Spectral characteristic control device

Abstract

The deep ultraviolet laser system includes a line narrowing module including a plurality of prisms such that an incident laser beam from the laser first interacts with a first prism and then interacts with a second prism following the first prism. The second prism comprises two distinct portions, the two distinct portions comprising a first portion designed to work with the incident laser beam and to achieve a higher bandwidth of the incident laser beam and a second portion designed to work with the incident laser beam and to achieve a lower bandwidth of the incident laser beam. The second prism is movable between a first position where the laser beam interacts with the first portion and a second position where the laser beam interacts with the first portion. The second prism is movable by translation using an activation mechanism controlled by the controller to vary the target bandwidth of the laser beam.

Description

[0001] CROSS-REFERENCE TO RELATED APPLICATIONS

[0002] This application claims priority to U.S. application 63 / 407,509, filed on September 16, 2022, which is incorporated herein by reference in its entirety. Technical Field

[0003] The disclosed subject matter relates to an apparatus for controlling spectral characteristics (such as, for example, bandwidth or wavelength) of a light beam output from a light source that provides light to a lithographic exposure apparatus. Background Art

[0004] In semiconductor lithography (or photolithography), the manufacture of integrated circuits (ICs) requires the performance of various physical and chemical processes on semiconductor (e.g., silicon) substrates (also known as wafers). A lithographic exposure apparatus or scanner is a machine that applies the desired pattern to a target portion of the substrate. The wafer is held on a stage so that the wafer is typically moved along an orthogonal X-axis direction defined by the scanner. L and Y L The wafer is illuminated by a beam with a wavelength in the deep ultraviolet (DUV) range. The beam travels in the axial direction, which corresponds to the Z direction of the scanner. L Direction. Z of the scanner L Direction and Horizontal X L -Y L The planes are orthogonal.

[0005] In many scientific and industrial applications, it is important to accurately know the spectral characteristics or properties (e.g., wavelength and / or bandwidth) of a light beam output from a light source (such as a laser). For example, accurate knowledge of the bandwidth of a light source is used to achieve control of the minimum feature size or critical dimension (CD) in deep ultraviolet (DUV) optical lithography. The critical dimension is the size of a feature printed on a semiconductor substrate (also referred to as a wafer), and thus the CD may require fine dimensional control. Summary of the invention

[0006] In some general aspects, a spectral feature control device includes a spectral feature selection module, the spectral feature selection module includes a plurality of prisms, the plurality of prisms are arranged in an optical plane, and are configured to receive an incident light beam and pass the incident light beam along the optical plane. The plurality of prisms include: a first prism, which is positioned at an input side of the spectral feature selection module and is configured to receive the incident light beam; a second prism, which is configured to receive the light beam leaving the first prism, the second prism including two or more parts, each of the two or more parts being configured to achieve a different bandwidth range of the light beam; and an activation mechanism, which is configured to move the second prism in a direction relative to the optical plane, thereby selecting the bandwidth range of the light beam by positioning a specific part of the second prism in the optical plane.

[0007] Embodiments may include one or more of the following features. For example, two or more portions may be stacked on each other relative to the optical plane. The spectral feature selection module may be configured to select a wavelength of the light beam in the deep ultraviolet (DUV) range. The control device may also include a first actuator, the first actuator being configured to rotate the first prism. The rotation of the first prism may primarily change the optical magnification of the light beam. The first actuator may be configured to rotate the first prism within an angle range, and the activation mechanism may be configured to move the second prism to adjust the optical magnification of the light beam within a range of about 10× to about 50×. The adjustment of the optical magnification of the light beam within a range between about 10× and about 50× may primarily adjust the bandwidth of the light beam within a range between about 1000 femtometers (fm) and about 250 fm. The first actuator may include one or more of the following items: a motor, a valve, a pressure control device, a piezoelectric device, a linear motor, a hydraulic actuator, and a voice coil.

[0008] The second prism may include a first portion stacked on a second portion, wherein when the first portion is positioned in an optical plane, the first portion is configured to interact with a higher bandwidth range of the light beam, and when the second portion is positioned in the optical plane, the second portion is configured to interact with a lower bandwidth range of the light beam. The first portion may have a first geometry, and the second portion may have a second geometry different from the first geometry. The first portion being positioned in the optical path may enable an optical magnification of the light beam in a range of about 10× to about 19×, and the second portion being positioned in the optical path may enable an optical magnification of the light beam in a range of about 20× to about 50×. The first portion may include a first right triangle geometry having one or more dimensions, and the second portion may include a second right triangle geometry having one or more dimensions different from one or more dimensions of the first right triangle geometry. The first portion may include a wedge prism having at least one surface plane located within the optical path, the surface plane having a uniform and flat geometry. The control device of claim 10, wherein the first portion comprises a wedge-shaped prism having at least one surface plane located within the optical path, the surface plane having a convex or concave geometry.

[0009] The activation mechanism is configured to move the second prism in a direction relative to the optical plane and may include: moving the second prism perpendicular to the optical plane to select the bandwidth range of the light beam. The spectral feature selection module may also include a third prism and a fourth prism arranged in a Littrow configuration to interact with the light beam and a diffractive optical element. Adjustment of the first prism and the second prism can mainly change at least the optical magnification of the light beam to achieve selection of the bandwidth of the light beam. The control device may also include: a third actuator configured to rotate the third prism; and a fourth actuator configured to rotate the fourth prism. The rotation of the third prism and the fourth prism can mainly change the central wavelength of the light beam. The third prism and the fourth prism may both include or be made of calcium fluoride or magnesium fluoride. The third prism and the fourth prism may both be right-angled triangular prisms.

[0010] The two or more portions of the second prism may include a first portion and a second portion, the first portion may include a material having a first refractive index, and the second portion may include a material having a second refractive index different from the first refractive index. The two or more portions of the second prism may include a first portion and a second portion, the first portion may include a material having a first refractive index, and the second portion may include a material having a second refractive index that is the same as the first refractive index. The first prism and the second prism may both include or be made of calcium fluoride or magnesium fluoride. The activation mechanism may include a pneumatic actuator or an electromechanical actuator.

[0011] In other general aspects, a method for controlling the wavelength and bandwidth of a light beam generated by an optical oscillator is described. The method includes: selecting a bandwidth range from a set of different bandwidth ranges, including: positioning different portions of a second prism in an optical plane through which the light beam travels, the second prism including a plurality of different portions; controlling the optical magnification of the light beam generated by the optical oscillator to a desired optical magnification based on the selected bandwidth range, including: directing the light beam through a first prism closest to the optical oscillator and through different portions of a second prism positioned in the optical plane; adjusting the angle at which the light beam travels, including: directing the light beam through at least a third prism; and selecting the wavelength and bandwidth of the light beam based on the adjusted angle, including: causing the light beam from at least the third prism to impinge on a dispersive optical element arranged in a Littrow configuration to interact with the light beam, and selecting the wavelength and bandwidth of the light beam based on the optical magnification of the light beam impinging on the dispersive optical element.

[0012] In other general aspects, a deep ultraviolet (DUV) laser system includes a line narrowing module, the line narrowing module including a plurality of prisms such that an incident laser beam from a laser first interacts with a first prism and then interacts with a second prism after the first prism. The second prism includes two different stacked portions, the two different stacked portions including a first portion designed to interact with a higher bandwidth of the incident laser beam and including a second portion designed to interact with a lower bandwidth of the incident laser beam. The second prism is movable between a first position where the laser beam interacts with the first portion and a second position where the laser beam interacts with the first portion. The second prism is movable by translation using an activation mechanism controlled by a controller to change a target bandwidth of the laser beam.

[0013] Implementations may include one or more of the following features. For example, the first portion may have a first shape, and the second portion may have a second shape different from the first shape. The activation mechanism may be a pneumatic or electric activation mechanism.

[0014] In other general aspects, an illumination system includes: a light source configured to generate a light beam; and a spectral feature control device arranged to interact with the light beam generated by the light source. The spectral feature control device includes: a dispersive optical element; a beam expander including a plurality of prisms, the plurality of prisms being arranged in an optical path between the dispersive optical element and an aperture through which the light beam of the light source can pass, the dispersive optical element and the beam expander being arranged so that the light beam of the light source interacts with the aperture, the prisms and the dispersive optical element along the optical path; and an activation mechanism configured to move a second prism of the beam expander in a direction not parallel to the optical path to select a bandwidth range of the light beam by positioning a specific geometrically different portion of the second prism in the optical path. The second prism is positioned adjacent to the first prism closest to the aperture. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 is a block diagram of a spectral feature control apparatus including a beam expander having a second prism including a first portion and a second portion;

[0016] Figure 2A yes Figure 1 a perspective view of the realization of the second prism;

[0017] Figure 2B yes Figure 2A an exploded perspective view of a second prism showing details of the first portion and the second portion;

[0018] Figure 2C is a top view of a spectral feature selection module, wherein the spectral feature selection module includes a beam expander, wherein the beam expander includes Figure 2A and Figure 2B a second prism of, wherein the page plane is an optical plane;

[0019] Figure 2D yes Figure 2A-2C a side view of a second prism and an activation mechanism physically coupled to the second prism to move or translate the second prism so that the first portion is in the optical plane;

[0020] Figure 2E yes Figure 2A-2C a side view of a second prism and an activation mechanism physically coupled to the second prism to move or translate the second prism so that the second portion is in the optical plane;

[0021] Figure 3A yes Figure 2C a top view of a spectral signature selection module of claim 1, wherein the second prism is positioned such that the second portion is in an optical plane and the first prism is in a first extreme position to produce a light beam having a bandwidth based on an overall magnification determined at least in part by a position of the first prism and a position of the second portion in the optical plane;

[0022] Figure 3B yes Figure 2C a top view of a spectral signature selection module of claim 1, wherein the second prism is positioned so that the second portion is in an optical plane and the first prism is in a second extreme position to produce a light beam having a bandwidth based on an overall magnification determined at least in part by a position of the first prism and a position of the second portion in the optical plane;

[0023] Figure 4A yes Figure 2Ca top view of a spectral signature selection module of claim 1, wherein the second prism is positioned such that the first portion is in an optical plane and the first prism is in a first extreme position to produce a light beam having a bandwidth based on an overall magnification determined at least in part by a position of the first prism and a position of the second portion in the optical plane;

[0024] Figure 4B yes Figure 2C a top view of a spectral signature selection module of claim 1, wherein the second prism is positioned such that the first portion is in an optical plane and the first prism is in a second extreme position to produce a light beam having a bandwidth based on an overall magnification determined at least in part by a position of the first prism and a position of the second portion in the optical plane;

[0025] Figure 5A yes Figure 1 a perspective view of another implementation of the second prism;

[0026] Figure 5B yes Figure 5A an exploded perspective view of a second prism showing details of the first portion and the second portion;

[0027] Fig. 6A yes Figure 1 a perspective view of another implementation of the second prism;

[0028] Figure 6B yes Fig. 6A an exploded perspective view of a second prism showing details of the first portion and the second portion;

[0029] Fig. 7A yes Figure 1 a perspective view of another implementation of the second prism;

[0030] Figure 7B yes Fig. 7A an exploded perspective view of a second prism showing details of the first portion and the second portion;

[0031] Fig. 8A yes Figure 1 a perspective view of another implementation of the second prism;

[0032] Figure 8B yes Fig. 8A an exploded perspective view of a second prism showing details of the first portion and the second portion;

[0033] Fig. 9 is a block diagram of a lithography system, which includes an illumination system that generates a pulsed beam directed toward a lithography exposure device. Figure 1 beam formation produced by a light source; and

[0034] Fig.10 It is depicted from Fig. 9 A plot of the spectrum of a light beam produced by an illumination system, the spectrum being defined by the central wavelength and bandwidth of the beam. DETAILED DESCRIPTION

[0035] refer to Figure 1 , the spectral feature control device 100 includes a spectral feature selection module 130, which is configured to receive a light beam 115 generated by a light source 101 through an aperture 135. The spectral feature selection module 130 includes optical features or components 102, 104, 106, 108, 110 that can be arranged in a Littrow configuration. The optical components 102, 104, 106, 108, 110 are configured to interact with the light beam 115 received within the spectral feature selection module 130. The optical components 102, 104, 106, 108, 110 can also be configured to modify and adjust the spectral properties (such as bandwidth or wavelength) of the light beam 115. The light beam 115 can have a wavelength in the deep ultraviolet (DUV) range. The light beam 115 can be a pulsed light beam, as discussed in more detail below, which is used to pattern microelectronic features on a substrate (or wafer) received in a lithography exposure device.

[0036] The spectral feature selection module 130 can be configured with a beam expander 120 consisting of optical components 102, 104, 106, 108. The optical components 102, 104, 106, 108 can be configured as transmissive and refracting optical elements, such as optical prisms. In particular, the optical components 102, 104, 106, 108 can be configured and implemented as a first prism 102, a second prism 104, a third prism 106, and a fourth prism 108, respectively. Each prism 102, 104, 106, 108 is configured to refract and redirect the light beam 115 as it passes through the body of the prism 102, 104, 106, 108. The light beam 115 is optically expanded by the beam expander 120 when traveling from the aperture 135 to the grating 110, and is optically compressed by the beam expander 120 when the light beam 115 travels from the grating 110 to the aperture 135.

[0037] The optical components 102, 104, 106, 108 are made of one or more materials that allow the wavelength of the light beam 115 to be transmitted. For example, the optical components 102, 104, 106, 108 can be made of a material compatible with the DUV wavelength of the light beam 115 (such as calcium fluoride or magnesium fluoride), and also allow the optical components 102, 104, 106, 108 to be implemented as a transmission prism. When the optical components 102, 104, 106, 108 are transmission prisms, the optical components 102, 104, 106, 108 are used to scatter, deflect and redirect the light beam 115 when it passes through the body of the corresponding prism. In addition, the spectral feature selection module 130 can also be configured with a diffractive optical element 110, which can be, for example, a grating having a diffractive surface 112. The grating 110 is designed to disperse, diffract and reflect the light beam 115. Grating 110 and diffractive surface 112 of grating 110 are made of a material compatible with the wavelength of light beam 115, and serve to reflect and diffract light beam 115 in contact with diffractive surface 112. For example, grating 110 (and surface 112) may be made of calcium fluoride or magnesium fluoride.

[0038] like Figure 1 As shown in , within the beam expander 120, the optical components 102, 104, 106, 108, 110 can be arranged continuously to define an optical plane. When the light beam 115 is received in the spectral feature control device 100, it will propagate through the optical plane and propagate in the optical plane. In this example, the optical plane is usually an XY plane. In particular, within the spectral feature selection module 130, the first prism 102 can be positioned closest to the aperture 135, followed by the second prism 104, the third prism 105 and the fourth prism 108, wherein the fourth prism 108 is positioned farthest from the aperture 135. Therefore, when the light beam 115 is received in the spectral feature selection module 130 through the aperture 135, the light beam 115 is first received by the beam expander 120, and specifically received at the first prism 102, and then passes through the second prism 104, the third prism 105 and the fourth prism 108 in sequence. The light beam 115 exiting from the beam expander 120 through the fourth prism 108 is directed toward the grating 110. The diffractive surface 112 of the grating 110 causes the light beam 115 to be diffracted and reflected back to the beam expander 120 and to the aperture 135 in the reverse order of the order in which the light beam 115 was received. In particular, the light beam 115 reflected from the diffractive surface 112 is received by the fourth prism 108, then by the third prism 104, the second prism 104, and finally by the first prism 102, which directs the light beam 115 out of the spectral feature selection module 130 through the aperture 135. As the light beam 115 travels from the grating 110 through the spectral feature selection module 130 in this reverse manner, the light beam 115 is optically compressed by each of the optical components 108, 106, 104, 102.

[0039] Initially, as previously described, when the light beam 115 enters the spectral feature selection module 130 through the aperture 135, the light beam 115 is directed toward the beam expander 120 and is received by the first prism 102 disposed within the beam expander 120. The first prism 102 can be configured to rotate within an optical plane, thereby modifying or adjusting one or more spectral properties of the light beam 115. Specifically, the rotation of the first prism 102 within the optical plane primarily adjusts the optical magnification of the light beam 115 at the grating 110. The optical magnification of the light beam 115 is the ratio of the lateral width Wo of the light beam 115 (on the path to the grating 110) exiting the beam expander 120 to the lateral width Wi of the light beam 115 (from the light source 101) entering the beam expander 120. Adjustment of the optical magnification of the light beam 115 at the grating 110 results in adjustment of the bandwidth of the light beam 115. The third prism 106 and the fourth prism 108 can be configured to rotate within an optical plane, thereby modifying or adjusting one or more spectral properties of the light beam 115. Specifically, the rotation of the third prism 106 and the fourth prism 108 mainly adjusts the incident angle of the light beam 115 at the grating 110. The adjustment of the incident angle of the light beam 115 at the grating 110 will cause the wavelength of the light beam 115 to be adjusted.

[0040] Since the adjustment of the bandwidth of the light beam 115 mainly depends on the rotation of the first prism 102, in the existing spectral feature control device, the bandwidth range that can be achieved by such an existing spectral feature control device is limited by the rotation of the first prism 102 and is also limited by the geometric structure of the first prism 102. This is because the rotation of the first prism 102 mainly adjusts the optical magnification of the light beam 115 at the grating 110 within a specific limited range. For example, in some embodiments, the rotation of the first prism 102 causes the optical magnification of the light beam 115 at the grating 110 to range from about 19× to about 50×. And, the optical magnification range corresponds to a bandwidth range of about 200 femtometers (fm) to about 500 fm, respectively. Therefore, in this example, if a bandwidth of 300 fm is initially desired, the existing spectral feature control device will not be able to adjust the first prism 102 to obtain a bandwidth of 800 fm.

[0041] The spectral characteristic control device 100 is designed to enable the bandwidth of the light beam 115 to be adjusted within a wider range than the existing device by converting the second prism 104 into a multi-part second prism 104. Specifically, the second prism 104 includes a first part 104-1 and a second part 104-2 that can be stacked along the Z direction relative to the first part 104-1. When the first part 104-1 is in the optical plane XY (such as Figure 1 As shown in the configuration of Figure 2D2 (shown in relation to the first portion 204-1 of the second prism 204), the first portion 104-1 is designed and configured to interact with the light beam 115 and thereby operate within a first bandwidth range. When the first portion 104-1 is in the optical plane XY, the second portion 104-2 is not in the optical plane and does not interact with the light beam 115, as shown in FIG. Figure 1 When the second portion 104-2 is in the optical plane XY (as shown in Figure 2E ), the second portion 104-2 of the second prism 204 is designed and configured to interact with the light beam 115 and thereby operate within a second bandwidth range that is different from the first bandwidth range. When the second portion 104-2 is in the optical plane XY, the first portion 104-1 is not in the optical plane and does not interact with the light beam 115. For example, the first portion 104-1 can be configured to receive and interact with a higher bandwidth range of the light beam 115, and the second portion 104-2 can be configured to receive and interact with a lower bandwidth range of the light beam 115. By decomposing or separating the second prism 104 into these differently designed portions 104-1 and 104-2, and selecting the first portion for the first bandwidth range and the second portion for the second bandwidth range, the spectral feature control device 100 operates within a wider bandwidth range without modifying the device 100 or changing components within the device 100 during operation of the light source 101.

[0042] In addition, the extended bandwidth range makes it possible to reduce edge placement errors (EPE) that may occur at the substrate receiving the beam 115. Specifically, edge placement errors may occur at features patterned on the substrate using the beam 115. Edge placement errors are the difference between the expected features and the printed features of the layout at the substrate. In particular, the beam 115 needs to pattern tiny features in precise positions on the substrate. For example, the feature can be a line, and the line has a right edge and a left edge. If the line and its right and / or left edges are not accurate in shape and form or are not placed in the correct position, misalignment (or EPE) may occur. And, if one or more EPE problems occur in the production process of the substrate, the device manufactured using the substrate including all these EPE problems is susceptible to electrical short circuits or low yields, which may cause the entire chip formed on the substrate to fail. In order to reduce the EPE problem, a higher bandwidth in the beam 115 is required. The spectral feature control device 100 achieves these higher bandwidths in the beam 115 by using a second prism 104 including two differently designed parts 104-1 and 104-2.

[0043] In some embodiments, the geometry and shape of the second portion 104-2 is different from the geometry and shape of the first portion 104-1. Figure 2A and Figure 2B , Figure 3A and Figure 3B , Figure 4A and Figure 4B as well as Fig. 7A and Figure 7B Examples of possible different geometries and shapes are discussed. In some embodiments, the material of the second portion 104-2 is different from the material of the first portion 104-1, as shown in FIG. Fig. 8A and Figure 8B In some embodiments, as described in reference Figure 5A and Figure 5B As discussed, the size and placement of the second portion 104 - 2 may be different than the size and placement of the first portion 104 - 1 .

[0044] like Figure 1 As further shown in FIG. 1 , the optical components 102, 104, 106, 108, 110 of the spectral feature selection module 130 may be configured with and mechanically coupled to corresponding actuation systems 102A, 104A, 106A, 108A, 110A. The actuation systems 102A, 104A, 106A, 108A, 110A may be configured to move the corresponding optical components 102, 104, 106, 108, 110 to adjust one or more spectral properties of the light beam 115. Typically, each of the actuation systems 102A, 104A, 106A, 108A, 110A is a mechanical device for moving or controlling the corresponding optical component. The actuation systems 102A, 104A, 106A, 108A, 110A may receive energy from the control module 140 and may convert the energy into some motion applied to the corresponding optical component. For example, the actuation system 102A, 106A, 108A, 110A may be or include any of a force device and a rotation stage for rotating one or more of the prism or grating 110. The actuation system 102A, 106A, 108A, 110A may include, for example, a motor (such as a stepper motor), a valve, a pressure control device, a piezoelectric device, a linear motor, a hydraulic actuator, a voice coil, etc. Although the actuation system 110A is shown relative to the grating 110, alternatively, the grating 110 may be fixed in various orientations. Similarly, alternatively, any one of the prism 106 and the prism 108 may be fixed, while the other prism is movable (rotatable) in the optical plane.

[0045] The actuation system 104A mechanically coupled to the second prism 104 can be configured as an activation mechanism, which can be or include, for example, a pneumatic actuator or an electromechanical actuator. The activation mechanism 104A can be configured to translate the first portion 104-1 and the second portion 104-2 of the second prism 104 along the Z direction perpendicular to the XY plane of the optical plane, and thereby allow the first portion 104-1 and the second portion 104-2 to move into and out of the optical plane (XY plane). Since the first portion 104-1 and the second portion 104-2 are configured to select different bandwidth ranges and operate within different bandwidth ranges, the activation mechanism 104A allows different bandwidth ranges to be selected.

[0046] The control module 140 may include electronics in any combination of hardware, firmware, and software. The control module 140 may be configured to provide energy or power to the actuation systems 102A, 104A, 106A, 108A, 110A, and control and monitor the movement of the respective optical components 102, 104, 106, 108, 110 to which the actuation systems are mechanically coupled. In addition, the control module 140 may also be configured to receive control signals from a control system 145. The control system 145 may also be configured to communicate with the light source 101. The control system 145 may be configured to send control signals to the control module 140, and the control signals may include, for example, specific commands to operate or control one or more of the actuation systems 102A, 104A, 106A, 108A, 110A, and thereby determine the position of the optical components 102, 104, 106, 108, 110.

[0047] refer to Figure 2A-2C , an implementation 204 of the second prism 104 is shown. Figure 2A , the second prism 204 is shown in a perspective view separated from the beam expander 120 and is Figure 2B In FIG. 1 , the second prism 204 is shown in an exploded perspective view (with transparency to show all surfaces) and is separated from the beam expander. Figure 2C , the second prism 204 is shown disposed within an implementation 220 of the beam expander 120. The second prism 204 includes a second portion 204-2 stacked on a first portion 204-1.

[0048] In this embodiment, the second portion 204-2 has a triangular geometry and the first portion 204-1 has a wedge geometry. The second portion 204-2 may be a triangular prism, and in some embodiments, the triangle may be a right triangle. The first portion 204-1 may be a wedge prism having a wedge angle Φ in the range of 0° to 45° ( Figure 2B ).

[0049] The beam expander 220 further includes a first prism 202 as the first optical component 102, a third prism 206 as the third optical component 106, a fourth prism 208 as the fourth optical component 108, and a grating 210 arranged to interact with the light beam 115 passing through the beam expander 220. The size of the surface area of ​​the prisms 202, 204, 206, 208 interacting with the light beam 115 generally increases from the first prism 202 closest to the aperture 135 to the fourth prism 208 farthest from the aperture 135.

[0050] When the first portion 204-1 is positioned in an optical plane (XY plane), the first portion 204-1 includes a front surface 205-1 facing the first prism 202, and includes a rear surface 207-1 facing the third prism 206 ( Figure 2B ). Although surface 205-1 is referred to as "front", it should be noted that this term refers to its position relative to the first prism 202, and similarly, although surface 207-1 is referred to as "rear", it should be noted that this term refers to its position relative to the third prism 206. When the first portion 204-1 is located in the optical plane (XY plane), the light beam 115 enters the front surface 205-1 when leaving the first prism 202, and exits the rear surface 207-1 when traveling toward the third prism 206. On the return path (from the grating 210), the light beam 115 enters the rear surface 207-1 when leaving the third prism 206, and exits the front surface 205-1 when traveling toward the first prism 202.

[0051] When the second portion 204-2 is positioned in the optical plane (XY plane), the second portion 204-2 includes a front surface 205-2 facing the first prism 202, and includes a rear surface 207-2 facing the third prism 206 ( Figure 2B ). Although surface 205-2 is referred to as "front", it should be noted that this term refers to its position relative to the first prism 202, and similarly, although surface 207-2 is referred to as "rear", it should be noted that this term refers to its position relative to the third prism 206. When the second portion 204-2 is located in the optical plane (XY plane), the light beam 115 enters the front surface 205-2 when leaving the first prism 202, and exits the rear surface 207-2 when traveling toward the third prism 206. On the return path (from the grating 210), the light beam 115 enters the rear surface 207-2 when leaving the third prism 206, and exits the front surface 205-2 when traveling toward the first prism 202.

[0052] As referenced above Figure 1 As discussed, the second prism 104 is physically coupled to the activation mechanism 104A. Figure 2C An implementation 204A of the activation mechanism 104A is shown in FIG. Figure 2D and Figure 2E The operation of the activation mechanism 204A is shown in FIG. The activation mechanism 204A may be any suitable mechanism configured to move the prism 204 in the Z direction so that the first portion 204-1 and the second portion 204-2 are alternately placed in an optical plane (XY plane) that is located at Figure 2D and Figure 2E The activation mechanism 204A may be a device including a linear motor, a pressure control device, a piezoelectric device, a hydraulic or pneumatic actuator, or an electromagnetic actuator. Figure 2D As shown in FIG. 1 , when receiving an instruction from the control module 140 for positioning the first portion 204-1 of the prism 204 in the optical plane OP, the activation mechanism 204A translates the prism 204 along the +Z direction so that the first portion 204-1 of the prism 204 is positioned in the optical plane OP. Figure 2E As shown in FIG, when receiving an instruction from control module 140 to position second portion 204-2 of prism 204 in optical plane OP, activation mechanism 204A translates prism 204 along the -Z direction so that second portion 204-2 of prism 204 is positioned in optical plane OP.

[0053] Reference again Figure 2C , an implementation 202A of the first actuator 102A is configured to rotate the first prism 202 in an optical plane (XY plane) and about an actuation axis parallel to the Z direction; the actuation axis may correspond to the axis of the first prism 202, or may be parallel to the axis of the first prism 202. Typically, the first actuator 102A is configured to rotate the first prism 202 within an angular range from 0° to approximately 20°. Additionally, an implementation 206A of the third actuator 106A is configured to rotate the third prism 206 in an optical plane (XY plane) and about an actuation axis parallel to the Z direction (such as, the axis of the third prism 206). Finally, an implementation 208A of the fourth actuator 108A is configured to rotate the fourth prism 208 in an optical plane (XY plane) and about an actuation axis parallel to the Z direction (such as, the axis of the fourth prism 208). Each actuation system 202A, 206A, 208A may be or may include any of a force device and a rotation stage for rotating its associated prism 202, 206, 208. Each actuation system 202A, 206A, 208A may include, for example, a motor (such as a stepper motor), one or more valves, a pressure control device, a piezoelectric device, a linear motor, a hydraulic actuator, a voice coil, etc.

[0054] refer to Figure 3A and Figure 3B , the second prism 204 is positioned so that the second portion 204-2 is in the optical plane (XY plane), such as Figure 2EIn this example, the first prism 202 is as shown in Figure 3A The first position P(A) shown in Figure 3B . The second position P(B) is obtained by rotating the first prism 202 about the actuation axis, which in this particular example is not aligned with the center of gravity of the prism 202 (which defines the prism axis), and therefore there is some rotation and some translation of the prism 202. This change in the position of the first prism 202 causes Figure 3B In the arrangement, the light beam 115 is Figure 3A The arrangement of the light beam 115 impinges on the front surface of the first prism 202 at different angles and positions. This change in the impingement position on the front surface of the first prism 202 causes a cascade change in the path or direction of the light beam 115 directed to each of the second prism 204, the third prism 206, and the fourth prism 208, as well as a cascade change in the optical magnification at each of the second prism 204, the third prism 206, and the fourth prism 208, so that Figure 3B In the arrangement of Figure 3A The arrangements are close to the grating 210 at different angles and different lateral ranges Wo.

[0055] In particular, when the first prism 202 is at position P(A) (eg Figure 3A ), the overall optical magnification at the grating 210 is 20×. That is, the ratio of the width Wo to the width Wi is 20. This optical magnification is due to the placement of the first prism 202 in the first position P(A) and the placement of the second portion 204-2 of the second prism 204 in the optical plane. On the other hand, when the first prism 202 is in position P(B) (as shown in FIG. Figure 3B ), the overall optical magnification at the grating 210 is 50×. That is, the ratio of the width Wo to the width Wi is 50. This optical magnification is due to the placement of the first prism 202 in the first position P(B) and the placement of the second portion 204-2 of the second prism 204 in the optical plane.

[0056] refer to Figure 4A and Figure 4B , the second prism 204 is positioned so that the first portion 204-1 is in an optical plane (XY plane), such as Figure 2D The first prism 202 may be in the Figure 4A The first position P(A) shown in Figure 4B When the first prism 202 is at position P(A) (as shown in Figure 4A), the overall optical magnification at the grating 210 is 10×. That is, the ratio of the width Wo to the width Wi is 10. This optical magnification is due to the placement of the first prism 202 in the first position P(A) and the placement of the first portion 204-1 of the second prism 204 in the optical plane. On the other hand, when the first prism 202 is in the second position P(B) (as shown in FIG. Figure 4B ), the overall optical magnification at the grating 210 is 19×. That is, the ratio of the width Wo to the width Wi is 19. This optical magnification is due to the placement of the first prism 202 in the first position P(B) and the placement of the first portion 204-1 of the second prism 204 in the optical plane.

[0057] Thus, adjustment of the overall optical magnification is effected by the first actuator 202A (which adjusts the position of the first prism 202 in the optical plane) and by the activation mechanism 204A (which adjusts the position of the second prism 204 in the Z direction perpendicular to the optical plane), and is under the control of the control module 140. Figure 3A ), the optical beam 115 may have a bandwidth of approximately 480 fm. At an optical magnification of 50×( Figure 3B ), the optical beam 115 may have a bandwidth of approximately 250 fm. At an optical magnification of 10×( Figure 4A ), the beam 115 may have a bandwidth of approximately 1000 fm. At an optical magnification of 19× ( Figure 4B ), the beam 115 can have a bandwidth of about 520 fm. By controlling the initial incident conditions of the beam 115, the actual value of the bandwidth can be fine-tuned around a specific bandwidth value of tens of fm from the initial bandwidth of the incident beam 115, so that there can be overlap for any bandwidth value, and any target value within about 250 fm-1000 fm can be achieved by the spectral feature control device 100. In this way, the beam expander 220 (which can be implemented in the spectral feature control device 100) enables the selection of two different bandwidth ranges (from about 250 fm-500 fm or from about 500 fm-1000 fm), and generally enables the selection of a much wider bandwidth range.

[0058] Two different configurations ( Figure 3A / Figure 3B and Figure 4A / Figure 4B) is due to the different geometric structures of the first part 204-1 and the second part 204-2. Unlike the second part 204-2, which is a right angle prism, the first part 204-1 is a wedge prism that includes two extended surface planes, namely the front surface 205-1 and the back surface 207-1. The two surface planes are positioned at an angle (wedge angle Φ) relative to each other, which is different from the angle at which the front surface 205-2 and the back surface 207-2 of the second part 204-2 are located. This is in Figure 2B Because the first portion 204-1 has a different geometry than the second portion 204-2, the first portion 204-1 modifies the optical properties of the light beam 115 passing through the first portion 204-1 in a different manner than the second portion 204-2, and this allows for different selectable bandwidth ranges that cannot be achieved by simply orienting the first prism 202 in the optical plane OP with a single portion of the second prism (in previous designs). In particular, when Figure 4B The layout and Figure 3B When comparing the arrangement of Figure 4B The front surface 205-1 of the first portion 204-1 (see Figure 2A ) and the light beam 115 hits Figure 3B The first surface 205-2 of the second portion 204-2 (see Figure 2A Specifically, the angle and position at which the light beam 115 enters the second prism 204 are different in the two arrangements. In addition, the angle and position at which the light beam 115 exits the second prism 204 are also different in the two arrangements. Therefore, when the light beam 115 travels through the third prism 206 and the fourth prism 208, there is an additional cascade change in the optical magnification of the light beam 115, and this is manifested as Figure 4B In the arrangement of Figure 3B Overall change of arrangement.

[0059] Other implementations of the second prism 104 are also possible. Figure 5A and Figure 5B As shown in , implementation 504 of second prism 104 includes a first portion 504-1 (a first triangular prism) and a second portion 504-2 (a second triangular prism having a different shape / scale than the first triangular prism). In addition, second triangular prism 504-2 is oriented at a different angle than first triangular prism 504-1, such that a front surface 505-2 of second triangular prism 504-2 is at a different angle than a front surface 505-1 of first triangular prism 504-1.

[0060] like Figure 2Aand Figure 2B As shown in FIG. , the front surface 205-1 of the wedge-shaped prism (first portion) 204-1 is planar. In other embodiments, as Fig. 6A and Figure 6B As shown in , the front surface 605-1 of the wedge prism (first part) 604-1 is convex. Specifically, the implementation 604 of the second prism 104 includes a wedge prism as the first part 604-1 and a triangular prism as the second part 604-2, wherein the triangular prism 604-2 can be a right triangle prism. The wedge prism 604-1 includes a convex front surface 605-1, and includes a rear surface 607-1. When the wedge prism 604-1 is positioned in an optical plane, the light beam 115 from the aperture 135 first enters the front surface 605-1 and then exits the rear surface 607-1. The convex surface (front surface) 605-1 of the wedge prism 604-1 is used to converge the light beam 115, and also enables additional flexibility to control the magnification and size or lateral range of the light beam 115 when interacting with the grating 210. The triangular prism 604-2 includes a front surface 605-2 and a back surface 607-2. When the triangular prism 604-2 is positioned in an optical plane, the light beam 115 from the aperture 135 first enters the front surface 605-2 and then exits the back surface 607-2.

[0061] In other embodiments, Fig. 7A and Figure 7B As shown in FIG. 1 , the front surface 705-1 of the wedge-shaped prism (first portion) 704-1 is concave. Specifically, the implementation 704 of the second prism 104 includes a wedge-shaped prism as the first portion 704-1 and a triangular prism as the second portion 704-2, wherein the triangular prism 704-2 may be a right-angled triangular prism. The wedge-shaped prism 704-1 includes a concave front surface 705-1 and includes a back surface 707-1. When the wedge-shaped prism 704-1 is positioned in an optical plane (such as Figure 4A and Figure 4B ), the light beam 115 from the aperture 135 first enters the front surface 705-1 and then exits the back surface 707-1. The concave surface (front surface) 705-1 of the wedge-shaped prism 704-1 is used to diverge the light beam 115 and also enables additional flexibility to control the magnification and size or lateral extent of the light beam 115 when interacting with the grating 210. The triangular prism 704-2 includes the front surface 705-2 and the back surface 707-2. When the triangular prism 704-2 is positioned in an optical plane (such as Figure 3A and Figure 3B ), the light beam 115 from the aperture 135 first enters the front surface 705-2 and then exits the rear surface 707-2.

[0062] refer to Fig. 8A and Figure 8B , another implementation 804 of the second prism 104 is shown. The second prism 804 includes a first portion 804-1 and includes a second portion 804-2 stacked on the first portion. The shape of the first portion 804-1 can be the same as the shape of the first portion 804-2, but the material used in the second portion 804-2 is different from the material used in the first portion 804-1. In this way, the light beam 115 behaves differently in each portion of the first portion 804-1 and the second portion 804-2. Although using different materials in the second portion 804-2 and the first portion 804-1 can achieve a small increase in bandwidth range when using the same shape, it is also possible to use different materials in the second portion 204-2 / 504-2 / 604-2 / 704-2 relative to the corresponding first portion 204-1 / 504-1 / 604-1 / 704-1 to obtain a larger bandwidth range of these beam expanders.

[0063] refer to Fig. 9 , the spectral characteristic control device 100 is implemented in a lithography system 950. The lithography system 950 includes an illumination system 960, which generates a pulsed light beam 962, the pulsed light beam 962 having a nominal central wavelength (such as Figure 1 The wavelength of the pulsed light beam 962 is determined by the incident angle of the light beam 115 in the grating 110. The pulsed light beam 962 is directed to the lithography exposure device 970. The pulsed light beam 962 is formed by the light beam 115 generated by the light source 101. The pulsed light beam 962 is used to pattern microelectronic features on a substrate 972 received in the device 970. The illumination system 960 includes a light source 101, which generates a pulsed light beam 962 at a pulse repetition rate desired by the device 970. The illumination system 960 includes a control system 145, which communicates with the light source 101, the spectral feature control device 100, and other features within the illumination system 960 (including the measurement system 964). The control system 145 also communicates with the lithography exposure device 970 through the lithography controller 974. The light beam 962 is directed through a beam preparation system 966, which may include optical elements that modify aspects of the light beam 962, such as reflective or refractive optical elements, optical pulse stretchers, or optical apertures or shutters.

[0064] The pulses of beam 962 are centered at a wavelength (the wavelength is given by Figure 1The wavelength of the light beam 962 is determined by the incident angle of the light beam 115 at the grating 110, and the central wavelength is in the deep ultraviolet (DUV) range, which can include, for example, wavelengths from about 100 nanometers (nm) to about 400 nm. The size of the microelectronic features patterned on the substrate 972 depends on the central wavelength of the light beam 962, where a lower central wavelength results in a smaller minimum feature size or critical size. When the wavelength of the light beam 962 is 248nm or 193nm, the minimum feature size can be, for example, 50nm or less. The bandwidth of the light beam 962 can be the actual instantaneous bandwidth of the spectrum of the light beam 962. Fig.10 A depiction 1080 of the spectrum of light beam 962 is shown in , where the bandwidth BW and the central wavelength λ 0 are depicted. Spectrum 1080 contains information about how the optical energy or power of light beam 962 is distributed over different wavelengths or frequencies.

[0065] The spectral feature control device 100 is placed at the first end of the light source 101 to interact with the light beam 115. The light beam 115 is a light beam generated at one end of a resonator within the light source 101. In some embodiments, the light source 101 can be a dual-stage light source, which includes a first stage with a master oscillator and a second stage with a power amplifier. The master oscillator (MO) generates a first light beam, which is passed to the power amplifier through an optical element including a relay optical device. The power amplifier (PA) receives the first light beam and optically amplifies the first light beam to form an output light beam 962. In this configuration of the light source 101, the spectral feature control device 100 can be arranged to receive the first light beam of the master oscillator. The master oscillator (MO) typically includes a gain medium in which amplification occurs and an optical feedback mechanism such as an optical resonator. The power amplifier (PA) typically includes a gain medium in which amplification occurs when implanted by the first light beam from the master oscillator. The spectral feature control apparatus 100 receives the beam 115 from the master oscillator to enable fine adjustment of the spectral features, such as the central wavelength and bandwidth of the beam 115, at relatively low output pulse energies. The power amplifier amplifies the output (first beam) from the master oscillator to obtain the desired power in the beam 962 for use by the photolithography exposure apparatus 970. An example of such a light source 101 is described and discussed in U.S. Patent No. 10,416,471 for "Spectral Feature Control Apparatus," which is incorporated herein by reference in its entirety.

[0066] The embodiments may be further described using the following terms.

[0067] 1. A spectral characteristic control device, comprising:

[0068] A spectral feature selection module, comprising a plurality of prisms, the plurality of prisms being arranged in an optical plane and configured to receive an incident light beam and pass the incident light beam along the optical plane, the plurality of prisms comprising:

[0069] a first prism, positioned at the input side of the spectral feature selection module and configured to receive the incident light beam;

[0070] a second prism configured to receive the light beam exiting the first prism, the second prism comprising two or more portions, each of the two or more portions being configured to achieve a different bandwidth range for the light beam; and

[0071] An activation mechanism is configured to move the second prism in a direction relative to the optical plane, thereby selecting a bandwidth range of the light beam by positioning a specific portion of the second prism in the optical plane.

[0072] 2. A control device according to clause 1, wherein the two or more parts are stacked on each other relative to the optical plane.

[0073] 3. A control device according to clause 1, wherein the spectral feature selection module is configured to select a wavelength of the light beam in the deep ultraviolet (DUV) range.

[0074] 4. The control device according to clause 1 further includes a first actuator configured to rotate the first prism.

[0075] 5. A control device according to clause 4, wherein rotation of the first prism causes the optical magnification of the light beam to be changed.

[0076] 6. A control device according to claim 4, wherein the first actuator is configured to rotate the first prism within an angular range, and the activation mechanism is configured to move the second prism to adjust the optical magnification of the light beam within a range of about 10× to about 50×.

[0077] 7. A control device according to claim 6, wherein adjustment of the optical magnification of the light beam in the range of about 10× to about 50× enables adjustment of the bandwidth of the light beam in the range of about 1000 femtometers (fm) to about 250 fm.

[0078] 8. The control apparatus of clause 4, wherein the first actuator comprises one or more of the following: a motor, a valve, a pressure control device, a piezoelectric device, a linear motor, a hydraulic actuator, and a voice coil.

[0079] 9. A control device according to claim 1, wherein the second prism includes a first portion stacked on a second portion, wherein when the first portion is positioned in the optical plane, the first portion is configured to interact with a higher bandwidth range of the light beam, and when the second portion is positioned in the optical plane, the second portion is configured to interact with a lower bandwidth range of the light beam.

[0080] 10. A control device according to clause 9, wherein the first portion has a first geometry and the second portion has a second geometry, the second geometry being different from the first geometry.

[0081] 11. A control device according to claim 9, wherein the first portion is positioned in the optical path so that the optical magnification of the light beam is in the range of about 10× to about 19×, and the second portion is positioned in the optical path so that the optical magnification of the light beam is in the range of about 20× to about 50×.

[0082] 12. A control device according to claim 11, wherein the first portion includes a first right triangle geometry, the first right triangle geometry includes one or more dimensions, and the second portion includes a second right triangle geometry, the second right triangle geometry includes one or more dimensions different from one or more dimensions of the first right triangle geometry.

[0083] 13. A control device according to clause 10, wherein the first portion comprises a wedge-shaped prism having at least one surface plane located within the optical path, the surface plane having a uniform and flat geometry.

[0084] 14. A control device according to clause 10, wherein the first portion comprises a wedge-shaped prism having at least one surface plane located within the optical path, the surface plane having a convex or concave geometry.

[0085] 15. A control device according to clause 2, wherein the activation mechanism is configured to move the second prism in a direction relative to the optical plane, including: moving the second prism perpendicular to the optical plane to select the bandwidth range of the light beam.

[0086] 16. A control device according to clause 1, wherein the spectral feature selection module further comprises a third prism and a fourth prism and a diffractive optical element arranged in a Littrow configuration to interact with the light beam.

[0087] 17. A control device according to clause 16, wherein adjustment of the first prism and the second prism primarily changes at least the optical magnification of the light beam to achieve selection of the bandwidth of the light beam.

[0088] 18. The control device according to clause 17, further comprising:

[0089] a third actuator configured to rotate the third prism; and

[0090] a fourth actuator configured to rotate the fourth prism,

[0091] The rotation of the third prism and the fourth prism changes the central wavelength of the light beam.

[0092] 19. The control device according to clause 18, wherein the third prism and the fourth prism each comprise calcium fluoride or magnesium fluoride.

[0093] 20. The control device of clause 19, wherein the third prism and the fourth prism are right-angled triangular prisms.

[0094] 21. A control device according to claim 1, wherein the two or more parts of the second prism include a first part and a second part, the first part includes a material having a first refractive index, and the second part includes a material having a second refractive index, the second refractive index being different from the first refractive index.

[0095] 22. A control device according to claim 1, wherein the two or more parts of the second prism include a first part and a second part, the first part includes a material having a first refractive index, and the second part includes a material having a second refractive index, and the second refractive index is the same as the first refractive index.

[0096] 23. The control device of clause 1, wherein the first prism and the second prism each comprise calcium fluoride or magnesium fluoride.

[0097] 24. A control device according to clause 1, wherein the activation mechanism comprises a pneumatic actuator or an electromechanical actuator.

[0098] 25. A method for controlling the wavelength and bandwidth of an optical beam generated by an optical oscillator, the method comprising:

[0099] selecting a bandwidth range from a set of different bandwidth ranges, comprising: positioning different portions of a second prism in an optical plane through which the light beam travels, wherein the second prism comprises a plurality of different portions;

[0100] controlling the magnification of the light beam generated by the optical oscillator to a desired optical magnification based on the selected bandwidth range, comprising: directing the light beam through a first prism proximate to the optical oscillator and through the different portions of the second prism positioned in the optical plane;

[0101] Adjusting the angle at which the light beam travels, comprising: directing the light beam through at least a third prism; and

[0102] Based on the adjusted angle, the wavelength and bandwidth of the light beam are selected, including: causing the light beam from the at least third prism to impinge on a dispersive optical element arranged in a Littrow configuration to interact with the light beam, and selecting the wavelength and bandwidth of the light beam based on the optical magnification of the light beam impinging on the dispersive optical element.

[0103] 26. A deep ultraviolet (DUV) laser system comprising:

[0104] a line narrowing module including a plurality of prisms such that an incident laser beam from a laser first interacts with a first prism and then interacts with a second prism subsequent to the first prism;

[0105] The second prism comprises two distinct stacked portions, the two distinct stacked portions comprising a first portion and a second portion, the first portion being designed to interact with a higher bandwidth of the incident laser beam and the second portion being designed to interact with a lower bandwidth of the incident laser beam;

[0106] the second prism being movable between a first position where the laser beam interacts with the first portion and a second position where the laser beam interacts with the first portion;

[0107] Wherein the second prism is movable by translation using an activation mechanism controlled by a controller to change a target bandwidth of the laser beam.

[0108] 27. The DUV laser system of clause 26, wherein the first portion has a first shape and the second portion has a second shape, the second shape being different from the first shape.

[0109] 28. The DUV laser system of clause 26, wherein the activation mechanism is a pneumatic activation mechanism or an electric activation mechanism.

[0110] 29. An illumination system comprising:

[0111] a light source configured to generate a light beam; and

[0112] a spectral characteristic control device arranged to interact with the light beam generated by the light source, the spectral characteristic control device comprising:

[0113] Dispersive optical elements;

[0114] a beam expander comprising a plurality of prisms arranged in an optical path between the dispersive optical element and an aperture through which the light beam of the light source can pass, wherein the dispersive optical element and the beam expander are arranged such that the light beam of the light source interacts with the aperture, the prisms and the dispersive optical element along the optical path; and

[0115] An activation mechanism is configured to move a second prism of the beam expander in a direction non-parallel to the optical path to select a bandwidth range of the light beam by positioning a specific geometrically different portion of the second prism in the optical path, wherein the second prism is positioned adjacent to the first prism closest to the aperture.

[0116] The implementations described above and other implementations are within the scope of the following claims.

Claims

1. A spectral characteristic control device, comprising: A spectral feature selection module, comprising a plurality of prisms, the plurality of prisms being arranged in an optical plane and configured to receive an incident light beam and pass the incident light beam along the optical plane, the plurality of prisms comprising: a first prism, positioned at the input side of the spectral feature selection module and configured to receive the incident light beam; a second prism configured to receive the light beam exiting the first prism, the second prism comprising two or more portions, each of the two or more portions being configured to achieve a different bandwidth range for the light beam; and An activation mechanism is configured to move the second prism in a direction relative to the optical plane, thereby selecting a bandwidth range of the light beam by positioning a specific portion of the second prism in the optical plane. 2 . The control device of claim 1 , wherein the two or more parts are stacked on top of each other relative to the optical plane.

3. The control device according to claim 1, wherein the spectral feature selection module is configured to select a wavelength of the light beam in the deep ultraviolet (DUV) range. 4 . The control device of claim 1 , further comprising a first actuator configured to rotate the first prism.

5. A control device according to claim 4, wherein rotation of the first prism causes the optical magnification of the light beam to be changed.

6. The control device of claim 4, wherein the first actuator is configured to rotate the first prism within an angular range, and the activation mechanism is configured to move the second prism to adjust the optical magnification of the light beam within a range of about 10× to about 50×.

7. A control device according to claim 6, wherein adjustment of the optical magnification of the light beam in the range of about 10× to about 50× enables adjustment of the bandwidth of the light beam in the range of about 1000 femtometers (fm) to about 250 fm.

8. The control apparatus of claim 4, wherein the first actuator comprises one or more of the following: a motor, a valve, a pressure control device, a piezoelectric device, a linear motor, a hydraulic actuator, and a voice coil.

9. A control device according to claim 1, wherein the second prism includes a first portion stacked on a second portion, wherein when the first portion is positioned in the optical plane, the first portion is configured to interact with a higher bandwidth range of the light beam, and when the second portion is positioned in the optical plane, the second portion is configured to interact with a lower bandwidth range of the light beam.

10. The control device of claim 9, wherein the first portion has a first geometry and the second portion has a second geometry, the second geometry being different from the first geometry.

11. A control device according to claim 9, wherein the first portion is positioned in the optical path so that the optical magnification of the light beam is in the range of about 10× to about 19×, and the second portion is positioned in the optical path so that the optical magnification of the light beam is in the range of about 20× to about 50×.

12. A control device according to claim 11, wherein the first portion includes a first right triangle geometric structure, the first right triangle geometric structure has one or more dimensions, and the second portion includes a second right triangle geometric structure, the second right triangle geometric structure has one or more dimensions different from one or more dimensions of the first right triangle geometric structure.

13. The control device of claim 10, wherein the first portion comprises a wedge-shaped prism having at least one surface plane located within the optical path, the surface plane having a uniform and flat geometry.

14. The control device of claim 10, wherein the first portion comprises a wedge-shaped prism having at least one surface plane located within the optical path, the surface plane having a convex or concave geometry.

15. The control device of claim 2, wherein the activation mechanism is configured to move the second prism in a direction relative to the optical plane comprises: The second prism is moved perpendicular to the optical plane to select the bandwidth range of the light beam.

16. The control device of claim 1, wherein the spectral feature selection module further comprises a diffractive optical element arranged in a Littrow configuration to interact with the light beam and a third prism and a fourth prism.

17. The control device according to claim 16, wherein the adjustment of the first prism and the second prism mainly changes at least the optical magnification of the light beam to achieve the selection of the bandwidth of the light beam.

18. The control device according to claim 17, further comprising: a third actuator configured to rotate the third prism; as well as a fourth actuator configured to rotate the fourth prism, The rotation of the third prism and the fourth prism changes the central wavelength of the light beam.

19. The control device according to claim 18, wherein the third prism and the fourth prism each include calcium fluoride or magnesium fluoride.

20. The control device according to claim 19, wherein the third prism and the fourth prism are right-angled triangular prisms.

21. A control device according to claim 1, wherein the two or more parts of the second prism include a first part and a second part, the first part includes a material having a first refractive index, and the second part includes a material having a second refractive index, and the second refractive index is different from the first refractive index.

22. A control device according to claim 1, wherein the two or more parts of the second prism include a first part and a second part, the first part includes a material having a first refractive index, and the second part includes a material having a second refractive index, and the second refractive index is the same as the first refractive index.

23. The control device of claim 1, wherein the first prism and the second prism each comprise calcium fluoride or magnesium fluoride.

24. The control device of claim 1, wherein the activation mechanism comprises a pneumatic actuator or an electromechanical actuator.

25. A method for controlling the wavelength and bandwidth of an optical beam generated by an optical oscillator, the method comprising: selecting a bandwidth range from a set of different bandwidth ranges, comprising: positioning different portions of a second prism in an optical plane through which the light beam travels, wherein the second prism comprises a plurality of different portions; controlling the magnification of the light beam generated by the optical oscillator to a desired optical magnification based on the selected bandwidth range, comprising: directing the light beam through a first prism proximate to the optical oscillator and through the different portions of the second prism positioned in the optical plane; Adjusting the angle at which the light beam travels, comprising: directing the light beam through at least a third prism; and Based on the adjusted angle, the wavelength and the bandwidth of the light beam are selected, including: causing the light beam from the at least third prism to impinge on a dispersive optical element arranged in a Littrow configuration to interact with the light beam, and selecting the wavelength and the bandwidth of the light beam based on the optical magnification of the light beam impinging on the dispersive optical element.

26. A deep ultraviolet (DUV) laser system comprising: a line narrowing module including a plurality of prisms such that an incident laser beam from a laser first interacts with a first prism and then interacts with a second prism subsequent to the first prism; The second prism comprises two distinct stacked portions, the two distinct stacked portions comprising a first portion and a second portion, the first portion being designed to interact with a higher bandwidth of the incident laser beam and the second portion being designed to interact with a lower bandwidth of the incident laser beam; the second prism being movable between a first position where the laser beam interacts with the first portion and a second position where the laser beam interacts with the first portion; Wherein the second prism is movable by translation using an activation mechanism controlled by a controller to change a target bandwidth of the laser beam.

27. The DUV laser system of claim 26, wherein the first portion has a first shape and the second portion has a second shape, the second shape being different from the first shape.

28. The DUV laser system of claim 26, wherein the activation mechanism is a pneumatic activation mechanism or an electric activation mechanism.

29. An illumination system comprising: a light source configured to generate a light beam; as well as a spectral characteristic control device arranged to interact with the light beam generated by the light source, the spectral characteristic control device comprising: Dispersive optical elements; a beam expander comprising a plurality of prisms arranged in an optical path between the dispersive optical element and an aperture through which the light beam of the light source can pass, wherein the dispersive optical element and the beam expander are arranged such that the light beam of the light source interacts with the aperture, the prisms and the dispersive optical element along the optical path; and An activation mechanism is configured to move a second prism of the beam expander in a direction non-parallel to the optical path to select a bandwidth range of the light beam by positioning a specific geometrically different portion of the second prism in the optical path, wherein the second prism is positioned adjacent to the first prism closest to the aperture.

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