A high-temperature-resistant packaging structure of a MEMS fiber vibration sensor

Abstract

The application belongs to the technical field of high-temperature testing of MEMS fiber vibration sensors, and discloses a high-temperature-resistant packaging structure of a MEMS fiber vibration sensor, which comprises a bottom shell, an upper cover fixedly installed at the top end of the bottom shell through screws, and a MEMS fiber vibration sensitive element bonded in the bottom shell; and a multi-surface synchronous clamping mechanism for fixing the MEMS fiber vibration sensitive element is installed at the bottom end of the upper cover. The application synchronously presses and fixes the MEMS fiber vibration sensitive element from four surfaces through an automatic mode, so that the MEMS fiber vibration sensitive element is more stably fixed, and the problem of sliding of the MEMS fiber vibration sensitive element along the inside of the bottom shell during high-temperature detection is prevented, thereby improving the detection accuracy of the MEMS fiber vibration sensitive element at high temperature.

Description

TECHNICAL FIELD

[0001] The application belongs to the technical field of high-temperature test of MEMS fiber vibration sensors, and particularly relates to a high-temperature-resistant packaging structure of a MEMS fiber vibration sensor. BACKGROUND

[0002] MEMS sensors are an important branch of MEMS devices, as an important component of micro-electro-mechanical systems, MEMS sensors are functional devices for realizing the sensing and signal processing of micro-electro-mechanical systems, and the manufacturing process of MEMS sensors is combined with the advanced IC microelectronic processing technology and MEMS micro-mechanical processing manufacturing technology to realize the manufacturing of stable structural devices (such as beams, membranes, interdigital structures, etc.) that can sense pressure, temperature, magnetic field, acceleration and other parameters, so as to realize the sensing, testing and conversion of various related parameters.

[0003] The high-temperature vibration test of the fiber vibration sensor based on the MEMS vibration sensitive element, since the MEMS fiber vibration sensor sensitive element is mainly composed of silicon-based materials, and the size is small, it cannot be directly installed on the surface of the measured structure, and the MEMS fiber vibration sensor sensitive element needs to be packaged to resist high temperature.

[0004] If the packaging structure and method introduce the adhesive, the physical and chemical properties of the adhesive change under high temperature, the performance fails under high temperature, the MEMS vibration sensitive element slips in the packaging shell cavity, the overall structure of the sensor changes, and the sensor performance is affected. SUMMARY

[0005] The application aims at the problem in the prior art that the physical and chemical properties of the adhesive change under high temperature, the performance fails under high temperature, the MEMS vibration sensitive element slips in the packaging shell cavity, the overall structure of the sensor changes, and the sensor performance is affected, and proposes the following technical scheme:

[0006] A high-temperature-resistant packaging structure of a MEMS fiber vibration sensor, comprising a bottom shell, an upper cover is fixedly installed on the top end of the bottom shell through a screw, and a MEMS fiber vibration sensitive element is bonded in the bottom shell.

[0007] The upper cover bottom end is provided with a multi-surface synchronous clamping mechanism for fixing the MEMS fiber vibration sensitive element, the multi-surface synchronous clamping mechanism comprises a mounting plate fixedly installed at the center of the upper cover bottom end, a positioning sleeve is symmetrically embedded at the bottom end of the mounting plate, a T-shaped column is slidably connected inside the positioning sleeve, a spring rod one is embeddedly installed at the top end of the T-shaped column, a moving piece slidably connected inside the positioning sleeve is clamped and installed between the top ends of the two spring rods one, a lead screw rotatably connected between the bottom end of the mounting plate is threadedly connected inside the moving piece, a rectangular plate is fixedly installed between the bottom ends of two adjacent T-shaped columns, L-shaped strips are fixedly installed at the middle of the four end faces of the rectangular plate, eight limiting strips are fixedly installed at the center of the four end faces of the rectangular plate in a symmetrical manner, a rotating shaft is rotatably connected between the opposite two limiting strips, a gear is fixedly installed on the middle of the outer surface of the rotating shaft and is meshingly connected with the one end face of the L-shaped strip, and a turnover rod is slidably connected on the outer side of the rotating shaft, and a high-temperature-resistant rubber pad is bonded to the one end face of the turnover rod.

[0008] As a preferred embodiment of the above technical scheme, a moving block is slidably connected inside the L-shaped strip, a support plate fixedly installed at the bottom end of the moving block is in close contact with the top end of the MEMS fiber vibration sensitive element, and a bolt is threadedly connected to the outer side of the turnover rod and in close contact with the outer surface of the rotating shaft.

[0009] As a preferred embodiment of the above technical scheme, a cylindrical column is symmetrically embeddedly installed at the two end faces of the turnover rod, a turnover frame is rotatably connected to the outer side, a moving frame is movably connected to the bottom end of the turnover frame, and a compression roller is rotatably connected inside the moving frame.

[0010] As a preferred embodiment of the above technical scheme, a cylindrical column is symmetrically embeddedly installed at the two end faces of the turnover rod, a turnover frame is rotatably connected to the outer side, a moving frame is movably connected to the bottom end of the turnover frame, and a compression roller is rotatably connected inside the moving frame.

[0011] As a preferred embodiment of the above technical scheme, an arc-shaped piston rod is symmetrically embeddedly installed at the one end face of the turnover frame, a piston sleeve is sleeved on the outer side of the arc-shaped piston rod, a rectangular block is fixedly installed at the one end face of the piston sleeve, and the rectangular block is fixedly installed at the one end face of the turnover rod.

[0012] As a preferred embodiment of the above technical scheme, the piston sleeve is arc-shaped, and the centers of the piston sleeve and the arc-shaped piston rod coincide with each other.

[0013] As the preferred technical scheme of the above, the installation plate is fixedly installed with directional connecting mechanisms on both sides, the directional connecting mechanisms comprise plug-in columns symmetrically embedded and installed at one end of the installation plate, a back-shaped sleeve is fixedly installed between the two plug-in columns, spring rods II are embeddedly installed on one end face of the back-shaped sleeve, and clamping blocks are fixedly installed on one end of the spring rods II and slidably connected to the inside of the back-shaped sleeve.

[0014] As the preferred technical scheme of the above, a connecting rope is embeddedly installed on one end face of the clamping block, a synchronous linkage block is fixedly installed between the two connecting ropes and slidably connected to the outside of the lead screw, and a trapezoidal plate fixedly connected between the top end of the rectangular plate and the bottom end of the clamping block is attached to the outside of the clamping block.

[0015] As the preferred technical scheme of the above, a vertical rod and a threaded column are embeddedly installed on both sides of the bottom end of the synchronous linkage block, the vertical rod and the threaded column are slidably connected to the inside of the moving piece, and a nut is threadedly connected to the outside of the threaded column at the bottom end position of the moving piece.

[0016] The beneficial effects of the present application are:

[0017] (1) The MEMS optical fiber vibration sensitive element is synchronously and multi-pointly pressed from four sides in an automatic manner, so that the MEMS optical fiber vibration sensitive element is fixed more stably, and the problem of sliding of the MEMS optical fiber vibration sensitive element along the inside of the bottom shell during high-temperature detection is prevented, thereby improving the detection accuracy of the MEMS optical fiber vibration sensitive element at high temperature;

[0018] (2) The extrusion force of the rectangular plate on the top end of the MEMS optical fiber vibration sensitive element can be adjusted to ensure that the MEMS optical fiber vibration sensitive element is in an optimal working state, which not only improves the overall sensitivity of the sensor, but also improves its long-term stability, avoids performance degradation due to changes in external environment or long use time, and periodically adjusts and calibrates the sensor to help maintain the accuracy and reliability of the MEMS optical fiber vibration sensitive element;

[0019] (3) The installation between the multi-surface synchronous clamping mechanism and the upper cover changes the installation difficulty, and the process does not require manual accurate alignment, saves operation time, reduces operation difficulty, and ensures the stability and consistency of the multi-surface synchronous clamping mechanism, thereby improving the installation efficiency and reliability. BRIEF DESCRIPTION OF DRAWINGS

[0020] Figure 1 A structure diagram of a high-temperature-resistant packaging structure of a MEMS optical fiber vibration sensor in Example 1 is shown.

[0021] Figure 2The diagram shown is a cross-sectional view of a high-temperature resistant packaging structure for a MEMS fiber optic vibration sensor according to Embodiment 1.

[0022] Figure 3 The diagram shown is a structural schematic of the multi-faceted synchronous clamping mechanism in Embodiment 1;

[0023] Figure 4 The diagram shown is a schematic of the installation structure of the support plate in Embodiment 1;

[0024] Figure 5 The diagram shown is a schematic of the piston sleeve installation structure in Embodiment 1;

[0025] Figure 6 The diagram shown is a structural schematic of the directional connection mechanism in Embodiment 1.

[0026] In the diagram: 1. Bottom shell; 2. Top cover; 3. MEMS fiber optic vibration sensing element; 4. Multi-faceted synchronous clamping mechanism; 41. Mounting plate; 42. Positioning sleeve; 43. Lead screw; 44. Moving part; 45. Spring rod one; 46. T-shaped column; 47. Rectangular plate; 48. L-shaped strip; 49. Moving block; 410. Support plate; 411. Limiting strip; 412. Rotating shaft; 413. Gear; 414. Flipping rod; 415. Bolt; 416. High-temperature resistant rubber pad; 17. Cylindrical; 418. Tilting frame; 419. Circular sleeve; 420. Column; 421. Threaded rod; 422. Moving frame; 423. Pressure roller; 424. Rectangular block; 425. Piston sleeve; 426. Arc-shaped piston rod; 5. Orientation connection mechanism; 51. Synchronous linkage block; 52. Upright pole; 53. Threaded column; 54. Nut; 55. Connecting rope; 56. Snap-fit ​​block; 57. Spring rod II; 58. Return sleeve; 59. Insertion column; 510. Trapezoidal plate. Detailed Implementation

[0027] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the present invention will be clearly and completely described below in conjunction with the embodiments.

[0028] Example 1: This invention provides a high-temperature resistant packaging structure for a MEMS fiber optic vibration sensor, such as... Figures 1 to 6 As shown, it includes: a bottom shell 1, a top cover 2 fixedly installed on the top of the bottom shell 1 by screws, and a MEMS fiber optic vibration sensing element 3 bonded inside the bottom shell 1.

[0029] The upper cover 2 is provided with a multi-surface synchronous clamping mechanism 4 for fixing the MEMS fiber vibration sensitive element 3. The multi-surface synchronous clamping mechanism 4 comprises a mounting plate 41 fixedly installed at the bottom end center of the upper cover 2, a positioning sleeve 42 symmetrically embedded at the bottom end of the mounting plate 41, a T-shaped column 46 slidingly connected inside the positioning sleeve 42, a spring rod I 45 embeddedly installed at the top end of the T-shaped column 46, a moving piece 44 slidingly connected inside the positioning sleeve 42 clamped and installed between the top ends of the two spring rods I 45, a lead screw 43 rotatably connected between the bottom end of the mounting plate 41 and the moving piece 44 through threaded connection, a rectangular plate 47 fixedly installed between the bottom ends of the adjacent two T-shaped columns 46, and L-shaped strips 48 fixedly installed at the middle portions of the four end faces of the rectangular plate 47. Eight limiting strips 411 are fixedly installed at the four end face centers of the rectangular plate 47 in a symmetrical manner at the bottom end of the upper cover 2, a rotating shaft 412 is rotatably connected between the opposite two limiting strips 411, a gear 413 is fixedly installed at the middle portion of the outer surface of the rotating shaft 412 and meshes with one end face of the L-shaped strip 48, and a turnover rod 414 is slidingly connected outside the rotating shaft 412 and is bonded with a high-temperature-resistant rubber pad 416 at one end face.

[0030] As shown in Figure 2 and Figure 3 , a moving block 49 is slidingly connected inside the L-shaped strip 48, the moving block 49 is fixedly installed at the bottom end of the support plate 410 which is in close contact with the top end of the MEMS fiber vibration sensitive element 3, and a bolt 415 is threadedly connected outside the turnover rod 414 and is in close contact between the end face of the bolt 415 and the outer surface of the rotating shaft 412.

[0031] When the moving block 49 moves along the inside of the L-shaped strip 48, the support plate 410 is driven to move, so that the support plate 410 is at different positions at the top end of the MEMS fiber vibration sensitive element 3, thereby changing the stress position at the top end of the MEMS fiber vibration sensitive element 3, preventing the MEMS fiber vibration sensitive element 3 from being easily damaged due to long-term extrusion of the same part, thereby protecting the MEMS fiber vibration sensitive element 3 and increasing the service life of the MEMS fiber vibration sensitive element 3.

[0032] Rotating the bolt 415, the bolt 415 rotates along the inside of the turnover rod 414 and moves, the bolt 415 after moving is in close contact with the outside of the rotating shaft 412, so that the turnover rod 414 and the rotating shaft 412 are extruded and fixed by the bolt 415, the fixing difficulty of the turnover rod 414 is changed, and the turnover rod 414 is installed more stably.

[0033] As shown in Figure 3 and Figure 4As shown, the two ends of the turnover rod 414 are symmetrically embedded with a cylinder 417, and the outer side is rotatably connected with a turnover frame 418. The bottom end of the turnover frame 418 is movably connected with a moving frame 422, and the inside of the moving frame 422 is rotatably connected with a compression roller 423.

[0034] The cylinder 417 can drive the turnover rod 414 to rotate. When the turnover rod 414 rotates, the moving frame 422 rotates, and the compression roller 423 rotates, so that the compression roller 423 and the MEMS fiber vibration sensitive element 3 are in contact and displacement, so as to press the outer side of the MEMS fiber vibration sensitive element 3 by the compression roller 423, and then the purpose of pressing and fixing around the MEMS fiber vibration sensitive element 3 is achieved.

[0035] As shown in Figure 4 and Figure 5 , the bottom end of the turnover frame 418 is symmetrically embedded with a round sleeve 419. One of the round sleeves 419 is slidably connected with a stand column 420 inside, and the other round sleeve 419 is threadedly connected with a threaded rod 421 inside. The threaded rod 421 is rotatably connected to the inside of the moving frame 422, and the stand column 420 is fixedly installed at the top end of the moving frame 422.

[0036] By rotating the threaded rod 421, the threaded rod 421 rotates and moves along the inside of the round sleeve 419, thereby driving the moving frame 422 to move. When the moving frame 422 moves, the stand column 420 moves inside the round sleeve 419, thereby changing the distance between the moving frame 422 and the turnover frame 418. The adjustment difficulty of the distance between the moving frame 422 and the turnover frame 418 is changed, which further facilitates the contact between the compression roller 423 inside the moving frame 422 and the MEMS fiber vibration sensitive element 3, and improves the contact efficiency of the compression roller 423 and the MEMS fiber vibration sensitive element 3.

[0037] As shown in Figure 4 and Figure 5 , the one end of the turnover frame 418 is symmetrically embedded with an arc-shaped piston rod 426, and the outer side of the arc-shaped piston rod 426 is sleeved with a piston sleeve 425. The one end of the piston sleeve 425 is fixedly installed with a rectangular block 424, and the rectangular block 424 is fixedly installed at the one end of the turnover rod 414. The shape of the piston sleeve 425 is arc-shaped, and the centers of the piston sleeve 425 and the arc-shaped piston rod 426 coincide with each other.

[0038] When the pressure roller 423 and the MEMS fiber vibration sensitive element 3 are attached, the turnover frame 418 is still turned over, and the abutting force between the pressure roller 423 and the MEMS fiber vibration sensitive element 3 makes the turnover frame 418 turn over. When the turnover frame 418 turns over, the arc-shaped piston rod 426 moves in the piston sleeve 425, the gas in the piston sleeve 425 is compressed, the compressed gas pushes the pressure roller 423 to extrude the MEMS fiber vibration sensitive element 3, and the MEMS fiber vibration sensitive element 3 is installed more stably due to extrusion.

[0039] As shown in Figure 2 and 3 The mounting plate 41 is fixedly installed with a directional connecting mechanism 5 on both sides. The directional connecting mechanism 5 includes plug-in columns 59 symmetrically embedded and installed at one end of the mounting plate 41. A back-shaped sleeve 58 is fixedly installed between the two plug-in columns 59. A spring rod two 57 is embedded and installed at one end of the back-shaped sleeve 58. A clamping block 56 is fixedly installed at one end of the spring rod two 57 and is slidingly connected inside the back-shaped sleeve 58 at the bottom end. An inclined angle is formed at the top end of the clamping block 56. Positioning grooves are symmetrically formed inside the cover plate 2. A placing groove is formed at one side of the positioning grooves inside the cover plate 2. One end of the back-shaped sleeve 58 and one end face of the positioning groove are attached to each other. One end of the clamping block 56 is movably installed inside the placing groove.

[0040] When the back-shaped sleeve 58 is installed, the back-shaped sleeve 58 is attached to the bottom end of the mounting plate 41 and the upper cover 2 through the plug-in columns 59. At this time, the clamping block 56 enters the positioning groove inside the cover plate 2 under the action of the inclined angle. At the same time, the clamping block 56 is first in contact with the upper cover 2 under the action of the inclined angle of the clamping block 56, thereby driving the clamping block 56 to move inside the back-shaped sleeve 58. When the clamping block 56 moves, the spring rod two 57 is compressed. When the back-shaped sleeve 58 is completely installed inside the positioning groove, the tension of the spring rod two 57 drives the clamping block 56 to enter the placing groove. At this time, the mounting plate 41 is positioned up and down by the clamping block 56, and is positioned left and right under the action of the mounting plate 41, the plug-in columns 59 and the back-shaped sleeve 58, so that the mounting plate 41 is positioned up, down, left and right after installation, and is installed more stably.

[0041] As shown in Figure 3 and 6As shown, the one end surface of the clamping block 56 is embeddedly installed with the connecting rope 55, the two connecting ropes 55 are fixedly installed with the synchronous linkage block 51 which is slidingly connected to the outside of the lead screw 43, the outside bottom end of the clamping block 56 is connected with the trapezoidal plate 510 which is fixedly connected between the top end of the rectangular plate 47, the bottom end of the two sides of the synchronous linkage block 51 is embeddedly installed with the vertical rod 52 and the threaded column 53, the vertical rod 52 and the threaded column 53 are slidingly connected to the inside of the moving piece 44, the outside of the threaded column 53 is threadedly connected with the nut 54 at the bottom end position of the moving piece 44;

[0042] When the trapezoidal plate 510 rises, the clamping block 56 is moved, so that the clamping block 56 enters the positioning groove, further increasing the stability between the clamping block 56 and the upper cover 2, and in the process, the synchronous linkage block 51 is lifted by the connecting rope 55, the synchronous linkage block 51 is lifted along the outside of the lead screw 43, the vertical rod 52 and the threaded column 53 are lifted in the moving piece 44, at this time, the synchronous linkage block 51 is lifted more stably, and the synchronous linkage block 51 moves downward to drive the two clamping blocks 56 to move relatively, so that the clamping block 56 is separated along the inside of the upper cover 2, thereby facilitating the disassembly of the multi-surface synchronous clamping mechanism 4, and changing the disassembly difficulty of the multi-surface synchronous clamping mechanism 4.

[0043] Working principle: in the actual use process of the device, the user installs the MEMS optical fiber vibration sensitive element 3 between the bottom shell 1, then installs the installation plate 41 and the upper cover 2, in the process, installs the back type sleeve 58 and the upper cover 2, at this time, the back type sleeve 58 drives the installation plate 41 and the bottom end of the upper cover 2 to be attached through the plug-in column 59, due to the action of the inclined angle of the clamping block 56, the clamping block 56 first contacts the upper cover 3, so as to drive the clamping block 56 to move in the back type sleeve 58, when the back type sleeve 58 completely enters the positioning groove, at this time, the tension of the spring rod two 57 drives the clamping block 56 to enter the placing groove, so as to complete the installation between the multi-surface synchronous clamping mechanism 4 and the upper cover 2, change the installation difficulty, and the process does not need manual accurate alignment, saves the operation time, reduces the operation difficulty, at the same time, ensures the stability and consistency of the multi-surface synchronous clamping mechanism 4, improves the installation efficiency and reliability;

[0044] Then personnel will install the cover 2 and bottom shell 1, at this time due to the rectangular plate 47 and MEMS fiber vibration sensitive element 3 top contact, and at the same time L type strip 48 top support plate 410 synchronous with the MEMS fiber vibration sensitive element 3 top contact, before the process, can be adjusted by moving block 49 in the L type strip 48 inside the position, moving block 49 position adjustment when the support plate 410 position change, so that the support plate 410 into the MEMS fiber vibration sensitive element 3 top edge, in turn, to the MEMS fiber vibration sensitive element 3 top different position extrusion fit, thereby preventing the MEMS fiber vibration sensitive element 3 top force position is the same and cause the MEMS fiber vibration sensitive element 3 top damage problem occurs;

[0045] At the same time in the above process, personnel can rotate the screw 43, screw 43 rotation when the moving parts 44 in the positioning sleeve 42 inside the movement, moving parts 44 movement when the spring rod 45 movement, spring rod 45 movement when the T type column 46 movement, T type column 46 movement when the rectangular plate 47 movement, so as to change the rectangular plate 47 bottom and MEMS fiber vibration sensitive element 3 top distance between, so as to change the rectangular plate 47 on the MEMS fiber vibration sensitive element 3 top extrusion force, by adjusting the rectangular plate 47 on the MEMS fiber vibration sensitive element 3 top extrusion force, can ensure that the MEMS fiber vibration sensitive element 3 in a best working state, so not only can improve the overall sensitivity of the sensor, but also can improve its long-term stability, avoid due to environmental changes or long time use caused by performance decline, and irregularly this kind of manual adjustment calibration, can help to keep the accuracy and reliability of the MEMS fiber vibration sensitive element 3;

[0046] When the rectangular plate 47 is in contact with the top end of the MEMS fiber vibration sensitive element 3, the spring rod 45 is compressed due to the extrusion force of the MEMS fiber vibration sensitive element 3, and in the process, the rectangular plate 47 is lifted, the L-shaped strip 48 is lifted, the gear 413 is rotated, the shaft 412 is rotated in the limiting strip 411, the turnover rod 414 is rotated due to the rotation of the shaft 412, and the high-temperature-resistant rubber pad 416 and the side wall of the MEMS fiber vibration sensitive element 3 are in contact. In the process, the compression roller 423 of the moving frame 422 is first in contact with the side wall of the MEMS fiber vibration sensitive element 3, and when the turnover rod 414 continues to turn, the compression roller 423 moves along the outside of the MEMS fiber vibration sensitive element 3, and the angle of the compression roller 423 changes. When the angle of the compression roller 423 changes, the turnover frame 418 is rotated outside the cylinder 417 through the moving frame 422, the turnover frame 418, the round sleeve 419, the stand column 420 and the threaded rod 421, and in the process, the arc-shaped piston rod 426 moves in the piston sleeve 425, so that the gas in the piston sleeve 425 is compressed. The driving force of the compressed gas makes the compression roller 423 extrude the side of the MEMS fiber vibration sensitive element 3, and the four sides of the MEMS fiber vibration sensitive element 3 are synchronously and multi-pointly pressed through an automatic mode, so that the MEMS fiber vibration sensitive element 3 is fixed more stably, and the problem that the MEMS fiber vibration sensitive element 3 slides in the bottom shell 1 during high-temperature detection is prevented, so that the detection accuracy of the MEMS fiber vibration sensitive element 3 at high temperature is improved.

[0047] Finally, the personnel slide the turnover rod 414, adjust the position of the turnover rod 414 outside the shaft 412, and then extrude and fix the turnover rod 414 by using the bolt 415, so as to change the position of the high-temperature-resistant rubber pad 416. Then, the personnel rotate the threaded rod 421, adjust the position of the threaded rod 421 in the round sleeve 419, so that the moving frame 422 drives the stand column 420 to slide in the round sleeve 419, so that the position of the compression roller 423 is adjusted, and the extrusion position of the compression roller 423 on the MEMS fiber vibration sensitive element 3 is changed. The extrusion force of the compression roller 423 on the MEMS fiber vibration sensitive element 3 can be changed, so that the MEMS fiber vibration sensitive element 3 is more stable after installation.

[0048] The above embodiments are only used to illustrate the technical solutions of the present application, but not limit them.

Claims

1. A high-temperature resistant packaging structure for a MEMS fiber optic vibration sensor, characterized in that, include: A bottom shell (1) is fixedly mounted with a top cover (2) by screws at the top of the bottom shell (1). A MEMS fiber optic vibration sensing element (3) is bonded inside the bottom shell (1). A multi-faceted synchronous clamping mechanism (4) for fixing the MEMS fiber optic vibration sensing element (3) is installed at the bottom of the top cover (2). The multi-faceted synchronous clamping mechanism (4) includes a mounting plate (41) fixedly mounted at the center of the bottom of the top cover (2). A positioning sleeve (42) is symmetrically embedded at the bottom of the mounting plate (41). A T-shaped column (46) is slidably connected inside the positioning sleeve (42). A spring rod (45) is embedded at the top of the T-shaped column (46). A movable part (44) slidably connected inside the positioning sleeve (42) is snapped between the tops of the two spring rods (45). The component (44) is internally connected by a threaded rod (43) that is rotatably connected to the bottom end of the mounting plate (41). A rectangular plate (47) is fixedly installed between the bottom ends of two adjacent T-shaped columns (46). An L-shaped strip (48) is fixedly installed in the middle of the four end faces of the rectangular plate (47). Eight limiting strips (411) are symmetrically fixedly installed at the bottom end of the upper cover (2) with respect to the center of the four end faces of the rectangular plate (47). A rotating shaft (412) is rotatably connected between two opposite limiting strips (411). A gear (413) is fixedly installed in the middle of the outer surface of the rotating shaft (412), and the outer side of the gear (413) meshes with one end face of the L-shaped strip (48). A flipping rod (414) is slidably connected to the outer side of the rotating shaft (412). A high-temperature resistant rubber pad (416) is glued to one end face of the flipping rod (414). The L-shaped bar (48) has a sliding block (49) inside. The bottom of the sliding block (49) is fixedly installed with a support plate (410) that is in contact with the top of the MEMS fiber vibration sensing element (3). The outside of the flipping rod (414) is connected to a bolt (415) by a thread, and one end face of the bolt (415) is in contact with the outer surface of the rotating shaft (412). The two ends of the flipping rod (414) are symmetrically embedded with cylinders (417), the gear (413) is rotatably connected to the outside of the flipping frame (418), the bottom of the flipping frame (418) is movably connected to a movable frame (422), and the movable frame (422) is rotatably connected to a pressure roller (423) inside the movable frame (422).

2. The high-temperature resistant packaging structure for the MEMS fiber optic vibration sensor according to claim 1, characterized in that, The bottom end of the flipping frame (418) is symmetrically fitted with round sleeves (419). One of the round sleeves (419) is slidably connected to a column (420), and the other round sleeve (419) is threadedly connected to a threaded rod (421). The threaded rod (421) is rotatably connected to the inside of the movable frame (422), and the column (420) is fixedly installed on the top of the movable frame (422).

3. The high-temperature resistant packaging structure for the MEMS fiber optic vibration sensor according to claim 2, characterized in that, An arc-shaped piston rod (426) is symmetrically embedded on one end of the flipping frame (418). A piston sleeve (425) is sleeved on the outside of the arc-shaped piston rod (426). A rectangular block (424) is fixedly installed on one end of the piston sleeve (425) and the rectangular block (424) is fixedly installed on one end of the flipping rod (414).

4. The high-temperature resistant packaging structure for the MEMS fiber optic vibration sensor according to claim 3, characterized in that, The piston sleeve (425) is arc-shaped, and the centers of the piston sleeve (425) and the arc-shaped piston rod (426) coincide with each other.

5. The high-temperature resistant packaging structure for the MEMS fiber optic vibration sensor according to claim 4, characterized in that, The mounting plate (41) is fixedly installed with a directional connection mechanism (5) on both sides. The directional connection mechanism (5) includes plug-in posts (59) that are symmetrically embedded at one end of the mounting plate (41) at equal intervals. A loop sleeve (58) is fixedly installed between the two plug-in posts (59). A spring rod (57) is embedded in one end face of the loop sleeve (58). A snap-fit ​​block (56) is fixedly installed at one end of the spring rod (57), and the bottom end of the snap-fit ​​block (56) is slidably connected to the inside of the loop sleeve (58).

6. The high-temperature resistant packaging structure for the MEMS fiber optic vibration sensor according to claim 5, characterized in that, A connecting rope (55) is embedded in one end face of the snap-fit ​​block (56), and a synchronous linkage block (51) is fixedly installed between the two connecting ropes (55) and the synchronous linkage block (51) is slidably connected to the outside of the lead screw (43). A trapezoidal plate (510) is fixedly connected to the top of the rectangular plate (47) at the bottom of the outer side of the snap-fit ​​block (56).

7. The high-temperature resistant packaging structure for the MEMS fiber optic vibration sensor according to claim 6, characterized in that, The bottom sides of the synchronous linkage block (51) are respectively embedded with a vertical rod (52) and a threaded column (53). The vertical rod (52) and the threaded column (53) are slidably connected inside the moving part (44). The threaded column (53) is connected to a nut (54) by a thread at the bottom of the moving part (44).

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