Physical quantity sensor, inertial measurement device, and electronic apparatus

Abstract

The invention discloses a physical quantity sensor, an inertial measurement device and electronic equipment, which are used for improving the impact resistance of a rotating member rod of the physical quantity sensor. The physical quantity sensor comprises an element substrate, a movable body and a fixed body, wherein the movable body comprises a suspension piece; the torsional spring is connected with the suspension piece; the torsion spring is connected with the fixing body, the rotating piece is connected with the torsion spring and comprises a first interdigital electrode, the fixing body comprises a fixing piece rod, the fixing piece rod comprises a second interdigital electrode, the rotating piece comprises a longitudinal rotating piece rod extending in the Y-axis direction and a transverse rotating piece rod extending in the X-axis direction, and the longitudinal rotating piece rod is provided with a slit.

Description

Technical Field

[0001] The present invention relates to a physical quantity sensor, an inertial measurement device including the physical quantity sensor, and an electronic device including the inertial measurement device. Background Art

[0002] As a physical quantity sensor using MEMS (Micro Electro Mechanical Systems) technology, for example, a physical quantity sensor described in Patent Document 1 is known.

[0003] Patent document 1 discloses a capacitive micro-electromechanical accelerometer comprising: a substrate defining a substrate plane extending in the horizontal and vertical directions; a first sensor for measuring acceleration in a vertical axis direction perpendicular to the substrate plane; and an accelerometer package having an internal package plane adjacent to the substrate plane above and / or below the substrate and parallel to the substrate plane.

[0004] In Patent Document 1, the first sensor includes a rotating member movable relative to a substrate, a rotating member hanger, and one or more fixed members fixed relative to the substrate. In addition, the rotating member includes a transverse rotating member rod, a first longitudinal rotating member rod mounted on the transverse rotating member rod, a second longitudinal rotating member rod mounted on the transverse rotating member rod, and one or more rotating member electrodes for measuring differential capacitance.

[0005] Patent Document 1: Japanese Patent Application Publication No. 2019-23613

[0006] However, in such a physical quantity sensor, since the transverse rotating member rod, the first longitudinal rotating member rod, and the second longitudinal rotating member rod are formed in an elongated shape, there is a technical problem in the impact resistance against a strong impact. Summary of the invention

[0007] The physical quantity sensor involved in one aspect of the present application includes: a supporting substrate, including a first fixed portion and a second fixed portion; a cover body, opposite to the supporting substrate; and an element substrate, arranged between the supporting substrate and the cover body, the element substrate includes: a fixed body, joined to the supporting substrate; and a movable body, joined to the supporting substrate and capable of displacement relative to the fixed body, the movable body includes: a suspension member, joined to the first fixed portion; a supporting spring, connected to the suspension member; and a rotating member, connected to the supporting spring and including a first comb-tooth electrode, the fixed body includes a supporting portion, the supporting portion is joined to the second fixed portion, the supporting portion includes a second comb-tooth electrode opposite to the first comb-tooth electrode, the rotating member includes: a first connecting portion, extending in a first direction; and a second connecting portion, extending in a second direction intersecting the first direction, the first connecting portion is provided with a first slit.

[0008] An inertial measurement device according to one aspect of the present application includes the above-described physical quantity sensor.

[0009] An electronic device according to one aspect of the present application includes the above-described inertial measurement device. BRIEF DESCRIPTION OF THE DRAWINGS

[0010] Figure 1 It is a top view of the physical quantity sensor according to Embodiment 1.

[0011] Figure 2 is along Figure 1 Cross-sectional view along line II-II.

[0012] Figure 3 is along Figure 1 Cross-sectional view along line III-III.

[0013] Figure 4 yes Figure 1 A partial enlarged top view of region IV.

[0014] Figure 5 yes Figure 1 A partial enlarged top view of region V.

[0015] Fig. 6A It is a partially enlarged plan view of a physical quantity sensor according to a comparative example.

[0016] Figure 6B It is a partially enlarged plan view of a physical quantity sensor according to a comparative example.

[0017] Fig. 7A This is a partially enlarged plan view of the physical quantity sensor according to Modification 1.

[0018] Figure 7B It is a partially enlarged top view of the physical quantity sensor according to Modification 2.

[0019] Figure 7C This is a partially enlarged top view of the physical quantity sensor according to Modification 3.

[0020] Fig.7D It is a partially enlarged top view of the physical quantity sensor according to Modification 4.

[0021] Figure 8 This is an exploded perspective view showing a schematic structure of an inertial measurement device according to a second embodiment.

[0022] Fig. 9 It is a perspective view showing a circuit board on which the physical quantity sensor is mounted.

[0023] Fig.10This is a perspective view showing an electronic device according to a third embodiment.

[0024] Fig.11 This is a perspective view showing an electronic device according to a third embodiment. DETAILED DESCRIPTION

[0025] Hereinafter, embodiments of the present invention will be described with reference to the drawings.

[0026] It should be noted that in the following drawings, different components are sometimes shown with different dimensional scales in order to facilitate viewing of the components.

[0027] In addition, for the sake of convenience, the three axes of the X-axis, Y-axis, and Z-axis, which are orthogonal to each other, are shown in the figure below, and the tip side of the arrow in the axis direction is referred to as the "positive direction side", and the base end side is referred to as the "negative direction side". In addition, in the following, the direction parallel to the X-axis is referred to as the "X-axis direction", the direction parallel to the Y-axis is referred to as the "Y-axis direction", and the direction parallel to the Z-axis is referred to as the "Z-axis direction". In addition, in the following, observation along the Z-axis direction is referred to as "planar perspective top view observation", and observation of a section including the Z-axis from the X-axis direction is referred to as "section perspective cross-sectional observation".

[0028] In addition, in the following description, for example, with respect to a substrate, the description of "on a substrate" means any one of the following cases: a case where the substrate is arranged in contact with the substrate, a case where the substrate is arranged with other structures interposed therebetween, or a case where a part of the substrate is arranged in contact with the substrate and a part of the substrate is arranged with other structures interposed therebetween. In addition, the description of the upper surface of a structure means the surface of the structure on the positive side in the Z-axis direction, for example, "the upper surface of the substrate" means the surface of the substrate on the positive side in the Z-axis direction. In addition, the description of the lower surface of a structure means the surface of the structure on the negative side in the Z-axis direction, for example, "the lower surface of the substrate" means the surface of the substrate on the negative side in the Z-axis direction.

[0029] 1. Implementation Method 1

[0030] Reference Figures 1 to 5 , a schematic structure of the physical quantity sensor 100 according to Embodiment 1 is described.

[0031] Figure 1 1 is a plan view showing the physical quantity sensor 100 according to the first embodiment. Figure 2 yes Figure 1 Cross-sectional view at line II-II in FIG. Figure 3 yes Figure 1 Cross-sectional view at line III-III in FIG. Figure 4 yes Figure 1 A partial enlarged top view of region IV. Figure 5 yes Figure 1It should be noted that in Figure 1 In the figure, for the convenience of explanation, the cover 2 is made transparent.

[0032] The physical quantity sensor 100 is a MEMS device, and includes a support substrate 1, a cover 2, and an element substrate 3. The element substrate 3 has three sensor elements 101, 102, and 103. The physical quantity sensor can also be called an inertial sensor.

[0033] 1.1.Support substrate

[0034] like Figures 1 to 3 As shown, the support substrate 1 has a cavity 1c formed of a recessed portion on the upper surface, and has anchors 11 and 12 and projections 14a, 14b, 15a, 15b, 16a, and 16b protruding toward the positive side in the Z-axis direction in the cavity 1c.

[0035] The movable body 4 of the sensor element 101 described later is bonded to the anchor 11, and the fixed body 8 of the sensor element 101 described later is bonded to the anchor 12. The bonding method is not particularly limited and can be appropriately selected from adhesive bonding, anodic bonding, room temperature bonding, direct bonding, silicone bonding, and the like.

[0036] It should be noted that, in the present embodiment, the anchor 11 is an example of a first fixing portion, and the anchor 12 is an example of a second fixing portion.

[0037] The projections 14a, 14b, 15a, 15b, 16a, and 16b are provided at positions overlapping with the rotating member 40 of the movable body 4 described later in a plan view. More specifically, the projections 14a, 14b, 15a, 15b, 16a, and 16b are provided at positions overlapping with the slits 61, 62, 63, 64, 65, and 66 provided in the rotating member 40 in a plan view.

[0038] The projections 14a, 14b, 15a, 15b, 16a, 16b function as stoppers that come into contact with the rotating member 40 at the very beginning when the rotating member 40 is displaced by a strong impact or the like, so as to suppress further excessive displacement.

[0039] In this embodiment, the support substrate 1 is made of a silicon substrate. The support substrate 1 having the cavity 1c etc. is formed by patterning the silicon substrate. It should be noted that the support substrate 1 may also be a glass substrate, a ceramic substrate, an SOI (Silicon on Insulator) substrate or the like.

[0040] 1.2. Cover

[0041] The cover body 2 has a cavity 2c formed of a recessed portion on the lower surface, and wirings 31a, 31b, 32a, 32b, 33a, and 33b are provided in the cavity 2c.

[0042] In this embodiment, the cover 2 is made of a silicon substrate. The silicon substrate is patterned to form the cover 2 having the cavity 2c. It should be noted that the cover 2 may also be made of a glass substrate or the like.

[0043] The wirings 31a, 31b, 32a, 32b, 33a, and 33b are electrically connected to external wirings 35 provided on the upper surface of the cover body 2 via through holes 2h provided in the cover body 2. The external wirings 35 have electrode pads 36.

[0044] like Figure 1 As shown, the wirings 31a, 31b, 32a, 32b, 33a, 33b have portions provided at positions overlapping with the rotating member 40 of the movable body 4 described later in a plan view. More specifically, the wirings 31a, 31b, 32a, 32b, 33a, 33b have portions provided at positions overlapping with the slits 61, 62, 63, 64, 65, 66 provided in the rotating member 40, the first structures 711, 721, 731, 741, the second structures 712, 722, 732, 742, and the structures 75, 76 in a plan view.

[0045] like Figure 2 As shown, the through hole 2h is provided at a position overlapping with the slit 64. It should be noted that the through hole 2h may also be provided at a position not overlapping with the slit 64. Although not shown, the through hole 2h is also configured to connect other wirings 31a and the like and external wirings 35 corresponding to other wirings 31a.

[0046] 1.3. Component substrate

[0047] like Figure 2 and Figure 3 As shown in FIG. 1 , the element substrate 3 is disposed between the support substrate 1 and the cover 2. Figure 1 As shown, the element substrate 3 has sensor elements 101 , 102 , and 103 .

[0048] The element substrate 3 is, for example, a silicon substrate doped with impurities such as phosphorus (P) and boron (B). The element substrate 3 having the sensor elements 101, 102, and 103 is formed by patterning the silicon substrate.

[0049] The sensor element 101 is an acceleration sensor that detects acceleration in the Z-axis direction. The sensor element 102 is an acceleration sensor that detects acceleration in the X-axis direction. The sensor element 103 is an acceleration sensor that detects acceleration in the Y-axis direction. Therefore, the physical quantity sensor 100 is a three-axis acceleration sensor that measures acceleration in three-axis directions. It should be noted that the physical quantity sensor 100 may also be a uniaxial acceleration sensor having only the sensor element 101, or a biaxial acceleration sensor having the sensor element 101 and either the sensor element 102 or the sensor element 103.

[0050] like Figure 2 and Figure 3 As shown, the sensor elements 101 and 103 are provided in a housing space S formed by the cavity 1c and the cavity 2c. The same is true for the sensor element 102. The housing space S is preferably filled with an inert gas such as nitrogen, helium, or argon, and is substantially at atmospheric pressure at the operating temperature.

[0051] like Figure 1 As shown, the sensor element 101 has a movable body 4 and a fixed body 8. The movable body 4 is provided to be displaceable relative to the fixed body 8 to detect acceleration in the Z-axis direction. In other words, the relative position of the movable body 4 to the fixed body 8 changes according to the applied acceleration.

[0052] 1.3.1. Movable body

[0053] The movable body 4 includes a rotating member 40 , a suspension member 50 , a first torsion spring 58 , and a second torsion spring 59 .

[0054] The rotating member 40 is suspended from the suspension member 50 by means of the first torsion spring 58 and the second torsion spring 59. It should be noted that the suspension member 50 may also be referred to as a suspension part or a hanger. In the present embodiment, the first torsion spring 58 and the second torsion spring 59 are examples of support springs.

[0055] The suspension member 50 is joined to the anchor 11 of the support substrate 1 at the anchor point 56 and is fixed to the support substrate 1 .

[0056] The first torsion spring 58 and the second torsion spring 59 are provided on the rotation axis of the rotor 40 , and function as the rotation axis of the rotor 40 .

[0057] Therefore, the rotating member 40 is rotatably suspended from the suspension member 50 by means of the first torsion spring 58 and the second torsion spring 59. Because of such movement, the rotating member 40 can also be called a rocking plate.

[0058] 1.3.1.1. Rotating parts

[0059] The rotating member 40 has a first longitudinal rotating member rod 42 and a second longitudinal rotating member rod 43 extending in the Y-axis direction, a transverse rotating member rod 41 extending in the X-axis direction, and a plurality of interdigital electrodes 44 provided on the transverse rotating member rod 41 for measuring differential capacitance.

[0060] The plurality of interdigital electrodes 44 are provided in a comb-teeth shape. Some of the plurality of interdigital electrodes 44 have a concave portion 44 c.

[0061] In this embodiment, the first longitudinal rotation member rod 42 and the second longitudinal rotation member rod 43 are examples of the first connection part, the transverse rotation member rod 41 is an example of the second connection part, and the interdigital electrode 44 is an example of the first comb-tooth electrode.

[0062] The first longitudinal rotating member rod 42 has a slit 61 , a first structure 711 , and a second structure 712 .

[0063] The second longitudinal rotation member rod 43 has a slit 62 , a first structure 721 , and a second structure 722 .

[0064] In the present embodiment, the slits 61 and 62 are examples of first slits.

[0065] like Figure 4 As shown, the slit 62 is a through slot extending in the Y-axis direction and penetrating through the second longitudinal rotating member rod 43 in the Z-axis direction.

[0066] In addition, the first structure body 721 and the second structure body 722 are provided in parallel with the slit 62 and extend in the Y-axis direction.

[0067] It should be noted that the slit 61 , the first structure 711 , and the second structure 712 have the same configuration as the slit 62 , the first structure 721 , and the second structure 722 except that they are opposite to each other, and therefore detailed description thereof will be omitted.

[0068] In this embodiment, the second longitudinal rotation member rod 43 has two slits 62a and 62b disposed adjacent to each other in the X-axis direction. It should be noted that the number of the slits 62 may also be one or more than three.

[0069] The first structure body 721 and the second structure body 722 are provided in parallel with the slit 62 and extend in the Y-axis direction.

[0070] The first structure 721 has an extension portion 721b extending in parallel with the slit 62a in the Y-axis direction. One end 721a of the extension portion 721b is connected obliquely to the second longitudinal rotation member rod 43. The other end 721c is open and is a free end.

[0071] Therefore, a through groove 721d having one end opened is provided between the first structure 721 and the second longitudinal rotation member rod 43.

[0072] The second structure 722 has an extension portion 722b extending in parallel with the slit 62b in the Y-axis direction. One end 722a of the extension portion 722b is connected obliquely to the second longitudinal rotation member rod 43. In addition, the other end 722c is open and is a free end.

[0073] Therefore, a through groove 722d having one end opened is provided between the second structure 722 and the second longitudinal rotation member rod 43.

[0074] The first structure 721 and the second structure 722 each function as a buffer member that contacts surrounding structures before the second longitudinal rotation member rod 43 when the second longitudinal rotation member rod 43 moves due to a strong impact or the like, and mitigates the impact of the contact.

[0075] Thus, by providing the first structure 721 and the second structure 722 in parallel with the slit 62, the portion of the second longitudinal rotating member rod 43 that is narrowed by the formation of the slit 62, that is, the patterns 43a and 43b, can be protected from strong impacts and the like.

[0076] The patterns 43a and 43b are portions remaining in the second longitudinal rotating member rod 43 due to the formation of the slit 62, and therefore can be referred to as remaining patterns.

[0077] The width E1 of the through groove 721d and the width F1 of the through groove 722d are set to the same length. Specifically, as will be described later in the comparative study item comparing the case where the first structure 721 and the second structure 722 are provided with the case where the first structure 721 and the second structure 722 are not provided with the first structure 721 and the second structure 722, in the case where the width A1> the width B1 or the width A1< the width B1, by making the width E1=the width F1, in the etching process of forming the second longitudinal rotating member rod 43 having the slit 62, the width C1=the width D1 can be easily achieved.

[0078] Here, the width A1 is the length between the second longitudinal rotation member rod 43 and the second longitudinal hanger rod 54 of the floor suspension member 50 described later. The width B1 is the length between the second longitudinal rotation member rod 43 and the element substrate 3. The width C1 is the length of the pattern 43a of the second longitudinal rotation member rod 43 between the slit 62a and the through groove 721d. The width D1 is the length of the pattern 43b of the second longitudinal rotation member rod 43 between the slit 62b and the through groove 722d. The width E1 is the width of the through groove 721d, in other words, the interval between the first structure 721 and the second longitudinal rotation member rod 43. The width F1 is the width of the through groove 722d, in other words, the interval between the second structure 722 and the second longitudinal rotation member rod 43.

[0079] When the width C1 ≠ the width D1 , the sensitivity of the axes other than the Z axis increases, and the accuracy of the sensor element 101 decreases.

[0080] However, in the present embodiment, by making the width E1 = the width F1 , the width C1 = the width D1 can be easily achieved, and therefore, the sensor element 101 with excellent accuracy can be easily achieved.

[0081] In this embodiment, one end 721a of the first structure 721 is connected to the second longitudinal rotation member rod 43, and the other end 721c is open and is a free end, but the opposite structure may be adopted. That is, the end 721c may be connected to the second longitudinal rotation member rod 43, and the end 721a may be open. The second structure 722 may also be constructed in the same manner.

[0082] A higher buffering effect can be expected on the open end side of the first structure 721 . Therefore, by making the open end of the first structure 721 the side of the interdigital electrode 44 which is more active, the buffering effect of the first structure 721 can be more easily enjoyed.

[0083] The slit 62 , the first structure 721 , and the second structure 722 are provided at positions overlapping with the protrusion 14 b in a plan view.

[0084] The portion of the second longitudinal rotating member rod 43 provided with the slit 62 has improved flexibility compared to other portions. Therefore, even if the second longitudinal rotating member rod 43 collides with the protrusion 14b due to a strong impact or the like, the portion provided with the slit 62 is used as the portion that collides with the protrusion 14b, so that the second longitudinal rotating member rod 43 can be less likely to have cracks or fissures than when the other portions collide.

[0085] Furthermore, since the impact at the time of collision can be mitigated by the first structure 721 and the second structure 722, high impact resistance can be achieved.

[0086] The slit 62 , the first structure 721 , and the second structure 722 are provided at positions overlapping with the wiring 31 b in a plan view.

[0087] Therefore, the area facing the wiring 31b can be kept small, so the parasitic capacitance between the wiring 31b can be suppressed. Therefore, the influence on the sensor performance such as sensitivity can be suppressed.

[0088] It should be noted that, in the present embodiment, the slit 62, the first structure 721, and the second structure 722 are arranged at positions overlapping both the protrusion 14b and the wiring 31b in a plan view, but may also be arranged at positions overlapping at least one of the protrusion 14b and the wiring 31b. In other words, the slit 62, the first structure 721, and the second structure 722 may not overlap one of the protrusion 14b and the wiring 31b in a plan view.

[0089] like Figure 1 As shown, the first longitudinal rotating member rod 42 has brake plates 481 and 482. The brake plate 481 is provided on the positive side of the first torsion spring 58 in the Y-axis direction in the first longitudinal rotating member rod 42, and the brake plate 482 is provided on the negative side of the first torsion spring 58 in the Y-axis direction in the first longitudinal rotating member rod 42.

[0090] The second longitudinal rotation member rod 43 has brake plates 491 and 492. The brake plate 491 is provided on the positive side of the second torsion spring 59 in the Y-axis direction in the second longitudinal rotation member rod 43, and the brake plate 492 is provided on the negative side of the second torsion spring 59 in the Y-axis direction in the second longitudinal rotation member rod 43.

[0091] The brake plates 481 , 482 , 491 , and 492 have the function of damping the movement of the rotating member 40 .

[0092] 1.3.1.2. Suspension parts

[0093] The hanger 50 has a first transverse hanger bar 51 and a second transverse hanger bar 52 extending in the X-axis direction, and a first longitudinal hanger bar 53 and a second longitudinal hanger bar 54 extending in the Y-axis direction.

[0094] In the present embodiment, the first lateral spreader bar 51 and the second lateral spreader bar 52 are examples of the third connection portion, and the first longitudinal spreader bar 53 and the second longitudinal spreader bar 54 are examples of the fourth connection portion.

[0095] One ends of the first lateral spreader rod 51 and the second lateral spreader rod 52 are joined to the anchor 11 at the anchor point 56 and fixed to the support base plate 1 .

[0096] The other end of the first transverse hanger rod 51 is connected to one end of the first longitudinal hanger rod 53. The other end of the first longitudinal hanger rod 53 is connected to the first torsion spring 58.

[0097] The other end of the second transverse hanger rod 52 is connected to one end of the second longitudinal hanger rod 54. The other end of the second longitudinal hanger rod 54 is connected to a second torsion spring 59.

[0098] The first lateral hanger bar 51 includes a slit 63, a first structure 731, and a second structure 732. In the present embodiment, the slit 63 is an example of a second slit.

[0099] The slit 63 is a through groove extending in the X-axis direction and penetrating the first lateral hanger rod 51 in the Z-axis direction.

[0100] The first structure body 731 and the second structure body 732 are provided in parallel with the slit 63 and extend in the X-axis direction.

[0101] One end of the first structure 731 and the second structure 732 on the anchor point 56 side is connected obliquely to the first transverse hanger rod 51, and the other end on the first torsion spring 58 side is open and is a free end. In the first structure 731 and the second structure 732, a higher buffering effect can be expected on the open end (free end) side, so by making the other end on the first torsion spring 58 side, which has greater mobility, an open end (free end), it is possible to achieve a structure that makes it easier to enjoy the buffering effect of the first structure 731 and the second structure 732.

[0102] It should be noted that the first structure 731 and the second structure 732 may also have one end on the anchor point 56 side open, and the other end on the first torsion spring 58 side connected to the first transverse hanger rod 51 .

[0103] The second lateral hanger bar 52 includes a slit 64, a first structure 741, and a second structure 742. In the present embodiment, the slit 64 is an example of a second slit.

[0104] The slit 64 is a through groove extending in the X-axis direction and penetrating the second lateral hanger rod 52 in the Z-axis direction.

[0105] The first structure 741 and the second structure 742 are arranged parallel to the slit 64 and extend in the X-axis direction. One end of the first structure 741 and the second structure 742 on the anchor point 56 side is obliquely connected to the second lateral hanger rod 52, and the other end on the second torsion spring 59 side is open.

[0106] The first structures 731 and 741 and the second structures 732 and 742 function as buffer members similarly to the first structure 721 and the second structure 722 described above.

[0107] In addition, the relationship between the width of the through groove between the first structure 731 and the first lateral hanger rod 51 and the width of the through groove between the second structure 732 and the first lateral hanger rod 51 is also the same as the first structure 721 and the second structure 722 described above, and they are the same width.

[0108] Similarly, the relationship between the width of the through groove between the first structure 741 and the second lateral hanger rod 52 and the width of the through groove between the second structure 742 and the second lateral hanger rod 52 is also the same as the first structure 721 and the second structure 722 described above, and they are the same width.

[0109] The slit 63 , the first structure 731 , and the second structure 732 are provided at positions overlapping with the protrusion 15 a in a plan view.

[0110] In addition, the slit 63 , the first structure 731 , and the second structure 732 are provided at positions overlapping with the wiring 32 a in a plan view.

[0111] It should be noted that the slit 63, the first structure 731, and the second structure 732 are arranged at positions overlapping both the protrusion 15a and the wiring 32a in a plan view, but may also be arranged at positions overlapping at least one of the protrusion 15a and the wiring 32a. That is, the slit 63, the first structure 731, and the second structure 732 may not overlap one of the protrusion 15a and the wiring 32a in a plan view.

[0112] The slit 64 , the first structure 741 , and the second structure 742 are provided at positions overlapping with the protrusion 15 b in a plan view.

[0113] In addition, the slit 64 , the first structure 741 , and the second structure 742 are provided at positions overlapping with the wiring 32 b in a plan view.

[0114] It should be noted that the slit 64, the first structure 741, and the second structure 742 are arranged at positions overlapping both the protrusion 15b and the wiring 32b in a plan view, but may also be arranged at positions overlapping at least one of the protrusion 15b and the wiring 32b. That is, the slit 64, the first structure 741, and the second structure 742 may not overlap one of the protrusion 15a and the wiring 32a in a plan view.

[0115] The first longitudinal spreader bar 53 has a slit 65 and a structure 75 .

[0116] The second longitudinal spreader bar 54 has a slot 66 and a structure 76 .

[0117] In the present embodiment, the slit 65 and the slit 66 are examples of third slits.

[0118] like Figure 5 As shown, the slit 66 is a through slot extending in the Y-axis direction and penetrating the second longitudinal hanger rod 54 in the Z-axis direction.

[0119] In addition, the structure 76 is provided in parallel with the slit 66 and extends in the Y-axis direction.

[0120] Thus, the number of structures provided in parallel with the slit 66 may be only one. It should be noted that the slit 65 and the structure 75 have the same configuration as the slit 66 and the structure 76 except that they are opposite to each other, and therefore detailed description thereof will be omitted.

[0121] In the present embodiment, the second longitudinal hanger rod 54 has two slits 66a and 66b disposed adjacent to each other in the X-axis direction. It should be noted that the number of the slits 66 may be one or three or more.

[0122] The structure 76 is provided in parallel with the slit 66 a and extends in the Y-axis direction.

[0123] The structure 76 has an extending portion 76 b that is parallel to the slit 66 a and extends in the Y-axis direction.

[0124] One end 76a of the extension portion 76b is connected obliquely to the second longitudinal spreader rod 54. In addition, the other end 76c is open.

[0125] Therefore, a through groove 76 d having one end open is provided between the structure 76 and the second longitudinal hanger rod 54 .

[0126] The structure 76 has a function as a buffer member similar to the first structure 721 and the second structure 722 described above.

[0127] The width E2 of the through groove 76d is set to be the same length as the length between the second longitudinal hanger bar 54 and the brake plate 491, that is, the width B2. The details will be described in the comparative study item described later. In the case of width A2>width B2, by making width E2=width B2, in the etching process of forming the second longitudinal hanger bar 54 having the slit 66, it is easy to achieve width C2=width D2.

[0128] Here, the width A2 is the length between the second longitudinal hanger bar 54 and the sensor element 103. The width C2 is the length of the pattern 54a of the second longitudinal hanger bar 54 between the slit 66a and the through groove 76d. The width D2 is the length of the pattern 54b of the second longitudinal hanger bar 54 on the positive direction side of the slit 66b in the X-axis direction.

[0129] When the width C2 ≠ the width D2 , the sensitivity of the axes other than the Z axis increases, and the accuracy of the sensor element 101 decreases.

[0130] However, in the present embodiment, by making the width E2 = the width B2 , the width C2 = the width D2 can be easily achieved, and therefore, the sensor element 101 with excellent accuracy can be easily achieved.

[0131] The slit 66 and the structure 76 are provided at positions overlapping with the protrusion 16 b in a plan view.

[0132] The portion provided with the slit 66 in the second longitudinal spreader bar 54 has improved flexibility compared to other portions. Therefore, even if the second longitudinal spreader bar 54 collides with the protrusion 16b due to a strong impact or the like, since the portion provided with the slit 66 collides with the protrusion 16b, it is possible to suppress the generation of cracks or fissures in the second longitudinal spreader bar 54 compared to the case where other portions collide.

[0133] Furthermore, since the impact at the time of collision can be mitigated by the structure 76, high impact resistance can be achieved.

[0134] The slit 66 and the structure 76 are provided at positions overlapping with the wiring 33 b in a plan view.

[0135] Therefore, the area facing the wiring 33b can be kept small, so the parasitic capacitance between the wiring 33b can be suppressed. Therefore, the influence on the sensor performance such as sensitivity can be suppressed.

[0136] It should be noted that, in the present embodiment, the slit 66 and the structure 76 are arranged at a position overlapping both the protrusion 16b and the wiring 33b in a plan view, but may also be arranged at a position overlapping at least one of the protrusion 16b and the wiring 33b. In other words, the slit 66 and the structure 76 may not overlap one of the protrusion 16b and the wiring 33b in a plan view.

[0137] 1.3.2. Fixed body

[0138] like Figure 1 As shown, the fixed body 8 has a first fixing rod 81, a second fixing rod 82, and a plurality of interdigital electrodes 84 provided on the first fixing rod 81 and the second fixing rod 82 and used for measuring differential capacitance.

[0139] The plurality of interdigital electrodes 84 are provided in a comb-teeth shape. The interdigital electrodes 84 are disposed between two adjacent interdigital electrodes 44 so as to face the interdigital electrodes 44. The interdigital electrodes 84 provided on the second stator rod 82 have a recessed portion 84c.

[0140] In the present embodiment, the first fixture rod 81 and the second fixture rod 82 are examples of a support portion. The interdigital electrode 84 is an example of a second comb-teeth electrode.

[0141] When the sensor element 101 is accelerated in the Z-axis direction, the rotor 40 rotates about the first torsion spring 58 and the second torsion spring 59. This movement is detected by differential capacitance measurement between the interdigital electrodes 84 and the interdigital electrodes 44.

[0142] The first fixture rod 81 is engaged with the anchor 12 of the support substrate 1 at the anchor point 86 and is fixed to the support substrate 1 .

[0143] The second fixing member rod 82 is connected to the anchor 12 of the support substrate 1 at the anchor point 87 and is fixed to the support substrate 1 .

[0144] 1.3.3. Comparative study

[0145] Next, the reason why the width C1 = the width D1 can be easily achieved by setting the width E1 = the width F1 will be described.

[0146] In this embodiment, in order to realize width E1 = width F1, the first structure body 721 and the second structure body 722 are provided. Therefore, the case where the first structure body 721 and the second structure body 722 are not provided will be described below as a comparative example.

[0147] Fig. 6A and Figure 6B is a partially enlarged top view of a physical quantity sensor according to a comparative example, Figure 4 The following are the corresponding drawings. Fig. 6A Shows the designed or ideal structure, Figure 6B Shows actual or realistic structure.

[0148] like Fig. 6A As shown, when the second longitudinal rotating member rod 43 having the slits 62a and 62b is formed on the element substrate 3 by etching, the width C3 of the pattern 43a and the width D3 of the pattern 43b are designed to be width C3 = width D3. This is because by making the width C3 = width D3, the sensitivity of the axes other than the Z axis can be reduced, so the accuracy of the sensor element 101 is improved.

[0149] However, in the case where width A3>width B3, in reality, Figure 6B As shown, due to the micro-loading effect, the etching rate of the portion with width A3 is faster than the etching rate of the portion with width B3, and the width of the pattern 43a becomes width C4 which is shorter than width C3.

[0150] Here, the width A3 and the width A4 are the lengths between the second longitudinal rotation member rod 43 and the second longitudinal hanger rod 54. The width B3 is the length between the second longitudinal rotation member rod 43 and the element substrate 3. The width C3 and the width C4 are the lengths of the pattern 43a of the second longitudinal rotation member rod 43. The width D3 is the length of the pattern 43b of the second longitudinal rotation member rod 43.

[0151] In contrast, in this embodiment, if Figure 4 As shown, the first structure 721 and the second structure 722 are provided in parallel with the slit 62, and the relationship between the width E1 of the through groove 721d and the width F1 of the through groove 722d is made to be width E1 = width F1.

[0152] Therefore, when etching the element substrate 3 to form the second longitudinal rotating member rod 43 having the slit 62, the first structure 721 and the second structure 722, the etching rate difference due to the micro-loading effect is suppressed, and the width C1 = the width D1 can be easily achieved.

[0153] Therefore, it is possible to realize a sensor element 101 having excellent accuracy and in which sensitivity in axes other than the Z axis is suppressed.

[0154] Likewise, in this embodiment, if Figure 5 As shown, the structure 76 is provided in parallel with the slit 66 so that the relationship between the width E2 of the through groove 76d adjacent to the slit 66 and the length between the second longitudinal hanger rod 54 and the brake plate 491, that is, the width B2, is width E2 = width B2.

[0155] Therefore, when etching the element substrate 3 to form the second vertical hanger bar 54 having the slit 66 , the structure 76 , and the brake plate 491 , the etching rate difference due to the micro-loading effect is suppressed, and the width C2 = the width D2 can be easily achieved.

[0156] Therefore, it is possible to realize a sensor element 101 having excellent accuracy and in which sensitivity in axes other than the Z axis is suppressed.

[0157] In this way, even if the structure has only one structure body 76, it is possible to achieve a structure capable of suppressing the difference in etching rate due to the micro-loading effect.

[0158] 1.3.4. Variations

[0159] The above-mentioned first structure 721 and second structure 722 can be modified in various ways. The following is an example of specific deformation forms of the first structure 721 and second structure 722. It should be noted that the same can also be applied to the first structure 711, 731, 741, the second structure 712, 732, 742 and the structure 75, 76.

[0160] 1.3.4.1. Modification 1

[0161] Fig. 7A is a partially enlarged top view of the physical quantity sensor 100 according to the first modification, and is similar to Figure 4 Corresponding attached drawings.

[0162] In the first modification, the extension 721b of the first structure 721 has a portion bent at a right angle, and is vertically connected to the second longitudinal rotation member rod 43 at the end 721a. The end 721c is open. The second structure 722 is also constructed similarly to the first structure 721.

[0163] The second longitudinal turning member rod 43 has three slits 62 .

[0164] The width of the through groove 721d between the first structure 721 and the second longitudinal rotation member rod 43 provided in parallel with the slit 62 is set to be the same as the width of the through groove 722d between the second structure 722 and the second longitudinal rotation member rod 43. Thus, the width of the pattern 43a and the width of the pattern 43b in the portion where the slit 62 is provided are formed to be the same.

[0165] 1.3.4.2. Modification 2

[0166] Figure 7B is a partially enlarged top view of a physical quantity sensor 100 according to Modification 2. Figure 4 Corresponding attached drawings.

[0167] In the second modification, the central part of the extension part 721b of the first structure 721 is connected to the second longitudinal rotation member rod 43, and the end 721a and the end 721c are open. The end 721a and the end 721c are both open ends, so that the structure with excellent buffering effect can be achieved. The second structure 722 is also configured in the same manner as the first structure 721.

[0168] The second longitudinal rotation member rod 43 has a slit 62 .

[0169] The width of the through groove 721d between the first structure 721 and the second longitudinal rotation member rod 43 provided in parallel with the slit 62 is set to be the same as the width of the through groove 722d between the second structure 722 and the second longitudinal rotation member rod 43. Thus, the width of the pattern 43a and the width of the pattern 43b in the portion where the slit 62 is provided are formed to be the same.

[0170] 1.3.4.3. Modification 3

[0171] Figure 7C is a partially enlarged top view of a physical quantity sensor 100 according to Modification 3, and is similar to Figure 4 Corresponding attached drawings.

[0172] In the modification 3, the first structure 721 has two extensions 721b. The two extensions 721b are connected obliquely to the second longitudinal rotation member rod 43 at the end 721a, and the end 721c of each of the two extensions 721b is open and is a free end. Since there are two extensions 721b, it can be a structure with excellent buffering effect. It should be noted that the number of extensions 721b can also be 3 or more. The second structure 722 is also constructed in the same way as the first structure 721.

[0173] The width of the through groove 721d between the first structure 721 and the second longitudinal rotation member rod 43 provided in parallel with the slit 62 is set to be the same as the width of the through groove 722d between the second structure 722 and the second longitudinal rotation member rod 43. Thus, the width of the pattern 43a and the width of the pattern 43b in the portion where the slit 62 is provided are formed to be the same.

[0174] 1.3.4.4. Modification 4

[0175] Fig.7D is a partially enlarged top view of a physical quantity sensor 100 according to Modification 4, and is similar to Figure 4 Corresponding attached drawings.

[0176] In the modification 4, the first structure 721 is provided within the width of the second longitudinal rotation member rod 43. In other words, the first structure 721 does not have a portion extending from the second longitudinal rotation member rod 43. The second structure 722 is also configured similarly to the first structure 721.

[0177] The width of the through groove 721d between the first structure 721 and the second longitudinal rotation member rod 43 provided in parallel with the slit 62 is set to be the same as the width of the through groove 722d between the second structure 722 and the second longitudinal rotation member rod 43. Thus, the width of the pattern 43a and the width of the pattern 43b in the portion where the slit 62 is provided are formed to be the same.

[0178] As described above, according to the physical quantity sensor 100 of the present embodiment, the following effects can be obtained.

[0179] The physical quantity sensor 100 of this embodiment comprises: a support substrate 1 having an anchor 11 as a first fixing portion and an anchor 12 as a second fixing portion; a cover body 2, which is opposite to the support substrate 1; and an element substrate 3, which is arranged between the support substrate 1 and the cover body 2, and the element substrate 3 has: a fixing body 8, which is joined to the support substrate 1; and a movable body 4, which is joined to the support substrate 1 and can be displaced relative to the fixing body 8, and the movable body 4 has: a suspension member 50, which is joined to the anchor 11; a second torsion spring 59, which is a support spring, connected to the suspension member 50; and a rotating member 40, which is connected to the second torsion spring 59. The torsion spring 59 is connected and has a forked electrode 44 as a first comb-tooth electrode. The fixed body 8 has a second fixed member rod 82 as a supporting portion. The second fixed member rod 82 is engaged with the anchor 12 and has a forked electrode 84 as a second comb-tooth electrode opposite to the forked electrode 44. The rotating member 40 has: a second longitudinal rotating member rod 43 as a first connecting portion, extending in the Y-axis direction as a first direction; and a transverse rotating member rod 41 as a second connecting portion, extending in the X-axis direction as a second direction, and the second longitudinal rotating member rod 43 has a slit 62 as a first slit.

[0180] In this way, the second longitudinal rotation member rod 43 includes the slit 62. Therefore, the slit 62 improves the flexibility of the second longitudinal rotation member rod 43 and can improve the impact resistance against strong impact. Therefore, it is possible to realize a highly reliable physical quantity sensor 100.

[0181] In the physical quantity sensor 100 of the present embodiment, the rotor 40 has the first structure 721 which is parallel to the slit 62 and extends in the Y-axis direction.

[0182] The first structure 721 functions as a buffer member, and thus the impact resistance against a strong impact can be further improved.

[0183] In the physical quantity sensor 100 of this embodiment, one end 721a of the first structure 721 is connected to the second longitudinal rotating member rod 43, and the other end 721c is opened and is a free end.

[0184] In this way, since the first structure 721 has an open end (free end), it has an excellent buffering effect.

[0185] In the physical quantity sensor 100 of this embodiment, the rotor 40 has the second structure 722 which is parallel to the slit 62 and extends in the Y-axis direction. The first structure 721 and the second structure 722 are arranged on both sides of the second longitudinal rotor rod 43 with the slit 62 interposed therebetween.

[0186] In this way, the first structure 721 and the second structure 722 functioning as buffer members are arranged on both sides of the second longitudinal rotating member rod 43, so that the impact resistance against a strong impact can be further improved.

[0187] In the physical quantity sensor 100 of the present embodiment, the width E1 which is the interval between the first structure 721 and the second longitudinal rotation member rod 43 is equal to the width F1 which is the interval between the second structure 722 and the second longitudinal rotation member rod 43 .

[0188] Thus, by making width E1 = width F1, width C1 of pattern 43a and width D1 of pattern 43b of second longitudinal rotation member rod 43 can be made equal. Therefore, it is possible to realize highly accurate sensor element 101 with reduced sensitivity in axes other than the detection axis.

[0189] The physical quantity sensor 100 of the present embodiment includes a protrusion 14 b , which is provided on the supporting substrate 1 and overlaps with the slit 62 in a plan view.

[0190] Therefore, when the second longitudinal rotating member rod 43 moves greatly due to a strong impact, the second longitudinal rotating member rod 43 contacts the protrusion 14b at the portion provided with the slit 62. The portion provided with the slit 62 in the second longitudinal rotating member rod 43 is more flexible than other portions. Therefore, the impact resistance can be improved.

[0191] The physical quantity sensor 100 of the present embodiment includes the wiring 31 b , and the wiring 31 b is provided on the cover 2 and overlaps with the slit 62 in a plan view.

[0192] Therefore, the area where the second longitudinal rotating member rod 43 faces the wiring 31b can be suppressed to be small, so that the parasitic capacitance between the second longitudinal rotating member rod 43 and the wiring 31b can be suppressed. Therefore, the sensor element 101 having excellent sensor performance such as sensitivity can be realized.

[0193] In the physical quantity sensor 100 of this embodiment, the suspension member 50 includes: a second transverse hanger rod 52 as a third connecting part, which is connected to the anchor 11 and extends in the X-axis direction; and a second longitudinal hanger rod 54 as a fourth connecting part, which is connected to the second transverse hanger rod 52 and extends in the Y-axis direction, and the second transverse hanger rod 52 includes a slit 64 as a second slit.

[0194] Therefore, the flexibility of the second cross hanger bar 52 is increased by the slit 64, and the impact resistance against a strong impact can be improved. Therefore, a highly reliable physical quantity sensor 100 can be realized.

[0195] In the physical quantity sensor 100 of the present embodiment, the second vertical hanger bar 54 includes the slit 66 as the third slit.

[0196] Therefore, the flexibility of the second vertical hanger bar 54 is increased by the slit 66, and the impact resistance against a strong impact can be improved. Therefore, a highly reliable physical quantity sensor 100 can be realized.

[0197] 2. Implementation Method 2

[0198] 2.1. Overview of Inertial Measurement Unit

[0199] Next, refer to Figure 8 and Fig. 9 , an inertial measurement unit (IMU: Inertial Measurement Unit) 300 including the physical quantity sensor 100 described above will be described.

[0200] Figure 8 1 is an exploded perspective view showing a schematic structure of inertial measurement device 300 according to the present embodiment. Fig. 9 1 is a perspective view showing a circuit board 315 which is mounted on the inertial measurement device 300 and on which the physical quantity sensor 100 is mounted.

[0201] Inertial measurement device 300 is mounted on a mounted device such as an automobile, a robot, a smartphone, or a portable activity meter, and is used as a device for detecting the posture, movement, etc. of the mounted device.

[0202] like Figure 8 As shown, the structure of inertial measurement device 300 includes housing 301, joint member 310 and sensor module 325. Joint member 310 is sandwiched inside housing 301, and sensor module 325 is fitted or inserted.

[0203] The housing 301 is a box-shaped container with a rectangular shape and no cover, and its interior is an internal space surrounded by walls. The material of the housing 301 is, for example, aluminum. It should be noted that other metals such as zinc and stainless steel, resins, or composite materials of metal and resin can also be used.

[0204] Perforations 302 are formed near two vertices in the diagonal direction of the upper surface of the outer case 301. The perforations 302 are used when the inertial measurement device 300 is mounted on the mounted device.

[0205] The sensor module 325 is composed of an inner case 320 and a circuit substrate 315 .

[0206] The inner case 320 is a member that supports the circuit board 315, and has a shape that can be accommodated inside the outer case 301. The material of the inner case 320 can be the same as that of the outer case 301.

[0207] A recess 331 for preventing contact with the circuit board 315 and an opening 321 for exposing the connector 316 are formed on the lower surface of the inner case 320 .

[0208] Reference Fig. 9 , the structure of the circuit board 315 on which the physical quantity sensor 100 is mounted will be described.

[0209] The circuit substrate 315 is, for example, a multilayer substrate having a plurality of through holes, and a glass epoxy substrate may be used. It should be noted that the circuit substrate 315 is not limited to a glass epoxy substrate, and a rigid substrate such as a composite substrate or a ceramic substrate may also be used.

[0210] A connector 316 , the physical quantity sensor 100 , and angular velocity sensors 317 x , 317 y , and 317 z are mounted on the upper surface and side surfaces of the circuit board 315 .

[0211] The connector 316 is a plug-type connector having two rows of connection terminals arranged at equal intervals in the X-axis direction. In this embodiment, the connection terminals have 10 pins in one row and 20 pins in total in two rows, but the number of connection terminals can be appropriately changed according to design specifications.

[0212] The angular velocity sensor 317z is a gyro sensor that detects a single-axis angular velocity in the Z-axis direction. For example, a vibration gyro sensor that uses a crystal as a vibrator and detects an angular velocity from the Coriolis force applied to a vibrating object can be used. It should be noted that the present invention is not limited to a vibration gyro sensor, and a sensor that uses ceramics or silicon as a vibrator can also be used.

[0213] In addition, an angular velocity sensor 317x for detecting a uniaxial angular velocity in the X-axis direction is mounted on the side surface of the circuit substrate 315 in the X-axis direction so that the mounting surface is orthogonal to the X-axis. Similarly, an angular velocity sensor 317y for detecting a uniaxial angular velocity in the Y-axis direction is mounted on the side surface of the circuit substrate 315 in the Y-axis direction so that the mounting surface is orthogonal to the Y-axis. It should be noted that the angular velocity sensors 317x, 317y, and 317z may also be formed by a single package.

[0214] The physical quantity sensor 100 is a three-axis acceleration sensor for measuring acceleration in the X-axis direction, the Y-axis direction, and the Z-axis direction, but may be a single-axis or two-axis acceleration sensor as described above.

[0215] A control IC 319 serving as a control unit is mounted on the lower surface of the circuit board 315 .

[0216] The control IC 319 is an MCU (Micro Controller Unit) having a built-in storage unit including a non-volatile memory, a communication I / F (interface), an A / D converter (Digital Analog Converter), etc., to control each unit of the inertial measurement device 300. The storage unit stores a program for detecting acceleration and angular velocity with a prescribed order and content, a program for digitizing the detected data and compiling it into packet data, and accompanying data. It should be noted that in addition to this, a plurality of electronic components are also mounted on the circuit board 315.

[0217] As described above, since the above-described physical quantity sensor 100 is employed in the inertial measurement device 300 , it is possible to provide the inertial measurement device 300 which is excellent in shock resistance and has improved reliability.

[0218] As described above, according to inertial measurement device 300 including physical quantity sensor 100 according to the present embodiment, in addition to the effects of Embodiment 1, a highly reliable inertial measurement device can be provided.

[0219] 3. Implementation Method 3

[0220] In the third embodiment, an electronic device including the inertial measurement device 300 of the second embodiment will be described.

[0221] Hereinafter, as examples of electronic devices, examples of mobile objects such as automobiles and examples of portable devices such as smartphones will be described.

[0222] 3.1. Overview of mobile objects

[0223] Fig.10 11 is a perspective view of a moving object as the electronic device according to Embodiment 3, and is a view showing a structure of a car 1100 as an example of the moving object.

[0224] Automobile 1100 is equipped with inertial measurement device 300 including the above-described physical quantity sensor 100 .

[0225] The inertial measurement device 300 detects the posture of the vehicle body 1101 and outputs a detection signal. The detection signal includes an angular velocity signal and an acceleration signal. The detection signal of the inertial measurement device 300 is supplied to the vehicle body posture control device 1102 for controlling the posture of the vehicle body 1101.

[0226] The vehicle body posture control device 1102 detects the posture of the vehicle body 1101 according to the signal, and controls the hardness or softness of the suspension, or controls the braking of each wheel 1103 according to the detection result.

[0227] In addition, the detection signal of the inertial measurement device 300 can also be used in keyless entry, car anti-theft devices, car navigation devices, car air conditioners, anti-lock braking systems (ABS), airbags, TPMS (Tire Pressure Monitoring System), engine controllers, control devices for inertial navigation for autonomous driving, and ECUs (Electronic Control Units) such as battery monitors for hybrid vehicles and electric vehicles.

[0228] In addition, the inertial measurement device 300 may be mounted on other mobile bodies other than the automobile 1100. For example, the inertial measurement device 300 may be mounted on a mobile body such as a bipedal walking robot, a train, a radio-controlled airplane, a radio-controlled helicopter, an unmanned aerial vehicle, agricultural machinery, or a construction machine. Thus, the mobile body can use the detection signal of the inertial measurement device 300 for posture control, position measurement, and the like of the mobile body.

[0229] As described above, in the present embodiment, an inertial measurement device 300 including the physical quantity sensor 100 is mounted on a moving object such as the automobile 1100 .

[0230] Therefore, according to this embodiment, the reliability of automobile 1100 can be improved.

[0231] 3.2. Overview of portable devices

[0232] Fig.11 1 is a perspective view of a portable device as the electronic device according to Embodiment 3, and is a view showing a structure of a smartphone 1200 as an example of the portable device.

[0233] The smartphone 1200 is equipped with an inertial measurement device 300 including the physical quantity sensor 100 described above.

[0234] The detection signal detected by the inertial measurement device 300 is output to the control circuit 1201. The control circuit 1201 can identify the posture and movement of the smartphone 1200 from the received detection signal, and change the display image displayed by the display unit 1202, or emit a warning sound, effect sound, or drive the vibration motor to vibrate the main body.

[0235] In addition, the inertial measurement device 300 may be mounted on other portable devices other than the smartphone 1200. For example, the inertial measurement device 300 may be mounted on portable devices such as smart watches, portable activity measurement devices, HMDs (Head Mounted Displays), mobile PCs (Personal Computers), tablet PCs, cameras, and PDAs (Personal Digital Assistants). Thus, the portable device can recognize the posture and movement of the portable device based on the detection signal from the inertial measurement device 300, and change the displayed image, or emit a warning sound or effect sound, or drive a vibration motor to vibrate the main body, etc.

[0236] As described above, in the present embodiment, a portable device such as the smartphone 1200 is equipped with the inertial measurement device 300 including the physical quantity sensor 100 described above.

[0237] Therefore, according to the present embodiment, the reliability of the smartphone 1200 including the physical quantity sensor 100 can be improved.

[0238] As described above, automobile 1100 and smartphone 1200 as electronic devices according to the present embodiment include inertial measurement device 300 described above.

[0239] Therefore, the reliability of the automobile 1100 and the smartphone 1200 can be improved.

[0240] The preferred embodiments of the present invention have been described above, but the present invention is not limited to the above embodiments. In addition, the configuration of each part of the present invention can be replaced with any configuration that performs the same function as the above embodiments, and any configuration can be added.

Claims

1. A physical quantity sensor, characterized in that: include: A support substrate including a first fixing portion and a second fixing portion; a cover body, facing the supporting substrate; as well as an element substrate, disposed between the support substrate and the cover, The element substrate includes: a fixed body joined to the support substrate; and a movable body joined to the support substrate and capable of displacement relative to the fixed body. The movable body includes: a suspension member engaged with the first fixing portion; a support spring connected to the suspension member; and a rotating member connected to the support spring and including a first comb-tooth electrode, The fixed body comprises a supporting portion, The supporting portion is engaged with the second fixing portion, The support portion includes a second comb-tooth electrode facing the first comb-tooth electrode, The rotating member comprises: A first connecting portion extending in a first direction; and The second connecting portion extends in a second direction intersecting the first direction, The first connecting portion is provided with a first slit.

2. The physical quantity sensor according to claim 1, characterized in that: The rotating member includes a first structure, The first structure is parallel to the first slit, The first structure extends in the first direction.

3. The physical quantity sensor according to claim 2, characterized in that: One end of the first structure is connected to the first connecting portion, The other end of the first structure is a free end.

4. The physical quantity sensor according to claim 3, characterized in that: The rotating member has a second structure. The second structure is parallel to the first slit, The second structure extends in the first direction, The first structure and the second structure are arranged on both sides of the first connection portion with the first slit interposed therebetween.

5. The physical quantity sensor according to claim 4, characterized in that: A distance between the first structure and the first connection portion is equal to a distance between the second structure and the first connection portion.

6. The physical quantity sensor according to claim 1, characterized in that: The physical quantity sensor includes a protrusion provided on the support substrate and overlapping with the first slit in a plan view.

7. The physical quantity sensor according to claim 1, characterized in that: The physical quantity sensor includes a wiring that is provided on the cover and overlaps the first slit in a plan view.

8. The physical quantity sensor according to claim 1, characterized in that: The suspension member comprises: a third connecting portion engaged with the first fixing portion and extending in the second direction; and a fourth connecting portion connected to the third connecting portion and extending in the first direction, The third connecting portion is provided with a second slit.

9. The physical quantity sensor according to claim 8, characterized in that: The fourth connecting portion is provided with a third slit.

10. An inertial measurement device, characterized in that: The invention comprises the physical quantity sensor according to claim 1.

11. An electronic device, characterized in that: Comprising the inertial measurement device of claim 10.

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