Plate conveying device for workpiece hanging plate transfer cabin of large vacuum coating machine

Abstract

The invention discloses a plate conveying device for a workpiece hanging plate transfer cabin of a large vacuum coating machine, the plate conveying device is arranged in a transfer cabin and comprises two plate conveying mechanisms which are oppositely arranged up and down, each plate conveying mechanism comprises a power source, a screw rod, a connecting seat, a sliding seat, a jacking mechanism and a sliding rail, the connecting seat is connected with a screw rod nut on the screw rod, and the sliding seat is connected with the jacking mechanism. The power source drives the lead screw to rotate to drive the connecting base to slide along the sliding rail, the sliding base is fixedly connected with the connecting base, the two jacking mechanisms are arranged on the sliding base, each jacking mechanism comprises a supporting block capable of ascending and descending, and a clamping groove matched with the thickness of a workpiece hanging plate is formed in each supporting block. The space of the transition cabin can be reduced, then the vacuumizing time of the cabin is shortened, and the working efficiency is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of large-scale vacuum coating machines, and in particular to a plate conveying device used for hanging plates and transferring cabins of workpieces of large-scale vacuum coating machines. Background Art

[0002] The technical development trend of vacuum coating equipment is to improve production capacity and efficiency, and to improve the quality and stability of coating products. In order to improve production capacity and efficiency, the equipment design is getting bigger and bigger, the loading capacity is increasing, and the single workpiece hanger (multiple workpieces are hung on the hanger to complete the coating together) is also bigger and heavier; in order to improve the quality and stability of the film layer, in addition to introducing new coating technologies and processes, a basic requirement is to control the stability of the coating atmosphere in the furnace, and to ensure that the residual gas in each furnace is reduced to a minimum and remains consistent. To achieve the above requirements, the most effective means is to carry out the coating and loading and unloading processes of each furnace in a vacuum, and the vacuum cannot be broken. In this way, each furnace is coated in the same vacuum environment, and the atmosphere in the furnace is not polluted by the atmosphere due to the vacuum breaking, and the consistency of the residual atmosphere between furnaces can be maintained, so that the quality and consistency of the film layer will be greatly improved. Therefore, in recent years, the development of vacuum coating equipment has been large-scale on the one hand and multi-chamber on the other.

[0003] For example, a vacuum coating device disclosed in Chinese patent CN216037214U includes four chambers: a process chamber, a conveying chamber, a feeding chamber, and a discharging chamber. The four chambers not only take up a large space, but also result in low efficiency of vacuuming due to the large space. In addition, in this multi-chamber design, the feeding chamber and the discharging chamber need to pass through a conveying chamber when feeding materials to the process chamber or discharging materials from the process chamber, which also results in low efficiency of feeding and discharging, and the mechanical structure and movement process of feeding and discharging are very complicated. Summary of the invention

[0004] The object of the present invention is to provide a plate feeding device for the workpiece hanging plate transfer cabin of a large vacuum coating machine, which has a compact structure and can reduce the space of the transition cabin, thereby shortening the time for vacuuming the cabin and improving work efficiency.

[0005] The purpose of the present invention can be achieved through the following technical solutions.

[0006] A plate feeding device for a workpiece plate transfer chamber of a large vacuum coating machine, wherein the plate feeding device is arranged in a transition chamber for plate entry and a transition chamber for plate exit of the vacuum coating equipment, and is used to feed the workpiece plate from the transition chamber for plate entry to a rotating rack in a process chamber, or to remove the workpiece plate from the rotating rack in the process chamber and feed it to the transition chamber for plate exit, wherein the plate feeding device comprises two plate feeding mechanisms arranged opposite to each other up and down, wherein the plate feeding mechanism comprises a power source, a screw rod, a connecting seat, a sliding seat, a lifting mechanism and a sliding rail parallel to the screw rod, wherein the connecting seat is connected to a screw rod nut on the screw rod, and the power source drives the screw rod to rotate and drives the connecting seat to move along the sliding rail The rail slides, the slide seat is fixedly connected to the connecting seat, the slide seat is provided with two jacking mechanisms, one in front and one in the back, the jacking mechanism includes a liftable support block, the support block is provided with a slot matching the thickness of the workpiece hanging plate, the slide seat of the upper plate feeding mechanism moves synchronously with the slide seat of the lower plate feeding mechanism, the support block of the front jacking mechanism on the upper plate feeding mechanism and the support block of the front jacking mechanism on the lower plate feeding mechanism form a pair of front clamping components for clamping the workpiece hanging plate, the support block of the rear jacking mechanism on the upper plate feeding mechanism and the support block of the rear jacking mechanism on the lower plate feeding mechanism form a pair of rear clamping components for clamping the workpiece hanging plate;

[0007] A plurality of workpiece hanging plate slots arranged in front and behind are arranged in the transition chamber for entering the plate and the transition chamber for exiting the plate.

[0008] In the transition cabin for feeding boards, the front lifting mechanism of the upper board feeding mechanism and the front lifting mechanism of the lower board feeding mechanism clamp and lift the workpiece hanging board placed in the front workpiece hanging board slot in the transition cabin, and follow the movement of their respective slides to deliver the workpiece hanging board to the rotating rack of the process cabin; the rear lifting mechanism of the upper board feeding mechanism and the rear lifting mechanism of the lower board feeding mechanism clamp and lift the workpiece hanging board placed in the rear workpiece hanging board slot in the transition cabin, and follow the movement of their respective slides to deliver the workpiece hanging board to the front workpiece hanging board slot in the transition cabin;

[0009] In the transition chamber for discharging the plate, the front lifting mechanism of the upper plate feeding mechanism and the front lifting mechanism of the lower plate feeding mechanism clamp and lift the workpiece hanging plate on the process chamber turntable, and follow the movement of their respective slides to send the workpiece hanging plate to the front workpiece hanging plate slot in the transition chamber. The rear lifting mechanism of the upper plate feeding mechanism and the rear lifting mechanism of the lower plate feeding mechanism clamp and lift the workpiece hanging plate placed in the front workpiece hanging plate slot in the transition chamber, and follow the movement of their respective slides to send the workpiece hanging plate to the rear workpiece hanging plate slot in the transition chamber.

[0010] The plate delivery device of the present invention is used to deliver uncoated workpiece hanging plates to the process chamber, or to remove coated workpiece hanging plates from the process chamber. The vacuum coating equipment only needs to be provided with one process chamber and two transition chambers, one of which is a transition chamber for entering plates, and the other is a transition chamber for exiting plates. The number of chambers is reduced, and the overall volume of the required vacuum chamber is significantly reduced, and the vacuuming time required to achieve working conditions is shortened. The present invention adopts two sets of lifting mechanisms, one set of front lifting mechanisms and one set of rear lifting mechanisms, which are compact in structure. The front lifting mechanism is combined with a linear drive of a screw rod to realize the transfer and transportation of the workpiece hanging plate at the front of the transition chamber and the process chamber. The rear lifting mechanism is combined with a linear drive of a screw rod to realize the transfer and transportation of the workpiece hanging plate at the front of the transition chamber and the rear of the transition chamber. Such a setting can shorten the stroke of the plate delivery. The plate delivery mechanism is arranged above and below the workpiece hanging plate, so that the length of the transition chamber can be designed to be shorter, and the volume of the transition chamber can be reduced, thereby improving the efficiency of plate delivery and vacuuming.

[0011] The present invention also has the following improvements:

[0012] The lifting mechanism of the present invention also includes a reducer, a coupling, a bearing seat, a transversely arranged output shaft, an eccentric block, a connecting block and a vertical guide component. The output end of the reducer is connected to one end of the output shaft through the coupling, the output shaft is installed on the bearing seat, the other end of the output shaft is connected to the eccentric block, the eccentric block is rotatably connected to one end of the connecting block through a connecting shaft, the other end of the connecting block is rotatably connected under the support block, the vertical guide component is located on both sides of the connecting block and connected to the support block, the output shaft rotates through the eccentric block and the connecting block to drive the support block to rise and fall, and at the same time controls the support block to make linear motion through the vertical guide component.

[0013] The transmission structures such as the reducer and the output shaft of the jacking mechanism of the present invention are arranged horizontally, which can reduce the height space occupied and make the height of the transition cabin smaller, so as to improve work efficiency.

[0014] The power source of the plate feeding mechanism of the present invention is a servo motor, which can accurately control the rotation of the screw rod to ensure the accuracy of the movement distance of the slide.

[0015] The power source of the present invention is connected to the screw rod through an angle converter, and the power transmission direction is changed through the angle converter to reduce the size of the equipment.

[0016] The power source of the present invention is arranged outside the transition cabin, and the transmission shaft between the power source and the angle adjuster is connected to the shell of the transition cabin through a magnetic fluid seal. Because the transition cabin needs to be vacuumed, the power source is arranged outside to reduce the risk of motor short circuit and ignition, reduce equipment failure rate, and improve equipment reliability.

[0017] The screw rod of the present invention is a ball screw rod, and the existing standard structure can be adopted to reduce the cost.

[0018] The slide rails of the present invention are provided with two, which are symmetrically arranged on both sides of the screw rod, and the connecting seat spans over the two slide rails.

[0019] The front and rear ends of the transition cabin of the present invention are provided with movable doors to facilitate the entry, transfer or exit of the workpiece hanging board.

[0020] The transition cabin of the present invention is provided with an inspection door to facilitate the inspection of the structure inside the cabin.

[0021] Compared with the prior art, the present invention has the following beneficial effects:

[0022] 1. The plate delivery device of the present invention is used to deliver uncoated workpiece hanging plates to the process chamber, or to remove coated workpiece hanging plates from the process chamber. The vacuum coating equipment only needs to set up one process chamber and two transition chambers, which reduces the number of chambers, significantly reduces the overall volume of the vacuum chamber required, and shortens the vacuuming time required to achieve working conditions.

[0023] 2. The present invention adopts two sets of lifting mechanisms, one set of front lifting mechanism and one set of rear lifting mechanism, which have a compact structure. The front lifting mechanism is combined with the linear drive of the screw rod to realize the transfer and transportation of the workpiece hanging plate at the front of the transition cabin and the process cabin. The rear lifting mechanism is combined with the linear drive of the screw rod to realize the transfer and transportation of the workpiece hanging plate at the front of the transition cabin and the rear of the transition cabin. Such an arrangement can shorten the travel of the plate delivery. The plate delivery mechanism is arranged above and below the workpiece hanging plate, which can make the length of the transition cabin designed to be shorter and reduce the volume of the transition cabin, thereby improving the efficiency of plate delivery and vacuum extraction.

[0024] 3. The transmission structures such as the reducer and output shaft of the jacking mechanism of the present invention are arranged horizontally, which can reduce the height space occupied and make the height of the transition cabin smaller, so as to improve work efficiency.

[0025] 4. The power source of the present invention is arranged externally to reduce the risk of motor short circuit and ignition, reduce the equipment failure rate, and improve the reliability of the equipment.

[0026] In summary, by adopting the plate feeding device of the present invention, fewer and smaller chambers can be used to improve the working efficiency of vacuum coating and reduce production costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 It is an overall structural diagram of a large-scale vacuum coating equipment used in the present invention;

[0028] Figure 2 It is a cross-sectional structural diagram of the transition cabin and the process cabin of the present invention;

[0029] Figure 3 This is the appearance structure diagram of the transition cabin of the present invention;

[0030] Figure 4 It is a three-dimensional diagram of the plate delivery device in the transition cabin of the present invention;

[0031] Figure 5 yes Figure 4 A front view of the middle feeding plate device;

[0032] Figure 6 It is a transmission structure diagram of the power source and the screw rod of the plate feeding mechanism of the present invention;

[0033] Figure 7 It is a three-dimensional diagram of the plate feeding mechanism of the present invention;

[0034] Figure 8 It is a three-dimensional diagram of the jacking mechanism of the present invention;

[0035] Fig. 9 yes Figure 7 A three-dimensional picture of the middle front lifting mechanism after the support blocks are removed;

[0036] Fig.10 is a plan view of the plate delivery mechanism of the present invention, in which the lifting mechanism is located at the rear of the transition cabin;

[0037] Fig.11 yes Fig.10 The cross-sectional structural principle diagram of the center feeding plate mechanism;

[0038] Fig.12 is a plan view of another state of the plate delivery mechanism of the present invention, in which the lifting mechanism is located at the front of the transition cabin;

[0039] Fig.13 yes Fig.12 The cross-sectional structural principle diagram of the center feeding plate mechanism;

[0040] Fig.14 It is a cross-sectional structural principle diagram when the support block of the jacking mechanism is not jacked up;

[0041] Fig.15 It is a cross-sectional structural schematic diagram of the supporting block of the jacking mechanism when it is jacking.

[0042] Explanation of the reference numerals: 1. transition cabin; 2. plate delivery mechanism; 3. movable door; 4. process cabin; 5. rotating frame; 6. workpiece hanging plate; 7. power source; 8. magnetic fluid; 9. angle gauge; 10. screw rod; 11. connecting seat; 12. sliding seat; 13. lifting mechanism; 14. workpiece hanging plate slot; 15. sliding rail; 131. reducer; 132. coupling; 133. bearing seat; 134. output shaft; 135. eccentric block; 136. connecting block; 137. support block; 138. vertical guide component. DETAILED DESCRIPTION

[0043] The technical solution of the present invention is described in detail below in conjunction with the accompanying drawings and embodiments so that those skilled in the art can better understand and implement the technical solution of the present invention.

[0044] Example

[0045] A plate feeding device for a large vacuum coating machine workpiece hanging plate transfer cabin, such as Figure 1 As shown, the plate delivery device is arranged in the transition chamber 1 for plate entry and the transition chamber 1 for plate exit of the vacuum coating equipment, and is used to deliver the workpiece hanging plate 6 from the transition chamber 1 for plate entry to the rotating rack 5 of the process chamber 4, or to remove the workpiece hanging plate 6 from the rotating rack of the process chamber 4 and deliver it to the transition chamber 1 for plate exit, combined with Figures 2 to 15 The plate feeding device includes two plate feeding mechanisms 2 arranged opposite to each other up and down. The plate feeding mechanism 2 includes a power source 7, a screw rod 10, a connecting seat 11, a slide seat 12, a lifting mechanism 13 and a slide rail 15 parallel to the screw rod 10. The connecting seat 11 is connected to the screw nut on the screw rod 10. The power source 7 drives the screw rod 10 to rotate and drives the connecting seat 11 to slide along the slide rail 15. The slide seat 12 is fixedly connected to the connecting seat 11. Two lifting mechanisms 13 are arranged on the slide seat 12, one in front and one behind. The lifting mechanism 13 includes a liftable support block 137, and the support block 137 is opened A card slot matching the thickness of the workpiece hanging plate 6 is provided, the slide 12 of the upper plate feeding mechanism 2 moves synchronously with the slide 12 of the lower plate feeding mechanism 2, the support block 137 of the front jacking mechanism 13 on the upper plate feeding mechanism 2 and the support block 137 of the front jacking mechanism 13 on the lower plate feeding mechanism 2 form a pair of front clamping components for clamping the workpiece hanging plate 6, and the support block 137 of the rear jacking mechanism 13 on the upper plate feeding mechanism 2 and the support block 137 of the rear jacking mechanism 13 on the lower plate feeding mechanism 2 form a pair of rear clamping components for clamping the workpiece hanging plate 6;

[0046] A plurality of workpiece hanging plate slots 14 arranged in a front-to-back manner are provided in the transition chamber 1 for inlet and outlet of the board. In this embodiment, a total of 15 workpiece hanging plates 6 can be placed in the transition chamber 1.

[0047] In the transition cabin 1 for entering the plate, the front lifting mechanism 13 of the upper plate feeding mechanism 2 and the front lifting mechanism 13 of the lower plate feeding mechanism 2 clamp and lift the workpiece hanging plate 6 placed in the front workpiece hanging plate slot 14 in the transition cabin 1, and follow the movement of their respective slide seats 12 to deliver the workpiece hanging plate 6 to the rotating frame 5 of the process cabin 4; the rear lifting mechanism 13 of the upper plate feeding mechanism 2 and the rear lifting mechanism 13 of the lower plate feeding mechanism 2 clamp and lift the workpiece hanging plate 6 placed in the rear workpiece hanging plate slot 14 in the transition cabin 1, and follow the movement of their respective slide seats 12 to deliver the workpiece hanging plate 6 to the front workpiece hanging plate slot 14 in the transition cabin 1. In this embodiment, one set of front lifting mechanisms can deliver the front workpiece hanging plates No. 1 to 8 6 to the process cabin 4, and one set of rear lifting mechanisms can move the rear workpiece hanging plates No. 9 to 15 6 to the workpiece hanging plate slots 14 corresponding to the original workpiece hanging plates No. 1 to 8 6;

[0048] In the transition cabin 1 for discharging the plate, the front lifting mechanism 13 of the upper plate feeding mechanism 2 and the front lifting mechanism 13 of the lower plate feeding mechanism 2 clamp and lift the workpiece hanging plate 6 on the rotating frame 5 of the process cabin 4, and follow the movement of their respective slides 12 to send the workpiece hanging plate 6 to the front workpiece hanging plate slot 14 in the transition cabin 1; the rear lifting mechanism 13 of the upper plate feeding mechanism 2 and the rear lifting mechanism 13 of the lower plate feeding mechanism 2 clamp and lift the workpiece hanging plate 6 placed in the front workpiece hanging plate slot 14 in the transition cabin 1, and follow the movement of their respective slides 12 to send the workpiece hanging plate 6 to the rear workpiece hanging plate slot 14 in the transition cabin 1.

[0049] In one embodiment, if Figure 8 and Fig. 9 As shown, the lifting mechanism 13 also includes a reducer 131, a coupling 132, a bearing seat 133, a transversely arranged output shaft 134, an eccentric block 135, a connecting block 136 and a vertical guide component 138. The output end of the reducer 131 is connected to one end of the output shaft 134 through the coupling 132. The output shaft 134 is installed on the bearing seat 133. The other end of the output shaft 134 is connected to the eccentric block 135. The eccentric block 135 is rotatably connected to one end of the connecting block 136 through the connecting shaft. The other end of the connecting block 136 is rotatably connected under the support block 137. The vertical guide component 138 is located on both sides of the connecting block 136 and is connected to the support block 137. The output shaft 134 rotates through the eccentric block 135 and the connecting block 136 to drive the support block 137 to rise and fall, and at the same time, the support block 137 is controlled to move linearly through the vertical guide component. The transmission structures such as the reducer 131 and the output shaft 134 of the jacking mechanism 13 of this embodiment are arranged horizontally, which can reduce the height space occupied and make the height of the transition cabin 1 smaller to improve work efficiency.

[0050] In one embodiment, the power source 7 of the plate feeding mechanism 2 is a servo motor, which can accurately control the rotation of the screw rod 10 to ensure the accuracy of the movement distance of the slide.

[0051] In one embodiment, the power source 7 is connected to the screw rod 10 via the angle converter 9, and the power transmission direction is changed by the angle converter 9 to reduce the size of the device.

[0052] In one embodiment, the power source 7 is arranged outside the transition cabin 1, and the transmission shaft between the power source 7 and the angle adjuster 9 is sealed and connected to the shell of the transition cabin 1 through the magnetic fluid 8. The power source 7 is arranged outside to reduce the risk of motor short circuit and ignition, reduce the equipment failure rate, and improve the reliability of the equipment.

[0053] In one embodiment, the screw rod 10 is a ball screw rod, and an existing standard structure can be used to reduce costs.

[0054] In one embodiment, two slide rails 14 are provided, symmetrically arranged on both sides of the screw rod 10 , and the connecting seat 11 spans over the two slide rails 14 .

[0055] In one embodiment, movable doors 3 are provided at the front and rear ends of the transition cabin 1 to facilitate the entry, transfer or exit of the workpiece hanging plate 6 .

[0056] The transition cabin of the present invention is provided with an inspection door to facilitate the inspection of the structure inside the cabin.

[0057] Finally, it should be noted that the above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or replace some of the technical features therein by equivalents. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A plate feeding device for a large vacuum coating machine for workpiece hanging and transferring, characterized in that: The plate feeding device is arranged in a transition chamber for plate entry and a transition chamber for plate exit of the vacuum coating equipment, and is used to feed the workpiece hanging plate from the transition chamber for plate entry to the rotating rack of the process chamber, or to remove the workpiece hanging plate from the rotating rack of the process chamber and feed it to the transition chamber for plate exit. The plate feeding device includes two plate feeding mechanisms arranged opposite to each other up and down, and the plate feeding mechanism includes a power source, a screw rod, a connecting seat, a sliding seat, a lifting mechanism and a slide rail parallel to the screw rod. The connecting seat is connected to the screw rod nut on the screw rod, and the power source drives the screw rod to rotate and drives the connecting seat to slide along the slide rail. The slide seat is connected to the connecting rod The receiving seat is fixedly connected, and two lifting mechanisms, one in front and one in the back, are arranged on the slide seat, and the lifting mechanism includes a liftable support block, and a slot matching the thickness of the workpiece hanging plate is opened on the support block, and the slide seat of the upper plate feeding mechanism moves synchronously with the slide seat of the lower plate feeding mechanism, and the support block of the front lifting mechanism on the upper plate feeding mechanism and the support block of the front lifting mechanism on the lower plate feeding mechanism form a pair of front clamping components for clamping the workpiece hanging plate, and the support block of the rear lifting mechanism on the upper plate feeding mechanism and the support block of the rear lifting mechanism on the lower plate feeding mechanism form a pair of rear clamping components for clamping the workpiece hanging plate; A plurality of workpiece hanging plate slots arranged in front and behind are arranged in the transition chamber for entering the plate and the transition chamber for exiting the plate. In the transition cabin for feeding boards, the front lifting mechanism of the upper board feeding mechanism and the front lifting mechanism of the lower board feeding mechanism clamp and lift the workpiece hanging board placed in the front workpiece hanging board slot in the transition cabin, and follow the movement of their respective slides to deliver the workpiece hanging board to the rotating rack of the process cabin; the rear lifting mechanism of the upper board feeding mechanism and the rear lifting mechanism of the lower board feeding mechanism clamp and lift the workpiece hanging board placed in the rear workpiece hanging board slot in the transition cabin, and follow the movement of their respective slides to deliver the workpiece hanging board to the front workpiece hanging board slot in the transition cabin; In the transition chamber for discharging the plate, the front lifting mechanism of the upper plate feeding mechanism and the front lifting mechanism of the lower plate feeding mechanism clamp and lift the workpiece hanging plate on the process chamber turntable, and follow the movement of their respective slides to send the workpiece hanging plate to the front workpiece hanging plate slot in the transition chamber. The rear lifting mechanism of the upper plate feeding mechanism and the rear lifting mechanism of the lower plate feeding mechanism clamp and lift the workpiece hanging plate placed in the front workpiece hanging plate slot in the transition chamber, and follow the movement of their respective slides to send the workpiece hanging plate to the rear workpiece hanging plate slot in the transition chamber.

2. The plate feeding device for the workpiece hanging plate transfer chamber of a large vacuum coating machine according to claim 1 is characterized in that: The lifting mechanism also includes a reducer, a coupling, a bearing seat, a transversely arranged output shaft, an eccentric block, a connecting block and a vertical guide component. The output end of the reducer is connected to one end of the output shaft through the coupling, the output shaft is installed on the bearing seat, the other end of the output shaft is connected to the eccentric block, the eccentric block is rotatably connected to one end of the connecting block through a connecting shaft, the other end of the connecting block is rotatably connected under the support block, the vertical guide component is located on both sides of the connecting block and connected to the support block, the output shaft rotates through the eccentric block and the connecting block to drive the support block to rise and fall, and at the same time, the support block is controlled to move in a straight line through the vertical guide component.

3. The plate feeding device for the workpiece hanging plate transfer chamber of a large vacuum coating machine according to claim 1 or 2, characterized in that: The power source of the plate feeding mechanism is a servo motor.

4. The plate feeding device for the workpiece hanging plate transfer chamber of a large vacuum coating machine according to claim 3 is characterized in that: The power source is connected to the screw rod through an angle converter.

5. The board feeding device for the workpiece hanging board transfer cabin of a large vacuum coating machine according to claim 4 is characterized in that: The power source is arranged outside the transition cabin, and the transmission shaft between the power source and the angle controller is connected to the shell of the transition cabin through a magnetic fluid seal.

6. The plate feeding device for the workpiece hanging plate transfer chamber of a large vacuum coating machine according to claim 5 is characterized in that: The screw rod is a ball screw rod.

7. The plate feeding device for the workpiece hanging plate transfer chamber of a large vacuum coating machine according to claim 1 is characterized in that: The slide rails are provided with two and are symmetrically arranged on both sides of the screw rod, and the connecting seat spans over the two slide rails.

8. The board feeding device for the workpiece hanging board transfer cabin of a large vacuum coating machine according to claim 1 is characterized in that: The front and rear ends of the transition cabin are provided with movable doors.

9. The plate feeding device for the workpiece hanging plate transfer chamber of a large vacuum coating machine according to claim 1 is characterized in that: The transition cabin is provided with an inspection door.

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