A modular spray plate for plate development

Abstract

The present application provides a modular spray plate for plate development, which relates to the technical field of PCB board development, including a frame, wherein the inner wall of the frame is evenly distributed and fixedly connected with a plurality of fixing frames, a plate body is fixedly connected between two relatively distributed fixing frames, the upper surface of the plate body is provided with multiple oblique deep grooves, a spray head assembly is provided below the multiple oblique deep grooves, the spray head assembly includes a plurality of mounting holes evenly distributed, a positioning tube is threadedly connected to the inner wall of the mounting hole, a hemispherical shell is fixedly connected to the lower end of the positioning tube, a sphere with holes is movably connected to the inner wall of the hemispherical shell, and an inner tube is fixedly connected to the end of the sphere with holes away from the hemispherical shell. The present application forms a circular airflow curtain through a conical rubber sleeve and an outer conical sleeve to concentrate the developer during the spraying process to prevent it from splashing around and reducing the utilization rate of the developer.

Description

Technical Field

[0001] The invention relates to the technical field of PCB board development, and in particular to a modular spray disc for board development. Background Art

[0002] The developer spray tray is a key component in the development process. It is part of the developer supply spray system and is responsible for evenly spraying the developer on the wafer surface. The developer spray tray is usually equipped with different types of developer nozzles, such as E2 nozzles, LD nozzles, etc. These nozzles ensure uniform development process reaction and reduce the impact on the wafer surface by accurately controlling the developer flow and spraying method. They can also well control the development reaction time and save the developer consumption. The design of the developer spray tray is crucial to avoid development defects and improve development uniformity, which directly affects the manufacturing quality and production efficiency of semiconductor wafers.

[0003] During the working process of the developer spray plate, the pump body accurately guides the developer into the plate body, and then evenly guides it through several carefully designed nozzles to ensure that the developer can be accurately sprayed on the surface of the PCB board. However, during the spraying process, the developer is easy to splash around, resulting in uneven spraying effect. More importantly, the current spraying method lacks a mechanism to guide the developer to the surroundings based on the spraying center, which affects the uniformity of the developer spraying on the PCB board.

[0004] For example: the Chinese utility model patent (application number: 202223344234.7) discloses a "developer nozzle structure". Its specification discloses: In the prior art, when the nozzle is used, it is generally a fixed structure, which is not convenient for disassembly and assembly. When the nozzle structure sprays liquid, it sprays liquid from one end or multiple ends, and the liquid is sprayed in one direction. The uniformity of the sprayed developer does not meet expectations; the above patents can prove the defects of the prior art.

[0005] Therefore, we have made improvements to this and proposed a modular spray plate for plate development. Summary of the invention

[0006] The purpose of the present invention is to address the problems raised by the current background technology.

[0007] In order to achieve the above-mentioned purpose of the invention, the present invention provides a modular spray plate for plate development to improve the above-mentioned problem.

[0008] The specific application is as follows:

[0009] A modular spray plate for plate development, comprising a frame, wherein a plurality of fixed frames are evenly distributed and fixedly connected to the inner wall of the frame, a plate body is fixedly connected between two relatively distributed fixed frames, a plurality of inclined deep grooves are provided on the upper surface of the plate body, and a spray head assembly is provided below the plurality of inclined deep grooves;

[0010] The nozzle assembly includes a plurality of mounting holes evenly distributed, the inner wall of the mounting hole is threadedly connected to a positioning tube, the lower end of the positioning tube is fixedly connected to a hemispherical shell, the inner wall of the hemispherical shell is movably connected to a sphere with holes, the end of the sphere with holes away from the hemispherical shell is fixedly connected to an inner tube, a plurality of arc cone rods are evenly distributed and fixedly connected below the inner tube, a bent plate frame is movably connected between two adjacent arc cone rods, an arc rubber plate is fixedly connected above the bent plate frame, and conical rubber sleeves are movably connected between the outer walls of a plurality of the bent plate frames.

[0011] As a preferred technical solution of the present application, auxiliary plates are fixedly connected on both sides of the arc cone rod, and an inclined groove is provided on the side of the auxiliary plate away from the arc cone rod, and a sliding rod is movably connected between the two relatively distributed inclined grooves.

[0012] As a preferred technical solution of the present application, the outer wall of the sliding rod is symmetrically and evenly distributed and fixedly connected to two auxiliary frames, and the two auxiliary frames are fixedly mounted on the surfaces of adjacent bent plate frames.

[0013] As a preferred technical solution of the present application, an arc-shaped rubber plate is fixedly connected to the top of the bending plate frame, and several of the arc-shaped rubber plates are movably installed on the lower end of the inner tube. An outer conical sleeve is fixedly connected to the bottom of the outer wall of the inner tube, and an adjustment component is provided on the outer wall of the outer conical sleeve.

[0014] As a preferred technical solution of the present application, a positioning rod is fixedly connected below the surface of the bending plate frame, and a rib is fixedly connected to the other end of the positioning rod away from the bending plate frame, and the outer walls of several ribs are fixedly mounted on the inner wall of the conical rubber sleeve.

[0015] As a preferred technical solution of the present application, the adjustment assembly includes an auxiliary tube fixedly installed on one side of the outer conical sleeve, and several auxiliary tubes on the same side are fixedly connected to a side plate at one end away from the inner tube, and an elastic airbag is fixedly connected between two relatively distributed side plates.

[0016] As a preferred technical solution of the present application, a curved tube is inserted through the side plate and fixedly connected between the plurality of elastic airbags, and the curved tube connects the plurality of elastic airbags in series.

[0017] As a preferred technical solution of the present application, one end of the curved pipe is fixedly connected to a supporting pipe, and one end of the supporting pipe passes through the frame.

[0018] As a preferred technical solution of the present application, a plurality of locking frames are evenly distributed and fixedly connected in a straight line on the side of the side plate away from the elastic airbag, and the locking frames are movably connected to the inner tube.

[0019] As a preferred technical solution of the present application, a disc cover is fixedly connected to the top of the disc body, and the disc cover is directly above the multiple inclined deep grooves, and a bent pipe is fixedly connected to the middle of the upper surface of the disc cover.

[0020] Compared with the prior art, the present invention has the following beneficial effects:

[0021] In the scheme of this application:

[0022] 1. In order to solve the problem that the developer is easy to splash around during the spraying process in the prior art, resulting in an uneven spraying effect, and more importantly, the current spraying method lacks a mechanism to guide the developer to the surroundings based on the spraying center, which affects the uniformity of the developer spraying on the PCB board. The present application forms a circular airflow curtain through a conical rubber sleeve and an outer conical sleeve to concentrate the developer during the spraying process, prevent it from splashing around, and reduce the utilization rate of the developer. The arc rubber sleeve is pushed to expand outward as the wind pressure continues to increase, so that the circular airflow curtain The diameter expands to continuously spread the developer toward the middle and outward, so that the developer can be evenly sprayed on the surface of the PCB board. While the conical rubber sleeve expands outward, the arc rubber plate above the bending plate frame is separated from the bottom of the inner tube and moves toward the middle of the inner tube. The elasticity of the cone box rubber sleeve makes several arc rubber plates contact each other to block the lower part of the inner tube, so that the developer is quickly closed. Release, so that it can be flexibly switched between the anti-splashing structure, the airflow curtain spreading structure and the blocking structure, thereby ensuring the uniformity of the developer spraying and increasing the utilization rate of the developer;

[0023] 2. The present application diverts the introduced air through an elastic airbag, so that the initial pressure is not sufficient to push the arc-shaped rubber plate away from the lower end of the inner tube. After the elastic airbag continues to expand and reaches the maximum volume, the pressure is no longer divided, so that the arc-shaped rubber plate can be pushed, so that the pressure control operation can be performed. In the process of continuous expansion of the elastic airbag, the locking plate pushes the inner tube to tilt, so that it can switch between the variable pressure structure and the angle control structure, thereby improving the efficiency of the developer disk spraying. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 A schematic diagram of the overall structure of a modular spray plate for plate development provided in this application;

[0025] Figure 2 Schematic diagram of the plate structure of the modular spray plate for plate development provided in this application Figure 1 ;

[0026] Figure 3 Schematic diagram of the plate structure of the modular spray plate for plate development provided in this application Figure 2 ;

[0027] Figure 4 A schematic diagram of the structure of a nozzle assembly in a modular spray tray for plate development provided in this application;

[0028] Figure 5 A schematic diagram of the exploded structure of the nozzle assembly in the modular spray tray for plate development provided in this application;

[0029] Figure 6 A schematic diagram of the partial structure of the nozzle assembly in the modular spray tray for plate development provided in the present application;

[0030] Figure 7 A schematic diagram of the airflow curtain protection work of the nozzle assembly in the modular spray tray for plate development provided in this application;

[0031] Figure 8 A schematic diagram of the expanded working state of the nozzle assembly in the modular spray tray for plate development provided in this application.

[0032] Indicated in the figure:

[0033] 1. Frame; 2. Fixed frame; 3. Plate body; 4. Plate cover; 5. Bend pipe;

[0034] 6. Nozzle assembly; 601. Mounting hole; 602. Positioning tube; 603. Hemispherical shell; 604. Inner tube; 605. Outer cone sleeve; 606. Sphere with hole; 607. Arc rubber sheet; 608. Inclined groove; 609. Arc cone rod; 610. Conical rubber sleeve; 611. Auxiliary plate; 612. Rib plate; 613. Sliding rod; 614. Auxiliary frame; 615. Bending plate frame; 616. Positioning rod;

[0035] 7. Adjustment assembly; 701. Auxiliary tube; 702. Locking frame; 703. Curved tube; 704. Side plate; 705. Elastic airbag; 706. Support tube;

[0036] 8. Multiple inclined and deep grooves. DETAILED DESCRIPTION

[0037] In order to enable those skilled in the art to better understand the scheme of the present invention, the technical scheme in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the present invention.

[0038] As described in the background technology, during the spraying process, the developer is easy to splash around, resulting in an uneven spraying effect. More importantly, since the current spraying method lacks a mechanism to guide the spraying center to the surroundings, it affects the uniformity of the developer spraying on the PCB board.

[0039] In order to solve this technical problem, the present invention provides a modular spray disc for plate development, which is applied to the technical field of PCB board development.

[0040] Specifically, please refer to Figure 1 , Figure 2 , Figure 4 , Figure 5 , Figure 6 , Figure 7 and Figure 8 The modular spray plate for plate development specifically comprises a frame 1, a plurality of fixed frames 2 are evenly distributed and fixedly connected to the inner wall of the frame 1, a plate body 3 is fixedly connected between two relatively distributed fixed frames 2, a plurality of inclined deep grooves 8 are provided on the upper surface of the plate body 3, and a spray head assembly 6 is provided below the plurality of inclined deep grooves 8;

[0041] The nozzle assembly 6 includes a plurality of mounting holes 601 evenly distributed, the inner wall of the mounting hole 601 is threadedly connected to a positioning tube 602, the lower end of the positioning tube 602 is fixedly connected to a hemispherical shell 603, the inner wall of the hemispherical shell 603 is movably connected to a sphere 606 with a hole, the end of the sphere 606 with a hole away from the hemispherical shell 603 is fixedly connected to an inner tube 604, a plurality of arc cone rods 609 are evenly distributed and fixedly connected below the inner tube 604, a bent plate frame 615 is movably connected between two adjacent arc cone rods 609, and an arc rubber is fixedly connected above the bent plate frame 615 The plate 607 and the outer wall of several bent plate racks 615 are movably connected with a conical rubber sleeve 610. The developer flows along the bent pipe 5 into the multi-slanted deep grooves 8 between the plate cover 4 and the plate body 3, and is divided into several mounting holes 601 and enters the positioning tube 602. With the pressure of the liquid, it passes through the hemispherical shell 603 and the perforated sphere 606 and enters the inner tube 604. The several bent plate racks 615 and the arc cone rod 609 cooperate with each other to concentrate the derived liquid. At the same time as the developer is sprayed, air is introduced and flows along the outer cone sleeve 606. 05, the outer cone sleeve 605 cooperates with the inner tube 604 to form a circular air curtain with the air discharged. The developer falling on the surface of the PCB is blown to all directions by the air curtain. As the air pressure increases, the arc rubber plate 607 is pushed downward and away from the lower end of the inner tube 604. Since the sliding rod 613 connected to the bending plate frame 615 by the auxiliary frame 614 moves in the inclined groove 608 of the auxiliary plate 611, the arc rubber plate 607 is driven to move downward, and the inclined groove 608 moves it to the middle, so that the arc rubber plate 607 moves obliquely. When the developer is discharged, the curved rubber plate 607 moves downward and contacts the discharged developer, so that the curved rubber plate 607 is turned outward by the slide bar 613, driving the curved plate frame 615 to follow the movement, and then the positioning rod 616 pushes the rib plate 612 to make the conical rubber sleeve 610 expand outward, thereby changing the diameter of the circular airflow curtain to gradually expand the developer, and the developer is blown and continuously spread outward, so that the developer is evenly sprayed on the surface of the PCB board, and several curved rubber plates 607 are concentrated in the middle and are located below the inner tube 604 to close the release of the developer.

[0042] The modular spray plate for plate development provided by the present invention forms a circular airflow curtain through the conical rubber sleeve 610 and the outer conical sleeve 605 to concentrate the developer during the spraying process to prevent it from splashing around and reducing the utilization rate of the developer. As the wind pressure continues to increase, the arc rubber sleeve is pushed to expand outward, so that the diameter of the circular airflow curtain is expanded to continuously spread the developer toward the middle and outward, so that the developer can be evenly sprayed on the surface of the PCB board. While the conical rubber sleeve 610 is expanding outward, the arc rubber plate 607 above the bent plate frame 615 is separated from the bottom of the inner tube 604 and moves toward the middle of the inner tube 604. Due to the elasticity of the cone box rubber sleeve, a plurality of arc rubber plates 607 are in contact with each other to block the lower part of the inner tube 604, so that the developer is quickly closed. Release of the developer, so that it can be flexibly switched between the anti-splashing structure, the airflow curtain spreading structure and the blocking structure, thereby ensuring the uniformity of the developer spraying and increasing the utilization rate of the developer.

[0043] In order to enable those skilled in the art to better understand the solutions of the present invention, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings.

[0044] It should be noted that, in the absence of conflict, the embodiments of the present invention and the features and technical solutions in the embodiments may be combined with each other.

[0045] It should be noted that similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, further definition and explanation thereof is not required in subsequent drawings.

[0046] Example 1, please refer to Figure 5 and Figure 6 A modular spray disc for plate development, wherein both sides of an arc cone rod 609 are fixedly connected with auxiliary plates 611, an oblique groove 608 is provided on the side of the auxiliary plate 611 away from the arc cone rod 609, and a slide bar 613 is movably connected between the two relatively distributed oblique grooves 608, and the moving trajectory of the slide bar 613 is limited by the oblique groove 608, so that the arc rubber plate 607 can be separated from the inner tube 604 and move to the oblique lower part of the inner tube 604 to ensure the closure and blockage of the inner tube 604.

[0047] Further, such as Figure 6 As shown, the outer wall of the slide rod 613 is symmetrically and evenly distributed and fixedly connected with two auxiliary frames 614. The two auxiliary frames 614 are fixedly installed on the surfaces of adjacent bent plate frames 615. The slide rod 613 and the bent plate frame 615 can be connected through the auxiliary frames 614, driving the bent plate frame 615 to move along the inclined groove 608.

[0048] Further, such as Figure 5 and Figure 6As shown, an arc-shaped rubber plate 607 is fixedly connected to the top of the bent plate frame 615, and several arc-shaped rubber plates 607 are movably installed on the lower end of the inner tube 604. An outer cone sleeve 605 is fixedly connected to the bottom of the outer wall of the inner tube 604. An adjustment component 7 is provided on the outer wall of the outer cone sleeve 605. The gas entering therein is guided through the outer cone sleeve 605 to form a circular airflow curtain.

[0049] Further, such as Figure 5 and Figure 6 As shown, a positioning rod 616 is fixedly connected below the surface of the bending plate frame 615, and a rib 612 is fixedly connected to the other end of the positioning rod 616 away from the bending plate frame 615. The outer walls of several ribs 612 are fixedly installed on the inner wall of the conical rubber sleeve 610, and the conical rubber sleeve 610 is supported by the ribs 612.

[0050] Example 2 further optimizes the modular spray plate for plate development provided in Example 1. Specifically, Figure 1 , Figure 2 , Figure 3 and Figure 4 As shown, the regulating assembly 7 includes an auxiliary tube 701 fixedly installed on one side of the outer cone sleeve 605, and a plurality of auxiliary tubes 701 on the same side are fixedly connected with a side plate 704 at one end away from the inner tube 604, and an elastic airbag 705 is fixedly connected between two relatively distributed side plates 704. The elastic airbag 705 is first introduced with air along with the curved tube 703. Since the air pressure is diverted, it is used to inflate the elastic airbag 705, so that the air pressure introduced into the outer cone sleeve 605 is smaller, and the elastic airbag 705 is continuously filled with air. After the filling is completed, as the auxiliary tube 701 is introduced into the inner wall of the outer cone sleeve 605, its air pressure can push the arc rubber plate 607 and expand the cone rubber sleeve 610. During the expansion of the elastic airbag 705, the side plate 704 pushes the locking frame 702, so that the perforated sphere 606 connected to the inner tube 604 is deflected in the hemispherical shell 603, so that the spraying range is tilted to expand the spraying range of the developer.

[0051] The introduced air is diverted through the elastic airbag 705, so that the initial pressure is not enough to push the arc-shaped rubber plate 607 away from the lower end of the inner tube 604. After the elastic airbag 705 continues to expand and reaches the maximum volume, the pressure is no longer divided, so that the arc-shaped rubber plate 607 can be pushed, so that the pressure control operation can be performed. In the process of continuous expansion of the elastic airbag 705, the locking plate pushes the inner tube 604 to tilt, so that it can switch between the variable pressure structure and the angle control structure, thereby improving the efficiency of spraying the developer disk.

[0052] Further, such as Figure 3As shown, a curved tube 703 is fixedly connected between the plurality of elastic airbags 705 and passes through the side plate 704, and the curved tube 703 connects the plurality of elastic airbags 705 in series, and air is provided to the plurality of elastic airbags 705 through the curved tube 703 to change their states.

[0053] Further, such as Figure 2 and Figure 3 As shown, one end of the curved tube 703 is fixedly connected to a support tube 706, and one end of the support tube 706 passes through the frame 1 and is connected to an air pump through the support tube 706 to provide gas for the spray plate structure.

[0054] Further, such as Figure 4 As shown, a plurality of locking frames 702 are evenly distributed and fixedly connected in a straight line on one side of the side plate 704 away from the elastic airbag 705. The locking frames 702 are movably connected to the inner tube 604. The power of expansion and contraction of the elastic airbag 705 is transferred through the locking frames 702, thereby pushing the inner tube 604 to tilt and return.

[0055] Further, such as Figure 1 and Figure 2 As shown, a disk cover 4 is fixedly connected to the top of the disk body 3, and the disk cover 4 is directly above the multi-inclined deep grooves 8. A curved pipe 5 is fixedly connected to the middle of the upper surface of the disk cover 4. The developer is introduced into the space between the disk cover 4 and the disk body 3 through the curved pipe 5, enters the multi-inclined deep grooves 8 for diversion, and is introduced into each nozzle structure, thereby realizing the spraying work on the PCB board.

[0056] The use process of the modular spray plate for plate development provided by the present invention is as follows:

[0057] Working principle: The staff connects the elbow 5 to the pipeline of the developer, and connects the support tube 706 to the air pump, and the PCB board to be developed is transported to the bottom of the spray plate by the conveying equipment;

[0058] Spraying: The pump body introduces the developer through the curved pipe 5, passes between the disk cover 4 and the disk body 3, and is guided by the multi-slanted deep grooves 8, then enters the positioning tube 602, passes through the perforated sphere 606 and enters the inner tube 604, and then is guided out through the pipeline spliced ​​by a plurality of arc cone rods 609 and the bent plate frame 615, and sprayed on the surface of the PCB board;

[0059] Air curtain protection: When the pump body is working, the air pump works accordingly, and the gas enters the curved pipe 703 and is distributed to the elastic airbag 705. The elastic airbag 705 diverts the gas and guides it through the auxiliary pipe 701 and into the outer cone sleeve 605. The outer cone sleeve 605 and the inner pipe 604 restrict the gas flow and guide it through the conical rubber sleeve 610, so that a circular air curtain is formed to guide the developer to cover the developer to prevent the developer from splashing outwards. Figure 7As shown;

[0060] Angle adjustment: The elastic airbag 705 is continuously filled with gas, and it expands continuously, so that the side plates 704 on both sides of the elastic airbag 705 are pushed, and the locking plate pushes the inner tube 604, and the perforated sphere 606 connected to one end of the inner tube 604 rotates in the hemispherical shell 603, and the angle of the inner tube 604 is adjusted, so that the spraying range is changed and the uniformity of the spraying is increased;

[0061] Expansion: After the elastic airbag 705 is continuously inflated, the air pressure diverted to the auxiliary tube 701 is continuously increased. In the process of increasing air pressure, the arc-shaped rubber plate 607 can be pushed away from the lower end of the inner tube 604, and the bent plate frame 615 can be driven to move downward, so that the slide bar 613 connected to the auxiliary frame 614 moves in the inclined groove 608, driving the bent plate frame 615 to move obliquely downward and concentrate under the inner tube 604. The arc-shaped rubber plate 607 will be impacted by the developer and flipped around the slide bar 613 as the axis. The bent plate frame 615 will follow the movement and drive the rib plate 612 to move outward with the positioning rod 616, and stretch the conical rubber sleeve 610 to expand, change the angle of the outer wall of the conical rubber sleeve 610, and adjust the diameter of the air curtain of the outlet air flow, so that the developer on the surface of the PCB board is gradually driven by the air curtain to blow around, so as to be evenly sprayed on the surface of the PCB board. Figure 8 As shown;

[0062] Closing: During the turning process of the bending plate frame 615, as the air pressure continues to increase, the arc-shaped rubber plate 607 below the inner tube 604 gradually converges to the middle, and the lower end of the inner tube 604 is gradually blocked, thereby controlling the flow of the developer and closing it;

[0063] Reset: After the spraying work of this PCB board is completed, the air pump and the pump body are turned off. After the conical rubber sleeve 610 loses pressure, it recovers elasticity and moves inward. Under the push of the positioning rod 616, the bent plate frame 615 is flipped inward with the slide bar 613, and the slide bar 613 is squeezed to move upward along the inclined groove 608, driving the arc-shaped rubber plate 607 to separate from each other and contact with the lower end of the inner tube 604. After the elastic airbag 705 loses the support of the air pump, the elastic airbag 705 is reset with the help of elasticity, and the locking plate pulls the inner tube 604 back to its original position.

[0064] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral one; it can be a mechanical connection, an electrical connection, or communication with each other; it can be a direct connection, or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0065] Obviously, the embodiments described above are only some embodiments of the present invention, rather than all embodiments. The preferred embodiments of the present invention are given in the accompanying drawings, but they do not limit the patent scope of the present invention. The present invention can be implemented in many different forms. On the contrary, the purpose of providing these embodiments is to make the understanding of the disclosure of the present invention more thorough and comprehensive. Although the present invention has been described in detail with reference to the aforementioned embodiments, for those skilled in the art, it is still possible to modify the technical solutions recorded in the aforementioned specific embodiments, or to perform equivalent replacements for some of the technical features therein. Any equivalent structure made using the contents of the specification and drawings of the present invention, directly or indirectly used in other related technical fields, is also within the scope of patent protection of the present invention.

Claims

1. A modular spray plate for plate development, characterized in that: It comprises a frame (1), the inner wall of the frame (1) is evenly distributed and fixedly connected to a plurality of fixing frames (2), a disk body (3) is fixedly connected between two relatively distributed fixing frames (2), the upper surface of the disk body (3) is provided with a plurality of inclined deep grooves (8), and a nozzle assembly (6) is provided below the plurality of inclined deep grooves (8); The nozzle assembly (6) comprises a plurality of mounting holes (601) evenly distributed, the inner wall of the mounting hole (601) being threadedly connected to a positioning tube (602), the lower end of the positioning tube (602) being fixedly connected to a hemispherical shell (603), the inner wall of the hemispherical shell (603) being movably connected to a sphere (606) with a hole, the end of the sphere (606) with a hole away from the hemispherical shell (603) being fixedly connected to an inner tube (604), a plurality of arc cone rods (609) being evenly distributed and fixedly connected below the inner tube (604), a bent plate frame (615) being movably connected between two adjacent arc cone rods (609), an arc-shaped rubber plate (607) being fixedly connected above the bent plate frame (615), and a conical rubber sleeve (610) being movably connected between the outer walls of a plurality of the bent plate frames (615); Auxiliary plates (611) are fixedly connected to both sides of the arc cone rod (609); an inclined groove (608) is provided on the side of the auxiliary plate (611) away from the arc cone rod (609); a sliding rod (613) is movably connected between two inclined grooves (608) that are relatively distributed; the outer wall of the sliding rod (613) is symmetrically and evenly distributed and fixedly connected to two auxiliary frames (614); the two auxiliary frames (614) are fixedly mounted on the surfaces of adjacent bent plate frames (615).

2. A modular spray plate for plate development according to claim 1, characterized in that: An arc-shaped rubber plate (607) is fixedly connected to the upper part of the bending plate frame (615), and a plurality of the arc-shaped rubber plates (607) are movably mounted on the lower end of the inner tube (604). An outer cone sleeve (605) is fixedly connected to the lower part of the outer wall of the inner tube (604), and an adjustment component (7) is provided on the outer wall of the outer cone sleeve (605).

3. A modular spray plate for plate development according to claim 1, characterized in that: A positioning rod (616) is fixedly connected below the surface of the bending plate frame (615), and a rib plate (612) is fixedly connected to the other end of the positioning rod (616) away from the bending plate frame (615), and the outer walls of a plurality of the rib plates (612) are fixedly mounted on the inner wall of the conical rubber sleeve (610).

4. A modular spray plate for plate development according to claim 2, characterized in that: The adjustment assembly (7) comprises an auxiliary tube (701) fixedly mounted on one side of the outer cone sleeve (605); a plurality of the auxiliary tubes (701) on the same side have one end fixedly connected to a side plate (704) away from the inner tube (604); and an elastic air bag (705) is fixedly connected between two side plates (704) that are relatively distributed.

5. A modular spray plate for plate development according to claim 4, characterized in that: A curved tube (703) is fixedly connected between the plurality of elastic airbags (705) and passes through the side plate (704), and the curved tube (703) connects the plurality of elastic airbags (705) in series.

6. A modular spray plate for plate development according to claim 5, characterized in that: One end of the curved tube (703) is fixedly connected to a support tube (706), and one end of the support tube (706) passes through the frame (1).

7. A modular spray plate for plate development according to claim 4, characterized in that: A plurality of locking frames (702) are evenly distributed and fixedly connected in a straight line on one side of the side plate (704) away from the elastic airbag (705), and the locking frames (702) are movably connected to the inner tube (604).

8. A modular spray plate for plate development according to claim 1, characterized in that: A disk cover (4) is fixedly connected to the top of the disk body (3), and the disk cover (4) is located directly above the multi-slanted deep grooves (8). A curved pipe (5) is fixedly connected to the middle of the upper surface of the disk cover (4).

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