Clamping and positioning mechanism for mask

Abstract

The invention relates to a clamping and positioning mechanism for a mask plate, comprising: a positioning frame comprising two first frame bodies and two second frame bodies which are connected and define a positioning space; the clamping and positioning assembly comprises a plurality of clamping and positioning devices, and one of the two first frame bodies and one of the two second frame bodies are provided with the clamping and positioning devices correspondingly; the first moving assembly comprises a first driving device and a first mounting frame which are in transmission connection; the second moving assembly comprises a second driving device and a second mounting frame which are in transmission connection, the second mounting frame and the first mounting frame are oppositely arranged, and clamping and positioning devices are arranged on the first mounting frame and the second mounting frame; the clamping and positioning device comprises a base and a positioning piece, the positioning piece is connected to the base, and a clamping space is formed between the positioning piece and the base. The clamping and positioning mechanism for the mask plate is easy and convenient to operate, and rapid clamping of the mask plate is facilitated.

Description

Technical Field

[0001] The present disclosure relates to the technical field of mask processing, and in particular, to a clamping and positioning mechanism for a mask. Background Art

[0002] The mask is an indispensable component in the photolithography process. The quality and accuracy of the mask directly affect the performance and reliability of the product. Therefore, testing the mask is a key step to ensure product quality. Before testing the mask, it is usually necessary to use a positioning mechanism to clamp the mask. In the related art, the positioning mechanism relies on manual clamping, and the operation is cumbersome, which is not conducive to rapid clamping, resulting in low efficiency of mask testing. Summary of the invention

[0003] The purpose of the present disclosure is to provide a clamping and positioning mechanism for a mask plate, which is easy to operate and is conducive to fast clamping of the mask plate.

[0004] In order to achieve the above-mentioned purpose, the present disclosure provides a clamping and positioning mechanism for a mask, the clamping and positioning mechanism comprising: a positioning frame, the positioning frame comprising two first frames and two second frames arranged opposite to each other, the first frames are connected to the second frames and enclose a positioning space; a clamping and positioning assembly, the clamping and positioning assembly comprising a plurality of clamping and positioning devices, one of the two first frames and one of the two second frames are respectively provided with the clamping and positioning devices; a first moving assembly, the first moving assembly comprising a first driving device and a first mounting frame, the first mounting frame is parallel to and opposite to the other of the two second frames, the first driving device is connected to the first mounting frame The first frame is connected to the frame for driving the first mounting frame to move along the extension direction of the first frame, and the first mounting frame is provided with the clamping and positioning device; and a second moving component, the second moving component includes a second driving device and a second mounting frame, the second mounting frame is arranged opposite to the first mounting frame and is slidably connected to one of the two second frames, the second driving device is connected to the second mounting frame for driving the second mounting frame to move along the extension direction of the second frame, and the second mounting frame is provided with the clamping and positioning device; the clamping and positioning device includes a base and a positioning piece, the positioning piece is connected to the base and a clamping space is formed between the positioning piece and the base for the mask to be inserted.

[0005] Optionally, the clamping and positioning device includes an adjusting member, the base is provided with a threaded hole, one end of the adjusting member is connected to the positioning member, and the other end is penetrated through the threaded hole and threadedly connected to the threaded hole.

[0006] Optionally, the clamping and positioning device includes an elastic member, the positioning member is provided with a mounting hole and a stop flange, the stop flange protrudes away from the inner wall of the mounting hole in a radial direction of the mounting hole, the adjusting member includes a rod-shaped body and a positioning flange, the positioning flange protrudes away from the outer peripheral wall of the rod-shaped body in a radial direction of the rod-shaped body, the elastic member is sleeved on the rod-shaped body, and one end of the elastic member abuts against the stop flange and the other end abuts against the base, the elastic force of the elastic member is used to push the positioning member until the stop flange abuts against the positioning flange.

[0007] Optionally, the stop flange divides the mounting hole into a first hole portion and a second hole portion arranged coaxially, the clamping and positioning device includes a first bearing, the first bearing is arranged in the first hole portion and is used to rotatably connect the positioning member and the rod-shaped body, and the stop flange and the positioning flange are respectively abutted against the first bearing.

[0008] Optionally, the clamping and positioning device includes a second bearing, which is arranged in the second hole portion and is used to rotatably connect the positioning member and the rod-shaped body, and the elastic member and the stop flange are respectively in contact with the second bearing.

[0009] Optionally, the adjusting member is provided with an operating groove, and the operating groove extends from the end surface of the rod-shaped body toward the base.

[0010] Optionally, the base is provided with an opening, which extends from the outer surface of the base to be connected with the threaded hole and the extension direction of the opening intersects with the extension direction of the threaded hole. The clamping and positioning device includes a locking piece, which is passed through the opening and tightly abuts against the adjusting piece to limit the rotation of the adjusting piece.

[0011] Optionally, the positioning member includes a columnar body and a clamping flange, the clamping flange protrudes radially of the columnar body, and the clamping space is formed between the clamping flange and the base.

[0012] Optionally, a guide slope is provided on the side of the clamping flange facing the base, and the guide slope is inclined from the outer peripheral wall of the clamping flange toward the base.

[0013] Optionally, the base includes a seat body and a flexible plate, the seat body is provided with a groove, the flexible plate is detachably embedded in the groove, the surface of the flexible plate is flush with the seat body, and the clamping space is formed between the flexible plate and the clamping flange.

[0014] Optionally, the clamping and positioning device includes an adjusting handle, the adjusting handle includes a connected handle portion and a screw rod, the first mounting frame, the second mounting frame, the first frame body, and the second frame body are provided with a slide groove, a nut is slidably arranged in the slide groove, the base is provided with a connecting hole, the screw rod is passed through the connecting hole and is threadedly connected to the corresponding nut.

[0015] Optionally, two clamping and positioning devices are provided at a position of the second mounting frame close to the second driving device, and the two clamping and positioning devices share the same base. One of the two positioning members in the two clamping and positioning devices is arranged opposite to the positioning member in the clamping and positioning device on the second frame, and the other is arranged opposite to the positioning member in the clamping and positioning device on the first frame.

[0016] Optionally, both ends of the first mounting frame are slidably connected to the two first frames via first sliding seats respectively, the first driving device is constructed as a cylinder, the cylinder is mounted on the first frame, and the piston rod of the cylinder is parallel to the first frame and is transmission-connected to the first sliding seat.

[0017] Optionally, the second mounting frame is slidably connected to the second frame via a second sliding seat, the second driving device is constructed as a cylinder, the cylinder is mounted on the first frame, and the piston rod of the cylinder is parallel to the second frame and is transmission-connected to the second sliding seat.

[0018] Through the above technical scheme, when the clamping and positioning mechanism for the mask provided by the present invention is in use, the first driving device drives the first mounting frame to move along the extension direction of the first frame, and the second driving device drives the second mounting frame to move along the extension direction of the second frame. Since the first mounting frame and the second mounting frame are both provided with clamping and positioning devices, the first mounting frame and the second mounting frame move, and the clamping and positioning devices thereon are driven to move, so as to clamp the mask and limit the position between the multiple clamping and positioning devices. In addition, since the clamping and positioning device includes a base and a positioning piece, the positioning piece is connected to the base and a clamping space for inserting the mask is formed between the positioning piece and the base, and the base is used to support and place the mask. When the first movable component and the second movable component cooperate with each other, that is, the first mounting frame moves along the extension direction of the first frame, and the second mounting frame moves along the extension direction of the second frame, the respective clamping and positioning devices are driven to move and approach the mask, so that each edge of the mask is inserted into the clamping space of the corresponding clamping and positioning device. In summary, the mask can be fully positioned through the cooperation of the first movable component and the second movable component, and clamped in place at one time. The operation is simple and reduces manual operation, which is conducive to quick clamping of the mask, thereby helping to improve the detection efficiency of the mask.

[0019] Other features and advantages of the present disclosure will be described in detail in the following detailed description. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] The accompanying drawings are used to provide a further understanding of the present disclosure and constitute a part of the specification. Together with the following specific embodiments, they are used to explain the present disclosure but do not constitute a limitation of the present disclosure. In the accompanying drawings: Figure 1 is a structural schematic diagram of a clamping and positioning mechanism for a mask provided by an exemplary embodiment of the present disclosure; Figure 2 is another structural schematic diagram of a clamping and positioning mechanism for a mask provided by an exemplary embodiment of the present disclosure; Figure 3 is a structural schematic diagram of a clamping and positioning device of a clamping and positioning mechanism for a mask provided by an exemplary embodiment of the present disclosure; Figure 4 is a cross-sectional view of a clamping and positioning device of a clamping and positioning mechanism for a mask provided by an exemplary embodiment of the present disclosure; Figure 5 yes Figure 1 A partial enlarged view of point A in the middle.

[0021] Description of Reference Numerals 1-positioning frame; 10-slide groove; 11-first frame; 12-second frame; 2-clamping positioning device; 20-clamping space; 21-base; 210-seat body; 211-threaded hole; 212-opening hole; 213-groove; 214-connecting hole; 22-positioning member; 221-mounting hole; 2211-first hole part; 2212-second hole part; 222-stop flange; 223-columnar body; 224-clamping flange; 2241-with guiding inclined surface; 23-adjusting member; 23 1-rod-shaped body; 232-positioning flange; 233-operating groove; 24-elastic member; 25-first bearing; 26-second bearing; 27-adjusting handle; 271-handle portion; 272-screw; 28-flexible plate; 3-first moving assembly; 31-first driving device; 32-first mounting frame; 33-first sliding seat; 34-first mounting plate; 4-second moving assembly; 41-second driving device; 42-second mounting frame; 43-second sliding seat; 44-second mounting plate; 5-mask. DETAILED DESCRIPTION

[0022] The specific implementation of the present disclosure is described in detail below in conjunction with the accompanying drawings. It should be understood that the specific implementation described herein is only used to illustrate and explain the present disclosure, and is not used to limit the present disclosure.

[0023] In the present disclosure, unless otherwise specified, directional words such as "inside" and "outside" refer to "inside" and "outside" relative to the corresponding component's own contour. In addition, the terms "first", "second", etc. used in the present disclosure are to distinguish one element from another and do not have order and importance. In addition, in the following description, when referring to the drawings, unless otherwise explained, the same figure numbers in different drawings represent the same or similar elements. The above definitions are only used to explain and illustrate the present disclosure and should not be understood as limitations on the present disclosure.

[0024] The present disclosure provides a clamping and positioning mechanism for a mask plate, referring to Figures 1 to 5 As shown in, the clamping and positioning mechanism includes: a positioning frame 1, the positioning frame 1 includes two first frames 11 and two second frames 12 arranged opposite to each other, the first frame 11 is connected to the second frame 12 and encloses a positioning space; a clamping and positioning assembly, the clamping and positioning assembly includes a plurality of clamping and positioning devices 2, one of the two first frames 11 and one of the two second frames 12 are respectively provided with a clamping and positioning device 2; a first moving assembly 3, the first moving assembly 3 includes a first driving device 31 and a first mounting frame 32, the first mounting frame 32 is parallel to and opposite to the other of the two second frames 12, the first driving device 31 is in transmission connection with the first mounting frame 32 to drive the first mounting frame 32 moves along the extension direction of the first frame 11, and a clamping and positioning device 2 is arranged on the first mounting frame 32; and a second moving component 4, the second moving component 4 includes a second driving device 41 and a second mounting frame 42, the second mounting frame 42 is arranged opposite to the first mounting frame 32 and is slidably connected to one of the two second frames 12, the second driving device 41 is transmission-connected with the second mounting frame 42 to drive the second mounting frame 42 to move along the extension direction of the second frame 12, and a clamping and positioning device 2 is arranged on the second mounting frame 42; the clamping and positioning device 2 includes a base 21 and a positioning member 22, the positioning member 22 is connected to the base 21 and a clamping space 20 is formed between the positioning member 22 and the base 21 for the mask 5 to be inserted.

[0025] Through the above technical scheme, when the clamping and positioning mechanism for the mask provided by the present invention is in use, the first driving device 31 drives the first mounting frame 32 to move along the extension direction of the first frame 11, and the second driving device 41 drives the second mounting frame 42 to move along the extension direction of the second frame 12. Since the first mounting frame 32 and the second mounting frame 42 are both provided with clamping and positioning devices 2, the first mounting frame 32 and the second mounting frame 42 move, and the clamping and positioning devices 2 thereon are driven to move, so as to clamp the mask 5 and limit it between the multiple clamping and positioning devices 2. In addition, since the clamping and positioning device 2 includes a base 21 and a positioning member 22, the positioning member 22 is connected to the base 21 and a clamping space 20 for inserting the mask 5 is formed between the base 21 and the base 21, and the base 21 is used to support and place the mask 5. When the first movable component 3 and the second movable component 4 cooperate with each other, that is, the first mounting frame 32 moves along the extension direction of the first frame 11, and the second mounting frame 42 moves along the extension direction of the second frame 12, the respective clamping and positioning devices 2 are driven to move and move closer to the mask 5, so that each side of the mask 5 is inserted into the clamping space 20 of the corresponding clamping and positioning device 2. In summary, through the cooperation of the first movable component 3 and the second movable component 4, the mask 5 can be fully positioned and clamped in place at one time. The operation is simple and reduces manual operation, which is conducive to quick clamping of the mask 5, thereby improving the detection efficiency of the mask 5.

[0026] In the present disclosure, the number of the clamping and positioning devices 2 provided on the first mounting frame 32 can be multiple and arranged at intervals. Similarly, the number of the clamping and positioning devices 2 provided on the second mounting frame 42 can also be multiple and arranged at intervals. Exemplarily, the clamping and positioning devices 2 on the first mounting frame 32 and the clamping and positioning devices 2 on the second mounting frame 42 can both be set to two or more, and the present disclosure does not make specific restrictions on this. In this way, the area of ​​the clamping and positioning mechanism and the mask plate 5 is increased, thereby improving the stability of the mask plate 5 after clamping.

[0027] In the exemplary embodiments provided in the present disclosure, reference is made to Figure 3 and Figure 4 As shown in , the clamping and positioning device 2 may include an adjusting member 23, and the base 21 is provided with a threaded hole 211. One end of the adjusting member 23 is connected to the positioning member 22, and the other end is inserted into the threaded hole 211 and threadedly connected to the threaded hole 211. In the above technical solution, the adjusting member 23 can be constructed as a bolt, and the positioning member 22 is connected to the base 21 through the adjusting member 23. Since the adjusting member 23 is threadedly connected to the threaded hole 211 on the base 21, the distance between the positioning member 22 and the base 21 can be adjusted by rotating the adjusting member 23. That is to say, the size of the clamping space 20 can be adjusted by rotating the adjusting member 23 to meet the clamping requirements of mask plates 5 of different thicknesses, thereby expanding the scope of use.

[0028] In the exemplary embodiments provided in the present disclosure, reference is made to Figure 4 As shown in, the clamping and positioning device 2 may include an elastic member 24, the positioning member 22 is provided with a mounting hole 221 and a stop flange 222, the stop flange 222 protrudes away from the inner wall of the mounting hole 221 along the radial direction of the mounting hole 221, the adjusting member 23 includes a rod-shaped body 231 and a positioning flange 232, the positioning flange 232 protrudes away from the outer peripheral wall of the rod-shaped body 231 along the radial direction of the rod-shaped body 231, the elastic member 24 is sleeved on the rod-shaped body 231, and one end of the elastic member 24 abuts against the stop flange 222 and the other end abuts against the base 21, the elastic force of the elastic member 24 is used to push the positioning member 22 until the stop flange 222 abuts against the positioning flange 232. In the above technical solution, the adjusting member 23 is inserted into the mounting hole 221, and the elastic force of the elastic member 24 pushes the positioning member 22 to abut against the stop flange 222 and the positioning flange 232, so that the adjusting member 23 is stably connected to the positioning member 22, wherein the elastic member 24 can be constructed as a spring or an elastic rubber sleeve, and the present disclosure does not make any specific limitations on this. In the present disclosure, by providing an elastic member 24, the positioning member 22 can float up and down along the axial direction of the rod-shaped body 231 under the elastic force of the elastic member 24, thereby elastically clamping the mask 5, realizing adaptive clamping, and avoiding damage to the mask 5 due to hard clamping. In addition, since the positioning member 22 can float up and down along the axial direction of the rod-shaped body 231, and the elastic force of the elastic member 24 is used to clamp the mask 5, after the size of the clamping space 20 is adjusted once by the adjusting member 23, the clamping and positioning requirements of the mask 5 with different thicknesses can be met at the same time, the frequency of adjustment is reduced, and the convenience of use is improved. When the stop flange 222 and the positioning flange 232 abut against each other, the positioning member 22 is stably mounted on the adjusting member 23 under the action of the mutual abutment between the stop flange 222 and the positioning flange 232, thereby preventing the positioning member 22 from detaching from the adjusting member 23, thereby ensuring the stability of the clamping and positioning device 2 during use.

[0029] In the exemplary embodiments provided in the present disclosure, reference is made to Figure 4As shown in the figure, the stop flange 222 divides the mounting hole 221 into a first hole portion 2211 and a second hole portion 2212 arranged coaxially, the clamping and positioning device 2 may include a first bearing 25, the first bearing 25 is arranged in the first hole portion 2211 and is used to rotate the connecting positioning member 22 and the rod-shaped body 231, and the stop flange 222 and the positioning flange 232 are respectively abutted against the first bearing 25. By setting the first bearing 25, the positioning member 22 and the rod-shaped body 231 are rotatably connected so that the positioning member 22 can rotate relative to the adjusting member 23. In this way, when the first driving device 31 drives the first mounting frame 32 to move along the extension direction of the first frame 11 or the second driving device 41 drives the second mounting frame 42 to move along the extension direction of the second frame 12, the clamping positioning device 2 on the first mounting frame 32 and the clamping positioning device 2 on the second mounting frame 42 are driven to roll along the mask plate 5, so that rolling friction is formed between the clamping positioning device 2 and the mask plate 5, thereby reducing the friction force between the clamping positioning device 2 and the mask plate 5, reducing friction loss, and extending the service life of the positioning member 22.

[0030] In the exemplary embodiments provided in the present disclosure, reference is made to Figure 4 As shown in , the clamping and positioning device 2 may include a second bearing 26, which is arranged in the second hole portion 2212 and is used to rotatably connect the positioning member 22 and the rod-shaped body 231, and the elastic member 24 and the stop flange 222 are respectively in contact with the second bearing 26. By providing the second bearing 26, the elastic member 24 can be in contact with the inner ring of the second bearing 26. Since the inner ring of the second bearing 26 is fixedly connected to the adjusting member 23, the positioning member 22 rotates relative to the adjusting member 23 along with the outer ring of the second bearing 26. Therefore, when the positioning member 22 rotates, it will not be affected by the elastic member 24, thereby ensuring the smoothness of the rotation of the positioning member 22.

[0031] In the present disclosure, a limiting annular groove may be provided on the outer peripheral wall of the rod-shaped body 231 , and a retaining spring (not shown in the figure) may be clamped in the limiting annular groove. The retaining spring is used to limit the second bearing 26 to the rod-shaped body 231 to ensure the reliability of the installation of the second bearing 26 .

[0032] In the exemplary embodiments provided in the present disclosure, reference is made to Figure 4 As shown in , the adjusting member 23 may be provided with an operating groove 233, which extends from the end surface of the rod-shaped body 231 toward the base 21. The operating groove 233 is used to cooperate with an operating tool such as a wrench, and the adjusting member 23 can be driven to rotate by operating the operating tool such as a wrench, thereby adjusting the size of the clamping space 20, thereby improving the convenience of operation.

[0033] It should be noted that an operating protrusion can also be provided on the adjusting member 23, the operating protrusion protruding from the rod-shaped body 231 along the radial direction of the rod-shaped body 231, and the adjusting member 23 can be rotated by holding or clamping the operating protrusion with a tool, thereby adjusting the size of the clamping space 20, thereby improving the convenience of operation.

[0034] In the exemplary embodiments provided in the present disclosure, reference is made to Figure 3 and Figure 4 As shown in , the base 21 may be provided with an opening 212, the opening 212 extends from the outer surface of the base 21 to communicate with the threaded hole 211, and the extension direction of the opening 212 intersects with the extension direction of the threaded hole 211, and the clamping and positioning device 2 includes a locking member (not shown in the figure), which is passed through the opening 212 and abuts against the adjusting member 23 to limit the rotation of the adjusting member 23. In the above technical solution, the opening 212 can be configured as a threaded hole 211, and the locking member can be configured as a set screw, and the locking member is threadedly connected with the opening 212. After adjusting the spacing between the positioning member 22 and the base 21, the locking member is tightened so that the locking member abuts against the adjusting member 23 to limit the rotation of the adjusting member 23, thereby locking the adjusting member 23, avoiding accidental rotation of the adjusting member 23 during use, and improving the reliability of the clamping and positioning device 2 during use.

[0035] In the exemplary embodiments provided in the present disclosure, reference is made to Figure 3 and Figure 4 As shown in , the positioning member 22 may include a columnar body 223 and a clamping flange 224, the clamping flange 224 protrudes along the radial direction of the columnar body 223, and a clamping space 20 is formed between the clamping flange 224 and the base 21. By such a configuration, the positioning member 22 is ensured to have good strength, and when the mask 5 is clamped, the mask 5 is clamped between the clamping flange 224 and the base 21, at which time, the outer side surface of the mask 5 abuts against the outer peripheral surface of the columnar body 223, thereby ensuring the reliability of the clamping of the mask 5, avoiding the positional displacement of the mask 5 during the detection process, and improving the accuracy of the detection.

[0036] In the exemplary embodiments provided in the present disclosure, reference is made to Figure 4 As shown in , the side of the clamping flange 224 facing the base 21 may be provided with a guiding slope 2241, and the guiding slope 2241 is inclined from the outer peripheral wall of the clamping flange 224 toward the base 21. The guiding slope 2241 plays a guiding role, so that the mask 5 can be inserted into the clamping space 20 more smoothly, which is conducive to improving the efficiency of clamping.

[0037] In the exemplary embodiments provided in the present disclosure, reference is made to Figure 3As shown in , the base 21 may include a base body 210 and a flexible board 28, the base body 210 is provided with a groove 213, the flexible board 28 is detachably embedded in the groove 213, the surface of the flexible board 28 is flush with the base body 210, and a clamping space 20 is formed between the flexible board 28 and the clamping flange 224. In the above technical solution, the thickness of the flexible board 28 can be set to be consistent with the depth of the groove 213, and mounting holes 221 are correspondingly set on the bottom walls of the flexible board 28 and the groove 213. The flexible board 28 is mounted in the groove 213 by fasteners, so that the surface of the flexible board 28 is flush with the base body 210, and the flexible board 28 has a buffering effect. In this way, when clamping, the mask 5 can collide with the flexible board 28 to avoid scratches or wear on the surface of the mask 5 due to hard contact. Similarly, the positioning member 22 can also be made of a flexible material, such as peek material, so as to ensure the integrity of the mask 5. In this embodiment, the openings 212 described above are disposed on the seat body 210 to facilitate the arrangement of the openings 212 .

[0038] In the exemplary embodiments provided in the present disclosure, reference is made to Figure 3 and Figure 4 As shown in , the clamping and positioning device 2 may include an adjustment handle 27, and the adjustment handle 27 includes a connected handle portion 271 and a screw 272. The first mounting frame 32, the second mounting frame 42, the first frame 11, and the second frame 12 are provided with a slide groove 10, and a nut is slidably provided in the slide groove 10. The base 21 is provided with a connecting hole 214, and the screw 272 is penetrated in the connecting hole 214 and is threadedly connected with the corresponding nut. Through such a setting, when the screw 272 is fastened with the nut, the base 21 is locked. When the screw 272 is loosened, the screw 272 moves along the corresponding slide groove 10 with the corresponding nut. When it moves to the desired position, the screw 272 is fastened with the nut again, and the position adjustment of the clamping and positioning device 2 can be completed, thereby realizing the adjustment of the spacing between the clamping and positioning devices 2, so as to adapt to the clamping of mask plates of different sizes.

[0039] In the exemplary embodiments provided in the present disclosure, reference is made to Figure 1 , Figure 2 and Figure 5As shown in , two clamping and positioning devices 2 may be provided at the position of the second mounting frame 42 close to the second driving device 41, and the two clamping and positioning devices 2 share the same base 21. One of the two positioning members 22 in the two clamping and positioning devices 2 is arranged opposite to the positioning member 22 in the clamping and positioning device 2 on the second frame 12, and the other is arranged opposite to the positioning member 22 in the clamping and positioning device 2 on the first frame 11. By such an arrangement, two groups of clamping forces with perpendicular clamping directions are formed, so that two adjacent sides of the rectangular mask 5 can be pressed simultaneously. In this embodiment, the base 21 and the flexible plate 28 can both be set to an L-shaped structure, and the two clamping and positioning devices 2 can share the same flexible plate 28. The notch of the flexible plate 28 faces the inner side of the positioning frame 1, and the two clamping and positioning devices 2 are respectively arranged at both ends of the flexible plate 28. In this way, when the second mounting frame 42 moves along the second frame body 12, the two clamping and positioning devices 2 can respectively contact the two adjacent side surfaces of the rectangular mask plate 5, so as to clamp and position the rectangular mask plate 5 in two different directions, thereby improving the compactness of the mechanism and enhancing the convenience of clamping.

[0040] In the exemplary embodiments provided in the present disclosure, reference is made to Figure 1 , Figure 2 and Figure 5 As shown in the figure, the two ends of the first mounting frame 32 can be slidably connected to the two first frames 11 through the first sliding seat 33 respectively. The first driving device 31 is constructed as a cylinder, which is installed on the first frame 11. The piston rod of the cylinder is parallel to the first frame 11 and is transmission-connected to the first sliding seat 33. In the above technical scheme, the first sliding seat 33 is slidably arranged on the first frame 11, and the first mounting frame 32 is fixedly connected to the first sliding seat 33. Here, a first mounting plate 34 and a fastener can be set. The fastener is passed through the first mounting plate 34 and is threadedly connected to the nut in the slide groove 10 of the first frame 11. The cylinder is fixedly connected to the first mounting plate 34. In this way, when the fastener is fastened to the nut in the slide groove 10 of the first frame 11, the cylinder is locked and installed on the first frame 11. When the fastener is loosened, the cylinder is moved, and the cylinder drives the first mounting plate 34 to move along the first frame 11 to the desired position, and then locked by tightening the fastener, thereby realizing the adjustment of the position of the first moving component 3 to adapt to the clamping requirements of mask plates 5 of different sizes.

[0041] In the exemplary embodiments provided in the present disclosure, reference is made to Figure 5As shown in, the second mounting frame 42 can be slidably connected to the second frame 12 through the second sliding seat 43, and the second driving device 41 is constructed as a cylinder, which is installed on the first frame 11, and the piston rod of the cylinder is parallel to the second frame 12 and is transmission-connected with the second sliding seat 43. In the above technical solution, the second sliding seat 43 is slidably arranged on the second frame 12, and the second mounting frame 42 is fixedly connected to the second sliding seat 43. Here, a second mounting plate 44 and a fastener can be provided, the fastener is penetrated through the second mounting plate 44 and is threadedly connected to the nut in the slide groove 10 of the second frame 12, and the cylinder is fixedly connected to the second mounting plate 44. In this way, when the fastener is fastened to the nut in the slide groove 10 of the first frame, the cylinder is locked and installed on the second frame 12. When the fastener is loosened, the cylinder is moved, and the cylinder drives the second mounting plate 44 to move to the desired position along the second frame 12, and then locked by tightening the fastener, so as to achieve the adjustment of the position of the second moving component 4, so as to adapt to the clamping requirements of mask plates 5 of different sizes, and expand the scope of use.

[0042] It should be noted that in order to improve versatility and facilitate later replacement, the first mounting frame 32, the second mounting frame 42, the first frame 11 and the second frame 12 can all be made of aluminum profiles, and the aluminum profiles are pre-installed with nuts that can slide along the extension direction of the aluminum profiles, which are easy to disassemble and assemble, easy to adjust, and more flexible to use.

[0043] refer to Figures 1 to 5 As shown in , the use process of the clamping and positioning mechanism for the mask plate 5 provided by the present disclosure will be described in detail below.

[0044] The positions of the first moving assembly 3 and the second moving assembly 4 are adjusted according to the length and width of the mask 5, so that the placement space enclosed by the clamping and positioning device 2 set on the first frame 11 and the clamping and positioning device 2 set on the second frame 12 is adapted to the size of the mask 5. According to the thickness of the mask 5, the distance between the base 21 and the positioning member 22, that is, the size of the clamping space 20, is adjusted. Then, the mask 5 is placed so that the mask 5 is located in the placement space, and the side edges of the mask 5 overlap the bases 21 of the respective corresponding clamping and positioning devices 2. After that, the first driving device 31 and the second driving device 41 are started to drive the first mounting frame 32 and the second mounting frame 42 to move in the direction close to the mask 5, so that the mask 5 The corresponding side edges are inserted into the clamping spaces 20 of the corresponding clamping and positioning devices 2. With the continuous driving of the first driving device 31 and the second driving device 41, the corresponding side edges of the mask 5 abut against the columnar bodies 223 of the corresponding clamping and positioning devices 2. At this point, the clamping of the mask 5 is completed, which is stable and reliable. When the mask 5 needs to be removed or replaced, the first driving device 31 and the second driving device 41 are started to move in the opposite direction to the above to drive the first mounting frame 32 and the second mounting frame 42 away from the mask 5. After that, the mask 5 can be directly taken out. The operation is simple and reduces manual participation, which is conducive to the rapid clamping or disassembly of the mask 5, and further helps to improve the detection efficiency of the mask 5.

[0045] The preferred embodiments of the present disclosure are described in detail above in conjunction with the accompanying drawings; however, the present disclosure is not limited to the specific details in the above embodiments. Within the technical concept of the present disclosure, a variety of simple modifications can be made to the technical solution of the present disclosure, and these simple modifications all fall within the protection scope of the present disclosure.

[0046] It should also be noted that the various specific technical features described in the above specific embodiments can be combined in any suitable manner without contradiction. In order to avoid unnecessary repetition, the present disclosure will not further describe various possible combinations.

[0047] In addition, various embodiments of the present disclosure may be arbitrarily combined, and as long as they do not violate the concept of the present disclosure, they should also be regarded as the contents disclosed by the present disclosure.

Claims

1. A clamping and positioning mechanism for a mask, characterized in that: The clamping and positioning mechanism comprises: A positioning frame, the positioning frame comprising two first frames arranged opposite to each other and two second frames arranged opposite to each other, the first frames are connected to the second frames and enclose a positioning space; A clamping and positioning assembly, the clamping and positioning assembly comprising a plurality of clamping and positioning devices, one of the two first frames and one of the two second frames are respectively provided with the clamping and positioning devices; a first moving assembly, the first moving assembly comprising a first driving device and a first mounting frame, the first mounting frame being arranged parallel to and opposite to the other of the two second frames, the first driving device being drivingly connected to the first mounting frame to drive the first mounting frame to move along the extension direction of the first frame, the first mounting frame being provided with the clamping and positioning device; and a second moving assembly, the second moving assembly comprising a second driving device and a second mounting frame, the second mounting frame being arranged opposite to the first mounting frame and being slidably connected to one of the two second frames, the second driving device being transmission-connected to the second mounting frame to drive the second mounting frame to move along the extension direction of the second frame, the second mounting frame being provided with the clamping and positioning device; The clamping and positioning device comprises a base and a positioning member. The positioning member is connected to the base and a clamping space is formed between the positioning member and the base for inserting a mask.

2. The clamping and positioning mechanism for a mask according to claim 1, characterized in that: The clamping and positioning device comprises an adjusting member, the base is provided with a threaded hole, one end of the adjusting member is connected to the positioning member, and the other end is penetrated into the threaded hole and threadedly connected to the threaded hole.

3. The clamping and positioning mechanism for a mask according to claim 2, characterized in that: The clamping and positioning device includes an elastic member, the positioning member is provided with a mounting hole and a stop flange, the stop flange protrudes away from the inner wall of the mounting hole in the radial direction of the mounting hole, the adjusting member includes a rod-shaped body and a positioning flange, the positioning flange protrudes away from the outer peripheral wall of the rod-shaped body in the radial direction of the rod-shaped body, the elastic member is sleeved on the rod-shaped body, and one end of the elastic member abuts against the stop flange and the other end abuts against the base, the elastic force of the elastic member is used to push the positioning member until the stop flange abuts against the positioning flange.

4. The clamping and positioning mechanism for a mask according to claim 3, characterized in that: The stop flange divides the mounting hole into a first hole portion and a second hole portion which are coaxially arranged, and the clamping and positioning device includes a first bearing which is arranged in the first hole portion and is used to rotationally connect the positioning member and the rod-shaped body, and the stop flange and the positioning flange are respectively abutted against the first bearing.

5. The clamping and positioning mechanism for a mask according to claim 4, characterized in that: The clamping and positioning device comprises a second bearing, which is arranged in the second hole portion and is used to rotatably connect the positioning member and the rod-shaped body, and the elastic member and the stop flange are respectively in contact with the second bearing.

6. The clamping and positioning mechanism for a mask according to claim 3, characterized in that: The adjusting member is provided with an operating groove, and the operating groove extends from the end surface of the rod-shaped body toward the base.

7. The clamping and positioning mechanism for a mask according to claim 2, characterized in that: The base is provided with an opening, which extends from the outer surface of the base to be connected with the threaded hole and the extension direction of the opening intersects with the extension direction of the threaded hole. The clamping and positioning device includes a locking piece, which is passed through the opening and pressed against the adjusting piece to limit the rotation of the adjusting piece.

8. The clamping and positioning mechanism for a mask according to any one of claims 1 to 7, characterized in that: The positioning member comprises a columnar body and a clamping flange, wherein the clamping flange protrudes in a radial direction of the columnar body, and the clamping space is formed between the clamping flange and the base.

9. The clamping and positioning mechanism for a mask according to claim 8, characterized in that: A guide slope is provided on the side of the clamping flange facing the base, and the guide slope is inclined from the outer peripheral wall of the clamping flange toward the base.

10. The clamping and positioning mechanism for a mask according to claim 8, characterized in that: The base includes a seat body and a flexible plate, the seat body is provided with a groove, the flexible plate is detachably embedded in the groove, the surface of the flexible plate is flush with the seat body, and the clamping space is formed between the flexible plate and the clamping flange.

11. The clamping and positioning mechanism for a mask according to claim 1, characterized in that: The clamping and positioning device includes an adjustment handle, which includes a connected handle portion and a screw rod. The first mounting frame, the second mounting frame, the first frame body, and the second frame body are provided with slide grooves, in which nuts are slidably arranged. The base is provided with a connecting hole, and the screw rod is inserted into the connecting hole and is threadedly connected with the corresponding nut.

12. The clamping and positioning mechanism for a mask according to claim 1, characterized in that: Two clamping and positioning devices are provided at positions of the second mounting frame close to the second driving device, and the two clamping and positioning devices share the same base. One of the two positioning members in the two clamping and positioning devices is arranged opposite to the positioning member in the clamping and positioning device on the second frame, and the other is arranged opposite to the positioning member in the clamping and positioning device on the first frame.

13. The clamping and positioning mechanism for a mask according to claim 1, characterized in that: The two ends of the first mounting frame are slidably connected to the two first frames through first sliding seats respectively. The first driving device is constructed as a cylinder, which is installed on the first frame. The piston rod of the cylinder is parallel to the first frame and is transmission-connected to the first sliding seat.

14. The clamping and positioning mechanism for a mask according to claim 1, characterized in that: The second mounting frame is slidably connected to the second frame through a second sliding seat. The second driving device is constructed as a cylinder, which is installed on the first frame. The piston rod of the cylinder is parallel to the second frame and is transmission-connected to the second sliding seat.

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