Coating device

Abstract

Provided is a coating device capable of suppressing the crystal state of a formed coating film from becoming uneven. Specifically, the coating device is provided with: a stage on which a substrate is placed; a coater that forms a coating film on the substrate by discharging a coating liquid from a nozzle while moving relative to the substrate placed on the stage; and a dryer that dries the coating film on the substrate, and adjusts a drying promotion force of the dryer that promotes drying corresponding to the portion of the coating film on the basis of drying distribution information of the coating film on the substrate.

Description

Technical Field

[0001] The present invention relates to a coating device for forming a coating film on a substrate, and more particularly to a coating device capable of drying the coating film while suppressing the crystal state of the coating film from becoming non-uniform. Background Art

[0002] In recent years, a substrate W having a uniform thin film formed thereon (referred to as a coated substrate) has been used in various applications. For example, when a coating film having a uniform film thickness is formed on a substrate, the coating is formed by a coating device having a slit-shaped nozzle. Figure 8 As shown, the coating device comprises: a carrier 100 for mounting a substrate W; and a coater 101 having a slit-shaped nozzle for ejecting a coating liquid. While ejecting the coating liquid from the slit of the nozzle, the substrate W and the coater 101 are moved relative to each other, thereby forming a coating film C of a specified thickness on the substrate W.

[0003] Then, the formed coated substrate W is carried out from the coating apparatus and then dried by a drying device 102 that is different from the coating apparatus (for example, refer to Patent Document 1 listed below).

[0004] Prior art literature

[0005] Patent Literature

[0006] Patent Document 1: Japanese Patent Application Publication No. 2003-017402 Summary of the invention

[0007] Problems to be solved by the invention

[0008] However, in the above-mentioned coating device, there is a problem that the functionality of the formed coating film C cannot be fully exerted. That is, among the materials of the coating film C, there are materials whose functionality depends on the crystal state, such as the material of the perovskite solar cell. However, even if the coating film C formed by the coating device is dried under a uniform drying environment as in the drying device 102, the crystal state of the coating film C will be different depending on the part, and there is a problem that the functionality of the coating film C is impaired due to the unevenness of the crystal state.

[0009] The present invention has been made in view of the above-mentioned problems, and an object of the present invention is to provide a coating device capable of suppressing the crystal state of a formed coating film from becoming non-uniform.

[0010] Means for solving problems

[0011] In order to solve the above-mentioned problem, the coating device of the present invention comprises: a carrier for mounting a substrate; a coater which moves relative to the substrate mounted on the carrier while ejecting a coating liquid from a nozzle to form a coating film on the substrate; and a dryer which dries the coating film on the substrate, characterized in that a drying promoting force of the dryer for promoting drying is adjusted corresponding to the position of the coating film based on the drying distribution information of the coating film on the substrate.

[0012] According to the coating apparatus, the drying promotion force is adjusted according to the portion of the coating film based on the drying distribution information of the coating film, so that drying can be performed while suppressing the non-uniformity of the crystal state of the coating film.

[0013] That is, since the drying state of the coating film on the substrate can be understood based on the drying distribution information, the drying promotion force of the dryer, that is, the output for drying, is adjusted according to the drying distribution information corresponding to the coating film. Specifically, the drying promotion force is weakened at the part where the drying is relatively advanced, and the drying promotion force is strengthened at the part where the drying is relatively delayed to perform drying. As a result, as the coating film as a whole, by suppressing the unevenness of the drying state, the crystals of the coating film tend to grow significantly, and the crystalline state of the coating film can be suppressed from becoming uneven.

[0014] Furthermore, the drying distribution information may be periodically updated according to the drying state of the formed coating film.

[0015] According to this configuration, even when the drying state of the coating film changes with production, the drying distribution information can be updated to suppress the non-uniformity of the drying state in accordance with the change in the drying state. In addition, the drying distribution information can be updated every multiple substrates or every substrate.

[0016] Furthermore, the drying distribution information may be acquired based on the drying state of the coating film immediately after coating, and the coating film on the substrate may be dried using the drying acceleration force adjusted based on the acquired drying distribution information.

[0017] According to this configuration, since the drying distribution information is obtained based on the drying state of the coating film immediately after coating, the drying promotion force can be adjusted based on the drying state of the coating film immediately after the coating film is formed. Therefore, the formed coating film can be dried while suppressing the unevenness of the drying state.

[0018] Furthermore, the dryer may be provided in the coater, and may be configured to perform drying while adjusting the drying acceleration force based on the drying distribution information immediately after the coating film is formed.

[0019] According to this configuration, the coating liquid can be dried based on the drying distribution information immediately after landing on the substrate, so that a state in which the drying state becomes non-uniform due to natural drying immediately after landing can be avoided.

[0020] As a specific form of the drying accelerating force, the dryer may supply air to the coating film to dry it, and the drying accelerating force may be exerted by adjusting the air supply amount of the dryer.

[0021] As a specific form of the drying accelerating force, the dryer may supply air to the coating film to dry it, and the drying accelerating force may be exerted by adjusting the distance between a supply port of the dryer that blows air and the coating film.

[0022] In addition, it can also be configured that the dryer has a shape extending in a width direction orthogonal to the coating direction, wherein the coating direction is a direction in which the coater moves in one direction to form a coating film, and the supply port of the dryer has a partition portion divided in the width direction, and the air supply amount is adjusted according to each of the partition portions.

[0023] According to this configuration, since the supply port of the dryer has the partitioning portion divided in the width direction, the drying acceleration force can be adjusted by adjusting the air supply amount supplied from each partitioning portion.

[0024] Furthermore, the air supply amount of the supply port of the dryer may be adjusted by setting an opening area for each of the partitions.

[0025] According to this configuration, by appropriately setting the opening area for each partition portion, the amount of air supplied from the partition portion can be adjusted.

[0026] Effects of the Invention

[0027] According to the coating apparatus of the present invention, by suppressing the non-uniformity of the drying state of the coating film, it is possible to suppress the non-uniformity of the crystal state of the formed coating film. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 It is a perspective view showing a coating device according to an embodiment of the present invention.

[0029] Figure 2 It is a schematic diagram showing the vicinity of the leg portion of the coating unit.

[0030] Figure 3 It is a cross-sectional view of a coater provided with a dryer.

[0031] Figure 4 This is a diagram showing the dryer as viewed from the air ejection portion side.

[0032] Figure 5 This is a diagram schematically showing drying distribution information showing the drying state for each portion of the coating film.

[0033] Figure 6 The figures show the position of the dryer and the adjustment state of the drying promoting force, (a) shows the coating start end, (b) shows the center, and (c) shows the coating end.

[0034] Figure 7 It is a figure which shows another embodiment.

[0035] Figure 8 It is a figure which shows the conventional coating apparatus and drying apparatus. DETAILED DESCRIPTION

[0036] Embodiments of the present invention will be described using the drawings.

[0037] Figure 1 is a perspective view schematically showing a coating device according to one embodiment of the present invention. Figure 2 is a diagram showing the vicinity of the leg portion of the coating unit, Figure 3 It is a diagram showing a coater provided with a dryer.

[0038] like Figure 1 to Figure 3 As shown, the coating device forms a coating film of a liquid substance such as a chemical solution, an anti-etching agent solution (hereinafter referred to as a coating liquid) on a substrate W, and comprises a base 2, a carrier 21 for mounting the substrate W, and a coating unit 30 configured to be movable in a specific direction relative to the carrier 21.

[0039] In the following description, the direction in which the coating unit 30 moves is the X-axis direction, the direction perpendicular to the X-axis direction on the horizontal plane is the Y-axis direction, and the direction perpendicular to both the X-axis and Y-axis directions is the Z-axis direction.

[0040] A stage 21 is disposed at the center of the base 2. The stage 21 carries the carried-in substrate W. The stage 21 is provided with a substrate carrying surface 21a for carrying the substrate W and a substrate holding member (not shown) for holding the substrate W. Specifically, a plurality of suction holes are formed on the substrate carrying surface 21a of the stage 21, and by generating suction force in the suction holes, the substrate W can be sucked and held on the substrate carrying surface 21a.

[0041] In addition, a substrate lifting mechanism for lifting the substrate W is provided on the stage 21. Specifically, a plurality of pin holes are formed on the surface of the stage 21, and lifting pins (not shown) that can be lifted and lowered in the Z-axis direction are embedded in the pin holes. That is, when the substrate W is carried in with the lifting pins protruding from the surface of the stage 21, the front end of the lifting pins abuts against the substrate W and can hold the substrate W. Then, by lowering the lifting pins from this state and storing them in the pin holes, the substrate W can be placed on the substrate placement surface 21a.

[0042] In addition, the coating unit 30 discharges the coating liquid onto the substrate W to form a coating film C. Figure 1 , Figure 2 As shown, the coating unit 30 has a leg 31 connected to the base 2 and a coater 34 extending in the Y-axis direction, and is installed so as to be movable in the X-axis direction in a state of crossing the base 2 in the Y-axis direction. Specifically, rails 22 extending in the X-axis direction are respectively provided at both ends of the base 2 in the Y-axis direction, and the leg 31 is slidably installed on the rails 22. In addition, a linear motor is installed on the leg 31, and by driving and controlling the linear motor, the coating unit 30 moves in the X-axis direction and can stop at any position.

[0043] In addition, if Figure 2 As shown in the figure, a coater 34 for coating a coating liquid is installed on the leg 31 of the coating unit 30. Specifically, a track 37 extending in the Z-axis direction and a slider 35 sliding along the track 37 are provided on the leg 31, and these sliders 35 are connected to the coater 34. In addition, a ball screw mechanism driven by a servo motor is installed on the slider 35. By driving and controlling the servo motor, the slider 35 moves in the Z-axis direction and can stop at any position. That is, the coater 34 is supported so as to be contactable and separable with respect to the substrate W held on the stage 21.

[0044] In addition, if Figure 1 to Figure 3As shown, the coater 34 ejects the coating liquid to form a coating film C on the substrate W. The coater 34 is a columnar member having a shape extending in one direction, and is arranged to extend in a direction substantially perpendicular to the traveling direction of the coating unit 30. Specifically, the coater 34 has a side portion 34b extending in the vertical direction and a substrate facing surface 34d that is opposite to the substrate W via an inclined portion 34c formed in an inclined shape from the side portion 34b. In addition, a slit nozzle 34a is formed on the substrate facing surface 34d, and the coating liquid is ejected from the slit nozzle 34a. That is, on the substrate facing surface 34d of the coater 34, a slit nozzle 34a is formed in a manner extending in the longitudinal direction, and the coating liquid supplied to the coater 34 is ejected uniformly from the slit nozzle 34a in the entire longitudinal direction. Therefore, by moving the coating unit 30 in the X-axis direction while the coating liquid is ejected from the slit nozzle 34a, a coating film C having a certain thickness is formed on the substrate W in the entire length direction of the slit nozzle 34a. In addition, in the present embodiment, the direction in which the coating unit 30 is moved while the coating liquid is ejected from the slit nozzle 34a for coating the coating liquid is referred to as the coating direction (in the present embodiment, the X-axis direction), and the coating direction side is referred to as the coating progress side. In addition, the direction orthogonal to the coating direction is referred to as the width direction (in the present embodiment, the Y-axis direction).

[0045] The coater 34 is provided with a dryer 40. The dryer 40 dries the coating film C formed on the substrate W. Here, drying not only means complete drying but also includes drying in a semi-dry state and drying to a degree that promotes crystallization of the material compared to drying in the air.

[0046] In the present embodiment, the dryer 40 is integrally installed in the coater 34 in a manner adjacent to the side opposite to the coating side. That is, when the coater 34 moves in the coating direction while ejecting the coating liquid, the dryer 40 moves integrally with the coater 34, and immediately after the coating film C is formed on the substrate W, the coating film C is dried by the dryer 40.

[0047] The dryer 40 is provided along the longitudinal direction of the applicator 34, and has an air supply unit 41 for supplying air. In the present embodiment, the air supply unit 41 is arranged adjacent to the applicator 34.

[0048] The air supply unit 41 supplies air to the coating film C formed on the substrate W. In the present embodiment, the air supply unit 41 includes an air supply body 411 and an air blowing unit 42 , and the air stored in the air supply body 411 is blown out through the air blowing unit 42 .

[0049] The air supply main body 411 has a box shape and is formed into a shape extending in the length direction along the side surface 34b of the applicator 34. In the present embodiment, it is formed to have a size longer than the length direction size of the slit nozzle 34a. In addition, a chamber 41b for storing air for supplying to the coating film C is formed in the air supply main body 411, and the air supplied from the air supply source not shown can be temporarily stored in the chamber 41b. In the present embodiment, the chamber 41b is formed to be divided into three in the length direction, and these divided parts are connected to the air ejection part 42 through the connecting flow path formed narrower than the divided part. Therefore, when the air is supplied to the chamber 41b, it diffuses in each divided part and is temporarily stored in each divided part, and the connecting flow path 43 formed narrower than the divided part is formed, so that the air ejection part 42 is stably supplied. In addition, in the present embodiment, the air supply source is independently connected to the three divided parts, and the air supply amount can be adjusted for each divided part.

[0050] The air ejection part 42 guides the air supplied to the air supply body 411 to the coating film C. The air ejection part 42 has an opening 41c (supply port of the dryer 40 of the present invention) formed therein, and supplies air to the coating film C through the opening 41c.

[0051] In this embodiment, the air ejection portion 42 is formed by a block member 51 (see Figure 4 (b)) is formed. That is, a block storage portion 44 for storing the block member 51 is formed at the front end portion of the air supply main body 411, and air is supplied through the block member 51. That is, a supply flow path 51a for guiding air is formed in the block member 51, and an opening portion 41c is formed on the substrate W side. And, it is configured so that when the block member 51 is stored in the block storage portion 44, the supply flow path 51a is connected to the connecting flow path 43. Thus, the air supplied to the chamber 41b is supplied to the coating film through the connecting flow path 43, the supply flow path 51a, and the opening portion 41c.

[0052] In addition, the air ejection part 42 is formed to adjust the air volume in the length direction. Specifically, the air ejection part 42 is formed with a plurality of partitions 60 in the length direction. Figure 4 As shown in (a) of FIG. 1 , three partitions 60 are formed. And, the air volume can be adjusted for each of the partitions 60 .

[0053] Here, Figure 4 (a) is a view of the dryer 40 viewed from the air ejection portion 42 side, and the air ejection portion 42 is formed by three partitions 60. Figure 4As shown in (a), in this embodiment, the partitioning section 60 is formed by a block member 51, and is formed by arranging and storing three block members 51 in the length direction of the block storage section 44. That is, the three block members 51 are connected to the partition of the chamber 41b through the connecting flow path 43. Thus, the air supplied from the partition of the chamber 41b is supplied through the connecting flow path 43 and the opening 41c of the block member 51, and by adjusting the air volume of the supply source according to each partition of the chamber 41b, the air volume (air supply volume) can be adjusted according to each partition 60.

[0054] In addition, if Figure 4 As shown in (a), the opening portion 41c formed in the block member 51 is set to have an opening area for each partition portion 60. In this embodiment, for example, Figure 4 As shown in (a), the opening areas of the openings 41c at both ends in the longitudinal direction are set smaller than those of the openings 41c at the center. Thus, the air supply amount can be adjusted in the longitudinal direction of the air ejection portion 42. That is, the air supply amount can be reduced at the ends in the longitudinal direction, and the air supply amount can be increased at the center compared to the ends in the longitudinal direction.

[0055] In this way, by adjusting the air supply amount to the coating film, the drying promotion force that promotes the dry state of the coating film can be adjusted. The drying promotion force is the degree of promoting the dry state of the coating film, which is to make the moisture and volatile components fly from the coating film and enter the dry state. In this embodiment, the drying promotion force is adjusted by giving a difference to the air supply amount, and it can be adjusted by changing the supply amount from the air supply source and the opening area of ​​the opening portion 41c. For example, if the supply amount from the air supply source is the same, the air volume in the division 60 with a large opening area of ​​the opening portion 41c becomes more, thereby relatively promoting drying, and in the division with a small opening area of ​​the opening portion 41c, the air volume becomes less, thereby relatively inhibiting the promotion of drying. In addition, by adjusting the air volume of the air supply source, the air supply amount of the air ejection portion 42 as a whole can be adjusted to adjust the drying promotion force, and by adjusting the air supply amount of each division 60, the drying promotion force can be adjusted more finely according to each division 60 compared with the adjustment based on the opening area of ​​the block component 51.

[0056] In addition, these block components 51 are constructed as follows Figure 4 As shown in (b), the block 51 is formed of a single body and can be replaced. For example, the block components 51 located at both ends in the length direction can be replaced with the block located in the center. In addition, a plurality of block components 51 with different opening areas are prepared for the block components 51. By freely replacing the configuration of the block components 51, the air volume of the coating film can be adjusted, and the drying promotion force can be freely adjusted in advance.

[0057] In addition, the dryer 40 is formed so that the height position relative to the coating film can be adjusted. In the present embodiment, a lifting mechanism is provided on the side surface portion 34b of the coater 34, and the lifting mechanism is composed of a track extending in the Z direction and a slider moving along the track. By driving and controlling the lifting mechanism, the dryer 40 is displaced in the Z direction relative to the coater 34, thereby adjusting the height position of the dryer 40. Thus, by adjusting the height position of the dryer 40, the amount of air supplied from the air ejection portion 42 to the coating film can be adjusted. That is, by adjusting the height position of the dryer 40, the air volume reaching the coating film is adjusted, thereby adjusting the air supply amount, and as a result, the drying promotion force can be adjusted.

[0058] The coating device includes a control device that controls the driving of the various driving devices, controls the driving of the driving devices of each unit to execute a series of processing operations according to a pre-stored program, and performs various calculations required for the coating operation.

[0059] The control device stores drying distribution information for controlling the drying promotion force of the dryer 40. The drying distribution information is information indicating the drying distribution of the coating film C on the substrate W formed by the coater 34, and is data associating the site (position) and the drying state of the coating film C on the substrate W. The control device adjusts the drying promotion force on the site of the coating film C based on the drying distribution information.

[0060] Specifically, the drying distribution information is associated with the drying state of the region (part) of the coating film C. Figure 5 In the example shown, the coating direction (X-axis direction) is divided into five regions and the width direction (Y-axis direction) is divided into three regions to understand the degree of drying state of each region. Figure 5 In the figure, the degree of drying is relatively represented by A to C, where A represents the state where the drying progress is the greatest, and B and C represent the state where the drying progress is not great. For example, in the coating direction, the first coated part ( Figure 5 The right end of the coating film C is represented by A, indicating that drying is in progress. In addition, the central part of the coating film C is represented by C, indicating that the drying is relatively unprogressed because it is surrounded by the coating film C. Similarly, the degree of drying is also represented by A to C in the width direction, and the 15 regions of the coating film C are represented in the order of the coating direction and the width direction, such as AB, CC, etc. to indicate the drying state. For example, the first coated part ( Figure 5 The drying state of both ends of the coating film C in the width direction is AB, the drying state of the central position is CC, and the end in the coating direction ( Figure 5 The two ends in the width direction of the coating film C (on the left end side) are BC.

[0061] For such drying distribution information, the drying state data is obtained from the pre-formed coating film C. That is, the coating film C is formed by the coater 34 under the coating conditions set in advance, and the drying state in each area is grasped by observing the surface of the coating film C, and the drying state is used as the drying distribution information under the coating conditions. In addition, the drying distribution information may always use the pre-acquired drying distribution information, or may use the pre-acquired periodic drying distribution information, and appropriately update the drying distribution information according to the operating time of the coating device, batches, etc.

[0062] Then, the control device adjusts the drying promotion force of the dryer 40 based on the drying distribution information. That is, the drying promotion force is adjusted by setting the amount of air ejected from the coater 40 and the height position of the opening 41c according to the drying state of each area AA to CC of the coating film C and the opening area of ​​the block member 51 mounted on the dryer 40. In the present embodiment, the amount of air and the height position of the opening are adjusted by considering that the opening area of ​​the block member 51 at the center position is set larger than that of the block members 51 at the both end positions in the width direction.

[0063] Here, Figure 6 The diagram shows the adjustment states of the drying promotion force of the dryer 40 at (a) the coating start end, (b) the middle part, and (c) the coating end end. The left figure is a diagram viewed from the Y-axis direction, and the right figure is a diagram viewed from the X-axis direction. Figure 6 In the figure, the size and thickness of the arrows schematically indicate the air supply amount.

[0064] like Figure 6 As shown in (a), at the coating start end, the drying state is AB at both ends in the width direction and BC in the center, so the drying promotion force in the center is adjusted to be greater than that in the both ends in the width direction. Figure 6 As shown in the right side figure of (a), by setting the supply amount of air from the air supply source to be the same, according to the difference in the opening area of ​​the block component 51, the amount of air supplied from the block component 51 at the central position is adjusted to be greater than the amount of air supplied from the block components 51 at the two end positions of the air ejection portion 42, thereby adjusting the coating film C in the central portion to a drier state than the two end portions in the width direction of the coating film C.

[0065] Next, in the central part of the coating direction, the drying state is all CC, so the drying promotion force is adjusted to increase compared with the setting at the coating start end. Specifically, the height position of the dryer 40 is adjusted to a position closer to the coating film C than the coating start end. In addition, the air volume from the air supply source is adjusted to increase, and the air of approximately the same air volume is supplied from all the block parts 51 of the air ejection part 42. As a result, for the coating film C in the central part of the coating direction, the amount of air supplied to the coating film C in the entire width direction is increased, and the drying state is promoted compared with the coating start end.

[0066] Next, at the end of the coating direction, the drying state is CC in the central part of the width direction and BC at both ends in the width direction, so the drying promotion force in the central part of the width direction is adjusted to be greater than the drying promotion force at both ends in the width direction. In addition, at the end of the coating direction, the drying state has not progressed compared with the beginning end of the coating direction, so the drying promotion force is adjusted to be greater than the beginning end of the coating direction. Specifically, the height position of the dryer 40 is restored to the same height position as the beginning end of the coating, and the supply amount of air from the air supply source is adjusted to be greater than the beginning end of the coating. Thus, the drying promotion force is adjusted to a state greater than the beginning end of the coating. In addition, in such an adjustment, even if the supply amount of air from the air supply source is constant, the drying promotion force at the central position in the width direction becomes larger due to the difference in the opening area of ​​the block component 51, but it can also be adjusted to make the supply amount of air from the air supply source larger in the central position in the width direction, so as to further increase the drying promotion force of the coating film C at the central position in the width direction.

[0067] In this way, according to the coating device of the above-mentioned embodiment, the drying promotion force is adjusted according to the position of the coating film C based on the drying distribution information of the coating film C, so that the drying can be performed while suppressing the non-uniformity of the crystal state of the coating film C. That is, since the drying state of the position of the coating film C on the substrate W can be grasped based on the drying distribution information, the drying promotion force of the dryer 40, that is, the output for drying is adjusted according to the drying distribution information corresponding to the position of the coating film C. Specifically, the adjustment is performed in a manner that the drying is performed by weakening the drying promotion force at the position where the drying is relatively advanced and strengthening the drying promotion force at the position where the drying is relatively delayed. As a result, as the coating film C as a whole, by suppressing the non-uniformity of the drying state, it is easy to make the crystal of the coating film C grow significantly, and it is possible to suppress the situation where the crystal state of the coating film C becomes non-uniform.

[0068] In the above embodiment, an example is described in which the drying distribution information is obtained by experiments in advance, but the drying distribution information obtained based on the drying state of the coating film C immediately after the coating film is formed may be used. Figure 7As shown, a camera 7 capable of observing the surface of the coating film C may be provided on the opposite side of the coating device 34 where the coating is performed, and drying distribution information is formed based on the drying information obtained from the camera 7, and the dryer 40 is controlled based on the drying distribution information. Specifically, a heater 21a for drying the coating film C formed on the substrate W is provided on the stage 21, and the coating liquid is sprayed from the coating device 34 and the drying of the coating liquid is started immediately after the liquid is applied to form the coating film C. Based on the image information obtained by photographing the coating film C by the camera 7, the drying state is grasped by the control device to form the drying distribution information. In addition, the drying promotion force of the dryer 40 following the coating device 34 may be adjusted based on the drying distribution information.

[0069] In addition, according to the above embodiment, an example in which the dryer 40 and the coater 34 are integrated is described, but the dryer 40 and the coater 34 may be provided in different units. In terms of controlling the drying state immediately after coating, integration is preferred, but in a structure that feeds back the drying state in real time, time can be gained to grasp the drying state, so that a high-performance PC may not be used in the control device, which can suppress the overall cost of the device.

[0070] In addition, in the above-mentioned embodiment, the case where the air ejection unit 42 has three partitions 60 is described, but the number of partitions may be two or more, and the greater the number of partitions 60, the more finely the drying distribution information of the coating film C can be handled. In addition, the air ejection unit 42 may have only one partition 60. By removing the partition 60, the handling capability of the drying distribution information is reduced, but the structure is simplified, so the cost of the device can be suppressed.

[0071] In addition, in the above-mentioned embodiment, the drying promoting force is adjusted by the air supply amount, the height position of the dryer 40, and the opening area of ​​the block member 51. However, it is not necessary to have all of them, and it is also possible to select them arbitrarily for adjustment. In addition, the drying promoting force can also be adjusted by a unit other than the air supply unit such as a heater and a suction unit.

[0072] Description of Reference Numerals

[0073] 21 Carrier

[0074] 30 coating units

[0075] 34 Coating machine

[0076] 40 Dryer

[0077] 41C Opening

[0078] 42 Air ejection unit

[0079] 51 parts

[0080] 60 Division

[0081] C coating film

[0082] W substrate

Claims

1. A coating device, comprising: a stage for mounting a substrate; a coater that forms a coating film on the substrate by ejecting a coating liquid from a nozzle while moving relative to the substrate placed on the stage; and a dryer that dries the coating film on the substrate, It is characterized in that The drying accelerating force of the dryer for accelerating drying is adjusted according to the location of the coating film based on the drying distribution information of the coating film on the substrate.

2. The coating device according to claim 1, characterized in that: The drying distribution information is periodically updated according to the drying state of the formed coating film.

3. The coating device according to claim 1, characterized in that: The drying distribution information is acquired based on the drying state of the coating film immediately after coating, and the coating film on the substrate is dried using the drying promotion force adjusted based on the acquired drying distribution information.

4. The coating device according to claim 1, characterized in that: The dryer is provided in the coater, and performs drying while adjusting a drying acceleration force based on the drying distribution information immediately after forming a coating film.

5. The coating device according to claim 1, characterized in that: The dryer supplies air to the coating film to dry it, and the drying acceleration force is performed by adjusting the air supply amount of the dryer.

6. The coating device according to claim 1 or 5, characterized in that: The dryer supplies air to the coating film to dry it, and the drying acceleration force is exerted by adjusting the distance between the supply port of the dryer that blows air and the coating film.

7. The coating device according to claim 5, characterized in that: The dryer has a shape extending in a width direction orthogonal to a coating direction, wherein the coating direction is a direction in which the coater moves in one direction to form a coating film, and the supply port of the dryer has a partition divided in the width direction, and the air supply amount is adjusted according to each of the partitions.

8. The coating device according to claim 7, characterized in that: The air supply amount of the supply port of the dryer is adjusted by setting the opening area for each of the partitions.

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