Detection device and detection method of plasma generator

Abstract

The invention discloses a detection device and method for a plasma generator, and belongs to the technical field of plasma generator detection.The detection device comprises an operation table, an electric rotating disc is installed on the surface of the operation table, a plurality of eight-equally-divided placing discs are installed on the surface of the electric rotating disc, and a feeding mechanism is installed on the upper surface of the operation table; two visual detection mechanisms are installed on the upper surface of the operation table, a turnover mechanism is arranged on the upper surface of the operation table and located on the inner sides of the two visual detection mechanisms, and a microwave testing mechanism, a pressure testing mechanism and a discharging mechanism which are matched with the multiple containing discs are arranged on the surface of the operation table; a discharging conveying belt matched with the discharging mechanism is installed on the surface of the operation table. On the basis of realizing double-sided visual detection on the plasma generator, the plasma generator can be subjected to microwave test, and the shell pressure test can be carried out on the plasma generator.

Description

Technical Field

[0001] The present invention relates to the technical field of plasma generator detection, and more specifically, to a detection device and a detection method for a plasma generator. Background Art

[0002] The main working principle of the plasma generator is to increase the low voltage to positive high voltage and negative high voltage through a boost circuit, and use the positive high voltage and negative high voltage to ionize the air to produce a large number of positive ions and negative ions, and the number of negative ions is greater than the number of positive ions.

[0003] In modern industrial production, in order to ensure the quality and reliability of products, the application of various precision detection technologies and equipment has become increasingly important, especially for some high-precision and high-reliability products, such as semiconductor devices, aerospace parts, etc., whose detection requirements are more stringent. Traditional plasma generator detection methods often rely on manual visual inspection or simple mechanical testing, which are not only inefficient, but also difficult to meet the increasingly high quality standards. Summary of the invention

[0004] 1. Technical issues to be solved

[0005] In view of the problems existing in the prior art, the purpose of the present invention is to provide a detection device and a detection method for a plasma generator. On the basis of realizing double-sided visual inspection of the plasma generator, the present invention can also perform microwave testing on the plasma generator and perform shell pressure testing on the plasma generator.

[0006] 2. Technical solution

[0007] To solve the above problems, the present invention adopts the following technical solutions:

[0008] A detection device for a plasma generator comprises: an operating table, an electric turntable is installed on the surface of the operating table, a plurality of placement plates divided into eight equal parts are installed on the surface of the electric turntable, a loading mechanism is installed on the upper surface of the operating table, two visual detection mechanisms are installed on the upper surface of the operating table, a flip mechanism is provided on the upper surface of the operating table and located inside the two visual detection mechanisms, a microwave testing mechanism, a pressure testing mechanism and a unloading mechanism are provided on the surface of the operating table and are compatible with the plurality of placement plates, a unloading conveyor belt compatible with the unloading mechanism is installed on the surface of the operating table, and a control panel is installed on one side of the unloading conveyor belt.

[0009] As a preferred solution of the present invention, the feeding mechanism comprises a feeding rack and a first driving seat mounted on the surface of the operating table, a first movable seat for transverse adjustment is mounted on the surface of the feeding rack, a first electric cylinder is fixed on the surface of the moving part of the first movable seat, and an electromagnetic suction head is fixed on the surface of the piston rod of the first electric cylinder;

[0010] The surface of the first driving seat is rotatably connected to a first threaded rod, the surface of the first threaded rod is threadedly connected to an internal threaded plate, a first servo motor is installed at one end of the first driving seat, and the output shaft of the first servo motor is fixedly connected to one end of the first threaded rod, a second driving seat slidably connected to the surface of the first driving seat is fixed on the surface of the internal threaded plate, the surface of the second driving seat is rotatably connected to a second threaded rod, the surface of the second threaded rod is threadedly connected to a loading seat, two loading trays are provided on the surface of the loading seat, a second servo motor is fixed to one side of the second driving seat, and the output shaft of the second servo motor is fixedly connected to one end of the second threaded rod.

[0011] As a preferred solution of the present invention, the visual inspection mechanism includes a visual inspection frame installed on the upper surface of the operating table, the surface of the visual inspection frame is installed with a first sliding rail extending longitudinally, the surface of the first sliding rail is slidably connected with a first sliding block and a second sliding block, the surface of the second sliding block is installed with a first positioning ring, the surface of the first sliding block is installed with a folding plate, the surface of the folding plate is installed with a CCD camera, the surfaces of the visual inspection frame and the second sliding block are both installed with second electric cylinders, and the piston rods of the two second electric cylinders are fixedly connected to the bottom of the second sliding block and the first sliding block, respectively.

[0012] As a preferred solution of the present invention, the flipping mechanism includes a flipping seat installed on the surface of the operating table, both sides of the flipping seat surface are provided with a second sliding rail extending longitudinally, the surface of the second sliding rail is slidably connected with a second movable seat, the surface of the second movable seat is provided with a third sliding rail extending transversely, the surface of the third sliding rail is slidably connected with two third movable seats, the surface of the third movable seat relative to the inner side is rotatably connected with a flip clamping rod, the surfaces of the two third movable seats are rotatably connected with a connecting rod, a limiting slide groove is provided on the surface of the connecting rod on one side, and a limiting protrusion adapted to the limiting slide groove is provided on the surface of the connecting rod on the other side.

[0013] As a preferred solution of the present invention, a third servo motor is installed on the surface of the third movable seat on one side, and the output shaft of the third servo motor is fixedly connected to the flip clamp rod, the surfaces of the connecting rod and the flip clamp rod are fixedly connected with pulleys, and the two pulleys are rotatably connected by a transmission belt, a third electric cylinder is installed on the surface of the flip seat, and the piston rod of the third electric cylinder is fixedly connected to the second movable seat, and a fourth electric cylinder is provided on the inner sides of the two third movable seats.

[0014] As a preferred embodiment of the present invention, the microwave testing mechanism includes a microwave testing frame installed on the surface of an operating table, the surface of the microwave testing frame is provided with two fourth sliding rails extending longitudinally, the surface of the fourth sliding rails is slidably connected with a seventh movable seat, a fifth electric cylinder for longitudinal adjustment is installed on the top of the microwave testing frame, and the piston rod of the fifth electric cylinder is fixedly connected to the seventh movable seat, a sixth electric cylinder for longitudinal adjustment is provided on the surface of the seventh movable seat, a fourth movable seat is fixedly provided on the surface of the piston rod of the sixth electric cylinder, a seventh electric cylinder and a microwave probe are installed on the surface of the fourth movable seat, a microwave source is fixedly provided on the surface of the piston rod of the seventh electric cylinder, and a second positioning ring and a receiving antenna are fixedly connected on the surface of the microwave testing frame and on the upper and lower sides of the electric turntable.

[0015] As a preferred solution of the present invention, the pressure testing mechanism includes a pressure testing platform installed on the surface of an operating platform, the surface of the pressure testing platform is provided with two longitudinally extending fifth sliding rails, the surface of the fifth sliding rails is slidably connected with a fifth moving seat, the surface of the pressure testing platform is installed with a longitudinally adjustable eighth electric cylinder, and the piston rod of the eighth electric cylinder is fixedly connected to the fifth moving seat, the surface of the fifth moving seat is installed with two spring telescopic rods, the bottom of the spring telescopic rod is installed with a pressing plate, and the bottom of the pressing plate is installed with a pressure sensor.

[0016] As a preferred solution of the present invention, the unloading mechanism includes a unloading rack installed on the surface of the operating table, the surface of the unloading rack is installed with a second electric slide rail for transverse adjustment, the surface of the second electric slide rail moving member is installed with a sixth moving seat for longitudinal adjustment, the surface of the third electric slide rail moving member is fixed with an eighth moving seat, the surface of the eighth moving seat is installed with a ninth electric cylinder for longitudinal adjustment, and the surface of the piston rod of the ninth electric cylinder is fixed with an electric clamp.

[0017] A plasma generator detection method, comprising:

[0018] A. Place multiple plasma generators on the loading tray, then start the second servo motor and its output shaft drives the second threaded rod to rotate and drive the loading seat to move, the first servo motor starts its output shaft to drive the first threaded rod to rotate, and then the second driving seat is driven to move under the action of the internal thread plate, and then the first electric slide rail is started to drive the first moving seat to move horizontally, and then the first electric cylinder starts its piston rod to drive the electromagnetic suction head to adjust the height, so as to place the plasma generator on the surface of the loading tray on the surface of the placement plate;

[0019] B. The piston rods of the two second electric cylinders are activated to drive the second sliding block and the first sliding block to move on the surface of the first sliding rail. The second sliding block drives the first positioning ring to move above the plasma generator. The first sliding block drives the folding plate and the CCD camera to move above the first positioning ring. At this time, the plasma generator is visually inspected by the CCD camera.

[0020] C. The second moving seat is driven to move on the surface of the second sliding rail by starting the third electric cylinder, and then the third electric cylinder is started to drive the two third moving seats to move on the surface of the third sliding rail. When the third moving seat on one side moves, it drives a connecting rod to move on the inner wall of another connecting rod, and then the plasma generator is clamped by the flip clamp rod. The third servo motor is started and its output shaft drives a flip clamp rod to rotate. At this time, one connecting rod is driven to rotate under the action of the pulley and the transmission belt, and the other connecting rod is driven to rotate under the action of the limiting slide groove and the limiting protrusion. At this time, another flip clamp rod is driven to rotate under the action of another set of limiting slide grooves and limiting protrusions, thereby realizing the flipping of the plasma generator;

[0021] D. At this time, the electric turntable drives the plasma generator to continue to move, and another set of visual inspection mechanisms repeats step B to perform visual inspection on the other side of the plasma generator;

[0022] E. Adjust the frequency of the microwave source to 2.45 GHz, then start the seventh electric cylinder and its piston rod to drive the microwave source to contact the microwave probe, and connect the microwave source and the microwave probe, then start the sixth electric cylinder and its piston rod to drive the fourth moving seat to move, at this time, the microwave probe can transmit microwave signals from the upper side to the plasma generator, the microwave signals will pass through the plasma generator, and the microwave signals will be received by the receiving antenna, at this time, the test results will be transmitted to the control panel through the receiving antenna, and the control panel will calculate the test results;

[0023] F. The receiving antenna will record the microwave signal in the free space without plasma, and then record the transmission signal and reflection signal when plasma exists. At this time, the control panel compares the difference in microwave signal intensity when there is plasma and when there is no plasma, calculates the transmission coefficient and reflection coefficient, and analyzes the phase change of the microwave signal. The transmission coefficient and phase change data are combined with the Landau damping condition relationship formula to calculate the plasma density;

[0024] G. The piston rod of the eighth electric cylinder is activated to drive the fifth moving seat to move on the surface of the fifth sliding rail. At this time, the pressing plate and the pressure sensor are pushed under the action of the spring telescopic rod. At this time, the pressure sensor is convenient for recording the pressure data received by the plasma generator and transmitting it to the control panel;

[0025] H. Start the sixth movable seat for lateral adjustment through the second electric slide rail, and start the eighth movable seat for longitudinal adjustment through the third electric slide rail. At this time, start the ninth electric cylinder and its piston rod to drive the electric clamp to move. At the same time, the plasma generator is clamped by the electric clamp and moved to the surface of the unloading conveyor belt.

[0026] 3. Beneficial effects

[0027] Compared with the prior art, the advantages of the present invention are:

[0028] (1) The present invention can move the plasma generator to the placement plate on the surface of the electric turntable through the loading mechanism, and then the electric turntable rotates to drive the plasma generator to rotate. At this time, the plasma generator is inspected by the first group of visual inspection mechanisms, and then the plasma generator is flipped by the flipping mechanism. At this time, the plasma generator is subjected to secondary inspection by the second group of visual inspection mechanisms, and then the plasma generator is subjected to microwave testing by the microwave testing mechanism, and the plasma generator is subjected to shell pressure testing by the pressure testing mechanism. Finally, the inspected plasma generator is moved to the surface of the unloading conveyor belt by the unloading mechanism, and the inspection results are observed through the control panel.

[0029] (2) The present invention uses a visual inspection mechanism, a microwave testing mechanism and a pressure testing mechanism in combination with CCD visual inspection, microwave testing and a plasma generator multimodal inspection technology, thereby achieving comprehensive inspection of product appearance, internal structure and surface state, significantly improving the accuracy and reliability of inspection. At the same time, the automated inspection device can effectively reduce human errors, improve the consistency and stability of inspection, and achieve high-speed and continuous inspection, thereby greatly shortening the inspection time and improving production efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Figure 1It is a schematic diagram of a detection device for a plasma generator according to the present invention from a first viewing angle;

[0031] Figure 2 A schematic diagram of a detection device for a plasma generator according to the present invention from a second viewing angle;

[0032] Figure 3 It is a partial structural diagram of a feeding mechanism in a detection device of a plasma generator of the present invention;

[0033] Figure 4 It is a partial structural diagram of a feeding mechanism in a detection device of a plasma generator of the present invention;

[0034] Figure 5 It is a schematic diagram of a visual detection mechanism in a detection device for a plasma generator of the present invention;

[0035] Figure 6 It is a schematic diagram of a flipping mechanism in a detection device of a plasma generator of the present invention;

[0036] Figure 7 A detection device for a plasma generator of the present invention Figure 6 A magnified view of the local structure at center A;

[0037] Figure 8 A schematic diagram of a microwave testing mechanism in a detection device for a plasma generator according to the present invention;

[0038] Fig. 9 It is a schematic diagram of a pressure testing mechanism in a detection device of a plasma generator of the present invention;

[0039] Fig.10 The present invention is a schematic diagram of a material discharge mechanism in a detection device for a plasma generator.

[0040] Description of the numbers in the figure:

[0041] 1. Operation table; 2. Electric turntable; 3. Placement plate; 4. Loading mechanism; 401. Loading rack; 402. First electric slide rail; 403. First moving seat; 404. First electric cylinder; 405. Electromagnetic suction head; 406. First driving seat; 407. First threaded rod; 408. Internal threaded plate; 409. First servo motor; 410. Second driving seat; 411. Second threaded rod; 412. Loading seat; 413. Loading tray; 414. Second servo motor; 5. Visual inspection machine Structure; 501, visual inspection frame; 502, first sliding rail; 503, first sliding block; 504, second sliding block; 505, first positioning ring; 506, folding plate; 507, CCD camera; 508, second electric cylinder; 6, flip mechanism; 601, flip seat; 602, second sliding rail; 603, second moving seat; 604, third sliding rail; 605, third moving seat; 606, flip clamp rod; 607, third servo motor; 608, connecting rod; 609, limit Slide groove; 610, limit protrusion; 611, pulley; 612, transmission belt; 613, third electric cylinder; 614, fourth electric cylinder; 7, microwave test mechanism; 701, microwave test frame; 702, fourth sliding rail; 703, seventh moving seat; 704, fifth electric cylinder; 705, fourth moving seat; 706, sixth electric cylinder; 707, microwave source; 708, microwave probe; 709, second positioning ring; 710, receiving antenna; 711, seventh electric cylinder; 8 , pressure testing mechanism; 801, pressure testing bench; 802, fifth sliding rail; 803, fifth moving seat; 804, eighth electric cylinder; 805, spring telescopic rod; 806, pressing plate; 807, pressure sensor; 9, unloading mechanism; 901, unloading rack; 902, second electric slide rail; 903, sixth moving seat; 904, third electric slide rail; 905, eighth moving seat; 906, ninth electric cylinder; 907, electric clamp; 10, unloading conveyor belt; 11, control panel. DETAILED DESCRIPTION

[0042] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0043] Example:

[0044] See also Figure 1-10A detection device for a plasma generator comprises: an operating table 1, an electric turntable 2 is installed on the surface of the operating table 1, a plurality of placement plates 3 divided into eight equal parts are installed on the surface of the electric turntable 2, a loading mechanism 4 is installed on the upper surface of the operating table 1, two visual detection mechanisms 5 are installed on the upper surface of the operating table 1, a flip mechanism 6 is provided on the upper surface of the operating table 1 and located inside the two visual detection mechanisms 5, a microwave testing mechanism 7, a pressure testing mechanism 8 and a unloading mechanism 9 are provided on the surface of the operating table 1 and are compatible with the plurality of placement plates 3, a unloading conveyor belt 10 compatible with the unloading mechanism 9 is installed on the surface of the operating table 1, and a control panel 11 is installed on one side of the unloading conveyor belt 10.

[0045] In a specific embodiment of the present invention, the plasma generator can be moved to the placement plate 3 on the surface of the electric turntable 2 by the loading mechanism 4, and then the electric turntable 2 rotates to drive the plasma generator to rotate. At this time, the plasma generator is inspected by the first group of visual inspection mechanisms 5, and then the plasma generator is flipped by the flipping mechanism 6. At this time, the plasma generator is subjected to secondary inspection by the second group of visual inspection mechanisms 5, and then the plasma generator is subjected to microwave testing by the microwave testing mechanism 7, and the plasma generator is subjected to shell pressure testing by the pressure testing mechanism 8. Finally, the inspected plasma generator is moved to the surface of the unloading conveyor belt 10 by the unloading mechanism 9, and the inspection results are observed through the control panel 11.

[0046] Specifically, the feeding mechanism 4 includes a feeding frame 401 and a first driving seat 406 installed on the surface of the operating table 1, a first movable seat 403 for transverse adjustment is installed on the surface of the feeding frame 401, a first electric cylinder 404 is fixed on the surface of the moving part of the first movable seat 403, and an electromagnetic suction head 405 is fixed on the surface of the piston rod of the first electric cylinder 404;

[0047] The surface of the first driving seat 406 is rotatably connected to the first threaded rod 407, the surface of the first threaded rod 407 is threadedly connected to the internal threaded plate 408, a first servo motor 409 is installed at one end of the first driving seat 406, and the output shaft of the first servo motor 409 is fixedly connected to one end of the first threaded rod 407, a second driving seat 410 slidably connected to the surface of the first driving seat 406 is fixed on the surface of the internal threaded plate 408, the surface of the second driving seat 410 is rotatably connected to the second threaded rod 411, the surface of the second threaded rod 411 is threadedly connected to the loading seat 412, the surface of the loading seat 412 is provided with two loading trays 413, a second servo motor 414 is fixed to one side of the second driving seat 410, and the output shaft of the second servo motor 414 is fixedly connected to one end of the second threaded rod 411.

[0048] In a specific embodiment of the present invention, multiple plasma generators are placed on a loading tray 413, and then the second servo motor 414 starts its output shaft to drive the second threaded rod 411 to rotate and drive the loading seat 412 to move, and the first servo motor 409 starts its output shaft to drive the first threaded rod 407 to rotate, and then the second driving seat 410 is driven to move under the action of the internal threaded plate 408. At this time, the first electric slide rail 402 is started to drive the first moving seat 403 to move horizontally, and then the first electric cylinder 404 starts its piston rod to drive the electromagnetic suction head 405 to adjust the height, so that the plasma generator on the surface of the loading tray 413 is placed on the surface of the placement plate 3.

[0049] Specifically, the visual inspection mechanism 5 includes a visual inspection frame 501 installed on the upper surface of the operating table 1, the surface of the visual inspection frame 501 is installed with a longitudinally extending first sliding rail 502, the surface of the first sliding rail 502 is slidably connected with a first sliding block 503 and a second sliding block 504, the surface of the second sliding block 504 is installed with a first positioning ring 505, the surface of the first sliding block 503 is installed with a folding plate 506, the surface of the folding plate 506 is installed with a CCD camera 507, the surfaces of the visual inspection frame 501 and the second sliding block 504 are both installed with second electric cylinders 508, and the piston rods of the two second electric cylinders 508 are fixedly connected to the bottom of the second sliding block 504 and the first sliding block 503, respectively.

[0050] In a specific embodiment of the present invention, two second electric cylinders 508 are used to start their piston rods to drive the second sliding block 504 and the first sliding block 503 to move on the surface of the first sliding rail 502, the second sliding block 504 drives the first positioning ring 505 to move above the plasma generator, and the first sliding block 503 drives the folding plate 506 and the CCD camera 507 to move above the first positioning ring 505. At this time, the plasma generator is visually inspected by the CCD camera 507.

[0051] Specifically, the flip mechanism 6 includes a flip seat 601 installed on the surface of the operating table 1, and both sides of the flip seat 601 surface are provided with a longitudinally extending second sliding rail 602, the surface of the second sliding rail 602 is slidably connected to a second moving seat 603, the surface of the second moving seat 603 is provided with a transversely extending third sliding rail 604, the surface of the third sliding rail 604 is slidably connected to two third moving seats 605, the surface of the third moving seat 605 relative to the inner side is rotatably connected to a flip clamping rod 606, the surfaces of the two third moving seats 605 are both rotatably connected to a connecting rod 608, the surface of one side of the connecting rod 608 is provided with a limiting sliding groove 609, and the surface of the other side of the connecting rod 608 is provided with a limiting sliding groove 609. The surface of the side connecting rod 608 is provided with a limiting protrusion 610 adapted to the limiting slide groove 609, the surface of the third movable seat 605 on one side is installed with a third servo motor 607, and the output shaft of the third servo motor 607 is fixedly connected to the flip clamp rod 606, the surfaces of the connecting rod 608 and the flip clamp rod 606 are fixedly connected with a pulley 611, and the two pulleys 611 are rotatably connected through a transmission belt 612, the surface of the flip seat 601 is installed with a third electric cylinder 613, and the piston rod of the third electric cylinder 613 is fixedly connected to the second movable seat 603, and a fourth electric cylinder 614 is provided on the inner sides of the two third movable seats 605.

[0052] In a specific embodiment of the present invention, the third electric cylinder 613 is started to drive the second movable seat 603 to move on the surface of the second sliding rail 602, and then the third electric cylinder 613 is started to drive the two third movable seats 605 to move on the surface of the third sliding rail 604. When the third movable seat 605 on one side moves, it drives a connecting rod 608 to move on the inner wall of another connecting rod 608, and then the plasma generator is clamped by the flip clamp rod 606. The third servo motor 607 starts its output shaft to drive a flip clamp rod 606 to rotate. At this time, under the action of the pulley 611 and the transmission belt 612, one connecting rod 608 is driven to rotate. At this time, under the action of the limiting slide groove 609 and the limiting protrusion 610, another connecting rod 608 is driven to rotate. At this time, under the action of another group of limiting slide grooves 609 and the limiting protrusion 610, another flip clamp rod 606 is driven to rotate, thereby realizing the flipping of the plasma generator.

[0053] Specifically, the microwave testing mechanism 7 includes a microwave testing frame 701 installed on the surface of the operating table 1, the surface of the microwave testing frame 701 is provided with two fourth sliding rails 702 extending longitudinally, the surface of the fourth sliding rail 702 is slidably connected with a seventh movable seat 703, a fifth electric cylinder 704 for longitudinal adjustment is installed on the top of the microwave testing frame 701, and the piston rod of the fifth electric cylinder 704 is fixedly connected to the seventh movable seat 703, a sixth electric cylinder 706 for longitudinal adjustment is provided on the surface of the seventh movable seat 703, a fourth movable seat 705 is fixedly provided on the surface of the piston rod of the sixth electric cylinder 706, a seventh electric cylinder 711 and a microwave probe 708 are installed on the surface of the fourth movable seat 705, a microwave source 707 is fixedly provided on the surface of the piston rod of the seventh electric cylinder 711, and a second positioning ring 709 and a receiving antenna 710 are fixedly connected on the surface of the microwave testing frame 701 and on the upper and lower sides of the turntable of the electric turntable 2.

[0054] In a specific embodiment of the present invention, the frequency of the microwave source 707 is adjusted to 2.45 GHz, and then the seventh electric cylinder 711 starts its piston rod to drive the microwave source 707 to contact the microwave probe 708, and connect the microwave source 707 and the microwave probe 708, and then the sixth electric cylinder 706 starts its piston rod to drive the fourth movable seat 705 to move. At this time, the microwave probe 708 can transmit a microwave signal to the plasma generator from the upper side, and the microwave signal will pass through the plasma generator. At this time, the microwave signal is received by the receiving antenna 710, and the test result will be transmitted to the control panel 11 through the receiving antenna 710, and the test result will be calculated by the control panel 11.

[0055] Specifically, the pressure testing mechanism 8 includes a pressure testing platform 801 installed on the surface of the operating platform 1, the surface of the pressure testing platform 801 is provided with two longitudinally extending fifth sliding rails 802, the surface of the fifth sliding rail 802 is slidably connected with a fifth movable seat 803, the surface of the pressure testing platform 801 is installed with a longitudinally adjustable eighth electric cylinder 804, and the piston rod of the eighth electric cylinder 804 is fixedly connected to the fifth movable seat 803, the surface of the fifth movable seat 803 is installed with two spring telescopic rods 805, the bottom of the spring telescopic rod 805 is installed with a pressing plate 806, and the bottom of the pressing plate 806 is installed with a pressure sensor 807.

[0056] In a specific embodiment of the present invention, the piston rod of the eighth electric cylinder 804 is started to drive the fifth movable seat 803 to move on the surface of the fifth sliding rail 802. At this time, the pressing plate 806 and the pressure sensor 807 are pushed under the action of the spring telescopic rod 805. At this time, the pressure sensor 807 is convenient for recording the received pressure data of the plasma generator and transmitting it to the control panel 11.

[0057] Specifically, the unloading mechanism 9 includes an unloading rack 901 installed on the surface of the operating table 1, the surface of the unloading rack 901 is installed with a second electric slide rail 902 for transverse adjustment, the surface of the moving part of the second electric slide rail 902 is installed with a sixth moving seat 903 for longitudinal adjustment, the surface of the moving part of the third electric slide rail 904 is fixed with an eighth moving seat 905, the surface of the eighth moving seat 905 is installed with a ninth electric cylinder 906 for longitudinal adjustment, and the surface of the piston rod of the ninth electric cylinder 906 is fixed with an electric clamp 907.

[0058] In a specific embodiment of the present invention, the sixth movable seat 903 is driven by the second electric slide rail 902 to perform lateral adjustment, and the eighth movable seat 905 is driven by the third electric slide rail 904 to perform longitudinal adjustment. At this time, the ninth electric cylinder 906 is started and its piston rod drives the electric clamp 907 to move. At the same time, the plasma generator is clamped by the electric clamp 907 and moved to the surface of the unloading conveyor belt 10.

[0059] A plasma generator detection method comprises the following steps:

[0060] A. Place multiple plasma generators through the loading tray 413, then the second servo motor 414 starts its output shaft to drive the second threaded rod 411 to rotate and drive the loading seat 412 to move, the first servo motor 409 starts its output shaft to drive the first threaded rod 407 to rotate, and then the second driving seat 410 is driven to move under the action of the internal thread plate 408, and then the first electric slide rail 402 is started to drive the first moving seat 403 to move horizontally, and then the first electric cylinder 404 starts its piston rod to drive the electromagnetic suction head 405 to adjust the height, so as to place the plasma generator on the surface of the loading tray 413 on the surface of the placement plate 3;

[0061] B. The piston rods of the two second electric cylinders 508 are activated to drive the second sliding block 504 and the first sliding block 503 to move on the surface of the first sliding rail 502. The second sliding block 504 drives the first positioning ring 505 to move above the plasma generator. The first sliding block 503 drives the folding plate 506 and the CCD camera 507 to move above the first positioning ring 505. At this time, the plasma generator is visually inspected by the CCD camera 507.

[0062] C. The third electric cylinder 613 is started to drive the second moving seat 603 to move on the surface of the second sliding rail 602, and then the third electric cylinder 613 is started to drive the two third moving seats 605 to move on the surface of the third sliding rail 604. When the third moving seat 605 on one side moves, it drives one connecting rod 608 to move on the inner wall of the other connecting rod 608, and then the plasma generator is clamped by the flip clamping rod 606. The third servo motor 607 is started and its output shaft drives one flip clamping rod 606 to rotate. At this time, under the action of the pulley 611 and the transmission belt 612, one connecting rod 608 is driven to rotate, and at this time, under the action of the limiting slide groove 609 and the limiting protrusion 610, another connecting rod 608 is driven to rotate, and at this time, under the action of another group of limiting slide grooves 609 and the limiting protrusion 610, another flip clamping rod 606 is driven to rotate, thereby realizing the flipping of the plasma generator;

[0063] D. At this time, the electric turntable 2 drives the plasma generator to continue to move, and another set of visual inspection mechanisms 5 repeats step B to perform visual inspection on the other side of the plasma generator;

[0064] E. Adjust the frequency of the microwave source 707 to 2.45 GHz, then start the seventh electric cylinder 711 and its piston rod drives the microwave source 707 to contact with the microwave probe 708, and connect the microwave source 707 and the microwave probe 708, then start the sixth electric cylinder 706 and its piston rod drives the fourth movable seat 705 to move, at this time, the microwave probe 708 can transmit microwave signals from the upper side to the plasma generator, the microwave signals will pass through the plasma generator, and the microwave signals will be received by the receiving antenna 710, at this time, the test results will be transmitted to the control panel 11 through the receiving antenna 710, and the test results will be calculated by the control panel 11;

[0065] F. The receiving antenna 710 records the microwave signal in the free space without plasma, and then records the transmission signal and reflection signal when plasma exists. At this time, the control panel 11 compares the difference in microwave signal intensity when plasma exists and when plasma does not exist, calculates the transmission coefficient and reflection coefficient, and analyzes the phase change of the microwave signal at the same time. The transmission coefficient and phase change data are used to calculate the plasma density in combination with the Landau damping condition relationship formula;

[0066] G. The piston rod of the eighth electric cylinder 804 is activated to drive the fifth moving seat 803 to move on the surface of the fifth sliding rail 802. At this time, the spring telescopic rod 805 pushes the pressing plate 806 and the pressure sensor 807. At this time, the pressure sensor 807 is convenient for recording the pressure data received by the plasma generator and transmitting it to the control panel 11;

[0067] H. The sixth movable seat 903 is started and adjusted laterally by the second electric slide rail 902, and the eighth movable seat 905 is started and adjusted longitudinally by the third electric slide rail 904. At this time, the ninth electric cylinder 906 is started and its piston rod drives the electric clamp 907 to move. At the same time, the plasma generator is clamped by the electric clamp 907 and moved to the surface of the unloading conveyor belt 10.

[0068] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes according to the technical scheme and improved concepts of the present invention within the technical scope disclosed by the present invention, and they should be covered by the protection scope of the present invention.

Claims

1. A detection device for a plasma generator, characterized in that: include: An operating table (1), wherein an electric turntable (2) is mounted on the surface of the operating table (1), a plurality of placement plates (3) divided into eight equal parts are mounted on the surface of the electric turntable (2), a loading mechanism (4) is mounted on the upper surface of the operating table (1), two visual inspection mechanisms (5) are mounted on the upper surface of the operating table (1), a flipping mechanism (6) is mounted on the upper surface of the operating table (1) and located inside the two visual inspection mechanisms (5), a microwave testing mechanism (7), a pressure testing mechanism (8) and a material unloading mechanism (9) are mounted on the surface of the operating table (1) and are compatible with the plurality of placement plates (3), a material unloading conveyor belt (10) compatible with the material unloading mechanism (9) is mounted on the surface of the operating table (1), and a control panel (11) is mounted on one side of the material unloading conveyor belt (10).

2. The detection device for a plasma generator according to claim 1, characterized in that: The feeding mechanism (4) comprises a feeding frame (401) and a first driving seat (406) mounted on the surface of the operating table (1); a first movable seat (403) capable of being adjusted laterally is mounted on the surface of the feeding frame (401); a first electric cylinder (404) is fixed on the surface of a movable member of the first movable seat (403); and an electromagnetic suction head (405) is fixed on the surface of a piston rod of the first electric cylinder (404); The surface of the first driving seat (406) is rotatably connected to a first threaded rod (407), and the surface of the first threaded rod (407) is threadedly connected to an internal threaded plate (408). A first servo motor (409) is installed at one end of the first driving seat (406), and an output shaft of the first servo motor (409) is fixedly connected to one end of the first threaded rod (407). A second driving seat (410) slidably connected to the surface of the first driving seat (406) is fixedly connected to the surface of the internal threaded plate (408). The surface of the second driving seat (410) is rotatably connected to a second threaded rod (411), and the surface of the second threaded rod (411) is threadedly connected to a loading seat (412). Two loading trays (413) are provided on the surface of the loading seat (412). A second servo motor (414) is fixed to one side of the second driving seat (410), and an output shaft of the second servo motor (414) is fixedly connected to one end of the second threaded rod (411).

3. A plasma generator detection device according to claim 2, characterized in that: The visual inspection mechanism (5) comprises a visual inspection frame (501) installed on the upper surface of the operating table (1); the surface of the visual inspection frame (501) is installed with a first sliding rail (502) extending longitudinally; the surface of the first sliding rail (502) is slidably connected with a first sliding block (503) and a second sliding block (504); the surface of the second sliding block (504) is installed with a first positioning ring (505); the surface of the first sliding block (503) is installed with a folding plate (506); the surface of the folding plate (506) is installed with a CCD camera (507); the surfaces of the visual inspection frame (501) and the second sliding block (504) are both installed with second electric cylinders (508), and the piston rods of the two second electric cylinders (508) are fixedly connected to the bottom of the second sliding block (504) and the bottom of the first sliding block (503), respectively.

4. The detection device for a plasma generator according to claim 3, characterized in that: The flipping mechanism (6) comprises a flipping seat (601) mounted on the surface of the operating table (1), both sides of the surface of the flipping seat (601) are provided with second sliding rails (602) extending longitudinally, the surface of the second sliding rail (602) is slidably connected with a second movable seat (603), the surface of the second movable seat (603) is provided with a third sliding rail (604) extending transversely, the surface of the third sliding rail (604) is slidably connected with two third movable seats (605), the surface of the third movable seat (605) relative to the inner side is rotatably connected with a flip clamping rod (606), the surfaces of the two third movable seats (605) are rotatably connected with a connecting rod (608), a limiting sliding groove (609) is provided on the surface of one side of the connecting rod (608), and a limiting protrusion (610) adapted to the limiting sliding groove (609) is provided on the surface of the other side of the connecting rod (608).

5. The detection device for a plasma generator according to claim 4, characterized in that: A third servo motor (607) is installed on the surface of the third movable seat (605) on one side, and the output shaft of the third servo motor (607) is fixedly connected to the flip clamp rod (606). The surfaces of the connecting rod (608) and the flip clamp rod (606) are both fixedly connected with pulleys (611), and the two pulleys (611) are rotatably connected via a transmission belt (612). A third electric cylinder (613) is installed on the surface of the flip seat (601), and the piston rod of the third electric cylinder (613) is fixedly connected to the second movable seat (603). A fourth electric cylinder (614) is provided on the inner sides of the two third movable seats (605).

6. The detection device for a plasma generator according to claim 5, characterized in that: The microwave testing mechanism (7) comprises a microwave testing frame (701) installed on the surface of an operating table (1); the surface of the microwave testing frame (701) is provided with two fourth sliding rails (702) extending longitudinally; the surface of the fourth sliding rails (702) is slidably connected to a seventh movable seat (703); a fifth electric cylinder (704) for longitudinal adjustment is installed on the top of the microwave testing frame (701); a piston rod of the fifth electric cylinder (704) is fixedly connected to the seventh movable seat (703); the surface of the seventh movable seat (703) is A sixth electric cylinder (706) capable of longitudinal adjustment is provided on the surface; a fourth movable seat (705) is fixed on the surface of the piston rod of the sixth electric cylinder (706); a seventh electric cylinder (711) and a microwave probe (708) are installed on the surface of the fourth movable seat (705); a microwave source (707) is fixed on the surface of the piston rod of the seventh electric cylinder (711); and a second positioning ring (709) and a receiving antenna (710) are fixedly connected on the surface of the microwave test rack (701) and located on the upper and lower sides of the electric turntable (2).

7. The detection device for a plasma generator according to claim 6, characterized in that: The pressure testing mechanism (8) comprises a pressure testing platform (801) installed on the surface of an operating platform (1); the surface of the pressure testing platform (801) is provided with two fifth sliding rails (802) extending longitudinally; the surface of the fifth sliding rail (802) is slidably connected with a fifth movable seat (803); the surface of the pressure testing platform (801) is provided with an eighth electric cylinder (804) for longitudinal adjustment; the piston rod of the eighth electric cylinder (804) is fixedly connected with the fifth movable seat (803); the surface of the fifth movable seat (803) is provided with two spring telescopic rods (805); a pressing plate (806) is installed at the bottom of the spring telescopic rod (805); and a pressure sensor (807) is installed at the bottom of the pressing plate (806).

8. The detection device for a plasma generator according to claim 7, characterized in that: The unloading mechanism (9) comprises an unloading rack (901) mounted on the surface of the operating table (1); a second electric slide rail (902) for transverse adjustment is mounted on the surface of the unloading rack (901); a sixth movable seat (903) for longitudinal adjustment is mounted on the surface of the movable member of the second electric slide rail (902); an eighth movable seat (905) is fixed on the surface of the movable member of the third electric slide rail (904); a ninth electric cylinder (906) for longitudinal adjustment is mounted on the surface of the eighth movable seat (905); and an electric clamp (907) is fixed on the surface of the piston rod of the ninth electric cylinder (906).

9. A plasma generator detection method, applied to a plasma generator detection device according to claims 1-8, characterized in that: Includes steps: A. Multiple plasma generators are placed on a loading tray (413), and then the second servo motor (414) starts its output shaft to drive the second threaded rod (411) to rotate and drive the loading seat (412) to move. The first servo motor (409) starts its output shaft to drive the first threaded rod (407) to rotate. At this time, the second driving seat (410) is driven to move under the action of the internal thread plate (408). At this time, the first electric slide rail (402) is started to drive the first moving seat (403) to move horizontally. Then, the first electric cylinder (404) starts its piston rod to drive the electromagnetic suction head (405) to adjust the height, so that the plasma generator on the surface of the loading tray (413) is placed on the surface of the placement plate (3); B. The piston rods of the two second electric cylinders (508) are activated to drive the second sliding block (504) and the first sliding block (503) to move on the surface of the first sliding rail (502); the second sliding block (504) drives the first positioning ring (505) to move above the plasma generator; the first sliding block (503) drives the folding plate (506) and the CCD camera (507) to move above the first positioning ring (505); at this time, the plasma generator is visually inspected by the CCD camera (507); C. The second movable seat (603) is driven to move on the surface of the second sliding rail (602) by starting the third electric cylinder (613), and then the third electric cylinder (613) is started to drive the two third movable seats (605) to move on the surface of the third sliding rail (604). When the third movable seat (605) on one side moves, it drives a connecting rod (608) to move on the inner wall of another connecting rod (608), and then the plasma generator is clamped by flipping the clamping rod (606). The third servo motor (6 07) starting its output shaft to drive a flip clamp rod (606) to rotate, and at this time, under the action of the pulley (611) and the transmission belt (612), a connecting rod (608) is driven to rotate, and at this time, under the action of the limiting slide groove (609) and the limiting protrusion (610), another connecting rod (608) is driven to rotate, and at this time, under the action of another set of limiting slide grooves (609) and the limiting protrusion (610), another flip clamp rod (606) is driven to rotate, thereby realizing the flipping of the plasma generator; D. At this time, the electric turntable (2) drives the plasma generator to continue to move, and another set of visual detection mechanisms (5) repeats step B to perform visual angle detection on the other side of the plasma generator; E. The frequency of the microwave source (707) is adjusted to 2.45 GHz. Then, the seventh electric cylinder (711) starts its piston rod to drive the microwave source (707) to contact the microwave probe (708), and the microwave source (707) and the microwave probe (708) are connected. Then, the sixth electric cylinder (706) starts its piston rod to drive the fourth movable seat (705) to move. At this time, the microwave probe (708) can transmit a microwave signal from the upper side to the plasma generator. The microwave signal will pass through the plasma generator and the microwave signal will be received by the receiving antenna (710). At this time, the test result will be transmitted to the control panel (11) through the receiving antenna (710), and the test result will be calculated by the control panel (11); F. The receiving antenna (710) records the microwave signal in the free space without plasma, and then records the transmission signal and reflection signal when plasma exists. At this time, the control panel (11) compares the difference in microwave signal intensity when plasma exists and when plasma does not exist, calculates the transmission coefficient and reflection coefficient, and analyzes the phase change of the microwave signal. The transmission coefficient and phase change data are used to calculate the plasma density in combination with the Landau damping condition relationship formula; G. The piston rod of the eighth electric cylinder (804) is activated to drive the fifth movable seat (803) to move on the surface of the fifth sliding rail (802). At this time, the pressing plate (806) and the pressure sensor (807) are pushed under the action of the spring telescopic rod (805). At this time, the pressure sensor (807) is convenient for recording the pressure data received by the plasma generator and transmitting it to the control panel (11); H. The sixth movable seat (903) is driven to perform lateral adjustment by the second electric slide rail (902), and the eighth movable seat (905) is driven to perform longitudinal adjustment by the third electric slide rail (904). At this time, the piston rod of the ninth electric cylinder (906) is started to drive the electric clamp (907) to move, and the plasma generator is clamped by the electric clamp (907) and moved to the surface of the unloading conveyor belt (10).

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