Purification device for ultrahigh vacuum environment

Abstract

The invention discloses a purification device for an ultrahigh vacuum environment. The purification device comprises a barrel, a separator, a magnet and an ionization filament. The first end of the barrel is open, and the second end of the barrel is closed. The separator is arranged in the cylinder, and in the axial direction of the cylinder, the separator divides an inner cavity of the cylinder into an ionization cavity close to the first end of the cylinder and a collection cavity close to the second end of the cylinder. The magnet is arranged on the separator in a penetrating mode, a penetrating hole communicated with the ionization cavity and the collection cavity is formed in the magnet, and two magnetic poles of the magnet are distributed in the direction perpendicular to the central axis of the cylinder. The ionization lamp filament is at least partially arranged in the ionization cavity and used for ionizing gas in the ionization cavity. According to the ionization filament, gas can be ionized into negative particles and positive particles, and the negative particles and the positive particles are influenced by a magnetic field, do spiral motion in the through holes in the magnet and are collected into the collection cavity.

Description

Technical Field

[0001] The invention belongs to the technical field of vacuum interconnection, and in particular relates to a purification device for an ultra-high vacuum environment. Background Art

[0002] The Nano Vacuum Interconnection Experiment Station is a nano field platform that integrates material growth, device processing, and test analysis. The platform is designed with an ultra-high vacuum pipeline, and the pipeline is connected to multiple devices for material growth, device processing, and test analysis.

[0003] Due to the diversity of equipment, various gas elements and dust particles will always remain in the interconnected pipes. Under ultra-high vacuum, the mean free path of a single molecule is large, so residual gas molecules and dust particles often touch the sample surface, causing the sample to be contaminated.

[0004] The current solution is to use titanium pumps to sublimate titanium to remove gas elements, mainly oxygen and nitrogen. However, titanium pumps are expensive, and it is difficult to install titanium pumps in equipment chambers. There are high requirements for flange openings on pipelines, resulting in high use costs for titanium pumps. In addition, the working state of titanium pumps is unstable. In many cases, not only can the gas elements not be removed in time, but also the dust particles cannot be removed effectively.

[0005] The information disclosed in this background technology section is only intended to enhance the understanding of the overall background of the invention and should not be regarded as an acknowledgment or any form of suggestion that the information constitutes the prior art already known to a person skilled in the art. Summary of the invention

[0006] The object of the present invention is to provide a purification device for an ultra-high vacuum environment, which is used to solve the problem of high purification cost in an ultra-high vacuum environment.

[0007] In order to achieve the above-mentioned purpose, a specific embodiment of the present invention provides a purification device for ultra-high vacuum environment, including a cylinder, a separator, a magnet and an ionization filament. The first end of the cylinder is open, and the second end is closed. The separator is arranged in the cylinder, and in the axial direction of the cylinder, the separator divides the internal cavity of the cylinder into an ionization chamber near the first end of the cylinder and a collection chamber near the second end of the cylinder. The magnet is penetrated on the separator, and a through hole connecting the ionization chamber and the collection chamber is opened on the magnet, and the two magnetic poles of the magnet are distributed in a direction perpendicular to the central axis of the cylinder. The ionization filament is at least partially arranged in the ionization chamber, and is used to ionize the gas in the ionization chamber.

[0008] In one or more embodiments of the present invention, the ionization filament includes a first filament portion and two first electrode portions connected to both ends of the first filament portion. The first filament portion is located in the ionization chamber, and one end of the first electrode portion away from the first filament portion extends to the second end of the barrel.

[0009] In one or more embodiments of the present invention, the purification device further includes two first insulating members which are sleeved on the two first electrode parts in a one-to-one correspondence.

[0010] In one or more embodiments of the present invention, the purification device further comprises a neutralization filament at least partially disposed in the collection chamber.

[0011] In one or more embodiments of the present invention, the neutralizing filament includes a second filament portion and two second electrode portions connected to two ends of the second filament portion, and the second electrode portion extends away from one end of the second filament portion to the second end of the barrel.

[0012] In one or more embodiments of the present invention, the purification device further includes two second insulating members which are sleeved on the two second electrode parts in a one-to-one correspondence.

[0013] In one or more embodiments of the present invention, the purification device includes a plurality of magnets distributed along the circumference of the cylinder, and the magnetic poles of two adjacent magnets are distributed in opposite positions.

[0014] In one or more embodiments of the present invention, a plurality of magnets are arranged around the central axis of the cylinder.

[0015] In one or more embodiments of the present invention, the purification device further comprises a flange sleeved on the circumferential outer wall of the cylinder.

[0016] In one or more embodiments of the present invention, the magnet is configured as a magnetic ring or a hollow magnetic column.

[0017] Compared with the prior art, the ionization filament of the present invention can ionize gas into negatively charged particles and positively charged particles. The negatively charged particles and the positively charged particles are affected by the magnetic field, and they make spiral motion in the perforations on the magnet and are collected in the collection chamber. In addition, the dust particles entering the ionization chamber can also absorb the negatively charged particles and the positively charged particles to form charged dust particles, which are collected in the collection chamber under the action of the magnetic field, and the impurities inside the pipeline can be centrally stored without destroying the vacuum environment. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the prior art descriptions are briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in the present invention, and for ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0019] Figure 1 It is a three-dimensional structural diagram of a purification device for ultra-high vacuum environment in one embodiment of the present invention;

[0020] Figure 2 This is a diagram of the internal structure of a purification device for ultra-high vacuum environment in one embodiment of the present invention;

[0021] Figure 3 It is a cross-sectional structural diagram of a purification device for ultra-high vacuum environment in one embodiment of the present invention;

[0022] Figure 4 The top view of the structure of a purification device for ultra-high vacuum environment in one embodiment of the present invention.

[0023] Explanation of main figure marks: 1. cylinder, 11. ionization chamber, 12. collecting chamber, 2. isolation member, 3. magnet, 31. perforation, 4. ionization filament, 41. first filament portion, 42. first electrode portion, 5. first insulating member, 6. neutralization filament, 61. second filament portion, 62. second electrode portion, 7. second insulating member, 8. flange. DETAILED DESCRIPTION

[0024] In order to enable those skilled in the art to better understand the technical solutions in the present invention, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the present invention.

[0025] In one embodiment, referring to Figures 1 to 4 As shown, the present invention provides a purification device for ultra-high vacuum environment, which comprises a cylinder 1, a spacer 2, a magnet 3 and an ionization filament 4. The first end of the cylinder 1 is open, the second end of the cylinder 1 is closed, and the first end of the cylinder 1 is used to communicate with the pipeline of the vacuum interconnection system. The spacer 2 is arranged in the cylinder 1, and the shape of the spacer 2 is adapted to the shape of the internal cavity of the cylinder 1. In the axial direction of the cylinder 1, the spacer 2 divides the internal cavity of the cylinder 1 into an ionization chamber 11 and a collection chamber 12, the ionization chamber 11 is close to the first end of the cylinder 1, and the collection chamber 12 is close to the second end of the cylinder 1. The magnet 3 is disposed on the isolating member 2, and a through hole 31 is disposed on the magnet 3. The ionization chamber 11 and the collection chamber 12 are connected through the through hole 31. The two magnetic poles of the magnet 3 are distributed along a direction perpendicular to the central axis of the cylinder 1, that is, the inner side (the inner ring portion close to the through hole 31) of the magnet 3 is an N pole, and the outer side (the outer ring portion away from the through hole 31) is an S pole, or the inner side is an S pole and the outer side is an N pole. The ionization filament 4 is at least partially disposed in the ionization chamber 11, and is used to ionize the gas in the ionization chamber 11.

[0026] According to the above structural design, in actual application, the first end of the cylinder 1 is connected to the pipeline of the vacuum interconnection system. After the gas in the pipeline enters the ionization chamber 11, the ionization filament 4 ionizes the gas into negatively charged particles and positively charged particles. Under the influence of the magnetic field of the magnet 3, the negatively charged particles and the positively charged particles are acted on by the Lorentz force and make spiral motion in the perforations 31 on the magnet 3. When the negatively charged particles and the positively charged particles enter the collection chamber 12, the negatively charged particles and the positively charged particles begin to be neutralized to form uncharged neutral particles, and these neutral particles are collected in the collection chamber 12.

[0027] Moreover, after the gas is ionized into negatively charged particles and positively charged particles, the dust particles entering the ionization chamber 11 can adsorb the negatively charged particles and the positively charged particles to form charged dust particles. The charged dust particles can also be affected by the magnetic field to perform spiral motion in the perforations 31 and be collected in the collection chamber 12.

[0028] In addition, it should be noted that when the gas in the collection chamber 12 enters the ionization chamber 11 from the collection chamber 12 through the perforation 31, it will be re-ionized into negatively charged particles and positively charged particles by the ionization filament 4, and re-enter the collection chamber 12 under the influence of the magnetic field. Similarly, dust particles will be collected back into the collection chamber 12 after leaving the collection chamber 12.

[0029] In one embodiment, referring to Figures 1 to 4 As shown, the magnet 3 is constructed as a hollow cylindrical structure, and its axial cavity forms a through hole 31 .

[0030] In addition, the hollow cylindrical structure means that the height of the magnet 3 is greater than its outer diameter. In practical applications, when the height of the magnet 3 is less than its outer diameter, the magnet 3 is substantially constructed as a magnetic ring.

[0031] In one embodiment, referring to Figure 2 and Figure 3 As shown, the ionization filament 4 includes a first filament portion 41 and two first electrode portions 42 connected to both ends of the first filament portion 41. The first filament portion 41 is located in the ionization chamber 11, and one end of the first electrode portion 42 away from the first filament portion 41 extends to the second end of the barrel 1. The first electrode portion 42 is constructed as a long columnar structure and is used to connect an external circuit to supply power to the first filament portion 41.

[0032] Furthermore, the purification device further includes two first insulating members 5 , which are sleeved on the two first electrode portions 42 in a one-to-one correspondence to provide insulation protection for the first electrode portions 42 to prevent the first electrode portions 42 from touching surrounding conductors and causing a short circuit.

[0033] In one embodiment, referring to Figure 2 and Figure 3As shown, the purification device also includes a neutralization filament 6 that is at least partially disposed in the collection chamber 12. The neutralization filament 6 can provide a suitable neutralization environment (electric field, energy and temperature), increase the neutralization speed of negatively charged particles and positively charged particles in the collection chamber 12, and improve the purification efficiency.

[0034] Similarly, the neutralizing filament 6 includes a second filament portion 61 and two second electrode portions 62 connected to both ends of the second filament portion 61, and the second electrode portion 62 extends from one end of the second filament portion 61 to the second end of the barrel 1. The second electrode portion 62 is constructed as a long columnar structure and is used to connect an external circuit to supply power to the second filament portion 61.

[0035] Furthermore, the purification device further includes two second insulating members 7 , which are sleeved on the two second electrode portions 62 in a one-to-one correspondence to provide insulation protection for the second electrode portions 62 , thereby preventing the second electrode portions 62 from touching surrounding conductors and causing a short circuit.

[0036] The length of the first electrode portion 42 is greater than the length of the second electrode portion 62, so as to facilitate the introduction of the first filament portion 41 into the ionization chamber 11. Similarly, the length of the first insulating member 5 is greater than the length of the second insulating member 7.

[0037] In one embodiment, the first insulating member 5 and the second insulating member 7 are made of high temperature resistant insulating material.

[0038] Preferably, the first insulating member 5 and the second insulating member 7 are made of ceramic material.

[0039] In one embodiment, referring to Figure 1 and Figure 4 As shown, the purification device includes a plurality of magnets 3 distributed along the circumference of the cylinder 1, and the magnetic poles of two adjacent magnets 3 are distributed in opposite positions. That is, the inner side of a certain magnet 3 is an N pole and the outer side is an S pole, and the inner side of another magnet 3 adjacent to the magnet 3 is an S pole and the outer side is an N pole. In this way, when the magnets 3 are installed on the isolation member 2, no repulsive force will be generated between the adjacent magnets 3 to increase the difficulty of installation, thereby improving the installation efficiency of the magnets 3.

[0040] In addition, even if the spacer 2 is formed on the magnet 3 by a process such as injection molding or casting, the opposite distribution positions of the magnetic poles of two adjacent magnets 3 can enable the magnets 3 to be adsorbed together in advance to facilitate subsequent injection molding or casting.

[0041] Preferably, the isolation member 2 is made of non-magnetic metal.

[0042] Furthermore, a plurality of magnets 3 are arranged around the central axis of the cylinder 1 .

[0043] In one embodiment, referring to Figure 1As shown, the purification device also includes a flange 8 sleeved on the circumferential outer wall of the cylinder 1. After the cylinder 1 is inserted into the pipeline of the vacuum interconnection system, the flange 8 can be fixed to the outer wall of the pipeline by bolts to fix the entire purification device.

[0044] Furthermore, in order to ensure the flatness of the outer wall of the pipeline of the vacuum interconnection system, the flange 8 is arranged as close to the second end of the cylinder 1 as possible to increase the depth of the cylinder 1 inserted into the pipeline.

[0045] It will be apparent to those skilled in the art that the invention is not limited to the details of the exemplary embodiments described above and that the invention can be implemented in other specific forms without departing from the spirit or essential features of the invention. Therefore, the embodiments should be considered exemplary and non-limiting in all respects, and the scope of the invention is defined by the appended claims rather than the foregoing description, and it is intended that all variations falling within the meaning and scope of the equivalent elements of the claims be included in the invention. Any reference numeral in a claim should not be considered as limiting the claim to which it relates.

[0046] In addition, it should be understood that although the present specification is described according to embodiments, not every embodiment contains only one independent technical solution. This narrative method of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment may also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A purification device for ultra-high vacuum environment, characterized in that: include: A cylinder (1) having an open first end and a closed second end; an isolating member (2) disposed in the cylinder (1), wherein in the axial direction of the cylinder (1), the isolating member (2) separates the internal cavity of the cylinder (1) into an ionization chamber (11) close to a first end of the cylinder (1) and a collection chamber (12) close to a second end of the cylinder (1); A magnet (3) is disposed on the isolation member (2), the magnet (3) is provided with a through hole (31) connecting the ionization chamber (11) and the collection chamber (12), and the two magnetic poles of the magnet (3) are distributed in a direction perpendicular to the central axis of the cylinder (1); An ionization filament (4) is at least partially disposed in the ionization chamber (11) and is used to ionize the gas in the ionization chamber (11).

2. The purification device according to claim 1, characterized in that: The ionization filament (4) comprises a first filament portion (41) and two first electrode portions (42) connected to two ends of the first filament portion (41); the first filament portion (41) is located in the ionization chamber (11); and one end of the first electrode portion (42) away from the first filament portion (41) extends to the second end of the cylinder (1).

3. The purification device according to claim 2, characterized in that: The purification device also includes two first insulating parts (5) which are sleeved on the two first electrode parts (42) in a one-to-one correspondence.

4. The purification device according to claim 1, characterized in that: The purification device further comprises a neutralizing filament (6) which is at least partially disposed in the collecting chamber (12).

5. The purification device according to claim 4, characterized in that: The neutralizing filament (6) comprises a second filament portion (61) and two second electrode portions (62) connected to two ends of the second filament portion (61), wherein the second electrode portion (62) extends from one end of the second filament portion (61) to the second end of the barrel (1).

6. The purification device according to claim 5, characterized in that: The purification device also includes two second insulating parts (7) which are sleeved on the two second electrode parts (62) in a one-to-one correspondence.

7. The purification device according to claim 1, characterized in that: The purification device comprises a plurality of magnets (3) distributed along the circumference of the cylinder (1), and the magnetic poles of two adjacent magnets (3) are distributed in opposite positions.

8. The purification device according to claim 7, characterized in that: The multiple magnets (3) are arranged around the central axis of the cylinder (1).

9. The purification device according to claim 1, characterized in that: The purification device further comprises a flange (8) sleeved on the circumferential outer wall of the cylinder (1).

10. The purification device according to claim 1, characterized in that: The magnet (3) is constructed as a magnetic ring or a hollow magnetic column.

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