A scanning electron microscope assembly leak detection tool

Abstract

The application relates to the technical field of scanning electron microscopes, and discloses a scanning electron microscope assembly leak detection tool, which comprises a vacuum chamber arranged in a tool body, a plurality of interfaces arranged on the tool body, a plurality of scanning electron microscope assemblies to be detected connected with the plurality of interfaces, and a leak detector communicated with the vacuum chamber. When the leak detector is started and test gas is injected into the connection between the scanning electron microscope assembly to be detected and the interface by a gas injection structure, if the leak rate value displayed on the leak detector is less than a leak rate setting value, it is determined that the leak rate of the scanning electron microscope assembly to be detected is qualified; otherwise, it is determined that the leak rate of the scanning electron microscope assembly to be detected is unqualified. The technical scheme of the application significantly improves the leak detection efficiency, helps to improve the on-site cleaning and tidiness, simplifies the leak detection process, and has a simpler structure, easier operation and lower cost compared with an automatic leak detection tool.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of scanning electron microscopy, in particular to a scanning electron microscope assembly leak detection tool. BACKGROUND

[0002] Scanning electron microscope, abbreviated as SEM, is a large high-resolution precision instrument for micro-area topography analysis. SEM uses a highly focused narrow high-energy electron beam to scan the sample surface. High-energy electron beam interacts with the sample surface to produce various signal electrons. By detecting various signal electrons, an image representing the micro-topography of the sample surface is obtained. Due to the large depth of field, high resolution, intuitive imaging, strong three-dimensional effect, wide range of magnification, and the ability of the sample to rotate and tilt in three-dimensional space, SEM has a wide range of applications in chemical industry, material analysis, biomedical science, and teaching and scientific research.

[0003] SEM is a complex vacuum system, including a large number of interconnected SEM components. Leak detection of SEM components is a necessary step in assembling SEM. When performing overall leak detection on SEM, each SEM component needs to be checked one by one to locate the leak. Due to the large number of connection points of the SEM components, it takes at least one to two days to check the leak. The above-mentioned overall leak detection method of SEM requires a large amount of time and labor cost. SUMMARY

[0004] Therefore, the present application provides a SEM component leak detection tool to solve the problem of time and labor cost in the overall leak detection of SEM.

[0005] The present application provides a SEM component leak detection tool, comprising:

[0006] A tool body having a vacuum chamber inside, a plurality of interfaces provided on the tool body; the plurality of interfaces are in communication with the vacuum chamber; a plurality of to-be-tested SEM components are connected to the plurality of interfaces respectively;

[0007] A leak detector in communication with the vacuum chamber through an external hole provided on the tool body;

[0008] A gas injection structure adapted to inject test gas into the connection between the plurality of to-be-tested SEM components and the plurality of interfaces one by one;

[0009] The scanning electron microscope assembly leak detection tool is suitable for injecting test gas into the connection between the interface and the scanning electron microscope assembly to be tested when starting the leak detector, and when the leak rate value displayed on the leak detector is less than the leak rate set value, it is determined that the leak rate of the scanning electron microscope assembly to be tested is qualified, otherwise, it is determined that the leak rate of the scanning electron microscope assembly to be tested is unqualified. Beneficial effects: the technical scheme of the present application can complete the leak detection task of the scanning electron microscope assembly to be tested at one time, and significantly improve the efficiency of the leak detection process. At the same time, the scanning electron microscope assembly leak detection tool has the advantages of small size, strong expandability and wide application; it is helpful to improve the cleanliness and orderliness of the site and simplify the existing complex leak detection process. In addition, compared with the automatic leak detection tool, the scanning electron microscope assembly leak detection tool has the advantages of simple structure, easy operation and low cost.

[0010] Optionally, the scanning electron microscope assembly to be tested and the interface are connected through a flange structure, and a sealing ring is arranged between the flange structure and the interface; the scanning electron microscope assembly to be tested, the flange structure, the sealing ring and the interface are fastened and connected through a plurality of fasteners.

[0011] Optionally, the sealing ring is an O-ring. Beneficial effects: the scanning electron microscope assembly leak detection tool of the present application has no welding structure, compared with the traditional welding process, the O-ring is used for sealing, and the welding step is saved, thereby saving a process and making the production more efficient and convenient; and the processing cost is saved.

[0012] Optionally, the fastener is a screw. Beneficial effects: the scanning electron microscope assembly leak detection tool has the advantages of simple structure, convenient maintenance and convenient cleaning of the vacuum chamber by using the screw connection. At the same time, it can be repeatedly disassembled and reused frequently.

[0013] Optionally, the scanning electron microscope assembly to be tested includes a scanning coil, a beam shutter of a high-position detector and a movable diaphragm. Beneficial effects: the scanning electron microscope assembly leak detection tool can be quickly leak detected without any additional switching and disassembly.

[0014] Optionally, the scanning electron microscope assembly to be tested further includes a cutoff valve; one end of the cutoff valve is connected with the interface; the other end of the cutoff valve penetrating the vacuum chamber is provided with an air hole, and the air hole is in communication with a leak detection hole provided on the tool body; the leak detection hole is adapted to be in communication with the outside; the scanning electron microscope assembly leak detection tool has a first leak detection state of injecting test gas into the air hole of the cutoff valve, and a second leak detection state of installing a first blind plate on the leak detection hole to close the air hole. Beneficial effects: the scanning electron microscope assembly leak detection tool can not only leak detect the connection of the cutoff valve, but also quickly leak detect the sealing property of the cutoff valve itself.

[0015] Optionally, the test gas is helium. Advantage: the application adopts the above technical solution, which is beneficial to save helium.

[0016] Optionally, a standby interface is further arranged on the tool body and communicates with the vacuum chamber; the standby interface has a first state of connecting extra scanning electron microscope components to be tested, a second state of closing the standby interface by a second blind plate, and a third state of connecting a cleaning instrument, closing the external hole and all interfaces by a third blind plate, and cleaning the scanning electron microscope components to be tested in the vacuum chamber by plasma. Advantage: the application adopts the above technical solution, which can be used to connect and switch other scanning electron microscope components to be tested for rapid leak detection; at the same time, the scanning electron microscope components to be tested can be cleaned, the application range of the scanning electron microscope component leak detection tool is expanded, one tool is used for multiple purposes, and enterprise costs are significantly reduced.

[0017] Optionally, the cleaning instrument is a plasma cleaning instrument.

[0018] The scanning electron microscope component leak detection tool further comprises:

[0019] A window flange is arranged on an opening provided on the top surface of the tool body, and the opening communicates with the vacuum chamber.

[0020] A transparent piece is arranged between the window flange and the tool body; the scanning electron microscope component leak detection tool is adapted to observe the inside of the vacuum chamber through the transparent piece. Advantage: the application adopts the above technical solution, which can conveniently observe the cleaning status of the scanning electron microscope components to be tested when the scanning electron microscope components to be tested are cleaned by the scanning electron microscope component leak detection tool, ensures the cleaning quality of the scanning electron microscope components to be tested, and guarantees the reliability of the overall performance of the subsequent scanning electron microscope.

[0021] Optionally, the scanning electron microscope component leak detection tool further comprises:

[0022] A rack is arranged on which the tool body is placed; the rack is adapted to support the tool body. Advantage: the application adopts the above technical solution, which is convenient to operate and move. BRIEF DESCRIPTION OF DRAWINGS

[0023] In order to more clearly illustrate the specific embodiments of the present application or the technical solutions in the prior art, the following will briefly introduce the drawings needed to be used in the description of the specific embodiments or the prior art. Obviously, the drawings in the following description are some embodiments of the present application, and those skilled in the art can obtain other drawings according to these drawings without creative labor.

[0024] Figure 1A perspective view of a scanning electron microscope assembly leak detection tool according to an embodiment of the present application is shown in FIG. 1.

[0025] Figure 2 A partial top view of a scanning electron microscope assembly leak detection tool according to an embodiment of the present application is shown in FIG. 2.

[0026] Figure 3 A partial perspective view of a scanning electron microscope assembly leak detection tool according to an embodiment of the present application is shown in FIG. 3. Figure 1

[0027] Figure 4 A partial perspective view of a scanning electron microscope assembly leak detection tool according to an embodiment of the present application is shown in FIG. 4. Figure 2

[0028] Figure 5 A perspective view of a tool body according to an embodiment of the present application is shown in FIG. 5.

[0029] Reference Signs List:

[0030] 1, tool body; 2, vacuum chamber; 3, interface; 4, external hole; 5, connecting pipe; 6, movable diaphragm; 7, isolation valve; 8, vent hole; 9, leak detection hole; 10, first blind plate; 11, spare interface; 12, second blind plate; 13, window flange; 14, opening; 15, transparent piece; 16, stand. DETAILED DESCRIPTION

[0031] In order to make the objects, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be described clearly and completely below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are some but not all of the embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative work fall within the protection scope of the present application.

[0032] When performing overall leak detection on a vacuum system, if the parts and components of the vacuum system are not disassembled and leak detection is performed, it is not very convenient to inject helium when injecting helium into the part to be measured due to the complex positional relationship of the parts, which leads to a lot of helium wasted in actual operation. The scanning electron microscope can also perform leak detection on the parts of the scanning electron microscope component to be measured involved in the vacuum system before assembly. However, the scanning electron microscope components to be measured are numerous, and the types of interfaces are various. When leak detection is performed, the detection personnel need to find the adapter that matches the leak detector for connection, which seriously affects the work efficiency. In addition, the adapter usually needs to be customized for non-standard interfaces, and a large number of adapters are prone to be lost and inconvenient to summarize, which seriously affects the leak detection efficiency and the degree of cleanliness and tidiness of the site. Due to the above reasons, the present application provides a scanning electron microscope component leak detection tool.​​

[0033] like Figures 1 to 5 One specific embodiment of the scanning electron microscope (SEM) assembly leak detection fixture shown includes: a fixture body 1, a leak detector, a gas injection structure, a viewing window flange 13, a transparent component 15, and a stand 16. This SEM assembly leak detection fixture is used for efficient leak detection of the SEM assembly under test.

[0034] like Figure 1 , Figure 2 and Figure 5 As shown, the tooling body 1 is placed on the support platform 16; the support platform 16 is adapted to support the tooling body 1, and the support platform 16 can be a cuboid frame connected by profiles, with a flat plate set on the cuboid frame. The tooling body 1 has a vacuum chamber 2 inside; specifically, the vacuum level in the vacuum chamber 2 is generally a medium vacuum level, and the vacuum level range in the vacuum chamber 2 is: 10... 3 Pa~10 -1Pa. The design size of the jig body 1 is consistent with the scanning electron microscope valve body, so it can be well compatible with the interface of the scanning electron microscope assembly to be tested. In addition, its small size helps to reduce the exhaust time and save space. A plurality of interfaces 3 are provided on the jig body 1; the plurality of interfaces 3 are in communication with the vacuum chamber 2; a plurality of scanning electron microscope assemblies to be tested are connected with the plurality of interfaces 3 respectively. The leak detector is in communication with the vacuum chamber 2 through the external connection hole 4 provided on the jig body 1. Specifically, the flange structure provided on the leak detector is connected with the external connection hole 4 through the connection pipe 5 provided with the flange structure. The gas injection structure is suitable for injecting test gas one by one to the connection between the plurality of scanning electron microscope assemblies to be tested and the plurality of interfaces 3; specifically, the gas injection structure can inject test gas through a pipe; the test gas is helium. The reason for choosing helium as the test gas is that: first, helium is harmless to the human body and the natural environment; second, helium is a non-combustible gas, which is safe to operate; third, helium is a rare gas, which will not react with the measured object; fourth, the molecular diameter and mass of helium are small, which can easily pass through small gaps and facilitate leak detection; fifth, helium remains in a gaseous state under normal circumstances and will not block the micro-leakage hole; sixth, the residual gas in the vacuum system almost does not contain helium; seventh, the content of helium in the air is only 5ppm, which is easy to find the location of the gas leak. The leak detector can be a special instrument for helium leak detection. When the leak detector is started and the gas injection structure injects test gas into the connection between the currently tested scanning electron microscope assembly and the interface 3, if the leak rate value displayed on the leak detector is less than the set leak rate value, it is determined that the leak rate of the currently tested scanning electron microscope assembly is qualified, otherwise, it is determined that the leak rate of the currently tested scanning electron microscope assembly is unqualified, and the currently tested scanning electron microscope assembly needs to be checked and repaired, and re-leak detection is performed until the leak rate value is less than the set leak rate value. If the leak rate value displayed by the leak detector at the position where the test gas is injected is less than the set leak rate value, there is a leak point at this position. Specifically, the scanning electron microscope assembly to be tested includes a scanning coil, a beam shutter of a high-position detector, a movable diaphragm 6, and a partition valve 7.

[0035] As shown in Figures 1 to 4 , the scanning electron microscope assembly to be tested is connected with the interface 3 through the flange structure, and a sealing ring is provided between the flange structure and the interface 3; the scanning electron microscope assembly to be tested, the flange structure, the sealing ring and the interface 3 are fastened and connected by a plurality of fasteners. Specifically, the sealing ring is an O-ring; the fastener is a screw.

[0036] As shown in Figure 3 and Figure 4As shown, one end of the isolation valve 7 is connected to the interface 3; the other end of the isolation valve 7, which penetrates the vacuum chamber 2, is provided with a vent 8, which communicates with a leak detection hole 9 provided on the fixture body 1; the leak detection hole 9 is adapted to communicate with the outside; the leak detection hole 9 can be set on the bottom surface of the fixture body 1. The scanning electron microscope assembly leak detection fixture has a first leak detection state in which test gas is injected into the vent 8 of the isolation valve 7; and a second leak detection state in which a first blind plate 10 is installed on the leak detection hole 9 to seal the vent 8. In the second leak detection state, the connection of the isolation valve 7 can be leak-detected through the gas injection structure. The isolation valve 7 has a simple structure and is used to seal the gun chamber in the ultra-high vacuum field of the scanning electron microscope; when the current scanning electron microscope assembly under test is the isolation valve 7, the leak rate setting value is 1×10. - 10 mbar.L / s.

[0037] Furthermore, such as Figures 3 to 5 As shown, the fixture body 1 is also provided with a spare interface 11 communicating with the vacuum chamber 2; the spare interface 11 has a first state for connecting excess scanning electron microscope (SEM) components to be tested, a second state for sealing the spare interface 11 by a second blind plate 12, and a third state for connecting a cleaning device, sealing the external holes and all interfaces by a third blind plate, and cleaning the SEM components to be tested placed in the vacuum chamber using plasma cleaning. Specifically, the cleaning device is a plasma cleaner.

[0038] like Figure 1 , Figure 2 and Figure 5 As shown, the viewing flange 13 is mounted on an opening 14 on the top surface of the fixture body 1, and the opening 14 communicates with the vacuum chamber 2. A transparent element 15 is disposed between the viewing flange 13 and the fixture body 1; the scanning electron microscope leak detection fixture is adapted to observe the interior of the vacuum chamber 2 through the transparent element 15. The transparent element 15 can be an acrylic sheet.

[0039] Although embodiments of the invention have been described in conjunction with the accompanying drawings, those skilled in the art can make various modifications and variations without departing from the spirit and scope of the invention, and such modifications and variations all fall within the scope defined by the appended claims.

Claims

1. A leak detection fixture for a scanning electron microscope assembly, characterized in that, include: The tooling body (1) has a vacuum chamber (2) inside, and multiple interfaces (3) are provided on the tooling body (1); the multiple interfaces (3) are connected to the vacuum chamber (2); multiple scanning electron microscope components to be tested are respectively connected to the multiple interfaces (3); The leak detector is connected to the vacuum chamber (2) through the external connection hole (4) provided on the tool body (1); The gas injection structure is suitable for injecting test gas into the connection points of multiple scanning electron microscope components under test and multiple interfaces (3) one by one; The scanning electron microscope (SEM) component leak detection fixture is suitable for starting the leak detector and injecting test gas into the connection between one of the current SEM components under test and the interface (3). If the leak rate value displayed on the leak detector is less than the leak rate setting value, the leak rate of the current SEM component under test is determined to be qualified; otherwise, the leak rate of the current SEM component under test is determined to be unqualified. The scanning electron microscope assembly to be tested includes: a scanning coil, a high-position detector's beadlock, and a movable aperture (6). The scanning electron microscope assembly under test further includes: a shut-off valve (7); one end of the shut-off valve (7) is connected to the interface (3); the other end of the shut-off valve (7) penetrating the vacuum chamber (2) is provided with a vent (8), the vent (8) is connected to a leak detection hole (9) provided on the fixture body (1); the leak detection hole (9) is adapted to communicate with the outside; the scanning electron microscope assembly leak detection fixture has a first leak detection state of injecting test gas into the vent (8) of the shut-off valve (7); and a second leak detection state of installing a first blind plate (10) on the leak detection hole (9) to close the vent (8); The test gas is helium; The tooling body (1) is also provided with a spare interface (11) that communicates with the vacuum chamber (2); the spare interface (11) has a first state of connecting excess scanning electron microscope components to be tested, a second state of closing the spare interface (11) by a second blind plate (12); and a third state of connecting a cleaning device, closing the external hole (4) and all interfaces (3) by a third blind plate, and cleaning the scanning electron microscope components to be tested placed in the vacuum chamber (2) by a plasma cleaning device. The cleaning device is a plasma cleaner.

2. The scanning electron microscope assembly leak detection fixture according to claim 1, characterized in that, The scanning electron microscope assembly under test and the interface (3) are connected by a flange structure, and a sealing ring is provided between the flange structure and the interface (3); the scanning electron microscope assembly under test, the flange structure, the sealing ring and the interface (3) are fastened together by multiple fasteners.

3. The scanning electron microscope assembly leak detection fixture according to claim 2, characterized in that, The sealing ring is an O-ring.

4. The scanning electron microscope assembly leak detection fixture according to claim 2, characterized in that, The fastener is a screw.

5. The scanning electron microscope assembly leak detection fixture according to claim 1, characterized in that, The scanning electron microscope assembly leak detection fixture also includes: A viewing flange (13) is installed on an opening (14) on the top surface of the tooling body (1), and the opening (14) is connected to the vacuum chamber (2); A transparent element (15) is disposed between the viewing flange (13) and the tooling body (1); the scanning electron microscope assembly leak detection tooling is adapted to observe the interior of the vacuum chamber (2) through the transparent element (15).

6. The scanning electron microscope assembly leak detection fixture according to any one of claims 1-4, characterized in that, Also includes: The tool body (1) is placed on the stand (16); The stand (16) is adapted to support the tooling body (1).

Images