Rotating disc type silicon crystal perovskite lamination equipment and efficient feeding and discharging method thereof

Abstract

The invention discloses rotating disc type silicon crystal perovskite lamination equipment and an efficient feeding and discharging method thereof, and relates to the technical field of semiconductor material preparation. The coating device comprises a feeding mechanism, a coating assembly, a rotating mechanism, a discharging mechanism and two material taking and placing devices, the feeding mechanism and the discharging mechanism are fixedly connected through the coating assembly, the rotating mechanism is arranged between the feeding mechanism and the discharging mechanism, and the two material taking and placing devices are arranged on the right side of the feeding mechanism and the right side of the discharging mechanism respectively. By reasonably planning the internal layout and the operation process of the equipment, seamless connection between two key processes of coating and feeding and discharging is realized; when a part of the silicon wafers are just in the coating process, the other part of the silicon wafers are in a loading and unloading state, and the silicon wafers and the loading and unloading state are parallel and do not influence each other; the feeding and discharging speed and frequency can be dynamically adjusted according to the actual working condition, and it is ensured that the optimal working state is maintained in the whole production process.

Description

Technical Field

[0001] The invention belongs to the technical field of semiconductor material preparation, and in particular relates to a turntable silicon crystal perovskite stacking device and an efficient loading and unloading method thereof. Background Art

[0002] In recent years, perovskite materials have attracted much attention in the research of new solar cells due to their excellent optoelectronic properties. In order to meet the needs of large-scale industrial production, higher requirements are placed on related production equipment, especially in terms of improving production efficiency. Although traditional turntable coating equipment can meet the basic production process requirements to a certain extent, there is still an obvious efficiency bottleneck in the loading and unloading links, that is, since the loading and unloading operations take a long time, the overall production cycle is limited. Therefore, how to break through this limitation has become one of the problems that the industry needs to solve urgently. Summary of the invention

[0003] The purpose of the present invention is to provide a turntable silicon crystal perovskite stacking equipment and an efficient loading and unloading method thereof, so as to solve the problem that although the existing turntable coating equipment can meet the basic production process requirements to a certain extent, there is still an obvious efficiency bottleneck in the loading and unloading links, that is, because the loading and unloading operations take a long time, the overall production rhythm is limited.

[0004] In order to solve the above technical problems, the present invention is achieved through the following technical solutions:

[0005] The present invention is a turntable silicon crystal perovskite stacking device and an efficient loading and unloading method thereof, comprising a feeding mechanism, a coating assembly, a rotating mechanism, a discharging mechanism and two material taking and placing devices, wherein the feeding mechanism and the discharging mechanism are fixedly connected through the coating assembly, the rotating mechanism is arranged between the feeding mechanism and the discharging mechanism, and the two material taking and placing devices are respectively arranged on the right side of the feeding mechanism and the discharging mechanism;

[0006] The rotating mechanism includes a base, a rotating shaft, a workbench and a support frame, a servo motor is arranged in the base, the base at the output end of the servo motor is fixedly connected to the rotating shaft, the lower end of the rotating shaft is rotatably connected to the base, the upper end of the rotating shaft is fixedly connected to the workbench, four sample stages are fixed in a circular array on the upper surface of the workbench, one of the sample stages is located directly below the coating component; a plurality of ball grooves are provided around the lower surface of the workbench, balls are rotatably connected in the ball grooves, the support frame is composed of a plurality of support legs and a support ring, an annular track groove is provided on the upper surface of the support ring, and the support ring is sleeved on the outer periphery of the rotating shaft; mask plates are provided on both sides of the upper surface of the sample stage;

[0007] The feeding mechanism and the discharging mechanism have the same structure, the feeding mechanism includes a feeding conveyor line, and the discharging mechanism includes a discharging conveyor line;

[0008] The coating assembly includes a coating frame, a first driving device, a movable plate, a second driving device and a coating head. The coating frame is fixedly connected to two opposite surfaces of a feeding mechanism and a discharging mechanism. The coating frame is a "U"-shaped plate structure. The first driving device is arranged in the middle of the coating frame. A plurality of guide columns are fixed on the lower surface of the coating frame. The output end of the first driving device is fixedly connected to the middle of the movable plate. A plurality of guide holes are arranged on one surface of the movable plate, and the guide holes are nested with the guide columns. A second driving device is arranged on one side of the lower surface of the movable plate, and a coating head is arranged at the output end of the second driving device.

[0009] Furthermore, the shape and size of the annular track groove are adapted to the ball bearings, and the ball bearings and the annular track groove are in sliding fit.

[0010] Furthermore, the feeding mechanism and the discharging mechanism are symmetrically arranged on both sides of the rotating mechanism, and the two material picking and placing devices are arranged on both sides of the rotating mechanism.

[0011] Furthermore, the material picking and placing device includes a manipulator, and a picking and placing portion and an image acquisition device arranged on the manipulator, the manipulator is used to drive the picking and placing portion and the image acquisition device to move, the image acquisition device is used to obtain the position of the crystalline silicon located on the feeding conveyor line, and the picking and placing portion is used to pick and place the crystalline silicon.

[0012] The efficient loading and unloading method of the turntable silicon crystal perovskite stacking equipment comprises the following steps:

[0013] S1. First, start the feeding mechanism and the discharging mechanism, and convey the material to be coated through the feeding mechanism;

[0014] S2. Grab the material to be coated from the feeding conveyor line through the material picking and placing device, and then place it on the sample table closest to the feeding mechanism;

[0015] S4, start the servo motor to drive the workbench to rotate until the sample table carrying the material rotates to the bottom of the coating assembly;

[0016] S5, start the first driving device to drive the coating head to move down to a suitable position, start the second driving device to drive the coating head to coat the material; at the same time, the material picking and placing device repeats the action in step S2;

[0017] S6, after repeating the action in step S4, repeat the action in step S5; at the same time, another material picking and placing device grabs the coated material and places it on the discharging conveyor line for transmission;

[0018] S7, repeat the above steps S2 to S6 until all the coating materials are completely coated.

[0019] The present invention has the following beneficial effects:

[0020] The present invention realizes seamless connection between the two key processes of coating and loading and unloading by rationally planning the internal layout and operation flow of the equipment; when one part of the silicon wafers is in the coating process, the other part of the silicon wafers is in the loading and unloading state, and the two are in parallel and do not affect each other; the loading and unloading speed and frequency can be dynamically adjusted according to the actual working conditions to ensure that the best working state is maintained throughout the production process.

[0021] Of course, any product implementing the present invention does not necessarily need to achieve all of the advantages described above at the same time. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the accompanying drawings required for describing the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other accompanying drawings can be obtained based on these accompanying drawings without paying creative work.

[0023] Figure 1 It is a schematic diagram of the overall structure of the turntable silicon crystal perovskite stacking device;

[0024] Figure 2 A top view of a rotating disk silicon perovskite stacking device;

[0025] Figure 3 This is the front view of the turntable silicon crystal perovskite stacking device.

[0026] In the accompanying drawings, the components represented by the reference numerals are listed as follows:

[0027] 1. Feeding mechanism; 2. Coating assembly; 3. Workbench; 4. Discharging mechanism; 5. Material picking and placing device; 101. Feeding conveyor line; 201. Coating rack; 2011. Guide column; 202. First driving device; 203. Movable plate; 204. Second driving device; 205. Coating head; 301. Base; 302. Rotating shaft; 303. Workbench; 304. Support frame; 3041. Support leg; 3042. Support ring; 305. Sample table; 3051. Mask plate; 401. Discharging conveyor line. DETAILED DESCRIPTION

[0028] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0029] In the description of the present invention, it should be understood that the terms "upper", "middle", "outer", "inner" and the like indicating directions or positional relationships are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the components or elements referred to must have a specific direction, be constructed and operated in a specific direction, and therefore should not be understood as limiting the present invention.

[0030] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "provided with", "connected", etc. should be understood in a broad sense. For example, "connected" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0031] See also Figure 1-Figure 3 As shown, the present invention is a turntable silicon crystal perovskite stacking device, comprising a feeding mechanism 1, a coating assembly 2, a rotating mechanism 3, a discharging mechanism 4 and two material taking and placing devices 5, the feeding mechanism 1 and the discharging mechanism 4 are fixedly connected through the coating assembly 2, the rotating mechanism 3 is arranged between the feeding mechanism 1 and the discharging mechanism 4, and the two material taking and placing devices 5 are respectively arranged on the right side of the feeding mechanism 1 and the discharging mechanism 4; the feeding mechanism 1 and the discharging mechanism 4 are symmetrically arranged on both sides of the rotating mechanism 3, and the two material taking and placing devices 5 are arranged on both sides of the rotating mechanism 3;

[0032] The rotating mechanism 3 includes a base 301, a rotating shaft 302, a workbench 303 and a support frame 304. A servo motor is arranged in the base 301. The base 301 at the output end of the servo motor is fixedly connected to the rotating shaft 302. The lower end of the rotating shaft 302 is rotatably connected to the base 301. The upper end of the rotating shaft 302 is fixedly connected to the workbench 303. Four sample tables 305 are fixed on the upper surface of the workbench 303 in a circular array. A plurality of ball grooves are provided around the lower surface of the workbench 303. The ball grooves are rotatably connected to the base 301. The support frame 304 is connected to a ball bearing, and is composed of a plurality of support legs 3041 and a support ring 3042. An annular track groove is provided on the upper surface of the support ring 3042. The shape and size of the annular track groove are adapted to the ball bearing, and the ball bearing and the annular track groove are slidably matched. The support ring 3042 is sleeved on the outer periphery of the rotating shaft 302. Mask plates 3051 are provided on both sides of the upper surface of the sample stage 305. The mask plates 3051 and the upper surface of the material to be coated on the sample stage 305 are on the same horizontal plane.

[0033] The feeding mechanism 1 and the discharging mechanism 4 have the same structure. The feeding mechanism 1 includes a feeding conveying line 101, and the discharging mechanism 4 includes a discharging conveying line 401;

[0034] The coating assembly 2 includes a coating frame 201, a first driving device 202, a movable plate 203, a second driving device 204 and a coating head 205. The coating frame 201 is fixedly connected to the two opposite surfaces of the feeding mechanism 1 and the discharging mechanism 4. The coating frame 201 is a "U"-shaped plate structure. The first driving device 202 is arranged in the middle of the coating frame 201. A plurality of guide columns 2011 are fixed on the lower surface of the coating frame 201. The output end of the first driving device 202 is fixedly connected to the middle of the movable plate 203. A plurality of guide holes are arranged on one surface of the movable plate 203, and the guide holes are nested with the guide columns 2011. A second driving device 204 is arranged on one side of the lower surface of the movable plate 203. A coating head 205 is arranged at the output end of the second driving device 204. The coating head 205 starts coating. The coating starting point and end point of the coating head 205 are respectively on the mask plate 3051 arranged on the upper surface of the sample stage 305.

[0035] In one embodiment, one of the sample stages 305 is located directly below the coating assembly 2 .

[0036] In one embodiment, the material picking and placing device 5 includes a manipulator, and a picking and placing part and an image acquisition device arranged on the manipulator. The manipulator is used to drive the picking and placing part and the image acquisition device to move. The image acquisition device is used to obtain the position of the crystalline silicon located on the feeding conveyor line 101, and the picking and placing part is used to pick and place the crystalline silicon.

[0037] The efficient loading and unloading method of the turntable silicon crystal perovskite stacking equipment comprises the following steps:

[0038] S1, firstly, start the feeding mechanism 1 and the discharging mechanism 4, and convey the material to be coated through the feeding mechanism 1;

[0039] S2, grab the material to be coated from the feeding conveyor line 101 through the material picking and placing device 5, and then place it on the sample table 305 closest to the feeding mechanism 1;

[0040] S4, start the servo motor to drive the workbench 303 to rotate until the sample table 305 carrying the material rotates to the bottom of the coating assembly 2;

[0041] S5, start the first driving device 202 to drive the coating head 205 to move down to a suitable position, start the second driving device 204 to drive the coating head 205 to coat the material; at the same time, the material taking and placing device 5 repeats the action in step S2;

[0042] S6, after repeating the action in step S4, repeat the action in step S5; at the same time, another material picking and placing device 5 grabs the coated material and places it on the discharging conveyor line 401 for transmission;

[0043] S7, repeat the above steps S2 to S6 until all the coating materials are completely coated.

[0044] It needs further explanation:

[0045] Flower basket type loading and unloading structure design: the silicon wafers to be coated are neatly arranged through the belt transmission of the feeding conveyor line 101, and then loaded into the basket in sequence for use in the next process; the flower basket type loading and unloading structure consists of several small units that can be operated independently, and each small unit is responsible for loading or unloading a certain number of silicon wafers; when one of the units is performing loading and unloading operations, the other units can still continue the normal coating operation, thus avoiding the problem of overall efficiency reduction due to delays in a single link.

[0046] Optimized operation process: Based on the traditional turntable equipment, an area dedicated to loading and unloading operations is added, and a precise mechanical linkage device is used to ensure a smooth transition between the two; in this way, at any time, some silicon wafers are in the coating state, while others are in the loading and unloading preparation stage, forming a virtuous circle.

[0047] Application of intelligent control technology: Using modern information technology, such as the Internet of Things and big data analysis, a complete production management system is built; this system can not only realize real-time monitoring of each operation link, but also automatically adjust equipment operating parameters according to preset parameters to achieve the best production effect.

[0048] In the description of this specification, the description with reference to the terms "one embodiment", "example", "specific example", etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0049] The preferred embodiments of the present invention disclosed above are only used to help explain the present invention. The preferred embodiments do not describe all the details in detail, nor do they limit the invention to the specific implementation methods described. Obviously, many modifications and changes can be made according to the content of this specification. This specification selects and specifically describes these embodiments in order to better explain the principles and practical applications of the present invention, so that those skilled in the art can understand and use the present invention well. The present invention is limited only by the claims and their full scope and equivalents.

Claims

1. A turntable silicon crystal perovskite stacking device, comprising a feeding mechanism (1), a coating assembly (2), a rotating mechanism (3), a discharging mechanism 4) and two material taking and placing devices (5), characterized in that: The feeding mechanism (1) and the discharging mechanism (4) are fixedly connected via a coating assembly (2); the rotating mechanism (3) is arranged between the feeding mechanism (1) and the discharging mechanism (4); and the two material taking and placing devices (5) are respectively arranged on the right side of the feeding mechanism (1) and the discharging mechanism (4); The rotating mechanism (3) comprises a base (301), a rotating shaft (302), a workbench (303) and a support frame (304); a servo motor is arranged in the base (301); the base (301) at the output end of the servo motor is fixedly connected to the rotating shaft (302); the lower end of the rotating shaft (302) is rotatably connected to the base (301); the upper end of the rotating shaft (302) is fixedly connected to the workbench (303); the upper surface of the workbench (303) is in a circular array Four sample tables (305) are fixed, a plurality of ball grooves are provided around the lower surface of the workbench (303), balls are rotatably connected in the ball grooves, the support frame (304) is composed of a plurality of support legs (3041) and a support ring (3042), an annular track groove is provided on the upper surface of the support ring (3042), and the support ring (3042) is sleeved on the outer periphery of the rotating shaft (302); mask plates (3051) are provided on both sides of the upper surface of the sample table (305); The feeding mechanism (1) and the discharging mechanism (4) have the same structure, the feeding mechanism (1) comprises a feeding conveying line (101), and the discharging mechanism (4) comprises a discharging conveying line (401); The coating assembly (2) comprises a coating frame (201), a first driving device (202), a movable plate (203), a second driving device (204) and a coating head (205); the coating frame (201) is fixedly connected to two surfaces opposite to the feeding mechanism (1) and the discharging mechanism (4); the coating frame (201) is a "U"-shaped plate structure; the first driving device (202) is arranged in the middle of the coating frame (201); a plurality of guide columns (2011) are fixed on the lower surface of the coating frame (201); the output end of the first driving device (202) is fixedly connected to the middle of the movable plate (203); a plurality of guide holes are arranged on one surface of the movable plate (203); the guide holes and the guide columns (2011) are nested and matched; a second driving device (204) is arranged on one side of the lower surface of the movable plate (203); and a coating head (205) is arranged at the output end of the second driving device (204).

2. The turntable silicon crystal perovskite stacking device according to claim 1, characterized in that: The shape and size of the annular track groove are adapted to the ball bearings, and the ball bearings are slidably matched with the annular track groove.

3. The turntable silicon crystal perovskite stacking device according to claim 1, characterized in that: The feeding mechanism (1) and the discharging mechanism (4) are symmetrically arranged on both sides of the rotating mechanism (3), and the two material taking and placing devices (5) are arranged on both sides of the rotating mechanism (3).

4. The turntable silicon crystal perovskite stacking device according to claim 1, characterized in that: One of the sample stages (305) is located directly below the coating assembly (2).

5. The turntable silicon crystal perovskite stacking device according to claim 1, characterized in that: The material picking and placing device (5) comprises a manipulator, and a picking and placing portion and an image acquisition device arranged on the manipulator, the manipulator is used to drive the picking and placing portion and the image acquisition device to move, the image acquisition device is used to obtain the position of the crystalline silicon located on the feeding conveyor line (101), and the picking and placing portion is used to pick and place the crystalline silicon.

6. The efficient loading and unloading method of the turntable silicon crystal perovskite stacking equipment according to claim 1, using the equipment according to any one of claims 1-5, characterized in that: The following steps are involved: S1. First, the feeding mechanism (1) and the discharging mechanism (4) are turned on, and the material to be coated is conveyed through the feeding mechanism (1); S2, grabbing the material to be coated from the feeding conveyor line (101) through the material picking and placing device (5), and then placing it on the sample table (305) closest to the feeding mechanism (1); S4, starting the servo motor to drive the workbench (303) to rotate until the sample table (305) carrying the material rotates to the bottom of the coating assembly (2); S5, start the first driving device (202) to drive the coating head (205) to move down to a suitable position, start the second driving device (204) to drive the coating head (205) to coat the material; at the same time, the material taking and placing device (5) repeats the action in step S2; S6, after repeating the action in step S4, repeat the action in step S5; at the same time, another material picking and placing device (5) grabs the coated material and places it on the discharging conveyor line (401) for transmission; S7, repeat the above steps S2 to S6 until all the coating materials are completely coated.

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