Bionic semicircular canal three-dimensional line-angle acceleration sensor based on triboelectricity

Abstract

The invention discloses a bionic semicircular canal three-dimensional line-angular acceleration sensor based on triboelectricity. The bionic semicircular canal three-dimensional line-angular acceleration sensor comprises an x-y line-angular acceleration sensor module, an x-z line-angular acceleration sensor module and a y-z line-angular acceleration sensor module. Each module comprises a linear acceleration sensor of a cylindrical pipeline and an angle acceleration sensor of an annular pipeline, liquid can be injected into the two pipelines, and the two pipelines are connected through a specially-arranged artificial ampulla crest containing a triboelectric sensing structure. The three modules are arranged in a Cartesian coordinate axis mode through special grooves in linear acceleration to form the three-dimensional sensor. The three-dimensional sensor repeatedly impacts the artificial sensing fiber in the artificial ampulla crest through the liquid in the pipeline in the movement process to generate a friction electric signal, and the friction electric signal is processed to obtain the acceleration. The three-dimensional sensor can be applied to moving objects such as mechanical arms, automobiles and human bodies to realize acceleration measurement and feedback.

Description

Technical Field

[0001] The present invention relates to the field of sensor technology, and in particular to a triboelectric bionic semicircular canal three-dimensional linear-angular acceleration sensor and a preparation method thereof, which can detect linear acceleration and angular acceleration of different moving objects. Background Art

[0002] In the modern industrial system, accelerometers are widely used in various fields, such as consumer electronics, automobiles, aerospace, industrial control and medical equipment. Traditional accelerometers usually use technical principles such as voltage, capacitance and thermal coupling. However, these sensors are usually complex in structure and require energy sharing, which limits their long-term use. In recent years, triboelectric nanogenerators (TENGs) have attracted widespread attention due to their high sensitivity, low cost and self-powered. Accelerometers designed based on triboelectric nanogenerators have become a hot research direction. However, existing triboelectric sensors are mostly used for two-dimensional acceleration measurement and can only meet one test modulus, and cannot meet the simultaneous measurement requirements of linear and angular acceleration in three-dimensional space. Therefore, there is an urgent need for a sensor that can achieve high-sensitivity linear-angular acceleration measurement in three-dimensional space. Summary of the invention

[0003] Existing triboelectric sensors are mainly used for acceleration measurement in two-dimensional planes, and there are still technical challenges in the simultaneous measurement of linear and angular acceleration in three-dimensional space. To address this problem, the present invention proposes a triboelectric bionic semicircular canal three-dimensional linear-angular acceleration sensor, which simulates the structure and sensing principle of the semicircular canals in the human ear and uses triboelectric nanogenerator technology to achieve high-sensitivity simultaneous measurement of linear and angular acceleration in three-dimensional space, filling the gap in the existing technology.

[0004] The technical solution of the present invention is as follows: A triboelectric bionic semicircular canal three-dimensional linear-angular acceleration sensor comprises an xy linear-angular acceleration sensor module composed of an xy triboelectric linear acceleration sensor and an xy triboelectric angular acceleration sensor, an xz linear-angular acceleration sensor module composed of an xz triboelectric linear acceleration sensor and an xz triboelectric angular acceleration sensor, and a yz linear-angular acceleration sensor module composed of a yz triboelectric linear acceleration sensor and a yz triboelectric angular acceleration sensor.

[0005] The linear acceleration sensor and angular acceleration sensor of each linear-angular acceleration sensor module are connected through an artificial ampulla ridge with triboelectric artificial sensing fibers, and are respectively designed with an angular acceleration sensor water injection port and a linear acceleration sensor water injection port; the above three modules are arranged and integrated in a Cartesian coordinate axis manner through special grooves on the linear acceleration to form a three-dimensional sensor.

[0006] Furthermore, the xy triboelectric linear acceleration sensor comprises a cylindrical pipe for storing liquid and artificial ampullae ridges matching the pipe at both ends, wherein artificial sensing fibers made of bionic tactile nerve fibers in the semicircular canals of the human ear based on the principle of triboelectric nanogenerators are inserted into the artificial ampullae ridges at both ends; when the linear acceleration sensor performs variable speed motion, the liquid flows in the pipe and then impacts the artificial sensing fibers to cause them to swing, generating a triboelectric signal containing variable speed motion information, and linear acceleration information is obtained by decoupling the triboelectric signal.

[0007] Furthermore, the xy triboelectric angular acceleration sensor comprises a circular pipe for storing liquid and artificial ampullae ridges matching the pipe at both ends, wherein artificial sensing fibers made of bionic tactile nerve fibers in the semicircular canals of the human ear based on the principle of triboelectric nanogenerators are inserted into the artificial ampullae ridges at both ends; when the angular acceleration sensor performs rotational motion, the liquid in the pipe flows and impacts the artificial sensing fibers to cause them to swing, generating a triboelectric signal containing variable angle information, and the angular acceleration information is obtained by decoupling the triboelectric signal.

[0008] Furthermore, the artificial ampullary ridge structure comprises two cavities separated by a middle partition, one cavity is connected to the cylindrical pipe of the linear acceleration sensor, and the other cavity is connected to the circular pipe of the angular acceleration sensor; each linear-angular acceleration sensor module comprises two artificial ampullary ridges a and b, and three holes are designed in the two cavities of the artificial ampullary ridges to insert three artificial sensing fibers.

[0009] Furthermore, the artificial ampullary ridge is manufactured by 3D printing using PLA material, and connection structures for connecting the cylindrical pipe and the annular pipe are preset at both ends.

[0010] Furthermore, the artificial sensing fiber used in the artificial ampullary ridge a is composed of Ecoflex 00-30 wrapped flexible copper wire, and the copper wire diameter is 0.5 mm. The artificial sensing fiber used in the artificial ampullary ridge b is composed of PDMS Sylgard184 wrapped flexible copper wire, and the copper wire diameter is 0.5 mm.

[0011] Furthermore, the cylindrical pipe is made of PLA material through 3D printing, and has connection structures and water injection holes for connecting to the artificial ampulla ridge at both ends. At the same time, grooves are preset on the surface of the cylinder to facilitate the integrated installation of multiple sensors.

[0012] Furthermore, the three modules are arranged and integrated in a Cartesian coordinate axis manner through the grooves to form a three-dimensional sensor, thereby realizing three-dimensional linear-angular acceleration sensing and acceleration direction sensing.

[0013] Furthermore, the liquid injected into the cylindrical pipe and the annular pipe is saline with a concentration of 0.5 mol / L.

[0014] The acceleration sensor device manufactured based on the present invention has the following beneficial effects: 1. High sensitivity and versatility: The present invention utilizes the mechanism of the semicircular canals of the human ear to sense acceleration and uses triboelectric technology for bionic design, which can simultaneously sense linear acceleration and angular acceleration.

[0015] 2. Simple structure, easy to manufacture and assemble: The device of the present invention has a simple structure, and its special design makes it easy to manufacture and assemble the various components, thus reducing the production cost and having broad application prospects.

[0016] 3. Strong scalability: The design concept and manufacturing method of the present invention can be expanded and optimized according to specific needs. The one-dimensional linear-angular acceleration sensor described in the present invention is suitable for acceleration applications in different fields, and can be used in two-dimensional and three-dimensional composite structures according to the scene. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 . Schematic diagram of the structure of the bionic semicircular canal three-dimensional linear-angular acceleration sensor; Figure 2 . Schematic diagram of the structure of the bionic semicircular tube-angular acceleration sensor; Figure 3 . The sensing working principle of linear accelerometer; Figure 4 . The sensing working principle of the angular accelerometer; Figure 5 . Artificial sensing fiber location and lead method in linear accelerometer; Figure 6 . Artificial sensing fiber position and lead method in angular accelerometer. DETAILED DESCRIPTION

[0018] The present invention is further described in detail below with reference to the accompanying drawings and specific embodiments.

[0019] The present invention discloses a triboelectric bionic semicircular canal three-dimensional linear-angular acceleration sensor. Figure 1It can be seen that the xy line-angle acceleration sensor module is composed of an xy triboelectric linear acceleration sensor 1 and an xy triboelectric angular acceleration sensor 2, an xz line-angle acceleration sensor module is composed of an xz triboelectric linear acceleration sensor 3 and an xz triboelectric angular acceleration sensor 4, and a yz line-angle acceleration sensor module is composed of a yz triboelectric linear acceleration sensor 5 and a yz triboelectric angular acceleration sensor 6. The linear acceleration sensor and the angular acceleration sensor of each line-angle sensor module are connected through an artificial ampulla ridge 7 with artificial sensing fibers. In order to facilitate the injection and discharge of liquid during use, an angle sensor water injection port 8 and a linear sensor water injection port 9 are designed respectively.

[0020] For any of the linear-angular acceleration sensor modules, it can be seen Figure 2 , comprising a cylindrical pipe and an annular pipe for storing liquid and an artificial ampulla crest 7 for connecting the two pipes, so as to form a linear acceleration sensor ( Figure 2 No. 1) and the angular acceleration sensor ( Figure 2 Number 2). Among them, the artificial ampullary ridge ( Figure 2 An artificial sensor fiber made of bionic tactile nerve fibers in the semicircular canals of the human ear based on the principle of a friction nanogenerator was inserted into the Figure 2 4 and 5). When the linear acceleration sensor is in variable speed motion, the liquid in the pipe will flow and impact the artificial sensing fiber to cause it to swing, resulting in an unbalanced charge surface between the metal wire wrapping layer and the salt water, which leads to charge transfer in the metal wire. Different accelerations bring different liquid impact forces, generating frictional electric signals containing variable speed motion information. Figure 3 , and obtain linear acceleration information by decoupling the triboelectric signal. When the angular acceleration sensor is rotating, the liquid in the pipe will flow and impact the artificial sensing fiber to cause it to swing, resulting in an unbalanced charge surface between the metal wire wrapping layer and the salt water, thereby causing charge transfer in the metal wire. Different accelerations bring different liquid impact forces, which can be seen Figure 4 , a triboelectric signal containing variable angle information is generated, and angular acceleration information is obtained by decoupling the triboelectric signal.

[0021] The artificial ampullary ridge (7) structure involved includes two cavities separated by a middle partition, one cavity is connected to the cylindrical pipe of the linear acceleration sensor, and the other cavity is connected to the circular pipe of the angular acceleration sensor. The one-dimensional linear-angular acceleration sensor module includes two artificial ampullary ridges a and b to form a one-dimensional linear-angular acceleration sensor module. Three artificial sensing fibers are arranged in the two cavities of the artificial ampullary ridges a and b. For the linear acceleration sensor, Figure 5, which specifically uses the right end cavity of the artificial ampulla ridge a and the left end cavity of the artificial ampulla ridge b. Similarly, for the angular acceleration sensor, such as Figure 6 Specifically, the left end cavity of the artificial ampulla ridge a and the right end cavity of the artificial ampulla ridge b are used.

[0022] Among them, the cylindrical pipe is made of PLA material by 3D printing, and has a connection structure and water injection holes for connecting the artificial ampullary ridge at both ends. At the same time, grooves are preset on the surface of the cylinder to facilitate the integrated installation of multiple sensors. The annular pipe is made of PLA material by 3D printing, and has a connection structure and water injection holes for connecting the artificial ampullary ridge at both ends. The artificial ampullary ridge is made of PLA material by 3D printing, and has a connection structure for connecting the cylindrical pipe and the annular pipe at both ends. The artificial sensing fiber in the artificial ampullary ridge a is made of Ecoflex 00-30 wrapped copper wire, and the diameter of the copper wire is 0.5mm. The artificial sensing fiber in the artificial ampullary ridge b is made of PDMS Sylgard 184 wrapped copper wire, and the diameter of the copper wire is 0.5mm. The liquid injected into the cylindrical pipe and the annular pipe is saline with a concentration of 0.5mol / L. The three modules are integrated into a three-dimensional sensor by arranging them in a Cartesian coordinate axis manner through special grooves on the linear accelerometer, thereby realizing three-dimensional linear-angular acceleration sensing and acceleration direction sensing. Example

[0023] 1. Design, manufacture and assembly of three-dimensional linear-angular acceleration sensors 1.1 Fabrication of cylindrical tubes, annular tubes and artificial ampullae The cylindrical pipe, annular pipe and artificial ampullary ridge are first drawn using 3D modeling software, and then the drawn 3D structure is sliced ​​and printed using a 3D printer using PLA material based on the layer stacking principle. Among them, the cylindrical pipe and the annular pipe are preset with a connection structure and a water injection hole at both ends. The cylindrical surface of the cylindrical pipe is provided with a specific groove, so that the three cylindrical pipes can be assembled and assembled in a Cartesian coordinate system to form a three-dimensional sensor structure. The lower surfaces of the two cavities of the artificial ampullary ridge are respectively provided with three holes for inserting artificial sensing fibers, and the two ends are preset with a connection structure connecting the cylindrical pipe and the annular pipe.

[0024] 1.2 Fabrication of artificial sensing fibers for artificial crista ampullaria The artificial sensing fiber is Ecoflex-copper artificial sensing fiber, and its manufacturing method is: (1) Prepare Ecoflex: Mix the two parts (A and B) of Ecoflex 00-30 in a 1:1 ratio for 5 minutes to ensure that the two parts are completely mixed.

[0025] (2) Place the mixed Ecoflex in a vacuum pump and remove bubbles for 5 minutes to remove the bubbles in the Ecoflex mixed liquid.

[0026] (3) Prepare copper wire metal fiber thread and clean the metal fiber thread with isopropyl alcohol to remove grease and dirt on the surface.

[0027] (4) Use a small material stretching instrument to straighten the cleaned metal fiber thread and hang it on a bracket. Slowly insert the suspended metal fiber thread into the mixed Ecoflex solution to make the liquid adhere to its surface. After slowly pulling it out, use a ring heating device to heat the Ecoflex solution on the surface of the copper metal fiber thread to make it solidify quickly. Repeat the process of slowly inserting the metal fiber thread into the Ecoflex solution to make it wrapped for the second time, slowly pulling it out, and then heating it again to solidify it.

[0028] (5) After curing, check the integrity and uniformity of the Ecoflex wrap layer.

[0029] 1.3 Fabrication of artificial sensing fibers for artificial ampullary ridge b The artificial sensing fiber is a PDMS-copper artificial sensing fiber, and its manufacturing method is: (1) Prepare PDMS: Stir the two parts of PDMS Sylgard 184 (base material A and crosslinker B) at a mass ratio of 10:1 for 5 minutes to ensure that the two parts are completely mixed.

[0030] (2) Place the mixed PDMS into a vacuum pump and remove bubbles for 10 minutes to remove the bubbles in the PDMS mixed liquid.

[0031] (3) Prepare copper wire metal fiber thread and clean the metal fiber thread with isopropyl alcohol to remove grease and dirt on the surface.

[0032] (4) Use a small material stretching instrument to straighten the cleaned metal fiber thread and hang it on the bracket. Slowly insert the suspended metal fiber thread into the mixed PDMS solution to make the liquid adhere to its surface. After slowly taking it out, use a ring heating device to heat the PDMS solution on the surface of the copper metal fiber thread to make it solidify quickly. Repeat the process of slowly inserting the metal fiber thread into the PDMS solution to make it wrap for the second time, slowly pull it out, and heat it to solidify.

[0033] (5) After curing, check the integrity and uniformity of the PDMS coating.

[0034] 1.4 Integration of artificial ampullary ridge and artificial sensor fiber Three Ecoflex-copper artificial sensing fibers are respectively inserted into the reserved holes of the two cavities of the artificial ampulla ridge a, and the holes are blocked with a mixed Ecoflex solution and heated to completely block them. The other end of the Ecoflex-copper artificial sensing fiber is connected to a signal acquisition and processing circuit.

[0035] Three PDMS-copper artificial sensing fibers were inserted into the reserved holes of the two cavities of the artificial ampulla ridge b, and the holes were blocked with a mixed PDMS solution and heated to completely block them. The other end of the Ecoflex-copper artificial sensing fiber was connected to a signal acquisition and processing circuit.

[0036] 1.5 Assembly of Linear-Angular Acceleration Sensor Module The cylindrical pipe, the annular pipe and the artificial ampullary ridge are connected through a pre-designed connection structure, and 0.5 mol / L saline is injected through the water injection port to half of the full capacity. At this point, the installation and manufacture of the linear-angular acceleration sensor module is completed.

[0037] 1.6 Assembly of 3D Linear-Angular Acceleration Sensor The cylindrical pipes of the linear acceleration of the three modules are arranged in a Cartesian coordinate axis manner through preset grooves to form an integration of three-dimensional sensors, and adhesive is added to the connecting grooves to achieve a tightening effect.

[0038] 1.7 Application of 3D Linear-Angular Acceleration Sensor The three-dimensional linear-angular acceleration sensor is applied to the robotic arm. When the robotic arm is in full motion, the three-dimensional linear-angular acceleration sensor can provide real-time feedback on the linear and rotational acceleration of the robotic arm, and the feedback position and force can be achieved through the algorithm.

[0039] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the protection scope of the present invention.

Claims

1. A triboelectric bionic semicircular canal three-dimensional linear-angular acceleration sensor, characterized in that: The invention comprises an xy line-angular acceleration sensor module composed of an xy triboelectric linear acceleration sensor (1) and an xy triboelectric angular acceleration sensor (2); an xz line-angular acceleration sensor module composed of an xz triboelectric linear acceleration sensor (3) and an xz triboelectric angular acceleration sensor (4); and a yz line-angular acceleration sensor module composed of a yz triboelectric linear acceleration sensor (5) and a yz triboelectric angular acceleration sensor (6); The linear acceleration sensor and the angular acceleration sensor of each linear-angular acceleration sensor module are connected via an artificial ampulla ridge (7) with triboelectric artificial sensing fibers, and are respectively designed with an angular acceleration sensor water injection port (8) and a linear acceleration sensor water injection port (9); The above three modules are integrated into a three-dimensional sensor by arranging them in a Cartesian coordinate axis manner through special grooves on the linear accelerometer.

2. The triboelectric bionic semicircular canal three-dimensional linear-angular acceleration sensor according to claim 1, characterized in that: The xy triboelectric linear acceleration sensor (1) comprises a cylindrical pipe for storing liquid and artificial ampullae crests (7) matching the pipe at both ends, wherein artificial sensing fibers made of bionic tactile nerve fibers in the semicircular canals of the human ear based on the principle of triboelectric nanogenerators are inserted into the artificial ampullae crests at both ends; when the linear acceleration sensor performs variable speed motion, the liquid in the pipe flows and then impacts the artificial sensing fibers to cause them to swing, generating a triboelectric signal containing variable speed motion information, and linear acceleration information is obtained by decoupling the triboelectric signal.

3. The triboelectric bionic semicircular canal three-dimensional linear-angular acceleration sensor according to claim 1, characterized in that: The xy triboelectric angular acceleration sensor (2) comprises a circular tube for storing liquid and artificial ampulla crests (7) matching the tube at both ends, wherein artificial sensing fibers made of bionic tactile nerve fibers in the semicircular canals of the human ear based on the principle of triboelectric nanogenerators are inserted into the artificial ampulla crests at both ends; when the angular acceleration sensor performs rotational motion, the liquid in the tube flows and then impacts the artificial sensing fibers to cause them to swing, generating a triboelectric signal containing variable angle information, and angular acceleration information is obtained by decoupling the triboelectric signal.

4. A triboelectric bionic semicircular canal three-dimensional linear-angular acceleration sensor according to claim 2 or 3, characterized in that: The artificial ampullary ridge (7) structure comprises two cavities separated by a middle partition, one cavity is connected to the cylindrical pipe of the linear acceleration sensor, and the other cavity is connected to the circular pipe of the angular acceleration sensor; each linear-angular acceleration sensor module comprises two artificial ampullary ridges a and b, and three holes are designed in the two cavities of the artificial ampullary ridge (7) for inserting three artificial sensing fibers.

5. The triboelectric bionic semicircular canal three-dimensional linear-angular acceleration sensor according to claim 4, characterized in that: The artificial ampullary ridge (7) is made of PLA material by 3D printing, and has connection structures for connecting the cylindrical pipe and the annular pipe preset at both ends.

6. The triboelectric bionic semicircular canal three-dimensional linear-angular acceleration sensor according to claim 4, characterized in that: The artificial sensing fiber used in the artificial crista ampullaria a is composed of Ecoflex 00-30 wrapped flexible copper wire, and the wire diameter of the copper wire is 0.5 mm. The artificial sensing fiber used in the artificial crista ampullaria b is composed of PDMS Sylgard 184 wrapped flexible copper wire, and the wire diameter of the copper wire is 0.5 mm.

7. The triboelectric bionic semicircular canal three-dimensional linear-angular acceleration sensor according to claim 4, characterized in that: The cylindrical pipe is made of PLA material through 3D printing, and has connection structures and water injection holes for connecting to the artificial ampulla ridge at both ends. At the same time, grooves are preset on the surface of the cylinder to facilitate the integrated installation of multiple sensors.

8. The triboelectric bionic semicircular canal three-dimensional linear-angular acceleration sensor according to claim 7, characterized in that: The three modules are arranged and integrated in a Cartesian coordinate axis manner through the grooves to form a three-dimensional sensor, thereby realizing three-dimensional linear-angular acceleration sensing and acceleration direction sensing.

9. The triboelectric bionic semicircular canal three-dimensional linear-angular acceleration sensor according to claim 5, characterized in that: The liquid injected into the cylindrical pipe and the annular pipe is saline with a concentration of 0.5 mol / L.

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