Photomask plate transmission control system of photoetching machine

Abstract

The photomask plate transmission control system comprises a service-based photomask plate control module, a photomask plate transmission control module and a photomask plate transmission control module, the service manager is used for managing tasks required for executing user services and execution logic of the tasks, and the service state machine is used for acquiring the tasks to be executed from the service manager, calling a task execution interface of a photomask project module and receiving task execution results from the photomask project module; the task-based photomask project module comprises a task manager which is used for providing an action interface for the dynamic combination of the tasks of the photomask business module, and a task state machine which is used for acquiring an action to be executed from the task manager, calling the electrical equipment management module to execute the action and receiving an action execution result; and the electrical equipment management module is used for managing the electrical equipment executing the action. In this way, complex business decomposition is controlled through photomask plate transmission, a double-queue organization business model is adopted, and business issuing and response are rapidly achieved under the condition that other subsystems are not affected.

Description

Technical Field

[0001] The present application relates to the technical field of photolithography machines, and more specifically, to a mask transmission control system for a photolithography machine. Background Art

[0002] The photolithography machine is an important equipment in the semiconductor manufacturing process. Its function is to accurately transfer the circuit pattern in the mask (also called the mask) to the silicon wafer or other substrate according to the predetermined size and position through the exposure process. This requires extremely high alignment accuracy between the mask and the silicon wafer or other substrate, which puts high demands on the transmission control of the mask.

[0003] Therefore, it is desirable to provide a solution for a high-performance photomask transmission control system of a lithography machine. Summary of the invention

[0004] An embodiment of the present application provides a photomask transmission control system for a lithography machine, which decomposes complex photomask transmission control services and adopts a dual-queue organization business model to quickly implement business delivery and response without affecting other subsystems.

[0005] According to one aspect of the present application, a photomask transmission control system for a lithography machine is provided, comprising: a business-based photomask control module, including a business manager for managing tasks required for executing the business and the execution logic of the tasks, and a business state machine that obtains the tasks to be executed from the business manager, calls the execution task interface of the photomask project module, and receives the task execution results from the photomask project module; a task-based photomask project module, including a task manager for providing an action interface for dynamic combination of tasks of the photomask business module, and a task state machine that obtains the actions to be executed from the task manager, calls the electrical equipment management module to execute the actions, and receives the action execution results; and an electrical equipment management module, which is used to manage the electrical equipment that executes the actions.

[0006] In the above-mentioned mask transmission control system, the service manager includes a service interface for at least one of plate loading, plate moving, preloading and mask scanning.

[0007] In the above-mentioned mask transmission control system, the business state machine returns a pointer to a predetermined object in the mask project module by calling a function for a task message that pops up in the business queue, and calls the execution task interface of the mask project module according to the type of the task message that pops up.

[0008] In the above-mentioned mask transmission control system, the task manager includes at least one of the following task interfaces: taking the plate from the mask storage library, taking the plate from the mechanical alignment position carrier, taking the plate from the cache table, taking the plate from the mask table, placing the plate from the robot on the mask storage library, placing the plate from the robot on the mechanical alignment position carrier, placing the plate from the robot on the cache table, placing the plate from the robot on the mask table, rough alignment on the mask table, pre-alignment on the mechanical alignment position carrier, scanning on the mask storage library and scanning on the mechanical alignment position carrier.

[0009] In the above-mentioned mask transmission control system, the task state machine returns a pointer to a predetermined object in the electrical equipment management module by calling a function for an action message that pops up in the task queue, and calls the electrical equipment interface of the electrical equipment management module according to the type of action message that pops up.

[0010] In the above-mentioned photomask transmission control system, the action message includes checking whether there is a waiting parallel message or whether there is an error in the previous task, and jumping out in response to the waiting parallel message or the error in the previous task.

[0011] In the above-mentioned mask transmission control system, the action message includes the need to check whether there are waiting parallel messages and whether the message processing result is successful, and in response to there being no waiting parallel messages and the message processing is successful and there are tasks in the task manager, the next action is constructed.

[0012] In the above-mentioned mask transmission control system, the task state machine obtains the next action to be executed from the task manager according to the execution result of the action returned from the electrical equipment management module and executes it.

[0013] In the above-mentioned mask transmission control system, the service state machine obtains the next service to be executed from the service manager according to the execution result of the task returned from the task state machine and executes it.

[0014] In the above-mentioned photomask transmission control system, the electrical equipment management module is used to provide an operation interface for electrical equipment including a motor, a manipulator, air flotation, and a barcode scanner, and notification of electrical equipment messages.

[0015] The mask transmission control system of the lithography machine provided in the embodiment of the present application can decompose the complex business of the mask transmission control and adopt a dual-queue organization business model to quickly implement business delivery and response without affecting other subsystems. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] By reading the detailed description of the preferred specific embodiments below, various other advantages and benefits of the present application will become clear to those of ordinary skill in the art. The drawings in the specification are only used for the purpose of illustrating the preferred embodiments and are not considered to be limitations of the present application. Obviously, the drawings described below are only some embodiments of the present application. For those of ordinary skill in the art, other drawings can also be obtained based on these drawings without creative work. Moreover, the same reference numerals are used to represent the same components throughout the drawings.

[0017] Figure 1 The figure illustrates a schematic business structure diagram of a mask transmission control system of a lithography machine according to an embodiment of the present application.

[0018] Figure 2 A schematic physical structure diagram of a mask transmission control system of a lithography machine according to an embodiment of the present application is illustrated.

[0019] Figure 3 The figure illustrates a schematic system architecture diagram of a mask transmission control system of a lithography machine according to an embodiment of the present application.

[0020] Figure 4 The diagram illustrates a dual-queue framework flow chart of a mask transmission control system of a lithography machine according to an embodiment of the present application.

[0021] Figure 5 The diagram illustrates a process flow chart of the mask transmission control system of a lithography machine according to an embodiment of the present application. DETAILED DESCRIPTION

[0022] Below, the exemplary embodiments according to the present application will be described in detail with reference to the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments of the present application, and it should be understood that the present application is not limited to the exemplary embodiments described here.

[0023] Schematic system

[0024] In the lithography machine, the main tasks that the mask transmission control system needs to implement include plate loading, plate moving, preloading, and mask scanning. Figure 1 Here, Figure 1 The diagram shows a schematic business structure diagram of the mask transmission control system of the lithography machine according to the embodiment of the present application. According to the current specific business that needs to be implemented, the mask transmission control system efficiently and safely controls physical mechanisms such as manipulators and motors, usually electrical equipment to complete all actions that need to be performed under the business, such as Figure 2 Here, Figure 2The figure shows a schematic physical structure diagram of a mask transport control system of a lithography machine according to an embodiment of the present application. RM is a reticle memory, which is a structure for placing a mask box; RS is a reticle stage, which is an external device for placing a mask; PRE is a mechanical alignment stage, which has a suction cup for sucking the mask; and CS is a cache stage, which has a suction cup for sucking the mask.

[0025] At the same time, the mask transmission control system is an indivisible minimum control unit for other control systems. Therefore, when executing a business request from another control system, the response working mode is adopted. When other control systems send business requests again, they should queue in the mask transmission control system and wait for the last business occupancy to end before execution.

[0026] Figure 3 FIG. 1 is a schematic system architecture diagram of a mask transmission control system of a lithography machine according to an embodiment of the present application. Figure 3 As shown, in the photomask transmission control system of the lithography machine according to the embodiment of the present application, it includes a business-based photomask control module (RTController) and a task-based photomask entry module (RTEntry), as well as an electrical equipment management module.

[0027] Among them, the business-based mask control module includes a business manager for managing the tasks required to execute user business and the execution logic of the tasks, and a business state machine that obtains the tasks to be executed from the business manager, calls the execution task interface of the mask project module, and receives the task execution results from the mask project module.

[0028] As described above, for the services that need to be implemented by the mask transmission control system of the lithography machine, the service manager may, for example, include the following service interfaces: BNEStatus UpReticle() for uploading the plate, BNEStatusMoveReticle() for moving the plate, BNEStatus PreLoad() for preloading, and BNEStatusScanReticles() for scanning the mask.

[0029] Based on this, the code logic of the business state machine is as follows:

[0030] void BusinessStateMachine::Loop()

[0031] {

[0032] while(flag_){

[0033] std::unique_ptr <entrycallbackmsg>message=

[0034] PopBusinessStateMachineQueue();

[0035] if(message){

[0036] switch(message->type){

[0037] case MANAGER_RESOLVE:{

[0038] HandleTask(message->task); / / Call the execution task interface

[0039] break;

[0040] }

[0041] case SUB_STRATUM:{ / / Process message

[0042] HandleMessage(message);

[0043] break;

[0044] }

[0045] case EXTERNAL:{ / / Process external notification conversion message

[0046] HandleNotify(message);

[0047] break;

[0048] }

[0049] default:

[0050] break;

[0051] }

[0052] }

[0053] }

[0054] }

[0055] That is, by defining a loop function named BusinessStateMachine, messages in the queue of the business state machine are processed, and different processing functions are called according to the message type.

[0056] Specifically, after the message is popped from the queue of the business state machine, the PopBusinessStateMachineQueue function is called to return a pointer to the EntryCallbackMsg object, ie, a predetermined object in the mask project module, and std::unique_ptr is used to manage dynamically allocated objects.

[0057] According to the type of message, if it is a MANAGER_RESOLVE type message, the execution task interface is called, if it is a SUB_STRATUM type message, the message is processed, and if it is an EXTERNAL type message, the message of external notification conversion is processed. That is, after calling the mask project module execution task interface, the business state machine receives the task execution result from the mask project module in the form of an external message, and obtains the next task to be executed from the business manager according to the task execution result and executes it.

[0058] Furthermore, the task-based mask project module includes a task manager for providing a task interface for the dynamic combination of tasks in the mask business module, and a task state machine for obtaining actions to be executed from the task manager, calling the electrical equipment management module to execute actions and receiving action execution results.

[0059] Among them, the task interface provided by the task manager includes, for example, the following: BNEStatus TakeFromRM() for taking a plate from the mask template storage library, BNEStatus TakeFromPRE() for taking a plate from the mechanical alignment stage, BNEStatus TakeFromCS() for taking a plate from the buffer stage, BNEStatusTakeFromRS() for taking a plate from the mask template stage, BNEStatus PutToRM() for putting the plate from the robot to the mask template storage library, BNEStatus PutToPRE() for putting the plate from the robot to the mechanical alignment stage, BNEStatus PutToCS() for putting the plate from the robot to the buffer stage, BNEStatusPutToRS() for putting the plate from the robot to the mask template stage, BNEStatus CoarseAlignAtRS() for coarse alignment on the mask template stage, BNEStatus PreAlignAtPRE() for pre-alignment of the mechanical alignment stage, BNEStatusScanAtRM() for scanning on the mask template storage library, and BNEStatusScanAtRM() for scanning on the mechanical alignment stage. ScanAtPRE().

[0060] Similarly, the code logic of the task state machine is as follows:

[0061]

[0062]

[0063] That is, by defining a loop function named TaskStateMachine, the messages in the queue of the task state machine are processed, and different processing functions are called according to the message type.

[0064] Specifically, after the message is popped from the queue of the task state machine, the PopTaskStateMachineQueue function is called to return a pointer to the ElectricCallbackMsg object, ie, a predetermined object in the electrical equipment management module, and std::unique_ptr is used to manage dynamically allocated objects.

[0065] According to the type of message, if it is a MANAGER_RESOLVE type message, the electrical device interface is called. If it is a SUB_STRATUM type message, the message is processed, and it is checked whether there is a waiting parallel message (expectMsgs_.empty()) or whether the previous task has an error (BNE_SUCCESS!=msg->rc). If there is a waiting parallel message or the previous task has an error, it will jump out. If there are still tasks in the task manager (tm_), the ConstructNextAction function is called to construct the next action. If there are no tasks in the task manager, the NextAction function is called.

[0066] Use the CheckIsTaskFinish function to check whether the task is completed.

[0067] If it is an EXTERNAL type message, the electrical device message is processed. In addition, it is necessary to check whether there is a waiting parallel message (expectMsgs_.empty()) and whether the message processing result is successful (msg->rc==BNE_SUCCESS). If there is no waiting parallel message and the message processing is successful, and there are tasks in the task manager (tm_), the ConstructNextAction function is called to construct the next action.

[0068] Furthermore, after calling the electrical equipment management module to execute an action, the task state machine receives the action execution result, and obtains the next action to be executed from the task manager according to the action execution result and executes it.

[0069] In addition, in the embodiment of the present application, the electrical equipment management module (DeviceManager) is used to provide operation interfaces for motors, manipulators, air floats, barcode scanners and other electrical equipment and notifications of electrical equipment messages.

[0070] In this way, the mask transmission control system of the lithography machine according to the embodiment of the present application is layered from the system architecture through a business-based mask control module, a task-based mask project module and an electrical equipment management module, and a dual-queue organization business model based on complex business decomposition is constructed through mutually separated modularization and reusability, so as to quickly realize business delivery and response without affecting other subsystems.

[0071] Here, by using a state machine to manage mask transmission control, complex business processes can be made clear and controllable, and tasks can be dynamically combined to complete complex businesses, achieve code reuse, and apply a dual-queue framework to decompose and distribute businesses, achieving separation between the control layer and the access layer and reducing code coupling.

[0072] Figure 4 The figure shows a dual queue framework flow chart of a mask transmission control system of a lithography machine according to an embodiment of the present application. Figure 4 As shown in the figure, for the complex business issued, the business manager queues the business, and the business state machine calls the corresponding task interface to transfer it to the task manager and enter the task queue. Then, the task state machine calls the electrical device to execute the electrical device action, and executes subsequent actions and tasks by returning message notifications.

[0073] Application Examples

[0074] Figure 5 The diagram illustrates a process flow chart of the mask transmission control system of a lithography machine according to an embodiment of the present application.

[0075] like Figure 5 As shown, first, the business manager decomposes the plate loading business into a combination of tasks such as RM plate retrieval, PRE pre-alignment, RS rough alignment, and RS plate placement, and adds it to the task queue, which is stored by BusinessManagerQueue, and organizes the tasks to enter the business state machine for processing. The business state machine processes the RM plate retrieval, PRE pre-alignment, RS rough alignment, and RS plate placement tasks in turn.

[0076] Then, the task manager decomposes the task, organizes the actions of RM plate taking, PRE pre-alignment, RS rough alignment, RS plate placing, etc., and stores them in TaskManagerQueue. The actions of the organized tasks enter the task state machine for processing, and the corresponding electrical actions are executed in sequence.

[0077] Among them, after each electrical action is executed, the task state machine receives the return message from the appliance and takes the next action. After each task is executed, the task state machine notifies the business state machine to take the next task until all tasks in the business queue are executed, and the publishing business is completed.

[0078] The basic principles of the present application are described above in conjunction with specific embodiments. However, it should be noted that the advantages, strengths, effects, etc. mentioned in the present application are only examples and not limitations, and it cannot be considered that these advantages, strengths, effects, etc. are required by each embodiment of the present application. In addition, the specific details disclosed above are only for the purpose of illustration and ease of understanding, not for limitation, and the above details do not limit the present application to being implemented by adopting the above specific details.

[0079] The block diagrams of the devices, apparatuses, equipment, and systems involved in this application are only illustrative examples and are not intended to require or imply that they must be connected, arranged, and configured in the manner shown in the block diagrams. As will be appreciated by those skilled in the art, these devices, apparatuses, equipment, and systems can be connected, arranged, and configured in any manner. Words such as "including", "comprising", "having", etc. are open words, meaning "including but not limited to", and can be used interchangeably with them. The words "or" and "and" used here refer to the words "and / or" and can be used interchangeably with them, unless the context clearly indicates otherwise. The word "such as" used here refers to the phrase "such as but not limited to", and can be used interchangeably with it.

[0080] It should also be noted that in the apparatus, device and method of the present application, each component or each step can be decomposed and / or recombined. Such decomposition and / or recombination should be regarded as equivalent solutions of the present application.

[0081] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use the present application. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein may be applied to other aspects without departing from the scope of the present application. Therefore, the present application is not intended to be limited to the aspects shown herein, but rather to the widest scope consistent with the principles and novel features disclosed herein.

[0082] The above description has been given for the purpose of illustration and description. In addition, this description is not intended to limit the embodiments of the present application to the forms disclosed herein. Although multiple example aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, changes, additions and sub-combinations thereof.< / entrycallbackmsg>

Claims

1. A mask transmission control system for a photolithography machine, comprising: A business-based mask project module includes a business manager for managing tasks and task execution logic required for executing the business, and a business state machine for obtaining tasks to be executed from the business manager, calling an execution task interface of the mask project module, and receiving task execution results from the mask project module; The task-based mask project module includes a task manager for providing an action interface for the dynamic combination of tasks in the mask business module, and a task state machine for obtaining actions to be executed from the task manager, calling an electrical equipment management module to execute actions, and receiving action execution results; and The electrical equipment management module is used to manage the electrical equipment that performs actions.

2. The photomask transmission control system according to claim 1, wherein: The service manager includes a service interface for at least one of plate loading, plate moving, preloading and mask scanning.

3. The photomask transmission control system according to claim 1, wherein: The business state machine returns a pointer to a predetermined object in the mask project module by calling a function for a task message popped up in the business queue, and calls the execution task interface of the mask project module according to the type of the popped-up task message.

4. The photomask transmission control system according to claim 1, wherein: The task manager includes at least one of the following task interfaces: taking a plate from a mask storage library, taking a plate from a mechanical alignment position carrier, taking a plate from a buffer table, taking a plate from a mask table, placing a plate from a robot onto a mask storage library, placing a plate from a robot onto a mechanical alignment position carrier, placing a plate from a robot onto a buffer table, placing a plate from a robot onto a mask table, rough alignment on the mask table, pre-alignment on the mechanical alignment position carrier, scanning on the mask storage library, and scanning on the mechanical alignment position carrier.

5. The photomask transmission control system according to claim 1, wherein: The task state machine returns a pointer to a predetermined object in the electrical equipment management module by calling a function for an action message popped up in the task queue, and calls the electrical equipment interface of the electrical equipment management module according to the type of the action message popped up.

6. The photomask transmission control system according to claim 5, wherein: The action message includes checking whether there is a waiting parallel message or whether there is an error in the previous task, and jumping out in response to there being a waiting parallel message or an error in the previous task.

7. The photomask transmission control system according to claim 5, wherein: The action message includes the need to check whether there are waiting parallel messages and whether the message processing result is successful, and in response to there being no waiting parallel messages and the message processing is successful and there are tasks in the task manager, construct the next action.

8. The photomask transmission control system according to claim 1, wherein: The task state machine obtains the next action to be executed from the task manager according to the execution result of the action returned from the electrical equipment management module and executes it.

9. The photomask transmission control system according to claim 1, wherein: The service state machine obtains the next service to be executed from the service manager according to the execution result of the task returned from the task state machine and executes it.

10. The photomask transmission control system according to claim 1, wherein: The electrical equipment management module is used to provide an operation interface for electrical equipment including a motor, a manipulator, air flotation, and a barcode scanner, and notification of electrical equipment messages.

Images