A high-power linear adjustable power stabilizing circuit with a radio frequency power supply band protection function
By designing the voltage stabilizing circuit and protection circuit of the RF power supply, the problem of unstable power output of the RF power supply is solved, fine adjustment and protection functions are achieved, and the stability and process accuracy of the RF power supply are improved.
Patent Information
- Application Number
- CN202411540290.9
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2024-10-31
- Publication Date
- 2025-10-17
- Estimated Expiration
- 2044-10-31
AI Technical Summary
The power output of RF power supplies is unstable, especially in high-power applications, which leads to complex circuit design and difficulty in achieving precisely controllable drain voltage, affecting plasma concentration and related process accuracy.
A radio frequency power supply circuit is designed, which includes a voltage stabilizing circuit, a sampling circuit, an error amplifier circuit, a voltage difference detection circuit and a voltage difference protection circuit. The drain voltage of the final power amplifier is controlled by a finely adjustable voltage stabilizing circuit, and protection is provided in abnormal situations to prevent circuit damage.
The stability and fine adjustment of the RF power supply output power are achieved, abnormal burning of the voltage stabilization circuit is prevented, and process accuracy and equipment reliability are improved.
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Figure CN119414913B_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The application belongs to the technical field of radio frequency power supply, and particularly relates to a high-power linear adjustable power stabilizing circuit with a protection function for a radio frequency power supply. BACKGROUND
[0002] The radio frequency power supply is a driving source of plasma industrial equipment, and is mainly used for radio frequency sputtering, plasma chemical vapor deposition, and can be used in film coating, plasma cleaning, CO2 laser and the like. The power stability of the radio frequency power supply directly affects the concentration of the plasma, thereby directly affecting the precision of the related process. In particular, in the application in the semiconductor production industry, the related process precision has a high requirement.
[0003] The stability of the power output of the radio frequency power supply can be affected by many factors, and the stability of the drain voltage of the final stage power amplifier tube is one of the most important factors. Only the accurate, controllable and stable drain voltage can ensure the stability of the output power of the radio frequency power supply, and can ensure that the output power of the radio frequency power supply can be finely compensated. Since the power of the final stage power amplifier tube of the radio frequency power supply is very high, the output power can reach several hundred watts or even thousands of watts. Such a high power requirement leads to the complexity of the circuit design. SUMMARY
[0004] The application aims to provide a high-power linear adjustable power stabilizing circuit with a protection function for a radio frequency power supply, and solve the stability problem of the power output of the radio frequency power supply.
[0005] In order to achieve the above-mentioned purpose, the technical scheme of the application is as follows:
[0006] A high-power linear adjustable power stabilizing circuit with a protection function for a radio frequency power supply, comprising: a stabilizing circuit, a sampling circuit, an error amplification circuit, a differential voltage detection circuit and a differential voltage protection circuit.
[0007] The stabilizing circuit comprises an input voltage VDin, a first resistor, a second resistor, a stabilizing diode and a stabilizing PMOS tube. The source of the stabilizing PMOS tube is connected with the input voltage VDin, the gate is connected with one end of the second resistor, and the drain is an output voltage VDout. The first resistor connects the input voltage VDin with the gate of the stabilizing PMOS tube. The positive electrode of the stabilizing diode is connected with the gate of the stabilizing PMOS tube, and the negative electrode is connected with the input voltage VDin.
[0008] The sampling circuit comprises a fourth resistor and a seventh resistor. The output voltage VDout is connected with the ground through the fourth resistor and the seventh resistor.
[0009] The error amplification circuit comprises a reference voltage VRef, a sixth resistor, a first operational amplifier, a fifth resistor and a second NPN transistor; the reference voltage VRef is connected to the non-inverting input terminal of the first operational amplifier, the connection point of the fourth resistor and the seventh resistor is connected to the inverting input terminal of the first operational amplifier through the sixth resistor; the output terminal of the first operational amplifier is connected to the base of the second NPN transistor through the fifth resistor, the collector of the second NPN transistor is connected to the other end of the second resistor, and the emitter of the second NPN transistor is grounded;
[0010] The differential voltage detection circuit is used for detecting the differential voltage between the input voltage VDin and the output voltage VDout.
[0011] The differential voltage protection circuit comprises a protection voltage VPro, a second operational amplifier, a thirteenth resistor, a diode and an eighth resistor; the differential voltage is connected to the non-inverting input terminal of the second operational amplifier, and the protection voltage VPro is connected to the inverting input terminal of the second operational amplifier; the output terminal of the second operational amplifier is grounded through the thirteenth resistor, and the output terminal of the second operational amplifier is also connected to the anode of the diode, and the cathode of the diode is connected to the base of the second NPN transistor through the eighth resistor.
[0012] Further, the voltage stabilizing circuit further comprises a first capacitor, a second capacitor and a polarity capacitor; the drain of the voltage stabilizing PMOS transistor is grounded through the first capacitor, the second capacitor and the polarity capacitor, wherein the anode of the polarity capacitor is connected to the drain of the voltage stabilizing PMOS transistor, and the cathode of the polarity capacitor is grounded.
[0013] Further, the error amplification circuit further comprises a third resistor, a fourth capacitor, a fifth capacitor and a tenth resistor; the non-inverting input terminal of the first operational amplifier is connected to the collector of the second NPN transistor through the fourth capacitor and the third resistor, and the inverting input terminal of the first operational amplifier is connected to the output terminal of the first operational amplifier through the fifth capacitor and the tenth resistor.
[0014] Further, the error amplification circuit further comprises a ninth resistor; the base of the second NPN transistor is grounded through the ninth resistor.
[0015] Further, the differential voltage detection circuit comprises a twelfth resistor, a seventeenth resistor, a third operational amplifier, a nineteenth resistor, a fourth operational amplifier and a twenty-third resistor; the input voltage VDin is connected to the non-inverting input terminal of the fourth operational amplifier through the twelfth resistor; the output voltage VDout is connected to the non-inverting input terminal of the third operational amplifier through the seventeenth resistor, the inverting input terminal of the third operational amplifier is connected to the output terminal of the third operational amplifier, and the output terminal of the third operational amplifier is also connected to the inverting input terminal of the fourth operational amplifier through the nineteenth resistor; the twenty-third resistor is connected to the inverting input terminal of the fourth operational amplifier and the output terminal of the fourth operational amplifier; the output terminal of the fourth operational amplifier is the differential voltage between the input voltage VDin and the output voltage VDout.
[0016] Further, the differential pressure detection circuit further comprises a fourteenth resistor and a twenty-first resistor; the non-inverting input terminal of the fourth operational amplifier is connected to ground through the fourteenth resistor, and the non-inverting input terminal of the third operational amplifier is connected to ground through the twenty-first resistor.
[0017] Further, the generating circuit of the protection voltage VPro comprises a VCC voltage, an eleventh resistor, a fifteenth resistor, a sixteenth resistor, a third NPN triode, an eighteenth resistor, a twentieth resistor and a twenty-second resistor; the VCC voltage is connected to ground through the eleventh resistor and the fifteenth resistor, the connection point of the eleventh resistor and the fifteenth resistor is connected to the collector of the third NPN triode through the sixteenth resistor, and the emitter of the third NPN triode is connected to ground; the input voltage VDin is connected to ground through the eighteenth resistor and the twenty-second resistor, and the connection point of the eighteenth resistor and the twenty-second resistor is connected to the base of the third NPN triode through the twentieth resistor; the connection point of the eleventh resistor and the fifteenth resistor is used to output the protection voltage VPro.
[0018] A radio frequency power supply comprises the large-power linear adjustable power stabilizing circuit with the protection function according to any one of the above.
[0019] Compared with the prior art, the present application has the following advantages and beneficial effects:
[0020] The present application is used for stabilizing the output power of the radio frequency power supply, mainly through the large-power linear fine adjustable voltage stabilizing circuit, the drain voltage of the final stage power amplifier is controlled, fine adjustment compensation of the output power is realized, and the purpose of stabilizing the output power is achieved; at the same time, the input-output differential pressure detection protection function is provided, and the voltage stabilizing circuit can be prevented from being burnt out under abnormal conditions. BRIEF DESCRIPTION OF DRAWINGS
[0021] Figure 1 The large-power linear adjustable power stabilizing circuit block diagram of the present application is shown in the figure;
[0022] Figure 2 The large-power linear adjustable power stabilizing circuit diagram of the present application is shown in the figure. DETAILED DESCRIPTION
[0023] In order to make the purpose, technical scheme and advantages of the present application more clear, the present application is further described in detail below in combination with the drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application, and are not used to limit the present application. In addition, the technical features involved in each embodiment of the present application described below can be combined with each other as long as they do not conflict with each other.
[0024] The large-power linear adjustable power stabilizing circuit with the protection function of the radio frequency power supply of the present application is shown in the figure, Figure 1 and Figure 2The voltage stabilizing circuit, the sampling circuit, the error amplifier circuit, the differential voltage detection circuit and the differential voltage protection circuit are shown.
[0025] The voltage stabilizing circuit comprises an input voltage VDin, a first resistor R1, a second resistor R2, a voltage stabilizing diode D1 and a voltage stabilizing PMOS transistor. The source of the voltage stabilizing PMOS transistor is connected to the input voltage VDin, the gate is connected to one end of the second resistor R2, and the drain is the output voltage VDout. The first resistor R1 connects the input voltage VDin and the gate of the voltage stabilizing PMOS transistor. The positive electrode of the voltage stabilizing diode D1 is connected to the gate of the voltage stabilizing PMOS transistor, and the negative electrode is connected to the input voltage VDin.
[0026] The sampling circuit comprises a fourth resistor R4 and a seventh resistor R7. The output voltage VDout is connected to the ground through the fourth resistor R4 and the seventh resistor R7.
[0027] The error amplifier circuit comprises a reference voltage VRef, a sixth resistor R6, a first operational amplifier, a fifth resistor R5 and a second NPN transistor Q2. The reference voltage VRef is connected to the non-inverting input terminal of the first operational amplifier. The connection point of the fourth resistor R4 and the seventh resistor R7 is connected to the inverting input terminal of the first operational amplifier through the sixth resistor R6. The output terminal of the first operational amplifier is connected to the base of the second NPN transistor Q2 through the fifth resistor R5. The collector of the second NPN transistor Q2 is connected to the other end of the second resistor R2, and the emitter is connected to the ground.
[0028] The differential voltage detection circuit is used for detecting the differential voltage between the input voltage VDin and the output voltage VDout. The differential voltage detection circuit comprises a twelfth resistor R12, a seventeenth resistor R17, a third operational amplifier, a nineteenth resistor R19, a fourth operational amplifier and a twenty-third resistor R23. The input voltage VDin is connected to the non-inverting input terminal of the fourth operational amplifier through the twelfth resistor R12. The output voltage VDout is connected to the non-inverting input terminal of the third operational amplifier through the seventeenth resistor R17. The inverting input terminal of the third operational amplifier is connected to the output terminal of the third operational amplifier. The output terminal of the third operational amplifier is also connected to the inverting input terminal of the fourth operational amplifier through the nineteenth resistor R19. The twenty-third resistor R23 connects the inverting input terminal of the fourth operational amplifier and the output terminal of the fourth operational amplifier. The output terminal of the fourth operational amplifier is the differential voltage between the input voltage VDin and the output voltage VDout. Further, the differential voltage detection circuit further comprises a fourteenth resistor R14 and a twenty-first resistor R21. The non-inverting input terminal of the fourth operational amplifier is connected to the ground through the fourteenth resistor R14, and the non-inverting input terminal of the third operational amplifier is connected to the ground through the twenty-first resistor R21.
[0029] The differential pressure protection circuit comprises a protection voltage VPro, a second operational amplifier, a thirteenth resistor R13, a diode D2 and an eighth resistor R8; the differential pressure is connected to the non-inverting input terminal of the second operational amplifier, and the protection voltage VPro is connected to the inverting input terminal of the second operational amplifier; the output terminal of the second operational amplifier is grounded through the thirteenth resistor R13, and the output terminal of the second operational amplifier is also connected to the anode of the diode D2, and the cathode of the diode D2 is connected to the base of the second NPN transistor Q2 through the eighth resistor R8.
[0030] In the embodiment, the voltage stabilizing circuit further comprises a first capacitor C1, a second capacitor C2 and a polarity capacitor C3; the drain of the voltage stabilizing PMOS transistor is grounded through the first capacitor C1, the second capacitor C2 and the polarity capacitor C3, wherein the anode of the polarity capacitor C3 is connected to the drain of the voltage stabilizing PMOS transistor, and the cathode of the polarity capacitor C3 is grounded, for power filtering.
[0031] In the embodiment, the voltage stabilizing PMOS transistor comprises a PMOS transistor Q1 and a bidirectional breakdown diode; the bidirectional breakdown diode is connected to the source and the gate of the PMOS transistor Q1.
[0032] In the embodiment, the error amplification circuit further comprises a third resistor R3, a fourth capacitor C4, a fifth capacitor C5 and a tenth resistor R10; the non-inverting input terminal of the first operational amplifier is connected to the collector of the second NPN transistor Q2 through the fourth capacitor C4 and the third resistor R3, and the inverting input terminal of the first operational amplifier is connected to the output terminal of the first operational amplifier through the fifth capacitor C5 and the tenth resistor R10, for loop filtering. Further, the error amplification circuit further comprises a ninth resistor R9; the base of the second NPN transistor Q2 is grounded through the ninth resistor R9.
[0033] In the embodiment, the generation circuit of the protection voltage VPro comprises a VCC voltage, an eleventh resistor R11, a fifteenth resistor R15, a sixteenth resistor R16, a third NPN transistor Q3, an eighteenth resistor R18, a twentieth resistor R20 and a twenty-second resistor R22; the VCC voltage is grounded through the eleventh resistor R11 and the fifteenth resistor R15, the connection point of the eleventh resistor R11 and the fifteenth resistor R15 is connected to the collector of the third NPN transistor Q3 through the sixteenth resistor R16, and the emitter of the third NPN transistor Q3 is grounded; the input voltage VDin is grounded through the eighteenth resistor R18 and the twenty-second resistor R22, and the connection point of the eighteenth resistor R18 and the twenty-second resistor R22 is connected to the base of the third NPN transistor Q3 through the twentieth resistor R20; the connection point of the eleventh resistor R11 and the fifteenth resistor R15 leads out the protection voltage VPro.
[0034] As Figure 1VDin is the input voltage of the stabilizing circuit, which can be supplied by a general high-power AC / DC adjustable DC switching power supply. The high-power adjustable DC switching power supply generally has a large voltage adjustment step, and the output voltage fluctuates by a large VPP and has switching harmonics. After passing through the "voltage stabilizing circuit", VDin can output stable VDout to supply the drain of the final stage power amplifier of the radio frequency power supply.
[0035] As shown in Figure 1 VDout is sampled by high-precision and low-temperature-drift resistance division, and then error amplification is performed with reference voltage VRef, and then feedback is performed to the "voltage stabilizing circuit" to realize the function of stable output voltage. The division sampling coefficient determines the multiple relationship between VDout and VRef. VRef uses high-precision DAC plus operational amplifier buffer output, and through fine adjustable VRef voltage, fine adjustment of VDout can be realized.
[0036] As shown in Figure 1 As shown in
[0037] As shown in Figure 1 VDin and VDout are detected by the "voltage difference detection" circuit, and if it is found that VDin-VDout exceeds the safe range, the protection circuit is started to prevent the "voltage stabilizing circuit" from being abnormally burned.
[0038] As shown in Figure 1 As shown in
[0039] The following takes a 1000W radio frequency power supply as an example to further illustrate the present application:
[0040] As shown in Figure 2As shown, VDin is the input voltage for the stabilization circuit, powered by a Mean Well RSP-2000-48 2000W adjustable DC switching power supply. The RSP-2000-48 has a voltage adjustment step of 0.3V, which does not allow for fine voltage regulation. The RSP-2000-48's output voltage ripple reaches 0.3VPP. Based on a drain current of 40A, 40A * 0.3V = 12W. This means that a voltage fluctuation of 0.3VPP can result in an output power fluctuation of ten watts. After passing through the high-power PMOS voltage regulator circuit Q1, VDin outputs a stable VDout, which powers the drain of the final amplifier stage of the RF power supply.
[0041] like Figure 2 As shown, VDout is sampled using the high-precision resistor divider R4 and R7, with R4 / R7 = 20. R4 and R7 use 0.1% precision resistors with a temperature drift of 25ppm. VRef uses a 16-bit high-precision DAC, buffered by an op amp, to output a voltage between [0V and 3V]. VRef has an adjustable step of 0.0458mV. Using the voltage divider sampling coefficient R4 and R7, we obtain VDout = 21 * VRef, resulting in a VDout output range of [0V, 63V] with an adjustable step of 0.961mV. This fine adjustment step of VDout allows for fine-tuning and compensation of the final amplifier's output power.
[0042] like Figure 2 As shown in the figure, due to the extremely high drain current in the final stage of the power amplifier, when outputting 1000W, the maximum drain current can reach 30A. At this point, the voltage difference between VDin and VDout determines the heat dissipation of the linear "voltage regulator circuit." If the voltage difference between VDin and VDout is 1V, the heat dissipation of the voltage regulator PMOS transistor Q1 will reach 30W. The larger the voltage difference, the greater the heat dissipation. Therefore, coarse adjustment of the VDin voltage is required to keep the voltage difference between VDin and VDout within the allowable voltage difference and heat dissipation range of the "voltage regulator circuit."
[0043] like Figure 2 As shown, the voltage difference between VDin and VDout is detected by the "voltage differential detection" circuit. Depending on the operational characteristics of the op amp, the resistance values of R12, R14, R17, R21, R19, and R23 can be adjusted to achieve a voltage output of VDin – VDout. VPro is generated by precision resistor divider voltage across VCC. VPro is also controlled by VDin: a higher VDin voltage results in a lower VPro voltage. The protection voltage VPro can be adjusted to a range of [1V, 3.3V] by adjusting the resistance values of R11, R15, R16, R18, R22, and R20. If the VDin - VDout ratio exceeds the safe range VPro, the protection circuit is activated to prevent the voltage regulator from burning out.
[0044] like Figure 2 As shown in the figure, when VDin-VDout>VPro, the protection circuit starts, and controls Q1 through D2 and Q2, so that the voltage difference is stable at VPro, that is, VDin-VDout=VPro, thereby preventing the PMOS "voltage regulator circuit" Q1 from burning abnormally. <VPro时,保护电路能够自动恢复到正常工作模式,此时VDout=21*Vref。功放正常运行中,压差保护电路不会起作用,该功能一般用于功放启动或者关闭等瞬间,导致压差异常的情况。
[0045] The present invention also provides a radio frequency power supply, which includes the radio frequency power supply high-power linear adjustable power stabilization circuit with protection function described in any one of the above.
[0046] It should be pointed out that, according to the needs of implementation, the various steps / components described in this application can be split into more steps / components, or two or more steps / components or partial operations of steps / components can be combined into new steps / components to achieve the purpose of the present invention.
[0047] It will be easily understood by those skilled in the art that the above are merely preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.
Claims
1. A high-power linear adjustable power stabilization circuit with protection function for radio frequency power supply, characterized in that: include: Voltage stabilizing circuit, sampling circuit, error amplifying circuit, voltage difference detecting circuit and voltage difference protection circuit; The voltage stabilizing circuit includes an input voltage VDin, a first resistor, a second resistor, a voltage stabilizing diode, and a voltage stabilizing PMOS transistor; the source of the voltage stabilizing PMOS transistor is connected to the input voltage VDin, the gate is connected to one end of the second resistor, and the drain is the output voltage VDout; the first resistor connects the input voltage VDin and the gate of the voltage stabilizing PMOS transistor; the positive electrode of the voltage stabilizing diode is connected to the gate of the voltage stabilizing PMOS transistor, and the negative electrode is connected to the input voltage VDin; The sampling circuit includes a fourth resistor and a seventh resistor; the output voltage VDout is grounded through the fourth resistor and the seventh resistor; The error amplifier circuit includes a reference voltage VRef, a sixth resistor, a first operational amplifier, a fifth resistor, and a second NPN transistor; the reference voltage VRef is connected to the non-inverting input terminal of the first operational amplifier, and the connection point between the fourth resistor and the seventh resistor is connected to the inverting input terminal of the first operational amplifier via the sixth resistor; the output terminal of the first operational amplifier is connected to the base of the second NPN transistor via the fifth resistor, the collector of the second NPN transistor is connected to the other end of the second resistor, and the emitter of the second NPN transistor is grounded; A voltage difference detection circuit is used to detect the voltage difference between the input voltage VDin and the output voltage VDout; The voltage difference protection circuit includes a protection voltage VPro, a second operational amplifier, a thirteenth resistor, a diode and an eighth resistor; the voltage difference is connected to the non-inverting input terminal of the second operational amplifier, and the protection voltage VPro is connected to the inverting input terminal of the second operational amplifier; the output terminal of the second operational amplifier is grounded through the thirteenth resistor, and the output terminal of the second operational amplifier is also connected to the positive electrode of the diode, and the negative electrode of the diode is connected to the base of the second NPN transistor through the eighth resistor.
2. The high-power linear adjustable power stabilization circuit with protection function of radio frequency power supply according to claim 1 is characterized in that: The voltage stabilizing circuit also includes a first capacitor, a second capacitor and a polarity capacitor; the drain of the voltage stabilizing PMOS tube is grounded through the first capacitor, the second capacitor and the polarity capacitor, wherein the positive electrode of the polarity capacitor is connected to the drain of the voltage stabilizing PMOS tube, and the negative electrode of the polarity capacitor is grounded.
3. The high-power linear adjustable power stabilization circuit with protection function of radio frequency power supply according to claim 1, characterized in that: The error amplifier circuit also includes a third resistor, a fourth capacitor, a fifth capacitor and a tenth resistor; the non-inverting input terminal of the first operational amplifier is connected to the collector of the second NPN transistor through the fourth capacitor and the third resistor, and the inverting input terminal of the first operational amplifier is connected to the output terminal of the first operational amplifier through the fifth capacitor and the tenth resistor.
4. The high-power linear adjustable power stabilization circuit with protection function of radio frequency power supply according to claim 1, characterized in that: The error amplifying circuit further includes a ninth resistor; the base of the second NPN transistor is grounded via the ninth resistor.
5. The high-power linear adjustable power stabilization circuit with protection function of radio frequency power supply according to claim 1, characterized in that: The voltage difference detection circuit includes a twelfth resistor, a seventeenth resistor, a third op amp, a nineteenth resistor, a fourth op amp and a twenty-third resistor; the input voltage VDin is connected to the non-inverting input terminal of the fourth op amp through the twelfth resistor; the output voltage VDout is connected to the non-inverting input terminal of the third op amp through the seventeenth resistor, the inverting input terminal of the third op amp is connected to the output terminal of the third op amp, and the output terminal of the third op amp is also connected to the inverting input terminal of the fourth op amp through the nineteenth resistor; the twenty-third resistor is connected to the inverting input terminal of the fourth op amp and the output terminal of the fourth op amp; the output terminal of the fourth op amp is the voltage difference between the input voltage VDin and the output voltage VDout.
6. The high-power linear adjustable power stabilization circuit with protection function of radio frequency power supply according to claim 5, characterized in that: The voltage difference detection circuit further includes a fourteenth resistor and a twenty-first resistor; the non-inverting input terminal of the fourth operational amplifier is grounded through the fourteenth resistor, and the non-inverting input terminal of the third operational amplifier is grounded through the twenty-first resistor.
7. The high-power linear adjustable power stabilization circuit with protection function of radio frequency power supply according to claim 1, characterized in that: The circuit for generating the protection voltage VPro includes a VCC voltage, an eleventh resistor, a fifteenth resistor, a sixteenth resistor, a third NPN transistor, an eighteenth resistor, a twentieth resistor, and a twenty-second resistor; the VCC voltage is grounded through the eleventh resistor and the fifteenth resistor, the connection point between the eleventh resistor and the fifteenth resistor is connected to the collector of the third NPN transistor through the sixteenth resistor, and the emitter of the third NPN transistor is grounded; the input voltage VDin is grounded through the eighteenth resistor and the twenty-second resistor, the connection point between the eighteenth resistor and the twenty-second resistor is connected to the base of the third NPN transistor through the twentieth resistor; the protection voltage VPro is drawn out from the connection point between the eleventh resistor and the fifteenth resistor.
8. A radio frequency power supply, characterized in that: The radio frequency power supply comprises the radio frequency power supply high-power linear adjustable power stabilization circuit with protection function as claimed in any one of claims 1 to 7.
Citation Information
Patent Citations
MOS tube power consumption self-locking protection circuit
CN215897700U
Stabilized power circuit
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