An all-round adjustment mechanism for welding bellows in optical systems

Abstract

The present invention relates to the technical field of stability test in optical systems. The present invention is an all-round adjustment mechanism for welding bellows in optical systems, comprising a vacuum chamber, a plurality of connecting tubes are evenly installed on the outside of the vacuum chamber, and a connecting flange is fixedly connected to one end of the connecting tube away from the vacuum chamber, a welding bellows body is fixedly connected to the connecting flange by bolts, an optical device is fixedly installed on one end of the welding bellows body away from the vacuum chamber, and a limiting mechanism is arranged on the welding bellows body. The present invention improves the stability of the optical system through the coordinated use of a six-axis adjustment platform and the welding bellows. When the welding bellows is excessively twisted, a limit switch is used to generate a signal feedback, and the six-axis adjustment platform performs reverse adjustment to avoid the welding bellows body exceeding the yield limit. The tightening assembly realizes the integrated synchronous locking of multiple No. 2 locking screws to avoid the eccentricity problem caused by inconsistent tightening.

Description

Technical Field

[0001] The invention belongs to the technical field of stability test in optical systems, and in particular relates to an all-round adjustment mechanism for a welding bellows in an optical system. Background Art

[0002] Welded bellows is a special pipe connector, which consists of a series of corrugations that allow the pipe to expand, bend or absorb vibration within a certain range. Welded bellows are also used in optical systems, especially in high vacuum environments, such as synchrotron radiation sources, free electron lasers and other facilities. Welded bellows can be used as vacuum seals to allow flexible connections between pipes or cavities while maintaining vacuum. After being installed on the vacuum cavity in the optical system, the following problems exist:

[0003] 1. One end of the welding bellows is connected to the vacuum chamber, and the other end is fixed to the optical equipment. Since the angle of the optical system needs to be adjusted, a six-axis adjustment platform is usually installed at the bottom of the vacuum chamber. When the six-axis adjustment platform is used to adjust the angle, the welding bellows will also bend and twist. Therefore, a limiting mechanism is usually installed on the welding bellows to limit it to prevent excessive bending of the welding bellows. The limiting mechanism is usually fixed to the outer wall of the flange of the welding bellows with circumferentially arranged bolts. However, the bolts need to be tightened one by one, which has low work efficiency and is difficult to ensure that the tightening degree of each bolt is consistent, which can easily lead to eccentricity of the limiting mechanism, making it difficult to achieve the limiting effect.

[0004] 2. After the welding bellows is installed on the vacuum chamber, although there is a limit mechanism for limiting the position, there is no detection and feedback mechanism on the limit mechanism, and it is difficult to adjust the welding bellows from the extreme position to the normal position in time, resulting in the welding corrugation being in the extreme position for a long time, which is also easy to cause exceeding the yield limit, causing irreversible damage to the welding bellows.

[0005] 3. When using the six-axis adjustment platform to adjust the angle, external dust and impurities will adhere to the outer wall of the telescopic end of the hydraulic cylinder on the six-axis adjustment platform, which may easily cause friction and damage, thereby reducing the adjustment accuracy of the six-axis adjustment platform. Summary of the invention

[0006] The purpose of the present invention is to provide a omnidirectional adjustment mechanism for welding bellows in optical systems with a simple structure and reasonable design in order to solve the above problems.

[0007] The present invention achieves the above-mentioned purpose through the following technical solutions:

[0008] A full-range adjustment mechanism for a welding bellows in an optical system comprises a vacuum chamber, a plurality of connecting tubes are evenly installed outside the vacuum chamber, and a connecting flange is fixedly connected to one end of the connecting tube away from the vacuum chamber, a welding bellows body is fixedly connected to the connecting flange by bolts, an optical device is fixedly installed to one end of the welding bellows body away from the vacuum chamber, a limiting mechanism is arranged on the welding bellows body, and two fixing mechanisms are symmetrically arranged on the limiting mechanism.

[0009] A six-axis adjustment platform is provided at the bottom of the vacuum chamber, and the six-axis adjustment platform includes a top plate fixedly connected to the bottom of the vacuum chamber, six hydraulic cylinders are fixedly installed at the bottom of the top plate, and a base is fixedly connected to the bottom of the six hydraulic cylinders. A cleaning mechanism is provided on each hydraulic cylinder, and a control host is fixedly connected to the top center of the base.

[0010] The limiting mechanism includes a fixing ring which is symmetrically sleeved on both ends of the welding bellows body, and two No. 3 fixing blocks are fixedly connected to the outside of the fixing ring on the right side in a front-to-back symmetrical manner, and the two No. 3 fixing blocks are fixedly connected with a U-shaped connecting plate, and each U-shaped connecting plate is fixedly connected to two contact plates at one end away from the No. 3 fixing block, and two mounting plates are fixedly connected to the fixing ring on the left side in a front-to-back symmetrical manner, and a limit switch is installed on each mounting plate.

[0011] Preferably, a baffle is fixedly connected to the top of the hydraulic cylinder output end, a No. 1 mounting shaft is hinged on the top of the baffle, one end of the No. 1 mounting shaft is rotatably connected to a No. 1 fixing seat, the No. 1 fixing seat is fixedly installed on the bottom of the top plate, a No. 2 mounting shaft is hinged to the bottom of the fixed end of the hydraulic cylinder, one end of the No. 2 mounting shaft is rotatably connected to a No. 2 fixing seat, and the No. 2 fixing seat is fixedly connected to the top of the base.

[0012] Preferably, the cleaning mechanism includes a spring, a cleaning assembly and a driving assembly. The spring is sleeved on the output end of the hydraulic cylinder, and a cleaning assembly for cleaning the hydraulic cylinder is provided at the bottom of the spring. A driving assembly is commonly provided between the hydraulic cylinder and the spring. The driving assembly includes a No. 1 fixed block fixedly connected to the outside of the baffle, a screw rod is fixedly connected to the bottom of the No. 1 fixed block, and the cleaning assembly includes a crimping ring fixedly connected to the bottom of the spring, a No. 2 fixed block is fixedly installed on the outside of the crimping ring, a No. 2 threaded block is rotatably installed in the middle of the No. 2 fixed block, the No. 2 threaded block is threadedly connected to the screw rod through a ball nut, and a block is fixedly connected to the bottom of the screw rod.

[0013] Preferably, the bottom of the No. 2 threaded block is fixedly sleeved with a No. 4 gear, the bottom of the crimping ring is rotatably connected to a connecting ring, the bottom of the connecting ring is fixedly installed with a cleaning brush for cleaning the output end of the hydraulic cylinder, the outside of the cleaning brush is fixedly sleeved with a No. 3 gear ring meshing with the No. 4 gear, and a number of steel balls are evenly installed on the bottom of the cleaning brush, and the bottom of the steel balls fits with the top of the fixed end of the hydraulic cylinder.

[0014] Preferably, the fixing mechanism includes a crimping assembly, a tightening assembly and a servo motor, the crimping assembly is arranged on the tightening assembly, the tightening assembly includes a No. 1 gear ring rotatably connected to the outside of the fixing ring located on the right side, a No. 2 gear ring is fixedly connected to the side of the No. 1 gear ring close to the center of the welding bellows body, a plurality of rotating blocks are evenly rotatably connected to the outside of the fixing ring located on the right side, a mounting sleeve is fixedly connected to the top of the rotating block, a No. 2 gear meshing with the No. 1 gear ring is fixedly sleeved on the outside of the rotating block, and a No. 1 gear is fixedly sleeved on the top of the mounting sleeve.

[0015] Preferably, a No. 2 locking screw passes through the center of the rotating block, and the No. 2 locking screw and the rotating block are threadedly connected by a ball nut, a square shaft is fixedly connected to the bottom center of the No. 2 locking screw, and a number of limiting holes corresponding to the position of the square shaft are evenly opened on the fixing ring, and the square shaft is slidably connected to the inside of the limiting hole, and the bottom of the square shaft fits with the welded bellows body.

[0016] Preferably, each of the fixing mechanisms has a servo motor, the servo motors of the two fixing mechanisms are distributed on the left and right, and the two servo motors are respectively fixedly connected to the No. 3 fixing block located on the rear side and the mounting plate located on the rear side, and the output end of the servo motor is fixedly sleeved with the No. 3 gear meshing with the No. 2 gear ring.

[0017] Preferably, the crimping assembly includes a side plate evenly fixedly connected to the outside of the fixing ring away from the center of the welding bellows body, a limiting rod is fixedly connected to the top of one side of the side plate close to the center of the welding bellows body, and there are two limiting blocks symmetrically slidingly sleeved on the limiting rod, and a rack meshing with gear No. 1 is fixedly connected between the two limiting blocks.

[0018] Preferably, a No. 1 threaded block is fixedly connected to the side of the back side of the rack away from the welding bellows body, a guide rod is slidably passed through the center of the No. 1 threaded block, an end of the guide rod away from the welding bellows body is fixedly connected to a No. 1 fixing plate, a ring is fixedly connected to one side of the No. 1 fixing plate, a No. 1 locking screw is threadedly connected to the side of the No. 1 threaded block away from the rack, one end of the No. 1 locking screw is fitted with the outer wall of the guide rod, and the other end of the No. 1 locking screw is fixedly connected to a handwheel.

[0019] Preferably, a plurality of rubber shock-absorbing pads are evenly and fixedly connected to the bottom of the base, an anti-skid pad is fixedly connected to the bottom of the rubber shock-absorbing pad, and a plurality of anti-skid grooves are evenly opened at the bottom of the anti-skid pad.

[0020] The beneficial effects of the present invention are:

[0021] 1. The present invention uses a six-axis adjustment platform to adjust the angle of the welding bellows body with six degrees of freedom. In conjunction with the use of the welding bellows, it is beneficial to improve the stability of the optical system. When the welding bellows is excessively twisted, the limit switch and the contact plate are in contact, and the limit switch is used to generate a signal feedback. The six-axis adjustment platform stops rotating and performs reverse adjustment, thereby avoiding the welding bellows body from exceeding the yield limit and extending the service life of the welding bellows body.

[0022] 2. The invention realizes the integrated and synchronous locking of multiple No. 2 locking screws through the tightening components in the fixing mechanism, and realizes the rapid installation of the limiting mechanism on the welding bellows body, with high working efficiency and synchronous tightening. Compared with single tightening, the screw feed is uniform, avoiding the eccentricity problem caused by inconsistent tightening.

[0023] 3. The present invention realizes radial crimping fixation of the limiting mechanism through the No. 2 locking screw in the limiting mechanism, and realizes axial fixation of the limiting mechanism through the crimping assembly. The combination of radial fixation and axial fixation improves the installation stability and firmness of the limiting mechanism.

[0024] 4. Through the setting of the cleaning mechanism of the present invention, under the elastic force of the spring, when the output end of the hydraulic cylinder is extended, the cleaning brush can move axially relative to the output end of the hydraulic cylinder, thereby realizing axial cleaning of the output end of the hydraulic cylinder. Through the setting of the driving component, when the output end of the hydraulic cylinder is extended, the cleaning brush is synchronously driven to rotate, thereby realizing radial rotation cleaning, improving the cleaning effect of the surface of the output end of the hydraulic cylinder, and avoiding the influence of dust and impurities on the adjustment accuracy of the six-axis adjustment platform. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 It is a stereogram of the overall structure of the present invention;

[0026] Figure 2 is a partial cross-sectional view of the present invention;

[0027] Figure 3 is a partial cross-sectional view of the hydraulic cylinder and the cleaning mechanism of the present invention;

[0028] Figure 4 The present invention Figure 3 A magnified schematic diagram of the middle A area;

[0029] Figure 5 It is a schematic diagram of the fixing mechanism and the limiting mechanism of the present invention from a first viewing angle;

[0030] Figure 6 The present invention Figure 5 A magnified schematic diagram of the middle B area;

[0031] Figure 7 is a schematic diagram of the fixing mechanism and the limiting mechanism of the present invention from a second viewing angle;

[0032] Figure 8 The present invention Figure 7 Enlarged schematic diagram of the middle C area;

[0033] Fig. 9 It is a partial cross-sectional view of the fixing mechanism and the fixing ring of the present invention.

[0034] In the figure: 1. vacuum chamber; 2. connecting flange; 3. connecting pipe; 4. six-axis adjustment platform; 41. top plate; 42. hydraulic cylinder; 43. control host; 44. base; 45. No. 1 mounting shaft; 46. No. 1 fixing seat; 47. No. 2 mounting shaft; 48. No. 2 fixing seat; 5. welding bellows body; 6. fixing mechanism; 61. crimping assembly; 611. rack; 612. limit block; 613. side plate; 614. No. 1 locking screw; 615. No. 1 threaded block; 616. guide rod; 617. No. 1 fixing plate; 618. collar; 619. limit rod; 62. tightening assembly; 621. No. 1 gear; 622. No. 2 locking screw; 623. mounting sleeve; 624. No. 2 gear; 625. No. Gear ring; 626, gear ring No. 2; 627, rotating block; 628, square shaft; 629, limit hole; 63, gear No. 3; 64, servo motor; 7, limit mechanism; 71, fixing ring; 72, mounting plate; 73, limit switch; 74, contact plate; 75, U-shaped connecting plate; 76, fixing block No. 3; 8, cleaning mechanism; 81, spring; 82, cleaning assembly; 821, crimping ring; 822, steel ball; 823, gear ring No. 3; 824, cleaning brush; 825, connecting ring; 83, driving assembly; 831, block; 832, fixing block No. 1; 833, screw rod; 834, fixing block No. 2; 835, threaded block No. 2; 836, gear No. 4; 9, anti-slip pad; 10, rubber shock-absorbing pad; 11, baffle. DETAILED DESCRIPTION

[0035] The present application is further described in detail below in conjunction with the accompanying drawings. It is necessary to point out here that the following specific implementation methods are only used to further illustrate the present application and cannot be understood as limiting the scope of protection of the present application. Technical personnel in this field can make some non-essential improvements and adjustments to the present application based on the above application content.

[0036] Example: See Figure 1A full-range adjustment mechanism for a welding bellows in an optical system comprises a vacuum chamber 1, a plurality of connecting tubes 3 are evenly installed outside the vacuum chamber 1, and a connecting flange 2 is fixedly connected to the end of the connecting tube 3 away from the vacuum chamber 1, a welding bellows body 5 is fixedly connected to the connecting flange 2 by bolts, an optical device is fixedly installed at the end of the welding bellows body 5 away from the vacuum chamber 1, a limiting mechanism 7 is arranged on the limiting mechanism 7, and two fixing mechanisms 6 are symmetrically arranged on the left and right.

[0037] When in use, the welding bellows body 5 is used to connect the vacuum chamber 1 and the optical device, the limiting mechanism 7 is used to limit the welding bellows body 5, and the fixing mechanism 6 is used to stably install the limiting mechanism 7 on the welding bellows body 5.

[0038] See also Figure 1 , Figure 2 and Figure 3 A six-axis adjustment platform 4 is provided at the bottom of the vacuum chamber 1. The six-axis adjustment platform 4 includes a top plate 41 fixedly connected to the bottom of the vacuum chamber 1, six hydraulic cylinders 42 are fixedly installed at the bottom of the top plate 41, and a base 44 is fixedly connected to the bottom of the six hydraulic cylinders 42. A cleaning mechanism 8 is provided on each hydraulic cylinder 42, a control host 43 is fixedly connected to the top center of the base 44, a plurality of rubber shock-absorbing pads 10 are evenly fixedly connected to the bottom of the base 44, an anti-skid pad 9 is fixedly connected to the bottom of the rubber shock-absorbing pad 10, and a plurality of anti-skid grooves are evenly opened at the bottom of the anti-skid pad 9, a baffle 11 is fixedly connected to the top of the output end of the hydraulic cylinder 42, a No. 1 mounting shaft 45 is hinged on the top of the baffle 11, and one end of the No. 1 mounting shaft 45 is rotatably connected to a No. 1 fixed seat 46, and the No. 1 fixed seat 46 is fixedly installed at the bottom of the top plate 41, a No. 2 mounting shaft 47 is hinged at the bottom of the fixed end of the hydraulic cylinder 42, and one end of the No. 2 mounting shaft 47 is rotatably connected to a No. 2 fixed seat 48, and the No. 2 fixed seat 48 is fixedly connected to the top of the base 44.

[0039] During use of the six-axis adjustment platform 4, the control host 43 is used to adjust the extension and retraction of the output ends of the six hydraulic cylinders 42, and the extension and retraction of the six hydraulic cylinders 42 are used to achieve angle adjustment of the top plate 41 and the vacuum chamber 1 thereon. The bottom of the hydraulic cylinder 42 is hinged to the No. 2 mounting shaft 47, the No. 2 mounting shaft 47 is rotatably connected to the No. 2 fixing seat 48, the baffle 11 is hinged to the No. 1 mounting shaft 45, and the No. 1 mounting shaft 45 is hinged to the No. 1 fixing seat 46, thereby achieving multi-degree-of-freedom adjustment of the top plate 41.

[0040] See also Figure 2 , Figure 3 and Figure 4The cleaning mechanism 8 includes a spring 81, a cleaning component 82 and a driving component 83. The spring 81 is sleeved on the output end of the hydraulic cylinder 42, and a cleaning component 82 for cleaning the hydraulic cylinder 42 is provided at the bottom of the spring 81. A driving component 83 is commonly provided between the hydraulic cylinder 42 and the spring 81. The driving component 83 includes a No. 1 fixed block 832 fixedly connected to the outside of the baffle 11, and a screw rod 833 is fixedly connected to the bottom of the No. 1 fixed block 832. The cleaning component 82 includes a crimping ring 821 fixedly connected to the bottom of the spring 81, and a No. 2 fixed block 834 is fixedly installed on the outside of the crimping ring 821. A No. 2 threaded block 835 is rotatably installed in the middle of the No. 2 fixed block 834. The No. 2 threaded block 835 is threadedly connected to the screw rod 833 through a ball nut. A block 831 is fixedly connected to the bottom of the screw rod 833, wherein the thread pitch of the screw rod 833 is large to prevent it from self-locking with the No. 2 threaded block 835.

[0041] See also Figure 2 , Figure 3 and Figure 4 The bottom of the No. 2 threaded block 835 is fixedly sleeved with a No. 4 gear 836, the bottom of the crimping ring 821 is rotatably connected with a connecting ring 825, the bottom of the connecting ring 825 is fixedly installed with a cleaning brush 824 for cleaning the output end of the hydraulic cylinder 42, the outside of the cleaning brush 824 is fixedly sleeved with a No. 3 gear ring 823 meshing with the No. 4 gear 836, and a number of steel balls 822 are evenly installed on the bottom of the cleaning brush 824, and the bottom of the steel balls 822 fits with the top of the fixed end of the hydraulic cylinder 42.

[0042] During the use of the cleaning mechanism 8, in the initial state, the spring 81 is in a compressed but not compressed to the limit state, and the spring 81 presses the cleaning component 82 to the top of the fixed end of the hydraulic cylinder 42. When the output end of the hydraulic cylinder 42 is extended, the elastic force of the spring 81 ensures that the cleaning brush 824 is always in contact with the top of the fixed end of the hydraulic cylinder 42. At this time, as the output end of the hydraulic cylinder 42 continues to extend, the cleaning brush 824 moves axially to clean the output end of the hydraulic cylinder 42; when the output end of the hydraulic cylinder 42 is extended, it will simultaneously drive the baffle 11 and the No. 1 fixed block 832 thereon to move upward, synchronously driving the screw rod 8 33 moves upward, thereby driving the second threaded block 835 and the fourth gear 836 thereon to rotate, and at the same time driving the third gear ring 823 and the cleaning brush 824 thereon to rotate, and utilizing the rotation of the cleaning brush 824 to perform radial rotation cleaning on the output end of the hydraulic cylinder 42. When the output end of the hydraulic cylinder 42 contracts, the cleaning brush 824 is driven to rotate in the opposite direction. Through the coordination of axial cleaning and radial rotation cleaning, the cleaning effect of the output end of the hydraulic cylinder 42 is improved, and the influence of dust and impurities on the adjustment accuracy of the hydraulic cylinder 42 is avoided, and the steel ball 822 is used to reduce the friction between the cleaning brush 824 and the top of the fixed end of the hydraulic cylinder 42.

[0043] See also Figure 1 , Figure 5 and Figure 7 The limiting mechanism 7 includes a fixing ring 71 which is symmetrically sleeved on both ends of the welding bellows body 5. Two No. 3 fixing blocks 76 are symmetrically fixedly connected to the outside of the fixing ring 71 on the right side, and the two No. 3 fixing blocks 76 are fixedly connected with a U-shaped connecting plate 75. One end of each U-shaped connecting plate 75 away from the No. 3 fixing block 76 is fixedly connected with two contact plates 74. Two mounting plates 72 are symmetrically fixedly connected to the fixing ring 71 on the left side, and each mounting plate 72 is installed with a limit switch 73 corresponding to the position of the contact plate 74.

[0044] When the six-axis adjustment platform 4 is used to adjust the angle of the vacuum chamber 1, the adjustment of the welding bellows body 5 is achieved through the connecting pipe 3 and the connecting flange 2. The welding bellows body 5 itself has the characteristics of expansion, bending and vibration absorption, which reduces the vibration of the optical equipment and improves the stability of the optical equipment. When the six-axis adjustment platform 4 adjusts the welding bellows body 5, the welding bellows body 5 deflects up and down, and at the same time drives the fixing ring 71 away from the vacuum chamber 1 to deflect, and synchronously drives the mounting plate 72 and the limit switch 73 thereon to deflect, until the limit switch 73 contacts the contact plate 74, a signal feedback is generated, at this time the adjustment of the six-axis adjustment platform 4 is stopped, or the six-axis adjustment platform 4 is reversely rotated, avoiding the problem of damage caused by the welding bellows body 5 breaking through the yield limit, thereby extending the service life of the welding bellows body 5.

[0045] See also Figure 1 , Figure 5 , Figure 6 , Figure 7 , Figure 8 and Fig. 9The fixing mechanism 6 includes a crimping assembly 61, a tightening assembly 62 and a servo motor 64. The crimping assembly 61 is arranged on the tightening assembly 62. The tightening assembly 62 includes a No. 1 gear ring 625 rotatably connected to the outside of the fixing ring 71 located on the right side. A No. 2 gear ring 626 is fixedly connected to the side of the No. 1 gear ring 625 close to the center of the welding bellows body 5. A plurality of rotating blocks 627 are evenly rotatably connected to the outside of the fixing ring 71 located on the right side. A mounting sleeve 623 is fixedly connected to the top of the rotating block 627. A No. 2 gear 624 meshing with the No. 1 gear ring 625 is fixedly sleeved on the outside of the rotating block 627. A No. 1 gear 621 is fixedly sleeved on the top of the outside of the mounting sleeve 623. A No. 2 locking screw 62 is rotatably penetrated through the center of the rotating block 627. 2. The No. 2 locking screw 622 is threadedly connected to the rotating block 627 through a ball nut. A square shaft 628 is fixedly connected to the bottom center of the No. 2 locking screw 622, and a plurality of limiting holes 629 corresponding to the position of the square shaft 628 are evenly opened on the fixing ring 71, and the square shaft 628 is connected inside the limiting holes 629 by sliding up and down. The bottom of the square shaft 628 fits with the welded bellows body 5. There is a servo motor 64 in each fixing mechanism 6. The servo motors 64 in the two fixing mechanisms 6 are distributed on the left and right, and the two servo motors 64 are respectively fixedly connected to the No. 3 fixing block 76 located on the rear side and the mounting plate 72 located on the rear side. The output end of the servo motor 64 is fixedly sleeved with a No. 3 gear 63 meshing with the No. 2 gear ring 626.

[0046] See also Figure 6 , Figure 7 and Figure 8 The crimping assembly 61 includes a side plate 613 that is evenly fixedly connected to the outside of the fixing ring 71 and away from the center of the welding bellows body 5. The top of the side plate 613 close to the welding bellows body 5 is fixedly connected to a limiting rod 619. Two limiting blocks 612 are symmetrically slidably sleeved on the limiting rod 619. A rack 611 meshing with a No. 1 gear 621 is fixedly connected between the two limiting blocks 612. A side of the back of the rack 611 away from the welding bellows body 5 is fixedly connected to a No. 1 gear. Threaded block 615, a guide rod 616 slides through the center of the No. 1 threaded block 615, one end of the guide rod 616 away from the center of the welding bellows body 5 is fixedly connected to a No. 1 fixing plate 617, one side of the No. 1 fixing plate 617 is fixedly connected to a ring 618, and one side of the No. 1 threaded block 615 away from the rack 611 is threadedly connected to a No. 1 locking screw 614, one end of the No. 1 locking screw 614 is in contact with the outer wall of the guide rod 616, and the other end of the No. 1 locking screw 614 is fixedly connected to a hand wheel.

[0047] During the use of the fixing mechanism 6, in the initial state, the No. 1 fixing plate 617 is in a direction away from the center of the fixing ring 71 to avoid interference when the fixing ring 71 is installed on the welding bellows body 5. First, the two fixing rings 71 are respectively sleeved on the two ends of the welding bellows body 5, and then the right end of the welding bellows body 5 is installed on the connecting flange 2 by bolts, and the left end of the welding bellows body 5 is installed on the optical device. At this time, the hand wheel on the No. 1 locking screw 614 is turned to synchronously drive the No. 1 locking screw 614 to rotate, and the crimping fixation of the No. 1 locking screw 614 on the guide rod 616 is loosened. At this time, the guide rod 616 is rotated. 16, synchronously drive the No. 1 fixing plate 617 and the collar 618 to rotate until the collar 618 corresponds to the position of the bolt, reverse the hand wheel, and use the No. 1 locking screw 614 to lock the guide rod 616. At this time, start the servo motor 64, and the output end of the servo motor 64 drives the No. 3 gear 63 to rotate, and synchronously drives the No. 2 gear ring 626 and the No. 1 gear ring 625 to rotate. The No. 1 gear ring 625 drives multiple No. 2 gears 624 to rotate synchronously, and at the same time drives multiple rotating blocks 627 to rotate synchronously. The rotating blocks 627 drive multiple No. 2 locking screws 622 to move synchronously toward the center direction of the fixing ring 71. Since the No. 2 locking screws 62 The square shaft 628 at the bottom of the No. 2 locking screw 622 and the limiting hole 629 ensure that when the rotating block 627 rotates, the No. 2 locking screw 622 and the square shaft 628 thereon move up and down, and the square shaft 628 at the bottom of the No. 2 locking screw 622 is used to press and fix the fixing ring 71 to the two ends of the welding bellows body 5, so as to realize the radial pressing and fixing of the fixing ring 71. At the same time, the rotating block 627 synchronously drives the installation sleeve 623 and the No. 1 gear 621 thereon to rotate, and at the same time drives the rack 611 to move toward the center of the welding bellows body 5, and synchronously drives the No. 1 threaded block 615 and the guide rod 616 to move toward the center of the welding bellows body 5. The No. 1 fixing plate 617 and the sleeve 618 thereon are moved toward the center of the welded bellows body 5, and the sleeve 618 is sleeved onto the bolt to realize the axial limit fixation of the bolt by the fixing ring 71, thereby improving the installation stability of the limit mechanism 7, and at the same time realizing the synchronous tightening of multiple No. 2 locking screws 622, with high installation and disassembly efficiency and synchronous tightening. The feed amount of each No. 2 locking screw 622 is the same, which avoids the occurrence of eccentric installation, and the servo motor 64 is equipped with a brake with a self-locking function. After the fixing mechanism 6 is installed, the servo motor 64 is self-locking.

[0048] It should be noted that this is a full-range adjustment mechanism for welding bellows in optical systems. When in use, first, the fixing ring 71 is sleeved and fixed onto the two ends of the welding bellows body 5, and then the right end of the welding bellows body 5 is installed on the connecting flange 2 by bolts, and the left end of the welding bellows body 5 is installed on the optical device, and then the servo motor 64 in the fixing mechanism 6 is started, and the tightening assembly 62 is used to achieve the synchronous tightening of multiple No. 2 locking screws 622, thereby improving the installation efficiency of the limiting mechanism 7, and during synchronous tightening, the feed amount of each No. 2 locking screw 622 is the same, thereby avoiding the occurrence of eccentric installation, and the tightening assembly 62 is used to achieve radial crimping and fixing of the limiting mechanism 7, and the crimping assembly 61 is used to achieve axial crimping and fixing, thereby improving the installation stability, and the crimping assembly 61 and the tightening assembly 62 are integrated and synchronously linked. After the welding bellows body 5 is installed, the six-axis adjustment platform 4 is used to adjust the angle of the vacuum chamber 1, thereby realizing the angle adjustment of the welding bellows body 5. The welding bellows body 5 itself has the characteristics of expansion, bending and vibration absorption, which reduces the vibration of the optical equipment and improves the stability of the optical equipment. When the welding bellows body 5 is bent to the limit, the limit switch 73 contacts the contact plate 74, and a signal feedback is generated. At this time, the adjustment of the six-axis adjustment platform 4 is stopped, or the six-axis adjustment platform 4 is reversely rotated, avoiding the problem of damage to the welding bellows body 5 due to breaking through the yield limit. When the hydraulic cylinder 42 in the six-axis adjustment platform 4 is expanded and contracted, the cleaning mechanism 8 cleans the outer wall of the output end of the hydraulic cylinder 42 by axial movement and radial rotation, avoiding the influence of dust and impurities on the adjustment accuracy of the hydraulic cylinder 42.

[0049] The above-mentioned embodiments only express several implementation methods of the present invention, and the description thereof is relatively specific and detailed, but it cannot be understood as limiting the scope of the present invention. It should be pointed out that, for ordinary technicians in this field, several variations and improvements can be made without departing from the concept of the present invention, which all belong to the protection scope of the present invention.

Claims

1. A full-range adjustment mechanism for welding bellows in an optical system, comprising a vacuum chamber (1), characterized in that: A plurality of connecting pipes (3) are evenly installed outside the vacuum chamber (1), and one end of the connecting pipe (3) away from the vacuum chamber (1) is fixedly connected to a connecting flange (2), a welding bellows body (5) is fixedly connected to the connecting flange (2) by bolts, an optical device is fixedly installed on one end of the welding bellows body (5) away from the vacuum chamber (1), a limiting mechanism (7) is provided on the welding bellows body (5), and two fixing mechanisms (6) are symmetrically provided on the limiting mechanism (7); A six-axis adjustment platform (4) is arranged at the bottom of the vacuum chamber (1), the six-axis adjustment platform (4) comprises a top plate (41) fixedly connected to the bottom of the vacuum chamber (1), six hydraulic cylinders (42) are fixedly installed at the bottom of the top plate (41), the bottoms of the six hydraulic cylinders (42) are commonly fixedly connected to a base (44), each hydraulic cylinder (42) is provided with a cleaning mechanism (8), and a control host (43) is fixedly connected to the top center of the base (44); The limit mechanism (7) comprises a fixing ring (71) symmetrically sleeved on both ends of the welding bellows body (5); two No. 3 fixing blocks (76) are fixedly connected to the outside of the fixing ring (71) on the right side in a front-to-back symmetrical manner, and the two No. 3 fixing blocks (76) are fixedly connected to a U-shaped connecting plate (75); one end of each U-shaped connecting plate (75) away from the No. 3 fixing block (76) is fixedly connected to two contact plates (74); two mounting plates (72) are fixedly connected to the fixing ring (71) on the left side in a front-to-back symmetrical manner, and a limit switch (73) is installed on each mounting plate (72); The fixing mechanism (6) comprises a crimping assembly (61), a tightening assembly (62) and a servo motor (64); the crimping assembly (61) is arranged on the tightening assembly (62); the tightening assembly (62) comprises a first gear ring (625) rotatably connected to the outside of a fixing ring (71) located on the right side; a second gear ring (626) is fixedly connected to the side of the first gear ring (625) close to the center of the welding bellows body (5); a plurality of rotating blocks (627) are evenly rotatably connected to the outside of the fixing ring (71) located on the right side; a mounting sleeve (623) is fixedly connected to the top of the rotating block (627); a second gear (624) meshing with the first gear ring (625) is fixedly sleeved on the outside of the rotating block (627); and a first gear (621) is fixedly sleeved on the top of the mounting sleeve (623); A No. 2 locking screw (622) passes through the center of the rotating block (627), and the No. 2 locking screw (622) and the rotating block (627) are threadedly connected via a ball nut. A square shaft (628) is fixedly connected to the center of the bottom of the No. 2 locking screw (622), and a plurality of limiting holes (629) corresponding to the position of the square shaft (628) are evenly opened on the fixing ring (71), and the square shaft (628) is slidably connected to the inside of the limiting hole (629) up and down, and the bottom of the square shaft (628) is in contact with the welding bellows body (5).

2. According to claim 1, a full range adjustment mechanism for welding bellows in an optical system, characterized in that: The top of the output end of the hydraulic cylinder (42) is fixedly connected to a baffle (11), the top of the baffle (11) is hingedly connected to a first mounting shaft (45), one end of the first mounting shaft (45) is rotatably connected to a first fixing seat (46), the first fixing seat (46) is fixedly installed at the bottom of the top plate (41), the bottom of the fixed end of the hydraulic cylinder (42) is hingedly connected to a second mounting shaft (47), one end of the second mounting shaft (47) is rotatably connected to a second fixing seat (48), and the second fixing seat (48) is fixedly connected to the top of the base (44).

3. The all-round adjustment mechanism for welding bellows in an optical system according to claim 1, characterized in that: The cleaning mechanism (8) comprises a spring (81), a cleaning assembly (82) and a driving assembly (83); the spring (81) is sleeved on the output end of the hydraulic cylinder (42); a cleaning assembly (82) for cleaning the hydraulic cylinder (42) is arranged at the bottom of the spring (81); a driving assembly (83) is arranged between the hydraulic cylinder (42) and the spring (81); the driving assembly (83) comprises a first fixing block (832) fixedly connected to the outside of the baffle (11); The bottom of the block (832) is fixedly connected with a screw rod (833), the cleaning assembly (82) comprises a crimping ring (821) fixedly connected to the bottom of the spring (81), a No. 2 fixed block (834) is fixedly installed on the outside of the crimping ring (821), a No. 2 threaded block (835) is rotatably installed in the middle of the No. 2 fixed block (834), the No. 2 threaded block (835) and the screw rod (833) are threadedly connected via a ball nut, and a stopper (831) is fixedly connected to the bottom of the screw rod (833).

4. The all-round adjustment mechanism for welding bellows in an optical system according to claim 3, characterized in that: The bottom of the No. 2 threaded block (835) is fixedly sleeved with a No. 4 gear (836), the bottom of the crimping ring (821) is rotatably connected with a connecting ring (825), the bottom of the connecting ring (825) is fixedly installed with a cleaning brush (824) for cleaning the output end of the hydraulic cylinder (42), the outside of the cleaning brush (824) is fixedly sleeved with a No. 3 gear ring (823) meshing with the No. 4 gear (836), and a plurality of steel balls (822) are evenly installed at the bottom of the cleaning brush (824), and the bottom of the steel balls (822) is in contact with the top of the fixed end of the hydraulic cylinder (42).

5. The all-round adjustment mechanism for welding bellows in an optical system according to claim 1, characterized in that: Each of the fixing mechanisms (6) has a servo motor (64), the servo motors (64) in the two fixing mechanisms (6) are distributed on the left and right, and the two servo motors (64) are respectively fixedly connected to a third fixing block (76) located on the rear side and a mounting plate (72) located on the rear side, and the output end of the servo motor (64) is fixedly sleeved with a third gear (63) meshing with a second gear ring (626).

6. The all-round adjustment mechanism for welding bellows in an optical system according to claim 1, characterized in that: The crimping assembly (61) comprises a side plate (613) uniformly fixedly connected to the outside of the fixing ring (71) away from the center of the welding bellows body (5); a limiting rod (619) is fixedly connected to the top of one side of the side plate (613) close to the center of the welding bellows body (5); two limiting blocks (612) are symmetrically slidably sleeved on the limiting rod (619); and a rack (611) meshing with a first gear (621) is fixedly connected between the two limiting blocks (612).

7. The all-round adjustment mechanism for welding bellows in an optical system according to claim 6, characterized in that: A No. 1 threaded block (615) is fixedly connected to the side of the back of the rack (611) away from the welding bellows body (5); a guide rod (616) is slidably penetrated through the center of the No. 1 threaded block (615); a No. 1 fixing plate (617) is fixedly connected to the end of the guide rod (616) away from the welding bellows body (5); a collar (618) is fixedly connected to one side of the No. 1 fixing plate (617); a No. 1 locking screw (614) is threadedly connected to the side of the No. 1 threaded block (615) away from the rack (611); one end of the No. 1 locking screw (614) is in contact with the outer wall of the guide rod (616), and the other end of the No. 1 locking screw (614) is fixedly connected to a hand wheel.

8. The all-round adjustment mechanism for welding bellows in an optical system according to claim 1, characterized in that: A plurality of rubber shock-absorbing pads (10) are evenly and fixedly connected to the bottom of the base (44); an anti-skid pad (9) is evenly and fixedly connected to the bottom of the rubber shock-absorbing pad (10); and a plurality of anti-skid grooves are evenly provided at the bottom of the anti-skid pad (9).

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