Dust removal device and panel manufacturing equipment

Abstract

The present invention discloses a dust removal device and panel manufacturing equipment, the dust removal device including a power supply circuit, a first annular guide rail, a second annular guide rail, a conductive drive, a dust removal assembly, an exhaust member, and a magnetic ring. The first annular guide rail is arranged on the annular surface along the inner edge of the annular surface, the second annular guide rail is spaced apart from the first annular guide rail and is arranged on the annular surface along the outer edge of the annular surface, the conductive drive member is slidably connected to and electrically connected to the first annular guide rail and the second annular guide rail, the conductive drive member includes at least a first sub-segment and a second sub-segment located on a side of the first sub-segment close to the second annular guide rail, the dust removal assembly is arranged on the conductive drive member, the dust removal assembly can move with the conductive drive member, the exhaust member can exhaust air from a local area near the annular surface, and the magnetic ring can form a driving magnetic field on the side of the annular surface facing the first annular guide rail, thereby automatically cleaning foreign particles in a certain area of ​​the annular surface.

Description

Technical Field

[0001] The present invention relates to the technical field of dust removal, and in particular to a dust removal device and panel manufacturing equipment. Background Art

[0002] A panel manufacturing device 200' in the related art generally includes a transfer table 2002' and a plurality of workstations 2003' arranged around the transfer table 2002'. A transfer robot 2004' is provided on the transfer table 2002', and the table surface of the transfer table 2002' includes an annular surface 2001' surrounding the transfer robot 2004'. During the display panel manufacturing process, the transfer robot 2004' is required to transfer the display panels in the manufacturing process between the different workstations 2003'. However, since the transfer robot 2004' needs to undergo a large number of changes in its posture during operation, the transfer robot 2004' is prone to wear during long-term operation, resulting in the accumulation of fallen foreign particles on the annular surface 2001'. In addition, during the process of transporting the display panel by the transfer robot 2004', the display panel may also generate debris due to vibration, friction, collision, etc., and this debris may also fall into the annular surface 2001' and form foreign particles.

[0003] The more foreign particles accumulated in the annular surface 2001', the greater the possibility that the foreign particles in the annular surface 2001' will float up and adhere to the surface of the display panel during the process of manufacturing the display panel using the panel manufacturing device 200', thereby causing a decrease in the manufacturing yield of the display panel. Summary of the Invention

[0004] One object of the present invention is to provide a dust removal device that can automatically clean foreign particles within a certain area of ​​an annular surface.

[0005] Another object of the present invention is to propose a panel manufacturing equipment. By setting the aforementioned dust removal device, the dust removal device can be used to clean up the foreign particles that fall into a certain area of ​​the annular surface, thereby reducing the possibility of foreign particles adhering to the panel and improving the manufacturing yield of the panel.

[0006] To achieve this object, the present invention adopts the following technical solutions:

[0007] In a first aspect, a dust removal device is provided, comprising:

[0008] Power supply circuit;

[0009] a first annular guide rail, the first annular guide rail being arranged on the annular surface along an inner edge of the annular surface;

[0010] a second annular guide rail, the second annular guide rail being spaced apart from the first annular guide rail and being disposed on the annular surface along an outer edge of the annular surface;

[0011] a conductive driving member, the conductive driving member being slidably connected to and electrically connected to the first annular guide rail and the second annular guide rail, the conductive driving member comprising at least a first sub-segment and a second sub-segment located on a side of the first sub-segment close to the second annular guide rail;

[0012] a dust removal assembly, the dust removal assembly being disposed on the conductive driving member and being capable of moving with the conductive driving member and cleaning the annular surface;

[0013] an air extraction member, the air extraction member being used to extract air from a local area near the annular surface; and

[0014] a magnetic ring, the magnetic ring being concentrically arranged with the first annular guide rail and located on a side of the annular surface facing away from the first annular guide rail, and the magnetic ring being capable of forming a driving magnetic field on a side of the annular surface facing the first annular guide rail;

[0015] The first annular guide rail and the second annular guide rail are electrically connected to the output end and the input end of the power supply circuit, respectively. When the power supply circuit is operating within the driving magnetic field, the Ampere force applied to each part of the conductive driving member includes at least a force component parallel to the annular surface and pointing to the same side of the conductive driving member, and the Ampere force applied to the first sub-segment is smaller than the Ampere force applied to the second sub-segment.

[0016] As a preferred solution of the dust removal device, the magnetic ring is located on the outer peripheral side of the second annular guide rail.

[0017] As a preferred embodiment of the dust removal device, the dust removal device includes two magnetic rings, one of which is located on the inner side of the first annular guide rail, and the other is located on the outer side of the second annular guide rail, and the directions of the magnetic fields formed by the two magnetic rings on the side facing the annular surface are opposite, and the magnetism of the magnetic ring located on the inner side of the first annular guide rail is smaller than the magnetism of the magnetic ring located on the outer side of the second annular guide rail.

[0018] As a preferred solution of the dust removal device, when the power circuit is working, the current flowing in the first sub-segment is smaller than the current flowing in the second sub-segment.

[0019] As a preferred embodiment of the dust removal device, the dust removal device further comprises at least one third annular guide rail, the third annular guide rail being concentrically arranged on the annular surface with the first annular guide rail, and the third annular guide rail being located between the first annular guide rail and the second annular guide rail;

[0020] The conductive driving member includes a plurality of sub-segments connected in sequence, wherein the plurality of sub-segments include a first sub-segment and a second sub-segment. The sub-segments are arranged in sequence along a direction from the first annular guide rail to the second annular guide rail, and two opposite ends of each sub-segment are electrically connected to two adjacent annular guide rails respectively.

[0021] The dust removal device also includes a current regulating mechanism, which is electrically connected to at least the two annular guide rails so as to be connected in parallel with the sub-segment between the two annular guide rails. The current regulating mechanism can at least regulate the current flowing in the sub-segment between the two annular guide rails.

[0022] As a preferred solution of the dust removal device, the current regulating mechanism includes a resistor.

[0023] As a preferred solution of the dust removal device, the current regulating mechanism includes the power supply circuit, and the power supply circuit includes multiple sub-power supplies, the output end and the input end of the sub-power supply are respectively electrically connected to the two annular guide rails, and among the two annular guide rails electrically connected to different sub-power supplies, at least one of the annular guide rails is different, and among the multiple sub-power supplies, the output end and the input end of one sub-power supply are respectively electrically connected between the first annular guide rail and one of the third annular guide rails, and the output end and the input end of another sub-power supply are respectively electrically connected between the second annular guide rail and one of the third annular guide rails.

[0024] As a preferred solution of the dust removal device, an insulating connector is connected between two adjacent sub-segments, and a conductive connector is also provided between the two sub-segments, and the conductive connector includes an on-off switch or a variable resistor.

[0025] As a preferred embodiment of the dust removal device, the dust removal assembly includes an assembly seat, a discharge member, and an anode adsorption member, wherein the assembly seat is provided on the conductive driving member, the discharge member and the anode adsorption member are spaced apart from each other on the assembly seat, and the discharge member is provided between the anode adsorption member and the annular surface;

[0026] Two ends of the discharge member are electrically connected to the first annular guide rail and the second annular guide rail respectively, or two ends of the discharge member are electrically connected to an external power source;

[0027] One end of the anode adsorption component is electrically connected to the first annular guide rail, or one end of the anode adsorption component can be electrically connected to an external circuit.

[0028] In the second aspect, a panel manufacturing device is provided, comprising: a panel manufacturing device and a dust removal device as described in the first aspect above, wherein the panel manufacturing device has an annular surface, and the first annular guide rail and the second annular guide rail of the dust removal device are both arranged on the annular surface.

[0029] The present invention has the following advantages compared to the prior art:

[0030] The dust removal device of the present invention forms a driving magnetic field on the side facing the annular surface by arranging a magnetic ring, and by arranging a first annular guide rail, a second annular guide rail and a conductive driving member. When the power circuit is working, a current can be generated in the conductive driving member from the connection to the first annular guide rail to the connection to the second annular guide rail, or a current can be generated from the connection to the second annular guide rail to the connection to the first annular guide rail, so that the conductive driving member can be subjected to an Ampere force roughly perpendicular to the length direction of the conductive driving member, and the Ampere force exerted on each part of the conductive driving member at least includes a component force parallel to the annular surface and pointing to the same side of the conductive driving member, so that the conductive driving member can slide along the first annular guide rail and the second annular guide rail under the action of the Ampere force, and then can drive the dust removal component to move, so that the dust removal component can clean the annular surface within a certain area, and automatically clean and collect the impurity particles accumulated within the certain area into the exhaust action area of ​​the exhaust member, so that the exhaust member can remove the impurity particles, thereby realizing automatic cleaning of the impurity particles accumulated on the annular surface within a certain area.

[0031] Furthermore, since the moving speed of the portion of the conductive driving member close to the outer ring edge of the annular surface is greater than the moving speed of the portion of the conductive driving member close to the inner ring edge of the annular surface when the conductive driving member moves along the first annular guide rail and the second annular guide rail around the center of the annular surface, the conductive driving member is provided with at least a first sub-segment and a second sub-segment located on the side of the first sub-segment close to the second annular guide rail, and the Ampere force received by the first sub-segment is smaller than the Ampere force received by the second sub-segment, the acceleration obtained by the portion of the conductive driving member close to the second annular guide rail can be greater than the acceleration obtained by the portion of the conductive driving member close to the first annular guide rail, thereby making the moving speed of the portion of the conductive driving member close to the outer ring edge of the annular surface greater than the moving speed of the portion of the conductive driving member close to the inner ring edge of the annular surface, thereby making the Ampere force received by the conductive driving member more suitable for causing the conductive driving member to move along the first annular guide rail and the second annular guide rail around the center of the annular surface. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] Figure 1 This is a structural diagram of a panel manufacturing device provided by the prior art.

[0033] Figure 2 Schematic diagram of a top view of the structure of a dust removal device according to an embodiment of the present invention.

[0034] Figure 3 This is a schematic cross-sectional view of the structure of a dust removal device according to the first embodiment of the present invention.

[0035] Figure 4 This is a schematic cross-sectional view of the structure of a dust removal device according to a second embodiment of the present invention.

[0036] Figure 5 It is a schematic cross-sectional view of the structure of a dust removal device according to a third embodiment of the present invention.

[0037] Figure 6 This is a schematic cross-sectional view of the structure of the dust removal device according to the first embodiment of the present invention (omitting the dust removal assembly, the air extraction component and the magnetic ring).

[0038] Figure 7 This is a schematic cross-sectional view of the structure of a dust removal device according to a second embodiment of the present invention (omitting the dust removal assembly, the air extraction member and the magnetic ring).

[0039] Figure 8 This is a schematic structural diagram of a panel manufacturing device according to a first embodiment of the present invention.

[0040] Figure 9 FIG. 1 is a schematic structural diagram of a panel manufacturing device according to a second embodiment of the present invention.

[0041] Figure 1 middle:

[0042] 200', panel manufacturing device; 2001', annular surface; 2002', transfer table; 2003', work station; 2004', transfer robot.

[0043] Figures 2 to 9 middle:

[0044] 100. Dust removal device;

[0045] 1. Power supply circuit; 11. Sub-power supply; 2. First annular guide rail; 3. Second annular guide rail; 4. Conductive drive member; 41. Subsegment; 411. First subsegment; 412. Second subsegment; 42. Insulating connector; 43. Conductive connector; 5. Dust removal assembly; 50. Assembly base; 501. Inner cavity; 502. Opening; 51. Discharge member; 52. Anode adsorption member; 53. Base; 54. Brush; 6. Vacuum member; 7. Magnetic ring; 8. Third annular guide rail; 91. Resistor;

[0046] 200. Panel manufacturing device;

[0047] 2001, annular surface; 2001a, through hole; 2002, transfer platform; 2003, work station; 2004, transfer robot; 2005, deposition chamber; 2005a, bottom surface; 2006, first electrode; 2007, second electrode; 2008, column. DETAILED DESCRIPTION

[0048] The advantages and features of the present invention and methods for achieving them will become apparent with reference to the embodiments described in detail below in conjunction with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below, but can be implemented in various forms. This embodiment is provided only to complete the disclosure of the present invention and enable those skilled in the art to fully understand the scope of the present invention. The present invention is limited only by the scope of the claims. The same reference numerals represent the same components throughout the specification.

[0049] Hereinafter, the present invention will be described in detail with reference to the accompanying drawings.

[0050] like Figure 2 and Figure 3 As shown, a dust removal device 100 is provided, including a power supply circuit 1, a first annular guide rail 2, a second annular guide rail 3, a conductive driving member 4, a dust removal component 5, an exhaust member 6 and a magnetic ring 7. The first annular guide rail 2 is arranged on the annular surface 2001 along the inner ring edge of the annular surface 2001, the second annular guide rail 3 is spaced from the first annular guide rail 2, and is arranged on the annular surface 2001 along the outer ring edge of the annular surface 2001, the conductive driving member 4 can be slidably connected to and electrically connected to the first annular guide rail 2 and the second annular guide rail 3, the conductive driving member 4 at least includes a first sub-segment 411 and a second sub-segment 412 located on the side of the first sub-segment 411 close to the second annular guide rail 3, the dust removal component 5 is arranged on the conductive driving member 4, the dust removal component 5 can move with the conductive driving member 4 and clean the annular surface 2001, the exhaust member 6 is used to exhaust the local area near the annular surface 2001, the magnetic ring 7 is concentrically arranged with the first annular guide rail 2, and the magnetic ring 7 is located on the side of the annular surface 2001 away from the first annular guide rail 2, the magnetic ring 7 can form a driving magnetic field on the side of the annular surface 2001 facing the first annular guide rail 2, wherein, due to Figure 2 The power circuit 1 and the magnetic ring 7 shown in FIG. 2 are both located on the side of the annular surface 2001 away from the first annular guide rail 2 and the second annular guide rail 3 . Therefore, the power circuit 1 and the magnetic ring 7 are shown using dotted lines.

[0051] Among them, it can be understood that since the first annular guide rail 2 and the second annular guide rail 3 are both located on the same side of the annular surface 2001, the side of the annular surface 2001 away from the first annular guide rail 2 is equivalent to the side of the annular surface 2001 away from the second annular guide rail 3, and is also equivalent to the side of the annular surface 2001 away from the first annular guide rail 2 and the second annular guide rail 3, and the side of the annular surface 2001 facing the first annular guide rail 2 is equivalent to the side of the annular surface 2001 facing the second annular guide rail 3, and is also equivalent to the side of the annular surface 2001 facing the first annular guide rail 2 and.

[0052] The first annular guide rail 2 and the second annular guide rail 3 are electrically connected to the output end and the input end of the power supply circuit 1, respectively (that is, the first annular guide rail 2 can be electrically connected to the output end of the power supply circuit 1, and the second annular guide rail 3 can be electrically connected to the input end of the power supply circuit 1, or the first annular guide rail 2 can be electrically connected to the input end of the power supply circuit 1, and the second annular guide rail 3 can be electrically connected to the output end of the power supply circuit 1). When the power supply circuit 1 is operating, in the driving magnetic field, the Ampere force exerted on various parts of the conductive driving member 4 at least includes a component force parallel to the annular surface 2001 and pointing to the same side of the conductive driving member 4, and the Ampere force exerted on the first sub-segment 411 is smaller than the Ampere force exerted on the second sub-segment 412.

[0053] By arranging the magnetic ring 7 to form a driving magnetic field on the side facing the annular surface 2001, and by arranging the first annular guide rail 2, the second annular guide rail 3 and the conductive driving member 4, when the power supply circuit 1 is working, a current can be generated in the conductive driving member 4 from the connection to the first annular guide rail 2 to the connection to the second annular guide rail 3, or from the connection to the second annular guide rail 3 to the connection to the first annular guide rail 2, so that the conductive driving member 4 can be subjected to an Ampere force substantially perpendicular to the length direction of the conductive driving member 4, and the Ampere force at each location of the conductive driving member 4 includes at least a parallel The force is directed to the same side of the annular surface 2001 and the conductive driving member 4, so that the conductive driving member 4 can slide along the first annular guide rail 2 and the second annular guide rail 3 under the action of the Ampere force, and then can drive the dust removal component 5 to move, so as to realize the cleaning of the annular surface 2001 within a certain area by the dust removal component 5, and automatically clean the impurity particles accumulated within the certain area and collect them into the exhaust action area of ​​the exhaust member 6, so that the exhaust member 6 can remove the impurity particles, thereby realizing the automatic cleaning of the impurity particles accumulated on the annular surface 2001 within a certain area.

[0054] Furthermore, since the conductive driving member 4 moves along the first annular guide rail 2 and the second annular guide rail 3 around the center of the annular surface 2001, the moving speed of the portion of the conductive driving member 4 close to the outer edge of the annular surface 2001 is greater than the moving speed of the portion of the conductive driving member 4 close to the inner edge of the annular surface 2001, the conductive driving member 4 is provided with at least a first sub-segment 411 and a second sub-segment 412 located on the side of the first sub-segment 411 close to the second annular guide rail 3, and the Ampere force exerted on the first sub-segment 411 is smaller than that on the second sub-segment 412. 2, the Ampere force exerted on the conductive driving member 4 can make the acceleration of the portion of the conductive driving member 4 close to the second annular guide rail 3 greater than the acceleration of the portion of the conductive driving member 4 close to the first annular guide rail 2, thereby making the movement speed of the portion of the conductive driving member 4 close to the outer edge of the annular surface 2001 greater than the movement speed of the portion of the conductive driving member 4 close to the inner edge of the annular surface 2001, thereby making the Ampere force exerted on the conductive driving member 4 more suitable for causing the conductive driving member 4 to move along the first annular guide rail 2 and the second annular guide rail 3 around the center of the annular surface 2001.

[0055] It can be understood that, according to the left-hand rule, in order to make the Ampere force acting on various parts of the conductive driving member 4 include at least a force component parallel to the annular surface 2001 and pointing to the same side of the conductive driving member 4, the magnetic flux lines of the driving magnetic field must not be parallel to the annular surface 2001, and must all point from the side facing the annular surface 2001 to the side facing away from the annular surface 2001, or from the side facing away from the annular surface 2001 to the side facing the annular surface 2001.

[0056] Preferably, the magnetic flux lines of the driving magnetic field can be made substantially perpendicular to the annular surface 2001, so that when the Ampere force on the conductive driving member 4 remains unchanged, the Ampere force component parallel to the annular surface 2001 and directed toward the same side of the conductive driving member 4 is greater. In other words, the utilization efficiency of the Ampere force is higher, and the conductive driving member 4 can be driven to move along the first annular guide rail 2 and the second annular guide rail 3 around the center of the annular surface 2001 with lower energy consumption. Figure 2 As shown, Figure 2 The figure shows that the magnetic flux lines of the driving magnetic field are approximately perpendicular to the annular surface 2001 and point to Figure 2 within the paper.

[0057] Optionally, the magnetic ring 7 may be located on the side facing away from the annular surface 2001 to prevent the magnetic ring 7 from affecting the operation of other devices and equipment on the side facing the annular surface 2001 .

[0058] Since the Ampere force exerted on the conductive driving component 4 is proportional to the strength of the cut magnetic field and the magnitude of the current flowing in the conductive driving component 4, based on this, the Ampere force exerted on the first sub-segment 411 can be made smaller than the Ampere force exerted on the second sub-segment 412 by making the strength of the driving magnetic field cut by the first sub-segment 411 smaller than the strength of the driving magnetic field cut by the second sub-segment 412, and / or making the current flowing in the first sub-segment 411 smaller than the current flowing in the second sub-segment 412.

[0059] Specifically, when the intensity of the driving magnetic field cut by the first sub-segment 411 is smaller than the intensity of the driving magnetic field cut by the second sub-segment 412, as shown in FIG. Figure 3 As shown, in an optional embodiment, the magnetic ring 7 is located on the outer peripheral side of the second annular guide rail 3, so that the magnetic ring 7 can form a driving magnetic field on the side facing the annular surface 2001, and the magnetic field strength is stronger in the part closer to the second annular guide rail 3, and weaker in the part closer to the first annular guide rail 2, so that the strength of the driving magnetic field cut by the first sub-segment 411 is smaller than the strength of the driving magnetic field cut by the second sub-segment 412.

[0060] like Figure 2 and Figure 4 As shown, in another optional embodiment, the dust removal device 100 includes two magnetic rings 7, one of the two magnetic rings 7 is located on the inner side of the first annular guide rail 2, and the other is located on the outer side of the second annular guide rail 3, and the directions of the magnetic fields formed by the two magnetic rings 7 on the side of the annular surface 2001 toward the first annular guide rail 2 are opposite, and the magnetism of the magnetic ring 7 located on the inner side of the first annular guide rail 2 is smaller than the magnetism of the magnetic ring 7 located on the outer side of the second annular guide rail 3, so that the magnetic field formed by the magnetic ring 7 located on the outer side of the second annular guide rail 3 can be weakened by the magnetic field formed by the magnetic ring 7 located on the inner side of the first annular guide rail 2, so that the strength of the driving magnetic field gradually increases from the first annular guide rail 2 to the second annular guide rail 3, so that the strength of the driving magnetic field cut by the first sub-segment 411 is smaller than the strength of the driving magnetic field cut by the second sub-segment 412. In addition, the magnetic field formed by the magnetic ring 7 located on the inner side of the first annular guide rail 2 is used to weaken the magnetic field formed by the magnetic ring 7 located on the outer peripheral side of the second annular guide rail 3. On the one hand, the difference in magnetic field strength between the part of the driving magnetic field close to the first annular guide rail 2 and the part close to the second annular guide rail 3 can be increased, so that the difference between the Ampere force exerted on the first sub-segment 411 and the Ampere force exerted on the second sub-segment 412 is larger, so as to further make the force exerted on the conductive driving component 4 more reasonable. On the other hand, by selecting magnetic rings 7 with different magnetic properties, the magnetic field strength of each position of the formed driving magnetic field can be more flexibly adjusted.

[0061] When the power supply circuit 1 is operated, the current flowing in the first sub-segment 411 is smaller than the current flowing in the second sub-segment 412. Figures 4 to 6 As shown, optionally, the dust removal device 100 may further include at least one third annular guide rail 8, which is concentrically arranged on the annular surface 2001 with the first annular guide rail 2, and the third annular guide rail 8 is located between the first annular guide rail 2 and the second annular guide rail 3. The conductive driving member 4 includes a plurality of sub-segments 41 connected in sequence, among which the plurality of sub-segments 41 include the aforementioned first sub-segment 411 and the second sub-segment 412. Along the direction from the first annular guide rail 2 to the second annular guide rail 3, the sub-segments 41 are arranged in sequence, and the two opposite ends of each sub-segment 41 are respectively electrically connected to the two adjacent annular guide rails. The dust removal device 100 also includes a current regulating mechanism (not numbered in the figure), which is electrically connected to at least the two annular guide rails to be connected in parallel with the sub-segment 41 between the two annular guide rails. The current regulating mechanism can at least regulate the current flowing in the sub-segment 41 between the two annular guide rails so that the current flowing in the first sub-segment 411 is smaller than the current flowing in the second sub-segment 412.

[0062] When the dust removal device 100 further includes a plurality of third annular guide rails 8 , the radii of the plurality of third annular guide rails 8 may increase sequentially, and the third annular guide rails 8 may be arranged concentrically and sequentially.

[0063] Optionally, the current regulating mechanism may be located on the side facing away from the annular surface 2001 to prevent the current regulating mechanism from affecting the operation of other devices and equipment on the side facing the annular surface 2001 .

[0064] like Figure 4 As shown, in an optional embodiment, the current regulating mechanism includes a resistor 91. The resistor 91 can be connected in parallel to the subsegment 41 between the two annular guide rails through the two annular guide rails, so that the current can be partially diverted to the point where it flows through the resistor 91, thereby reducing the current flowing through the subsegment 41 between the two annular guide rails. Specifically, at least the first subsegment 411 is connected in parallel to the resistor 91, so that the resistor 91 can reduce the current flowing in the first subsegment 411.

[0065] Optionally, the current regulating mechanism includes multiple resistors 91, which are electrically connected between two annular guide rails, and at least one of the two annular guide rails electrically connected to different resistors 91 is different. In other words, for any two resistors 91, the two ends of the two resistors 91 are electrically connected to different annular guide rails, or one end of the two resistors 91 may be connected to the same annular guide rail, and the other ends of the two resistors 91 are connected to different annular guide rails, so that the current flowing in more sub-segments 41 can be adjusted through the resistors 91, so that the Ampere force exerted on more sub-segments 41 in the driving magnetic field can be more flexibly adjusted.

[0066] For example, a resistor 91 may be connected between any two adjacent annular guide rails, so that each sub-segment 41 is respectively connected in parallel with a resistor 91, so that the current flowing in each sub-segment 41 can be flexibly adjusted by adjusting the resistance of the resistor 91 connected in parallel to each sub-segment 41, thereby flexibly adjusting the Ampere force exerted on more sub-segments 41 in the driving magnetic field.

[0067] Optionally, the current shunting capability of the resistor 91 can be changed by replacing the resistor 91 with a different resistance value, or at least part of the resistor 91 can be a variable resistor, so that the resistance value of the resistor 91 can be adjusted without replacing the resistor 91.

[0068] like Figure 5 As shown, in another optional embodiment, the current regulation mechanism includes a power supply circuit 1, which includes multiple sub-power supplies 11. The output and input ends of each sub-power supply 11 are electrically connected to two annular rails. Different sub-power supplies 11 are electrically connected to at least one of the two annular rails. Among the multiple sub-power supplies 11, the output and input ends of one sub-power supply 11 are electrically connected between the first annular rail 2 and a third annular rail 8, respectively. Another sub-power supply 11 has its output and input ends electrically connected between the second annular rail 3 and a third annular rail 8, respectively. Thus, each sub-power supply 11 can control the current flowing through the sub-segment 41 between the two annular rails to which it is connected. In this case, the multiple sub-power supplies 11 can be connected in series or independently.

[0069] Exemplarily, a sub-power source 11 may be connected between any two adjacent annular guide rails, and the output end of each sub-power source 11 is electrically connected to an annular guide rail in the two adjacent annular guide rails close to the inner circle of the annular surface, and the input end of each sub-power source 11 is electrically connected to an annular guide rail in the two adjacent annular guide rails close to the outer circle of the annular surface, or, the output end of each sub-power source 11 is electrically connected to an annular guide rail in the two adjacent annular guide rails close to the outer circle of the annular surface, and the input end of each sub-power source 11 is electrically connected to an annular guide rail in the two adjacent annular guide rails close to the inner circle of the annular surface, so that the current flowing in each sub-segment 41 can be flexibly adjusted by adjusting each sub-power source 11, and thus the Ampere force exerted on more sub-segments 41 in the driving magnetic field can be flexibly adjusted.

[0070] like Figure 6 As shown, optionally, an insulating connector 42 is connected between two adjacent sub-segments 41, and a conductive connector 43 is also provided between the two sub-segments 41. The conductive connector 43 includes an on-off switch or a variable resistor, so that the current flowing through the sub-segment 41 can be adjusted by adjusting the conductive connector 43.

[0071] Optionally, the current regulating mechanism may include the resistor 91 and the power supply circuit 1, and the power supply circuit 1 may include multiple sub-power supplies 11, so as to be able to adjust the current flowing through each sub-segment 41 more flexibly and diversely.

[0072] In an optional example, the insulating connector 42 and the conductive connector 43 are located between one end of a sub-segment 41 and an annular guide rail, so that the electrical connection or disconnection between two adjacent sub-segments 41 can be controlled by controlling the on-off switch to be closed or opened, so that part of the sub-segment 41 is not electrically connected between the two adjacent annular guide rails, so that the part of the sub-segment 41 is not affected by the Ampere force, or the resistance value of the conductive connector 43 and the sub-segment 41 as a whole between the two adjacent annular guide rails can be adjusted by adjusting the resistance value of the variable resistor, so as to adjust the current that the sub-segment 41 can obtain when the resistor 91 is connected in parallel with the sub-segment 41.

[0073] In another optional example, the two adjacent sub-segments 41 are connected at their two adjacent ends to two adjacent annular guide rails, and the insulating connector 42 and the conductive connector 43 are connected between the two adjacent sub-segments 41, so that the electrical conduction or disconnection between the two adjacent sub-segments 41 can be controlled by controlling the on-off switch to be closed or opened, so that the circuits of the two sub-segments 41 can be independently controlled by the sub-power supplies 11 connected in parallel to the two sub-segments 41, or, by adjusting the resistance value of the variable resistor, when the sub-segment 41 is connected in parallel with the resistor 91, the current that the sub-segment 41 can be adjusted.

[0074] In addition, whether the current regulating mechanism includes a resistor 91 or multiple sub-power sources 11, an insulating connector 42 and a conductive connector 43 can be connected between two adjacent sub-segments 41, so that the conductive connector 43 can cooperate with the resistor 91 and / or the sub-power source 11 to achieve more flexible and diverse adjustment of the current in each sub-segment 41, such as Figure 6 , Figure 6The figure exemplifies the dust removal device 100 including two third annular guide rails 8, and the conductive driving member 4 including two sub-segments 41, one sub-segment 41 being a first sub-segment 411, which is connected between the first annular guide rail 2 and the adjacent third annular guide rail 8, and the other sub-segment 41 being a second sub-segment 412, which is connected between the second annular guide rail 3 and the adjacent third annular guide rail 8. An insulating connector 42 is connected between the two sub-segments 41 and a conductive connector 43 is provided. The current regulating mechanism includes two sub-power sources 11 and a resistor 91. The two sub-power sources 11 are respectively connected in parallel to the two sub-segments 41 through the annular guide rails, and the resistor 91 is connected between the first annular guide rail 2 and the second annular guide rail 3. In other words, the resistor 91 is connected in parallel to the conductive driving member 4 as a whole. Therefore, by controlling the conductive connector 43 to disconnect or connect or adjust the specific resistance value of the conductive connector 43, and cooperating with the sub-power source 11 to control the two sub-segments 41 respectively, the current flowing in the first sub-segment 411 and the second sub-segment 412 can be flexibly adjusted.

[0075] Furthermore, if Figure 7 As shown, Figure 7 It is exemplarily shown that the dust removal device 100 includes four third annular guide rails 8, the conductive driving member 4 includes four sub-segments 41, and outside the two adjacent third annular guide rails 8 in the middle, there is a sub-segment 41 connected between any two adjacent annular guide rails, and an insulating connector 42 and a conductive connector 43 are connected between any two adjacent sub-segments 41, and the two insulating connectors 42 and the two conductive connectors 43 are respectively located between one end of a sub-segment 41 and the third annular guide rail 8 close to the first annular guide rail 2 and close to the second annular guide rail 3, and the remaining one insulating connector 42 and one conductive connector 43. The current regulating mechanism includes four sub-power supplies 11 and two resistors 91, and the two sub-power supplies 11 are respectively connected in parallel to the two sub-segments 41 through the annular guide rails. Among the two resistors 91, one is connected in parallel to the two sub-segments 41 closest to the first annular guide rail 2, and the other is connected in parallel to the two sub-segments 41 closest to the second annular guide rail 3.

[0076] At this time, the conductive connector 43 can be controlled to be disconnected or connected or the specific resistance value of the conductive connector 43 can be adjusted, and the sub-power supply 11 can be used to control the two sub-segments 41 separately to achieve separate control and adjustment of the current flowing in each sub-segment 41. For example, the conductive connector 43 located in the middle can be disconnected, and the conductive connector 43 close to the first annular guide rail 2 and the second annular guide rail 3 can be connected, so as to cooperate with each sub-power supply 11 and the resistor 91 to adjust the current flowing in each sub-segment 41.

[0077] Please see again Figure 2 and Figure 3The annular surface 2001 may be provided with a through hole 2001a, and the through hole 2001a is connected to the interval space between the first annular guide rail 2 and the second annular guide rail 3. At this time, optionally, the exhaust member 6 is connected to the end of the through hole 2001a away from the dust removal assembly 5, so that the exhaust member 6 can exhaust the area between the first annular guide rail 2 and the second annular guide rail 3 near the through hole 2001a through the through hole 2001a.

[0078] It can be understood that the exhaust member 6 can be specifically arranged at any position outside the area that can be cleaned by the dust removal component 5 as needed, as long as the exhaust member 6 can be connected to the end of the through hole 2001a away from the dust removal component 5 through the air pipe, so as to be able to exhaust the area between the first annular guide rail 2 and the second annular guide rail 3 near the through hole 2001a. This embodiment does not make any specific restrictions on the specific setting position of the exhaust member 6.

[0079] Exemplarily, when the dust removal device 1 is applied to the panel manufacturing device 200 , the exhaust member 6 can be set at any position outside the panel manufacturing device 200 to prevent the exhaust member 6 from affecting the display panel manufacturing process in the panel manufacturing device 200 .

[0080] The dust removal assembly 5 can be of various structures to collect and transport foreign particles to the suction area of ​​the suction member 6 in different ways. Next, two different structures of the dust removal assembly 5 will be described with reference to the accompanying drawings.

[0081] like Figure 3 and Figure 4 As shown, in an optional embodiment, the dust removal component 5 includes a component seat 50, a discharge component 51 and an anode adsorption component 52. The component seat 50 is arranged on the conductive driving component 4, and the discharge component 51 and the anode adsorption component 52 are spaced apart from each other on the component seat 50, and the discharge component 51 is arranged between the anode adsorption component 52 and the annular surface 2001, so that electrons can be released from a position close to the annular surface 2001 through the discharge component 51 to charge the impurity particles located on the annular surface 2001. At the same time, the charged impurity particles are adsorbed by the anode adsorption component 52, so that the impurity particles are collected and transported to the exhaust action area of ​​the exhaust component 6.

[0082] In addition, after the dust removal component 5 moves to the vicinity of the suction action area of ​​the exhaust component 6, the discharge component 51 and the anode adsorption component 52 can be powered off to release the force exerted by the discharge component 51 and the anode adsorption component 52 on the impurity particles, thereby making it easier for the exhaust component 6 to extract the impurity particles.

[0083] Optionally, the discharge member 51 may be made of a filament material. For example, the discharge member 51 may include but is not limited to tungsten material and rhenium material, so that when the discharge member 51 is powered on, it can emit electrons to the outside.

[0084] Optionally, the two ends of the discharge element 51 are electrically connected to the first annular guide rail 2 and the second annular guide rail 3 respectively, so that when the power supply circuit 1 is working, voltage can be applied to the two ends of the discharge element 51 through the first annular guide rail 2 and the second annular guide rail 3, so that the discharge element 51 can be used for discharge.

[0085] At this time, when the power supply circuit 1 is working, the conductive driving component 4 drives the dust removal component 5 to move to the vicinity of the exhaust action area of ​​the exhaust component 6. The discharge component 51 can be powered off by simply disconnecting the power supply circuit 1 from the first annular guide rail 2 and the second annular guide rail 3 to release the force exerted by the discharge component 51 on the impurity particles.

[0086] Exemplarily, two ends of the discharge member 51 may be electrically connected to two ends of the conductive driving member 4 , so that the discharge member 51 and the conductive driving member 4 are connected in parallel between the first annular guide rail 2 and the second annular guide rail 3 .

[0087] In other embodiments, the two ends of the discharge element 51 can also be electrically connected to an external power supply so that a voltage can be applied to the two ends of the discharge element 51 through the external power supply, thereby being able to control the movement of the conductive driving element 4 and whether the discharge element 51 discharges through the power supply circuit 1 and the external power supply respectively.

[0088] Optionally, one end of the anode adsorbent 52 can be electrically connected to the first annular guide rail 2, so that when the power circuit 1 is working, the anode adsorbent 52 can be formed into an anode through the first annular guide rail 2, so that the anode adsorbent 52 can be used to adsorb charged impurity particles.

[0089] At this time, when the power supply circuit 1 is working, the conductive driving component 4 drives the dust removal component 5 to move to the vicinity of the suction action area of ​​the suction component 6. The anode adsorption component 52 can be powered off by simply disconnecting the power supply circuit 1 from the first annular guide rail 2 and the second annular guide rail 3 to release the adsorption force exerted by the anode adsorption component 52 on the impurity particles.

[0090] For example, one end of the anode adsorption member 52 may be electrically connected to the conductive driving member 4 , so that one end of the anode adsorption member 52 is electrically connected to the first annular guide rail 2 through the conductive driving member 4 .

[0091] In other embodiments, one end of the anode adsorption member 52 can be electrically connected to an external circuit so that a voltage can be applied to one end of the anode adsorption member 52 through an external power supply, thereby being able to control the movement of the conductive driving member 4 and whether the anode adsorption member 52 forms an anode through the power supply circuit 1 and the external power supply respectively.

[0092] Optionally, the dust removal assembly 5 may include a plurality of anode adsorption members 52, and along the relative direction between the discharge member 51 and the anode adsorption member 52, the plurality of anode adsorption members 52 are arranged at intervals (eg Figure 3 Alternatively, along the relative direction of the first annular guide rail 2 and the second annular guide rail 3, a plurality of anode adsorption members 52 are arranged at intervals (as shown in FIG. Figure 4 As shown), the adsorbable surface area of ​​the dust removal component 5 for charged impurity particles can be increased by increasing the number of anode adsorption components 52, thereby improving the collection capacity of the dust removal component 5 for charged impurity particles.

[0093] Optionally, the anode adsorption component 52 is a porous structure. For example, the anode adsorption component 52 may be a sheet structure including but not limited to a mesh structure with multiple holes, thereby increasing the surface area of ​​the anode adsorption component 52 and thereby improving the dust removal component 5's ability to collect charged impurity particles.

[0094] Optionally, the component seat 50 is a cover-like structure having an inner cavity 501. The component seat 50 has an opening 502 on the side facing the annular surface 2001, which is connected to the inner cavity 501. The discharge member 51 and the anode adsorption member 52 are both located inside the inner cavity 501. Thus, the component seat 50 can prevent the dispersal of charged impurity particles entering the inner cavity 501, thereby improving the dust removal effect of the dust removal component 5. In addition, this arrangement also enables the conductive driving member 4 to drive the dust removal component 5 to move to the vicinity of the suction action area of ​​the exhaust member 6, and the opening 502 is roughly aligned with the through hole 2001a, so that the exhaust member 6 can remove the impurity particles collected in the inner cavity 501 through the through hole 2001a.

[0095] like Figure 5 As shown, in another optional embodiment, the dust removal component 5 includes a seat body 53 and a brush 54. The seat body 53 is arranged on the conductive driving member 4, and the brush 54 is arranged on the seat body 53. The side of the brush 54 away from the seat body 53 can abut against the annular surface 2001, so that the seat body 53 can follow the movement of the conductive driving member 4 to enable the brush 54 to sweep the impurity particles on the annular surface 2001 into the suction action area of ​​the suction member 6.

[0096] like Figure 8 As shown, a panel manufacturing equipment is provided, including: a panel manufacturing device 200 and a dust removal device 100 as described in the aforementioned technical solution, the panel manufacturing device 200 has an annular surface 2001, and the first annular guide rail 2 and the second annular guide rail 3 of the dust removal device 100 are both arranged on the annular surface 2001. By setting the aforementioned dust removal device 100, the dust removal device 100 can be used to clean up foreign particles that fall into a certain area of ​​the annular surface 2001, thereby reducing the possibility of foreign particles adhering to the panel and improving the manufacturing yield of the panel.

[0097] Furthermore, the panel manufacturing device 200 may be as described in the aforementioned background technology, including a transfer platform 2002 and a plurality of workstations 2003 arranged around the transfer platform 2002, a transfer robot 2004 is provided on the transfer platform 2002, and the table surface of the transfer platform 2002 includes a ring-shaped surface 2001 structure surrounding the transfer robot 2004.

[0098] like Figure 9 As shown, in other embodiments, the panel manufacturing device 200 can also be other structures for manufacturing display panels. For example, the panel manufacturing device 200 can also be a chemical vapor deposition device, which has a deposition chamber 2005, and a first electrode 2006 and a second electrode 2007 respectively arranged at the top and bottom of the deposition chamber 2005, wherein the second electrode 2007 is usually supported by a column 2008 to be suspended relative to the bottom surface 2005a in the deposition chamber 2005, and the bottom surface 2005a has an annular surface 2001 surrounding the column 2008. At this time, the dust removal device 100 can be arranged in the space formed between the second electrode 2007 and the bottom surface 2005a, and the first annular guide rail 2 and the second annular guide rail 3 of the dust removal device 100 are both arranged around the column 2008, so that the dust removal device 100 can automatically clean a certain area within the annular surface 2001 located on the outer periphery of the column 2008.

[0099] Although the embodiments of the present invention have been described above with reference to the accompanying drawings, the present invention is not limited to the above embodiments, but can be manufactured in various forms, and those skilled in the art will understand that the present invention can be implemented in other specific forms without changing the technical spirit or basic characteristics of the present invention. Therefore, it should be understood that the above embodiments are illustrative and not restrictive in all aspects.

Claims

1. A dust removal device, characterized in that: include: Power supply circuit; a first annular guide rail, the first annular guide rail being arranged on the annular surface along an inner edge of the annular surface; a second annular guide rail, the second annular guide rail being spaced apart from the first annular guide rail and being disposed on the annular surface along an outer edge of the annular surface; a conductive driving member, the conductive driving member being slidably connected to and electrically connected to the first annular guide rail and the second annular guide rail, the conductive driving member comprising at least a first sub-segment and a second sub-segment located on a side of the first sub-segment close to the second annular guide rail; a dust removal assembly, the dust removal assembly being disposed on the conductive driving member and being capable of moving with the conductive driving member and cleaning the annular surface; an air extraction member, the air extraction member being used to extract air from a local area near the annular surface; as well as, a magnetic ring, the magnetic ring being concentrically arranged with the first annular guide rail and located on a side of the annular surface facing away from the first annular guide rail, and the magnetic ring being capable of forming a driving magnetic field on a side of the annular surface facing the first annular guide rail; The first annular guide rail and the second annular guide rail are electrically connected to the output end and the input end of the power supply circuit, respectively. When the power supply circuit is operating within the driving magnetic field, the Ampere force applied to each part of the conductive driving member includes at least a force component parallel to the annular surface and pointing to the same side of the conductive driving member, and the Ampere force applied to the first sub-segment is smaller than the Ampere force applied to the second sub-segment.

2. The dust removal device according to claim 1, characterized in that: The magnetic ring is located on the outer circumference of the second annular guide rail.

3. The dust removal device according to claim 1, characterized in that: The dust removal device includes two magnetic rings, one of which is located on the inner side of the first annular guide rail, and the other is located on the outer side of the second annular guide rail, and the directions of the magnetic fields formed by the two magnetic rings on the side facing the annular surface are opposite, and the magnetism of the magnetic ring located on the inner side of the first annular guide rail is smaller than the magnetism of the magnetic ring located on the outer side of the second annular guide rail.

4. The dust removal device according to claim 1, characterized in that: When the power circuit is in operation, a current flowing in the first sub-segment is smaller than a current flowing in the second sub-segment.

5. The dust removal device according to claim 4, characterized in that: The dust removal device further includes at least one third annular guide rail, the third annular guide rail being concentrically arranged on the annular surface with the first annular guide rail, and the third annular guide rail being located between the first annular guide rail and the second annular guide rail; The conductive driving member includes a plurality of sub-segments connected in sequence, wherein the plurality of sub-segments include a first sub-segment and a second sub-segment. The sub-segments are arranged in sequence along a direction from the first annular guide rail to the second annular guide rail, and two opposite ends of each sub-segment are electrically connected to two adjacent annular guide rails respectively. The dust removal device also includes a current regulating mechanism, which is electrically connected to at least the two annular guide rails so as to be connected in parallel with the sub-segment between the two annular guide rails. The current regulating mechanism can at least regulate the current flowing in the sub-segment between the two annular guide rails.

6. The dust removal device according to claim 5, characterized in that: The current regulating mechanism includes a resistor.

7. The dust removal device according to claim 6, characterized in that: The current regulating mechanism includes the power supply circuit, and the power supply circuit includes multiple sub-power supplies, the output end and the input end of the sub-power supply are respectively electrically connected to the two annular guide rails, and at least one of the two annular guide rails electrically connected to different sub-power supplies is different. Among the multiple sub-power supplies, the output end and the input end of one sub-power supply are respectively electrically connected between the first annular guide rail and one of the third annular guide rails, and the output end and the input end of another sub-power supply are respectively electrically connected between the second annular guide rail and one of the third annular guide rails.

8. The dust removal device according to any one of claims 5 to 7, characterized in that: An insulating connector is connected between two adjacent sub-segments, and a conductive connector is also provided between the two sub-segments. The conductive connector includes an on-off switch or a variable resistor.

9. The dust removal device according to any one of claims 1 to 7, characterized in that: The dust removal assembly includes an assembly seat, a discharge member, and an anode adsorption member, wherein the assembly seat is provided on the conductive driving member, the discharge member and the anode adsorption member are spaced apart from each other on the assembly seat, and the discharge member is provided between the anode adsorption member and the annular surface; Two ends of the discharge member are electrically connected to the first annular guide rail and the second annular guide rail respectively, or two ends of the discharge member are electrically connected to an external power source; One end of the anode adsorption component is electrically connected to the first annular guide rail, or one end of the anode adsorption component can be electrically connected to an external circuit.

10. A panel manufacturing device, characterized in that: include: A panel manufacturing device and a dust removal device as described in any one of claims 1 to 9, wherein the panel manufacturing device has an annular surface, and the first annular guide rail and the second annular guide rail of the dust removal device are both arranged on the annular surface.

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