A transmission device and gallium nitride production system

Abstract

The present invention relates to the field of precise transmission control technology, and specifically to a transmission device and a gallium nitride production system. In the transmission device, a transmission shaft is used to transmit and connect the power output shaft of the driver and the main shaft body. The transmission sleeve is matched with the transmission shaft, and the transmission sleeve is sleeved on the transmission column. The first cylinder and the second cylinder are coaxially fixedly connected and the internal spaces of the two are connected. The first cylinder is located at one end of the second cylinder close to the transmission column. The first cylinder has an internal thread. The rotating member has an external thread, and the rotating member can be rotatably matched in the first cylinder, and the rotating member and the first cylinder are movably sealed. The rotating member is connected to the transmission column. The piston is slidably matched in the second cylinder. The pressure sensor is arranged on the inner side of the sealing plate, and a first elastic member is abutted between the pressure sensor and the piston. It can calibrate the transmission accuracy as needed according to the actual transmission situation, and can adapt to the situation where short-distance transmission and long-distance transmission are mixed.

Description

Technical Field

[0001] The present invention relates to the technical field of precise transmission control, and in particular to a transmission device and a gallium nitride production system. Background Art

[0002] In the actual production process, transmission mechanisms are widely used. In production work with high requirements for transmission accuracy, the accuracy of short-distance displacement transmission is relatively easy to control. As the transmission distance increases, the difficulty of controlling transmission accuracy gradually increases.

[0003] In production activities that have high requirements for transmission accuracy, short-distance transmission and long-distance transmission occur frequently. How to effectively ensure the continuous stability of transmission accuracy at different transmission distances is the key to ensuring production stability and reliability.

[0004] In view of this, this application is hereby filed. Summary of the invention

[0005] The first object of the present invention is to provide a transmission device, which can calibrate the transmission accuracy as needed according to the actual transmission situation, can adapt to the mixed use of short-distance transmission and long-distance transmission, and is conducive to ensuring the stability and reliability of production equipment.

[0006] The second object of the present invention is to provide a gallium nitride production system, which can effectively ensure the stability and reliability of the gallium nitride production reactor during the gallium nitride production process, and help to ensure the reduction of the scrap rate in gallium nitride production.

[0007] The embodiment of the present invention is achieved as follows:

[0008] A transmission device comprises: a main shaft body, a transmission shaft, a transmission sleeve, a transmission column, a first cylinder body, a second cylinder body, a rotating part, a piston, a pressure sensor and a processor.

[0009] The transmission shaft is used to connect the power output shaft of the driver with the main shaft body.

[0010] The transmission sleeve is matched with the transmission shaft for transmission, and the transmission sleeve is sleeved on the transmission column. Along the circumference of the transmission column, the transmission sleeve is fixedly matched with the transmission column. Along the axial direction of the transmission column, the transmission sleeve is slidably matched with the transmission column.

[0011] The first cylinder is coaxially fixedly connected with the second cylinder and the internal spaces of the two cylinders are connected. The first cylinder is located at one end of the second cylinder close to the transmission column. The end of the second cylinder away from the first cylinder is closed by a sealing plate, and the sealing plate is provided with a vent hole. The first cylinder has an internal thread.

[0012] The rotating member has an external thread, and is rotatably matched with the first cylinder, and a movable seal is formed between the rotating member and the first cylinder. The rotating member is fixedly connected with the transmission column.

[0013] The piston is slidably matched in the second cylinder, and the piston and the second cylinder are slidably sealed. The pressure sensor is arranged on the inner side of the sealing plate, and a first elastic member is abutted between the pressure sensor and the piston.

[0014] The pressure sensor is electrically connected to the processor.

[0015] When the rotating member is located at an end of the first cylinder away from the second cylinder, the piston abuts against an end of the second cylinder close to the first cylinder. When the driver drives the main shaft body, the transmission shaft can indirectly drive the rotating member to move toward the second cylinder, so that the internal pressure of the first cylinder gradually increases and can eventually push the piston. The processor is used to confirm the elastic deformation of the first elastic member according to the pressure data detected by the pressure sensor, and determine the compression data of the gas in the first cylinder according to the pressure data and the elastic deformation, and use the compression data to calibrate the transmission accuracy of the transmission shaft.

[0016] Furthermore, the main shaft body is a lead screw.

[0017] Furthermore, the first elastic member is a spring.

[0018] The second cylinder is also provided with oil-absorbing cotton, which is in a cylindrical shape. The outer diameter of the oil-absorbing cotton matches the inner diameter of the first elastic member. The oil-absorbing cotton is coaxially arranged with the first elastic member and is located inside the first elastic member. One end of the oil-absorbing cotton is connected to the piston, and the other end is connected to the sealing plate. The inner wall of the oil-absorbing cotton has an oil-isolating film. Rust-proof lubricating oil is adsorbed in the oil-absorbing cotton.

[0019] Furthermore, a first rod is fixedly connected to a side of the piston away from the first cylinder, and the first rod extends along the axial direction of the second cylinder and extends to the outside of the second cylinder through the air vent.

[0020] The main shaft body is a hollow structure. One end of the main shaft body away from the transmission shaft has an opening, and a detection rod is arranged in the main shaft body. The detection rod is coaxially arranged with the main shaft body, and the outer diameter of the detection rod is smaller than the inner diameter of the main shaft body.

[0021] The detection rod is fixedly connected with a second rod body, and the second rod body extends along the axial direction of the main shaft body and extends outside the main shaft body through the opening. The first rod body and the second rod body are fixedly connected by a connecting rod.

[0022] A mounting blind hole is provided on the side wall of the detection rod, and the mounting blind hole is arranged along the radial direction of the detection rod. A detection column is slidably fitted in the mounting blind hole, and a second elastic member is abutted between the detection column and the bottom of the mounting blind hole to ensure that the detection column always abuts against the inner side wall of the main shaft body.

[0023] The detection column is made of conductive material, and a conductive ring is embedded in the hole wall of the blind hole. The conductive ring is sleeved on the detection column and is electrically connected to the detection column. The detection column and the conductive ring constitute a detection terminal.

[0024] The detection rod has a plurality of detection terminals, and the detection columns of the detection terminals are oriented in different directions. The two groups of detection terminals constitute a detection unit, and in the detection unit, the conductive rings of the two groups of detection terminals are electrically connected.

[0025] The inner side wall of the main shaft body is provided with a conductive coating, which is extended in a strip shape along the axial direction of the main shaft body. Along the circumference of the main shaft body, a plurality of conductive coatings are distributed at intervals.

[0026] The transmission device also has a detection circuit. Each detection unit is correspondingly configured with two conductive coatings, one conductive coating is electrically connected to one pole of the detection circuit and fits with a detection column of the detection unit, and the other conductive coating is electrically connected to the other pole of the detection circuit and fits with the other detection column of the detection unit.

[0027] Among them, the resistance per unit length of the conductive coating remains constant.

[0028] The detection circuit is electrically connected to the processor, and the processor is used to determine whether the main shaft body is deformed according to the current change data of the detection circuit.

[0029] Further, the processor determines whether the main shaft body is deformed according to the current change data of the detection circuit. It includes: if the current value of the detection circuit increases, the inner side wall of the main shaft body has a convex deformation. If the current value of the detection circuit decreases, the inner side wall of the main shaft body has a concave deformation.

[0030] A gallium nitride production system comprises: a driving mechanism, a gallium nitride production reactor and the above-mentioned transmission device.

[0031] The main shaft body is a lead screw, and the main shaft body is matched with a moving sleeve, and the moving sleeve is fixedly connected to a moving seat. The driving mechanism and the main shaft body are matched by a transmission shaft. The gallium nitride production reactor includes a first furnace body and a second furnace body, the first furnace body is fixedly installed, and the second furnace body is installed on the moving seat.

[0032] The driving mechanism is used for driving the main shaft body so as to separate the second furnace body from the first furnace body and to make the second furnace body match with the first furnace body.

[0033] The beneficial effects of the technical solution of the embodiment of the present invention include:

[0034] The processor of the transmission device provided in the embodiment of the present invention can confirm the elastic deformation of the first elastic part based on the pressure data detected by the pressure sensor, and determine the compression data of the gas in the first cylinder based on the pressure data and the elastic deformation, and use the compression data to determine the axial movement of the rotating part, and calibrate the transmission accuracy (rotation amount / transmission amount) of the transmission shaft / spindle body based on the axial movement of the rotating part.

[0035] In general, the transmission device provided by the embodiment of the present invention can calibrate the transmission accuracy as needed according to the actual transmission situation, can adapt to the mixed use of short-distance transmission and long-distance transmission, and is conducive to ensuring the stability and reliability of production equipment. The gallium nitride production system provided by the embodiment of the present invention can effectively ensure the stability and reliability of the gallium nitride production reactor during the gallium nitride production process, which helps to ensure the reduction of the scrap rate in gallium nitride production. BRIEF DESCRIPTION OF THE DRAWINGS

[0036] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required for use in the embodiments are briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present invention and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without creative work.

[0037] Figure 1 is a schematic diagram of the overall structure of the transmission device;

[0038] Figure 2 It is a structural schematic diagram of the second cylinder of the transmission device;

[0039] Figure 3 is a schematic diagram of the internal structure of the transmission device;

[0040] Figure 4 Schematic diagram of the internal structure of the detection rod;

[0041] Figure 5 A planar development schematic diagram of the inner wall of the main shaft body;

[0042] Figure 6 Schematic diagram of the structure of the gallium nitride production system.

[0043] Description of reference numerals:

[0044] Spindle body 100; detection rod 110; mounting blind hole 111; detection column 112; second elastic member 113; conductive ring 114; conductive coating 120; second rod body 130; connecting rod 140; transmission shaft 200; transmission sleeve 300; transmission column 400; first cylinder 500; rotating member 510; second cylinder 600; sealing plate 610; air hole 611; piston 620; first elastic member 630; oil-absorbing cotton 640; first rod body 650; driving mechanism 2100; moving sleeve 2200; moving seat 2300; first furnace body 2400; second furnace body 2500. DETAILED DESCRIPTION

[0045] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Generally, the components of the embodiments of the present invention described and shown in the drawings here can be arranged and designed in various different configurations.

[0046] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the invention claimed for protection, but merely represents selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0047] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0048] The terms “first”, “second”, etc. are only used for distinguishing descriptions and should not be understood as indicating or implying relative importance.

[0049] In addition, the terms "parallel", "vertical", etc. do not mean that the components must be absolutely parallel or vertical, but can be slightly tilted. For example, "parallel" only means that its direction is more parallel than "vertical", and does not mean that the structure must be completely parallel, but can be slightly tilted.

[0050] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "setting", "installation" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a direct connection, or an indirect connection through an intermediate medium, or it can be a communication between the two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0051] Please refer to Figure 1-Figure 2 , this embodiment provides a transmission device.

[0052] The transmission device includes: a main shaft body 100, a transmission shaft 200, a transmission sleeve 300, a transmission column 400, a first cylinder 500, a second cylinder 600, a rotating member 510, a piston 620, a pressure sensor (not shown in the figure) and a processor (not shown in the figure).

[0053] The transmission shaft 200 is used to connect the power output shaft of the external driver to the main shaft body 100, so that the driver can drive the main shaft body 100. The main shaft body 100 can be a rotating part of a rotating mechanism. Specifically, in different application scenarios, the specific rotating mechanism can be flexibly selected according to actual conditions. Exemplarily, the transmission shaft 200 can coaxially and fixedly connect the main shaft body 100 and the power output shaft of the driver, but is not limited thereto.

[0054] The transmission sleeve 300 is in transmission cooperation with the transmission shaft 200 . For example, the transmission sleeve 300 and the transmission shaft 200 are transmitted via gears, but the present invention is not limited thereto.

[0055] In the present embodiment, the rotation axis of the transmission sleeve 300 is arranged to coincide with its own central axis, and the central axes of the transmission sleeve 300 and the transmission shaft 200 are arranged in parallel and spaced apart. The transmission sleeve 300 is arranged coaxially with the transmission column 400, and the transmission sleeve 300 is sleeved on the transmission column 400. Along the circumference of the transmission column 400, the transmission sleeve 300 is fixedly matched with the transmission column 400. Along the axial direction of the transmission column 400, the transmission sleeve 300 is slidably matched with the transmission column 400. Exemplarily, the transmission sleeve 300 can be provided with an internal spline, and the transmission column 400 can be provided with an external spline, but it is not limited thereto.

[0056] The first cylinder 500 and the second cylinder 600 are coaxially fixedly connected and their internal spaces are connected. The first cylinder 500, the second cylinder 600 and the transmission column 400 are coaxially arranged. The first cylinder 500 is located at one end of the second cylinder 600 close to the transmission column 400.

[0057] One end of the second cylinder 600 away from the first cylinder 500 is closed by a sealing plate 610, and the sealing plate 610 is provided with an air hole 611. The first cylinder 500 has an internal thread.

[0058] The rotating member 510 is cylindrical, and the outer diameter of the rotating member 510 is matched with the inner diameter of the first cylinder 500 . The outer diameter of the transmission column 400 is smaller than the inner diameter of the first cylinder 500 .

[0059] The rotating member 510 has an external thread, and the first cylinder 500 has an internal thread. The rotating member 510 is threadedly engaged with the first cylinder 500. The rotating member 510 is rotatably engaged with the first cylinder 500. When the rotating member 510 rotates, the rotating member 510 can realize axial movement in the first cylinder 500 through the thread structure. There is a movable seal between the rotating member 510 and the first cylinder 500. The rotating member 510 is coaxially fixedly connected with the transmission column 400.

[0060] The piston 620 is slidably fitted in the second cylinder 600, and a sliding seal is formed between the piston 620 and the second cylinder 600. The pressure sensor is arranged on the inner side of the sealing plate 610, and a first elastic member 630 is abutted between the pressure sensor and the piston 620. The pressure sensor is electrically connected to the processor.

[0061] When the rotating member 510 is located at an end of the first cylinder 500 away from the second cylinder 600 , the piston 620 abuts against an end of the second cylinder 600 close to the first cylinder 500 under the elastic force of the first elastic member 630 .

[0062] When the driver drives the main shaft body 100, the transmission shaft 200 can indirectly drive the rotating member 510 through the transmission sleeve 300 and the transmission column 400, so that the rotating member 510 moves toward the second cylinder 600. As the rotating member 510 moves toward the second cylinder 600, the rotating member 510 compresses the gas in the first cylinder 500, so that the internal pressure of the first cylinder 500 gradually increases. When the gas pressure in the first cylinder 500 reaches a level that can push the piston 620, the piston 620 is smoothly pushed.

[0063] When the piston 620 is pushed, the pressure detected by the pressure sensor can reflect the air pressure in the first cylinder 500. Specifically, the air pressure in the first cylinder 500 = standard atmospheric pressure + elastic force of the first elastic member 630, and the air pressure in the first cylinder 500 can reflect the compression ratio of the gas. According to the compression ratio and the elastic deformation of the first elastic member 630, the axial movement distance of the rotating member 510 can be determined, and the axial movement distance of the rotating member 510 can inversely determine the actual number of rotations of the transmission shaft 200, so that the actual rotation amount / transmission amount of the main shaft body 100 can be calibrated.

[0064] Based on this, the processor can confirm the elastic deformation of the first elastic member 630 according to the pressure data detected by the pressure sensor, and determine the compression data of the gas in the first cylinder 500 according to the pressure data and the elastic deformation, and use the compression data to determine the axial movement of the rotating member 510, and calibrate the transmission accuracy (rotation amount / transmission amount) of the transmission shaft 200 / spindle body 100 according to the axial movement of the rotating member 510.

[0065] In general, the transmission device provided in this embodiment can calibrate the transmission accuracy as needed according to the actual transmission situation, can adapt to the mixed use of short-distance transmission and long-distance transmission, and is conducive to ensuring the stability and reliability of production equipment.

[0066] Specifically, during use, when the main shaft body 100 is a lead screw, the transmission device can be adapted to the lead screw mechanism. In this embodiment, the first elastic member 630 is a spring.

[0067] Furthermore, an oil-absorbing cotton 640 is provided in the second cylinder 600. The oil-absorbing cotton 640 is cylindrical. The outer diameter of the oil-absorbing cotton 640 is adapted to the inner diameter of the first elastic member 630. The oil-absorbing cotton 640 is coaxially arranged with the first elastic member 630 and is located inside the first elastic member 630. The outer wall of the oil-absorbing cotton 640 is in contact with the first elastic member 630.

[0068] One end of the oil-absorbing cotton 640 is connected to the piston 620, and the other end is connected to the sealing plate 610. The inner wall of the oil-absorbing cotton 640 has an oil-isolating film. Rust-proof lubricating oil is absorbed in the oil-absorbing cotton 640. The oil-isolating film is an elastic film, which is used to prevent the absorbed rust-proof lubricating oil from leaking from the inner wall of the oil-absorbing cotton 640.

[0069] With this design, when the piston 620 is pushed, the first elastic member 630 will be elastically compressed, and at this time, the oil-absorbing cotton 640 will also be elastically compressed in the axial direction. In this process, the anti-rust lubricating oil absorbed in the oil-absorbing cotton 640 can be squeezed onto the first elastic member 630, which can effectively lubricate the first elastic member 630 and prevent the first elastic member 630 from rusting, which is conducive to maintaining the smoothness of the first elastic member 630 and ensuring the detection sensitivity of the pressure sensor. It should be noted that the elastic force generated by the oil-absorbing cotton 640 when it is compressed can be ignored.

[0070] Furthermore, please combine Figure 1-Figure 5 The piston 620 is fixedly connected to a first rod 650 on one side away from the first cylinder 500 . The first rod 650 extends along the axial direction of the second cylinder 600 and extends to the outside of the second cylinder 600 through the air vent 611 . The outer diameter of the first rod 650 is smaller than the aperture of the air vent 611 .

[0071] The spindle body 100 is a hollow structure. One end of the spindle body 100 away from the transmission shaft 200 has an opening, and a detection rod 110 is disposed coaxially with the spindle body 100 . The outer diameter of the detection rod 110 is smaller than the inner diameter of the spindle body 100 .

[0072] The detection rod 110 is coaxially fixedly connected with the second rod 130, which is located at one end of the detection rod 110 away from the transmission shaft 200. The second rod 130 extends along the axial direction of the main shaft 100 and extends outside the main shaft 100 through the opening. The first rod 650 and the second rod 130 are fixedly connected by a connecting rod 140.

[0073] A mounting blind hole 111 is provided on the side wall of the detection rod 110, and the mounting blind hole 111 is arranged along the radial direction of the detection rod 110. A detection column 112 is slidably fitted in the mounting blind hole 111, and a second elastic member 113 is abutted between the detection column 112 and the bottom of the mounting blind hole 111, so that the detection column 112 is always abutted against the inner wall of the main shaft body 100.

[0074] The main shaft body 100, the detection rod 110, and the second elastic member 113 are all made of insulating materials.

[0075] The detection column 112 is made of conductive material, and a conductive ring 114 is embedded in the hole wall of the installation blind hole 111. The conductive ring 114 is arranged close to the mouth of the installation blind hole 111, and the conductive ring 114 is sleeved on the detection column 112. The inner ring wall of the conductive ring 114 is in contact with the outer wall of the detection column 112 and is electrically connected to the detection column 112.

[0076] The detection column 112 and the conductive ring 114 constitute a detection terminal.

[0077] The detection rod 110 has a plurality of detection terminals, and the detection columns 112 of the detection terminals are oriented in different directions. The two groups of detection terminals constitute a detection unit, and in the detection unit, the conductive rings 114 of the two groups of detection terminals are electrically connected.

[0078] The inner wall of the main shaft body 100 has a conductive coating 120, and the conductive coating 120 extends in a strip shape along the axial direction of the main shaft body 100. Along the circumference of the main shaft body 100, a plurality of conductive coatings 120 are distributed at intervals.

[0079] In this embodiment, the length of each conductive coating 120 is the same as the length of the inner space of the spindle body 100 .

[0080] The transmission device also has a detection circuit (not shown in the figure).

[0081] Each detection unit is correspondingly configured with two conductive coatings 120. Among them, one end of a conductive coating 120 close to the transmission shaft 200 is electrically connected to one pole of the detection circuit, and the conductive coating 120 is attached to a detection column 112 of the detection unit (that is, the end of the detection column 112 abuts against this conductive coating 120), and the end of another conductive coating 120 away from the transmission shaft 200 is electrically connected to the other pole of the detection circuit, and the conductive coating 120 is attached to another detection column 112 of the detection unit (that is, the end of the detection column 112 abuts against this conductive coating 120).

[0082] The resistance per unit length of the conductive coating 120 remains constant.

[0083] The detection circuit is electrically connected to the processor, and the processor is used to determine whether the spindle body 100 is deformed according to the current change data of the detection circuit.

[0084] Through the above design, when the rotating member 510 is located at the end of the first cylinder 500 away from the second cylinder 600, the piston 620 abuts against the end of the second cylinder 600 close to the first cylinder 500. At this time, the detection rod 110 also fits with the inner end wall of the main shaft body 100 close to the transmission shaft 200.

[0085] When the rotation of the main shaft body 100 is small, that is, the transmission distance of the screw is short, the starting state is when the screw sleeve is located at one end of the main shaft body 100 close to the transmission shaft 200. At this time, the piston 620 has not been pushed open, and the detection rod 110 is located at one end of the main shaft body 100 close to the transmission shaft 200. The screw sleeve also mainly moves near this end of the main shaft body 100. The range where the screw sleeve is located can be focused on for detection.

[0086] When the rotation of the main shaft body 100 is large, that is, the transmission distance of the lead screw is long, the piston 620 is pushed away, and the detection rod 110 moves toward the end of the main shaft body 100 away from the transmission shaft 200, and the lead screw sleeve also moves toward the other end of the main shaft body 100. The detection rod 110 can be pulled toward the end of the main shaft body 100 away from the transmission shaft 200 to focus on the detection of the range where the lead screw sleeve is located.

[0087] Specifically, the processor determines whether the spindle body 100 is deformed according to the current change data of the detection circuit. It includes: (1) If the current value of the detection circuit increases, it means that the actual length of the detection column 112 connected to the detection circuit is reduced, which means that the detection column 112 moves further into the installation blind hole 111, which means that there is a protrusion on the inner wall of the spindle body 100 at the position where the end of the detection column 112 abuts (protruding toward the side where the central axis of the spindle body 100 is located), that is: the inner side wall of the spindle body 100 has a convex deformation; (2) If the current value of the detection circuit decreases, the inner side wall of the spindle body 100 has a concave deformation.

[0088] Through the above design, on the basis of calibrating the transmission amount, the structural integrity of the spindle body 100 can also be tested, which helps to ensure the structural integrity and structural stability of the transmission device, and facilitates timely detection of structural defects of the spindle body 100 to avoid affecting normal transmission work.

[0089] Please combine Figure 6 This embodiment also provides a gallium nitride production system, which includes: a driving mechanism 2100, a gallium nitride production reactor and the above-mentioned transmission device.

[0090] The main shaft body 100 is a lead screw, and the main shaft body 100 is matched with a moving sleeve 2200 (equivalent to a lead screw sliding sleeve), and the moving sleeve 2200 is fixedly connected to a moving seat 2300 .

[0091] The driving mechanism 2100 and the main shaft body 100 are coupled to each other via the transmission shaft 200 . The gallium nitride production reactor comprises a first furnace body 2400 and a second furnace body 2500 . The first furnace body 2400 is fixedly installed, and the second furnace body 2500 is installed on the moving seat 2300 .

[0092] The driving mechanism 2100 is used to drive the spindle body 100 to separate the second furnace body 2500 from the first furnace body 2400 and to make the second furnace body 2500 cooperate with the first furnace body 2400 .

[0093] In summary, the transmission device provided by the embodiment of the present invention can calibrate the transmission accuracy as needed according to the actual transmission situation, can adapt to the mixed use of short-distance transmission and long-distance transmission, and is conducive to ensuring the stability and reliability of production equipment. The gallium nitride production system provided by the embodiment of the present invention can effectively ensure the stability and reliability of the gallium nitride production reactor during the gallium nitride production process, which helps to ensure the reduction of the scrap rate in gallium nitride production.

[0094] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. For those skilled in the art, the present invention may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. A transmission device, characterized in that: include: A main shaft body, a transmission shaft, a transmission sleeve, a transmission column, a first cylinder body, a second cylinder body, a rotating part, a piston, a pressure sensor and a processor; The transmission shaft is used to transmit and connect the power output shaft of the driver with the main shaft body; The transmission sleeve is in transmission cooperation with the transmission shaft, and the transmission sleeve is sleeved on the transmission column; along the circumference of the transmission column, the transmission sleeve is fixedly cooperated with the transmission column; along the axial direction of the transmission column, the transmission sleeve is slidably cooperated with the transmission column; The first cylinder and the second cylinder are coaxially fixedly connected and their internal spaces are connected. The first cylinder is located at one end of the second cylinder close to the transmission column; the end of the second cylinder away from the first cylinder is closed by a sealing plate, and the sealing plate is provided with a vent hole; the first cylinder has an internal thread; The rotating member has an external thread, and the rotating member can be rotatably matched in the first cylinder, and the rotating member and the first cylinder are movably sealed; the rotating member is fixedly connected to the transmission column; The piston is slidably fitted in the second cylinder, and a sliding seal is formed between the piston and the second cylinder; the pressure sensor is arranged on the inner side of the sealing plate, and a first elastic member is abutted between the pressure sensor and the piston; The pressure sensor is electrically connected to the processor; When the rotating member is located at the end of the first cylinder away from the second cylinder, the piston abuts against the end of the second cylinder close to the first cylinder; when the driver drives the main shaft body, the transmission shaft can indirectly drive the rotating member to move toward the second cylinder, so that the internal pressure of the first cylinder gradually increases and finally pushes the piston; The processor is used to confirm the elastic deformation of the first elastic member according to the pressure data detected by the pressure sensor, determine the compression data of the gas in the first cylinder according to the pressure data and the elastic deformation, and use the compression data to calibrate the transmission accuracy of the transmission shaft.

2. The transmission device according to claim 1, characterized in that: The main shaft body is a lead screw.

3. The transmission device according to claim 1, characterized in that: The first elastic member is a spring; The second cylinder is also provided with oil-absorbing cotton, which is in a cylindrical shape, and whose outer diameter matches the inner diameter of the first elastic member. The oil-absorbing cotton is coaxially arranged with the first elastic member and is located inside the first elastic member; one end of the oil-absorbing cotton is connected to the piston, and the other end is connected to the sealing plate, and the inner side wall of the oil-absorbing cotton has an oil-isolating film; The oil-absorbing cotton has anti-rust lubricating oil absorbed therein.

4. The transmission device according to claim 1, characterized in that: A first rod is fixedly connected to a side of the piston away from the first cylinder, and the first rod extends along the axial direction of the second cylinder and extends to the outside of the second cylinder through the air vent; The main shaft body is a hollow structure; one end of the main shaft body away from the transmission shaft has an opening, and a detection rod is provided in the main shaft body, the detection rod is coaxially arranged with the main shaft body, and the outer diameter of the detection rod is smaller than the inner diameter of the main shaft body; The detection rod is fixedly connected to a second rod body, the second rod body extends along the axial direction of the main shaft body and extends outside the main shaft body through the opening; the first rod body and the second rod body are fixedly connected by a connecting rod; A mounting blind hole is provided on the side wall of the detection rod, and the mounting blind hole is arranged along the radial direction of the detection rod. A detection column is slidably fitted in the mounting blind hole, and a second elastic member is abutted between the detection column and the bottom of the mounting blind hole, so that the detection column always abuts against the inner side wall of the main shaft body; The detection column is made of conductive material, a conductive ring is embedded in the hole wall of the installation blind hole, the conductive ring is sleeved on the detection column and is electrically connected with the detection column; the detection column and the conductive ring constitute a detection terminal; The detection rod has a plurality of detection terminals, and the detection columns of the detection terminals have different orientations; two groups of the detection terminals constitute a detection unit, and in the detection unit, the conductive rings of the two groups of the detection terminals are electrically connected; The inner side wall of the main shaft body has a conductive coating, and the conductive coating extends in a strip shape along the axial direction of the main shaft body; along the circumference of the main shaft body, a plurality of conductive coatings are distributed at intervals; The transmission device also has a detection circuit; each detection unit is correspondingly configured with two conductive coatings, one conductive coating is electrically connected to one pole of the detection circuit and fits with one detection column of the detection unit, and the other conductive coating is electrically connected to the other pole of the detection circuit and fits with the other detection column of the detection unit; Wherein, the resistance per unit length of the conductive coating is kept constant; The detection circuit is electrically connected to the processor, and the processor is used to determine whether the main shaft body is deformed according to the current change data of the detection circuit.

5. The transmission device according to claim 4, characterized in that: When the processor determines whether the main shaft body is deformed based on the current change data of the detection circuit, it includes: if the current value of the detection circuit increases, the inner side wall of the main shaft body has a convex deformation; if the current value of the detection circuit decreases, the inner side wall of the main shaft body has a concave deformation.

6. A gallium nitride production system, characterized in that: include: A driving mechanism, a gallium nitride production reactor and a transmission device as claimed in any one of claims 1 to 5; The main shaft body is a lead screw, and the main shaft body is matched with a moving sleeve, and the moving sleeve is fixedly connected with a moving seat; the driving mechanism and the main shaft body are matched by the transmission shaft; the gallium nitride production reactor includes a first furnace body and a second furnace body, the first furnace body is fixedly installed, and the second furnace body is installed on the moving seat; The driving mechanism is used to drive the main shaft body to separate the second furnace body from the first furnace body and to make the second furnace body cooperate with the first furnace body.

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