Warp marking device

Abstract

The invention discloses a warpage marking device, and relates to the technical field of glass substrate warpage detection, the warpage marking device comprises a detection equipment main body, the middle position of the detection equipment main body is fixedly connected with a detection table, a driving pneumatic cylinder is installed above the detection table, and the output shaft end of the driving pneumatic cylinder is provided with a detector; the detector is located at the eccentric position above the substrate main body, so that detection is not limited to the central area of the plate, the surface of the substrate main body can be completely covered, more accurate surface data feedback analysis is achieved, the surface integrity of the substrate main body can be evaluated more accurately, and meanwhile the detection accuracy is improved through dynamic adjustment of the detection area in the process. Different detection positions of the detector are increased while the irradiation range of the detector is reduced, so that each part of the substrate can be subjected to uniform and sufficient detection feedback, the problem that in a traditional method, light is excessively focused on a central area and detection of an edge area is insufficient is solved, and uniform distribution and comprehensive coverage of detection light are ensured.

Description

Technical Field

[0001] The present invention relates to the technical field of glass substrate warping detection, and in particular to a warping marking device. Background Art

[0002] This device is mainly used for the detection of circular glass substrate materials used in high-end technology fields such as semiconductor devices and flat panel display devices. This device is specially designed to randomly select a number of circular glass substrates from a busy production line for detailed detection, evaluation and calculation, so as to ensure comprehensive monitoring and continuous optimization of product quality. At the same time, this device uses non-contact measurement technology of laser transmitters to minimize potential damage to the surface of the glass substrate and ensure the accuracy of the measurement results.

[0003] However, compared with existing equipment technology, there are still the following defects in specific use:

[0004] 1. The existing technology generally uses a laser transmitter to shoot the laser at the surface of the object to be tested. After the laser is irradiated on the surface of the object, it is received by the receiver lens to distinguish whether there is a warping defect. However, when the size of the glass substrate to be tested is larger than or far exceeds the field of view of the instrument lens, due to the mismatch between the substrate size and the coverage of the detection lens, the rays of the detection instrument will be concentrated on the central area of ​​the glass substrate, while the edge area is relatively shallow and difficult to obtain sufficient direct illumination detection attention. This phenomenon will lead to uneven distribution of light detection on the surface of the substrate, in which the core area is redundant due to over-focusing of the detection light, while the edge area misses potential warping defects due to insufficient distribution of the detection light. This regional light intensity mismatch not only reduces the comprehensiveness and accuracy of the detection, but also poses a potential threat to the quality and stability of subsequent products;

[0005] 2. When the current glass substrate warpage detection device is performing a detection task, the glass substrate to be detected is usually in an unshielded and exposed state. In this environment, when the detection instrument is started and projects light onto the surface of the glass substrate to perform detection, the lighting conditions of the surrounding environment, such as natural light, artificial lighting, and other light directly or indirectly irradiated to the surface of the glass substrate, will be reflected. These reflected light rays and the detection light rays emitted by the detection instrument will interweave to form a complex light field environment, thereby significantly interfering with the light receiving system of the detection instrument. In addition, when the glass substrate is in an unshielded and exposed state, dust, moisture, volatile substances, etc., present in the air, these environmental factors will also be attached to the surface of the glass substrate in small amounts, thereby affecting the accuracy and reliability of the detection results;

[0006] 3. In addition, when the existing glass substrate warping detection device identifies the warping condition, it will rely on advanced instruments to automatically record. This mechanism provides the staff with clear information about the existence of the warping phenomenon after the detection process is completed. However, although this method can confirm the existence of the warping condition, it lacks direct and accurate means to indicate which specific area or position on the surface of the glass substrate the warping occurs. Even if the glass substrate warping phenomenon exists, its severity will vary greatly, ranging from mild to severe. For mild warping conditions, since this self-recording method cannot accurately locate the warping area, it is difficult for the staff to quickly and effectively identify and handle the warping area during the subsequent processing and repair process. Therefore, this detection method lacking accurate position indication not only limits the practicality of the detection results, but also reduces the detection efficiency of the device;

[0007] In view of this, the present invention proposes a warpage marking device to compensate for and improve the deficiencies of the prior art. Summary of the invention

[0008] In order to solve the above technical problems, the present invention provides a warping marking device to solve the technical problems raised in the above background technology.

[0009] To achieve the above purpose, the technical solution adopted by the present invention is: a warpage marking device, used for performing warpage detection on the entire substrate body, comprising a detection device body, a detection platform is fixedly connected at the middle position of the detection device body, a driving pneumatic cylinder is installed above the detection platform, a detector is installed at the output shaft end of the driving pneumatic cylinder, and the detector is located at an eccentric position above the substrate body;

[0010] Also includes:

[0011] Balanced control adjustment mechanism, used to accurately control the rotation angle of the entire substrate body;

[0012] The light-proof detection mechanism is used to improve the overall detection accuracy of the detector and to perform multi-dimensional warpage detection at the same time.

[0013] Furthermore, the balancing control adjustment mechanism includes a flat curved rod group fixedly connected to the outer wall of the detector, the end of the flat curved rod group away from the detector is fixedly connected to a connecting shaft, the upper surface of the connecting shaft is fixedly connected to a screw rod, the outer wall of the connecting shaft is installed with an adjustment cylinder, the inner wall of the adjustment cylinder is provided with an inclined groove, the lower surface of the adjustment cylinder is rotatably connected to a limit buckle, and the limit buckle is fixedly connected to the inner wall of the detection equipment body.

[0014] Furthermore, a storage cylinder is installed on the outer wall of the adjustment cylinder, the inner wall of the storage cylinder is slidably connected with a magnetic plate pressure shaft, the outer wall of the magnetic plate pressure shaft is sleeved with a spring, and the outer wall of the flat curved rod group is fixedly connected with a trigger magnetic sheet.

[0015] Furthermore, the bevel groove is a continuous N-shape as a whole, elastic balls are installed at the corners of the inner wall of the bevel groove, and convex shafts are fixedly connected to the vertical parts of the outer wall of the connecting shaft corresponding to the bevel groove. The connecting shaft and the adjusting cylinder are slidably connected through the convex shaft and the bevel groove.

[0016] Furthermore, the coating material is stored inside the storage cylinder, and the output port of the storage cylinder is located in the same vertical plane as the detector.

[0017] Furthermore, the two ends of the spring are fixedly connected to the storage tube and the magnetic plate pressure shaft respectively. The magnetic plate pressure shaft is in the shape of a cup cover as a whole, and the outer wall of the cup cover is made of magnetic blocking sheet material. The magnetic plate pressure shaft corresponds to the positive magnetic sheet in the trigger magnetic sheet.

[0018] Furthermore, the light-shielding detection mechanism includes a linkage disk installed on the outer wall of the screw rod, the surface of the linkage disk is installed with a shaft fixing plate, the outer wall of the shaft fixing plate is slidably connected with a cross limit frame, the cross limit frame is fixedly connected to the lower surface of the detection platform, the upper surface of the shaft fixing plate is fixedly connected with a combination bin, the inner side wall of the combination bin is fixedly connected with a reflector, light-absorbing plates are evenly and symmetrically installed on both sides of the reflector, the bottom wall of the inner side wall of the combination bin is evenly and slidably connected with a buffer ball, and the outer wall of the combination bin is slidably connected with a marking block corresponding to the position of the buffer ball.

[0019] Furthermore, a ball screw structure is formed between the screw rod and the linkage disk, and the linkage disk is located at the bottom of the outer wall of the screw rod.

[0020] Furthermore, bending grooves are evenly formed on the surface of the linkage disk, and the linkage disk is rotationally connected to the belt shaft fixing plate through the bending grooves.

[0021] Furthermore, the entire light absorbing plate is adhered with black adsorption paper, and the buffer balls and the substrate body are in the same horizontal plane.

[0022] Compared with the prior art, the present invention has the following beneficial effects:

[0023] (1) In order to solve the problem of uneven distribution of light on the surface of the substrate body due to the mismatch between the size of the detector and the substrate body, after completing a single detection, the device performs a conventional upward movement through the detector, and at the same time drives the flat plate curved rod group to trigger the adjustment tube to accurately control the substrate body to rotate at an appropriate angle. The rotation of the control angle will not cause the detector to repeatedly cover the area that has been detected. This improvement makes the detection no longer limited to the central area of ​​the plate, but can fully cover the surface of the substrate body, providing a more comprehensive and accurate surface data feedback analysis, which helps to more accurately evaluate the surface integrity of the substrate body. At the same time, this process dynamically adjusts the detection area, while reducing the irradiation range of the detector and increasing the number of different positions detected by the detector, thereby ensuring that all parts of the substrate can receive uniform and sufficient detection feedback. Moreover, through the rotation of the substrate body, although the irradiation range of the detector remains unchanged physically, the actual detection area on the substrate is effectively reduced and diversified. This design avoids the problem of excessive focus of light on the central area and insufficient detection of the edge area in the traditional method, ensuring uniform distribution and comprehensive coverage of the detection light.

[0024] Compared with the prior art that uses rays to be projected on the central area of ​​the substrate body, the detection method of the device dynamically adjusts the position of the substrate without adding additional drive sources and components, so that the detection light of the detector can evenly cover every corner of the substrate, thereby improving the comprehensiveness of the detection and reducing the risk of missing defects. At the same time, it also improves the problem that the existing detection method generates detection redundancy due to excessive focus of light on the central area, while the edge area is difficult to accurately identify defects due to insufficient light;

[0025] The N-shaped bevel groove design enables the adjustment cylinder to achieve a certain range of rotation adjustment within a limited space, thereby improving the compactness and flexibility of the structure. The connecting shaft and the adjustment cylinder are slidably connected through the cooperation between the convex shaft and the bevel groove, thereby ensuring the precise guidance of the connecting shaft during movement to avoid deviation and shaking. This precise guiding mechanism is the basis for achieving precise control of the rotation of the substrate body. In addition, elastic balls are installed at the corners of the inner wall of the bevel groove, which enables the convex shaft to stop smoothly when reaching the predetermined position through the buffering effect of the elastic ball, thereby achieving precise control of the subsequent rotation angle of the substrate body and ensuring that the detection rays can evenly cover every detection area of ​​the substrate.

[0026] (2) In order to solve the problem that the staff cannot accurately locate the warped area in time for slight warping, the device is set when the detector is in the normal detection process. Once the warping abnormality is identified, the detector will automatically move downward to ensure that the triggering magnetic sheet and the magnetic plate pressure shaft are in the same horizontal plane. Based on the magnetic principle of like poles repelling each other, the magnetic plate pressure shaft will squeeze the coating material inside the storage tube. At this time, the angle control rotation will be implemented in conjunction with the above-mentioned substrate body for each detection, so that this process and the dynamic rotation mechanism of the substrate body angle control will work together to ensure that the coating material sprayed each time is triggered will be accurately sprayed on the lower surface of the warped area of ​​the substrate body, thereby realizing the accurate marking of the warping position. Accurately marking the warping position enables the staff to quickly identify and locate the problem area during the subsequent processing and repair process, avoiding blind search and misjudgment, and greatly improving work efficiency and repair quality;

[0027] Compared with the existing technology that relies on advanced instruments for automatic recording, this method not only increases the cost of the equipment itself, but also fails to accurately provide the staff with clear information about the existence of warping after the detection process is completed. The present device integrates the detection and marking process, reduces the time interval and manual intervention between detection and marking in the traditional method, optimizes the overall efficiency of the detection process, and can directly and accurately indicate the specific area on the surface of the substrate body where the warping occurs, significantly improving the practicality of the detection results;

[0028] (3) In order to solve the problems of ambient light interference and micro-pollution existing in the detection of the prior art, the device triggers the combination bin to shrink inward by synchronously moving the lead screw downward in the first step during the process of the detector starting and projecting light onto the surface of the substrate body. First of all, this shrinkage process can not only adjust the position of the substrate body to be detected to ensure the precise positioning of the detection, but also work together with the flat plate part in the flat curved rod group to form a sealed cylindrical bin. The formation of the cylindrical bin automatically provides a light-proof space for the detector. Through this dynamic sealing and isolation structural design, the ambient light interference is effectively isolated, and the interference of other light in the environment on the light receiving system of the detection instrument is avoided, which significantly improves the accuracy and stability of the detection, and also controls the adhesion of micro-pollutants in the air to the surface of the substrate body, reduces the influence of micro-pollution on the detection results, and further improves the reliability and accuracy of the detection.

[0029] Secondly, in order to solve the problem that when the detector irradiates light on the surface of the substrate body, the reflected light generated by the substrate body is re-irradiated on the substrate body to form multiple reflections, the reflectors evenly installed on the inner wall of the combined bin of the device can effectively collect and guide the reflected light to the direction of the surface of the light-absorbing plate with black adsorbent paper, thereby reducing the multiple reflections of the light. In addition, the black adsorbent paper has an extremely high light absorption rate and can quickly absorb the light to prevent it from being reflected or scattered again, thereby greatly improving the light collection efficiency, so that the detector can more accurately capture and analyze the reflected light on the surface of the substrate body. Based on reducing the interference of light and improving the light collection efficiency, the detector can complete the scanning and analysis of the substrate body surface more quickly, which helps to shorten the detection time and improve the overall detection efficiency of the equipment.

[0030] Finally, when the outer wall of the substrate body is warped, the warped part will squeeze the buffer ball in contact with it, and then act on the marking block to make it protrude outward. This real-time feedback mechanism enables the inspector to identify the warped area of ​​the outer wall area of ​​the substrate body, and through the above-mentioned controlled angle rotation of the substrate body, combined with the uniform distribution of the buffer balls on the inner wall of the combination bin, the device can simultaneously realize multi-dimensional simultaneous detection of the surface and edge of the substrate body. This all-round, multi-angle detection method greatly improves the comprehensiveness and accuracy of the detection, and reduces the misjudgment or missed detection caused by blind spots in the detection. Compared with traditional detection, which requires multiple steps and multiple equipment to complete the comprehensive detection of the substrate body, this device integrates multi-dimensional detection functions and real-time feedback mechanisms to merge multiple detection steps into a continuous process, thereby simplifying the detection process and improving detection efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] Figure 1 It is a schematic diagram of the main stereoscopic structure of the present invention;

[0032] Figure 2 It is a bottom-up three-dimensional structural schematic diagram of the present invention;

[0033] Figure 3 It is a schematic diagram of the three-dimensional structure of the balanced control quantity adjustment mechanism of the present invention;

[0034] Figure 4 It is a schematic diagram of the overall three-dimensional structure of the balanced control quantity adjustment mechanism of the present invention;

[0035] Figure 5 It is a partial exploded diagram of the balanced control quantity adjustment mechanism of the present invention;

[0036] Figure 6 This is a schematic diagram of the internal three-dimensional structure of the regulating cylinder of the present invention;

[0037] Figure 7 It is a schematic diagram of the three-dimensional structure of the light-shielding detection mechanism of the present invention;

[0038] Figure 8 An exploded view of the light-shielding detection mechanism of the present invention;

[0039] Fig. 9 It is a schematic diagram of the three-dimensional structure of the combined warehouse components of the present invention;

[0040] Fig.10 For the present invention Fig. 9 A schematic diagram of the partially enlarged three-dimensional structure in the middle.

[0041] The numbers in the figure are:

[0042] 1. Testing equipment body; 11. Testing table; 12. Driving pneumatic cylinder; 13. Testing instrument; 14. Substrate body;

[0043] 2. Balance control adjustment mechanism; 21. Flat curved rod group; 22. Connecting shaft; 23. Screw rod; 24. Adjustment cylinder; 25. Inclined groove; 26. Limit buckle; 27. Storage cylinder; 28. Magnetic plate pressure shaft; 29. ​​Spring; 210. Trigger magnetic sheet;

[0044] 3. Light-proof detection mechanism; 31. Linkage disk; 32. Shaft fixing plate; 33. Cross limit frame; 34. Combination bin; 35. Reflector; 36. Light-absorbing plate; 37. Buffer ball; 38. Marking block. DETAILED DESCRIPTION

[0045] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention;

[0046] Embodiments of the present invention

[0047] Please refer to Figure 1 - Figure 2 As shown, a warpage marking device is used to perform warpage detection on a substrate body 14 as a whole, comprising a detection device body 1, a detection platform 11 is fixedly connected to the middle position of the detection device body 1, a driving pneumatic cylinder 12 is installed above the detection platform 11, and a detector 13 is installed at the output shaft end of the driving pneumatic cylinder 12, and the detector 13 is located at an eccentric position above the substrate body 14;

[0048] Please refer to Figure 3 - Figure 6As shown, the balance control adjustment mechanism 2 includes a flat curved rod group 21 fixedly connected to the outer wall of the detector 13, one end of the flat curved rod group 21 away from the detector 13 is fixedly connected to a connecting shaft 22, the upper surface of the connecting shaft 22 is fixedly connected to a screw rod 23, an outer wall of the connecting shaft 22 is installed with an adjustment cylinder 24, the inner side wall of the adjustment cylinder 24 is provided with an inclined groove 25, the lower surface of the adjustment cylinder 24 is rotatably connected to a limit buckle 26, the limit buckle 26 is fixedly connected to the inner side wall of the detection device body 1, and the outer wall of the adjustment cylinder 24 is installed with a storage cylinder 27;

[0049] Specifically, the detection is no longer limited to the central area of ​​the plate, but can fully cover the surface of the substrate body 14, providing a more comprehensive and accurate surface data feedback analysis, which helps to more accurately evaluate the surface integrity of the substrate body 14. At the same time, this process reduces the irradiation range of the detector 13 and increases the number of different positions detected by the detector 13 through dynamic adjustment of the detection area, thereby ensuring that all parts of the substrate can receive uniform and sufficient detection feedback;

[0050] The inner wall of the storage barrel 27 is slidably connected with a magnetic plate pressure shaft 28, and the outer wall of the magnetic plate pressure shaft 28 is sleeved with a spring 29. The outer wall of the flat curved rod group 21 is fixedly connected with a trigger magnetic sheet 210. The inclined groove 25 is in a continuous N-shape as a whole. Elastic balls are installed at the corners of the inner wall of the inclined groove 25. The outer wall of the connecting shaft 22 is fixedly connected with a convex shaft at the vertical position corresponding to the inclined groove 25. The connecting shaft 22 and the adjusting barrel 24 are slidably connected through the convex shaft and the inclined groove 25. The coating material is stored in the storage barrel 27. The output port of the storage barrel 27 is in the same vertical plane as the detector 13. The two ends of the spring 29 are fixedly connected to the storage barrel 27 and the magnetic plate pressure shaft 28 respectively. The magnetic plate pressure shaft 28 is in a cup cover shape as a whole, and the outer wall of the cup cover is made of magnetic resistance sheet material. The magnetic plate pressure shaft 28 corresponds to the positive magnetic sheet in the trigger magnetic sheet 210.

[0051] Specifically, the magnetic plate pressure shaft 28 is designed to be in the shape of a cup cover, which effectively limits the direction in which the magnetic plate pressure shaft 28 is subjected to the magnetic repulsion force of the triggering magnetic sheet 210, and ensures that the outer wall of the cup cover of the magnetic plate pressure shaft 28 blocks the magnetic repulsion force of the triggering magnetic sheet 210, so that the magnetic repulsion force can only act on the magnetic plate pressure shaft 28 through the opening part inside the cup cover when the two are in the same horizontal plane, thereby realizing the directional conduction of the magnetic repulsion force. This design ensures that the magnetic plate pressure shaft 28 can move in a predetermined direction when receiving the repulsion force, improves the accuracy and reliability of the movement, and effectively isolates the influence of the weak magnetic force generated by the triggering magnetic sheet 210 on the position of the magnetic plate pressure shaft 28, thereby reducing unnecessary interference, avoiding malfunction or inaccurate positioning caused by weak magnetic force, and improving the stability and accuracy of the detection device;

[0052] Please refer to Figure 7 - Fig.10As shown, the light-shielding detection mechanism 3 includes a linkage disk 31 installed on the outer wall of the screw rod 23, and the surface of the linkage disk 31 is installed with a shaft fixing plate 32, and the outer wall of the shaft fixing plate 32 is slidably connected with a cross limit frame 33, and the cross limit frame 33 is fixedly connected to the lower surface of the detection platform 11, and the upper surface of the shaft fixing plate 32 is fixedly connected with a combination bin 34, and the inner side wall of the combination bin 34 is fixedly connected with a reflector 35, and light absorbing plates 36 are evenly and symmetrically installed on both sides of the reflector 35. The bottom wall is evenly slidably connected with a buffer ball 37, and the outer wall of the combined bin 34 is slidably connected with a marking block 38 at the position corresponding to the buffer ball 37. A ball screw structure is formed between the screw rod 23 and the linkage disk 31, and the linkage disk 31 is located at the bottom of the outer wall of the screw rod 23. The surface of the linkage disk 31 is evenly provided with curved grooves, and the linkage disk 31 is rotationally connected with the shaft fixing plate 32 through the curved grooves. The light absorbing plate 36 is entirely attached with black adsorption paper, and the buffer ball 37 and the substrate body 14 are in the same horizontal plane;

[0053] Specifically, in view of the characteristics of the substrate body 14 being light, thin and brittle, in order to solve the problem of the existing clamp causing damage to the substrate body 14 during the clamping and limiting process, the present device evenly installs buffer balls 37 at the position of the inner wall of the combined bin 34 corresponding to the outer wall of the substrate body 14. The primary function of the buffer balls 37 is to protect the substrate body 14 from physical damage. Due to its spherical characteristics, the buffer balls 37 can provide effective buffering when in contact with the substrate body 14, absorb and disperse the squeezing force, thereby preventing the substrate body 14 from being broken or scratched due to direct force. Secondly, the contact mode between the buffer balls 37 and the substrate body 14 is point contact. Compared with surface contact, this contact mode can significantly reduce the friction between the two. The reduction in friction not only helps to protect the surface of the substrate body 14 from wear, but also ensures that the substrate body 14 can maintain a stable posture during the detection process, avoiding vibration or displacement caused by friction that affects the accuracy of the detection result.

[0054] Specifically, by the synchronous downward movement of the lead screw 23 in the first step, the combined bin 34 is triggered to shrink inward. First, this shrinking process can not only adjust the position of the substrate body 14 to be detected to ensure accurate positioning of the detection, but also work together with the flat plate part in the flat plate curved rod group 21 to form a sealed cylindrical bin. The formation of the cylindrical bin automatically provides a light-proof space for the detector 13. Through this dynamic sealing and isolation structural design, the ambient light interference is effectively isolated.

[0055] The following are the complete usage steps and working principles of the above embodiment:

[0056] The use process of the device is as follows: first, the selected substrate body 14 sample is placed on the upper surface of the detection table 11, and then the corresponding measurement parameters of the detection device body 1 are set according to the size, shape and characteristics of the substrate body 14, such as laser wavelength, measurement range, data sampling rate, etc., and then the detection device body 1 is started, and the driving pneumatic cylinder 12 drives the detector 13 to scan and detect the surface of the substrate body 14 using a high-precision, non-contact irradiation method;

[0057] The balanced control adjustment mechanism 2 for accurately controlling the overall rotation angle of the substrate body 14 is specifically used as follows:

[0058] like Figure 3 and Figure 4 As shown, since the flat plate curved rod group 21 is integrally fixedly connected to the outer wall of the detector 13, when the detector 13 moves up and down in the process of detecting the substrate body 14, the flat plate curved rod group 21 will move synchronously with it. Figure 5 As shown, since the bevel groove 25 is in a continuous N-shape as a whole, and the outer wall of the connecting shaft 22 is fixedly connected with a convex shaft at the vertical position corresponding to the bevel groove 25, and the connecting shaft 22 and the adjusting cylinder 24 are slidably connected through the convex shaft and the bevel groove 25, when the above-mentioned detector 13 moves downward, the convex shaft of the outer wall of the connecting shaft 22 will first move downward along the vertical position in the N-shaped groove to the corner position of the N-shaped groove, as shown in FIG. Figure 6 As shown, since elastic balls are installed at the corners of the inner wall of the inclined groove 25, the convex shaft can stop smoothly when reaching the predetermined position through the buffering effect of the elastic balls;

[0059] Then, when the detector 13 moves upward to prepare for the second detection, the convex shaft of the outer wall of the connecting shaft 22 will slide along the inclined surface of the N-shaped groove, thereby synchronously triggering the adjustment cylinder 24 to drive the substrate body 14 on the upper surface to complete the rotation of the control angle. Through the rotation of the substrate body 14, the irradiation range of the detector 13 remains unchanged physically, but the actual detection area on the substrate is effectively reduced and diversified. This design avoids the problem of excessive focus of light on the central area and insufficient detection of the edge area in the traditional method, ensuring the uniform distribution and comprehensive coverage of the detection light.

[0060] Since the detector 13 is electrically connected to the driving pneumatic cylinder 12, the device is designed so that when the detector 13 is in the normal detection process, once the warping abnormality is identified, the detector 13 will automatically move downward by a specific distance, such as Figure 4As shown, when the detector 13 moves downward to the detection position, after moving downward a specific distance, the trigger magnetic sheet 210 and the positive magnetic sheet in the magnetic plate pressure shaft 28 will correspond to each other and be in the same horizontal plane. At this time, based on the magnetic principle that like poles repel each other, the magnetic plate pressure shaft 28 will squeeze the coating material inside the storage tube 27 after being subjected to the like-pole repulsion of the trigger magnetic sheet 210. Since the output port position of the storage tube 27 is in the same vertical plane as the detector 13, the coating material sprayed from the output port of the storage tube 27 can cooperate with the above-mentioned substrate body 14 to implement angle control rotation for each detection, so that this process and the dynamic rotation mechanism of the control angle of the substrate body 14 work together to ensure that the coating material sprayed each time is triggered will be accurately sprayed on the lower surface of the warped area of ​​the substrate body 14, thereby realizing accurate marking of the warped position, so that the staff can quickly identify and locate the problem area during the subsequent processing and repair process, avoiding blind search and misjudgment, and greatly improving work efficiency and repair quality;

[0061] The light-shielding detection mechanism 3 for improving the overall detection accuracy of the detector 13 and performing multi-dimensional warpage detection simultaneously is specifically used as follows:

[0062] like Figure 8 As shown, since a ball screw structure is formed between the lead screw 23 and the linkage disk 31, and the linkage disk 31 is located at the bottom of the outer wall of the lead screw 23, when the flat curved rod group 21 drives the connecting shaft 22 to move downward, the lead screw 23 will synchronously drive the linkage disk 31 to rotate. Since the surface of the linkage disk 31 is evenly provided with curved grooves, and the linkage disk 31 is rotationally connected to the belt shaft fixing plate 32 through the curved grooves, when the linkage disk 31 rotates, the curved grooves on its surface will continuously squeeze the belt shaft fixing plate 32, thereby driving the belt shaft fixing plate 32 to shrink and move closer to the center position under the limiting action of the cross limiting frame 33.

[0063] like Fig. 9As shown, since the shaft fixing plate 32 is fixedly connected to the combined bin 34, and buffer balls 37 are evenly installed at the positions of the inner wall of the combined bin 34 corresponding to the outer wall of the substrate body 14, and the buffer balls 37 and the substrate body 14 are in the same horizontal plane, when the combined bin 34 follows the shaft fixing plate 32 to synchronously shrink and move closer, the buffer balls 37 will contact the outer wall area of ​​the substrate body 14. Due to its own spherical characteristics, the buffer balls 37 can provide effective buffering, absorb and disperse the squeezing force when contacting the substrate body 14, thereby preventing the substrate body 14 from being broken or scratched due to direct force. Secondly, the contact mode between the buffer balls 37 and the substrate body 14 is point contact. Compared with surface contact, this contact mode can significantly reduce the friction between the two. The reduction in friction not only helps to protect the surface of the substrate body 14 from wear, but also ensures that the substrate body 14 can maintain a stable posture during the detection process, avoiding vibration or displacement caused by friction that affects the accuracy of the detection result.

[0064] At the same time, when the combined bin 34 is completely shrunk and brought together to stop, the combined bin 34 itself will work together with the flat plate portion of the flat curved rod assembly 21 to form a sealed cylindrical bin, and the formation of the cylindrical bin automatically provides a light-proof space for the detector 13, thereby effectively isolating the ambient light interference and avoiding the interference of other light in the environment on the light receiving system of the detector 13;

[0065] At the same time Fig.10 As shown, the inner wall of the combined bin 34 is evenly installed with reflectors 35, and light-absorbing plates 36 are symmetrically installed on both sides of the reflectors 35. When the detector 13 performs detection, the reflectors 35 can effectively collect and guide the light reflected by the substrate body 14 itself to the direction of the surface of the light-absorbing plate 36 with black absorbent paper affixed thereto, thereby reducing multiple reflections of the light. In addition, the black absorbent paper has an extremely high absorbance, which can quickly absorb the light to prevent it from being reflected or scattered again, thereby greatly improving the light collection efficiency, so that the detector 13 can more accurately capture and analyze the reflected light on the surface of the substrate body 14. Based on reducing the interference of light and improving the light collection efficiency, the detector 13 can complete the scanning and analysis of the surface of the substrate body 14 more quickly, which helps to shorten the detection time and improve the overall detection efficiency of the equipment.

[0066] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A warpage marking device, used for performing warpage detection on a substrate body (14) as a whole, comprising a detection device body (1), a detection platform (11) is fixedly connected to the middle position of the detection device body (1), a driving pneumatic cylinder (12) is installed above the detection platform (11), a detector (13) is installed at the output shaft end of the driving pneumatic cylinder (12), and the detector (13) is located at an eccentric position above the substrate body (14), characterized in that: Also includes: A balanced control adjustment mechanism (2) is used to accurately control the rotation angle of the entire substrate body (14); The light-shielding detection mechanism (3) is used to improve the overall detection accuracy of the detector (13) and to simultaneously perform multi-dimensional warpage detection.

2. A warping marking device according to claim 1, characterized in that: The balance control adjustment mechanism (2) comprises a flat curved rod group (21) fixedly connected to the outer wall of the detector (13); one end of the flat curved rod group (21) away from the detector (13) is fixedly connected to a connecting shaft (22); the upper surface of the connecting shaft (22) is fixedly connected to a screw rod (23); an adjustment cylinder (24) is installed on the outer wall of the connecting shaft (22); an inclined groove (25) is provided on the inner side wall of the adjustment cylinder (24); the lower surface of the adjustment cylinder (24) is rotatably connected to a limit buckle (26); and the limit buckle (26) is fixedly connected to the inner side wall of the detection device body (1).

3. A warping marking device according to claim 2, characterized in that: A storage cylinder (27) is installed on the outer wall of the regulating cylinder (24), a magnetic plate pressure shaft (28) is slidably connected to the inner wall of the storage cylinder (27), a spring (29) is sleeved on the outer wall of the magnetic plate pressure shaft (28), and a trigger magnetic sheet (210) is fixedly connected to the outer wall of the flat curved rod group (21).

4. A warping marking device according to claim 2, characterized in that: The inclined surface groove (25) is in a continuous N-shape as a whole. Elastic balls are installed at the corners of the inner wall of the inclined surface groove (25). The outer wall of the connecting shaft (22) is fixedly connected with a convex shaft at a vertical position corresponding to the inclined surface groove (25). The connecting shaft (22) and the adjusting cylinder (24) are slidably connected via the convex shaft and the inclined surface groove (25).

5. A warping marking device according to claim 3, characterized in that: The storage cylinder (27) stores coating material inside, and the output port of the storage cylinder (27) is located at the same vertical plane as the detector (13).

6. A warping marking device according to claim 3, characterized in that: The two ends of the spring (29) are fixedly connected to the storage tube (27) and the magnetic plate pressure shaft (28) respectively. The magnetic plate pressure shaft (28) is in the shape of a cup cover as a whole, and the outer wall of the cup cover is made of a magnetic resistance sheet material. The magnetic plate pressure shaft (28) corresponds to the positive magnetic sheet in the trigger magnetic sheet (210).

7. A warping marking device according to claim 2, characterized in that: The light-shielding detection mechanism (3) comprises a linkage disk (31) mounted on the outer wall of the screw rod (23); the surface of the linkage disk (31) is mounted with a shaft fixing plate (32); the outer wall of the shaft fixing plate (32) is slidably connected with a cross limit frame (33); the cross limit frame (33) is fixedly connected to the lower surface of the detection platform (11); the upper surface of the shaft fixing plate (32) is fixedly connected with a combination bin (34); the inner side wall of the combination bin (34) is fixedly connected with a reflector (35); light absorbing plates (36) are evenly and symmetrically mounted on both sides of the reflector (35); the bottom wall of the inner side wall of the combination bin (34) is evenly and slidably connected with a buffer ball (37); and the outer wall of the combination bin (34) is slidably connected with a marking block (38) at the position corresponding to the buffer ball (37).

8. A warping marking device according to claim 7, characterized in that: A ball screw structure is formed between the screw rod (23) and the linkage disk (31), and the linkage disk (31) is located at the bottom of the outer wall of the screw rod (23).

9. A warping marking device according to claim 7, characterized in that: The surface of the linkage disk (31) is evenly provided with curved grooves, and the linkage disk (31) is rotationally connected to the belt shaft fixing plate (32) via the curved grooves.

10. A warping marking device according to claim 7, characterized in that: The light absorbing plate (36) is entirely attached with black absorption paper, and the buffer ball (37) and the substrate body (14) are located at the same horizontal plane.

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