Magnetic encoder

Abstract

Provided is a magnetic encoder which, in a high-resolution magnetic encoder for detecting an absolute angular position in a multi-turn rotation, achieves redundancy of functions for avoiding a situation in which a failure cannot be detected and correct angular information cannot be output. In a magnetic encoder (1A), a first multi-turn rotation sensor unit (20A) and a second multi-turn rotation sensor unit (20B) respectively perform cross check processing for checking whether first multi-turn rotation information and second multi-turn rotation information corresponding to an accumulated number of turns are normal. In addition, the first one-turn rotation sensor unit (40A) and the second one-turn rotation sensor unit (40B) each perform cross check processing for checking whether or not a first one-turn rotation angle and a second one-turn rotation angle, which are angular positions within the range of one-turn rotation, are normal. After verification, all multi-circle rotation information and one-circle rotation angle are synthesized to calculate the absolute angle position of multi-circle rotation.

Description

Technical Field

[0001] The present invention relates to a magnetic encoder for detecting rotation. Background Art

[0002] An encoder that detects the absolute angular position during multiple rotations, including not only the angular position but also the number of rotations, is installed in various devices such as motors. In the rotary encoder described in Patent Document 1, a first magnet with two poles, one of which is magnetized to the N pole and the other to the S pole, is arranged on the rotation axis of the rotating body, and a second magnet with multiple poles, in which the N poles and the S poles are alternately magnetized in the circumferential direction, is arranged to surround the first magnet. The absolute angular position during multiple rotations is detected based on the outputs of the magnetoresistive element and two Hall elements (first magnetic sensing unit) facing the first magnet with two poles and the output of the magnetoresistive element (second magnetic sensing unit) facing the second magnet with multiple poles. Prior art literature Patent Literature

[0003] Patent Document 1: Japanese Patent No. 6877168 Summary of the invention

[0004] Problems to be solved by the invention In various devices equipped with encoders, the stop of the encoder's function (no output of angle information) can be used as a fault detection. However, in the case where the encoder continues to output incorrect angle information while operating as an encoder, it cannot be used as a fault detection and cannot be responded to because it cannot be determined whether the angle information is correct. Therefore, an encoder that can detect incorrect angle information and output correct angle information is needed.

[0005] In response to such requirements, it is possible to consider setting up multiple encoders on the same rotating body, comparing the angle information of multiple encoders, etc. to detect faults, so that even if one fails, the angle information of the other encoder can be output (redundancy). However, if two sets of encoders with the same structure are simply set up, the components will be set up twice, the structure of the equipment will be complicated and large-scale, and the cost will increase. In particular, optical encoders are often used in high-resolution encoders, but when optical encoders are made redundant, it is difficult to miniaturize and simplify, and the cost will increase significantly.

[0006] On the other hand, as described in Patent Document 1, an encoder that detects the absolute angular position during multiple rotations needs to count the number of rotations. However, in order to correctly count the accumulated number of rotations (multi-rotation information), it is necessary to always maintain a state in which the rotation can be detected when the rotating body moves and to continue counting reliably.

[0007] In view of the above problems, the present invention provides a magnetic encoder that detects absolute angular position during multiple rotations, realizes redundancy to avoid a situation where a fault cannot be detected and correct angle information cannot be outputted, and can detect absolute angular position with a simple and low-cost structure. Technical solutions to solve problems

[0008] In order to solve the above-mentioned problems, a first embodiment of the present invention is a magnetic encoder, which detects the absolute angular position of a rotating body, and has: two groups of multi-turn rotation sensor parts, which detect the rotation of the rotating body; two groups of one-turn rotation sensor parts, which detect the angular position within the range of one turn of the rotating body, that is, the one-turn rotation angle; a first magnet, which is magnetized with a pair of N poles and S poles; and an annular second magnet, which has a second track that is magnetized with multiple pairs of N poles and S poles alternately in the circumferential direction and is coaxially arranged with the first magnet, and the two groups of the multi-turn rotation sensor parts have: a first multi-turn rotation sensor part, which has a magnetic power generation element opposite to the first magnet, and calculates first multi-turn rotation information corresponding to the accumulated number of rotations of the rotating body based on a detection signal of an electric current generated by the magnetic power generation element; and a second multi-turn rotation sensor part, which calculates second multi-turn rotation information corresponding to the accumulated number of rotations of the rotating body based on the outputs of the first and second magnetic detection elements that are opposite to the first magnet and are mechanically offset by 90°. The first multi-turn rotation sensor unit and the second multi-turn rotation sensor unit respectively perform cross-check processing to verify whether the first multi-turn rotation information and the second multi-turn rotation information are normal. The two groups of the one-turn rotation sensor units include: a first one-turn rotation sensor unit, which calculates the first one-turn rotation angle based on the output of the first magnetic sensitive element relative to the second magnet, the first and second magnetic detection elements, or the third and fourth magnetic detection elements relative to the first magnet and with a mechanical angle offset of 90°, and the second magnetic sensitive element relative to the first magnet; and a second one-turn rotation sensor unit, which calculates the second one-turn rotation angle based on the output of the first magnetic detection element group composed of more than three magnetic detection elements including the fifth, sixth, and seventh magnetic detection elements relative to the first magnet and arranged in the circumferential direction, the first one-turn rotation sensor unit and the second one-turn rotation sensor unit respectively perform cross-check processing to verify whether the first one-turn rotation angle and the second one-turn rotation angle are normal.

[0009] In order to solve the above-mentioned problems, a second embodiment of the present invention is a magnetic encoder that detects the absolute angular position of a rotating body, and comprises: two sets of multi-turn rotation sensor parts that detect the rotation of the rotating body; two sets of one-turn rotation sensor parts that detect the angular position within the range of one turn of the rotating body, that is, the one-turn rotation angle; a first magnet that is magnetized with a pair of N poles and S poles; and an annular second magnet that has a second track that is magnetized with multiple pairs of N poles and S poles alternately in the circumferential direction and is coaxially arranged with the first magnet, wherein the two sets of the multi-turn rotation sensor parts comprise: a first multi-turn rotation sensor part that has a magnetic power generation element that is opposite to the first magnet, and calculates first multi-turn rotation information corresponding to the cumulative number of rotations of the rotating body based on a detection signal of a current generated by the magnetic power generation element; and a second multi-turn rotation sensor part that calculates second multi-turn rotation information corresponding to the cumulative number of rotations of the rotating body based on outputs of first and second magnetic detection elements that are opposite to the first magnet and are mechanically offset by 90°, wherein the first multi-turn rotation sensor part and the second multi-turn rotation sensor part are arranged coaxially with the first magnet. The sensor unit performs a cross-check process to verify whether the first multi-turn rotation information and the second multi-turn rotation information are normal, respectively. The two groups of the one-turn rotation sensor units include: a first one-turn rotation sensor unit, which calculates the first one-turn rotation angle based on the output of the first magnetic sensitive element and the first magnetic detection element group, the first magnetic sensitive element is opposite to the second magnet, and the first magnetic detection element group is composed of three or more magnetic detection elements including the third, fourth, and fifth magnetic detection elements that are opposite to the first magnet and arranged in the circumferential direction; and a second one-turn rotation sensor unit, which calculates the second one-turn rotation angle based on the output of the second magnetic sensitive element and the first and second magnetic detection elements or the sixth and seventh magnetic detection elements, the second magnetic sensitive element is opposite to the first magnet, the sixth and seventh magnetic detection elements are different from the first and second magnetic detection elements, and the mechanical angle is offset by 90°, the first one-turn rotation sensor unit and the second one-turn rotation sensor unit respectively perform a cross-check process to verify whether the first one-turn rotation angle and the second one-turn rotation angle are normal.

[0010] In order to solve the above-mentioned problems, a third embodiment of the present invention is a magnetic encoder that detects the absolute angular position of a rotating body, and comprises: two sets of multi-turn rotation sensor parts that detect the rotation of the rotating body; two sets of one-turn rotation sensor parts that detect the angular position within the range of one turn of the rotating body, that is, the one-turn rotation angle; an annular first magnet that has a first track magnetized with a pair of N poles and S poles; an annular second magnet that has a second track magnetized with multiple pairs of N poles and S poles alternately in the circumferential direction and is coaxially arranged with the first magnet; and an annular third magnet that has a pair of N poles and S poles magnetized and is coaxially arranged with the first magnet and the second magnet, wherein the two sets of the multi-turn rotation sensor parts comprise: a first multi-turn rotation sensor part that has a first magnetic power generation element that is opposite to the first magnet, and calculates first multi-turn rotation information corresponding to the cumulative number of rotations of the rotating body based on a detection signal of a current generated by the first magnetic power generation element; and a second multi-turn rotation sensor part that has a second magnetic power generation element that is opposite to the first magnet, and calculates a detection signal of a current generated by the second magnetic power generation element corresponding to the number of rotations of the rotating body. The first multi-turn rotation sensor unit and the second multi-turn rotation sensor unit respectively perform cross-check processing to verify whether the first multi-turn rotation information and the second multi-turn rotation information are normal, and the two groups of the one-turn rotation sensor units include: a first one-turn rotation sensor unit, which calculates a first one-turn rotation angle based on outputs of a first magnetic sensitive element and a first magnetic detection element group, wherein the first magnetic sensitive element is opposite to the second magnet, and the first magnetic detection element group is composed of three or more magnetic detection elements including first, second, and third magnetic detection elements that are opposite to the third magnet and arranged in a circumferential direction; and a second one-turn rotation sensor unit, which calculates a second one-turn rotation angle based on the output of the second magnetic detection element group, and the second magnetic detection element group is composed of three or more magnetic detection elements including fourth, fifth, and sixth magnetic detection elements that are opposite to the third magnet and arranged in a circumferential direction, wherein the first one-turn rotation sensor unit and the second one-turn rotation sensor unit respectively perform cross-check processing to verify whether the first one-turn rotation angle and the second one-turn rotation angle are normal.

[0011] According to various aspects of the present invention, the multi-turn rotation sensor units of the two systems respectively calculate the multi-turn rotation information, and perform a cross-check process to mutually verify whether the calculated multi-turn rotation information is normal. The one-turn rotation sensor unit that detects the one-turn angle is also provided with two systems, and a cross-check process is also performed. In this way, by setting up two systems of detection elements and calculation units for outputting absolute angular positions to construct a redundant system, even in the event of a fault, the correct absolute angular position can be calculated based on the output of the system without the fault. Therefore, it is possible to avoid the situation where the fault cannot be detected and the abnormal absolute angular position is continuously output.

[0012] In addition, according to each mode of the present invention, the redundant system is entirely composed of a magnetic detection mechanism, and therefore, compared with the case of using an optical angle detection mechanism in combination, the structure can be simplified, and miniaturization and cost reduction can be achieved. In addition, it has the advantages of being less prone to adverse conditions caused by contamination and high durability. Moreover, at least one system of the multi-turn rotation sensor unit is equipped with a magnetic generating element, and therefore, even if at least one system is not supplied with power from a battery or an external source, the multi-turn rotation information can be continuously updated. In addition, in the third mode of the present invention, since the multi-turn rotation sensor units of the two systems are equipped with magnetic generating elements, the correct absolute angle position can be output without the burden of replacing batteries.

[0013] In the second mode of the present invention, it is preferred to have a magnet holder having an annular magnet holder with the rotation axis of the rotating body as the center, the second magnet is arranged on the outer periphery of one surface of the magnet holder, the third magnet is arranged on the inner periphery of the one surface, the first magnet is arranged on the other surface of the magnet holder, the first magnetic sensitive element, the first, second, third magnetic detection elements and the fourth, fifth, and sixth magnetic detection elements are arranged on a first substrate opposite to the one surface, and the first magnetic power generation element and the second magnetic power generation element are arranged on a second substrate opposite to the other surface. In this way, by arranging magnets on the surface and back of the magnet holder, the magnetic power generation element and the magnetic sensitive element are opposite to the magnet holder from opposite sides, and the detection mechanism can be made into a simple and compact structure. In addition, since the detection element is not arranged on the rotation axis, it can correspond to a hollow shaft.

[0014] In each embodiment of the present invention, the following embodiment can be adopted: a management and supervision unit is provided which is connected to the first multi-turn rotation sensor unit, the second multi-turn rotation sensor unit, the first single-turn rotation sensor unit and the second single-turn rotation sensor unit, and the management and supervision unit is provided with an absolute angle position comprehensive calculation unit, which calculates the absolute angle position based on the first multi-turn rotation information, the second multi-turn rotation information, the first single-turn rotation angle and the second single-turn rotation angle.

[0015] Alternatively, in each embodiment of the present invention, the following embodiment may be adopted: one of the first one-turn rotation sensor unit and the second one-turn rotation sensor unit includes an absolute angle position comprehensive calculation unit, and the absolute angle position comprehensive calculation unit calculates the absolute angle position based on the first multi-turn rotation information, the second multi-turn rotation information, the first rotation angle, and the second one-turn rotation angle. In this way, by combining the unit for calculating the multi-turn rotation information and the one-turn rotation angle as the unit for calculating the absolute angle position, the structure can be simplified and the cost can be reduced.

[0016] In each embodiment of the present invention, it is preferred to include a nonvolatile memory that stores the first multi-turn rotation information, and the first multi-turn rotation information is updated by the current generated by the magnetoelectric element, and the absolute angle position comprehensive calculation unit calculates the absolute angle position based on the first multi-turn rotation information read from the nonvolatile memory at startup. In this way, even if the rotating body moves during the period when no power is supplied, the number of rotations will not be unclear, and an accurate absolute angle position can be output at startup.

[0017] In each embodiment of the present invention, the second magnetic sensor is preferably a magnetoresistive effect element having a magnetoresistive pattern of phase A and a magnetoresistive pattern of phase B having a phase difference of 90°, the second track is arranged in two rows in the radial direction, the positions of the S pole and the N pole of the adjacent second track are offset by one pole in the circumferential direction, and the second magnetic sensor is opposite to the boundary of the adjacent second track. In this way, since the magnetoresistive effect element is arranged in the rotating magnetic field that changes in the in-plane direction of each track, the detection accuracy can be improved. Effects of the Invention

[0018] According to the present invention, since a redundant system is constructed by separately providing two systems of sensor parts for detecting multi-turn rotation information and sensor parts for detecting one-turn rotation angle, it is possible to avoid a situation where a fault cannot be detected and the correct angle information cannot be output. In addition, since all of the detection mechanisms are composed of magnetic ones, the structure can be simplified, miniaturization and cost reduction can be achieved, and it is not easy to cause adverse conditions caused by contamination, and it becomes a highly durable structure. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 This is a configuration diagram and a functional block diagram of the main part of the magnetic encoder according to the first embodiment. Figure 2 This is a structural diagram and a functional block diagram of a fourth variation of the first embodiment. Figure 3 This is a configuration diagram and a functional block diagram of the main parts of the magnetic encoder according to the second embodiment. Figure 4 This is a configuration diagram and a functional block diagram of the main parts of the magnetic encoder according to the third embodiment. Figure 5 This is a cross-sectional view showing a main part of a specific example of the magnetic encoder according to the first embodiment. Figure 6 It is an exploded perspective view of main parts showing a specific example of the magnetic encoder according to the first embodiment, and is a view seen from the other side (L2 direction) in the rotation axis direction. Figure 7 It is an exploded perspective view of main parts showing a specific example of the magnetic encoder according to the first embodiment, and is a view seen from one side (L1 direction) in the rotation axis direction. DETAILED DESCRIPTION

[0020] Embodiments of the magnetic encoder of the present invention are described below. The magnetic encoder of the present invention is a multi-turn absolute angular position encoder capable of knowing the number of rotations from a predetermined origin position and the current angular position.

[0021] In this specification, regarding the structure of the magnetic encoder of the present invention, the specific structure of the magnet and magnet holder as its main parts, various elements for detecting magnetic field changes and the substrate on which they are configured are described, but the description of other parts (external casing, etc.) is omitted.

[0022] Figure 1 , Figure 2 , Figure 3 , Figure 4 They are respectively a structural diagram (disposition diagram of magnets and elements) and a functional block diagram of the main parts of the magnetic encoder of the present invention. Figure 1 It is a configuration diagram and a functional block diagram of the main part of the magnetic encoder 1A according to the first embodiment. Figure 5 , Figure 6 , Figure 7 This is an explanatory diagram showing a main part of a specific example of the magnetic encoder 1A according to the first embodiment. Figure 5 It is a cross-sectional view showing a main part of a specific example of the magnetic encoder 1A according to the first embodiment. Figure 6 It is an exploded perspective view of main parts showing a specific example of the magnetic encoder 1A according to the first embodiment, and is a view seen from the other side (L2 direction) in the rotation axis direction. Figure 7It is an exploded perspective view of main parts showing a specific example of the magnetic encoder 1A according to the first embodiment, and is a view seen from one side (L1 direction) in the rotation axis direction.

[0023] (Implementation Method 1) The magnetic encoder 1A of the first embodiment uses a rotating body 2 such as a rotating shaft of a motor as a measurement object. Figure 1 As shown, the magnetic encoder 1A includes a magnet holder 3 fixed to the rotating body 2, and a first magnet 11 and a second magnet 12 fixed to the magnet holder 3. The first magnet 11 is a disk-shaped permanent magnet. The second magnet 12 is an annular permanent magnet surrounding the outer circumference of the first magnet 11. The first magnet 11 and the second magnet 12 are coaxially arranged around the rotation axis L of the rotating body 2. Figure 1 , Figure 5 As shown in FIG. 1 , the magnet holder 3 includes a cylindrical shaft portion 31 and an annular magnet holder 32 extending from the shaft portion 31 toward the outer circumference. The shaft portion 31 extends along the axial direction of the rotation axis L. The magnet holder 32 is arranged at an end portion of one side L1 of the shaft portion 31 in the axial direction (see FIG. 1 ). Figure 5 ). The shaft portion 31 is fixed to the rotating shaft (rotating body 2) of the motor by, for example, a set screw.

[0024] The first magnet 11 and the second magnet 12 are arranged on one surface 33 of the magnet holding portion 32. The one surface 33 is a surface facing one side L1 in the axial direction, and the other surface 34 of the magnet holding portion 32 is a surface facing the other side L2 in the axial direction (see Figure 5 ) The magnetic encoder 1A includes a first substrate 35 that faces one surface 33 from one side L1 in the axial direction.

[0025] like Figure 1 , Figure 5 As shown, the first magnet 11 is arranged at the center of a surface 33 of the magnet holding portion 32. The N pole and the S pole of the first magnet 11 are each magnetized by one pole, and the center thereof coincides with the rotation axis L. The second magnet 12 is arranged at the outer periphery of one surface 33 of the magnet holding portion 32. The second magnet 12 has an annular second track T2 having a plurality of pairs of N poles and S poles alternately magnetized in the circumferential direction, and the center thereof coincides with the rotation axis L. The second track T2 is arranged in two rows in the radial direction. The positions of the N poles and S poles of the second track T2 adjacent in the radial direction are offset by one pole in the circumferential direction. For example, the second magnet 12 has 128 pairs of N poles and S poles alternately magnetized in the circumferential direction. In addition, the number of N poles and S poles may be a number different from 128 pairs.

[0026] The magnetic encoder 1A calculates multi-turn rotation information corresponding to the cumulative number of rotations of the rotating body 2 by detecting the magnetic field of the first magnet 11. On the other hand, the angular position within the range of one rotation of the rotating body 2 (hereinafter referred to as one-turn rotation angle) is calculated by detecting the magnetic fields of the first magnet 11 and the second magnet 12. Then, by combining the multi-turn rotation information and the one-turn rotation angle, the absolute angular position of the multi-turn rotation is calculated.

[0027] The magnetic encoder 1A includes a first multi-turn rotation sensor unit 20A and a second multi-turn rotation sensor unit 20B as multi-turn rotation sensor units that calculate multi-turn rotation information. The first multi-turn rotation sensor unit 20A and the second multi-turn rotation sensor unit 20B calculate multi-turn rotation information, respectively. Hereinafter, the multi-turn rotation information calculated by the first multi-turn rotation sensor unit 20A is referred to as the first multi-turn rotation information, and the multi-turn rotation information calculated by the second multi-turn rotation sensor unit 20B is referred to as the second multi-turn rotation information. The first multi-turn rotation sensor unit 20A and the second multi-turn rotation sensor unit 20B perform a cross-check process that compares the first multi-turn rotation information and the second multi-turn rotation information with each other and verifies whether each multi-turn rotation information is normal.

[0028] The magnetic encoder 1A includes a first one-turn rotation sensor unit 40A and a second one-turn rotation sensor unit 40B as one-turn rotation sensor units that calculate one-turn rotation angles. The first one-turn rotation sensor unit 40A and the second one-turn rotation sensor unit 40B each calculate the one-turn rotation angle. Hereinafter, the one-turn rotation angle calculated by the first one-turn rotation sensor unit 40A is referred to as the first one-turn rotation angle, and the one-turn rotation angle calculated by the second one-turn rotation sensor unit 40B is referred to as the second one-turn rotation angle. The first one-turn rotation sensor unit 40A and the second one-turn rotation sensor unit 40B each perform a cross-check process of comparing the first one-turn rotation angle and the second one-turn rotation angle with each other and verifying whether each one-turn rotation angle is normal.

[0029] (First multi-turn rotation sensor unit) like Figure 1 As shown, the first multi-turn rotation sensor unit 20A includes: a magnetoelectric element W overlapping the first magnet 11 from one side L1 in the axial direction; a microcontroller unit 21A connected to the magnetoelectric element W; and a first non-volatile memory 22A. In addition, the first multi-turn rotation sensor unit 20A may also include structures other than the above. The magnetoelectric element W is mounted on the first substrate surface 35a (refer to the first substrate surface 35a) on the one side L1 in the axial direction of the first substrate 35. Figure 5 ).

[0030] In the first multi-turn rotation sensor unit 20A, the magnetoelectric element W is, for example, a magnetosensitive wire such as a Wiegand wire. The Wiegand wire exerts a large Barkhausen effect (Wiegand effect) through changes in the magnetic field. The Wiegand wire is an element in which a coil is wound on a conductor of a ferromagnetic body. As the first magnet 11 rotates, a pulsed current is generated in the coil when the N pole and the S pole of the first magnet 11 switch positions. At this time, the direction of the current changes according to the direction before and after the magnetic field is reversed. Therefore, the direction of the current changes according to the rotation direction of the rotating body 2.

[0031] The microcontroller unit 21A includes a multi-turn rotation information generating unit 23A that performs calculations such as counting the number of rotations based on the output of the magnetoelectric element W. For example, the multi-turn rotation information generating unit 23A performs a process of increasing or decreasing the count value based on the pulsed current and the signal corresponding to the direction thereof, and generates multi-turn rotation information (for example, the count value) corresponding to the cumulative number of rotations of the rotating body 2. The microcontroller unit 21A uses the current from the magnetoelectric element W to store the multi-turn rotation information in the first nonvolatile memory 22A. In the first multi-turn rotation sensor unit 20A, even if the power supply from the outside or the battery is stopped, the rotation of the rotating body 2 is detected, and the multi-turn rotation information (first multi-turn rotation information) stored in the first nonvolatile memory 22A is updated.

[0032] (Second multi-turn rotation sensor section) The second multi-turn rotation sensor unit 20B includes: magnetic detection elements H1 and H2 facing the first magnet 11 from one side L1 in the axial direction; and a microcontroller unit 21B connected to the magnetic detection elements H1 and H2. The magnetic detection elements H1 and H2 are Hall elements. The magnetic detection elements H1 and H2 are arranged at positions with a mechanical angle offset of 90° in the phase of rotation centered on the rotation axis L. In addition, the second multi-turn rotation sensor unit 20B may also include structures other than the above. The magnetic detection elements H1 and H2 are mounted on the second substrate surface 35b of the first substrate 35 facing the other side L2 in the axial direction.

[0033] The microcontroller unit 21B includes a multi-turn rotation information generating unit 23B, which performs operations such as counting the number of rotations based on the outputs of the magnetic detection elements H1 and H2. As described above, the first magnet includes a pair of magnetic pole pairs. Therefore, the magnetic detection elements H1 and H2 output a rectangular wave signal of one cycle with a phase shift of 90° from each other during one rotation of the rotating body 2. The multi-turn rotation information generating unit 23B performs processing such as increasing or decreasing the count value in accordance with the change of the output, and generates multi-turn rotation information (such as a count value) corresponding to the accumulated number of rotations of the rotating body 2.

[0034] (First rotation sensor section) like Figure 1 As shown, the first one-turn rotation sensor unit 40A includes: a first magnetic sensor element MR1, which is opposite to the second magnet 12 from one side L1 in the axial direction; a second magnetic sensor element MR2, which is opposite to the center of the first magnet 11 from one side L1 in the axial direction; magnetic detection elements H3 and H4, which are opposite to the outer periphery of the first magnet 11 from one side L1 in the axial direction; and a microcontroller unit 41A, which is connected to the first magnetic sensor element MR1, the second magnetic sensor element MR2 and the magnetic detection elements H3 and H4. In addition, the first one-turn rotation sensor unit 40A may also include structures other than the above. The microcontroller unit 41A is used as a position calculation unit, which uses the outputs of the above-mentioned elements to calculate the one-turn rotation angle.

[0035] The first magnetic sensor MR1, the second magnetic sensor MR2, and the magnetic detection elements H3 and H4 are mounted on the second substrate surface 35b of the first substrate 35 on the other side L2 of the axial direction. As described above, the first substrate 35 is provided with a magnetic power generation element W at the center of the first substrate surface 35a. Therefore, the two elements (magnetic power generation element W and the second magnetic sensor MR2) to be arranged at the center of the substrate are arranged separately on the front and back sides of the substrate. The magnetic detection elements H3 and H4 are arranged at positions where the mechanical angle is offset by 90° in the phase of rotation centered on the rotation axis L.

[0036] Here, in Figure 5 , Figure 6 , Figure 7 In the specific example of the magnetic encoder 1A shown, a substrate holder 37 is fixed on the first substrate 35 from the magnet holder 3 side to form a substrate unit 38. The first magnetic sensor MR1 is arranged in the through-portion of the substrate holder 37, and is connected to the sensor circuit provided on the first substrate 35 via a flexible wiring substrate (not shown). The substrate unit 38 is fixed to an encoder holder 39 arranged in a manner surrounding the magnet holder 3, thereby forming a predetermined gap between the first magnetic sensor MR1 and the second magnet 12 and between the magnetic detection elements H1 to H7 and the first magnet 11. In addition, the substrate holder 37 may not be provided, and the first substrate 35 on which the first magnetic sensor MR1, the second magnetic sensor MR2 and the magnetic detection elements H1 to H7 are mounted may be directly fixed to the encoder holder 39.

[0037] The first magnetic sensor MR1 and the second magnetic sensor MR2 are magnetoresistive effect elements. The first magnetic sensor MR1 and the second magnetic sensor MR2 have a magnetoresistive pattern of the A phase and a magnetoresistive pattern of the B phase that are mutually offset by 90 degrees in electrical angle in the phase of rotation centered on the rotation axis L. The magnetoresistive pattern of the A phase has a magnetoresistive pattern of the +a phase and a magnetoresistive pattern of the -a phase that are offset by 180 degrees in electrical angle. The magnetoresistive pattern of the B phase has a magnetoresistive pattern of the +b phase and a magnetoresistive pattern of the -b phase that are offset by 180 degrees in electrical angle.

[0038] The first magneto-sensitive element MR1 outputs two cycles of sin and cos signals each time the rotating body 2 rotates by an angle corresponding to a pair of magnetic pole pairs of the second magnet 12. The microcontroller unit 41A (position calculation unit) performs an inverse tangent operation based on the output (sin and cos signals) of the first magneto-sensitive element MR1 to calculate the angular position. Thus, when the number of magnetic pole pairs of the second magnet 12 is set to P, an angle calculation value of P cycles is obtained relative to one rotation of the rotating body 2.

[0039] The second magneto-sensitive element MR2 faces the first magnet 11 having a pair of magnetic poles, and therefore outputs two cycles of sin and cos signals during one rotation of the rotating body 2. The microcontroller unit 41A (position calculation unit) performs an arc tangent calculation based on the sin and cos signals to calculate the angle.

[0040] The magnetic detection elements H3 and H4 are Hall elements. The magnetic detection elements H3 and H4 output a rectangular wave signal of one cycle with a phase shift of 90° relative to each other during one rotation of the rotating body 2. The microcontroller unit 41A (position calculation unit) performs processing to determine which section of the rectangular wave is located based on the output pattern of the magnetic detection elements H3 and H4, for example.

[0041] The microcontroller unit 41A (position calculation unit) calculates the angle calculation value of one rotation cycle based on the angle calculated from the output of the second magnetic sensor MR2 by the arc tangent calculation and the current interval calculated based on the outputs of the magnetic detection elements H3 and H4. By combining the angle calculation value with the angle calculation value of one rotation cycle P calculated based on the output of the first magnetic sensor MR1, a high-resolution rotation angle of one rotation is calculated.

[0042] In addition, the microcontroller unit 41A (position calculation unit) performs processing to calculate the number of rotations of the rotating body 2 based on the cumulative value of the change in the one-rotation angle. For example, based on the result of the determination of which interval the output (rectangular wave) of the magnetic detection elements H3 and H4 is in, processing to increase or decrease the count value is performed. Based on the value obtained by dividing the count value by the number of counts during one rotation of the rotating body 2, the value indicating the number of rotations is obtained.

[0043] (Second one-turn sensor section) The second one-turn rotation sensor unit 40B includes: magnetic detection elements H5, H6, H7 facing the first magnet 11 from one side L1 in the axial direction; and a microcontroller unit 41B connected to the magnetic detection elements H5, H6, H7. The magnetic detection elements H5, H6, H7 are Hall elements. The magnetic detection elements H5, H6, H7 are installed on the second substrate surface 35b of the first substrate 35 (see FIG. 1 ) in the same manner as the other magnetic detection elements H1 to H4. Figure 6 ).

[0044] The magnetic detection elements H5, H6, and H7 are arranged at positions that are mutually offset by a mechanical angle of 120° in the phase of rotation centered on the rotation axis L. Therefore, the magnetic detection elements H5, H6, and H7 output a sinusoidal waveform signal of one cycle whose phases are mutually offset by 120° during one rotation of the rotating body 2 (i.e., during the period when the rotating body 2 passes through a pair of magnetic pole pairs).

[0045] The microcontroller unit 41B is used as a position calculation unit, which uses the outputs of the magnetic detection elements H5, H6, and H7 to calculate the angle of one rotation. For example, the microcontroller unit 41B uses the outputs of the magnetic detection elements H5, H6, and H7 to perform processing to estimate the angular position of the rotating body 2. In estimating the angular position, a correspondence table between the angular position of the rotating body 2 and the calculated values ​​calculated based on the outputs of the magnetic detection elements H5, H6, and H7 is used. When the magnetic encoder 1A is initially set, a learning process is performed in advance, and a correspondence table is created based on the outputs of the magnetic detection elements H5, H6, and H7 during the rotation of the rotating body 2, and the created correspondence table is stored.

[0046] The outputs of the magnetic detection elements H5, H6, and H7 (sinusoidal waveform signals with mutually offset phases) can be converted into a sign of a specified number corresponding to the angular position. For example, by combining the positive and negative judgment results of each signal and the judgment results of the relative magnitude of each signal, it can be converted into a sign of 0 to 11. By performing a rotation of the rotating body 2, the angular position is made to correspond to each sign, thereby making a correspondence table. When calculating the rotation angle of one circle, the microcontroller unit 41B (position calculation unit) calculates the above-mentioned sign based on the output of the magnetic detection elements H5, H6, and H7, and reads out the angular position corresponding to the calculated value from the correspondence table. The read angle is output as an estimated value of the rotation angle of one circle.

[0047] (Absolute angle position comprehensive calculation unit) The magnetic encoder 1A includes, in addition to the above-mentioned four sensor units, a management and supervision unit 50 for managing the entire system including the above-mentioned four sensor units and monitoring abnormalities. The output from each sensor unit is input to the management and supervision unit 50. The management and supervision unit 50 includes a microcontroller unit 51 and a second nonvolatile memory 52. ​​The second nonvolatile memory 52 stores various information such as setting values ​​and parameters required for the processing at the start-up of the magnetic encoder 1A. The microcontroller unit 51 includes an absolute angle position comprehensive calculation unit 53.

[0048] The absolute angle position integrated calculation unit 53 uses the multi-turn rotation information of the two systems (the first multi-turn rotation information and the second multi-turn rotation information) and the one-turn rotation angles of the two systems (the first one-turn rotation angle and the second one-turn rotation angle) to calculate the absolute angle position of the multi-turn rotation of the rotating body 2. For example, the above-mentioned cross-check is used to determine whether the outputs of the multi-turn rotation sensor units of the two systems are normal (that is, the cumulative number of rotations is consistent). Therefore, when it is determined that one of them is abnormal, the output value of the other is used to calculate the absolute angle position. Similarly, the above-mentioned cross-check is used to determine whether the outputs of the one-turn rotation sensor units of the two systems are normal (that is, the one-turn rotation angle is consistent). Therefore, when it is determined that one of them is abnormal, the output value of the other is used to calculate the absolute angle position.

[0049] Here, the absolute angle position integrated calculation unit 53 calculates the absolute angle position of the multi-turn rotation using the output (first multi-turn rotation information) of the first multi-turn rotation sensor unit 20A when the magnetic encoder 1A is started. That is, the absolute angle position of the multi-turn rotation of the rotating body 2 is calculated by combining the first multi-turn rotation information read from the first non-volatile memory 22A of the first multi-turn rotation sensor unit 20A at the time of startup and the one-turn rotation angle calculated by the first one-turn rotation sensor unit 40A or the second one-turn rotation sensor unit 40B at the time of startup.

[0050] In addition, after the absolute angle position integrated calculation unit 53 calculates the absolute angle position of the multi-turn rotation of the rotating body 2 using the first multi-turn rotation information read from the first nonvolatile memory 22A at startup, the number of rotations is calculated based on the count value based on the change of the one-turn rotation angle in the first one-turn rotation sensor unit 40A or the second one-turn rotation sensor unit 40B during the period before the power is turned off, and combined with the first multi-turn rotation information at startup, thereby calculating multi-turn rotation information different from the first multi-turn rotation information continuously updated in the first multi-turn rotation sensor unit 20A. Then, the absolute angle position of the multi-turn rotation of the rotating body 2 is calculated by combining the multi-turn rotation information calculated based on the change of the one-turn rotation angle with the one-turn rotation angle.

[0051] (Effects of Embodiment 1) As described above, the magnetic encoder 1A of the first embodiment includes: two sets of multi-turn rotation sensor parts that detect the rotation of the rotating body 2; two sets of one-turn rotation sensor parts that detect the angular position within the range of one turn of the rotating body 2, that is, the one-turn rotation angle; the first magnet 11 that is magnetized with a pair of N poles and S poles; and the annular second magnet 12 that has a second track T2 that is magnetized with a plurality of pairs of N poles and S poles alternately in the circumferential direction and is coaxially arranged with the first magnet 11. The two sets of multi-turn rotation sensor parts include: the first multi-turn rotation sensor part 20A that includes a magnetoelectric element W facing the first magnet 11 and calculates first multi-turn rotation information corresponding to the cumulative number of turns of the rotating body 2 based on the detection signal of the current generated by the magnetoelectric element W; and the second multi-turn rotation sensor part 20B that calculates second multi-turn rotation information corresponding to the cumulative number of turns of the rotating body 2 based on the outputs of the first and second magnetic detection elements H1 and H2 that are opposite to the first magnet 11 and are offset by 90 degrees in mechanical angle. The first multi-turn rotation sensor unit 20A and the second multi-turn rotation sensor unit 20B respectively perform cross-check processing to verify whether the first multi-turn rotation information and the second multi-turn rotation information are normal. The two sets of one-turn rotation sensor units include: a first one-turn rotation sensor unit 40A, which calculates the first one-turn rotation angle based on the outputs of the first magnetic sensor MR1 opposite to the first magnet 11, the third magnetic detection element H3 and the fourth magnetic detection element H4 opposite to the first magnet 11 and with a mechanical angle offset of 90 degrees, and the second magnetic sensor MR2 opposite to the second magnet 12; and a second one-turn rotation sensor unit 40B, which calculates the second one-turn rotation angle based on the outputs of the first magnetic detection element group composed of three or more magnetic detection elements including the fifth magnetic detection element H5, the sixth magnetic detection element H6, and the seventh magnetic detection element H7 opposite to the first magnet 11 and arranged in the circumferential direction. The first one-turn rotation sensor unit 40A and the second one-turn rotation sensor unit 40B respectively perform cross-check processing to verify whether the first one-turn rotation angle and the second one-turn rotation angle are normal.

[0052] Furthermore, the magnetic encoder 1A of the first embodiment includes a management and supervision unit 50 connected to the first multi-turn rotation sensor unit 20A, the second multi-turn rotation sensor unit 20B, the first one-turn rotation sensor unit 40A, and the second one-turn rotation sensor unit 40B. The management and supervision unit 50 includes an absolute angle position comprehensive calculation unit 53 that calculates the absolute angle position based on the first multi-turn rotation information, the second multi-turn rotation information, the first one-turn rotation angle, and the second one-turn rotation angle.

[0053] Thus, the magnetic encoder 1A of the first embodiment performs the following cross-check processing: the multi-turn rotation sensor units of the two systems respectively calculate the multi-turn rotation information, and mutually verify whether the calculated multi-turn rotation information is normal. The one-turn rotation sensor unit for detecting the one-turn rotation angle is also provided with two systems, and the cross-check processing is also performed. In this way, the detection elements and the calculation unit for outputting the absolute angle position of the two systems are provided to construct a redundant system, so that even in the event of a fault, the correct absolute angle position can be calculated based on the output of the system without the fault. Therefore, it is possible to avoid the situation where the fault cannot be detected and the abnormal absolute angle position is continuously output.

[0054] In the first embodiment, the redundant system is entirely composed of magnetic detection mechanisms, so the structure can be simplified, miniaturization and cost reduction can be achieved compared to the case of using optical detection mechanisms. In addition, there are advantages that the defect caused by contamination is not easy to occur and the durability is high. Moreover, since one system of the multi-turn rotation sensor unit is equipped with a magnetic power generation element W, the multi-turn rotation information can be continuously updated even without power supply from a battery or an external source.

[0055] That is, the first multi-turn rotation sensor unit 20A in the first embodiment includes a first nonvolatile memory 22A, and the first nonvolatile memory 22A updates the first multi-turn rotation information by the current generated by the magnetoelectric element W even when there is no power supply from the outside. The absolute angle position comprehensive calculation unit 53 calculates the absolute angle position based on the first multi-turn rotation information read from the first nonvolatile memory 22A at startup. In this way, even if the rotating body 2 moves during the period when no power is supplied, the number of rotations will not be unclear, and an accurate absolute angle position can be output at startup.

[0056] In the first embodiment, the second magnetic sensitive element MR2 is a magnetoresistive effect element having a magnetoresistive pattern of the A phase and a magnetoresistive pattern of the B phase with a phase difference of 90°, the second track T2 is arranged in two rows in the radial direction, the positions of the S pole and the N pole of the adjacent second track T2 are offset by one pole in the circumferential direction, and the second magnetic sensitive element MR2 is opposite to the boundary of the adjacent second track T2. In this way, the magnetoresistive effect element is arranged in the rotating magnetic field whose direction changes in the in-plane direction of each track. Therefore, the detection accuracy can be improved.

[0057] (Variation of Implementation Example 1) (1) In the first embodiment, as two magnetic detection elements with a mechanical angle offset of 90°, there are two sets of magnetic detection elements H1 and H2 of the second multi-turn rotation sensor unit 20B and magnetic detection elements H3 and H4 of the first single-turn rotation sensor unit 40A, but the first single-turn rotation sensor unit 40A may be configured to calculate the single-turn rotation angle using the outputs of the magnetic detection elements H1 and H2 instead of the outputs of the magnetic detection elements H3 and H4. In this way, the number of magnetic detection elements can be reduced.

[0058] That is, the magnetic encoder 1A of embodiment 1 can be configured to include: a first one-circle rotation sensor unit 40A, which calculates the first one-circle rotation angle based on the outputs of the first magnetic sensitive element MR1, the first and second magnetic detection elements H1, H2 relative to the first magnet 11, or the third and fourth magnetic detection elements H3, H4 relative to the first magnet 11 and mechanically offset by 90°, and the second magnetic sensitive element MR2 relative to the second magnet 12; and a second one-circle rotation sensor unit, which calculates the second one-circle rotation angle based on the outputs of the first magnetic detection element group consisting of three or more magnetic detection elements including the fifth, sixth, and seventh magnetic detection elements H5, H6, and H7 relative to the first magnet 11 and arranged circumferentially.

[0059] (2) The second one-turn rotation sensor unit 40B of the first embodiment has three magnetic detection elements H5, H6, and H7 facing the first magnet 11. However, in order to perform the process of estimating the one-turn rotation angle, the number of magnetic detection elements facing the first magnet 11 and arranged in the circumferential direction may be three or more, and the arrangement is not limited to the mechanical angle of 120°. That is, the second one-turn rotation sensor unit 40B only needs to have at least three magnetic detection elements facing the first magnet 11 and arranged at equal angles in the circumferential direction.

[0060] (3) In each sensor unit of the first embodiment, a microcontroller unit is used as an electronic component that performs calculation processing, but other electronic components may be used.

[0061] (4) The management and supervision unit 50 provided in the magnetic encoder 1A of the first embodiment can be integrated into any one of the two systems of one-turn sensor units or the two systems of multi-turn sensor units. Figure 2 1 is a structural diagram and functional block diagram of a fourth variant of implementation example 1. Figure 2 As shown, the magnetic encoder 1B according to the fourth modification of the first embodiment integrates the function of the management and supervision unit 50 into the first one-turn sensor unit 40C. Hereinafter, the same reference numerals are given to the same components as those of the first embodiment, and the description thereof will be omitted.

[0062] like Figure 2As shown, the magnetic encoder 1B of the modification example 4 includes a first multi-turn rotation sensor unit 20A, a second multi-turn rotation sensor unit 20B, a first one-turn rotation sensor unit 40C, and a second one-turn rotation sensor unit 40B. The first one-turn rotation sensor unit 40C includes a microcontroller unit 41C connected to the first magnetic sensor element MR1, the second magnetic sensor element MR2, and the magnetic detection elements H1 and H2, and a second non-volatile memory 42. In addition, the second multi-turn rotation sensor unit 20B may also include a structure other than the above. The second non-volatile memory 42 stores various information such as setting values ​​and parameters required for the processing at the start-up of the magnetic encoder 1B.

[0063] The microcontroller unit 41C functions as a position calculation unit that calculates the one-turn angle using the outputs of the first magnetic sensor element MR1, the second magnetic sensor element MR2, and the magnetic detection elements H1 and H2, and includes an absolute angle position comprehensive calculation unit 43. The absolute angle position comprehensive calculation unit 43 inputs the first multi-turn rotation information, the second multi-turn rotation information, the first one-turn rotation angle, and the second one-turn rotation angle, and performs processing to calculate the absolute angle position of the multi-turn rotation based on these input values ​​in the same manner as in the first embodiment.

[0064] (Effects of Modification 4) The magnetic encoder 1B of the modification example 4 is similar to the embodiment 1, and includes two systems of multi-turn rotation sensor units and two systems of one-turn rotation sensor units, and verifies whether the output is normal by cross-checking. Therefore, the same effect as the embodiment 1 can be obtained. That is, two systems of detection elements and calculation units for outputting absolute angular positions are provided to construct a redundant system, so that even in the event of a failure, the correct absolute angular position can be calculated based on the output of the system without the failure. Therefore, it is possible to avoid the situation where the failure cannot be detected and the abnormal absolute angular position is continuously output.

[0065] In addition, since the same magnetic detection mechanism as in Embodiment 1 is used, the structure can be simplified, miniaturization and cost reduction can be achieved, and durability is high compared to the case of using an optical detection mechanism. Moreover, one of the two systems of multi-turn rotation sensor units can continuously update the multi-turn rotation information even if there is no power supply from a battery or an external power supply.

[0066] Furthermore, in the magnetic encoder 1B of the modification 4, the first one-turn rotation sensor unit 40C includes an absolute angle position integrated calculation unit 43, and the absolute angle position integrated calculation unit 43 calculates the absolute angle position based on the first multi-turn rotation information, the second multi-turn rotation information, the first one-turn rotation angle, and the second one-turn rotation angle. Therefore, since the management and supervision unit 50 is not provided, and the second one-turn rotation sensor unit 40C is also used as a unit having the function of the absolute angle position integrated calculation unit 43, the structure can be simplified and the cost can be reduced.

[0067] Alternatively, a configuration may be adopted in which any one of the first multi-turn rotation sensor unit 20A, the second multi-turn rotation sensor unit 20B, and the first single-turn rotation sensor unit 40B has the function of the absolute angle position integrated calculation unit 43 .

[0068] (Implementation Method 2) Figure 3 1C is a structural diagram and a functional block diagram of the main parts of the magnetic encoder 1C according to the second embodiment. Figure 3 As shown, the structure of the two systems of the multi-turn rotation sensor unit of the magnetic encoder 1C of the second embodiment is the same as that of the first embodiment. On the other hand, the structure of the magnetic detection element in the multi-turn rotation sensor unit and the calculation method of one-turn rotation angle are different from those of the first embodiment. Hereinafter, the same reference numerals are attached to the same structures as those of the first embodiment, and the description thereof is omitted.

[0069] The magnetic encoder 1C includes the second magnet 12 and the first magnet 11 having the same structure as in Embodiment 1. In addition, the magnetic encoder 1C includes the first multi-turn rotation sensor unit 20A and the second multi-turn rotation sensor unit 20B having the same structure as in Embodiment 1 as two systems of multi-turn rotation sensor units. Furthermore, the magnetic encoder 1C includes the first one-turn rotation sensor unit 40D and the second one-turn rotation sensor unit 40E as two systems of one-turn rotation sensor units.

[0070] In the magnetic encoder 1C, as in the first embodiment, the management and supervision unit 50 is not integrated into the first one-turn sensor unit 40D, and the absolute angle position integrated calculation unit 53 is provided in the management and supervision unit 50. In addition, as in the fourth variation of the first embodiment, the management and supervision unit 50 and the first one-turn sensor unit 40D may be integrated.

[0071] The first one-turn sensor unit 40D includes a first magnetic sensor element MR1 facing the second magnet 12, three magnetic detection elements H3, H4, and H5 facing the third magnet 13, and a microcontroller unit 41D. The microcontroller unit 41D functions as a position calculation unit that calculates a one-turn angle.

[0072] In the first one-turn rotation sensor unit 40D, the arctangent operation is performed based on the output (sin signal and cos signal) of the first magnetic sensor element MR1 relative to the multi-pole second magnet 12, similarly to the first embodiment. Thus, when the number of magnetic pole pairs of the second magnet 12 is set to P, the angle calculation value of P cycles is obtained with respect to one turn of the rotating body 2. Therefore, a high-resolution angle calculation value can be obtained.

[0073] On the other hand, in the first one-turn rotation sensor unit 40D, unlike in the first embodiment, a low-resolution angle calculation value is calculated based on the output of the magnetic detection elements H3, H4, and H5. The magnetic detection elements H3, H4, and H5 are Hall elements. The magnetic detection elements H3, H4, and H5 are opposite to the first magnet 11 having a magnetic pole pair, and are arranged at positions that are mutually offset by 120° mechanical angle in the phase of rotation centered on the rotation axis L. The magnetic detection elements H3, H4, and H5 output a sinusoidal waveform signal of one cycle with a phase offset of 120° from each other during one rotation of the rotating body 2 (i.e., during the period when the magnetic pole pair passes through a pair).

[0074] The microcontroller unit 41D (position calculation unit) uses the outputs of the magnetic detection elements H3, H4, and H5 to perform processing to estimate the angular position of the rotating body 2. The content of the estimation processing is the same as the estimation processing performed by the second one-turn rotation sensor unit 40 using the outputs of the magnetic detection elements H1, H2, and H3 in the first embodiment, so the description is omitted. As a result, a low-resolution angle estimation value can be obtained. The microcontroller unit 41D (position calculation unit) calculates the one-turn rotation angle by combining the high-resolution angle calculation value obtained from the output of the first magnetic sensor MR1 with the low-resolution angle estimation value obtained from the output of the magnetic detection elements H3, H4, and H5.

[0075] Next, the second one-turn rotation sensor unit 40E includes: a second magnetic sensitive element MR2 facing the second magnet 12; two magnetic detection elements H1 and H2 facing the first magnet 11; and a microcontroller unit 41E. The microcontroller unit 41E has the function of a position calculation unit that calculates the one-turn rotation angle. In order to calculate the one-turn rotation angle, the second one-turn rotation sensor unit 40E uses the outputs of the magnetic detection elements H1 and H2 that constitute the second multi-turn rotation sensor unit 20B. That is, the magnetic detection elements H1 and H2 are used for both the second multi-turn rotation sensor unit 20B and the second one-turn rotation sensor unit 40E.

[0076] In the second one-turn sensor unit 40E, the second magnetic sensor element MR2 is opposite to the first magnet 11 having a pair of magnetic poles, and thus, two cycles of sin signals and cos signals are output during one turn of the rotating body 2. The microcontroller unit 41E (position calculation unit) performs an inverse tangent operation based on the sin signal and the cos signal to perform processing of the calculation angle.

[0077] The magnetic detection elements H1 and H2 output rectangular wave signals of one cycle with phases shifted by 90° from each other during one rotation of the rotating body 2. The microcontroller unit 41E (position calculation unit) executes processing to determine which section of the rectangular wave is located based on the output pattern of the magnetic detection elements H1 and H2.

[0078] The microcontroller unit 41E (position calculation unit) calculates an angle calculation value per one rotation and one cycle based on the angle calculated from the output of the second magnetic sensor MR2 by the arctangent calculation and the current section calculated from the outputs of the magnetic detection elements H1 and H2.

[0079] The absolute angle position comprehensive calculation unit 53 uses the outputs of the first multi-turn rotation sensor unit 20A and the second multi-turn rotation sensor unit 20B and the first single-turn rotation sensor unit 40D and the second single-turn rotation sensor unit 40E to calculate the absolute angle position of the multi-turn rotation of the rotating body 2. At this time, as in the above-mentioned methods, the absolute angle position is calculated using the multi-turn rotation information and the single-turn rotation angle determined to be normal using the result of the cross-check.

[0080] (Effects of Embodiment 2) As described above, the magnetic encoder 1C of the second embodiment includes: two sets of multi-turn rotation sensor units that detect the rotation of the rotating body 2; two sets of one-turn rotation sensor units that detect the angular position within the range of one turn of the rotating body 2, that is, the one-turn rotation angle; a first magnet 11 that is magnetized with a pair of N poles and S poles; and an annular second magnet 12 that includes a second track T2 that is magnetized with a plurality of pairs of N poles and S poles alternately in the circumferential direction and is arranged coaxially with the first magnet 11. The two sets of multi-turn rotation sensor units include: a first multi-turn rotation sensor unit 20A that includes a magnetoelectric element W that faces the first magnet and calculates first multi-turn rotation information corresponding to the cumulative number of turns of the rotating body 2 based on the detection signal of the current generated by the magnetoelectric element W; and a second multi-turn rotation sensor unit 20B that calculates second multi-turn rotation information corresponding to the cumulative number of turns of the rotating body 2 based on the outputs of the first and second magnetic detection elements H1 and H2 that face the first magnet 11 and are offset by 90 degrees in mechanical angle. The first multi-turn rotation sensor unit 20A and the second multi-turn rotation sensor unit 20B respectively perform cross-check processing to verify whether the first multi-turn rotation information and the second multi-turn rotation information are normal. The two groups of one-turn rotation sensor units include: a first one-turn rotation sensor unit 40C, which calculates the first one-turn rotation angle based on the output of the first magnetic sensor MR1 and the first magnetic detection element group, the first magnetic sensor MR1 is opposite to the second magnet 12, and the first magnetic detection element group is composed of three or more magnetic detection elements including the third, fourth, and fifth magnetic detection elements H3, H4, and H5 that are opposite to the first magnet 11 and arranged in the circumferential direction; and a second one-turn rotation sensor unit 40B, which calculates the second one-turn rotation angle based on the second magnetic sensor MR2 opposite to the first magnet 11 and the first and second magnetic detection elements H1 and H2. The first one-turn rotation sensor unit 40C and the second one-turn rotation sensor unit 40B respectively perform cross-check processing to verify whether the first one-turn rotation angle and the second one-turn rotation angle are normal.

[0081] In addition, the magnetic encoder 1C of the second embodiment is provided with two systems of multi-turn rotation sensor units and two systems of one-turn rotation sensor units, similarly to the first embodiment, and verifies whether the output is normal by cross-checking. Therefore, the same effect as the first embodiment can be obtained. That is, two systems of detection elements and calculation units for outputting absolute angular positions are provided to construct a redundant system, so that even in the event of a failure, the correct absolute angular position can be calculated based on the output of the system without the failure. Therefore, it is possible to avoid the situation where the failure cannot be detected and the abnormal absolute angular position is continuously output.

[0082] In addition, since all magnetic detection mechanisms are used as in Embodiment 1, the structure can be simplified, miniaturization and cost reduction can be achieved, and durability is high compared to the case of using optical detection mechanisms. Moreover, one of the two systems of multi-turn rotation sensor units can continuously update multi-turn rotation information even if there is no power supply from a battery or an external power supply.

[0083] (Variation of Implementation Example 2) (1) Embodiment 2 is a structure in which the second multi-turn rotation sensor unit 20B and the second single-turn rotation sensor unit 40E use two magnetic detection elements H1 and H2 with a mechanical angle offset of 90 degrees. However, it is also possible to use a structure in which each of them has a dedicated magnetic detection element instead of using them. In this case, the second single-turn rotation sensor unit 40E has dedicated magnetic detection elements H6 and H7.

[0084] That is, the magnetic encoder 1C of embodiment 2 can have a second one-circle rotation sensor unit 40B, which calculates the second one-circle rotation angle based on the output of the second magnetic sensitive element MR2 opposite to the first magnet 11 and the first and second magnetic detection elements H1, H2, or the sixth and seventh magnetic detection elements H6, H7 that are different from the first and second magnetic detection elements H1, H2 and have a mechanical angle offset of 90°.

[0085] (2) The first one-turn rotation sensor unit 40D of the second embodiment includes three magnetic detection elements H3, H4, and H5 facing the first magnet 11. However, in order to perform the process of estimating the one-turn rotation angle, the number of magnetic detection elements facing the first magnet 11 and arranged in the circumferential direction may be three or more, and the arrangement is not limited to the mechanical angle interval of 120°. That is, the second one-turn rotation sensor unit 40D may include at least three magnetic detection elements facing the first magnet 11 and arranged at equal angles in the circumferential direction.

[0086] (Implementation 3) Figure 4 1 is a structural diagram and a functional block diagram of the main parts of the magnetic encoder 1D according to the third embodiment. Figure 4 As shown, the difference between the magnetic encoder 1D of the third embodiment and the first and second embodiments is that the multi-turn rotation sensor units configured as the two systems can update the multi-turn rotation information without power supply. In addition, in order to correspond to the hollow shaft, the arrangement of the elements arranged on the rotation axis and the structure of the magnet are changed, and part of the calculation method of one-turn rotation angle is changed corresponding to the change in the arrangement of the elements. Hereinafter, the same symbols are marked for the same structures as those in the first and second embodiments, and the description is omitted.

[0087] The magnetic encoder 1D includes a first magnet 11D, a second magnet 12, and a third magnet 13, all of which are annular, as magnets for generating a magnetic field for detection. The first magnet 11D is disposed on the other surface 34 of the magnet holding portion 32 (see Figure 5 ) on the outer periphery. The first magnet 11D has a first annular track T1 in which the N pole and the S pole are magnetized one pole each in the circumferential direction, and the center thereof coincides with the rotation axis L. The first track T1 is arranged in two rows in the radial direction. The positions of the N pole and the S pole of the first track T1 adjacent in the radial direction are offset by one pole in the circumferential direction. The structure of the second magnet 12 is the same as that of embodiments 1 and 2. The third magnet 13 is arranged on a surface 33 (refer to Figure 5 The third magnet 13 has an N pole and an S pole each magnetized by one pole, and its center is consistent with the rotation axis L.

[0088] like Figure 4 As shown, the magnetic encoder 1D includes a first multi-turn rotation sensor unit 20C, a second multi-turn rotation sensor unit 20D, a first one-turn rotation sensor unit 40F, and a second one-turn rotation sensor unit 40G.

[0089] The first multi-turn rotation sensor unit 20C includes a first magnetic power element W1, a microcontroller unit 21C, and a first non-volatile memory 22C. The microcontroller unit 21C includes a multi-turn rotation information generating unit 23C. The second multi-turn rotation sensor unit 20D includes a second magnetic power element W2, a microcontroller unit 21D, and a first non-volatile memory 22D. The microcontroller unit 21D includes a multi-turn rotation information generating unit 23D. The first magnetic power element W1 and the second magnetic power element W2 are not arranged on the rotation axis L, but are opposite to the annular first magnet 11D. The first magnetic power element W1 and the second magnetic power element W2 are opposite to the first magnet 11D at a position where the mechanical angle is offset by 180°. The first magnetic power element W1 and the second magnetic power element W2 are mounted on a second substrate 36 opposite to the other surface 34 of the magnet holding portion 32.

[0090] The first one-turn rotation sensor unit 40F includes: a first magnetic sensitive element MR1 facing the second magnet 12; three magnetic detection elements H1, H2, H3 facing the third magnet 13; a microcontroller unit 41F; and a third non-volatile memory 45. The microcontroller unit 41F includes an absolute angle position comprehensive calculation unit 43, and the absolute angle position comprehensive calculation unit 43 is input with the multi-turn rotation information of the two systems and the one-turn rotation angle of the two systems. In addition, a management and supervision unit independent of the first one-turn rotation sensor unit 40F may be provided in the same manner as in Embodiment 1, instead of providing the absolute angle position comprehensive calculation unit 43 in the first one-turn rotation sensor unit 40F.

[0091] In the first one-turn rotation sensor unit 40F, the magnetic detection elements H1, H2, and H3 are arranged at positions that are mutually offset by a mechanical angle of 120° in the phase of rotation centered on the rotation axis L. The first one-turn rotation sensor unit 40F calculates a high-resolution one-turn rotation angle through the same calculation processing as the first one-turn rotation sensor unit 40D of the second embodiment based on the output of the first magnetic sensitive element MR1 and the output of the magnetic detection elements H1, H2, and H3.

[0092] The second one-turn rotation sensor unit 40G includes: three magnetic detection elements H4, H5, and H6 facing the third magnet 13; and a microcontroller unit 41G. The magnetic detection elements H4, H5, and H6 are arranged at positions that are offset from each other by 120° mechanical angle in the phase of rotation centered on the rotation axis L. The second one-turn rotation sensor unit 40G calculates a low-resolution one-turn rotation angle by the same calculation processing as the first one-turn rotation sensor unit 40B of the first embodiment.

[0093] In the first one-turn rotation sensor unit 40F, the absolute angle position integrated calculation unit 43 uses the outputs of the first multi-turn rotation sensor unit 20C and the second multi-turn rotation sensor unit 20D and the first one-turn rotation sensor unit 40F and the second one-turn rotation sensor unit 40G to calculate the absolute angle position of the multi-turn rotation of the rotating body 2. At this time, as in the above-mentioned methods, the absolute angle position is calculated using the multi-turn rotation information and the one-turn rotation angle determined to be normal using the result of the cross-check.

[0094] (Effects of Embodiment 3) As described above, the magnetic encoder 1D of embodiment 3 has: two groups of multi-turn rotation sensor parts, which detect the rotation of the rotating body 2; two groups of one-turn rotation sensor parts, which detect the angular position within the range of one rotation of the rotating body 2, that is, the one-turn rotation angle; an annular first magnet 11, which has a first track T1 magnetized with a pair of N poles and S poles; an annular second magnet 12, which has a second track T2 with multiple pairs of N poles and S poles alternately magnetized in the circumferential direction, and is coaxially arranged with the first magnet 11; and an annular third magnet 13, which is magnetized with a pair of N poles and S poles, and is coaxially arranged with the first magnet 11 and the second magnet 12. The two sets of multi-turn rotation sensor units include: a first multi-turn rotation sensor unit 20C, which includes a first magnetoelectric element W1 opposite to the first magnet 11, and calculates first multi-turn rotation information corresponding to the cumulative number of rotations of the rotating body 2 based on the detection signal of the current generated by the first magnetoelectric element W1; and a second multi-turn rotation sensor unit 20D, which includes a second magnetoelectric element W2 opposite to the first magnet 11, and calculates second multi-turn rotation information corresponding to the cumulative number of rotations of the rotating body 2 based on the detection signal of the current generated by the second magnetoelectric element W2. The first multi-turn rotation sensor unit 20C and the second multi-turn rotation sensor unit 20D respectively perform cross-check processing to verify whether the first multi-turn rotation information and the second multi-turn rotation information are normal. The two groups of one-turn rotation sensor units include: a first one-turn rotation sensor unit 40F, which calculates the first one-turn rotation angle based on the output of the second magnetic sensitive element MR2 and the first magnetic detection element group, the second magnetic sensitive element MR2 is opposite to the second magnet 12, and the first magnetic detection element group is composed of three or more magnetic detection elements including the first, second, and third magnetic detection elements H1, H2, and H3 that are opposite to the third magnet 13 and arranged in the circumferential direction; and a second one-turn rotation sensor unit 40B, which calculates the second one-turn rotation angle based on the output of the second magnetic detection element group, and the second magnetic detection element group is composed of three or more magnetic detection elements including the fourth, fifth, and sixth magnetic detection elements H4, H5, and H6 that are opposite to the third magnet 13 and arranged in the circumferential direction. The first one-turn rotation sensor unit 40F and the second one-turn rotation sensor unit 40B respectively perform cross-check processing to verify whether the first one-turn rotation angle and the second one-turn rotation angle are normal.

[0095] The magnetic encoder 1D of the third embodiment is similar to the first and second embodiments, and includes two systems of multi-turn rotation sensor units and two systems of one-turn rotation sensor units, and verifies whether the output is normal by cross-checking. Therefore, the same effects as those of the first and second embodiments can be obtained. That is, two systems of detection elements and calculation units for outputting absolute angular positions are provided to construct a redundant system, so that even in the event of a failure, the correct absolute angular position can be calculated based on the output of the system without the failure. Therefore, it is possible to avoid the situation where the failure cannot be detected and the abnormal absolute angular position is continuously output.

[0096] In addition, since all magnetic detection mechanisms are used in the same manner as in Embodiments 1 and 2, the structure can be simplified, miniaturization and cost reduction can be achieved, and durability is high compared to the case of using an optical detection mechanism. Moreover, the multi-turn rotation sensor units of both systems can continuously update the multi-turn rotation information without power supply from a battery or an external source. Therefore, the correct absolute angle position can be output without the burden of replacing batteries.

[0097] Moreover, similarly to the modification 4 of the first embodiment, the management and supervision unit 50 is not provided, and the second one-turn rotation sensor unit 40F is used as a unit having the function of the absolute angle position comprehensive calculation unit 43. Therefore, the structure can be simplified and the cost can be reduced. In addition, any one of the first multi-turn rotation sensor unit 20C, the second multi-turn rotation sensor unit 20D, and the first one-turn rotation sensor unit 40G can also have the function of the absolute angle position comprehensive calculation unit 53.

[0098] In the third embodiment, there is a magnet holder 3 having an annular magnet holder 32 centered on the rotation axis of the rotating body 2. The second magnet 12 is arranged on the outer periphery of one surface 33 of the magnet holder 32, and the third magnet 13 is arranged on the inner periphery of the one surface 33. The first magnet 11 is arranged on the other surface of the magnet holder 32. The second magnetic sensor MR2, the first, second, and third magnetic detection elements H1, H2, and H3, and the fourth, fifth, and sixth magnetic detection elements H4, H5, and H6 are arranged on a first substrate 35 opposite to the one surface 33. The first magnetic power generation element W1 and the second magnetic power generation element W2 are arranged on a second substrate 36 opposite to the other surface. In this way, by arranging magnets on the front and back surfaces of the magnet holder 32, the magnetic power generation elements W, W2, and the first magnetic sensor MR1 are opposite to the magnet holder 32 from the opposite sides, and the detection mechanism can be made into a simple and compact structure. In addition, since no detection element is arranged on the rotation axis L, it can correspond to a hollow shaft.

[0099] (Variation of Implementation Example 3) The first one-turn rotation sensor unit 40F of the third embodiment has three magnetic detection elements H1, H2, H3 (first detection element group) opposite to the third magnet 13, and the second one-turn rotation sensor unit 40G has three magnetic detection elements H4, H5, H6 (second detection element group) opposite to the third magnet 13, but in order to perform the process of estimating the one-turn rotation angle, the number of magnetic detection elements opposite to the third magnet 13 and arranged in the circumferential direction can be more than three, and the configuration is not limited to the mechanical angle of 120° interval. That is, the first one-turn rotation sensor unit 40F and the second one-turn rotation sensor unit 40G only need to have at least three magnetic detection elements opposite to the third magnet 13 and arranged at equal angles in the circumferential direction.

[0100] (Other Embodiments) In the third embodiment, the third magnet 13 is provided as a magnet to make the magnetic detection elements H1 to H6 face each other, but a configuration may be adopted in which the magnetic detection elements H1 to H6 face the first magnet 11. In this case, the third magnet 13 is not necessary.

[0101] The structures of the above-mentioned embodiments and modifications can be combined as appropriate. Explanation of symbols

[0102] 1A, 1B, 1C, 1D...magnetic encoder, 2...rotating body, 3...magnet holder, 11, 11D...first magnet, 12...second magnet, 13...third magnet, 20A, 20C...first multi-turn rotation sensor section, 20B, 20D...second multi-turn rotation sensor section, 21A, 21B...microcontroller unit, 22A, 22B...first nonvolatile memory, 23A, 23B...multi-turn rotation information generating section, 31...shaft section, 32...magnet holder, 33...one surface, 34...other surface, 35...first substrate, 35a...first substrate surface, 35b...second substrate surface, 36...first substrate, 37...substrate holder, 38...substrate unit, 39...encoder holder, 40A, 40C, 40D, 40F…first one-turn rotation sensor unit, 40B, 40E, 40G…second one-turn rotation sensor unit, 41A, 41B, 41C, 41D, 41E, 41F, 41G…microcontroller unit, 42, 45, 52…second non-volatile memory, 43, 53…absolute angle position comprehensive calculation unit, 50…management and supervision unit, 51…microcontroller unit, T1…first track, T2…second track, L…rotation axis, L1…one side of the axis direction, L2…the other side of the axis direction, MR1…first magnetic sensitive element, MR2…second magnetic sensitive element, H1, H2, H3, H4, H5, H6, H7…magnetic detection element, W…magnetic power generation element, W1…first magnetic power generation element, W2…second magnetic power generation element.

Claims

1. A magnetic encoder for detecting the absolute angular position of a rotating body, characterized in that: have: two sets of multi-turn rotation sensor units, the two sets of multi-turn rotation sensor units detecting the rotation of the rotating body; Two sets of one-turn rotation sensor units, the two sets of one-turn rotation sensor units detect the angular position within the range of one turn of the rotating body, that is, the one-turn rotation angle; A first magnet, the first magnet being magnetized with a pair of N poles and S poles; as well as an annular second magnet having a second track with a plurality of pairs of N poles and S poles alternately magnetized in the circumferential direction and arranged coaxially with the first magnet, The two sets of multi-turn rotation sensor units include: a first multi-turn rotation sensor unit including a magnetoelectric element opposed to the first magnet and calculating first multi-turn rotation information corresponding to the accumulated number of rotations of the rotating body based on a detection signal of a current generated by the magnetoelectric element; as well as a second multi-turn rotation sensor unit that calculates second multi-turn rotation information corresponding to the cumulative number of rotations of the rotating body based on outputs of a first magnetic detection element and a second magnetic detection element that are opposite to the first magnet and are mechanically offset by 90°; The first multi-turn rotation sensor unit and the second multi-turn rotation sensor unit respectively perform cross-check processing to verify whether the first multi-turn rotation information and the second multi-turn rotation information are normal. The two sets of one-turn sensor units include: a first one-turn rotation sensor unit, which calculates a first one-turn rotation angle based on outputs of a first magnetic sensitive element, the first and second magnetic detection elements or a third and fourth magnetic detection elements, and a second magnetic sensitive element, wherein the first magnetic sensitive element is opposite to the second magnet, the third and fourth magnetic detection elements are opposite to the first magnet, and the mechanical angle is offset by 90°, and the second magnetic sensitive element is opposite to the first magnet; as well as a second one-turn rotation sensor unit, which calculates a second one-turn rotation angle based on an output of a first magnetic detection element group, wherein the first magnetic detection element group is composed of three or more magnetic detection elements including a fifth magnetic detection element, a sixth magnetic detection element, and a seventh magnetic detection element that are opposite to the first magnet and arranged in a circumferential direction, The first rotation sensor unit and the second rotation sensor unit respectively perform a cross-check process to verify whether the first rotation angle and the second rotation angle are normal.

2. A magnetic encoder for detecting the absolute angular position of a rotating body, characterized in that: have: two sets of multi-turn rotation sensor units, the two sets of multi-turn rotation sensor units detecting the rotation of the rotating body; Two sets of one-turn rotation sensor units, the two sets of one-turn rotation sensor units detect the angular position within the range of one turn of the rotating body, that is, the one-turn rotation angle; A first magnet, the first magnet being magnetized with a pair of N poles and S poles; as well as an annular second magnet having a second track with a plurality of pairs of N poles and S poles alternately magnetized in the circumferential direction and arranged coaxially with the first magnet, The two sets of multi-turn rotation sensor units include: a first multi-turn rotation sensor unit including a magnetoelectric element opposed to the first magnet and calculating first multi-turn rotation information corresponding to the accumulated number of rotations of the rotating body based on a detection signal of a current generated by the magnetoelectric element; as well as a second multi-turn rotation sensor unit that calculates second multi-turn rotation information corresponding to the cumulative number of rotations of the rotating body based on outputs of a first magnetic detection element and a second magnetic detection element that are opposite to the first magnet and are mechanically offset by 90°; The first multi-turn rotation sensor unit and the second multi-turn rotation sensor unit respectively perform cross-check processing to verify whether the first multi-turn rotation information and the second multi-turn rotation information are normal. The two sets of one-turn sensor units include: a first one-turn rotation sensor unit, the first one-turn rotation sensor unit calculating a first one-turn rotation angle based on outputs of a first magnetic sensitive element and a first magnetic detection element group, wherein the first magnetic sensitive element is opposite to the second magnet, and the first magnetic detection element group is composed of three or more magnetic detection elements including a third detection element, a fourth detection element, and a fifth magnetic detection element which are opposite to the first magnet and arranged in a circumferential direction; as well as a second one-turn rotation sensor unit, which calculates a second one-turn rotation angle based on an output of a second magnetic sensitive element and the first and second magnetic detection elements or a sixth and seventh magnetic detection elements, wherein the second magnetic sensitive element is opposite to the first magnet, the sixth and seventh magnetic detection elements are different from the first and second magnetic detection elements, and have a mechanical angle offset of 90°, The first rotation sensor unit and the second rotation sensor unit respectively perform a cross-check process to verify whether the first rotation angle and the second rotation angle are normal.

3. A magnetic encoder for detecting the absolute angular position of a rotating body, characterized in that: have: two sets of multi-turn rotation sensor units, the two sets of multi-turn rotation sensor units detecting the rotation of the rotating body; Two sets of one-turn rotation sensor units, the two sets of one-turn rotation sensor units detect an angular position within a range of one turn of the rotating body, that is, a one-turn rotation angle; A first annular magnet having a first track magnetized with a pair of N poles and S poles; an annular second magnet having a second track having a plurality of pairs of N poles and S poles alternately magnetized in a circumferential direction and arranged coaxially with the first magnet; and a third annular magnet, the third magnet being magnetized with a pair of N poles and S poles and being coaxially arranged with the first magnet and the second magnet, The two sets of multi-turn rotation sensor units include: a first multi-turn rotation sensor unit including a first magnetoelectric element opposed to the first magnet and calculating first multi-turn rotation information corresponding to the accumulated number of rotations of the rotating body based on a detection signal of a current generated by the first magnetoelectric element; as well as a second multi-turn rotation sensor unit, the second multi-turn rotation sensor unit having a second magnetoelectric element opposed to the first magnet, and calculating second multi-turn rotation information corresponding to the accumulated number of rotations of the rotating body based on a detection signal of a current generated by the second magnetoelectric element, The first multi-turn rotation sensor unit and the second multi-turn rotation sensor unit respectively perform cross-check processing to verify whether the first multi-turn rotation information and the second multi-turn rotation information are normal. The two sets of one-turn sensor units include: a first one-turn rotation sensor unit that calculates a first one-turn rotation angle based on outputs of a first magnetic sensing element that is opposite to the second magnet and a first magnetic detection element group that is composed of three or more magnetic detection elements including a first magnetic detection element, a second magnetic detection element, and a third magnetic detection element that are opposite to the third magnet and arranged in a circumferential direction; and a second one-turn rotation sensor unit, which calculates a second one-turn rotation angle based on an output of a second magnetic detection element group, wherein the second magnetic detection element group is composed of three or more magnetic detection elements including a fourth magnetic detection element, a fifth magnetic detection element, and a sixth magnetic detection element that are arranged circumferentially opposite to the third magnet, The first rotation sensor unit and the second rotation sensor unit respectively perform a cross-check process to verify whether the first rotation angle and the second rotation angle are normal.

4. The magnetic encoder according to claim 3, characterized in that: A magnet holder is provided, the magnet holder having an annular magnet holding portion centered on the rotation axis of the rotating body, The second magnet is arranged on the outer periphery of one surface of the magnet holding portion. The third magnet is arranged on the inner periphery of the one surface, The first magnet is arranged on the other surface of the magnet holding portion. The first magnetic sensing element, the first magnetic detection element, the second magnetic detection element, the third magnetic detection element, the fourth magnetic detection element, the fifth magnetic detection element, and the sixth magnetic detection element are arranged on a first substrate opposite to the one surface. The first magnetoelectric element and the second magnetoelectric element are arranged on a second substrate facing the other surface.

5. The magnetic encoder according to any one of claims 1 to 3, characterized in that: A management and supervision unit is provided, the management and supervision unit being connected to the first multi-turn rotation sensor unit, the second multi-turn rotation sensor unit, the first single-turn rotation sensor unit, and the second single-turn rotation sensor unit, The management and supervision unit includes an absolute angular position integrated calculation unit that calculates the absolute angular position based on the first multi-rotation information, the second multi-rotation information, the first one-rotation angle, and the second one-rotation angle.

6. The magnetic encoder according to any one of claims 1 to 3, characterized in that: One of the first rotation sensor unit and the second rotation sensor unit includes an absolute angular position integrated calculation unit that calculates the absolute angular position based on the first multi-rotation information, the second multi-rotation information, the first rotation angle, and the second rotation angle.

7. The magnetic encoder according to claim 6, characterized in that: A nonvolatile memory is provided, the nonvolatile memory stores the first multi-turn rotation information, and the first multi-turn rotation information is updated by the current generated by the magnetic generating element, The absolute angular position integrated calculation unit calculates the absolute angular position based on the first multi-rotation information read from the nonvolatile memory at the time of activation.

8. The magnetic encoder according to any one of claims 1 to 3, characterized in that: The first magneto-sensitive element is a magnetoresistive effect element having an A-phase magnetoresistive pattern and a B-phase magnetoresistive pattern having a phase difference of 90° with each other. The second tracks are arranged in two rows in the radial direction, the positions of the S poles and the N poles of adjacent second tracks are offset by one pole in the circumferential direction, and the first magnetic sensor element faces a boundary of adjacent second tracks.

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