Pressure sensor

Abstract

A pressure sensor is provided with: a substrate; a plurality of first electrodes provided on the substrate and arranged in a first direction and a second direction intersecting the first direction; a second electrode facing the plurality of first electrodes; a third electrode provided on the substrate and having a first lattice shape; an elastic body which is provided between the second electrode and the first electrode and between the second electrode and the third electrode, and which contains conductive particles; and a plurality of wiring layers connected to the first electrode via contact holes provided in the substrate, each of the plurality of wiring layers having a second lattice shape different from the first lattice shape.

Description

[0001] This application is a divisional application of the Chinese application with application number 202210036505.8 filed on January 13, 2022 and invention name “Pressure Sensor”. Technical Field

[0002] The present invention relates to a pressure sensor. Background Art

[0003] There is known a pressure sensor that detects pressing force by switching the electrical connection state of a switch according to the presence or absence of pressing force (for example, Patent Document 1).

[0004] Patent Document 1: Japanese Patent Application Publication No. 2018-080956

[0005] When the pressure sensor has a two-dimensional resolution on the surface to be detected of the pressing force, a plurality of switches are arranged two-dimensionally. Here, if the electrical characteristics of the switches are not uniform, the difficulty of the technology to ensure the detection accuracy of the pressing force at the position where the switch with a relatively small electrical change corresponding to the presence or absence of the pressing force is provided becomes higher. Summary of the invention

[0006] The present invention has been made in view of the above-mentioned problems, and an object of the present invention is to provide a pressure sensor capable of stably detecting a pressing force regardless of the detection position of the pressing force.

[0007] A pressure sensor in one embodiment of the present invention comprises: a plurality of first electrodes arranged along a substrate; an elastomer in contact with the plurality of first electrodes; a second electrode in contact with the elastomer and sandwiching the elastomer between the first electrodes; and a third electrode arranged at a position closer to the substrate than the second electrode and electrically connected to the second electrode, the elastomer containing conductive particles, the conductive particles electrically connecting the first electrode with the second electrode when a pressing force is applied to bring the first electrode and the second electrode close to each other, the third electrodes being continuous in a lattice shape, and the lattice shape is a lattice shape for dividing first electrodes adjacent to each other in at least one direction. BRIEF DESCRIPTION OF THE DRAWINGS

[0008] Figure 1 It is a cross-sectional view of a stacked structure including the main structure of the pressure sensor.

[0009] Figure 2 FIG. 1 is a diagram showing a pressure sensor that receives a pressing force from the second electrode side.

[0010] Figure 3 It is a diagram showing an example of a circuit configuration of a pressure sensor.

[0011] Figure 4It is a top view showing a structural example of an array.

[0012] Figure 5 It is a top view showing an example of the positional relationship of a plurality of arrays.

[0013] Figure 6 It means by Figure 3 A timing chart showing an example of electrical control when a pressure sensor having the circuit configuration shown is in operation.

[0014] Figure 7 It is a cross-sectional view showing a structural example of a pressure sensor according to a reference example.

[0015] Figure 8 1 is a plan view showing the shape of electrodes within a detection region of the pressure sensor according to Modification 1. FIG.

[0016] Fig. 9 1 is a plan view showing an example of the state of the inside of the array Un where the wiring layer having the power supply line Vbias and the signal line is provided.

[0017] Fig.10 It means that Figure 8 The electrode layers shown are Fig. 9 FIG. 1 is a top view of an example of arrangement of contacts for wiring layer connection within an array Un.

[0018] Fig.11 It is a cross-sectional view of a stacked structure including main structures of a pressure sensor according to Modification 2.

[0019] Description of Reference Numerals

[0020] 1, 1B...pressure sensor; 10...substrate; 20...first electrode; 20A, 20B, 20C, 20D...array electrode; 30...second electrode; 40, 40A...third electrode; 40a...extension portion; 50...elastic body; 51, 51a, 51b...conductive particles; 62...second element; Gate...scanning line; Sig...signal line; Vbias...power supply line. DETAILED DESCRIPTION

[0021] Hereinafter, various embodiments of the present invention will be described with reference to the accompanying drawings. It should be noted that what is disclosed are only examples, and appropriate changes that can be easily thought of by those skilled in the art while maintaining the main idea of ​​the invention are of course included in the scope of the present invention. In addition, in order to explain more clearly, the width, thickness, shape, etc. of each part are schematically represented compared to the actual method, but after all, they are only examples and are not intended to limit the interpretation of the present invention. In addition, in this specification and each figure, the same figure mark is marked for the same elements as those mentioned above in the figures that have appeared, and the detailed description is sometimes appropriately omitted.

[0022] (Implementation Method)

[0023] Figure 1 : is a cross-sectional view of a stacked structure including the main structure of the pressure sensor 1. The pressure sensor 1 is a so-called device substrate in which a plurality of structures are stacked on a substrate 10. The plurality of structures include a field effect transistor (FET) using a semiconductor. Specifically, on the substrate 10, an insulating film 11, a first wiring layer 12, a first insulating layer 13, a semiconductor layer 14, a second wiring layer 15, a second insulating layer 16, a third wiring layer 17, a third insulating layer 18, a fourth wiring layer 19, etc. are stacked in order from the side closer to the substrate 10. The first wiring layer 12, the second wiring layer 15, the third wiring layer 17, and the fourth wiring layer 19 are formed using a conductive material such as a metal electrode. The first insulating layer 13, the second insulating layer 16, and the third insulating layer 18 are formed using an insulator including, for example, silicon oxide or silicon nitride. The semiconductor layer 14 is a semiconductor that functions as a channel of the FET. When the FET is a MOSFET (Metal Oxide Semiconductor FET), the semiconductor layer 14 is, for example, silicon (Si). Figure 1 The first element 61 shown and the later described Figure 3 FETs such as the second element 62 , the third element 63 , and the fourth element 64 are formed on the substrate 10 .

[0024] In the following description, a direction along the substrate 10 is referred to as a first direction Dx. In addition, another direction along the substrate 10 and orthogonal to the first direction Dx is referred to as a second direction Dy. In addition, a direction orthogonal to the first direction Dx and the second direction Dy is referred to as a third direction Dz. The third direction Dz is a stacking direction of a stacking structure formed on the substrate 10.

[0025] A cover HRC, an electrode layer, etc. are also stacked on the upper side of the fourth wiring layer 19. The cover HRC is stacked between the fourth wiring layer 19 and the electrode layer to insulate the fourth wiring layer 19 from the electrode layer. In addition, the cover HRC is an organic layer that protects the structure on the lower layer side by suppressing the pressing force from the second electrode 30 side described later applied to the structure on the lower layer side compared to the cover HRC. The electrode layer includes a first electrode 20 and a third electrode 40. The first electrode 20 and the third electrode 40 are separated. An elastomer 50 is also provided on the upper side of the electrode layer. The elastomer 50 is a thin film elastic member. The elastomer 50 includes a plurality of conductive particles 51. The elastomer 50 including the conductive particles 51 exhibits pressure-sensitive conductivity.

[0026] In addition, a second electrode 30 is provided on the upper side of the elastic body 50. The second electrode 30 is a conductive sheet, but the second electrode 30 may be a sheet-like member that is conductive at least on the surface of the second electrode 30 on the elastic body 50 side. More specifically, the second electrode 30 is a compound-based film such as ITO (Indium Tin Oxide) provided on the elastic body 50 side. The side opposite to the elastic body 50 side of the second electrode 30 may be conductive or covered with an insulator such as a synthetic resin.

[0027] Figure 2 FIG. 1 is a diagram showing a pressure sensor 1 that receives a pressing force from the second electrode 30 side. Figure 1 When the pressure sensor 1 shown in FIG. 1 is subjected to a pressing force in the third direction Dz from the second electrode 30 side, as shown in FIG. Figure 2 As shown, the elastic body 50 is compressed in the third direction Dz. As a result, some of the plurality of conductive particles 51 included in the elastic body 50 form a conduction path that electrically connects the third electrode 40 and the second electrode 30 and the first electrode 20 and the second electrode 30 . Figure 2 , the third electrode 40 and the second electrode 30 are connected by the conductive particles 51a, and the first electrode 20 and the second electrode 30 are connected by the conductive particles 51b. The conductive particles 51a and 51b are part of the plurality of conductive particles 51. If the pressing force in the third direction Dz from the second electrode 30 side disappears, Figure 2 The status shown returns Figure 1 In the state shown, the conduction path disappears. In this way, the pressure sensor 1 can detect the pressing force from the second electrode 30 side according to whether the conduction path is established. In addition, the third electrode 40, the second electrode 30, the first electrode 20 and the elastic body 50 that form the conduction path according to the pressing force from the second electrode 30 side function as a switch 80 that switches on and off according to the pressing force. It should be noted that the second electrode 30 of the embodiment is in a floating state when it is not subjected to the pressing force and is in a non-connected state with the first electrode 20 and the third electrode 40.

[0028] More specifically, the elastic body 50 shows anisotropic pressure-sensitive conductivity in which, according to the pressing force along the third direction Dz, conduction between the third electrode 40 and the second electrode 30 and conduction between the first electrode 20 and the second electrode 30 are established, and conduction in another direction (such as the direction along the substrate 10) is not established. The conductive particles 51 are provided in the elastic body 50 in such a manner that such pressure-sensitive conductivity is established.

[0029] In the embodiment, the sheet resistance of the third electrode 40 is smaller than the sheet resistance of the second electrode 30. Specifically, the electrode layers constituting the first electrode 20 and the third electrode 40 are made of a metal having extremely high conductivity such as silver (Ag). The specific composition of the third electrode 40 is not limited thereto, but it is preferred that the third electrode 40 is composed of a material having as high conductivity as possible and as low sheet resistance as possible.

[0030] Figure 3 It is a diagram showing a circuit configuration example of the pressure sensor 1 . Figure 3 The circuit shown comprises an array circuit SC and a reset circuit RC.

[0031] The array circuit SC includes a first element 61, a second element 62, a third element 63, etc. The first element 61, the second element 62, and the third element 63 are switch elements composed of FETs. In the first element 61, one of the source and the drain is connected to the switch 80, and the other is connected to the second element 62, the third element 63, and the capacitor 70. In the second element 62, one of the source and the drain is connected to the signal line Sig, and the other is connected to the first element 61, the third element 63, and the capacitor 70. In the third element 63, one of the source and the drain is connected to the initialization potential line Vbl, and the other is connected to the first element 61, the second element 62, and the capacitor 70. In addition, the gate and back gate of the first element 61 are connected to the detection action signal transmission line Vs. In addition, the gate and back gate of the second element 62 are connected to the scanning line Gate. In addition, the gate and back gate of the third element 63 are connected to the initialization signal transmission line Vdch.

[0032] In the capacitor 70, one of the two terminals is connected to the common potential line Vcom, and the other is connected to the first element 61, the second element 62, and the third element 63. The switch 80 is provided to open and close one of the source and the drain of the first element 61 and the power supply line Vbias.

[0033] The reset circuit RC includes a fourth element 64. The fourth element 64 is a switch element composed of a FET. In the fourth element 64, one of the source and the drain is connected to the signal line Sig, and the other is connected to the reset potential line VR1. In addition, the gate and the back gate of the fourth element 64 are connected to the reset signal transmission line Vrst.

[0034] The array circuit SC is provided individually for each array capable of detecting pressure individually. The pressure sensor 1 is described later. Figure 5As shown in FIG. 1 , a plurality of arrays are provided. The scan line Gate is shared by a plurality of array circuits SC arranged along the first direction Dx. The signal line Sig is shared by a plurality of array circuits SC arranged along the second direction Dy. The detection action signal transmission line Vs, the power supply line Vbias, the common potential line Vcom, the initialization potential line Vbl, and the initialization signal transmission line Vdch are shared by all array circuits SC.

[0035] Figure 4 1 is a top view showing an example of the structure of the array. When described as a top view, it means a view observed from the front along the first direction Dx-second direction Dy plane of the plate surface of the substrate 10. Figure 4 As shown, an array is provided with a first element 61, a second element 62 and a third element 63. Figure 3 The circuit described in the embodiment is provided with a scanning line Gate, a signal line Sig, a detection action signal transmission line Vs, a common potential line Vcom, an initialization potential line Vbl, and an initialization signal transmission line Vdch. Figure 4 The array shown is constructed by referring to Figure 1 The laminated structure on the substrate 10 described above is established. Figure 1 As shown, Figure 4 The first electrode 20 and the third electrode 40 shown are arranged in the same layer (electrode layer). The first element 61, the second element 62 and the third element 63, as well as the scanning line Gate, the signal line Sig, the detection action signal transmission line Vs, the common potential line Vcom, the initialization potential line Vbl and the initialization signal transmission line Vdch are arranged at a position closer to the substrate 10 than the electrode layer.

[0036] like Figure 4 As shown in FIG. 1 , the position of the first element 61 when viewed from above partially overlaps with the position of the first electrode 20 when viewed from above. Figure 1 As shown, the second wiring layer 15 stacked on the upper side of the semiconductor layer 14 constituting the FET of the first element 61 includes an electrode 15a connected to the semiconductor layer 14 and formed as one of the source and the drain of the first element 61. The electrode 15a is connected to the connection portion 19a via a contact hole formed in the second insulating layer 16 and the third insulating layer 18. The connection portion 19a is formed when the fourth wiring layer 19 is stacked. The connection portion 19a connects the first electrode 20 to the electrode 15a. The connection portion 19a and the first electrode 20 are connected via a contact hole formed on the upper side of the connection portion 19a in the cover portion HRC. Figure 1 In the figures, the first electrode 20 has a cross-sectional shape that is bent along the contact hole. However, this is an example of the shape of the first electrode 20 and is not limited thereto, and can be appropriately changed.

[0037] like Figure 1 as well as Figure 4 As shown, the first electrode 20 is formed to be separated from the third electrode 40 . Figure 4 , a square first electrode 20 is shown in which two of the four sides facing each other are along the first direction Dx and the other two sides facing each other are along the second direction Dy. The shape of the first electrode 20 is not limited thereto. The shape of the first electrode 20 can be changed appropriately as long as it is separated from the third electrode 40. Figure 4 As shown, one array is provided with, for example, one first electrode 20 .

[0038] Figure 5 2 is a top view showing an example of the positional relationship of a plurality of arrays. Figure 4 The first electrode 20 is described as follows. Figure 5 There are multiple settings shown. Figure 5 The plurality of first electrodes 20 shown are arranged in a matrix along the first direction Dx and the second direction Dy. Figure 5 In the embodiment, 3×3 first electrodes 20 are arranged in the first direction Dx and the second direction Dy, but the actual pressure sensor 1 has more first electrodes 20. For example, 80×84 first electrodes 20 are arranged. In addition, the pitch between adjacent first electrodes 20 in the first direction Dx (or the second direction Dy) is 321 μm. This specific example is only an example and is not limited thereto, and can be appropriately changed.

[0039] Reference Figure 3 as well as Figure 4 The array described is with reference to Figure 5 A plurality of arrays are provided in a manner corresponding to the configuration of the plurality of first electrodes 20 described above. A plurality of arrays provided in a manner corresponding to the plurality of first electrodes 20 arranged along the first direction Dx share the scanning line Gate. Figure 4 As shown in FIG. 1 , the scan line Gate is arranged to extend along the first direction Dx. A plurality of array shared signal lines Sig are arranged in a manner corresponding to the plurality of first electrodes 20 arranged along the second direction Dy. Figure 4 As shown in FIG. 1 , the signal line Sig is arranged to extend along the second direction Dy. According to the structure of the first electrode 20 and the array arranged in this way, when viewed from above, the signal line Sig passes through adjacent first electrodes 20 among the plurality of first electrodes 20 arranged along the first direction Dx in a line along the second direction Dy. In addition, when viewed from above, the scanning line Gate passes through adjacent first electrodes 20 among the plurality of first electrodes 20 arranged along the second direction Dy in a line along the first direction Dx. That is, when viewed from above, the plurality of first electrodes 20 are divided into a grid shape by the signal line Sig and the scanning line Gate.

[0040] like Figure 5As shown, the third electrode 40 is formed as a single continuous electrode that divides the first electrode 20 into a grid shape. Figure 5 The third electrode 40 (the shaded portion) shown in the figure divides the plurality of first electrodes 20 arranged along the first direction Dx and the plurality of first electrodes 20 arranged along the second direction Dy. In other words, the third electrode 40 has an opening 25 for accommodating the first electrode 20 on the inner side. That is, the third electrode 40 is an electrode in which the openings 25 are arranged in a matrix. The first electrode 20 is separated from the third electrode 40 by the openings 25. Specifically, as Figure 4 As shown, one side of the first electrode 20 is separated from one side of the opening of the third electrode 40 facing the first side by a gap Wi. It should be noted that the shape of the opening 25 is not limited to a square and can be changed appropriately. It should be noted that the gap Wi is, for example, 50 μm, but is not limited to this and can be changed appropriately. Preferably, the gap Wi is greater than the thickness of the elastomer 50 in the third direction Dz, and is less than 25% (for example, about 22.5%) of the smaller width of the width in the first direction Dx and the width in the second direction Dy of each area divided into a grid shape by the signal line Sig and the scanning line Gate. In addition, Figure 4 Although not shown in the figure, the distance between the side of the first electrode 20 facing the side on which the distance Wi is written and the third electrode 40 is also the distance Wi.

[0041] The third electrode 40 is connected to a power supply line Vbias provided outside the detection area SA where the plurality of first electrodes 20 are provided. Figure 5 As shown, the detection area SA is an area where a plurality of first electrodes 20 are provided and which can detect a pressing force from the second electrode 30 side.

[0042] like Figure 5As shown, a peripheral area FA is provided in a manner surrounding the outer side of the detection area SA. The power supply line Vbias is provided to follow the peripheral area FA. The power supply line Vbias is connected to the third electrode 40 in the third direction Dz via the contact 45. Specifically, the third electrode 40 has an extension portion 40a extending from the detection area SA to the peripheral area FA. When viewed from above, the extension portion 40a overlaps with the power supply line Vbias and the contact 45. The extension portion 40a is connected to the power supply line Vbias via the contact 45. Thus, the potential of the third electrode 40 becomes the potential of the power supply line Vbias (for example, the constant potential C4 described later). In this way, the power supply line Vbias acts as a power supply portion. It should be noted that the power supply line Vbias is formed on the substrate 10 and on the same layer as any one of the wiring layers (for example, the first wiring layer 12, the second wiring layer 15, the third wiring layer 17, and the fourth wiring layer 19) on the lower side of the cover portion HRC, but is not limited to this. For example, a wiring layer dedicated to the power supply line Vbias may be stacked on the substrate 10. The contact 45 is a contact formed in a contact hole in a manner that connects the wiring layer formed with the power supply line Vbias to the third electrode 40. The contact hole is formed to penetrate the cover portion HRC and the insulating layer located above the wiring layer in the third direction Dz.

[0043] Figure 5 , a peripheral area FA near one of the corners of the outer edge of the detection area SA is shown, and the peripheral area FA is set to surround the detection area SA when viewed from above. The power supply line Vbias overlaps with the peripheral area FA when viewed from above and is set to surround the detection area SA. The plurality of contact members 45 overlap with the peripheral area FA when viewed from above and are set to surround the detection area SA and follow the power supply line Vbias. It should be noted that Figure 5 In the embodiment, the contact members 45 are arranged in a single row to follow the power supply line Vbias, but the contact members 45 may be arranged in a plurality of rows to follow the power supply line Vbias.

[0044] Figure 4 as well as Figure 5 Although not shown in the figure, Figure 3 The reset circuit RC shown is shared among multiple arrays of shared signal lines Sig. The reset potential line VR1 can also be shared among all reset circuits RC.

[0045] Figure 6 It means by Figure 3 The circuit structure shown in the figure is a timing chart showing an example of electrical control when the pressure sensor 1 is in operation. Figure 6 During the periods other than the period T1 specifically shown in FIG. 1 , the third element 63 is in a state where the signal transmission between the source and the drain is cut off (OFF). Figure 6During the periods other than the period T2 specifically shown in FIG. 1 , the first element 61 is in a state where the signal transmission between the source and the drain is cut off (OFF). Figure 6 During the period other than the period T3 specifically shown in FIG. 1 , the second element 62 is in a state where the signal transmission between the source and the drain is cut off (OFF). Figure 6 During the periods other than the period T3 specifically shown in FIG, the fourth element 64 is in a state where signal transmission between the source and the drain can be performed (ON). In other words, during the periods other than the periods T1, T2, and T3, the initialization signal transmission line Vdch, the detection action signal transmission line Vs, the reset signal transmission line Vrst, and the scanning line Gate are set to have potentials in a manner that realizes the states of the first element 61, the second element 62, the third element 63, and the fourth element 64. It should be noted that the potentials of the initialization potential line Vbl, the reset potential line VR1, the common potential line Vcom, and the power supply line Vbias are constant potentials that are individually determined in advance. Figure 6 The constant potential C1 of the initialization potential line Vbl, the constant potential C2 of the reset potential line VR1, the constant potential C3 of the common potential line Vcom, and the constant potential C4 of the power supply line Vbias shown may all be different potentials, or may be partly equal potentials. In the embodiment, the constant potential C3 is equal to the constant potential C4.

[0046] In addition, a plurality of scan lines Gate are provided according to the number of arrays arranged along the first direction Dx. Figure 6 In the figure, as a record representing multiple scan line Gates, the figure marks of scan line Gate (1), ..., scan line Gate (n) are shown. Multiple scan line Gates are provided with drive signals in sequence from a scan circuit that is not shown in the figure. The scan circuit includes, for example, a shift register. The number of shift outputs of the shift register is the same as the number of scan line Gates (n). n is a natural number greater than 2. The scan line Gate to which the drive signal output by the scan circuit is provided is shifted to scan line Gate (1), ..., scan line Gate (n) in sequence through the shift register.

[0047] First, during period T1, the potential of the initialization signal transmission line Vdch is high (H). As a result, the circuit between the source and drain of the third element 63 becomes connected. Therefore, the other of the two terminals of the capacitor 70 connected to the other of the source and drain of the third element 63 is electrically connected to the initialization potential line Vbl. The capacitor 70 is electrically connected to the initialization potential line Vbl, thereby releasing the electrostatic capacitance maintained before the connection. That is, the electrostatic capacitance maintained by the capacitor 70 becomes a state corresponding to the potential difference between the common potential line Vcom and the initialization potential line Vbl. This state is a state in which the capacitor 70 is reset. As described above, the initialization signal transmission line Vdch is shared in all arrays, so the capacitors 70 of all arrays are reset during period T1.

[0048] Next, during period T2, the potential of the detection action signal transmission line Vs is high (H). As a result, the circuit between the source and drain of the first element 61 becomes connected. Therefore, depending on the on / off of the switch 80 connected to one of the source and drain of the first element 61, whether the power supply line Vbias is connected to one of the terminals of the capacitor 70 changes. Specifically, when the pressure sensor 1 is subjected to a pressing force from the second electrode 30 side, the power supply line Vbias is connected to one of the terminals of the capacitor 70. On the other hand, when the pressure sensor 1 is not subjected to a pressing force from the second electrode 30 side, the power supply line Vbias is not connected to one of the terminals of the capacitor 70. In this way, depending on whether the pressure sensor 1 is subjected to a pressing force from the second electrode 30 side during period T2, the electrostatic capacitance stored in the capacitor 70 changes.

[0049] Furthermore, the potential of the reset signal transmission line Vrst is low (L) during period T3. It should be noted that, in the period excluding period T3 and a portion of the period before and after period T3, the fourth element 64 is turned on (ON), and therefore, the signal line Sig is connected to the reset potential line VR1. During the period when the fourth element 64 is turned on, the potential of the signal line Sig is reset by the potential of the reset potential line VR1. Before and after period T3, the low (L) / high (H) of the reset signal transmission line Vrst is reversed, and as a result, the potential of the reset signal transmission line Vrst in period T3 is low (L), thereby disconnecting the signal line Sig from the reset potential line VR1.

[0050] In addition, in the period T3, the potentials of the scanning lines Gate(1), . . . , and Gate(n) are controlled so as to be sequentially reversed between High (H) and Low (L). Figure 6, an example is shown in which any one of the scanning lines Gate (1), ..., scanning line Gate (n) is made high (H) according to the above-mentioned driving signal provided. As a result, the second elements 62 of multiple arrays that do not share the signal line Sig but share the scanning line Gate, that is, multiple arrays arranged along the first direction Dx, are turned on in sequence, and the capacitor 70 is connected to the signal line Sig. Therefore, the potential of the signal line Sig becomes a potential corresponding to the electrostatic capacitance maintained by the capacitor 70. As a result, pressure detection can be performed by the pressure sensor 1 connected to the signal line Sig. The pressure sensor 1 is a circuit that determines whether the pressure sensor 1 receives a pressing force from the second electrode 30 side based on the potential of the signal line Sig.

[0051] Although not shown, the pressure sensor 1 has a Figure 6 Specifically, the power supply circuit, control reference Figure 6 The control circuit for switching high (H) / low (L) corresponding to period T1, period T2, and period T3 is arranged in the pressure sensor 1, and the power supply circuit supplies potentials corresponding to the high (H) / low (L) of the initialization signal transmission line Vdch, the initialization potential line Vbl, the detection action signal transmission line Vs, the reset signal transmission line Vrst, etc., and potentials corresponding to the constant potentials C1, C2, C3, and C4.

[0052] The above is based on Figure 3 However, the circuit structure of the pressure sensor 1 is not limited to Figure 3 In principle, if the first element 61, the second element 62, the capacitor 70, and the switch 80 are present, and their source-drain connections and the potential supply to the gate are provided, the pressure sensor of the present invention operates. The third element 63 and the fourth element 64 are specific structural examples for potential reset and are not essential for pressure detection.

[0053] The pressure sensor 1 of the embodiment is as shown in FIG. Figure 1 , Figure 2 , Figure 4 , Figure 5 As described above, the first electrode 20 and the third electrode 40 are separated by the opening 25. In other words, the first electrode 20 and the third electrode 40 are separated by the interval Wi (see Figure 4) are arranged in a manner that the first electrode 20 and the third electrode 40 are located nearby in a non-contact positional relationship. Therefore, no matter where the pressing force from the second electrode 30 side is detected in the detection area SA including the plurality of first electrodes 20 arranged along the plate surface of the substrate 10, the electrical separation distance of the first electrode 20 and the third electrode 40 that are conductive corresponding to the pressing force is substantially the same. This is because the interval between the first electrode 20 and the third electrode 40 is unified as the interval Wi, so that the conduction path length of the second electrode 30 when the first electrode 20 and the third electrode 40 are conductive via the conductive particles 51 and the second electrode 30 is substantially the same length as the interval Wi. In addition, in the embodiment, the potential of the power supply line Vbias is supplied via the third electrode 40 having a lower film resistance than the second electrode 30, so the current from the power supply line Vbias to the conductive path of the second electrode 30 is also hardly attenuated. Therefore, no matter where in the detection area SA the pressing force is applied from the second electrode 30 side, the electrical state when the conduction path between the first electrode 20 and the third electrode 40 is established and the electrical state when the conduction path is not established are clearly distinguished. In this way, according to the embodiment, the pressing force can be stably detected regardless of the detection position of the pressing force.

[0054] Figure 7 It is a cross-sectional view showing a structural example of a pressure sensor according to a reference example. Figure 7 The pressure sensor shown in the figure is different from the embodiment and does not have the third electrode 40. Therefore, the power supply having the same potential as the power supply line Vbias is connected to the second electrode 30. In addition, since the power supply is not connected to the second electrode 30 in the detection area SA, the second electrode 30 must be connected to the power supply outside the detection area SA. It should be noted that Figure 7 The elastic body 50 shown is in a state of receiving a pressing force from the second electrode 30 side.

[0055] Since the second electrode 30 has a higher sheet resistance than the third electrode 40 of the embodiment, the farther the detection position of the pressing force is from the power supply source of the reference example, the greater the attenuation of the current from the power supply source due to the sheet resistance of the second electrode 30. Figure 7The difference between the electrical state when the conductive path between the second electrode 30 and the third electrode 40 shown is established and the electrical state when the conductive path is not established is less clear. This is because the greater the attenuation of the current from the power supply due to the thin film resistance of the second electrode 30 means that even if the conductive path is established, the electrical change caused by the influence of the current is smaller. In this way, compared with the reference example, in the embodiment, it is possible to suppress the situation where the detection accuracy is inconsistent according to the position relationship between the position of the pressing force detected in the detection area SA and the position of the power supply. Therefore, in the embodiment, as described above, the pressing force can be stably detected regardless of the detection position of the pressing force.

[0056] As described above, the pressure sensor 1 of the embodiment includes: a plurality of first electrodes 20 arranged along the substrate 10; an elastic body 50 in contact with the plurality of first electrodes 20; a second electrode 30 in contact with the elastic body 50 and sandwiching the elastic body 50 between the first electrode 20; and a third electrode 40 provided at a position closer to the substrate 10 than the second electrode 30 and electrically connected to the second electrode 30. The elastic body 50 contains conductive particles, and the conductive particles electrically connect the first electrode 20 and the second electrode 30 when a pressing force is applied to bring the first electrode 20 and the second electrode 30 close to each other. The third electrode 40 is continuous in a lattice shape, and the lattice shape is a lattice shape that divides the first electrodes 20 adjacent to each other in at least one direction. That is, the third electrode 40 having the same potential as the second electrode 30 connected to the first electrode 20 when a pressing force is applied is arranged near the first electrode 20 in a manner that divides the adjacent first electrodes 20. Therefore, the first electrode 20 and the third electrode 40 that are electrically connected when pressed can be brought into a closer positional relationship. Therefore, regardless of the configuration of the switch, it is easy to stabilize the electrical characteristics of the switch including the first electrode 20 and the third electrode 40 (eg, the switch 80). Therefore, according to the pressure sensor 1, the pressing force can be stably detected regardless of the detection position of the pressing force.

[0057] In addition, the pressure sensor 1 has a detection area SA and a transistor (second element 62) in which a plurality of first electrodes 20 are arranged in a matrix. The detection area SA includes: a plurality of signal lines Sig along one of the row direction (first direction Dx) and the column direction (second direction Dy) and a plurality of scanning lines Gate along the other of the row direction and the column direction. In the transistor, one of the source and the drain is connected to the substrate 10 via the first element 61, the other of the source and the drain is connected to the signal line Sig, and the gate is connected to the scanning line Gate. Thus, the transistor is operated in units of each scanning line Gate, and a signal representing the electrical state of the first electrode 20 connected to the operating transistor via the first element 61 is obtained via the signal line Sig. That is, the electrical state of the first electrode 20 can be scanned by scanning the scanning line Gate. Therefore, it is possible to detect the pressed part in the detection area SA where the electrical connection between the first electrode 20 and the second electrode 30 is generated.

[0058] In addition, the third electrode 40 is formed in the same layer as the plurality of first electrodes 20. Thus, the first electrode 20 and the third electrode 40 can be formed in the same process, and the pressure sensor 1 can be manufactured at a lower cost.

[0059] In addition, the third electrode 40 is continuous along the substrate 10 in a manner surrounding the four sides of each first electrode 20. Thus, the positional relationship between the third electrode 40 and the first electrode 20, which have the same potential as the second electrode 30 connected to the first electrode 20 when a pressing force is applied, can be made more qualitative, and the electrical characteristics of the switch (for example, the switch 80) including the first electrode 20 and the third electrode 40 can be easily made more stable regardless of the configuration of the switch.

[0060] In addition, the thin film resistance of the third electrode 40 is smaller than the thin film resistance of the second electrode 30. Thus, a conduction path including the third electrode 40 closest to the first electrode 20 among the first electrode 20, the second electrode 30, and the third electrode 40 connected when pressed is established, and the electrical characteristics of the switch (for example, the switch 80) including the first electrode 20 and the third electrode 40 are easily stabilized regardless of the configuration of the switch.

[0061] In addition, the third electrode 40 has an extension portion 40a, which extends to the outside (peripheral area FA) of the area (detection area SA) where the plurality of first electrodes 20 are provided and is connected to the power supply line Vbias. When a pressing force is applied to bring the first electrode 20 and the second electrode 30 closer together, the first electrode 20 and the third electrode 40 are electrically connected. Thus, the structure for connecting the first electrode 20 and the third electrode 40 and the structure for connecting the first electrode 20 and the second electrode 30 can be shared. Therefore, the pressure sensor 1 can be manufactured at a lower cost.

[0062] In addition, the second electrode 30 is electrically floated when not electrically connected to the third electrode 40. That is, there is no need for a structure for continuously applying a specific potential from the outside to the second electrode 30. Thus, the pressure sensor 1 can be manufactured at a lower cost.

[0063] (Variation Example)

[0064] Below, refer to Figure 8 to Figure 11 A modification example in which a specific form of a part of the structure is different from that of the embodiment will be described. In the description of the modification example, the same reference numerals may be given to the same structure as that of the embodiment, and the description thereof may be omitted.

[0065] (Variant 1)

[0066] Figure 8 FIG. 2 is a top view illustrating the shape of the electrodes in the detection area SA of the pressure sensor of Modification Example 1. Figure 8 As shown in FIG. 1 , in the modification example 1, an array electrode 20A, an array electrode 20B, an array electrode 20C, an array electrode 20D, and a third electrode 40A (shaded portion) are provided in the array Un. Figure 8 , a structure of 3×3 arrays Un arranged in three directions along the first direction Dx and three directions along the second direction Dy is shown. The detection area SA may also be configured with more arrays Un or fewer arrays Un. In this way, the pressure sensor of the modified example 1 is configured with multiple arrays Un in a matrix in the detection area SA when viewed from above.

[0067] The array electrodes 20A, 20B, 20C, and 20D are functionally the same as the first electrode 20 of the embodiment. In addition, the third electrode 40A is functionally the same as the third electrode 40 of the embodiment. In Modification 1, the first electrodes 20 of each array are replaced with a plurality of first electrodes such as the array electrodes 20A, 20B, 20C, and 20D. In Modification 1, according to the number, shape, and arrangement of the plurality of first electrodes, the shape when viewed from above is changed compared to the third electrode 40 of the embodiment, such as the third electrode 40A.

[0068] Figure 8In the example shown, the array electrode 20A and the array electrode 20B arranged along the first direction Dx in the array Un are adjacent to each other without sandwiching the third electrode 40A. In addition, the array electrode 20C and the array electrode 20D arranged along the first direction Dx in the array Un are adjacent to each other without sandwiching the third electrode 40A. On the other hand, the array electrodes 20A and the array electrodes 20C arranged along the second direction Dy in the array Un are adjacent to each other with the third electrode 40A sandwiched therebetween. In addition, the array electrodes 20B and the array electrodes 20D arranged along the second direction Dy in the array Un are adjacent to each other with the third electrode 40A sandwiched therebetween. In this way, the third electrode 40A is continuous in a grid shape, and the grid shape is a grid shape that divides the first electrodes adjacent to each other in at least one direction (for example, the second direction Dy) among the plurality of adjacent first electrodes in the array Un. It should be noted that the positional relationship between the plurality of first electrodes and the third electrode 40A in the array Un is not limited to this. For example, Figure 8 The first direction Dx and the second direction Dy may be interchanged. In addition, the third electrode 40A may extend so as to further divide the array electrode 20A and the array electrode 20B and the array electrode 20C and the array electrode 20D in the array Un.

[0069] In the first modification, a plurality of first electrodes arranged in one array Un, such as the array electrodes 20A, 20B, 20C, and 20D, share one second element 62. It should be noted that in the first modification, the second element 62 may be omitted. Figure 3 The first element 61 is shown, and the switch 80 is connected to the second element 62, the third element 63 and the capacitor 70. The switch 80 of the modification example 1 is switched between conduction (ON) and non-conduction (OFF) between the third electrode 40-the second electrode 30-the array electrodes 20A, 20B, 20C, 20D.

[0070] Fig. 9 1 is a plan view showing an example of the state of the inside of the array Un in which the wiring layer provided with the power supply line Vbias and the signal line Sig is provided.

[0071] Fig.10 It means that Figure 8 The electrode layers shown are Fig. 9 FIG. 1 is a top view of an example of arrangement of contacts for wiring layer connection within an array Un. Fig.10 The contact shown is formed to penetrate the cover portion HRC.

[0072] like Fig. 9 As shown, the connection portion 19a of the first modification extends in a manner corresponding to the shape and arrangement of the array electrodes 20A, 20B, 20C, and 20D in a plan view. Fig.10The contact forming regions 20P, 20Q, 20R, and 20S shown are connected to the array electrodes 20A, 20B, 20C, and 20D via one or more contacts. Fig.10 The contact forming region 20P shown in FIG. Fig. 9 The array electrode 20B is connected to the connection portion 19a shown in FIG. Fig.10 The contact forming region 20Q shown in FIG. Fig. 9 The array electrode 20C is connected to the connection portion 19a shown in FIG. Fig.10 The contact forming region 20R shown in FIG. Fig. 9 The array electrode 20D is connected to the connection portion 19a shown. Fig.10 The contact forming region 20S shown in FIG. 20A includes a contact 454 and a contact 454 formed therein. Fig. 9 The connection portion 19a shown is connected.

[0073] The plurality of connection portions 19a individually connected to the array electrodes 20A, 20B, 20C, and 20D are connected to each other via a common connection portion 19c located near the center of the array Un, for example. The common connection portion 19c is provided on the same layer as the connection portion 19a. Figure 1 The structure shown in FIG. 1 is a structure in which the connection portion 19a and the electrode 15a are connected. In the modification 1, the structure is replaced by a structure in which the connection portion 19c and the electrode 15a are connected in common (see FIG. 1 ). Figure 1 ) connection. The specific form of the connection between the connecting portion 19a and the electrode 15a is not limited to this and can be appropriately changed. In addition, the number and arrangement of array electrodes such as array electrodes 20A, 20B, 20C, and 20D are not limited to Fig. 9 The example shown can be changed appropriately. For example, it can also be a configuration in which one of the array electrodes is located on the upper side of the common connection portion 19c when viewed from above. In this case, a contact is provided to connect the array electrode to the common connection portion 19c. In addition, the more the number of contacts connecting the connection portion 19a (or the common connection portion 19c) to one array electrode, the more the current path between the connection structures increases, thereby being able to reduce the resistance of each contact unit. Therefore, from this point of view, it is also possible to connect the array electrode using the common connection portion 19c and the contacts.

[0074] like Fig. 9 As shown, the power supply line Vbias of the modification example 1 extends along the second direction Dy in a non-contact configuration with the connection portion 19a and the signal line Sig. Specifically, the power supply line Vbias is provided along two sides of the four sides of the array Un that face each other in the first direction Dx and extend along the second direction Dy. The power supply line Vbias is connected to the third electrode 40A via Fig.10 The contact forming region 45A shown in the figure is connected to the contact 455 included in the contact forming region 45A. Figure 8 The corresponding positions between the array electrodes 20A and 20C are configured with Fig. 9 The virtual electrode DF is shown. The virtual electrode DF is connected via Fig.10 The contact 456 located between the contact forming region 20P and the contact forming region 20R in the contact forming region 45A shown is connected to the third electrode 40A. The potential of the power supply line Vbias is provided to the virtual electrode DF via the contact forming region 45A and the third electrode 40A. As a result, the electrical characteristics between the array electrode 20A and the array electrode 20C and the electrical characteristics between the array electrode 20B and the array electrode 20D can be made closer, and the detection accuracy of the pressing force can be further improved. It should be noted that Fig.10 In the figure, only two contacts (contacts 451, 452, 453, 454, 455, 456) in each region are represented by reference numerals, but structures shown in the same shape as the square structures marked with reference numerals also function as contacts.

[0075] In the first modification, adjacent arrays Un among the plurality of arrays Un arranged in a matrix form share the power supply line Vbias and the third electrode 40A located therebetween.

[0076] Fig. 9 The wiring layer shown is, for example, the fourth wiring layer 19 of the embodiment (see Figure 1 ), but is not limited thereto, and may also be other wiring layers. In this case, Fig.10 The illustrated contact and the contact hole for establishing a connection based on the contact extend to the other wiring layer.

[0077] It should be noted that, in reference Figure 8 to Figure 10 In the modification example 1 described above, in the array Un, four first electrodes (array electrodes 20A, 20B, 20C, 20D) share one second element 62, but the number of first electrodes that can share one second element 62 in the modification example 1 is not limited to four, and can be two or more. In addition, the top view arrangement of the plurality of first electrodes that share one second element 62 and the shape of each first electrode are arbitrary.

[0078] Except for the matters mentioned above, Modification 1 is the same as the embodiment. That is, the elastic body 50 and the second electrode 30 are provided above the electrode layer forming the array electrodes 20A, 20B, 20C, 20D and the third electrode 40A, similarly to the embodiment.

[0079] In the case where a plurality of first electrodes share one second element 62 as in Modification 1, the conduction between the first electrode 20 and the second electrode 30 of the same embodiment (see Figure 2 ) The same conduction is generated individually on the plurality of first electrodes according to the pressing force from the second electrode 30 side. Therefore, a part of the plurality of first electrodes may be conductively connected to the second electrode 30, and all of the plurality of first electrodes may be conductively connected to the second electrode 30. That is, a situation in which at least one of the plurality of first electrodes is conductively connected to the second electrode 30 may be generated. For example, Figure 8 As shown, in the manner in which the array electrodes 20A, 20B, 20C, and 20D share one second element 62, there can be generated a first situation in which none of the array electrodes 20A, 20B, 20C, and 20D is electrically connected to the second electrode 30, a second situation in which one of the array electrodes 20A, 20B, 20C, and 20D is electrically connected to the second electrode 30, a third situation in which two of the array electrodes 20A, 20B, 20C, and 20D are electrically connected to the second electrode 30, a fourth situation in which three of the array electrodes 20A, 20B, 20C, and 20D are electrically connected to the second electrode 30, and a fifth situation in which four of the array electrodes 20A, 20B, 20C, and 20D are electrically connected to the second electrode 30. The detection circuit connected to the signal line Sig has an electrical resolution capable of identifying the first to fifth situations, so that the pressure sensor can grade the detection of the pressing force of each array. That is, the first to fifth situations that can be generated by the difference in the strength of the pressing force from the second electrode 30 side can be detected separately, so that in addition to detecting whether there is a pressing force, the strength of the pressing force can also be detected. Here, the first to fifth situations are taken as examples, but the electrical resolution of the detection circuit only needs to correspond to the number of first electrodes that share one second element 62.

[0080] According to Modification 1, one transistor (second element 62) is connected to two or more first electrodes (e.g., array electrodes 20A, 20B, 20C, 20D). Thus, the strength of the signal output to the signal line Sig via the transistor can be changed according to the number of first electrodes connected to the second electrode 30 among the two or more first electrodes. That is, the strength of the signal can be given a level corresponding to the number of first electrodes connected to the one transistor via the first element 61. Thus, the detection accuracy of the pressed position and the pressed force in the detection area SA is further improved.

[0081] In addition, the third electrode 40A divides the first electrodes adjacent to each other in at least one direction among two or more first electrodes (for example, array electrodes 20A, 20B, 20C, and 20D) connected to one transistor (second element 62). Thus, it is easy to make the electrical characteristics based on the positional relationship between the two or more first electrodes connected to one transistor (second element 62) via the first element 61 and the third electrode 40A more stable.

[0082] The third electrode 40A is electrically connected to a power supply line Vbias stacked on the substrate 10 side relative to the third electrode 40A. Thus, the power supply line Vbias can be arranged in the detection area SA and connected to the third electrode 40A.

[0083] In addition, the power supply line Vbias and the signal line Sig are formed in the same layer. Therefore, the power supply line Vbias and the signal line Sig can be formed in the same process, and the pressure sensor 1 can be manufactured at a lower cost.

[0084] (Variant 2)

[0085] Fig.11 2 is a cross-sectional view of a laminated structure including the main structure of a pressure sensor 1B according to a second modification. Fig.11 The elastic body 50 shown in FIG. 1 is in a state of receiving a pressing force from the second electrode 30 side. The pressure sensor 1B further includes a conductive portion 90 in addition to the structure of the embodiment. Fig.11 As shown, it has: a power supply line Vbias disposed on the upper side of the cover HRC and exposed to the outside. The power supply line Vbias disposed on the upper side of the cover HRC and exposed to the outside may be a post-installed electrode connected to an external power supply source that provides the same potential as the power supply line Vbias of the embodiment, or may be a structure in which the third electrode 40 extends to the outside.

[0086] The conductive portion 90 is, for example, a conductive tape having conductivity and adhesiveness on the surface facing the second electrode 30 and on the surface facing the power supply line Vbias provided on the upper side of the cover portion HRC and exposed to the outside. Fig.11 As shown, the conductive portion 90 connects the power supply line Vbias provided on the upper side of the cover portion HRC and exposed to the outside to the second electrode 30. Thus, the potential of the power supply line Vbias is provided to the second electrode 30. The conductive portion 90 may be another structure that performs the same function.

[0087] It should be noted that in Modified Example 2, when the pressure sensor 1B is not subjected to a pressing force from the second electrode 30 side, the conduction between the first electrode 20 and the second electrode 30 is not established as in the embodiment, and therefore, whether or not to apply the potential of the power supply line Vbias from the side of the first element 61 corresponding to the presence or absence of a pressing force is switched. Therefore, in Modified Example 2, the pressing force can also be detected in the same manner as in the embodiment. Moreover, according to Modified Example 2, the second electrode 30 is always supplied with the potential of the power supply line Vbias, and therefore, when the pressure sensor 1B is subjected to a pressing force from the second electrode 30 side, the potential supplied to the capacitor 70 (see Figure 3 ) is more stable. In addition, as in the embodiment, the first electrode 20 and the third electrode 40 are arranged in the vicinity via the opening 25, so that the electrical characteristics of the array are extremely stable regardless of the arrangement of the array in the row and column directions within the detection area SA. Therefore, according to the modification 2, it is possible to detect the pressing force with higher accuracy under more stable conditions.

[0088] As described above, according to Modification 2, the second electrode 30 is connected to the power supply unit (power supply line Vbias) provided outside the region where the plurality of first electrodes 20 are provided. Thus, the potential of the second electrode 30 can be made the same as that of the third electrode 40 in advance, and the electrical characteristics of the switch (for example, the switch 80) including the first electrode 20, the second electrode 30, and the third electrode 40 can be easily stabilized regardless of the configuration of the switch.

[0089] It should be noted that other effects brought about by the methods described in the implementation examples and modified examples are obvious according to the description of this specification, or are easily conceivable by those skilled in the art, and are of course understood to be brought about by the present invention.

Claims

1. A pressure sensor, characterized in that: have: substrate; A plurality of first electrodes are disposed on the substrate and arranged in a first direction and a second direction intersecting the first direction; a second electrode facing the plurality of first electrodes; A third electrode is disposed on the substrate and has a first lattice shape; an elastic body, disposed between the second electrode and the first electrode and between the second electrode and the third electrode, and containing conductive particles; as well as a plurality of wiring layers connected to the first electrode via contact holes provided in the substrate, The plurality of wiring layers each have a second lattice shape different from the first lattice shape.

2. The pressure sensor according to claim 1, characterized in that: The plurality of wiring layers include a first wiring layer, a second wiring layer, a third wiring layer, and a fourth wiring layer arranged in a matrix. One corner of the first wiring layer, one corner of the second wiring layer, one corner of the third wiring layer, and one corner of the fourth wiring layer are connected to face each other.

3. The pressure sensor according to claim 1, characterized in that: The second lattice shape has a structure in which a plurality of fragments intersect each other, The plurality of wiring layers are respectively connected to the corresponding first electrodes at a plurality of intersections where the fragments intersect.

4. The pressure sensor according to claim 1, characterized in that: The pressure sensor further has a power supply line extending along the second direction, The power supply line is connected to the third electrode via a contact.

5. The pressure sensor according to claim 1, characterized in that: The pressure sensor further includes a dummy electrode, the dummy electrode being arranged between wiring layers arranged along the second direction and extending along the first direction. The dummy electrode is connected to the third electrode via a contact.

6. The pressure sensor according to claim 1, characterized in that: The plurality of first electrodes have detection areas arranged in a matrix. The detection area includes a plurality of signal lines along one of a row direction and a column direction and a plurality of scanning lines along the other of the row direction and the column direction. The pressure sensor further includes a transistor in which one of a source and a drain is connected to the first electrode, the other of the source and the drain is connected to the signal line, and a gate is connected to the scanning line.

7. The pressure sensor according to claim 1, characterized in that: The third electrode and the plurality of first electrodes are formed in the same electrode layer.

8. The pressure sensor according to claim 1, characterized in that: The third electrode is continuous along the substrate so as to surround the first electrodes.

9. The pressure sensor according to claim 1, characterized in that: The sheet resistance of the third electrode is smaller than the sheet resistance of the second electrode.

10. The pressure sensor according to claim 1, characterized in that: The third electrode has an extension portion, the extension portion extends outside the region where the plurality of first electrodes are provided and is connected to the power supply portion, When a pressing force is applied to bring the first electrode and the second electrode closer together, the second electrode and the third electrode are electrically connected.

11. The pressure sensor according to claim 1, characterized in that: The second electrode is connected to a power supply portion provided outside a region where the plurality of first electrodes are provided.

12. The pressure sensor according to claim 1, characterized in that: The second electrode is electrically floating without being electrically connected to the third electrode.

13. The pressure sensor according to claim 6, characterized in that: One transistor is connected to two or more of the first electrodes.

14. The pressure sensor according to claim 13, characterized in that: The third electrode divides the first electrodes adjacent to each other in at least one direction among two or more of the first electrodes connected to one transistor.

15. The pressure sensor according to claim 13, characterized in that: The third electrode is electrically connected to a power supply portion, and the power supply portion is stacked on a side closer to the substrate than the third electrode.

16. The pressure sensor according to claim 15, characterized in that: The plurality of first electrodes have detection areas arranged in a matrix. The detection area includes a plurality of signal lines along one of a row direction and a column direction, The power supply portion and the signal line are in the same layer.

Images