Pneumatic control system and control method of upper cover driving device of vacuum chamber

Abstract

The present invention discloses a pneumatic control system and a control method for an upper cover driving device of a vacuum chamber, and relates to the field of semiconductor equipment technology. The pneumatic control system is provided with a first isolating valve, and the switch of the first isolating valve is controlled by a first protective air circuit connected to a second driving circuit, thereby controlling the connection between the opening and closing cover protection circuit and the air intake pipeline, thereby ensuring that the opening and closing cover protection circuit can only be opened when the rotating mechanism is fixed and the lifting cylinder does not rotate with the rotating mechanism. By providing a two-hand control valve in the opening and closing cover protection circuit, when the opening and closing cover protection circuit is opened, the operator is required to operate with both hands to open the pneumatic control valve, and the air intake pipeline and the first driving circuit are connected through the pneumatic control valve, thereby driving the lifting cylinder to operate, thereby realizing the opening and closing of the cover, thereby improving the safety of the opening and closing cover operation.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor equipment, and in particular to a pneumatic control system of an upper cover driving device of a vacuum chamber and a control method thereof. Background Art

[0002] The vacuum chamber of the semiconductor equipment usually has an upper cover, and the upper cover is driven by an upper cover driving device to open or close the opening at the top of the vacuum chamber, so as to facilitate installation and maintenance of the interior of the vacuum chamber.

[0003] Since semiconductor equipment requires regular maintenance and overhaul, frequent opening and closing of the upper cover will cause wear on the sealing ring, resulting in failure of the sealing ring and affecting the stability of the process environment. At present, in order to reduce the impact of frequent opening and closing of the upper cover on the sealing ring, the upper cover is lifted by a lifting cylinder and then flipped upward to open the upper cover. This opening operation has poor stability, and the upward flipping action requires a large operating radius, resulting in the semiconductor equipment occupying a large height space on the production line; and in the process of flipping to the side, gravity causes mechanical stress to be concentrated at a certain position of the upper cover, which will also increase the risk of deformation of the vacuum chamber and damage to the sealing interface, especially for the upper cover with a larger mass. Moreover, the pneumatic control system of the lifting cylinder is usually a single pneumatic circuit control, the gas source is directly connected to the lifting cylinder, and a simple switch valve is used to control the inlet and outlet of the gas, thereby realizing the opening and closing of the upper cover.

[0004] Existing systems often rely on mechanical locking and simple control logic. The operator's hands or other parts of the body may be exposed in the danger zone, especially when the upper cover falls accidentally or the lifting cylinder loses control, which may cause serious personal injury. The safety of the operator cannot be fully guaranteed, especially in environments where the operation is complex or requires multiple repeated operations, the safety risks are more prominent. Summary of the invention

[0005] The object of the present invention is to provide a pneumatic control system of an upper cover driving device of a vacuum chamber and a control method thereof, so as to ensure the safety of the upper cover opening and closing operation and the sealing of the vacuum chamber.

[0006] To achieve this object, the present invention adopts the following technical solutions:

[0007] A pneumatic control system for an upper cover driving device of a vacuum chamber, wherein the upper cover driving device comprises a lifting cylinder, a rotating mechanism and a locking mechanism, wherein the driving end of the lifting cylinder is connected to the upper cover and is used to drive the upper cover to rise and fall; the locking mechanism comprises a locking disk, a locking member and a locking cylinder, wherein one end of the rotating mechanism is connected to the fixed end of the lifting cylinder and the other end is connected to the locking disk, the locking cylinder drives the locking member to extend and retract, and the locking member is used to lock the locking disk; wherein,

[0008] The pneumatic control system includes an air intake pipeline, a first drive circuit, a second drive circuit and an opening and closing cover protection circuit, one end of the air intake pipeline is connected to the air source, and the other end is connected to the first drive circuit, the second drive circuit and the opening and closing cover protection circuit;

[0009] The first driving circuit is connected to the lifting cylinder and is used to drive the lifting rod of the lifting cylinder to extend and retract; the first driving circuit is provided with an air control valve, the air inlet of the air control valve is connected to the air inlet pipeline, the air outlet of the air control valve is connected to the air inlet cavity of the lifting cylinder, and the air outlet of the air control valve is connected to the air outlet cavity of the lifting cylinder;

[0010] The second driving circuit is connected to the locking cylinder and is used to control the extension and retraction of the locking gas rod of the locking cylinder;

[0011] The opening and closing cover protection circuit includes a first isolating valve and a two-hand control valve. The second drive circuit is connected to the first isolating valve through a first protection gas circuit, and the first protection gas circuit is used to control the switch of the first isolating valve; the air intake pipeline is connected to the two-hand control valve through the first isolating valve; the two-hand control valve controls the switch of the air control valve.

[0012] As an optional solution of the pneumatic control system of the upper cover driving device of the vacuum chamber, a first machine-controlled valve is further provided on the second driving circuit, an air inlet of the first machine-controlled valve is communicated with the air inlet pipeline, an air outlet of the first machine-controlled valve is selectively communicated with the rodless chamber or the rod chamber of the locking cylinder, and an exhaust port of the first machine-controlled valve is selectively communicated with the rod chamber or the rodless chamber of the locking cylinder;

[0013] The first protective gas circuit is connected between the first machine-controlled valve and the rodless chamber of the locking cylinder. When the air outlet of the first machine-controlled valve is connected to the rodless chamber of the locking cylinder, the gas at the air outlet of the first machine-controlled valve can enter the first protective gas circuit.

[0014] As an optional scheme for the pneumatic control system of the upper cover driving device of the vacuum chamber, the opening and closing cover protection circuit also includes a second machine-controlled valve and a third machine-controlled valve, the air inlet of the second machine-controlled valve and the air inlet of the third machine-controlled valve are both connected to the air outlet of the first isolation valve; the air outlet of the second machine-controlled valve is connected to the first air inlet of the two-hand control valve, the air outlet of the third machine-controlled valve is connected to the second air inlet of the two-hand control valve, and the air outlet of the two-hand control valve is connected to the control air port of the pneumatic control valve.

[0015] As an optional solution of the pneumatic control system of the upper cover driving device of the vacuum chamber, the two-hand control valve includes a two-hand control valve for opening the cover and a two-hand control valve for closing the cover, the air-controlled valve includes an air-controlled valve for opening the cover and an air-controlled valve for closing the cover, and the third machine-controlled valve includes a machine-controlled valve for opening the cover and a machine-controlled valve for closing the cover;

[0016] The air outlet of the second mechanical control valve is communicated with the first air inlet of the cover-opening two-hand control valve and the first air inlet of the cover-closing two-hand control valve, the air inlet of the cover-opening mechanical control valve and the air inlet of the cover-closing mechanical control valve are both communicated with the air outlet of the first isolation valve, the air outlet of the cover-opening mechanical control valve is communicated with the second air inlet of the cover-opening two-hand control valve, the air outlet of the cover-opening two-hand control valve is communicated with the control air port of the cover-opening air control valve, the air inlet of the cover-opening air control valve is communicated with the air inlet pipeline, and the air outlet of the cover-opening air control valve is communicated with the rod chamber of the lifting cylinder;

[0017] The air outlet of the closing mechanical control valve is connected to the second air inlet of the closing double-hand control valve, the air outlet of the closing double-hand control valve is connected to the control air port of the closing air control valve, the air inlet of the closing air control valve is connected to the air inlet pipeline, and the air outlet of the closing air control valve is connected to the rodless chamber of the lifting cylinder.

[0018] As an optional scheme for the pneumatic control system of the upper cover driving device of the vacuum chamber, an opening cover isolation valve and a closing cover isolation valve are provided on the first driving circuit, the opening cover isolation valve is arranged between the closing cover air control valve and the rodless chamber of the lifting cylinder, and the air outlet of the opening cover air control valve and the air outlet of the closing cover two-hand control valve are both connected to the control air port of the opening cover isolation valve; the closing cover isolation valve is arranged between the rod chamber of the lifting cylinder and the exhaust pipeline, and the control air port of the closing cover isolation valve is connected to the air outlet of the closing cover air control valve.

[0019] As an optional solution for the pneumatic control system of the upper cover driving device of the vacuum chamber, a first shuttle valve and a second shuttle valve are further provided on the first driving circuit, the first air inlet of the first shuttle valve is communicated with the air outlet of the cover-opening air control valve, the air outlet of the first shuttle valve is communicated with the rod chamber of the lifting cylinder and the first air inlet of the second shuttle valve; the second air inlet of the second shuttle valve is communicated with the air outlet of the cover-closing two-hand control valve, and the air outlet of the second shuttle valve is communicated with the control air port of the cover-opening isolation valve;

[0020] And / or, the first drive circuit is further provided with a first speed control valve and a second speed control valve, the first speed control valve is provided at the rod chamber of the lifting cylinder, and is used to control the speed of gas entering and exiting the rod chamber of the lifting cylinder; the second speed control valve is provided at the rodless chamber of the lifting cylinder, and is used to control the speed of gas entering and exiting the rodless chamber of the lifting cylinder;

[0021] The first speed control valve is a pilot-operated one-way valve speed regulating valve, and the air outlet of the closing air control valve is connected to the control air port of the pilot-operated one-way valve speed regulating valve, which is used to control the rod chamber of the lifting cylinder to be connected to the air inlet of the closing isolation valve through the pilot-operated one-way valve speed regulating valve.

[0022] As an optional scheme for the pneumatic control system of the upper cover driving device of the vacuum chamber, the opening and closing cover protection circuit is also provided with a fourth machine-controlled valve, the air inlet of the fourth machine-controlled valve is connected to the air inlet pipeline, and the air outlet of the fourth machine-controlled valve is connected to the air inlet of the first isolation valve; when the rotating mechanism drives the lifting cylinder to rotate to a set position, the fourth machine-controlled valve opens.

[0023] A pneumatic control method for a vacuum chamber upper cover driving device, which is applied to a pneumatic control system of a vacuum chamber upper cover driving device as described in any of the above schemes, and the pneumatic control method comprises the following steps:

[0024] The gas in the air intake pipeline enters the second drive circuit, controls the locking gas rod of the locking cylinder to extend, drives the locking member to lock the locking disk, so as to fix the rotating mechanism; at the same time, part of the gas flowing from the air intake pipeline to the rodless chamber of the locking cylinder enters the first isolation valve through the first protective gas path, and controls the first isolation valve to open;

[0025] The gas in the air intake pipeline enters the opening and closing cover protection circuit, and under the operation of the operator's hands, the gas enters the two-hand control valve through the first isolation valve, and the two-hand control valve controls the air control valve to open;

[0026] The gas in the air intake pipeline enters the first driving circuit, and after the air control valve is opened, the gas enters the lifting cylinder through the air control valve, and the lifting cylinder drives the upper cover to open and close.

[0027] As an optional solution of the pneumatic control method of the upper cover driving device of the vacuum chamber, the opening and closing cover protection circuit is further provided with a fourth mechanically controlled valve, the air inlet of the fourth mechanically controlled valve is communicated with the air inlet pipeline, and the air outlet of the fourth mechanically controlled valve is communicated with the air inlet of the first isolation valve; before the gas in the air inlet pipeline enters the second driving circuit, the fourth mechanically controlled valve is opened after the rotating mechanism drives the lifting cylinder to rotate to a set position;

[0028] After the fourth mechanical control valve is opened, the gas in the air intake pipeline enters the second drive circuit and the opening and closing cover protection circuit;

[0029] The gas entering the second drive circuit enters the first isolation valve through the first protective gas path, and controls the first isolation valve to open;

[0030] The gas entering the opening and closing cover protection circuit enters the two-hand control valve through the fourth machine-controlled valve and the first isolation valve.

[0031] As an optional scheme of the pneumatic control method of the upper cover driving device of the vacuum chamber, the two-hand control valve includes a two-hand control valve for opening the cover, the air control valve includes an air control valve for opening the cover and an air control valve for closing the cover, the first driving circuit is provided with an opening cover isolation valve and a closing cover isolation valve, the air outlet of the opening cover air control valve is connected with the control air port of the opening cover isolation valve; the closing cover isolation valve is provided between the rod chamber of the lifting cylinder and the exhaust pipeline, the control air port of the closing cover isolation valve is connected with the air outlet of the closing cover air control valve, and the air outlet of the closing cover two-hand control valve is connected with the control air port of the opening cover isolation valve; the pneumatic control method also includes the following steps:

[0032] When the gas from the gas outlet of the cover-opening two-hand control valve enters the control gas port of the cover-opening gas control valve, and the cover-opening gas control valve is controlled to open, the gas from the air inlet pipeline enters the first drive circuit through the cover-opening gas control valve;

[0033] Part of the gas entering the first drive circuit enters the control air port of the open-cover isolation valve to open the open-cover isolation valve; the other part enters the rod chamber of the lifting cylinder to drive the lifting gas rod of the lifting cylinder to contract, and the gas in the rodless chamber of the lifting cylinder is discharged through the open-cover isolation valve to drive the upper cover to rise.

[0034] When the gas from the gas outlet of the closed-lid double-hand control valve enters the control gas port of the closed-lid gas control valve and the control gas port of the open-lid isolation valve, and the closed-lid gas control valve and the open-lid isolation valve are controlled to open, the gas in the air inlet pipeline enters the first drive circuit through the closed-lid gas control valve;

[0035] A portion of the gas entering the first drive circuit enters the rodless chamber of the lifting cylinder through the control air port of the open cover partition valve, driving the lifting gas rod of the lifting cylinder to extend; the other portion enters the control air port of the closed cover partition valve, controlling the closing cover partition valve to open; the gas in the rod chamber of the lifting cylinder can be discharged through the closing cover partition valve to drive the upper cover to descend.

[0036] Beneficial effects of the present invention:

[0037] The pneumatic control system of the upper cover driving device of the vacuum chamber provided by the present invention includes an air intake pipeline, a first driving circuit, a second driving circuit and an opening and closing cover protection circuit. The air intake pipeline provides gas to the first driving circuit, the second driving circuit and the opening and closing cover protection circuit. The first driving circuit is connected to the lifting cylinder for driving the upper cover to open and close. The lifting cylinder is connected to the rotating mechanism. The rotating mechanism drives the lifting cylinder to drive the upper cover to rotate, so as to realize the upper cover to rotate and open and close in the plane, reduce the influence of stress concentration on the sealing ring and the vacuum chamber, and improve the sealing of the vacuum chamber. The second driving circuit is connected to the locking cylinder, and the locking gas rod of the locking cylinder is extended to drive the locking member to lock the locking disk connected to the rotating mechanism. When the locking cylinder locks the rotating mechanism, the gas in the second driving circuit enters the first isolation valve through the first protective gas circuit to control the first isolation valve to open. After the first isolating valve is opened, the gas in the air intake pipeline enters the double-hand control valve through the first isolating valve, and the double-hand control valve controls the air control valve to open, so that the gas in the air intake pipeline enters the first drive circuit through the air control valve, drives the lifting gas rod of the lifting cylinder to extend and retract, and drives the upper cover to open and close. The pneumatic control system is provided with a first isolating valve, and the switch of the first isolating valve is controlled by the first protection air circuit connected to the second drive circuit, thereby controlling the connection between the opening and closing cover protection circuit and the air intake pipeline, ensuring that the opening and closing cover protection circuit can only be opened when the rotating mechanism is fixed and the lifting cylinder does not rotate with the rotating mechanism. By providing a double-hand control valve in the opening and closing cover protection circuit, when the opening and closing cover protection circuit is opened, the operator must use both hands to open the air control valve, connect the air intake pipeline and the first drive circuit through the air control valve, and then drive the lifting cylinder to operate, so as to realize the opening and closing of the cover, thereby improving the safety of the opening and closing cover operation.

[0038] The pneumatic control method of the upper cover driving device of the vacuum chamber provided by the present invention is applied to the above-mentioned pneumatic control system. In this pneumatic control method, when opening and closing the cover, the gas in the air intake pipeline first enters the second drive circuit to drive the locking cylinder to lock the rotating mechanism, and at the same time, the gas in the second drive circuit enters the first isolation valve through the first protective air circuit to control the first isolation valve to open. Under the operation of the operator's hands, the gas in the air intake pipeline enters the two-hand control valve through the first isolation valve, and the two-hand control valve controls the air control valve to open. After the air control valve is opened, the gas in the air intake pipeline enters the lifting cylinder through the air control valve, and the lifting cylinder drives the upper cover to open and close. This pneumatic control method improves the safety of the cover opening and closing operation and ensures the sealing of the vacuum chamber. BRIEF DESCRIPTION OF THE DRAWINGS

[0039] Figure 1 It is a structural schematic diagram of the connection between the upper cover driving device of the vacuum chamber provided by an embodiment of the present invention and the upper cover of the vacuum chamber;

[0040] Figure 2 is a partial cross-sectional view of an upper cover driving device of a vacuum chamber provided by an embodiment of the present invention;

[0041] Figure 3 It is a schematic diagram of the gas flow direction when the pneumatic control system of the upper cover driving device of the vacuum chamber provided by an embodiment of the present invention drives the upper cover to open;

[0042] Figure 4 It is a schematic diagram of the gas flow direction when the pneumatic control system of the upper cover driving device of the vacuum chamber provided by the embodiment of the present invention drives the upper cover to close;

[0043] Figure 5 It is a schematic diagram of gas flow direction of a pneumatic control system of an upper cover driving device of a vacuum chamber provided by an embodiment of the present invention when the opening and closing of the cover stops midway;

[0044] Figure 6 It is a schematic diagram of the gas flow direction of the pneumatic control system of the upper cover driving device of the vacuum chamber provided by an embodiment of the present invention when the rotating mechanism rotates.

[0045] In the figure:

[0046] 100. lifting mechanism; 101. lifting cylinder; 102. supporting assembly; 103. connecting plate;

[0047] 200, rotating mechanism; 201, rotating arm; 202, rotating shaft; 203, base;

[0048] 300, locking mechanism; 301, locking plate; 302, locking member; 303, locking cylinder;

[0049] 400, vacuum chamber; 401, upper cover; 4011, rotating handle;

[0050] 1. Intake pipe; 11. First intake branch pipe; 12. Second intake branch pipe; 13. Third intake branch pipe;

[0051] 2. First drive circuit; 21. Open cover air control valve; 22. Close cover air control valve; 23. First shuttle valve; 24. Second shuttle valve; 25. Open cover isolation valve; 26. Close cover isolation valve; 27. Check valve; 28. First speed control valve; 29. ​​Second speed control valve;

[0052] 3. Second drive circuit; 31. First machine-controlled valve; 32. Air intake throttle valve;

[0053] 4. The first protective gas circuit;

[0054] 5. Open and close cover protection circuit; 51. Fourth machine-controlled valve; 52. First isolation valve; 53. Second machine-controlled valve; 541. Open cover machine-controlled valve; 542. Close cover machine-controlled valve; 551. Open cover double-hand control valve; 552. Close cover double-hand control valve; 56. Air outlet pipeline; 561. First air outlet branch pipeline; 562. Second air outlet branch pipeline; 571. Fourth air inlet branch pipeline; 572. Fifth air inlet branch pipeline;

[0055] 6. Exhaust pipe. DETAILED DESCRIPTION

[0056] Embodiments of the present invention are described in detail below, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended to be used to explain the present invention, and should not be construed as limiting the present invention.

[0057] In the description of the present invention, it should be noted that the terms "center", "up", "down", "left", "right", "vertical", "horizontal", "inside", "outside" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first" and "second" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance. Among them, the terms "first position" and "second position" are two different positions.

[0058] Unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", and "fixed" should be understood in a broad sense, for example, it can be a fixed connection or a detachable connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0059] Unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include the first feature being in direct contact with the second feature, or may include the first feature being in contact with the second feature through another feature between them instead of being in direct contact. Moreover, a first feature being "above", "above" and "above" a second feature includes the first feature being directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes the first feature being directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.

[0060] The technical solution of the present invention is further described below with reference to the accompanying drawings and through specific implementation methods.

[0061] like Figure 1 and Figure 2 As shown, the upper cover driving device of the vacuum chamber includes a lifting mechanism 100, a rotating mechanism 200 and a locking mechanism 300. The lifting mechanism 100 is connected to the upper cover 401 and is used to drive the upper cover 401 to rise, so that the upper cover 401 is completely separated from the opening of the vacuum chamber 400. At this time, the upper cover 401 is located directly above the opening of the vacuum chamber 400. When installing and maintaining the interior of the vacuum chamber 400, it is inconvenient to operate the upper cover 401 located directly above the opening of the vacuum chamber 400; the rotating mechanism 200 is connected to the lifting mechanism 100 and is used to drive the lifting mechanism 100 to drive the upper cover 401 to rotate to one side on the plane where the upper cover 401 is located, so as to move the upper cover 401 out from above the opening of the vacuum chamber 400. In order to ensure the sealing of the vacuum chamber 400, a sealing ring is provided at the opening of the vacuum chamber 400, and the sealing ring is used to ensure the sealing between the upper cover 401 and the opening of the vacuum chamber 400. In this way of opening the upper cover 401, it is only necessary to lift the upper cover 401 until the sealing ring of the opening of the vacuum chamber 400 is disengaged from the contact, and then the upper cover 401 is rotated to one side by the rotating mechanism 200. During operation, it does not need to occupy a large height space, which is convenient for semiconductor equipment to be arranged in a more compact space, improves the compactness of the semiconductor equipment, and provides operators with a larger operating space and safety guarantee. Moreover, when the upper cover 401 is opened, the opening and the sealing ring of the vacuum chamber 400 will not be subjected to the force of a certain position of the upper cover 401, thereby avoiding deformation of the vacuum chamber 400 and damage to the sealing ring caused by mechanical stress concentration, thereby ensuring the stability of the upper cover 401 during the lifting process and the sealing of the vacuum chamber 400.

[0062] Specifically, the lifting mechanism 100 includes a lifting cylinder 101 and a support assembly 102. The lifting cylinder 101 is connected to the upper cover 401 through two groups of support assemblies 102. The lifting cylinder 101 includes a lifting cylinder body and a lifting gas rod. The lifting gas rod is slidably arranged in the lifting cylinder body. The lifting gas rod is connected to the two groups of support assemblies 102 through a connecting plate 103. The other ends of the two groups of support assemblies 102 are connected to the upper cover 401 to ensure the stability of the lifting cylinder 101 driving the upper cover 401 to rise and fall.

[0063] The rotating mechanism 200 includes a base 203, a rotating arm 201 and a rotating shaft 202. The base 203 is arranged in the circumference of the vacuum chamber 400. The rotating shaft 202 is rotatably arranged in the base 203. One end of the rotating arm 201 is fixedly connected to the rotating shaft 202, and the other end is connected to the lifting cylinder body of the lifting cylinder 101. A square block is provided at one end of the rotating arm 201 connected to the lifting cylinder 101. The lifting cylinder body is fixed on the square block. A evacuation hole for the lifting gas rod to pass through is provided in the middle of the square block. The end and side wall of the rotating shaft 202 are fixedly connected to the rotating arm 201 by set screws to ensure that the rotating shaft 202 rotates synchronously with the rotating arm 201 when the rotating shaft 202 rotates. The rotating shaft 202 is rotatably connected to the base 203 by a bearing to ensure the smoothness and reliability of the rotation of the rotating shaft 202.

[0064] In order to facilitate the rotation operation of the upper cover 401, two rotating handles 4011 are installed on the upper cover 401. After the lifting mechanism 100 lifts the upper cover 401 into place, the operator holds the two rotating handles 4011 to rotate the upper cover 401, so that the upper cover 401 rotates relative to the base 203. The design of the rotating handle 4011 is ergonomic, simple in structure, provides a good operating feel and control, and is more convenient for the rotation operation of the upper cover 401, and has better flexibility.

[0065] After the installation and maintenance inside the vacuum chamber 400 is completed, the upper cover 401 is rotated to the top of the opening of the vacuum chamber 400 by holding the rotating handle 4011, and then the lifting rod of the lifting cylinder 101 is controlled to extend to drive the upper cover 401 to descend and seal the opening of the vacuum chamber 400.

[0066] The locking mechanism 300 is used to fix the position of the upper cover 401 when the upper cover 401 closes the opening and is in the working position or when the upper cover 401 is rotated to the maintenance position by the rotating mechanism 200, so as to ensure that the upper cover 401 will not be accidentally opened or moved during the working process or maintenance process of the vacuum chamber 400. The end of the rotating shaft 202 away from the rotating arm 201 is connected with a locking disk 301, and a locking hole is provided on the locking disk 301. The locking mechanism 300 also includes a locking member 302 and a locking cylinder 303. The rotating shaft 202 drives the locking disk 301 to rotate while the rotating shaft 202 rotates. The locking gas rod of the locking cylinder 303 is connected to the locking member 302, which is used to drive the locking member 302 to extend and retract. The locking member 302 cooperates with the locking hole on the locking disk 301 to lock and fix the rotating shaft 202. The locking holes on the locking disk 301 include a first locking hole for locking with the locking member 302 when the upper cover 401 is in the working position and a second locking hole for locking with the locking member 302 when the upper cover 401 is in the maintenance position.

[0067] In order to prevent the upper cover 401 from accidentally falling or the lifting cylinder 101 from losing control, which may cause harm to the operator, the safety of opening and closing the cover is improved, such as Figure 3 and Figure 4 As shown, this embodiment provides a pneumatic control system for an upper cover driving device of a vacuum chamber, and the pneumatic control system includes an air intake pipeline 1, a first driving circuit 2, a second driving circuit 3, and an opening and closing cover protection circuit 5. One end of the air intake pipeline 1 is connected to the air source, and the other end is connected to the first driving circuit 2, the second driving circuit 3, and the opening and closing cover protection circuit 5. Specifically, the air intake pipeline 1 includes a first air intake branch pipeline 11, a second air intake branch pipeline 12, and a third air intake branch pipeline 13. The first air intake branch pipeline 11 is connected to the first driving circuit 2, the second air intake branch pipeline 12 is connected to the second driving circuit 3, and the third air intake branch pipeline 13 is connected to the opening and closing cover protection circuit 5, so that the air source supplies air to the first driving circuit 2, the second driving circuit 3, and the opening and closing cover protection circuit 5, respectively.

[0068] The first drive circuit 2 is connected to the lifting cylinder 101, and is used to drive the lifting gas rod of the lifting cylinder 101 to extend and retract; the first drive circuit 2 is provided with an air control valve, the air inlet of the air control valve is connected to the air inlet pipeline 1, the air outlet of the air control valve is connected to the air inlet chamber of the lifting cylinder 101, and the exhaust port of the air control valve is connected to the air outlet chamber of the lifting cylinder 101. The second drive circuit 3 is connected to the locking cylinder 303, and is used to control the extension and retraction of the locking gas rod of the locking cylinder 303. The opening and closing cover protection circuit 5 includes a first isolation valve 52 and a two-hand control valve, the second drive circuit 3 is connected to the first isolation valve 52 through the first protection gas circuit 4, and the first protection gas circuit 4 is used to control the switch of the first isolation valve 52; the air inlet pipeline 1 is connected to the two-hand control valve through the first isolation valve 52; the two-hand control valve controls the switch of the air control valve.

[0069] The pneumatic control system is provided with a first isolating valve 52, and the switch of the first isolating valve 52 is controlled by the first protection gas circuit 4 connected to the second drive circuit 3, thereby controlling the connection between the opening and closing cover protection circuit 5 and the air intake pipeline 1, ensuring that the opening and closing cover protection circuit 5 can be opened only when the rotating mechanism 200 is fixed and the lifting cylinder 101 does not rotate with the rotating mechanism 200. By providing a two-hand control valve in the opening and closing cover protection circuit 5, when the opening and closing cover protection circuit 5 is opened, the operator is required to operate with both hands to open the air control valve, connect the air intake pipeline 1 and the first drive circuit 2 through the air control valve, and then drive the lifting cylinder 101 to operate, so as to realize the opening and closing of the cover, thereby improving the safety of the opening and closing cover operation.

[0070] In one embodiment, the opening and closing cover protection circuit 5 is also provided with a fourth mechanically controlled valve 51, the air inlet of the fourth mechanically controlled valve 51 is connected to the air inlet pipeline 1, and the air outlet of the fourth mechanically controlled valve 51 is connected to the air inlet of the first isolating valve 52; when the rotating mechanism 200 drives the lifting cylinder 101 to rotate to the set position, the fourth mechanically controlled valve 51 opens.

[0071] In this embodiment, the fourth machine-controlled valve 51 is a roller plunger machine-controlled valve, which is installed on the base 203. A pressure block is provided on the rotating arm 201. When the pressure block rotates to a set position, the pressure block abuts against the roller plunger machine-controlled valve to open the roller plunger machine-controlled valve. At this time, the gas in the intake pipe 1 enters the opening and closing cover protection circuit 5 through the roller plunger machine-controlled valve. The operator operates the two-hand control valve with both hands, and the two-hand control valve can control the air-controlled valve to open, so that the gas in the intake pipe 1 enters the first drive circuit 2 through the air-controlled valve, and drives the upper cover 401 through the lifting cylinder 101.

[0072] Before opening the cover, the upper cover 401 is in the working position. When opening the cover, the rotating mechanism 200 does not move, and the locking mechanism 300 keeps locking the rotating mechanism 200; the lifting cylinder 101 drives the upper cover 401 to rise. When the upper cover 401 rises to its position, the locking cylinder 303 drives the locking member 302 to contract and unlock the rotating mechanism 200. After the rotating mechanism 200 drives the upper cover 401 to rotate to the maintenance position through the lifting cylinder 101, the locking cylinder 303 drives the locking member 302 to extend and lock the rotating mechanism 200. After the maintenance of the vacuum chamber 400 is completed, the locking mechanism 300 unlocks the rotating mechanism 200, and the rotating shaft 202 drives the lifting cylinder 101 to rotate to the top of the opening through the rotating arm 201. At this time, the pressure block can abut against the roller plunger type machine-controlled valve to open the roller plunger type machine-controlled valve. Such a setting ensures the accuracy of the docking between the upper cover 401 and the opening.

[0073] The second drive circuit 3 is also provided with a first machine-controlled valve 31, the air inlet of the first machine-controlled valve 31 is connected to the air inlet pipeline 1, the air outlet of the first machine-controlled valve 31 is selectively connected to the rodless chamber or the rod chamber of the locking cylinder 303, and the air outlet of the first machine-controlled valve 31 is selectively connected to the rod chamber or the rodless chamber of the locking cylinder 303. The first protection gas circuit 4 is connected between the first machine-controlled valve 31 and the rodless chamber of the locking cylinder 303. When the air outlet of the first machine-controlled valve 31 is connected to the rodless chamber of the locking cylinder 303, the gas at the air outlet of the first machine-controlled valve 31 can enter the first protection gas circuit 4. That is, only when the locking cylinder 303 drives the locking member 302 to lock the rotating mechanism 200, gas enters the first protection gas circuit 4 to control the first isolation valve 52 to open.

[0074] In this embodiment, the first mechanically controlled valve 31 is a knob-type mechanically controlled valve, and the air outlet of the knob-type mechanically controlled valve is selectively connected to the rodless chamber or the rod chamber of the locking cylinder 303 by rotating the knob of the knob-type mechanically controlled valve.

[0075] Furthermore, an air intake throttle valve 32 is also provided on the second drive circuit 3, and the air intake throttle valve 32 is provided between the rod chamber of the locking cylinder 303 and the first machine-controlled valve 31. The air intake throttle valve 32 can adjust the pressure of the gas to ensure the stable driving of the locking cylinder 303 and avoid damaging the locking disk 301 when the locking gas rod drives the locking member 302 to cooperate with the locking hole.

[0076] When the air outlet of the first machine-controlled valve 31 is connected to the rodless chamber of the locking cylinder 303, a part of the gas in the second intake branch pipeline 12 enters the rodless chamber of the locking cylinder 303, and the gas in the rod chamber of the locking cylinder 303 returns to the exhaust port of the first machine-controlled valve 31 through the intake throttle valve 32 and is discharged through the muffler to drive the locking gas rod of the locking cylinder 303 to extend, so that the locking piece 302 cooperates with the locking hole on the locking plate 301 to lock; another part of the gas enters the control air port of the first isolating valve 52 through the first protective air circuit 4, and the first isolating valve 52 is opened, so that the gas in the third intake branch pipeline 13 enters the first isolating valve 52 after passing through the fourth machine-controlled valve 51. After the operator operates with both hands, it enters the two-hand control valve, and then controls the air control valve to open, so that the gas in the first intake branch pipeline 11 can flow to the lifting cylinder 101 through the air control valve.

[0077] When the air outlet of the first mechanical control valve 31 is connected to the rod chamber of the locking cylinder 303, the gas in the second air intake branch line 12 enters the rod chamber of the locking cylinder 303, and the gas in the rodless chamber of the locking cylinder 303 is discharged through the exhaust port of the first mechanical control valve 31, and the locking gas rod contracts to drive the locking member 302 to unlock the rotating mechanism 200. At this time, since the pressure of the exhaust port of the first mechanical control valve 31 is much lower than the pressure of the control air port of the first isolation valve 52, the gas flowing out of the rodless chamber of the locking cylinder 303 will not enter the first protection air path 4.

[0078] Specifically, the opening and closing cover protection circuit 5 also includes a second machine-controlled valve 53 and a third machine-controlled valve. The air inlet of the second machine-controlled valve 53 and the air inlet of the third machine-controlled valve are both connected to the air outlet of the first isolation valve 52; the air outlet of the second machine-controlled valve 53 is connected to the first air inlet of the two-hand control valve, the air outlet of the third machine-controlled valve is connected to the second air inlet of the two-hand control valve, and the air outlet of the two-hand control valve is connected to the control air port of the air control valve.

[0079] In this embodiment, the second machine-controlled valve 53 and the third machine-controlled valve are both button machine-controlled valves. When the operator operates, he presses the second machine-controlled valve 53 with one hand and presses the third machine-controlled valve with the other hand, so that the gas passing through the air outlet of the first isolating valve 52 enters the first air inlet of the two-hand control valve through the second machine-controlled valve 53, and enters the second air inlet of the two-hand control valve through the third machine-controlled valve. When the air inlet pressures of the first air inlet and the second air inlet of the two-hand control valve are the same, the air outlet of the two-hand control valve can be opened, and the gas can flow to the control air port of the air control valve through the air outlet of the two-hand control valve.

[0080] Specifically, the two-hand control valve includes a two-hand control valve 551 for opening the cover and a two-hand control valve 552 for closing the cover, the air control valve includes an air control valve 21 for opening the cover and an air control valve 22 for closing the cover, and the third machine-controlled valve includes a machine-controlled valve 541 for opening the cover and a machine-controlled valve 542 for closing the cover. The air outlet of the second machine-controlled valve 53 is connected to the first air inlet of the two-hand control valve 551 for opening the cover and the first air inlet of the two-hand control valve 552 for closing the cover, the air inlet of the machine-controlled valve 541 for opening the cover and the air inlet of the machine-controlled valve 542 for closing the cover are both connected to the air outlet of the first isolation valve 52, the air outlet of the machine-controlled valve 541 for opening the cover is connected to the second air inlet of the two-hand control valve 551 for opening the cover, the air outlet of the two-hand control valve 551 for opening the cover is connected to the control air port of the air control valve 21 for opening the cover, the air inlet of the air control valve 21 for opening the cover is connected to the air inlet pipeline 1, and the air outlet of the air control valve 21 for opening the cover is connected to the rod chamber of the lifting cylinder 101. The air outlet of the closing mechanical control valve 542 is connected to the second air inlet of the closing double-hand control valve 552, the air outlet of the closing double-hand control valve 552 is connected to the control air port of the closing air control valve 22, the air inlet of the closing air control valve 22 is connected to the air inlet pipeline 1, and the air outlet of the closing air control valve 22 is connected to the rodless chamber of the lifting cylinder 101.

[0081] In this embodiment, in order to facilitate the operator to identify more easily, when opening the cover, one hand operates the second mechanically controlled valve 53 and the other hand operates the cover-opening mechanically controlled valve 541; when closing the cover, one hand operates the second mechanically controlled valve 53 and the other hand operates the cover-closing mechanically controlled valve 542.

[0082] The second mechanically controlled valve 53 can be arranged in parallel with the lid opening mechanically controlled valve 541 and the lid closing mechanically controlled valve 542, or in series; similarly, the lid opening mechanically controlled valve 541 and the lid closing mechanically controlled valve 542 can be arranged in parallel or in series. The lid opening air-controlled valve 21 and the lid closing air-controlled valve 22 can be arranged in parallel or in series.

[0083] In this embodiment, the second mechanical control valve 53 and the lid closing mechanical control valve 542 are both two-position three-way valves, and the lid opening mechanical control valve 541 is a two-position five-way valve. The second mechanical control valve 53, the lid opening mechanical control valve 541 and the lid closing mechanical control valve 542 are arranged in series. The air outlet of the second mechanically controlled valve 53 is connected to an air outlet pipeline 56, and the air outlet pipeline 56 is connected to two air outlet branch pipelines, namely a first air outlet branch pipeline 561 and a second air outlet branch pipeline 562. The first air outlet branch pipeline 561 is communicated with the air inlet of the lid-opening mechanically controlled valve 541, the first air outlet of the lid-opening mechanically controlled valve 541 is communicated with the second air inlet of the lid-opening two-hand control valve 551, the second air outlet of the lid-opening mechanically controlled valve 541 is communicated with the air inlet of the lid-closing mechanically controlled valve 542, and the air outlet of the lid-closing mechanically controlled valve 542 is communicated with the second air inlet of the lid-closing two-hand control valve 552; the second air outlet branch pipeline 562 is connected to the fourth air inlet branch pipeline 571 and the fifth air inlet branch pipeline 572, the fourth air inlet branch pipeline 571 is communicated with the first air inlet of the lid-opening two-hand control valve 551, and the fifth air inlet branch pipeline 572 is communicated with the first air inlet of the lid-closing two-hand control valve 552.

[0084] The opening air control valve 21 uses a two-position five-way valve, and the closing air control valve 22 uses a two-position three-way valve. The opening air control valve 21 and the closing air control valve 22 are arranged in series, the first air inlet branch pipeline 11 is connected to the air inlet of the opening air control valve 21, the first air outlet of the opening air control valve 21 is connected to the rod cavity of the lifting cylinder 101, and the second air outlet is connected to the air inlet of the closing air control valve 22. The air outlet and the exhaust port of the closing air control valve 22 are selectively connected to the rodless cavity of the lifting cylinder 101.

[0085] In one embodiment, the first drive circuit 2 is provided with an open cover cut-off valve 25 and a closed cover cut-off valve 26. The open cover cut-off valve 25 is provided between the closed cover cut-off valve 26 and the rodless chamber of the lifting cylinder 101. The air outlet of the open cover air control valve 21 and the air outlet of the closed cover double-hand control valve 552 are both connected to the control air outlet of the open cover cut-off valve 25. The closed cover cut-off valve 26 is provided between the rod chamber of the lifting cylinder 101 and the exhaust pipeline 6. The control air outlet of the closed cover cut-off valve 26 is connected to the air outlet of the closed cover air control valve 22. The provision of the open cover cut-off valve 25 ensures that only after the open cover double-hand control valve 551 is opened and the open cover air control valve 21 is controlled to open, the lifting air rod of the lifting cylinder 101 can be retracted to lift the upper cover 401 upward. The setting of the closing isolation valve 26 ensures that only after the closing double-hand control valve 552 is opened and the closing air control valve 22 is controlled to open, the lifting gas rod of the lifting cylinder 101 can be extended to drive the upper cover 401 to descend.

[0086] The gas at the outlet of the two-hand control valve 551 for opening the cover flows to the control air port of the air control valve 21 for opening the cover, and controls the first air outlet of the air control valve 21 for opening the cover to open. After the first air outlet of the air control valve 21 for opening the cover is opened, the gas in the first air inlet branch pipeline 11 flows out through the first air outlet of the air control valve 21 for opening the cover, and a part of it flows to the rod chamber of the lifting cylinder 101, and the other part flows to the control air port of the isolation valve 25 for opening the cover, and controls the isolation valve 25 for opening the cover to open, so that the gas in the rodless chamber of the lifting cylinder 101 can be discharged through the isolation valve 25 for opening the cover, driving the lifting gas rod to contract, and realizing opening the cover.

[0087] Part of the gas at the outlet of the closing double-hand control valve 552 flows to the control air port of the closing air control valve 22 to control the outlet of the closing air control valve 22 to open; the other part flows to the opening partition valve 25 to control the opening partition valve 25. After the outlet of the closing air control valve 22 is opened, the gas in the first air inlet branch pipeline 11 flows to the closing air control valve 22 through the second outlet of the opening air control valve 21, and after flowing out through the outlet of the closing air control valve 22, part of it enters the rodless chamber of the lifting cylinder 101 through the opening partition valve 25, and the other part flows to the control air port of the closing partition valve 26 to control the opening of the closing partition valve 26, so that the gas in the rod chamber of the lifting cylinder 101 is discharged through the closing partition valve 26, driving the lifting gas rod to extend, and achieving closing.

[0088] Furthermore, a one-way valve 27 is provided between the first air outlet of the cover-opening air control valve 21 and the rod chamber of the lifting cylinder 101. The one-way valve 27 is used for one-way communication from the first air outlet of the cover-opening air control valve 21 to the rod chamber of the lifting cylinder 101. The air inlet of the cover-closing isolation valve 26 is connected between the one-way valve 27 and the rod chamber of the lifting cylinder 101. By providing the one-way valve 27, it is prevented that the gas in the rod chamber of the lifting cylinder 101 flows to the cover-opening air control valve 21 and is discharged from the exhaust port of the cover-opening air control valve 21 when the cover is closed.

[0089] In one embodiment, the first drive circuit 2 is further provided with a first shuttle valve 23 and a second shuttle valve 24. The first air inlet of the first shuttle valve 23 is connected to the air outlet of the cover-opening air control valve 21, and the air outlet of the first shuttle valve 23 is connected to the rod chamber of the lifting cylinder 101 and the first air inlet of the second shuttle valve 24; the second air inlet of the second shuttle valve 24 is connected to the air outlet of the cover-closing double-hand control valve 552, and the air outlet of the second shuttle valve 24 is connected to the control air outlet of the cover-opening isolation valve 25. When the cover is opened, the gas at the first air outlet of the cover-opening air control valve 21 flows to the first air inlet of the first shuttle valve 23, flows to the rod chamber of the lifting cylinder 101 and the first air inlet of the second shuttle valve 24 through the air outlet of the first shuttle valve 23, and flows to the control air outlet of the cover-opening isolation valve 25 through the air outlet of the second shuttle valve 24, thereby controlling the cover-opening isolation valve 25 to open. When the cover is closed, part of the gas from the outlet of the closing double-hand control valve 552 flows to the second air inlet of the second shuttle valve 24, and flows to the control air port of the opening isolation valve 25 through the outlet of the second shuttle valve 24, thereby controlling the opening isolation valve 25 to open.

[0090] In one embodiment, the first drive circuit 2 is further provided with a first speed control valve 28 and a second speed control valve 29. The first speed control valve 28 is provided at the rod chamber of the lifting cylinder 101 to control the speed of gas entering and exiting the rod chamber of the lifting cylinder 101; the second speed control valve 29 is provided at the rodless chamber of the lifting cylinder 101 to control the speed of gas entering and exiting the rodless chamber of the lifting cylinder 101. By providing the first speed control valve 28 and the second speed control valve 29, the stability of the lid when opening and closing is ensured.

[0091] Furthermore, the first speed control valve 28 is a pilot-operated check valve speed regulating valve, and the air outlet of the cover closing air control valve 22 is connected to the control air outlet of the pilot-operated check valve speed regulating valve, which is used to control the rod chamber of the lifting cylinder 101 to be connected to the air inlet of the cover closing isolation valve 26 through the pilot-operated check valve speed regulating valve. When closing the cover, the gas through the air outlet of the cover closing air control valve 22 controls the pilot-operated check valve speed regulating valve to open, and then the gas in the rod chamber of the lifting cylinder 101 can flow to the cover closing isolation valve 26 through the first speed control valve 28 for discharge, further ensuring the safety when closing the cover.

[0092] This embodiment also provides a pneumatic control method for a vacuum chamber upper cover driving device, which is applied to the pneumatic control system of the vacuum chamber upper cover driving device. The pneumatic control method includes the following steps:

[0093] S10, the gas in the air intake pipeline 1 enters the second drive circuit 3, controls the extension of the locking gas rod of the locking cylinder 303, drives the locking member 302 to lock the locking disk 301, so as to fix the rotating mechanism 200; at the same time, part of the gas flowing from the air intake pipeline 1 to the rodless chamber of the locking cylinder 303 enters the first isolating valve 52 through the first protective gas circuit 4, and controls the first isolating valve 52 to open.

[0094] The gas in the intake pipeline 1 enters the second drive circuit 3 through the second intake branch pipeline 12. Part of the gas flowing out through the outlet of the first mechanically controlled valve 31 enters the rodless chamber of the locking cylinder 303, and the other part enters the first protective air circuit 4. The first isolating valve 52 is controlled to open, and the gas in the rod chamber of the locking cylinder 303 flows to the exhaust port of the first mechanically controlled valve 31 through the intake throttle valve 32 and is discharged through the muffler.

[0095] S20, the gas in the air intake pipeline 1 enters the opening and closing cover protection circuit 5, and under the operation of the operator's hands, the gas enters the double-hand control valve through the first isolation valve 52, and the double-hand control valve controls the air control valve to open.

[0096] The gas in the air intake pipeline 1 enters the opening and closing cover protection circuit 5 through the third air intake branch pipeline 13. At this time, the first isolation valve 52 is opened. Under the operation of the operator's hands, the gas enters the double-hand control valve through the first isolation valve 52, and the double-hand control valve controls the air control valve to open.

[0097] Specifically, when opening the cover, the operator presses the second mechanical control valve 53 with one hand and presses the cover-opening mechanical control valve 541 with the other hand, so that the gas passing through the air outlet of the first isolating valve 52 enters the first air inlet of the cover-opening two-hand control valve 551 through the second mechanical control valve 53, and enters the second air inlet of the cover-opening two-hand control valve 551 through the cover-opening mechanical control valve 541. When the air inlet pressures of the first air inlet and the second air inlet of the cover-opening two-hand control valve 551 are the same, the air outlet of the cover-opening two-hand control valve 551 can be opened, and the gas can flow through the air outlet of the cover-opening two-hand control valve 551 to the control air port of the cover-opening air control valve 21.

[0098] When closing the cover, the operator presses the second mechanically controlled valve 53 with one hand and presses the closing mechanically controlled valve 542 with the other hand, so that the gas passing through the air outlet of the first isolating valve 52 enters the first air inlet of the closing double-hand control valve 552 through the second mechanically controlled valve 53, and enters the second air inlet of the closing double-hand control valve 552 through the opening mechanically controlled valve 541 and the closing mechanically controlled valve 542. When the air inlet pressures of the first air inlet and the second air inlet of the closing double-hand control valve 552 are the same, the air outlet of the closing double-hand control valve 552 can be opened, and the gas can flow through the air outlet of the closing double-hand control valve 552 to the control air port of the closing air control valve 22.

[0099] S30, the gas in the air intake pipeline 1 enters the first drive circuit 2, and after the air control valve is opened, the gas enters the lifting cylinder 101 through the air control valve, and the lifting cylinder 101 drives the upper cover 401 to open and close.

[0100] The gas in the air intake pipeline 1 enters the first drive circuit 2 through the first air intake branch pipeline 11. After the cylinder valve is opened, the gas enters the lifting cylinder 101 through the air control valve, and the lifting cylinder 101 drives the upper cover 401 to open and close.

[0101] Specifically, refer to Figure 3 The arrow direction shown in the figure represents the flow direction of the gas. The pneumatic control method when the lifting cylinder 101 drives the upper cover 401 to open includes the following steps:

[0102] S301, when the gas from the air outlet of the open-cover double-hand control valve 551 enters the control air port of the open-cover air control valve 21, after the open-cover air control valve 21 is controlled to open, the gas in the air intake pipeline 1 enters the first drive circuit 2 through the open-cover air control valve 21.

[0103] S302, a part of the gas entering the first drive circuit 2 enters the control air port of the cover-opening isolation valve 25 to open the cover-opening isolation valve 25; the other part enters the rod chamber of the lifting cylinder 101 to drive the lifting gas rod of the lifting cylinder 101 to contract, and the gas in the rodless chamber of the lifting cylinder 101 is discharged through the cover-opening isolation valve 25 to drive the upper cover 401 to rise and open the upper cover 401.

[0104] After the cover-opening air control valve 21 is opened, the gas in the first air inlet branch pipeline 11 flows in through the air inlet of the cover-opening air control valve 21, and flows out through the first air outlet of the cover-opening air control valve 21 to the first air inlet of the first shuttle valve 23. Part of the gas flowing out through the air outlet of the first shuttle valve 23 flows to the rod chamber of the lifting cylinder 101 through the one-way valve 27 and the first speed control valve 28; the other part of the gas flows to the control air port of the cover-opening isolation valve 25 through the first air inlet and air outlet of the second shuttle valve 24, and the cover-opening isolation valve 25 is controlled to open, so that the gas in the rodless chamber of the lifting cylinder 101 can flow to the exhaust port of the cover-closing air control valve 22 through the second speed control valve 29 and the cover-opening isolation valve 25 to be discharged, thereby causing the lifting gas rod of the lifting cylinder 101 to contract, driving the upper cover 401 to open.

[0105] Reference Figure 4 The arrow direction shown in the figure represents the flow direction of the gas. The pneumatic control method when the lifting cylinder 101 drives the upper cover 401 to close includes the following steps:

[0106] S301ˊ, when the gas from the air outlet of the closed-lid double-hand control valve 552 enters the control air port of the closed-lid air control valve 22 and the control air port of the open-lid isolation valve 25, after the closed-lid air control valve 22 and the open-lid isolation valve 25 are controlled to open, the gas in the air intake pipeline 1 enters the first drive circuit 2 through the closed-lid air control valve 22.

[0107] S302ˊ, a part of the gas entering the first drive circuit 2 enters the rodless chamber of the lifting cylinder 101 through the control air port of the open cover isolation valve 25, driving the lifting gas rod of the lifting cylinder 101 to extend; the other part enters the control air port of the closing cover isolation valve 26, controlling the closing cover isolation valve 26 to open; the gas in the rod chamber of the lifting cylinder 101 can be discharged through the closing cover isolation valve 26 to drive the upper cover 401 to descend and close the upper cover 401.

[0108] Part of the gas flowing out of the air outlet of the closed double-hand control valve 552 flows to the control air outlet of the closed air control valve 22, controlling the air outlet of the closed air control valve 22 to be opened; the other part flows to the second air inlet of the second shuttle valve 24, and flows to the open-cover isolation valve 25 through the outlet of the second shuttle valve 24, controlling the open-cover isolation valve 25 to be opened. Part of the gas flowing out of the air outlet of the closed air control valve 22 enters the rodless chamber of the lifting cylinder 101 through the open-cover isolation valve 25 and the second speed control valve 29, and the other part flows to the control air outlet of the closed isolation valve 26, controlling the closed isolation valve 26 to be opened, so that the gas in the rod chamber of the lifting cylinder 101 can flow to the closed isolation valve 26, and flow into the exhaust pipe 6 through the air outlet of the closed isolation valve 26 for discharge.

[0109] Specifically, the first speed control valve 28 is arranged at the rod chamber of the lifting cylinder 101. The first speed control valve 28 is a pilot-operated one-way valve speed regulating valve. The air outlet of the closing air control valve 22 is connected to the control air port of the pilot-operated one-way valve speed regulating valve. The pneumatic control method also includes the following steps: a part of the gas entering the first drive circuit 2 enters the rodless chamber of the lifting cylinder 101 through the control air port of the opening isolation valve 25, driving the lifting air rod of the lifting cylinder 101 to extend; the other part enters the control air port of the closing isolation valve 26 and the control air port of the pilot-operated one-way valve speed regulating valve, controls the closing isolation valve 26 to open, and controls the rod chamber of the lifting cylinder 101 to be connected to the air inlet of the closing isolation valve 26 through the pilot-operated one-way valve speed regulating valve. The gas in the rod chamber of the lifting cylinder 101 enters the closing isolation valve 26 through the pilot-operated one-way valve speed regulating valve and is discharged.

[0110] In the pneumatic control method, when opening and closing the cover, the gas in the air intake line 1 first enters the second drive circuit 3 to drive the locking cylinder 303 to lock the rotating mechanism 200, and at the same time, the gas in the second drive circuit 3 enters the first isolation valve 52 through the first protection gas circuit 4 to control the first isolation valve 52 to open. Under the operation of the operator's hands, the gas in the air intake line 1 enters the double-hand control valve through the first isolation valve 52, and the double-hand control valve controls the air control valve to open. After the air control valve is opened, the gas in the air intake line 1 enters the lifting cylinder 101 through the air control valve, and the lifting cylinder 101 drives the upper cover 401 to open and close. The pneumatic control method improves the safety of the cover opening and closing operation and ensures the sealing of the vacuum chamber 400.

[0111] In order to ensure the accuracy of the closing position, before the gas in the intake pipe 1 enters the second drive circuit 3, the rotating mechanism 200 drives the lifting cylinder 101 to rotate to the set position, and then the fourth machine-controlled valve 51 is opened; after the fourth machine-controlled valve 51 is opened, the gas in the intake pipe 1 enters the second drive circuit 3 and the opening and closing cover protection circuit 5; the gas entering the second drive circuit 3 enters the first isolating valve 52 through the first protection gas circuit 4 to control the opening of the first isolating valve 52; the gas entering the opening and closing cover protection circuit 5 enters the two-hand control valve through the fourth machine-controlled valve 51 and the first isolating valve 52.

[0112] Reference Figure 5 The direction of the arrow shown represents the flow direction of the gas. The pneumatic control method provided in this embodiment also includes a pneumatic control method when the opening and closing of the cover stops halfway. When the opening and closing of the cover stops halfway, the second machine-controlled valve 53 is closed, and the gas flowing from the air intake pipeline 1 to the third air intake branch pipeline 13 cannot provide gas to the opening double-hand control valve 551 and the closing double-hand control valve 552 through the fourth machine-controlled valve 51 and the first isolating valve 52 through the second machine-controlled valve 53, and thus cannot control the opening of the opening air-controlled valve 21 and the closing air-controlled valve 22. The gas in the first air intake branch pipeline 11 cannot flow to the control air port of the opening isolating valve 25, the control air port of the closing isolating valve 26, the control air port of the pilot-operated one-way valve speed regulating valve and the lifting cylinder 101 through the opening air-controlled valve 21 and the closing air-controlled valve 22. Therefore, the lifting cylinder 101 will not fall due to the stopping of the opening and closing of the cover at this time, which greatly improves the safety of operating the lifting cylinder 101.

[0113] Reference Figure 6The arrow direction shown represents the flow direction of the gas. The pneumatic control method provided in this embodiment also includes a pneumatic control method for controlling the rotation of the rotating mechanism 200. The operator rotates the first mechanical control valve 31 so that the air outlet of the first mechanical control valve 31 is connected to the rod chamber of the locking cylinder 303, and the exhaust port is connected to the rodless chamber of the locking cylinder 303. The gas in the intake pipeline 1 enters the second intake branch pipeline 12, and the gas in the second intake branch pipeline 12 enters through the air inlet of the first mechanical control valve 31. The gas flowing out of the air outlet enters the rod chamber of the locking cylinder 303 through the intake throttle valve 32, and the gas in the rodless chamber of the locking cylinder 303 is discharged through the exhaust port of the first mechanical control valve 31. The locking gas rod contracts to drive the locking member 302 to unlock the rotating mechanism 200. At this time, since the pressure of the exhaust port of the first mechanical control valve 31 is much lower than the pressure of the control port of the first isolation valve 52 , the gas flowing out of the rodless chamber of the locking cylinder 303 will not enter the first protection gas path 4 . At this time, the gas entering the third intake branch pipeline 13 in the intake pipeline 1 flows to the second air inlet of the first shuttle valve 23 through the fourth machine-controlled valve 51, and a part of the gas flowing out through the air outlet of the first shuttle valve 23 enters the rod chamber of the lifting cylinder 101 through the one-way valve 27 and the pilot one-way valve speed regulating valve; the other part flows to the first air inlet of the second shuttle valve 24, and through the air outlet of the second shuttle valve 24 to the control air port of the open cover isolation valve 25, so as to control the open cover isolation valve 25 to open, and the gas in the rodless chamber of the lifting cylinder 101 flows to the exhaust port of the closing cover air control valve 22 through the second speed control valve 29 and the open cover isolation valve 25 for discharge, thereby ensuring that during the process of the rotating mechanism 200 driving the upper cover 401 to rotate, the upper cover 401 is always at the set lifting height and will not fall, thereby improving safety.

[0114] The above contents are only preferred embodiments of the present invention. For ordinary technicians in this field, according to the concept of the present invention, there will be changes in the specific implementation methods and application scopes. The content of this specification should not be understood as limiting the present invention.

Claims

1. A pneumatic control system for a cover driving device of a vacuum chamber, characterized in that: The upper cover driving device comprises a lifting cylinder (101), a rotating mechanism (200) and a locking mechanism (300); the driving end of the lifting cylinder (101) is connected to the upper cover (401) and is used to drive the upper cover (401) to rise and fall; the locking mechanism (300) comprises a locking disk (301), a locking member (302) and a locking cylinder (303); one end of the rotating mechanism (200) is connected to the fixed end of the lifting cylinder (101), and the other end is connected to the locking disk (301); the locking cylinder (303) drives the locking member (302) to extend and retract, and the locking member (302) is used to lock the locking disk (301); wherein, The pneumatic control system comprises an air intake pipeline (1), a first drive circuit (2), a second drive circuit (3) and an opening and closing cover protection circuit (5); one end of the air intake pipeline (1) is connected to an air source, and the other end is connected to the first drive circuit (2), the second drive circuit (3) and the opening and closing cover protection circuit (5); The first drive circuit (2) is connected to the lifting cylinder (101) and is used to drive the lifting gas rod of the lifting cylinder (101) to extend and retract; the first drive circuit (2) is provided with an air control valve, the air inlet of the air control valve is connected to the air inlet pipeline (1), the air outlet of the air control valve is connected to the air inlet chamber of the lifting cylinder (101), and the air outlet of the air control valve is connected to the air outlet chamber of the lifting cylinder (101); The second drive circuit (3) is connected to the locking cylinder (303) and is used to control the extension and retraction of the locking gas rod of the locking cylinder (303); The opening and closing cover protection circuit (5) comprises a first isolating valve (52) and a two-hand control valve; the second drive circuit (3) is connected to the first isolating valve (52) via a first protection gas circuit (4); the first protection gas circuit (4) is used to control the switch of the first isolating valve (52); the air intake pipeline (1) is connected to the two-hand control valve via the first isolating valve (52); and the two-hand control valve controls the switch of the air control valve.

2. The pneumatic control system of the upper cover driving device of the vacuum chamber according to claim 1, characterized in that: The second drive circuit (3) is also provided with a first machine-controlled valve (31), the air inlet of the first machine-controlled valve (31) is connected to the air inlet pipeline (1), the air outlet of the first machine-controlled valve (31) is selectively connected to the rodless chamber or the rod chamber of the locking cylinder (303), and the air outlet of the first machine-controlled valve (31) is selectively connected to the rod chamber or the rodless chamber of the locking cylinder (303); The first protective gas circuit (4) is connected between the first machine-controlled valve (31) and the rodless chamber of the locking cylinder (303). When the air outlet of the first machine-controlled valve (31) is connected to the rodless chamber of the locking cylinder (303), the gas at the air outlet of the first machine-controlled valve (31) can enter the first protective gas circuit (4).

3. The pneumatic control system of the upper cover driving device of the vacuum chamber according to claim 1, characterized in that: The opening and closing cover protection circuit (5) also includes a second machine-controlled valve (53) and a third machine-controlled valve, wherein the air inlet of the second machine-controlled valve (53) and the air inlet of the third machine-controlled valve are both connected to the air outlet of the first isolation valve (52); the air outlet of the second machine-controlled valve (53) is connected to the first air inlet of the two-hand control valve, the air outlet of the third machine-controlled valve is connected to the second air inlet of the two-hand control valve, and the air outlet of the two-hand control valve is connected to the control air port of the air control valve.

4. The pneumatic control system of the upper cover driving device of the vacuum chamber according to claim 3, characterized in that: The two-hand control valve comprises an open-cover two-hand control valve (551) and a closed-cover two-hand control valve (552), the air-controlled valve comprises an open-cover air-controlled valve (21) and a closed-cover air-controlled valve (22), and the third machine-controlled valve comprises an open-cover machine-controlled valve (541) and a closed-cover machine-controlled valve (542); The air outlet of the second mechanical control valve (53) is communicated with the first air inlet of the cover-opening two-hand control valve (551) and the first air inlet of the cover-closing two-hand control valve (552); the air inlet of the cover-opening mechanical control valve (541) and the air inlet of the cover-closing mechanical control valve (542) are both communicated with the air outlet of the first isolation valve (52); the air outlet of the cover-opening mechanical control valve (541) is communicated with the second air inlet of the cover-opening two-hand control valve (551); the air outlet of the cover-opening two-hand control valve (551) is communicated with the control air port of the cover-opening air control valve (21); the air inlet of the cover-opening air control valve (21) is communicated with the air inlet pipeline (1); and the air outlet of the cover-opening air control valve (21) is communicated with the rod chamber of the lifting cylinder (101); The air outlet of the closing mechanical control valve (542) is connected to the second air inlet of the closing double-hand control valve (552), the air outlet of the closing double-hand control valve (552) is connected to the control air port of the closing air control valve (22), the air inlet of the closing air control valve (22) is connected to the air inlet pipeline (1), and the air outlet of the closing air control valve (22) is connected to the rodless chamber of the lifting cylinder (101).

5. The pneumatic control system of the upper cover driving device of the vacuum chamber according to claim 4, characterized in that: The first drive circuit (2) is provided with an open cover isolation valve (25) and a closed cover isolation valve (26); the open cover isolation valve (25) is arranged between the closed cover air control valve (22) and the rodless chamber of the lifting cylinder (101); the air outlet of the open cover air control valve (21) and the air outlet of the closed cover double-hand control valve (552) are both connected to the control air port of the open cover isolation valve (25); the closed cover isolation valve (26) is arranged between the rod chamber of the lifting cylinder (101) and the exhaust pipeline (6); the control air port of the closed cover isolation valve (26) is connected to the air outlet of the closed cover air control valve (22).

6. The pneumatic control system of the upper cover driving device of the vacuum chamber according to claim 5, characterized in that: The first drive circuit (2) is also provided with a first shuttle valve (23) and a second shuttle valve (24); the first air inlet of the first shuttle valve (23) is communicated with the air outlet of the cover-opening air control valve (21); the air outlet of the first shuttle valve (23) is communicated with the rod chamber of the lifting cylinder (101) and the first air inlet of the second shuttle valve (24); the second air inlet of the second shuttle valve (24) is communicated with the air outlet of the cover-closing double-hand control valve (552); the air outlet of the first shuttle valve (23) is communicated with the control air port of the cover-opening isolation valve (25); And / or, the first drive circuit (2) is further provided with a first speed control valve (28) and a second speed control valve (29), the first speed control valve (28) being provided at the rod chamber of the lifting cylinder (101) for controlling the speed of gas entering and exiting the rod chamber of the lifting cylinder (101); the second speed control valve (29) being provided at the rodless chamber of the lifting cylinder (101) for controlling the speed of gas entering and exiting the rodless chamber of the lifting cylinder (101); The first speed control valve (28) is a pilot-operated one-way valve speed regulating valve, and the air outlet of the closing air control valve (22) is connected to the control air port of the pilot-operated one-way valve speed regulating valve, which is used to control the rod chamber of the lifting cylinder (101) to be connected to the air inlet of the closing isolation valve (26) through the pilot-operated one-way valve speed regulating valve.

7. The pneumatic control system of the upper cover driving device of the vacuum chamber according to claim 1, characterized in that: The opening and closing cover protection circuit (5) is also provided with a fourth machine-controlled valve (51), the air inlet of the fourth machine-controlled valve (51) is connected to the air inlet pipeline (1), and the air outlet of the fourth machine-controlled valve (51) is connected to the air inlet of the first isolation valve (52); when the rotating mechanism (200) drives the lifting cylinder (101) to rotate to a set position, the fourth machine-controlled valve (51) opens.

8. A pneumatic control method for a cover driving device of a vacuum chamber, characterized in that: A pneumatic control system for an upper cover driving device of a vacuum chamber according to any one of claims 1 to 7, wherein the pneumatic control method comprises the following steps: The gas in the air intake pipeline (1) enters the second drive circuit (3), controls the locking gas rod of the locking cylinder (303) to extend, drives the locking member (302) to lock the locking disk (301), so as to fix the rotating mechanism (200); at the same time, part of the gas flowing from the air intake pipeline (1) to the rodless chamber of the locking cylinder (303) enters the first isolation valve (52) through the first protective gas path (4), and controls the first isolation valve (52) to open; The gas in the air inlet pipeline (1) enters the opening and closing cover protection circuit (5), and under the operation of the operator's hands, the gas enters the two-hand control valve through the first isolation valve (52), and the two-hand control valve controls the air control valve to open; The gas in the air intake pipeline (1) enters the first drive circuit (2), and after the air control valve is opened, the gas enters the lifting cylinder (101) through the air control valve, and the lifting cylinder (101) drives the upper cover (401) to open and close.

9. The pneumatic control method of the upper cover driving device according to claim 8, characterized in that: The opening and closing cover protection circuit (5) is further provided with a fourth mechanically controlled valve (51), the air inlet of the fourth mechanically controlled valve (51) being in communication with the air inlet pipeline (1), and the air outlet of the fourth mechanically controlled valve (51) being in communication with the air inlet of the first isolation valve (52); before the gas in the air inlet pipeline (1) enters the second drive circuit (3), the fourth mechanically controlled valve (51) is opened after the rotating mechanism (200) drives the lifting cylinder (101) to rotate to a set position; After the fourth mechanical control valve (51) is opened, the gas in the air intake pipeline (1) enters the second drive circuit (3) and the opening and closing cover protection circuit (5); The gas entering the second drive circuit (3) enters the first isolation valve (52) through the first protective gas circuit (4), and controls the first isolation valve (52) to open; The gas entering the opening and closing cover protection circuit (5) enters the two-hand control valve via the fourth mechanical control valve (51) and the first isolation valve (52).

10. The pneumatic control method of the upper cover driving device according to claim 8, characterized in that: The two-hand control valve comprises an open-cover two-hand control valve (551) and a closed-cover two-hand control valve (552); the air control valve comprises an open-cover air control valve (21) and a closed-cover air control valve (22); the first drive circuit (2) is provided with an open-cover isolation valve (25) and a closed-cover isolation valve (26); the air outlet of the open-cover air control valve (21) is communicated with the control air outlet of the open-cover isolation valve (25); the closed-cover isolation valve (26) is provided between the rod chamber of the lifting cylinder (101) and the exhaust pipeline (6); the control air outlet of the closed-cover isolation valve (26) is communicated with the air outlet of the closed-cover air control valve (22); the air outlet of the closed-cover two-hand control valve (552) is communicated with the control air outlet of the open-cover isolation valve (25); the pneumatic control method further comprises the following steps: When the gas from the gas outlet of the cover-opening two-hand control valve (551) enters the control gas port of the cover-opening gas control valve (21), the cover-opening gas control valve (21) is controlled to open, and then the gas in the air inlet pipeline (1) enters the first drive circuit (2) through the cover-opening gas control valve (21); A portion of the gas entering the first drive circuit (2) enters the control air port of the cover-opening isolation valve (25) to open the cover-opening isolation valve (25); the other portion enters the rod chamber of the lifting cylinder (101) to drive the lifting gas rod of the lifting cylinder (101) to contract, and the gas in the rodless chamber of the lifting cylinder (101) is discharged through the cover-opening isolation valve (25) to drive the upper cover (401) to rise; When the gas from the gas outlet of the closing double-hand control valve (552) enters the control gas port of the closing gas control valve (22) and the control gas port of the opening isolation valve (25), the closing gas control valve (22) and the opening isolation valve (25) are controlled to open, and then the gas in the air inlet pipeline (1) enters the first drive circuit (2) through the closing gas control valve (22); A portion of the gas entering the first drive circuit (2) enters the rodless chamber of the lifting cylinder (101) through the control air port of the open cover isolation valve (25), driving the lifting air rod of the lifting cylinder (101) to extend; the other portion enters the control air port of the closed cover isolation valve (26), controlling the opening of the closed cover isolation valve (26); the gas in the rod chamber of the lifting cylinder (101) can be discharged through the closed cover isolation valve (26) to drive the upper cover (401) to descend.

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