A glow electrode using an inverted "L" shaped insulating structure

Abstract

The application provides a glow electrode with an inverted L-shaped insulation structure, which comprises an anode plate, an active cooling plate and an insulation ceramic. The anode plate is fixed to the active cooling plate through bolts, and the active cooling plate is internally provided with a cooling pipeline which can be actively supplied with water for heat dissipation. The insulation ceramic block is laid between the anode plate and the active cooling plate. In order to prevent the deterioration of the insulation performance caused by the particle deposition and film plating in the process of the glow discharge and the plasma discharge, an inverted L-shaped slotted ceramic is arranged at the periphery of the insulation ceramic block. The particles from the plasma make it difficult for the particles to be reflected into the slotted part, especially the part after the turning, so that the outer surface of the ceramic is not completely plated with the film, the insulation failure is avoided, the insulation performance between the anode plate and the cooling plate is effectively improved, and the normal use of the electrode is ensured.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of plasma wall treatment, in particular to a glow electrode using inverted "L" type insulation structure. The glow electrode is protected by inverted "L" type slotted insulation ceramic and active cooling plate to avoid plasma deposition on the surface of the ceramic in the device, which causes insulation failure, thereby protecting the insulation of the electrode. BACKGROUND

[0002] In a tokamak device, glow discharge cleaning is one of the important wall treatment methods, aiming to remove impurities and fuel particles deposited on the surface of the first wall. The basic principle is to introduce working gas into the vacuum chamber, apply high voltage to the glow electrode as an anode, and the inner wall of the device is grounded as a cathode to form a Paschen breakdown at a certain gas pressure to generate glow plasma to achieve cleaning effect. The glow electrode is mainly composed of an electrode plate, an insulation ceramic and an active cooling plate. When the plasma is running, part of the particles will deposit on the outer surface of the insulation ceramic, causing the ceramic insulation to fail, and thus the electrode cannot be used normally. SUMMARY

[0003] In order to solve the problem of unstable reliability of ceramic insulation between the current glow electrode and the active cooling plate, and to avoid particle deposition and adhesion on the surface of the ceramic during plasma operation or wall treatment in the tokamak device, the ceramic insulation fails. The present application provides a glow electrode using inverted "L" type insulation structure. The inverted "L" type slotted ceramic structure avoids complete coating of the outer surface of the ceramic, thereby effectively improving the insulation of the electrode.

[0004] The technical scheme adopted by the present application is: a glow electrode using inverted "L" type insulation structure, the glow electrode comprising an electrode body, an insulation ceramic and an active cooling plate; the insulation ceramic comprises an inverted "L" type ceramic block and a common ceramic block, the active cooling plate is used for cooling the electrode body, the insulation ceramic is installed between the electrode body and the active cooling plate, and is used for insulating the electrode body from the active cooling plate; the common ceramic block and the inverted "L" type ceramic block are laid on the active cooling plate, and the inverted "L" type ceramic block is tightly attached to the periphery of the common ceramic block; the electrode body is installed above the inverted "L" type ceramic block and the common ceramic block, and the electrode body is connected with the active cooling plate by bolts, so that the electrode plate, the common ceramic block, the inverted "L" type ceramic block and the active cooling plate are tightly attached.

[0005] The present application has the following beneficial effects:

[0006] The present invention proposes a glow electrode utilizing an inverted "L"-shaped insulating structure. During the operation of a tokamak device, the design of the inverted "L"-shaped ceramic block structure prevents plasma from being deposited on the outer surface of the ceramic and causing insulation failure, thereby improving the reliability of the glow discharge electrode of the tokamak device and providing good wall conditions for plasma operation. At the same time, it also provides a new and convenient method for other devices to avoid insulation failure caused by plasma coating. BRIEF DESCRIPTION OF THE DRAWINGS

[0007] Figure 1 It is a schematic diagram of an inverted "L"-shaped ceramic block of the present invention;

[0008] Figure 2 It is a schematic diagram of the inverted "L"-shaped ceramic block of the present invention installed on the electrode body.

[0009] In the figure, there is an electrode body 1, an inverted "L"-shaped ceramic block 2, a common ceramic block 3, and an active cooling plate 4. DETAILED DESCRIPTION

[0010] The following will provide a clear and complete description of the technical solution of the present invention in conjunction with the schematic diagram of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0011] The present invention provides a glow electrode utilizing an inverted "L" type insulating structure, such as Figure 2 As shown, the glow electrode includes an electrode body 1, insulating ceramic, and an active cooling plate 4; the insulating ceramic includes an inverted "L"-shaped ceramic block 2 and a conventional ceramic block 3. The electrode body 1 generates a large amount of heat during operation, requiring cooling by an active cooling plate 4 with a water-cooling structure. To ensure insulation between the electrode body 1 and the active cooling plate 4, an insulating ceramic is installed between the two.

[0012] Furthermore, during the operation of the tokamak device, an inverted "L"-shaped ceramic block 2 is installed at the outermost periphery to ensure that the outer side of the entire electrode body 1 is still insulated from the active cooling plate 4 after being coated with plasma.

[0013] like Figure 1As shown, the inverted "L" shaped ceramic block 2 adopts an inverted "L" slot design. The inverted "L" shaped ceramic block 2 is block-shaped as a whole. The inverted "L" shaped ceramic block 2 is formed by an inverted "L" slot of a certain width running through the left and right sides of the ceramic block. The inverted "L" slot divides the ceramic block into two parts, front and back, wherein the height of the front part is lower than the height of the back part. The ordinary ceramic block 3 and the inverted "L" shaped ceramic block 2 are laid on the top of the active cooling plate 4, and the inverted "L" shaped ceramic block 2 is close to the outer periphery of the ordinary ceramic block 3; the electrode body 1 is installed on the inverted "L" shaped ceramic block 2 and the ordinary ceramic block 3, and the electrode body 1 is connected to the active cooling plate 4 with bolts, so that the electrode body 1 and the ordinary ceramic block 3, as well as the inverted "L" shaped ceramic block 2 and the active cooling plate 4 are tightly fitted to ensure timely heat transfer. The higher rear part of the inverted "L"-shaped ceramic block 2 fits tightly with the ordinary ceramic block 3, and the upper surface of the rear part fits tightly with the electrode body 1. The lower front part of the inverted "L"-shaped ceramic block 2 has a gap with the electrode body 1. The inverted "L"-shaped ceramic block 2 and the ordinary ceramic block 3 isolate the electrode body 1 from the active cooling plate 4. The particles from the plasma are coated on the periphery of the two ceramic blocks but it is difficult to enter the surface of the inverted "L" groove part, thereby avoiding the outer surface of the ceramic block from being completely coated and thus preventing insulation failure. The glow electrode can effectively improve the insulation performance between the electrode body 1 and the active cooling plate 4, ensuring the normal use of the electrode.

[0014] The electrode body 1 utilizes a flat anode structure. During operation, a working gas (D2, He) is introduced into the device and maintained at a constant pressure. A positive voltage is applied to the anode plate, making it act as the anode. The grounded device wall acts as the cathode, generating a glow discharge within the vacuum chamber to remove impurities trapped on the first wall surface. During operation, water is introduced into the active cooling plate 4 to cool the electrode body 1.

[0015] The active cooling plate 4 has a flow channel inside, and cooling water is passed through it to relieve the heat load deposited on the electrode surface when in use.

[0016] By adopting an inverted "L" slot design, when the plasma of the tokamak device is running, the outer surface of the inverted "L"-shaped ceramic block 2 can be prevented from being deposited by particles and losing its insulating function, thereby effectively improving the insulation performance between the anode and the active cooling plate 4 and ensuring the normal use of the electrode.

[0017] Although the specific embodiments of the present invention are described above to facilitate understanding of the present invention by those skilled in the art, and it should be clear that the present invention is not limited to the scope of the specific embodiments, it is obvious to those skilled in the art that as long as various changes are within the spirit and scope of the present invention as defined and determined by the appended claims, these changes are obvious, and all inventions and creations utilizing the concepts of the present invention are protected.

Claims

1. A glow electrode using an inverted "L"-shaped insulation structure, characterized in that: The glow electrode includes an electrode body, insulating ceramic and an active cooling plate; the insulating ceramic includes an inverted "L"-shaped ceramic block and an ordinary ceramic block; the active cooling plate is used to cool the electrode body; the insulating ceramic is installed between the electrode body and the active cooling plate to insulate the electrode body from the active cooling plate; ordinary ceramic blocks and inverted "L"-shaped ceramic blocks are laid on top of the active cooling plate, with the inverted "L"-shaped ceramic blocks closely attached to the outer periphery of the ordinary ceramic blocks; the electrode body is installed on top of the inverted "L"-shaped ceramic block and the ordinary ceramic block, and the electrode body is connected to the active cooling plate with bolts, so that the electrode body, the ordinary ceramic block, the inverted "L"-shaped ceramic block and the active cooling plate are tightly fitted together; The inverted "L"-shaped ceramic block is block-shaped as a whole, and is formed by an inverted "L"-shaped groove of a certain width running through the left and right sides of the ceramic block. The inverted "L"-shaped groove divides the ceramic block into two parts, front and back, wherein the height of the front part is lower than the height of the rear part; the rear part of the inverted "L"-shaped ceramic block with a higher height fits tightly with the ordinary ceramic block, and the upper surface of the rear part fits tightly with the electrode body, and the upper surface of the front part of the inverted "L"-shaped ceramic block with a lower height has a gap with the electrode body.

2. The glow electrode with an inverted "L"-shaped insulating structure according to claim 1, characterized in that: There is a flow channel inside the active cooling plate, and cooling water is passed through it when in use to relieve the heat load deposited on the surface of the electrode body.

3. The glow electrode with an inverted "L"-shaped insulating structure according to claim 1, characterized in that: The electrode body adopts an anode flat plate structure.

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