A corrugated diaphragm based pressure sensor and method of detection thereof

Abstract

The application discloses a kind of pressure sensor based on corrugated diaphragm and its detection method, including dot matrix and data processing module;Dot matrix is located outside corrugated diaphragm, and dot matrix includes at least two microwave points, and different microwave points are directed to different positions of corrugated diaphragm, the distance between each microwave point and the corresponding position of corrugated diaphragm is not different, and each microwave point is electrically connected with data processing module.The size of pressure, the stress position of corrugated diaphragm, the flow of corrugated diaphragm under the action of pressure can be determined.The use of pressure sensor is widened, so that it can adapt to the application under the demand of complex environment, and is not easy to be disturbed by external interference.

Description

TECHNICAL FIELD

[0001] The present application belongs to the field of pressure detection, and relates to a pressure sensor based on a corrugated diaphragm and a detection method thereof. BACKGROUND

[0002] The corrugated diaphragm is a diaphragm with good elastic compression resistance, which has a wide application in the engineering field, such as pump valves, automobile industry, pneumatic components, gas equipment, electronic industry, electrical equipment, pneumatic and hydraulic equipment, etc. Its main functions are sealing and adjusting gap, etc. In addition, the corrugated diaphragm is also commonly used in valves, regulating valves, automatic mechanical follow-up devices, switches and counters for flow, pressure, differential, liquid level, constant temperature volume thermal compensation, etc. The corrugated diaphragm is usually a circular diaphragm with concentric rings, which is a pressure-sensitive element that can move perpendicular to its flexible direction. It can separate two media with different pressures and has flexibility. According to different profiles, the corrugated diaphragm is commonly divided into circular arc, sine, triangle, trapezoid, etc. The corrugated diaphragm refers to the diaphragm that, when subjected to pressure or force, moves to the side with low pressure, so that the center generates displacement in a certain relationship with the pressure difference. The corrugated diaphragm can be made of various materials, such as stainless steel and rubber. Among them, the rubber corrugated diaphragm has good elasticity and sealing property, while the stainless steel corrugated diaphragm has high strength and corrosion resistance. The characteristics of the corrugated diaphragm are generally represented by the relationship between the displacement of the center and the measured pressure.

[0003] The existing corrugated diaphragm pressure sensor usually changes the displacement of the corrugated diaphragm under the action of external pressure, changes the capacitance between the fixed electrode plate on the sensor, and outputs the corresponding analog signal, so as to realize the conversion from physical quantity to electrical analog quantity. However, the traditional corrugated diaphragm pressure sensor can only measure the pressure size through the change of the capacitance, and cannot determine the specific force position, and is easily disturbed by the external environment. SUMMARY

[0004] The present application aims to overcome the above-mentioned shortcomings of the prior art, and provides a pressure sensor based on a corrugated diaphragm and a detection method thereof, which can determine the specific force position of the corrugated diaphragm.

[0005] To achieve the above-mentioned purpose, the present application adopts the following technical solutions:

[0006] A pressure sensor based on a corrugated diaphragm, comprising a dot matrix and a data processing module.

[0007] The dot matrix is located outside the corrugated diaphragm, and the dot matrix comprises at least two micro-wave points, different micro-wave points are directed to different positions of the corrugated diaphragm, the distance between each micro-wave point and the corresponding position of the corrugated diaphragm is different, and each micro-wave point is electrically connected with the data processing module.

[0008] Preferably, the wavelength of each microwave point is different.

[0009] Preferably, the shell is arranged outside the dot matrix and the data processing module.

[0010] Preferably, the shell is a Faraday cage.

[0011] Preferably, the data processing module adopts MCU.

[0012] A detection method of the pressure sensor based on the corrugated diaphragm, comprising the following processes:

[0013] When the pressure sensor is not subjected to force, the microwave points send microwave signals to the corrugated diaphragm, the microwave points receive the microwave signals reflected from the corrugated diaphragm, and the distance between each microwave point and the corresponding position of the corrugated diaphragm is calculated as the balance distance.

[0014] After the pressure sensor is subjected to force, the microwave points send microwave signals to the corrugated diaphragm, the microwave points receive the microwave signals reflected from the corrugated diaphragm under pressure, and the distance between each microwave point and the corresponding position of the corrugated diaphragm is calculated as the force distance.

[0015] The balance distance and the force distance of each microwave point are compared, when the balance distance and the force distance are inconsistent, the position of the corrugated diaphragm corresponding to the current microwave point is subjected to pressure, and when the balance distance and the force distance are consistent, the position of the corrugated diaphragm corresponding to the current microwave point is not subjected to pressure.

[0016] Preferably, the distance calculation process between the microwave point and the corresponding position of the corrugated diaphragm is that the time interval of the signal sent by the microwave point to the corrugated diaphragm and the signal reflected from the corrugated diaphragm to the microwave point is recorded respectively According to the formula s=c Wherein s is the distance between the microwave point and the corrugated diaphragm, and c is the microwave velocity, then the distance between the microwave point and the corrugated diaphragm is s / 2.

[0017] Preferably, the pressure of the position of the corrugated diaphragm corresponding to the current microwave point is calculated according to the difference between the balance distance and the force distance.

[0018] Further, the flow between the two microwave points is calculated according to the pressure difference between the two microwave points.

[0019] Further, the flow is calculated according to the formula Q= Wherein Q is the flow, F1-F2 is the pressure difference between the two microwave points, P is the resistance coefficient of the corrugated diaphragm, and S is the cross-sectional area of the corrugated diaphragm.

[0020] Compared with the prior art, the present application has the following beneficial effects:

[0021] The application is characterized in that a corrugated diaphragm, a dot matrix composed of at least two microwave dots, and a data processing module are arranged. When the pressure sensor is subjected to pressure, the microwave dots send signals to the corrugated diaphragm, and the reflected signals sent by the corrugated diaphragm are received, so that the distance between the microwave dots and the corresponding positions of the corrugated diaphragm can be obtained. According to the data processing module, the signals received by the microwave dots when not subjected to force and subjected to pressure are processed, and whether the distances are consistent when not subjected to force and subjected to pressure is determined, so that the force position of the corrugated diaphragm is determined. The use scenarios of the pressure sensor are widened, so that it can adapt to the application under various requirements in complex environments and is not easily disturbed by the outside world.

[0022] Further, the shell is used to shield external signal interference and protect the pressure sensor from external damage.

[0023] Further, according to the signals sent by the microwave dots to the corrugated diaphragm and the reflected signals sent by the corrugated diaphragm, the distance between the microwave dots and the corrugated diaphragm can be obtained, so that the pressure can be determined.

[0024] Further, according to the pressure and the force position, the flow of the corrugated diaphragm when subjected to pressure can be calculated. BRIEF DESCRIPTION OF DRAWINGS

[0025] Figure 1 is a schematic diagram of a pressure sensor based on a corrugated diaphragm according to the present application;

[0026] Among them, the above-mentioned drawings include the following reference signs:

[0027] 1-corrugated diaphragm, 2-MCU, 3-microwave dot, 4-shell. DETAILED DESCRIPTION

[0028] The embodiments of the application will be described in detail below, and examples of the embodiments are shown in the drawings, wherein the same or similar reference signs represent the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the drawings are exemplary and are only used to explain the application, and cannot be understood as a limitation of the application.

[0029] In the description of the present application, it needs to be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, which are only for the purpose of facilitating the description of the present application and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application. In addition, the terms "first", "second" are only for the purpose of description, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the technical features indicated. Therefore, the features defined as "first", "second" can explicitly or implicitly include one or more of the features. In the description of the present application, the meaning of "a plurality of" is two or more, unless otherwise specifically limited.

[0030] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terms "mounting", "connected", "connection" should be interpreted broadly, for example, it can be fixed connection, or detachable connection, or integral connection; it can be mechanical connection, or electrical connection or can communicate with each other; it can be directly connected, or indirectly connected through intermediate medium, or the internal communication of two elements or the interaction relationship between two elements. The term "and / or" used herein includes any and all combinations of one or more related listed items. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances. The terms used in the specification of the present application are only for the purpose of describing the specific embodiments, and are not intended to limit the present application.

[0031] The following disclosure provides many different embodiments or examples for implementing different structures of the present application. In order to simplify the disclosure of the present application, the components and settings of specific examples are described below. Of course, they are only examples, and the purpose is not to limit the present application. In addition, the present application can repeatedly refer to numbers and / or letters in different examples, and such repetition is for the purpose of simplification and clarity, which itself does not indicate the relationship between the various embodiments and / or settings discussed. In addition, the present application provides examples of various specific processes and materials, but those skilled in the art can realize the application of other processes and / or the use of other materials.

[0032] The present application provides a corrugated diaphragm based pressure sensor, which realizes the measurement of pressure size, stress position and flow by combining the reflection of microwave signal and the method of measuring time difference.

[0033] As Figure 1 shown, the corrugated diaphragm-based pressure sensor described in the embodiment mainly comprises a dot matrix, a data processing module and a shell 4, wherein the dot matrix comprises n microwave dots 3, n is a positive integer greater than or equal to 2, and the number is not limited in this application.

[0034] The data processing module is specifically MCU2 (Microcontroller Unit) in this application, which is not limited in this application and can also be a data processing module, a processor, etc. The MCU2 is electrically connected with all the microwave dots 3 and can control the microwave dots 3 through the MCU2. The MCU2 comprises a communication pin and a clock pin. The communication pin is specifically RS485 in this application, which can also be RS232, can bus, etc., and is not limited in this application, and is used for transmitting processing data in the MCU2. The clock pin can control data output through timing.

[0035] The shell 4 is arranged outside the pressure sensor, which is specifically a Faraday cage and is used for shielding external signal interference, and can also be a metal box, etc., and is not limited in this application.

[0036] The microwave dots 3 are arranged below the corrugated diaphragm 1, and the dot matrix comprises four microwave dots 3, specifically P1, P2, P3 and P4, for sending and receiving signals in the embodiment.

[0037] The specific principle of the pressure sensor according to the embodiment of the application comprises that when the pressure sensor is subjected to pressure from the outside, the corrugated diaphragm 1 is deformed to act on the microwave dots 3, at this time, the microwave dots 3 are powered on by controlling the MCU2, the microwave dots 3 send microwave signals to the corrugated diaphragm 1, the microwave dots 3 receive pressure signals reflected from the corrugated diaphragm 1, and the time interval of the signals sent by the microwave dots 3 to the corrugated diaphragm 1 and the signals reflected from the corrugated diaphragm 1 to the microwave dots 3 is recorded The current signals are sent to the MCU2 by the microwave dots 3, and the MCU2 calculates the distance between the microwave dots 3 and the corrugated diaphragm 1 according to the formula s=c , wherein s is the distance of the microwave passing between the microwave dots 3 and the corrugated diaphragm 1, that is, the process of the microwave from the microwave dots 3 to the corrugated diaphragm 1 and then back to the microwave dots 3, c is the speed of the microwave, which is approximately the same as the speed of light, that is, 3*10 ^8 m / s, is the time interval, the total distance of the signals sent and received by the microwave dots 3 can be calculated, and the current distance is the shortest distance. Then the distance between the microwave dots 3 and the corrugated diaphragm 1 is s / 2. When subjected to pressure, the deformation amount of the corrugated diaphragm 1 on the microwave dots 3 is - S2 is the total distance after being subjected to pressure, S1 is the total distance before being subjected to pressure, and is recorded as At this time, according to the formula F = E Wherein E is the elastic modulus of the corrugated diaphragm 1, the pressure of the current microwave point 3 corresponding to the position of the corrugated diaphragm 1 can be calculated.

[0038] In addition, when the pressure sensor is not subjected to force, the microwave point 3 sends a microwave signal to the corrugated diaphragm 1, the microwave point 3 receives the microwave signal reflected from the corrugated diaphragm 1, calculates the distance between the current each microwave point 3 and the corresponding position of the corrugated diaphragm 1, called the balance distance, and sends the current distance information to the storage module of the MCU 2.

[0039] After the pressure sensor is subjected to force, the microwave point 3 sends a microwave signal to the corrugated diaphragm 1, the microwave point 3 receives the microwave signal reflected from the corrugated diaphragm 1, calculates the distance between the current each microwave point 3 and the corresponding position of the corrugated diaphragm 1, called the balance distance, and sends the current distance information to the storage module of the MCU 2.

[0040] In the embodiment of the application, the wave bands of each microwave point 3 are different, so after the microwave point 3P1 sends a signal, it can only receive the signal sent by the corrugated diaphragm 1 at the current frequency band, and so on. Therefore, the MCU 2 can determine the point where the distance changes by comparing the balance distance and the force distance of each microwave point 3 according to the distance information of the storage module, that is, when the balance distance and the force distance are inconsistent, the position of the current microwave point 3 on the corrugated diaphragm 1 is subjected to pressure, and when the balance distance and the force distance are consistent, the position of the current microwave point 3 on the corrugated diaphragm 1 is not subjected to pressure. The microwave point 3 subjected to pressure can be determined, and the combination of the current microwave point 3 is the force position of the corrugated diaphragm.

[0041] In addition, the MCU 2 can calculate the force position and the force size of the microwave point 3 according to the calculation, for example, the pressure size F1 and F2 calculated according to the microwave point 3P1 and the microwave point 3P2, and according to the formula Q = F1-F2 Wherein Q is the flow, F1-F2 is the pressure difference between the microwave point 3P1 and the microwave point 3P2, P is the resistance coefficient of the corrugated diaphragm 1, and S is the cross-sectional area of the corrugated diaphragm 1, that is, the distance between the microwave point 3P1 and the microwave point 3P2, so that the flow between the microwave point 3P1 and the microwave point 3P2 of the pressure sensor can be calculated. In this way, the continuous flow of the whole pressure sensor can be obtained.

[0042] The MCU 2 packs the calculated force size, force position and flow data, and transmits them through the RS485 pin. The clock pin can control the ordered output of data by simultaneously outputting clk.

[0043] Based on the working principle of the pressure sensor under pressure described above, the magnitude and location of the pressure when the sensor is under pressure can be calculated. Furthermore, the flow rate of the pressure sensor can be determined based on the location of the force, thus enabling it to adapt to a wider range of applications. Moreover, the pressure sensor transmits signals via microwaves, making it less susceptible to interference from the external environment, thereby improving the measurement accuracy.

[0044] An MCU (Microcontroller Unit) is an embedded microcomputer chip that integrates a processor, memory, and multiple input / output interfaces. It is typically used in applications such as automation control and data processing, and can control external hardware devices and perform complex logical operations according to a program.

[0045] In the corrugated diaphragm-based pressure sensor application described in this embodiment, the main functions of MCU2 include:

[0046] 1. Signal control: Through electrical connection with the microwave dot matrix, MCU2 can control the power on and off of microwave dot 3, thereby controlling the transmission and reception of microwave signals.

[0047] 2. Data processing: MCU2 receives the signal from microwave point 3, calculates the distance from microwave point 3 to corrugated diaphragm 1 according to the time interval, and uses formulas to calculate the pressure, position, and flow rate.

[0048] 3. Storage and comparison: The storage module of MCU2 can record the balance distance and force distance of microwave point 3, thereby realizing real-time comparison and pressure position detection.

[0049] 4. Communication Transmission: MCU2 transmits data such as pressure magnitude, applied position, and flow rate to the host computer or other devices via communication pins (e.g., RS485 interface). Timing control is performed via the clock pin to ensure orderly data output.

[0050] 5. Anti-interference design: By placing the MCU2 inside the housing 4 of the Faraday cage structure, external electromagnetic interference is reduced and the accuracy of measurement is improved.

[0051] The MCU2 serves as the core data processing and control unit in the pressure sensor system, enabling the sensor to perform precise pressure, position, and flow monitoring.

[0052] Microwave point 3 is a key component of this pressure sensor, used to send and receive microwave signals to detect the displacement of the corrugated diaphragm 1 and calculate the stress. The main functions and characteristics of microwave point 3 are as follows:

[0053] 1. Signal transmission and reception:

[0054] Each microwave point 3 can send microwave signals to the corrugated diaphragm 1 and receive signals reflected back from the corrugated diaphragm 1.

[0055] By controlling the power-on state of microwave point 3, MCU2 can send and receive signals at specific times.

[0056] 2. Measurement time interval:

[0057] After the signal is sent, microwave point 3 records the time interval Δt from the signal transmission to the reception, reflecting the change in distance between microwave point 3 and the corrugated diaphragm 1.

[0058] By measuring at microwave point 3, the minute deformation of the corrugated diaphragm 1 can be calculated, and thus the magnitude of the pressure can be deduced.

[0059] 3. Independent frequency band:

[0060] Different microwave points 3 use different frequency bands (for example, P1, P2, P3, and P4 use different microwave frequencies) to avoid signal interference.

[0061] This design ensures that each microwave point 3 can only receive reflected signals from its own frequency band, thereby accurately identifying pressure changes at different points.

[0062] 4. Location and flow measurement:

[0063] When multiple microwave points 3 work simultaneously, the pressure difference at different positions of the corresponding corrugated diaphragm 1 can be measured.

[0064] By using the pressure difference between multiple points and the parameters of the corrugated diaphragm 1, the flow rate can be further calculated, enabling flow monitoring inside the sensor.

[0065] 5. Stress testing:

[0066] Microwave point 3 can accurately detect the distance difference between the corrugated diaphragm 1 under stressed and unstressed conditions. By comparing it with the equilibrium distance (distance when no force is applied) stored in MCU2, it can determine whether pressure is applied and the location of the pressure.

[0067] In this pressure sensor, microwave point 3 completes the measurement of the deformation of the corrugated diaphragm 1 by sending and receiving microwave signals. Combined with the time interval and the characteristic parameters of the corrugated diaphragm 1, high-precision detection of the pressure magnitude and distribution location is achieved.

[0068] This invention utilizes a dot matrix consisting of a corrugated diaphragm 1, at least two microwave points 3, and a data processing module. When the pressure sensor is subjected to pressure, the distance between the microwave points 3 and the corrugated diaphragm 1 can be determined by receiving the reflected signal from the diaphragm 1 after the microwave points 3 send a signal to the diaphragm 1. This allows for the determination of the pressure magnitude. The data processing module then processes the signals received by the microwave points 3 under pressure and without pressure to determine the stress location on the corrugated diaphragm. Simultaneously, the flow rate of the corrugated diaphragm under pressure can be calculated based on the pressure magnitude and stress location. Pressure measurement using microwave signals offers strong anti-interference capabilities and improves measurement accuracy. It enables real-time monitoring of pressure and flow rate at multiple points, making it suitable for complex applications. This pressure sensor, through the combination of microwaves and a corrugated diaphragm, achieves precise monitoring of stress distribution and flow rate, and can be used in various fields such as industrial pressure monitoring and fluid transport systems. This broadens the application scenarios of pressure sensors, enabling them to adapt to various needs in complex environments and making them less susceptible to external interference.

[0069] The sequence numbers of the embodiments in this application are for descriptive purposes only and do not represent the superiority or inferiority of the embodiments.

[0070] In the above embodiments of this application, the descriptions of each embodiment have different focuses. For parts not described in detail in a certain embodiment, please refer to the relevant descriptions of other embodiments.

[0071] In the several embodiments provided in this application, it should be understood that the disclosed technical content can be implemented in other ways. The device embodiments described above are merely illustrative; for example, the division of units can be a logical functional division, and in actual implementation, there may be other division methods. For instance, multiple units or components may be combined or integrated into another system, or some features may be ignored or not executed. Furthermore, the displayed or discussed mutual coupling, direct coupling, or communication connection may be through some interfaces; the indirect coupling or communication connection between units or modules may be electrical or other forms.

[0072] The units described as separate components may or may not be physically separate. The components shown as units may or may not be physical units; that is, they may be located in one place or distributed across multiple units. Some or all of the units can be selected to achieve the purpose of this embodiment according to actual needs.

[0073] The above description is only a preferred embodiment of this application. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the principle of this application, and these improvements and modifications should also be considered within the scope of protection of this application.

[0074] It should be understood that the above description is for illustrative purposes and not for limitation. Many embodiments and applications beyond the provided examples will be apparent to those skilled in the art upon reading the above description. Therefore, the scope of this patent should not be determined by reference to the above description, but rather by reference to the foregoing claims and the full scope of their equivalents. For purposes of completeness, all articles and references, including patent applications and publications, are incorporated herein by reference. The omission of any aspect of the subject matter disclosed herein in the foregoing claims is not intended as a waiver of that subject matter, nor should it be construed as an indication that the applicant has not considered that subject matter as part of the disclosed inventive subject matter.

Claims

1. A detection method for a pressure sensor based on a corrugated diaphragm, characterized in that, The pressure sensor includes a dot matrix and a data processing module; The dot matrix is ​​located outside the corrugated diaphragm (1). The dot matrix includes at least two microwave dots (3). Different microwave dots (3) face different positions on the corrugated diaphragm (1). The distance between each microwave dot (3) and the corresponding position on the corrugated diaphragm (1) is different. Each microwave dot (3) is electrically connected to the data processing module. The wavelength band of each microwave point (3) is different; The dot matrix and data processing module are externally housed in a casing (4); The shell (4) is a Faraday cage; The detection method Includes the following processes: When the pressure sensor is not subjected to force, the microwave point (3) sends a microwave signal to the corrugated diaphragm (1), the microwave point (3) receives the microwave signal reflected from the corrugated diaphragm (1), and calculates the distance between each microwave point (3) and the corresponding position of the corrugated diaphragm (1) as the balance distance; After the pressure sensor is subjected to force, the microwave point (3) sends a microwave signal to the corrugated diaphragm (1). The microwave point (3) receives the microwave signal fed back by the corrugated diaphragm (1) when it is subjected to pressure, and calculates the distance between each microwave point (3) and the corresponding position of the corrugated diaphragm (1) as the force distance. Compare the equilibrium distance and the force distance of each microwave point (3). When the equilibrium distance and the force distance are inconsistent, the position on the corrugated diaphragm (1) corresponding to the current microwave point (3) is subjected to pressure. When the equilibrium distance and the force distance are consistent, the position on the corrugated diaphragm (1) corresponding to the current microwave point (3) is not subjected to pressure.

2. The detection method of the pressure sensor based on a corrugated diaphragm according to claim 1, characterized in that, The data processing module uses an MCU (2).

3. The detection method of the pressure sensor based on a corrugated diaphragm according to claim 1, characterized in that, The calculation process for the distance between the microwave point (3) and the corresponding position of the corrugated diaphragm (1) is as follows: Record the time interval between the signal sent from the microwave point (3) to the corrugated diaphragm (1) and the signal reflected from the corrugated diaphragm (1) to the microwave point (3). According to the formula s=c , where s is the distance traveled by the microwave between microwave point (3) and corrugated diaphragm (1), and c is the microwave speed, then the distance between microwave point (3) and corrugated diaphragm (1) is s / 2.

4. The detection method of the pressure sensor based on a corrugated diaphragm according to claim 1, characterized in that, Based on the difference between the equilibrium distance and the force-bearing distance, the pressure at the position of the corrugated diaphragm (1) corresponding to the current microwave point (3) is calculated.

5. The detection method of the pressure sensor based on a corrugated diaphragm according to claim 4, characterized in that, The flow rate between the two microwave points (3) is calculated based on the pressure difference between the two microwave points (3).

6. The detection method of the pressure sensor based on a corrugated diaphragm according to claim 5, characterized in that, Flow rate is calculated using the formula Q= The calculations show that Q is the flow rate, F1-F2 is the pressure difference between the two microwave points (3), P is the resistance coefficient of the corrugated diaphragm (1), and S is the cross-sectional area of ​​the corrugated diaphragm (1).

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