Heating equipment for vacuum coating

Abstract

The invention relates to the technical field of vacuum coating, and discloses a heating device for vacuum coating, the heating device mainly comprises a fixing shell, a fixing plate and a heat conduction assembly, the top end of the fixing shell is provided with a fixing cavity, and the fixing shell is movably sleeved with the heat conduction assembly through the lower half part of the fixing cavity; and the fixed shell is movably sleeved with the fixed plate through the upper half part of the fixed cavity. Through the shape arrangement of the fixing shell and the fixing plates, the size of the space where the heat conduction assembly is located is effectively limited, so that the shape of the heat conduction assembly is limited, the possibility of bending deformation of the heat conduction assembly is reduced, meanwhile, through the arrangement of the heat conduction rings and the high-temperature-resistant particles, the shape of the multiple heat conduction plates is effectively limited, and the heat conduction efficiency is improved. The possibility of bending deformation of the heat-conducting plate is further reduced, so that the contact between the heat-conducting plate and the heating wire is sufficient and stable, the heat of the heating wire is sufficiently transferred to the substrate by the heat-conducting plate and the like, and the preheating effect of the substrate is enhanced.

Description

Technical Field

[0001] The present application relates to the technical field of vacuum coating, and in particular to a heating device for vacuum coating. Background Art

[0002] Vacuum coating technology refers to a surface treatment method that uses physical or chemical means to deposit a layer of special-purpose film on the surface of a workpiece under a vacuum environment. Generally, vacuum coating technology is divided into two categories, one is physical vapor deposition, also known as PVD, and the other is chemical vapor deposition, also known as CVD. The corresponding vacuum coating machine includes a studio, an exhaust system, an air intake system, a power supply system, a control system, etc. When in use, the substrate is fixed, and the reaction gas is input through the air intake system. The reaction gas bombards the target material under the action of the electric field, so that the atoms on the surface of the target material are sputtered and deposited on the surface of the substrate, thereby achieving the purpose of coating.

[0003] In order to remove water vapor and organic matter and improve coating efficiency, existing vacuum coating machines preheat the substrate before coating. The corresponding heating equipment includes heating wires and heat conducting plates, etc. The heat conduction of the heating wires is used to make the heat conducting plates heat up, and the heat radiation of the heat conducting plates is transferred to the substrate, thereby achieving the purpose of preheating the substrate.

[0004] However, the existing heating equipment still has some defects during use: first, the material of the existing heat conduction plate is often aluminum to play a role in corrosion resistance, but due to the soft texture of aluminum, the aluminum heat conduction plate will bend and deform after long-term use, resulting in unstable contact between the heating wire and the heat conduction plate, thereby affecting the heating effect on the substrate; secondly, the overall thermal emissivity of the existing heating plate is consistent. When this heating equipment is vacuum coated and heated, the heat radiated to each position of the substrate is roughly the same, but the heat dissipation rate of the edge area of ​​the large-sized substrate is faster than that of the middle area. When the radiated heat is basically the same, the difference in heat dissipation rate will cause a large difference in the overall pre-heating temperature of the substrate, thereby affecting the coating effect on the substrate. Summary of the invention

[0005] The present application proposes a heating device for vacuum coating, which has the advantages of limiting the deformation of the heat conducting plate, enhancing the contact stability between the heating wire and the heat conducting plate, increasing the heat radiation of the edge area of ​​the substrate, and enhancing the uniformity of the overall preheating temperature of the substrate, so as to solve the problem that the heating device has poor heating effect on the substrate and leads to poor coating effect.

[0006] To achieve the above-mentioned purpose, the present application adopts the following technical solution: A heating device for vacuum coating, comprising:

[0007] A fixing mechanism, a substrate is placed on the top of the fixing mechanism, and is used to provide a placement space for the substrate. The fixing mechanism includes a fixing shell, a fixing plate, and a heat-conducting component. A fixing cavity is opened on the top of the fixing shell. The fixing shell is movably connected with the heat-conducting component through the lower half of the fixing cavity, and the fixing shell is movably connected with the fixing plate through the upper half of the fixing cavity. The top of the heat-conducting component is fitted with the bottom of the fixing plate. The fixing plate is used to limit the space where the heat-conducting component is located, so as to limit the shape of the heat-conducting component.

[0008] A heat-conducting component is used to provide preheating for a substrate, and the heat-conducting component includes a heat-conducting plate, a heating wire and a heat-conducting ring. The heat-conducting plate is composed of a circular plate and a plurality of circular rings, and the circular plate and the circular rings are arranged concentrically. A heating wire is movably sleeved in the middle between two adjacent heat-conducting plates. Heat-conducting rings are arranged above and below the heating wire, and the heat-conducting ring is located between two adjacent heat-conducting plates. High-temperature resistant heat-conducting particles are filled between the heating wire and the heat-conducting ring. The heat-conducting ring and the heat-conducting particles are used to limit the shape of the heat-conducting plate, so that the contact between the heat-conducting plate and the heating wire is sufficient and stable.

[0009] Furthermore, the fixing shell is made of a high temperature resistant material, the fixing plate is circular, and the fixing plate is made of copper.

[0010] Furthermore, the heat conducting plate is made of aluminum, and the heat conducting ring is made of copper.

[0011] Furthermore, it also includes:

[0012] The working mechanism is used to create environmental conditions for coating, and the fixing mechanism is arranged at the inner bottom end of the working mechanism;

[0013] The sputtering mechanism is used to provide a material source for coating, and the sputtering mechanism is arranged at the inner top of the working mechanism.

[0014] Furthermore, the working mechanism includes:

[0015] A working shell, one side of which is provided with an opening;

[0016] A working door, wherein the working housing is movably hinged to the working door through an opening;

[0017] A vacuum pumping assembly, one end of which is fixedly connected to the lower half of the working shell;

[0018] An inflatable component, one end of which is fixedly connected to the upper half of the working shell, the number of the inflatable components is four, and the four inflatable components are evenly arranged around the working shell.

[0019] Furthermore, the sputtering mechanism comprises:

[0020] A target material, the top end of which is fixedly connected to the inner top end of the working shell;

[0021] A magnetic pole assembly is arranged between the target material and the working shell.

[0022] Furthermore, the fixing mechanism further comprises:

[0023] A clamping assembly, wherein the top of the fixed shell is fixedly provided with a clamping assembly, the number of the clamping assemblies is four, and the four clamping assemblies are evenly arranged around the fixed shell for stably clamping the substrate;

[0024] A movable component, wherein a fixing groove is provided on a side of the fixing plate, a fixing hole is provided on a side of the fixing shell, the fixing groove of the fixing plate corresponds to the fixing hole of the fixing shell, the movable component is movably engaged with the fixing groove and the fixing hole, and the movable component is located near the edge of the substrate, the number of the movable components is several, and the several movable components are evenly arranged around the fixing plate, so as to increase the heat radiation to the edge area of ​​the substrate;

[0025] A telescopic component is movably provided outside the fixed shell to provide a power source for the movement of the movable component.

[0026] Furthermore, the clamping assembly comprises:

[0027] A clamping member, the bottom end of which is fixedly connected to the top end of the fixed shell;

[0028] A threaded rod, a threaded hole is formed in the middle of the clamping piece, and the clamping piece is threadedly sleeved with the outer wall of the threaded rod through the threaded hole;

[0029] A clamping plate is fixedly connected to one end of the threaded rod located above the fixing plate.

[0030] Furthermore, the activity components include:

[0031] A movable part, wherein the movable part is in an inverted T-shape, and the bottom end of the movable part is in contact with the top end of the heat conducting component;

[0032] The movable ball has a movable groove at the bottom end of the movable piece, and the movable piece is movably sleeved with the movable ball through the movable groove. A vertical spring is arranged in the movable groove, and the vertical spring is located between the movable piece and the movable ball.

[0033] Furthermore, the telescopic assembly includes:

[0034] Telescopic cylinders, the number of which is two and the two telescopic cylinders are arranged opposite to each other, and the telescopic cylinders are fixedly sleeved on the wall surface of the working shell;

[0035] A telescopic rod, one end of which is movably connected to the telescopic cylinder;

[0036] The telescopic member, the other end of the telescopic rod is fixedly connected to the outer wall of the telescopic member, and the inner wall of the telescopic member is fixedly connected to the movable member.

[0037] The beneficial effects of the present invention are as follows:

[0038] The present application provides a heating device for vacuum coating, which arranges a heat-conducting component and a fixing plate in a fixing shell, and the fixing plate is located at the top of the heat-conducting component. Since the heat-conducting component is composed of a heat-conducting plate, a heating wire and a heat-conducting ring, a plurality of heat-conducting plates of different sizes are nested in layers, and a heating wire and a heat-conducting ring are arranged between two adjacent heat-conducting plates, and high-temperature resistant heat-conducting particles are arranged between the heating wire and the heat-conducting ring. Therefore, the shape setting of the fixing shell and the fixing plate is used to effectively limit the size of the space in which the heat-conducting component is located, so as to limit the shape of the heat-conducting component and reduce the possibility of bending and deformation of the heat-conducting component. At the same time, the setting of the heat-conducting ring and the high-temperature resistant particles is used to effectively limit the shape of a plurality of heat-conducting plates, and further reduce the possibility of bending and deformation of the heat-conducting plates, so that the contact between the heat-conducting plate and the heating wire is sufficient and stable, and the heat of the heating wire is fully transferred to the substrate by the heat-conducting plate, etc., thereby enhancing the preheating effect of the substrate.

[0039] By opening a fixing groove on the fixing plate, and the fixing plate is movably connected with the movable component through the fixing groove, since the movable component is in contact with the heat-conducting component and the movable component is located near the edge of the substrate, the movable component can increase the heat radiation to the edge area of ​​the substrate, thereby enhancing the uniformity of the overall preheating temperature of the substrate, making the temperature of the edge area of ​​the large-sized substrate the same as that of the middle area, and effectively improving the subsequent coating effect on the substrate. In addition, the setting of the movable component effectively fixes the position of the fixing plate, fully improves the stability of the setting of the fixing plate, and ensures that the spatial size of the heat-conducting component will not change.

[0040] By arranging a telescopic component outside the fixed shell and connecting the telescopic component with the movable component, the telescopic component is deformed by the telescopic cylinder and the telescopic rod, and the movable component is effectively pushed to move back and forth in the fixed groove of the fixed plate. In the preheating stage, the movable telescopic component and the movable component can not only mix the heat in the working mechanism and improve the temperature uniformity in the working shell, but also exert pressure on the heat-conducting component, so that the heat-conducting ring and the heat-conducting particles further promote the full contact between the heating wire and the heat-conducting plate. In the coating stage, the movable telescopic component and the movable component promote the atoms sputtered by the magnetic pole component to move and fully mix, so that the atoms are evenly deposited on the substrate surface. BRIEF DESCRIPTION OF THE DRAWINGS

[0041] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art are briefly introduced below. Obviously, the drawings in the following description are only embodiments of the present invention. For those of ordinary skill in the art, other drawings can be obtained based on the provided drawings without creative work:

[0042] Figure 1 It is a three-dimensional structural diagram of the whole of the present invention;

[0043] Figure 2 It is an overall three-dimensional structural diagram of the working shell section in the present invention;

[0044] Figure 3 It is a cross-sectional three-dimensional structural diagram of the whole of the present invention;

[0045] Figure 4 For the present invention Figure 3 A magnified structural diagram;

[0046] Figure 5 For the present invention Figure 3 The enlarged structure diagram at B;

[0047] Figure 6 It is a three-dimensional structural diagram of the fixing mechanism in the present invention;

[0048] Figure 7 It is a three-dimensional structural diagram of the telescopic component and the movable component in the present invention;

[0049] Figure 8 It is a three-dimensional structural diagram of the fixing shell, the fixing plate, the heat conducting component and the clamping component in the present invention;

[0050] Fig. 9 It is a three-dimensional structural diagram of the fixed shell, the fixed plate, the heat-conducting component and the movable component in the present invention;

[0051] Fig.10 It is a cross-sectional three-dimensional structural diagram of the fixed shell, the fixed plate, the heat-conducting component and the movable component in the present invention;

[0052] Fig.11 It is a bottom-up stereoscopic structural diagram of the fixed plate and the movable assembly in the present invention;

[0053] Fig.12 It is a three-dimensional structural diagram of the fixed shell and the heat conducting component in the present invention;

[0054] Fig.13 is a three-dimensional structural diagram of the heat conduction component in the present invention;

[0055] Fig.14 It is a top-view cross-sectional three-dimensional structural diagram of the heat-conducting component in the present invention;

[0056] Fig.15 It is a three-dimensional structural diagram of the heat conducting plate in the present invention;

[0057] Fig.16 It is a three-dimensional structural diagram of the heating wire and the heat-conducting ring in the present invention.

[0058] In the figure: 1. working mechanism; 11. working shell; 12. working door; 13. vacuum assembly; 14. inflation assembly; 2. sputtering mechanism; 21. target material; 22. magnetic pole assembly; 3. fixing mechanism; 31. fixing shell; 32. fixing plate; 4. clamping assembly; 41. clamping part; 42. threaded rod; 43. clamping plate; 5. telescopic assembly; 51. telescopic cylinder; 52. telescopic rod; 53. telescopic part; 6. movable assembly; 61. movable part; 62. movable ball; 7. heat conduction assembly; 71. heat conduction plate; 72. heating wire; 73. heat conduction ring. DETAILED DESCRIPTION

[0059] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0060] Embodiment 1, a heating device for vacuum coating, comprising a working mechanism 1, such as Figure 1-Figure 2 The inner bottom of the working mechanism 1 is provided with a fixing mechanism 3, and the inner top of the working mechanism 1 is provided with a sputtering mechanism 2, specifically:

[0061] Working mechanism 1, the working mechanism 1 includes a working housing 11, such as Figure 1 An opening is provided on one side of the working housing 11 for convenient access to the substrate. The working housing 11 is hinged to the working door 12 through the opening. The staff can open and close the opening of the working housing 11 through the working door 12. A sealing gasket is provided between the working housing 11 and the working door 12, which can effectively improve the tightness between the working housing 11 and the working door 12, thereby improving the sealing of the working mechanism 1. Figure 1-Figure 3One end of the vacuum component 13 is fixedly connected to the lower half of the working shell 11. When the vacuum component 13 is started, the air in the working shell 11 can be extracted, so that the environment in the working shell 11 tends to be vacuum, thereby preparing for the filling of reaction gas during coating. One end of the inflation component 14 is fixedly connected to the upper half of the working shell 11. There are four inflation components 14, and the four inflation components 14 are evenly arranged around the working shell 11. After the environment in the working shell 11 tends to be vacuum, the inflation component 14 is used to fill the working shell 11 with reaction gas, such as argon, so that the working mechanism 1 can create environmental conditions for coating, so that the coating is in a vacuum environment.

[0062] like Figure 2-Figure 3 The sputtering mechanism 2 is used to provide a material source for coating. The sputtering mechanism 2 includes a target material 21. The top of the target material 21 is fixedly connected to the inner top of the working shell 11, and a magnetic pole assembly 22 is arranged between the target material 21 and the working shell 11. Thus, the sputtering mechanism 2 can provide a material source for coating. Specifically, when a DC power supply is connected to the working shell 11, the magnetic pole assembly 22 generates an electric field, so that the reaction gas bombards the target material 21 under the action of the electric field, knocks out the atoms on the surface of the target material 21, and sputters toward the substrate, and finally deposits on the surface of the substrate.

[0063] like Figure 2-Figure 4 , Figure 6 , Figure 8-Figure 16 , a fixing mechanism 3, and a substrate is placed on the top of the fixing mechanism 3, which is used to provide a placement space for the substrate, such as Fig.12 The fixing mechanism 3 includes a fixing shell 31, and the fixing shell 31 is made of a high temperature resistant material so that the fixing shell 31 is not easily deformed by high temperature. The bottom end of the fixing shell 31 is fixedly connected with a support column so that the fixing shell 31 is stably arranged. The top end of the fixing shell 31 is provided with a fixing cavity, such as Fig.10 The fixed shell 31 is movably connected to the heat-conducting component 7 through the lower half of the fixed cavity, and the fixed shell 31 is movably connected to the fixed plate 32 through the upper half of the fixed cavity. The top of the heat-conducting component 7 is fitted with the bottom of the fixed plate 32. The fixed plate 32 is circular and made of copper, so that the fixed plate 32 is not easy to deform and can enhance the limiting extrusion of the heat-conducting component 7 during heat conduction. The fixed plate 32 is used to limit the space where the heat-conducting component 7 is located, so as to limit the shape of the heat-conducting component 7 and reduce the possibility of bending and deformation of the heat-conducting component 7.

[0064] like Figure 4 , Fig.10 , Figure 13-Figure 16 , a heat conducting component 7 is used to provide preheating for the substrate, and the heat conducting component 7 includes a heat conducting plate 71, such as Fig.15The heat conducting plate 71 is composed of a circular plate and a plurality of circular rings, and the circular plate and the circular rings are arranged concentrically. Since the whole heat conducting plate 71 is transformed into a plurality of separated heat conducting plates 71, when only a single heat conducting plate 71 is deformed, the deformation of the single heat conducting plate 71 has a low influence on the overall heat conducting effect, thereby reducing the influence caused by the bending deformation of the heat conducting plate 71 and improving the service life of the heat conducting plate 71. The heat conducting plate 71 is made of aluminum, and the thickness between the inner and outer rings of the heat conducting plate 71 is relatively thick, which can be used for heat conduction, such as Fig.16 A heating wire 72 is movably sleeved in the middle between two adjacent heat conducting plates 71, which can be used to generate heat. Heat conducting rings 73 are provided above and below the heating wire 72, and the heat conducting ring 73 is located between the two adjacent heat conducting plates 71. The heat conducting ring 73 is made of copper, and the thickness between the inner and outer circles of the heat conducting ring 73 is relatively thin, which can be used to limit the shape of the heat conducting plate 71. It should be noted that for the components of the heat conducting component 7, the proportion of aluminum material in the heat conducting component 7 is greater than that of copper material, thereby reducing the cost. High-temperature resistant heat conducting particles are filled between the heating wire 72 and the heat conducting ring 73, which are used to limit the shape of the heat conducting plate 71 and to conduct heat. Therefore, the heat conducting ring 73 and the heat conducting particles are used to limit the shape of the heat conducting plate 71, reduce the possibility of bending and deformation of the heat conducting plate 71, and make the contact between the heat conducting plate 71 and the heating wire 72 sufficient and stable.

[0065] Embodiment 2, based on embodiment 1, the fixing mechanism 3 further includes:

[0066] like Figure 6 , Figure 8 , a clamping assembly 4, a clamping assembly 4 is fixedly arranged at the top of the fixed shell 31, the number of the clamping assembly 4 is four, and the four clamping assemblies 4 are evenly arranged around the fixed shell 31, for stably clamping the substrate, and the clamping assembly 4 includes a clamping member 41, such as Figure 8 The bottom end of the clamping member 41 is fixedly connected to the top end of the fixed shell 31, a threaded hole is opened in the middle of the clamping member 41, and the clamping member 41 is threadedly sleeved with the outer wall of the threaded rod 42 through the threaded hole, and one end of the threaded rod 42 located above the fixed plate 32 is fixedly connected with a clamping plate 43. When the substrate needs to be installed, the substrate is placed in the middle of the fixed plate 32, and then the threaded rod 42 is rotated to make the clamping plate 43 fit the edge of the substrate, so that the four clamping components 4 can stably clamp the substrate. When the substrate needs to be taken out, the threaded rod 42 is rotated in the opposite direction to make the clamping plate 43 away from the substrate, thereby facilitating the removal of the substrate.

[0067] like Figure 3-Figure 4 , Figure 6-Figure 7 , Figure 9-11, a movable component 6, a fixing groove is provided on the side of the fixing plate 32, a fixing hole is provided on the side of the fixing shell 31, the fixing groove of the fixing plate 32 corresponds to the fixing hole of the fixing shell 31, the movable component 6 is movably engaged with the fixing groove and the fixing hole, and the movable component 6 is located near the edge of the substrate, the number of movable components 6 is several, and the several movable components 6 are evenly arranged around the fixing plate 32, so as to increase the heat radiation to the edge area of ​​the substrate. It should be noted that the number and position of the movable components 6 should be set without interfering with the clamping component 4 clamping the substrate, and the movable component 6 includes a movable part 61, such as Figure 7 , Fig.11 The movable part 61 is in an inverted T-shape, and the bottom end of the movable part 61 is in contact with the top end of the heat-conducting component 7, so that the heat in the heat-conducting component 7 can be transferred to the movable part 61, so that the movable part 61 can heat the edge area of ​​the substrate, thereby making the overall temperature of the large-sized substrate uniform. Since the movable part 61 is connected to the fixed shell 31 and the fixed plate 32 at the same time, the stability of the fixed plate 32 in the fixed shell 31 can be improved, ensuring that the spatial size of the heat-conducting component 7 remains unchanged. It should be noted that the shape of the top end of the movable part 61 can be adaptively changed according to needs, such as changing the upper half of the movable part 61 from a vertical rod to a plate with a high outside and a low inside, so that the atoms can be fully sputtered on the substrate.

[0068] Embodiment 3, based on embodiment 2, the fixing mechanism 3 further includes:

[0069] like Figure 2-Figure 3 , Figure 5-Figure 7 The telescopic component 5 is provided outside the fixed shell 31 and is used to provide a power source for the movement of the movable component 6. The telescopic component 5 includes a telescopic cylinder 51, such as Figure 7 The number of telescopic cylinders 51 is two, and the two telescopic cylinders 51 are arranged opposite to each other. The telescopic cylinders 51 are fixedly sleeved on the wall of the working shell 11, one end of the telescopic rod 52 is movably connected to the telescopic cylinder 51, and the other end of the telescopic rod 52 is fixedly connected to the outer wall of the telescopic member 53, and the inner wall of the telescopic member 53 is fixedly connected to the movable member 61. The shape of the telescopic member 53 is annular, and the telescopic member 53 is composed of a number of rhombus components connected end to end, and the rhombus component can be telescopically deformed. When the telescopic cylinder 51 pushes the telescopic rod 52 to move in the direction close to the fixing mechanism 3, it can effectively push the telescopic member 53 to contract, thereby driving the movable component 6 to approach the substrate. When the telescopic cylinder 51 pushes the telescopic rod 52 to move in the direction away from the fixing mechanism 3, it can effectively push the telescopic member 53 to expand, thereby driving the movable component 6 away from the substrate. Thus, the telescopic component 5 can reciprocate and retract to realize the reciprocating movement of the movable component 6. It should be noted that the distance that the telescopic cylinder 51 pushes the telescopic rod 52 to move is controllable, thereby ensuring that the movable component 6 does not hit the edge of the substrate, thereby improving the protection of the substrate.

[0070] like Figure 3-Figure 4 , Figure 6-Figure 7 , Figure 9-11 , the movable assembly 6, the movable assembly 6 also includes a movable ball 62, such as Figure 4 , Figure 10-11 A movable groove is provided at the bottom end of the movable part 61, and the movable part 61 is movably connected to the movable ball 62 through the movable groove. A vertical spring is provided in the movable groove, and the vertical spring is located between the movable part 61 and the movable ball 62. When the movable part 61 moves, the movable ball 62 will exert pressure on the heat-conducting ring 73 under the elastic force of the vertical spring, so that the heat-conducting ring 73 is stably clamped between the two heat-conducting plates 71, and the heat-conducting particles fully fill the space between the heat-conducting plates 71, the heating wire 72 and the heat-conducting ring 73, thereby further ensuring that the contact between the heat-conducting plate 71 and the heating wire 72 is stable and sufficient.

[0071] The working principle of the method of the present invention is as follows:

[0072] When installing the substrate, first open the working door 12 and place the substrate in the middle of the fixed plate 32. Then use the clamping assembly 4 to clamp and fix the substrate. At the same time, start the telescopic assembly 5 and push the movable assembly 6 to be located near the edge of the substrate. Finally, close the working door 12 and start the vacuum assembly 13 to evacuate the working shell 11 so that the environment inside the working shell 11 tends to be vacuum.

[0073] When preheating the substrate, the heat conducting component 7 is energized to make the heating wire 72 generate heat. Since the heat conducting plate 71, the heat conducting particles and the heat conducting ring 73 are in full contact with the heating wire 72, the heat of the heating wire 72 is conducted out. Since the fixing plate 32 is fully fitted with the heat conducting component 7, the fixing plate 32 generates heat and radiates heat to the substrate placed thereon, so that the substrate is heated and water vapor is effectively removed. In this process, since the bottom end of the movable component 6 is fully fitted with the top end of the heat conducting component 7 and the movable component 6 is located near the edge of the substrate, the movable component 6 can increase the heat radiation to the edge area of ​​the substrate, thereby enhancing the uniformity of the overall preheating temperature of the substrate, so that the large-scale The temperature of the edge area of ​​the inch-long substrate is the same as that of the middle area, which effectively improves the subsequent coating effect on the substrate. At the same time, the telescopic cylinder 51 is started, so that the telescopic cylinder 51 slowly drives the telescopic rod 52 to move back and forth, so that the telescopic part 53 reciprocates to expand and contract, thereby realizing the reciprocating movement of the movable component 6. At this time, the moving telescopic component 5 and the movable component 6 effectively disturb the heat around the fixing mechanism 3, so that the temperature in the working shell 11 is quickly and evenly distributed. In addition, the moving movable part 61 and the movable ball 62 will apply pressure to the top of the heat-conducting component 7, effectively promoting stable connection and sufficient contact between the various parts in the heat-conducting component 7, thereby realizing sufficient heat conduction of the heat-conducting component 7.

[0074] When coating the substrate, the working door 12 is started, the reaction gas is input into the working shell 11, and then the magnetic pole assembly 22 is energized to generate an electric field, so that the reaction gas bombards the target material 21 under the action of the electric field, so that atoms are sputtered from the surface of the target material 21 and deposited on the surface of the magnetic pole assembly 22. In this process, the telescopic cylinder 51 is started, so that the telescopic cylinder 51 drives the telescopic rod 52 to move back and forth, so that the telescopic part 53 reciprocates to expand and contract, thereby realizing the reciprocating movement of the movable component 6, effectively disturbing the sputtered atoms above the substrate, so that the atoms are fully mixed and pushed to the top of the substrate, so that the atoms are evenly deposited on the surface of the substrate, and the coating effect is further improved.

[0075] When disassembling the substrate, the working door 12 is opened, and the clamping assembly 4 and the movable assembly 6 are restored to their original state, so that the substrate is no longer restricted by the clamping assembly 4 and the movable assembly 6, and the substrate can be taken out at this time.

[0076] The above description of the disclosed embodiments enables one skilled in the art to implement or use the present invention. Various modifications to these embodiments will be apparent to one skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention will not be limited to the embodiments shown herein, but rather to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A heating device for vacuum coating, characterized in that: include: A fixing mechanism (3), wherein a substrate is placed at the top of the fixing mechanism (3) for providing a placement space for the substrate, the fixing mechanism (3) comprising a fixing shell (31), a fixing plate (32) and a heat-conducting component (7), the top of the fixing shell (31) being provided with a fixing cavity, the fixing shell (31) being movably sleeved with the heat-conducting component (7) through the lower half of the fixing cavity, and the fixing shell (31) being movably sleeved with the fixing plate (32) through the upper half of the fixing cavity, the top of the heat-conducting component (7) being fitted with the bottom of the fixing plate (32), and the fixing plate (32) being used to limit the space where the heat-conducting component (7) is located, so as to limit the shape of the heat-conducting component (7); A heat conducting component (7) is used for providing preheating for a substrate. The heat conducting component (7) comprises a heat conducting plate (71), a heating wire (72) and a heat conducting ring (73). The heat conducting plate (71) is composed of a circular plate and a plurality of circular rings, and the circular plate and the circular rings are arranged concentrically. A heating wire (72) is movably sleeved in the middle between two adjacent heat conducting plates (71). Heat conducting rings (73) are arranged above and below the heating wire (72), and the heat conducting ring (73) is located between two adjacent heat conducting plates (71). High temperature resistant heat conducting particles are filled between the heating wire (72) and the heat conducting ring (73). The heat conducting ring (73) and the heat conducting particles are used to restrict the shape of the heat conducting plate (71) so that the contact between the heat conducting plate (71) and the heating wire (72) is sufficient and stable.

2. The heating device for vacuum coating according to claim 1, characterized in that: The fixing shell (31) is made of a high temperature resistant material, the fixing plate (32) is circular, and the fixing plate (32) is made of copper.

3. The heating device for vacuum coating according to claim 2, characterized in that: The heat conducting plate (71) is made of aluminum, and the heat conducting ring (73) is made of copper.

4. The heating device for vacuum coating according to claim 3, characterized in that: Also includes: The working mechanism (1) is used to create environmental conditions for coating, and the fixing mechanism (3) is arranged at the inner bottom end of the working mechanism (1); The sputtering mechanism (2) is used to provide a material source for coating, and the sputtering mechanism (2) is arranged at the inner top of the working mechanism (1).

5. The heating device for vacuum coating according to claim 4, characterized in that: The working mechanism (1) comprises: A working housing (11), wherein one side of the working housing (11) is provided with an opening; A working door (12), wherein the working housing (11) is movably hinged to the working door (12) through an opening; A vacuum pumping assembly (13), one end of which is fixedly connected to the lower half of the working shell (11); An inflatable component (14), one end of which is fixedly connected to the upper half of the working shell (11), the number of the inflatable components (14) is four, and the four inflatable components (14) are evenly arranged around the working shell (11).

6. The heating device for vacuum coating according to claim 5, characterized in that: The sputtering mechanism (2) comprises: A target material (21), the top end of the target material (21) being fixedly connected to the inner top end of the working housing (11); A magnetic pole assembly (22), wherein a magnetic pole assembly (22) is arranged between the target material (21) and the working shell (11).

7. The heating device for vacuum coating according to claim 6, characterized in that: The fixing mechanism (3) further comprises: A clamping assembly (4), wherein the top end of the fixed shell (31) is fixedly provided with a clamping assembly (4), the number of the clamping assemblies (4) is four, and the four clamping assemblies (4) are evenly arranged around the fixed shell (31) for stably clamping the substrate; A movable component (6), a fixing groove is provided on the side of the fixing plate (32), a fixing hole is provided on the side of the fixing shell (31), the fixing groove of the fixing plate (32) corresponds to the fixing hole of the fixing shell (31), the movable component (6) is movably engaged with the fixing groove and the fixing hole, and the movable component (6) is located near the edge of the substrate, the number of the movable components (6) is several, and the several movable components (6) are evenly arranged around the fixing plate (32), so as to increase the heat radiation to the edge area of ​​the substrate; A telescopic component (5), the fixed shell (31) is movably provided with a telescopic component (5) outside the fixed shell, and is used to provide a power source for the movement of the movable component (6).

8. The heating device for vacuum coating according to claim 7, characterized in that: The clamping assembly (4) comprises: A clamping member (41), wherein the bottom end of the clamping member (41) is fixedly connected to the top end of the fixed shell (31); A threaded rod (42), a threaded hole is formed in the middle of the clamping member (41), and the clamping member (41) is threadedly sleeved with the outer wall of the threaded rod (42) through the threaded hole; A clamping plate (43) is fixedly connected to one end of the threaded rod (42) located above the fixing plate (32).

9. The heating device for vacuum coating according to claim 8, characterized in that: The active component (6) comprises: A movable part (61), wherein the shape of the movable part (61) is an inverted T-shape, and the bottom end of the movable part (61) is in contact with the top end of the heat conducting component (7); The movable ball (62) is provided with a movable groove at the bottom end of the movable member (61), and the movable member (61) is movably sleeved with the movable ball (62) through the movable groove. A vertical spring is arranged in the movable groove, and the vertical spring is located between the movable member (61) and the movable ball (62).

10. The heating device for vacuum coating according to claim 9, characterized in that: The telescopic assembly (5) comprises: Telescopic cylinders (51), the number of the telescopic cylinders (51) is two, and the two telescopic cylinders (51) are arranged opposite to each other, and the telescopic cylinders (51) are fixedly sleeved on the wall surface of the working housing (11); A telescopic rod (52), one end of which is movably connected to the telescopic cylinder (51); The telescopic member (53) has the other end of the telescopic rod (52) fixedly connected to the outer wall of the telescopic member (53), and the inner wall of the telescopic member (53) fixedly connected to the movable member (61).

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