Near-field image data output system, method, control device, computer equipment, storage medium and program product of laser chip
By designing the near-field image data output system of the laser chip, only the energy distribution data of the illuminated luminous channel is output, which solves the problem of data storage pressure in multi-channel laser chip testing, and achieves a significant reduction in data output and a reduction in storage pressure.
Patent Information
- Application Number
- CN202510018509.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Filing Date
- 2025-01-06
- Publication Date
- 2025-05-16
- Estimated Expiration
- 2045-01-06
AI Technical Summary
The energy distribution test of the exit surface of multi-channel laser chips puts great pressure on data storage resources, mainly because traditional testing methods require independent exposure and data acquisition of each luminous channel, resulting in a small proportion of effective data in the collected data.
A near-field image data output system for laser chips is designed, and each light emitting channel is sequentially lit by a driving device. The image acquisition device exposes light when each channel is lit, and only outputs energy distribution data containing the lit luminous channel to avoid outputting data of the unlit channel.
The storage pressure of data storage resources is effectively reduced, and the data output is significantly reduced by outputting only effective energy distribution data.
Smart Images

Figure CN119437661B_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the field of chip testing technology, and in particular to a near-field image data output system for a laser chip, a near-field image data output method for a laser chip, a control device, a computer device, a computer-readable storage medium, and a computer program product. Background Art
[0002] The energy distribution parameter of the output surface is a commonly used evaluation index of laser chips. This index is also called near-field light distribution.
[0003] Some laser chips include multiple light-emitting channels. For such chips, testing the energy distribution state of the chip's emission surface creates a huge pressure on data storage resources. Summary of the invention
[0004] Based on this, it is necessary to provide a near-field image data output system for a laser chip, a near-field image data output method for a laser chip, a control device, a computer device, a computer-readable storage medium and a computer program product to address the above technical problems.
[0005] A near-field image data output system for a laser chip is configured to test a laser chip to be tested, wherein the laser chip to be tested includes a plurality of light-emitting channels, including:
[0006] A driving device, configured to drive each of the light-emitting channels in sequence according to a preset logic, so that each of the light-emitting channels is illuminated in sequence;
[0007] An image acquisition device, configured to expose the laser chip to be tested once when each light-emitting channel is illuminated to obtain energy distribution data including the illuminated light-emitting channels and the unilluminated light-emitting channels; and
[0008] The image acquisition device is also configured to output the energy distribution data containing only the illuminated light-emitting channel in the energy distribution data as target near-field image data.
[0009] In one embodiment, the laser chip testing system further includes a control device, which is respectively connected to the driving device and the image acquisition device, and the control device is configured to send multiple trigger signals; wherein each of the trigger signals is configured to trigger the driving device and the image acquisition device to work once according to a first corresponding relationship, and the first corresponding relationship is the corresponding relationship between the number of occurrences of the trigger signal and the channel number of the light-emitting channel.
[0010] In one of the embodiments, the first corresponding relationship is sent by the control device to the driving device and the image acquisition device.
[0011] In one of the embodiments, the control device is further configured to output a second corresponding relationship to the image acquisition device, wherein the second corresponding relationship is a corresponding relationship between the light emitting channel and the target area;
[0012] The image acquisition device is configured to output the energy distribution data of the target area where the illuminated light-emitting channel is located in the energy distribution data as target near-field image data according to the second corresponding relationship.
[0013] In one embodiment, the second corresponding relationship is established based on the relationship between the energy distribution data of each single channel of the calibration laser chip and the target area where the corresponding single channel is located.
[0014] In one embodiment, the light emitting channel includes a plurality of light emitting holes, each of which is located in the same target area.
[0015] In one embodiment, the shape of the target area is determined according to the arrangement of the light-emitting holes.
[0016] In one embodiment, the light emitting channel includes a plurality of light emitting holes, and the target area includes a plurality of sub-target areas; wherein one sub-target area corresponds to one light emitting hole.
[0017] In one of the embodiments, an image stitching device is further included. The image stitching device is connected to the image acquisition device and is configured to stitch the target near-field image data of each of the light-emitting channels to form a target near-field image.
[0018] In one embodiment, the preset logic includes any one of row-by-row selection, column-by-column selection, or row-column cross selection.
[0019] In one embodiment, the light-emitting channels on the laser chip to be tested are distributed in a regular array, a random array, or a staggered array.
[0020] Based on the same inventive concept, the present application also provides a near-field image data output method of a laser chip, wherein the laser chip includes a plurality of light-emitting channels, and the method includes:
[0021] According to the preset logic, a target light emitting channel is selected on the laser chip to be tested;
[0022] Sending a trigger signal, wherein the trigger signal is configured to trigger a driving device to light up the target light-emitting channel, and trigger an image acquisition device to perform a single exposure on the laser chip to be tested, so as to obtain energy distribution data including the lighted target light-emitting channel and the unlighted light-emitting channel;
[0023] The image acquisition device is controlled to output the energy distribution data containing only the energy distribution data of the illuminated target light emitting channel as the target near-field image data.
[0024] In one embodiment, the controlling the image acquisition device to output only the energy distribution data of the illuminated target light emitting channel in the energy distribution data as the target near-field image data comprises:
[0025] The energy distribution data of the target area where the illuminated light-emitting channel is located in the energy distribution data is output as target near-field image data.
[0026] In one embodiment, the light emitting channel includes a plurality of light emitting holes, each of which is located in the same target area.
[0027] In one embodiment, the shape of the target area is determined according to the arrangement of the light-emitting holes.
[0028] In one embodiment, the light emitting channel includes a plurality of light emitting holes, and the target area includes a plurality of sub-target areas; wherein one sub-target area corresponds to one light emitting hole.
[0029] In one embodiment, the method for determining the target area includes:
[0030] The target area corresponding to the target light emitting channel is determined according to the target light emitting channel and a second corresponding relationship, wherein the second corresponding relationship is a corresponding relationship between the light emitting channel and the target area corresponding to the light emitting channel.
[0031] In one embodiment, the method for acquiring the second corresponding relationship includes:
[0032] Acquiring single-channel energy distribution data of each light-emitting channel of a calibration laser chip, wherein the calibration laser chip has the same structure as the laser chip to be measured;
[0033] Based on the single-channel energy distribution data, the target area of the corresponding light emitting channel is calibrated.
[0034] In one embodiment, after controlling the image acquisition device to output the energy distribution data containing only the energy distribution data of the illuminated target light emitting channel as the target near-field image data, the method includes:
[0035] The target near-field image data of each target light-emitting channel are spliced to form a target near-field image.
[0036] In one embodiment, the preset logic includes row-by-row selection, column-by-column selection, or row-column cross selection.
[0037] In one embodiment, the light-emitting channels on the laser chip to be tested are distributed in a regular array, a random array, or a staggered array.
[0038] Based on the same inventive concept, the present application also provides a control device, the device comprising:
[0039] A selection module is configured to select a target light emitting channel on the laser chip to be tested according to a preset logic;
[0040] A trigger module is configured to send a trigger signal, wherein the trigger signal is configured to trigger the driving device to light up the target light-emitting channel and trigger the image acquisition device to perform a single exposure on the laser chip to be tested, so as to obtain energy distribution data including the lighted target light-emitting channel and the unlighted light-emitting channel;
[0041] The output control module is configured to control the image acquisition device to output only the energy distribution data of the illuminated target light-emitting channel in the energy distribution data as the target near-field image data.
[0042] Based on the same inventive concept, the present application also provides a computer device, including a memory and a processor, wherein the memory stores a computer program, and is characterized in that the processor implements the steps of any of the above-described methods when executing the computer program.
[0043] Based on the same inventive concept, the present application also provides a computer-readable storage medium on which a computer program is stored, characterized in that when the computer program is executed by a processor, the steps of any of the methods described above are implemented.
[0044] Based on the same inventive concept, the present application also provides a computer program product, including a computer program, characterized in that when the computer program is executed by a processor, the steps of any of the methods described above are implemented.
[0045] In the above-mentioned near-field image data output system of the laser chip, near-field image data output method of the laser chip, control device, computer equipment, computer-readable storage medium and computer program product, when the image acquisition device outputs the energy distribution data of a single light-emitting channel, only the energy distribution data of the light-emitting channel that is lit is output, and the energy distribution data of the light-emitting channel that is not lit is not output, that is, not all the data obtained by the exposure of the image acquisition device is output. Therefore, the amount of data outputted by the image acquisition device can be greatly reduced, thereby effectively reducing the storage pressure on data storage resources. BRIEF DESCRIPTION OF THE DRAWINGS
[0046] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the conventional technology, the drawings required for use in the embodiments or the conventional technology descriptions are briefly introduced below. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.
[0047] Figure 1 It is a schematic diagram of a near-field image of a single light-emitting channel in the prior art;
[0048] Figure 2 is a structural block diagram of a near-field image data output system of a laser chip in one embodiment;
[0049] Figure 3 is a structural block diagram of a near-field image data output system of a laser chip in another embodiment;
[0050] Figure 4 is a structural block diagram of a near-field image data output system of a laser chip in yet another embodiment;
[0051] Figure 5 1 is a flow chart of a method for outputting near-field image data of a laser chip in one embodiment;
[0052] Figure 6 is a timing diagram of a laser chip test in one embodiment;
[0053] Figure 7 is a structural block diagram of an image acquisition device in one embodiment;
[0054] Figure 8 is a schematic diagram of a target near-field image in one embodiment;
[0055] Fig. 9 FIG. 4 is a structural block diagram of a control device in one embodiment.
[0056] Description of reference numerals:
[0057] 100 - driving device, 200 - image acquisition device, 210 - exposure module, 211 - exposure unit, 212 - storage unit, 213 - reading unit, 220 - acquisition control module, 300 - control device, 310 - selection module, 320 - trigger module, 330 - output control module. DETAILED DESCRIPTION
[0058] In order to facilitate understanding of the present application, the present application will be described more fully below with reference to the relevant drawings. Embodiments of the present application are provided in the drawings. However, the present application can be implemented in many different forms and is not limited to the embodiments described herein. On the contrary, the purpose of providing these embodiments is to make the disclosure of the present application more thorough and comprehensive.
[0059] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art to which this application belongs. The terms used herein in the specification of this application are only for the purpose of describing specific embodiments and are not intended to limit this application.
[0060] It can be understood that the terms "first", "second", etc. used in the present application can be used in this article to describe various elements, but these elements are not limited by these terms. These terms are only used to distinguish the first element from another element.
[0061] It should be noted that when an element is considered to be "connected" to another element, it can be directly connected to the other element, or connected to the other element through an intermediate element. In addition, the "connection" in the following embodiments should be understood as "electrical connection", "communication connection", etc. if there is transmission of electrical signals or data between the connected objects.
[0062] When used herein, the singular forms "a", "an", and "said / the" may also include plural forms, unless the context clearly indicates otherwise. It should also be understood that the terms "include / comprise" or "have" and the like specify the presence of stated features, wholes, steps, operations, components, parts, or combinations thereof, but do not exclude the possibility of the presence or addition of one or more other features, wholes, steps, operations, components, parts, or combinations thereof. At the same time, the term "and / or" used in this specification includes any and all combinations of the relevant listed items.
[0063] As mentioned in the background technology, in the prior art, when testing the energy distribution state of the emission surface of a multi-channel laser chip, there is a problem of great pressure on data storage resources. The inventors have found that the reasons for this problem include:
[0064] Please refer to Figure 1 and Figure 2For this type of chip, in the traditional testing method, the driving device 100 independently lights up each light-emitting channel, and the image acquisition device 200 (such as a camera) exposes the entire laser chip when each light-emitting channel is lit, thereby collecting the near-field image data of a single light-emitting channel (i.e., the data of the energy distribution image of the exit surface). At this time, due to the limited size of the light-emitting channel, the light-emitting channel only occupies a very small space in the near-field image formed for each light-emitting channel. Therefore, in the entire set of data collected by the image acquisition device 200 for a single light-emitting channel, the effective data of the light-emitting channel accounts for a very small proportion (such as 0.4%~0.5%). This also leads to greater pressure on data storage resources.
[0065] Based on this, the present application provides a near-field image data output system of a laser chip, a near-field image data output method of a laser chip, a control device, a computer device, a computer-readable storage medium and a computer program product that can reduce storage pressure.
[0066] In one embodiment, a near-field image data output system for a laser chip is provided. The system is configured to test the laser chip to be tested. The laser chip to be tested may include, but is not limited to, laser chips such as vertical-cavity surface-emitting lasers (VCSEL) or photonic crystal surface-emitting lasers (PCSEL). VCSEL chips can be roughly divided into different application scenarios: in the field of high-speed data communication, that is, the application scenario of optical communication / optical interconnection, a VCSEL chip in the 850nm band is used, and the VCSEL chip can have a bandwidth of 28G, 40G, 56G, 100G, and 200G; in the field of optical sensing, for example, laser radar can use a VCSEL chip in the 905nm / 950nm / 942nm band, but it is not limited to this.
[0067] The laser chip to be tested includes a plurality of light-emitting channels. It is understood that "several" means one or more than one. Exemplarily, the light-emitting channels on the laser chip to be tested may be distributed in a regular array. Of course, the arrangement of the light-emitting channels on the laser chip to be tested is not limited thereto, such as the light-emitting channels on the laser chip to be tested may also be distributed in a random array or a staggered array.
[0068] See also Figure 2 The near-field image data output system of the laser chip includes a driving device 100 and an image acquisition device 200.
[0069] The driving device 100 is configured to drive each light-emitting channel in sequence according to a preset logic, so that each light-emitting channel is illuminated in sequence.
[0070] The preset logic may include any one of row-by-row selection, column-by-column selection, or row-column cross selection. Specifically, for example, the driving device 100 may drive each light-emitting channel row by row, so that each light-emitting channel is illuminated row by row. For another example, the driving device 100 may drive each light-emitting channel column by column, so that each light-emitting channel is illuminated column by column. For another example, the driving device 100 may drive each light-emitting channel row by row, so that each light-emitting channel is illuminated row by row.
[0071] The image acquisition device 200 is configured to expose the laser chip to be tested once when each light-emitting channel is illuminated to obtain energy distribution data including the illuminated light-emitting channel and the unilluminated light-emitting channel, that is, to obtain near-field image data of a single light-emitting channel.
[0072] That is, the image acquisition device 200 is configured to expose the laser chip to be tested once when each light-emitting channel is lit, so as to obtain energy distribution data (i.e., near-field image data). The energy distribution data includes energy distribution data of the light-emitting channel that is lit and energy distribution data of the light-emitting channel that is not lit.
[0073] At the same time, the image acquisition device 200 is also configured to output the energy distribution data containing only the energy distribution data of the illuminated light-emitting channels as the target near-field image data.
[0074] In this embodiment, when the image acquisition device 200 outputs the energy distribution data of a single light-emitting channel, it only outputs the energy distribution data of the light-emitting channel that is lit, and does not output the energy distribution data of the light-emitting channel that is not lit, that is, not all the data obtained by the image acquisition device 200 through exposure are output. Therefore, the amount of data outputted by the image acquisition device 200 can be greatly reduced, thereby effectively reducing the storage pressure on data storage resources.
[0075] In one embodiment, see Figure 3 The laser chip testing system further includes a control device 300. The control device 300 is connected to the driving device 100 and the image acquisition device 200 respectively, and can further control the driving device 100 and the image acquisition device 200.
[0076] The control device 300 is configured to send multiple trigger signals, wherein each trigger signal is configured to trigger the driving device 100 and the image acquisition device 200 to work once according to a first corresponding relationship, wherein the first corresponding relationship is a corresponding relationship between the number of occurrences of the trigger signal and the channel number of the light emitting channel.
[0077] When testing the laser chip to be tested, each time a light-emitting channel is tested, the control device 300 may send a trigger signal to trigger the driving device 100 and the image acquisition device 200. The first corresponding relationship may be pre-entered in the driving device 100 and the image acquisition device 200. Each time the driving device 100 and the image acquisition device 200 receive a trigger signal, the channel number of the light-emitting channel currently being tested may be obtained according to the number of occurrences of the trigger signal and the first corresponding relationship. Exemplarily, when the driving device 100 and the image acquisition device 200 receive a trigger signal for the first time, the light-emitting channel currently being tested may be obtained as the first light-emitting channel.
[0078] After obtaining the channel number of the currently tested light-emitting channel according to the number of occurrences of the trigger signal and the first corresponding relationship, the driving device 100 can perform a driving operation to light up the currently tested light-emitting channel.
[0079] At the same time, based on the number of occurrences of the trigger signal and the first corresponding relationship, when the channel number of the light-emitting channel currently being tested is obtained, the image acquisition device 200 can output only the energy distribution data of the light-emitting channel currently being tested and lit after exposing the laser chip to be tested once, while the energy distribution data of the remaining light-emitting channels are not output.
[0080] In this embodiment, by setting the first corresponding relationship, the control device 300 only needs to send a trigger signal during the test, so that the driving device 100 and the image acquisition device 200 can automatically obtain which light-emitting channel is currently being tested, without sending relevant information of the light-emitting channel currently being tested to the driving device 100 and the image acquisition device 200, thereby effectively improving the response speed of the test.
[0081] In one embodiment, the first corresponding relationship is sent by the control device 300 to the driving device 100 and the image acquisition device 200, thereby simplifying the structure of the near-field image data output system of the laser chip.
[0082] Of course, in other embodiments, the first corresponding relationship may also be generated by other devices, which is not limited here.
[0083] In one embodiment, the control device 300 is further configured to output a second corresponding relationship to the image acquisition device 200. The second corresponding relationship is a corresponding relationship between the light emitting channel and the target area.
[0084] The same laser chip may have multiple light-emitting channels. Accordingly, the near-field image formed by exposing the laser chip may include multiple target areas. The target areas may correspond to the light-emitting channels one by one, thereby forming a second corresponding relationship.
[0085] Exemplarily, the second corresponding relationship is established based on the relationship between the energy distribution data of each single channel of the calibration laser chip and the target area where the corresponding single channel is located.
[0086] The calibration laser chip and the laser chip to be tested may have the same structure. Specifically, the calibration laser chip and the laser chip to be tested may have the same size, and the shape, size, and arrangement of each light-emitting channel in the two may be the same.
[0087] The single-channel near-field image of each light-emitting channel of the calibration laser chip can be obtained by conventional testing methods. Then, the single-channel near-field image of each light-emitting channel can be processed to calibrate the illuminated area, thereby obtaining the target area corresponding to each light-emitting channel.
[0088] For example, the target area corresponding to each light emitting channel can be calibrated and represented by pixel coordinates. For example, a rectangular target area can be calibrated by pixel coordinates (x1, x2, y1, y2), indicating that the target area is an area with a horizontal coordinate between x1 and x2 and a vertical coordinate between y1 and y2 in the pixel coordinate system.
[0089] In this embodiment, the second corresponding relationship can be accurately and effectively obtained by calibrating the lighted area in the single-channel near-field image of each light-emitting channel of the calibration laser chip.
[0090] In one embodiment, the light emitting channel includes a plurality of light emitting holes, each of which is located in the same target area.
[0091] At this time, the target area corresponding to a light-emitting channel can be a larger area that completely surrounds all the light-emitting holes in the light-emitting channel, thereby simplifying the calibration process of the target area.
[0092] In one embodiment, the shape of the target area is determined according to the arrangement of the light-emitting holes.
[0093] For example, see Figure 1 , a light-emitting channel includes a plurality of light-emitting holes arranged in an array, and the target area corresponding to the light-emitting channel is a rectangular area that completely surrounds the plurality of light-emitting holes. The rectangular area can be as follows Figure 1 In the dotted box area, the edge contour of the target area and the edge contour of the light-emitting channel can overlap. It can be understood that in other examples, the edge contour of the target area and the edge contour of the light-emitting channel may not overlap, which can be set according to actual needs.
[0094] Of course, the arrangement of the light-emitting holes in the light-emitting channel may also be in other forms. Accordingly, the target area corresponding to the light-emitting channel may also have other shapes, such as a regular polygon, a circle or a trapezoid, etc.
[0095] In one embodiment, the light channel includes a plurality of light holes. The target area includes a plurality of sub-target areas. One sub-target area corresponds to one light hole area. That is, the sub-target areas correspond to the light hole areas one by one.
[0096] At this time, the image acquisition device 200 can more accurately transmit only the data of the light-emitting hole area of the light-emitting channel, thereby further reducing the data output amount and further reducing the storage pressure.
[0097] In one embodiment, see Figure 4 The near-field image data output system of the laser chip further includes an image stitching device 400. The image stitching device 400 is connected to the image acquisition device 200, so as to receive the data output by the image acquisition device 200.
[0098] The image stitching device 400 is configured to stitch the target near-field image data of each light-emitting channel to form a target near-field image.
[0099] Exemplarily, according to the second correspondence between the light-emitting channels and the target areas mentioned in the aforementioned embodiment, the target near-field image data of each light-emitting channel can be placed in the corresponding target area, thereby realizing the splicing of the target near-field image data corresponding to multiple light-emitting channels to form a target near-field image.
[0100] It can be understood that the light-emitting channels to be spliced may be all the light-emitting channels on the laser chip to be tested, or may be part of the light-emitting channels on the laser chip to be tested, and the specific configuration may be based on actual needs.
[0101] In some of the above embodiments, by setting the first corresponding relationship, the image acquisition device 200 can autonomously control the energy distribution data that only includes the energy distribution data of the illuminated light-emitting channels as the target near-field image data.
[0102] However, it is understandable that in other embodiments, the first corresponding relationship may not be placed in the driving device 100 and the image acquisition device 200. In this case, the image acquisition device 200 may be controlled by the control device 300 located outside the image acquisition device 200 to output the energy distribution data containing only the energy distribution data of the light-emitting channel that is lit as the target near-field image data. In the following embodiments, a method for outputting near-field image data of a laser chip is provided, which can be applied to the control device 300 located outside the image acquisition device 200.
[0103] In one embodiment, see Figure 5 , a method for outputting near-field image data of a laser chip is provided, the method comprising the following steps:
[0104] Step S10, selecting a target light emitting channel on the laser chip to be tested according to a preset logic;
[0105] The laser chip to be tested may include several light-emitting channels, which may include but is not limited to a laser chip having multiple light-emitting channels such as a vertical cavity surface emitting laser (VCSEL).
[0106] For example, the light-emitting channels on the laser chip to be tested may be arranged in a regular array. Of course, the arrangement of the light-emitting channels on the laser chip to be tested is not limited thereto, for example, the light-emitting channels on the laser chip to be tested may also be arranged in a random array or a staggered array.
[0107] The target luminous channel is the luminous channel currently being tested.
[0108] Step S20, sending a trigger signal, the trigger signal is configured to trigger the driving device 100 to light up the target light-emitting channel, and trigger the image acquisition device 200 to expose the laser chip to be tested once, so as to obtain energy distribution data including the illuminated target light-emitting channel and the unilluminated light-emitting channel.
[0109] The trigger signal is a signal that triggers the test of the target luminous channel. Figure 6 Each time a trigger signal is sent, the driving device 100 can be triggered to light up a target light-emitting channel, and the image acquisition device 200 can be triggered to expose the laser chip to be tested.
[0110] The image acquisition device 200 can obtain energy distribution data (ie, near-field image data) after each exposure. The energy distribution data includes energy distribution data of the light-emitting channel that is lit and energy distribution data of the light-emitting channel that is not lit.
[0111] For example, see Figure 7 The image acquisition device 200 may include an exposure module 210 and an acquisition control module 220. The exposure module 210 includes an exposure unit 211, a storage unit 212 and a reading unit 213.
[0112] The acquisition control module 220 can receive the trigger signal and control the exposure unit 211 to perform a single exposure on the laser chip to be tested within the first time T1 based on the trigger signal, so that the storage unit 212 obtains a complete energy distribution data of the laser chip to be tested. The energy distribution data includes the energy distribution data of the illuminated light-emitting channel (target light-emitting channel) and the energy distribution data of the unilluminated light-emitting channel.
[0113] Step S30, controlling the image acquisition device 200 to output the energy distribution data containing only the energy distribution data of the illuminated target light-emitting channel as the target near-field image data.
[0114] After the first time T1, within the second time T2, an instruction may be sent to the acquisition control module 220 to control the reading unit 213 to read only the energy distribution data of the illuminated light emitting channel (target light emitting channel) from the storage unit 212 and output it.
[0115] After completing the data acquisition of a target luminescence channel, the target luminescence channel can be replaced.
[0116] Therefore, illustratively, after the second time T2, it is also possible to receive information on the completed data acquisition of the target light-emitting channel sent by the image acquisition device 200 within the third time T3, and perform corresponding processing based on the information, so as to send a trigger signal again after the third time T3 to trigger the test of the new target light-emitting channel.
[0117] It can be understood that when testing the next target light emitting channel, all data in the register unit 212 (including the read data and unread data of the previous target light emitting channel) will be overwritten by the re-acquired complete energy distribution data of the laser chip to be tested.
[0118] In this embodiment, the image acquisition device 200 is controlled to output only the energy distribution data of the illuminated target light-emitting channel in the energy distribution data as the target near-field image data, and does not output the energy distribution data of the unilluminated light-emitting channel, that is, not all the data obtained by the image acquisition device 200 through exposure are output. Therefore, the amount of data outputted to the outside by the image acquisition device 200 can be greatly reduced, thereby effectively reducing the storage pressure on data storage resources.
[0119] In one embodiment, the target light emitting channel may include a single light emitting channel. In this case, the storage pressure can be reduced without changing the hardware framework of the laser chip testing system, thereby effectively reducing the production cost.
[0120] Of course, in other embodiments, the number of light-emitting channels in the target light-emitting channel may also be greater than 1 (for example, two or three, etc.), which can be specifically set according to actual needs.
[0121] In one embodiment, step S30 includes:
[0122] Step S31, outputting the energy distribution data of the target area where the illuminated light-emitting channel is located in the energy distribution data as target near-field image data.
[0123] In one embodiment, the light emitting channel includes a plurality of light emitting holes, each of which is located in the same target area.
[0124] At this time, the target area corresponding to a light-emitting channel may be a larger area that completely surrounds all the light-emitting holes in the light-emitting channel.
[0125] In one embodiment, the shape of the target area is determined according to the arrangement of the light-emitting holes.
[0126] For example, see Figure 1 A light-emitting channel includes a plurality of light-emitting holes arranged in an array (circular holes in the figure), and the target area corresponding to the light-emitting channel is a rectangular area that completely surrounds the plurality of light-emitting holes. The rectangular area can be as follows Figure 1 In the dotted box area, the edge contour of the target area and the edge contour of the light-emitting channel can overlap. It can be understood that in other examples, the edge contour of the target area and the edge contour of the light-emitting channel may not overlap, which can be set according to actual needs.
[0127] Of course, the arrangement of the light-emitting holes in the light-emitting channel may also be in other forms. Accordingly, the target area corresponding to the light-emitting channel may also have other shapes, such as a regular polygon, a circle or a trapezoid, etc.
[0128] In one embodiment, the light-emitting channel includes a plurality of light-emitting holes, and the target area includes a plurality of sub-target areas, wherein one sub-target area corresponds to one light-emitting hole.
[0129] At this time, the image acquisition device 200 can more accurately transmit only the data of the light-emitting holes of the light-emitting channel, thereby further reducing the data output amount and further reducing the storage pressure.
[0130] In one embodiment, a method for determining a target area includes:
[0131] Step S311, determining a target area according to a target light emitting channel and a second corresponding relationship, where the second corresponding relationship is a corresponding relationship between a light emitting channel and a target area corresponding to the light emitting channel.
[0132] At this time, before testing the laser chip to be tested, the correspondence between the light-emitting channel and the target area can be established first. Different light-emitting channels on the same laser chip can correspond to different target areas. Then, when testing the laser chip to be tested, the correspondence can be directly used to quickly and effectively determine the target area corresponding to the target light-emitting channel.
[0133] In one embodiment, the method for acquiring the second corresponding relationship includes:
[0134] Step S1, obtaining single-channel energy distribution data of each light-emitting channel of a calibration laser chip, wherein the calibration laser chip has the same structure as the laser chip to be measured.
[0135] Among them, the single-channel energy distribution data of each light-emitting channel can be obtained through traditional testing methods.
[0136] The calibration laser chip has the same structure as the laser chip to be tested. Specifically, the calibration laser chip and the laser chip to be tested may have the same size, and the shape, size, and arrangement of each light-emitting channel in the two may be the same.
[0137] Step S2: calibrate the target area of the corresponding light emitting channel based on the single-channel energy distribution data.
[0138] Based on the single-channel energy distribution data, a single-channel near-field image can be obtained. Then, the single-channel near-field image of each light-emitting channel can be processed (there can be many specific image processing methods, which are well known to those skilled in the art and will not be described in detail here), so as to calibrate the illuminated area in the image, thereby obtaining the target area corresponding to each light-emitting channel.
[0139] In this embodiment, by calibrating the lighted area in the single-channel near-field image of each light-emitting channel of the calibration laser chip, the second corresponding relationship between the light-emitting channel and the target area can be accurately and effectively obtained.
[0140] In one embodiment, after step S30, the method further includes:
[0141] Step S40, the target near-field image data of each target light emitting channel are spliced to form a target near-field image (see Figure 8 ).
[0142] Exemplarily, according to the second correspondence between the light-emitting channels and the target areas mentioned in the aforementioned embodiment, the target near-field image data of each light-emitting channel can be placed in the corresponding target area, thereby realizing the splicing of the target near-field image data corresponding to multiple light-emitting channels to form a target near-field image.
[0143] It can be understood that the light-emitting channels to be spliced may be all the light-emitting channels on the laser chip to be tested, or may be part of the light-emitting channels on the laser chip to be tested, and the specific configuration may be based on actual needs.
[0144] In this embodiment, relevant staff can use one target near-field image to simultaneously monitor whether the data of multiple light-emitting channels are abnormal, thereby facilitating improving their work efficiency.
[0145] In one embodiment, the preset logic includes row-by-row selection, column-by-column selection, or row-column cross selection.
[0146] At this time, according to the preset logic, after selecting the target light-emitting channel on the laser chip to be tested, under the triggering action of the trigger signal, the driving device 100 can light up each light-emitting channel row by row or column by column or cross-light up each light-emitting channel.
[0147] It should be understood that although Figure 5 The steps in the flowchart are shown in sequence as indicated by the arrows, but these steps are not necessarily executed in the order indicated by the arrows. Unless otherwise specified in this document, there is no strict order restriction for the execution of these steps, and these steps can be executed in other orders. Moreover, Figure 5 At least part of the steps may include multiple steps or multiple stages. These steps or stages are not necessarily performed at the same time, but can be performed at different times. The execution order of these steps or stages is not necessarily sequential, but can be performed in turn or alternately with other steps or at least part of the steps or stages in other steps.
[0148] In one embodiment, see Fig. 9 , a control device 300 is also provided, which includes a selection module 310, a trigger module 320 and an output control module 330.
[0149] The selection module 310 is configured to select a target light emitting channel on the laser chip to be tested according to a preset logic.
[0150] The trigger module 320 is configured to send a trigger signal, and the trigger signal is configured to trigger the driving device 100 to light up the target light-emitting channel, and trigger the image acquisition device 200 to perform a single exposure on the laser chip to be tested, so as to obtain energy distribution data including the lighted target light-emitting channel and the unlighted light-emitting channel;
[0151] The output control module 330 is configured to control the image acquisition device 200 to output the energy distribution data containing only the energy distribution data of the illuminated target light-emitting channel as the target near-field image data.
[0152] In one embodiment, the output control module is configured to output the energy distribution data of the target area where the illuminated light-emitting channel is located in the energy distribution data as the target near-field image data.
[0153] In one embodiment, the light emitting channel includes a plurality of light emitting holes, each of which is located in the same target area.
[0154] In one embodiment, the shape of the target area is determined according to the arrangement of the light-emitting holes.
[0155] In one embodiment, the light-emitting channel includes a plurality of light-emitting holes, and the target area includes a plurality of sub-target areas; wherein one sub-target area corresponds to one light-emitting hole area.
[0156] In one embodiment, the output control module is configured to determine the target area corresponding to the target light channel according to the target light channel and a second corresponding relationship, wherein the second corresponding relationship is a corresponding relationship between the light channel and the target area corresponding to the light channel.
[0157] In one embodiment, the test data acquisition control device 300 further includes a calibration module.
[0158] The calibration module is configured to obtain single-channel energy distribution data of each light-emitting channel of the calibration laser chip, the calibration laser chip has the same structure as the laser chip to be measured; based on the single-channel energy distribution data, calibrate the target area of the corresponding light-emitting channel.
[0159] In one embodiment, the test data acquisition control device 300 further includes a splicing module.
[0160] The splicing module is configured to splice the target near-field image data of each target light-emitting channel to form a target near-field image.
[0161] For the specific definition of the control device, please refer to the definition of the near-field image data output method of the laser chip above, which will not be repeated here. Each module in the above-mentioned control device can be implemented in whole or in part by software, hardware and a combination thereof. The above-mentioned modules can be embedded in or independent of the processor in the computer device in the form of hardware, or can be stored in the memory in the computer device in the form of software, so that the processor can call and execute the operations corresponding to the above modules. It should be noted that the division of modules in the embodiment of the present application is schematic and is only a logical function division. There may be other division methods in actual implementation.
[0162] In one embodiment, a computer device is further provided, including a memory and a processor, wherein a computer program is stored in the memory, and the processor implements the steps in the above method embodiments when executing the computer program.
[0163] In one embodiment, a computer-readable storage medium is provided, on which a computer program is stored. When the computer program is executed by a processor, the steps in the above-mentioned method embodiments are implemented.
[0164] In one embodiment, a computer program product is provided, including a computer program, which implements the steps in the above method embodiments when executed by a processor.
[0165] In the description of this specification, the description with reference to the terms "one embodiment", "other embodiments", etc. means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic description of the above terms does not necessarily refer to the same embodiment or example.
[0166] The technical features of the above embodiments may be combined arbitrarily. To make the description concise, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.
[0167] The above-mentioned embodiments only express several implementation methods of the present application, and the descriptions thereof are relatively specific and detailed, but they cannot be understood as limiting the scope of the invention patent. It should be pointed out that, for a person of ordinary skill in the art, several variations and improvements can be made without departing from the concept of the present application, and these all belong to the protection scope of the present application. Therefore, the protection scope of the patent of the present application shall be subject to the attached claims.
Claims
1. A near-field image data output system for a laser chip, configured to test a laser chip to be tested, wherein the laser chip to be tested includes a plurality of light-emitting channels, characterized in that: include: A driving device, configured to drive each of the light-emitting channels in sequence according to a preset logic, so that each of the light-emitting channels is illuminated in sequence; An image acquisition device is configured to expose the laser chip to be tested once when each light-emitting channel is illuminated to obtain energy distribution data including the illuminated light-emitting channels and the unilluminated light-emitting channels; as well as The image acquisition device is further configured to output only the energy distribution data of the light-emitting channel that is lit in the energy distribution data as the target near-field image data, and not output the energy distribution data of the light-emitting channel that is not lit; The laser chip testing system further includes a control device, which is connected to the driving device and the image acquisition device respectively, and the control device is configured to send multiple trigger signals; wherein each of the trigger signals is configured to trigger the driving device and the image acquisition device to work once according to a first corresponding relationship, and the first corresponding relationship is a corresponding relationship between the number of occurrences of the trigger signal and the channel number of the light-emitting channel; The image acquisition device is configured to output the energy distribution data of the target area where the illuminated light-emitting channel is located in the energy distribution data as target near-field image data according to a second corresponding relationship, wherein the second corresponding relationship is a corresponding relationship between the light-emitting channel and the target area; The second corresponding relationship is established based on the relationship between the energy distribution data of each single channel of the calibration laser chip and the target area where the corresponding single channel is located.
2. The near-field image data output system of a laser chip according to claim 1, characterized in that: The first corresponding relationship is sent by the control device to the driving device and the image acquisition device.
3. The near-field image data output system of a laser chip according to claim 1, characterized in that: The control device is further configured to output a second corresponding relationship to the image acquisition device.
4. The near-field image data output system of a laser chip according to claim 1, characterized in that: The light-emitting channel includes a plurality of light-emitting holes, and each of the light-emitting holes is located in the same target area.
5. The near-field image data output system of a laser chip according to claim 1, characterized in that: The shape of the target area is determined according to the arrangement of the light-emitting holes.
6. The near-field image data output system of a laser chip according to claim 1, characterized in that: The light-emitting channel includes a plurality of light-emitting holes, and the target area includes a plurality of sub-target areas; wherein one sub-target area corresponds to one light-emitting hole.
7. The near-field image data output system of a laser chip according to any one of claims 1 to 6, characterized in that: It also includes an image stitching device, which is connected to the image acquisition device and is configured to stitch the target near-field image data of each of the light-emitting channels to form a target near-field image.
8. The near-field image data output system of a laser chip according to any one of claims 1 to 6, characterized in that: The preset logic includes any one of row-by-row selection, column-by-column selection, or row-column cross selection.
9. The near-field image data output system of a laser chip according to any one of claims 1 to 6, characterized in that: The light-emitting channels on the laser chip to be tested are distributed in a regular array, a random array or a staggered array.
10. A method for outputting near-field image data of a laser chip, characterized in that: The laser chip includes a plurality of light-emitting channels, and the method includes: According to the preset logic, a target light emitting channel is selected on the laser chip to be tested; Sending a trigger signal, the trigger signal is configured to trigger the driving device to light up the target light-emitting channel, and trigger the image acquisition device to expose the laser chip to be tested once, so as to obtain energy distribution data including the lighted target light-emitting channel and the light-emitting channel that is not lighted, and the trigger signal is configured to trigger the driving device and the image acquisition device to work once according to a first corresponding relationship, wherein the first corresponding relationship is a corresponding relationship between the number of occurrences of the trigger signal and the channel number of the light-emitting channel; Controlling the image acquisition device to output only the energy distribution data of the illuminated target light-emitting channel in the energy distribution data as the target near-field image data, and not outputting the energy distribution data of the unilluminated light-emitting channel; The controlling the image acquisition device to output only the energy distribution data of the illuminated target light-emitting channel in the energy distribution data as target near-field image data comprises: Outputting the energy distribution data of the target area where the light-emitting channel is located in the energy distribution data as target near-field image data; The method for determining the target area includes: Determine the target area corresponding to the target light channel according to the target light channel and a second corresponding relationship, wherein the second corresponding relationship is a corresponding relationship between the light channel and the target area corresponding to the light channel; The method for acquiring the second corresponding relationship includes: Acquiring single-channel energy distribution data of each light-emitting channel of a calibration laser chip, wherein the calibration laser chip has the same structure as the laser chip to be measured; Based on the single-channel energy distribution data, the target area of the corresponding light emitting channel is calibrated.
11. The near-field image data output method of a laser chip according to claim 10, characterized in that: The light-emitting channel includes a plurality of light-emitting holes, and each of the light-emitting holes is located in the same target area.
12. The near-field image data output method of a laser chip according to claim 11, characterized in that: The shape of the target area is determined according to the arrangement of the light-emitting holes.
13. The near-field image data output method of a laser chip according to claim 10, characterized in that: The light-emitting channel includes a plurality of light-emitting holes, and the target area includes a plurality of sub-target areas; wherein one sub-target area corresponds to one light-emitting hole.
14. The near-field image data output method of a laser chip according to claim 10, characterized in that: After the image acquisition device is controlled to output the energy distribution data containing only the energy distribution data of the illuminated target light-emitting channel as the target near-field image data, the method includes: The target near-field image data of each target light-emitting channel are spliced to form a target near-field image.
15. The near-field image data output method of a laser chip according to claim 10, characterized in that: The preset logic includes row-by-row selection, column-by-column selection, or row-column cross selection.
16. The near-field image data output method of a laser chip according to claim 10, characterized in that: The light-emitting channels on the laser chip to be tested are distributed in a regular array, a random array or a staggered array.
17. A control device, characterized in that: The device comprises: A selection module is configured to select a target light emitting channel on the laser chip to be tested according to a preset logic; A trigger module is configured to send a trigger signal, wherein the trigger signal is configured to trigger the driving device to light up the target light-emitting channel and trigger the image acquisition device to expose the laser chip to be tested once, so as to obtain energy distribution data including the lighted target light-emitting channel and the light-emitting channel that is not lighted, and the trigger signal is configured to trigger the driving device and the image acquisition device to work once according to a first corresponding relationship, wherein the first corresponding relationship is a corresponding relationship between the number of occurrences of the trigger signal and the channel number of the light-emitting channel; an output control module, configured to control the image acquisition device to output only the energy distribution data of the illuminated target light emitting channel in the energy distribution data as target near-field image data; The controlling the image acquisition device to output only the energy distribution data of the illuminated target light-emitting channel in the energy distribution data as target near-field image data comprises: Outputting the energy distribution data of the target area where the light-emitting channel that is lit in the energy distribution data is located as the target near-field image data, and not outputting the energy distribution data including the light-emitting channel that is not lit; The method for determining the target area includes: Determine the target area corresponding to the target light channel according to the target light channel and a second corresponding relationship, wherein the second corresponding relationship is a corresponding relationship between the light channel and the target area corresponding to the light channel; The method for acquiring the second corresponding relationship includes: Acquiring single-channel energy distribution data of each light-emitting channel of a calibration laser chip, wherein the calibration laser chip has the same structure as the laser chip to be measured; Based on the single-channel energy distribution data, the target area of the corresponding light emitting channel is calibrated.
18. A computer device comprising a memory and a processor, wherein the memory stores a computer program, wherein: When the processor executes the computer program, the steps of the method according to any one of claims 10 to 16 are implemented.
19. A computer-readable storage medium having a computer program stored thereon, characterized in that: When the computer program is executed by a processor, the steps of the method according to any one of claims 10 to 16 are implemented.
20. A computer program product comprising a computer program, characterized in that When the computer program is executed by a processor, the steps of the method described in any one of claims 10 to 16 are implemented.
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