Substrate storage container and cover thereof

Abstract

The invention relates to a substrate storage container and a cover thereof. A substrate storage container (1) is provided with: a container main body (2) in which a substrate storage space (27) capable of storing a plurality of substrates (W) is formed, and which has, at one end, an opening peripheral edge part (28) in which a container main body opening part (21) communicating with the substrate storage space is formed; and a lid body (3) which can be attached to and detached from the opening of the container main body, can close the opening of the container main body, and has a sealing member attachment part (311) and a peripheral edge part facing part (331) facing the peripheral edge part of the opening, the lid body further having a sealing member (4), and the sealing member has: a base part (41) held by the sealing member attachment part; a peripheral edge abutting lip portion (421) extending from the base portion and abutting against the opening peripheral edge portion; and a facing portion abutting lip portion (422) extending from the base portion and abutting the peripheral portion facing portion. The peripheral portion facing portion has a cross-sectional shape of a non-straight plane indicating an arrangement target (PT) of the facing portion abutting lip portion.

Description

Technical Field

[0001] The present invention relates to a substrate storage container for storing substrates such as semiconductor wafers and a cover thereof. Background Art

[0002] As a container for storing substrates such as semiconductor wafers, a container having a structure including a container body and a lid body has been conventionally known.

[0003] The container body has a cylindrical wall portion, which is formed with a container body opening at one end and is closed at the other end. A substrate storage space is formed in the container body. The substrate storage space is formed by being surrounded by the wall portion and can store a plurality of substrates. The cover body can be detached from the container body opening and can close the container body opening.

[0004] A front holding member is provided at a portion of the cover body and at a portion opposite to the substrate storage space when the opening of the container body is closed. When the opening of the container body is closed by the cover body, the front holding member can support the edge portions of a plurality of substrates. In addition, the inner substrate support portion is provided on the wall portion in a paired manner with the front holding member. The inner substrate support portion can support the edge portions of a plurality of substrates. When the opening of the container body is closed by the cover body, the inner substrate support portion cooperates with the front holding member to support the plurality of substrates, thereby maintaining the plurality of substrates in a state where adjacent substrates are separated from each other at a predetermined interval and arranged.

[0005] In addition, a sealing member is provided on the cover. The sealing member is mounted on the sealing member mounting portion of the cover and is arranged around the outer peripheral edge of the cover. When the cover is mounted on the peripheral edge of the opening, the sealing member is elastically deformed by being clamped by the sealing surface of the container body and the inner surface of the cover, and the cover seals the opening of the container body in a state where the opening of the container body is sealed. By removing the cover from the peripheral edge of the opening, the substrate can be taken out or put into the substrate storage space in the container body (for example, refer to Patent Document 1).

[0006] Patent Document 1: Japanese Patent No. 4953690

[0007] In order to ensure airtightness when sealing with a sealing member, the sealing member needs to be appropriately mounted on the sealing member mounting portion of the cover body and arranged at the arrangement destination of the sealing member. However, it is not easy to arrange the sealing member at the arrangement destination. Summary of the invention

[0008] An object of the present invention is to provide a substrate storage container and a cover body, which can appropriately attach a sealing member to a sealing member attaching portion of the cover body and arrange the sealing member at an arrangement destination.

[0009] The present invention relates to a substrate storage container, comprising: a container body, in which a substrate storage space capable of storing a plurality of substrates is formed, and at one end thereof, an opening peripheral edge portion is formed, in which an opening of the container body communicating with the substrate storage space is formed; and a cover body, which can be detached from the opening of the container body and can close the opening of the container body, and has a sealing member mounting portion and a peripheral edge portion opposing portion opposed to the opening peripheral edge portion, wherein the cover body further has a sealing member, which is mounted on the sealing member mounting portion of the cover body and is clamped in the container body. The opening peripheral portion and the peripheral portion opposing portion are tightly abutted against each other and against the opening peripheral portion and the peripheral portion opposing portion, thereby closing the container body opening in an airtight state, and the sealing member comprises: a base held on the sealing member mounting portion; a peripheral portion abutting lip extending from the base and abutting against the opening peripheral portion; and an opposing portion abutting lip extending from the base and abutting against the peripheral portion opposing portion, the peripheral portion opposing portion having a non-straight plane cross-sectional shape representing a configuration target of the opposing portion abutting lip.

[0010] Furthermore, it is preferable that the cross-sectional shape of the non-straight plane of the peripheral edge portion opposing portion is a protruding shape protruding toward the opposing portion contact lip portion side with respect to a straight plane serving as a reference.

[0011] Furthermore, it is preferable that the protruding shape of the peripheral portion facing portion is a smoothly protruding shape, a shape formed by connecting a plurality of straight planes, or a shape having a protrusion that partially protrudes so as to restrict movement of the facing portion contact lip.

[0012] In addition, it is preferable that the cross-sectional shape of the non-straight plane of the peripheral portion opposing portion has a restricting recessed portion which is recessed toward a side away from the opposing portion contact lip relative to a straight plane serving as a reference and with which the opposing portion contact lip can be engaged.

[0013] In addition, it is preferable that the cross-sectional shape of the non-straight plane of the peripheral edge portion opposing portion is provided so as to surround the peripheral edge portion of the cover body.

[0014] In addition, the present invention relates to a cover body, which is a cover body of a substrate storage container, comprising: a container body, in which a substrate storage space capable of storing a plurality of substrates is formed, and at one end thereof, an opening peripheral edge portion is formed, in which an opening of the container body communicating with the substrate storage space is formed; and a cover body which can be detached from the opening of the container body, has a sealing member mounting portion and a peripheral edge portion opposing portion opposed to the opening peripheral edge portion, and can close the opening of the container body, the cover body further comprising a sealing member, which is mounted on the sealing member mounting portion of the cover body, The sealing member is sandwiched between the opening peripheral portion and the peripheral portion opposing portion and is tightly abutted against the opening peripheral portion and the peripheral portion opposing portion, thereby closing the container body opening in an airtight state together with the cover body, and comprises: a base held by the sealing member mounting portion; a peripheral portion abutting lip extending from the base and abutting against the opening peripheral portion; and an opposing portion abutting lip extending from the base and abutting against the peripheral portion opposing portion, the peripheral portion opposing portion having a non-straight plane cross-sectional shape representing the configuration target of the opposing portion abutting lip.

[0015] According to the present invention, it is possible to provide a substrate storage container and a cover body in which it is easy to appropriately attach a sealing member to a sealing member attaching portion of a cover body and to arrange the sealing member at an arrangement destination. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is an exploded perspective view showing the substrate storage container 1 according to the first embodiment of the present invention. Figure 2 It is an exploded perspective view showing a state where substrates W are stored in the substrate storage container 1 according to the first embodiment of the present invention. Figure 3 It is a perspective view of the cover body 3 showing a state where the sealing member 4 and the front holding member 7 are attached to the substrate storage container 1 according to the first embodiment of the present invention. Figure 4 It is a perspective view showing the sealing member 4 of the lid 3 of the substrate storage container 1 according to the first embodiment of the present invention. Figure 5 It is a rear view of the cover body 3 showing a state where the sealing member 4 and the front holding member 7 are removed from the substrate storage container 1 according to the first embodiment of the present invention. Fig. 6A It is along Figure 3 as well as Figure 5 Cross-sectional view along line AA. Figure 6B yes Fig. 6A A partial enlarged view of . Figure 6C It is for Fig. 6AA diagram showing a state in which the sealing member 4 is deviated from the placement target. Fig. 7A 2 is a cross-sectional view showing a cover 3 of a substrate storage container 1 according to a second embodiment of the present invention (with Fig. 6A corresponding figure). Figure 7B yes Fig. 7A A partial enlarged view of . Figure 8 2 is a cross-sectional view showing a cover 3 of a substrate storage container 1 according to a third embodiment of the present invention (with Fig. 6A corresponding figure). Fig. 9 2 is a cross-sectional view showing a cover 3 of a substrate storage container 1 according to a fourth embodiment of the present invention (with Fig. 6A corresponding figure). Fig. 10A It is a top view showing the substrate holding adapter 8 . Fig. 10B It is a plan view showing a state where the substrate W is held by the substrate holding adapter 8 . Fig. 10C yes Fig. 10B Schematic central longitudinal section view of . DETAILED DESCRIPTION

[0017] [First embodiment] Hereinafter, a substrate storage container 1 according to a first embodiment of the present invention will be described with reference to the drawings. Figure 1 It is an exploded perspective view showing the substrate storage container 1 according to the first embodiment of the present invention. Figure 2 It is an exploded perspective view showing a state where substrates W are stored in the substrate storage container 1 according to the first embodiment of the present invention. Figure 3 It is a perspective view of the cover body 3 showing a state where the sealing member 4 and the front holding member 7 are attached to the substrate storage container 1 according to the first embodiment of the present invention. Figure 4 It is a perspective view showing the sealing member 4 of the lid 3 of the substrate storage container 1 according to the first embodiment of the present invention. Figure 5 It is a rear view of the cover body 3 showing a state where the sealing member 4 and the front holding member 7 are removed from the substrate storage container 1 according to the first embodiment of the present invention. Fig. 6A It is along Figure 3 as well as Figure 5 Cross-sectional view along line AA. Figure 6B yes Fig. 6A A partial enlarged view of . Figure 6C It is for Fig. 6A A diagram showing a state in which the sealing member 4 is deviated from the placement target.

[0018] Here, for the sake of convenience, the direction from the container body 2 toward the lid body 3 ( Figure 1 The direction from the upper right to the lower left in the figure is defined as the front direction D11, the opposite direction is defined as the rear direction D12, and these two directions are defined as the front-rear direction D1. Figure 1 The upper direction (in the figure) is defined as the upper direction D21, the opposite direction thereof is defined as the lower direction D22, and these two directions are defined as the upper and lower directions D2. In addition, the direction from the second side wall 26 toward the first side wall 25 ( Figure 1 The direction from the lower right to the upper left in the figure is defined as the left direction D31, the opposite direction is defined as the right direction D32, and these two directions are defined as the left and right directions D3.

[0019] In addition, the substrates W (see Figure 2 ) is a disk-shaped silicon wafer, glass wafer, sapphire wafer, etc., and is a thin substrate used in industry. The substrate W in this embodiment is a silicon wafer with a diameter of 200 mm to 450 mm.

[0020] like Figure 1-2 As shown, the substrate storage container 1 is used to store the substrate W composed of the above-mentioned silicon wafer, and has a container body 2, a cover body 3, a substrate supporting plate-like portion 5 as a side substrate supporting portion, an inner substrate supporting portion (not shown), and a front retaining member 7 as a cover body side substrate supporting portion.

[0021] like Figure 1 As shown, the container body 2 has a cylindrical wall portion 20, which has a container body opening portion 21 formed at one end and is closed at the other end. A substrate storage space 27 is formed in the container body 2. The substrate storage space 27 is surrounded by the wall portion 20. A substrate support plate portion 5 is arranged at a portion of the wall portion 20 that forms the substrate storage space 27. Figure 2 As shown, the substrate storage space 27 can store a plurality of substrates W.

[0022] The substrate support plate-like portions 5 are provided on the wall portion 20 in pairs along the left-right direction D3 in the substrate storage space 27. When the container body opening 21 is not closed by the cover body 3, the substrate support plate-like portions 5 abut against the side portions of the edge portions of the plurality of substrates W, thereby supporting the side portions of the edge portions of the plurality of substrates W while the adjacent substrates W are separated and arranged at a predetermined interval. A rear substrate support portion (not shown) is provided on the rear side of the substrate support plate-like portion 5.

[0023] The back substrate support portion (not shown) is provided on the wall portion 20 in a paired manner with the front holding member 7 in the substrate storage space 27. When the container body opening 21 is closed by the lid 3, the back substrate support portion (not shown) abuts against the rear portions of the edge portions of the plurality of substrates W, thereby being able to support the rear portions of the edge portions of the plurality of substrates W.

[0024] The cover body 3 can be detached from the opening peripheral edge portion 28 forming the container body opening 21, and can close the container body opening 21. The front holding member 7 is provided at a portion of the cover body 3 and at a portion facing the substrate storage space 27 when the container body opening 21 is closed by the cover body 3. The front holding member 7 is arranged inside the substrate storage space 27 in a paired manner with the back substrate support portion (not shown) in the front-rear direction D1.

[0025] When the container body opening 21 is closed by the cover 3, the front holding member 7 abuts against the edges of the plurality of substrates W, thereby supporting the front of the edges of the plurality of substrates W. When the container body opening 21 is closed by the cover 3, the front holding member 7 cooperates with the back substrate support part (not shown) to support the plurality of substrates W, thereby holding the plurality of substrates W in a state where adjacent substrates W are separated and arranged at a predetermined interval. Each part will be described in detail below.

[0026] like Figure 1 As shown in the figures, the wall portion 20 of the container body 2 includes an inner wall 22, an upper wall 23, a lower wall 24, a first side wall 25, and a second side wall 26. The inner wall 22, the upper wall 23, the lower wall 24, the first side wall 25, and the second side wall 26 are made of a plastic material, and in this embodiment, are integrally formed of polycarbonate.

[0027] The first side wall 25 is opposed to the second side wall 26, and the upper wall 23 is opposed to the lower wall 24. The rear end of the upper wall 23, the rear end of the lower wall 24, the rear end of the first side wall 25, and the rear end of the second side wall 26 are all connected to the inner wall 22. The front end of the upper wall 23, the front end of the lower wall 24, the front end of the first side wall 25, and the front end of the second side wall 26 constitute an opening peripheral portion 28, which has a positional relationship opposed to the inner wall 22 and forms a container body opening portion 21 having a substantially rectangular shape.

[0028] The opening peripheral portion 28 is provided at one end of the container body 2, and the inner wall 22 is located at the other end of the container body 2. The outer shape of the container body 2 formed by the outer surface of the wall portion 20 is box-shaped. The inner surface of the wall portion 20, that is, the inner surface of the inner wall 22, the inner surface of the upper wall 23, the inner surface of the lower wall 24, the inner surface of the first side wall 25, and the inner surface of the second side wall 26 form a substrate storage space 27 surrounded by them. The container body opening 21 formed in the opening peripheral portion 28 is connected to the substrate storage space 27 surrounded by the wall portion 20 and formed inside the container body 2. A maximum of 25 substrates W can be stored in the substrate storage space 27.

[0029] like Figure 1 , Figure 2 As shown, latch engaging recesses 231A, 231B, 241A, 241B are formed in a part of the upper wall 23 and the lower wall 24 and in a part near the opening peripheral edge 28, and are recessed toward the outside of the substrate storage space 27. The latch engaging recesses 231A, 231B, 241A, 241B are formed one each near the left and right ends of the upper wall 23 and the lower wall 24, and a total of four are formed.

[0030] like Figure 1 , Figure 2 As shown, in the outer surface of the upper wall 23, a flange fixing portion (not shown) and ribs 235A and 235B are provided integrally with the upper wall 23. The flange fixing portion (not shown) is arranged at the central portion of the upper wall 23. A top flange 236 is fixed to the flange fixing portion (not shown). The top flange 236 is arranged at the central portion of the upper wall 23. The top flange 236 is a member that becomes a part that is hooked and suspended in the substrate storage container 1 when the substrate storage container 1 is suspended in an AMHS (automatic wafer handling system), a PGV (wafer substrate transport vehicle), etc.

[0031] A plurality of ribs 235A extend substantially to the left and right from the top flange 236. A plurality of ribs 235B extend substantially to the front direction D11 from the top flange 236, and a plurality of ribs 235B extend substantially to the rear direction D12 from the top flange 236.

[0032] A latch mechanism is provided in the cover body 3. The latch mechanism is provided near the left and right ends of the cover body 3, such as Figure 1 to Figure 3 as well as Figure 5 As shown, there are two upper latch parts 32A that can protrude from the upper side of the cover body 3 toward the upper direction D21, and two lower latch parts 32B that can protrude from the lower side of the cover body 3 toward the lower direction D22. The two upper latch parts 32A are arranged near the left and right ends of the upper side of the cover body 3, and the two lower latch parts 32B are arranged near the left and right ends of the lower side of the cover body 3.

[0033] An operation portion 33 is provided on the outer surface of the cover 3. By operating the operation portion 33 from the front side of the cover 3, the upper latch portion 32A and the lower latch portion 32B can be made to protrude from the upper side and the lower side of the cover 3, or the upper latch portion 32A and the lower latch portion 32B can be made not to protrude from the upper side and the lower side. The upper latch portion 32A protrudes from the upper side of the cover 3 in the upward direction D21 and engages with the latch engagement recesses 231A and 231B of the container body 2, and the lower latch portion 32B protrudes from the lower side of the cover 3 in the downward direction D22 and engages with the latch engagement recesses 241A and 241B of the container body 2, thereby fixing the cover 3 to the opening peripheral edge portion 28 of the container body 2.

[0034] A front holding member 7 is fixedly provided on the inner side of the cover body 30 of the cover body 3. In the present embodiment, the front holding member 7 is configured to be separated in the left-right direction D3. The front holding member 7 has a front holding member substrate receiving portion 73. The front holding member substrate receiving portions 73 are arranged in pairs in the left-right direction D3 at a predetermined interval. Two of the front holding member substrate receiving portions 73 are arranged in pairs in the left-right direction D3. The front holding member substrate receiving portions 73, which are arranged in pairs in this way, are arranged in a state where 25 pairs are arranged in the up-down direction D2. By accommodating the substrate W in the substrate accommodating space 27 and closing the cover body 3, the front holding member substrate receiving portions 73 clamp and support the edge of the edge of the substrate W.

[0035] like Figure 3 to Figure 5 As shown, the cover 3 has a substantially rectangular shape that is substantially consistent with the shape of the opening peripheral portion 28 of the container body 2. The cover 3 can be detached from the opening peripheral portion 28 of the container body 2. By attaching the cover 3 to the opening peripheral portion 28, the cover 3 can close the container body opening 21. Figure 1 The inner surface of the cover body 3 shown in the figure), and is a surface opposite to the surface of the step portion (sealing surface 281) formed at a position D12 behind the opening edge of the opening peripheral portion 28 when the cover body 3 closes the opening portion 21 of the container body, and an annular sealing member 4 is installed.

[0036] When the cover 3 is mounted on the opening peripheral portion 28, the lip portion 42 of the sealing member 4, which will be described later, is elastically deformed by being sandwiched between the sealing surface 281 and the peripheral portion opposing portion 331 constituting the inner surface of the cover 3, and the cover 3 closes the container body opening 21 in a state of sealing the container body opening 21. By removing the cover 3 from the opening peripheral portion 28, the substrate W can be taken out or put into the substrate storage space 27 in the container body 2.

[0037] More specifically, the cover 3 has a cover body 30. The cover body 30 forms an outer contour of the cover 3 that is substantially rectangular. Therefore, the cover body 30 has a substantially rectangular shape. The cover body 30 has an inner surface 301 (see Figure 3 The inner surface 301 faces the substrate storage space 27 when the container body opening 21 is closed by the cover 3. The outer surface 302 is exposed to the outside of the substrate storage container 1 when the container body opening 21 is closed by the cover 3. The cover body 30 is made of a plastic material, etc., and in this embodiment, is formed of polycarbonate.

[0038] like Fig. 6A As shown in the figures, a sealing member mounting portion 311 and a peripheral portion facing portion 331 are provided at a portion of the peripheral edge of the cover body 30 and opposite to the sealing surface 281 constituting the opening peripheral edge portion 28 of the container body 2. A retaining groove 321 is formed at the sealing member mounting portion 311. The sealing member mounting portion 311 is formed so as to exist around a portion of the peripheral edge of the cover body 30, and the retaining groove 321 also exists along the sealing member mounting portion 311 so as to exist around a portion of the peripheral edge of the cover body 30. The peripheral portion facing portion 331 is composed of a portion of the peripheral edge of the cover body 30 that is opposite to the sealing surface 281 constituting the opening peripheral edge portion 28 and is closer to the outside of the cover body 3 than the retaining groove 321. The peripheral portion facing portion 331 is composed of a portion of the peripheral edge of the cover body 30 and is a plate-shaped portion that extends in the D2-D3 plane (perpendicular to the front-rear direction D1).

[0039] like Fig. 6A As shown, the retaining groove 321 has a groove bottom surface 322 and a pair of groove side surfaces 323. The cross-sectional shape of the retaining groove 321 obtained by cutting in a direction orthogonal to the direction in which the retaining groove 321 extends is roughly rectangular. In this cross section, the surface extending from the opening of the retaining groove 321 along the depth direction of the retaining groove 321 constitutes a pair of groove side surfaces 323. The groove bottom surface 322 constitutes the bottom of the retaining groove 321. The base 41 of the sealing member 4 described later is inserted into the retaining groove 321. Thus, the sealing member 4 is mounted on the sealing member mounting portion 311 of the cover body 3, and the lip portion 42 of the sealing member 4 can abut against the opening peripheral edge portion 28 and the peripheral edge portion opposing portion 331.

[0040] The sealing member 4 is made of various thermoplastic elastomers such as polyester and polyolefin elastomers that can be elastically deformed, fluororubber, silicone rubber, etc. Figure 4 As shown, the sealing member 4 has a rectangular ring shape and is arranged so as to surround the outer peripheral edge of the cover body 3 .

[0041] The sealing member 4 has a base portion 41 and a lip portion 42. Fig. 6A as well as Figure 6CAs shown, the cross-sectional shape of the base 41 orthogonal to the annular circumferential direction of the sealing member 4 is a roughly rectangular shape with concave and convex portions on the outer periphery. The base 41 has a front end face 411, a pair of side faces 412 extending from the front end face 411, and a base end 410 located at the front end extending from the side faces 412. The side faces 412 are concave and convex surfaces in which concave portions and convex portions are alternately arranged and extended. In the base 41, the front end face 411 and the pair of side faces 412 are inserted into the retaining groove 321. The pair of side faces 412 of the base 41 inserted into the retaining groove 321 have an opposing positional relationship with a pair of groove side faces 323.

[0042] The lip portion 42 is integrally formed at the base end 410 located at the front end where the side surface 412 extends from the front end surface 411 of the base 41. The lip portion 42 extends from the base end 410 of the base 41 in a direction inclined relative to the direction in which the side surface 412 extends from the front end surface 411 of the base 41. Fig. 6A As shown in the figures, the lip 42 is divided into two parts from the middle, forming a peripheral abutting lip 421 and an opposing abutting lip 422. When the lid 3 closes the container body opening 21, the peripheral abutting lip 421 abuts against the sealing surface 281 of the opening peripheral portion 28 of the container body 2, and the opposing abutting lip 422 abuts against the peripheral opposing portion 331.

[0043] If Fig. 6A Taking the portion on the upper direction D21 side of the cover body 3 shown in the figure as an example, the peripheral portion abutting lip 421 extends in an inclined direction between the rear direction D12 and the upper direction D21 (the outer direction of the D2-D3 plane) in a manner of abutting against the opening peripheral portion 28. The opposing portion abutting lip 422 extends in an inclined direction between the front direction D11 and the upper direction D21 (the outer direction of the D2-D3 plane) in a manner of abutting against the peripheral portion opposing portion 331. In addition, the directions in which the peripheral portion abutting lip 421 and the opposing portion abutting lip 422 extend differ depending on the position of the sealing member 4 in the cover body 3, but the extending direction can be roughly referred to as the outer direction of the D2-D3 plane.

[0044] Through the abutment of the peripheral abutting lip 421 against the opening peripheral portion 28, and the abutment of the opposing portion abutting lip 422 against the peripheral portion opposing portion 331, the lip 42 of the sealing member 4 is clamped between the opening peripheral portion 28 and the peripheral portion opposing portion 331 and is tightly attached to the opening peripheral portion 28 and the peripheral portion opposing portion 331, thereby sealing the container body opening 21 in an airtight state together with the cover body 3.

[0045] Next, the shape of the peripheral edge portion opposing portion 331 will be described in detail. Figure 6BAs shown, the peripheral portion opposing portion 331 has a non-straight plane cross-sectional shape representing the configuration target PT of the opposing portion abutting lip portion 422. The non-straight plane cross-sectional shape in the peripheral portion opposing portion 331 is arranged to surround the peripheral portion of the cover body 3. For example, in the present embodiment, if the base 41 of the sealing member 4 is fully inserted into the retaining groove 321 of the sealing member mounting portion 311 of the cover body 3 (the front end surface 411 of the base 41 of the sealing member 4 is fully abutted against the groove bottom surface 322 of the retaining groove 321), the sealing member 4 in this state is configured at the configuration target PT (refer to Fig. 6A , Figure 6B ). In this state, the airtightness when the sealing member 4 is closed can be ensured.

[0046] On the other hand, Figure 6C As shown, if the base 41 of the sealing member 4 is not sufficiently inserted into the retaining groove 321 of the sealing member mounting portion 311 of the cover body 3 (typically, the front end face 411 of the base 41 of the sealing member 4 does not abut against the groove bottom face 322 of the retaining groove 321), the sealing member 4 in this state is not configured at the configuration target PT (deviation). In this state, the airtightness of the sealing member 4 when closed cannot be ensured (airtightness cannot be ensured).

[0047] Thus, in order to ensure airtightness when the sealing member 4 is closed, it is extremely important to arrange the sealing member 4 at the arrangement target PT. However, in the manufacturing process of the cover body 3, it is not easy to confirm whether the sealing member 4 is arranged at the arrangement target PT of the sealing member mounting portion 311. In addition, in the substrate storage container 1, in order to prevent contamination, a mark indicating the arrangement target PT, such as an attached object, cannot be added to the sealing member mounting portion 311.

[0048] In contrast, in the present embodiment, the peripheral portion opposing portion 331 has a non-straight plane cross-sectional shape indicating the configuration target PT of the opposing portion abutting lip portion 422. From another perspective, the peripheral portion opposing portion 331 has a non-straight plane surface indicating the configuration target of the opposing portion abutting lip portion 422 on the rear direction D12 side. If the cross-sectional shape (surface) is a non-straight plane, the configuration target PT can be indicated based on the shape even without adding a mark or the like.

[0049] like Figure 6B As shown, the cross-sectional shape of the non-straight plane in the peripheral portion opposing portion 331 is a protruding shape protruding toward the opposing portion abutting lip portion 422 side (the rear direction D12 side) relative to the reference straight plane (reference plane) P. The reference straight plane P is typically an imaginary straight plane when the peripheral portion opposing portion 331 is to be formed by a straight plane.

[0050] In the first embodiment, the protruding shape in the peripheral portion opposing portion 331 is a smoothly protruding shape. The top of the protruding portion indicates the configuration target PT. The protruding portion may be a convex strip extending all around the peripheral portion (up and down direction D2, left and right direction D3) of the cover body 3, a convex strip extending partially, or a convex portion that does not substantially extend.

[0051] According to the substrate storage container 1 of the first embodiment having the above-mentioned structure, the following effects can be obtained. The substrate storage container 1 of the first embodiment comprises: a container body 2, in which a substrate storage space 27 capable of storing a plurality of substrates W is formed, and an opening peripheral portion 28 having a container body opening 21 communicating with the substrate storage space 27 formed at one end; and a cover body 3, which can be detached from the container body opening 21, can close the container body opening 21, and has a sealing member mounting portion 311 and a peripheral portion opposing portion 331 opposing the opening peripheral portion 28. The cover body 3 further comprises a sealing member 4, which is mounted on the sealing member mounting portion 311 of the cover body 3, sandwiched between the opening peripheral portion 28 and the peripheral portion opposing portion 331, and tightly abutted against the opening peripheral portion 28 and the peripheral portion opposing portion 331, thereby sealing the container body opening 21 in an airtight state. The sealing member 4 has a base 41 held by the sealing member mounting portion 311, a peripheral portion abutting lip 421 extending from the base 41 and abutting against the opening peripheral portion 28, and an opposing portion abutting lip 422 extending from the base 41 and abutting against the peripheral portion opposing portion 331. The peripheral portion opposing portion 331 has a cross-sectional shape that is a non-straight plane representing the configuration target PT of the opposing portion abutting lip 422.

[0052] Therefore, according to the first embodiment, the facing portion contact lip portion 422 can be easily arranged on the arrangement target PT with reference to the shape of the peripheral portion facing portion 331. There is basically no contamination caused by the means for indicating the arrangement target PT.

[0053] [Second embodiment] Next, a second embodiment of the present invention will be described with reference to the drawings. Fig. 7A 2 is a cross-sectional view showing a cover 3 of a substrate storage container 1 according to a second embodiment of the present invention (with Fig. 6A corresponding figure). Figure 7B yes Fig. 7A A partial enlarged view of .

[0054] like Fig. 7A As shown, in the second embodiment, the protruding shape of the peripheral portion facing portion 331 is different from that in the first embodiment. Since the other configurations in the second embodiment are the same as those in the first embodiment, the same reference numerals are given to the same components and the description thereof is omitted.

[0055] In the second embodiment, Fig. 7A as well as Figure 7B As shown, the protruding shape of the peripheral portion facing portion 331 is a shape formed by connecting a plurality of straight planes P1 and P2. The ridge formed by the plurality of straight planes P1 and P2 represents the placement target PT. According to the second embodiment, the same effects as those of the first embodiment can be obtained.

[0056] [Third embodiment] Next, a third embodiment of the present invention will be described with reference to the drawings. Figure 8 2 is a cross-sectional view showing a cover 3 of a substrate storage container 1 according to a third embodiment of the present invention (with Fig. 6A corresponding figure).

[0057] like Figure 8 As shown, in the third embodiment, the protruding shape of the peripheral portion facing portion 331 is different from that in the first and second embodiments. Since the other configurations in the third embodiment are the same as those in the first embodiment, the same reference numerals are used for the same components and the description thereof is omitted.

[0058] In the third embodiment, Figure 8 As shown, the protruding shape of the peripheral portion facing portion 331 is a shape having a protrusion 332 that partially protrudes so as to restrict the movement of the facing portion contact lip portion 422 .

[0059] According to the third embodiment, the same effect as that of the first embodiment can be obtained. In addition, according to the third embodiment, the protruding shape of the peripheral portion opposing portion 331 is a shape having a protrusion 332 that partially protrudes so as to limit the movement of the opposing portion abutting lip 422, so that the opposing portion abutting lip 422 is arranged on the configuration target PT in a manner that abuts against the protrusion 332. Assuming that the opposing portion abutting lip 422 deviates outward from the configuration target PT, the opposing portion abutting lip 422 does not abut against the protrusion 332, so it is easy to determine whether it is arranged on the configuration target PT. Once the opposing portion abutting lip 422 is arranged on the configuration target PT, the opposing portion abutting lip 422 easily abuts against the protrusion 332 and is easily hooked on the protrusion 332. Therefore, it is easy to maintain the state in which the opposing portion abutting lip 422 is arranged on the configuration target PT.

[0060] [Fourth embodiment] Next, a fourth embodiment of the present invention will be described with reference to the drawings. Fig. 9 2 is a cross-sectional view showing a cover 3 of a substrate storage container 1 according to a fourth embodiment of the present invention (with Fig. 6A corresponding figure).

[0061] like Fig. 9As shown, in the fourth embodiment, the cross-sectional shape of the non-straight plane in the peripheral portion opposing portion 331 is different from that in the first to third embodiments. Since the other configurations in the fourth embodiment are the same as those in the first embodiment, the same reference numerals are used for the same components and the description thereof is omitted.

[0062] In the fourth embodiment, Fig. 9 As shown, the cross-sectional shape of the non-straight plane in the peripheral portion opposing portion 331 has a limiting recess 333 that is recessed toward the side (front direction D11 side) away from the opposing portion abutting lip 422 relative to the straight plane P serving as a reference and that can be engaged with the opposing portion abutting lip 422. As long as the opposing portion abutting lip 422 can be engaged with the limiting recess 333, the shape and size of the limiting recess 333 are not particularly limited.

[0063] According to the fourth embodiment, the same effect as that of the first embodiment can be obtained. In addition, according to the fourth embodiment, the cross-sectional shape of the non-straight plane in the peripheral portion opposing portion 331 has a limiting recess 333 that is recessed toward a side away from the opposing portion abutting lip 422 relative to the straight plane P serving as a reference, and is a limiting recess 333 that the opposing portion abutting lip 422 can engage with. Therefore, the opposing portion abutting lip 422 is arranged on the configuration target PT in a manner that engages with the limiting recess 333. Assuming that the opposing portion abutting lip 422 deviates from the configuration target PT to the outside, since the opposing portion abutting lip 422 is not engaged with the limiting recess 333, it can be easily determined whether it is arranged on the configuration target PT. Once the opposing portion abutting lip 422 is arranged on the configuration target PT, the opposing portion abutting lip 422 engages with the limiting recess 333, so it is easy to maintain the state in which the opposing portion abutting lip 422 is arranged on the configuration target PT.

[0064] The present invention is not limited to the above-described embodiments, and can be modified within the technical scope described in the claims.

[0065] For example, in the embodiment, the base 41 of the sealing member 4 is held in the sealing member mounting portion 311 by being inserted into the retaining groove 321, but the method of being held in the sealing member mounting portion 311 is not limited thereto. For example, the base 41 of the sealing member 4 can be held in the sealing member mounting portion 311 by being clamped or engaged.

[0066] In the embodiment, the cross-sectional shape of the non-straight plane in the peripheral portion opposing portion 331 is arranged around the peripheral portion of the cover body 3, but is not limited thereto and may be arranged locally in the circumferential direction or may be arranged separately in a plurality in the circumferential direction.

[0067] The shapes of the container body 2 and the cover 3 , and the number and size of substrates W that can be stored in the container body 2 are not limited to those in the present embodiment.

[0068] The substrate W can be stored in the substrate storage space 27 using the substrate holding adapter 8 . Fig. 10A It is a top view showing the substrate holding adapter 8 . Fig. 10B It is a plan view showing a state where the substrate W is held by the substrate holding adapter 8 . Fig. 10C yes Fig. 10B The schematic central longitudinal sectional view of the substrate holding adapter 8 is a member constituting a part of the back substrate support portion (not shown), the substrate support plate portion 5 and the front holding member 7. The substrate holding adapter 8 can also be considered as a Figure 1 to Figure 3 The rear substrate supporting portion (not shown), the substrate supporting plate-like portion 5 , and the front holding member 7 in the illustrated embodiment are portions extending toward the center (the center of the substrate W) in a plan view.

[0069] like Fig. 10A As shown, the substrate holding adapter 8 includes an annular plate-like portion 81 and an adhesive sheet 82. The annular plate-like portion 81 is composed of a plate-like member that is roughly O-shaped when viewed from above (the outer peripheral edge 811 and the inner peripheral edge 812 are roughly circular). The annular plate-like portion 81 is made of, for example, metal (for example, SUS). The adhesive sheet 82 is composed of a thin film-like sheet member having adhesive properties, and is installed on the upper surface of the annular plate-like portion 81 in a manner that blocks the area inside the inner peripheral edge 812 of the annular plate-like portion 81. Fig. 10B as well as Fig. 10C As shown, the adhesive sheet 82 can hold the substrate W by its adhesive force. The substrate W is bonded and held to a region of the adhesive sheet 82 that is inside the inner peripheral edge 812 of the annular plate-shaped portion 81 .

[0070] exist Figure 1 to Figure 3 In the illustrated embodiment, when the substrate holding adapter 8 is applied, the front edge of the annular plate-shaped portion 81 is supported by the front holding member substrate receiving portion 73 of the front holding member 7, and the substrate holding adapter 8 as a part of the front holding member 7 supports the front edge of the substrate W. Similarly, the substrate holding adapter 8 as a part of the substrate supporting plate-shaped portion 5 supports the side of the edge of the substrate W when the container body opening 21 is not closed by the cover body 3. Similarly, the substrate holding adapter 8 as a part of the back substrate supporting portion (not shown) supports the rear edge of the substrate W when the container body opening 21 is closed by the cover body 3.

[0071] When vibration, impact, etc. are applied to the substrate storage container 1 storing the substrates W, the vibration, impact, etc. are reduced by the adhesive sheet 82. Therefore, the vibration, impact, etc. are not easily transmitted to the substrate W held by the adhesive sheet 82. Therefore, even if the substrate W has been subjected to additional processing after slicing and has reduced strength, when the substrate 2 is stored in the substrate storage container 1, it is not easy to be damaged by vibration or impact.

[0072] The substrate storage container 1 including the substrate holding adapter 8 can be used while being transported or stored in a state where the substrate holding adapter 8 is arranged in the substrate storage space 27 without storing the substrate W.

[0073] The substrate holding adapter 8 is not limited to the annular shape in plan view, and may be in a (non-closed) arc shape. Description of Reference Numerals

[0074] 1 substrate storage container 2 Container body 3 Cover 4 Sealing components 20Wall 21 Opening of container body 27 substrate storage space 28 opening periphery 41 base 42 Lips 311 Sealing component installation part 321 holding slot 331 peripheral portion opposing portion 332 protrusion 333 limit recess 421 peripheral edge portion abuts against lip portion 422 Opposing portion abutting lip P is a straight plane as a reference P1, P2 multiple straight planes PT configuration target W substrate

Claims

1. A substrate storage container, characterized in that: The substrate storage container comprises: A container body having a substrate storage space formed therein for storing a plurality of substrates, and having an opening peripheral edge portion at one end thereof having a container body opening portion communicating with the substrate storage space; as well as The cover body is detachable from the container body opening, can close the container body opening, and has a sealing member mounting portion and a peripheral portion facing the opening peripheral portion. The cover body further comprises a sealing member, which is mounted on the sealing member mounting portion of the cover body, sandwiched between the opening peripheral edge portion and the peripheral edge portion opposing portion and tightly abutted against the opening peripheral edge portion and the peripheral edge portion opposing portion, thereby sealing the container body opening in an airtight state. The sealing member comprises: a base held by the sealing member mounting portion; a peripheral portion contact lip extending from the base and contacting the peripheral portion of the opening; and an opposing portion contact lip extending from the base and contacting the opposing portion of the peripheral portion. The peripheral edge portion facing portion has a cross-sectional shape that is a non-straight plane indicating a location where the facing portion abutting lip portion is disposed.

2. The substrate storage container according to claim 1, wherein: The cross-sectional shape of the non-straight plane of the peripheral edge portion opposing portion is a protruding shape protruding toward the opposing portion contact lip portion side with respect to the straight plane serving as a reference.

3. The substrate storage container according to claim 2, characterized in that: The protruding shape of the peripheral portion facing portion is a smoothly protruding shape, a shape formed by connecting a plurality of straight planes, or a shape having a protrusion that partially protrudes so as to restrict movement of the facing portion contact lip portion.

4. The substrate storage container according to claim 1, wherein: The cross-sectional shape of the non-straight plane of the peripheral portion opposing portion has a restricting recessed portion which is recessed toward a side away from the opposing portion contact lip relative to a straight plane serving as a reference and with which the opposing portion contact lip can engage.

5. The substrate storage container according to any one of claims 1 to 4, characterized in that: The cross-sectional shape of the non-straight plane of the peripheral edge portion opposing portion is arranged to surround the peripheral edge portion of the cover body.

6. A cover body, which is a cover body of a substrate storage container, characterized in that: The substrate storage container comprises: A container body having a substrate storage space formed therein for storing a plurality of substrates, and having an opening peripheral edge portion at one end thereof having a container body opening portion communicating with the substrate storage space; as well as The cover body can be detachably mounted on the opening of the container body, has a sealing member mounting portion and a peripheral portion facing the peripheral portion of the opening, and can close the opening of the container body. The cover body further comprises a sealing member, which is mounted on the sealing member mounting portion of the cover body, sandwiched between the opening peripheral edge portion and the peripheral edge portion opposing portion and tightly abutted against the opening peripheral edge portion and the peripheral edge portion opposing portion, thereby sealing the container body opening in an airtight state together with the cover body. The sealing member comprises: a base held by the sealing member mounting portion; a peripheral portion contact lip extending from the base and contacting the peripheral portion of the opening; and an opposing portion contact lip extending from the base and contacting the opposing portion of the peripheral portion. The peripheral edge portion facing portion has a cross-sectional shape that is a non-straight plane indicating a location where the facing portion abutting lip portion is disposed.

7. The cover according to claim 6, characterized in that: The cross-sectional shape of the non-straight plane of the peripheral edge portion opposing portion is a protruding shape protruding toward the opposing portion contact lip portion side with respect to the straight plane serving as a reference.

8. The cover according to claim 7, characterized in that: The protruding shape of the peripheral portion facing portion is a smoothly protruding shape, a shape formed by connecting a plurality of straight planes, or a shape having a protrusion that partially protrudes so as to restrict movement of the facing portion contact lip portion.

9. The cover according to claim 6, characterized in that: The cross-sectional shape of the non-straight plane of the peripheral portion opposing portion has a restricting recessed portion which is recessed toward a side away from the opposing portion contact lip relative to a straight plane serving as a reference and with which the opposing portion contact lip can engage.

10. The cover according to any one of claims 6 to 9, characterized in that: The cross-sectional shape of the non-straight plane of the peripheral edge portion opposing portion is arranged to surround the peripheral edge portion of the cover body.

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