A rotating cache mechanism

Abstract

The present invention relates to a rotary cache mechanism, comprising a horizontal frame, a lifting electric cylinder disposed on the lower side of the horizontal frame, a movable end of the lifting electric cylinder connected to a sliding table, a rotating mechanism disposed on the sliding table, a cache box disposed on the rotating mechanism, and a correction component and a baffle component disposed on the cache box. A servo motor drives bevel gear 1 to rotate, which in turn drives bevel gear 2 to rotate. Bevel gear 2 rotates via a drive shaft, a rotating table, and a turntable. The turntable rotates the cache mechanism filled with silicon wafers 90 degrees via a support plate, thereby converting the silicon wafers from a horizontal state to a vertical state. The vertical silicon wafers are easier to grasp, significantly reducing the fragmentation rate during the wafer retrieval process by a robot arm, greatly improving silicon wafer production efficiency, and having a simple structure, reducing costs, and facilitating subsequent manual operations.

Description

Technical Field

[0001] The invention belongs to the field of rotary cache mechanisms, in particular to a rotary cache mechanism. Background Art

[0002] Existing silicon wafer buffering mechanisms consist of a hoist and a buffering mechanism. Silicon wafers are transported by a conveyor to the buffering mechanism and flow into it. With each wafer deposited, an electric cylinder is raised a certain distance until the buffering mechanism is full. Because both the electric cylinder and the buffering mechanism remain vertically positioned, awaiting wafer retrieval by a robotic arm, wafer retrieval efficiency is low, significantly impacting production efficiency. Therefore, a rotating buffering mechanism has been proposed. Summary of the Invention

[0003] The purpose of this section is to summarize some aspects of the embodiments of the present invention and briefly introduce some preferred embodiments. Some simplifications or omissions may be made in this section and the abstract and title of this application to avoid obscuring the purpose of this section, the abstract and the title of the invention, and such simplifications or omissions should not be used to limit the scope of the present invention.

[0004] In view of the following technical problems in the prior art: since the electric cylinder and the cache mechanism always remain in a vertical state waiting for the robot to take the film, the film taking efficiency is low, which greatly affects the production efficiency.

[0005] To solve the above technical problems, the present invention provides the following technical solutions: a rotary buffer mechanism comprising a horizontal frame, a lifting electric cylinder being provided on the lower side of the horizontal frame, a sliding platform being connected to the movable end of the lifting electric cylinder, a rotating mechanism being provided on the sliding platform, a buffer box being provided on the rotating mechanism, and a correction component and a blocking piece component being provided on the buffer box;

[0006] Two groups of support members are provided on two opposite vertical surfaces inside the cache box. Each group of support members is composed of a plurality of support rods made of ceramic. The support rods of each group are arranged in a single row and are parallel to each other.

[0007] The correction component includes a cylinder 1, a movable frame 1 and a correction tooth plate. The cache box is provided with a cylinder 1, and the movable end of the cylinder 1 is provided with a movable frame 1. Two correction tooth plates are provided on the movable frame 1. The teeth on the correction tooth plates are perpendicular to the central axis of the support rod, and the teeth of the correction tooth plates extend into the inner side of the cache box.

[0008] As a preferred technical solution of the rotary cache mechanism, the cache box is provided with ribs, which are distributed on the outside of the cache box and correspond to the support rods;

[0009] The ribs increase the structural strength of the cache box.

[0010] As a preferred technical solution of the rotary cache mechanism, the baffle component includes a second movable frame, a second cylinder, and a baffle. The second cylinder is provided in the middle of the cache box, the second movable frame is provided at the movable end of the second cylinder, and the baffle is provided in the middle of the second movable frame, and the baffle extends into the inner side of the cache box.

[0011] The baffle can divide the inner cavity of the cache box into two parts.

[0012] As a preferred technical solution of a rotating cache mechanism, the rotating mechanism includes a rotating platform, a turntable and a support plate. The inner side of the sliding platform is rotatably connected to the rotating platform. One end of the rotating platform extends out of the sliding platform and is connected to the turntable. Two support plates are provided on the turntable, and the support plates are both fixedly connected to the cache box.

[0013] The servo motor drives bevel gear 1 to rotate, bevel gear 1 drives bevel gear 2 to rotate, bevel gear 2 rotates the rotating table, turntable and support plate through the drive shaft, and the support plate rotates the cache box, thereby rotating the cache box to a certain angle.

[0014] As a preferred technical solution of a rotary cache mechanism, the rotary mechanism further comprises a servo motor, a frame, a bevel gear 1, a bevel gear 2 and a drive shaft. The frame is provided on the side of the sliding table away from the support plate, the drive shaft is provided on the rotary table, the drive shaft extends into the inner side of the frame, the drive shaft is provided with a bevel gear 2, the servo motor is provided on the end of the frame away from the sliding table, the power output end of the servo motor is provided with a bevel gear 1, the bevel gear 1 is rotatably connected to the inner side of the frame, and the bevel gear 1 and the bevel gear 2 are meshed;

[0015] The servo motor drives the bevel gear 1 to rotate, the bevel gear 1 drives the bevel gear 2 to rotate, and the bevel gear 2 drives the rotary table, the turntable and the support plate to rotate through the driving shaft.

[0016] The beneficial effects of a rotary caching mechanism of the present invention are as follows: a servo motor drives bevel gear one to rotate, which in turn drives bevel gear two to rotate, and bevel gear two rotates through a drive shaft, a rotating table and a turntable. The turntable rotates the cache mechanism full of silicon wafers 90 degrees through a support plate, which allows the silicon wafer to be converted from a horizontal state to a vertical state. The silicon wafer in the vertical state is easier to clamp, which greatly reduces the fragmentation rate during the robot's wafer picking process, greatly improves the silicon wafer production efficiency, has a simple structure, reduces costs, and facilitates subsequent manual operations. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following briefly introduces the drawings required for describing the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. Those skilled in the art can also derive other drawings based on these drawings without inventive effort. Among them:

[0018] Figure 1 It is a schematic diagram of the three-dimensional structure of the present invention;

[0019] Figure 2 It is a front structural schematic diagram of the present invention;

[0020] Figure 3 It is a structural schematic diagram of the rotating mechanism of the present invention;

[0021] Figure 4 For the present invention Figure 1 A schematic diagram of the partially enlarged structure of part B;

[0022] Figure 5 For the present invention Figure 2 Schematic diagram of the locally enlarged structure of part A.

[0023] Figure numerals: horizontal frame 1, lifting electric cylinder 2, support plate 3, cache box 4, sliding table 5, cylinder one 6, movable frame one 7, movable frame two 8, cylinder two 9, baffle 10, support rod 11, correction gear plate 12, rib 13, servo motor 14, frame 15, bevel gear one 16, bevel gear two 17, drive shaft 18, rotating table 19, turntable 20. DETAILED DESCRIPTION

[0024] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the specific embodiments of the present invention are described in detail below with reference to the accompanying drawings.

[0025] In the following description, many specific details are set forth to facilitate a full understanding of the present invention. However, the present invention may also be implemented in other ways different from those described herein. Those skilled in the art may make similar generalizations without violating the connotation of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed below.

[0026] Secondly, the term "one embodiment" or "embodiment" herein refers to a specific feature, structure, or characteristic that may be included in at least one implementation of the present invention. The phrase "in one embodiment" appearing in various places throughout this specification does not necessarily refer to the same embodiment, nor does it refer to a separate or selective embodiment that is mutually exclusive of other embodiments.

[0027] Furthermore, the present invention is described in detail with reference to schematic diagrams. For ease of illustration, when describing the embodiments of the present invention, cross-sectional views illustrating device structures may be partially enlarged and not to scale. Furthermore, the schematic diagrams are merely illustrative and should not limit the scope of protection of the present invention. Furthermore, in actual production, the three-dimensional dimensions of length, width, and depth should be included.

[0028] like Figure 1-5 As shown, the present invention proposes a rotary cache mechanism, comprising a horizontal frame 1, a lifting electric cylinder 2 is provided on the lower side of the horizontal frame 1, a movable end of the lifting electric cylinder 2 is connected to a sliding table 5, a rotating mechanism is provided on the sliding table 5, a cache box 4 is provided on the rotating mechanism, and a correction component and a baffle component are provided on the cache box 4;

[0029] Two sets of support members are provided on two opposite vertical surfaces inside the buffer box 4. Each set of support members is composed of a plurality of support rods 11. The material of the support rods 11 is ceramic. The support rods 11 of each set are arranged in a single row and are parallel to each other.

[0030] The correction component includes a cylinder 6, a movable frame 7 and a correction tooth plate 12. The cache box 4 is provided with a cylinder 6, and the movable end of the cylinder 6 is provided with a movable frame 7. Two correction tooth plates 12 are provided on the movable frame 7. The teeth on the correction tooth plate 12 are perpendicular to the central axis of the support rod 11, and the teeth of the correction tooth plate 12 extend into the inner side of the cache box 4.

[0031] The cache box 4 is provided with ribs 13, which are distributed on the outside of the cache box 4 and correspond to the support rods 11;

[0032] The ribs 13 can enhance the structural strength of the cache box 4 .

[0033] The baffle component includes a movable frame 2 8, a cylinder 2 9 and a baffle 10. The cylinder 2 9 is provided in the middle of the cache box 4. The movable end of the cylinder 2 9 is provided with a movable frame 2 8. The baffle 10 is provided in the middle of the movable frame 2 8. The baffle 10 extends into the inner side of the cache box 4.

[0034] The baffle 10 can divide the inner cavity of the cache box 4 into two parts.

[0035] The rotating mechanism includes a rotating platform 19, a turntable 20 and a support plate 3. The inner side of the sliding platform 5 is rotatably connected to the rotating platform 19. One end of the rotating platform 19 extends out of the sliding platform 5 and is connected to the turntable 20. Two support plates 3 are provided on the turntable 20. The support plates 3 are both fixedly connected to the buffer box 4.

[0036] The servo motor 14 drives the bevel gear 16 to rotate, the bevel gear 16 drives the bevel gear 2 17 to rotate, the bevel gear 2 17 rotates with the rotating table 19, the turntable 20 and the support plate 3 through the drive shaft 18, and the support plate 3 rotates with the cache box 4, thereby rotating the cache box 4 to a certain angle.

[0037] The rotating mechanism also includes a servo motor 14, a frame 15, a bevel gear 16, a bevel gear 2 17 and a drive shaft 18. The frame 15 is provided on the side of the sliding table 5 away from the support plate 3. The drive shaft 18 is provided on the rotating table 19. The drive shaft 18 extends into the inner side of the frame 15. The drive shaft 18 is provided with a bevel gear 2 17. The servo motor 14 is provided at the end of the frame 15 away from the sliding table 5. The power output end of the servo motor 14 is provided with a bevel gear 16. The bevel gear 16 is rotatably connected to the inner side of the frame 15, and the bevel gear 16 is meshed with the bevel gear 2 17.

[0038] The servo motor 14 drives the bevel gear 1 16 to rotate, the bevel gear 1 16 drives the bevel gear 2 17 to rotate, and the bevel gear 2 17 drives the rotating platform 19, the turntable 20 and the support plate 3 to rotate through the driving shaft 18.

[0039] The specific implementation method is as follows: loading action: silicon wafers are transported from the conveyor to the buffer station, and the buffer box 4 is lifted upward by a pitch distance through the lifting electric cylinder 2. Every time the silicon wafers are loaded into the inner side of the buffer box 4, the buffer box 4 is lifted upward by a pitch distance again to achieve the silicon wafer stacking and caching effect. When the silicon wafers on the buffer mechanism are full, the buffer mechanism rotates 90 degrees so that the silicon wafers fall onto the correction mechanism. The correction mechanism pushes the silicon wafers to prepare for the robot to pick up the silicon wafers. Among them: the distance of one pitch is the distance between two adjacent support rods 11;

[0040] The servo motor 14 drives the bevel gear 16 to rotate, and the bevel gear 16 drives the bevel gear 2 17 to rotate. The bevel gear 2 17 rotates through the drive shaft 18, the rotating table 19 and the turntable 20. The turntable 20 rotates the cache mechanism full of silicon wafers 90 degrees through the support plate 3, which allows the silicon wafer to be converted from a horizontal state to a vertical state. The silicon wafer in the vertical state is easier to clamp, which greatly reduces the fragmentation rate during the robot's wafer removal process, greatly improves the silicon wafer production efficiency, has a simple structure, reduces costs, and facilitates subsequent manual operations.

[0041] It will be appreciated that in the development of any actual embodiment, as in any engineering or design project, numerous implementation-specific decisions may be made. Such a development effort may be complex and time-consuming, but will, for those of ordinary skill having the benefit of this disclosure, be a routine undertaking of design, fabrication, and production without undue experimentation.

[0042] It should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention and are not intended to limit the present invention. Although the present invention has been described in detail with reference to the preferred embodiments, those skilled in the art should understand that the technical solutions of the present invention may be modified or replaced by equivalents without departing from the spirit and scope of the technical solutions of the present invention, which should all be included in the scope of the claims of the present invention.

Claims

1. A rotary cache mechanism, characterized in that: The invention comprises a horizontal frame (1), a lifting electric cylinder (2) is provided on the lower side of the horizontal frame (1), a movable end of the lifting electric cylinder (2) is connected to a sliding table (5), a rotating mechanism is provided on the sliding table (5), a buffer box (4) is provided on the rotating mechanism, and a correction component and a baffle component are provided on the buffer box (4); Two groups of support members are provided on two opposite vertical surfaces inside the cache box (4), and each group of support members is composed of a plurality of support rods (11). The support rods (11) of each group are arranged in a single row, and the support rods (11) are parallel to each other. The correction component includes a cylinder (6), a cylinder (6) is provided on the cache box (4), a movable frame (7) is provided at the movable end of the cylinder (6), and two correction tooth plates (12) are provided on the movable frame (7), the teeth on the correction tooth plates (12) are perpendicular to the central axis of the support rod (11), and the teeth of the correction tooth plates (12) extend into the inner side of the cache box (4); The cache box (4) is provided with ribs (13), the ribs (13) are distributed on the outside of the cache box (4), and the ribs (13) correspond to the support rods (11); The baffle component includes a movable frame 2 (8), a cylinder 2 (9) and a baffle (10), the middle of the cache box (4) is provided with a cylinder 2 (9), the movable end of the cylinder 2 (9) is provided with a movable frame 2 (8), the middle of the movable frame 2 (8) is provided with a baffle (10), and the baffle (10) extends into the inner side of the cache box (4); The rotating mechanism comprises a rotating platform (19), a rotating disk (20) and a supporting plate (3); the inner side of the sliding platform (5) is rotatably connected to the rotating platform (19); one end of the rotating platform (19) extends out of the sliding platform (5) and is connected to the rotating disk (20); two supporting plates (3) are provided on the rotating disk (20); and the supporting plates (3) are both fixedly connected to the cache box (4); The rotating mechanism further comprises a servo motor (14), a frame (15), a bevel gear 1 (16), a bevel gear 2 (17) and a drive shaft (18). The frame (15) is provided on the side of the sliding table (5) away from the support plate (3). The drive shaft (18) is provided on the rotating table (19). The drive shaft (18) extends into the inner side of the frame (15). The drive shaft (18) is provided with a bevel gear 2 (17). The servo motor (14) is provided on the end of the frame (15) away from the sliding table (5). The power output end of the servo motor (14) is provided with a bevel gear 1 (16). The bevel gear 1 (16) is rotatably connected to the inner side of the frame (15). The bevel gear 1 (16) and the bevel gear 2 (17) are meshed.

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