Loading and unloading machine and conveying system provided with loading and unloading machine

By designing a loading and unloading machine including a base part, a support part and a moving part, the problem of complex and high cost of transporting heavy block cassettes in the prior art is solved, and efficient left-right movement and space saving of the cassettes are achieved.

CN119490068APending Publication Date: 2025-02-21ENTIS TECH CO LTD
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Patent Information

Application Number
CN202311549702.0
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Priority Date
2023-08-14
Filing Date
2023-11-21
Publication Date
2025-02-21

AI Technical Summary

Technical Problem

The prior art requires the use of large and expensive multi-joint robots when transporting heavy block cassettes in automated processes, and the delivery system is complex, making it difficult to achieve efficient cassette movement and space savings.

Method used

A loading and unloading machine is designed, including a base portion, a support portion and a moving portion. A plurality of cassettes can be placed on the support portion, and the support portion is moved to the left and right through the moving portion, thereby realizing the left and right movement of the cassettes. The loading and unloading machine is also equipped with a guide part and a control part for controlling the loading and unloading of the cassette to ensure that the cassette can be moved in the same direction without moving the loading and unloading machine.

Benefits of technology

It realizes that the heavy block cassettes are safely moved left and right without the need for large multi-joint robots, saving space and improving the efficiency and automation of the transmission system.

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Abstract

The invention relates to a conveying system and a loading and unloading machine for the conveying system. The loading and unloading machine comprises a base part; a support part supporting a plurality of cassettes provided so as to accommodate at least one object therein; and a moving portion that moves the support portion in a first direction between the base portion and the support portion, the cartridge is placed on the support portion so as to be movable in the first direction, and a portion of the support portion on which the cartridge is placed is disposed so as to be movable in the first direction relative to both ends of the base portion in the first direction by the moving portion. A predetermined distance is extended in the first direction.
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Citation Information

Patent Citations

  • Method for thinning a semiconductor wafer

    KR1020180096121A