Broadband electric field sensor, electric field sensor assembly and electric field detection method

Abstract

The invention provides a broadband electric field sensor, an electric field sensor assembly and an electric field detection method.The broadband electric field sensor comprises a substrate, at least one dynamic induction electrode and at least one static induction electrode, the substrate comprises an entity area and a concave area, and the dynamic induction electrodes and the static induction electrodes are arranged at intervals; one part of the dynamic induction electrode is attached to the entity area, the other part of the dynamic induction electrode is located on the concave area, one part of the static induction electrode is attached to the entity area, the other part of the static induction electrode is located on the concave area, and the dynamic induction electrode obtains at least one direct current signal of a current electric field according to an excitation signal; the static induction electrode obtains at least one alternating current signal of the current electric field at least according to charges induced in the current electric field. The direct current signal and the alternating current signal can be obtained at the same time, good detection of a direct current electric field and an alternating current electric field is achieved, the sensitive degree of electric field detection is improved, and the detection frequency band of the electric field sensor is widened.

Description

Technical Field

[0001] The invention relates to an electric field sensor, in particular to a broadband electric field sensor, an electric field sensor component and an electric field detection method. Background Art

[0002] As a key component for measuring electric field strength, electric field sensors are widely used in many fields such as aerospace, smart grid, electrostatic protection, lightning warning, scientific research, etc.

[0003] In recent years, with the development of MEMS and micro-nano processing technology, MEMS electric field sensors based on the charge induction principle have become a hot topic of research and application due to their small size, low cost, easy integration, and batch manufacturing. Existing MEMS electric field sensors work based on resonance or vibration, mostly driven by electrostatics or piezoelectrics. Through periodic vibration structures, they modulate the induced charge on the sensing electrode placed in the measured electric field environment, thereby generating an induced current proportional to the electric field size to detect the measured electric field.

[0004] However, existing MEMS electric field sensors can usually only sense one type of electrical signal, resulting in a narrow detection frequency band of the MEMS electric field sensor, thereby reducing the sensitivity to electric field detection. Summary of the invention

[0005] In view of the shortcomings existing in the above problems, the present invention provides a wide-band electric field sensor, an electric field sensor component and an electric field detection method which can simultaneously obtain a DC current signal and an AC current signal, achieve good detection of a DC electric field and an AC electric field, improve the sensitivity of electric field detection, and broaden the detection frequency band of the electric field sensor.

[0006] To achieve the above-mentioned object, in a first aspect, the present invention provides a broadband electric field sensor, comprising a substrate, at least one dynamic induction electrode and at least one static induction electrode, wherein the substrate comprises a solid area and a recessed area, the dynamic induction electrode and the static induction electrode are arranged at intervals, a portion of the dynamic induction electrode is attached to the solid area, and another portion is located on the recessed area, and a portion of the static induction electrode is attached to the solid area, and another portion is located on the recessed area, wherein:

[0007] The dynamic induction electrode obtains at least one direct current signal of the current electric field according to the excitation signal, and the static induction electrode obtains at least one alternating current signal of the current electric field according to at least the charges induced in the current electric field.

[0008] In one embodiment, the dynamic sensing electrode includes a sensing electrode component a and a piezoelectric electrode component a, a portion of the sensing electrode component a is attached to the solid area, and another portion is located on the recessed area, and the piezoelectric electrode component a is attached to a portion of the sensing electrode component a, wherein:

[0009] The DC current signal is obtained by converting the vibration generated by the piezoelectric electrode assembly a according to the excitation signal;

[0010] The static sensing electrode comprises a sensing electrode assembly b and a piezoelectric electrode group b, a portion of the sensing electrode assembly b is attached to the solid area, and another portion is located on the recessed area, and the piezoelectric electrode assembly b is attached to a portion of the sensing electrode assembly b, wherein:

[0011] The AC current signal is obtained by converting the charges induced by the sensing electrode assembly b in the current electric field, or the AC current signal is obtained by converting the displacement generated by the reciprocating motion of the piezoelectric electrode assembly b when the piezoelectric electrode assembly b receives the charges induced by the sensing electrode assembly b in the current electric field.

[0012] In one embodiment, the sensing electrode assembly a and the sensing electrode assembly b both include a base portion and a metal electrode, a first portion of the base portion is attached to the solid area, a second portion of the base portion is located on the recessed area, and the metal electrode is attached to a partial area of ​​the second portion;

[0013] The piezoelectric electrode assembly a and the piezoelectric electrode assembly b both include piezoelectric electrodes attached to partial areas of the first part and partial areas of the second part, and lead-out electrodes attached to partial areas of the first part, wherein the piezoelectric electrode is connected to the lead-out electrode through the first part, and the lead-out electrode is connected to the metal electrode through the base layer.

[0014] In one embodiment, the second portion includes a second portion a and a second portion b, wherein the second portion b is farther away from the first portion than the second portion a, and the metal electrode is attached to the second portion b.

[0015] In one embodiment, the piezoelectric electrode includes a piezoelectric upper electrode, a piezoelectric layer and a piezoelectric lower electrode, wherein the piezoelectric lower electrode is attached to a partial area of ​​the first part and a partial area of ​​the second part a, the piezoelectric upper electrode is attached to at least a portion of the piezoelectric lower electrode, and the piezoelectric layer is sandwiched between the piezoelectric upper electrode and the piezoelectric lower electrode.

[0016] In one of the embodiments, the DC current signal includes a DC current signal in the current electric field obtained according to a set sensing time point, or each DC current signal in the current electric field obtained according to a set sensing time period;

[0017] The alternating current signal includes an alternating current signal in the current electric field obtained according to a set sensing time point, or each alternating current signal in the current electric field obtained according to a set sensing time period.

[0018] In one embodiment, the frequency of the electric field detected by the dynamic sensing electrode is less than 50% of the self-resonance frequency of the broadband electric field sensor;

[0019] The frequency of the electric field detected by the static induction electrode is greater than 50% of the self-resonance frequency of the broadband electric field sensor;

[0020] The alternating current signal detected by the static induction electrode is an alternating current signal greater than, equal to or less than 50% of the self-resonant frequency of the electric field sensor.

[0021] In a second aspect, the present invention further provides an electric field sensor assembly, comprising the above-mentioned broadband electric field sensor, and at least one data processing part connected thereto, wherein:

[0022] The data processing part receives at least one of the DC current signals and at least one of the AC current signals, and obtains at least one DC voltage value and at least one AC voltage value respectively, and determines the current electric field type according to the comparison result of the DC voltage value and the AC voltage value.

[0023] In one embodiment, the data processing part at least includes an excitation module, a first calculation module, a second calculation module and a third calculation module, wherein:

[0024] The excitation module inputs the excitation signal to the dynamic induction electrode to drive the piezoelectric electrode assembly a to vibrate, and receives the generated vibration signal;

[0025] The first calculation module receives the DC current signal input by the dynamic induction electrode and obtains a DC voltage value;

[0026] The second calculation module receives the AC current signal input by the static induction electrode and obtains an AC voltage value;

[0027] The third calculation module compares the DC voltage value with the AC voltage value, and determines the current electric field type according to the comparison result.

[0028] In one embodiment, the first calculation module includes an I / V conversion unit, an amplification unit, a phase shift filter and a coherent demodulator, wherein:

[0029] The I / V conversion unit converts the DC current signal into a DC voltage signal;

[0030] The amplifying unit removes interference signals from the DC voltage signal and amplifies the DC voltage signal;

[0031] The phase shift filter receives the vibration signal amplified by the piezoelectric electrode assembly a, filters the vibration signal, and converts the vibration signal into a specified waveform;

[0032] The coherent demodulator demodulates the received vibration signal of the specified waveform and the amplified DC voltage signal to obtain a DC voltage value.

[0033] In one embodiment, the second calculation module includes an I / V conversion unit, an amplification unit, a filter and an amplitude extraction unit, wherein:

[0034] The I / V conversion unit converts the AC current signal into an AC voltage signal;

[0035] The amplifying unit removes interference signals from the AC voltage signal and amplifies the AC voltage signal;

[0036] The filter filters the AC voltage signal and converts the AC voltage signal into a specified waveform;

[0037] The amplitude extraction unit obtains an AC voltage value according to the AC voltage signal.

[0038] In a third aspect, the present invention further provides an electric field detection method, which is applied to the above-mentioned electric field sensor assembly, comprising the following steps:

[0039] The dynamic induction electrode and the static induction electrode respectively obtain at least one direct current signal and at least one alternating current signal of the current electric field;

[0040] Obtain a DC voltage value and an AC voltage value according to the DC current signal and the AC current signal respectively;

[0041] The DC voltage value is compared with the AC voltage value, and the current electric field type is determined based on the comparison result.

[0042] Compared with the prior art, the present invention has one of the following advantages:

[0043] Through the dynamic induction electrode and the static induction electrode, the DC current signal and the AC current signal can be obtained at the same time. Compared with the existing MEMS electric field sensor that can only obtain one current signal, it can achieve good detection of the DC electric field and the AC electric field, improve the sensitivity of the electric field detection, and broaden the detection frequency band of the electric field sensor;

[0044] Since the dynamic induction electrode and the static induction electrode have the same structure, they can be replaced as needed;

[0045] By comparing the DC current value with the AC current value, the electric field can be detected and the type of the current electric field can be accurately determined. BRIEF DESCRIPTION OF THE DRAWINGS

[0046] Figure 1 It is a structural diagram of a first embodiment of a broadband electric field sensor in the present invention;

[0047] Figure 2 for Figure 1 Sectional view along AA direction;

[0048] Figure 3 It is a structural diagram of a second embodiment of the broadband electric field sensor of the present invention;

[0049] Figure 4 It is a structural diagram of a third embodiment of the broadband electric field sensor in the present invention;

[0050] Figure 5 It is a schematic structural diagram of a first embodiment of an electric field sensor assembly in the present invention;

[0051] Figure 6 for Figure 5 The structural diagram of the excitation module;

[0052] Figure 7 for Figure 5 A schematic diagram of the structure of the first computing module;

[0053] Figure 8 for Figure 5 A schematic diagram of the structure of the second computing module;

[0054] Fig. 9 It is a schematic structural diagram of a second embodiment of the electric field sensor assembly of the present invention;

[0055] Fig.10 Flow chart of the electric field detection method in the present invention.

[0056] The main reference numerals are as follows:

[0057] 1-substrate; 100-insulating layer a; 101-substrate layer; 102-recessed area; 2-dynamic induction electrode; 200-base layer; 201-first part; 202-second part a; 203-second part b; 204-metal electrode; 205-piezoelectric upper electrode; 206-piezoelectric layer; 207-piezoelectric lower electrode; 208-insulating layer b; 209-lead electrode; 3-static induction electrode; 4-data processing part; 401-excitation module; 402-first calculation module; 403-second calculation module; 404-third calculation module; 5-first data processing part; 6-second data processing part; 7-third data processing part; 8-wideband electric field sensor. DETAILED DESCRIPTION

[0058] In order to make the purpose, technical solution and advantages of the present invention clearer, the technical solution of the present invention will be clearly and completely described below in conjunction with specific embodiments and corresponding drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0059] In the description of the present invention, it is necessary to understand that the terms "upper", "lower", "top surface", "bottom surface", "inside", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation of the present invention. It should be noted that when a component is considered to be "connected" to another component, it may be directly connected to the other component or there may be a centrally arranged component at the same time. In addition, the terms "first" and "second" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance.

[0060] Embodiment 1

[0061] like Figure 1 and Figure 2 As shown, this embodiment provides a broadband electric field sensor, including a substrate 1 , a dynamic sensing electrode 2 and a static sensing electrode 3 .

[0062] Specifically, the substrate 1 includes a solid area and a recessed area 102. The recessed area 102 is formed by a local area of ​​the top end surface of the substrate 1 being recessed toward the bottom end surface thereof, and the solid area surrounds the outside of the recessed area 102 to form a frame-like structure.

[0063] Preferably, the shape of the substrate 1 , the shape of the recessed area 102 , and the shape of the solid area are all square structures.

[0064] Furthermore, the entity region is composed of a stacked insulating layer a100 and a substrate layer 101. The insulating layer a100 is used to isolate signals, and the material of the insulating layer a100 is not limited to silicon dioxide, silicon nitride, and a composite material made of silicon dioxide and silicon nitride. The substrate layer 101 can be made of dielectric materials such as silicon-based materials, glass, ceramics or organic materials, metals and metal alloy materials.

[0065] Specifically, the dynamic induction electrode 2 and the static induction electrode 3 are arranged side by side and spaced apart on the same side of the solid area. A portion of the dynamic induction electrode 2 is attached to the solid area, and another portion is located on the recessed area 102; a portion of the static induction electrode 3 is attached to the solid area, and another portion is located on the recessed area 102, wherein:

[0066] The dynamic induction electrode 2 obtains a DC current signal at a current induction time point in the current electric field according to the excitation signal, and the static induction electrode 3 obtains an AC current signal of the current electric field according to at least the induced charge at the current induction time point in the current electric field.

[0067] Furthermore, the dynamic sensing electrode 2 includes a sensing electrode assembly a and a piezoelectric electrode assembly a, a portion of the sensing electrode assembly a is attached to the solid area, and another portion is located above the recessed area 102, and a portion of the piezoelectric electrode assembly a is attached to the sensing electrode assembly a, wherein:

[0068] The direct current signal is obtained by converting the vibration generated by the piezoelectric electrode assembly a according to the excitation signal.

[0069] Furthermore, the static induction electrode 3 includes an induction electrode assembly b and a piezoelectric electrode group b, a portion of the induction electrode assembly b is attached to the solid area, and another portion is located on the recessed area 102, and a portion of the piezoelectric electrode assembly b is attached to the induction electrode assembly b, wherein:

[0070] The AC current signal is obtained by converting the charges induced by the sensing electrode assembly b in the current electric field, or the AC current signal is obtained by converting the displacement generated by the reciprocating motion when the piezoelectric electrode assembly b receives the charges induced by the sensing electrode assembly b in the current electric field.

[0071] Furthermore, the sensing electrode assembly a and the sensing electrode assembly b both include a base portion 200 and a metal electrode 204, a first portion 201 of the base portion 200 is attached to the top end surface of the insulating layer a100, a second portion of the base portion 200 is located above the recessed area 102, and the metal electrode 204 is attached to a partial area of ​​the second portion.

[0072] Both the piezoelectric electrode assembly a and the piezoelectric electrode assembly b include a piezoelectric electrode attached to a partial area of ​​the first part 201 and a partial area of ​​the second part, and a lead-out electrode 209 attached to a partial area of ​​the first part 201, wherein the piezoelectric electrode is connected to the lead-out electrode 209 through the first part 201, and the lead-out electrode 209 is connected to the metal electrode 204 through the base part 200.

[0073] In this embodiment, further, the second part includes a second part a202 and a second part b203, wherein the second part b203 is away from the first part 201 relative to the second part a202, and the metal electrode 204 is attached to the second part b203.

[0074] In this embodiment, further, the piezoelectric electrode includes two piezoelectric upper electrodes 205, a piezoelectric layer 206 and two piezoelectric lower electrodes 207, the piezoelectric lower electrode 207 is attached to a partial area of ​​the first part 201 and a partial area of ​​the second part a202, the piezoelectric upper electrode 205 is attached to at least a part of the piezoelectric lower electrode 207, and the piezoelectric layer 206 is sandwiched between the piezoelectric upper electrode 205 and the piezoelectric lower electrode 207. Among them, one piezoelectric upper electrode a and one piezoelectric lower electrode a constitute the input end of the excitation signal, and are connected to the data processing part through a transmission line to receive the excitation signal input by the data processing part, and another piezoelectric upper electrode a and another piezoelectric lower electrode a constitute the output end of the vibration signal, and are connected to the data processing part through a transmission line to input the vibration signal to the data processing part.

[0075] In addition, optionally, the piezoelectric electrode further includes an insulating layer b208, which is sandwiched between the piezoelectric lower electrode 207 and the base layer 200 for isolating signals. The material of the insulating layer b208 is not limited to silicon dioxide, silicon nitride, and a composite material made of silicon dioxide and silicon nitride.

[0076] Optionally, the metal electrode 204 can be made of metals such as Ti, Pt, Al, Ag, Cr, Cu, Au, Mo, or alloy materials. The base layer 200 can be made of dielectric materials such as silicon-based materials, glass, ceramics, metals or organic materials, metals and metal alloy materials. The piezoelectric layer 206 can be made of lead zirconate titanate, aluminum nitride, zinc oxide, lead titanate, barium titanate, and modified lead titanate. The shape of the base layer 200 can be a straight beam, a folded beam, a U-shaped beam, a serpentine beam, a crab beam, etc.

[0077] In this embodiment, when the base layer 200 is made of a highly conductive silicon-based material, signal transmission between the metal electrode 204 and the extraction electrode 209 and between the piezoelectric electrode and the extraction electrode 209 can be achieved without providing a transmission line.

[0078] In another embodiment, when the base layer 200 is made of a non-highly conductive material, a transmission line is embedded in the base layer 200, the piezoelectric electrode is connected to the lead-out electrode 209 via the transmission line, and the metal electrode 204 is connected to the lead-out electrode 209 via the transmission line, thereby realizing signal transmission between the metal electrode 204 and the lead-out electrode 209, and between the piezoelectric electrode and the lead-out electrode 209.

[0079] In addition, in the broadband electric field sensor provided in the present embodiment, the metal electrode 204 is the core component of the electric field sensor, and is responsible for at least receiving and sensing the charge signal in the current electric field. The base portion 200 has a certain elasticity. After the metal electrode 204 is attached to the top surface of the base portion 200, when the current electric field changes drastically, the metal electrode 204 can not only sense the charge in the current electric field, but also move back and forth in the upper and lower directions between the upper position of the recessed area 102 and the inside of the recessed area 102 under the influence of the current electric field. Among them, when the metal electrode 204 is located at the upper position of the recessed area 102, the number of charges induced on the surface of the metal electrode 204 is greater than the number of charges induced on the surface of the metal electrode 204 when the metal electrode 204 is located inside the recessed area 102. At the same time, when the metal electrode 204 is located at the upper position of the recessed area 102, the electric field value obtained is also greater than the electric field value obtained when the metal electrode 204 is located inside the recessed area 102.

[0080] In addition, when the current electric field changes dramatically, causing the base portion 200 to reciprocate in the up and down directions, a displacement is generated, which can be input into the piezoelectric electrode through the base portion 200 made of a highly conductive material or a transmission line placed in the base portion 200.

[0081] In addition, in this embodiment, the frequency of the electric field detected by the dynamic induction electrode is less than 50% of the self-resonance frequency of the broadband electric field sensor.

[0082] Exemplarily, assuming that the resonance frequency of the broadband electric field sensor is f1, the frequency of the electric field detected by the dynamic induction electrode is f≤0.5×f1.

[0083] The frequency of the electric field detected by the static sensing electrode is greater than 50% of the self-resonance frequency of the broadband electric field sensor.

[0084] Exemplarily, assuming that the resonance frequency of the broadband electric field sensor is f1, the frequency of the electric field detected by the static induction electrode is f≥0.5×f1.

[0085] The alternating current signal detected by the static induction electrode is an alternating current signal greater than 50% of the self-resonant frequency of the electric field sensor.

[0086] Exemplarily, assuming that the resonant frequency of the broadband electric field sensor is f1, the alternating current signal f detected by the static induction electrode is: f≥0.5×f1.

[0087] The alternating current signal detected by the static induction electrode is an alternating current signal equal to 50% of the self-resonant frequency of the electric field sensor.

[0088] Exemplarily, the resonance frequency of the broadband electric field sensor is set to f1, and the AC current signal f detected by the static induction electrode is: f=0.5×f1.

[0089] The alternating current signal detected by the static sensing electrode is an alternating current signal less than 50% of the self-resonant frequency of the electric field sensor.

[0090] Exemplarily, the resonance frequency of the broadband electric field sensor is set to f1, and the AC current signal f detected by the static induction electrode is: f≤0.5×f1.

[0091] Embodiment 2

[0092] like Figure 3 As shown, this embodiment provides a broadband electric field sensor, including a substrate 1, a dynamic sensing electrode 2 and a static sensing electrode 3. The broadband electric field sensor in this embodiment is different from the broadband electric field sensor in the first embodiment in that:

[0093] The dynamic induction electrode 2 corresponds to the static induction electrode 3 and is disposed at intervals on the substrate 1. Part of the dynamic induction electrode 2 is attached to the first portion 201 of the physical region, and the other part is located on the recessed region 102; part of the static induction electrode 3 is attached to the second portion of the physical region, and the other part is located on the recessed region 102.

[0094] Embodiment 3

[0095] like Figure 4 As shown, this embodiment provides a broadband electric field sensor, including a substrate 1, a dynamic sensing electrode 2 and a static sensing electrode 3. The broadband electric field sensor in this embodiment is different from the broadband electric field sensor in the second embodiment in that:

[0096] The metal electrode 204 and the second portion b203 in the dynamic induction electrode 2 are in a comb-tooth structure, and the metal electrode 204 and the second portion b203 in the static induction electrode 3 are in a comb-tooth structure. The two metal electrodes 204 and the two second portions b203 are staggered.

[0097] There is a preset interval between the two metal electrodes 204 and between the two second parts b203, so that the two metal electrodes 204 and the two second parts b203 will not interfere with each other when they move back and forth in the up and down directions.

[0098] In addition, in the above-mentioned embodiments 1 to 3, the DC current signal output by the broadband electric field sensor is the current real-time DC current signal obtained by the dynamic induction electrode 2 , and the AC current signal output is the current real-time AC current signal obtained by the static induction electrode 3 .

[0099] After setting the sensing time period and each sensing time point, the broadband electric field sensor in the first to third embodiments can output a direct current signal and an alternating current signal corresponding to each sensing time point within the sensing time period.

[0100] In the above-mentioned first to third embodiments, since the dynamic induction electrode 2 and the static induction electrode 3 have the same structure, they can be replaced as needed.

[0101] Exemplarily, when sensing a direct current signal, the sensing electrode assembly a in the dynamic sensing electrode 2 does not generate vibration, and the direct current signal is obtained by converting the vibration generated by the piezoelectric electrode in the piezoelectric electrode assembly a according to the excitation signal. At this time, if the sensing electrode assembly b in the static sensing electrode 3 is damaged, the dynamic sensing electrode 2 and the static sensing electrode 3 can be replaced without affecting the use of the broadband electric field sensor.

[0102] Embodiment 4

[0103] like Figures 5 to 8 As shown, this embodiment provides an electric field sensor assembly, comprising the broadband electric field sensor 8 of any one of the above-mentioned embodiments 1 to 3, and a data processing part 4 connected to the broadband electric field sensor 8, wherein:

[0104] The data processing part 4 receives the DC current signal and the AC current signal, and obtains the DC voltage value and the AC voltage value respectively, and determines the current electric field type according to the comparison result of the DC voltage value and the AC voltage value.

[0105] Specifically, the data processing part 4 is connected to the dynamic sensing electrodes and the static sensing electrodes through transmission lines.

[0106] Furthermore, the data processing part 4 is connected to the input end of the excitation signal composed of a piezoelectric upper electrode and a piezoelectric lower electrode in the dynamic induction electrode through a transmission line, and is used to input the excitation signal to the piezoelectric electrode. The data processing part is connected to the lead-out electrode in the dynamic induction electrode through a transmission line, and is used to receive the DC current signal output by the dynamic induction electrode and obtain the DC voltage value. The data processing part is also connected to the lead-out electrode in the static induction electrode through a transmission line, and is used to receive the AC current signal output by the static induction electrode and obtain the AC voltage value.

[0107] The data processing part 4 includes an excitation module 401, a first calculation module 402, a second calculation module 403 and a third calculation module 404, wherein:

[0108] The excitation module 401 inputs an excitation signal to the piezoelectric electrode assembly a to drive the piezoelectric electrodes in the piezoelectric electrode assembly a to vibrate;

[0109] The first calculation module 402 receives the DC current signal input from the dynamic induction electrode via the lead-out electrode and obtains a DC voltage value;

[0110] The second calculation module 403 receives the AC current signal input from the static induction electrode via the lead-out electrode, and obtains the AC voltage value;

[0111] The third calculation module 404 compares the DC voltage value with the AC voltage value, and determines the current electric field type according to the comparison result.

[0112] Furthermore, the excitation module 401 is used to input an excitation signal to the piezoelectric electrode assembly a and receive a vibration signal generated by the piezoelectric electrode in the piezoelectric electrode assembly a.

[0113] Furthermore, the excitation module 401 includes an excitation signal generating unit, a phase shift filter, a signal amplifier and a vibration signal receiver. The excitation signal generating unit inputs an excitation signal to the piezoelectric electrode assembly a, the piezoelectric electrode in the piezoelectric electrode assembly a generates vibration according to the excitation signal, and outputs a vibration signal, the vibration signal receiver receives the vibration signal output by the piezoelectric electrode in the piezoelectric electrode assembly a, and the phase shift filter and the signal amplifier process the vibration signal accordingly to determine whether the piezoelectric electrode in the piezoelectric electrode assembly a generates the maximum vibration.

[0114] Exemplarily, the excitation signal generating unit is connected to the piezoelectric upper electrode through a transmission line, and the vibration signal receiver is connected to the piezoelectric lower electrode through a transmission line.

[0115] Furthermore, the first calculation module 402 includes an I / V conversion unit, an amplification unit, a phase shift filter and a coherent demodulator, wherein:

[0116] The I / V conversion unit converts the DC current signal into a DC voltage signal;

[0117] The amplification unit removes interference signals from the DC voltage signal and amplifies the DC voltage signal;

[0118] The phase shift filter receives the vibration signal amplified by the piezoelectric electrode in the piezoelectric electrode assembly a, filters the vibration signal, and converts the vibration signal into a specified waveform;

[0119] The coherent demodulator demodulates the received vibration signal of the specified waveform and the amplified DC voltage signal to obtain a DC voltage value.

[0120] Optionally, the phase shift filter can convert the vibration signal into a square wave signal, a half wave signal or a full wave signal according to the setting.

[0121] Furthermore, the second calculation module 403 includes an I / V conversion unit, an amplification unit, a filter and an amplitude extraction unit. The AC current signal is obtained by the sensing electrode assembly b according to the charge conversion induced in the current electric field, and is input into the second calculation module through the extraction electrode b and the transmission line, wherein:

[0122] The I / V conversion unit converts the AC current signal into an AC voltage signal;

[0123] The amplification unit removes interference signals from the AC voltage signal and amplifies the AC voltage signal;

[0124] The filter filters the AC voltage signal and converts the AC voltage signal into a specified waveform;

[0125] The amplitude extraction unit obtains an AC voltage value according to the AC voltage signal.

[0126] Optionally, the phase shift filter can convert the AC voltage signal into a square wave signal, a half wave signal or a full wave signal according to settings.

[0127] Furthermore, the third calculation module 404 compares the DC voltage value with the AC voltage value, and determines the current electric field type according to the comparison result.

[0128] Embodiment 5

[0129] like Fig. 9 As shown, this embodiment provides an electric field sensor assembly, comprising the broadband electric field sensor 8 of any one of the above-mentioned embodiments 1 to 3, a first data processing part 5 and a second data processing part 6 connected to the broadband electric field sensor 8, and a third data processing part 7 connected to the first data processing part 5 and the second data processing part 6, respectively, wherein:

[0130] The first data processing part 5 is connected to the input end of the excitation signal composed of a piezoelectric upper electrode and a piezoelectric lower electrode in the dynamic induction electrode through a transmission line, and is used to input the excitation signal to the piezoelectric electrode. The first data processing part is connected to the lead-out electrode in the dynamic induction electrode through a transmission line, and is used to receive the DC current signal output by the dynamic induction electrode and obtain the DC voltage value. The second data processing part 6 is connected to the lead-out electrode in the static induction electrode through a transmission line, and receives the AC current signal output by the static induction electrode and obtains the AC voltage value. The third data processing part 7 is connected to the first data processing part 5 and the second data processing part 6 through a transmission line, and is used to compare the DC voltage value with the AC voltage value, and determine the current electric field type according to the comparison result.

[0131] Specifically, the first data processing part 5 includes an excitation module and a first calculation module, wherein the excitation module inputs an excitation signal to the piezoelectric electrode assembly a to drive the piezoelectric electrode in the piezoelectric electrode assembly a to vibrate, and the first calculation module receives a DC current signal input by the dynamic induction electrode and obtains a DC voltage value.

[0132] The structures and principles of the excitation module and the first calculation module in this embodiment are the same as those of the excitation module and the first calculation module in the fourth embodiment.

[0133] Specifically, the second data processing part 6 includes a second calculation module, wherein the second calculation module receives the AC current signal input by the static induction electrode and obtains the AC voltage value.

[0134] The structure and principle of the second calculation module in this embodiment are the same as those of the second calculation module in the fourth embodiment.

[0135] Specifically, the third data processing part 7 includes a third calculation module, wherein the third calculation module compares the DC voltage value with the AC voltage value and determines the current electric field type according to the comparison result.

[0136] The structure and principle of the third calculation module in this embodiment are the same as those of the third calculation module in the fourth embodiment.

[0137] In the above embodiment, the first data processing part 5, the second data processing part 6 and the third data processing part 7 can also be solidified on the same circuit board.

[0138] For example, in Embodiment 4 and Embodiment 5, when the third calculation module determines that the DC voltage value is greater than the AC voltage value, the electric field type at the current sensing time point is a DC electric field. When the third calculation module determines that the DC voltage value is less than the AC voltage value, the electric field type at the current sensing time point is an AC electric field.

[0139] In another embodiment, after the first calculation module and the second calculation module respectively input multiple DC voltage values ​​and AC voltage values ​​at the same sensing time point to the third calculation module, the third calculation module determines the electric field type at each sensing time point according to the comparison results of the DC voltage values ​​and AC voltage values ​​at the same sensing time point.

[0140] If the electric field type corresponding to the multiple sensing time points is a direct current electric field, determining that the current electric field in the sensing time period is a direct current electric field;

[0141] If the electric field type corresponding to the multiple sensing time points is an alternating electric field, determining that the current electric field in the sensing time period is an alternating electric field;

[0142] If the electric field types corresponding to the multiple sensing time points are AC electric fields or DC electric fields, it is determined that the current electric field in the sensing time period is a changing electric field in which the AC electric field and the DC electric field switch between each other.

[0143] In addition, in the fourth and fifth embodiments, when the current electric field changes dramatically, the metal electrodes in the dynamic induction electrode and the static induction electrode both sense the charge in the current electric field to generate a charge signal. The charge signal is input into the data processing part 4, or the first data processing part 5 and the second data processing part 6 through the extraction electrode, so as to obtain the corresponding electric field value.

[0144] Embodiment 6

[0145] like Fig.10 As shown, this embodiment provides an electric field detection method, which is applied to the electric field sensor assembly described in the fourth embodiment and the fifth embodiment, and includes the following steps:

[0146] S101, setting the induction time of the current electric field.

[0147] Optionally, according to actual needs, the induction time of the current electric field is set as an induction time period, and corresponding induction time points are set in the set induction time period, so as to obtain a direct current signal and an alternating current signal corresponding to each induction time point in the induction time period.

[0148] Optionally, the induction time of the current electric field is set to the current induction time point according to actual needs, so as to obtain a direct current signal and an alternating current signal corresponding to the current induction time point.

[0149] S102, driving the piezoelectric electrodes in the piezoelectric electrode assembly a to vibrate.

[0150] Specifically, an excitation signal can be input into the piezoelectric electrode assembly a through the excitation module in Example 4 and Example 5 to drive the piezoelectric electrode in the piezoelectric electrode assembly a to vibrate and receive the vibration signal; or an excitation signal can be input into the piezoelectric electrode assembly a through the excitation module in the first data processing part in Example 5 to drive the piezoelectric electrode in the piezoelectric electrode assembly a to vibrate and receive the vibration signal.

[0151] S103, obtaining a direct current signal and an alternating current signal of the current electric field.

[0152] Specifically, the direct current signal is obtained by converting the vibration generated by the piezoelectric electrode in the piezoelectric electrode assembly a according to the excitation signal. The alternating current signal is obtained by converting the charge induced by the sensing electrode assembly b in the current electric field, or the alternating current signal is obtained by converting the displacement generated by the reciprocating motion when the piezoelectric electrode assembly b receives the charge induced by the sensing electrode assembly b in the current electric field.

[0153] Optionally, the DC current signal includes a DC current signal in the current electric field obtained according to a set sensing time point, or each DC current signal in the current electric field obtained according to a set sensing time period. The AC current signal includes an AC current signal in the current electric field obtained according to a set sensing time point, or each AC current signal in the current electric field obtained according to a set sensing time period.

[0154] S104, obtaining a DC voltage value and an AC voltage value according to the DC current signal and the AC current signal respectively.

[0155] Specifically, the first calculation module and the second calculation module in Example 4 respectively receive the DC current signal and the AC current signal, and obtain the DC voltage value and the AC voltage value; or the first calculation module in the first data processing part in Example 5 receives the DC current signal and obtains the DC voltage value, and the second calculation module in the second data processing part receives the AC current signal and obtains the AC voltage value.

[0156] Optionally, the DC voltage value includes a DC current value in the current electric field obtained according to a set induction time point, or each DC current value in the current electric field obtained according to a set induction time period. The AC voltage value includes an AC voltage value in the current electric field obtained according to a set induction time point, or each AC voltage value in the current electric field obtained according to a set induction time period.

[0157] S105. Determine the current electric field type according to the comparison result between the DC voltage value and the AC voltage value.

[0158] Specifically, the DC voltage value and the AC voltage value are compared by the third calculation module in the fourth or fifth embodiment, and the current electric field type is determined according to the comparison result.

[0159] For example, in Embodiment 4 and Embodiment 5, when the third calculation module determines that the DC voltage value is greater than the AC voltage value, the electric field type at the current sensing time point is a DC electric field. When the third calculation module determines that the DC voltage value is less than the AC voltage value, the electric field type at the current sensing time point is an AC electric field.

[0160] For example, in Embodiment 4 and Embodiment 5, after the first calculation module and the second calculation module respectively input multiple DC voltage values ​​and AC voltage values ​​at the same sensing time point to the third calculation module, the third calculation module determines the electric field type at each sensing time point according to the comparison results of the DC voltage values ​​and AC voltage values ​​at the same sensing time point. Wherein:

[0161] If the electric field type corresponding to the multiple sensing time points is a direct current electric field, determining that the current electric field in the sensing time period is a direct current electric field;

[0162] If the electric field type corresponding to the multiple sensing time points is an alternating electric field, determining that the current electric field in the sensing time period is an alternating electric field;

[0163] If the electric field types corresponding to the multiple sensing time points are AC electric fields or DC electric fields, it is determined that the current electric field in the sensing time period is a changing electric field in which the AC electric field and the DC electric field switch between each other.

[0164] The above description is only a preferred embodiment of the present invention, which is only illustrative and not restrictive of the present invention. Those skilled in the art understand that many changes, modifications, and even equivalences may be made to the present invention within the spirit and scope defined by the claims of the present invention, but all of them will fall within the scope of protection of the present invention.

Claims

1. A broadband electric field sensor, characterized in that: The invention comprises a substrate, at least one dynamic induction electrode and at least one static induction electrode, wherein the substrate comprises a solid area and a recessed area, the dynamic induction electrode and the static induction electrode are arranged at intervals, a part of the dynamic induction electrode is attached to the solid area, and another part is located on the recessed area, and a part of the static induction electrode is attached to the solid area, and another part is located on the recessed area, wherein: The dynamic induction electrode obtains at least one direct current signal of the current electric field according to the excitation signal, and the static induction electrode obtains at least one alternating current signal of the current electric field according to at least the charges induced in the current electric field.

2. The broadband electric field sensor according to claim 1, characterized in that: The dynamic sensing electrode comprises a sensing electrode component a and a piezoelectric electrode component a, a portion of the sensing electrode component a is attached to the solid area, and another portion is located on the recessed area, and the piezoelectric electrode component a is attached to a portion of the sensing electrode component a, wherein: The DC current signal is obtained by converting the vibration generated by the piezoelectric electrode assembly a according to the excitation signal; The static sensing electrode comprises a sensing electrode assembly b and a piezoelectric electrode group b, a portion of the sensing electrode assembly b is attached to the solid area, and another portion is located on the recessed area, and the piezoelectric electrode assembly b is attached to a portion of the sensing electrode assembly b, wherein: The AC current signal is obtained by converting the charges induced by the sensing electrode assembly b in the current electric field, or the AC current signal is obtained by converting the displacement generated by the reciprocating motion of the piezoelectric electrode assembly b when the piezoelectric electrode assembly b receives the charges induced by the sensing electrode assembly b in the current electric field.

3. The broadband electric field sensor according to claim 2, characterized in that: The sensing electrode assembly a and the sensing electrode assembly b both include a base portion and a metal electrode, a first portion of the base portion is attached to the solid area, a second portion of the base portion is located on the recessed area, and the metal electrode is attached to a partial area of ​​the second portion; The piezoelectric electrode assembly a and the piezoelectric electrode assembly b both include piezoelectric electrodes attached to partial areas of the first part and partial areas of the second part, and lead-out electrodes attached to partial areas of the first part, wherein the piezoelectric electrode is connected to the lead-out electrode through the first part, and the lead-out electrode is connected to the metal electrode through the base layer.

4. The broadband electric field sensor according to claim 3, characterized in that: The second portion includes a second portion a and a second portion b, wherein the second portion b is farther away from the first portion than the second portion a, and the metal electrode is attached to the second portion b.

5. The broadband electric field sensor according to claim 4, characterized in that: The piezoelectric electrode includes a piezoelectric upper electrode, a piezoelectric layer and a piezoelectric lower electrode, wherein the piezoelectric lower electrode is attached to a partial area of ​​the first part and a partial area of ​​the second part a, the piezoelectric upper electrode is attached to at least a portion of the piezoelectric lower electrode, and the piezoelectric layer is sandwiched between the piezoelectric upper electrode and the piezoelectric lower electrode.

6. The broadband electric field sensor according to any one of claims 1 to 5, characterized in that: The DC current signal includes a DC current signal in the current electric field obtained according to a set sensing time point, or each DC current signal in the current electric field obtained according to a set sensing time period; The alternating current signal includes an alternating current signal in the current electric field obtained according to a set sensing time point, or each alternating current signal in the current electric field obtained according to a set sensing time period.

7. The broadband electric field sensor according to claim 1, characterized in that: The frequency of the electric field detected by the dynamic sensing electrode is less than 50% of the self-resonance frequency of the broadband electric field sensor; The frequency of the electric field detected by the static induction electrode is greater than 50% of the self-resonance frequency of the broadband electric field sensor; The alternating current signal detected by the static induction electrode is an alternating current signal greater than, equal to or less than 50% of the self-resonant frequency of the electric field sensor.

8. An electric field sensor assembly, characterized in that: The invention comprises the broadband electric field sensor according to any one of claims 1 to 7, and at least one data processing part connected thereto, wherein: The data processing part receives at least one of the DC current signals and at least one of the AC current signals, and obtains at least one DC voltage value and at least one AC voltage value respectively, and determines the current electric field type according to the comparison result of the DC voltage value and the AC voltage value.

9. The electric field sensor assembly according to claim 7, characterized in that: The data processing part at least includes an excitation module, a first calculation module, a second calculation module and a third calculation module, wherein: The excitation module inputs the excitation signal to the dynamic induction electrode to drive the piezoelectric electrode assembly a to vibrate, and receives the generated vibration signal; The first calculation module receives the DC current signal input by the dynamic induction electrode and obtains a DC voltage value; The second calculation module receives the AC current signal input by the static induction electrode and obtains an AC voltage value; The third calculation module compares the DC voltage value with the AC voltage value, and determines the current electric field type according to the comparison result.

10. The electric field sensor assembly according to claim 9, characterized in that: The first calculation module includes an I / V conversion unit, an amplification unit, a phase shift filter and a coherent demodulator, wherein: The I / V conversion unit converts the DC current signal into a DC voltage signal; The amplifying unit removes interference signals from the DC voltage signal and amplifies the DC voltage signal; The phase shift filter receives the vibration signal amplified by the piezoelectric electrode assembly a, filters the vibration signal, and converts the vibration signal into a specified waveform; The coherent demodulator demodulates the received vibration signal of the specified waveform and the amplified DC voltage signal to obtain a DC voltage value.

11. The electric field sensor assembly according to claim 9, characterized in that: The second calculation module includes an I / V conversion unit, an amplification unit, a filter and an amplitude extraction unit, wherein: The I / V conversion unit converts the AC current signal into an AC voltage signal; The amplifying unit removes interference signals from the AC voltage signal and amplifies the AC voltage signal; The filter filters the AC voltage signal and converts the AC voltage signal into a specified waveform; The amplitude extraction unit obtains an AC voltage value according to the AC voltage signal.

12. An electric field detection method, applied to the electric field sensor assembly according to any one of claims 8 to 11, characterized in that: The following steps are involved: The dynamic induction electrode and the static induction electrode respectively obtain at least one direct current signal and at least one alternating current signal of the current electric field; Obtain a DC voltage value and an AC voltage value according to the DC current signal and the AC current signal respectively; The DC voltage value is compared with the AC voltage value, and the current electric field type is determined based on the comparison result.

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