Low-elasticity-modulus amorphous elastomer material for pressure sensor and sensor

Abstract

The invention discloses a low-elasticity-modulus amorphous elastomer material for a pressure sensor and the pressure sensor, and relates to the technical field of amorphous materials. The amorphous material comprises, by weight, 40%-55% of Zr, 12%-17% of Cu, 10%-16% of Ni, 4%-9% of Ti, 6%-15% of Al and 3%-5% of Pd, and the elastic modulus of the amorphous material is 82 GPa. The elastic body of the pressure sensor is made of an amorphous material, the elastic modulus of the elastic body is only 40% of that of conventional elastic steel, and the sensitivity is improved by more than 2.2 times. Besides, the elastic steel has high mechanical strength which is more than two times that of conventional elastic steel, so that the size can be reduced by 50%, the weight is reduced, and the processing difficulty is reduced when a torque product with the same measuring range is manufactured.

Description

Technical Field

[0001] The invention belongs to the technical field of amorphous materials, and in particular relates to an amorphous material with a low elastic modulus used for a pressure sensor and a pressure sensor. Background Art

[0002] Pressure sensor is a widely used pressure signal detection sensor. At present, steel-based thin film pressure sensor is the "pearl" among pressure sensors. It has the advantages of high precision, good stability, and wide operating temperature range. The elastomer of steel-based thin film pressure sensor is a metal material, such as 17-4PH, 630S, SUS316, etc. The elastomer made of these metal materials has a large elastic modulus, small elastic strain, and low sensitivity, which is not conducive to application in petrochemical, aerospace and other equipment. Summary of the invention

[0003] The object of the present invention is to provide a low elastic modulus amorphous elastomer material for a pressure sensor to solve the problems and defects mentioned in the above background technology.

[0004] The invention also provides a forging process for the amorphous alloy material.

[0005] The invention also provides a pressure sensor.

[0006] A first aspect of the present invention provides a low elastic modulus amorphous elastomer material for a pressure sensor, the preparation raw materials including an amorphous alloy;

[0007] The amorphous alloy includes at least one of ZrCuNiTiAlPd and ZrCuNiTiBeMo;

[0008] The ZrCuNiTiAlPd includes the following elements in mass fraction:

[0009] Zr 40%-55%, Cu 12%-17%, Ni 10%-16%, Ti 4%-9%, Al 6%-15% and Pd 3%-5%, its elastic modulus is 82GPa;

[0010] The ZrCuNiTiBeMo includes the following elements in mass fractions:

[0011] Zr 39%-58%, Cu 15%-25%, Ni 6%-15%, Ti 9%-15%, Be 15%-21% and Mo5%-8%, and its elastic modulus is 90GPa.

[0012] According to one technical solution of the amorphous elastomer material technical solution of the present invention, at least the following beneficial effects are achieved:

[0013] The present invention adopts an amorphous elastic material to manufacture the pressure sensor, whose elastic modulus is only 40% of that of conventional elastic steel, and the sensitivity will be increased by more than 2 times. In addition, it has high mechanical strength, which is more than 2 times that of conventional elastic steel, so when manufacturing the pressure sensor products with the same range, the volume and weight can be reduced by 50%.

[0014] According to some embodiments of the present invention, the ZrCuNiTiAlPd amorphous alloy has a microhardness of HV558, a compressive fracture strength of 1.79 GPa, an elasticity of 1.7%, and a plasticity of 0.5%.

[0015] According to some embodiments of the present invention, the ZrCuNiTiBeMo amorphous alloy has a yield strength of 1.56 GPa and a fracture strength of 1.75 GPa.

[0016] The second aspect of the present invention discloses a forging process of the amorphous alloy material, characterized in that the annealing treatment temperature of the forging process is 950°C to 1200°C.

[0017] A third aspect of the present invention discloses a pressure sensor, characterized in that it includes a pressure nozzle, an elastic core, a transfer plate, a shell, and a wire, wherein the elastic core is made of a low elastic modulus amorphous elastomer material.

[0018] According to some embodiments of the present invention, a pressure-sensitive thin-film strain resistor Whitstone bridge is prepared on the surface of the elastic core. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] In order to facilitate understanding by those skilled in the art, the present invention is further described below with reference to the accompanying drawings.

[0020] Figure 1 Schematic diagram of the pressure sensor structure. DETAILED DESCRIPTION

[0021] The following will be combined with the embodiments to clearly and completely describe the concept of the present invention and the technical effects produced, so as to fully understand the purpose, characteristics and effects of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, other embodiments obtained by those skilled in the art without creative work are all within the scope of protection of the present invention.

[0022] In the description of the present invention, the description with reference to the terms "one embodiment", "some embodiments", "illustrative embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner.

[0023] If the specific conditions are not specified in the examples, the experiments were carried out under conventional conditions or conditions recommended by the manufacturer. If the manufacturers of the reagents or instruments are not specified, they are all conventional products that can be purchased commercially.

[0024] Example 1

[0025] This embodiment is an amorphous material ZrCuNiTiAlPd for a pressure sensor, which is composed of the following elements by weight fraction:

[0026] Zr 40%-55%, Cu 12%-17%, Ni 10%-16%, Ti 4%-9%, Al 6%-15% and Pd 3%-5%, its elastic modulus is 82GPa;

[0027] The pressure sensor in this embodiment, such as Figure 1 As shown, it includes a pressure nozzle 1, an elastic core 2, a switching plate 3, a shell 4, and a conductor 5.

[0028] The pressure induction nozzle 1 is made of stainless steel, with a pressure induction through hole in the center. The elastic core 2 is made of amorphous material with low elastic modulus, and is a cup-shaped elastic body with an opening downward. After grinding and polishing, the upper surface is respectively prepared with an insulating film, a sensitive film, a pad film, and a protective film using a vacuum atomic film deposition device to form a thin film strain resistor Huishitong bridge for sensing pressure.

[0029] The elastic core 2 is laser welded at the upper end interface of the pressure nozzle 1. An adapter board 3 is arranged above the elastic core 2. The adapter board 3 is a high-temperature circuit board. The signal on the elastic core 2 is connected to the adapter board 3 through a high-temperature metal wire, and the signal on the adapter board 3 is led out through a high-temperature wire 5. The lower part of the shell 5 is sleeved on the upper end step of the pressure nozzle 1 and is sealed and welded by laser.

[0030] In the implementation mode of the present invention, the conventional pressure sensor elastomer material is changed from 17-4PH, S630, etc. to a non-gold alloy elastomer. The elastic modulus of the amorphous alloy elastomer is 82GPa, while the elastic modulus of the conventional 17-4PH elastomer is 195GPa. The sensitivity of the sensor is improved by more than 2 times. The amorphous alloy elastomer has high strength, and the volume and weight of the sensor product are reduced.

[0031] Example 2

[0032] This embodiment is an amorphous elastomer material ZrCuNiTiBeMo for a pressure sensor, which is composed of the following elements by weight:

[0033] Zr 39% to 58%, Cu 15% to 25%, Ni 6% to 15%, Ti 9% to 15%, Be 15% to 21% and Mo5% ​​to 8%, with an elastic modulus of 90 GPa. The sensitivity of the pressure sensor made of this material is 2.2 times higher than that of the pressure sensor made of S630 elastomer (elastic modulus is 196 GPa).

[0034] According to some embodiments of the present invention, the ZrCuNiTiAlPd amorphous alloy has a microhardness of HV558, a compressive fracture strength of 1.79 GPa, an elasticity of 1.7%, and a plasticity of 0.5%.

[0035] According to some embodiments of the present invention, the ZrCuNiTiBeMo amorphous alloy has a yield strength of 1.56 GPa and a fracture strength of 1.75 GPa.

[0036] In the forging process of the amorphous alloy material of this embodiment, the annealing temperature of the forging process is 950°C to 1200°C.

[0037] Comparative Example 1

[0038] The material used to prepare the pressure sensor elastomer in this comparative example is S630 stainless steel.

[0039] Comparative Example 2

[0040] The material used to prepare the pressure sensor elastomer in this comparative example is 17-4PH stainless steel.

[0041] The test results of the fracture strength and elastic modulus of the pressure sensors prepared in Examples 1-2 of the present invention and Comparative Examples 1-2 and the test results of the sensor sensitivity are shown in Table 1.

[0042] Table 1 Performance test results of the pressure sensors prepared in Examples 1-2 of the present invention and Comparative Examples 1-2 - Sensitivity mv / V Tensile strength(GPa) Elastic modulus(GPa) Example 1 4.57 1.79 82 Example 2 4.22 1.79 90 Comparative Example 1 1.87 0.68 195 Comparative Example 2 1.85 0.70 196

[0043] The ZrCuNiTiAlPd amorphous alloy in Example 1 of the present invention has an outer diameter of 18 mm and a length of 200 mm, and is used to make a pressure sensor, and its sensitivity is 2.4 times that of the 17-4PH material; the ZrCuNiTiBeMo in Example 2 of the present invention is an amorphous alloy with a diameter greater than 30 mm and a tensile strength greater than 2570 MPa; it is used to make a pressure sensor elastomer, and its sensitivity is 2.28 times that of the S630 material.

[0044] In summary, the present invention uses an amorphous material to manufacture the torque shaft, and its elastic modulus is only 40% of that of conventional elastic steel, and the sensitivity will be increased by more than 2 times. In addition, it has high mechanical strength, which is more than 2 times that of conventional elastic steel. Therefore, when manufacturing the same range of torque products, the volume can be reduced by 50%, the weight is reduced, and the processing difficulty is reduced.

[0045] The above specific embodiments further illustrate the purpose, technical solutions and beneficial effects of the present invention in detail. It should be understood that the above are only specific embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A low elastic modulus amorphous elastomer material for a pressure sensor, characterized in that: The preparation raw materials include amorphous alloy; The amorphous alloy includes at least one of ZrCuNiTiAlPd and ZrCuNiTiBeMo; The ZrCuNiTiAlPd includes the following elements in mass fraction: Zr 40%-55%, Cu 12%-17%, Ni 10%-16%, Ti 4%-9%, Al 6%-15% and Pd 3%-5%, its elastic modulus is 82GPa; The ZrCuNiTiBeMo includes the following elements in mass fractions: Zr 39%-58%, Cu 15%-25%, Ni 6%-15%, Ti 9%-15%, Be 15%-21% and Mo5%-8%, and its elastic modulus is 90GPa.

2. The amorphous elastomer for pressure sensor according to claim 1, characterized in that: The ZrCuNiTiAlPd amorphous alloy has a microhardness of HV558, a compression fracture strength of 1.79 GPa, an elasticity of 1.7%, and a plasticity of 0.5%.

3. The amorphous elastomer for pressure sensor according to claim 1, characterized in that: The ZrCuNiTiBeMo amorphous alloy has a yield strength of 1.56 GPa and a fracture strength of 1.75 GPa.

4. A forging process for a low elastic modulus amorphous elastomer of a pressure sensor according to any one of claims 1 to 3, characterized in that: The annealing temperature of the forging process is 950°C to 1200°C.

5. A pressure sensor, characterized in that: The invention comprises a pressure-introducing nozzle, an elastic core, a transfer plate, a shell and a conductor, wherein the elastic core is made of a low elastic modulus amorphous elastic material.

6. The pressure sensor according to claim 5, characterized in that: A thin film strain resistor Whitstone bridge for inducing pressure is prepared on the surface of the elastic core.

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