Evaporation simulation device and evaporation simulation system with same

Abstract

The invention discloses an evaporation simulation device and an evaporation simulation system with the same, the evaporation simulation device comprises a shell, a containing vessel and a heating piece, the shell is a high-vacuum-resistant piece and is provided with a containing cavity, the shell is provided with an extraction opening and a first visible window, the containing vessel is arranged in the containing cavity and is used for containing a coating material, and the heating piece is arranged in the containing vessel. The containing vessel is provided with a second visible window, the first visible window corresponds to the second visible window, and the heating piece is arranged in the containing cavity to heat the containing vessel. According to the evaporation simulation device, the physical change of the coating material in the heating process in the containing vessel can be observed conveniently, and the observation time is short.

Description

Technical Field

[0001] The present invention relates to the technical field of evaporation simulation, and in particular to an evaporation simulation device and an evaporation simulation system having the same. Background Art

[0002] In the process of new device structures moving from research and development to mass production, some new materials, due to their particular physical properties, may denature or experience performance degradation due to long-term evaporation when evaporated using containers such as crucibles.

[0003] However, in actual production, since most of the holding containers are made of metal, the physical changes of the new coating material during the heating process in the holding container are not easy to observe. For example, it is impossible to observe the timing of denaturation and material state changes of materials that may undergo denaturation, the physical state of materials whose performance may deteriorate during a long period of evaporation, and the material state and change process of materials that may be unevenly distributed in the crucible (uneven distribution causes local heating and thus affects material performance) during the evaporation process. At the same time, since the capacity of the holding container is large in actual production, it takes a long time for parameter adjustment to take effect. Therefore, the parameter adjustment time is long. Summary of the invention

[0004] The present invention aims to solve at least one of the technical problems existing in the prior art. To this end, the present invention provides a vapor deposition simulation device, which is convenient for observing the physical changes of the coating material during the heating process in the container, and the observation time is relatively short.

[0005] The evaporation simulation device according to the embodiment of the first aspect of the present invention comprises: A shell, the shell is a high vacuum resistant part and has a containing cavity, and the shell is provided with an air extraction port and a first visual window; A containing vessel, the containing vessel is arranged in the containing cavity and is used to contain the coating material, the containing vessel is provided with a second visible window, and the first visible window and the second visible window are arranged correspondingly; A heating element is arranged in the accommodating cavity to heat the containing vessel.

[0006] According to some embodiments of the present invention, the holding vessel comprises: A containing body, wherein the top of the containing body has an opening; A cover body, the cover body is arranged to cover the opening; The containing body and / or the cover body are made of a light-transmitting material to form the second visual window.

[0007] According to some embodiments of the present invention, The top surface and / or side surface of the shell are made of light-transmitting material to form the first visual window.

[0008] According to some embodiments of the present invention, a support platform is further included, wherein the support platform has a groove, and at least a portion of the holding vessel is located in the groove.

[0009] According to some embodiments of the present invention, the heating element is a heating table, and the heating table is arranged at the bottom of the containing vessel; and / or the heating element is a heating wire, and the heating wire is arranged on the outer surface of the containing vessel.

[0010] According to some embodiments of the present invention, the heating element is a heating table, and the heating table is arranged at the bottom of the supporting table; and / or the heating element is a heating wire, and the heating wire is arranged on the outer surface of the containing vessel.

[0011] According to some embodiments of the present invention, the heating platform is disposed at the bottom of the support platform, and / or the heating wire is disposed on the outer surface of the support platform to heat the support platform.

[0012] According to some embodiments of the present invention, the heating element comprises a plurality of heating zones; It also includes a heating control module, which is connected to the multiple heating zones respectively to control the heating parameters of different heating zones.

[0013] According to some embodiments of the present invention, a video input module is further included, and the video input module is arranged in the first visible window.

[0014] According to some embodiments of the present invention, a rate control module is further included, and the rate control module is connected to the heating element to adjust the evaporation rate of the coating material.

[0015] According to some embodiments of the present invention, a nozzle is further included; the cover body is provided with a through hole connecting the interior of the containing body and the accommodating cavity, and the nozzle is detachably connected to the through hole.

[0016] In the present application, a vapor deposition simulation device is provided, which includes a shell, a container and a heating element. The shell is a high vacuum resistant part and has a receiving cavity. The shell is provided with an exhaust port and a first visible window. The container is provided in the receiving cavity for containing a coating material. The container is provided with a second visible window. The first visible window and the second visible window are provided correspondingly. The heating element is provided in the receiving cavity to heat the container. The container and the heating element are provided by providing a shell with a receiving cavity. The container and the heating element are provided. The shell is provided as a high vacuum resistant part to meet the heating of the coating material in a high vacuum environment. By providing an exhaust port in the shell, the air in the receiving cavity can be evacuated through the exhaust port to change the vacuum degree in the receiving cavity. The container in the receiving cavity can be observed by providing the first visible window. The container is used to contain the coating material, and the heating element is used to heat the vapor deposition material. The second visible window provided in the container can be used to observe the physical changes of the coating material in the container. The first visual window and the second visual window are set correspondingly, so that it is convenient to observe the physical changes of the coating material in the container from the outside of the shell through the first visual window and the second visual window, that is, it is possible to observe the timing of deformation of the material that may be denatured and the change of the material state, the physical state of the material that may be degraded during the long-term evaporation process, and the material state and change process of the material that may be unevenly distributed in the crucible (uneven distribution causes local heating and thus affects the material performance) when the material is unevenly distributed in the container during the evaporation process. At the same time, when it is observed that the rate of vaporization of the coating material is too fast or too slow, the climate rate of the coating material can be adjusted by adjusting parameters such as the heating temperature. Since the capacity of the container in the simulation device is smaller than that of the container actually produced, it takes a shorter time to adjust the parameters, saving the parameter adjustment time.

[0017] The evaporation simulation system according to the second embodiment of the present invention comprises the evaporation simulation device in the above embodiment and an exhaust device, wherein the exhaust device is connected to the exhaust port.

[0018] The evaporation simulation system according to the embodiment of the present invention, by adopting the evaporation simulation device in the above embodiment, is convenient for obtaining the physical changes of the coating material during the heating process in the container, and the simulation efficiency is high.

[0019] Additional aspects and advantages of the present invention will be given in part in the following description and in part will be obvious from the following description, or will be learned through practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 is a schematic structural diagram of a shell of a vapor deposition simulation device according to an embodiment of the present application; Figure 2 is a front view of an embodiment of a vapor deposition simulation device according to an embodiment of the present application; Figure 3 is a top view of another embodiment of a vapor deposition simulation device according to an embodiment of the present application; Figure 4 This is a structural schematic diagram of an embodiment of the cooperation between a container and a heating element of a vapor deposition simulation device according to an embodiment of the present application; Figure 5 is a structural schematic diagram of another embodiment of the cooperation between a holding container and a heating element of a vapor deposition simulation device according to an embodiment of the present application; Figure 6 is a structural schematic diagram of another embodiment of the cooperation between a holding vessel and a heating element of a vapor deposition simulation device according to an embodiment of the present application; Figure 7 It is a structural schematic diagram of another embodiment of the cooperation between a holding vessel and a heating element of a vapor deposition simulation device according to an embodiment of the present application; Figure 8 is a front view of another embodiment of a vapor deposition simulation device according to an embodiment of the present application; Fig. 9 is a top view of a cover of a vapor deposition simulation device according to an embodiment of the present application; Fig.10 It is a structural schematic diagram of a vapor deposition simulation system according to an embodiment of the present application.

[0021] Reference numerals: Evaporation simulation device 100, Shell 10, accommodating chamber 10a, air extraction port 11, first visual window 12, supporting frame 13, The container 20, the second visual window 21, the container body 22, the cover 23, the through hole 231, Heating element 30, heating zone 31, Support platform 40, groove 41, Heating control module 50, video input module 60, rate control module 70, nozzle 80, Evaporation simulation system 1000 and exhaust device 200 . DETAILED DESCRIPTION

[0022] Embodiments of the present invention are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0023] The disclosure below provides many different embodiments or examples to implement different structures of the present invention. In order to simplify the disclosure of the present invention, the parts and settings of specific examples are described below. Of course, they are only examples, and the purpose is not to limit the present invention. In addition, the present invention can repeat reference numbers and / or letters in different examples. This repetition is for the purpose of simplicity and clarity, and does not itself indicate the relationship between the various embodiments and / or settings discussed. In addition, the present invention provides various specific processes and examples of materials, but those of ordinary skill in the art can be aware of the applicability of other processes and / or the use of other materials.

[0024] Vacuum evaporation, or evaporation for short, refers to a process in which a coating material (or film material) is evaporated and gasified by a certain heating evaporation method under vacuum conditions, and the particles fly to the surface of the substrate and condense into a film. Evaporation is an earlier and more widely used vapor deposition technology, with the advantages of simple film formation method, high film purity and density, and unique film structure and performance.

[0025] The physical process of evaporation includes: the deposited material evaporates or sublimates into gaseous particles → the gaseous particles are quickly transported from the evaporation source to the substrate surface → the gaseous particles attach to the substrate surface to form nuclei and grow into a solid film → the film atoms are reconstructed or chemical bonds are generated.

[0026] Specifically, the substrate is placed in a vacuum chamber, and the film material is heated by resistance, electron beam, laser, etc., so that the film material evaporates or sublimates, and gasifies into particles (atoms, molecules or atomic groups) with a certain energy (0.1-0.3eV). The gaseous particles are rapidly transmitted to the substrate in a linear motion with basically no collision. Part of the particles reaching the surface of the substrate are reflected, and the other part is adsorbed on the substrate and diffuses on the surface. Two-dimensional collisions occur between the deposited atoms to form clusters, and some may evaporate after staying on the surface for a short time. The particle clusters constantly collide with the diffused particles, or adsorb single particles, or release single particles. This process is repeated. When the number of aggregated particles exceeds a certain critical value, it becomes a stable nucleus, and then continues to adsorb diffused particles and gradually grows. Finally, through the contact and merging of adjacent stable nuclei, a continuous film is formed.

[0027] In the process of new device structures moving from R&D to mass production, some new coating materials may be denatured or their performance may degrade after long-term deposition due to the special physical properties of the materials. If coating materials that have deformed or degraded in performance are used for deposition, the overall performance of the new device will be affected.

[0028] However, in actual production, since most of the holding containers are made of metal, the physical changes of the new coating material during the heating process in the holding container are not easy to observe. For example, it is impossible to observe the timing of deformation and material state changes of materials that may be deformed, the physical state of materials whose performance may be degraded during a long period of evaporation, and the material state and change process of materials that may be unevenly distributed in the crucible (uneven distribution causes local heating and thus affects material performance) during the evaporation process. At the same time, since the capacity of the holding container is large in actual production, it takes a long time for parameter adjustment to take effect. Therefore, the parameter adjustment time is long.

[0029] Based on this, the present invention proposes a vapor deposition simulation device 100, which can observe the physical changes of the coating material during the heating process in the container 20, and at the same time, save the parameter adjustment time.

[0030] Figure 1-Figure 9 FIG. 1 is a schematic diagram of the structure of the evaporation simulation device 100 according to an embodiment of the present invention. Figure 1 and Figure 2 The evaporation simulation device 100 includes a shell 10, a container 20 and a heating element 30. The shell 10 is a high vacuum resistant component and has a containing cavity 10a. The shell 10 is provided with an exhaust port 11 and a first visible window 12. The container 20 is arranged in the containing cavity 10a for containing the coating material. The container 20 is provided with a second visible window 21. The first visible window 12 and the second visible window 21 are arranged correspondingly. The heating element 30 is arranged in the containing cavity 10a to heat the container 20.

[0031] Specifically, refer to Figure 1 and Figure 2 The evaporation simulation device 100 in the embodiment of the present invention includes a shell 10. The shape of the shell 10 is not limited. Exemplarily, the shape of the shell 10 can be a cube, a sphere, a column, an irregular shape, etc. Preferably, the shell 10 is a cube. The shell 10 has a accommodating cavity 10a, which is used to accommodate a container 20 and a heating element 30, etc. The shape of the accommodating cavity 10a can be the same as that of the shell 10, or it can be different. Exemplarily, the shape of the accommodating cavity 10a can be a cube, a sphere, a column, an irregular shape, etc. Preferably, the accommodating cavity 10a is a cube, that is, the shape of the accommodating cavity 10a is the same as that of the shell 10, which can improve space utilization.

[0032] The housing 10 is a high vacuum resistant part, suitable for heating the coating material in a vacuum environment. Exemplarily, the housing 10 can be made of metal, such as austenitic stainless steel, aluminum and aluminum alloy, aluminum bronze, beryllium, molybdenum and tantalum, etc.; it can also be made of plastic, such as polyvinylidene fluoride, polytetrafluoroethylene (PTFE or Teflon), Nalgene, polycarbonate and polystyrene, etc.; it can also be made of glass and ceramic, such as borosilicate glass, ceramic and alumina ceramic, Makor, etc.

[0033] The shell 10 is provided with an air extraction port 11. By providing the air extraction port 11, the air in the accommodating chamber 10a can be evacuated to change the vacuum degree in the accommodating chamber 10a. It is understandable that the air extraction port 11 can be provided at any position of the shell 10. For example, the air extraction port 11 can be provided on the top surface, side surface or bottom surface of the shell 10. The shape of the air extraction port 11 is not limited, and can be square, circular, irregular, etc. The size of the air extraction port 11 can be set according to actual needs. The number of air extraction ports 11 is not limited and can be set according to actual needs. In order to improve the air extraction efficiency, more than two air extraction ports 11 can be provided, for example, two, three, five, etc. In order to improve the sealing performance of the shell 10, one air extraction port 11 can be provided. Preferably, the air extraction port 11 is set to one. The air extraction port 11 is provided with a plugging member for sealing the air extraction port 11 after air extraction, and the plugging member can be a rubber plug, etc.

[0034] The shell 10 is provided with a first visual window 12, through which the container 20 in the accommodating cavity 10a can be observed. The size of the first visual window 12 can be set according to actual needs. For example, the first visual window 12 can be a partial area of ​​any surface of the shell 10, or any surface of the shell 10, or two or more surfaces of the shell 10. Among them, any surface can be the top surface, bottom surface or side surface of the shell 10. The shape of the first visual window 12 is not limited. For example, the first visual window 12 can be square, round, irregular, etc. It can be understood that the first visual window 12 can be made of a light-transmitting material so that the container 20 in the accommodating cavity 10a can be observed through the first visual window 12.

[0035] The evaporation simulation device 100 also includes a holding vessel 20, which may be a crucible or the like. The holding vessel 20 is used to hold the coating material, which may be a main material of a blue light emitting layer, an electron / hole transport layer material, a guest material of a green light emitting layer, or the like. The holding cavity of the holding vessel 20, that is, the space used to hold the coating material, may have the same shape as that of the coating material, or may be different. Preferably, the shape of the holding cavity of the holding vessel 20 is the same as that of the coating material. The holding vessel 20 is disposed in the containing cavity 10a. Specifically, the holding vessel 20 may be disposed at any position of the containing cavity 10a. For example, the holding vessel 20 may be disposed at the bottom of the containing cavity 10a, or may be connected to the side wall or top of the containing cavity 10a through other connectors.

[0036] The container 20 is provided with a second visual window 21, through which the physical changes of the coating material in the container 20 can be observed. The size of the second visual window 21 can be set according to actual needs. For example, the second visual window 21 can be a partial area of ​​any side of the container 20, or any side of the container 20, or two or more sides of the container 20. Among them, any side can be the top surface, bottom surface or side surface of the container 20. The shape of the second visual window 21 is not limited. For example, the second visual window 21 can be square, round, irregular, etc. It can be understood that the second visual window 21 can be made of a light-transmitting material so that the physical changes of the coating material in the container 20 can be observed through the second visual window 21.

[0037] The first visual window 12 and the second visual window 21 are arranged correspondingly, so that the physical changes of the coating material in the container 20 can be observed from the outside of the shell 10 through the first visual window 12 and the second visual window 21, that is, the timing of deformation of the material that may be denatured and the change of the material state can be observed, the physical state of the material that may be degraded during the long-term evaporation process when the performance is degraded, and the material state and change process of the material that may be unevenly distributed in the crucible (uneven distribution causes local heating and thus affects the material performance) when the material is unevenly distributed in the container 20 during the evaporation process. At the same time, when it is observed that the rate of vaporization of the coating material is too fast or too slow, the climate rate of the coating material can be adjusted by adjusting parameters such as the heating temperature. Since the capacity of the container 20 in the simulation device is smaller than that of the container 20 actually produced, it takes a shorter time to adjust the parameters, saving the parameter adjustment time.

[0038] Among them, the projection of the second visual window 21 on the shell 10 can fall into the first visual window 12, or the projection of the second visual window 21 on the shell 10 can overlap with the first visual window 12, or the projection of the second visual window 21 on the shell 10 can completely cover the first visual window 12 and be larger than the area of ​​the first visual window 12, or the projection of the second visual window 21 on the shell 10 can partially overlap with the first visual window 12.

[0039] The heating element 30 is disposed in the accommodating chamber 10a to heat the container 20. Specifically, the heating element 30 can be disposed at any position of the accommodating chamber 10a, for example, the heating element 30 can be disposed at the bottom of the accommodating chamber 10a, or can be connected to the side wall or top of the accommodating chamber 10a through other connecting members. The heating element 30 can be directly in contact with the container 20 for heating, or can be heated by transferring heat through other heat conducting members.

[0040] Therefore, refer to Figure 1 and Figure 2 According to the evaporation simulation device 100 of the present invention, a shell 10 having a accommodating cavity 10a is provided to accommodate a container 20 and a heating element 30. The shell 10 is configured to be resistant to high vacuum to meet the heating requirements of the coating material in a high vacuum environment. By providing an exhaust port 11 in the shell 10, the air in the accommodating cavity 10a can be evacuated through the exhaust port 11 to change the vacuum degree in the accommodating cavity 10a. The container 20 in the accommodating cavity 10a can be observed by providing a first visible window 12. The container 20 is used to hold the coating material, and the heating element 30 is used to heat the evaporation material. The second visible window 21 provided in the container 20 can observe the physical changes of the coating material in the container 20. The first visual window 12 and the second visual window 21 are arranged correspondingly, so that the physical changes of the coating material in the container 20 can be observed from the outside of the shell 10 through the first visual window 12 and the second visual window 21, that is, the timing of deformation of the material that may be denatured and the change of the material state can be observed, the physical state of the material that may be degraded during the long-term evaporation process when the performance is degraded, and the material state and change process of the material that may be unevenly distributed in the crucible (uneven distribution causes local heating and thus affects the material performance) when the material is unevenly distributed in the container 20 during the evaporation process. At the same time, when it is observed that the rate of vaporization of the coating material is too fast or too slow, the climate rate of the coating material can be adjusted by adjusting parameters such as the heating temperature. Since the capacity of the container 20 in the simulation device is smaller than that of the container 20 actually produced, it takes a shorter time to adjust the parameters, saving the parameter adjustment time.

[0041] In some embodiments, the housing 10 may include a support frame 13 and a panel installed in the support frame 13. The support frame may be made of metal, and the panel may be made of metal or glass.

[0042] It is understandable that, in order to facilitate the placement and removal of the container 20 and the coating material, the housing 10 includes at least one openable panel, which may be a top panel, a bottom panel or a side panel.

[0043] In some embodiments of the present invention, reference Figure 2 and Figure 3 The container 20 includes a container body 22 and a cover body 23 . The top of the container body 22 has an opening, and the cover body 23 covers the opening. The container body 22 and / or the cover body 23 are made of a light-transmitting material to form a second visual window 21 .

[0044] In some embodiments of the present invention, the top surface and / or the side surface of the housing 10 are made of a light-transmitting material to form a first visible window 12 .

[0045] Specifically, the containing body 22 may be made of a light-transmitting material to form the second visual window 21, and the cover 23 may be made of a light-transmitting material to form the second visual window 21. Alternatively, the containing body 22 may be made of a light-transmitting material to form the second visual window 21, and the cover 23 may be made of an opaque material. Alternatively, the containing body 22 may not be made of a light-transmitting material, and the cover 23 may be made of a light-transmitting material to form the second visual window 21.

[0046] The top surface of the housing 10 may be made of a light-transmitting material to form the first visual window 12, and the side surface of the housing 10 may be made of a light-transmitting material to form the first visual window 12. Alternatively, the top surface of the housing 10 may be made of a light-transmitting material to form the first visual window 12, and the side surface of the housing 10 may be made of an opaque material. Alternatively, the top surface of the housing 10 may be made of an opaque material, and the side surface of the housing 10 may be made of a light-transmitting material to form the first visual window 12.

[0047] In some embodiments, the cover 23 disposed on the top of the containing body 22 is made of a light-transmitting material to form a second visible window 21, and the top surface of the shell 10 is made of a light-transmitting material to form a first visible window 12. In this way, the first visible window 12 and the second visible window 21 can be arranged correspondingly so that the physical changes of the coating material during the heating process can be observed through the first visible window 12 and the second visible window 21.

[0048] It is understandable that when the container 20 is placed in the accommodating cavity 10a, the top opening of the containing body 22 faces the top surface of the shell 10, that is, the container 20 is placed vertically in the accommodating cavity 10a with the top facing upward.

[0049] It is understandable that the containing body 22 and the cover body 23 may be separate structures, or the containing body 22 and the cover body 23 may be rotatably connected, etc.

[0050] In some embodiments, the second visible window 21 is formed by using a light-transmitting material on the containing body 22, and the side of the shell 10 is used to form a first visible window 12. In this way, the first visible window 12 and the second visible window 21 can be set correspondingly, so that the physical changes of the coating material during the heating process can be observed through the first visible window 12 and the second visible window 21.

[0051] It is understood that when the container 20 is placed in the accommodating chamber 10a, the side of the accommodating body 22 faces the side of the housing 10, that is, the container 20 is placed vertically in the accommodating chamber 10a with the top facing upwards. In this way, the container 20 is easily placed.

[0052] When the shell 10 is a cube, the shell 10 includes multiple sides, and one side of the shell 10 may be made of a light-transmitting material, or more than two sides may be made of a light-transmitting material, so that the physical changes of the coating material during the heating process can be observed at multiple angles.

[0053] In some embodiments, the container 20 is made of a light-transmitting material; the housing 10 is made of a light-transmitting material.

[0054] By using light-transmitting materials for both the container 20 and the shell 10, physical changes of the coating material during the heating process can be observed at different angles, which is convenient for observation and has high accuracy of the observation results.

[0055] It is understandable that the material of the container 20 and the shell 10 can be the same, for example, the material of the container 20 and the shell 10 can both be high temperature resistant and high vacuum resistant glass. The material of the container 20 and the shell 10 can also be different, for example, the material of the container 20 is high temperature resistant and high vacuum resistant glass, and the material of the shell 10 is high vacuum resistant glass. Preferably, the material of the container 20 is high temperature resistant and high vacuum resistant glass, and the material of the shell 10 is high vacuum resistant glass, which reduces the production cost.

[0056] In some embodiments of the present invention, reference Figure 5 , further comprising a support platform 40 , the support platform 40 having a groove 41 , at least part of the container 20 is located in the groove 41 .

[0057] By providing a support platform 40 with a groove 41 , and at least a portion of the container 20 is located in the groove 41 , the stability of the support platform 40 in supporting the container 20 is improved.

[0058] The container 20 may be partially located in the groove 41 , for example, 1 / 3, 1 / 2, 3 / 4, 4 / 5, etc. of the height of the container 20 may be located in the groove 41 ; the container 20 may also be completely located in the groove 41 .

[0059] The bottom surface of the holding vessel 20 can match the supporting surface of the groove 41. For example, the bottom surface of the holding vessel 20 can be a plane, in which case the supporting surface of the groove 41 is a plane; the bottom surface of the holding vessel 20 can be a convex arc surface, in which case the supporting surface of the groove 41 is also a convex arc surface; the bottom surface of the holding vessel 20 can be a concave arc surface, in which case the supporting surface of the groove 41 is also a concave arc surface.

[0060] The projection of the bottom surface of the container 20 on the support surface of the groove 41 may coincide with the support surface of the groove 41, or may be slightly smaller than the support surface of the groove 41. Preferably, the projection of the bottom surface of the container 20 on the support surface of the groove 41 is slightly smaller than the support surface of the groove 41, so as to facilitate placing the container 20 into the groove 41.

[0061] The side of the container 20 may or may not match the side of the groove 41. Preferably, the side of the container 20 is a plane, and the side of the groove 41 is a plane.

[0062] In some embodiments of the present invention, reference Figure 2 The heating element 30 is a heating platform, which is disposed at the bottom of the container 20 to heat the container 20 .

[0063] By placing the container 20 on the heating platform, the heating platform can heat the container 20 from below and support the container 20 at the same time.

[0064] In some embodiments, the heating stage may be a resistance heating stage, an electron beam heating stage, a radio frequency induction heating stage, an arc heating stage, a laser heating stage, and the like.

[0065] The bottom surface of the container 20 and the top surface of the heating platform can be arranged in a close fit to increase the contact area, that is, to increase the heating area and improve the heating rate. For example, the bottom surface of the container 20 can be a plane, in which case the top surface of the heating platform is a plane; the bottom surface of the container 20 can be a convex arc surface, in which case the top surface of the heating platform is also a convex arc surface; the bottom surface of the container 20 can be a concave arc surface, in which case the top surface of the heating platform is also a concave arc surface.

[0066] The projection of the bottom surface of the container 20 on the bottom surface of the housing 10 may overlap with the projection of the top surface of the heating platform on the bottom surface of the housing 10, or may fall within the projection of the top surface of the heating platform on the bottom surface of the housing 10, or may completely cover and be larger than the projection of the top surface of the heating platform on the bottom surface of the housing 10. Preferably, the projection of the bottom surface of the container 20 on the bottom surface of the housing 10 overlaps with the projection of the top surface of the heating platform on the bottom surface of the housing 10.

[0067] In some embodiments of the present invention, reference Figure 4 The heating element 30 is a heating wire, and the heating wire is arranged on the outer surface of the container 20.

[0068] By arranging the heating wire on the outer surface of the container 20 , the outer surface of the container 20 can be heated.

[0069] In some embodiments, the heating wire may be a resistance heating wire, an electron beam heating wire, a radio frequency induction heating wire, an arc heating wire, a laser heating wire, or the like.

[0070] The heating wire may surround the circumferential outer surface of the container 20, or may be arranged on the bottom surface of the container 20, or may surround the circumferential outer surface and the bottom surface of the container 20. Preferably, the heating wire surrounds the circumferential outer surface and the bottom surface of the container 20. The heating wire may be wound at intervals or may be wound closely. Preferably, the heating wire is wound at intervals. The heating wire may be arranged in a spiral or in parallel, etc.

[0071] In some embodiments of the present invention, reference Figure 6 The heating platform is disposed at the bottom of the support platform 40 , and / or the heating wire is disposed on the outer surface of the support platform 40 to heat the support platform 40 .

[0072] It should be noted that the support platform 40 should be a heat conducting member to conduct the heat of the heating platform or the heating wire to the container 20. The material of the support platform 40 is not limited, and can be metal, ceramic, etc.

[0073] The support platform 40 is heated by a heating platform disposed at the bottom of the support platform 40 to heat the container 20 in the support platform 40. The container 20 can be heated from the bottom and side of the container 20, making the heating more uniform and stable and having higher heating efficiency.

[0074] The projection of the bottom surface of the support platform 40 on the bottom surface of the shell 10 may overlap with the projection of the top surface of the heating platform on the bottom surface of the shell 10, or may fall within the projection of the top surface of the heating platform on the bottom surface of the shell 10, or may completely cover and be larger than the projection of the top surface of the heating platform on the bottom surface of the shell 10. Preferably, the projection of the bottom surface of the support platform 40 on the bottom surface of the shell 10 overlaps with the projection of the top surface of the heating platform on the bottom surface of the shell 10.

[0075] The support platform 40 is heated by a heating wire disposed on the outer surface of the support platform 40 to heat the container 20 in the support platform 40. The container 20 can be heated from the bottom and the side, making the heating more uniform and stable and the heating efficiency higher.

[0076] The heating wire may surround the circumferential outer surface of the support platform 40, or may be arranged on the bottom surface of the support platform 40, or may surround the circumferential outer surface and the bottom surface of the support platform 40. Preferably, the heating wire surrounds the circumferential outer surface and the bottom surface of the support platform 40. The heating wire may be wound at intervals or may be wound closely. Preferably, the heating wire is wound at intervals. The heating wire may be arranged in a spiral or in parallel, etc.

[0077] In some embodiments of the present invention, reference Figure 7 The heating element 30 includes a plurality of heating zones 31 ; the evaporation simulation device 100 further includes a heating control module 50 , which is respectively connected to the plurality of heating zones 31 to control heating parameters of different heating zones 31 .

[0078] By setting a plurality of heating zones 31 and adjusting the parameters of different heating zones 31 respectively, it is possible to study the uneven heating and observe the material state and change process of the coating material.

[0079] The number of heating zones 31 can be more than two, for example, two, three, five, eight, etc. The heating temperatures of different heating zones 31 can be set according to actual needs, and the heating control module 50 can increase or decrease the heating temperature of the control zone.

[0080] Different heating zones 31 may adopt the same heating method or different heating methods. Preferably, different heating zones 31 adopt the same heating method.

[0081] In some embodiments of the present invention, reference Figure 8 The evaporation simulation device 100 further includes a video input module 60 , and the video input module 60 is disposed in the first visual window 12 .

[0082] By arranging the video input module 60 in the first visual window 12 , the physical changes of the coating material during the heating process can be recorded by the video input module 60 instead of manual observation.

[0083] In some embodiments, the video input module 60 may be a high-definition camera, etc., which can observe subtle changes that cannot be observed by the human eye. At the same time, the video can be stored for repeated observation and comparison.

[0084] It can be understood that the input end of the video input module 60 disposed in the first visual window 12 faces the second visual window 21 so as to observe the coating material in the container 20 .

[0085] In some embodiments, the video input module 60 may be disposed on the top, side, or bottom of the housing 10 .

[0086] In some embodiments of the present invention, reference Figure 8 The evaporation simulation device 100 further includes a rate control module 70 , which is connected to the heating element 30 to adjust the evaporation rate of the coating material.

[0087] By providing a rate control module 70 connected to the heating element 30 , the evaporation rate of the evaporation material can be controlled to better simulate the mass production evaporation process.

[0088] In some embodiments of the present invention, reference Fig. 9 The evaporation simulation device 100 further includes a nozzle 80 ; the cover body 23 is provided with a through hole 231 communicating with the interior of the containing body 22 and the accommodating cavity 10 a , and the nozzle 80 is detachably connected to the through hole 231 .

[0089] A through hole 231 communicating the interior of the containing body 22 with the accommodating cavity 10 a is provided on the cover 23 , and the nozzle 80 is installed in the through hole 231 , so that the vaporized coating material can be transported to the substrate through the nozzle 80 .

[0090] The cover 23 of the nozzle 80 is made of a light-transmitting material, which makes it easy to observe the timing of accumulation, the material state during accumulation, and the reason for material accumulation when clogging occurs in coating materials that are prone to clogging (such as the main material of the blue light emitting layer, and some electron / hole transport layer materials).

[0091] The nozzle 80 and the through hole 231 can be detachably connected by means of a snap connection, a threaded connection, or a detachable connection piece, so as to facilitate the connection of a nozzle 80 of a suitable size.

[0092] In some embodiments, there are multiple through holes 231, and the multiple through holes 231 are arranged in three rows along the length or width direction of the cover body 23, wherein the aperture of the through holes 231 in the middle row is smaller than the aperture of the through holes 231 on both sides.

[0093] According to the evaporation simulation system 1000 of the second embodiment of the present invention, refer to Fig.10 , including the evaporation simulation device 100 and the exhaust device 200 in the above embodiment, and the exhaust device 200 is connected to the exhaust port 11.

[0094] The evaporation simulation system 1000 according to the embodiment of the present invention, by adopting the evaporation simulation device 100 in the above embodiment, is convenient for obtaining the physical changes of the coating material during the heating process in the container 20, and the simulation efficiency is high.

[0095] Specifically, the exhaust device 200 may be a vacuum pump or the like.

[0096] In some embodiments, the evaporation simulation system 1000 further includes a control module, which can be connected to the exhaust device 200 to control the start and stop of the exhaust device 200 according to the vacuum degree in the housing 10. The control module is also connected to the heating element 30 to control the heating temperature and heating time. The control module is also connected to the heating control module 50 to control the heating parameters of different heating zones 31 by the heating control module 50. The control module is also connected to the video input module 60 to control the start and stop of the video input module 60, as well as the storage and transmission of data. The control module is also connected to the rate control module 70 to control the rate control module 70, thereby adjusting the evaporation rate of the coating material.

[0097] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.

[0098] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection, an electrical connection, or a communication; it can be a direct connection, or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0099] In the present invention, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature being "above", "above" or "above" a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being "below", "below" or "below" a second feature may mean that the first feature is directly below or obliquely below the second feature, or means that the first feature is lower in level than the second feature.

[0100] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art may combine and combine the different embodiments or examples described in this specification and the features of the different embodiments or examples, without contradiction.

[0101] Although the embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the claims and their equivalents.

Claims

1. A vapor deposition simulation device, characterized in that: include: A shell, the shell is a high vacuum resistant part and has a containing cavity, and the shell is provided with an air extraction port and a first visual window; A containing vessel, the containing vessel is arranged in the containing cavity and is used to contain the coating material, the containing vessel is provided with a second visual window, and the first visual window and the second visual window are arranged correspondingly; A heating element is arranged in the accommodating cavity to heat the containing vessel.

2. The evaporation simulation device according to claim 1, characterized in that: The container comprises: A containing body, wherein the top of the containing body has an opening; A cover body, the cover body is arranged to cover the opening; The containing body and / or the cover body are made of a light-transmitting material to form the second visual window.

3. The evaporation simulation device according to claim 1 or 2, characterized in that: The top surface and / or side surface of the shell are made of light-transmitting material to form the first visual window.

4. The evaporation simulation device according to claim 3, characterized in that: It also includes a support platform, which has a groove, and at least part of the container is located in the groove.

5. The evaporation simulation device according to any one of claims 1 to 3, characterized in that: The heating element is a heating platform, and the heating platform is arranged at the bottom of the containing vessel; and / or the heating element is a heating wire, and the heating wire is arranged on the outer surface of the containing vessel.

6. The evaporation simulation device according to claim 4, characterized in that: The heating platform is arranged at the bottom of the supporting platform, and / or the heating wire is arranged on the outer surface of the supporting platform to heat the supporting platform.

7. The evaporation simulation device according to claim 1, characterized in that: The heating element comprises a plurality of heating zones; It also includes a heating control module, which is connected to the multiple heating zones respectively to control the heating parameters of different heating zones.

8. The evaporation simulation device according to claim 1, characterized in that: It also includes a video input module, which is arranged in the first visual window.

9. The evaporation simulation device according to claim 1, characterized in that: It also includes a rate control module, which is connected to the heating element to adjust the evaporation rate of the coating material.

10. The evaporation simulation device according to claim 2, characterized in that: Also includes a nozzle; The cover body is provided with a through hole communicating with the interior of the containing body and the accommodating cavity, and the nozzle is detachably connected to the through hole.

11. A vapor deposition simulation system, characterized in that: include: The evaporation simulation device according to any one of claims 1 to 10; An air suction device is connected to the air suction port.

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