Mask pre-alignment device

Abstract

The invention provides a mask pre-alignment device which comprises a supporting frame and a supporting plate, the supporting frame is provided with a driving assembly, a first limiting assembly and a second limiting assembly, the first limiting assembly and the second limiting assembly are in transmission connection with the driving assembly, and the driving assembly alternately or simultaneously drives the first limiting assembly and the second limiting assembly. The first limiting plate and the second limiting plate of the first limiting assembly move oppositely or oppositely in the first direction, and the third limiting plate and the fourth limiting plate of the second limiting assembly move oppositely or oppositely in the second direction. Therefore, the position of the mask plate on the supporting plate is calibrated; according to the mask pre-alignment device, the same driving assembly is adopted to drive the first limiting assembly and the second limiting assembly while accurate pre-alignment operation on the mask plate is achieved, the structure of the driving assembly is greatly simplified, and the manufacturing difficulty and the manufacturing cost of the mask pre-alignment device are reduced.

Description

Technical Field

[0001] The present application relates to the technical field of lithography equipment, and in particular to a mask pre-alignment device. Background Art

[0002] With the rise of the chip industry, lithography technology has made great progress, especially in top-level lithography machines, where the precision of each component and the process cost are extremely high. For example, in the top-level lithography requirements, the mask stage pre-alignment accuracy is extremely high, resulting in the corresponding mask stage pre-alignment device structure being extremely complex and the manufacturing cost being extremely high. At the same time, the core technical points to ensure accuracy are difficult to master.

[0003] However, with the gradual failure of Moore's Principle and the limitation of quantum effect, the development of photolithography process is gradually slowing down. The application of high-process chips has become diversified, which makes the structure of photolithography machines under different processes show a trend of diversified development. In addition, there are more and more mask transfer processes, and many processes do not require high mask stage pre-alignment accuracy, but the complexity and manufacturing cost of the corresponding mask pre-alignment device are difficult to reduce.

[0004] Therefore, there is an urgent need for a method that can greatly simplify the complexity of the mask pre-alignment device and reduce the manufacturing cost of the mask pre-alignment device in photolithography requirements with lower precision requirements. Summary of the invention

[0005] The purpose of the present application is to solve the problem in the prior art of how to simplify the complexity of the mask pre-alignment device and reduce the manufacturing cost while ensuring the quality of lithography. Therefore, the present application provides a mask pre-alignment device, which can calibrate the position of the mask plate on the support surface through the first limit assembly and the second limit assembly in the first direction and the second direction, so as to achieve accurate pre-alignment operation of the mask plate, and the limit plate 1, the limit plate 2, the limit plate 3 and the limit plate 4 can be away from the support surface, so as to avoid the interference of the limit plate 1, the limit plate 2, the limit plate 3 and the limit plate 4 with the position of the mask plate during the placement of the mask plate and the lithography process. Furthermore, the same driving assembly is used to drive the first limit assembly and the second limit assembly, which greatly simplifies the structure of the driving assembly and reduces the manufacturing difficulty and manufacturing cost of the mask pre-alignment device.

[0006] The present application provides a mask pre-alignment device, comprising: Support frames and support plates; The support plate is fixedly arranged on the support frame and has a support surface for supporting the mask; The support frame is provided with a driving assembly, and a first limiting assembly and a second limiting assembly transmission-connected to the driving assembly; The first limiting assembly includes a limiting plate 1 and a limiting plate 2 which are arranged opposite to each other along a first direction of the support surface, and the second limiting assembly includes a limiting plate 3 and a limiting plate 4 which are arranged opposite to each other along a second direction of the support surface, and the first direction and the second direction intersect; The first limiting plate, the second limiting plate, the third limiting plate and the fourth limiting plate are movably arranged relative to the supporting frame; The driving assembly drives the first limiting assembly and the second limiting assembly alternately or simultaneously, so that the limiting plate 1 and the limiting plate 2 move relative to or toward each other in the first direction, and the limiting plate 3 and the limiting plate 4 move relative to or toward each other in the second direction.

[0007] By adopting the above technical solution, by arranging the first limit assembly and the second limit assembly in the intersecting first direction and the second direction, it can be ensured that the first limit assembly and the second limit assembly can accurately position the mask on the support surface. And the same driving assembly is used to alternately or simultaneously drive the first limit assembly and the second limit assembly, so that the driving assembly can be greatly simplified, and the complexity of the mask pre-alignment device can be simplified while ensuring the pre-alignment accuracy, thereby reducing the problem of manufacturing cost of the mask pre-alignment device.

[0008] In some embodiments, the driving assembly includes a driving member, and a first transmission assembly and a second transmission assembly disposed around the driving member; The driving member drives the first limiting assembly and the second limiting assembly through the first transmission assembly and the second transmission assembly; The first transmission assembly includes a first transmission surface that is matched with the driving member for transmission, and a transmission direction of the first transmission surface is parallel to the first direction. The second transmission assembly includes a second transmission surface that is matched with the driving member for transmission, and a transmission direction of the second transmission surface is parallel to the second direction. The first transmission surface and the second transmission surface are staggered in a third direction.

[0009] By adopting the above technical solution, it is possible to avoid interference between the first transmission component when transmitting in the first direction and the second transmission surface when transmitting in the second direction. Furthermore, the first transmission component and the second transmission component can be stacked in the third direction, thereby improving the integration of the mask pre-alignment device and reducing the overall volume of the drive component and the mask pre-alignment device.

[0010] In some embodiments, the output end of the driving member is movably arranged in the third direction so that the output end switches between the first transmission surface and the second transmission surface; Alternatively, the output end of the driving member is simultaneously connected to the first transmission surface and the second transmission surface, and drives the limit plate one, limit plate two, limit plate three and limit plate four to move toward or away from the support surface at the same time.

[0011] By adopting the above technical solution, the first limit assembly and the second limit assembly can be adjusted in sequence by switching the position of the output end, so that the mask on the supporting surface can be adjusted in only one direction at a time, thereby ensuring the accuracy of each adjustment.

[0012] Furthermore, the first limit assembly and the second limit assembly can also be driven simultaneously to efficiently complete the pre-alignment of the mask plate at one time, greatly improving the pre-alignment efficiency of the mask pre-alignment device and simplifying the operation process; and the output end of the driving member does not need to be movably set, which further simplifies the structure of the driving member and reduces the cost of the mask pre-alignment device.

[0013] In some embodiments, the output end of the driving member is configured as a transmission gear; The first transmission assembly comprises a transmission rack 1 and a transmission rack 2 which are arranged in parallel, and the side of the transmission rack 1 and the transmission rack 2 on which the transmission teeth are arranged is the first transmission surface; When the first transmission assembly cooperates with the transmission gear, the first transmission rack and the second transmission rack are clamped relatively on both sides of the transmission gear; The transmission rack 1 and the transmission rack 2 are movably arranged on the support frame through a slide rail; The second transmission assembly comprises a transmission rack 3 and a transmission rack 4 arranged in parallel, and the side of the transmission rack 3 and the transmission rack 4 provided with transmission teeth is the second transmission surface; When the second transmission assembly cooperates with the transmission gear, the transmission rack three and the transmission rack four are clamped relatively on both sides of the transmission gear; The limit plate 1, limit plate 2, limit plate 3 and limit plate 4 are fixedly arranged on the transmission rack 1, transmission rack 2, transmission rack 3 and transmission rack 4.

[0014] By adopting the above technical solution, the output end of the driving member is connected to the first transmission assembly and the second transmission assembly by a rigid transmission method such as a gear transmission, which can ensure the stability and movement accuracy of the first transmission assembly and the second transmission assembly during movement. At the same time, the transmission rack 1 and the transmission rack 2 are clamped on both sides of the transmission gear, so that when the transmission gear rotates, it can simultaneously drive the transmission rack 1 and the transmission rack 2 to move symmetrically relative to or toward each other in the first direction; thereby reducing the motion error between the transmission rack 1 and the transmission rack 2, thereby improving the limiting accuracy of the limiting plate 1 and the limiting plate 2. Similarly, the limiting accuracy of the limiting plate 3 and the limiting plate 4 is also improved; to ensure the pre-alignment accuracy of the mask pre-alignment device.

[0015] In some embodiments, the support frame includes a bottom plate disposed opposite to the support plate, and a support layer disposed between the bottom plate and the support plate; The upper side of the support layer is fixedly connected to the support plate via a plurality of support columns; The third direction is perpendicular to the support surface; The support layer is provided with a first through hole extending in a third direction on a bottom surface of the support plate corresponding to the support plate, and the first through hole is used to accommodate the movement of the output end of the driving member; The support layer extends downward in the third direction to form a first guide plate, and extends upward to form a second guide plate; the first transmission assembly is movably disposed on the first guide plate; the second transmission assembly is movably disposed on the second guide plate.

[0016] By adopting the above technical solution, the first guide plate and the second guide plate extending up and down from the support layer are used to stagger the first transmission assembly and the second transmission assembly in the third direction, thereby avoiding mutual interference between the first transmission assembly and the second transmission assembly. Furthermore, the first guide plate and the second guide plate can guide and limit the movement of the first transmission assembly and the second transmission assembly, thereby further improving the stability of the movement of the first transmission assembly and the second transmission assembly, thereby ensuring the pre-alignment accuracy of the mask pre-alignment device.

[0017] In some embodiments, the support layer and the base plate are connected via a plurality of adjustment columns, the height of the adjustment columns are adjustable, and the adjustment columns are used to adjust the flatness of the support layer.

[0018] By adopting the above technical solution, the flatness of the support layer can be adjusted by adjusting the adjustment column, thereby indirectly adjusting the flatness of the support plate fixed to the support layer.

[0019] In some embodiments, the support frame further comprises a baffle surrounding the support layer; The first limiting assembly and the second limiting assembly are located outside the baffle, and the baffle is provided with a second through hole for accommodating the movement of the first transmission assembly and the second transmission assembly.

[0020] By adopting the above technical solution, the support layer and the driving components arranged in the support layer can be shielded, reducing the entry of external components that affect the safety and reliability of the device.

[0021] In some embodiments, a plurality of support blocks are disposed on a side of the support plate facing away from the support frame, and upper surfaces of the support blocks form the support surface.

[0022] By adopting the above technical solution, on the one hand, the support method of multiple support blocks can reduce the area of ​​the support surface and reduce the friction resistance between the support surface and the mask plate, thereby facilitating the first limit assembly and the second limit assembly to position the mask plate.

[0023] In some embodiments, the limit plate 1 and / or the limit plate 2 is arranged in an L shape, including a first extension portion arranged corresponding to the side of the support surface, and a second extension portion connecting the first extension portion and the first transmission assembly; the first extension portion and the second extension portion are vertically connected.

[0024] By adopting the above technical solution, the first extension part can increase the contact area of ​​the limit plate one and / or the limit plate two on the side of the mask plate, thereby improving the stability of the calibration of the limit plate one and / or the limit plate two on the mask plate, and at the same time can calibrate the placement posture of the mask plate to ensure the pre-alignment accuracy of the mask pre-alignment device.

[0025] Other features and corresponding beneficial effects of the present application are described in the latter part of the specification, and it should be understood that at least some of the beneficial effects become obvious from the records in the specification of the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 A schematic diagram of the three-dimensional structure of a mask pre-alignment device according to an embodiment of the present application; Figure 2 A schematic diagram of the internal structure of a mask pre-alignment device according to an embodiment of the present application; Figure 3 This is a schematic diagram of the internal structure of a mask pre-alignment device according to an embodiment of the present application from another perspective.

[0027] Description of reference numerals: 1. Support frame; 11. Bottom plate; 12. Support layer; 121. a first guide plate; 122. a second guide plate; 13. Support column; 14. Adjustment column; 2. Support plate; 21. Support block; p. Support surface; a, first transmission surface; b, second transmission surface; 31. Transmission rack one; 32. Transmission rack two; 33. Transmission rack three; 34. Transmission rack four; 35. Output terminal; 4. The first limit assembly; 41. Limiting plate 1; 42. Limiting plate 2; 5. The second limit assembly; 51. Limiting plate three; 52. Limiting plate four; 6. baffle; 61. second through hole; 7. Mask; X, first direction; Y, second direction; Z, third direction. DETAILED DESCRIPTION

[0028] The following specific embodiments illustrate the implementation of the present application, and those skilled in the art can easily understand other advantages and effects of the present application from the contents disclosed in this specification. Although the description of the present application will be introduced in conjunction with the preferred embodiment, this does not mean that the features of this application are limited to the implementation. On the contrary, the purpose of introducing the application in conjunction with the implementation is to cover other options or modifications that may be extended based on the claims of the present application. In order to provide a deep understanding of the present application, the following description will include many specific details. The present application can also be implemented without using these details. In addition, in order to avoid confusion or blurring the focus of the present application, some specific details will be omitted in the description. It should be noted that the embodiments in the present application and the features in the embodiments can be combined with each other without conflict.

[0029] It should be noted that in this specification, similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, it does not need to be further defined and explained in the subsequent drawings.

[0030] The technical solution of the present application will be described clearly and completely below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the present application, rather than all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present application.

[0031] In the description of the present application, it should be noted that the terms "center", "up", "down", "left", "right", "vertical", "horizontal", "inside", "outside", etc. indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, which are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present application. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, features defined as "first", "second", etc. may explicitly or implicitly include one or more of the features. In the description created by the present application, unless otherwise specified, "multiple" means two or more.

[0032] In the description of this application, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in this application can be understood according to specific circumstances.

[0033] In order to make the objectives, technical solutions and advantages of the present application clearer, the implementation methods of the present application will be further described in detail below in conjunction with the accompanying drawings.

[0034] See also Figure 1~Figure 3 , Figure 1 is a schematic diagram of a three-dimensional structure of a mask pre-alignment device according to an embodiment of the present application, Figure 2 Schematic diagram of the internal structure of a mask pre-alignment device according to an embodiment of the present application. Figure 3 This is a schematic diagram of the internal structure of a mask pre-alignment device according to an embodiment of the present application from another perspective.

[0035] like Figures 1 to 3 As shown, an embodiment of the present application provides a mask pre-alignment device, comprising: Support frame 1 and support plate 2; The support plate 2 is fixedly arranged on the support frame 1 and has a support surface p for supporting the mask 7; The support frame 1 is provided with a driving assembly, and a first limiting assembly 4 and a second limiting assembly 5 which are transmission-connected with the driving assembly; The first limiting assembly 4 includes a limiting plate 1 41 and a limiting plate 2 42 which are arranged relatively along a first direction X of the support surface p, and the second limiting assembly 5 includes a limiting plate 3 51 and a limiting plate 4 52 which are arranged relatively along a second direction Y of the support surface p, and the first direction X and the second direction Y intersect; The limiting plate 1 41, the limiting plate 2 42, the limiting plate 3 51 and the limiting plate 4 52 are movably arranged relative to the supporting frame 1; The driving assembly drives the first limiting assembly 4 and the second limiting assembly 5 alternately or simultaneously, so that the limiting plate 1 41 and the limiting plate 2 42 move relative to or toward and away from each other in the first direction X, and the limiting plate 3 51 and the limiting plate 4 52 move relative to or toward and away from each other in the second direction Y.

[0036] Among them, by arranging the first limit assembly 4 and the second limit assembly 5 in the intersecting first direction X and second direction Y, it can be ensured that the first limit assembly 4 and the second limit assembly 5 can accurately position the mask 7 on the support surface p. And the same driving assembly is used to alternately or simultaneously drive the first limit assembly 4 and the second limit assembly 5, so that the driving assembly can be greatly simplified, and the complexity of the mask pre-alignment device can be simplified while ensuring the pre-alignment accuracy, and the manufacturing cost of the mask pre-alignment device can be reduced.

[0037] In one embodiment, the first direction X and the second direction Y can be freely set according to the shape of the mask 7 to be pre-aligned and the position of the mask plate to be pre-aligned. For example, when the mask 7 is set as a cuboid, the first direction X and the second direction Y are set perpendicular to each other.

[0038] In one embodiment, the drive assembly includes a drive member, and a first transmission assembly and a second transmission assembly disposed around the drive member; The driving member drives the first limiting assembly 4 and the second limiting assembly 5 through the first transmission assembly and the second transmission assembly; The first transmission component includes a first transmission surface a that cooperates with the driving member for transmission, and the transmission direction of the first transmission surface a is parallel to the first direction X. The second transmission component includes a second transmission surface b that cooperates with the driving member for transmission, and the transmission direction of the second transmission surface b is parallel to the second direction Y. The first transmission surface a and the second transmission surface b are staggered in the third direction Z.

[0039] Thus, it is possible to avoid interference between the first transmission component when transmitting in the first direction X and the second transmission surface b when transmitting in the second direction Y. Furthermore, the first transmission component and the second transmission component can be stacked in the third direction Z, thereby improving the integration of the mask pre-alignment device and reducing the overall volume of the drive component and the mask pre-alignment device.

[0040] In one embodiment, in order to facilitate the support of the mask 7, the support surface p is often set horizontally; in this case, the third direction Z can be set to be perpendicular to the support surface p. This allows the first transmission assembly and the second transmission assembly to be staggered in the height direction, which is conducive to integrating the first transmission assembly and the second transmission assembly between the support surface p and the bottom plate 11.

[0041] In one embodiment, the output end 35 of the driving member is movably arranged in the third direction Z, so that the output end 35 can switch between the first transmission surface a and the second transmission surface b. The driving member is arranged as a motor, and can be directly arranged on the support frame 1 through a lifting device, so that the driving member as a whole can move in the third direction Z, so as to achieve the switching of the output end 35 between the first transmission surface a and the second transmission surface b. In other alternative embodiments, the driving member is arranged as a motor, and can be fixedly arranged on the support frame 1, and the output shaft of the motor is arranged as a telescopic member, and the output end 35 is driven by the telescopic member to be movably arranged in the third direction Z, so as to achieve the switching of the output end 35 between the first transmission surface a and the second transmission surface b.

[0042] The output end 35 switches between the first transmission surface a and the second transmission surface b, so that the first limit assembly 4 and the second limit assembly 5 can be adjusted in sequence, so that the mask on the support surface p is only adjusted in one direction each time, thereby ensuring the accuracy of each adjustment.

[0043] In another embodiment, the output end 35 of the driving member is connected to the first transmission surface a and the second transmission surface b at the same time, and drives the limit plate 1 41, the limit plate 2 42, the limit plate 3 51 and the limit plate 4 52 to move toward or away from the support surface p at the same time. The output end 35 of the driving member can drive the first limit assembly 4 and the second limit assembly 5 at the same time, and complete the pre-alignment of the mask 7 in one time and efficiently, which greatly improves the pre-alignment efficiency of the mask pre-alignment device and simplifies the operation process; and the output end 35 of the driving member does not need to be movable, which further simplifies the structure of the driving member and reduces the cost of the mask pre-alignment device.

[0044] It should be noted that the positioning accuracy of the first positioning component 4 and the second positioning component 5 is related to the material strength of the first positioning component 4 and the second positioning component 5, and the uniformity of the distribution of the force acting on the mask during positioning. Generally, the more positioning surfaces there are, the greater the friction between the mask 7 and the supporting surface p, which easily leads to uneven distribution of the positioning force.

[0045] In one embodiment, the output end 35 of the driving member is configured as a transmission gear; The first transmission assembly includes a transmission rack 1 31 and a transmission rack 2 32 arranged in parallel, and the side of the transmission rack 1 31 and the transmission rack 2 32 provided with transmission teeth is a first transmission surface a; When the first transmission assembly cooperates with the transmission gear, the transmission rack 1 31 and the transmission rack 2 32 are clamped on both sides of the transmission gear relatively; The transmission rack 1 31 and the transmission rack 2 32 are movably arranged on the support frame 1 through the slide rails; The second transmission assembly includes a transmission rack 3 33 and a transmission rack 4 34 arranged in parallel, and the side of the transmission rack 3 33 and the transmission rack 4 34 provided with transmission teeth is a second transmission surface b; When the second transmission assembly cooperates with the transmission gear, the transmission rack 33 and the transmission rack 4 34 are clamped on both sides of the transmission gear relatively; The limiting plate 1 41 , the limiting plate 2 42 , the limiting plate 3 51 and the limiting plate 4 52 are fixedly arranged on the transmission rack 1 31 , the transmission rack 2 32 , the transmission rack 3 33 and the transmission rack 4 34 .

[0046] The output end 35 of the driving member is connected to the first transmission assembly and the second transmission assembly by a rigid transmission method such as a gear transmission, which can ensure the stability and movement accuracy of the first transmission assembly and the second transmission assembly during movement; At the same time, the transmission rack 1 31 and the transmission rack 2 32 are clamped on both sides of the transmission gear, so that when the transmission gear rotates, it can simultaneously drive the transmission rack 1 31 and the transmission rack 2 32 to move symmetrically relative to or toward each other in the first direction X; thereby reducing the motion error between the transmission rack 1 31 and the transmission rack 2 32, thereby improving the limiting accuracy of the limiting plate 1 41 and the limiting plate 2 42. Similarly, the limiting accuracy of the limiting plate 3 51 and the limiting plate 4 52 is also improved; so as to ensure the pre-alignment accuracy of the mask pre-alignment device.

[0047] In one embodiment, the support frame 1 includes a bottom plate 11 disposed opposite to the support plate 2, and a support layer 12 disposed between the bottom plate 11 and the support plate 2; The upper side of the support layer 12 is fixedly connected to the support plate 2 via a plurality of support columns 13; The third direction Z is perpendicular to the support surface p; The support layer 12 is provided with a first through hole penetrating along the third direction Z on the bottom surface of the support plate 2 corresponding to the support plate 2, and the first through hole is used to accommodate the movement of the output end 35 of the driving member; The support layer 12 extends downward in the third direction Z to form a first guide plate 121 , and extends upward to form a second guide plate 122 ; the first transmission assembly is movably disposed on the first guide plate 121 ; the second transmission assembly is movably disposed on the second guide plate 122 .

[0048] Thus, the first transmission assembly and the second transmission assembly are staggered in the third direction Z through the first guide plate 121 and the second guide plate 122 extending up and down the support layer 12, thereby avoiding mutual interference between the first transmission assembly and the second transmission assembly. Furthermore, the first guide plate 121 and the second guide plate 122 can guide and limit the movement of the first transmission assembly and the second transmission assembly, thereby further improving the stability of the movement of the first transmission assembly and the second transmission assembly, thereby ensuring the pre-alignment accuracy of the mask pre-alignment device.

[0049] In one embodiment, the first guide plate 121 is slidably connected to the back side of the transmission rack 1 31 and the back side of the transmission rack 2 32 via a slide rail, and one side of the transmission rack 1 31 and the transmission rack 2 32 abuts against the surface of the support layer 12, so that the support layer 12 and the first guide plate 121 can limit the movement of the transmission rack 1 31 and the transmission rack 2 32 from two planes, thereby ensuring the movement accuracy of the transmission rack 1 31 and the transmission rack 2 32.

[0050] In one embodiment, the support layer 12 is connected to the bottom plate 11 via a plurality of adjustment columns 14, the height of the adjustment columns 14 is adjustable, and the adjustment columns 14 are used to adjust the flatness of the support of the support layer 12. Thus, the flatness of the support of the support layer 12 can be adjusted by adjusting the adjustment columns 14, thereby indirectly adjusting the flatness of the support plate 2 fixed to the support layer 12.

[0051] In one embodiment, the adjustment column 14 can be configured as a flat head screw, so as to adjust the flatness of the support layer 12 in advance.

[0052] In one embodiment, the support frame 1 further comprises a baffle 6 surrounding the support layer 12; The first limiting assembly 4 and the second limiting assembly 5 are located outside the baffle 6, and the baffle 6 is provided with a second through hole 61 for accommodating the movement of the first transmission assembly and the second transmission assembly.

[0053] The baffle 6 can shield the support layer 12 and the driving components disposed in the support layer 12, thereby reducing the impact of external components entering the device on safety and reliability.

[0054] In one embodiment, a plurality of support blocks 21 are disposed on the side of the support plate 2 facing away from the support frame 1, and the upper surface of the support block 21 forms a support surface p. On the one hand, the support by a plurality of support blocks 21 can reduce the area of ​​the support surface p, reduce the friction resistance between the support surface p and the mask 7, and thus facilitate the first limiting assembly 4 and the second limiting assembly 5 to position the mask 7.

[0055] In one embodiment, the limiting plate 1 41 and / or the limiting plate 2 42 are arranged in an L shape, including a first extension portion arranged corresponding to the side edge of the support surface p, and a second extension portion connecting the first extension portion and the first transmission assembly; the first extension portion and the second extension portion are vertically connected. The first extension portion can increase the contact area of ​​the limiting plate 1 41 and / or the limiting plate 2 42 on the side edge of the mask 7, thereby improving the stability of the limiting plate 1 41 and / or the limiting plate 2 42 in calibrating the mask 7, and at the same time can calibrate the placement posture of the mask 7 to ensure the pre-alignment accuracy of the mask pre-alignment device. Among them, the second extension portion can be fixedly connected to the first transmission assembly.

[0056] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present application, rather than to limit it. Although the present application has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present application.

Claims

1. A mask pre-alignment device, characterized in that: include: Support frames and support plates; The support plate is fixedly arranged on the support frame and has a support surface for supporting the mask; The support frame is provided with a driving assembly, and a first limiting assembly and a second limiting assembly transmission-connected to the driving assembly; The first limiting assembly includes a limiting plate 1 and a limiting plate 2 which are arranged opposite to each other along a first direction of the support surface, and the second limiting assembly includes a limiting plate 3 and a limiting plate 4 which are arranged opposite to each other along a second direction of the support surface, and the first direction and the second direction intersect; The first limiting plate, the second limiting plate, the third limiting plate and the fourth limiting plate are movably arranged relative to the supporting frame; The driving assembly drives the first limiting assembly and the second limiting assembly alternately or simultaneously, so that the limiting plate 1 and the limiting plate 2 move relative to or toward each other in the first direction, and the limiting plate 3 and the limiting plate 4 move relative to or toward each other in the second direction; The driving assembly includes a driving member, and a first transmission assembly and a second transmission assembly arranged around the driving member; The driving member drives the first limiting assembly and the second limiting assembly through the first transmission assembly and the second transmission assembly; The first transmission assembly includes a first transmission surface that is in transmission cooperation with the driving member, and a transmission direction of the first transmission surface is parallel to the first direction; the second transmission assembly includes a second transmission surface that is in transmission cooperation with the driving member, and a transmission direction of the second transmission surface is parallel to the second direction, and the first transmission surface and the second transmission surface are staggered in a third direction; The output end of the driving member is movably arranged in the third direction so that the output end switches between the first transmission surface and the second transmission surface; Alternatively, the output end of the driving member is simultaneously connected to the first transmission surface and the second transmission surface, and drives the limit plate one, limit plate two, limit plate three and limit plate four to move toward or away from the support surface at the same time.

2. The mask pre-alignment device according to claim 1, characterized in that: The output end of the driving member is configured as a transmission gear; The first transmission assembly comprises a transmission rack 1 and a transmission rack 2 which are arranged in parallel, and the side of the transmission rack 1 and the transmission rack 2 on which the transmission teeth are arranged is the first transmission surface; When the first transmission assembly cooperates with the transmission gear, the first transmission rack and the second transmission rack are clamped relatively on both sides of the transmission gear; The transmission rack 1 and the transmission rack 2 are movably arranged on the support frame through a slide rail; The second transmission assembly comprises a transmission rack 3 and a transmission rack 4 arranged in parallel, and the side of the transmission rack 3 and the transmission rack 4 provided with transmission teeth is the second transmission surface; When the second transmission assembly cooperates with the transmission gear, the transmission rack three and the transmission rack four are clamped relatively on both sides of the transmission gear; The limit plate 1, limit plate 2, limit plate 3 and limit plate 4 are fixedly arranged on the transmission rack 1, transmission rack 2, transmission rack 3 and transmission rack 4.

3. The mask pre-alignment device according to claim 2, characterized in that: The support frame includes a bottom plate arranged opposite to the support plate, and a support layer arranged between the bottom plate and the support plate; The upper side of the support layer is fixedly connected to the support plate via a plurality of support columns; The third direction is perpendicular to the support surface; The support layer is provided with a first through hole extending in a third direction on a bottom surface of the support plate corresponding to the support plate, and the first through hole is used to accommodate the movement of the output end of the driving member; The support layer extends downward in the third direction to form a first guide plate, and extends upward to form a second guide plate; the first transmission assembly is movably disposed on the first guide plate; the second transmission assembly is movably disposed on the second guide plate.

4. The mask pre-alignment device according to claim 3, characterized in that: The support layer and the bottom plate are connected via a plurality of adjustment columns, the height of the adjustment columns is adjustable, and the adjustment columns are used to adjust the flatness of the support layer.

5. The mask pre-alignment device according to claim 3, characterized in that: The support frame also includes a baffle surrounding the support layer; The first limiting assembly and the second limiting assembly are located outside the baffle, and the baffle is provided with a second through hole for accommodating the movement of the first transmission assembly and the second transmission assembly.

6. The mask pre-alignment device according to claim 1, characterized in that: A plurality of support blocks are arranged on one side of the support plate away from the support frame, and the upper surfaces of the support blocks form the support surface.

7. The mask pre-alignment device according to claim 2, characterized in that: The limiting plate 1 and / or the limiting plate 2 are arranged in an L shape, including a first extension portion arranged corresponding to the side of the supporting surface, and a second extension portion connecting the first extension portion and the first transmission assembly; the first extension portion and the second extension portion are vertically connected.

Images