Electroplating pool for electroplating copper and electroplating process

Abstract

The electroplating pool comprises an electroplating pool body, a suction assembly, a circulation control assembly and a back flushing assembly, a receding inner cavity is formed in one side of the lower end in the electroplating pool body and is of an L-shaped structure, a plurality of supporting shafts are horizontally arranged in the receding inner cavity, and the multiple supporting shafts are rotationally sleeved with rotation rollers; a plurality of autorotation rollers are arranged in the electroplating pool, circulating filter cloth is arranged on the autorotation rollers in a circulating lap joint mode and is in an L shape, the circulating filter cloth in an L-shaped movable layout is arranged on one side in the electroplating pool, when electroplating solution circulation in the electroplating pool needs to be carried out, pollutant pretreatment can be carried out on the extracted solution, and anode mud below an electroplating copper plate is subjected to adhesion collection; the circulating filter cloth is subjected to circulating rotation control through the circulating control assembly, and then pollutants deposited on the surface of the circulating filter cloth can be treated through the backflushing assembly after the circulating filter cloth is used for a certain time, so that the operation is worry-saving and convenient, and the circulating temperature control quality of an electroplating solution in the electroplating pool is improved.

Description

Technical Field

[0001] The invention relates to the field of copper electroplating, in particular to an electroplating pool and an electroplating process for copper electroplating. Background Art

[0002] Copper plating is the most widely used pre-plating layer in the electroplating industry. It is used to improve the bonding strength of the coating, including tin soldering parts, lead-tin alloys, and zinc die-casting parts, before nickel, gold, and silver plating.

[0003] During the copper electroplating process, the copper parts and the workpieces to be electroplated need to be placed on the positive and negative sides of the power supply device respectively, and placed in the electroplating tank, and then the electroplating operation is carried out in conjunction with the electroplating solution. When the existing electroplating tank is in use, in order to better control the electroplating solution in the electroplating tank, it needs to be pumped and circulated. However, since the electroplating solution is easily polluted during use, and with the processing and use of copper, anode mud will accumulate on one side at the bottom of the electroplating tank, resulting in inconvenience for pretreatment when the physical circulation control temperature in the electroplating tank, affecting the accuracy of the circulation temperature control. Summary of the invention

[0004] The object of the present invention is to provide a plating pool and a plating process for electroplating copper to solve the problems raised in the above background technology.

[0005] To achieve the above object, the present invention provides the following technical solution: an electroplating pool for electroplating copper, comprising:

[0006] An electroplating tank, wherein a lower end of the electroplating tank is provided with a clearance cavity, the clearance cavity is in an L-shaped structure, a plurality of support shafts are horizontally arranged in the clearance cavity, a plurality of support shafts are rotatably sleeved with self-rotating rollers, a plurality of self-rotating rollers are cyclically overlapped with circulating filter cloths, and the circulating filter cloths are arranged in an L-shaped structure;

[0007] A suction assembly, the suction assembly is arranged on a vertical side of the yielding inner cavity, the suction assembly includes a suction installation box and a suction main pipe, the suction installation box and the suction main pipe are located between the circulating filter cloth clamped by the circulating filter arrangement in the yielding inner cavity;

[0008] A circulation control assembly, which is arranged on one side of the suction installation box close to the suction main pipe, and includes a plurality of control rings and a plurality of driven bevel gears;

[0009] A recoil assembly, wherein a dirt groove is horizontally opened on one side of the lower end of the give way cavity, a recoil box is horizontally arranged above the dirt groove in the give way cavity, and one side of the circulating filter cloth passes horizontally between the dirt groove and the recoil box.

[0010] Preferably, a plurality of combination joints are symmetrically arranged horizontally on one side of the circulating filter cloth close to the suction main pipe, a collecting cavity is opened in the circulating filter cloth close to the combination joint, one side of the combination joint is horizontally connected to the suction main pipe, and a transfer inner groove is opened in the collecting cavity through the combination joint.

[0011] Preferably, the suction installation box is away from the suction main pipe and in contact with the circulating filter cloth on the side close to the processing area of ​​the electroplating pool. A number of access grooves are horizontally symmetrically opened on the side of the suction installation box close to the collecting chamber. One side of the several access grooves respectively penetrates the side of the suction installation box close to the circulating filter cloth, and the several access grooves are respectively connected to the collecting chamber to open a connecting groove.

[0012] Preferably, a control shaft is inserted into the access groove through a bearing horizontally penetrating the suction installation box, a shifting impeller is sleeved on one side of the control shaft placed in the access groove, and a shifting gear is sleeved on one side of the control shaft penetrating the suction installation box.

[0013] Preferably, the suction installation box is symmetrically provided with a plurality of bearing rings on one side close to the suction main pipe, the virtual axes of the bearing rings are coaxial with the virtual axes of the combined joint, the control ring is rotated and plugged into the bearing ring through the bearing, the inner circumference of the bearing ring is symmetrically provided with a plurality of shifting teeth, and the shifting gears on one side of the plurality of control shafts are respectively engaged with the shifting teeth of the control ring.

[0014] Preferably, a transmission bracket is horizontally provided on one side of the upper end of the suction mounting box close to the control ring, a synchronization shaft is vertically rotatably plugged into one side of the transmission bracket, the synchronization shaft passes through both ends of the transmission bracket and is respectively sleeved with transmission bevel gears, a plurality of grooves are symmetrically provided on the outer peripheral side of the self-rotating roller close to the transmission bracket, a driven bevel gear is sleeved on one side of the self-rotating roller located in the groove, a bevel gear ring is provided on the side of the control ring away from the suction mounting box, and one side of the two transmission bevel gears is respectively meshed and connected with one side of the driven bevel gear and the bevel gear ring.

[0015] Preferably, a movable rod is provided in the adapter inner groove through two three-bracket horizontal movable plug-in, the movable rod passes through the three-bracket and is placed in the collecting groove. A reset spring is provided on one side through a partition sleeve, a sealing gasket is provided on one side of the adapter inner groove, a sealing plate is provided on the side of the movable rod close to the sealing gasket and away from the collecting groove, a sealing rubber ring is provided on the side of the sealing plate close to the sealing gasket, and the diameter of the sealing plate is larger than the inner diameter of the sealing gasket and smaller than the diameter of the adapter inner groove.

[0016] Preferably, a plurality of transmission tubes are vertically symmetrically provided at the lower end of the suction installation box, the upper ends of the plurality of transmission tubes are respectively connected to a side of a plurality of transition inner grooves away from the sealing plate and the collecting groove, and the lower ends of the plurality of transmission tubes are respectively connected to the upper end of the recoil box.

[0017] Preferably, a plurality of conical recoil holes are symmetrically provided at the lower end of the recoil box, a narrow side of the plurality of conical recoil holes is in contact with the circulating filter cloth, and a sewage outlet is provided on one side of the sewage tank penetrating the electroplating tank.

[0018] A plating process using an electroplating bath for electroplating copper comprises the following steps:

[0019] Step 1: Hang the electroplated copper plate just above the horizontal section of the circulating filter cloth for electroplating. When the electroplating copper plate produces anode mud, the anode mud falls above the circulating filter cloth;

[0020] Step 2: When the electroplating solution in the electroplating tank is subjected to temperature-controlled circulation treatment, a circulation pump is connected to one side of the suction main pipe to extract the solution from the electroplating tank to the outside. At this time, the solution in the transfer inner tank and the collection tank flows, and the solution in the electroplating tank enters from several access tanks and the connection tank, and then the sealing plate is pushed away from the sealing gasket ring, and the solution in the electroplating tank is extracted from the electroplating tank. During this period, when the solution enters the access tank, it is initially filtered through the circulation filter cloth;

[0021] Step 3: When the access slot rotates, multiple toggle gears control the control ring and the bevel gear ring to rotate, and then under the transmission action of the transmission bevel gear, the self-rotating roller on one side is controlled to rotate. At this time, the circulating filter cloth rotates clockwise, driving and circulating the pollutants avoided by the circulating filter cloth and the adhering anode;

[0022] Step 4: When the circulating filter cloth needs to be treated for dirt, the suction main pipe sends high-pressure and clean electroplating solution into the inner tank of the adapter. At this time, the electroplating solution pushes the sealing plate and the sealing gasket ring to contact and seal. After pressurization, the electroplating solution enters the recoil box from the transmission pipe, and then sprays to the circulating filter cloth from several conical recoil holes. At this time, the dirt tank performs a suction operation to discharge the contaminated electroplating solution and wait for post-processing.

[0023] Compared with the prior art, the present invention has the following beneficial effects:

[0024] An L-shaped movable circulating filter cloth is set on one side of the electroplating pool. When the electroplating solution needs to be circulated in the electroplating pool, the extracted solution can be pre-treated with pollutants, and the anode mud under the electroplated copper plate can be adhered and collected. The circulating filter cloth is controlled by the circulating control component. After a certain period of use, the pollutants deposited on the surface of the circulating filter cloth can be treated through the recoil component. The operation is worry-free and convenient, which improves the quality of circulating temperature control of the electroplating solution in the electroplating pool. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 It is a schematic diagram of the structure of the present invention;

[0026] Figure 2 It is a schematic diagram of the structure of the present invention;

[0027] Figure 3 For the present invention Figure 2 Schematic diagram of part A;

[0028] Figure 4 For the present invention Figure 3 Schematic diagram of part B;

[0029] Figure 5 For the present invention Figure 3 Schematic diagram of the C part;

[0030] Figure 6 This is a schematic diagram of the structure of the suction installation box of the present invention;

[0031] Figure 7 This is a schematic diagram of the control ring installation structure of the present invention;

[0032] Figure 8 For the present invention Figure 7 Schematic diagram of part D.

[0033] In the figure: electroplating tank 1, giving way inner cavity 2, supporting shaft 3, rotating roller 4, circulating filter cloth 5, suction mounting box 6, switching inner groove 7, suction main pipe 8, access groove 9, connecting groove 10, movable rod 11, sealing gasket ring 12, sealing plate 13, reset spring 14, control shaft 15, toggle gear 16, toggle impeller 17, control ring 18, transmission bracket 19, transmission bevel gear 20, groove 21, driven bevel gear 22, bevel gear ring 23, dirt groove 24, recoil box 25, transmission pipe 26, conical recoil hole 27. DETAILED DESCRIPTION

[0034] In order to make the purpose and technical solution of the present invention clearly and completely described, and the advantages more clearly understood, the embodiments of the present invention are further described in detail with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are part of the embodiments of the present invention, rather than all of the embodiments, and are only used to explain the embodiments of the present invention, and are not used to limit the embodiments of the present invention. All other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0035] See also Figure 1-Figure 8 , the present invention provides the following technical solutions:

[0036] Embodiment 1: A plating pool for electroplating copper, comprising a plating pool 1, a lower end side of the plating pool 1 is provided with a clearance cavity 2, the clearance cavity 2 is in an L-shaped structure, a plurality of support shafts 3 are horizontally arranged in the clearance cavity 2, a plurality of support shafts 3 are rotatably sleeved with self-rotating rollers 4, a plurality of self-rotating rollers 4 are cyclically overlapped with circulating filter cloths 5, the circulating filter cloths 5 are in an L-shaped layout, a solution is sucked and circulated from a vertical surface of the circulating filter cloth 5, and a horizontal surface of the circulating filter cloth 5 is used to receive and adhere anode mud;

[0037] A suction component is provided to pre-treat pollutants during the temperature control circulation of the electroplating solution. The suction component is provided on a vertical side of the yielding inner cavity 2. The suction component includes a suction installation box 6 and a suction main pipe 8. The suction installation box 6 and the suction main pipe 8 are located between the circulating filter cloth 5 placed in the yielding inner cavity 2 and clamped by the circulating filter cloth 5. A plurality of combination joints are symmetrically arranged horizontally on one side of the circulating filter cloth 5 close to the suction main pipe 8. A collecting cavity is provided on one side of the circulating filter cloth 5 close to the combination joint. One side of the combination joint is horizontally connected to the suction main pipe 8 and inserted. A transfer inner groove 7 is provided in the collecting cavity and penetrates the combination joint. The suction main pipe 8 is connected and used in coordination with the suction installation box 6 through a plurality of combination joints and the transfer inner groove 7.

[0038] The suction installation box 6 is away from the suction main pipe 8 and is in contact with the circulating filter cloth 5 on the side close to the processing area of ​​the electroplating pool 1. A plurality of access slots 9 are horizontally symmetrically provided on the side close to the collecting chamber in the suction installation box 6. One side of the plurality of access slots 9 respectively penetrates the side of the suction installation box 6 close to the circulating filter cloth 5. The plurality of access slots 9 are respectively connected to the collecting chamber and provided with connecting slots 10. When the electroplating solution circulates, it is pre-filtered from the plurality of circulating filter cloths 5, and then enters the collecting tank through the plurality of access slots 9 and is sucked away by the suction main pipe 8.

[0039] A circulation control component is provided to control the circulation rotation of the circulation filter cloth 5. The circulation control component is arranged on the side of the suction installation box 6 close to the suction main pipe 8. The circulation control component includes a plurality of control rings 18 and a plurality of driven bevel gears 22. The access groove 9 is provided with a control shaft 15 which passes through the suction installation box 6 horizontally through the bearing. The control shaft 15 is provided with a toggle impeller 17 on one side of the access groove 9. The control shaft 15 passes through the side of the suction installation box 6 and is provided with a toggle gear 16. The suction installation box 6 is symmetrically provided with a plurality of bearing rings on the side close to the suction main pipe 8. The virtual axes of the bearing rings are aligned with the virtual axes of the combined joint. The quasi-axis is coaxial, and the control ring 18 is connected to the bearing ring through the rotation of the bearing. The inner circumference of the bearing ring is symmetrically provided with a plurality of toggle teeth, and the toggle gears 16 on one side of the plurality of control shafts 15 are respectively meshed and connected with the toggle teeth of the control ring 18. When the suction main pipe 8 sucks the solution from the plurality of transfer inner grooves 7, suction is generated in the collection groove, and the plurality of access grooves 9 extract the solution from the side of the circulating filter cloth 5. When the solution passes through the access grooves 9, the toggle impeller 17 is toggled to rotate. At this time, the control shaft 15 controls the toggle gear 16 to control the rotation of the control ring 18, and then under the action of the gear ratio, the control ring 18 rotates slowly;

[0040] A transmission bracket 19 is horizontally provided on one side of the upper end of the suction installation box 6 close to the control ring 18, and a synchronization shaft is vertically rotatably inserted on one side of the transmission bracket 19. The synchronization shaft passes through the transmission bracket 19 and is respectively sleeved with transmission bevel gears 20 at both ends. A plurality of grooves 21 are symmetrically provided on the outer peripheral side of the self-rotating roller 4 close to the transmission bracket 19. A driven bevel gear 22 is sleeved on one side of the self-rotating roller 4 located in the groove 21. A bevel gear ring 23 is provided on the side of the control ring 18 away from the suction installation box 6, and one side of the two transmission bevel gears 20 is respectively meshed and connected with one side of the driven bevel gear 22 and the bevel gear ring 23. When the control ring 18 rotates, the driven bevel gear 22 can be driven to rotate by the bevel gear ring 23 in cooperation with the transmission bevel gear 20. At this time, under the action of the rolling contact between the self-rotating roller 4 and the circulating filter cloth 5, the circulating filter cloth 5 starts to rotate in a cycle.

[0041] Embodiment 2: On the basis of embodiment 1, a recoil assembly is provided to flush the surface pollutants of the circulating filter cloth 5, a dirt groove 24 is horizontally opened on one side of the lower end of the inner cavity 2, a recoil box 25 is horizontally provided above the dirt groove 24 in the inner cavity 2, one side of the circulating filter cloth 5 passes horizontally between the dirt groove 24 and the recoil box 25, and a movable rod 11 is provided in the transfer inner tank 7 through two three-bracket horizontally movable plug-in, the movable rod 11 passes through the three-bracket and is placed in the collecting tank. A reset spring 14 is provided on one side of the transfer inner tank 7. There is a sealing gasket 12, and a sealing plate 13 is provided on the side of the movable rod 11 close to the sealing gasket 12 and away from the collecting tank. A sealing rubber ring is provided on the side of the sealing plate 13 close to the sealing gasket 12, and the diameter of the sealing plate 13 is larger than the inner diameter of the sealing gasket 12 and smaller than the diameter of the adapter inner tank 7. When the suction main pipe 8 is suctioning, the sealing plate 13 is away from the sealing gasket 12, and the solution in the collecting tank can pass through the adapter inner tank 7 normally into the suction main pipe 8. In the absence of external force, the reset spring 14 can pull the sealing plate 13 to always maintain contact with the sealing gasket 12.

[0042] A plurality of transmission pipes 26 are vertically symmetrically arranged at the lower end of the suction installation box 6, and the upper ends of the plurality of transmission pipes 26 are respectively connected to the side of the plurality of transfer inner tanks 7 away from the sealing plate 13 and the collecting tank, and the lower ends of the plurality of transmission pipes 26 are respectively connected to the upper end of the recoil box 25, and the lower end of the recoil box 25 is symmetrically provided with a plurality of conical recoil holes 27, and the narrow side of the plurality of conical recoil holes 27 is in contact with the circulating filter cloth 5, and a sewage outlet is provided on one side of the dirt tank 24 penetrating the electroplating tank 1. When the suction main pipe 8 delivers the high-pressure electroplating solution into the transfer inner tank 7, the sealing plate 13 and the sealing gasket ring 12 are abutted and sealed, so that the solution entering the transfer inner tank 7 can flow from the transmission pipe 26 to the recoil box 25, and then spray to the circulation filter cloth 5 under the further pressurization of the plurality of conical recoil holes 27. At this time, the solution is sucked in the dirt tank 24, and the conical recoil holes 27 are used to extract the electroplating solution containing a large amount of pollutants from the electroplating tank 1, thereby improving the use quality of the electroplating tank 1.

[0043] A scraper can be provided in the dirt tank 24, and when 25a is not in use, the surface of 5a can be simply scraped and the pollutants naturally fall into 24a.

[0044] A plating process using an electroplating bath for electroplating copper comprises the following steps:

[0045] Step 1: Hang the electroplated copper plate just above the horizontal section of the circulating filter cloth 5 for electroplating. When the electroplated copper plate produces anode mud, the anode mud falls above the circulating filter cloth 5;

[0046] Step 2: When the electroplating solution in the electroplating pool 1 is subjected to temperature control circulation treatment, a circulation pump is connected to one side of the suction main pipe 8 to extract the solution from the electroplating pool 1 to the outside. At this time, the solution in the transfer inner tank 7 and the collecting tank flows, and the solution in the electroplating pool 1 enters from a plurality of access tanks 9 and the connecting tank 10, and then the sealing plate 13 is pushed away from the sealing gasket ring 12, and the solution in the electroplating pool 1 is extracted from the electroplating pool 1. During this period, when the solution enters the access tank 9, it is initially filtered through the circulating filter cloth 5;

[0047] Step 3: When the access slot 9 rotates, the multiple toggle gears 16 control the control ring 18 and the bevel gear ring 23 to rotate, and then under the transmission action of the transmission bevel gear 20, the self-rotating roller 4 on one side is controlled to rotate, and at this time, the circulating filter cloth 5 rotates clockwise, driving and circulating the pollutants avoided by the circulating filter cloth 5 and the adhering anode;

[0048] Step 4: When the circulating filter cloth 5 needs to be treated for dirt, the suction main pipe 8 sends high-pressure and clean electroplating solution into the adapter inner tank 7. At this time, the electroplating solution pushes the sealing plate 13 to contact and seal the sealing gasket ring 12. The pressurized electroplating solution enters the recoil box 25 from the transmission pipe 26, and then sprays toward the circulating filter cloth 5 from a number of conical recoil holes 27. At this time, the dirt tank 24 performs a suction operation to discharge the contaminated electroplating solution and wait for post-processing.

[0049] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A copper electroplating bath, characterized in that: include: An electroplating tank (1), wherein a clearance cavity (2) is provided at one side of the lower end of the electroplating tank (1), the clearance cavity (2) is in an L-shaped structure, a plurality of support shafts (3) are horizontally arranged in the clearance cavity (2), a plurality of support shafts (3) are rotatably sleeved with self-rotating rollers (4), a plurality of self-rotating rollers (4) are cyclically overlapped with circulating filter cloths (5), and the circulating filter cloths (5) are arranged in an L-shaped structure; A suction assembly, the suction assembly being arranged on a vertical side of the yielding inner cavity (2), the suction assembly comprising a suction installation box (6) and a suction main pipe (8), the suction installation box (6) and the suction main pipe (8) being located between the circulating filter cloth (5) placed in the yielding inner cavity (2) and clamped by the circulating filter cloth (5); A circulation control assembly, the circulation control assembly being arranged on a side of the suction installation box (6) close to the suction main pipe (8), and comprising a plurality of control rings (18) and a plurality of driven bevel gears (22); A recoil assembly, wherein a dirt groove (24) is horizontally provided on one side of the lower end of the yielding inner cavity (2), a recoil box (25) is horizontally provided above the dirt groove (24) in the yielding inner cavity (2), and one side of the circulating filter cloth (5) passes horizontally between the dirt groove (24) and the recoil box (25).

2. The electroplating bath for copper electroplating according to claim 1, characterized in that: A plurality of combined joints are symmetrically arranged horizontally on one side of the circulation filter cloth (5) close to the suction main pipe (8); a collection chamber is provided in the circulation filter cloth (5) close to the combined joint; one side of the combined joint is horizontally connected to the suction main pipe (8); and a transfer inner groove (7) is provided in the collection chamber through the combined joint.

3. The electroplating bath for copper electroplating according to claim 2, characterized in that: The suction installation box (6) is in contact with the circulating filter cloth (5) at a side away from the suction main pipe (8) and close to the processing area of ​​the electroplating tank (1). A plurality of access grooves (9) are horizontally symmetrically provided at a side of the suction installation box (6) close to the collecting chamber. One side of the plurality of access grooves (9) respectively penetrates a side of the suction installation box (6) close to the circulating filter cloth (5). The plurality of access grooves (9) are respectively connected to the collecting chamber and have connecting grooves (10).

4. The electroplating bath for copper electroplating according to claim 3, characterized in that: A control shaft (15) is inserted and arranged in the access groove (9) through a bearing and horizontally penetrates the suction installation box (6); a shifting impeller (17) is sleeved on one side of the control shaft (15) placed in the access groove (9); and a shifting gear (16) is sleeved on one side of the control shaft (15) penetrating the suction installation box (6).

5. The electroplating bath for copper electroplating according to claim 4, characterized in that: A plurality of bearing rings are symmetrically arranged on one side of the suction installation box (6) close to the suction main pipe (8), and the virtual axes of the bearing rings are all coaxial with the virtual axes of the combined joint. The control ring (18) is rotatably plugged into the bearing ring through the bearing, and a plurality of shifting teeth are symmetrically arranged on the inner circumference of the bearing ring, and the shifting gears (16) on one side of the plurality of control shafts (15) are respectively meshed and connected with the shifting teeth of the control ring (18).

6. The electroplating bath for copper electroplating according to claim 5, characterized in that: A transmission bracket (19) is horizontally arranged on one side of the upper end of the suction installation box (6) close to the control ring (18); a synchronization shaft is vertically rotatably inserted on one side of the transmission bracket (19); the synchronization shaft passes through the transmission bracket (19) and is respectively sleeved with transmission bevel gears (20) at both ends thereof; a plurality of grooves (21) are symmetrically provided on the outer circumference of the self-rotating roller (4) close to the transmission bracket (19); a driven bevel gear (22) is sleeved on one side of the self-rotating roller (4) located in the groove (21); a bevel gear ring (23) is arranged on one side of the control ring (18) away from the suction installation box (6); and one side of the two transmission bevel gears (20) is respectively meshed and connected with one side of the driven bevel gear (22) and the bevel gear ring (23).

7. The electroplating bath for copper electroplating according to claim 6, characterized in that: A movable rod (11) is provided in the transition inner groove (7) through two three-bracket horizontal movable plug-in, and a return spring (14) is provided on one side of the movable rod (11) that passes through the three-bracket and is placed in the collection groove through a partition sleeve, and a sealing gasket (12) is provided on one side of the transition inner groove (7), and a sealing plate (13) is provided on the side of the movable rod (11) close to the sealing gasket (12) and away from the collection groove, and a sealing rubber ring is provided on the side of the sealing plate (13) close to the sealing gasket (12), and the diameter of the sealing plate (13) is larger than the inner diameter of the sealing gasket (12) and smaller than the diameter of the transition inner groove (7).

8. The electroplating bath for copper electroplating according to claim 7, characterized in that: A plurality of transmission tubes (26) are vertically symmetrically arranged at the lower end of the suction installation box (6), the upper ends of the plurality of transmission tubes (26) are respectively connected to a side of the plurality of transfer inner grooves (7) away from the sealing plate (13) and the collecting groove, and the lower ends of the plurality of transmission tubes (26) are respectively connected to the upper end of the recoil box (25).

9. The electroplating bath for copper electroplating according to claim 8, characterized in that: A plurality of conical recoil holes (27) are symmetrically formed at the lower end of the recoil box (25), the narrow openings of the plurality of conical recoil holes (27) are in contact with the circulating filter cloth (5), and a sewage outlet is formed at one side of the waste tank (24) penetrating the electroplating tank (1).

10. A plating process using the electroplating bath for copper electroplating according to any one of claims 1 to 9, characterized in that: The following steps are involved: Step 1: Hang the electroplated copper plate just above the horizontal section of the circulating filter cloth (5) for electroplating. When the electroplating process of the electroplated copper plate produces anode mud, the anode mud falls onto the circulating filter cloth (5); Step 2: When the electroplating solution in the electroplating tank (1) is subjected to temperature-controlled circulation treatment, a circulation pump is connected to one side of the suction main pipe (8) to extract the solution from the electroplating tank (1) to the outside. At this time, the solution in the transfer inner tank (7) and the collection tank flows, and the solution in the electroplating tank (1) enters from a plurality of access tanks (9) and a connection tank (10), and then the sealing plate (13) is pushed away from the sealing gasket ring (12), and the solution in the electroplating tank (1) is extracted from the electroplating tank (1). During this period, when the solution enters the access tank (9), it is initially filtered through the circulation filter cloth (5); Step 3: When the access slot (9) rotates, the plurality of toggle gears (16) control the control ring (18) and the bevel gear ring (23) to rotate, and then, under the driving action of the driving bevel gear (20), the self-rotating roller (4) on one side is controlled to rotate, and at this time, the circulating filter cloth (5) rotates clockwise, driving and circulating the pollutants and the anodes adhered to the circulating filter cloth (5); Step 4: When it is necessary to treat the dirt in the circulating filter cloth (5), the suction main pipe (8) delivers high-pressure and clean electroplating solution into the transfer inner tank (7). At this time, the electroplating solution pushes the sealing plate (13) and the sealing gasket ring (12) to contact and seal. The pressurized electroplating solution enters the recoil box (25) from the transmission pipe (26) and then sprays toward the circulating filter cloth (5) from a plurality of conical recoil holes (27). At this time, the dirt tank (24) performs a suction operation to discharge the contaminated electroplating solution and wait for post-treatment.

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