Surface treatment equipment and surface treatment method for double-sided coating

By designing a surface treatment equipment for double-sided plating, the two sides of the workpiece to be plated are electroplating or electrochemical plating, which solves the problems of low efficiency and unstable quality in the prior art, and achieves efficient and high-quality chip carrier surface treatment.

CN119392337APending Publication Date: 2025-02-07NANJING CHIYUN TECH DEV CO LTD
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Patent Information

Application Number
CN202411523356.3
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Filing Date
2024-10-30
Publication Date
2025-02-07

AI Technical Summary

Technical Problem

The surface treatment process of existing chip carriers is low in efficiency and unstable in quality, and the deprotection glue has a significant impact on the plating layer, affecting the reliability and adaptability of the chip carrier.

Method used

Design a surface treatment equipment for double-sided coating, adopting a compression module and a driving structure to close the opening, realize the electroplating or electrochemical plating on both sides of the workpiece to be plated, and support the combination of plating layers of different plating types and thicknesses.

Benefits of technology

The combination of coatings of different types and thicknesses on both sides of the workpiece to be plated is realized, which improves efficiency and quality, reduces costs, and solves the chip carrier's demand for reliability and adaptability.

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Abstract

The invention discloses surface treatment equipment and a surface treatment method for double-sided plating, and relates to the technical field of chips, the surface treatment equipment comprises a surface treatment main box, the surface treatment main box is provided with a first main groove and a second main groove, and a partition plate between the first main groove and the second main groove is provided with an opening; the first main groove or the second main groove is provided with a pressing module and a driving structure, the pressing module is located at the telescopic end of the driving structure and used for bearing a to-be-plated workpiece, and the driving structure drives the pressing module to move so that the to-be-plated workpiece can seal the opening. According to the surface treatment equipment and the surface treatment method for the double-sided coating, the efficiency and the quality are improved, and the cost is reduced.
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Description

Technical Field

[0001] The present invention relates to the technical field of chips, and in particular to a surface treatment device and a surface treatment method for a double-sided coating. Background Art

[0002] In recent years, with the vigorous development of the domestic electronics industry, many technological breakthroughs have been made, resulting in higher and higher integration of electronic packaging products and more and more temperature gradients in micro-assembly, which means that some chip carriers need to carry higher reliability and product adaptability.

[0003] According to current user needs, the thickness of the upper and lower surfaces of the chip carrier is required to be different, and some users also require that the plating types of the upper and lower surfaces are inconsistent.

[0004] The most commonly used method is to plate one side first, apply glue for protection, and then plate the other side. This process is not only inefficient, but also the removal of the protective glue will have a significant impact on the coating, which ultimately affects the quality of the chip carrier. It can be said to be expensive and poor. Summary of the invention

[0005] The purpose of the present invention is to provide a double-sided coating surface treatment device and a surface treatment method, which improves efficiency and quality and reduces costs.

[0006] To achieve the above object, the present invention provides the following solutions:

[0007] The present invention provides a surface treatment device for double-sided coating, comprising: a surface treatment main box, wherein the surface treatment main box is provided with a first main groove and a second main groove, the partition between the first main groove and the second main groove is provided with an opening, the first main groove or the second main groove is provided with a clamping module and a driving structure, the clamping module is located at the telescopic end of the driving structure, the clamping module is used to carry a workpiece to be plated, and the driving structure drives the clamping module to move so that the workpiece to be plated closes the opening.

[0008] Preferably, a sealing groove is provided on the partition, a sealing ring is provided in the sealing groove, and the sealing ring is located between the partition and the workpiece to be plated.

[0009] Preferably, the surface treatment main box is provided with a guide shaft, and the clamping module is slidably connected to the guide shaft.

[0010] Preferably, the surface treatment main box is also provided with a first relay tank and a second relay tank, the first relay tank is used to fill the first tank liquid, the second relay tank is used to fill the second tank liquid, the first relay tank is connected to the first main tank, and the second relay tank is connected to the second main tank.

[0011] Preferably, the first bath liquid is the same as or different from the second bath liquid.

[0012] Preferably, the surface treatment main box is further provided with a first recovery tank and a second recovery tank, the first recovery tank is communicated with the first main tank, and the second recovery tank is communicated with the second main tank.

[0013] Preferably, the surface treatment main box is also provided with a first pure water tank and a second pure water tank, the first pure water tank and the second pure water tank are used to hold pure water, the first pure water tank is connected to the first main tank, and the second pure water tank is connected to the second main tank.

[0014] Preferably, the clamping module is provided with hollow holes, and the hollow holes correspond to the workpieces to be plated.

[0015] Preferably, the driving structure is an electromagnetic push rod.

[0016] The present invention also discloses a surface treatment method using the surface treatment equipment of the double-sided coating, comprising the following working conditions:

[0017] Working condition 1: when both sides of the workpiece to be plated are electroplated, both sides of the workpiece to be plated can be plated simultaneously;

[0018] Working condition 2: when both sides of the workpiece to be plated are subjected to chemical plating, both sides of the workpiece to be plated can be plated simultaneously;

[0019] Working condition three, when one side of the workpiece to be plated is electroplated and the other side of the workpiece to be plated is chemically plated, electroplating or chemical plating is performed first, and then chemical plating or electroplating is performed.

[0020] Compared with the prior art, the present invention has achieved the following technical effects:

[0021] The present invention can be used to plate two surfaces at the same time. For example, different plating types, electroplated metal layers of different thicknesses, different chemical plating layers, electroplated metal layers combined with chemical plating layers and the like can be achieved on both sides of the workpiece to be plated. No interference with each other can be achieved, and even any combination can be achieved. This greatly solves the bottleneck currently faced by chip carriers, improves efficiency and quality, and reduces costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0023] Figure 1 Axonometric measurement of the surface treatment device for double-sided coating of the present invention Figure 1;

[0024] Figure 2 Axonometric measurement of the surface treatment device for double-sided coating of the present invention Figure 2 ;

[0025] Figure 3 An exploded view of a surface treatment device for double-sided coating of the present invention;

[0026] Figure 4 A top view of the surface treatment equipment for double-sided coating of the present invention;

[0027] Figure 5 for Figure 4 AA section view;

[0028] Figure 6 for Figure 4 BB cross-sectional view;

[0029] Figure 7 for Figure 4 CC section view;

[0030] Figure 8 for Figure 4 DD-section view;

[0031] Fig. 9 for Figure 6 A local enlarged view of point E;

[0032] Fig.10 for Figure 6 FF-section view;

[0033] Fig.11 for Figure 6 A local enlarged view of point G;

[0034] In the figure: 1-surface treatment main box, 2-first main tank, 3-second main tank, 4-clamping module, 5-driving structure, 6-workpiece to be plated, 7-partition, 8-opening, 9-sealing ring, 10-guide shaft, 11-first relay tank, 12-second relay tank, 13-first recovery tank, 14-second recovery tank, 15-first pure water tank, 16-second pure water tank. DETAILED DESCRIPTION

[0035] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0036] The purpose of the present invention is to provide a double-sided coating surface treatment device and a surface treatment method, which improves efficiency and quality and reduces costs.

[0037] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the present invention is further described in detail below with reference to the accompanying drawings and specific embodiments.

[0038] Embodiment 1

[0039] like Figures 1 to 11 As shown, this embodiment provides a double-sided coated surface treatment device, including: a surface treatment main box 1, the surface treatment main box 1 is provided with a first main groove 2 and a second main groove 3, the partition 7 between the first main groove 2 and the second main groove 3 is provided with an opening 8, the first main groove 2 or the second main groove 3 is provided with a clamping module 4 and a driving structure 5, the fixed end of the driving structure 5 is installed in the first main groove 2 or the second main groove 3 by screws, for example, the clamping module 4 and the driving structure 5 are both arranged in the first main groove 2, or the clamping module 4 and the driving structure 5 are both arranged in the second main groove 3, the clamping module 4 is located at the telescopic end of the driving structure 5, the clamping module 4 is used to carry the workpiece 6 to be plated, and the driving structure 5 drives the clamping module 4 to move so that the workpiece 6 to be plated closes the opening 8.

[0040] Specifically, in this embodiment, a sealing groove is provided on the outer side of the opening 8 on the partition 7, and a sealing ring 9 is provided in the sealing groove. The sealing ring 9 is located between the partition 7 and the workpiece 6 to be plated. When the clamping module 4 presses the workpiece 6 to be plated onto the partition 7, the sealing ring 9 realizes the sealing between the partition 7 and the workpiece 6 to be plated, thereby realizing the isolation between the first main groove 2 and the second main groove 3; the clamping module 4 is provided with a hollow hole, which corresponds to the workpiece 6 to be plated, so as to avoid blocking the workpiece 6 to be plated.

[0041] In this embodiment, the surface treatment main box 1 is provided with a guide shaft 10, and the pressing module 4 is slidably connected to the guide shaft 10, and the guide shaft 10 plays a guiding role when the driving structure 5 drives the pressing module 4 to perform linear motion. The driving structure 5 is an electromagnetic push rod or other structure capable of achieving linear motion, such as a cylinder, a hydraulic cylinder or an electric telescopic rod.

[0042] In this embodiment, the surface treatment main box 1 is further provided with a first relay tank 11 and a second relay tank 12. The first relay tank 11 is used to fill the first tank liquid, and the second relay tank 12 is used to fill the second tank liquid. The first relay tank 11 is connected to the first main tank 2, and a solenoid valve and a liquid pump are provided on the pipeline between the first relay tank 11 and the first main tank 2. The second relay tank 12 is connected to the second main tank 3, and a solenoid valve and a liquid pump are provided on the pipeline between the second relay tank 12 and the second main tank 3. The first tank liquid is the same as or different from the second tank liquid. Specifically, if the coatings on both sides of the workpiece 6 to be plated are the same, the first tank liquid is the same as the second tank liquid. If the coatings on both sides of the workpiece 6 to be plated are different, the first tank liquid is different from the second tank liquid.

[0043] In this embodiment, the surface treatment main box 1 is also provided with a first pure water tank 15 and a second pure water tank 16, which are used to hold pure water. The first pure water tank 15 is connected to the first main tank 2, and an electromagnetic valve and a liquid pump are provided on the pipeline between the first pure water tank 15 and the first main tank 2. The second pure water tank 16 is connected to the second main tank 3, and an electromagnetic valve and a liquid pump are provided on the pipeline between the second pure water tank 16 and the second main tank 3.

[0044] In this embodiment, the surface treatment main box 1 is also provided with a first recovery tank 13 and a second recovery tank 14, the first recovery tank 13 is connected with the first main tank 2, the first relay tank 11 or the first pure water tank 15, and the pipeline between the first recovery tank 13 and the first main tank 2, the first relay tank 11 or the first pure water tank 15 is provided with an electromagnetic valve and a liquid pump, the second recovery tank 14 is connected with the second main tank 3, the second relay tank 12 or the second pure water tank 16, and the pipeline between the second recovery tank 14 and the second main tank 3, the second relay tank 12 or the second pure water tank 16 is provided with an electromagnetic valve and a liquid pump.

[0045] The installation steps of the double-sided coating surface treatment equipment of this embodiment are as follows:

[0046] Step 1: Install the fixed end of the driving structure 5 in the first main groove 2 or the second main groove 3 by screws;

[0047] Step 2: Install the sealing ring 9 into the sealing groove on the partition 7;

[0048] Step 3, placing the workpiece 6 to be plated close to the sealing ring 9;

[0049] Step 4: Install the pressing module 4 on the guide shaft 10 and fit it to the workpiece 6 to be plated;

[0050] Step 5: Control the driving structure 5 to push the clamping module 4 through the clamping button, so that the workpiece 6 to be plated is stressed and sealed.

[0051] The working principle of the double-sided coating surface treatment equipment of this embodiment is as follows: turn on the switch power supply, and set the current, voltage, bath liquid temperature, minimum bath liquid inventory and other parameters of the first main bath 2 and the second main bath 3 respectively according to the different coating characteristics of the two sides of the product and the respective bath liquid characteristics; load the workpiece 6 to be plated into the equipment, clamp and seal it; inject the first bath liquid into the first relay tank 11, the second bath liquid into the second relay tank 12, and inject pure water into the first pure water tank 15 and the second pure water tank 16, and keep the first recovery tank 13 and the second recovery tank 14 empty.

[0052] This embodiment can realize functions such as different plating types, electroplated metal layers of different thicknesses, different chemical plating layers, and electroplated metal layers combined with chemical plating layers on both sides of the workpiece 6 to be plated.

[0053] Embodiment 2

[0054] This embodiment discloses a surface treatment method using the double-sided coating surface treatment device of embodiment 1, including the following working conditions:

[0055] Working condition 1, when both sides of the workpiece 6 to be plated are electroplated, both sides of the workpiece 6 to be plated can be plated simultaneously, including the following steps:

[0056] Step 1: The first bath solution in the first relay tank 11 is injected into the first main tank 2, and the second bath solution in the second relay tank 12 is injected into the second main tank 3, so that both sides of the workpiece 6 to be plated are plated;

[0057] Step 2, the first tank liquid is pumped back to the first relay tank 11, and the second tank liquid is pumped back to the second relay tank 12;

[0058] Step 3: The first pure water tank 15 introduces pure water into the first main tank 2, and the second pure water tank 16 introduces pure water into the second main tank 3, and the pure water is used to clean both sides of the workpiece 6 to be plated;

[0059] Step 4: empty the first main tank 2 and the second main tank 3, release the driving structure 5, and remove the plated products for further cleaning and packaging;

[0060] Working condition 2, when both sides of the workpiece 6 to be plated are subjected to chemical plating, both sides of the workpiece 6 to be plated can be subjected to chemical plating at the same time, including the following steps:

[0061] Step 1: The first bath solution in the first relay tank 11 is injected into the first main tank 2, and the second bath solution in the second relay tank 12 is injected into the second main tank 3, so that both sides of the workpiece 6 to be plated are plated;

[0062] Step 2, the first tank liquid is pumped back to the first relay tank 11, and the second tank liquid is pumped back to the second relay tank 12;

[0063] Step 3: The first pure water tank 15 introduces pure water into the first main tank 2, and the second pure water tank 16 introduces pure water into the second main tank 3, and the pure water is used to clean both sides of the workpiece 6 to be plated;

[0064] Step 4: empty the first main tank 2 and the second main tank 3, release the driving structure 5, and remove the plated products for further cleaning and packaging;

[0065] Working condition 3, when one side of the workpiece 6 to be plated is electroplated and the other side of the workpiece 6 to be plated is chemically plated, electroplating or chemical plating is performed on one side first, and then chemical plating or electroplating is performed on the other side, including the following steps:

[0066] Step 1: The first tank liquid in the first relay tank 11 is injected into the first main tank 2, and the second main tank 3 is left empty or injected with pure water through the second pure water tank 16. At this time, the first main tank 2 is working and the second main tank 3 is not working, so that one side of the workpiece 6 to be plated is plated;

[0067] Step 2, after the first main tank 2 is completed, the first tank liquid is withdrawn to the first relay tank 11, the first main tank 2 is kept empty or pure water is injected through the first pure water tank 15 as needed, the second tank liquid in the second relay tank 12 is injected into the second main tank 3, and the surface treatment process in the second main tank 3 is started. After completion, the second tank liquid is withdrawn to the second relay tank 12, so that the other side of the workpiece 6 to be plated is plated;

[0068] Step 3: After both sides of the workpiece 6 to be plated are plated, use pure water to clean both sides of the workpiece 6 to be plated;

[0069] Step 4: empty the first main tank 2 and the second main tank 3, release the driving structure 5, and remove the plated products for further cleaning and packaging.

[0070] The present invention uses specific examples to illustrate the principles and implementation methods of the present invention. The above examples are only used to help understand the method and core ideas of the present invention. At the same time, for those skilled in the art, according to the ideas of the present invention, there will be changes in the specific implementation methods and application scope. In summary, the content of this specification should not be understood as limiting the present invention.

Claims

1. A double-sided coating surface treatment device, characterized in that: include: A surface treatment main box, wherein the surface treatment main box is provided with a first main groove and a second main groove, the partition between the first main groove and the second main groove is provided with an opening, the first main groove or the second main groove is provided with a clamping module and a driving structure, the clamping module is located at the telescopic end of the driving structure, the clamping module is used to carry the workpiece to be plated, and the driving structure drives the clamping module to move so that the workpiece to be plated closes the opening.

2. The surface treatment equipment for double-sided coating according to claim 1, characterized in that: The partition is provided with a sealing groove, in which a sealing ring is provided, and the sealing ring is located between the partition and the workpiece to be plated.

3. The surface treatment equipment for double-sided coating according to claim 1, characterized in that: The surface treatment main box is provided with a guide shaft, and the clamping module is slidably connected to the guide shaft.

4. The surface treatment equipment for double-sided coating according to claim 1, characterized in that: The surface treatment main box is also provided with a first relay tank and a second relay tank, the first relay tank is used to fill the first tank liquid, the second relay tank is used to fill the second tank liquid, the first relay tank is connected to the first main tank, and the second relay tank is connected to the second main tank.

5. The surface treatment equipment for double-sided coating according to claim 4, characterized in that: The first bath solution is the same as or different from the second bath solution.

6. The surface treatment equipment for double-sided coating according to claim 1, characterized in that: The surface treatment main box is also provided with a first recovery tank and a second recovery tank, wherein the first recovery tank is communicated with the first main tank, and the second recovery tank is communicated with the second main tank.

7. The surface treatment equipment for double-sided coating according to claim 1, characterized in that: The surface treatment main box is also provided with a first pure water tank and a second pure water tank, the first pure water tank and the second pure water tank are used to hold pure water, the first pure water tank is connected to the first main tank, and the second pure water tank is connected to the second main tank.

8. The double-sided coating surface treatment equipment according to claim 1, characterized in that: The clamping module is provided with hollow holes, and the hollow holes correspond to the workpieces to be plated.

9. The surface treatment equipment for double-sided coating according to claim 1, characterized in that: The driving structure is an electromagnetic ejector.

10. A surface treatment method using the double-sided coating surface treatment equipment according to any one of claims 1 to 9, characterized in that: The following conditions are included: Working condition 1: when both sides of the workpiece to be plated are electroplated, both sides of the workpiece to be plated can be plated simultaneously; Working condition 2: when both sides of the workpiece to be plated are subjected to chemical plating, both sides of the workpiece to be plated can be plated simultaneously; Working condition three, when one side of the workpiece to be plated is electroplated and the other side of the workpiece to be plated is chemically plated, electroplating or chemical plating is performed first, and then chemical plating or electroplating is performed.