Wafer loading platform

Abstract

The present invention relates to the field of wafer loading technology, and specifically provides a wafer loading platform, comprising a base part and a wafer box; the base part comprises a metal bottom plate and a sliding tray arranged at the upper end of the metal bottom plate, and a sliding mechanism is arranged between the metal bottom plate and the sliding tray; the wafer box comprises a box body, in which a plurality of stainless iron material plates evenly distributed from top to bottom are arranged, and a wafer placing position is present at the upper end of a single stainless iron material plate; the present invention uses a sliding base part, and then fixes the sliding tray with a vertical quick clamp, so as to improve the stability of the structure and ensure the position accuracy of the wafer box; the wafer box can separate and place wafers, adapt to the use requirements of wafers of different models, and improve the use flexibility and overall production efficiency of the equipment; the present invention integrates the functions of bearing, adjustment, clamping, opening and closing the box, simplifies the process, and improves the production efficiency and the degree of production standardization.

Description

Technical Field

[0001] The invention relates to the technical field of wafer loading, and in particular to a wafer loading platform. Background Art

[0002] Wafer refers to the silicon chip used in the manufacture of silicon semiconductor integrated circuits. Due to its round shape, it is called a wafer. Wafers can be loaded into a wafer frame box, which can be further understood as: wafer cassettee, which can also be understood as a wafer box. Several wafers are loaded into the wafer box and loaded through the loading platform. Wafer loading platforms are widely used in semiconductor manufacturing (including wafer loading, testing, packaging and other links), photovoltaic industry (such as photovoltaic cell manufacturing and component packaging), flat panel displays (liquid crystal panel and OLED manufacturing), electronic component manufacturing (capacitor and resistor production), scientific research fields (material research and process development), etc. It is responsible for the accurate and rapid loading and transmission of wafers or related materials, and may also play a role in potential fields such as medical equipment manufacturing and artificial intelligence chip manufacturing to ensure the smooth progress of production, testing, research and development in all links.

[0003] The wafer loading platform currently used in the market includes a support base with a conveying mechanism on the support base. After the wafer is loaded into a wafer box, it is placed at one end of the support base and conveyed to the loading position through the conveying mechanism. However, the wafer box currently used in the market does not have the function of opening and closing the box. Wafers are easy to fall off the wafer box during transportation. In addition, since there is no detection device on the wafer loading platform, the conveying mechanism cannot guarantee the consistency of the transfer position each time when transporting the wafer box, which affects the loading effect. Summary of the invention

[0004] In view of the above-mentioned shortcomings of the prior art, an object of the present invention is to provide a wafer loading platform for solving the problems in the prior art that the wafer loading platform has no in-place detection function and the wafer box has no opening and closing function control.

[0005] To achieve the above-mentioned purpose and other related purposes, the present invention provides a wafer loading platform, comprising a base portion and a wafer box disposed at the upper end of the base portion;

[0006] The base part includes a metal bottom plate and a sliding tray arranged on the upper end of the metal bottom plate, a sliding mechanism is arranged between the metal bottom plate and the sliding tray, and the wafer box is arranged on the sliding tray;

[0007] The wafer box comprises a box body, in which a plurality of stainless steel plates are evenly distributed from top to bottom, and a wafer placing position is provided at the upper end of each stainless steel plate;

[0008] The front ends of the box body are provided with rotating shafts on both sides through rotating connectors, the upper ends of the rotating shafts are provided with knobs, the outer sides of the rotating shafts are provided with rotating rods, the rotating rods are provided with a plurality of L-shaped rods from top to bottom, and a single L-shaped rod can be rotatably matched in a material discharge position; the outer sides of the lower ends of the rotating rods are provided with clamps;

[0009] The upper ends of the metal bottom plate are also provided with box opening modules on both sides, the box opening modules include a cylinder and a metal stopper rod provided at the output end of the cylinder, a spring is provided in the metal stopper rod, the other end of the spring is provided with a pin, and a movable roller is provided on the pin; the output end of the box opening module cooperates to push the clamp to move, so that the rotating rod drives the L-shaped rod to rotate to open or close the discharge position;

[0010] The upper end of the metal bottom plate is also provided with a beam-type in-place detection sensor, which is distributed at the front end of the wafer box and is used to detect whether the wafer box is placed in place on the base part;

[0011] Vertical quick clamps are provided on both sides of the upper end of the metal bottom plate, and the vertical quick clamps have adjustable locking sliding trays. The vertical quick clamps include a support seat and a horizontal clamp and a vertical clamp that are hinged on the support seat through a pin shaft and cross-clamped, and a pressure head is provided at the end of the horizontal clamp;

[0012] A spring pin is also provided at the upper end of the metal bottom plate, and a through hole is provided on the sliding tray. After the wafer box is put in place, the spring pin passes through the through hole and is locked at the rear end of the box body to stop the wafer box from retreating after it is put in place on the base part.

[0013] In one embodiment of the present invention, columns are provided on both sides of the front end of the box body, and a third magnet is provided on the column opposite to one end of the L-shaped rod; both ends of the L-shaped rod are provided with a fourth magnet with opposite magnetic poles to the third magnet.

[0014] In one embodiment of the present invention, a baffle is provided at the rear end of the box body for limiting and supporting the rear end of the wafer; support platforms are provided at both ends of the inner side of the box body for supporting the wafer and the stainless steel plate.

[0015] In one embodiment of the present invention, a magnet is provided on the inner end of the column, and the front end of the stainless iron plate is adsorbed on the magnet.

[0016] In one embodiment of the present invention, a first magnet is disposed at the upper end of the sliding tray, and a second magnet with a magnetic pole opposite to that of the first magnet is disposed at the lower end of the box body. The wafer box is detachably placed relative to the sliding tray by attracting the first magnet through the second magnet.

[0017] In one embodiment of the present invention, the sliding mechanism includes a sliding rail and a slider that slide together, the sliding rail is installed at the lower end of the sliding tray, and the slider is installed at the upper end of the metal bottom plate; a movable roller is installed at the front end of the sliding tray, and the roller rolls on the metal bottom plate.

[0018] As described above, the wafer loading platform of the present invention has the following beneficial effects:

[0019] 1. The present invention sets the base part as a sliding matching structure and sets a facing type in-place detection sensor and a vertical quick clamp. The sliding matching metal bottom plate and the sliding tray facilitate placing the wafer box and sending the wafer box to the designated loading position. The facing type in-place detection sensor can detect whether the wafer box is in place. When the wafer box is in place, the sliding tray is quickly locked by the vertical quick clamp so that the wafer box can be reliably fed. The design of the spring pin can automatically pop out after the wafer box is placed in the sliding tray, thereby ensuring the consistency of the placement position of the wafer box each time and improving the loading effect.

[0020] 2. The present invention arranges a plurality of stainless iron material plates in the wafer box to form an independent wafer discharge position, which can separate the wafers and prevent secondary contamination between multiple wafers in the box body; the design of the rotating shaft sleeved with a rotating rod forms an opening and closing box control structure at the front end of the wafer box, and when the rotating rod rotates outward, the L-shaped rod moves counterclockwise in a circular motion to open the discharge position, which is convenient for wafer placement; when the rotating rod rotates inward, the L-shaped rod moves clockwise and contacts the outside of the discharge position to prevent the wafer from falling; the present invention is also equipped with an opening box module and a knob drive to complete the opening and closing actions of the wafer box, and has both manual and machine control functions, which effectively prevents the wafers placed in the wafer box from falling, reduces the error and damage risk caused by manual operation, and improves the production effect of the production line.

[0021] 3. The present invention uses a sliding mechanism and a roller to support the sliding tray in the base part, and then uses a vertical quick clamp to fix the sliding tray, so as to improve the stability of the structure, ensure the position accuracy of the wafer box, save effort and be quick to operate, with continuous movements, reduce operation time, and speed up loading speed; adopts in-place sensor auxiliary detection to accurately sense the position status of the wafer box, improve the accuracy and automation of equipment operation, reduce manual positioning errors and operation complexity; after the wafer box is placed in the sliding tray, the spring pin automatically pops out to ensure that the loading position is consistent each time, and improve the accuracy of the positioning structure and production efficiency; the wafer box adopts a stainless iron plate to form an independent discharge position, which can separate the wafers for discharge, and the wafer box can adapt to the use requirements of different types of wafers, thereby improving the use flexibility of the equipment and the overall production efficiency; the present invention integrates the functions of bearing, adjustment, clamping, opening and closing the box, simplifies the process, and improves production efficiency and the degree of production standardization. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 Shown is a schematic diagram of the three-dimensional structure of the wafer loading platform disclosed in the present invention.

[0023] Figure 2 Shown is a schematic diagram of the three-dimensional structure of the wafer loading platform disclosed in the present invention from another perspective.

[0024] Figure 3 Shown is a schematic diagram of the exploded structure of the base portion of the wafer loading platform disclosed in the present invention.

[0025] Figure 4 Display as Figure 3 Schematic diagram of the enlarged structure of the vertical quick clamp.

[0026] Figure 5 Display as Figure 3 Schematic diagram of the exploded structure of the center-opening box module.

[0027] Figure 6 Shown is an enlarged structural schematic diagram of a wafer box in the wafer loading platform disclosed in the present invention.

[0028] Figure 7 Shown is a schematic diagram of the exploded structure of a wafer box in the wafer loading platform disclosed in the present invention.

[0029] Figure 8 Display as Figure 7 Enlarged structural diagram of the transfer rod part.

[0030] Component number description

[0031] Metal base plate 1; sliding tray 2; through hole 21; sliding mechanism 3; slide rail 31; slider 32; roller 4; vertical quick clamp 5; support seat 51; horizontal clamp 52; vertical clamp 53; pressure head 54; box body 6; support table 61; stainless iron plate 7; discharge position 71; rotating shaft 8; knob 9; rotating rod 10; clamp 101; L-shaped rod 102; box opening module 11; cylinder 111; metal baffle rod 112; spring 113; pin 114; roller 115; opposite-beam in-position detection sensor 12; first magnet 13; second magnet 14; spring pin 15; column 16; third magnet 17; fourth magnet 18; magnet 19; baffle 20; handle 21. DETAILED DESCRIPTION

[0032] The following is a description of the implementation of the present invention by means of specific embodiments. Those skilled in the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification.

[0033] See also Figures 1 to 8. It should be noted that the structures, proportions, sizes, etc. illustrated in the drawings in this specification are only used to match the contents disclosed in the specification for people familiar with this technology to understand and read, and are not used to limit the limiting conditions for the implementation of the present invention, so they have no substantial technical significance. Any modification of the structure, change in the proportional relationship, or adjustment of the size should still fall within the scope of the technical content disclosed by the present invention without affecting the effects and purposes that can be achieved by the present invention. At the same time, the terms such as "upper", "lower", "left", "right", "middle" and "one" quoted in this specification are only for the convenience of description, and are not used to limit the scope of the implementation of the present invention. Changes or adjustments in their relative relationships should also be regarded as the scope of the implementation of the present invention without substantially changing the technical content.

[0034] The invention provides a wafer loading platform, which comprises a base part and a wafer box arranged on the upper end of the base part. A plurality of wafers are placed in the wafer box for subsequent loading.

[0035] See also Figures 1 to 5The base part includes a metal base plate 1 and a sliding tray 2 arranged at the upper end of the metal base plate 1, a sliding mechanism 3 is provided between the metal base plate 1 and the sliding tray 2, and the sliding mechanism 3 includes a sliding rail 31 and a slider 32 that slide together, the sliding rail 31 is installed at the lower end of the sliding tray 2, and the slider 32 is installed at the upper end of the metal base plate 1; a movable roller 4 is installed at the front end of the sliding tray 2, and the roller 4 rolls on the metal base plate 1 to assist the sliding tray 2 to slide relative to the metal base plate 1; a corresponding in-place detection sensor 12 is also provided at the upper end of the metal base plate 1, and the corresponding in-place detection sensor 12 is distributed at the front end of the wafer box, and is used to detect whether the wafer box is placed in place on the base part; vertical quick clamps 5 are provided on both sides of the upper end of the metal base plate 1, and the vertical quick clamps 5 can Adjustable locking sliding tray 2; specifically, the vertical quick clamp 5 includes a support seat 51 and a horizontal clamp 52 and a vertical clamp 53 which are hinged on the support seat 51 through a pin shaft and cross-clamped, and a pressure head 54 is provided at the end of the horizontal clamp 52; when it is necessary to lock the sliding tray 2, the vertical clamp 53 is pushed to drive the horizontal clamp 52 to press down, so that the pressure head 54 presses and fixes the sliding tray 2; when it is necessary to release the lock, the vertical clamp 53 is pushed to drive the horizontal clamp 52 to lift up, so that the pressure head 54 is separated from the sliding tray 2, and the sliding tray 2 can move forward and backward relative to the metal base plate 1; a spring pin 15 is also provided at the upper end of the metal base plate 1, and a through hole 21 is provided on the sliding tray 2. After the wafer box is placed in place, the spring pin 15 passes through the through hole 21 and is locked at the rear end of the box body 6, which is used to stop the wafer box from retreating after it is placed in place on the base part. The present invention sets the base part as a sliding matching structure and sets a facing type in-place detection sensor 12 and a vertical quick clamp 5. The sliding matching metal bottom plate 1 and the sliding tray 2 facilitate the placement of the wafer box and then send the wafer box to the designated loading position. The facing type in-place detection sensor 12 can detect whether the wafer box is in place. When the wafer box is in place, the sliding tray 2 is quickly locked by the vertical quick clamp 5 so that the wafer box can be reliably fed. The design of the spring pin 15 can automatically pop out after the wafer box is placed in the sliding tray 2, thereby ensuring the consistency of the placement position of the wafer box each time and improving the loading effect.

[0036] See also Figures 6 to 8The wafer box includes a box body 6, in which a plurality of stainless iron plates 7 are evenly distributed from top to bottom are arranged, and a wafer placing position 71 is provided at the upper end of each of the stainless iron plates 7; support platforms 61 are provided at both ends of the inner side of the box body 6 for supporting the wafer and the stainless iron plates 7; a baffle 20 is provided at the rear end of the box body 6 for limiting the position at the rear end of the stainless iron plates 7; handles 21 are provided at both side ends of the box body 6 for convenient placement of the wafer box; rotating shafts 8 are provided on both sides of the front end of the box body 6 through rotating connecting pieces, a knob 9 is provided at the upper end of the rotating shaft 8, and a rotating rod 10 is provided on the outer side of the rotating shaft 8, The rotating rod 10 is provided with a plurality of L-shaped rods 102 from top to bottom, and a single L-shaped rod 102 can be rotatably fitted in a material discharge position 71; a clamp 101 is provided on the outer side of the lower end of the rotating rod 10; both sides of the upper end of the metal bottom plate 1 are also provided with a box opening module 11, and the output end of the box opening module 11 cooperates to push the clamp 101 to move. Specifically, the box opening module 11 includes a cylinder 111 and a metal stopper 112 provided at the output end of the cylinder 111, a spring 113 is provided in the metal stopper 112, and a pin 114 is provided at the other end of the spring 113, and a movable roller 115 is provided on the pin 114, and the cylinder 1 11 provides drive, and the metal stopper 112 drives the roller 115 to roll against the clamp 101, so that the rotating rod 10 drives the L-shaped rod 102 to rotate to open or close the discharge position 71; the working principle here is to drive the roller 115 to move forward and backward through the cylinder 111. When the cylinder 111 retracts, it will drive the clamp 101 to move and open the discharge position 71; on the contrary, it will drive the L-shaped rod 102 to move in the opposite direction and close the discharge position 71; the present invention sets a plurality of stainless iron material plates 7 in the wafer box to form an independent wafer discharge position 71, which can separate the wafers and prevent secondary contamination between multiple wafers in the box body 6; The design of the rotating shaft 8 with the rotating rod 10 forms an opening and closing control structure at the front end of the wafer box. When the rotating rod 10 rotates outward, the L-shaped rod 102 moves in a counterclockwise circular motion to open the material placement position 71, making it convenient for the wafer to be placed in; when the rotating rod 10 rotates inward, the L-shaped rod 102 moves clockwise to abut against the outside of the material placement position 71 to prevent the wafer from falling. The present invention is also equipped with an opening module 11 and a knob 9 to drive the opening and closing actions of the wafer box, and at the same time has manual and machine control functions, which can effectively prevent the wafers placed in the wafer box from falling, reduce the errors and damage risks caused by manual operation, and improve the production effect of the production line.

[0037] The upper end of the sliding tray 2 is provided with a first magnet 13, and the lower end of the box body 6 is provided with a second magnet 14 with a magnetic pole opposite to the first magnet 13. The wafer box is attracted to the first magnet 13 by the second magnet 14 so as to be detachably placed relative to the sliding tray 2; the first magnet 13 and the second magnet 14 are arranged in cooperation, so as to pre-position the placement position of the wafer box and improve the stability and flexibility of the placement of the wafer box relative to the sliding tray 2. The front ends of the box body 6 are also provided with columns 16, and the columns 16 are provided with a third magnet 17 at a position opposite to one end of the L-shaped rod 102; both ends of the L-shaped rod 102 are provided with a fourth magnet 18 with a magnetic pole opposite to the third magnet 17; after the rotating shaft 8 drives the rotating rod 10 to rotate in a circle to open and close the box, the fourth magnet 18 at one end of the L-shaped rod 102 can be attracted to the third magnet 17 of the column 16 to keep the wafer box in the open and closed state, thereby improving the use effect of the wafer box. A magnet 19 is provided on the inner end of the column 16, and the front end of the stainless iron plate 7 is adsorbed on the magnet 19, forming a detachable lock on the front end of the stainless iron plate 7, which does not affect the removal of the stainless iron plate 7 from the wafer box and can also improve the reliability of the assembly of the stainless iron plate 7 relative to the wafer box.

[0038] In summary, the present invention uses a sliding mechanism 3 and a roller 4 to support the sliding tray 2 in the base part, and then uses a vertical quick clamp 5 to fix the sliding tray 2, so as to improve the stability of the structure, ensure the position accuracy of the wafer box, save effort and operate quickly, and have continuous actions, reduce the operation time, and speed up the loading speed; the sensor is used for auxiliary detection, and the position state of the wafer box is accurately sensed, so as to improve the accuracy and automation of the equipment operation, reduce the manual positioning error and the complexity of operation; after the wafer box is placed in the sliding tray 2, the spring pin 15 automatically pops up at the rear end of the wafer box to form a stop device, so as to ensure that the loading position is consistent each time, and improve the accuracy of the positioning structure and the production efficiency; the wafer box uses a stainless iron plate 7 to form an independent discharge position 71, which can separate the wafers, and the wafer box can adapt to the use requirements of different types of wafers, and improve the use flexibility and overall production efficiency of the equipment; the present invention integrates the functions of bearing, adjustment, clamping, opening and closing the box, simplifies the process, and improves the production efficiency and the degree of production standardization. Therefore, the present invention effectively overcomes the various shortcomings in the prior art and has a high industrial utilization value.

[0039] The above embodiments are merely illustrative of the principles and effects of the present invention, and are not intended to limit the present invention. Anyone familiar with the art may modify or alter the above embodiments without departing from the spirit and scope of the present invention. Therefore, all equivalent modifications or alterations made by a person of ordinary skill in the art without departing from the spirit and technical concept disclosed by the present invention shall still be covered by the claims of the present invention.

Claims

1. A wafer loading platform, comprising a base portion and a wafer box disposed on the upper end of the base portion; Features: The base portion comprises a metal bottom plate (1) and a sliding tray (2) arranged on the upper end of the metal bottom plate (1), a sliding mechanism (3) is arranged between the metal bottom plate (1) and the sliding tray (2), and the wafer box is arranged on the sliding tray (2); The wafer box comprises a box body (6), in which a plurality of stainless steel plates (7) are evenly distributed from top to bottom, and a wafer placing position (71) is located at the upper end of each of the stainless steel plates (7); The front ends of the box body (6) are provided with a rotating shaft (8) via a rotating connecting piece, the upper end of the rotating shaft (8) is provided with a knob (9), the outer side of the rotating shaft (8) is provided with a rotating rod (10), the rotating rod (10) is provided with a plurality of L-shaped rods (102) from top to bottom, and a single L-shaped rod (102) can be rotatably matched in a material discharge position (71); the outer side of the lower end of the rotating rod (10) is provided with a clamp (101); The upper sides of the metal bottom plate (1) are also provided with a box opening module (11), the box opening module (11) comprising a cylinder (111) and a metal stopper (112) arranged at the output end of the cylinder (111), a spring (113) is arranged in the metal stopper (112), the other end of the spring (113) is provided with a pin (114), and a movable roller (115) is arranged on the pin (114); the output end of the box opening module (11) cooperates to push the clamp (101) to move, so that the rotating rod (10) drives the L-shaped rod (102) to rotate to open or close the discharge position (71); The upper end of the metal bottom plate (1) is also provided with a beam-type in-place detection sensor (12), which is distributed at the front end of the wafer box and is used to detect whether the wafer box is placed in place on the base part; Vertical quick clamps (5) are provided on both sides of the upper end of the metal base plate (1), and the vertical quick clamps (5) can adjustably lock the sliding tray (2). The vertical quick clamps (5) include a support seat (51) and a horizontal clamp (52) and a vertical clamp (53) which are hingedly connected to the support seat (51) through a pin shaft and cross-clamped, and a pressure head (54) is provided at the end of the horizontal clamp (52); The upper end of the metal bottom plate (1) is also provided with a spring pin (15), and the sliding tray (2) is provided with a through hole (21). After the wafer box is placed in place, the spring pin (15) passes through the through hole (21) and is locked at the rear end of the box body (6), so as to stop the wafer box from retreating after it is placed in place on the base part.

2. The wafer loading platform according to claim 1, characterized in that: The front ends of the box body (6) are also provided with columns (16), and a third magnet (17) is provided on the columns (16) at a position opposite to one end of the L-shaped rod (102); and both ends of the L-shaped rod (102) are provided with a fourth magnet (18) having a magnetic pole opposite to that of the third magnet (17).

3. The wafer loading platform according to claim 2, characterized in that: The rear end of the box body (6) is provided with a baffle (20) for limiting and supporting the rear end of the wafer; both ends of the inner side of the box body (6) are provided with support platforms (61) for supporting the wafer and the stainless steel plate (7).

4. The wafer loading platform according to claim 3, characterized in that: A magnet (19) is provided on the inner end of the column (16), and the front end of the stainless iron plate (7) is adsorbed on the magnet (19).

5. The wafer loading platform according to claim 1, characterized in that: The upper end of the sliding tray (2) is provided with a first magnet (13), and the lower end of the box body (6) is provided with a second magnet (14) having a magnetic pole opposite to that of the first magnet (13). The wafer box is detachably placed relative to the sliding tray (2) by attracting the first magnet (13) through the second magnet (14).

6. The wafer loading platform according to claim 1, characterized in that: The sliding mechanism (3) comprises a sliding rail (31) and a sliding block (32) which are slidably matched, the sliding rail (31) being mounted on the lower end of the sliding tray (2), and the sliding block (32) being mounted on the upper end of the metal bottom plate (1); a movable roller (4) is mounted on the front end of the sliding tray (2), and the roller (4) rolls on the metal bottom plate (1).

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