Maxwell electromagnetic two-axis positioning platform device and working method thereof

Abstract

The application discloses a Maxwell electromagnetic two-axis positioning platform device and a working method thereof. The device comprises a moving platform, a guide mechanism and a driving mechanism. The driving mechanism comprises a stator, a coil and a mover. The stator has two groups of driving groups. The first group of driving groups comprises two stator arms arranged along a first direction. The second group of driving groups comprises two stator arms arranged along a second direction. The first and second groups of driving groups form U-shaped magnetic flux loops. The stator has a double-U-shaped cross structure to ensure compactness. The mover is arranged in a movable area surrounded by the stator arms. The mover is drivingly connected to the moving platform and guided by the guide mechanism. Each group of driving groups is wound with a coil. The application has the advantages of high integration, light weight and large stroke. The direct current bias magnetic flux generated by the permanent magnet only passes through the side surface of the mover along the movement direction and does not generate magnetic interference force in the non-movement direction, thereby avoiding parasitic movement in the non-movement direction and improving the comprehensive performance of the positioning platform device.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of precision driving technology, in particular to a Maxwell electromagnetic two-axis positioning platform device and a working method thereof. BACKGROUND

[0002] With the development of the field of ultra-precision manufacturing, the manufacturing precision of parts has reached the nanometer level. In order to adapt to the needs of nanometer machining, corresponding nanometer-level measurement equipment has also emerged, such as a nanometer-level positioning platform device. Through the nanometer-level positioning precision and resolution of the nanometer-level positioning platform device, and by using a scanning method, the size and surface quality of a part placed on the nanometer-level positioning platform device can be detected. The driving methods of these nanometer positioning platform devices mainly include electromagnetic force driving (such as Lorentz force shear stress electromagnetic driving and Maxwell normal stress electromagnetic driving) and intelligent material driving (such as piezoelectric driving and magnetostrictive driving).

[0003] Taking intelligent material driving as an example, although piezoelectric driving has the advantages of small size, large force density, large stiffness, high bandwidth, and high motion resolution, the stroke range of piezoelectric driving is limited due to the characteristics of piezoelectric materials, and the stroke range is usually tens of microns. If a flexible hinge amplification mechanism is used to increase the piezoelectric stroke, the overall motion quality will increase and the motion frequency will decrease. The performance of magnetostrictive driving is not higher than that of piezoelectric driving, so magnetostrictive driving is not widely used in the field of micro-nano driving.

[0004] Taking electromagnetic force driving as another example, although the nanometer positioning platform driven by the voice coil motor shear stress electromagnetic driving can reach the millimeter level, it has the disadvantages of low force density, low bandwidth, and low energy utilization rate, and cannot meet the use requirements of nanometer positioning platforms with a stroke of tens of microns or even hundreds of microns. Although the Maxwell normal stress electromagnetic driving forms a linear relationship between the driving force, the driving current, and the displacement by introducing a permanent magnet bias magnetic flux, it can better control precise motion and has the advantages of large force density and large stroke (hundreds of microns), but when driving multi-axis motion, it is usually only a simple combination and superposition of traditional single-axis driving units, which greatly increases the motion quality and the overall volume of the device, and leads to a decrease in the stroke, frequency, and other performances of the platform. In addition, the introduction of the permanent magnet bias magnetic flux will exert a non-motion direction coupling magnetic interference force, which will produce parasitic motion in the non-motion direction and interfere with the normal scanning detection results in the main motion direction.

[0005] In summary, the structure of the nanometer positioning platform in the related art cannot simultaneously consider large stroke, lightweight, and high integration, and the overall comprehensive performance of the nanometer positioning platform needs to be improved. SUMMARY

[0006] The present application aims to provide a Maxwell electromagnetic two-axis positioning platform device and a working method thereof, so as to solve the problem that the positioning platform in the prior art cannot simultaneously meet the requirements of large stroke, high motion bandwidth, high integration and no Z-direction vertical parasitic motion.

[0007] The technical scheme adopted by the present application is as follows: a Maxwell electromagnetic two-axis positioning platform device, comprising a motion platform, a driving mechanism and a guide mechanism, wherein the motion platform is used for placing a part to be detected, the driving mechanism is used for driving the motion platform, and the guide mechanism is used for constraining the motion path of the motion platform, so that the motion platform can only move in the horizontal direction,

[0008] The driving mechanism comprises a first direction stator, a second direction stator, a coil, a mover and a permanent magnet, the first direction stator and the second direction stator are both provided with a coil, the first direction stator has a first base plate, the first base plate comprises a first through hole in the center, and two first stator arms are protruded from the first end surface of the base plate, the second direction stator has a second base plate, the second base plate comprises a second through hole in the center, and two second stator arms are protruded from the first end surface of the second base plate, a space is formed between the two first stator arms and the two second stator arms, the mover is movably arranged in the space, the motion platform is connected to the upper surface of the mover, the first direction stator is installed on the upper part of the second direction stator, and the permanent magnet is arranged between the first direction stator and the second direction stator,

[0009] The guide mechanism is connected to the bottom surface of the mover by penetrating the second through hole and the first through hole from bottom to top.

[0010] Further, the first direction stator further comprises first protrusions located around the first direction stator, the second direction stator further comprises second protrusions located around the second direction stator, and the permanent magnet comprises four permanent magnets, which are arranged between the first protrusions and the second protrusions around the first direction stator and the second direction stator respectively.

[0011] Further, the guide mechanism is composed of four symmetrical straight circular flexible hinges with consistent sizes, forming a two-degree-of-freedom parallelogram flexible hinge structure, so as to realize the two-axis motion path constraint of the mover.

[0012] Further, the guide mechanism is fixedly connected to a mounting groove in the center of the base.

[0013] Further, coils are wound around the two first stator arms and the two second stator arms.

[0014] Further, an installation shell is further included, the installation shell is installed on the base and accommodates the driving mechanism, a mounting platform is provided with an accommodation hole, and the motion platform passes through the accommodation hole.

[0015] Further, the first displacement sensor and the second displacement sensor are arranged on the mounting platform, and the first displacement sensor and the second displacement sensor are arranged in the first mounting hole and the second mounting hole respectively.

[0016] Further, the two first stator arms are arranged in sequence along the first direction, and the two second stator arms are arranged in sequence along the second direction, and the first direction and the second direction intersect.

[0017] Further, the first direction and the second direction are perpendicular.

[0018] A working method of the Maxwell electromagnetic two-axis positioning platform device,

[0019] After the coil is energized, alternating current magnetic flux with varying direction and size is generated on the mover side surface along the first direction and the second direction, the alternating current magnetic flux direction of the in and out of the mover side surface is consistent, the magnet generates bias magnetic flux with constant size and direction on the mover side surface along the first direction and the second direction, the bias magnetic flux direction of the in and out of the mover side surface is opposite, thereby generating a difference of magnetic induction intensity on the mover side surface along the first direction and the second direction, in this case, two Maxwell electromagnetic driving forces are generated on the mover along the first direction and the second direction, under the constraint of the guide mechanism, the mover generates horizontal movement along the first direction and the second direction, and drives the movement platform to move along the first direction and the second direction, and the size and direction of the driving force in the first direction and the second direction can be changed by changing the current size and direction in the coil, so as to control the arbitrary movement of the mover in the horizontal plane.

[0020] Compared with the prior art, the beneficial effects of the present application are: the positioning platform device is optimized in structure, specifically, a driving mechanism including a stator, a coil and a mover is arranged, the stator has two driving groups, the first driving group includes two stator arms arranged along the first direction, the second driving group includes two stator arms arranged along the second direction, the first driving group forms a U-shaped magnetic flux loop, the second driving group also forms a U-shaped magnetic flux loop, the stator has a double-U-shaped cross structure to ensure compactness, the mover is arranged in the movable area surrounded by the four stator arms, the driving mechanism drives the movement platform through the mover, and the coil is wound in each driving group, in this way, by adopting the double-U-shaped cross structure of the stator, the mover can be driven to move in the movable area along the first direction or the second direction in the form of electromagnetic drive under the condition of selecting different coil energization, and the movement of the movement platform in the first direction or the second direction is realized.

[0021] On the way that the driving mechanism realizes multi-axis movement, the stator is arranged as a double U-shaped cross structure in the application, and the electromagnetic driving mechanism is formed by the cooperation of the stator and the mover, which replaces the driving mechanism formed by simply stacking multiple single-axis driving mechanisms in the related art, so that the structure of the driving mechanism in the application is simplified, and the compactness of the positioning platform device is improved, and the mass and volume of the positioning platform device are reduced, and the electromagnetic driving mode can make the positioning platform stroke reach ±200 microns, so that the positioning platform device well balances the advantages of lightweight, high integration, large stroke and the like, and the comprehensive performance of the positioning platform device is improved, in addition, the guide mechanism in the application directly provides high stiffness support in the vertical direction of the motion platform, and there is no coupled permanent magnet interference force in the vertical movement direction, which is smaller than the vertical parasitic motion of the two-dimensional electromagnetic driving positioning platform in the related art.

[0022] In addition to the purposes, features and advantages described above, the application has other purposes, features and advantages. The application will be further described in detail below with reference to the drawings. BRIEF DESCRIPTION OF DRAWINGS

[0023] Figure 1 The overall structure diagram of the positioning platform device of the application.

[0024] Figure 2 The internal structure diagram of the positioning platform device of the application.

[0025] Figure 3 The driving mechanism structure schematic diagram of the application.

[0026] Figure 4 The first direction stator structure schematic diagram of the driving mechanism of the application.

[0027] Figure 5 The second direction stator structure schematic diagram of the driving mechanism of the application.

[0028] Figure 6 The driving mechanism permanent magnet magnetic flux path principle diagram of the application.

[0029] Figure 7 The driving mechanism driving principle diagram of the application.

[0030] Figure 8 The guide mechanism assembly schematic diagram of the application.

[0031] Figure 9 The guide mechanism structure schematic diagram of the application.

[0032] Figure 10 The base structure schematic diagram of the application.

[0033] Figure 11 The mounting shell structure schematic diagram of the application. DETAILED DESCRIPTION

[0034] The specific embodiments of the present application will be described in detail below with reference to the accompanying drawings.

[0035] Please refer to Figures 1-11 The positioning platform device disclosed in the present application can be a nanometer-level positioning platform used in the field of ultra-precision manufacturing. The platform is used as a measuring device and can be used for detecting parts after finishing. The following will be described in detail.

[0036] The positioning platform device of the present application comprises a moving platform 500, a driving mechanism 400 and a guiding mechanism 700. The moving platform 500 can be used for placing parts to be detected. The driving mechanism 400 can be used for driving the moving platform 500, so that the parts to be detected can move with the moving platform 500. During the movement, the size, shape and position tolerance of the parts to be detected can be detected by cooperating with a laser scanning detection method.

[0037] As shown in Figure 2 and Figure 3 , the driving mechanism 400 comprises a first direction stator 410, a second direction stator 420, a coil 430 and a mover 440.

[0038] The stators 410 and 420 are the installation bases of the entire driving mechanism 400 and can provide installation positions for other parts. The coil 430 and the mover 440 are arranged on the stators 410 and 420. The stators 410 and 420 and the mover 440 can be electromagnetically connected. The coil 430 is a conversion medium between electric field and magnetic field.

[0039] Specifically, as shown in Figure 4 and Figure 5 , the stator 410 has an "I-shaped" substrate 412. The substrate 412 comprises a square through hole 413 in the center and a protruding body 414 around the square through hole 413. Two stator arms 411 are protrudingly arranged on the first end surface of the substrate. The stator 420 also has a substrate 421. The substrate 421 comprises a square through hole 423 in the center and a protruding body 424 around the square through hole 423. Two stator arms 422 are protrudingly arranged on the first end surface of the substrate 421. The stator arms 422 are positioned and fixed by the slots on the substrate 421. The four stator arms 411 and 422 form a movable area. The mover 440 is movably arranged in the movable area. The driving mechanism 400 is drivenly connected to the moving platform 500 through the mover 440.

[0040] The stator arms 411 and 422 are arranged in pairs to form two groups of driving groups. The two stator arms 411 in the first group of driving groups are arranged in sequence along a first direction X. The two stator arms 422 in the second group of driving groups are arranged in sequence along a second direction Y. The first direction X and the second direction Y intersect, so that the moving platform 500 can move in two different directions.

[0041] Each driving group is provided with a coil 430. When the coil 430 is energized, the mover 440 can move in the first direction X or the second direction Y in the active area. Specifically, when the coil 430 provided in the first driving group is energized, under the action of electromagnetic induction, a magnetic driving force along the first direction X will be generated between the two stator arms 411 in the first driving group, which will drive the mover 440 to move along the first direction X, so that the moving platform 500 can move along the first direction X with the mover 440; when the coil 430 provided in the second driving group is energized, under the action of electromagnetic induction, a magnetic driving force along the second direction Y will be generated between the two stator arms 422 in the second driving group, which will drive the mover 440 to move along the second direction Y, so that the moving platform 500 can move along the second direction Y with the mover 440.

[0042] It can be seen that the plane determined by the first direction X and the second direction Y is the movement plane of the moving platform 500. Through electromagnetic driving between the driving mechanism 400 and the moving platform 500, the moving platform 500 can move along the first direction X or the second direction Y, and after the movement of the moving platform 500 in two different directions is synthesized, the moving platform 500 can move to any desired position in the movement plane, thereby realizing detection of the to-be-detected part placed on the moving platform 500.

[0043] In summary, compared with the related art which needs to realize multi-axis movement by simply stacking multiple single-axis driving mechanisms, the device of the present application optimizes the structure of the stator 410, 420, such as setting the stator 410, 420 as a double-U structure, so that the four stator arms are formed into driving groups in different directions, so that the driving mechanism 400 forms an electromagnetic driving mechanism that can realize multi-axis movement, so that the stator 410, 420 can drive the mover 440 to move in different directions, thereby realizing multi-axis movement of the moving platform 500. This setting method will improve the compactness of the driving mechanism 400, thereby greatly reducing the mass and volume of the positioning platform equipment of the present application. This electromagnetic driving method can make the stroke of the positioning platform reach ±200 microns. Compared with the related art, the positioning platform equipment of the present application can well balance the advantages of high integration, light weight and large stroke, and the comprehensive performance of the positioning platform equipment is greatly improved.

[0044] For the specific orientation layout of the first direction X and the second direction Y, the first direction X can be perpendicular to the second direction Y. In this perpendicular layout, the first direction X and the second direction Y can cooperate to form a plane coordinate system. The preset position of the motion platform 500 is the origin of the plane coordinate system. The relative positions that the motion platform 500 needs to reach can be represented in the form of coordinate points in the coordinate system. Such a setting manner is more conducive to controlling the motion of the motion platform 500, thereby ensuring the detection accuracy required by the to-be-tested part.

[0045] As shown in Figure 3 The driving mechanism 400 further includes four permanent magnets 450. The four permanent magnets 450 are arranged between the four protrusions 414, 424 around the stator 410, 420 base plates 412, 421 and are clamped between the first direction and the second direction stator 410, 420 base plates in the vertical direction of the end surface of the base plate, thereby separating the first direction and the second direction stator base plates.

[0046] The arrangement of the magnets 450 can further ensure the motion accuracy. The principle thereof will be described in detail below.

[0047] As shown in Figure 6 and Figure 7 Taking the movement of the mover 440 to the first direction X as an example, when the coil 430 at the corresponding position is energized, the alternating magnetic flux will be formed between the two stator arms 411 in the first driving group. The magnetic induction intensity of the alternating magnetic flux is B1. The direct-current magnetic flux generated by the four magnets 450 from the N level will flow from the stator 410 base plate into the two stator arms 411, pass through the air gap between the stator arm 411 and the mover 440, flow into the mover 440, pass through the air gap between the stator arm 422 and the mover 440, and finally flow along the stator arm 422 into the stator base plate 421 and return to the permanent magnet S level.

[0048] It can be seen that the direct-current magnetic flux generated by the magnets 450 all flows into the two side surfaces of the mover 440 along the first and second motion directions and does not pass through the upper and lower surfaces of the mover 440. Therefore, the coupled disturbance magnetic force in the upward and downward directions of the mover 440 is not generated, thereby avoiding parasitic motion in the upward and downward directions and improving the scanning detection accuracy.

[0049] The magnets 450 generate direct current magnetic fluxes in the air gaps between the stator arms 411 and the mover 440. The magnetic induction intensities generated by the magnets 450 in the air gaps between the two stator arms 411 and the mover 440 are denoted as B2 and B3 respectively. It can be seen that the direction of the alternating current magnetic flux is consistent with the direction of one of the direct current magnetic fluxes and opposite to the direction of the other direct current magnetic flux, for example, the direction of B1 is consistent with the direction of B2 and opposite to the direction of B3. In this way, the magnetic fluxes on one side of the mover 440 are superimposed on each other, i.e. the magnetic flux B on one side is B1+B2, and the magnetic fluxes on the other side are cancelled out, i.e. the magnetic flux B' on the other side is B1-B3. In this way, a difference in the magnetic induction intensity is generated between the two sides of the mover 440, i.e. the difference T is B2+B3. In this case, a Maxwell electromagnetic driving force is generated on the mover 440 in the first direction, and the mover 440 generates horizontal movement in the first direction under the constraint of the guide mechanism 700 to drive the movement platform 500 to move in the first direction. The movement principle in the second direction is the same. The size and direction of the driving force in the first and second directions can be changed by changing the size and direction of the current in the coil 430, so as to control the arbitrary movement of the mover 440 in the XY plane.

[0050] In this driving mode, the arrangement of the magnets 450 can better control the magnetic driving force required for the movement of the mover 440, and the direct current magnetic flux generated by the magnets 450 can make the driving force and the driving current, and the driving force and the displacement of the mover 440 linearly related, so as to better control the movement accuracy of the device.

[0051] As shown in FIGS. Figure 2 and Figure 3 The mover 440 is provided with a first driving pole surface and a second driving pole surface. The first driving pole surface is located between the two stator arms 411 arranged in sequence along the first direction X, so that the two stator arms 411 along the first direction X can generate a magnetic driving force on the first driving pole surface, thereby driving the mover 440 to move along the first direction X. The second driving pole surface is located between the two stator arms 422 arranged in sequence along the second direction Y, so that the two stator arms 422 along the second direction Y can generate a magnetic driving force on the second driving pole surface, thereby driving the mover 440 to move along the second direction Y. The first driving pole surface and the second driving pole surface in the mover 440 are arranged in a surface driving manner, and the magnetic driving force can drive the mover 440 in a surface driving manner. The driving manner is more stable, and the movement trajectory of the movement platform 500 and the movement accuracy that can be achieved are more easily controlled.

[0052] The first driving pole surface can be perpendicular to the first direction X. In this way, the magnetic driving force is perpendicular to the driven surface, so that the force density of the first driving pole surface, i.e., the driving force per unit area of the first driving pole surface, reaches the maximum value. The two stator arms 411 arranged along the first direction X drive the mover 440 in a positive stress driving manner, which is more effective and reasonable. Similarly, the second driving pole surface can also be arranged perpendicular to the second direction Y, which will not be described here.

[0053] The first driving pole surface and the second driving pole surface can both be provided with two, two first driving pole surfaces are arranged on opposite sides of the mover 440, and two second driving pole surfaces are also arranged on opposite sides of the mover 440. The first driving pole surface and the second driving pole surface are arranged alternately, and the two first driving pole surfaces and the two second driving pole surfaces form a closed ring surface. This arrangement of the mover 440 can further improve the driving effect.

[0054] The mover 440 can be provided as a cube, i.e., the adjacent first driving pole surface and the second driving pole surface are perpendicular to each other, so as to facilitate the processing and manufacturing of the mover 440, and also facilitate the installation of the driving mechanism 400.

[0055] Each stator arm 411 is provided with a coil 430. Specifically, the two stator arms 411 arranged along the first direction X are both provided with a coil 430, and the two stator arms 422 arranged along the second direction Y are both provided with a coil 430. Such an arrangement can generate a larger magnetic induction intensity, thereby more effectively driving the mover 440 to move. It should be noted that the two stator arms 411 in the same driving group are both provided with a coil 430, which can ensure that the air gap magnetic flux density between the mover 440 and the stator arm 411 on both sides of the mover 440 is as equal as possible, thereby ensuring the symmetry of the magnetic circuit and the more stable driving of the mover 440.

[0056] As shown in FIGS. Figure 8 and Figure 9 The guide mechanism 700 can be used to constrain the movement path of the movement platform 500.

[0057] Specifically, the guide mechanism 700 is connected to the mover 440, and the mover 440 is guided by the guide mechanism 700. In this way, under the constraint of the guide mechanism 700, the mover 440 can keep moving along the first direction X and the second direction Y, thereby avoiding abnormality such as deviation during movement, and further ensuring the movement accuracy of the movement platform 500.

[0058] For the specific structure of the guide mechanism 700, it is mainly composed of four symmetrical straight circular flexible hinges 710 with the same size, forming a two-degree-of-freedom parallelogram flexible hinge structure, thereby realizing the two-axis motion path constraint of the mover 440. In this application, the flexible branch chain can deform correspondingly with the position change of the mover 440, thereby generating an elastic deformation force to realize the path constraint of the mover 440.

[0059] The flexible branch chain structure of the guide mechanism 700 can realize reset in the unstressed state because it is subjected to elastic bending deformation, thereby enabling the mover 440 to recover to the preset position from the current position after ending the motion, for the next use.

[0060] The two-degree-of-freedom parallelogram flexible guide mechanism 700 composed of the straight circular flexible hinges 710 can be fixed to the center mounting groove 310 of a base 300, the guide mechanism 700 is inserted into the center square through hole 413, 423 of the stator 410, 420 base plate, and the upper end surface is fixed to the lower end surface of the mover. It can be seen that since the parallelogram hinge structure can elastically deform with the position change of the motion platform 440, after the mover 440 ends the deformation, the mover 440 can reset with the reset of the two-way parallelogram hinge structure, that is, the mover 440 recovers to the preset position from the current position.

[0061] As shown in Figure 1 and Figure 2 , the positioning platform device further includes a base 300, which can serve as the mounting basis of other components of the entire positioning platform device. Specifically, the base 300 can be provided with a first mounting surface, and the first mounting surface is recessed to form a mounting groove 320, and the second direction stator 420 is embedded in the mounting groove 320. The base 300 can be provided with a mounting flange 330, and the first direction stator 410 is embedded in the mounting flange 330. The motion platform 500 is arranged on the side of the driving mechanism 400 away from the first mounting surface. This structure can ensure the position stability of the driving mechanism 400 in the positioning platform device.

[0062] The stators 410, 420 can be arranged in a cross-shaped intersection installation layout, and the four stator arms 411, 422 can be arranged at the end of the stator substrate, that is, two stator arms 411 in the first direction X and the stator 410 substrate 412 form a "U"-shaped magnetic flux loop, denoted as a first magnetic flux loop, and the mover 440 is located at the opening position of the "U"-shaped first magnetic flux loop; while the two stator arms 422 in the second direction Y and the other stator 420 substrate 421 form another "U"-shaped magnetic flux loop, denoted as a second magnetic flux loop, and the mover 440 is also located at the opening position of the "U"-shaped second magnetic flux loop. The arrangement of such first magnetic flux loop and second magnetic flux loop makes the appearance of the driving mechanism 400 present a double "U"-shaped intersection structure, which can make the structure of the driving mechanism 400 more compact. Meanwhile, the mounting groove 320 is provided on the base 300 to facilitate the embedding of the "U"-shaped base of the stator 410, 420 into the mounting groove 320 and the mounting flange 330.

[0063] The positioning platform device further comprises a mounting shell 100. The bottom of the mounting shell is mounted on the base 300 and the driving mechanism 400 is integrally accommodated and wrapped therein. The mounting platform 100 can be provided with an accommodation hole 110. The mounting shell 100 is sleeved on the motion platform 500 through the accommodation hole 110, so that the motion range of the motion platform 500 is further limited in the area surrounded by the accommodation hole 110. Through this arrangement, the mounting platform 100 can provide peripheral protection for the motion platform 500 to prevent it from being damaged by impact.

[0064] As shown in Figure 1 The positioning platform device can further comprise a first sensor 200 and a second sensor 600. The first sensor 200 and the second sensor 600 are both fixedly arranged on the mounting platform 100, and the first sensor 200 and the second sensor 600 can further ensure the motion accuracy of the device. Specifically, the first sensor 200 can be arranged along the first direction X in sequence with the motion platform 500, so that the first sensor 200 can ensure the position accuracy of the motion platform 500 in the first direction X by detecting the relative distance between the first sensor 200 and the motion platform 500, and the second sensor 600 can be arranged along the second direction Y in sequence with the motion platform 500, so that the second sensor 600 can ensure the position accuracy of the motion platform 500 in the second direction Y by detecting the relative distance between the second sensor 600 and the motion platform 500.

[0065] For the installation of the first sensor 200 and the second sensor 600, a first mounting hole 120 and a second mounting hole 130 can be provided on the mounting platform 100, and then the first sensor 200 is arranged in the first mounting hole 120 and the second sensor 600 is arranged in the second mounting hole 130, for example, by plug-in connection, to ensure the firmness of the installation of the two.

[0066] The above merely provides the preferred embodiments of the present application, but not intended to limit the present application. The present application can be variously changed and modified by those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall fall within the scope of the present application.

Claims

1. A Maxwell electromagnetic two-axis positioning platform device, characterized in that, The device includes a motion platform (500), a drive mechanism (400), and a guide mechanism (700). The motion platform (500) is used to place the part to be inspected, the drive mechanism (400) is used to drive the motion platform (500), and the guide mechanism (700) is used to constrain the motion path of the motion platform (500) so that the motion platform (500) can only move in the horizontal direction. The driving mechanism (400) includes a first directional stator (410), a second directional stator (420), a coil (430), a mover (440), and a permanent magnet (450). Both the first directional stator (410) and the second directional stator (420) are provided with coils (430). The first directional stator (410) has a first substrate (412), which includes a central first through hole (413). Two first stator arms (411) protrude from the first end face of the substrate. The second directional stator (420) has a second substrate (421). 21) Includes a central second through hole (423), two second stator arms (422) protruding from the first end face of the second substrate (421), a space is formed between the two first stator arms (411) and the two second stator arms (422), the mover (440) is movably disposed in the space, the motion platform (500) is connected to the upper surface of the mover (440), the first directional stator (410) is mounted on the upper part of the second directional stator (420), and the permanent magnet (450) is disposed between the first directional stator (410) and the second directional stator (420). The guide mechanism (700) passes through the second through hole (423) and the first through hole (413) from bottom to top and is connected to the bottom surface of the mover (440); The first direction stator (410) also includes a first protrusion (414) located around the perimeter, and the second direction stator (420) also includes a second protrusion (424) located around the perimeter. The permanent magnet (450) includes four pieces, and the four permanent magnets (450) are respectively arranged between the first protrusion (414) and the second protrusion (424) around the perimeter. Coil (430) is wound on both first stator arms (411) and both second stator arms (422); The DC magnetic flux generated by the permanent magnet (450) flows into the two sides of the mover (440) along the first and second motion directions, without passing through the upper and lower surfaces of the mover (440), and will not generate coupling interference magnetic force in the upper and lower directions of the mover (440).

2. The Maxwell electromagnetic two-axis positioning platform device according to claim 1, characterized in that, The guiding mechanism (700) consists of four symmetrical, uniformly sized straight circular flexible hinges (710), forming a two-degree-of-freedom parallelogram flexible hinge structure, thereby constraining the two-axis motion path of the mover (440).

3. The Maxwell electromagnetic two-axis positioning platform device according to claim 2, characterized in that, It also includes a base (300), and the guide mechanism (700) is fixed to a mounting groove (310) at the center of the base (300).

4. The Maxwell electromagnetic two-axis positioning platform device according to claim 3, characterized in that, It also includes a mounting housing (100), the bottom of which is mounted on the base (300) and encloses the drive mechanism (400) entirely. The upper surface of the mounting housing (100) is provided with a receiving hole (110), through which the motion platform (500) protrudes.

5. The Maxwell electromagnetic two-axis positioning platform device according to claim 4, characterized in that, It also includes a first displacement sensor (200) and a second displacement sensor (600). The mounting housing (100) is provided with a first mounting hole (120) and a second mounting hole (130). The first displacement sensor (200) and the second displacement sensor (600) are respectively disposed in the first mounting hole (120) and the second mounting hole (130).

6. The Maxwell electromagnetic two-axis positioning platform device according to any one of claims 1-5, characterized in that, Two first stator arms (411) are arranged sequentially along the first direction, and two second stator arms (422) are arranged sequentially along the second direction, with the first and second directions intersecting.

7. The Maxwell electromagnetic two-axis positioning platform device according to claim 6, characterized in that, The first direction is perpendicular to the second direction.

8. A method for operating the Maxwell electromagnetic two-axis positioning platform device according to claim 6 or 7, characterized in that, After the coil (430) is energized, an alternating magnetic flux with varying direction and magnitude is generated on the side surface of the mover (440) along the first and second directions. The direction of the alternating magnetic flux flowing into and out of the side surface of the mover (440) is consistent. The magnet (450) generates a bias magnetic flux with constant magnitude and direction along the first and second directions on the side surface of the mover (440). The direction of the bias magnetic flux flowing into and out of the side surface of the mover (440) is opposite. Thus, a difference in magnetic induction intensity is generated on the side surface of the mover (440) along the first and second directions. Under this condition, two Maxwell electromagnetic driving forces are generated on the mover (440) along the first and second directions. Under the constraint of the guide mechanism (700), the mover (440) moves horizontally in the first and second directions, driving the motion platform (500) to move along the first and second directions. By changing the magnitude and direction of the current in the coil (430), the magnitude and direction of the driving force in the first and second directions can be changed, thereby controlling the arbitrary movement of the mover (440) in the horizontal plane.

Images