A force analysis system and method for probe

Abstract

The present invention relates to the field of semiconductor testing technology, and more specifically, to a force analysis system and method for a probe. The force analysis system provided by the present invention includes a force measuring component for simultaneously performing force tests on the probe tip and the needle tail of the probe assembly; a clamping component for positioning, clamping and fixing the probe assembly; an observation component for realizing alignment observation of the probe tip side and the needle tail side of the probe assembly; and a control module for controlling the movement of the force measuring component relative to the probe assembly by inputting control instructions, and realizing force testing and analysis of the probe tip and the needle tail; wherein the force measuring component includes at least two force measuring mechanisms, which are symmetrically arranged on the needle tip side and the needle tail side, and are used to realize force testing on the probe tip side or the needle tail side of the probe assembly at the same time. The present invention can simultaneously measure the force on the probe tip and the needle tail, so as to comprehensively analyze the force transmission performance of the probe under actual working conditions.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor testing technology, and more particularly to a force analysis system and method for a probe. Background Art

[0002] During the semiconductor wafer testing phase, it is necessary to perform performance tests on the unpackaged chips on the wafer. Probe cards are used in the testing process. The probes are the core of the probe card and are distributed in the ceramic holes on the probe card. During wafer testing, the probe tips on the probe card directly contact the pads or bumps (PAD) on the wafer, and the probe tails contact the MLO / MLC (tester end), thereby achieving electrical connection between the wafer and the tester. The tester can measure the performance of wafer chips, screen and classify wafers, and eliminate chips that do not meet design requirements.

[0003] In order to ensure the yield and reliability of wafer testing, full and effective contact between the probe tip and the tail is crucial. The existing technology has limitations in the force measurement function of the probe in semiconductor wafer testing. Currently, only single-end force testing of the probe tip can be achieved, and the force of the probe tip and tail cannot be measured simultaneously. This limitation makes it difficult to fully analyze the force transfer performance of the probe under actual working conditions, and thus it is impossible to accurately evaluate the contact effect of the probe tip and the tail and the rationality of the overall design of the probe. In addition, the lack of a comprehensive analysis of the friction force on the probe in the ceramic hole also limits the accurate judgment of the contact performance and transfer effect.

[0004] In addition, existing test equipment is expensive and the test cost is high, which further increases the economic pressure in mass production. The lack of equipment functions and high costs make it difficult to meet the needs of high-precision mechanical analysis and test reliability, which in turn affects the yield and overall economic benefits of semiconductor testing. Summary of the invention

[0005] The purpose of the present invention is to provide a force analysis system and method for a probe, so as to solve the problem that the probe card probe of the prior art can only realize single-end force testing.

[0006] In order to achieve the above-mentioned object, the present invention provides a force analysis system for a probe, comprising a force measuring component, a clamping component, an observation component, a control module and a base plate:

[0007] The force measuring component is arranged on the bottom plate and performs force testing on the probe tip and the probe tail of the probe assembly at the same time;

[0008] The clamping component is arranged on the bottom plate to position, clamp and fix the probe assembly;

[0009] The observation component is arranged on the bottom plate to realize the alignment observation of the probe tip side and the probe tail side of the probe assembly;

[0010] The control module is arranged on the bottom plate, and controls the movement of the force measuring component relative to the probe assembly by inputting control instructions, and realizes the force test and analysis of the probe needle tip and needle tail;

[0011] The force measuring component includes at least two force measuring mechanisms, which are symmetrically arranged on the needle tip side and the needle tail side, and are used to simultaneously test the force on the probe tip side or the needle tail side of the probe assembly.

[0012] In some embodiments, the force measuring mechanism includes a test needle motion module, a three-axis motion force sensor element, a test needle fixture, a test needle, and a displacement sensor element:

[0013] The test needle motion module is located at the needle tip side or the needle tail side of the probe and is installed on the bottom plate to realize multi-directional position adjustment of the test needle;

[0014] The three-axis force sensor element is arranged on the test needle motion module to measure the force on the needle tip or needle tail of the probe;

[0015] The test needle fixture is arranged on the three-axis force sensor element and is used to clamp the test needle so that the test needle can achieve stable contact with the probe tip or needle tail;

[0016] The test needle is arranged on the test needle fixture and is used to achieve direct contact with the probe tip or needle tail;

[0017] The displacement sensor element is arranged on the test needle motion module and is used to measure the minute displacement change of the probe needle tip or needle tail.

[0018] In some embodiments, the test needle motion module includes a Y motion module and an XYZ precision slide:

[0019] The Y motion module is mounted on the bottom plate and located at the needle tip side or needle tail side of the probe, and is used to roughly adjust the Y direction position of the test needle;

[0020] The XYZ precision slide is installed on the Y motion module, providing installation positions for three-axis force sensor elements and displacement sensor elements, and is used to fine-tune the X, Y, and Z directions of the test needle.

[0021] In some embodiments, the clamping component includes a reference frame, a movable plate and a knob:

[0022] The reference frame is mounted on the bottom plate and is used to realize the positioning of the probe assembly;

[0023] The movable plate is mounted on the reference frame via a knob to clamp and fix the probe assembly;

[0024] The knob is mounted on the reference frame and is used to drive the clamping or loosening of the movable plate.

[0025] In some embodiments, the observation component includes at least two observation mechanisms mounted on the bottom plate and symmetrically arranged on the needle tip side and the needle tail side for realizing aligned observation of the needle tip side or the needle tail side of the probe assembly.

[0026] In some embodiments, the observation mechanism comprises at least a universal bracket and a microscope:

[0027] The universal bracket is located at the tip side or the tail side of the probe and is installed on the bottom plate to achieve multi-directional adjustment of the microscope;

[0028] The microscope is arranged on the universal bracket and is used to observe the position of the probe tip side or the probe tail side of the probe assembly.

[0029] In some embodiments, the universal bracket includes a fixed shaft, a first rotating shaft, a second rotating shaft, a shaft sleeve and a rotating shaft base:

[0030] The fixed shaft is fixed to the bottom plate as an integral supporting shaft;

[0031] The shaft sleeve is connected to the fixed shaft and is used for rotation and translation adjustment around the fixed shaft;

[0032] The first rotating shaft is installed inside the shaft sleeve and is used for rotation and translation adjustment around the shaft sleeve;

[0033] The second rotating shaft is connected to the first rotating shaft through a rotating shaft base, and is used for rotation and translation adjustment around the first rotating shaft.

[0034] In some embodiments, the force analysis system for a probe further comprises an illumination component:

[0035] The lighting component is arranged on the bottom plate to provide lighting for the probe tip side and the probe tail side of the probe assembly.

[0036] In order to achieve the above object, the present invention provides a force analysis method for a probe, which is implemented by using the force analysis system for the probe as described above, wherein the force measuring mechanism of the force analysis system at least includes a test needle, and the force analysis method for the probe includes the following steps:

[0037] Place the probe assembly on the clamping component to position, clamp and fix it;

[0038] The control module controls the force measuring mechanisms on both sides so that the test needles on both sides are close to the probe tip or the probe tail in the probe assembly respectively;

[0039] By observing the positions of the needle tip and the needle tail in real time through the observation component, the control module adjusts the X-direction and Z-direction motion axes of the force measuring mechanism so that the test needles on both sides are respectively on the same motion axis as the probe needle tip and the needle tail;

[0040] By observing the position of the needle tip and the needle tail in real time through the observation component, the control module adjusts the Y-direction motion axis of the force measuring mechanism so that the test needle and the probe needle tail are in full contact;

[0041] By observing the position of the needle tip and the needle tail in real time through the observation component, the control module adjusts the Y-direction motion axis of the force measuring mechanism so that the test needle is fully in contact with the probe needle tip and is compressed within the specified range;

[0042] Measure and record the force signals fed back from the probe tip and tail to complete the analysis of the force condition of the probe.

[0043] In some embodiments, the force analysis system for a probe further comprises an illumination component, and the force analysis method further comprises the following steps:

[0044] Turn on the light source in the lighting component to facilitate position observation in conjunction with the observation component.

[0045] The present invention provides a force analysis system and method for a probe, which can measure the force of the probe tip and the probe tail at the same time to comprehensively analyze the force transmission performance of the probe under actual working conditions, quickly complete the performance evaluation of the probe assembly, and effectively ensure sufficient contact between the probe and the test point, thereby improving the reliability and test efficiency of the probe card test process. BRIEF DESCRIPTION OF THE DRAWINGS

[0046] The above and other features, properties and advantages of the present invention will become more apparent through the following description in conjunction with the accompanying drawings and embodiments, in which the same reference numerals always represent the same features, wherein:

[0047] Figure 1 A motion axis view of a force analysis system for a probe according to an embodiment of the present invention is disclosed;

[0048] Figure 2 A front view of a force analysis system for a probe according to an embodiment of the present invention is disclosed;

[0049] Figure 3 A top view of a force analysis system for a probe according to an embodiment of the present invention is disclosed;

[0050] Figure 4 A schematic structural diagram of a force measuring mechanism according to an embodiment of the present invention is disclosed;

[0051] Figure 5A partial force measurement magnified diagram of a force analysis system for a probe according to an embodiment of the present invention is disclosed;

[0052] Figure 6 A schematic structural diagram of a clamping component according to an embodiment of the present invention is disclosed;

[0053] Figure 7 A schematic structural diagram of an observation mechanism according to an embodiment of the present invention is disclosed;

[0054] Figure 8 A step diagram of a force analysis method for a probe according to an embodiment of the present invention is disclosed.

[0055] The meanings of the reference numerals in the figures are as follows:

[0056] 1. Force measuring component;

[0057] 11 Needle tip side force measuring mechanism;

[0058] 12-pin tail-side force measuring mechanism;

[0059] 111 Y motion module; 112 XYZ precision slide; 113 three-axis motion force sensor element; 114 test needle fixture; 115 test needle; 116 displacement sensor element;

[0060] 2 clamping parts;

[0061] 21 reference frame; 22 movable plate; 23 knob;

[0062] 3. Observe the components;

[0063] 31 needle tip side observation mechanism; 32 needle tail side observation mechanism;

[0064] 311 universal bracket;

[0065] 3111 fixed shaft; 3112 first rotating shaft; 3113 second rotating shaft; 3114 shaft sleeve; 3115 rotating shaft base;

[0066] 312 microscope;

[0067] 4. Lighting components;

[0068] 5. Control module;

[0069] 6. Probe assembly;

[0070] 61 probes;

[0071] 7 bottom plate. DETAILED DESCRIPTION

[0072] In order to make the purpose, technical solution and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the invention and are not used to limit the invention.

[0073] In order to ensure that the probe tip and needle tail are in full and effective contact, a certain pressure (i.e., needle pressure) needs to be applied to the probe after the probe is implanted in the ceramic hole (probe assembly). The needle pressure usually needs to reach a probe elastic force of about 5g, and the compression amount is generally less than or equal to 50μm.

[0074] A force analysis system for a probe proposed in the present invention can simultaneously apply force to the probe tip and tail and perform measurements. By analyzing the forces exerted on the probe tip and tail, the magnitude of the friction force exerted on the probe in the middle ceramic hole can be analyzed, which helps to evaluate the force transmission effect, and further indirectly determine the rationality of the design of the probe and the probe tip and tail, as well as the contact performance.

[0075] Figures 1 to 3 The present invention discloses a motion axis view, a front view and a top view of a force analysis system for a probe according to an embodiment of the present invention. Figures 1 to 3 As shown, the force analysis system for a probe proposed by the present invention comprises at least a force measuring component 1, a clamping component 2, an observation component 3, a control module 5 and a base plate 7:

[0076] The force measuring component 1 is arranged on the bottom plate 7 to perform force testing on the probe tip and the probe tail of the probe assembly 6 at the same time;

[0077] The clamping component 2 is arranged on the bottom plate 7 to position, clamp and fix the probe assembly 6;

[0078] The observation component 3 is arranged on the bottom plate 7 to realize the alignment observation of the probe tip side and the needle tail side of the probe assembly 6;

[0079] The control module 5 is arranged on the bottom plate 7, and controls the movement of the force measuring component 1 relative to the probe assembly 6 by inputting control instructions, and realizes the force test and analysis of the probe needle tip and needle tail;

[0080] The bottom plate 7 serves as a mounting platform for the above components, providing overall structural support to ensure stable operation of each component;

[0081] The force measuring component 1 includes at least two force measuring mechanisms, which are symmetrically arranged on the needle tip side and the needle tail side, for realizing force testing on the probe needle tip side or the needle tail side of the probe assembly 6 at the same time to ensure the test accuracy.

[0082] Furthermore, the force analysis system for the probe further includes an illumination component 4:

[0083] The lighting component 4 is disposed on the bottom plate 7 to provide lighting for the probe tip side and the probe tail side of the probe assembly 6 .

[0084] The force analysis system for the probe proposed in the present invention can simultaneously perform accurate force testing and analysis on the probe tip and needle tail of the probe assembly through the synergistic effect of the above-mentioned components, providing comprehensive technical support for the performance evaluation of the probe.

[0085] like Figure 1 As shown, the force measuring component 1 includes a needle tip side force measuring mechanism 11 and a needle tail side force measuring mechanism 12, which are arranged on the needle tip side and the needle tail side in a mirror-symmetrical relationship:

[0086] The needle tip side force measuring mechanism 11 is used to test the force condition of the probe needle tip side of the probe assembly 6;

[0087] The needle tail side force measuring mechanism 12 is used to test the force condition of the probe needle tail side of the probe assembly 6 .

[0088] The force analysis system for the probe proposed by the present invention can simultaneously perform force tests on both ends of the probe through force measuring mechanisms on the needle tip side and the needle tail side, thereby ensuring the comprehensiveness and accuracy of force transmission.

[0089] Figure 4 The structural schematic diagram of the force measuring mechanism according to an embodiment of the present invention is disclosed. Figure 4 As shown, the force measuring mechanism includes a test needle motion module, a three-axis motion force sensor element 113, a test needle fixture 114, a test needle 115 and a displacement sensor element 116:

[0090] The test needle motion module is located at the needle tip side or the needle tail side of the probe and is installed on the bottom plate to realize multi-directional position adjustment of the test needle;

[0091] The three-axis force sensor element 113 is disposed on the test needle motion module and is used to measure the force on the needle tip or needle tail of the probe;

[0092] The test needle fixture 114 is disposed on the three-axis force sensor element 113 and is used to clamp the test needle 115 so that the test needle 115 can achieve stable contact with the probe tip or needle tail;

[0093] The test needle 115 is disposed on the test needle fixture 114, and is used to achieve direct contact with the probe tip or needle tail and can further compress the probe;

[0094] The displacement sensor element 116 is disposed on the test needle motion module and is used to measure the minute displacement changes of the probe tip or the probe tail.

[0095] The main function of the test needle motion module is to realize multi-directional position adjustment of the test needle. By equipping the motion axis, accurate positioning and dynamic adjustment in the three directions of X, Y, and Z can be realized so that the test needle 115 can be accurately aligned with the needle tip or needle tail of the probe.

[0096] More specifically, in this embodiment, the test needle motion module includes a Y motion module 111 and an XYZ precision slide 112:

[0097] The Y motion module 111 is mounted on the bottom plate 7 and is located at the tip side or the tail side of the probe, and is used to roughly adjust the Y-direction position of the test needle 115 at the tip side or the tail side of the probe;

[0098] The XYZ precision slide 112 is installed on the Y motion module 111 and provides installation positions for the three-axis force sensor element 113 and the displacement sensor element 116 for fine-tuning the position of the test needle 115 in the three directions of X, Y and Z.

[0099] Among them, the Y motion module 111 provides a large displacement range, ensuring that the test needle can be roughly aligned with the needle tip or needle tail area of ​​the probe, laying the foundation for subsequent fine adjustment;

[0100] The Y motion module 111 has an adjustment range of 100 mm and can provide a relatively large range of coarse adjustment displacement to meet the layout requirements of different probe assemblies.

[0101] The XYZ precision slide 112 realizes fine adjustment of the test needle in the three directions of X, Y and Z on the basis of coarse adjustment, ensuring that the test needle can be accurately aligned with the force point of the probe tip or needle tail at the same time.

[0102] The XYZ precision slide 112 is adjusted in three directions by the control module 5 through inputting commands or manually rotating the micro-tilt knob, and can accurately control the contact state between the test needle and the probe.

[0103] The XYZ adjustment range is ±12.5mm. Through microscope observation, precise adjustment in three directions can be achieved to ensure the ideal alignment of the test needle and the probe and the force transmission effect.

[0104] Through modular design, the test needle motion module has good flexibility and adaptability, and can be applied to different types of probe assembly force analysis scenarios.

[0105] In this embodiment, the three-axis force sensor element 113, as a core force testing component, can measure the magnitude and direction of the force on the probe in the three directions of X, Y, and Z, thereby performing high-precision analysis of the force on the probe tip and tail.

[0106] The three-axis force sensor element 113 may adopt a standard force measuring element, which can realize force measurement in three axis directions. Its model may be K3D40, and the maximum measurement load may reach 30g.

[0107] In this embodiment, the test needle fixture 114 can stably clamp the test needle 115 to ensure that the test needle 115 can accurately contact with the probe tip or the probe tail and remain stable.

[0108] Figure 5 A partial force measurement enlarged diagram of a force analysis system for a probe according to an embodiment of the present invention is disclosed, such as Figure 4 and Figure 5 As shown, the test needle 115 is used to transmit force information by contacting or compressing the tip or tail of the probe 61, thereby realizing force analysis of the probe assembly 6.

[0109] In this embodiment, the displacement sensor element 116 is a high-precision non-contact displacement sensor element:

[0110] For the tip side, the displacement sensor element 116 monitors the compression of the probe to ensure that the compression of the probe tip is within the design range (e.g., ≤50 μm);

[0111] For the needle tail side, the displacement sensor element 116 monitors the micro-displacement behavior of the probe to ensure the position accuracy and force stability of the probe tail during the test.

[0112] The high-precision non-contact displacement sensor element adopts Keyence standard precision displacement sensor, which is mainly used to measure the compression displacement of the probe. Its stroke range is 1 mm and the accuracy is 0.1 μm. The sensor maintains a non-contact state with the probe assembly 6 during the measurement process, ensuring that the force measuring component 1 is free from external interference during the force measurement process, thereby achieving more accurate and stable test results.

[0113] Furthermore, the high-precision non-contact displacement sensor element itself has an electromagnetic anti-interference function, ensuring that accurate measurement performance can be maintained in various complex electromagnetic environments.

[0114] Figure 6 The structure diagram of the clamping component according to an embodiment of the present invention is disclosed. Figure 6 As shown, the clamping component 2 includes a reference frame 21, a movable plate 22 and a knob 23:

[0115] The reference frame 21 is mounted on the bottom plate and is used to realize the positioning of the probe assembly 6;

[0116] The movable plate 22 is mounted on the reference frame 21 via a knob 23 to clamp and fix the probe assembly 6;

[0117] The knob 23 is mounted on the reference frame 21 and is used to drive the movable plate 22 to be clamped or loosened.

[0118] More specifically, in this embodiment, the reference frame 21 is a fixed foundation of the clamping component 2 , providing a stable support for the probe assembly 6 .

[0119] The movable plate 22 is a key component in the clamping component 2 for directly contacting and fixing the probe assembly 6 , and can be freely adjusted between clamping and loosening with the operation of the knob 23 .

[0120] The knobs 23 , which are three in number, are connected to the movable plate 22 via threads or other adjustable connection methods to drive the clamping action of the movable plate 22 .

[0121] The knob 23 provides an adjustable clamping force range to accommodate probe assemblies 6 of different sizes and shapes, and the structure of the movable plate 22 can protect the probe assembly 6 from damage when the clamping force is applied while maintaining its force uniformity. This modular design enables the clamping component 2 to have good versatility and reliability, and can adapt to a variety of probe assemblies 6, providing a stable operating platform for subsequent force analysis.

[0122] The observation component includes at least two observation mechanisms, which are installed on the bottom plate and symmetrically arranged on the needle tip side and the needle tail side, and are used to realize the alignment observation of the probe needle tip side or the needle tail side of the probe assembly.

[0123] like Figure 2 As shown, the observation component 3 includes a needle tip side observation mechanism 31 and a needle tail side observation mechanism 32 . The two mechanisms have the same components, which are both composed of a universal bracket 311 and a microscope 312 .

[0124] The needle tip side observation mechanism 31 is used to realize the alignment observation of the probe needle tip side on the probe assembly 6 , and the needle tail side observation mechanism 32 is used to realize the alignment observation of the probe needle tail side on the probe assembly 6 .

[0125] Figure 7 A schematic diagram of the structure of an observation mechanism according to an embodiment of the present invention is disclosed. Figure 7 As shown, the observation mechanism at least includes a universal bracket 311 and a microscope 312:

[0126] The universal bracket 311 is located at the tip side or the tail side of the probe and is mounted on the bottom plate 7 to achieve multi-directional adjustment of the microscope 312;

[0127] The microscope 312 is disposed on the universal bracket 311 and is used to observe the position of the probe tip side or the probe tail side of the probe assembly 6 .

[0128] More specifically, the universal bracket 311 allows the microscope 312 to be rotated and translated 360°, achieving adjustment of 6 degrees of freedom to obtain an optimal observation angle.

[0129] like Figure 7 As shown, the universal bracket 311 includes a fixed shaft 3111, a first rotating shaft 3112, a second rotating shaft 3113, a shaft sleeve 3114 and a rotating shaft base 3115:

[0130] The fixed shaft 3111 is fixed on the bottom plate 7 as an integral support shaft;

[0131] The shaft sleeve 3114 is connected to the fixed shaft 3111 and is used for rotation and translation adjustment around the fixed shaft 3111;

[0132] The first rotating shaft 3112 is installed inside the shaft sleeve 3114 and is used for rotation and translation adjustment around the shaft sleeve 3114;

[0133] The second rotating shaft 3113 is connected to the first rotating shaft 3112 via a rotating shaft base 3115 , and is used for rotation and translation adjustment around the first rotating shaft 3112 .

[0134] More specifically, the fixed axis 3111 serves as the core support axis of the stent, providing basic stability for the entire stent.

[0135] The sleeve 3114 rotates freely around the fixed axis 3111, allowing the entire bracket to rotate 360° around the fixed axis, and can also be adjusted in translation. The inner hole size of the sleeve 3114 matches the outer diameter of the fixed axis 3111 to ensure smooth rotation.

[0136] The first rotating shaft 3112 is installed in the sleeve 3114 and can be rotated and translated 360° around the sleeve, providing further free rotation and position adjustment functions.

[0137] The second rotation axis 3113 rotates around the first rotation axis 3112, further providing 360° rotation and translation adjustment functions, thereby allowing more complex movements and providing more flexible adjustments.

[0138] The structural design of the universal bracket 311 enables it to be flexibly adjusted in multiple directions, including rotation and position translation adjustment. By reasonably connecting and coordinating various components, an efficient and stable support system is formed, which can adapt to the adjustment requirements of various equipment or workpieces.

[0139] Based on the force analysis system for the probe, the present invention proposes a force analysis method for the probe. The force analysis method proposed in the present invention is based on the force analysis system, including a force measuring component, a clamping component, an observation component, a control module and a bottom plate, combined with hardware such as a precision slide, a force sensor, and a displacement sensor, to achieve accurate force measurement and analysis of the probe tip and needle tail in the probe assembly.

[0140] Figure 8 A step diagram of a force analysis method for a probe according to an embodiment of the present invention is disclosed, such as Figure 8 As shown, a force analysis method for a probe proposed by the present invention comprises:

[0141] Step S1, placing the probe assembly on a clamping component, and positioning, clamping and fixing it;

[0142] Step S2, the control module controls the force measuring mechanisms on both sides so that the test needles on both sides are close to the probe tip or the probe tail in the probe assembly respectively;

[0143] Step S3, observing the positions of the needle tip and the needle tail in real time through the observation component, and the control module adjusts the X-direction and Z-direction movement axes of the force measuring mechanism so that the test needles on both sides are respectively on the same movement axis as the probe needle tip and the probe needle tail;

[0144] Step S4, observing the positions of the needle tip and the needle tail in real time through the observation component, and the control module adjusts the Y-direction movement axis of the force measuring mechanism so that the test needle and the probe needle tail are in full contact;

[0145] Step S5, observing the positions of the needle tip and the needle tail in real time through the observation component, and the control module adjusts the Y-direction movement axis of the force measuring mechanism so that the test needle is fully in contact with the probe needle tip and is compressed within a specified range;

[0146] Step S6, measuring and recording the force signals fed back from the tip side and the tail side of the probe, and completing the analysis of the force condition of the probe.

[0147] Furthermore, the step S2 also includes: turning on the light source in the lighting component to cooperate with the observation component to perform position observation.

[0148] Combine the following Figures 1 to 7 The force analysis system for the probe shown further illustrates the specific steps of the force analysis method for the probe proposed by the present invention. It should be understood that within the scope of the present invention, the above-mentioned technical features of the present invention and the technical features specifically described below (such as the embodiments) can be combined and related to each other to form a preferred technical solution.

[0149] Step S1, placing the probe assembly on a clamping component, and positioning, clamping and fixing it;

[0150] The probe assembly 6 is placed on the reference frame 21 in the clamping part 2, and the knob 23 is tightened to drive the movable plate 22, and the movable plate 22 presses the probe assembly 6, clamping and fixing the probe assembly 6, ensuring that the probe assembly 6 is accurately positioned and remains stable during the test;

[0151] The clamping component 2 can be compatible with the positioning, clamping and fixing of probe assemblies 6 of various specifications, and supports the tip and tail force testing of various probes.

[0152] Step S2, the control module controls the force measuring mechanisms on both sides so that the test needles on both sides are close to the probe tip or the probe tail in the probe assembly respectively, so as to achieve preliminary alignment between the test needle and the probe assembly;

[0153] Turn on the light source in the lighting component 4 to observe the positions of the probe tip and the probe tail;

[0154] The control module 5 controls the Y motion module in the force measuring mechanism on both sides of the probe assembly 6, so that the test needles on both sides are close to the needle tip and needle tail of the probe 61 in the probe assembly 6 respectively, realizes the preliminary alignment of the test needle and the probe assembly, and cooperates with the observation component to obtain the position information of the needle tip and needle tail.

[0155] Step S3, observing the positions of the needle tip and the needle tail in real time through the observation component, and the control module adjusts the X-direction and Z-direction movement axes of the force measuring mechanism so that the test needles on both sides are respectively on the same movement axis as the probe needle tip and the probe tail, thereby achieving precise alignment of the test needle and the probe assembly;

[0156] The positions of the tip and tail of the probe 61 are respectively observed in real time through the microscopes 312 on both sides.

[0157] The control module 5 controls the X-direction motion axis and the Z-direction motion axis in the XYZ precision slide 112 on both sides respectively, so that the test needles 115 on both sides are respectively on the same motion axis with the needle tip and needle tail of the probe 61, ensuring the precise alignment of the test needles and the probes of the probe assembly in the X and Z directions, and ensuring the accuracy of subsequent force testing.

[0158] Step S4, observing the position of the needle tail in real time through the observation component, and the control module adjusts the Y-direction movement axis of the force measuring mechanism so that the test needle and the probe needle tail are in full contact;

[0159] The needle tail position is observed through the microscope 312, and the control module 5 controls the Y-direction movement axis in the XYZ precision slide 112 on the needle tail side of the probe 61 until the test needle 115 on the needle tail side of the probe 61 fully contacts the needle tail of the probe 61. At this time, the force measuring mechanism can provide real-time feedback on the magnitude of the force applied to the probe needle tail.

[0160] Step S5, observing the position of the needle tip in real time through the observation component, and the control module adjusts the Y-direction movement axis of the force measuring mechanism so that the test needle and the probe needle tip are fully in contact and compressed within a specified range;

[0161] By observing the needle tip position through the microscope 312, the control module 5 adjusts the Y-direction motion axis in the XYZ precision slide 112 on the probe tip side, so that the test needle on the probe tip side of the probe 61 is fully in contact with the probe tip and then further compresses the probe to within its specified range value (≤50μm).

[0162] The high-precision non-contact displacement sensor elements 116 on both sides respectively feed back the compression displacement on the needle tip side and the micro-motion on the needle tail side, providing multi-dimensional data support for force analysis.

[0163] Step S6, measuring and recording the force signals fed back from the probe tip side and the probe tail side, and completing the analysis of the force condition of the probe;

[0164] The magnitude of the force on the tip side and the tail side of the probe 61 is fed back through the three-axis force sensor element 113 on the tip side and the tail side of the probe 61;

[0165] The force measuring mechanisms on the tip and tail sides of the probe respectively feed back the force magnitudes of the tip and tail of the probe for force analysis.

[0166] By comparing the forces on the tip side and the tail side of the probe 61, it is determined whether the probe 61 is stuck in the ceramic hole of the probe assembly 6, thereby analyzing whether the contact performance of the probe is good.

[0167] The stuck phenomenon refers to the probe being stuck in the ceramic hole. It is judged by the magnitude of the force measured by the needle tip and the needle tail. If the force measured by the needle tip is much greater than the force measured by the needle tail, it means that the probe is stuck in the ceramic hole.

[0168] The force analysis method for the probe proposed in the present invention realizes the force analysis of the probe tip and the needle tail by accurately controlling the synergistic effect of the force measuring component and the observation component, which can quickly determine the mechanical properties of the probe and the rationality of its assembly, improve the detection efficiency and reliability, thereby providing reliable data support for the probe performance evaluation and effectively improving the reliability and test efficiency of the probe card test process.

[0169] The present invention provides a force analysis system and method for a probe, which can realize simultaneous force measurement and force transmission analysis of a probe tip and a probe tail on a probe card, and has the following beneficial effects:

[0170] 1) It realizes the double-end force test of the probe tip and needle tail, analyzes the force transmission, and makes up for the deficiency of the existing technology that can only test at one end;

[0171] 2) The universal design of the clamping component is compatible with probe assemblies of various specifications, which can meet the positioning, clamping and fixing requirements of various probes, increasing the flexibility and adaptability of the system;

[0172] 3) The XYZ precision slide and high-precision displacement sensor are used to achieve precise alignment and adjustment of the test needle, with high test accuracy;

[0173] 4) Through the feedback of high-precision displacement sensors and force sensors, it is possible to detect whether the probe is stuck and promptly determine whether the probe may cause poor contact during the test;

[0174] 5) By using the observation component and the lighting component together, it can ensure that the contact status between the probe and the test needle can be clearly observed at both ends of the probe, thereby providing support for accurate force testing;

[0175] 6) Through the automatic adjustment of the control module, convenience and high efficiency are achieved in the test process, the test speed is improved and the test error is reduced.

[0176] Although the above methods are illustrated and described as a series of actions for simplicity of explanation, it should be understood and appreciated that these methods are not limited by the order of the actions, because according to one or more embodiments, some actions may occur in a different order and / or concurrently with other actions from those illustrated and described herein or not illustrated and described herein but understandable to those skilled in the art.

[0177] As shown in this application and claims, unless the context clearly indicates an exception, the words "a", "an", "an" and / or "the" do not refer to the singular and may also include the plural. Generally speaking, the terms "include" and "comprise" only indicate the inclusion of the steps and elements that have been clearly identified, and these steps and elements do not constitute an exclusive list. The method or device may also include other steps or elements.

[0178] In the description of the present invention, it should be noted that the directions or positional relationships indicated by terms such as “upper”, “lower”, “front”, “back”, “left”, “right”, “vertical”, “inside” and “outside” are based on the directions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as a limitation on the present invention.

[0179] In the present invention, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0180] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be directly connected, or indirectly connected through an intermediate medium, or it can be the connection inside two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0181] The above embodiments are provided for persons familiar with the art to implement or use the present invention. Personnel familiar with the art can make various modifications or changes to the above embodiments without departing from the inventive concept of the present invention. Therefore, the protection scope of the present invention is not limited to the above embodiments, but should be the maximum scope of the innovative features mentioned in the claims.

Claims

1. A force analysis system for a probe, characterized in that: Including force measuring parts, clamping parts, observation parts, control module and base plate: The force measuring component is arranged on the bottom plate and performs force testing on the probe tip and the probe tail of the probe assembly at the same time; The clamping component is arranged on the bottom plate to position, clamp and fix the probe assembly; The observation component is arranged on the bottom plate to realize the alignment observation of the probe tip side and the probe tail side of the probe assembly; The control module is arranged on the bottom plate, and controls the movement of the force measuring component relative to the probe assembly by inputting control instructions, and realizes the force test and analysis on the tip side and the tail side of the probe; Wherein, the force measuring component includes at least two force measuring mechanisms, which are symmetrically arranged on the needle tip side and the needle tail side, and are used to simultaneously test the force on the needle tip side or the needle tail side of the probe assembly; The force measuring mechanism includes a test needle motion module, a three-axis motion force sensor element, a test needle fixture, a test needle and a displacement sensor element: The test needle motion module is located at the needle tip side or the needle tail side of the probe and is installed on the bottom plate to realize multi-directional position adjustment of the test needle; The three-axis force sensor element is arranged on the test needle motion module to measure the force on the needle tip or needle tail of the probe; The test needle fixture is arranged on the three-axis force sensor element and is used to clamp the test needle so that the test needle can achieve stable contact with the probe tip or needle tail; The test needle is arranged on the test needle fixture and is used to achieve direct contact with the probe needle tip or needle tail; The displacement sensor element is arranged on the test needle motion module and is used to measure the minute displacement change of the probe needle tip or needle tail.

2. The force analysis system for a probe according to claim 1, characterized in that: The test needle motion module includes a Y motion module and an XYZ precision slide: The Y motion module is mounted on the bottom plate and located at the tip side or the tail side of the probe, and is used to roughly adjust the Y position of the test needle; The XYZ precision slide is installed on the Y motion module, providing installation positions for three-axis force sensor elements and displacement sensor elements, and is used to fine-tune the X, Y, and Z directions of the test needle.

3. The force analysis system for a probe according to claim 1, characterized in that: The clamping component includes a reference frame, a movable plate and a knob: The reference frame is mounted on the bottom plate and is used to realize the positioning of the probe assembly; The movable plate is mounted on the reference frame via a knob to clamp and fix the probe assembly; The knob is mounted on the reference frame and is used to drive the clamping or loosening of the movable plate.

4. The force analysis system for a probe according to claim 1, characterized in that: The observation component includes at least two observation mechanisms, which are mounted on the bottom plate and symmetrically arranged on the needle tip side and the needle tail side, and are used to realize the alignment observation of the probe needle tip side or the needle tail side of the probe assembly.

5. The force analysis system for a probe according to claim 4, characterized in that: The observation mechanism at least comprises a universal bracket and a microscope: The universal bracket is located at the tip side or the tail side of the probe and is installed on the bottom plate to achieve multi-directional adjustment of the microscope; The microscope is arranged on the universal bracket and is used to observe the position of the probe tip side or the probe tail side of the probe assembly.

6. The force analysis system for a probe according to claim 5, characterized in that: The universal bracket includes a fixed shaft, a first rotating shaft, a second rotating shaft, a shaft sleeve and a rotating shaft base: The fixed shaft is fixed on the bottom plate as an integral supporting shaft; The shaft sleeve is connected to the fixed shaft and is used for rotation and translation adjustment around the fixed shaft; The first rotating shaft is installed inside the shaft sleeve and is used for rotation and translation adjustment around the shaft sleeve; The second rotating shaft is connected to the first rotating shaft through a rotating shaft base, and is used for rotation and translation adjustment around the first rotating shaft.

7. The force analysis system for a probe according to claim 1, characterized in that: Also includes lighting components: The lighting component is arranged on the bottom plate to provide lighting for the probe tip side and the probe tail side of the probe assembly.

8. A force analysis method for a probe, implemented by using a force analysis system for a probe according to any one of claims 1 to 7, wherein the force measuring mechanism of the force analysis system comprises at least a test needle, characterized in that: The following steps are involved: Place the probe assembly on the clamping component to position, clamp and fix it; The control module controls the force measuring mechanisms on both sides so that the test needles on both sides are close to the probe tip or the probe tail in the probe assembly respectively; By observing the positions of the needle tip and the needle tail in real time through the observation component, the control module adjusts the X-direction and Z-direction motion axes of the force measuring mechanism so that the test needles on both sides are respectively on the same motion axis as the probe needle tip and the needle tail; By observing the position of the needle tip and the needle tail in real time through the observation component, the control module adjusts the Y-direction motion axis of the force measuring mechanism so that the test needle and the probe needle tail are in full contact; By observing the position of the needle tip and the needle tail in real time through the observation component, the control module adjusts the Y-direction motion axis of the force measuring mechanism so that the test needle is fully in contact with the probe needle tip and is compressed within the specified range; Measure and record the force signals fed back from the probe tip and tail to complete the analysis of the force condition of the probe.

9. The force analysis method for a probe according to claim 8, characterized in that: The force analysis system for the probe further includes a lighting component, and the force analysis method further includes the following steps: Turn on the light source in the lighting component to facilitate position observation in conjunction with the observation component.

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