External purging device and semiconductor manufacturing system

Abstract

The application belongs to the technical field of exposure equipment, and particularly relates to an external purging device and a semiconductor manufacturing system, which are used for an exposure equipment, the exposure equipment comprising a projection device and a channel device, the projection device comprising at least one lens, the channel device having an internal space for accommodating the at least one lens in the projection device, the external purging device comprising a gas supply connecting unit, a filter connecting unit and an adapting unit, the gas supply connecting unit being used for providing purging gas, the adapting unit being detachably connected with the channel device, and the filter connecting unit being arranged between the gas supply connecting unit and the adapting unit and being used for connecting a filter to filter the purging gas. When the built-in purging device of the exposure equipment cannot be used or there is no high-purity purging gas supply, the external purging device is used to replace the built-in purging device, the high-purity purging gas filtered is used to replace the gas in the internal space, and the projection device can be prevented from being exposed to the environment to cause irreversible pollution of the projection device.

Description

Technical Field

[0001] This application belongs to the field of exposure equipment technology, specifically relating to an external purging device and a semiconductor manufacturing system. Background Technology

[0002] Exposure is a process in which light emitted from a light source in an exposure device passes through a mask containing the target pattern and shines onto the surface of a wafer, exposing the photoresist coated on the wafer and transferring the target pattern from the mask onto the wafer. To improve the uniformity of exposure, a projection device is usually placed between the light source and the mask surface. The cleanliness of the lens in the projection device is one of the important factors affecting the exposure quality of the exposure equipment.

[0003] Exposing projection devices to the environment can easily cause irreversible contamination. Therefore, whether in operation or during transportation, projection devices must be continuously purged with high-purity nitrogen (N2) to ensure their cleanliness. When the built-in purging device of the exposure equipment is unusable or there is no supply of high-purity purging gas, irreversible contamination of the projection device is likely to occur. Summary of the Invention

[0004] The purpose of this application is to provide an external purging device to prevent the projection device from being exposed to the environment and causing irreversible contamination.

[0005] To achieve the above objectives, this application provides an external purge device for an exposure apparatus, the exposure apparatus including a projection device and a channel device, the projection device including at least one lens, the channel device having an internal space for accommodating at least one lens in the projection device, and the external purge device comprising:

[0006] Gas supply connection unit, used to connect to a gas source to provide purging gas;

[0007] The adapter unit is detachably connected to the channel device;

[0008] A filter connection unit is connected between the gas supply connection unit and the adapter unit. The filter connection unit is used to connect a filter to filter the purge gas. The filtered purge gas is used to replace the gas in the internal space.

[0009] Optionally, the gas supply connection unit includes M gas source interface components and M first transmission channels, M≥1. The first transmission channels correspond one-to-one with the gas source interface components. The first end of the gas source interface component is used to connect to the gas source. The second end of the gas source interface component is connected to the first end of the first transmission channel. The second end of the first transmission channel is connected to the filter connection unit.

[0010] The filter connection unit includes N filter interface components, N second transmission channels, and N third transmission channels, where N ≥ 1. Each second transmission channel and each third transmission channel corresponds one-to-one with a filter interface component. Each filter interface component includes a filter interface part for connecting to the filter. The first end of the second transmission channel is connected to the second end of the first transmission channel. The filter interface component is connected between the second end of the second transmission channel and the first end of the third transmission channel. The second end of the third transmission channel is connected to the adapter unit.

[0011] Optionally, the gas supply connection unit further includes a first control valve unit, which is disposed on the first transmission channel and corresponds one-to-one with the first transmission channel.

[0012] Optionally, the filter connection unit further includes a second control valve unit and a third control valve unit, wherein the second control valve unit is disposed on the second transmission channel and corresponds one-to-one with the second transmission channel, and the third control valve unit is disposed on the third transmission channel and corresponds one-to-one with the third transmission channel.

[0013] Optionally, the external purging device further includes a pressure regulating unit, which is disposed between the air source interface component and the adapter unit, and is used to regulate the air pressure on the side of the pressure regulating unit away from the air source interface component.

[0014] Optionally, the voltage regulating unit is disposed between the second end of the first transmission channel and the first end of the second transmission channel.

[0015] Optionally, the pressure regulating unit includes a valve with an adjustable opening.

[0016] Optionally, M ≥ 2, where the second ends of the M first transmission channels are connected in parallel and then connected to the valve with adjustable opening.

[0017] Optionally, the gas supply connection unit further includes a first control valve unit, which is disposed on the first transmission channel and corresponds one-to-one with the first transmission channel. The first control valve unit includes a one-way valve.

[0018] Optionally, the pressure regulating unit further includes a pressure sensor for measuring the air pressure on the side of the adjustable valve away from the air source interface assembly. The pressure regulating unit is configured such that the opening of the adjustable valve can be adjusted according to the air pressure measured by the pressure sensor.

[0019] Optionally, the external purging device further includes a controller, which can output an opening control signal to control the opening of the adjustable valve.

[0020] Optionally, the external purging device further includes a pressure sensor, which measures the air pressure on the side of the adjustable valve away from the air source interface assembly and generates a pressure signal based on the measured air pressure. The controller can acquire the pressure signal and output the opening control signal based on the pressure signal.

[0021] Optionally, the gas supply connection unit further includes a first control valve unit, which is disposed on the first transmission channel and corresponds one-to-one with the first transmission channel. The controller can control the opening and closing of the first control valve unit according to the opening degree of the adjustable valve and the pressure signal.

[0022] Optionally, the pressure regulating unit includes a pressure sensor for measuring the air pressure on the side of the adjustable valve away from the air source interface assembly. The pressure regulating unit also includes a first display that can display the air pressure measured by the pressure sensor.

[0023] Optionally, the gas supply connection unit further includes a first control valve unit, which is disposed on the first transmission channel and corresponds one-to-one with the first transmission channel. The external purging device further includes a controller, which can control the opening and closing of the first control valve unit.

[0024] Optionally, the external purging device further includes a life monitoring unit, which is used to monitor the life parameters of the filter connected to the filter interface component.

[0025] Optionally, N≥2, the first end of the second transmission channel after parallel connection is connected to the gas supply connection unit, and the second end of the third transmission channel after parallel connection is connected to the adapter unit.

[0026] Optionally, the filter connection unit further includes a second control valve unit and a third control valve unit. The second control valve unit is disposed on the second transmission channel and corresponds one-to-one with the second transmission channel. The third control valve unit is disposed on the third transmission channel and corresponds one-to-one with the third transmission channel. The third control valve unit includes a one-way valve.

[0027] Optionally, the filter connection unit further includes a second control valve unit and a third control valve unit. The second control valve unit is disposed on the second transmission channel and corresponds one-to-one with the second transmission channel. The third control valve unit is disposed on the third transmission channel and corresponds one-to-one with the third transmission channel. The external purging device further includes a controller, which can control the switching of the second control valve unit and the third control valve unit.

[0028] Optionally, the life monitoring unit can generate a life signal based on the life parameters, and the controller can acquire the life signal and control the switching of the second control valve unit and the third control valve unit based on the life parameters.

[0029] Optionally, the lifespan monitoring unit includes a timer, which is used to record at least the cumulative operating time of the filter connected to the filter interface component, and the lifespan parameter includes the cumulative operating time.

[0030] Optionally, the external purging device further includes an air source connected to the first end of the air source interface assembly, and / or

[0031] A filter connected to the filter interface component.

[0032] This application also provides a semiconductor manufacturing system, including the aforementioned external purging device.

[0033] The external purging device and semiconductor manufacturing system disclosed in this application have the following beneficial effects:

[0034] In this application, the external purging device includes a gas supply connection unit, a filter connection unit, and an adapter unit. The gas supply connection unit connects to a gas source to provide purging gas. The adapter unit is detachably connected to the channel device. The filter connection unit is located between the gas supply connection unit and the adapter unit. The filter connection unit connects to a filter to filter the purging gas provided by the gas supply connection unit. The filtered purging gas replaces the gas in the internal space. When the built-in purging device of the exposure equipment cannot be used, or when there is no high-purity purging gas supply, the external purging device can provide filtered purging gas to replace the gas in the internal space, thus preventing irreversible contamination of the projection device caused by exposure to the environment.

[0035] Other features and advantages of this application will become apparent from the following detailed description, or may be learned in part from practice of this application.

[0036] It should be understood that the above general description and the following detailed description are exemplary and explanatory only, and are not intended to limit this disclosure. Attached Figure Description

[0037] The accompanying drawings, which are incorporated in and form part of this specification, illustrate embodiments consistent with this application and, together with the description, serve to explain the principles of this application. It is obvious that the drawings described below are merely some embodiments of this application, and those skilled in the art can obtain other drawings based on these drawings without any inventive effort.

[0038] Figure 1 This is a schematic diagram of the external purging device in the embodiments of this application.

[0039] Figure 2 This is a schematic diagram of the controller controlling the voltage regulation unit and other structures in the embodiments of this application.

[0040] Explanation of reference numerals in the attached figures:

[0041] 100. Gas supply connection unit; 110. Gas source interface assembly; 120. First transmission channel; 130. First control valve unit;

[0042] 200, Filter connection unit; 210, Filter interface assembly; 220, Second transmission channel; 230, Third transmission channel; 240, Second control valve unit; 250, Third control valve unit;

[0043] 300, Adapter Unit; 400, Air Source; 500, Filter;

[0044] 600, Pressure regulating unit; 610, Adjustable valve opening; 620, Pressure sensor; 630, First display;

[0045] 700, Controller; 800, Life Monitoring Unit. Detailed Implementation

[0046] Exemplary embodiments will now be described more fully with reference to the accompanying drawings. However, these exemplary embodiments can be implemented in many forms and should not be construed as limited to the examples set forth herein; rather, these embodiments are provided to make this application more comprehensive and complete, and to fully convey the concept of the exemplary embodiments to those skilled in the art.

[0047] Furthermore, the described features, structures, or characteristics can be combined in any suitable manner in one or more embodiments. Numerous specific details are provided in the following description to give a thorough understanding of embodiments of this application. However, those skilled in the art will recognize that the technical solutions of this application can be practiced without one or more of the specific details, or other methods, components, apparatuses, steps, etc., can be employed. In other instances, well-known methods, apparatuses, implementations, or operations are not shown or described in detail to avoid obscuring various aspects of this application.

[0048] The present application will now be described in further detail with reference to the accompanying drawings and specific embodiments. It should be noted that the technical features involved in the various embodiments described below can be combined with each other as long as they do not conflict with each other. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain the present application, and should not be construed as limiting the present application.

[0049] In this embodiment, the external purging device is used in the exposure equipment. The exposure equipment includes a projection device and a channel device. The projection device includes at least one lens, and the channel device has an internal space for accommodating at least one lens in the projection device. To prevent gas from the external environment from entering the internal space and contaminating the lens, it is necessary to purge the lens, that is, to replace the gas in the internal space with high-purity purging gas.

[0050] Typically, exposure equipment also includes a built-in purge system that introduces purge gas into the internal space to prevent irreversible contamination of the projection device caused by exposure to the environment. The built-in purge gas may include, for example, nitrogen with a purity of 5.4N or higher.

[0051] See Figure 1 As shown, the external purging device includes an air supply connection unit 100, a filter connection unit 200, and an adapter unit 300. The air supply connection unit 100 is used to connect to an air source 400 to provide purging gas. The adapter unit 300 can be detachably connected to the channel device. The filter connection unit 200 is connected between the air supply connection unit 100 and the adapter unit 300 and is used to connect a filter 500 to filter the purging gas. The filtered purging gas is used to replace the gas in the internal space.

[0052] The external purging device includes an air supply connection unit 100 and a filter connection unit 200. When using the external purging device, a suitable air source 400 and filter 500 can be selected according to actual needs and connected to the air supply connection unit 100 and the filter connection unit 200 respectively. However, it is not limited to this. In some embodiments, the external purging device also includes at least one of an air source 400 connected to the filter connection unit 200 and a filter 500 connected to the filter connection unit 200, depending on the specific situation.

[0053] After the gas supply connection unit 100 is connected to the gas source 400, the purge gas is input from the gas source 400 into the gas supply connection unit 100. It is understood that the gas supply connection unit 100 includes at least a port that can be connected to the gas source 400. The connection can be detachable or fixed. When the connection is detachable, the external purge device may or may not include the gas source 400; when the connection is fixed, the external purge device may include the gas source 400. The purge gas provided by the gas source 400 is, for example, nitrogen with a purity of 5N or less. The gas source 400 may include a purge gas storage device and / or a purge gas preparation device. Preferably, the gas source 400 is a purge gas storage device, such as a gas tank, which is easy to carry. When the gas source 400 is a purge gas storage device, the gas source 400 can be configured in a one-to-one correspondence with the gas supply connection unit 100.

[0054] The external purging device includes a filter connection unit 200 located between the gas supply connection unit 100 and the adapter unit 300. After connecting the filter 500, the purging gas input from the gas source 400 to the gas supply connection unit 100 can be filtered by the filter 500 and then introduced into the internal space through the adapter unit 300. It is understood that the filter connection unit 200 includes a port for connecting the filter 500. The connection can be detachable or fixed. When the connection is detachable, the external purging device may or may not include the filter 500; when the connection is fixed, the external purging device may include the filter 500. It is understood that different models of the filter 500 can be selected according to the required purity of the purging gas. Therefore, the purity requirement for the purging gas supplied by the gas source 400 connected via the gas supply connection unit 100 can be reduced, while providing high-purity filtered purging gas to meet the purging requirements of the projection device. For example, after the filter connection unit 200 is connected to the filter 500, the filter 500 can filter nitrogen gas with a purity of 5N or even lower provided by the gas source 400 to obtain high-purity nitrogen gas with a purity of 5.4N or higher; or in some embodiments, after the filter connection unit 200 is connected to the filter 500, the filter 500 can filter nitrogen gas with a purity of 5N or even lower provided by the gas source 400 to obtain nitrogen gas with a purity of 9N or higher.

[0055] It should be noted that the purging gas provided by the gas source 400 connected to the gas supply connection unit 100 may include nitrogen, but is not limited to this. The purging gas may also include inert gas or clean, dry air, depending on the circumstances.

[0056] The adapter unit 300 can be detachably connected to the channel device of an exposure device, but is not limited thereto. Multiple adapter units 300 can also be provided to connect multiple exposure devices at the same time, depending on the specific situation.

[0057] When the built-in purge device of the exposure equipment is unusable or there is no supply of high-purity purge gas, irreversible contamination of the projection device can easily occur.

[0058] In this embodiment, the external purging device includes a gas supply connection unit 100, a filter connection unit 200, and an adapter unit 300. The gas supply connection unit 100 is used to connect to a gas source 400 to provide purging gas. The adapter unit 300 is detachably connected to the channel device. The filter connection unit 200 is disposed between the gas supply connection unit 100 and the adapter unit 300. The filter connection unit 200 is used to connect to a filter 500 to filter the purging gas provided by the gas supply connection unit 100. The filtered purging gas is used to replace the gas in the internal space. When the built-in purging device of the exposure equipment cannot be used, or when there is no high-purity purging gas supplied to the built-in purging device, an external purging device is used to provide filtered high-purity purging gas to replace the gas in the internal space, which can prevent the projection device from being exposed to the environment and causing irreversible pollution to the projection device.

[0059] Furthermore, the adapter unit 300 is detachably connected to the channel device of the exposure equipment, meaning the external purge device can be disassembled after use without altering the structure of the exposure equipment. This allows the external purge device to be reused on multiple identical or different exposure devices. The detachable nature of the external purge device allows for temporary installation when needed, making it suitable for both use during exposure equipment operation and transportation.

[0060] In some embodiments, the gas supply connection unit 100 includes M gas source interface components 110 and M first transmission channels 120, where M ≥ 1, and each first transmission channel 120 corresponds one-to-one with a gas source interface component 110. A first end of each gas source interface component 110 is connected to a gas source 400, and a second end of each gas source interface component 110 is connected to a first end of a first transmission channel 120. The second end of each first transmission channel 120 is connected to a filter connection unit 200. It should be noted that the connections in this application include direct connections and indirect connections; for example, the connection between the second end of the first transmission channel 120 and the filter connection unit 200 can be either a direct or indirect connection. Thus, the gas supply connection unit 100 provides one or more gas paths and can connect to one or more gas sources 400 to provide purging gas.

[0061] In some embodiments, the filter connection unit 200 includes N filter interface assemblies 210, N second transmission channels 220, and N third transmission channels 230, where N ≥ 1. Each second transmission channel 220 and each third transmission channel 230 corresponds one-to-one with a filter interface assembly 210. Each filter interface assembly 210 includes a filter interface component for connection to a filter 500. A first end of a second transmission channel 220 is connected to a second end of a first transmission channel 120. A filter interface assembly 210 is connected between the second end of the second transmission channel 220 and one end of a third transmission channel 230. The second end of the third transmission channel 230 is connected to an adapter unit 300. Thus, the filter connection unit 200 provides one or more gas paths that can be connected to one or more filters 500 to filter purge gas.

[0062] The gas source interface component 110 can be integrated with the first transmission channel 120. For example, the gas source interface component 110 is a port of a pipe, and the first transmission channel 120 is at least a section of the remaining part of the pipe. However, it is not limited to this. The gas source interface component 110 can be separately set from the first transmission channel 120. For example, it is an adapter component that enables the gas source 400 to be sealed and connected to the first transmission channel 120.

[0063] The first transmission channel 120 can be integrated with the second transmission channel 220. For example, the first transmission channel 120 and the second transmission channel 220 are the front end and the rear end of a pipe, respectively. However, it is not limited to this. The first transmission channel 120 and the second transmission channel 220 can be set separately, depending on the specific situation.

[0064] The filter interface assembly 210 includes an inlet and an outlet. The inlet of the filter interface assembly 210 is connected to the second end of the second transmission channel 220, and the outlet of the filter interface assembly 210 is connected to the first end of the third transmission channel 230.

[0065] The second transmission channel 220 may be integrated with the inlet of the filter interface assembly 210. For example, the inlet of the filter interface assembly 210 may be one end of a pipe, and the second transmission channel 220 may be at least one segment of the remaining part of the pipe. However, it is not limited to this. The second transmission channel 220 may be set separately from the filter interface assembly 210, depending on the specific situation.

[0066] The third transmission channel 230 may be integrated with the outlet of the filter interface assembly 210. For example, the outlet of the filter interface assembly 210 may be one end of a pipe, and the third transmission channel 230 may be at least one segment of the remaining part of the pipe. However, it is not limited to this. The third transmission channel 230 may be set separately from the filter interface assembly 210, depending on the specific situation.

[0067] The filter interface component includes two ports disposed between the inlet and outlet of the filter interface assembly 210, which are used to connect the inlet and outlet of the filter 500, respectively. However, it is not limited to this. In some embodiments, the filter interface component may include multiple ports for connecting the filter 500 to connect a multi-port filter 500. In some embodiments, the filter interface component may include multiple ports for connecting the filter 500 to connect multiple filters 500.

[0068] It is understood that when the filter interface component is connected to the filter 500, the purge gas is transmitted from the gas supply connection unit 100 to the second transmission channel 220, and then enters the filter 500 sequentially from the inlet of the filter interface component 210, one port of the filter interface component, and the inlet of the filter 500. After filtration, the filtered purge gas is formed, and then enters the third transmission channel 230 sequentially from the outlet of the filter 500, the other port of the filter interface component, and the outlet of the filter interface component 210. After that, it enters the internal space of the channel device through the adapter unit 300.

[0069] The second transmission channel 220, the inlet of the filter interface component 210, and one port of the filter interface component can be integrated into one unit. For example, one port of the filter interface component can be one end of a pipe, the second transmission channel 220 can be at least one segment of the remaining part of the pipe, and the inlet of the filter interface component 210 can be the part of the pipe located between the second transmission channel 220 and one port of the filter interface component. However, it is not limited to this. The three components can be set separately, or the inlet of the filter interface component 210 and the filter interface component can be integrated into one unit, depending on the specific situation.

[0070] The third transmission channel 230, the outlet of the filter interface assembly 210, and the other port of the filter interface component can be integrated into one unit. For example, the other port of the filter interface component can be one end of a pipe, the third transmission channel 230 can be at least a section of the remaining part of the pipe, and the outlet of the filter interface assembly 210 can be the part of the pipe located between the third transmission channel 230 and the other port of the filter interface component. However, this is not a limitation. The three components can be set separately, or the outlet of the filter interface assembly 210 and the other port of the filter interface component can be integrated into one unit, depending on the specific circumstances.

[0071] The third transmission channel 230 may be integrated with the adapter unit 300. For example, the adapter unit 300 may be one end of a pipe, and the third transmission channel 230 may be at least one segment of the remaining part of the pipe. However, it is not limited to this. The third transmission channel 230 may be set separately from the adapter unit 300, depending on the specific situation.

[0072] Preferably, the gas supply connection unit 100 connects to the gas source 400, wherein the gas source 400 is detachably connected to the gas source interface assembly 110, thereby allowing the gas source 400 to be detached for maintenance or replacement, so that filtered purging gas can be continuously provided through an external purging device. However, it is not limited to this. In some embodiments, the gas supply connection unit 100 connects to the gas source 400, wherein the gas source 400 is fixedly connected to the gas source interface assembly 110.

[0073] When the air source 400 and the air source interface assembly 110 are detachably connected, the external purging device may or may not include the air source 400; when the air source 400 and the air source interface assembly 110 are fixedly connected, the external purging device includes the air source 400.

[0074] When M=1, the second end of the first transmission channel 120 is connected to the first end of the second transmission channel 220; when M≥2, the second ends of the first transmission channel 120 are connected in parallel and then connected to the first end of the second transmission channel 220. However, this is not limited to this. When M=N, the second ends of the first transmission channel 120 can be connected one-to-one with the first ends of the second transmission channel 220. When M>N, the second ends of the first transmission channel 120 can be partially connected in parallel and then connected to the first ends of the second transmission channel 220 to form a corresponding connection. The specific connection depends on the situation.

[0075] When M≥2, M gas sources 400 can be connected to provide purging gas and achieve continuous purging of the lens.

[0076] Preferably, the filter connection unit 200 is connected to the filter 500, including a filter interface component that can be detachably connected to the filter 500. Thus, the filter 500 is detachable for maintenance or replacement to avoid a decrease in the filtration performance of the filter connection unit 200, which would cause the purity of the filtered purge gas to fail to meet the purge requirements of the projection device. However, it is not limited to this. In some embodiments, the filter connection unit 200 is connected to the filter 500, including a filter interface component that is fixedly connected to the filter 500.

[0077] When the filter interface component can be detachably connected to the filter 500, the external purging device may or may not include the filter 500 connected to the filter interface component; when the filter interface component is fixedly connected to the filter 500, the external purging device includes the filter 500 connected to the filter interface component.

[0078] When N=1, the first end of the second transmission channel 220 is connected to the second end of the first transmission channel 120, and the second end of the third transmission channel 230 is connected to the adapter unit 300. When N≥2, the first ends of the second transmission channel 220 are connected in parallel to the second end of the first transmission channel 120, and the second ends of the third transmission channel 230 are connected in parallel to the adapter unit 300. However, this is not limited to the above. When M=N, the first ends of the second transmission channel 220 can be connected one-to-one with the second ends of the first transmission channel 120. When M<N, the first ends of the second transmission channel 220 can be partially connected in parallel to form a corresponding connection with the second ends of the first transmission channel 120. The specific connection depends on the situation.

[0079] When N≥2, multiple filters 500 can be connected to filter the purge gas, avoiding a rapid reduction in the lifespan of the filters 500, insufficient filtration effect, or inability to replace the filters 500, which would prevent continuous purging of the lens.

[0080] The external purging device may also include a pressure regulating unit 600, which is disposed between the gas source interface component 110 and the adapter unit 300. The pressure regulating unit 600 is used to regulate the air pressure on the side of the pressure regulating unit 600 away from the gas source interface component 110, thereby stabilizing the purging gas pressure entering the internal space of the channel device from the external purging device, avoiding the impact of air pressure fluctuations on the purging effect, and also avoiding the waste of purging gas from the gas source 400.

[0081] Preferably, the pressure regulating unit 600 is disposed between the air supply connection unit 100 and the filter connection unit 200. This prevents air pressure fluctuations from causing damage to the filter 500 connected to the filter connection unit 200 or accelerating its lifespan.

[0082] The pressure regulating unit 600 may include an adjustable valve 610, and the air pressure at the rear end of the adjustable valve 610 can be adjusted by adjusting the opening of the adjustable valve 610.

[0083] For example, the adjustable valve 610 is located between the second end of the first transmission channel 120 and the first end of the second transmission channel 220. By adjusting the opening of the adjustable valve 610, the air pressure at the rear end of the adjustable valve 610, i.e., in the second transmission channel 220, can be adjusted. However, it is not limited to this. The specific implementation method of the pressure regulating unit 600 and the position of the pressure regulating unit 600 in the external purging device can be set according to actual needs, as long as the air pressure on the side of the pressure regulating unit 600 away from the air source interface assembly 110 can be adjusted.

[0084] In some embodiments, the pressure regulating unit 600 further includes a pressure sensor 620, which measures the air pressure on the side of the adjustable valve 610 away from the air source interface assembly 110. The pressure regulating unit 600 is configured such that the opening of the adjustable valve 610 can be adjusted based on the air pressure measured by the pressure sensor 620. By measuring the air pressure at the rear end of the adjustable valve 610 using the pressure sensor 620 and then adjusting the opening of the adjustable valve 610 accordingly, the air pressure at the rear end of the adjustable valve 610 can be stabilized, i.e., the pressure regulating unit 600 achieves a pressure stabilization function.

[0085] In some implementations, see Figure 1 and Figure 2 As shown, the external purging device also includes a controller 700, which can output an opening control signal to control the opening of the adjustable valve 610, thereby realizing the air pressure regulation at the back end of the adjustable valve 610.

[0086] In some embodiments, the external purging device or pressure regulating unit 600 includes a pressure sensor 620 and a first display 630, such as an analog gauge or an LED display, showing the air pressure at the rear end of the adjustable valve 610 as measured by the pressure sensor 620, displaying, for example, the air pressure value. The pressure sensor 620 is used to measure the air pressure on the side of the adjustable valve 610 away from the air source interface assembly 110. Thus, when using the external purging device, the user can adjust the opening of the adjustable valve 610 according to the display content of the first display 630 to regulate the air pressure at the rear end of the adjustable valve 610. The adjustment of the opening of the adjustable valve 610 can be done manually or by the controller 700. The method of adjustment by the controller 700 is the same as in the previous embodiments and will not be described again here.

[0087] In some embodiments, the external purging device includes a pressure sensor 620 and a controller 700. The pressure sensor 620 measures the air pressure on the side of the adjustable valve 610 away from the air source interface assembly 110 and generates a pressure signal based on the measured air pressure. The controller 700 acquires the pressure signal and outputs an opening control signal based on the pressure signal. Thus, the controller 700 can use the measured air pressure at the rear end of the adjustable valve 610 to control the opening of the adjustable valve 610, thereby stabilizing the air pressure at the rear end of the adjustable valve 610.

[0088] The gas source 400 connected to the gas supply connection unit 100 may include a purge gas storage device and / or a purge gas preparation device. When the gas source 400 includes a purge gas storage device, the gas supply pressure of the purge gas storage device decreases as the gas storage volume decreases; when the gas source 400 includes a purge gas preparation device, the gas supply pressure is determined by the output terminal of the purge gas preparation device. That is, during the use of the external purging device, the gas supply pressure of the gas source 400 is prone to fluctuations. By setting the pressure regulating unit 600, the pressure fluctuations of the purge gas can be smoothed out, avoiding affecting lens purging, preventing damage to the filter connection unit 200, accelerated reduction of its lifespan, and problems such as excessive consumption of purge gas.

[0089] M≥2, and the second end of the first transmission channel 120 is connected in parallel and then connected to the pressure regulating unit 600. Thus, only one pressure regulating unit 600 is needed to achieve air pressure regulation at the back end of the pressure regulating unit 600.

[0090] Optionally, the gas supply connection unit 100 further includes a first control valve unit 130, which is disposed on the first transmission channel 120 and corresponds one-to-one with the first transmission channel 120.

[0091] When M=1, the flow of air in the gas supply connection unit 100 can be controlled by switching the first control valve unit 130.

[0092] With M≥2, the flow of air in the multiple first transmission channels 120 of the gas supply connection unit 100 can be controlled by controlling the first control valve unit 130. This allows for the switching of multiple air paths or combinations of air paths within the gas supply connection unit 100.

[0093] M≥2, the second ends of the first transmission channel 120 can be connected in parallel. Preferably, the first control valve unit 130 is a one-way valve. Thus, when the second ends of the first transmission channel 120 are connected in parallel, gas backflow between the first transmission channels 120 opened by the first control valve unit 130 can be avoided.

[0094] In some embodiments, the external purging device includes a first control valve unit 130 and a pressure regulating unit 600. Thus, when the air source 400 connected to one of the first transmission channels 120 cannot continue to supply air, the air supply can be switched to another first transmission channel 120 by controlling the switch of the first control valve unit 130; or when the air pressure of the air source 400 connected to one of the first transmission channels 120 is too low to provide sufficient purging gas pressure, the air supply can be supplemented by controlling the switch of the first control valve unit 130 or by opening at least one previously disconnected first transmission channel 120, thus preventing the purging gas supply pressure from being too low or interrupted, affecting lens purging.

[0095] For example, when using an external purging device, if the gas pressure at the rear end of the pressure regulating unit 600 is lower than a preset value, the first control valve unit 130, which was previously closed, is opened to continuously provide sufficient purging gas pressure. Optionally, the first control valve unit 130, which was previously open, is also closed to disconnect the gas source 400 that cannot continue to supply gas or has too low a gas pressure; alternatively, the disconnected gas source 400 that cannot continue to supply gas or has too low a gas pressure is replaced or maintained.

[0096] For example, the pressure regulating unit 600 includes an adjustable valve 610. When using an external purging device, if the air pressure at the downstream end of the pressure regulating unit 600 is still lower than a preset value, the opening of the adjustable valve 610 is first adjusted. When the opening of the adjustable valve 610 is greater than the preset value, for example, when the opening of the adjustable valve 610 is at its maximum, but the air pressure at the downstream end of the pressure regulating unit 600 is still lower than the preset value, the first control valve unit 130, which is in a closed state, is opened to continuously provide sufficient purging gas pressure. Optionally, the first control valve unit 130, which was originally in an open state, is also closed to disconnect the gas source 400 that cannot continue to supply gas or has too low a gas pressure; optionally, the disconnected gas source 400 that cannot continue to supply gas or has too low a gas pressure is replaced or maintained.

[0097] In some embodiments, the external purging device includes a controller 700, which can control the opening and closing of the first control valve unit 130, thereby reducing manual intervention.

[0098] In this embodiment, optionally, the controller 700 can perform the function of the controller 700 used to control the adjustable valve 610 in the pressure regulating unit 600 in the previous embodiment, which will not be described again here.

[0099] For example, the controller 700 can output an opening control signal to control the opening of the adjustable valve 610 and can control the opening and closing of the first control valve unit 130. When using an external purging device, the controller 700 can determine whether the gas pressure at the back end of the adjustable valve 610 is within a preset range based on the display content of the first display 630 in the pressure regulating unit 600. When the gas pressure at the back end of the adjustable valve 610 is low, the opening of the adjustable valve 610 is adjusted first. When the opening of the adjustable valve 610 corresponding to the opening control signal is greater than the preset value, for example, the opening of the adjustable valve 610 is already at its maximum, but the gas pressure at the back end of the adjustable valve 610 is still lower than the preset value, it is usually because the gas source 400 is not supplying enough gas. The controller 700 can open the first control valve unit 130, which is in a closed state, to provide sufficient purging gas pressure. Optionally, the controller 700 can also close the first control valve unit 130, which was originally in the open state, after opening the first control valve unit 130, which is in the closed state.

[0100] For example, the controller 700 can acquire a pressure signal and output an opening control signal based on the pressure signal to control the opening of the adjustable valve 610. The controller 700 can open the first control valve unit 130, which is in a closed state, when the gas pressure at the downstream end of the adjustable valve 610 corresponding to the pressure signal is lower than a preset value, and the opening of the adjustable valve 610 corresponding to the opening control signal is greater than the preset value, thereby providing sufficient purge gas pressure. Optionally, the controller 700 can also close the first control valve unit 130, which was previously in an open state, after opening the first control valve unit 130, which is in a closed state.

[0101] Optionally, the external purging device also includes a life monitoring unit 800, which monitors the life parameters of the filter 500 connected to the filter connection unit 200. This prevents the filter 500 from exceeding its lifespan, thus avoiding the filtered purge gas from failing to meet the requirements of the purge lens, such as reduced purity or the introduction of new contaminants.

[0102] In some embodiments, the life monitoring unit 800 includes a timer, which is used to record at least the cumulative operating time of the filter 500 connected to the filter connection unit 200.

[0103] The timer records the cumulative working time of the filter 500 to determine its lifespan, making lifespan monitoring simpler and reducing the manufacturing cost of external purging devices.

[0104] It should be noted that the lifespan monitoring unit 800 includes a timer, which is used at least to record the cumulative operating time of the filter 500 connected to the filter connection unit 200, but is not limited to this. The lifespan monitoring unit 800 can also be a flow monitoring device or a gas purity monitoring device, depending on the specific situation. If the lifespan monitoring unit 800 is a flow monitoring device, it can monitor the lifespan of the filter 500 by monitoring the total flow rate of the gas filtered by the filter 500; if the lifespan monitoring unit 800 is a gas purity monitoring device, it can monitor the lifespan of the filter 500 by monitoring the purity of the gas filtered by the filter 500.

[0105] The lifespan monitoring unit is used to monitor the lifespan parameters of the filter 500 connected to the filter interface component, including monitoring the lifespan parameters of the filter 500 in use, but not limited to this. It can also monitor the lifespan parameters of all filters 500 connected to the filter connection unit 200, depending on the specific situation.

[0106] With N≥2, the first end of the second transmission channel 220 is connected in parallel and then connected to the gas supply unit 100. Preferably, it is connected to the gas supply connection unit 100 via the pressure regulating unit 600. Thus, by setting only one pressure regulating unit 600, the gas pressure adjustment at the downstream end of the pressure regulating unit 600 can be realized.

[0107] With N≥2, the second end of the third transmission channel 230 is connected in parallel and then connected to the adapter unit 300. This allows one adapter unit 300 to connect to multiple gas paths providing filtered purge gas, enabling an external purge device to continuously provide filtered purge gas.

[0108] Optionally, the filter connection unit 200 further includes a second control valve unit 240 and a third control valve unit 250. The second control valve unit 240 is disposed on the second transmission channel 220 and corresponds one-to-one with the second transmission channel 220. The third control valve unit 250 is disposed on the third transmission channel 230 and corresponds one-to-one with the third transmission channel 230.

[0109] N=1, the flow of air in the filter connection unit 200 can be controlled by switching the second control valve unit 240 or the third control valve unit 250.

[0110] With N≥2, the flow of air through the multiple filters 500 in the filter connection unit 200 can be controlled by controlling the second control valve unit 240 and the third control valve unit 250. This allows for the switching of different filters 500.

[0111] N≥2, the second ends of the third transmission channel 230 can be connected in parallel. Preferably, the third control valve unit 250 includes a check valve, thereby preventing gas backflow between the third transmission channels 230 that are opened when the second ends of the third transmission channels 230 are connected in parallel.

[0112] In some embodiments, the external purging device includes a second control valve unit 240, a third control valve unit 250, and a life monitoring unit 800. Thus, when the life monitoring unit 800 detects that a filter 500 in use has reached the end of its lifespan, it can open the second control valve unit 240 and the third control valve unit 250 corresponding to the filter 500 that has not yet reached the end of its lifespan, and close the second control valve unit 240 and the third control valve unit 250 corresponding to the filter 500 that has reached the end of its lifespan. This achieves gas path switching for the purging gas providing filtration, preventing insufficient purity or interruption of the purging gas, which could affect lens purging.

[0113] It is understandable that when the lifespan parameter exceeds the preset range, the corresponding filter will reach the end of its lifespan in 500 days.

[0114] Optionally, the life monitoring unit 800 also includes a second display, the content of which may include life parameters, or a result indicating whether the filter 500 has reached the end of its life based on the life parameters. Thus, when using an external purging device, the second control valve unit 240 and the third control valve unit 250 can be opened or closed according to the displayed content.

[0115] In some embodiments, the external purging device includes a controller 700, which can control the switching of the second control valve unit 240 and the third control valve unit 250, thereby reducing manual intervention.

[0116] In this embodiment, optionally, the controller 700 can perform the function of the controller 700 for controlling the valve 610 with adjustable opening in the pressure regulating unit 600 mentioned above, or it can perform the function of the controller 700 for controlling the first control valve unit 130 mentioned above, which will not be described again here.

[0117] For example, the life monitoring unit 800 can generate a life signal based on the life parameters. The controller 700 is configured to acquire the life signal and control the switching of the second control valve unit 240 and the third control valve unit 250 based on the life parameters corresponding to the life signal. For example, when the life parameters corresponding to the life signal exceed a preset range, the controller 700 can determine that the filter 500 corresponding to the life signal has reached the end of its life. The controller 700 can open the second control valve unit 240 and the third control valve unit 250 connected to the filter 500 that has not reached the end of its life, and close the second control valve unit 240 and the third control valve unit 250 connected to the filter 500 that has reached the end of its life.

[0118] In some implementations, the purge gas pressure to be filtered is high, and the second control valve unit 240 and the third control valve unit 250 connected to multiple filters 500 can be opened simultaneously to improve the efficiency of providing filtered purge gas.

[0119] This application also proposes a semiconductor manufacturing system including the external purging devices disclosed above. The semiconductor manufacturing system may include a central controller to implement the functions of the controller 700 in the preceding embodiments. It is understood that the external purging devices may or may not include the controller 700. The central controller can control multiple external purging devices and can also control other semiconductor manufacturing equipment.

[0120] The terms "first," "second," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined with "first," "second," etc., may explicitly or implicitly include one or more of that feature. In the description of this application, "multiple" means two or more, unless otherwise explicitly specified.

[0121] In this application, unless otherwise expressly specified and limited, the terms "assembly," "connection," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0122] In the description of this specification, references to terms such as "some embodiments," "exemplarily," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of this application. The illustrative expressions of the above terms in this specification do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in a suitable manner in any one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0123] Although embodiments of this application have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting this application. Those skilled in the art can make changes, modifications, substitutions and variations to the above embodiments within the scope of this application. Therefore, any changes or modifications made in accordance with the claims and description of this application should fall within the scope of this patent application.

Claims

1. A semiconductor manufacturing system comprising an exposure apparatus, the exposure apparatus including a projection device, a channel device, and a built-in purge device, the projection device including at least one lens, the channel device having an internal space for accommodating at least one of the lenses in the projection device, and the built-in purge device for introducing a purge gas into the internal space, characterized in that, The semiconductor manufacturing system further includes an external purging device, which includes: Gas supply connection unit, used to connect to a gas source to provide purging gas; The adapter unit is detachably connected to the channel device; A filter connection unit is connected between the gas supply connection unit and the adapter unit. The filter connection unit is used to connect a filter to filter the purge gas. The filtered purge gas is used to replace the gas in the internal space. The gas supply connection unit includes M gas source interface components and M first transmission channels, M≥2. The first transmission channels correspond one-to-one with the gas source interface components. The first end of the gas source interface component is used to connect to the gas source. The second end of the gas source interface component is connected to the first end of the first transmission channel. The second end of the first transmission channel is connected to the filter connection unit. The filter connection unit includes N filter interface components, N second transmission channels, and N third transmission channels, where N ≥ 2. Each second transmission channel and each third transmission channel corresponds one-to-one with a filter interface component. Each filter interface component includes a filter interface part for connecting to the filter. The first end of the second transmission channel is connected to the second end of the first transmission channel. The filter interface component is connected between the second end of the second transmission channel and the first end of the third transmission channel. The second end of the third transmission channel is connected to the adapter unit. The gas supply connection unit further includes a first control valve unit, a second control valve unit, and a third control valve unit. The first control valve unit is disposed on the first transmission channel and corresponds one-to-one with the first transmission channel. The second control valve unit is disposed on the second transmission channel and corresponds one-to-one with the second transmission channel. The third control valve unit is disposed on the third transmission channel and corresponds one-to-one with the third transmission channel. The first control valve unit and the third control valve unit are one-way valves, and the second control valve unit is a switch valve.

2. The semiconductor manufacturing system according to claim 1, characterized in that, The external purging device further includes a pressure regulating unit, which is disposed between the air source interface component and the adapter unit. The pressure regulating unit is used to adjust the air pressure on the side of the pressure regulating unit away from the air source interface component.

3. The semiconductor manufacturing system according to claim 2, characterized in that, The voltage regulating unit is located between the second end of the first transmission channel and the first end of the second transmission channel.

4. The semiconductor manufacturing system according to claim 3, characterized in that, The pressure regulating unit includes a valve with an adjustable opening.

5. The semiconductor manufacturing system according to claim 4, characterized in that, The second ends of M of the first transmission channels are connected in parallel and then connected to the valve with adjustable opening.

6. The semiconductor manufacturing system according to claim 5, characterized in that, The pressure regulating unit further includes a pressure sensor for measuring the air pressure on the side of the adjustable valve away from the air source interface assembly. The pressure regulating unit is configured such that the opening of the adjustable valve can be adjusted according to the air pressure measured by the pressure sensor.

7. The semiconductor manufacturing system according to claim 5, characterized in that, The external purging device also includes a controller, which can output an opening control signal to control the opening of the adjustable valve.

8. The semiconductor manufacturing system according to claim 7, characterized in that, The external purging device also includes a pressure sensor, which measures the air pressure on the side of the adjustable valve away from the air source interface assembly and generates a pressure signal based on the measured air pressure. The controller can acquire the pressure signal and output the opening control signal based on the pressure signal.

9. The semiconductor manufacturing system according to claim 4 or 5, characterized in that, The pressure regulating unit includes a pressure sensor for measuring the air pressure on the side of the adjustable valve away from the air source interface assembly. The pressure regulating unit also includes a first display that can display the air pressure measured by the pressure sensor.

10. The semiconductor manufacturing system according to claim 1, characterized in that, The external purging device also includes a life monitoring unit, which is used to monitor the life parameters of the filter connected to the filter interface component.

11. The semiconductor manufacturing system according to claim 10, characterized in that, The first end of the second transmission channel after parallel connection is connected to the gas supply connection unit, and the second end of the third transmission channel after parallel connection is connected to the adapter unit.

12. The semiconductor manufacturing system according to claim 11, characterized in that, The external purging device also includes a controller, which is capable of controlling the switching of the second control valve unit.

13. The semiconductor manufacturing system according to claim 12, characterized in that, The life monitoring unit can generate a life signal based on the life parameters, and the controller can acquire the life signal and control the opening and closing of the second control valve unit based on the life parameters.

14. The semiconductor manufacturing system according to claim 10 or 13, characterized in that, The lifespan monitoring unit includes a gas purity monitoring device, which monitors the lifespan of the filter by monitoring the purity of the purge gas after filtration.

15. The semiconductor manufacturing system according to claim 1, characterized in that, The external purging device further includes an air source connected to the first end of the air source interface assembly, and / or A filter connected to the filter interface component.

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