A circulating water cooling device for a single crystal furnace

Abstract

The present invention discloses a circulating water cooling device for a single crystal furnace, and proposes the following scheme, which includes an operating table and a placement cabinet, wherein a base is provided at the bottom of the placement cabinet, a main body mechanism is installed on the placement cabinet, a material placing mechanism is provided inside the placement cabinet and the main body mechanism, and a water cooling mechanism is provided on the main body mechanism; the present invention provides a water cooling mechanism, and through a corresponding motor screw transmission assembly, it is convenient to drive the ventilation hood to move to a suitable position, and then introduce water cooling liquid into the liquid cooling chamber, so as to facilitate the absorption and dissipation of heat generated by the device, and then connect the air inlet head with the blower, so as to facilitate the introduction of air into the through grooves and annular grooves inside the ventilation hood, and then enter each nozzle and spray it out, so as to assist in dissipating the heat generated in the processing process, thereby making the heat dissipation more uniform, thereby weakening the temperature gradient and thermal stress, avoiding the crystal growth rate and growth direction being greatly affected, making the crystal growth more uniform, and ensuring product quality.

Description

Technical Field

[0001] The present invention relates to the technical field of single crystal manufacturing, and in particular to a circulating water cooling device for a single crystal furnace. Background Art

[0002] Single crystal silicon, a semiconductor material, is generally used in the manufacture of integrated circuits and other electronic components. Currently, there are two single crystal silicon growth technologies: the zone melting method and the Czochralski method. The Czochralski method is the most widely used method and generally requires a corresponding single crystal furnace. A single crystal furnace is a device that melts polycrystalline materials such as polycrystalline silicon and uses the Czochralski method to grow dislocation-free single crystals. In actual use, a circulating water cooling device for cooling the material is particularly important. Patent number CN117779189B discloses a circulating water cooling device for a single crystal furnace.

[0003] However, in actual operation, the circulating water cooling device of the single crystal furnace in the above patent is in a nearly closed state during the growth of the single crystal, and the air flow is not smooth, which easily leads to uneven heat dissipation. The uneven heat dissipation leads to thermal stress under the influence of the temperature gradient, which easily affects the growth rate and direction of the crystal, resulting in uneven crystal growth. This unevenness directly affects the shape, size and performance of the crystal, and reduces the quality of the product. In addition, during long-term use, some impurities and dirt will inevitably adhere to the inner wall of the water-cooling chamber of the single crystal furnace. This The continuous accumulation of these impurities and dirt can easily cause blockage of the water-cooling cavity of the single crystal furnace, and also affect the thermal conductivity of the water-cooling screen shell assembly, further resulting in a reduction in the heat dissipation effect, and ultimately affecting the molding quality of the crystal. In addition, after long-term use, the circulating coolant will cause the liquid quality to gradually deteriorate and contain a large number of impurity particles. When these impurity particles flow in the water-cooling liquid, they will cause erosion and wear on the inner wall of the cavity tube and other water-cooling system components, shortening the service life of the equipment. Once these impurities penetrate into the crystal growth area of ​​the single crystal furnace, they will cause serious contamination to the growing crystal, affecting product quality. In response to the above problems, the present invention document proposes a circulating water cooling device for a single crystal furnace. Summary of the Invention

[0004] The purpose of the present invention is to solve the shortcomings existing in the prior art, and to propose a single crystal furnace circulating water cooling device that can enhance the dissipation of heat inside the single crystal furnace through corresponding ventilation components, while facilitating the removal of impurities adhered to the inner wall of the liquid cooling chamber. In addition, it is convenient to add suitable scale inhibitors to the coolant, reduce the erosion of impurities on the inner wall of the liquid cooling chamber, and prevent impurities from affecting crystal growth, thereby further ensuring the operation of the single crystal furnace.

[0005] In order to achieve the above object, the present invention adopts the following technical solutions:

[0006] A circulating water cooling device for a single crystal furnace comprises an operating table and a placement cabinet, wherein a base is provided at the bottom of the placement cabinet, a main body mechanism is mounted on the placement cabinet, a material placement mechanism is provided inside the placement cabinet and the main body mechanism, a water cooling mechanism is provided on the main body mechanism, a scraping mechanism is provided inside the main body mechanism, and a material feeding mechanism is mounted on the main body mechanism;

[0007] The main body mechanism includes a shell, two support columns are fixedly connected to the placement cabinet, the two support columns are commonly fixedly connected to the shell, the shell is provided with a furnace cover, and the furnace cover is fixedly connected to the feed pipe;

[0008] The water cooling mechanism includes a motor, two motors are provided on the furnace cover, the interior of the shell is slidably connected to the ventilation hood, a first screw is rotatably connected to the transmission end of the motor, and the first screw is threadedly connected to the interior of the ventilation hood, a through groove and an annular groove are provided inside the ventilation hood, and the through groove and the annular groove are connected, a nozzle is installed on the inner wall of the ventilation hood, and the inner cavity of the nozzle is connected to the through groove, an air inlet head is provided on the furnace cover, a flexible telescopic tube is fixedly connected to the air inlet head, the flexible telescopic tube passes through the furnace cover and extends to the inside of the through groove, a liquid cooling chamber is provided inside the shell, and a liquid inlet pipe is provided on one side of the shell and a liquid outlet pipe is provided on the other side, and the liquid inlet pipe and the liquid outlet pipe are both connected to the liquid cooling chamber.

[0009] Preferably, a flange is fixedly connected to the top of the side wall of the shell, and the furnace cover is installed on the flange by bolts.

[0010] Preferably, there are two through slots and two air inlet heads, there are multiple annular slots, and the through slots are vertically arranged while the annular slots are horizontally arranged.

[0011] Preferably, the nozzles are provided in multiple groups, the multiple groups of nozzles are distributed in a circular array, and each group of nozzles is provided with multiple nozzles, and the multiple nozzles in each group are linearly distributed with equal intervals.

[0012] Preferably, the material placing mechanism includes an electric push rod, the placement cabinet is provided with an electric push rod, the output end of the electric push rod is connected to a connecting rod, the connecting rod extends to the interior of the shell and is installed with a crucible.

[0013] Preferably, the scraping mechanism includes a scraper blade, which is slidably connected in the liquid cooling chamber. The scraper blade is annular as a whole, and the top of the cross section of the scraper blade is triangular.

[0014] Preferably, the first screw rod is fixedly connected to a first gear on the side close to the motor, the first gear is meshed with a second gear on one side, the second gear is fixedly connected to a second screw rod, the second screw rod is rotatably connected to the inside of the shell, and the second screw rod is threadedly connected to the inside of the scraper.

[0015] Preferably, the feeding mechanism includes a storage frame, the furnace cover is provided with a storage frame, and the top of the storage frame is provided with a sealing cover.

[0016] Preferably, the storage frame and the interior of the furnace cover are slidably connected with a through rod, the bottom end of the through rod extends to the inside of the side wall of the shell, and a guide groove is provided inside the through rod, a spring is wound on the through rod, one end of the spring is fixedly connected to the through rod, and the other end is fixedly connected to the inside of the furnace cover.

[0017] Preferably, the guide groove is in the shape of an "I" as a whole, and a handle is fixedly connected to the top of the through rod, and the top of the handle is arc-shaped.

[0018] Compared with the prior art, the present invention provides a circulating water cooling device for a single crystal furnace, which has the following beneficial effects:

[0019] 1. The single crystal furnace circulating water cooling device is provided with a motor, a first screw rod, a ventilation hood, a through groove, an annular groove, a nozzle, an air inlet head, a flexible telescopic tube and a liquid cooling chamber. The two first screw rods are respectively driven to rotate by two motors. As the two first screw rods rotate, the ventilation hood is conveniently driven to move together until the ventilation hood is moved to a suitable position. Then, water-cooling liquid is introduced into the liquid cooling chamber to facilitate the absorption and dissipation of heat generated by the device. Then, the air inlet head is connected to the blower. The air is conveniently introduced into the ventilation hood through the air inlet head and the flexible telescopic tube, and then passes through the through groove and the annular groove into each nozzle and is ejected, thereby further assisting the dissipation of heat generated in the process of processing the single crystal rod, thereby making the heat dissipation in the processing process more uniform, thereby weakening the temperature gradient and thermal stress, avoiding the crystal growth rate and growth direction being greatly affected, making the crystal growth more uniform, and ensuring product quality.

[0020] 2. The circulating water cooling device of the single crystal furnace is provided with a first gear, a second gear, a second screw and a scraper. When the motor rotates, it also drives the first gear to rotate together, and then drives the second gear to rotate. The rotation of the second gear drives the second screw to rotate. As the second screw rotates, it drives the scraper to continuously slide in the liquid cooling chamber. The scraper can be used to frequently scrape off dust and impurities adhering to the inner wall of the liquid cooling chamber, thereby reducing the possibility of blockage of the liquid cooling chamber of the single crystal furnace. At the same time, it also ensures the heat conduction performance of the water cooling component, further improves the heat dissipation effect, and ultimately ensures the molding quality of the crystal.

[0021] 3. The circulating water cooling device of the single crystal furnace is provided with a storage frame, a through rod, a guide groove, a spring and a handle. According to actual conditions, the handle can be grasped and pressed, and the handle moves downward to drive the through rod downward, and the spring is compressed at the same time until the bottom opening of the guide groove on the through rod is exposed to the liquid cooling chamber. At this time, the descaling agent stored in the storage frame in advance will flow into the guide groove inside the through rod, and then flow into the liquid cooling chamber through the guide groove. By adding appropriate descaling agent to the coolant, the content of impurity particles is reduced, thereby reducing the erosion and wear caused by impurity particles on the inner wall of the cavity tube and other water cooling system components, ensuring the service life of the equipment, and reducing the situation where these impurities penetrate into the crystal growth area of ​​the single crystal furnace, avoiding serious pollution to the growing crystals, and ensuring product quality. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 This is a three-dimensional view of a circulating water cooling device for a single crystal furnace proposed by the present invention;

[0023] Figure 2 This is a view of the connection structure of the placement cabinet, base, main body, water cooling mechanism and feeding mechanism of the present invention;

[0024] Figure 3 This is a view of the connection structure of the placement cabinet, base, main body, material placement mechanism and water cooling mechanism of the present invention;

[0025] Figure 4 A view of the connection structure between the main body mechanism and the water cooling mechanism of the present invention;

[0026] Figure 5 A view of the connection structure between the main body mechanism and the feeding mechanism of the present invention;

[0027] Figure 6 A diagram showing the structure of the material placing mechanism, water cooling mechanism, scraping mechanism and material adding mechanism of the present invention;

[0028] Figure 7 A view of the connection structure between the water cooling mechanism and the scraping mechanism of the present invention;

[0029] Figure 8 A view of the connection structure between the second screw rod and the scraper blade of the present invention;

[0030] Figure 9 A view of the connection structure between the main body mechanism and the feeding mechanism of the present invention;

[0031] Figure 10 It is a view of the structure of the feeding mechanism of the present invention.

[0032] Figure: 1. Placement cabinet; 2. Base; 3. Main body; 301. Shell; 302. Flange; 303. Furnace cover; 304. Feed pipe; 305. Bolt; 306. Support column; 4. Loading mechanism; 401. Electric push rod; 402. Connecting rod; 403. Crucible; 5. Water cooling mechanism; 501. Motor; 502. First screw rod; 503. Ventilation hood; 504. Through groove; 505. Ring groove ; 506, nozzle; 507, air inlet head; 508, flexible telescopic tube; 509, liquid inlet pipe; 510, liquid outlet pipe; 511, liquid cooling chamber; 6, scraping mechanism; 601, first gear; 602, second gear; 603, second screw rod; 604, scraper; 7, feeding mechanism; 701, storage frame; 702, sealing cover; 703, through rod; 704, guide groove; 705, spring; 706, handle. DETAILED DESCRIPTION

[0033] The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments.

[0034] In the description of the present invention, it should be understood that the terms "upper", "lower", "front", "back", "left", "right", "top", "bottom", "inside", "outside", etc., indicating directions or positional relationships, are based on the directions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore should not be understood as limiting the present invention.

[0035] Example 1:

[0036] Reference Figures 1-9 A circulating water cooling device for a single crystal furnace includes an operating table, a placement cabinet 1, a base 2 is provided at the bottom of the placement cabinet 1, a main body mechanism 3 is installed on the placement cabinet 1, a material placement mechanism 4 is provided inside the placement cabinet 1 and the main body mechanism 3, a water cooling mechanism 5 is provided on the main body mechanism 3, a scraping mechanism 6 is provided inside the main body mechanism 3, and a material adding mechanism 7 is installed on the main body mechanism 3.

[0037] The main body mechanism 3 includes a shell 301, and two support columns 306 are fixedly connected to the placement cabinet 1, and the shell 301 is fixedly connected to the two support columns 306. A furnace cover 303 is provided on the shell 301, and a feed pipe 304 is fixedly connected to the furnace cover 303. A flange 302 is fixedly connected to the top of the side wall of the shell 301, and the furnace cover 303 is installed on the flange 302 by bolts 305. By setting the support columns 306, it is convenient to fix the shell 301. In actual operation, through the feed pipe 304 set on the furnace cover 303, it is convenient to add an appropriate amount of raw materials into the inside of the shell 301 to facilitate subsequent work.

[0038] The water cooling mechanism 5 includes a motor 501. Two motors 501 are provided on the furnace cover 303. The interior of the shell 301 is slidably connected to the ventilation cover 503. The driving end of the motor 501 is rotatably connected to the first screw rod 502, and the first screw rod 502 is threadedly connected to the interior of the ventilation cover 503. The interior of the ventilation cover 503 is provided with a through groove 504 and an annular groove 505, and the through groove 504 and the annular groove 505 are connected. A nozzle 506 is installed on the inner wall of the ventilation cover 503, and the inner cavity of the nozzle 506 is connected to the through groove 504. An air inlet head 507 is provided on the furnace cover 303, and a flexible extension is fixedly connected to the air inlet head 507. The flexible expansion pipe 508 passes through the furnace cover 303 and extends to the inside of the through groove 504. A liquid cooling chamber 511 is provided inside the shell 301, and a liquid inlet pipe 509 is provided on one side of the shell 301, and a liquid outlet pipe 510 is provided on the other side. The liquid inlet pipe 509 and the liquid outlet pipe 510 are both connected to the liquid cooling chamber 511. There are two through grooves 504 and air inlet heads 507. There are multiple annular grooves 505, and the through grooves 504 are vertically arranged and the annular grooves 505 are horizontally arranged. There are multiple groups of nozzles 506, and the multiple groups of nozzles 506 are distributed in a circular array, and each group of nozzles 506 is provided with multiple, and each group of multiple nozzles The nozzles 506 are linearly distributed at equal intervals. By setting the motor 501, according to actual conditions, during operation, the user can connect the two motors 501 to the power supply, and the motor 501 rotates to drive the first screw rod 502 to rotate. As the two first screw rods 502 rotate, it is convenient to jointly drive the ventilation hood 503 to move inside the shell 301 until the ventilation hood 503 is moved to a suitable position. Then, through the liquid inlet pipe 509, water-cooling liquid is conveniently introduced into the liquid cooling chamber 511. After the water-cooling liquid flows into the liquid cooling chamber 511 and circulates once, it flows out through the liquid outlet pipe 510. The above operation is repeated, which is convenient for the device to be operated in a timely manner. The heat generated during actual work is absorbed and dissipated, and then the corresponding air inlet head 507 is connected to the blower. Through the air inlet head 507 and the flexible telescopic tube 508, the wind is conveniently passed into the interior of the ventilation hood 503, and then passes through the through groove 504 and the annular groove 505, enters the interior of each nozzle 506, and then is immediately ejected, so as to further assist in dissipating the heat generated during the processing of the single crystal rod, thereby making the heat dissipation in the processing process more uniform, thereby weakening the temperature gradient and thermal stress, avoiding the crystal growth rate and growth direction being greatly affected, making the crystal growth more uniform, and ensuring product quality.

[0039] By arranging the shell 301, the furnace cover 303, the feed pipe 304, the support column 306, the motor 501, the first screw rod 502, the ventilation hood 503, the through groove 504, the annular groove 505, the nozzle 506, the air inlet head 507, the flexible telescopic tube 508, the liquid inlet pipe 509, the liquid outlet pipe 510 and the liquid cooling chamber 511, the shell 301 can be conveniently fixed and placed through the support column 306. In actual operation, the feed pipe 304 arranged on the furnace cover 303 can facilitate the addition of an appropriate amount of raw materials into the inside of the shell 301 to facilitate subsequent work.

[0040] According to actual conditions, during operation, the user can connect the two motors 501 to the power supply, and the motor 501 rotates to drive the first screw rod 502 to rotate. As the two first screw rods 502 rotate, it is convenient to jointly drive the ventilation cover 503 to move inside the shell 301 until the ventilation cover 503 is moved to a suitable position. Then, through the liquid inlet pipe 509, water-cooling liquid is conveniently introduced into the liquid cooling chamber 511. After the water-cooling liquid flows into the liquid cooling chamber 511 and circulates once, it flows out through the liquid outlet pipe 510. The above operation is repeated, which is convenient for heat generated by the device during actual work. Absorb and diverge, then connect the corresponding air inlet head 507 with the blower, and through the air inlet head 507 and the flexible telescopic tube 508, the wind is conveniently passed into the interior of the ventilation hood 503, and then passes through the through groove 504 and the annular groove 505, enters the interior of each nozzle 506, and then is ejected immediately, to further assist in dissipating the heat generated during the processing of the single crystal rod, thereby making the heat dissipation in the processing process more uniform, thereby weakening the temperature gradient and thermal stress, avoiding the crystal growth rate and growth direction being greatly affected, making the crystal growth more uniform, and ensuring product quality.

[0041] In the present invention, the placing mechanism 4 includes an electric push rod 401, and the placing cabinet 1 is provided with an electric push rod 401. The output end of the electric push rod 401 is connected to a connecting rod 402, and the connecting rod 402 extends to the inside of the shell 301 and is installed with a crucible 403. By setting the electric push rod 401, during operation, according to actual conditions, the electric push rod 401 is connected to the power supply, and the electric push rod 401 drives the connecting rod 402 to move, and the movement of the connecting rod 402 drives the crucible 403 to move, which facilitates the adjustment of the height of the crucible 403.

[0042] In the present invention, the scraping mechanism 6 includes a scraper 604, which is slidably connected to the liquid cooling chamber 511. The scraper 604 is annular as a whole, and the top of the cross section of the scraper 604 is triangular. The first screw rod 502 is fixedly connected to the first gear 601 on the side close to the motor 501. The second gear 602 is meshed with the first gear 601 on one side. The second gear 602 is fixedly connected to the second screw rod 603. The second screw rod 603 is rotatably connected to the inside of the housing 301, and the second screw rod 603 is threadedly connected to the inside of the scraper 604. By setting the first gear 601, when the motor 501 rotates, the second gear 602 is engaged with the first gear 601. At the same time as it moves, it will also drive the first gear 601 to rotate, and the rotation of the first gear 601 will drive the second gear 602 to rotate, and the rotation of the second gear 602 will drive the second screw rod 603 to rotate. As the second screw rod 603 rotates, it will drive the scraper 604 to continuously slide inside the liquid cooling chamber 511. Through the scraper 604, the dust and impurities adhering to the inner wall of the liquid cooling chamber 511 can be conveniently scraped off continuously, thereby reducing the possibility of blockage of the liquid cooling chamber 511 of the single crystal furnace, while also ensuring the thermal conductivity performance of the water cooling component, further improving the heat dissipation effect, and ultimately ensuring the molding quality of the crystal.

[0043] Example 2:

[0044] Reference Figures 1-10 A circulating water cooling device for a single crystal furnace includes an operating table, a placement cabinet 1, a base 2 is provided at the bottom of the placement cabinet 1, a main body mechanism 3 is installed on the placement cabinet 1, a material placement mechanism 4 is provided inside the placement cabinet 1 and the main body mechanism 3, a water cooling mechanism 5 is provided on the main body mechanism 3, a scraping mechanism 6 is provided inside the main body mechanism 3, and a material adding mechanism 7 is installed on the main body mechanism 3.

[0045] The main body mechanism 3 includes a shell 301, and two support columns 306 are fixedly connected to the placement cabinet 1, and the shell 301 is fixedly connected to the two support columns 306. A furnace cover 303 is provided on the shell 301, and a feed pipe 304 is fixedly connected to the furnace cover 303. A flange 302 is fixedly connected to the top of the side wall of the shell 301, and the furnace cover 303 is installed on the flange 302 by bolts 305. By setting the support columns 306, it is convenient to fix the shell 301. In actual operation, through the feed pipe 304 set on the furnace cover 303, it is convenient to add an appropriate amount of raw materials into the inside of the shell 301 to facilitate subsequent work.

[0046] The water cooling mechanism 5 includes a motor 501. Two motors 501 are provided on the furnace cover 303. The interior of the shell 301 is slidably connected to the ventilation cover 503. The driving end of the motor 501 is rotatably connected to the first screw rod 502, and the first screw rod 502 is threadedly connected to the interior of the ventilation cover 503. The interior of the ventilation cover 503 is provided with a through groove 504 and an annular groove 505, and the through groove 504 and the annular groove 505 are connected. A nozzle 506 is installed on the inner wall of the ventilation cover 503, and the inner cavity of the nozzle 506 is connected to the through groove 504. An air inlet head 507 is provided on the furnace cover 303, and a flexible extension is fixedly connected to the air inlet head 507. The flexible expansion pipe 508 passes through the furnace cover 303 and extends to the inside of the through groove 504. A liquid cooling chamber 511 is provided inside the shell 301, and a liquid inlet pipe 509 is provided on one side of the shell 301, and a liquid outlet pipe 510 is provided on the other side. The liquid inlet pipe 509 and the liquid outlet pipe 510 are both connected to the liquid cooling chamber 511. There are two through grooves 504 and air inlet heads 507. There are multiple annular grooves 505, and the through grooves 504 are vertically arranged and the annular grooves 505 are horizontally arranged. There are multiple groups of nozzles 506, and the multiple groups of nozzles 506 are distributed in a circular array, and each group of nozzles 506 is provided with multiple, and each group of multiple nozzles The nozzles 506 are linearly distributed at equal intervals. By setting the motor 501, according to actual conditions, during operation, the user can connect the two motors 501 to the power supply, and the motor 501 rotates to drive the first screw rod 502 to rotate. As the two first screw rods 502 rotate, it is convenient to jointly drive the ventilation hood 503 to move inside the shell 301 until the ventilation hood 503 is moved to a suitable position. Then, through the liquid inlet pipe 509, water-cooling liquid is conveniently introduced into the liquid cooling chamber 511. After the water-cooling liquid flows into the liquid cooling chamber 511 and circulates once, it flows out through the liquid outlet pipe 510. The above operation is repeated, which is convenient for the device to be operated in a timely manner. The heat generated during actual work is absorbed and dissipated, and then the corresponding air inlet head 507 is connected to the blower. Through the air inlet head 507 and the flexible telescopic tube 508, the wind is conveniently passed into the interior of the ventilation hood 503, and then passes through the through groove 504 and the annular groove 505, enters the interior of each nozzle 506, and then is immediately ejected, so as to further assist in dissipating the heat generated during the processing of the single crystal rod, thereby making the heat dissipation in the processing process more uniform, thereby weakening the temperature gradient and thermal stress, avoiding the crystal growth rate and growth direction being greatly affected, making the crystal growth more uniform, and ensuring product quality.

[0047] By arranging the shell 301, the furnace cover 303, the feed pipe 304, the support column 306, the motor 501, the first screw rod 502, the ventilation hood 503, the through groove 504, the annular groove 505, the nozzle 506, the air inlet head 507, the flexible telescopic tube 508, the liquid inlet pipe 509, the liquid outlet pipe 510 and the liquid cooling chamber 511, the shell 301 can be conveniently fixed and placed through the support column 306. In actual operation, the feed pipe 304 arranged on the furnace cover 303 can facilitate the addition of an appropriate amount of raw materials into the inside of the shell 301 to facilitate subsequent work.

[0048] According to actual conditions, during operation, the user can connect the two motors 501 to the power supply, and the motor 501 rotates to drive the first screw rod 502 to rotate. As the two first screw rods 502 rotate, it is convenient to jointly drive the ventilation cover 503 to move inside the shell 301 until the ventilation cover 503 is moved to a suitable position. Then, through the liquid inlet pipe 509, water-cooling liquid is conveniently introduced into the liquid cooling chamber 511. After the water-cooling liquid flows into the liquid cooling chamber 511 and circulates once, it flows out through the liquid outlet pipe 510. The above operation is repeated, which is convenient for heat generated by the device during actual work. Absorb and diverge, then connect the corresponding air inlet head 507 with the blower, and through the air inlet head 507 and the flexible telescopic tube 508, the wind is conveniently passed into the interior of the ventilation hood 503, and then passes through the through groove 504 and the annular groove 505, enters the interior of each nozzle 506, and then is ejected immediately, to further assist in dissipating the heat generated during the processing of the single crystal rod, thereby making the heat dissipation in the processing process more uniform, thereby weakening the temperature gradient and thermal stress, avoiding the crystal growth rate and growth direction being greatly affected, making the crystal growth more uniform, and ensuring product quality.

[0049] In the present invention, the loading mechanism 4 includes an electric push rod 401, and the placement cabinet 1 is provided with an electric push rod 401. The output end of the electric push rod 401 is connected to a connecting rod 402, and the connecting rod 402 extends to the inside of the shell 301 and is installed with a crucible 403. By setting the electric push rod 401, the connecting rod 402 and the crucible 403, during operation, according to actual conditions, the electric push rod 401 is connected to the power supply, and the electric push rod 401 drives the connecting rod 402 to move, and the movement of the connecting rod 402 drives the crucible 403 to move, which facilitates the adjustment of the height of the crucible 403.

[0050] In the present invention, the scraping mechanism 6 includes a scraper 604, which is slidably connected to the liquid cooling chamber 511. The scraper 604 is annular in shape, and the top of the cross section of the scraper 604 is triangular. The first screw rod 502 is fixedly connected to the side of the motor 501, and the first gear 601 is meshed with the second gear 602 on one side. The second gear 602 is fixedly connected to the second screw rod 603, and the second screw rod 603 is rotatably connected to the inside of the housing 301. The second screw rod 603 is threadedly connected to the inside of the scraper 604. By setting the first gear 601, the second gear 602, the second screw rod 603 and the scraper 6 04. When the motor 501 rotates, it will also drive the first gear 601 to rotate. The rotation of the first gear 601 drives the second gear 602 to rotate. The rotation of the second gear 602 drives the second screw rod 603 to rotate. As the second screw rod 603 rotates, it will drive the scraper 604 to continuously slide inside the liquid cooling chamber 511. The scraper 604 can be used to frequently scrape off dust and impurities adhering to the inner wall of the liquid cooling chamber 511, thereby reducing the possibility of blockage of the liquid cooling chamber 511 of the single crystal furnace. At the same time, it also ensures the thermal conductivity performance of the water cooling component, further improves the heat dissipation effect, and ultimately ensures the molding quality of the crystal.

[0051] In the present invention, the feeding mechanism 7 includes a storage frame 701, a storage frame 701 is provided on the furnace cover 303, a sealing cover 702 is provided on the top of the storage frame 701, and a through rod 703 is slidably connected to the interior of the storage frame 701 and the furnace cover 303. The bottom end of the through rod 703 extends to the inside of the side wall of the shell 301, and a guide groove 704 is provided inside the through rod 703. A spring 705 is wound around the through rod 703, one end of the spring 705 is fixedly connected to the through rod 703, and the other end is fixedly connected to the inside of the furnace cover 303. The guide groove 704 is in the shape of an "I" character as a whole, and a handle 706 is fixedly connected to the top of the through rod 703. The top of the handle 706 is arc-shaped. By arranging the storage frame 701, the sealing cover 702, the through rod 703, the guide groove 704, the spring 705 and the handle 706, during operation, according to In actual conditions, it is convenient to hold the handle 706 and press it, so that the handle 706 moves downward to drive the through rod 703 to move downward, and the spring 705 is compressed at the same time until the bottom opening of the guide groove 704 on the through rod 703 is exposed to the liquid cooling chamber 511. At this time, the descaling agent stored in the storage frame 701 in advance will flow into the guide groove 704 inside the through rod 703, and then flow into the liquid cooling chamber 511 through the guide groove 704. The cover 702 is convenient for replenishing the corresponding descaling agent to the inside of the storage frame 701, reducing the content of impurity particles, thereby reducing the erosion and wear of the inner wall of the cavity tube and other water cooling system components caused by impurity particles, ensuring the service life of the equipment, and reducing the situation where these impurities penetrate into the crystal growth area of ​​the single crystal furnace, avoiding serious pollution to the growing crystals, and ensuring product quality.

[0052] Working principle: In actual operation, according to actual conditions, the electric push rod 401 is connected to the power supply, and the electric push rod 401 drives the connecting rod 402 to move, and the movement of the connecting rod 402 drives the crucible 403 to move, so as to facilitate the height adjustment of the crucible 403 and the subsequent addition of raw materials.

[0053] Then, the shell 301 is conveniently fixed and placed through the support column 306. In actual operation, the feeding pipe 304 set on the furnace cover 303 is convenient for adding an appropriate amount of raw materials into the crucible 403 inside the shell 301 to prepare the single crystal rod.

[0054] Then, according to the actual situation, the user can connect the two motors 501 to the power supply, and the motor 501 rotates to drive the first screw rod 502 to rotate. As the two first screw rods 502 rotate, it is convenient to jointly drive the ventilation cover 503 to move inside the shell 301 until the ventilation cover 503 is moved to a suitable position. Then, through the liquid inlet pipe 509, water-cooling liquid is conveniently introduced into the liquid cooling chamber 511. After the water-cooling liquid flows into the liquid cooling chamber 511 and circulates once, it flows out through the liquid outlet pipe 510. The above operation is repeated to facilitate the absorption of heat generated by the device during actual work. Then, the corresponding air inlet head 507 is connected to the blower, and the air is conveniently passed into the interior of the ventilation hood 503 through the air inlet head 507 and the flexible telescopic tube 508, and then enters the interior of each nozzle 506 through the through groove 504 and the annular groove 505, and then is ejected immediately, so as to further assist in dissipating the heat generated in the process of processing the single crystal rod, thereby making the heat dissipation in the processing process more uniform, thereby weakening the temperature gradient and thermal stress, avoiding the crystal growth rate and growth direction being greatly affected, making the crystal growth more uniform, and ensuring product quality.

[0055] Furthermore, when the motor 501 rotates, it will also drive the first gear 601 to rotate, and the rotation of the first gear 601 will drive the second gear 602 to rotate, and the rotation of the second gear 602 will drive the second screw rod 603 to rotate. As the second screw rod 603 rotates, it will drive the scraper 604 to continuously slide inside the liquid cooling chamber 511. Through the scraper 604, the dust and impurities adhering to the inner wall of the liquid cooling chamber 511 can be frequently scraped off, thereby reducing the possibility of blockage of the liquid cooling chamber 511 of the single crystal furnace, while also ensuring the thermal conductivity performance of the water cooling component, further improving the heat dissipation effect, and ultimately ensuring the molding quality of the crystal.

[0056] In addition, according to actual conditions, the handle 706 can be grasped and pressed, and the handle 706 moves downward to drive the through rod 703 to move downward, and the spring 705 is compressed at the same time until the bottom opening of the guide groove 704 on the through rod 703 is exposed to the liquid cooling chamber 511. At this time, the descaling agent stored in the storage frame 701 in advance will flow into the guide groove 704 inside the through rod 703, and then flow into the liquid cooling chamber 511 through the guide groove 704. The cover 702 facilitates the replenishment of the corresponding descaling agent into the storage frame 701, thereby reducing the content of impurity particles by adding appropriate descaling agents to the coolant, thereby reducing the erosion and wear of the inner wall of the cavity tube and other water cooling system components caused by impurity particles, ensuring the service life of the equipment, and reducing the situation where these impurities penetrate into the crystal growth area of ​​the single crystal furnace, avoiding serious pollution to the growing crystals, and ensuring product quality.

[0057] The above are only preferred specific embodiments of the present invention, but the scope of protection of the present invention is not limited thereto. Any technician familiar with this technical field, within the technical scope disclosed by the present invention, who makes equivalent replacements or changes based on the technical solutions and inventive concepts of the present invention, should be covered by the scope of protection of the present invention.

Claims

1. A circulating water cooling device for a single crystal furnace, comprising a placement cabinet (1), characterized in that: The bottom of the placement cabinet (1) is provided with a base (2), a main body mechanism (3) is installed on the placement cabinet (1), a material placement mechanism (4) is provided inside the placement cabinet (1) and the main body mechanism (3), a water cooling mechanism (5) is provided on the main body mechanism (3), a scraping mechanism (6) is provided inside the main body mechanism (3), and a material adding mechanism (7) is installed on the main body mechanism (3); The main body (3) comprises a shell (301), two support columns (306) are fixedly connected to the placement cabinet (1), the two support columns (306) are fixedly connected to the shell (301), a furnace cover (303) is provided on the shell (301), and a feed pipe (304) is fixedly connected to the furnace cover (303); The water cooling mechanism (5) includes a motor (501), two motors (501) are provided on the furnace cover (303), the interior of the housing (301) is slidably connected to the ventilation cover (503), a first screw rod (502) is rotatably connected to the transmission end of the motor (501), and the first screw rod (502) is threadedly connected to the interior of the ventilation cover (503), a through groove (504) and an annular groove (505) are provided inside the ventilation cover (503), and the through groove (504) and the annular groove (505) are connected, a nozzle (506) is installed on the inner wall of the ventilation cover (503), and the inner cavity of the nozzle (506) is connected to the through groove (504), an air inlet head (507) is provided on the furnace cover (303), and a flexible telescopic tube (508) is fixedly connected to the air inlet head (507) ), the flexible telescopic tube (508) passes through the furnace cover (303) and extends to the inside of the through groove (504), the shell (301) is provided with a liquid cooling chamber (511), and one side of the shell (301) is provided with a liquid inlet pipe (509), and the other side is provided with a liquid outlet pipe (510), the liquid inlet pipe (509) and the liquid outlet pipe (510) are both connected to the liquid cooling chamber (511), the through groove (504) and the air inlet head (507) are both provided with two, the annular groove (505) is provided with multiple channels, and the through groove (504) is vertically arranged, and the annular groove (505) is horizontally arranged, the nozzles (506) are provided with multiple groups, the multiple groups of nozzles (506) are distributed in a ring array, and each group of the nozzles (506) is provided with multiple nozzles, and the multiple nozzles (506) in each group are linearly distributed with equal intervals.

2. A circulating water cooling device for a single crystal furnace according to claim 1, characterized in that: A flange (302) is fixedly connected to the top of the side wall of the shell (301), and the furnace cover (303) is installed on the flange (302) by bolts (305).

3. The single crystal furnace circulating water cooling device according to claim 1, characterized in that: The placing mechanism (4) comprises an electric push rod (401), the placing cabinet (1) is provided with the electric push rod (401), the output end of the electric push rod (401) is connected to a connecting rod (402), and the connecting rod (402) extends into the interior of the shell (301) and is equipped with a crucible (403).

4. The single crystal furnace circulating water cooling device according to claim 1, characterized in that: The scraping mechanism (6) comprises a scraper (604), the scraper (604) being slidably connected in the liquid cooling chamber (511), the scraper (604) being annular in its entirety, and the top of the cross section of the scraper (604) being triangular.

5. A circulating water cooling device for a single crystal furnace according to claim 4, characterized in that: A first gear (601) is fixedly connected to the side of the first screw rod (502) close to the motor (501), a second gear (602) is meshed with the side of the first gear (601), a second screw rod (603) is fixedly connected to the second gear (602), the second screw rod (603) is rotatably connected to the inside of the housing (301), and the second screw rod (603) is threadedly connected to the inside of the scraper (604).

6. The single crystal furnace circulating water cooling device according to claim 1, characterized in that: The feeding mechanism (7) comprises a material storage frame (701), the furnace cover (303) is provided with the material storage frame (701), and the top of the material storage frame (701) is provided with a sealing cover (702).

7. A circulating water cooling device for a single crystal furnace according to claim 6, characterized in that: The storage frame (701) and the furnace cover (303) are slidably connected to a through rod (703) in the interior thereof. The bottom end of the through rod (703) extends to the interior of the side wall of the shell (301), and a guide groove (704) is provided in the interior of the through rod (703). A spring (705) is wound around the through rod (703), and one end of the spring (705) is fixedly connected to the through rod (703), and the other end is fixedly connected to the interior of the furnace cover (303).

8. The single crystal furnace circulating water cooling device according to claim 7, characterized in that: The guide groove (704) is in the shape of an "I" character as a whole, and a handle (706) is fixedly connected to the top of the through rod (703), and the top of the handle (706) is in an arc shape.

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