A synthetic jet pump device with lateral air outlet

Abstract

The invention relates to a synthetic jet pump device with lateral air outlet, which belongs to the technical field of jet pumps and solves the problem in the prior art that a relatively large jet space needs to be reserved for synthetic jet pumps. The device comprises: a frame body accommodating a vibrator, a diaphragm, a cavity plate with stepped through holes, and a flow direction conversion member, which are assembled from top to bottom; wherein the vibrator comprises a piezoelectric element and a reinforcement layer; wherein a through space is formed in the frame body, and the vibrator is accommodated in the through space; wherein the flow direction conversion member has a flow channel groove with a lateral opening, and the flow channel groove connects the stepped through holes of the cavity plate with the outside from the side, and the stepped through holes of the cavity plate and the flow channel groove of the flow direction conversion member together form an L-shaped fluid passage.

Description

Technical Field

[0001] The invention relates to the technical field of jet pumps, and in particular to a synthetic jet pump device with lateral air outlet. Background Art

[0002] As a key device for the transmission and control of tiny fluids, micropumps have important application value in the fields of semiconductor heat dissipation, medical treatment, biological analysis, chemical reactions, etc.

[0003] The synthetic jet principle is a key technology based on fluid kinetic energy transfer and mixing, and is widely used in various engineering and scientific fields. Synthetic jet micropumps do not require complex structural design to achieve the conversion of vibration and fluid kinetic energy, which is conducive to microsystem integration. Therefore, the preparation of micropumps based on the synthetic jet method has better process advantages and smaller volume, providing important support for the improvement and innovation of system integration and performance.

[0004] In the field of heat dissipation, micropumps prepared using the principle of synthetic jets have a much higher heat dissipation efficiency than traditional micropumps. The flow field driven by the synthetic jet micropump is a vortex pair or vortex ring, which has the characteristics of pulsation and entrainment. The high-frequency pulsating flow field has an unstable thermal boundary layer, and the low-temperature fluid can directly contact the high-temperature wall, which greatly improves the heat exchange efficiency. In addition, the vortex rings and vortex pairs ejected by the synthetic jet pump can continuously draw in the low-temperature fluid in the environment during rotation, increase the net flow rate of the fluid, and further improve the heat exchange efficiency. Therefore, the heat exchange of the flow field driven by synthetic jets is 2-3 times the heat exchange capacity of conventional fans or pumps, and has the characteristics of low net flow, low power consumption, and high heat exchange, and has broad application prospects in the field of micro-space heat dissipation. However, the existing synthetic jet pumps are vertically discharged. In order to ensure the full evolution of the vortex pairs and vortex rings, it is necessary to reserve a large flow field evolution space in the longitudinal direction, resulting in a large space occupied by the jet pump, which cannot be applied to products and scenarios with ultra-thin requirements. However, if the reserved space is insufficient, vortex pairs and vortex rings cannot be formed, thereby failing to achieve a large flow rate and providing a heat dissipation effect.

[0005] The Chinese invention patent application, publication number CN101066542A, titled "Piezoelectric synthetic jet and its manufacturing method", discloses a piezoelectric ejector, in which the nozzle is located above the cavity and penetrates the cavity. Since the ejector nozzle is vertically arranged, a large reserved space is required above the nozzle when in use, which is difficult to apply to ultra-thin application scenarios with limited space.

[0006] The Chinese invention patent application, publication number CN103894306A, titled "A synthetic jet based on electromagnetic drive", discloses a synthetic jet, with a downward-facing nozzle arranged on the lower side of the jet cavity. Since the jet nozzle of the jet is arranged vertically downward, a large reserved space is required below the nozzle as the flow field evolution distance when in use, which still cannot meet the needs of ultra-thin application scenarios. Summary of the invention

[0007] In order to solve the above problems, a synthetic jet pump device with lateral air outlet is provided according to an embodiment of the present invention to achieve the effect of small overall volume and high-frequency (ultrasonic frequency band) vibration.

[0008] According to an embodiment of the present invention, a synthetic jet pump device for side-outlet air is provided, comprising: a frame body for accommodating a vibrator, a diaphragm, a cavity plate with stepped through holes, and a flow direction conversion member, which are assembled from top to bottom;

[0009] Wherein, the vibrator comprises a piezoelectric element and a reinforcement layer;

[0010] Wherein, a through space is formed in the frame, and the vibrator is accommodated in the through space;

[0011] The flow direction conversion member has a flow channel groove with a lateral opening, and the flow channel groove connects the stepped through hole of the cavity plate with the outside from the side, and the stepped through hole of the cavity plate and the flow channel groove of the flow direction conversion member together form an L-shaped fluid passage.

[0012] In an optional embodiment, the frame, diaphragm and cavity plate have consistent peripheral shapes and sizes; and the piezoelectric element, reinforcement layer, through space of the frame, and stepped through hole of the cavity plate are coaxially arranged.

[0013] In an optional embodiment, the stepped through hole in the cavity plate includes a cavity opening at an upper portion and a guide hole at a lower portion, and a radial dimension of the guide hole is smaller than a radial dimension of the cavity opening.

[0014] In an optional embodiment, the flow direction conversion member is plate-shaped, having a peripheral shape and size consistent with the frame, diaphragm and cavity plate; the flow channel groove of the flow direction conversion member includes a central groove below the guide hole of the cavity plate and connected thereto, and a lateral extension groove connected from the central groove to the lateral outside, wherein the lateral extension groove is formed to extend laterally beyond the range of the guide hole.

[0015] In an optional embodiment, the laterally extending groove extends laterally beyond the guide hole by 0.5 mm to 0.8 mm.

[0016] In an optional embodiment, the flow direction conversion member has a long strip opening that completely penetrates the flow direction conversion member in the thickness direction and extends from the end of the laterally extending groove to the side edge of the flow direction conversion member.

[0017] In an optional embodiment, the stepped through hole in the cavity plate includes a cavity opening, a first guide hole, and a second guide hole which are formed from top to bottom and have gradually decreasing aperture sizes.

[0018] In an optional embodiment, the flow direction conversion member is horseshoe-shaped and covers the second guide hole; the flow channel groove of the flow direction conversion member includes a central groove below and connected to the second guide hole of the cavity plate, and a lateral extension groove connected from the central groove to the lateral outside, wherein the lateral extension groove is formed to extend laterally beyond the range of the second guide hole.

[0019] In an optional embodiment, the laterally extending groove extends laterally beyond the second guide hole by 0.5 mm to 0.8 mm.

[0020] In an optional embodiment, a long shallow groove extending from an edge of the second guide hole to a side edge of the cavity plate is formed on the lower surface of the cavity plate.

[0021] Compared with the prior art, the synthetic jet pump device with lateral air outlet provided according to the embodiment of the present invention has at least the following beneficial effects:

[0022] 1. Ultra-thin stacking can be achieved through the laminated structure and lateral parallel air outlet, and no longitudinal air outlet space is required. While improving the heat dissipation efficiency, the volume occupied by the piezoelectric pump body is further optimized and the overall mechanical and electronic solution area and volume are greatly reduced, thereby increasing the space benefits of downstream users and facilitating high integration requirements.

[0023] 2. The L-shaped fluid passage structure of the side-outlet synthetic jet pump device can obtain an optimized air flow path, provide high-velocity, large-flow fluid circulation, achieve a heat exchange ratio far higher than that of traditional pumps and existing synthetic jet pumps, and greatly improve the efficiency and performance of the pump. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments will be briefly introduced below. The features and advantages of the present invention can be more clearly understood by referring to the drawings. The drawings are schematic and should not be understood as limiting the present invention in any way. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0025] Figure 1 It is a cross-sectional view of a synthetic jet pump device with side-flow air outlet provided according to a first embodiment of the present invention.

[0026] Figure 2 1 is an exploded view of a synthetic jet pump device with side-flow air outlet provided according to a first embodiment of the present invention.

[0027] Figure 3 It is an isometric view of a flow direction conversion plate of a synthetic jet pump device with side-flow according to a first embodiment of the present invention.

[0028] Figure 4 It is a schematic diagram of a first working state of a synthetic jet pump device with side-flow air outlet provided according to a first embodiment of the present invention.

[0029] Figure 5 It is a schematic diagram of a second working state of the lateral air outlet synthetic jet pump device provided according to the first embodiment of the present invention.

[0030] Figure 6 The figure shows the flow rate test result under applied voltage of an example of a synthetic jet pump device with lateral air outlet provided according to the first embodiment of the present invention.

[0031] Figure 7 1 is an exploded view of a synthetic jet pump device with side-flow air outlet provided according to a second embodiment of the present invention.

[0032] Figure 8 It is an isometric view of a cavity plate of a synthetic jet pump device with side-flow according to a second embodiment of the present invention.

[0033] Fig. 9 It is an isometric view of a flow direction conversion plate of a synthetic jet pump device with side-flow according to a second embodiment of the present invention.

[0034] Description of reference numerals:

[0035] 10 vibrators;

[0036] 12 Piezoelectric element;

[0037] 14 reinforcement layer;

[0038] 20 frame;

[0039] 22 through space;

[0040] 30 diaphragm;

[0041] 40 cavity plate;

[0042] 42 Step through hole;

[0043] 44 cavity opening;

[0044] 46 guide hole;

[0045] 50 flow to the conversion plate;

[0046] 52 flow channel;

[0047] 54 center groove;

[0048] 56 Laterally extending slots;

[0049] 57 support part;

[0050] 58 Long strip opening;

[0051] 140 cavity plate;

[0052] 142 Stepped through hole;

[0053] 144 cavity opening;

[0054] 146 first guide hole;

[0055] 148 second guide hole;

[0056] 149 Long shallow groove;

[0057] 150 flow direction conversion piece;

[0058] 152 flow channel;

[0059] 154 center groove;

[0060] 156 Laterally extending slots. DETAILED DESCRIPTION

[0061] In order to more clearly understand the above-mentioned purpose, features and advantages of the present invention, the present invention is further described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be noted that the embodiments of the present invention and the features in the embodiments can be combined with each other without conflict.

[0062] In the following description, many specific details are set forth to facilitate a full understanding of the present invention, but the present invention may also be implemented in other ways different from those described herein. Therefore, the protection scope of the present invention is not limited to the specific embodiments disclosed below.

[0063] A synthetic jet pump device with side-flow air outlet provided according to an embodiment of the present invention will be described in detail below with reference to the accompanying drawings.

[0064] Example 1

[0065] like Figure 1 and Figure 2As shown, a synthetic jet pump device for side-outlet air provided according to the first embodiment of the present invention includes: a frame 20 accommodating a vibrator 10, a diaphragm 30, a cavity plate 40 having a stepped through hole 42, and a flow direction conversion plate 50, which are assembled from top to bottom; wherein the vibrator 10 includes a piezoelectric element 12 and a reinforcement layer 14; and wherein the flow direction conversion plate 50 has a flow channel groove 52 with a lateral opening, and the flow channel groove 52 connects the stepped through hole 42 of the cavity plate 40 to the outside from the side, so that the stepped through hole 42 of the cavity plate 40 and the flow channel groove 52 of the flow direction conversion plate 50 together form an L-shaped fluid passage. The L-shaped fluid passage is used to achieve the suction and outflow of fluid from the side. The synthetic jet pump device for side-outlet air can be configured so that, after assembly, the central axis of the vibrator 10 is aligned with the central axis of the stepped through hole 42 of the cavity plate 40. The shape and size of the outer peripheral contours of the frame 20, the diaphragm 30, the cavity plate 40 and the flow direction conversion plate 50 can be formed to be consistent, so that after stacking and assembling, a synthetic jet pump device with a lateral air outlet of an overall uniform shape is obtained. Optionally, the frame 20, the diaphragm 30, the cavity plate 40 and the flow direction conversion plate 50 can be assembled by a bonding process. Also optionally, the reinforcement layer 14, the cavity plate 40, and the flow direction conversion plate 50 can be made of carbon fiber composite materials.

[0066] like Figure 2 As shown, the vibrator 10 includes a reinforcement layer 14 and a piezoelectric element 12 fixed on the reinforcement layer 14. The size of the reinforcement layer 14 can be slightly larger than the piezoelectric element 12 to provide better support and protection. Optionally, the reinforcement layer 14 and the piezoelectric element 12 can be circular and coaxial.

[0067] Continue to refer Figure 2 , the middle of the frame 20 is a through space 22, and the vibrator 10 is accommodated in the through space 22 when assembled in the frame 20. Therefore, the size of the vibrator 10 is smaller than the size of the through space 22 in the frame 20 to meet the assembly and vibration requirements. In addition, the thickness of the vibrator 10, that is, the total thickness of the reinforcement layer 14 and the piezoelectric element 12, can be less than the thickness of the frame 20, so that after assembly, a vibration space is reserved above the piezoelectric element 12 to accommodate the upward deformation of the vibrator 10 when vibrating.

[0068] During assembly, the lower surface of the frame 20 is fixed to the upper surface of the diaphragm 30, which plays a role in tensioning the diaphragm 30 and can optimize the vibration frequency. In addition, the lower surface of the reinforcing layer 14 of the vibrator 10 is attached to and fixed to the upper surface of the diaphragm 30, so that when the synthetic jet pump device with side air outlet is working, the diaphragm 30 vibrates together under the drive of the piezoelectric element 12. In this embodiment, the diaphragm 30 is made of a material with good elasticity.

[0069] refer to Figure 2, below the diaphragm 30 is the cavity plate 40. The stepped through hole 42 in the cavity plate 40 forms a two-step through space, wherein the stepped through hole 42 includes a cavity opening 44 formed in an upper portion and recessed downward, so that a cavity is formed between the diaphragm 30 above after assembly to accommodate the downward deformation of the vibrator 10 during vibration. The thickness of the cavity opening 44 is less than the thickness of the cavity plate 40, and the shape and area can be consistent with the through space 22 in the frame 20. The stepped through hole 42 also includes a guide hole 46 formed on the cavity bottom wall below the cavity opening 44 of the cavity plate 40. The guide hole 46 can be formed at the center of the cavity plate 40. The aperture of the guide hole 46 is smaller than the aperture of the cavity opening 44. Therefore, the cavity opening 44 and the guide hole 46 together form a stepped through hole 42 with a radial size that decreases from top to bottom in the cavity plate 40. Optionally, the diameter of the cavity opening 44 of the stepped through hole 42 formed in the cavity plate 40 is 15 mm to 15.5 mm, and the diameter of the guide hole 46 is 3 mm to 8 mm.

[0070] refer to Figures 1 to 3 , below the cavity plate 40 is the flow direction conversion plate 50, in which a flow channel groove 52 is formed that is connected to the stepped through hole 42 of the cavity plate 40, and the flow channel groove 52 is connected to the outside from the side. The shape and size of the flow direction conversion plate 50 may be consistent with the above-mentioned frame 20, diaphragm 30 and cavity plate 40. Specifically, the flow channel groove 52 in the flow direction conversion plate 50 may include a central groove 54 that extends vertically downward and is not through, and a lateral extension groove 56 that extends laterally from the central groove 54 to the outside. Among them, the central groove 54 is in the form of a non-through countersunk hole in the center of the flow direction conversion plate 50, and is connected to the stepped through hole 42 of the cavity plate 40 above. The central groove 54 provides a rectifying effect on the fluid during the process of the fluid flowing through the flow channel groove 52. The lateral extension groove 56 extends a distance to one side from the central groove 54. Optionally, the width of the flow channel groove 52 can be set to 1mm to 2mm, the length can be set to 2mm to 6mm, and the depth can be set to 0.05mm to 0.2mm. The stepped through hole 42 of the cavity plate 40 and the flow channel groove 52 of the flow direction conversion plate 50 together form an L-shaped fluid passage, so that the fluid flowing downward through the stepped through hole 42 of the cavity plate 40 and the central groove 54 of the flow direction conversion plate 50 is guided out from the side. Figure 1As shown, by forming a central groove 54 and a lateral extension groove 56 extending laterally therefrom, the flow channel groove 52 can extend on one side to exceed the range of the guide hole 46 of the cavity plate 40, and then a lateral channel is formed through the space between the lower surface of the cavity plate 40 that exceeds the guide hole 46 and the inner surface of the lateral extension groove 56, so as to connect the stepped through hole 42 with the lateral exterior. The range of the lateral extension groove 56 extending laterally beyond the guide hole 46 is 0.5mm to 0.8mm. Thus, through this lateral channel portion, when discharging the fluid, axial air discharge in the vertical direction can be prevented, and the fluid is completely discharged from the side to achieve parallel lateral air discharge. The inner end of the lateral extension groove 56 is connected to the central groove 54, and the outer end is an outlet connected to the lateral exterior. The distance that the lateral extension groove 56 extends from the central groove 54 to the outside can be shorter than the distance from the central groove 54 to the side of the cavity plate 40, thereby reducing the resistance along the way. As shown in FIG. Figure 2 and Figure 3 As shown, the flow channel groove 52 may also include: at the end of the lateral extension groove 56 extending a shorter distance, the flow direction conversion plate 50 may be formed with a long strip opening 58 that completely penetrates in the thickness direction and extends to the side edge of the flow direction conversion plate. The long strip opening 58 forms an air duct to facilitate guiding a large flow of fluid to be smoothly inhaled and discharged from the side. In this embodiment, the long strip opening 58 can be formed by cutting off a long strip material of a certain width from the end of the lateral extension groove 56 of the flow direction conversion plate 50 along the lateral outflow path of the fluid to the length of the lateral edge of the flow direction conversion plate 50. Optionally, the width of the long strip opening 58 forming the air duct is 3mm to 5mm, and the length can be determined according to the size of the flow direction conversion plate, and can be set to 3mm to 7.5mm.

[0071] like Figure 3 As shown, optionally, a protruding support portion 57 can be formed on the bottom surface of the end position of the above-mentioned lateral extension groove 56, and the support portion 57 can maintain the gap between the bottom surface of the lateral extension groove 56 and the lower surface of the cavity plate 40, so that during operation, even if the flow direction conversion plate 50 vibrates due to the vibration of the vibrator and the flow of the fluid, the upward vibration of the flow direction conversion plate 50 and the closing of the cavity plate 40 will not cause the fluid flow to be obstructed.

[0072] like Figure 1As shown, optionally, in the direction opposite to the extension direction of the lateral extension groove 56, the central groove 54 of the flow direction conversion plate 50 is retracted inward from the outer edge of the guide hole 46 of the cavity plate 40, that is, in this direction, the range of the guide hole 46 of the cavity plate 40 exceeds the range of the central groove 54 of the flow direction conversion plate 50, so that when the fluid is discharged, it is more conducive to guiding the fluid to the lateral extension groove 56. Optionally, the thickness of the flow direction conversion plate 50 can be set in the range of 0.15mm to 0.25mm to ensure a relatively thin overall thickness and to be able to form a flow channel groove 52 structure sufficient for fluid diversion.

[0073] After assembly, the fluid inlet passage in the synthetic jet pump device with side-outlet airflow is that the fluid passes through the lateral extension groove 56 in the flow direction conversion plate 50 from the side to the outside, passes through the central groove 54 of the flow direction conversion plate 50, is rectified at the central groove 54, turns upward to pass through the guide hole 46 in the cavity plate 40, and enters the cavity formed by the cavity opening 44. The fluid outlet passage is that the fluid passes downward from the cavity formed by the cavity opening 44 in the cavity plate 40 of the synthetic jet pump device with side-outlet airflow, passes through the guide hole 46 in the cavity plate 40, and the central groove 54 in the flow direction conversion plate 50, is rectified at the central groove 54, then turns sideways to pass through the lateral extension groove 56, and is discharged from the side along the air duct formed by the long strip opening 58, thereby realizing parallel side-outlet airflow.

[0074] The following references Figure 4 and Figure 5 , the working process of the synthetic jet pump device with side air outlet provided according to the first embodiment of the present invention is described.

[0075] like Figure 4 and Figure 5 As shown, when the vibrator 10 of the synthetic jet pump device with side-outlet provided in an embodiment of the present invention vibrates, the diaphragm 30, the piezoelectric element 12 and the reinforcement layer 14 vibrate together in a cosine waveform. As the bending direction of the vibrator 10 and the diaphragm 30 changes, the volume of the cavity formed between them and the cavity plate 40 below changes, resulting in a change in the air pressure in the cavity. Since the gas flows from the high-pressure area to the low-pressure area, the fluid moves approximately in one direction as a whole. This approximate unidirectional motion means that during the inhalation process of the fluid, the ejected fluid is very little and can be ignored, and during the ejection process of the fluid, the inhaled flow rate is very little and can be ignored.

[0076] like Figure 4As shown, in the first working state of the synthetic jet pump device with side-outlet, when the central part of the vibrator 10 vibrates and deforms upward, its surrounding part bends and deforms downward to form a cosine waveform. The central part of the vibrator 10 and the diaphragm 30 deforms upward away from the lower cavity plate 40, and the volume of the cavity below the central part of the vibrator 10 and the diaphragm 30 expands to form a low-pressure area P2; the surrounding part of the vibrator 10 and the diaphragm 30 approaches the cavity plate 40 downward, and the volume of the cavity below it shrinks to form a high-pressure area P1. The flow resistance in the high-pressure area is large, and the flow resistance in the low-pressure area is small. Therefore, as shown by the arrow in the figure, the external fluid flows into the low-pressure area at a high speed through the L-shaped fluid passage formed by the flow channel groove 52 in the flow conversion plate 50 and the stepped through hole 42 of the cavity plate 40, thereby realizing the suction of the fluid.

[0077] like Figure 5 As shown in the figure, in the second working state of the synthetic jet pump device with lateral air outlet, when the central part of the vibrator 10 vibrates and deforms downward, its surrounding part bends and deforms upward to form a cosine waveform. The central part of the vibrator 10 and the diaphragm 30 approaches the cavity plate 40 downward, so that the volume of the cavity formed between the cavity plate 40 is reduced, forming a high-pressure area P2; the surrounding part of the vibrator 10 and the diaphragm 30 is deformed upward, away from the cavity plate 40, and the volume of the cavity below it is expanded to form a low-pressure area P1. Since the high-pressure area below the central part of the vibrator 10 and the diaphragm 30 has the largest flow resistance, while the low-pressure area below the surrounding part has a small flow resistance, a small amount of fluid flows to the low-pressure area below the surrounding part as shown by the arrow in the figure, and a large amount of fluid flows from the high-pressure area below the central part to the outside in a parallel lateral direction through the L-shaped fluid passage formed by the stepped through hole 42 of the cavity plate 40 and the flow channel groove 52 of the flow conversion plate 50, so as to achieve high-speed lateral air outlet.

[0078] See also Figure 6 , shows the test results of the flow rate of the lateral air jet obtained based on the voltage change provided in an exemplary example of the lateral air outlet synthetic jet pump device provided by the first embodiment of the present invention. In this example, the lateral air outlet synthetic jet pump device has an overall size of 18 mm in length, 18 mm in width, and 2.5 mm in thickness, the aperture of the cavity opening of the stepped through hole in the cavity plate is 15 mm, the aperture of the guide hole is 3 mm, the width of the flow channel groove of the flow direction conversion plate is 1.2 mm, the length is 2.7 mm, and the width of the long strip opening 58 forming the air channel is 3.5 mm.

[0079] When a voltage of 10V is applied to the synthetic jet pump device for side air outlet in this example, vibration can be generated; when the voltage is applied from 10V to 35V, the wind speed of the generated side air outlet increases extremely rapidly, and the wind speed rises almost in a straight line; when a voltage of 40V is applied, the wind speed of the generated side air outlet reaches 40m / s, thereby providing an excellent synthetic jet effect.

[0080] Example 2

[0081] The following references Figures 7 to 9 , a synthetic jet pump device with lateral air outlet provided according to a second embodiment of the present invention is described in detail.

[0082] like Figure 7 As shown, the synthetic jet pump device for lateral air outlet provided by the second embodiment includes: a frame 20 for accommodating a vibrator 10; a diaphragm 30; a cavity plate 140; and a flow direction conversion member 150, which are assembled from top to bottom, wherein the vibrator 10 includes a piezoelectric element 12 and a reinforcement layer 14; a stepped through hole 142 is formed in the cavity plate 140; and a flow channel groove 152 is formed in the flow direction conversion member 150. Among them, the stepped through hole 142 of the cavity plate 140 and the flow channel groove 152 of the flow direction conversion member 150 together form an L-shaped fluid passage. The L-shaped fluid passage is used to achieve the inflow and outflow of fluid from the side. Optionally, the shape and size of the outer peripheral contours of the frame 20, the diaphragm 30 and the cavity plate 140 can be formed to be consistent, so that after stacking and assembly, a synthetic jet pump device for lateral air outlet with an overall uniform appearance is obtained.

[0083] Since the vibrator 10, frame 20 and diaphragm 30 of the synthetic jet pump device for side-flow air outlet provided in the second embodiment are substantially the same as the corresponding structures of the synthetic jet pump device for side-flow air outlet provided in the first embodiment above, they will not be described in detail here. Figures 7 to 9 , the cavity plate 140 and the flow direction conversion member 150 of this embodiment are described.

[0084] like Figure 7 and Figure 8 As shown, the through space in the cavity plate 140 of the second embodiment forms a three-step stepped through hole 142, which includes, from top to bottom: a cavity opening 144, a first guide hole 146, and a second guide hole 148, whose sizes decrease successively. Among them, the cavity opening 144 may have a shape and aperture size consistent with the through space 22 in the frame 20 to accommodate the downward deformation of the vibrator 10 during vibration. The first guide hole 146 and the second guide hole 148 are formed in the central part of the cavity plate 140. The cavity opening 144, the first guide hole 146, and the second guide hole 148 constituting the stepped through hole 142 form a through space in the cavity plate 140 whose radial size decreases from top to bottom. Optionally, as Figure 7As shown, the second guide hole 148 can be formed into a substantially horseshoe shape to facilitate the lateral guidance of the fluid. Optionally, a long shallow groove 149 extending outward from the second guide hole 148 to the side edge can be formed on the lower surface of the cavity plate 140 as a wind duct to guide the lateral outflow of the fluid. Optionally, the aperture of the cavity opening 144 of the stepped through hole 142 formed in the cavity plate 140 is 15 mm, the aperture of the first guide hole 146 is 3 mm, and the shape and size of the second guide hole 148 are matched with the flow channel groove 152 in the flow direction conversion member 150 below, for example, it can be set to a width of 1.5 mm.

[0085] like Figure 7 and Fig. 9 As shown, the flow direction conversion member 150 of the second embodiment is installed at the center of the bottom surface of the cavity plate 140. The flow direction conversion member 150 can be a structure that covers the opening of the second guide hole 148 of the cavity plate 140 and provides a flow channel groove 152. Figure 7 and Fig. 9 As shown, the flow direction conversion member 150 in this embodiment is horseshoe-shaped. The flow channel groove 152 forms a groove from the central part of the flow direction conversion member 150 and extends laterally to penetrate and communicate with the outside. The structure of the flow channel groove 152 includes a central groove 154 below and corresponding to the second guide hole 148, and a lateral extension groove 156 extending laterally from the central groove 154 to the outside. The flow channel groove 152 is connected to the second guide hole 148 of the cavity plate 140, and is combined with the vertically downward first guide hole 146 and the second guide hole 148 to form an L-shaped fluid passage, so that the fluid flowing downward through the cavity opening 144, the first guide hole 146 and the second guide hole 148 of the cavity plate 140 is discharged from the side through the flow channel groove 152. As shown Figure 7As shown, the structure of the flow direction conversion member 150 may be a structure and size that surrounds the flow channel groove 152 on the side outside the bottom and the lateral opening. That is, the size of the flow direction conversion member 150 may be to cover the second guide hole 148 of the cavity plate 140, so that the central groove 154 of the flow channel groove 152 partially matches the position and size of the second guide hole 148, and the lateral extension groove 156 extending laterally from the central groove 154 is formed at a position beyond the second guide hole 148. Optionally, in this embodiment, the thickness of the flow direction conversion member 150 may be set to a range of 0.05mm to 0.2mm, and the length may be 2mm to 8mm; the depth of the flow channel groove 152 formed in the flow direction conversion member 150 may be set to 0.01mm to 0.1mm, the width of the flow channel groove 152 may be set to 1mm to 3mm, and the length of the flow channel groove 152 may be set according to the size of the flow direction conversion member 150, for example, it may be set to 2mm to 5mm. The laterally extending groove 156 extends laterally beyond the second guide hole 148 by 0.5 mm to 0.8 mm, so as to not only turn the fluid to lateral outlet during the jetting process but also reduce the resistance along the jetting process.

[0086] The flow direction conversion member 150 has a more compact structure size, which can further reduce the overall weight of the synthetic jet pump device for side-outlet airflow, and reduce the overall size of the synthetic jet pump device for side-outlet airflow. Optionally, the shape of the flow direction conversion member 150 is not limited to the horseshoe shape shown in this embodiment, and can also be set as required, for example, circular, rectangular, elliptical, etc., to meet different installation requirements.

[0087] The synthetic jet pump device with lateral air outlet provided by the embodiment of the present invention can control the thickness to 1mm to 3mm after assembly. Since the synthetic jet pump device with lateral air outlet inhales and ejects the fluid from the side, it does not need circulation space in the vertical direction. It can realize the installation space that only occupies the thickness of the pump device itself (i.e., 1mm to 3mm) in the vertical direction through horizontal air cooling, optimizes the system volume based on the micro-space heat dissipation of the piezoelectric pump, and can greatly reduce the overall mechanical and electronic overall solution area and volume, improve the space benefits of downstream users, and is conducive to the high integration requirements of the system. In addition, the multi-level and vertical to lateral flow channel design of the synthetic jet pump device with lateral air outlet provided by the embodiment of the present invention can provide a fluid flow with high flow rate and large flow rate, and achieve excellent heat dissipation effect, thereby utilizing the synthetic jet principle for efficient gas exchange and optimizing the volume occupied by the pump body. The formed micro pump has a strong heat dissipation capacity and overall space benefits, which can meet the demand for ultra-thin stacking in the increasingly miniaturized consumer electronics field.

[0088] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any changes or substitutions that can be easily conceived by any technician familiar with the technical field within the technical scope disclosed by the present invention should be covered within the protection scope of the present invention.

Claims

1. A synthetic jet pump device with lateral air outlet, characterized in that: The invention comprises the following components assembled from top to bottom: a frame body accommodating a vibrator, a vibrating membrane, a cavity plate with stepped through holes, and a flow direction conversion member; Wherein, the vibrator comprises a piezoelectric element and a reinforcement layer; Wherein, a through space is formed in the frame, and the vibrator is accommodated in the through space; The flow direction conversion member has a flow channel groove with a lateral opening, and the flow channel groove connects the stepped through hole of the cavity plate with the outside from the side, and the stepped through hole of the cavity plate and the flow channel groove of the flow direction conversion member together form an L-shaped fluid passage, and the L-shaped fluid passage is used to realize the suction and outflow of the fluid from the side; The stepped through hole in the cavity plate includes an upper cavity opening and a lower guide hole, and the radial dimension of the guide hole is smaller than the radial dimension of the cavity opening; The flow channel groove of the flow direction conversion member includes a central groove below the guide hole of the cavity plate and connected thereto, and a lateral extension groove connected from the central groove to the lateral outside. The laterally extending groove is formed to extend laterally beyond the range of the guide hole. Wherein, a lateral channel is formed through the space between the lower surface of the cavity plate beyond the guide hole and the inner surface of the laterally extending groove, so that the stepped through hole is connected with the lateral exterior.

2. The synthetic jet pump device with side-flow air outlet according to claim 1, characterized in that: The frame, diaphragm and cavity plate have consistent peripheral shape and size; and The piezoelectric element, the reinforcement layer, the through space of the frame, and the stepped through hole of the cavity plate are coaxially arranged.

3. The synthetic jet pump device with side-flow air discharge according to claim 2, characterized in that: The flow direction conversion member is in a plate-like shape, and has an outer peripheral shape and size consistent with the frame, the diaphragm and the cavity plate.

4. The synthetic jet pump device with lateral air outlet according to claim 3, characterized in that: The laterally extending groove extends laterally beyond the guide hole by 0.5 mm to 0.8 mm.

5. The synthetic jet pump device with side-flow air discharge according to claim 3, characterized in that: The flow direction conversion member has a long strip opening which completely penetrates the flow direction conversion member in the thickness direction and extends from the end of the laterally extending groove to the side edge of the flow direction conversion member.

6. A synthetic jet pump device with lateral air outlet, characterized in that: The invention comprises the following components assembled from top to bottom: a frame body accommodating a vibrator, a vibrating membrane, a cavity plate with stepped through holes, and a flow direction conversion member; Wherein, the vibrator comprises a piezoelectric element and a reinforcement layer; Wherein, a through space is formed in the frame, and the vibrator is accommodated in the through space; The flow direction conversion member has a flow channel groove with a lateral opening, and the flow channel groove connects the stepped through hole of the cavity plate with the outside from the side, and the stepped through hole of the cavity plate and the flow channel groove of the flow direction conversion member together form an L-shaped fluid passage, and the L-shaped fluid passage is used to realize the suction and outflow of the fluid from the side; The stepped through hole in the cavity plate includes a cavity opening, a first guide hole, and a second guide hole formed from top to bottom and having a gradually decreasing aperture size; The flow channel groove of the flow direction conversion member includes a central groove below and connected to the second guide hole of the cavity plate, and a lateral extension groove connected from the central groove to the lateral outside. The lateral extension groove is formed to extend laterally beyond the range of the second guide hole. Wherein, a lateral channel is formed through the space between the lower surface of the cavity plate beyond the second guide hole and the inner surface of the laterally extending groove, so that the stepped through hole is connected with the lateral exterior.

7. The synthetic jet pump device with side-flow air discharge according to claim 6, characterized in that: The flow direction conversion member is horseshoe-shaped and covers the second guide hole.

8. The synthetic jet pump device with side-flow air outlet according to claim 7, characterized in that: The laterally extending groove extends laterally beyond the second guide hole by 0.5 mm to 0.8 mm.

9. The synthetic jet pump device with side-flow outlet according to any one of claims 6 and 7, characterized in that: A long shallow groove extending from the edge of the second guide hole to the side edge of the cavity plate is formed on the lower surface of the cavity plate.

Images