Temperature control system, temperature control method, control device, and computer program

Abstract

A temperature control system (1) according to one embodiment is provided with: a refrigeration device (10); a fluid circulation device (20) having a heat exchange section (21E) between the inlet (21U) and the outlet (21D), the fluid circulation device (20) exchanging heat between a fluid in the heat exchange section (21E) and a refrigerant in an evaporator (14) of the refrigeration device (10); a first temperature sensor (26) that detects the temperature of the fluid flowing through a portion of the main flow path (21) on the downstream side of the heat exchange unit (21E); and a control device (30). Furthermore, when the target temperature of the fluid is changed, the control device (30) performs initial control in which the compressor (11) is controlled such that the rotational speed of the compressor (11) is reduced to a set value derived from the target temperature, and the initial control is performed such that the rotational speed of the compressor (11) is reduced to a set value derived from the target temperature while or before or after the control of the compressor (11). The flow rate of the fluid flowing through the heat exchange part (21E) in the main flow path (21) is changed.

Description

Technical Field

[0001] Embodiments of the present invention relate to a temperature control system, a temperature control method, a control device, and a computer program. Background Art

[0002] A temperature control system is known, which comprises: a refrigeration device having a compressor, a condenser, an expansion valve and an evaporator; and a fluid circulation device that circulates a fluid such as water or salt water, and the temperature control system uses the evaporator of the refrigeration device to cool the fluid circulated by the fluid circulation device. The applicant has previously proposed such a system in, for example, Patent Document 1 (JPB6053907). Summary of the invention

[0003] In a manufacturing plant, temperature conditions may be switched in accordance with a switch in a manufacturing process. In temperature control when such temperature conditions are switched, there is an increasing demand for improved responsiveness every year.

[0004] When the temperature control system is used to cope with the temperature condition switching of the manufacturing process, the temperature control system can control the temperature of the fluid circulated by the fluid circulation device through PID control. In PID control, the responsiveness is improved by gain adjustment. However, even if the gain is adjusted in PID control, it is sometimes impossible to meet the high requirements for responsiveness in recent years.

[0005] On the other hand, feedforward control is sometimes incorporated into a PID control system in order to improve responsiveness. In feedforward control, a large control amount can be input separately from PID control, thereby achieving improved responsiveness. However, when a large control amount is suddenly input, the stable operation of the components of the device or system may be impaired, or an unexpected load or impact may be applied to the components.

[0006] Therefore, an object of the present invention is to provide a temperature control system, a temperature control method, a control device, and a computer program that can improve the responsiveness of temperature control of the temperature control system and suppress undesirable influences on operating conditions and component devices.

[0007] A temperature control system according to an embodiment of the present invention comprises: a refrigeration device including a compressor, a condenser, an expansion valve and an evaporator, wherein the refrigerant flowing out of the compressor returns to the compressor after passing through the condenser, the expansion valve and the evaporator in sequence; a fluid circulation device including a main flow path having a heat exchange portion between an inlet and an outlet, wherein the main flow path allows a fluid received by the inlet to flow toward the outlet through the heat exchange portion, and the fluid circulation device exchanges heat between the fluid in the heat exchange portion and the refrigerant in the evaporator; and a control device for controlling the refrigeration device and the fluid circulation device, wherein the control device performs the following initial control when a target temperature of the fluid is changed or when a temperature of the fluid before flowing into the heat exchange portion is changed: the compressor is controlled so that a rotation speed of the compressor is changed to a set value derived from the changed target temperature or the changed temperature of the fluid, and the flow rate of the fluid flowing through the heat exchange portion in the main flow path is changed simultaneously with, before or after the control of the compressor.

[0008] The temperature control method of one embodiment of the present invention is a temperature control method of a temperature control system, wherein the temperature control system comprises: a refrigeration device, which includes a compressor, a condenser, an expansion valve and an evaporator, wherein the refrigerant flowing out of the compressor returns to the compressor after passing through the condenser, the expansion valve and the evaporator in sequence; and a fluid circulation device, which includes a main flow path, wherein the main flow path has a heat exchange portion between an inlet and an outlet, wherein the main flow path allows a fluid received by the inlet to flow toward the outlet through the heat exchange portion, and the fluid circulation device causes the fluid in the heat exchange portion to exchange heat with the refrigerant in the evaporator. The method is a temperature control method having the following steps: a detection step, detecting a change in the target temperature of the fluid or a change in the temperature of the fluid before flowing into the heat exchange section; and a control step, when a change in the target temperature of the fluid or a change in the temperature of the fluid before flowing into the heat exchange section is detected by the detection step, controlling the compressor so that the rotation speed of the compressor is changed to a set value derived from the changed target temperature or the changed temperature of the fluid, and changing the flow rate of the fluid flowing through the heat exchange section in the main flow path while controlling the compressor or before or after the control.

[0009] A control device according to one embodiment of the present invention is a control device for controlling a temperature control system, the temperature control system comprising: a refrigeration device including a compressor, a condenser, an expansion valve and an evaporator, wherein the refrigerant flowing out of the compressor returns to the compressor after passing through the condenser, the expansion valve and the evaporator in sequence; and a fluid circulation device including a main flow path, the main flow path having a heat exchange portion between an inlet and an outlet, the main flow path allowing the fluid received by the inlet to flow toward the outlet through the heat exchange portion, the fluid circulation device causing the fluid in the heat exchange portion to exchange heat with the refrigerant in the evaporator, wherein when the target temperature of the fluid is changed or the temperature of the fluid before flowing into the heat exchange portion is changed, the control device performs the following initial control: controlling the compressor so that the rotation speed of the compressor is changed to a set value derived from the changed target temperature or the changed temperature of the fluid, and changing the flow rate of the fluid flowing through the heat exchange portion in the main flow path while controlling the compressor or before or after the control.

[0010] A computer program of one embodiment of the present invention is used to control a refrigeration device and a fluid circulation device, the refrigeration device includes a compressor, a condenser, an expansion valve and an evaporator, the refrigerant flowing out of the compressor returns to the compressor after passing through the condenser, the expansion valve and the evaporator in sequence, the fluid circulation device includes a main flow path, the main flow path has a heat exchange part between an inlet and an outlet, the main flow path allows a fluid received by the inlet to flow toward the outlet through the heat exchange part, the fluid circulation device causes the fluid in the heat exchange part to exchange heat with the refrigerant in the evaporator, wherein the computer program The program causes the computer to execute the following steps: a detection step, detecting a change in the target temperature of the fluid or a change in the temperature of the fluid before flowing into the heat exchange section; and a control step, when a change in the target temperature of the fluid or a change in the temperature of the fluid before flowing into the heat exchange section is detected by the detection step, controlling the compressor to change the rotation speed of the compressor to a set value derived from the changed target temperature or the changed temperature of the fluid, and changing the flow rate of the fluid flowing through the heat exchange section in the main flow path while controlling the compressor or before or after the control.

[0011] According to the present invention, the responsiveness of the temperature control of the temperature control system can be improved, and undesired influences on the operating state and the constituent devices can be suppressed. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1This is a diagram schematically showing a temperature control system according to one embodiment.

[0013] Figure 2 It shows the composition Figure 1 Block diagram of the functional structure of the control device of the temperature control system.

[0014] Figure 3 It is shown that the Figure 1 Conceptual diagram of information derived from a relational expression used in control by a control device of a temperature control system.

[0015] Figure 4 It shows the structure Figure 1 A graph of a relationship between a heat load and a rotation speed of a compressor expressed by a relational expression used by a control device of a temperature control system in control is shown.

[0016] Figure 5 Yes Figure 1 A flowchart for explaining the operation of the temperature control system.

[0017] Figure 6 Yes Figure 1 A flowchart for explaining the operation of the temperature control system.

[0018] Figure 7 It shows Figure 1 FIG. 1 is a graph for explaining the operation of the components of the temperature control system and the temperature control situation.

[0019] Figure 8 It is shown that it can be constructed Figure 1 A diagram of a set value table used in the control of a control device of a temperature control system.

[0020] Fig. 9 This is a diagram schematically showing a temperature control system according to a modified example.

[0021] Fig.10 It is a diagram schematically showing a temperature control system according to another modified example.

[0022] Fig.11 This is a flowchart for explaining the operation of a temperature control system according to a modified example.

[0023] Fig.12 It is right Fig.11 A flowchart for explaining the operation of the temperature control system is provided below.

[0024] Fig.13 Is to show the Fig.11 and Fig.12 FIG. 1 is a graph illustrating the operation of the components of the temperature control system and the temperature control situation corresponding to the operation of the temperature control system.

[0025] Fig.14 This is a flowchart for explaining the operation of the temperature control system according to another modification.

[0026] Fig.15 The diagrams are for explaining an application example of a temperature control system according to an embodiment or a modified example. DETAILED DESCRIPTION

[0027] Hereinafter, one embodiment of the present invention will be described.

[0028] <Structure of temperature control system>

[0029] Figure 1 This is a schematic diagram of a temperature control system 1 according to one embodiment. Figure 1 The temperature control system 1 shown includes a refrigeration device 10 , a fluid circulation device 20 and a control device 30 .

[0030] The refrigeration device 10 controls the temperature of the fluid flowing through the fluid circulation device 20 by using the refrigerant. The fluid circulation device 20 supplies the fluid whose temperature has been controlled by the refrigeration device 10 to the temperature control target T.

[0031] The fluid circulation device 20 circulates the fluid that has passed through the temperature control object T. The refrigeration device 10 controls the temperature of the fluid that has returned from the temperature control object T. The fluid circulated by the fluid circulation device 20 is, for example, salt water, but may be other fluids such as water.

[0032] The control device 30 is configured to control the refrigeration device 10 and the fluid circulation device 20, for example, to set the target temperature of the fluid provided to the temperature control object T according to the user's operation, or to control each part so that the temperature of the fluid reaches the set target temperature. Hereinafter, each part of the temperature control system 1 will be described in detail.

[0033] The refrigeration device 10 includes a compressor 11, a condenser 12, an expansion valve 13, and an evaporator 14. The compressor 11, the condenser 12, the expansion valve 13, and the evaporator 14 are connected in this order by a pipe 15 so that a refrigerant circulates.

[0034] The compressor 11 compresses the refrigerant in the state of low-temperature and low-pressure gas flowing out of the evaporator 14, and supplies it to the condenser 12 in the state of high-temperature and high-pressure gas. The condenser 12 cools and condenses the refrigerant compressed by the compressor 11 using cooling water, for example, and supplies it to the expansion valve 13 in the state of high-pressure liquid at a predetermined cooling temperature. The cooling water flowing through the condenser 12 may be water or other refrigerants. In addition, the condenser 12 may also be an air-cooled type.

[0035] The expansion valve 13 expands the refrigerant supplied from the condenser 12 to reduce its pressure, and supplies it to the evaporator 14 in a low-temperature and low-pressure gas-liquid mixed state. The evaporator 14 performs heat exchange between the refrigerant supplied from the expansion valve 13 and the fluid of the fluid circulation device 20. Here, the refrigerant that exchanges heat with the fluid becomes a low-temperature and low-pressure gas state, flows out of the evaporator 14 and returns to the compressor 11. Then, the refrigerant flowing out of the evaporator 14 is compressed again by the compressor 11.

[0036] The fluid circulation device 20 includes a main flow path 21 having an inlet 21U and an outlet 21D, and the main flow path 21 connects the inlet 21U and the outlet 21D to the temperature control object T. The main flow path 21 includes a heat exchange portion 21E between the inlet 21U and the outlet 21D, and the fluid received by the inlet 21U flows to the outlet 21D through the heat exchange portion 21E.

[0037] The fluid circulation device 20 transfers the fluid from the outlet 21D to the temperature control object T after the fluid in the heat exchange portion 21E exchanges heat with the refrigerant in the evaporator 14. Then, the fluid circulation device 20 receives the fluid after passing through the temperature control object T through the inlet 21U. Then, the fluid circulation device 20 guides the fluid flowing into the inlet 21U to the heat exchange portion 21E, and performs heat exchange again with the evaporator 14.

[0038] Furthermore, the fluid circulation device 20 further includes a pump 22 , a container 23 , a bypass flow path 24 , a valve mechanism 25 , a first temperature sensor 26 , a second temperature sensor 27 , and a flow rate sensor 28 .

[0039] The pump 22 constitutes a part of the main flow path 21 and generates a driving force for circulating the fluid. The pump 22 is arranged at a portion of the main flow path 21 that is closer to the upstream side than the heat exchange portion 21E, but its position is not particularly limited. The pump 22 is electrically connected to the control device 30, and the rotation speed of the pump 22 is controlled by the control device 30. The flow rate of the fluid circulating in the fluid circulation device 20 can be adjusted by increasing or decreasing the rotation speed of the pump 22.

[0040] The container 23 is also disposed at a portion of the main flow path 21 that is on the upstream side of the heat exchange portion 21E. The container 23 is provided to store a certain amount of fluid and constitutes a portion of the main flow path 21. In the present embodiment, the pump 22 is disposed in the container 23, but the pump 22 may also be disposed outside the container 23.

[0041] The bypass flow path 24 connects the upstream side portion and the downstream side portion of the heat exchange portion 21E of the main flow path 21, and allows the fluid received from the upstream side portion of the main flow path 21 to flow. The valve mechanism 25 adjusts the flow rate of the fluid flowing through the heat exchange portion 21E in the main flow path 21 and the flow rate of the fluid flowing through the bypass flow path 24.

[0042] The valve mechanism 25 of the present embodiment is configured to include a three-way valve 25V. The three-way valve 25V includes a first port 251, a second port 252, and a third port 253. And, the flow path from the first port 251 to the second port 252 constitutes a part of the main flow path 21. Here, the upstream end opening of the bypass flow path 24 is connected to the part of the main flow path 21 that is downstream of the pump 22 and upstream of the heat exchange portion 21E, and the downstream end opening of the bypass flow path 24 is connected to the third port 253 of the three-way valve 25V.

[0043] The three-way valve 25V can adjust the ratio of the flow rate of the fluid flowing into the first port 251 and flowing out of the second port 252 to the flow rate of the fluid flowing into the third port 253 and flowing out of the second port 252. Thus, the ratio of the flow rate of the fluid flowing through the heat exchange portion 21E in the main flow path 21 to the flow rate of the fluid flowing through the bypass flow path 24 can be adjusted. In addition, the valve mechanism 25 is configured to include the three-way valve 25V, but it can also be a structure in which two or more two-way valves are combined. The three-way valve 25V can be an electric valve, and the two-way valve can be an electromagnetic valve.

[0044] The first temperature sensor 26 detects the temperature of the fluid flowing partially on the downstream side of the heat exchange portion 21E of the main flow path 21. Specifically, the first temperature sensor 26 detects the temperature of the fluid flowing partially on the downstream side of the connection position of the main flow path 21 with the downstream end of the bypass flow path 24, specifically, detects the temperature of the fluid flowing partially on the downstream side of the three-way valve 25V.

[0045] The second temperature sensor 27 detects the temperature of the fluid flowing in the upstream portion of the heat exchange portion 21E of the main channel 21. Specifically, the second temperature sensor 27 detects the temperature of the fluid flowing in the portion between the inlet 21U of the main channel 21 and the container 23. In addition, the detection position of the second temperature sensor 27 may not be the above-mentioned one, but may be inside the container 23, or a portion between the container 23 and the heat exchange portion 21E of the main channel 21.

[0046] The flow sensor 28 detects the flow rate of the fluid flowing in the downstream portion of the main flow path 21 from the connection position with the downstream end of the bypass flow path 24, specifically, the flow rate of the fluid flowing in the downstream portion of the three-way valve 25V. That is, the flow sensor 28 detects the flow rate of the fluid supplied to the temperature control object T.

[0047] The first temperature sensor 26 , the second temperature sensor 27 , and the flow rate sensor 28 described above are electrically connected to the control device 30 , and information (temperature information, flow rate information) detected by each sensor is transmitted to the control device 30 .

[0048] The control device 30 is a controller that controls the operation of the refrigeration device 10 and the fluid circulation device 20, and can be composed of, for example, a computer having a CPU, a ROM, etc. In this case, various processes are performed according to the program stored in the ROM. In addition, the control device 30 can also be composed of other processors or electrical circuits (such as FPGA (Field Programmable GateAlley, Field Programmable Gate Array)).

[0049] The control device 30 controls the refrigeration device 10 and the fluid circulation device 20, for example, in order to control the temperature of the fluid so that the temperature reaches the target temperature set for the fluid circulating in the fluid circulation device 20. At this time, the control device 30 controls the rotation speed of the compressor 11 of the refrigeration device 10 and the opening degree of the expansion valve 13. The control device 30 controls the rotation speed of the pump 22 of the fluid circulation device 20 and the operation of the valve mechanism 25. The structure of the control device 30 is described in detail below.

[0050] <Control device structure>

[0051] Figure 2 is a block diagram showing the functional structure of the control device 30. Figure 2 As shown, the control device 30 includes an interface unit 301, a target temperature setting unit 302, a temperature acquisition unit 303, a flow acquisition unit 304, a heat load calculation unit 305, a transfer determination unit 306, a compressor control unit 307, an expansion valve control unit 308, a valve mechanism control unit 309, a pump control unit 310, and a set value information storage unit 311. Most of these functional units are realized by executing a program, for example. The set value information storage unit 311 can be composed of a part of a recording medium such as a ROM.

[0052] In addition, the control device 30 may be composed of, for example, one computer or a plurality of computers. In the case of being composed of a plurality of computers, the plurality of functional units may be allocated to the plurality of computers. Furthermore, the control device 30 controls the refrigeration device 10 and the fluid circulation device 20. Specifically, the control device 30 controls the refrigeration device 10 and the fluid circulation device 20 using any of the plurality of functional units. Each functional unit will be described in detail below.

[0053] The interface unit 301 receives information from the outside and provides information to the outside. The interface unit 301 obtains information on the target temperature of the fluid circulated by the fluid circulation device 20 through input from an operation unit operated by a user or input from an external device, for example, and provides it to, for example, the target temperature setting unit 302. In addition, the interface unit 301 also obtains information such as an operation start instruction, a stop instruction from the user, and a target flow rate of the fluid circulated by the fluid circulation device 20. When the interface unit 301 obtains information on the target flow rate, it provides the information to the pump control unit 310 and the like.

[0054] The target temperature setting unit 302 sets and maintains the target temperature information obtained from the interface unit 301 as the target temperature in advance. The target temperature setting unit 302 provides the obtained target temperature information to the heat load calculation unit 305, the transfer determination unit 306, the compressor control unit 307, the expansion valve control unit 308, the valve mechanism control unit 309, etc.

[0055] The temperature acquisition unit 303 acquires information on the temperature of the fluid detected by the first temperature sensor 26 and information on the temperature of the fluid detected by the second temperature sensor 27. The temperature acquisition unit 303 acquires temperature information all the time or at a predetermined period, and provides the information on the temperature of the fluid flowing on the downstream side of the heat exchange unit 21E acquired from the first temperature sensor 26 to the transfer determination unit 306, the compressor control unit 307, the expansion valve control unit 308, the valve mechanism control unit 309, etc. In addition, the temperature acquisition unit 303 provides the information on the temperature of the fluid flowing on the upstream side of the heat exchange unit 21E acquired from the second temperature sensor 27 to the heat load calculation unit 305.

[0056] The flow rate acquisition unit 304 acquires the flow rate information of the fluid detected by the flow rate sensor 28. The flow rate acquisition unit 304 acquires the flow rate information all the time or at a predetermined period, and provides the acquired flow rate information to the heat load calculation unit 305, the pump control unit 310, and the like.

[0057] The heat load calculation unit 305 calculates a heat load for making the temperature of the fluid before flowing into the heat exchange unit 21E in the main flow path 21 become the target temperature set by the target temperature setting unit 302. Specifically, the heat load calculation unit 305 calculates the heat load based on the target temperature, the temperature information obtained from the second temperature sensor 27, and the flow rate information of the fluid obtained from the flow rate acquisition unit 304.

[0058] The heat load can be obtained, for example, by multiplying the difference between the target temperature and the temperature determined by the second temperature sensor 27 by the flow rate of the fluid, the density of the fluid, and the specific heat. As an example, the heat load calculation unit 305 can derive the heat load based on the above calculation. The heat load calculation unit 305 provides the calculated heat load to the compressor control unit 307.

[0059] The transfer determination unit 306 obtains information on the target temperature from the target temperature setting unit 302 and temperature information on the fluid flowing on the downstream side of the heat exchange unit 21E from the first temperature sensor 26. The transfer determination unit 306 may also obtain temperature information on the fluid from the second temperature sensor 27. Furthermore, the transfer determination unit 306 of the present embodiment determines a control mode for controlling the temperature of the fluid flowing on the downstream side of the heat exchange unit 21E to the target temperature based on the information on the target temperature and the temperature information on the fluid flowing on the downstream side of the heat exchange unit 21E. The transfer determination unit 306 of the present embodiment determines any of the stable control, the initial control, and the preliminary stable control as the control mode, and provides information on the determined control mode to the compressor control unit 307, the expansion valve control unit 308, and the valve mechanism control unit 309.

[0060] In detail, the transfer determination unit 306 decides to first control with stable control as the control mode during the initial operation. That is, after the target temperature is set in the temperature control system 1 in the stopped state, when the start of operation is instructed, the transfer determination unit 306 decides to control with stable control. Thereafter, when the target temperature is changed, the transfer determination unit 306 decides whether to maintain stable control or transfer to "initial control". Initial control is a process performed to improve the responsiveness of temperature control. In detail, the transfer determination unit 306 of the present embodiment decides to transfer to initial control when the target temperature after the change is higher than the temperature of the fluid detected by the first temperature sensor 26 when the target temperature is changed to the target temperature and the absolute value of the difference between the temperature of the fluid detected by the first temperature sensor 26 and the target temperature is greater than the temperature threshold.

[0061] In the above-mentioned stable control, temperature control is performed by feedback controlling the compressor 11 and the expansion valve 13 or by making the rotation speed of the compressor 11 constant and feedback controlling the expansion valve 13. On the other hand, the initial control is performed to improve the responsiveness of the temperature control compared with the feedback control when the difference between the current temperature of the fluid and the target temperature is relatively large. In this initial control, it is predetermined that a relatively large operation amount is input to the compressor 11 and the expansion valve 13. In detail, in the initial control, the rotation speed of the compressor 11 and the opening of the expansion valve 13 are reduced with a relatively large operation amount. Such initial control is effective when the difference between the current temperature of the fluid and the target temperature is relatively large, and sometimes the superiority over the feedback control cannot be obtained when the difference between the current temperature of the fluid and the target temperature is relatively small. From the above viewpoints, the above-mentioned temperature threshold is preferably a relatively large value, for example, 5 degrees. The temperature threshold may be 3 degrees or more, 5 degrees or more, or 10 degrees or more. In this embodiment, as an example, the temperature threshold is set to 5 degrees, and the initial control is performed when the temperature is raised by 5 degrees or more.

[0062] Furthermore, the transfer determination unit 306 maintains stable control when the changed target temperature is lower than the temperature of the fluid detected by the first temperature sensor 26, or when the changed target temperature is higher than the temperature of the fluid detected by the first temperature sensor 26 but the absolute value of the difference between the temperature of the fluid detected by the first temperature sensor 26 and the target temperature is less than the temperature threshold.

[0063] Furthermore, the transfer determination unit 306 of the present embodiment decides to transfer to the preliminary stabilization control after transferring to the initial start control when the prescribed conditions are satisfied. Specifically, after the rotation speed of the compressor 11 and the opening degree of the expansion valve 13 are reduced in the initial start control, when the absolute value of the difference between the temperature of the fluid detected by the first temperature sensor 26 and the target temperature becomes less than the first prescribed value, the transfer determination unit 306 decides to transfer to the preliminary stabilization control. The first prescribed value may be, for example, a value of half the absolute value of the difference between the temperature of the fluid detected by the first temperature sensor 26 and the target temperature when the target temperature is changed. In this case, for example, when the target temperature is exactly 10 degrees higher than the temperature of the fluid when the target temperature is set, the first prescribed value is 5 degrees. In the preliminary stabilization control, as described later, the rotation speed of the compressor 11 is maintained in the state after being reduced in the initial start control, and the opening degree of the expansion valve 13 is feedback controlled.

[0064] Furthermore, the transfer determination unit 306 of the present embodiment decides to transfer to the stable control when the transfer to the preliminary stable control and the prescribed conditions are satisfied. Although described in detail later, in the initial control, the valve mechanism 25 is adjusted by the valve mechanism control unit 309 so that the rotation speed of the compressor 11 and the opening of the expansion valve 13 are reduced and the flow rate of the fluid flowing through the heat exchange unit 21E in the main flow path 21 is reduced. After that, the valve mechanism 25 adjusted in this way is controlled so that the flow rate of the fluid is restored to the flow rate before the adjustment. The above-mentioned prescribed condition as a condition for the transfer from the preliminary stable control to the stable control is that the state in which the valve mechanism 25 adjusted to reduce the flow rate of the fluid is restored to the state before the adjustment is established.

[0065] Specifically, the control device 30 of the present embodiment controls the valve mechanism control unit 309 to reduce the flow rate of the fluid flowing through the heat exchange unit 21E in the main flow path 21 in the initial operation control, and then, when the difference between the temperature of the fluid detected by the first temperature sensor 26 and the target temperature becomes less than the second predetermined value, controls the valve mechanism 25 to restore the flow rate of the fluid flowing through the heat exchange unit 21E in the main flow path 21 to the flow rate before the adjustment. When the action of restoring the flow rate of the fluid flowing through the heat exchange unit 21E in the main flow path 21 to the flow rate before the adjustment (hereinafter referred to as the restoration action) and the establishment of the preliminary stabilization control are completed, the shift determination unit 306 determines to shift to the stabilization control.

[0066] Here, in the present embodiment, the first prescribed value and the second prescribed value are the same value. Therefore, the recovery action of the valve mechanism 25 is performed while transferring to the preliminary stable control, and after the initial control, when the difference between the temperature of the fluid detected by the first temperature sensor 26 and the target temperature becomes less than the first prescribed value (the second prescribed value), the control mode is transferred to the stable control. That is, in the present embodiment, the transfer to the stable control is substantially generated while transferring to the preliminary stable control. However, the first prescribed value and the second prescribed value may also be different. In the case where the first prescribed value is greater than the second prescribed value, after the preliminary stable control, the recovery action of the valve mechanism 25 is performed, and the control mode is transferred to the stable control. Furthermore, the first prescribed value may also be smaller than the second prescribed value.

[0067] In the stable control described above, as described above, control is performed by feedback controlling the compressor 11 and the expansion valve 13 or by making the rotation speed of the compressor 11 constant and performing feedback controlling on the expansion valve 13. That is, in the stable control, the compressor 11 and the expansion valve 13 are controlled in the following manners: manner (1) feedback controlling the compressor 11 and the expansion valve 13; or manner (2) making the rotation speed of the compressor 11 constant and performing feedback controlling on the expansion valve 13.

[0068] In detail, in the above-mentioned method (1), the rotation speed of the compressor 11 and the opening degree of the expansion valve 13 are both feedback-controlled according to the difference between the temperature of the fluid detected by the first temperature sensor 26 and the target temperature. In the above-mentioned method (2), the rotation speed of the compressor 11 is maintained at a constant value, and the opening degree of the expansion valve 13 is feedback-controlled according to the difference between the temperature of the fluid detected by the first temperature sensor 26 and the target temperature. More specifically, when the control mode becomes a stable state during the initial operation, the above-mentioned method (1) is first performed, and when the prescribed conditions are met, the control is switched to the above-mentioned method (2). In the present embodiment, the prescribed condition for switching is that the temperature of the fluid detected by the first temperature sensor 26 reaches the target temperature.

[0069] Furthermore, in the initial control, the valve mechanism 25 is adjusted by the valve mechanism control unit 309 so that the rotation speed of the compressor 11 and the opening of the expansion valve 13 are reduced and the flow rate of the fluid flowing through the heat exchanger 21E in the main flow path 21 is reduced. Specifically, in the initial control, the rotation speed of the compressor 11 is reduced to a set value derived from the target temperature. That is, the rotation speed of the compressor 11 is reduced to a set value that becomes a different value according to the target temperature. Furthermore, in the initial control, the opening of the expansion valve 13 is reduced by a predetermined amount. In the present embodiment, the predetermined amount is a constant value regardless of the target temperature. Furthermore, in the initial control, the valve mechanism 25 is adjusted so that the flow rate of the fluid flowing through the heat exchanger 21E is reduced by a predetermined flow rate. Specifically, in the initial control, the valve mechanism 25 reduces the flow rate of the fluid flowing through the heat exchanger 21E in the main flow path 21 by a predetermined flow rate, and increases the flow rate of the fluid flowing through the bypass flow path 24 by a predetermined flow rate. In the present embodiment, the above-mentioned predetermined flow rate is a constant value regardless of the target temperature.

[0070] In addition, in the initial control, the timing of reducing the flow rate of the fluid flowing through the heat exchanger 21E may be the same as the timing of reducing the rotation speed of the compressor 11 and the opening of the expansion valve 13, or may be before or after the timing of reducing the rotation speed of the compressor 11 and the opening of the expansion valve 13. When the timing of reducing the flow rate of the fluid flowing through the heat exchanger 21E is earlier than the timing of reducing the rotation speed of the compressor 11 and the opening of the expansion valve 13, after the target temperature is changed, the flow rate of the fluid flowing through the heat exchanger 21E is reduced, and then the rotation speed of the compressor 11 and the opening of the expansion valve 13 are reduced. In this case, the timing of reducing the rotation speed of the compressor 11 and the opening of the expansion valve 13 is within 5 seconds after the flow rate of the fluid flowing through the heat exchanger 21E is reduced, preferably within 3 seconds, more preferably within 2 seconds, and further preferably within 1 second. Furthermore, in this case, the timing for reducing the flow rate of the fluid flowing through the heat exchange portion 21E after the target temperature is changed may be immediately after the target temperature is changed, for example, within 1 second after the change.

[0071] Furthermore, when the timing of reducing the flow rate of the fluid circulating in the heat exchange section 21E is later than the timing of reducing the rotation speed of the compressor 11 and the opening of the expansion valve 13, after the target temperature is changed, the rotation speed of the compressor 11 and the opening of the expansion valve 13 are reduced, and then the flow rate of the fluid circulating in the heat exchange section 21E is reduced. In this case, the timing of reducing the flow rate of the fluid circulating in the heat exchange section 21E is within 5 seconds after the rotation speed of the compressor 11 and the opening of the expansion valve 13 are reduced, preferably within 3 seconds, more preferably within 2 seconds, and further preferably within 1 second. Furthermore, in this case, the timing of reducing the rotation speed of the compressor 11 and the opening of the expansion valve 13 after the target temperature is changed can be just after the target temperature is changed, for example, within 1 second after the change.

[0072] Furthermore, when the timing of reducing the flow rate of the fluid flowing through the heat exchanger 21E is the same as the timing of reducing the rotation speed of the compressor 11 and the opening of the expansion valve 13, the rotation speed of the compressor 11 and the opening of the expansion valve 13 may be reduced immediately after the target temperature is changed, for example, within 1 second after the change, and the flow rate of the fluid flowing through the heat exchanger 21E in the main flow path 21 may be reduced. In addition, the timing of reducing the rotation speed of the compressor 11 and the opening of the expansion valve 13 mentioned above, strictly speaking, of course, refers to the timing of inputting the control signal to the compressor 11 and the expansion valve 13. Furthermore, the timing of reducing the flow rate of the fluid flowing through the heat exchanger 21E of course refers to the timing of inputting the control signal to the three-way valve 25V.

[0073] Furthermore, in the preliminary stabilization control, as described above, the rotation speed of the compressor 11 is maintained at the state after being reduced in the initial control, and the opening degree of the expansion valve 13 is feedback controlled. Specifically, in the preliminary stabilization control, the rotation speed of the compressor 11 is maintained at the state of the set value after being reduced in the initial control, and the opening degree of the expansion valve 13 is feedback controlled.

[0074] In addition, in the present embodiment, after the initial control, when the prescribed conditions are met, the stable control is performed at the same time as the preliminary stable control or after the preliminary stable control. In this case, the control is transferred to the above-mentioned method (2) of the stable control. That is, in the preliminary stable control, the rotation speed of the compressor 11 is maintained in the state after being reduced in the initial control, and the opening of the expansion valve 13 is feedback controlled. Therefore, when the stable control is performed at the same time as the preliminary stable control or after the preliminary stable control, in the stable control, the rotation speed of the compressor 11 is maintained in the state after being reduced in the initial control, and the opening of the expansion valve 13 is feedback controlled based on the difference between the temperature of the fluid detected by the first temperature sensor 26 and the target temperature.

[0075] Next, the compressor control unit 307 obtains information on the control mode determined by the transfer determination unit 306. Then, in the stable control, the compressor control unit 307 controls the rotation speed of the compressor 11 by feedback control based on the difference between the temperature of the fluid detected by the first temperature sensor 26 and the target temperature in accordance with the above-mentioned method (1), or maintains the rotation speed of the compressor 11 at a constant value in accordance with the above-mentioned method (2). More specifically, in the case where the control is transferred from the above-mentioned method (1) to the above-mentioned method (2), the rotation speed of the compressor 11 at the time when the target temperature is reached in the above-mentioned method (1) is maintained in the above-mentioned method (2). Furthermore, in the case where the control is transferred to the above-mentioned method (2) in the stable control after the initial control, the rotation speed of the compressor 11 is maintained at the set value reduced in the initial control.

[0076] The compressor control unit 307 reduces the rotation speed of the compressor 11 to a set value derived from the target temperature during the initial control. In detail, when it is decided to transfer to the initial control because the target temperature of the fluid is set higher than the temperature of the fluid detected by the first temperature sensor 26 and the absolute value of the difference between the temperature of the fluid detected by the first temperature sensor 26 and the target temperature is greater than the temperature threshold, the compressor control unit 307 of the present embodiment determines a relationship based on the target temperature and derives the above-mentioned set value based on the determined relationship. The above-mentioned relationship becomes a different expression depending on the target temperature. And, in detail, the above-mentioned relationship specifies the relationship between the heat load for making the temperature of the fluid before flowing into the heat exchange unit 21E become the target temperature and the set value (rotation speed of the compressor 11). In more detail, the above-mentioned relationship is an expression for determining the set value based on the value of the heat load.

[0077] The compressor control unit 307 obtains the information of the heat load from the heat load calculation unit 305. Then, the compressor control unit 307 determines the above-mentioned setting value based on the target temperature, the heat load, and the relationship determined according to the target temperature. The information used by the compressor control unit 307 to derive the relationship is stored in the setting value information storage unit 311. Figure 3 The details of the relational expression used in this embodiment will be described.

[0078] As described above, the initial control is performed to improve the responsiveness of the temperature control compared with the feedback control when the difference between the current temperature of the fluid and the target temperature is relatively large. From this point of view, it is preferred that the difference between the rotation speed of the compressor 11 and the set value before the initial control is started is relatively large so that the refrigeration capacity is greatly reduced. Specifically, it is preferred that when the initial control is performed, the rotation speed of the compressor 11 is reduced by at least the rotation speed equivalent to the refrigeration capacity of 5Kw. This means that the refrigeration capacity corresponding to the refrigerant circulation amount discharged by the compressor 11 at the rotation speed corresponding to the difference between the rotation speed of the compressor 11 and the set value before the initial control is started is at least 5Kw.

[0079] Furthermore, the compressor control unit 307 maintains the rotation speed of the compressor 11 at the set value reduced in the initial control in the preliminary stabilization control. That is, the compressor control unit 307 does not make any changes in the initial control state. However, it is preferred that the compressor control unit 307, when obtaining the content that the control mode has shifted to the preliminary stabilization control from the shift determination unit 306, holds in advance a flag indicating that the current state is the preliminary stabilization control.

[0080] The expansion valve control unit 308 also obtains the information of the control mode determined by the transfer determination unit 306 in the same manner as the compressor control unit 307. Furthermore, the expansion valve control unit 308 always controls the opening degree of the expansion valve 13 by feedback control based on the difference between the temperature of the fluid detected by the first temperature sensor 26 and the target temperature during the stable control.

[0081] Furthermore, the expansion valve control unit 308 reduces the opening of the expansion valve 13 by a prescribed amount during the initial control. As described above, in the present embodiment, the prescribed amount is a constant value regardless of the target temperature. In detail, the expansion valve control unit 308 reduces the opening of the expansion valve 13 by an amount in a range of 5% to 10% from the current opening (at the time of the initial control transition). In more detail, the expansion valve control unit 308 of the present embodiment reduces the opening of the expansion valve 13 by 6.5% during the initial control. That is, for example, when the opening of the expansion valve 13 is 100% before the initial control, the opening of the expansion valve 13 is reduced to 93.5%.

[0082] In addition, although in the present embodiment, the opening of the expansion valve 13 is reduced in the initial control, it is also possible that the opening of the expansion valve 13 is not reduced in the initial control. However, the inventors of the present application have found through in-depth experiments that when the opening of the expansion valve 13 and the rotation speed of the compressor 11 are both reduced in the initial control, the responsiveness of reaching the target temperature is improved. There is no particular restriction on the reduction amplitude of the expansion valve 13 in the initial control, that is, the above-mentioned specified amount, but when the specified amount is too small, the improvement in responsiveness will not be significantly apparent, and when the specified amount is too large, the responsiveness may be impaired due to the rapid pressure change on the side of the refrigeration device 10. From these viewpoints, the inventors of the present application have found the following structure: the specified amount is set to an amount in the range of more than 5% and less than 10% of the opening, but the specified amount may also be other values.

[0083] Furthermore, the expansion valve control unit 308 switches to a state in which the opening of the expansion valve 13 is controlled by feedback control in the preliminary stable control. In addition, the feedback control for the rotation speed of the compressor 11 and the opening of the expansion valve 13 in the above-mentioned method (1) of the stable control described above, the feedback control for the opening of the expansion valve 13 in the above-mentioned method (2), and the feedback control for the opening of the expansion valve 13 in the preliminary stable control are PID controls. However, these feedback controls may also be P control, PI control, or PD control. In any feedback control, control is performed in such a way that the temperature of the fluid detected by the first temperature sensor 26 becomes the target temperature.

[0084] In addition, the valve mechanism control unit 309 also obtains the information of the control mode determined by the transfer determination unit 306 in the same manner as the compressor control unit 307 and the expansion valve control unit 308. In addition, the valve mechanism control unit 309 closes the bypass flow path 24 by means of the valve mechanism 25 during the stable control, thereby forming a state in which the fluid flows only in the main flow path 21. That is, during the stable control, a state is formed in which only the fluid after the temperature control by the evaporator 14 flows into the temperature control object T. In addition, the valve mechanism control unit 309 may also form a state in which the fluid flows in both the main flow path 21 and the bypass flow path 24 during the stable control. In this case, the valve mechanism control unit 309 maintains the ratio of the flow rate of the fluid flowing through the heat exchange unit 21E in the main flow path 21 to the flow rate of the fluid flowing through the bypass flow path 24 at a constant value.

[0085] Furthermore, during the initial operation control, the valve mechanism control unit 309 adjusts the valve mechanism 25 so as to reduce the flow rate of the fluid flowing through the heat exchange unit 21E in the main flow path 21 by a predetermined flow rate. Specifically, during the initial operation control, the valve mechanism 25 reduces the flow rate of the fluid flowing through the heat exchange unit 21E in the main flow path 21 by a predetermined flow rate, and increases the flow rate of the fluid flowing through the bypass flow path 24 by a predetermined flow rate.

[0086] In the present embodiment, the above-mentioned prescribed flow rate is a constant value regardless of the target temperature. Specifically, in the present embodiment, the above-mentioned prescribed flow rate is set to a range of 5% or more and 15% or less of the flow rate of the fluid flowing through the heat exchange section 21E in the main flow path 21 in the stable control. That is, in the initial control, the valve mechanism 25 is adjusted so that the flow rate of the fluid flowing through the heat exchange section 21E in the main flow path 21 is reduced by 5% or more and 15% or less from the current flow rate. More specifically, in the initial control of the present embodiment, the valve mechanism 25 is adjusted so that the flow rate of the fluid flowing through the heat exchange section 21E in the main flow path 21 is reduced by 10%.

[0087] The reason why the valve mechanism control unit 309 reduces the flow rate of the fluid circulating in the heat exchange unit 21E during the initial control is to strike a balance with the reduction in the refrigeration capacity of the evaporator 14 caused by the reduction in the rotation speed of the compressor 11. Here, when the reduction in the flow rate of the fluid circulating in the heat exchange unit 21E is small, the superheat of the refrigerant returning from the evaporator 14 to the compressor 11 is not sufficiently reduced. When the reduction is large, the risk of liquid returning to the compressor 11 increases. From these viewpoints, the inventors of the present application have adopted the following structure: in the initial control, the flow rate of the fluid circulating in the heat exchange unit 21E is reduced by more than 5% and less than 15%, for example, 10%. However, the reduction in such a flow rate is not particularly limited. In addition, the relationship between the opening of the three-way valve 25V and the flow rate change is predetermined, and the flow rate is adjusted according to this relationship.

[0088] Furthermore, the valve mechanism control unit 309 of the present embodiment controls the valve mechanism 25 to restore the flow rate of the fluid flowing through the heat exchange unit 21E in the main passage 21 to the flow rate before the temperature of the fluid detected by the first temperature sensor 26 reaches the target temperature after adjusting the valve mechanism 25 in the initial control so that the flow rate of the fluid flowing through the heat exchange unit 21E in the main passage 21 decreases. Specifically, the valve mechanism control unit 309 controls the valve mechanism 25 to restore the flow rate of the fluid flowing through the heat exchange unit 21E in the main passage 21 to the flow rate before the adjustment when the absolute value of the difference between the temperature of the fluid detected by the first temperature sensor 26 and the target temperature becomes equal to or less than a second predetermined value.

[0089] Here, in the present embodiment, as described above, after the rotation speed of the compressor 11 and the opening of the expansion valve 13 are reduced in the initial control, when the absolute value of the difference between the temperature of the fluid detected by the first temperature sensor 26 and the target temperature becomes less than the first prescribed value, the transfer determination unit 306 determines to transfer to the preliminary stabilization control. And, the second prescribed value is the same as the first prescribed value. Therefore, the valve mechanism control unit 309 substantially controls the valve mechanism 25 to restore the flow rate of the fluid flowing through the heat exchange unit 21E to the flow rate before adjustment while obtaining the information of the transfer to the preliminary stabilization control. In addition, the valve mechanism control unit 309 may not use the second prescribed value for determination, but may use the information of the transfer to the preliminary stabilization control as a trigger to control the valve mechanism 25 to restore the flow rate of the fluid flowing through the heat exchange unit 21E to the flow rate before adjustment.

[0090] The pump control unit 310 also acquires information on the target flow rate from the interface unit 301. The pump control unit 310 also controls the rotation speed of the pump so that the flow rate of the fluid determined based on the flow rate information from the flow rate sensor 28 matches the target flow rate.

[0091] As described above, the setting value information storage unit 311 stores information for deriving a relational expression used for the compressor control unit 307 to determine the setting value. In the present embodiment, as an example, the setting value information storage unit 311 stores a basic expression and a plurality of coefficient eigenvalues, the basic expression at least including a variable substituted into the heat load calculated by the heat load calculation unit 305 and a coefficient for increasing or decreasing the aforementioned variable, and the plurality of coefficient eigenvalues ​​are stored in advance corresponding to a plurality of target temperature candidate values. Furthermore, the relational expression used by the compressor control unit 307 is determined by substituting the coefficient eigenvalue determined by comparing the target temperature with the target temperature candidate value into the basic expression.

[0092] <Information for deriving relational expressions used in control>

[0093] Below, refer to Figure 3 , the concepts of the basic formula and coefficient eigenvalues ​​used when determining the relational expression in this embodiment are explained. Figure 3 1 is a conceptual diagram showing information held in the setting value information holding unit 311 of the control device 30 , that is, a basic formula and coefficient eigenvalues ​​of a relational formula for deriving the setting value used to determine the initial motion control. Figure 3"F=aX+c" in the formula corresponds to the basic formula. "X" in the basic formula corresponds to the variable that is substituted into the heat load calculated by the heat load calculation unit 305. On the other hand, "a" and "c" in the basic formula correspond to coefficients that increase or decrease the heat load as a variable. And, "F" corresponds to the speed as a set value. In addition, "F" can also be expressed by the frequency of the input voltage of the inverter that controls the rotation of the compressor 11. The speed (RPM) is determined by (120×(frequency of the input voltage)) / number of motor poles.

[0094] and, Figure 3 The coefficient-specific value table shown defines and holds the relationship between a plurality of target temperature candidate values ​​and coefficient-specific values ​​corresponding to the plurality of target temperature candidate values, the coefficient-specific values ​​being specific values ​​of the coefficient “a” and the coefficient “c”.

[0095] In the present embodiment, when a target temperature of the fluid higher than the temperature of the fluid detected by the first temperature sensor 26 is set, and the absolute value of the difference between the temperature of the fluid detected by the first temperature sensor 26 and the target temperature is greater than the temperature threshold, it is decided to transfer to the initial control. At this time, the compressor control unit 307 determines the coefficient inherent value based on the comparison between the target temperature and the above-mentioned target temperature candidate value, and substitutes the coefficient inherent value into the basic formula to determine the relationship. More specifically, when the target temperature is, for example, -30 degrees, the compressor control unit 307 determines the coefficient inherent value (a: "●□", c: "□□") corresponding to the target temperature candidate value of -30 degrees (refer to Figure 3 , and substitute it into the basic formula to determine the relational expression. In addition, there may be a case where there is no target temperature candidate value that is consistent with the target temperature. In this case, when the target temperature is a value between two consecutive target temperature candidate values, the coefficient inherent value of the target temperature candidate value that is closer to the target temperature may be selected. In addition, when the target temperature is a value between two consecutive target temperature candidate values, the coefficient inherent value may be determined by linear interpolation based on the two coefficient inherent values.

[0096] Then, after the relational expression is determined as described above, the compressor control unit 307 substitutes the heat load calculated by the heat load calculation unit 305 into the variable X to determine the rotation speed as a set value. Figure 4 1 is a graph showing a relationship between the heat load expressed by the relational expression and the rotation speed (set value) of the compressor 11. Figure 4 As shown in FIG. 1 , the relational expression used by the compressor control unit 307 is different depending on the target temperature. For example, when the target temperature is -30 degrees and the heat load is 2 kW, the set value of the target speed of the compressor 11 in the initial control is determined as follows according to the relational expression F30 corresponding to -30 degrees (°C): Figure 4And, for example, when the target temperature is -20 degrees and the heat load is 1Kw, according to the relationship F20 corresponding to -20 degrees (°C), the set value of the target speed of the compressor 11 in the initial control is determined as Figure 4 W in . When the same heat load is substituted into two different relational expressions among the plurality of relational expressions, the relationship holds that the setting value derived from the relational expression corresponding to the lower target temperature is greater than the setting value derived from the relational expression corresponding to the higher target temperature.

[0097] Furthermore, in the present embodiment, the setting value information holding unit 311 holds the basic formula and the coefficient eigenvalues, but the plurality of relational formulas corresponding to the plurality of target temperature candidate values ​​may be held in the setting value information holding unit 311. Furthermore, as described later, the compressor control unit 307 may refer to a setting value table that is set for each target temperature candidate value and that determines the relationship between the heat load and the rotation speed of the compressor 11 as the setting value, and determine the setting value used in the initial control based on the setting value table.

[0098] <Operation of temperature control system>

[0099] Figure 5 This is a flowchart for explaining an example of the operation of the temperature control system 1. Figure 5 , an example of the operation of the temperature control system 1 is described.

[0100] Figure 5 The action shown is started according to the generation of the operation start instruction. When the control device 30 generates the operation start instruction, first, in step S501, the target temperature of the fluid circulated by the fluid circulation device 20 is set. In detail, the target temperature of the fluid is set and maintained by the target temperature setting unit 302 of the control device 30. Here, the target temperature setting unit 302 obtains the information of the target temperature from the interface unit 301. At this time, although not shown in the figure, the information of the target flow rate of the fluid circulated by the fluid circulation device 20 is also sent from the interface unit 301 to the pump control unit 310, and the pump control unit 310 drives the pump 22. And at this time, the valve mechanism control unit 309 uses the valve mechanism 25 to gradually close the bypass flow path 24, forming a state in which the fluid flows only in the main flow path 21.

[0101] Next, in step S502, the control device 30 determines the control mode through the transfer determination unit 306. Here, based on the fact that it is the initial operation, the transfer determination unit 306 determines to first perform control in the stable control as the control mode. By transferring to the stable control, feedback control of the compressor 11 and the expansion valve 13 of the refrigeration device 10 begins.

[0102] Next, in step S503, the control device 30 acquires information on the temperature of the fluid detected by the first temperature sensor 26 through the temperature acquisition unit 303. That is, the control device 30 acquires information on the temperature of the fluid that flows on the downstream side of the heat exchange unit 21E of the main flow path 21 and flows out of the three-way valve 25V. In addition, step S503 corresponds to an example of a detection process (step).

[0103] Next, in step S504, the control device 30 determines whether the absolute value of the difference between the temperature of the fluid flowing on the downstream side of the heat exchange portion 21E of the main flow path 21 and the target temperature is below the determination threshold, or whether the current control state is the "return control" state, based on the information on the temperature of the fluid detected by the first temperature sensor 26. The above determination threshold is a relatively small value, such as 0.5 degrees. In addition, "return control" means that after the initial control, the stable control is achieved while the preparatory stable control is in progress or after the preparatory stable control. The action during the initial control will be described later. Figure 6 When returning to stable control after initial control, the process is as follows: Figure 6 Processing by Figure 5 The "A" of the control is transferred to step S503, and the processing starts from step S503. In this case, it is determined that it is a return control in step S504.

[0104] In step S504, when the absolute value of the difference between the temperature of the fluid flowing on the downstream side of the heat exchange section 21E of the main flow path 21 and the target temperature is not less than the determination threshold value, and when the control is not returned to the state, the process transfers to step S505. Then, in step S505, the control device 30 performs feedback control on the rotation speed of the compressor 11 through the compressor control section 307, and performs feedback control on the opening degree of the expansion valve through the expansion valve control section 308. Here, the compressor control section 307 controls the rotation speed of the compressor 11 by feedback control based on the difference between the temperature of the fluid detected by the first temperature sensor 26 and the target temperature so that the temperature of the fluid detected by the first temperature sensor 26 approaches the target temperature. The expansion valve control section 308 controls the opening degree of the expansion valve 13 by feedback control based on the difference between the temperature of the fluid detected by the first temperature sensor 26 and the target temperature so that the temperature of the fluid detected by the first temperature sensor 26 approaches the target temperature.

[0105] After step S505, the control device 30 determines in step S506 whether a change in the target temperature has occurred. If no change in the target temperature has occurred, the control device 30 determines in step S507 whether an operation stop instruction has been issued. If no operation stop instruction has been issued, the process returns to step S503, and the feedback control of the compressor 11 and the expansion valve 13 in step S505 is repeated until the absolute value of the difference between the temperature of the fluid flowing on the downstream side of the heat exchange portion 21E of the main flow path 21 and the target temperature is detected to be below the determination threshold in step S504.

[0106] Furthermore, when it is detected in step S504 that the absolute value of the difference between the temperature of the fluid flowing on the downstream side of the heat exchange section 21E of the main flow path 21 and the target temperature is below the judgment threshold, or when it is detected that the control state is returned, the control device 30 maintains the rotation speed of the compressor 11 at a constant value through the compressor control section 307 in step S508, and continues to perform feedback control of the opening of the expansion valve 13 by the expansion valve control section 308.

[0107] In step S508, when the absolute value of the difference between the temperature of the fluid flowing on the downstream side of the heat exchange section 21E and the target temperature after steps S504 and S505 becomes below the judgment threshold, the compressor control section 307 maintains the speed of the compressor 11 at the time when the absolute value of the difference between the temperature of the detected fluid and the target temperature is below the judgment threshold. On the other hand, when the processing is transferred to step S508 in the stable control (return control) after the initial control, the speed of the compressor 11 is maintained at the set value reduced in the initial control described later. In addition, in step S508, the compressor control section 307 controls the opening of the expansion valve 13 by feedback control based on the difference between the temperature of the fluid detected by the first temperature sensor 26 and the target temperature so that the temperature of the fluid detected by the first temperature sensor 26 is consistent with the target temperature.

[0108] Then, after step S508, the control device 30 determines in step S506 whether a change in the target temperature has occurred. And, if a change in the target temperature has not occurred, the control device 30 determines in step S507 whether an operation stop instruction has been generated. And, if an operation stop instruction has not been generated, the process returns to step S503, and then the feedback control of step S508 is performed through step S504. In the state where the process of step S508 is repeated, the temperature of the fluid is basically controlled to the target temperature. However, in the stable control (return control) after the initial control, when the transfer from step S508 to step S504 is repeated, the process is transferred to step S505 when a prescribed condition is satisfied. For example, even in the return control, when the absolute value of the difference between the temperature of the fluid flowing on the downstream side of the heat exchange part 21E in the main flow path 21 and the target temperature is detected to be less than the determination threshold value in step S504 for more than a prescribed number of times, the process is transferred to step S505. In this case, an appropriate temperature control state can be formed by finely adjusting the rotation speed of the compressor 11 .

[0109] Furthermore, when the target temperature is changed in step S506, the control device 30 determines whether the changed target temperature is in accordance with the information of the temperature of the fluid detected by the first temperature sensor 26 in step S509, through the transfer determination unit 306. When it is determined in step S509 that the target temperature is to be lowered, the process transfers to step S503, and feedback control toward the target temperature is performed.

[0110] On the other hand, when it is determined in step S509 that the target temperature is not to be lowered, in other words, when it is determined to be raised, the control device 30 determines in step S510 whether the target temperature meets the condition of being raised from the current temperature by more than the temperature threshold through the transition determination unit 306. Specifically, the transition determination unit 306 determines whether the absolute value of the difference between the temperature of the fluid detected by the first temperature sensor 26 and the target temperature is more than the temperature threshold.

[0111] Furthermore, when it is not determined in step S510 that the absolute value of the difference between the temperature of the fluid detected by the first temperature sensor 26 and the target temperature is greater than the temperature threshold, the process is transferred to step S503 to perform feedback control toward the target temperature. On the other hand, when it is determined in step S510 that the absolute value of the difference between the temperature of the fluid detected by the first temperature sensor 26 and the target temperature is greater than the temperature threshold, the transfer determination unit 306 decides to perform control based on initial control (step S511). Furthermore, when it is determined in step S507 that an operation stop instruction is generated, the operation of the temperature control system 1 is stopped (end). In addition, in step S510, it can also be determined whether the absolute value of the difference between the target temperatures before and after the change is greater than the temperature threshold, and when the aforementioned absolute value is greater than the temperature threshold, it can be decided to transfer to initial control (step S511).

[0112] Figure 6 This is a flowchart for explaining the initial operation control. Figure 6 , the operation when transferring to the initial motion control is described.

[0113] First, in step S601 , the control device 30 acquires information on the target temperature after the change from the target temperature setting unit 302 .

[0114] Next, the control device 30 determines a relational expression corresponding to the target temperature through the compressor control unit 307 in step S602. Figure 3 and Figure 4 As described, in this embodiment, the relational expression is determined based on the basic expression and the coefficient eigenvalues ​​maintained by the set value information maintenance unit 311. The determined relational expression defines the relationship between the heat load for making the temperature of the fluid before flowing into the heat exchange unit 21E the target temperature and the set value (the rotation speed of the compressor 11).

[0115] Next, the compressor control unit 307 obtains the heat load information from the heat load calculation unit 305 in step S603. The heat load is a heat load for making the temperature of the fluid before flowing into the heat exchange unit 21E reach the target temperature, in other words, a heat load for making the temperature of the fluid before temperature control reach the target temperature. The heat load calculation unit 305 calculates the heat load using the target temperature, the temperature information of the fluid from the second temperature sensor 27, and the flow rate information of the fluid from the flow rate sensor 28.

[0116] Then, in step S604, the set value of the rotation speed of the compressor 11 as the target rotation speed in the initial control, the amount of downward adjustment (prescribed amount) of the opening of the expansion valve 13, and the amount of downward adjustment (prescribed flow rate) of the fluid flowing through the heat exchange section 21E in the main flow path 21 are determined. Here, in the present embodiment, the set value of the rotation speed of the compressor 11 is determined by substituting the heat load acquired in step S603 into the relationship determined in step S602. On the other hand, in the present embodiment, the amount of downward adjustment (prescribed amount) of the opening of the expansion valve 13 and the amount of downward adjustment (prescribed flow rate) of the fluid flowing through the heat exchange section 21E are determined as constant values ​​regardless of the target temperature.

[0117] Then, after step S604, in the present embodiment, in step S605, the compressor control unit 307 determines whether the difference between the set value of the speed of the compressor 11 as the target speed in the initial control and the current speed is greater than the speed threshold. And, when it is determined that the difference between the set value determined in step S604 and the current speed is greater than the speed threshold, in step S606, the compressor control unit 307 rewrites the set value of the speed of the compressor 11 as the target speed in the initial control to a value obtained by subtracting the speed threshold from the current speed. Thereafter, the compressor control unit 307 again determines whether the difference between the set value of the speed of the compressor 11 as the target speed in the initial control and the current speed is greater than the speed threshold. And, when it is detected in step S605 that the difference between the set value of the speed of the compressor 11 as the target speed in the initial control and the current speed is not greater than the speed threshold, the process is transferred to step S607.

[0118] Then, in step S607, the compressor control unit 307 reduces the rotation speed of the compressor 11 to the set value determined as described above. Furthermore, the expansion valve control unit 308 reduces the opening of the expansion valve 13 by a specified amount. Furthermore, the valve mechanism control unit 309 adjusts the flow rate so that the flow rate of the fluid flowing through the heat exchange unit 21E in the main flow path 21 is reduced by a specified flow rate. In detail, the valve mechanism control unit 309 controls the valve mechanism 25 so that the flow rate of the fluid flowing through the heat exchange unit 21E in the main flow path 21 is reduced by a specified flow rate and the flow rate of the fluid flowing through the bypass flow path 24 is increased by a specified flow rate. In addition, steps S601 to S607 through steps S506, S509, and S510 correspond to an example of a control process (step).

[0119] After that, the control device 30 determines whether to transfer to the preliminary stable control through the transfer determination unit 306 in step S608. Specifically, when it is detected in step S608 that the absolute value of the difference between the temperature of the fluid detected by the first temperature sensor 26 and the target temperature becomes less than the first prescribed value (yes in step S608), the transfer determination unit 306 decides to transfer to the preliminary stable control (S610). On the other hand, when it is not detected in step S608 that the absolute value of the difference between the temperature of the fluid detected by the first temperature sensor 26 and the target temperature becomes less than the first prescribed value, the control device 30 determines in step S609 whether an operation stop instruction is generated. And, in the case where the operation stop instruction is not generated, the processing returns to step S608 to monitor whether the absolute value of the difference between the temperature of the fluid detected by the first temperature sensor 26 and the target temperature becomes less than the first prescribed value.

[0120] Furthermore, in step S610, when deciding to transfer to the preliminary stabilization control, the control device 30 maintains the rotation speed of the compressor 11 at the set value reduced in the initial control through the compressor control unit 307. Furthermore, in step S610, the control device 30 switches to a state in which the expansion valve control unit 308 controls the opening of the expansion valve 13 through feedback control.

[0121] Then, in step S611, the control device 30 determines whether the absolute value of the difference between the temperature of the fluid detected by the first temperature sensor 26 and the target temperature has become less than or equal to the second predetermined value through the valve mechanism control unit 309. When it is not detected in step S611 that the absolute value of the difference between the temperature of the fluid detected by the first temperature sensor 26 and the target temperature has become less than or equal to the second predetermined value, the control device 30 determines in step S612 whether an operation stop instruction has been generated. And, when an operation stop instruction has not been generated, the process returns to step S610, the feedback control of the opening degree of the expansion valve 13 is repeated, and the temperature monitoring of step S611 is repeated.

[0122] Furthermore, when it is detected in step S611 that the absolute value of the difference between the temperature of the fluid detected by the first temperature sensor 26 and the target temperature becomes less than the second predetermined value, the control device 30 controls the valve mechanism 25 through the valve mechanism control unit 309 in step S613 so that the flow rate of the fluid flowing through the heat exchange unit 21E in the main flow path 21 is restored to the flow rate before adjustment. At this time, the transfer determination unit 306 decides to transfer to the stable control (A). Then, the processing is changed from Figure 6 The "A" Figure 5 The process moves to step S503 by receiving "A" of step S509, and starts processing from step S503. If it is determined in step S609 or step S612 that an operation stop instruction has been issued, the operation of the temperature control system 1 is stopped (end).

[0123] Figure 7 The graphs are diagrams for explaining the operation of the components of the temperature control system 1 and the state of temperature control. Figure 7 The graphs show changes in the temperature of the fluid, the rotation speed of the compressor 11, the opening of the expansion valve 13, and the opening of the three-way valve 25V when the process shifts from the above-mentioned steady control → initial control → preliminary steady control → steady control. In each graph, the horizontal axis is the time axis. Figure 7 (a) shows how the temperature of the fluid flowing through the fluid circulation device 20 changes over time. Figure 7 (b) shows how the rotation speed of the compressor 11 changes with the passage of time (control mode). Figure 7 (c) shows how the opening degree of the expansion valve 13 changes with the passage of time (control mode). Figure 7 (d) shows how the opening degree of the three-way valve 25V (the opening degree toward the heat exchange unit 21E) changes with the passage of time (control mode).

[0124] Figure 7 The “old target temperature” shown in (a) is a target temperature of the fluid flowing through the fluid circulation device 20 set at the start of operation. Figure 7 St1 in the figure represents a stable control state. At this time, the feedback control method (1) of the compressor 11 and the expansion valve 13 is first performed, and then the rotation speed of the compressor 11 is kept constant and the expansion valve 13 is feedback controlled (2). Figure 7 In the method (1), method (2) corresponds to St1-2. In the method (1), a relatively large operating amount is input to the compressor 11 and the expansion valve 13. In the method (2), the rotation speed of the compressor 11 is constant, and the opening of the expansion valve 13 does not change significantly. The temperature of the fluid is basically controlled to the target temperature (old target temperature). In addition, in the stable control ST1, the pump control unit 310 controls the rotation speed of the pump so that the flow rate of the fluid determined based on the flow information from the flow sensor 28 is consistent with the target flow rate. Figure 7 In the stable control ST1 of (d), the three-way valve 25V gradually closes the bypass flow path 24 by means of the valve mechanism 25 , thereby forming a state in which the fluid flows only in the main flow path 21 . Figure 7 “100%” in (d) indicates a state in which the fluid flows only in the main flow path 21 .

[0125] and, Figure 7The "new target temperature" in the figure represents the target temperature after the change. The change to the new target temperature is performed at the moment indicated by the symbol Ev in the figure, and the initial control St2 is performed accordingly. In the initial control St2, the rotation speed of the compressor 11 is reduced to the set value R derived from the target temperature. Furthermore, in the initial control St2, the opening of the expansion valve 13 is reduced by a specified amount D. Furthermore, in the initial control St2, the valve mechanism 25 is adjusted so that the flow rate of the fluid flowing through the heat exchange part 21E is reduced by a specified flow rate F. In this initial control, the rotation speed of the compressor 11 is reduced to the set value R, the opening of the expansion valve 13 is reduced by a specified amount D, and the flow rate of the fluid flowing through the heat exchange part 21E is reduced by a specified flow rate F in the form of a linear function or a step input.

[0126] Then, according to the absolute value of the difference between the temperature of the fluid detected by the first temperature sensor 26 and the target temperature becoming less than the first specified value and less than the second specified value, in this embodiment, the state is transferred to the stable control St4 while transferring to the preliminary stable control St3. At this time, the flow rate of the fluid flowing through the heat exchange unit 21E is restored to the state before adjustment. And, in the stable control St4, the temperature of the fluid is controlled to the new target temperature. The inventors of the present application have confirmed that by performing the initial control when the target temperature is greatly increased as described above, the arrival time Tr can be greatly shortened.

[0127] The temperature control system 1 of the present embodiment described above comprises: a refrigeration device 10; a fluid circulation device 20, which includes a main flow path 21, and the main flow path 21 has a heat exchange part 21E between an inlet 21U and an outlet 21D, and the main flow path 21 allows the fluid received by the inlet 21U to flow toward the outlet 21D through the heat exchange part 21E, and the fluid circulation device 20 causes the fluid in the heat exchange part 21E to exchange heat with the refrigerant in the evaporator 14 of the refrigeration device 10; a first temperature sensor 26, which detects the temperature of the fluid circulating in the downstream side of the heat exchange part 21E of the main flow path 21; and a control device 30, which controls the refrigeration device 10 and the fluid circulation device 20. Furthermore, when a target temperature of the fluid is set that is higher than the temperature of the fluid detected by the first temperature sensor 26, the control device 30 performs the following initial control: the compressor 11 is controlled so that the rotation speed of the compressor 11 is reduced to a set value derived based on the target temperature, and the flow rate of the fluid flowing through the heat exchange section 21E in the main flow path 21 is reduced while, before, or after the control of the compressor 11.

[0128] In the temperature control system 1, when the target temperature of the fluid is raised, the rotation speed of the compressor 11 is reduced to a set value corresponding to the target temperature. In this case, the responsiveness of the control to achieve the refrigeration capacity of the evaporator 14 suitable for the target temperature can be improved compared to the case of feedback control. That is, in feedback control, the control operation amount of the compressor to achieve the target temperature is derived in stages through multiple calculations based on the temperature difference between the target temperature and the current temperature. Moreover, it is a measure to gradually bring the temperature of the fluid closer to the target temperature, so the responsiveness may not be good sometimes. In contrast, in the temperature control system 1, when the target temperature is set, the control operation amount of the compressor 11 is changed in the form of a linear function or a step input toward a single set value. Therefore, the responsiveness of the control to achieve the refrigeration capacity of the evaporator 14 suitable for the target temperature can be improved.

[0129] On the other hand, even when the target temperature is raised, the temperature of the fluid circulating through the fluid circulation device 20 does not change dramatically. Furthermore, when the rotation speed of the compressor 11 is dramatically reduced while the temperature of the fluid does not change or does not change dramatically, the operation of the compressor 11 may become unstable due to, for example, the superheat of the refrigerant flowing out of the evaporator 14 increases. In contrast, in the temperature control system 1, when the rotation speed of the compressor 11 is reduced, the valve mechanism 25 is controlled so that the flow rate of the fluid circulating through the heat exchange portion 21E is reduced, thereby making it possible to make the state of the refrigerant flowing out of the evaporator 14 appropriate. As a result, it is possible to suppress the operation of the compressor 11 from becoming unstable.

[0130] Therefore, according to the temperature control system 1, the responsiveness of the temperature control can be improved, and undesired influences on the operating state and the constituent devices can be suppressed.

[0131] Furthermore, the fluid circulation device 20 of the present embodiment further includes a valve mechanism 25 for adjusting the flow rate of the fluid flowing through the heat exchange portion 21E in the main flow path 21. With this configuration, the valve mechanism 25 can improve the responsiveness of the flow rate change.

[0132] In detail, the fluid circulation device 20 further includes a bypass flow path 24, which connects the upstream side portion and the downstream side portion of the heat exchange portion 21E of the main flow path 21, and allows the fluid received from the main flow path 21 to flow. In addition, the valve mechanism 25 adjusts the flow rate of the fluid flowing through the heat exchange portion 21E in the main flow path 21 and the flow rate of the fluid flowing through the bypass flow path 24. In addition, the control device 30 reduces the flow rate of the fluid flowing through the heat exchange portion 21E in the main flow path 21 and increases the flow rate of the fluid flowing through the bypass flow path 24 in the initial control by adjusting the valve mechanism 25. With this structure, by utilizing the bypass flow path 24, it is possible to suppress the pressure fluctuation of the fluid flowing through the fluid circulation device 20, and it is possible to improve the responsiveness of the flow rate change and the responsiveness of the temperature control.

[0133] In particular, in the initial operation control, by opening the bypass flow path 24 in the state of being closed by the valve mechanism 25, the flow rate of the fluid flowing through the heat exchange portion 21E in the main flow path 21 is reduced, and the flow rate of the fluid flowing through the bypass flow path 24 is increased. In addition, in the initial operation control, the flow rate of the fluid flowing through the heat exchange portion 21E in the main flow path 21 is reduced by 5% or more and 15% or less. With this structure, the state of the refrigerant flowing out of the evaporator 14 after heat exchange with the fluid can be stably and appropriately controlled.

[0134] Then, the control device 30 determines a relational expression based on the changed target temperature, and derives a set value of the rotation speed of the compressor 11 in the initial operation control based on the determined relational expression. Figure 3 and Figure 4 As described above, the control device 30 holds a basic formula and a coefficient eigenvalue table as information for determining a relational formula in the setting value information holding unit 311. The coefficient eigenvalue table specifies the relationship between a plurality of target temperature candidate values ​​and coefficient eigenvalues ​​corresponding to the plurality of target temperature candidate values. The control device 30 determines the coefficient eigenvalue based on the comparison between the target temperature and the target temperature candidate values, and determines the relational formula by substituting the coefficient eigenvalue into the basic formula.

[0135] With this configuration, the set value for deriving the rotation speed of the compressor 11 used in the initial operation control is determined based on the target temperature. As a result, a unique value can be used as the set value for the target temperature, thereby improving the responsiveness of the temperature control.

[0136] More specifically, when the target temperature is set, the control device 30 calculates the heat load for making the temperature of the fluid before flowing into the heat exchange unit 21E the target temperature. The relationship between the heat load and the set value is defined by a relational expression. The set value is determined based on the target temperature, the heat load, and the relational expression determined based on the target temperature.

[0137] In this structure, by specifying the relationship between the heat load and the rotation speed of the compressor 11 in the relational expression, a set value related to the rotation speed of the compressor 11 that can improve the responsiveness of reaching the target temperature can be set according to the heat load. As a result, it is possible to achieve an improvement in the responsiveness of the refrigeration capacity of the evaporator 14 that is suitable for the target temperature. In addition, the relational expression of this structure can be prepared by determining the relationship between the refrigeration capacity of the evaporator 14 and the rotation speed of the compressor 11 corresponding to the refrigeration capacity, and the refrigeration capacity of the evaporator 14 is used to control the fluid before flowing into the heat exchange part 21E to the target temperature while considering the presence or absence of the heat load and the size of the heat load.

[0138] Furthermore, in the present embodiment, the control device 30 holds a basic formula and a coefficient eigenvalue table as information for determining a relational formula in the setting value information holding unit 311, the coefficient eigenvalue table defining the relationship between a plurality of target temperature candidate values ​​and the coefficient eigenvalues ​​corresponding to the plurality of target temperature candidate values. Furthermore, the control device 30 determines the coefficient eigenvalue based on the comparison between the target temperature and the target temperature candidate values, and determines the relational formula by substituting the coefficient eigenvalue into the basic formula. Thus, the amount of information held internally can be suppressed.

[0139] As a modified example, the control device 30 may determine the set value used in the initial control based on a set value table that defines the relationship between the heat load set for each target temperature candidate value and the rotation speed of the compressor 11 as the set value. Figure 8 An example of a setting value table is shown. Figure 8 In the case of the setting value table shown in FIG. 1 , for example, when the target temperature is -20 degrees (°C), the element table T20 is selected. And, when the heat load is, for example, 1.5 kW, "◆△Hz" is selected. And, the rotation speed corresponding to "◆△Hz" is determined as the setting value. Figure 8 In FIG. 1 , the frequency of the input voltage of the inverter for controlling the rotation of the compressor 11 is shown in the setting value table, but the rotation speed of the compressor 11 may be stored in the setting value table.

[0140] Furthermore, in the present embodiment, the control device 30 also reduces the opening of the expansion valve 13 by a predetermined amount during the initial control. Under this structure, compared with the case where the opening of the expansion valve 13 is maintained constant, the state of the refrigerant flowing out of the evaporator 14 after heat exchange with the fluid can be significantly optimized. As a result, the operation of the compressor 11 can be effectively prevented from becoming unstable. Moreover, as a result of ensuring the stability of the operation, the responsiveness of the temperature control can also be improved. Here, specifically, the control device 30 reduces the opening of the expansion valve 13 by an amount within a range of more than 5% and less than 10% from the current opening. In this way, by reducing the opening of the expansion valve 13 to a range that is neither too small nor too large, the operation of the compressor 11 can be effectively prevented from becoming unstable.

[0141] Furthermore, the control device 30 of the present embodiment reduces the rotation speed of the compressor 11 and the opening of the expansion valve 13 in the initial control, and then shifts to the preliminary stabilization control. In the preliminary stabilization control, the control device 30 adjusts the opening of the expansion valve 13 by feedback control based on the difference between the temperature of the fluid detected by the first temperature sensor 26 and the target temperature, and maintains the rotation speed of the compressor 11 in the state reduced in the initial control. With this structure, by performing the preliminary stabilization control accompanied by feedback control after the initial control that emphasizes responsiveness, good responsiveness to the target temperature and good control accuracy can be ensured.

[0142] Furthermore, after the control device 30 adjusts the valve mechanism 25 in the initial control so that the flow rate of the fluid flowing through the heat exchange portion 21E in the main flow path 21 is reduced, before the temperature of the fluid detected by the first temperature sensor 26 reaches the target temperature, the control device 30 controls the valve mechanism 25 so that the flow rate of the fluid flowing through the heat exchange portion 21E in the main flow path 21 is restored to the flow rate before the adjustment. With this structure, it is possible to avoid a situation where the responsiveness is reduced due to the temperature of the fluid exceeding the target temperature.

[0143] Furthermore, the control device 30 performs the initial control when the absolute value of the difference between the temperature of the fluid detected by the first temperature sensor 26 and the target temperature is greater than the temperature threshold. When the increase from the current temperature of the fluid to the target temperature is relatively small, the initial control may not be effective from the perspective of responsiveness. From this perspective, by using the temperature threshold to determine whether to perform the initial control, not only when the target temperature is greatly increased, but also the overall system can ensure good responsiveness of temperature control.

[0144] <Modification>

[0145] The fluid circulation device 20 of the embodiment described above includes the bypass flow path 24 that connects the upstream side portion and the downstream side portion of the heat exchange portion 21E of the main flow path 21 and allows the fluid received from the main flow path 21 to flow. Fig. 9 and Fig.10 2 and 3 show the modified examples of the structure of the fluid circulation device 20 which is different from the above-mentioned embodiment. Fig. 9 and Fig.10 Among the components of the temperature control system included in the modified example described below, the same components as those in the above-described embodiment are denoted by the same reference numerals, and duplicate description is omitted.

[0146] exist Fig. 9In the modified example shown, the fluid circulation device 20 does not include the bypass flow path 24. In this structure, when the flow rate of the fluid flowing through the heat exchange portion 21E in the main flow path 21 is reduced during the initial operation control, the discharge amount of the pump 22 is reduced. In addition, the following structure can also be adopted: a throttle valve is provided upstream of the heat exchange portion 21E, and the opening of the throttle valve is reduced during the initial operation control. Fig.10 In the illustrated modification, the bypass flow path 24 connects a portion on the upstream side of the heat exchange portion 21E of the main flow path 21 to a portion further upstream than the portion.

[0147] Fig.11 This is a flowchart for explaining the operation of a temperature control system of a modified example. In the above embodiment, when a target temperature of the fluid higher than the temperature of the fluid detected by the first temperature sensor 26 is set and the absolute value of the difference between the temperature of the fluid detected by the first temperature sensor 26 and the target temperature is greater than the temperature threshold, it is decided to transfer to the initial operation control. Fig.11 In the operation of the modified example shown, when the target temperature is adjusted downward or upward and the absolute value of the difference between the temperature of the fluid detected by the first temperature sensor 26 and the target temperature is greater than the temperature threshold, it is decided to shift to the initial control. That is, in the above-mentioned embodiment, the initial control is performed when the target temperature is greatly increased, but in this modified example, the initial control is also performed when the target temperature is greatly decreased.

[0148] Fig.11 The processing of steps S501 to S508 in the operation shown is the same as Figure 5 The same treatment is performed. Fig.11 In the operation in step S506, when it is determined that a change in the target temperature has occurred, the control device 30 determines in step S510R whether the target temperature meets the condition of being adjusted upward or downward from the current temperature by a temperature threshold. Specifically, the transfer determination unit 306 determines whether the absolute value of the difference between the temperature of the fluid detected by the first temperature sensor 26 and the target temperature is above the temperature threshold. Furthermore, when it is determined in step S510R that the target temperature meets the condition of being adjusted upward or downward from the current temperature by a temperature threshold, the transfer determination unit 306 decides to transfer to the initial control in step S511. In addition, in Fig.11 In progress, not in progress Figure 5 Step S509 (determination process of whether the target temperature is lowered) is shown.

[0149] Fig.12 It is from Fig.11 This is a flowchart to explain the operation when the operation is transferred to the initial operation control. Fig.12 In the action, Figure 6Similarly, the control device 30 first obtains the target temperature information from the target temperature setting unit 302 in step S601. Then, the control device 30 determines the relationship corresponding to the target temperature through the compressor control unit 307 in step S602. In step S602, for example, when the target temperature is adjusted from -20 degrees to -30 degrees, the selection Figure 4 In addition, in step S602, you can also use Figure 8 The set value table shown is used instead of the relational expression.

[0150] After the relational expression is determined in step S602, the compressor control unit 307 obtains the heat load information from the heat load calculation unit 305 in step S603. The heat load is a heat load for making the temperature of the fluid before flowing into the heat exchange unit 21E reach the target temperature, in other words, a heat load for making the temperature of the fluid before temperature control reach the target temperature.

[0151] Furthermore, in step S604R, the set value of the rotation speed of the compressor 11 as the target rotation speed in the initial control, the adjustment amount of the opening of the expansion valve 13, and the adjustment amount of the flow rate of the fluid flowing through the heat exchange section 21E in the main flow path 21 are determined. Here, in the present embodiment, the set value of the rotation speed of the compressor 11 is determined by substituting the heat load acquired in step S603 into the relational expression determined in step S602. On the other hand, in the present modification, the adjustment amount of the opening of the expansion valve 13 and the adjustment amount of the flow rate of the fluid flowing through the heat exchange section 21E are also determined as constant values ​​regardless of the target temperature. However, in the case of increasing the target temperature, the decrease amount of the opening of the expansion valve 13 and the decrease amount of the flow rate of the fluid flowing through the heat exchange section 21E are determined. Furthermore, in the case of decreasing the target temperature, the rotation speed of the compressor 11 is increased, and the increase amount of the opening of the expansion valve 13 and the increase amount of the fluid flowing through the heat exchange section 21E are determined.

[0152] That is, in this modification, when the target temperature is lowered, in the initial operation control, the rotation speed of the compressor 11 is increased, the flow rate of the fluid flowing through the heat exchange section 21E in the main flow path 21 is increased, and the opening of the expansion valve 13 is also increased. However, in this case, the opening of the expansion valve 13 may not be increased. Furthermore, when the flow rate of the fluid flowing through the heat exchange section 21E is increased in the initial operation control, the valve mechanism 25 may be adjusted so that the flow rate of the fluid flowing through the heat exchange section 21E in the main flow path 21 is increased by 5% or more and 15% or less from the current flow rate. In this case, in the stable control, the state in which the fluid flows through both the main flow path 21 and the bypass flow path 24 may be formed in advance, and in the initial operation control, the bypass flow path 24 may be closed and the flow rate of the fluid flowing through the heat exchange section 21E may be increased. Furthermore, when the opening of the expansion valve 13 is increased in the initial operation control, the opening of the expansion valve 13 may be increased by an amount in the range of 5% or more and 10% or less from the current opening (at the time of the initial operation control transition).

[0153] The processing after step S604R is the same as Figure 6 However, when the target temperature is lowered, in step S607 , the rotation speed of the compressor 11 is increased as described above, the flow rate of the fluid flowing through the heat exchange portion 21E in the main flow path 21 is increased, and the opening degree of the expansion valve 13 is also increased.

[0154] Fig.13 It shows that Fig.11 and Fig.12 FIG. 1 is a graph for explaining the operation of the components of the temperature control system and the state of temperature control. Fig.13 The figure shows the changes in the temperature of the fluid, the rotation speed of the compressor 11, the opening of the expansion valve 13, and the opening of the three-way valve 25V when the process changes from stable control to initial control to preliminary stable control to stable control. Fig.13 The operation when the process is transferred from the steady state control to the initial operation control due to the decrease in the target temperature is shown. In each graph, the horizontal axis is the time axis. Fig.13 (a) shows how the temperature of the fluid flowing through the fluid circulation device 20 changes over time. Fig.13 (b) shows how the rotation speed of the compressor 11 changes with the passage of time (control mode). Fig.13 (c) shows how the opening degree of the expansion valve 13 changes with the passage of time (control mode). Fig.13 (d) shows how the opening degree of the three-way valve 25V (the opening degree toward the heat exchange unit 21E) changes with the passage of time (control mode).

[0155] Fig.13The “old target temperature” shown in (a) is a target temperature of the fluid flowing through the fluid circulation device 20 set at the start of operation. Fig.13 St1 in the figure represents a stable control state. At this time, the control of the feedback control method (1) of the compressor 11 and the expansion valve 13 is first performed, and then the control of the feedback control method (2) of the expansion valve 13 is performed while keeping the rotation speed of the compressor 11 constant.

[0156] and, Fig.13 The "new target temperature" in the figure indicates the target temperature after the change. The change to the new target temperature is performed at the moment indicated by the symbol Ev in the figure, and the initial control St2 is performed accordingly. In the initial control St2, the rotation speed of the compressor 11 is increased to the set value R derived from the target temperature. Furthermore, in the initial control St2, the opening of the expansion valve 13 is increased by a specified amount D. Furthermore, in the initial control St2, the valve mechanism 25 is adjusted so that the flow rate of the fluid flowing through the heat exchange part 21E is increased by a specified flow rate F. In this initial control, the rotation speed of the compressor 11 is increased to the set value R, the opening of the expansion valve 13 is increased by a specified amount D, and the flow rate of the fluid flowing through the heat exchange part 21E is increased by a specified flow rate F in the form of a linear function or a step input.

[0157] Then, when the absolute value of the difference between the temperature of the fluid detected by the first temperature sensor 26 and the target temperature becomes less than the first predetermined value and less than the second predetermined value, in this example, the state is transferred to the stable control St4 while transferring to the preliminary stable control St3. And, in the stable control St4, the temperature of the fluid is controlled to the new target temperature. In the above-mentioned processing, the arrival time Tr can be greatly shortened.

[0158] In use Figures 11 to 13 In the temperature control system described, the control device 30 performs the following initial control when the target temperature of the fluid is changed: the compressor 11 is controlled so that the rotation speed of the compressor 11 is changed to a set value derived from the changed target temperature (the changed target temperature), and the flow rate of the fluid flowing through the heat exchange portion 21E in the main flow path 21 is changed simultaneously with, before, or after the control of the compressor 11. With this structure, the responsiveness of the temperature control when the target temperature is lowered can also be improved.

[0159] and, Fig.14 This is a flow chart for explaining the operation of the temperature control system of another modified example. Fig.11 In the modified example shown, whether to transfer to the initial operation control is determined based on the target temperature. Fig.14In the operation of the modified example shown, whether to shift to the initial control is determined based on the change in temperature of the fluid before entering the heat exchange unit 21E in the main flow path 21. Specifically, whether to shift to the initial control is determined based on the magnitude of the change in temperature of the fluid detected by the second temperature sensor 27.

[0160] Fig.14 The processing of steps S501 to S505 and step S508 in the operation shown is the same as Figure 5 Same processing. And, in this modification, in step S506R after feedback control is performed through step S505 and step S508, the control device 30 determines whether the temperature of the fluid before flowing into the heat exchange part 21E (the temperature of the fluid before temperature adjustment) has changed. The determination of step S506R is performed by comparing the temperature of the fluid detected by the second temperature sensor 27 at different detection times. More specifically, for example, it can be that the temperature of the fluid detected by the second temperature sensor 27 during the processing of step S506R is compared with the temperature of the fluid detected by the second temperature sensor 27 at a time earlier than the processing. The above-mentioned temperature of the fluid detected by the second temperature sensor 27 at a time earlier than the processing can be a moving average. The above-mentioned temperature of the fluid detected by the second temperature sensor 27 during the processing can be a moving average. And, when no change in the temperature of the fluid is detected in step S506R, the processing returns to step S503 and the feedback control is repeated.

[0161] On the other hand, when a change in the temperature of the fluid is detected in step S506R, in step S510R2, the control device 30 determines whether the absolute value of the difference in temperature of the fluid before and after the change is greater than the threshold value. The temperature difference is obtained based on the temperature of the fluid compared in step S506R. And, when it is determined in step S510R2 that the absolute value of the difference in temperature of the fluid before and after the change is greater than the threshold value, it is decided to transfer to the initial control (step S511). And, in the initial control, the same Fig.12 The same process as shown in Fig.12 The target temperature currently set is obtained by obtaining the target temperature obtained in step S601, and then the set value of the rotation speed of the compressor 11 is determined according to the heat load based on the temperature of the fluid detected by the second temperature sensor 27. That is, in this modified example, when the temperature of the fluid detected by the second temperature sensor 27 changes, the process for maintaining the target temperature is performed as soon as possible through the initial control. In addition, in step S510R2, it may also be determined that when the heat load is above a specified value, it is transferred to the initial control.

[0162] In use Fig.14In the temperature control system described, when the temperature of the fluid before flowing into the heat exchange section 21E changes, the control device 30 performs the following initial control: the compressor 11 is controlled so that the rotation speed of the compressor 11 is changed to a set value derived according to the temperature of the changed fluid (in detail, the heat load calculated according to the temperature of the changed fluid), and the flow rate of the fluid flowing through the heat exchange section 21E in the main flow path 21 is changed at the same time as the control of the compressor 11 or before or after the control. For example, when the temperature of the fluid before flowing into the heat exchange section 21E increases, the rotation speed of the compressor 11 increases, and the flow rate of the fluid flowing through the heat exchange section 21E increases. When the temperature of the fluid before flowing into the heat exchange section 21E decreases, the rotation speed of the compressor 11 decreases, and the flow rate of the fluid flowing through the heat exchange section 21E decreases. With this structure, when the temperature of the fluid returned from the temperature control object T changes significantly, the responsiveness of the temperature control for maintaining the target temperature can be improved.

[0163] and, Fig.15 This is a diagram for explaining an application example of a temperature control system of one embodiment or a modified example. Fig.15 In the embodiment, the temperature control system 1 is connected to the etching device 7 as the temperature control object T. Fig.15 The etching device of the embodiment includes an electrostatic chuck 71. The fluid after temperature control from the temperature control system 1 returns to the temperature control system 1 through the electrostatic chuck 71. A chip 72 is held on the electrostatic chuck 71. The electrostatic chuck 71 is connected to the inlet 21U and the outlet 21D of the main flow path 21 of the temperature control system 1 via the flow path inside the etching device. The etching device also includes an internal temperature sensor 73 that detects the temperature of the fluid flowing out of the electrostatic chuck 71 inside the device. Strictly speaking, the temperature control object T in this example is the electrostatic chuck 71 or the chip 72 of the etching device 7.

[0164] In addition, use Fig.14 The described action can be performed according to the temperature change of the fluid detected by the internal temperature sensor 73. That is, it can be determined whether to perform the initial control according to the temperature of the fluid detected by the internal temperature sensor 73. In detail, it can be determined whether to perform the initial control according to the temperature of the fluid located in the etching device 7 after heat exchange with the electrostatic chuck 71 in the etching device 7 as an external device and before flowing into the heat exchange part 21E detected by the internal temperature sensor 73. In addition, the internal temperature sensor 73 can also detect the temperature of the inside or outside surface of the electrostatic chuck 71. And, in Fig.15In the example of , the temperature control system 1 integrally has an external device, namely, an etching device 7, which is a temperature control object T, but the temperature control system 1 may also be integrated with other external devices. For example, the temperature control system 1 may also be integrated with other semiconductor manufacturing devices such as a resist processing device, inspection devices such as a semiconductor tester, and molding devices including molds outside the semiconductor field. In such other structures, it may also be determined whether to perform initial control based on the temperature detected by the element corresponding to the internal temperature sensor 73 of the external device.

[0165] As mentioned above, although embodiment and modification of this invention were described, this invention is not limited to the embodiment mentioned above, Various changes can be added to the said embodiment and modification.

Claims

1. A temperature control system, comprising: A refrigeration device comprising a compressor, a condenser, an expansion valve and an evaporator, wherein the refrigerant flowing out of the compressor returns to the compressor after passing through the condenser, the expansion valve and the evaporator in sequence; a fluid circulation device including a main flow path, the main flow path having a heat exchange portion between an inlet and an outlet, the main flow path allowing a fluid received by the inlet to flow toward the outlet through the heat exchange portion, the fluid circulation device causing the fluid in the heat exchange portion to exchange heat with the refrigerant in the evaporator; as well as a control device for controlling the refrigeration device and the fluid circulation device, When the target temperature of the fluid is changed or the temperature of the fluid before flowing into the heat exchange section is changed, the control device performs the following initial control: the compressor is controlled to change the speed of the compressor to a set value derived from the changed target temperature or the changed temperature of the fluid, and the flow rate of the fluid flowing through the heat exchange section in the main flow path is changed simultaneously with, before or after the control of the compressor.

2. The temperature control system according to claim 1, wherein: In the initial operation control, when the rotation speed of the compressor is reduced, the flow rate of the fluid flowing through the heat exchange portion in the main flow path is reduced.

3. The temperature control system according to claim 2, wherein: When the target temperature is changed to a temperature higher than the temperature of the fluid detected by a temperature sensor that detects the temperature of the fluid flowing through a portion of the main flow path on the downstream side of the heat exchange section, the control device reduces the rotation speed of the compressor in the initial control.

4. The temperature control system according to claim 1, wherein: In the initial operation control, when the rotation speed of the compressor is increased, the flow rate of the fluid flowing through the heat exchange portion in the main flow path is increased.

5. The temperature control system according to claim 1, wherein: The fluid circulation device further includes a valve mechanism that adjusts a flow rate of the fluid flowing through the heat exchange portion in the main flow path.

6. The temperature control system according to claim 5, wherein: The fluid circulation device further includes a bypass flow path connecting a portion on the upstream side of the heat exchange portion of the main flow path and a portion on the downstream side thereof, through which the fluid received from the main flow path flows. The valve mechanism adjusts the flow rate of the fluid flowing through the heat exchange portion in the main flow path and the flow rate of the fluid flowing through the bypass flow path. The control device reduces the flow rate of the fluid flowing through the heat exchange section in the main flow path and increases the flow rate of the fluid flowing through the bypass flow path by adjusting the valve mechanism during the initial control, or increases the flow rate of the fluid flowing through the heat exchange section in the main flow path and reduces the flow rate of the fluid flowing through the bypass flow path.

7. The temperature control system according to any one of claims 1 to 6, wherein: The control device determines a relational expression or a table based on the target temperature after the change or the target temperature set when the temperature of the fluid before flowing into the heat exchange part changes, and derives the set value based on the determined relational expression or the table.

8. The temperature control system according to claim 7, wherein: The control device calculates a heat load for making the temperature of the fluid before flowing into the heat exchange unit reach the target temperature when the target temperature is changed. The relational expression or the table specifies the relationship between the heat load and the set value, The set value is determined based on the target temperature, the heat load, and the relational expression or the table determined according to the target temperature.

9. The temperature control system according to claim 2, wherein: When the rotation speed of the compressor is reduced during the initial operation control, the control device also reduces the opening degree of the expansion valve by a predetermined amount.

10. The temperature control system according to claim 4, wherein: When the rotation speed of the compressor is increased during the initial operation control, the control device also increases the opening degree of the expansion valve by a predetermined amount.

11. The temperature control system according to claim 9 or 10, wherein: When changing the opening degree of the expansion valve in the initial control, the control device decreases or increases the opening degree of the expansion valve by an amount in a range of 5% to 10% from the current opening degree.

12. The temperature control system according to claim 9, wherein: The control device reduces the rotation speed of the compressor and the opening degree of the expansion valve in the initial control and then shifts to the preliminary stabilization control when the target temperature is changed to a temperature higher than the temperature of the fluid detected by the temperature sensor detecting the temperature of the fluid flowing in the portion on the downstream side of the heat exchange section in the main flow path. In the preliminary stabilization control, the control device adjusts the opening of the expansion valve through feedback control based on the difference between the temperature of the fluid detected by the temperature sensor and the target temperature, thereby maintaining the rotation speed of the compressor in the state reduced in the initial start control.

13. The temperature control system according to claim 12, wherein: After the rotation speed of the compressor and the opening degree of the expansion valve are reduced in the initial control, the control device shifts to the preliminary stabilization control when the absolute value of the difference between the temperature of the fluid detected by the temperature sensor and the target temperature becomes less than a first predetermined value.

14. The temperature control system according to claim 12, wherein: The feedback control is P control, PI control, PD control or PID control.

15. The temperature control system according to claim 12, wherein: After the control device adjusts the flow rate in the initial control so that the flow rate of the fluid flowing through the heat exchange section in the main flow path is reduced, and before the temperature of the fluid detected by the temperature sensor reaches the target temperature, the control device adjusts the flow rate so that the flow rate of the fluid flowing through the heat exchange section in the main flow path is restored to the flow rate before the adjustment.

16. The temperature control system according to claim 15, wherein: After the control device adjusts the flow rate so that the flow rate of the fluid flowing through the heat exchange section in the main flow path is reduced, when the absolute value of the difference between the temperature of the fluid detected by the temperature sensor and the target temperature becomes below a second prescribed value, the control device adjusts the flow rate so that the flow rate of the fluid flowing through the heat exchange section in the main flow path is restored to the flow rate before adjustment.

17. The temperature control system according to claim 15, wherein: The control device switches to the preliminary stable control and adjusts the flow rate so that the flow rate of the fluid flowing through the heat exchange part in the main flow path returns to the flow rate before the adjustment, and then switches to the stable control. In the stable control, the control device adjusts the opening of the expansion valve through feedback control based on the difference between the temperature of the fluid detected by the temperature sensor and the target temperature, thereby maintaining the speed of the compressor in the state after being reduced in the initial control, or controls the speed of the compressor and the opening of the expansion valve through feedback control based on the difference between the temperature of the fluid detected by the temperature sensor and the target temperature.

18. The temperature control system according to claim 6, wherein: In the initial control, when the flow rate of the fluid flowing through the heat exchange section in the main flow is reduced and the flow rate of the fluid flowing through the bypass flow path is increased by adjusting the valve mechanism, the flow rate of the fluid flowing through the heat exchange section in the main flow is reduced and the flow rate of the fluid flowing through the bypass flow path is increased by opening the bypass flow path which was closed by the valve mechanism.

19. The temperature control system according to claim 1, wherein: In the initial operation control, the flow rate of the fluid flowing through the heat exchange portion in the main flow path is reduced by 5% or more and 15% or less.

20. The temperature control system according to claim 1, wherein: The control device performs the initial control when the absolute value of the difference between the temperature of the fluid detected by the temperature sensor detecting the temperature of the fluid flowing in the downstream side of the heat exchange section in the main flow path and the target temperature or the absolute value of the difference between the target temperatures before and after the change is greater than the temperature threshold.

21. The temperature control system according to claim 1, wherein: When the initial operation control is performed, the rotation speed of the compressor is changed by a rotation speed corresponding to at least a refrigeration capacity of 5 kW.

22. The temperature control system according to claim 1, wherein: When the rotation speed of the compressor is to be reduced to the set value in the initial control, if the difference between the set value and the current rotation speed is greater than a rotation speed threshold, a value obtained by subtracting the rotation speed threshold from the current rotation speed is set as the set value.

23. The temperature control system according to claim 8, wherein: The control device holds a basic formula and a plurality of coefficient eigenvalues, the basic formula at least including a variable to be substituted into the heat load and a coefficient to increase or decrease the variable, and the plurality of coefficient eigenvalues ​​are held in advance corresponding to a plurality of target temperature candidate values. The relational expression is determined by substituting the coefficient eigenvalue determined by comparing the target temperature with the target temperature candidate value into the basic expression.

24. The temperature control system according to claim 1, wherein: The temperature control system further includes an external device that receives the fluid from the outflow port, performs heat exchange with the fluid, and causes the fluid after the heat exchange to flow into the inflow port. When the temperature of the fluid changes after the heat exchange in the external device and before flowing into the heat exchange part, the control device performs the following initial control: the compressor is controlled to change the rotation speed of the compressor to a set value derived according to the changed temperature of the fluid, and the flow rate of the fluid flowing through the heat exchange part in the main flow path is changed simultaneously with, before or after the control of the compressor.

25. A temperature control method, which is a temperature control method of a temperature control system, The temperature control system has: A refrigeration device comprising a compressor, a condenser, an expansion valve and an evaporator, wherein the refrigerant flowing out of the compressor returns to the compressor after passing through the condenser, the expansion valve and the evaporator in sequence; and A fluid circulation device, comprising a main flow path, the main flow path having a heat exchange portion between an inlet and an outlet, the main flow path allowing a fluid received by the inlet to flow toward the outlet through the heat exchange portion, the fluid circulation device causing the fluid in the heat exchange portion to exchange heat with the refrigerant in the evaporator, in, The temperature control method comprises the following steps: a detection step of detecting a change in a target temperature of the fluid or a change in a temperature of the fluid before flowing into the heat exchange portion; as well as A control process, when a change in the target temperature of the fluid or a change in the temperature of the fluid before flowing into the heat exchange part is detected through the detection process, controls the compressor to change the speed of the compressor to a set value derived from the changed target temperature or the changed temperature of the fluid, and changes the flow rate of the fluid flowing through the heat exchange part in the main flow path while controlling the compressor or before or after the control.

26. A control device, which is a control device for controlling a temperature control system, The temperature control system has: A refrigeration device comprising a compressor, a condenser, an expansion valve and an evaporator, wherein the refrigerant flowing out of the compressor returns to the compressor after passing through the condenser, the expansion valve and the evaporator in sequence; and A fluid circulation device, comprising a main flow path, the main flow path having a heat exchange portion between an inlet and an outlet, the main flow path allowing a fluid received by the inlet to flow toward the outlet through the heat exchange portion, the fluid circulation device causing the fluid in the heat exchange portion to exchange heat with the refrigerant in the evaporator, in, When the target temperature of the fluid is changed or the temperature of the fluid before flowing into the heat exchange section is changed, the control device performs the following initial control: the compressor is controlled to change the speed of the compressor to a set value derived from the changed target temperature or the changed temperature of the fluid, and the flow rate of the fluid flowing through the heat exchange section in the main flow path is changed simultaneously with, before or after the control of the compressor.

27. A computer program for controlling a refrigeration device and a fluid circulation device, the refrigeration device comprising a compressor, a condenser, an expansion valve and an evaporator, the refrigerant flowing out of the compressor returns to the compressor after passing through the condenser, the expansion valve and the evaporator in sequence, the fluid circulation device comprising a main flow path, the main flow path having a heat exchange portion between an inlet and an outlet, the main flow path allowing a fluid received by the inlet to flow toward the outlet through the heat exchange portion, the fluid circulation device causing the fluid in the heat exchange portion to exchange heat with the refrigerant in the evaporator, in, The computer program is used to make the computer execute the following steps: a detection step of detecting a change in a target temperature of the fluid or a change in the temperature of the fluid before flowing into the heat exchange portion; and A control step, when a change in the target temperature of the fluid or a change in the temperature of the fluid before flowing into the heat exchange section is detected through the detection step, the compressor is controlled to change the rotation speed of the compressor to a set value derived from the changed target temperature or the changed temperature of the fluid, and the flow rate of the fluid flowing through the heat exchange section in the main flow path is changed simultaneously with, before or after the control of the compressor.

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