Light beam adjusting system and laser processing equipment

Abstract

The invention discloses a light beam adjusting system and laser processing equipment, and relates to the technical field of laser application, the light beam adjusting system comprises a beam expanding and shaping module, a light adjusting module and a first spectroscope which are arranged in the light path direction, and a light beam enters the light adjusting module after being expanded and shaped by the beam expanding and shaping module; the light adjusting module is used for adjusting the light power of the light beam and then enabling the light beam to enter the first spectroscope to form reflected light and transmission light, the transmission light is emitted as a processing light beam, the light beam adjusting system further comprises a driver connected with the light adjusting module and a controller connected with the driver, and the reflection side of the first spectroscope is further provided with a first sensor connected with the controller; the controller obtains the optical power measured by the first sensor and controls the refractive index of the light adjusting module according to the optical power so as to adjust the optical power of the processing light beam. According to the light beam adjusting system and the laser processing equipment provided by the invention, the laser beam with relatively stable optical power can be provided.

Description

Technical Field

[0001] The present application relates to the field of laser application technology, and in particular to a beam adjustment system and laser processing equipment. Background Art

[0002] In today's highly developed technological era, laser processing technology has become one of the key pillars of the global economy. Laser processing equipment is widely used in many fields such as electronic communications, computers, medical equipment, automotive electronics, aerospace, etc. Its performance and quality are directly related to the reliability and stability of various high-end technology products. Among them, laser processing is a processing technology that uses a high-energy density laser beam to irradiate the surface of the workpiece, causing the material to melt, vaporize or chemically change instantly, thereby cutting, welding, punching, and surface treating the material. Since the laser beam can be focused to a very small spot, high-precision processing can be achieved; at the same time, the laser processing speed is fast, which can greatly improve production efficiency. The non-contact and strong adaptability of laser processing can avoid deformation of the workpiece and the material is widely applicable and widely used.

[0003] With the continuous advancement of laser processing technology, the integration of laser processing equipment is getting higher and higher, and the optical path structure is becoming increasingly complex. During the processing, with the aging of the light source and the influence of external factors such as jitter, temperature changes, and optical component loss, the processing laser power will become unstable, which will directly affect the processing accuracy and efficiency. Summary of the invention

[0004] The purpose of the present application is to provide a beam adjustment system and laser processing equipment, which can provide a laser beam with relatively stable optical power.

[0005] On the one hand, an embodiment of the present application provides a light beam adjustment system, including a beam expansion and shaping module, a light adjustment module and a first beam splitter arranged along the direction of the light path. The light beam is expanded and shaped by the beam expansion and shaping module and then enters the light adjustment module. The light adjustment module adjusts the optical power of the light beam and then enters the first beam splitter to form reflected light and transmitted light. The transmitted light is emitted as a processing light beam. The light beam adjustment system also includes a driver connected to the light adjustment module and a controller connected to the driver. A first sensor connected to the controller is also provided on the reflective side of the first beam splitter. The controller obtains the optical power measured by the first sensor and controls the refractive index of the light adjustment module according to the optical power to adjust the optical power of the processing light beam.

[0006] As an implementable manner, a second beam splitter is further provided on the light output side of the beam expansion and shaping module, a second sensor is provided on the reflection side of the second beam splitter, and the controller is further connected to the second sensor to control the driver according to the optical power detected by the second sensor.

[0007] As an implementable manner, the driver is used to generate an ultrasonic signal according to the control of the controller, and the light adjustment module adjusts the refractive index of the light beam under the action of the ultrasonic signal.

[0008] As an implementable manner, the light beam adjustment system also includes a polarization component arranged on the transmission side of the first beam splitter, the polarization component includes a first polarization element and a second polarization element arranged sequentially along the light path direction, and the first polarization element and the second polarization element sequentially adjust the polarization direction of the light beam.

[0009] As an implementable manner, the first polarizing element is a first polarizer, the second polarizing element is a second polarizer, and the first polarizer and the second polarizer have different thicknesses.

[0010] As an implementable manner, along the light path direction, a first reflector and a second reflector are sequentially arranged on the light exiting side of the second beam splitter, and the first reflector and the second reflector are used to reflect the light beam to fold the light path.

[0011] As an implementable manner, the first beam splitter and the second beam splitter are polarization beam splitters.

[0012] As an implementable manner, the beam adjustment system further includes an air circuit assembly, which includes an air source and a plurality of jet disks connected to the air source, and the jet disks blow air to each lens of the beam adjustment system to purge each lens.

[0013] As an implementable manner, the beam expansion and shaping module includes a biconcave lens and a plano-convex lens sequentially arranged along the optical path, and the plane of the plano-convex lens faces the biconcave lens.

[0014] On the other hand, an embodiment of the present application provides a laser processing device, including a light source for emitting laser and a beam adjustment system as described above, which is arranged on the light emitting side of the light source. The light source emits laser, and the laser is adjusted by the beam adjustment system and then emitted to the surface of the workpiece to be processed, so as to process the workpiece to be processed.

[0015] The beneficial effects of the embodiments of the present application include:

[0016] The beam adjustment system provided by the present application includes a beam expansion and shaping module, a light adjustment module and a first spectroscope arranged along the optical path direction. After the beam is expanded and shaped by the beam expansion and shaping module, the beam enters the light adjustment module. After the light power of the beam is adjusted by the light adjustment module, the light enters the first spectroscope to form reflected light and transmitted light. The transmitted light is emitted as a processing beam. The beam adjustment system also includes a driver connected to the light adjustment module and a controller connected to the driver. The reflection side of the first spectroscope is also provided with a first sensor connected to the controller. The controller obtains the light power measured by the first sensor, and controls the refractive index of the light adjustment module according to the light power to adjust the light power of the processing beam. The feedback mechanism formed by the first sensor and the controller, and the adjustment mechanism formed by the controller and the driver make the light power of the processing beam within a certain range, thereby improving the stability of the light power of the processing beam, so that the beam adjustment system can provide a laser beam with relatively stable light power. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without paying creative work.

[0018] Figure 1 One of the structural schematic diagrams of a light beam adjustment system provided in an embodiment of the present application;

[0019] Figure 2 A second structural schematic diagram of a light beam adjustment system provided in an embodiment of the present application;

[0020] Figure 3 A third structural schematic diagram of a light beam adjustment system provided in an embodiment of the present application;

[0021] Figure 4 The fourth structural schematic diagram of a light beam adjustment system provided in an embodiment of the present application.

[0022] Icons: 100-beam adjustment system; 110-beam expansion and shaping module; 111-double concave lens; 112-plano-convex lens; 120-light adjustment module; 121-driver; 130-first spectrometer; 131-first sensor; 140-controller; 150-second spectrometer; 151-second sensor; 160-polarization component; 161-first polarization element; 162-second polarization element; 171-first reflector; 172-second reflector; 182-jet disk; 210-light source. DETAILED DESCRIPTION

[0023] In order to make the purpose, technical solution and advantages of the embodiments of the present application clearer, the technical solution in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, rather than all the embodiments. The components of the embodiments of the present application described and shown in the drawings here can be arranged and designed in various different configurations.

[0024] Therefore, the following detailed description of the embodiments of the present application provided in the accompanying drawings is not intended to limit the scope of the present application for which protection is sought, but merely represents selected embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in the field without creative work are within the scope of protection of the present application.

[0025] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0026] Laser processing is a technology that uses high-energy laser beams to accurately process materials. Laser processing has the advantages of non-contact, high precision, small heat-affected zone, and strong adaptability. It is widely used in industrial manufacturing, electronics, aerospace, automobiles, medical and other fields. In the existing technology, due to the reasons of laser processing equipment, the optical power of the light beam irradiated to the surface of the workpiece to be processed is unstable.

[0027] The present application embodiment provides a beam adjustment system 100, such as Figure 1 As shown, it includes a beam expansion and shaping module 110, a light adjustment module 120 and a first beam splitter 130 arranged along the optical path direction. After the light beam is expanded and shaped by the beam expansion and shaping module 110, it enters the light adjustment module 120. The light adjustment module 120 adjusts the optical power of the light beam and then enters the first beam splitter 130 to form reflected light and transmitted light. The transmitted light is emitted as a processing light beam. The light beam adjustment system 100 also includes a driver 121 connected to the light adjustment module 120 and a controller 140 connected to the driver 121. A first sensor 131 connected to the controller 140 is also provided on the reflective side of the first beam splitter 130. The controller 140 obtains the optical power measured by the first sensor 131, and controls the refractive index of the light adjustment module 120 according to the optical power to adjust the optical power of the processing light beam.

[0028] The beam adjustment system 100 provided in the embodiment of the present application is applied to laser processing equipment. Specifically, the laser processing equipment includes a light source 210 and a beam adjustment system 100 arranged on the light emitting side of the light source 210. The light source 210 emits a laser beam. The beam adjustment system 100 adjusts the laser beam and then emits it to illuminate the surface of the workpiece to be processed, so as to process the workpiece. The beam adjustment system 100 provided in the embodiment of the present application is used for emitting a laser beam with relatively stable output power.

[0029] Specifically, the beam adjustment system 100 includes a beam expansion and shaping module 110, a light adjustment module 120 and a first beam splitter 130 which are sequentially arranged along the optical axis direction of the light beam, wherein the beam expansion and shaping module 110 is used to expand and shape the light beam, and beam expansion can reduce the energy density of the light beam, thereby avoiding damage to the lens in the beam adjustment system 100 by the high energy density light beam, thereby improving the life of the light beam adjustment system 100 on the one hand, and improving the stability of the light beam adjustment system 100 on the other hand, thereby improving the stability of the processing light beam emitted by the light beam adjustment system 100.

[0030] The light adjustment module 120 is also connected to a driver 121, and the driver 121 is also connected to a controller 140. In addition, the first beam splitter 130 splits the light beam irradiated thereto, and part of the light beam is transmitted, and part of the light beam is reflected, wherein the transmitted part of the light beam is emitted to form a processing light beam, and the reflected part of the light beam is irradiated to the first sensor 131, and the first sensor 131 measures the optical power of the part of the light beam. The first sensor 131 is also connected to the controller 140, and the controller 140 obtains the optical power measured by the first sensor 131, and calculates the optical power of the transmitted part of the light beam according to the optical power of the reflected part of the light beam. Optical power, that is, the optical power of the processing light beam, and the driver 121 is adjusted according to the optical power of the processing light beam, so as to adjust the refractive index of the light adjustment module 120 through the driver 121, thereby adjusting the optical power of the light beam emitted by the light adjustment module 120, thereby adjusting the optical power of the processing light beam, and through the feedback mechanism formed by the first sensor 131 and the controller 140, and the adjustment mechanism formed by the controller 140 and the driver 121, the optical power of the processing light beam is within a certain range, thereby improving the stability of the optical power of the processing light beam, so that the beam adjustment system 100 can provide a laser beam with relatively stable optical power.

[0031] Specifically, the controller 140 internally stores a preset value of optical power. When the value of optical power obtained by the controller 140 from the first sensor 131 is greater than the preset value, the controller 140 controls the driver 121 to reduce the refractive index of the light adjustment module 120, thereby reducing the optical power of the processing light beam. Conversely, when the value of optical power obtained by the controller 140 from the first sensor 131 is less than the preset value, the controller 140 controls the driver 121 to increase the refractive index of the light adjustment module 120, thereby increasing the optical power of the processing light beam.

[0032] The beam adjustment system 100 provided in the present application uses the feedback mechanism formed by the first sensor 131 and the controller 140, and the adjustment mechanism formed by the controller 140 and the driver 121 to keep the optical power of the processing beam within a certain range, thereby improving the stability of the optical power of the processing beam, and enabling the beam adjustment system 100 to provide a laser beam with relatively stable optical power.

[0033] Optional, such as Figure 2 As shown, a second beam splitter 150 is further provided on the light output side of the beam expansion and shaping module 110 , a second sensor 151 is provided on the reflection side of the second beam splitter 150 , and the controller 140 also communicates with the second sensor 151 to control the driver 121 according to the optical power detected by the second sensor 151 .

[0034] In order to improve the accuracy of adjusting the optical power of the light beam adjustment system 100, the embodiment of the present application further sets a second beam splitter 150 on the light output side of the beam expansion and shaping module 110, and sets a second sensor 151 on the reflection side of the second beam splitter 150. The second beam splitter 150 splits the light beam irradiated thereto, transmits part of the light beam, and reflects part of the light beam, wherein the transmitted part of the light beam is emitted to the light adjustment module 120, and the reflected part of the light beam is irradiated to the second sensor 151. The second sensor 151 measures the optical power of the part of the light beam. The second sensor 151 is also connected to the controller 140, and the controller 140 obtains the optical power measured by the second sensor 151. , and calculate the optical power of the transmitted partial light beam based on the optical power of the reflected partial light beam, and adjust the driver 121 according to the optical power required by the processing light beam, so as to adjust the refractive index of the light adjustment module 120 through the driver 121, thereby adjusting the optical power of the light beam emitted by the light adjustment module 120, thereby adjusting the optical power of the processing light beam, and the first feedback mechanism formed by the second sensor 151 and the controller 140, and the second feedback mechanism formed by the first sensor 131 and the controller 140, can further improve the stability of the optical power of the processing light beam, so that the light beam adjustment system 100 can provide a laser beam with relatively stable optical power.

[0035] In one achievable manner of the embodiment of the present application, the driver 121 is used to generate an ultrasonic signal according to the control of the controller 140, and the light adjustment module 120 adjusts the refractive index of the light beam under the action of the ultrasonic signal.

[0036] The driver 121 is used to generate an ultrasonic signal so that the light adjustment module 120 is located within the range of the ultrasonic signal. The crystal inside the light adjustment module 120 is affected by the ultrasonic signal to generate a Bragg grating shape, thereby changing the refractive index of the light adjustment module 120, affecting the luminous flux of the light adjustment module 120, thereby adjusting the optical power of the light beam emitted by the light adjustment module 120.

[0037] The refractive index of the light adjustment module 120 is controlled by ultrasonic signals, which has a simple structure and high adjustment accuracy, and can improve the integrity of the light beam adjustment system 100.

[0038] Optional, such as Figure 3 As shown, the beam adjustment system 100 also includes a polarization component 160 arranged on the transmission side of the first beam splitter 130, and the polarization component 160 includes a first polarization element 161 and a second polarization element 162 arranged in sequence along the light path direction. The first polarization element 161 and the second polarization element 162 adjust the polarization direction of the light beam in sequence.

[0039] The first polarization element 161 and the second polarization element 162 are used to sequentially adjust the polarization direction of the light beam so that the processing light beam has a single polarization state.

[0040] In one possible implementation of the embodiment of the present application, Figure 3 As shown, the first polarizing element 161 is a first polarizing plate, and the second polarizing element 162 is a second polarizing plate. The first polarizing plate and the second polarizing plate have different thicknesses.

[0041] By setting the thickness of the first polarizer and the second polarizer to different values, the beam offset of the processing light beam can be adjusted, and the purity of the polarization state of the processing light beam can be improved, thereby improving the stability of the polarization state.

[0042] Optional, such as Figure 1 , Figure 2 , Figure 3 and Figure 4 As shown, along the light path direction, the light emitting side of the second beam splitter 150 is also sequentially provided with a first reflector 171 and a second reflector 172 , and the first reflector 171 and the second reflector 172 are used to reflect the light beam to fold the light path.

[0043] The first reflector 171 and the second reflector 172 are used to adjust the position of the light beam, wherein the first reflector 171 has two degrees of freedom in two directions, and the second reflector 172 also has two degrees of freedom in two directions. The first reflector 171 and the second reflector 172 adjust the light beam in a four-degree-of-freedom manner so that it enters the light adjustment module 120, thereby increasing the degrees of freedom of light beam adjustment and facilitating adjustment by the operator.

[0044] In addition, the first reflector 171 and the second reflector 172 fold the optical path, so that the vertical space can be fully utilized, thereby reducing the volume in the horizontal direction.

[0045] In one possible implementation of the embodiment of the present application, Figure 2 , Figure 3 and Figure 4 As shown, the first beam splitter 130 and the second beam splitter 150 are polarization beam splitters.

[0046] The first beam splitter 130 and the second beam splitter 150 are set as polarization beam splitters. The polarization beam splitter splits the light beam according to the polarization direction. Specifically, the polarization beam splitter reflects a light beam in one polarization state and transmits a light beam in another polarization state, thereby achieving beam splitting. On this basis, the polarization beam splitter selects the polarization state of the light beam while achieving beam splitting, so that a light beam in a certain polarization state enters the polarization component 160. The polarization component 160 is used to adjust the polarizer of the light beam, thereby reducing the working pressure of the polarization component 160.

[0047] Optional, such as Figure 4 As shown, the beam adjustment system 100 further includes an air circuit assembly, which includes an air source and a plurality of air jet disks 182 connected to the air source. The air jet disks 182 blow air to each lens of the beam adjustment system 100 to purge each lens.

[0048] The embodiment of the present application utilizes the jet disk 182 to blow air to each lens in the light beam adjustment system 100 to clean each lens, thereby avoiding the friction of each lens caused by wiping with cleaning items, thereby reducing the wear of each lens and increasing the service life of the light beam adjustment system 100.

[0049] in, Figure 4 Only a part of the jet disk 182 is shown. In actual application, multiple jet disks 182 can be set, wherein one jet disk 182 can spray air to multiple lenses or to one lens. Those skilled in the art can make specific settings according to actual conditions.

[0050] In one possible implementation of the embodiment of the present application, Figure 1 , Figure 2 , Figure 3 and Figure 4 As shown, the beam expansion and shaping module 110 includes a biconcave lens 111 and a plano-convex lens 112 arranged in sequence along the optical path direction, and the plane of the plano-convex lens 112 faces the biconcave lens 111 .

[0051] Among them, the biconcave lens 111 is used to disperse the light beam, thereby realizing the function of beam expansion and reducing the energy density of the light beam; the plano-convex lens 112 is used to collimate the light beam, and the collimated light beam has a higher parallelism, reducing the divergence angle of the light beam, thereby improving the accuracy of the processed light beam.

[0052] The embodiment of the present application also discloses a laser processing device, including a light source 210 for emitting laser light and a beam adjustment system 100 as described above, which is arranged on the light emitting side of the light source 210. The light source 210 emits laser light, and the laser light is adjusted by the beam adjustment system 100 and then emitted to the surface of the workpiece to be processed, so as to process the workpiece to be processed. The laser processing device includes the same structure and beneficial effects as the beam adjustment system 100 in the aforementioned embodiment. The structure and beneficial effects of the beam adjustment system 100 have been described in detail in the aforementioned embodiment and will not be repeated here.

[0053] The above description is only the preferred embodiment of the present application and is not intended to limit the present application. For those skilled in the art, the present application may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A beam adjustment system, characterized in that: The invention comprises a beam expansion and shaping module, a light adjustment module and a first beam splitter which are sequentially arranged along the optical path direction. After the light beam is expanded and shaped by the beam expansion and shaping module, it enters the light adjustment module. The light adjustment module adjusts the optical power of the light beam and then enters the first beam splitter to form reflected light and transmitted light. The transmitted light is emitted as a processing light beam. The light beam adjustment system also comprises a driver connected to the light adjustment module and a controller connected to the driver. A first sensor connected to the controller is also arranged on the reflection side of the first beam splitter. The controller obtains the optical power measured by the first sensor and controls the refractive index of the light adjustment module according to the optical power to adjust the optical power of the processing light beam.

2. The beam adjustment system according to claim 1, characterized in that: A second beam splitter is also provided on the light output side of the beam expansion and shaping module, a second sensor is provided on the reflection side of the second beam splitter, and the controller is also connected to the second sensor to control the driver according to the optical power detected by the second sensor.

3. The beam adjustment system according to claim 2, characterized in that: The driver is used to generate an ultrasonic signal according to the control of the controller, and the light adjustment module adjusts the refractive index of the light beam under the action of the ultrasonic signal.

4. The beam adjustment system according to claim 1, characterized in that: It also includes a polarization component arranged on the transmission side of the first beam splitter, the polarization component includes a first polarization element and a second polarization element arranged in sequence along the light path direction, the first polarization element and the second polarization element adjust the polarization direction of the light beam in sequence.

5. The beam adjustment system according to claim 4, characterized in that: The first polarizing element is a first polarizing plate, the second polarizing element is a second polarizing plate, and the first polarizing plate and the second polarizing plate have different thicknesses.

6. The light beam adjustment system according to claim 2, characterized in that: Along the light path direction, a first reflector and a second reflector are sequentially arranged on the light exiting side of the second beam splitter, and the first reflector and the second reflector are used to reflect the light beam to fold the light path.

7. The beam adjustment system according to claim 2, characterized in that: The first beam splitter and the second beam splitter are polarization beam splitters.

8. The beam adjustment system according to claim 1, characterized in that: It also includes an air circuit component, which includes an air source and a plurality of air jet disks connected to the air source, and the air jet disks blow air to each lens of the beam adjustment system to purge each lens.

9. The light beam adjustment system according to claim 1, characterized in that: The beam expansion and shaping module comprises a biconcave lens and a plano-convex lens arranged in sequence along the optical path, and the plane of the plano-convex lens faces the biconcave lens.

10. A laser processing device, characterized in that: It includes a light source for emitting laser and a beam adjustment system as described in any one of claims 1 to 9 arranged on the light emitting side of the light source, wherein the light source emits laser, and the laser is adjusted by the beam adjustment system and then emitted to the surface of the workpiece to be processed, so as to process the workpiece.

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