Air temperature fine adjustment device for semiconductor temperature control equipment

Abstract

The invention belongs to the technical field of temperature control, and discloses an air temperature fine adjustment device for semiconductor temperature control equipment, which comprises a machine body, a chemical filter, a static pressure box and an electric control system are arranged in the machine body, an air volume adjusting valve is arranged at the top of the machine body, and an air temperature fine adjustment device is arranged on the air volume adjusting valve. The temperature difference between the machine body air outlet heat preservation air pipe and the main equipment air inlet can be automatically adjusted without a main equipment communication interface or a high-precision air conditioner liquid adjustment compound machine device, output control is directly conducted through the air temperature fine adjustment device, heat loss in the heat preservation air pipe transmission process is compensated, and the purpose of precise temperature control is achieved. The device is simple in design, easy to machine and install, free of special machining, low in cost, capable of achieving automatic operation, convenient to use by customers, capable of reducing manual intervention, stable and continuous in temperature output and simple in control logic.

Description

Technical Field

[0001] The invention belongs to the technical field of temperature control, and in particular relates to an air temperature fine-tuning device for semiconductor temperature control equipment. Background Art

[0002] In the precision industrial field of semiconductor manufacturing, the air outlet temperature of the air conditioning side of the high-precision air conditioning liquid conditioning compound machine device is crucial for the precise control of the ambient air temperature and humidity in the exposure equipment, coating / developing equipment and process chamber in semiconductor production; because the semiconductor factory end is limited by factors such as site, space, electrical quality conditions, factory layout, etc., the main equipment and the high-precision air conditioning liquid conditioning compound machine device are often not on the same floor, and are usually arranged up and down; the air outlet on the air conditioning side of the high-precision air conditioning liquid conditioning compound machine device provides air volume with set temperature and humidity, and is connected to the cavity of the main equipment through PU air ducts or insulation air ducts; after being transmitted through several meters of PU air ducts and insulation air ducts, when it reaches the inlet of the main equipment, the temperature will change due to heat loss, and the temperature of the main equipment inlet will often be lower than the temperature of the air outlet on the air conditioning side of the high-precision air conditioning liquid conditioning compound machine device, affecting the stability of temperature control and thus affecting product quality.

[0003] However, in the prior art, when the main device and the high-precision air-conditioning liquid conditioning compound machine device are controlled by Usecontrol, a temperature sensor is added to the air inlet of the main device cavity. The temperature sensor detects the temperature of the air inlet of the main device. At the same time, the temperature data of the high-precision air-conditioning liquid conditioning compound machine device is transmitted to the main station at the same time, and the difference between the two temperature sensor data is detected. The difference is input into the high-precision air-conditioning liquid conditioning compound machine device through a communication signal as an offset value. After receiving the signal, the high-precision air-conditioning liquid conditioning compound machine device performs autonomous adjustment; when the main device and the high-precision air-conditioning liquid conditioning compound machine device are controlled by Sourcecontrol, the temperature and humidity sensor data of the high-precision air-conditioning liquid conditioning compound machine device can no longer be transmitted to the main station, and the offset action can no longer be performed. The temperature of the main device air inlet is often lower than that of the air outlet of the high-precision air-conditioning liquid conditioning compound machine device, affecting the stability of temperature control.

[0004] To this end, we propose an air temperature fine-tuning device for semiconductor temperature control equipment to solve the problems existing in the prior art. The device has a simple overall structure, can be operated automatically, occupies a small space, has a good adjustment effect, is energy-efficient and easy to maintain, and can achieve precise temperature control effects. Summary of the invention

[0005] The object of the present invention is to provide an air temperature fine-tuning device for semiconductor temperature control equipment to solve the problem in the prior art proposed in the above background technology that the temperature and humidity sensor data of the high-precision air-conditioning liquid conditioning compound machine device can no longer be transmitted to the main station, and the offset action cannot be performed, and the temperature of the air inlet of the main equipment is often lower than that of the air outlet of the high-precision air-conditioning liquid conditioning compound machine device, affecting the stability of temperature control.

[0006] To achieve the above object, the present invention adopts the following technical solutions: An air temperature fine-tuning device for semiconductor temperature control equipment comprises a machine body, wherein a chemical filter, a static pressure box and an electric control system are arranged inside the machine body, an air volume regulating valve is arranged on the top of the machine body, an air temperature fine-tuning device is arranged on the air volume regulating valve, the air volume regulating valve is arranged on the top of the static pressure box, an air outlet of the static pressure box is provided with an air conditioner side air outlet temperature and humidity sensor, the static pressure box is connected to the air volume regulating valve, the end of the air volume regulating valve opposite to the static pressure box is connected to a main device, the air inlet of the main device is provided with a first temperature and humidity sensor, the electric control system is electrically connected to the air temperature fine-tuning device, and the chemical filter is arranged on one side of the inner cavity of the machine body.

[0007] Preferably, an air inlet channel for air to enter is provided at the air inlet end of the chemical filter, an evaporator coil box is provided at the air outlet end of the chemical filter, and the height of the chemical filter is the same as the height of the machine body.

[0008] Preferably, the inner cavity of the evaporator coil box is provided with a cooling and dehumidification module and a refrigeration module, the air outlet end of the evaporator coil box is provided with a waste heat recovery device, an air-conditioning refrigeration system is provided below the waste heat recovery device, and the excess heat discharged by the compressor of the air-conditioning refrigeration system is used to heat the waste heat recovery device.

[0009] Preferably, an electric heating device and an electric humidifying device are provided in the body, the electric heating device is provided with a heater for heating air, the heater is provided with a heating module, the electric humidifying device is provided with a humidifier, and the humidifier is provided with a humidifying module.

[0010] Preferably, a blower for drawing heated and humidified air into the static pressure box is provided in the machine body, the blower is arranged between the static pressure box and the electric humidification device, and a second temperature and humidity sensor is provided between the air outlet end of the blower and the air inlet end of the static pressure box.

[0011] Preferably, the air-conditioning side outlet temperature and humidity sensor and the first temperature and humidity sensor are both electrically connected to the electronic control system, the electronic control system is electrically connected to the blower, and the electronic control system is electrically connected to the second temperature and humidity sensor.

[0012] Preferably, the air volume regulating valve comprises a motor, a transmission, a gate and a valve body, the gate is slidably arranged inside the valve body, one end of the transmission is driven by the motor, and the other end of the transmission is installed on one side of the gate.

[0013] Preferably, a heat-insulating air duct is provided between the air outlet of the air volume regulating valve and the air inlet of the main equipment, the outer wall of the heat-insulating air duct is provided with a heat-insulating layer, and the heat-insulating air duct is a polyurethane air duct.

[0014] Preferably, the evaporator coil box, waste heat recovery device and electric heating device are all arranged above the air-conditioning cooling system, and a connecting side pipe is arranged between the air outlet end of the chemical filter and the electric heating device, and a third temperature and humidity sensor is arranged in the connecting side pipe.

[0015] Preferably, the electronic control system includes an operation panel and a touch screen module, the touch screen module is installed on the operation panel, the touch screen module is electrically connected to a control unit, and the control unit is electrically connected to a first temperature and humidity sensor, a second temperature and humidity sensor, a third temperature and humidity sensor, an air-conditioning side outlet temperature and humidity sensor, a heating module and a humidification module.

[0016] The air temperature fine-tuning device for semiconductor temperature control equipment proposed by the present invention has the following advantages compared with the prior art: The present invention cooperates among the air volume regulating valve, the air temperature fine-tuning device, the temperature and humidity sensor of the air outlet on the air conditioner side, and the static pressure box. The temperature difference between the insulated air duct at the air outlet of the machine body and the air inlet of the main equipment can be adjusted independently without passing through the communication interface of the main equipment and the high-precision air conditioning liquid conditioning compound machine device. The output can be directly controlled through the air temperature fine-tuning device to compensate for the heat loss in the transmission process of the insulated air duct and achieve the purpose of precise temperature control. The device is simple in design, easy to process and install, does not require special processing, and has low cost. At the same time, it realizes automated operation, is convenient for customers to use, reduces manual intervention, has stable and continuous temperature output, and has simple control logic. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a block diagram of the air conditioning system of the high-precision air conditioning liquid-adjusting compound machine of the present invention; Figure 2 It is a right view structural schematic diagram of the high-precision air conditioning liquid-adjusting compound machine air conditioner of the present invention; Figure 3 It is a left-side structural schematic diagram of the high-precision air conditioning liquid-adjusting compound machine air conditioner of the present invention; Figure 4 It is an enlarged structural schematic diagram of the air temperature fine-tuning device of the present invention.

[0018] In the figure: 1. Chemical filter; 2. Air conditioning refrigeration system; 3. Evaporator coil box; 4. Waste heat recovery device; 5. Electric heating device; 6. Electric humidification device; 7. Static pressure box; 8. Air conditioning side outlet temperature and humidity sensor; 9. Air temperature fine-tuning device; 10. Air volume regulating valve; 11. Blower; 12. Electronic control system. DETAILED DESCRIPTION

[0019] The following will be combined with the accompanying drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments. The specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention. Based on the embodiments in the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention.

[0020] The present invention provides Figure 1-4 An air temperature fine-tuning device 9 for semiconductor temperature control equipment shown in the figure comprises a body, a chemical filter 1, a static pressure box 7 and an electronic control system 12 are arranged inside the body, an air volume regulating valve 10 is arranged on the top of the body, the air temperature fine-tuning device 9 is arranged on the air volume regulating valve 10, the air volume regulating valve 10 is arranged on the top of the static pressure box 7, the air outlet of the static pressure box 7 is provided with an air-conditioning side air outlet temperature and humidity sensor 8, the static pressure box 7 is connected to the air volume regulating valve 10, the end of the air volume regulating valve 10 opposite to the static pressure box 7 is connected to the main equipment, the air inlet of the main equipment is provided with a first temperature and humidity sensor, the electronic control system 12 is electrically connected to the air temperature fine-tuning device 9, and the chemical filter 1 is arranged on one side of the inner cavity of the body.

[0021] The air inlet end of the chemical filter 1 is provided with an air inlet channel for air to enter, and the air outlet end of the chemical filter 1 is provided with an evaporator coil box 3. The height of the chemical filter 1 is the same as the height of the machine body. The chemical filter 1 uses activated carbon as the main adsorption material, and adsorbs impurities in the air through a large number of micropores on the surface of the activated carbon. These micropores provide a huge specific surface area, and harmful gases (adsorbates) in the air stick to the inner surface of the micropores through the attraction between molecules, thereby achieving a filtering effect.

[0022] The inner cavity of the evaporator coil box 3 is provided with a cooling and dehumidification module and a refrigeration module. The air outlet end of the evaporator coil box 3 is provided with a waste heat recovery device 4. An air-conditioning refrigeration system 2 is provided below the waste heat recovery device 4. The excess heat discharged by the compressor of the air-conditioning refrigeration system 2 is used to heat the waste heat recovery device 4. Refrigerant flows in the coil in the evaporator coil box 3. When the refrigerant evaporates in the coil, it absorbs heat from the surrounding air, thereby lowering the air temperature. The compressor is used to preheat the waste heat recovery device 4, thereby achieving the effect of energy saving and emission reduction, and the air temperature can be increased to a certain extent or initially reach the set requirements.

[0023] An electric heating device 5 and an electric humidifying device 6 are provided in the machine body. The electric heating device 5 is provided with a heater for heating the air, and the heater is provided with a heating module. The electric humidifying device 6 is provided with a humidifier, and the humidifier is provided with a humidifying module. The electric heating device 5 and the electric humidifying device 6 can heat and humidify air with unstable temperature, so that the air can meet customer needs after being discharged.

[0024] A blower 11 is provided in the machine body for drawing the heated and humidified air into the static pressure box 7. The blower 11 is arranged between the static pressure box 7 and the electric humidifying device 6. A second temperature and humidity sensor is provided between the air outlet end of the blower 11 and the air inlet end of the static pressure box 7. The blower 11 is used to introduce constant temperature and humidity air into the static pressure box 7, and the temperature and humidity of the air are recorded by the second temperature and humidity sensor before the constant temperature and pressure air enters the static pressure box 7, which is convenient for comparison with the air temperature in the static pressure box 7.

[0025] The air-conditioning side air outlet temperature and humidity sensor 8 and the first temperature and humidity sensor are electrically connected to the electronic control system 12, the electronic control system 12 is electrically connected to the blower 11, and the electronic control system 12 is electrically connected to the second temperature and humidity sensor. The air-conditioning side air outlet temperature and humidity sensor 8 in the static pressure box 7 is used to monitor the air temperature and humidity in the static pressure box 7, so as to detect whether the temperature before air supply can meet the requirements. The installation position is convenient and easy to install and replace.

[0026] The air volume regulating valve 10 includes a motor, a transmission, a gate and a valve body. The gate is slidably arranged inside the valve body. One end of the transmission is driven by the motor, and the other end of the transmission is installed on one side of the gate. The air with constant temperature and humidity is sent to the air inlet of the main equipment through the insulated air duct through the air volume regulating valve 10, and the air temperature is monitored by the first temperature and humidity sensor at the air inlet of the main equipment. The temperature difference between the first temperature and humidity sensor and the temperature and humidity sensor 8 at the air outlet on the air conditioning side is set as the offset value of the electronic control system 12, so that the electronic control system 12 is used to input the offset value into the air temperature fine-tuning device 9 in the air volume regulating valve 10, and the temperature compensation is precisely adjusted to achieve a temperature stabilization effect and continuous and stable product quality.

[0027] An insulating air duct is arranged between the air outlet of the air volume regulating valve 10 and the air inlet of the main equipment. The outer wall of the insulating air duct is provided with an insulating layer. The insulating air duct is a polyurethane air duct. The temperature of the air entering the main equipment is insulated by the insulating air duct, thereby avoiding excessive temperature deviation and reducing heat loss during transmission of the insulating air duct. The device occupies a small space and can be placed inside a high-precision air conditioning liquid conditioning compound machine device, without occupying additional space in the semiconductor factory.

[0028] The evaporator coil box 3, the waste heat recovery device 4 and the electric heating device 5 are all arranged above the air conditioning cooling system. A connecting side pipe is arranged between the air outlet end of the chemical filter 1 and the electric heating device 5, and a third temperature and humidity sensor is arranged in the connecting side pipe. The third temperature sensor is used to conveniently monitor the temperature of the air entering the body, so as to facilitate the use of the electric heating device 5 and the electric humidification device 6 to heat and humidify the air to a constant temperature and humidity state, so that the constant temperature and humidity air can be sent into the static pressure box 7 through the blower 11.

[0029] The electronic control system 12 includes an operation panel and a touch screen module. The touch screen module is installed on the operation panel. The touch screen module is electrically connected to a control unit. The control unit is electrically connected to a first temperature and humidity sensor, a second temperature and humidity sensor, a third temperature and humidity sensor, an air-conditioning side outlet temperature and humidity sensor 8, a heating module and a humidification module. The electronic control system 12 is used to conveniently convert the temperature difference between the first temperature and humidity sensor and the air-conditioning side outlet temperature and humidity sensor 8 into an offset value, and input the offset value into the air temperature fine-tuning device 9 to facilitate temperature compensation and close adjustment to achieve a temperature stability effect. There is no need to adjust the refrigeration system of the high-precision air-conditioning liquid conditioning compound machine device. Only the air temperature fine-tuning device 9 needs to be adjusted to save electricity.

[0030] When the main equipment and the high-precision air conditioning liquid conditioning compound machine device are controlled by Sourcecontrol, the air passes through the chemical filter 1 to filter other substances in the air, and then passes through the evaporator coil box 3 for cooling and dehumidification, and then flows to the waste heat recovery device 4, using the excess heat discharged by the compressor in the air conditioning refrigeration system 2 for preliminary temperature increase, while achieving energy conservation and emission reduction effects. At this time, the air temperature can rise partially or initially meet the set requirements, but it still cannot reach the stable control temperature. After the precise output control of the electric heating device 5 and the electric humidification device 6, the working conditions required by the customer are achieved, and the air is sucked in by the blower 11, and the constant temperature and humidity air is sent to the static pressure box 7. The air conditioning outlet temperature and humidity sensor in the static pressure box 7 is used to detect whether the temperature before air supply is After the requirements are met, it then enters the air volume regulating valve 10 and is connected to the cavity air inlet of the main equipment through the insulated air duct. The first temperature and humidity sensor is installed in the air inlet of the main equipment. There is a temperature difference between the first temperature and humidity sensor and the temperature sensor of the air outlet on the air conditioning side. The temperature difference is set to an offset value and input into the air temperature fine-tuning device 9 in the air volume regulating valve 10 through the electronic control system 12 for precise adjustment of temperature compensation to achieve a temperature stabilization effect and continuous and stable product quality. The temperature difference from the insulated air duct at the air outlet of the machine body to the air inlet of the main equipment can be adjusted independently without passing through the communication interface of the main equipment and the high-precision air conditioning liquid conditioning compound machine device, and can be directly controlled and output through the air temperature fine-tuning device 9 to compensate for the heat loss in the air duct transmission process and achieve the purpose of precise temperature control.

[0031] Finally, it should be noted that the above is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, it is still possible for those skilled in the art to modify the technical solutions described in the aforementioned embodiments or to make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. An air temperature fine-tuning device (9) for semiconductor temperature control equipment, comprising a body, characterized in that: A chemical filter (1), a static pressure box (7) and an electric control system (12) are arranged inside the machine body; an air volume regulating valve (10) is arranged on the top of the machine body; an air temperature fine-tuning device (9) is arranged on the air volume regulating valve (10); the air volume regulating valve (10) is arranged on the top of the static pressure box (7); an air outlet of the static pressure box (7) is provided with an air conditioner side air outlet temperature and humidity sensor (8); the static pressure box (7) and the air volume regulating valve (10) are connected; the end of the air volume regulating valve (10) opposite to the static pressure box (7) is connected to a main device; the air inlet of the main device is provided with a first temperature and humidity sensor; the electric control system (12) is electrically connected to the air temperature fine-tuning device (9); and the chemical filter (1) is arranged on one side of the inner cavity of the machine body.

2. The air temperature fine-tuning device (9) for semiconductor temperature control equipment according to claim 1, characterized in that: An air inlet channel for air to enter is arranged at the air inlet end of the chemical filter (1), an evaporator coil box (3) is arranged at the air outlet end of the chemical filter (1), and the height of the chemical filter (1) is the same as that of the machine body.

3. The air temperature fine-tuning device (9) for semiconductor temperature control equipment according to claim 2, characterized in that: The inner cavity of the evaporator coil box (3) is provided with a cooling and dehumidification module and a refrigeration module, the air outlet end of the evaporator coil box (3) is provided with a waste heat recovery device (4), an air conditioning and refrigeration system (2) is provided below the waste heat recovery device (4), and the waste heat discharged by the compressor of the air conditioning and refrigeration system (2) is used to heat the waste heat recovery device (4).

4. The air temperature fine-tuning device (9) for semiconductor temperature control equipment according to claim 3, characterized in that: An electric heating device (5) and an electric humidifying device (6) are provided in the machine body; a heater for heating air is provided in the electric heating device (5); a heating module is provided in the heater; a humidifier is provided in the electric humidifying device (6); a humidifier is provided in the humidifier.

5. The air temperature fine-tuning device (9) for semiconductor temperature control equipment according to claim 4, characterized in that: A blower (11) is provided in the machine body for drawing heated and humidified air into the static pressure box (7); the blower (11) is provided between the static pressure box (7) and the electric humidifying device (6); and a second temperature and humidity sensor is provided between an air outlet end of the blower (11) and an air inlet end of the static pressure box (7).

6. The air temperature fine-tuning device (9) for semiconductor temperature control equipment according to claim 5, characterized in that: The air-conditioning side air outlet temperature and humidity sensor (8) and the first temperature and humidity sensor are both electrically connected to the electric control system (12), the electric control system (12) is electrically connected to the blower (11), and the electric control system (12) is electrically connected to the second temperature and humidity sensor.

7. The air temperature fine-tuning device (9) for semiconductor temperature control equipment according to claim 6, characterized in that: The air volume regulating valve (10) comprises a motor, a transmission, a gate plate and a valve body, wherein the gate plate is slidably arranged inside the valve body, one end of the transmission is driven by the motor, and the other end of the transmission is mounted on one side of the gate plate.

8. The air temperature fine-tuning device (9) for semiconductor temperature control equipment according to claim 7, characterized in that: A heat-insulating air duct is provided between the air outlet of the air volume regulating valve (10) and the air inlet of the main equipment, the outer wall of the heat-insulating air duct is provided with a heat-insulating layer, and the heat-insulating air duct is a polyurethane air duct.

9. The air temperature fine-tuning device (9) for semiconductor temperature control equipment according to claim 8, characterized in that: The evaporator coil box (3), the waste heat recovery device (4) and the electric heating device (5) are all arranged above the air conditioning cooling system, and a connecting side pipe is arranged between the air outlet end of the chemical filter (1) and the electric heating device (5), and a third temperature and humidity sensor is arranged in the connecting side pipe.

10. The air temperature fine-tuning device (9) for semiconductor temperature control equipment according to claim 9, characterized in that: The electric control system (12) comprises an operation panel and a touch screen module, wherein the touch screen module is mounted on the operation panel, and the touch screen module is electrically connected to a control unit, wherein the control unit is electrically connected to a first temperature and humidity sensor, a second temperature and humidity sensor, a third temperature and humidity sensor, an air outlet temperature and humidity sensor (8) on the air conditioner side, a heating module, and a humidification module.

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