Chip detection equipment

Abstract

The invention discloses chip detection equipment which comprises a frame body. The frame body is provided with a feeding conveying line, a supplementing conveying line, a discharging conveying line and a waste conveying line. The detection assembly can carry out photographing detection on the chips conveyed by the feeding conveying line and can carry out photographing detection on the chips conveyed by the discharging conveying line; the overturning assembly is arranged at the tail end, located on the feeding conveying line, of the frame body and can overturn the chips conveyed by the feeding conveying line and carry the chips to the discharging conveying line; the screening assembly is arranged on the frame body, and when the back faces or the front faces of the chips conveyed by the discharging conveying line are damaged, the screening assembly can carry the chips conveyed by the discharging conveying line to the waste conveying line and carry the chips on the supplementing conveying line to the discharging conveying line to fill the gaps; according to the invention, the problems of low detection efficiency and poor matching degree between detection devices due to the fact that the material tray loaded with the chip is difficult to turn over to detect the back surface of the chip after the front surface of the chip is detected by the traditional chip detection device can be solved.

Description

Technical Field

[0001] The present invention relates to the field of chip detection, and in particular to a chip detection device. Background Art

[0002] With the rapid development of the semiconductor industry, the production of semiconductor chips is gradually moving towards automation and standardization. In the chip production process, appearance inspection is an important part, mainly used to detect whether there are defects on the chip surface, so as to provide a reference for the subsequent production of the chip. During the inspection, the tray loaded with multiple chips is sent to the inspection equipment, which will simultaneously inspect the multiple chips on the tray and then remove the unqualified products on the tray.

[0003] However, when testing chips, a tray is usually used as a carrier for the chips. After the testing equipment completes the front appearance inspection of the chips in the tray, it is difficult for traditional testing equipment to turn the tray over and continue to test the back of the chips. Generally, after a large number of chips are tested on the front side, the tray is reloaded and the chips are flipped over to test the back side of the chips. This results in low chip testing efficiency and poor coordination between testing equipment. Summary of the invention

[0004] In order to overcome the above disadvantages, an object of the present invention is to provide a chip detection device.

[0005] In order to achieve the above objectives, the technical solution adopted by the present invention includes: a frame, on which a loading conveyor line, a replenishing conveyor line, a unloading conveyor line and a waste conveyor line extending toward a second direction are sequentially arranged along a first direction; a detection component, which is arranged on the frame and can take pictures of the chips conveyed by the loading conveyor line to confirm whether the back of the chip is damaged, and can take pictures of the chips conveyed by the unloading conveyor line to confirm whether the front of the chip is damaged; a flipping component, which is arranged on the frame at the end of the loading conveyor line and can turn over the chips conveyed by the loading conveyor line and transport them to the unloading conveyor line; a screening component, which is arranged on the frame, and when the back or front of the chip conveyed by the unloading conveyor line is damaged, the screening component can transport the chip conveyed by the unloading conveyor line to the waste conveyor line, and transport the chip on the replenishing conveyor line to the unloading conveyor line to fill the gap.

[0006] In the preferred technical solution of the above-mentioned chip detection equipment, the loading conveyor line, the replenishing conveyor line, the unloading conveyor line and the waste conveyor line all transport trays loaded with chips through a transfer platform, and the transfer platform has a diagonal fixed structure to position the trays, and the transfer platform is configured on the loading conveyor line, the replenishing conveyor line, the unloading conveyor line and the waste conveyor line to be able to be raised and lowered in the vertical direction.

[0007] In the preferred technical solution of the above chip detection equipment, the detection component includes at least a first 2D detection camera and a 3D detection camera sequentially arranged above the loading conveyor line along the second direction, and a second 2D detection camera arranged above the unloading conveyor line.

[0008] In the preferred technical solution of the above-mentioned chip detection equipment, the flipping assembly at least includes a carrying platform arranged on the frame above the end of the loading conveyor line, a lifting structure arranged at the bottom of the frame and used to lift the chip transported at the end of the loading conveyor line to the carrying platform, and a clamping and flipping unit arranged on the frame and capable of moving along a first direction. The clamping and flipping unit at least includes an outer frame and a clamping structure and a flipping structure arranged on the outer frame. The clamping structure can be lifted and lowered in a vertical direction to clamp the chip, and the flipping structure can receive the chip clamped by the clamping structure and flip the chip 180°.

[0009] In the preferred technical solution of the above-mentioned chip detection equipment, the clamping structure at least includes a first clamping member arranged on the outer frame and a first driving member for driving the first clamping member to rise and fall relative to the outer frame in a vertical direction, and the flipping structure at least includes a second clamping member rotatably mounted on the outer frame through a rotating frame and movable in a first direction to clamp the chip, and a second driving member arranged on the outer frame and driving the rotating frame to rotate.

[0010] In the preferred technical solution of the chip detection device, there are two second clamping members symmetrically arranged, each of the second clamping members has a groove formed on the surface of the opposite side for the feed tray to be placed in, and an expansion portion with a slope is formed at the opening of the groove.

[0011] In the preferred technical solution of the above-mentioned chip detection equipment, each of the second clamping members includes a fixed part and a movable part, the fixed part is slidably configured on the rotating frame, and the movable part is vertically slidably configured on the fixed part; the movable part is restricted in position by an elastic member and the distance between the movable part and the fixed part can be changed.

[0012] In the preferred technical solution of the above-mentioned chip detection equipment, the screening component at least includes a suction structure which is arranged on the frame and can be moved above the feeding conveyor line, the unloading conveyor line and the waste conveyor line along a first direction, and the suction structure at least includes a suction cup module arranged along the first direction and a driving module for driving the suction cup module to rise and fall in a vertical direction.

[0013] In the preferred technical solution of the above-mentioned chip detection equipment, the loading conveyor line, the replenishing conveyor line, the unloading conveyor line and the waste conveyor line are provided with a material moving platform and a material moving component arranged on the material moving platform on the side away from the flipping component, the material moving component at the loading conveyor line and the replenishing conveyor line can move the material tray down to the loading conveyor line and the replenishing conveyor line respectively, and the material moving component on the unloading conveyor line and the waste conveyor line can move the material tray loaded with chips conveyed by the unloading conveyor line and the waste conveyor line to the material moving platform.

[0014] In the preferred technical solution of the above-mentioned chip detection equipment, the material transfer assembly at least includes a lifting structure arranged on the frame, a tray driven to rise and fall by the lifting structure, and a limiting structure arranged on the material transfer platform for fixing the material tray. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a front view of the present invention; Figure 2 A three-dimensional schematic diagram of the present invention Figure 1 ; Figure 3 A top view of the present invention; Figure 4 It is a left side view of the present invention; Figure 5 A three-dimensional schematic diagram of the present invention Figure 2 ; Figure 6 is a schematic diagram of the detection component; Figure 7 is a schematic diagram of a clamping and flipping unit; Figure 8 It is the left view of the clamping and flipping unit; Fig. 9 is a schematic diagram of the flip structure; Fig.10 It is a schematic diagram of the carrying platform supporting the material tray; Fig.11 is a schematic diagram of the screening component; Fig.12 It is the left view of the screening component; Fig.13 The connection relationship between the flip assembly, material transfer assembly and the loading conveyor line Figure 1 ; Fig.14 The connection relationship between the flip assembly, material transfer assembly and the loading conveyor line Figure 2 ; Fig.15 It is a connection diagram between the transfer platform and the diagonal fixed structure; In the figure: frame 1, loading conveyor line 2, replenishing conveyor line 3, unloading conveyor line 4, waste conveyor line 5, detection component 6, first 2D detection camera 61, 3D detection camera 62, second 2D detection camera 63, first gantry 64, second gantry 65, flip component 7, carrying platform 71, lifting structure 72, clamping flip unit 73, outer frame 731, first clamping member 732, first driving member 733, rotating frame 734, second clamping member 735, fixing part 7351, moving part 7352, groove 7353, enlarged part 7354, second driving member 736, elastic member 737, screening component 8, suction structure 81, suction cup module 82, driving module 83, material tray 9, transfer platform 10, diagonal fixing structure 11, bottom plate 12, material transfer platform 13, material transfer component 14, lifting structure 141, tray 142, limiting structure 143. DETAILED DESCRIPTION

[0016] The preferred embodiments of the present invention are described below with reference to the accompanying drawings. It should be understood by those skilled in the art that these embodiments are only used to explain the technical principles of the present invention and are not intended to limit the protection scope of the present invention.

[0017] It should be noted that in the description of the present invention, the terms "upper", "lower", "left", "right", "front", "rear" and the like indicating directions or positional relationships are based on the directions or positional relationships shown in the drawings, which are only for the convenience of description, and do not indicate or imply that the device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first" and "second" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0018] In addition, it should be noted that in the description of the present invention, unless otherwise clearly specified and limited, the terms "disposed", "connected" and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection. For those skilled in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0019] like Figures 1 to 15 As shown, the chip detection equipment of the present invention includes at least a frame 1 and a loading conveyor line 2, a replenishing conveyor line 3, a unloading conveyor line 4, a waste conveyor line 5, a detection component 6, a turning component 7 and a screening component 8 arranged on the frame 1.

[0020] See also Figure 2, a loading conveyor line 2, a replenishing conveyor line 3, a unloading conveyor line 4 and a waste conveyor line 5 extending toward the second direction are sequentially arranged on the frame 1 along the first direction; the loading conveyor line 2, the replenishing conveyor line 3, the unloading conveyor line 4 and the waste conveyor line 5 are arranged in parallel with each other, and the loading conveyor line 2, the replenishing conveyor line 3, the unloading conveyor line 4 and the waste conveyor line 5 can be a linear module; wherein, the loading conveyor line 2 is used to convey a tray 9 loaded with chips to be detected toward the detection component 6 and the flip component 7; the replenishing conveyor line 3 is used to convey an empty tray 9 without chips toward the flip component 7 and to convey a tray 9 loaded with chips toward the screening component 8; the unloading conveyor line 4 is used to unload the tray 9 loaded with chips that has been detected, screened and filled; the waste conveyor line 5 is used to convey the empty tray 9 and after the screening component 8 fills the empty tray 9 with damaged chips, unload the tray 9 and re-convey the empty tray 9 to a predetermined position.

[0021] See also Figures 1 to 6 The detection component 6 is arranged on the frame 1 above the loading conveyor line 2 and the unloading conveyor line 4. When the loading conveyor line 2 conveys the chips in the material tray 9 toward the flipping component 7, the detection component 6 can detect and record the damage information on the back of the chip. When the unloading conveyor line 4 unloads the chips in the material tray 9 that have been flipped by the flipping component 7, the detection component 6 can detect the damage information on the front of the chip and record the chip position.

[0022] See also Figure 5 The flipping component 7 is arranged on the frame 1 at the end of the unloading conveyor line 4, and can transport the material plate loaded with chips that has been detected by the detection component 6 at the end of the loading conveyor line 2 upward to a predetermined position, and transport the empty material tray 9 on the replenishing conveyor line 3 to the top of the material tray 9 loaded with chips, and turn over the material tray 9 loaded with chips and then transport it to the unloading conveyor line 4.

[0023] See also Figure 2 , Fig.11 The screening component 8 is arranged on the frame 1 above the feeding conveyor line 3, the unloading conveyor line 4 and the waste conveyor line 5. When the chip conveyed by the unloading conveyor line 4 is detected to be damaged by the detection component 6, the screening component 8 can suck out the damaged chip and place it in the empty tray 9 on the waste conveyor line 5, and move the intact chip in the upper tray 9 of the feeding conveyor line 3 to the tray 9 on the unloading conveyor line 4, so as to fill the vacancies in the tray 9.

[0024] Specifically, when testing the chips, first place the tray 9 loaded with the chips to be tested on the loading conveyor line 2, and place the empty tray 9 and the tray 9 loaded with undamaged chips on the replenishing conveyor line 3. The empty tray 9 is transported to its end close to the flipping assembly 7 through the replenishing conveyor line 3, and the tray 9 loaded with chips is transported to the screening assembly 8. Thereafter, the loading conveyor line 2 transports the tray 9 loaded with the chips to the end thereof, and the detection assembly 6 can detect the back of the chips in the tray 9 and record the position of the damaged chips in the tray 9. When the tray 9 moves to the end of the loading conveyor line 2, the tray 9 is lifted by the flipping assembly 7 to separate from the loading conveyor line 2. Thereafter, the flipping assembly 7 grabs the empty tray 9 at the end of the replenishing conveyor line 3 and places it on the tray 9, and the two are tested. After flipping, the chips in the material tray 9 are turned over, and the flipping component 7 transports the material tray 9 to the unloading conveyor line 4 and is transported by the unloading conveyor line 4. During the process, the front of the chips in the material tray 9 is detected by the detection component 6 and the position is recorded. After the detection is completed, the material tray 9 is transported to the screening component 8 by the unloading conveyor line 4. The screening component 8 can suck out the damaged chips and place them in the material tray 9 on the waste conveyor line 5, and suck out the undamaged chips in the material tray 9 on the replenishment conveyor line 3 and place them in the material tray 9 of the unloading conveyor line 4 to fill the vacancies. After the chip screening is completed, the unloading conveyor line 4 can be controlled to unload the material tray 9 loaded with chips after the detection. The whole process is automated and has the characteristics of a high degree of mechanization. At the same time, it can realize double-sided detection of chips, waste removal and chip filling, and has high detection accuracy.

[0025] In one or more embodiments, the loading conveyor line 2, the replenishing conveyor line 3, the unloading conveyor line 4 and the waste conveyor line 5 all transport the tray 9 loaded with chips through the transfer platform 10, and the transfer platform 10 has a diagonal fixed structure 11 to position the tray 9, and the transfer platform 10 is configured on the loading conveyor line 2, the replenishing conveyor line 3, the unloading conveyor line 4 and the waste conveyor line 5 to be able to be raised and lowered in the vertical direction.

[0026] See also Figure 3 , Figure 4 , Fig.10 , Figures 13 to 15 The loading conveyor line 2, the replenishing conveyor line 3, the unloading conveyor line 4 and the waste conveyor line 5 are all equipped with a transfer platform 10 that can be driven to move. The material tray 9 is placed on the transfer platform 10 and is driven to move. Each transfer platform 10 is equipped with a diagonal fixing structure 11. The diagonal fixing structure 11 at least includes an L-shaped stopper configured at a corner of the transfer platform 10 and a driving cylinder arranged opposite to the L-shaped stopper. When the material tray 9 is placed on the transfer platform 10, the driving cylinder extends the shaft end to press against the corner of the material tray 9, so that the material tray 9 can be pressed against the L-shaped stopper, thereby realizing the limitation of the position of the material tray 9.

[0027] See also Fig.10 , Figures 13 to 15 The four groups of transfer platforms 10 are connected to the loading conveyor line 2, the replenishing conveyor line 3, the unloading conveyor line 4 and the waste conveyor line 5 respectively by means of the bottom plate 12. A driving cylinder is arranged on the bottom plate 12. The extended shaft end of the driving cylinder is connected to the transfer platform 10. By controlling the extended shaft end of the driving cylinder to extend or retract, the material tray 9 transported by the transfer platform 10 can be raised and lowered in the height direction. It has the characteristics of simple structure and convenient operation. Through this setting, the height of the material tray 9 on the transfer platform 10 can be adjusted to meet the use requirements in different situations.

[0028] In one or more embodiments, the detection component 6 includes at least a first 2D detection camera 61 and a 3D detection camera 62 sequentially arranged above the loading conveyor line 2 along the second direction, and a second 2D detection camera 63 arranged above the unloading conveyor line 4.

[0029] See also Figures 2 to 6 The frame 1 is sequentially provided with a first gantry 64 and a second gantry 65 along the second direction. The first 2D detection camera 61 is installed on the first gantry 64 through a linear module configured along the first direction, and the 3D detection camera 62 is installed on the second gantry 65 through a linear module configured along the first direction. The first 2D detection camera 61 can take pictures of the back of the chip conveyed by the feeding conveyor line 2, so as to detect whether there are scratches, damages, etc. on the back of the chip. When the feeding conveyor line 2 conveys the chip toward the flip assembly 7, the 3D detection camera 62 can perform a depth detection on the surface of the chip, so as to at least determine whether the solder of the pin on the back of the chip is broken; when the chip is conveyed to the unloading conveyor line 4, the second 2D detection camera 63 can take pictures of the front of the chip, so as to detect whether there are scratches, damages, etc. on the front of the chip. In this way, through the cooperation of the first 2D detection camera 61, the 3D detection camera 62 and the second 2D detection camera 63, a comprehensive detection of the front and back of the chip can be achieved, effectively improving the detection effect and detection accuracy of the chip in this application.

[0030] In one or more embodiments, the flip assembly 7 at least includes a carrying platform 71 arranged on the frame 1 above the end of the feeding conveyor line 2, a lifting structure 72 arranged at the bottom of the frame 1 and used to lift the chip transported at the end of the feeding conveyor line 2 to the carrying platform 71, and a clamping and flipping unit 73 arranged on the frame 1 and capable of moving along a first direction. The clamping and flipping unit 73 at least includes an outer frame 731 and a clamping structure and a flipping structure arranged on the outer frame 731. The clamping structure can be lifted and lowered in a vertical direction to clamp the chip, and the flipping structure can receive the chip clamped by the clamping structure and flip the chip 180°; the clamping structure at least includes a first clamping member 732 arranged on the outer frame 731 and a first driving member 733 for driving the first clamping member 732 to be lifted and lowered relative to the outer frame 731 in a vertical direction. The flipping structure at least includes a second clamping member 735 which is rotatably mounted on the outer frame 731 through the rotating frame 734 and can move along the first direction to clamp the material tray 9, and a second driving member 736 which is arranged on the outer frame 731 and drives the rotating frame 734 to rotate; the second clamping member 735 has two and is symmetrically arranged, each second clamping member 735 forms a groove 7353 for placing the material tray 9 on the surface of the opposite side, and an expansion portion 7354 with a slope is formed at the opening of the groove 7353; each second clamping member 735 includes a fixed portion 7351 and a movable portion 7352, the fixed portion 7351 is slidably arranged on the rotating frame 734, and the movable portion 7352 is vertically slidably arranged on the fixed portion 7351; the movable portion 7352 is limited in position by the elastic member 737 and the distance between it and the fixed portion 7351 can be changed.

[0031] See also Figure 5 , Figures 7 to 10 , Fig.13 , Fig.14 The carrying platform 71 is arranged on the frame 1 at the end of the feeding conveyor line 2. A through window is formed on the carrying platform 71 for the feeding tray 9 to pass vertically. A driving cylinder and a block installed at the end of the driving cylinder are arranged on the carrying platform 71. When the material tray 9 is transported from the bottom of the carrying platform 71 to the top of the carrying platform 71 through the window, the extended shaft end of the driving cylinder controls the block to extend to form a limit for the material tray 9 to prevent the material tray 9 from falling. In addition, the above-mentioned diagonal fixing structure 11 can be arranged on the carrying platform 71, that is, L-shaped blocks and driving cylinders are set at the two diagonals of the window above the carrying platform 71, so as to further limit the position of the material tray 9 and ensure the consistency of the movement of the material tray 9.

[0032] See also Fig.13 , Fig.14 The lifting structure 72 of the frame 1 configured at the bottom of the bearing platform 71 can be a driving cylinder and a top plate installed on the end of the driving cylinder shaft, or it can be a plate driven to rise by a screw module, and there is no specific limitation.

[0033] See also Figures 7 to 9 The clamping and flipping unit 73 at least includes an outer frame 731 and a clamping structure and a flipping structure configured on the outer frame 731, wherein the outer frame 731 is configured on the linear module of the second gantry 65 and can be driven by the linear module along the first direction, the clamping structure includes a first driving member 733 and a first clamping member 732 installed in the vertical direction, the first driving member 733 can be a screw module or a driving cylinder, the first clamping member 732 can be a clamping cylinder with a clamping claw, the flipping structure includes a rotating frame 734 rotatably configured on the outer frame 731 and a second driving member 736 configured on the outer frame 731 for driving the rotating frame 734 to rotate, and includes a second clamping member 735 configured in the rotating frame 734, the second driving member 736 can be a servo motor or a rotating cylinder, the second clamping member 735 has two and is oppositely arranged in the rotating frame 734, each second clamping member 735 at least includes a fixed portion 7351 and a movable portion 7352, the fixed portion 7351 The fixed part 7351 can be driven by the driving cylinder to slide on the rotating frame 734. The movable part 7352 is arranged on the fixed part 7351 and can be relatively close to or away from the fixed part 7351. The groove 7353 formed between the movable part 7352 and the fixed part 7351 is used to place the material tray 9. The movable part 7352 and the fixed part 7351 form an expansion part 7354 with a slope at the opening of the groove 7353 to facilitate the material tray 9 to enter. Into the groove 7353. In addition, an elastic member 737 is fixed on the fixed portion 7351. The elastic member 737 can be a spring sheet. The elastic member 737 extends to the top of the movable portion 7352. The elastic member 737 can limit the movable portion 7352 while ensuring that the movable portion 7352 still has a certain amount of moving space after moving to abut against the elastic member 737, so as to adapt to the problem that when the shape of the material tray 9 is bent, the material tray 9 is difficult to enter between the two second clamping members 735.

[0034] Specifically, when it is necessary to turn over the material tray 9 on the loading conveyor line 2 and convey it to the unloading conveyor line 4, first, the material tray 9 loaded with chips at the end of the loading conveyor line 2 is lifted above the supporting platform 71 by the lifting structure 72, and the card block is controlled by the driving cylinder configured on the supporting platform 71 to extend into the window of the supporting platform 71 to form a support for the material tray 9. At the same time, the linear module on the second gantry 65 controls the outer frame 731 to move in the first direction to just above the replenishing conveyor line 3, and uses the first driving member 733 to control the first clamping member 732 to descend and grab the empty material tray 9 on the replenishing conveyor line 3, and then controls the outer frame 731 to reset so as to place the empty material tray 9 clamped by the first clamping member 732 on the top of the loading conveyor line 3. The first driving member 733 is then used to control the first clamping member 732 to move downward so as to synchronously grab the material tray 9 loaded with chips and the empty material tray 9, and the two material trays 9 are moved upward to be placed between the two second clamping members 735. Thereafter, the two second clamping members 735 are controlled to move toward each other so that the two material trays 9 can be located in the grooves 7353 of the second clamping members 735 to clamp the material tray 9, and then the second driving member 736 is used to control the rotating frame 734 to rotate 180°, so as to realize the turning over of the material tray 9 and the chips loaded in the material tray 9, and then the turned over material tray 9 can be placed on the unloading conveyor line 4. The whole process is mechanized and has the characteristics of high automation and high detection efficiency.

[0035] In one or more embodiments, the screening assembly 8 includes at least a suction structure 81 that is configured on the frame 1 and can move above the feeding conveyor line 3, the unloading conveyor line 4 and the waste conveyor line 5 along the first direction. The suction structure 81 includes at least a suction cup module 82 arranged along the first direction and a driving module 83 for driving the suction cup module 82 to rise and fall in the vertical direction.

[0036] See also Figure 2 , Fig.11 , Fig.12 The suction cup module 82 and the driving module 83 are arranged on a carrying plate, and the carrying plate is arranged on a linear module of the first gantry 64. The carrying plate can be driven by the linear module on the first gantry 64 along a first direction to achieve transverse movement above the feeding conveyor line 3, the unloading conveyor line 4 and the waste conveyor line 5; the suction cup module 82 is composed of a plurality of independent suction cups that can be extended downward, and the suction cups can be extended or retracted by a cylinder; the driving module 83 can be a screw module or a driving cylinder, and there is no specific limitation.

[0037] When screening the chips, first control the carrier plate to move to just above the unloading conveyor line 4, and use the drive module 83 to control the suction cup module 82 to move down to just above the chip to be removed, then control the suction cup to move down to absorb the damaged chip, and then control the carrier plate to move horizontally along the first direction to just above the waste conveyor line 5, and use the drive module 83 to control the suction cup module 82 to descend to place the damaged chip absorbed by the suction cup in the material tray 9 on the unloading conveyor line 4, then control the carrier plate to move horizontally along the first direction to above the replenishing conveyor line 3, use the suction cup to absorb the chips in the material tray 9 on the replenishing conveyor line 3, and then transport the absorbed chips to the material tray 9 of the unloading conveyor line 4 to fill the vacancy in the material tray 9.

[0038] It should be noted that the two sides of the feeding conveyor line 3 are equipped with lifting cylinders and top plates arranged on the extended shaft ends of the lifting cylinders. When the feeding conveyor line 3 conveys undamaged chips, the lifting cylinders can control the top plates to rise to lift the material tray 9 on the feeding conveyor line 3 and keep it at a predetermined height for the screening component 8 to take the chips; when the feeding conveyor line 3 conveys an empty material tray 9 toward the flipping component 7, the lifting cylinders do not work, and the empty material tray 9 can be smoothly conveyed to the end of the feeding conveyor line 3 for the flipping component 7 to clamp.

[0039] In one or more embodiments, the loading conveyor line 2, the replenishing conveyor line 3, the unloading conveyor line 4 and the waste conveyor line 5 are provided with a material moving platform 13 and a material moving component 14 arranged on the material moving platform 13 on the side away from the flipping component 7. The material moving component 14 at the loading conveyor line 2 and the replenishing conveyor line 3 can move the material tray 9 down to the loading conveyor line 2 and the replenishing conveyor line 3 respectively, and the material moving component 14 on the unloading conveyor line 4 and the waste conveyor line 5 can transport the material tray 9 loaded with chips conveyed by the unloading conveyor line 4 and the waste conveyor line 5 to the material moving platform 13; the material moving component 14 at least includes a lifting structure 141 arranged on the frame 1, a tray 142 driven to lift by the lifting structure 141, and a limiting structure 143 arranged on the material moving platform 13 for fixing the material tray 9.

[0040] See also Figures 1 to 5 , Fig.13 , Fig.14 The material moving platform 13 is arranged on the side of the frame 1 away from the material turning component. Four openings are formed on the material moving platform 13, and the four openings correspond to the loading conveyor line 2, the replenishing conveyor line 3, the unloading conveyor line 4 and the waste conveyor line 5 respectively. The material moving platform 13 is provided with a limiting structure 143 on the side around each opening. The limiting structure 143 can be a limiting block driven by a driving cylinder to extend above the opening. When the material tray 9 is located above the opening of the material moving platform 13, the limiting block can be controlled by the driving cylinder to extend to the bottom of the material tray 9 to form a support for the material tray 9.

[0041] See also Fig.14 The lifting structure 141 can be a screw module or a driving cylinder configured on the frame 1, and the tray 142 is driven up or down by the lifting structure 141 to lift the material tray 9 on the loading conveyor line 2, the replenishing conveyor line 3, the unloading conveyor line 4 and the waste conveyor line 5 through the opening of the material transfer platform 13 to the material transfer platform 13, or to receive the material tray 9 on the material transfer platform 13 and lower it to be placed on the loading conveyor line 2, the replenishing conveyor line 3, the unloading conveyor line 4 and the waste conveyor line 5.

[0042] Specifically, when the material tray 9 on the material transfer platform 13 is placed on the loading conveyor line 2 or the feeding conveyor line 3, the lifting structure 141 at the loading conveyor line 2 or the feeding conveyor line 3 is controlled to drive the tray 142 to lift up to support the material tray 9. Thereafter, the extended shaft end of the driving cylinder is controlled to drive the limit block to retreat to ensure that the material tray 9 can smoothly pass through the opening of the material transfer platform 13. As the tray 142 moves downward, the material tray 9 can fall on the loading conveyor line 2 and the feeding conveyor line 3. It has a simple structure, convenient operation, and a high degree of automation. High characteristics; when the material tray 9 on the unloading conveyor line 4 and the waste conveyor line 5 is transported toward the material transfer platform 13, the unloading conveyor line 4 and the waste conveyor line 5 are first used to transport the material tray 9 to the bottom of the opening of the material transfer platform 13, and then the lifting structure 141 is used to drive the tray 142 to rise to lift the material tray 9 placed on the unloading conveyor line 4 and the waste conveyor line 5. When the material tray 9 moves to the top of the material transfer platform 13, the driving cylinder is used to control the limit block to extend to the bottom of the material tray 9 to form a support for the material tray 9.

[0043] The above implementation modes are only for illustrating the technical concept and features of the present invention, and their purpose is to enable people familiar with this technology to understand the content of the present invention and implement it, and they cannot be used to limit the protection scope of the present invention. Any equivalent changes or modifications made according to the spirit of the present invention should be included in the protection scope of the present invention.

Claims

1. A chip detection device, characterized in that: include: A frame, on which a loading conveyor line, a replenishing conveyor line, a unloading conveyor line and a waste conveyor line are sequentially arranged along a first direction and extend toward a second direction; A detection component is arranged on the frame, capable of taking photos of the chips conveyed by the loading conveyor line to confirm whether the back of the chips is damaged, and capable of taking photos of the chips conveyed by the unloading conveyor line to confirm whether the front of the chips is damaged; A flip assembly is arranged on the frame at the end of the loading conveyor line, and is capable of flipping the chips conveyed by the loading conveyor line and transporting them to the unloading conveyor line; The screening component is arranged on the frame. When the back or front side of the chip transported by the unloading conveyor line is damaged, the screening component can move the chip transported by the unloading conveyor line to the waste conveyor line, and move the chip on the replenishing conveyor line to the unloading conveyor line to fill the gap.

2. The chip detection device according to claim 1, characterized in that: The loading conveyor line, the replenishing conveyor line, the unloading conveyor line and the waste conveyor line all transport trays loaded with chips through a transfer platform, the transfer platform has a diagonal fixed structure to position the trays, and the transfer platform is configured to be able to be raised and lowered in the vertical direction on the loading conveyor line, the replenishing conveyor line, the unloading conveyor line and the waste conveyor line.

3. The chip detection device according to claim 1, characterized in that: The detection component at least includes a first 2D detection camera and a 3D detection camera sequentially arranged above the loading conveyor line along a second direction, and a second 2D detection camera arranged above the unloading conveyor line.

4. The chip detection device according to claim 1, characterized in that: The flipping assembly at least includes a carrying platform arranged on the frame above the end of the feeding conveyor line, a lifting structure arranged at the bottom of the frame and used to lift the chip transported by the end of the feeding conveyor line to the carrying platform, and a clamping and flipping unit arranged on the frame and capable of moving along a first direction. The clamping and flipping unit at least includes an outer frame and a clamping structure and a flipping structure arranged on the outer frame. The clamping structure can be lifted and lowered in a vertical direction to clamp the chip, and the flipping structure can receive the chip clamped by the clamping structure and flip the chip 180°.

5. The chip detection device according to claim 4, characterized in that: The clamping structure at least includes a first clamping member arranged on the outer frame and a first driving member for driving the first clamping member to rise and fall relative to the outer frame in a vertical direction, and the flipping structure at least includes a second clamping member rotatably mounted on the outer frame through a rotating frame and movable in a first direction to clamp the chip, and a second driving member arranged on the outer frame and driving the rotating frame to rotate.

6. The chip detection device according to claim 5, characterized in that: The second clamping members are provided in two symmetrical arrangements, and each of the second clamping members is provided with a groove on the surface of one side facing the other for the material supply tray to be placed in, and an expansion portion with a slope is formed at the opening of the groove.

7. The chip detection device according to claim 5, characterized in that: Each of the second clamping members includes a fixed portion and a movable portion. The fixed portion is slidably arranged on the rotating frame, and the movable portion is vertically slidably arranged on the fixed portion. The movable portion is restricted in position by an elastic member and the distance between the movable portion and the fixed portion can be changed.

8. The chip detection device according to claim 1, characterized in that: The screening assembly at least includes a suction structure arranged on the frame and movable along a first direction above the feeding conveyor line, the unloading conveyor line and the waste conveyor line, and the suction structure at least includes a suction cup module arranged along the first direction and a driving module for driving the suction cup module to rise and fall in a vertical direction.

9. The chip detection device according to any one of claims 1 to 8, characterized in that: The loading conveyor line, the replenishing conveyor line, the unloading conveyor line and the waste conveyor line are provided with a material moving platform and a material moving component arranged on the material moving platform on the side away from the flipping component. The material moving components at the loading conveyor line and the replenishing conveyor line can respectively move the material tray down to the loading conveyor line and the replenishing conveyor line, and the material moving components on the unloading conveyor line and the waste conveyor line can move the material tray loaded with chips conveyed by the unloading conveyor line and the waste conveyor line to the material moving platform.

10. The chip detection device according to claim 9, characterized in that: The material moving assembly at least includes a lifting structure arranged on the frame, a tray driven to rise and fall by the lifting structure, and a limiting structure arranged on the material moving platform for fixing the material tray.

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