A micro optical wave actuator driven by evanescent field and method

Abstract

The present invention discloses an evanescent field driven micro-optical waveguide actuator and method. The actuator comprises a micro-nano optical fiber, a polymer fiber and a light source, the polymer fiber is in contact with and connected to one end of the micro-nano optical fiber, and the light source is arranged at the other end of the micro-nano optical fiber; the micro-nano optical fiber is a single-cone micro-nano optical fiber, the single-cone micro-nano optical fiber comprises a micro-nano optical fiber cone region located in the middle, a micro-nano optical fiber waist region located at one end and a micro-nano optical fiber pigtail located at the other end, the polymer fiber is in contact with and connected to the outer surface of the micro-nano optical fiber waist region, and the light source is arranged near the end of the micro-nano optical fiber pigtail. The principle of this method is that an evanescent field is generated around the waist region of the micro-nano optical fiber when light is passed through, and the temperature rises under the action of a photothermal conversion material, and the actuator is bent and deformed due to the different thermal expansion coefficients of the polymer fiber and the waist region of the micro-nano optical fiber. The present invention has the advantages of strong controllability and fast response speed, and is convenient for application in the fields of deep-sea exploration, micro soft robots, in vivo diagnosis and treatment, etc.

Description

Technical Field

[0001] The invention relates to the technical field of micro-light wave-induced actuation, and in particular to an evanescent field-driven micro-light wave-induced actuator and a method thereof. Background Art

[0002] Micro soft actuators that can convert external stimuli into mechanical motion have great application potential in deep-sea exploration, small biological sampling, biomedicine, etc. Various soft actuators driven by different stimuli such as magnetic field, electric field, temperature and humidity have been widely reported, among which photoactuators driven by light have received special attention due to their ease of remote control and the adjustability of parameters such as wavelength, intensity and polarization.

[0003] Most traditional optical actuators are triggered by free-space light, which means that there must be a straight optical path between the light source and the actuator, which greatly limits the use of actuators in situations that are easily obstructed. Moreover, during long-distance transportation, the intensity of free-space light may be significantly reduced, affecting the driving efficiency. For example, in underwater scenes, especially in deep-water and deep-sea exploration applications, the refraction, scattering and absorption of water will have a very large impact on the intensity and properties of spatial light, greatly hindering the use and precise control of actuators.

[0004] Using optical waveguides to transmit light to the actuator is an effective strategy to overcome these limitations, because light can be transmitted over long distances through optical waveguides, avoiding the influence of the external environment and reducing losses. However, there is a lack of research and development on optical waveguide actuators, and the reported optical waveguide actuators are mostly commercial optical fibers, which are large in size (>100 microns), resulting in large actuator sizes and difficulty in miniaturization. They are also prone to size mismatch with the photoresponsive material, which reduces energy utilization. Therefore, the existing optical waveguide actuators have small deformation amplitudes and long response times, which are difficult to meet the needs of practical use. Summary of the invention

[0005] In view of the shortcomings of the prior art, developing a micro-light wave actuator with large deformation capability has important scientific and application value, so the present invention provides an evanescent field driven micro-light wave actuator.

[0006] The technical solution of the present invention is as follows:

[0007] 1. A micro optical wave actuator driven by evanescent field:

[0008] The micro optical wave actuator includes a micro-nano optical fiber, a polymer fiber and a light source. The polymer fiber is in contact with and connected to one end of the micro-nano optical fiber, and the light source is arranged at the other end of the micro-nano optical fiber. The micro-nano optical fiber has a waist region, and a polymer fiber with different material properties from the micro-nano optical fiber is arranged in the waist region.

[0009] The micro-nano optical fiber is mainly a single-cone micro-nano optical fiber, which is made by a heating and stretching method. The single-cone micro-nano optical fiber includes a micro-nano optical fiber cone region located in the middle, a micro-nano optical fiber waist region located at one end, and a micro-nano optical fiber pigtail located at the other end, that is, the micro-nano optical fiber cone region is between the micro-nano optical fiber waist region and the micro-nano optical fiber pigtail, the micro-nano optical fiber waist region passes through a polymer fiber, the polymer fiber is in contact and connected with the surface of the micro-nano optical fiber waist region, and the light source is arranged near the end of the micro-nano optical fiber pigtail.

[0010] Wherein, the polymer fiber is tightly attached to the surface of the waist region of the micro-nano optical fiber.

[0011] Light is generated and emitted by the light source and then incident on the single-cone micro-nano optical fiber, so that an evanescent field is generated around the waist region of the micro-nano optical fiber; light is incident on the single-cone micro-nano optical fiber from the micro-nano optical fiber pigtail and propagates, passing through the micro-nano optical fiber cone region to reach the micro-nano optical fiber waist region.

[0012] The polymer fiber is doped with a photothermal conversion material.

[0013] The refractive index of the polymer fiber is greater than the refractive index of the core of the single-tapered micro-nano optical fiber, and the thermal expansion coefficients of the polymer fiber and the waist region of the micro-nano optical fiber are different.

[0014] Preferably, the polymer fiber is generally made of polymethyl methacrylate fiber, thermoplastic polyurethane, liquid crystal elastomer, hydrogel, polyethylene, polystyrene, etc., and the photothermal conversion material is specifically gold nanoparticles, gold nanorods, graphene, carbon nanotubes, dyes, etc.

[0015] More preferably, the polymer fiber is any one of polymer fiber I, polymer fiber II, polymer fiber III and polymer fiber IV;

[0016] 1) adding polymethyl methacrylate and photothermal dye to N,N-dimethylformamide until dissolved, wherein the mass amount of polymethyl methacrylate is 20-1000 times that of the photothermal dye, and then using electrospinning and parallel plate electrodes to obtain oriented polymethyl methacrylate fibers as polymer fiber I, and then using micromanipulation to place polymer fiber I on the micro-nano optical fiber waist region, and then treating the polymer fiber I placed on the micro-nano optical fiber waist region with N,N-dimethylformamide vapor to obtain a micro-nano optical fiber waist region combined with polymer fiber I as actuator I;

[0017] 2) dispersing the gold nanorods modified with polyethylene glycol in N,N-dimethylformamide and then adding thermoplastic polyurethane to dissolve, wherein the mass amount of thermoplastic polyurethane is 500-5000 times that of the gold nanorods, to obtain a mixed solution I, and then printing the mixed solution I on the waist region of the micro-nano optical fiber using microelectronic printing technology as polymer fiber II, and after drying and curing, obtaining a micro-nano optical fiber waist region combined with polymer fiber II as actuator II;

[0018] 3) dissolving N-isopropylacrylamide, acrylic acid, acrylamide benzophenone and azobisisobutyronitrile AIBN in 1,4-dioxane, heating for reaction, and drying to obtain PNIPAM, dispersing polyethylene glycol-modified gold nanorods in propanol, and then adding PNIPAM until dissolved, wherein the mass amount of PNIPAM is 500-5000 times that of the gold nanorods, to obtain a mixed solution II, and then using microelectronic printing technology to print the mixed solution II on the waist region of the micro-nano optical fiber as polymer fiber III, and irradiating with ultraviolet light to obtain a micro-nano optical fiber waist region combined with polymer fiber III, and then immersing the micro-nano optical fiber waist region combined with polymer fiber III in a mixed solvent of ethanol and water as actuator III;

[0019] 4) Mixing liquid crystal monomers, chain extenders, free radical inhibitors, crosslinkers, photoinitiators, catalysts and photothermal dyes together to obtain a mixed solution III, wherein the mass ratio of the photothermal dye in the mixed solution III is 0.1%-5%, heating under light-proof conditions to carry out oligomerization reaction to obtain liquid crystal elastomer ink, and then using microelectronic printing technology to print the liquid crystal elastomer ink pattern on the micro-nano optical fiber waist as polymer fiber IV, and irradiating with ultraviolet light to obtain a micro-nano optical fiber waist combined with polymer fiber IV as actuator IV.

[0020] 2. A micro-light wave actuation method based on an evanescent field driven micro-light wave actuator:

[0021] The method is:

[0022] The light source generates light, which is then incident into the single-tapered micro-nano optical fiber, generating an evanescent field around the micro-nano optical fiber waist region of the single-tapered micro-nano optical fiber. The refractive index of the polymer fiber is greater than the refractive index of the micro-nano optical fiber waist region, so that the light is transmitted to the polymer fiber and then absorbed by the polymer fiber, causing the temperature of the polymer fiber and the micro-nano optical fiber waist region to increase, causing a temperature difference between the polymer fiber and the micro-nano optical fiber waist region. Due to the different thermal expansion coefficients of the polymer fiber and the micro-nano optical fiber waist region, the micro-optical wave actuator is bent and deformed.

[0023] After the polymer fiber absorbs light, the temperature of the polymer fiber and the micro-nano optical fiber waist region increases under the action of the photothermal material, thereby causing the polymer fiber and the micro-nano optical fiber waist region to bend and deform in a direction with smaller thermal expansion deformation.

[0024] Compared with the prior art, the present invention has the following beneficial effects:

[0025] (1) It overcomes the defects of traditional actuators that are easily restricted by the space environment, difficult to miniaturize and remotely precisely control.

[0026] (2) Strong controllability and fast response speed.

[0027] (3) By driving the evanescent field generated in the waist region of the micro-nano optical fiber, the driving light can be efficiently introduced into the deformable material, thereby improving energy utilization. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 It is a schematic diagram of the structure of a micro light wave actuator.

[0029] Figure 2 yes Figure 1 AA cross-section diagram.

[0030] Figure 3 This is a microscopic image of oriented polymethyl methacrylate nanofibers collected using parallel plate electrodes.

[0031] Figure 4 This is a schematic diagram of the actuator deformation when the thermal expansion coefficient of the polymer fiber is greater than the waist of the micro-nano optical fiber.

[0032] Figure 5 This is a schematic diagram of the actuator deformation when the thermal expansion coefficient of the polymer fiber is smaller than the waist of the micro-nano optical fiber.

[0033] In the figure: 1. micro-nano optical fiber, 101. micro-nano optical fiber waist region, 102. micro-nano optical fiber taper region, 103. micro-nano optical fiber pigtail, 2. polymer fiber, 3. light source. DETAILED DESCRIPTION

[0034] The present invention is further described in detail below with reference to the accompanying drawings and specific embodiments.

[0035] like Figure 1 As shown, the micro-optical wave actuator includes a micro-nano optical fiber, a polymer fiber 2 and a light source 3. The polymer fiber 2 is in contact and connected with one end of the micro-nano optical fiber, and the light source 3 is arranged at the other end of the micro-nano optical fiber. The micro-nano optical fiber has a waist region, and a polymer fiber 2 with different material properties from the micro-nano optical fiber is arranged in the waist region.

[0036] The micro-nano optical fiber is mainly a single-cone micro-nano optical fiber 1, which is made by a heating and stretching method. The single-cone micro-nano optical fiber 1 includes a micro-nano optical fiber cone region 102 located in the middle, a micro-nano optical fiber waist region 101 located at one end, and a micro-nano optical fiber pigtail 103 located at the other end, that is, the micro-nano optical fiber cone region 102 is between the micro-nano optical fiber waist region 101 and the micro-nano optical fiber pigtail 103, the micro-nano optical fiber waist region 101 passes through the polymer fiber 2, and the polymer fiber 2 is in contact and connected with the surface of the micro-nano optical fiber waist region 101, and the light source 3 is arranged near the end of the micro-nano optical fiber pigtail 103.

[0037] Light is generated and emitted by the light source 3 and then incident on the single-cone micro-nano optical fiber 1, so that an evanescent field is generated around the waist region 101 of the micro-nano optical fiber; light is incident on the single-cone micro-nano optical fiber 1 from the micro-nano optical fiber pigtail 103 and propagates, passing through the micro-nano optical fiber cone region 102 to reach the micro-nano optical fiber waist region 101.

[0038] In a specific implementation, the polymer fiber 2 is attached to the surface of the micro-nano optical fiber waist region 101. The polymer fiber 2 is doped with a photothermal conversion material, the refractive index of the polymer fiber 2 is greater than the refractive index of the core of the single-taper micro-nano optical fiber 1, and the thermal expansion coefficients of the polymer fiber 2 and the micro-nano optical fiber waist region 101 are different.

[0039] The working process of the actuator of the present invention is as follows:

[0040] The light source 3 generates light, which is then incident on the single-taper micro-nano optical fiber 1, generating an evanescent field around the micro-nano optical fiber waist region 101 of the single-taper micro-nano optical fiber 1. Since the refractive index of the polymer fiber is greater than the refractive index of the micro-nano optical fiber waist region, the light in the evanescent field is transmitted to the polymer fiber 2 and then absorbed by the polymer fiber 2. Under the action of the photothermal conversion material, it is converted into heat energy, causing the temperature of the polymer fiber 2 and the micro-nano optical fiber waist region 101 to increase. Since the thermal expansion coefficients of the polymer fiber 2 and the micro-nano optical fiber waist region 101 are different, a temperature difference occurs between the polymer fiber 2 and the micro-nano optical fiber waist region 101. Since the thermal expansion coefficients of the polymer fiber 2 and the micro-nano optical fiber waist region 101 are different, the micro optical wave actuator is bent and deformed.

[0041] Specifically, when the thermal expansion coefficient of the polymer fiber 2 is greater than the thermal expansion coefficient of the micro-nano optical fiber waist region 101, after the polymer fiber 2 absorbs light, the temperatures of the polymer fiber 2 and the micro-nano optical fiber waist region 101 both increase under the action of the photothermal material, and the thermal expansion deformation of the polymer fiber 2 is greater than that of the micro-nano optical fiber waist region 101. The actuator bends and deforms in the direction where the thermal expansion deformation is smaller, that is, toward the side of the micro-nano optical fiber waist region 101.

[0042] When the thermal expansion coefficient of the polymer fiber 2 is smaller than that of the micro-nano optical fiber waist region 101, after the polymer fiber 2 absorbs light, the temperatures of the polymer fiber 2 and the micro-nano optical fiber waist region 101 both increase under the action of the photothermal material, and the thermal expansion deformation of the polymer fiber 2 is smaller than that of the micro-nano optical fiber waist region 101. The actuator bends and deforms in the direction of smaller thermal expansion deformation, that is, toward one side of the polymer fiber 2.

[0043] Embodiments of the present invention are as follows: Embodiment 1:

[0044] The schematic diagram of the micro-light wave actuator is shown in Figure 1 As shown, in this embodiment, the thermal expansion coefficient of the polymer fiber 2 is greater than the thermal expansion coefficient of the waist region 101 of the micro-nano optical fiber.

[0045] Polymethyl methacrylate (PMMA) and a certain amount of photothermal dye were dissolved in N,N-dimethylformamide, and then PMMA fibers were prepared by electrospinning. The oriented PMMA fibers were collected using parallel plate electrodes. The morphology of the oriented fibers was as follows: Figure 3 The fiber orientation can facilitate the subsequent micromanipulation of PMMA fibers and reduce the overlap and adhesion between disordered stacked nanofibers.

[0046] The micro-nano optical fiber 1 was prepared by a heating and stretching method, and then the PMMA fiber was placed on the micro-nano optical fiber waist region 101 of the micro-nano optical fiber 1 by micromanipulation as the polymer fiber 2. The polymer fiber 2 was treated with N,N-dimethylformamide vapor for 1 minute to firmly bond the micro-nano optical fiber 1 to obtain a micro optical waveguide actuator.

[0047] When the actuator is working, the pigtail 103 of the micro-nano optical fiber 1 is connected to the light source 3. When the light is transmitted to the waist region 101 of the micro-nano optical fiber 1, an evanescent field is generated on its surface. Since the refractive index of the polymer fiber 2 is greater than the refractive index of the waist region 101 of the micro-nano optical fiber 1, the light in the evanescent field can be absorbed by the polymer fiber 2 and converted into heat energy under the action of the photothermal dye, causing the temperature to rise. Since the thermal expansion coefficient of the polymer fiber 2 is higher than that of the waist region 101 of the micro-nano optical fiber 1, the optical actuator bends to one side of the micro-nano optical fiber 1 and deforms. The deformation effect is as follows: Figure 4 shown. Example

[0048] In this embodiment, the thermal expansion coefficient of the polymer fiber 2 is greater than the thermal expansion coefficient of the waist region 101 of the micro-nano optical fiber.

[0049] The micro-nano optical fiber 1 is prepared by using a heating stretching method. Polyethylene glycol-modified gold nanorods (AuNR) are dispersed in N,N-dimethylformamide and then thermoplastic polyurethane (TPU) is added to dissolve it. Subsequently, the TPU / AuNR solution is printed on the waist region 101 of the micro-nano optical fiber 1 as a polymer fiber 2 using microelectronic printing technology. After drying and curing, a micro optical waveguide actuator is obtained.

[0050] When the optical actuator is working, the pigtail 103 of the micro-nano optical fiber 1 is connected to the light source 3. When the light is transmitted to the waist region 101 of the micro-nano optical fiber 1, an evanescent field is generated on its surface. Since the refractive index of the polymer fiber 2 is greater than the refractive index of the waist region 101 of the micro-nano optical fiber 1, the light in the evanescent field can be absorbed by the polymer fiber 2 and converted into heat energy under the action of AuNR, resulting in a temperature increase. Since the thermal expansion coefficient of the polymer fiber 2 is higher than that of the waist region 101 of the micro-nano optical fiber 1, the optical actuator bends to one side of the micro-nano optical fiber 1 and deforms. The deformation effect is as follows: Figure 4 shown. Embodiment 2:

[0051] The AA cross-section of the micro optical wave actuator is shown in Figure 2 In this embodiment, the thermal expansion coefficient of the polymer fiber is smaller than the thermal expansion coefficient of the waist region of the micro-nano optical fiber.

[0052] N-isopropylacrylamide, acrylic acid, acrylamide benzophenone and AIBN were dissolved in 1,4-dioxane, reacted at 80 °C for 15 hours, and dried to obtain PNIPAM. Polyethylene glycol-modified AuNR was dispersed in propanol, and then PNIPAM was added to dissolve. The micro-nano optical fiber 1 was prepared by heating and stretching method, and then the PNIPAM / AuNR solution was printed on the waist region 101 of the micro-nano optical fiber 1 as polymer fiber 2 by microelectronic printing technology, and then UV light was irradiated for 60 min for cross-linking. It was then immersed in a water / ethanol mixed solvent to remove the unreacted part, and a micro-optical waveguide actuator was obtained.

[0053] When the optical actuator is working, the pigtail 103 of the micro-nano optical fiber 1 is connected to the light source 3. When the light is transmitted to the waist region 101 of the micro-nano optical fiber 1, an evanescent field is generated on its surface. Since the refractive index of the polymer fiber 2 is greater than the refractive index of the waist region 101 of the micro-nano optical fiber 1, the light in the evanescent field can be absorbed by the polymer fiber 2 and converted into heat energy under the action of AuNR, resulting in a temperature increase. Since PNIPAM has thermal shrinkage, that is, the thermal expansion coefficient of the polymer fiber 2 is lower than that of the waist region 101 of the micro-nano optical fiber 1, the optical actuator bends to one side of the polymer fiber 2 and deforms. The deformation effect is as follows: Figure 5 shown. Embodiment 3:

[0054] In this embodiment, the thermal expansion coefficient of the polymer fiber is smaller than the thermal expansion coefficient of the waist region of the micro-nano optical fiber.

[0055] Liquid crystal monomer RM 257, chain extender EDDET, free radical inhibitor BHT, crosslinker PETA, photoinitiator PI819, catalyst TEA and photothermal dye were mixed together and reacted at 80°C for 45 minutes in the dark to perform oligomerization reaction to obtain liquid crystal elastomer (LCE) ink.

[0056] The micro-nano optical fiber 1 was prepared by a heating and stretching method, and then the LCE pattern was printed on the waist region 101 of the micro-nano optical fiber 1 as the polymer fiber 2 by using a microelectronic printing technology, and then cross-linked by ultraviolet light irradiation for 60 minutes to obtain a micro optical waveguide actuator.

[0057] When the optical actuator is working, the pigtail 103 of the micro-nano optical fiber 1 is connected to the light source 3. When the light is transmitted to the waist region 101 of the micro-nano optical fiber 1, an evanescent field is generated on its surface. Since the refractive index of the polymer fiber 2 is greater than the refractive index of the waist region 101 of the micro-nano optical fiber 1, the light in the evanescent field can be absorbed by the polymer fiber 2 and converted into heat energy under the action of the photothermal dye, resulting in a temperature increase. Since LCE has thermal shrinkage, that is, the thermal expansion coefficient of the polymer fiber 2 is lower than that of the waist region 101 of the micro-nano optical fiber 1, the optical actuator bends to one side of the polymer fiber 2 and deforms. The deformation effect is as follows: Figure 5 shown. Embodiment 4:

[0058] In this embodiment, the thermal expansion coefficient of the polymer fiber 2 is greater than the thermal expansion coefficient of the waist region 101 of the micro-nano optical fiber.

[0059] The micro-nano optical fiber 1 is prepared by a heating and stretching method, polyethylene (PE) resin particles and photothermal dye are mixed at high temperature using a twin-screw extruder, wherein the mass ratio of the photothermal dye to the polyethylene resin particles is 0.1%-5%. The obtained mixture is cooled and re-granulated, and then added to a printing nozzle equipped with a heating function. Subsequently, the PE melt mixed with the photothermal dye is printed on the waist region 101 of the micro-nano optical fiber 1 as a polymer fiber 2 using microelectronic printing technology, and a micro-light wave actuator is obtained after cooling and solidification.

[0060] When the optical actuator is working, the pigtail 103 of the micro-nano optical fiber 1 is connected to the light source 3. When the light is transmitted to the waist region 101 of the micro-nano optical fiber 1, an evanescent field is generated on its surface. Since the refractive index of the polymer fiber 2 is greater than the refractive index of the waist region 101 of the micro-nano optical fiber 1, the light in the evanescent field can be absorbed by the polymer fiber 2 and converted into heat energy under the action of the photothermal dye, resulting in a temperature increase. Since the thermal expansion coefficient of the polymer fiber 2 is higher than that of the waist region 101 of the micro-nano optical fiber 1, the optical actuator bends to one side of the micro-nano optical fiber 1 and deforms. The deformation effect is as follows: Figure 4 shown. Embodiment 5:

[0061] The schematic diagram of the micro-light wave actuator is shown in Figure 1 As shown, in this embodiment, the thermal expansion coefficient of the polymer fiber 2 is greater than the thermal expansion coefficient of the waist region 101 of the micro-nano optical fiber.

[0062] The gold nanorods (AuNR) modified with polyethylene glycol were dispersed in tetrahydrofuran and polystyrene (PS) was added to dissolve to obtain AuNR / PS solution. PS fibers were then prepared by electrospinning. The obtained PS fiber mat was cut into small pieces and immersed in ethanol. The PS fiber mat was broken up by a high-speed disperser at 14,000 rpm to form a single PS short fiber dispersion in ethanol. The dispersion was droplet-coated on a silicon wafer and dried to obtain a single PS short fiber. Breaking up the originally overlapping and adhered nanofibers into single short fibers can facilitate the subsequent micromanipulation of PS fibers.

[0063] The micro-nano optical fiber 1 was prepared by a heating and stretching method, and then a PS short fiber was placed on the micro-nano optical fiber waist region 101 of the micro-nano optical fiber 1 by micromanipulation as the polymer fiber 2. The polymer fiber 2 was treated with tetrahydrofuran vapor for 1 minute to firmly bond the micro-nano optical fiber 1 to obtain a micro optical waveguide actuator.

[0064] When the actuator is working, the pigtail 103 of the micro-nano optical fiber 1 is connected to the light source 3. When the light is transmitted to the waist region 101 of the micro-nano optical fiber 1, an evanescent field is generated on its surface. Since the refractive index of the polymer fiber 2 is greater than the refractive index of the waist region 101 of the micro-nano optical fiber 1, the light in the evanescent field can be absorbed by the polymer fiber 2 and converted into heat energy under the action of the photothermal dye, causing the temperature to rise. Since the thermal expansion coefficient of the polymer fiber 2 is higher than that of the waist region 101 of the micro-nano optical fiber 1, the optical actuator bends to one side of the micro-nano optical fiber 1 and deforms. The deformation effect is as follows: Figure 4 shown.

[0065] The above specific implementation modes are used to explain the present invention rather than to limit the present invention. Any modification and change made to the present invention within the spirit of the present invention and the protection scope of the claims shall fall within the protection scope of the present invention.

[0066] The above description is only a preferred embodiment of the present invention, so all equivalent changes or modifications made according to the structure, characteristics and principles described in the scope of the patent application of the present invention are included in the scope of the patent application of the present invention.

Claims

1. An evanescent field driven micro optical wave actuator, characterized in that: The invention comprises a micro-nano optical fiber, a polymer fiber (2) and a light source (3), wherein the polymer fiber (2) is in contact with and connected to one end of the micro-nano optical fiber, and the light source (3) is arranged at the other end of the micro-nano optical fiber; the micro-nano optical fiber has a waist region, and a polymer fiber (2) having material properties different from those of the micro-nano optical fiber is arranged at the waist region; The micro-nano optical fiber is mainly a single-cone micro-nano optical fiber (1), and the single-cone micro-nano optical fiber (1) comprises a micro-nano optical fiber cone region (102) located in the middle, a micro-nano optical fiber waist region (101) located at one end, and a micro-nano optical fiber pigtail (103) located at the other end; the polymer fiber (2) is in contact with and connected to the surface of the micro-nano optical fiber waist region (101); and the light source (3) is arranged near the end of the micro-nano optical fiber pigtail (103); Light is generated and emitted by the light source (3) and then incident on the single-cone micro-nano optical fiber (1), so that an evanescent field is generated around the waist region (101) of the micro-nano optical fiber; light is incident from the micro-nano optical fiber pigtail (103) into the single-cone micro-nano optical fiber (1) and propagates, passing through the micro-nano optical fiber cone region (102) and reaching the micro-nano optical fiber waist region (101).

2. The evanescent field driven micro optical wave actuator according to claim 1, characterized in that: The polymer fiber (2) is attached to the surface of the micro-nano optical fiber waist region (101).

3. The evanescent field driven micro optical wave actuator according to claim 1, characterized in that: The polymer fiber (2) is doped with a photothermal conversion material.

4. The evanescent field driven micro optical wave actuator according to claim 2, characterized in that: The refractive index of the polymer fiber (2) is greater than the refractive index of the core of the single-tapered micro-nano optical fiber (1), and the thermal expansion coefficients of the polymer fiber (2) and the waist region (101) of the micro-nano optical fiber are different.

5. A method for a micro-light wave actuator driven by an evanescent field based on the micro-light wave actuator according to any one of claims 1 to 4, characterized in that: The method is: The light source (3) generates light, which is then incident on the single-tapered micro-nano optical fiber (1), generating an evanescent field around the micro-nano optical fiber waist region (101) of the single-tapered micro-nano optical fiber (1). The refractive index of the polymer fiber is greater than the refractive index of the micro-nano optical fiber waist region, so that the light is transmitted to the polymer fiber (2) and then absorbed by the polymer fiber (2), resulting in an increase in the temperature of the polymer fiber (2) and the micro-nano optical fiber waist region (101). Since the thermal expansion coefficients of the polymer fiber (2) and the micro-nano optical fiber waist region (101) are different, the micro optical wave actuator is bent and deformed.

6. The method for actuating a micro-optical waveguide driven by an evanescent field according to claim 5, characterized in that: The polymer fiber (2) is doped with a photothermal conversion material, and after the polymer fiber (2) absorbs light, the temperature of the polymer fiber (2) and the micro-nano optical fiber waist region (101) increases under the action of the photothermal material, thereby causing the polymer fiber (2) and the micro-nano optical fiber waist region (101) to bend and deform in a direction with smaller thermal expansion deformation.

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