A single-chamber passive airbag

Abstract

This invention relates to the field of semiconductor technology, specifically to a single-chamber passive airbag, comprising: a body, which includes a shell, an air membrane, and a piston; an air chamber is formed between the air membrane and the piston, and a venting pipe is connected to the side wall of the shell corresponding to the air chamber; a support platform, disposed above the air membrane and fixedly connected to the air membrane, with an additional support area at the upper end of the support platform; and an adjustment component, including a drive end and an execution end, the execution end being located inside the shell and connected to the piston, adjusting the volume of the air chamber under the action of the drive end to change the stiffness and natural frequency of the passive airbag. In this invention, the relative movement of the lateral part and the lifting part causes the lifting part to drive the piston to move up and down, thereby changing the volume of the air chamber. Simultaneously, the volume of the air chamber can be finely adjusted to meet the stiffness requirements of the airbag under different working environments, and it also has a certain load-bearing capacity.

Description

Technical Field

[0001] This invention relates to the field of semiconductor technology, and in particular to a single-cavity passive airbag. Background Technology

[0002] Semiconductor manufacturing involves many precise mechanical and electronic operations, such as wafer processing, etching, photolithography, and ion implantation. These steps must be performed in cleanrooms and are highly sensitive to even minor environmental changes. Even small vibrations can significantly impact product yield; therefore, passive vibration isolators are necessary for effective isolation in critical areas. Simultaneously, the packaging process requires encapsulating chips from the wafer into various package types, such as DIP, QFP, and BGA, which also demands high precision and reliability from the packaging equipment.

[0003] Traditional airbags, once manufactured, have fixed stiffness and damping that cannot be adjusted. Furthermore, complex environmental interference can affect the airbag's stiffness and load-bearing capacity. The contact area of ​​the airbag itself is difficult to change, making it impossible to adjust the airbag's natural frequency. The only way to change the airbag's natural frequency is to modify its structural parameters. Current technologies alter the airbag's natural frequency by changing the volume of the air chamber through inflation / deflation or adding auxiliary airbags. However, these methods cannot adjust the airbag's natural frequency according to different working conditions and require additional space.

[0004] Therefore, this application develops a single-cavity passive airbag to solve the problems existing in the prior art. Summary of the Invention

[0005] The purpose of this invention is to provide a single-cavity passive airbag to solve the problems in the prior art where it is difficult to change the stiffness of the airbag itself and it is impossible to ensure the load-bearing capacity of the airbag while making the airbag have strong stiffness.

[0006] The technical solution of this invention is: a single-cavity passive airbag, comprising:

[0007] The body includes a shell, an air film, and a piston; an air chamber is formed between the air film and the piston, and a vent pipe is connected to the side wall of the shell corresponding to the air chamber.

[0008] A support platform is set above the air membrane and fixedly connected to the air membrane, and the upper end of the support platform has an additional support area.

[0009] The adjustment component includes a drive end and an actuation end. The actuation end is located inside the housing and connected to the piston. It is adjusted by the drive end to regulate the volume of the air chamber and change the stiffness and natural frequency of the passive airbag.

[0010] Preferably, the air film includes a mounting surface, an abutment surface, and a connecting surface. The mounting surface is disposed between the housing and the support platform and surrounds the top of the air chamber in an annular shape. The abutment surface is in contact with the bottom end of the support platform. The outer contour of the abutment surface is connected to the inner contour of the mounting surface through the connecting surface and forms a cavity with the outer wall surface of the support platform.

[0011] Preferably, the connecting surface extends from the inner contour of the mounting surface to the outer contour of the abutting surface and is inclined.

[0012] Preferably, the actuator includes a lateral moving part and a pair of lifting parts. The lateral moving part is located between the pair of lifting parts. The lateral moving part is rotatably connected to the drive end via a control rod. A through hole is provided on the side wall of the housing corresponding to the position of the control rod for rotating the control rod and moving the lateral moving part. The contact surface between the lateral moving part and the lifting parts is an inclined surface. When the drive end drives the control rod to rotate, the lateral moving part moves radially along the housing and slides relative to the two lifting parts, causing the lifting parts to rise or fall and change the volume of the air chamber.

[0013] Preferably, the inclined surface of the lateral moving part is provided with a groove, and the inclined surface of the lifting part is provided with a protrusion that matches the groove. When the groove matches the protrusion, the lifting part and the lateral moving part fit tightly together.

[0014] Preferably, the transverse part is provided with a groove along the axial direction of the housing, a guide post is provided in the groove, the guide post is provided along the axial direction of the housing, the end of the control rod away from the drive end penetrates the radial direction of the guide post and is rotatably connected to the guide post, and the end away from the drive end is also provided with a limiting block.

[0015] Preferably, the piston has a sleeve on the side that contacts the actuator and the bottom of the housing. The sleeve is fitted onto both ends of the guide post. When the lifting part moves, the sleeve slides along the axial direction of the guide post.

[0016] Preferably, the outer wall surface of the piston is provided with a plurality of sealing rings, and the sealing rings are tightly fitted to the inner wall of the gas chamber.

[0017] Preferably, a sensor is provided at the bottom of the housing to measure the height of the piston, thereby adjusting the volume of the air chamber.

[0018] Compared with the prior art, the advantages of the present invention are:

[0019] (1) By moving the lateral part and the lifting part relative to each other, the lifting part drives the piston to move up and down, thereby changing the volume of the air chamber. At the same time, the volume of the air chamber can be finely adjusted to meet the stiffness requirements of the airbag under different working environments, and it has a certain load-bearing capacity.

[0020] (2) The air film is set between the bearing platform and the shell to improve the air tightness of the air chamber, and the air film and the outer wall of the bearing platform form a cavity. After the air is filled into the air chamber, the connecting surface of the air film deforms in the direction of the cavity and is supported on the outer wall of the bearing platform and the inner wall of the shell, providing radial support force to prevent the bearing platform from moving laterally or misaligning.

[0021] (3) A groove is provided on the transverse part and a guide post is provided. The control rod is rotatably connected to the guide post. When the transverse part moves, the guide post moves in the groove, reducing the space occupied at the end of the transverse part. In the confined space, not only can the natural frequency of the airbag be adjusted, but the space occupied by the confined space can also be reduced. Attached Figure Description

[0022] The present invention will be further described below with reference to the accompanying drawings and embodiments:

[0023] Figure 1 This is a schematic diagram of the internal structure of a single-cavity passive airbag according to the present invention;

[0024] Figure 2 This is a schematic diagram of the internal explosion of a single-chamber passive airbag according to the present invention;

[0025] Figure 3 This is a schematic diagram of the initial position of a single-cavity passive airbag according to the present invention;

[0026] Figure 4 This is a schematic diagram of the single-chamber passive airbag according to the present invention after the air chamber volume is adjusted;

[0027] Figure 5 This is a cross-sectional view of a single-cavity passive airbag according to the present invention;

[0028] Figure 6 This is a schematic diagram of the structure of a single-cavity passive airbag according to the present invention.

[0029] The components are: 1. Body; 11. Shell; 12. Air film; 121. Mounting surface; 122. Abutment surface; 123. Connecting surface; 124. Chamber; 13. Piston; 14. Air chamber; 15. Sealing ring;

[0030] 2. Supporting platform;

[0031] 3. Adjustment component; 31. Drive end; 32. Actuation end; 321. Lateral movement part; 322. Lifting part; 323. Slide groove; 324. Protrusion; 325. Groove; 326. Guide post; 327. Limiting block; 328. Sleeve; 33. Control rod; 34. Through hole;

[0032] 4. Sensors. Detailed Implementation

[0033] The present invention will be further described in detail below with reference to specific embodiments:

[0034] like Figures 1-5 As shown, a single-chamber passive airbag includes a body 1, a support platform 2, and an adjustment assembly 3. The body 1 includes a shell 11, an air membrane 12, and a piston 13. The air membrane 12 is located on top of the shell 11 and is fixedly connected to the support platform 2. The support platform 2 is located above the air membrane 12 and has an additional load-bearing area for supporting a workbench or other equipment. The piston 13 is disposed inside the shell 11 and forms an air chamber with the air membrane 12. A vent pipe is connected to the side wall of the shell 11 corresponding to the air chamber and is connected to an external air pump to vent air into the air chamber. At the same time, the drive end 31 located outside the shell 11 drives the actuator end 32 located inside the shell 11 to move, changing the volume of the air chamber, thereby changing the stiffness and natural frequency of the airbag. The stiffness requirements of the airbag in different working environments can be achieved by fine-tuning the actuator end 32, and the airbag can have a certain load-bearing capacity.

[0035] After inflating the air chamber, the airbag stiffness is changed by adjusting the volume of the air chamber using the adjusting component 3. To meet the stiffness requirements of the airbag, the airtightness of the air chamber is crucial. Poor airtightness can lead to external gas or moisture seeping into the air chamber, affecting the stiffness and stability of the airbag. In this embodiment, the air membrane 12 includes a mounting surface 121, an abutment surface 122, and a connecting surface 123. The mounting surface 121 is located between the housing 11 and the support platform 2, and is annularly surrounding the top of the air chamber, helping to enhance the connection between the air membrane 12 and the housing 11 and the support platform 2. The connection stability between the ring structure and the gas film 12 is ensured. The ring structure can evenly distribute the pressure and prevent the gas film 12 from shifting or deforming when subjected to external forces. The contact surface 122 is attached to the bottom of the support platform 2. The gas film 12 can provide additional support for the support platform 2, which helps to enhance the stability of the support platform 2 in the semiconductor manufacturing process and prevents it from shifting due to vibration or external forces. The connecting surface 123 connects the inner contour of the mounting surface 121 with the outer contour of the contact surface 122 to form a complete structure, which can prevent gas leakage and infiltration.

[0036] Furthermore, the air membrane 12 and the outer wall of the support platform 2 form a cavity 124, and the connecting surface 123 extends from the inner contour of the mounting surface 121 to the outer contour of the abutment surface 122 and is inclined. The design of the cavity 124 increases the contact area between the air membrane 12 and the support platform 2, thereby improving the stability of the entire structure and providing an additional buffer space for the air membrane 12. The connecting surface 123 is inclined, and the housing 11 corresponding to the connection between the mounting surface 121 and the connecting surface 123 is chamfered, which provides a guiding effect for the deformation of the air membrane 12. After the air is inflated into the air chamber, the connecting surface 123 of the air membrane 12 deforms in the direction of the cavity 124. The deformed air membrane 12 is supported on the outer wall of the support platform 2 and the inner wall of the housing 11, providing radial support force on the housing 11 to prevent the support platform 2 from moving or misaligning, while also reducing the risk of gas leakage and ensuring stable air pressure inside the airbag.

[0037] In order to achieve the adjustment of the air chamber volume and the airbag stiffness, in this embodiment, the actuator 32 includes a transverse part 321 and a pair of lifting parts 322. The transverse part 321 is rotatably connected to the drive end 31 through the control rod 33. When the drive end 31 drives the control rod 33 to rotate, the transverse part 321 moves along the axial direction of the control rod 33. A through hole 34 is provided on the side wall of the corresponding housing 11 to provide movement space for the control rod 33 and the transverse part 321. The contact surface between the lifting part 322 and the transverse part 321 is an inclined surface. When the transverse part 321 moves radially along the housing 11, the lifting part 322 moves axially in the housing 11 through the mutual sliding of the inclined surfaces, thereby causing the piston 13 to rise or fall to change the volume of the air chamber. The design of the inclined surface makes it easier for the lifting part 322 to move axially under the action of the transverse part 321, reducing friction and resistance, improving motion efficiency, and making the movement of the lifting part 322 more precise and controllable.

[0038] The formula for calculating the natural frequency of the air film is as follows:

[0039]

[0040] f: natural frequency;

[0041] k: Gas polyvariance index, which is 1.4;

[0042] F0: Initial load, i.e., the initial stiffness of the airbag;

[0043] A: Effective load-bearing area of ​​the air-supported membrane;

[0044] P a Gauge pressure;

[0045] D: Diameter of the air chamber;

[0046] L0: Initial effective depth of the air chamber;

[0047] L1: Adjust height.

[0048] As can be seen from the above formula, after a single-chamber passive airbag is manufactured, the effective bearing area of ​​the air membrane will not change, and the diameter and effective depth of the air chamber will also remain unchanged. The natural frequency of the single-chamber passive airbag can only be changed by adjusting L1.

[0049] Furthermore, a groove 323 is provided on the inclined surface of the transverse part 321, and a protrusion 324 matching the groove 323 is provided on the inclined surface of the lifting part 322. The matching of the groove 323 and the protrusion 324 enables the lifting part 322 to move along a specific path under the drive of the transverse part 321, thereby achieving precise control of the air chamber volume. When the groove 323 and the protrusion 324 are matched, the lifting part 322 and the transverse part 321 fit tightly together, which can reduce the shaking of the lifting part 322 and the transverse part 321 during the movement, thereby enhancing the stability of the entire airbag structure. At the same time, it can also counteract the force perpendicular to the moving direction of the transverse part 321 and prevent the transverse part 321 from deviating during the movement.

[0050] When adjusting the volume of the air chamber through the relative movement of the lateral moving part 321 and the lifting part 322, sufficient space needs to be provided in the axial direction of the housing 11 for the lateral moving part 321 to move. The control rod 33 penetrates the lateral moving part 321 and is rotatably connected to it. When the control rod 33 rotates, it controls the lateral moving part 321 to rotate. At this time, the lateral moving part 321 needs to have a relatively long moving space, which increases the volume of the single-chamber passive airbag. In order to reduce the space occupancy of the single-chamber passive airbag in the confined space, the lateral moving part 321 is provided with a groove 325 along the longitudinal direction of the housing 11, and a guide post 326 is provided in the groove 325. The control rod 33 penetrates the lateral moving part 321. 21 moves along the cross section of the groove 325 and penetrates the guide post 326, and is rotatably connected to the guide post 326. One end of the control rod 33 connected to the guide post 326 is also provided with a limiting block 327 to limit the movement range of the control rod 33 and prevent the control rod 33 from exceeding the predetermined position during movement. When the lateral movement part 321 moves, the groove 325 moves accordingly, and the guide post 326 is always in the groove 325. The setting of the groove 325 not only reduces the weight of the single-chamber passive airbag, making it easier to adjust the volume of the air chamber, but also shortens the movement distance of the lateral movement part 321 and reduces the volume occupied by the single-chamber passive airbag by setting one end of the control rod 33 on the guide post 326.

[0051] Furthermore, a sleeve 328 is provided on the side of the piston 13 that contacts the actuator end 32 and on the bottom of the housing 11. The sleeve 328 is sleeved on both ends of the guide post 326. When the lifting part 322 moves, the sleeve 328 slides along the axial direction of the guide post 326. The cooperation between the guide post 326 and the sleeve 328 provides a clear path for the movement of the lifting part 322, ensuring the stability and accuracy of the lifting part 322 during the movement process.

[0052] Furthermore, the outer wall of the piston 13 is provided with multiple sealing rings 14. The sealing rings 14 are tightly fitted with the inner wall of the air chamber to ensure the sealing between the piston 13 and the air chamber, prevent internal gas leakage, and also ensure the pressure inside the air chamber is stable, avoiding system pressure fluctuations caused by gas leakage.

[0053] To more accurately measure the change in air chamber volume, a sensor 4 is installed at the bottom of the housing 11. The height of the piston 13 is measured by the sensor 4, thereby calculating the volume of the air chamber.

[0054] The implementation principle of this embodiment:

[0055] While altering the airbag stiffness and ensuring load-bearing capacity, air is inflated into the air chamber through the venting tube. Subsequently, the drive end 31 rotates, causing the control rod 33 to rotate. One end of the control rod 33 is connected to the guide post 326. The control rod 33 rotates within the lateral movement part 321 and the guide post 326. The guide post 326 is fixed to the bottom of the housing 11. The lateral movement part 321 moves axially along the control rod 33. The lifting plate, which slides against the lateral movement part 321, causes the lifting part 322 to rise and fall under the action of the inclined surface. This changes the volume of the air chamber, thus altering the rigidity of the airbag. During the movement of the transverse section 321, the guide post 326, located within the groove 325, reduces the movement distance of the transverse section 321, thereby reducing the space occupied by the single-chamber passive airbag. After air is introduced into the air chamber, the connecting surface 123 of the air membrane 12 deforms into the chamber 124 and is supported on the outer wall of the bearing platform 2 and the inner wall of the shell 11, providing radial support for both and preventing radial displacement or misalignment of the bearing platform 2.

[0056] The above embodiments are merely illustrative of the technical concept and features of the present invention, intended to enable those skilled in the art to understand the content of the present invention and implement it accordingly, and should not be construed as limiting the scope of protection of the present invention. It will be apparent to those skilled in the art that the present invention is not limited to the details of the above exemplary embodiments, and that the present invention can be implemented in other specific forms without departing from the spirit or essential characteristics of the present invention. Therefore, the embodiments should be considered exemplary and non-limiting in all respects. The scope of the present invention is defined by the appended claims rather than the foregoing description, and thus all changes falling within the meaning and scope of the equivalents of the claims are intended to be included within the present invention.

Claims

1. A single-cavity passive airbag, characterized in that, include: The body (1) includes a shell (11), an air film (12) and a piston (13); an air chamber (14) is formed between the air film (12) and the piston (13), and a vent pipe is connected to the side wall of the shell (11) corresponding to the air chamber (14); The support platform (2) is set above the air membrane (12) and is fixedly connected to the air membrane (12). The upper end of the support platform (2) has an additional support area. The adjustment component (3) includes a drive end (31) and an execution end (32). The execution end (32) is located inside the housing (11) and connected to the piston (13). It is adjusted by the drive end (31) to change the volume of the air chamber (14) and the stiffness and natural frequency of the passive airbag. The actuator (32) includes a transverse part (321) and a pair of lifting parts (322). The transverse part (321) is located between the pair of lifting parts (322). The transverse part (321) is rotatably connected to the drive end (31) via a control rod (33). A through hole (34) is provided on the side wall of the housing (11) corresponding to the position of the control rod (33) for rotating the control rod (33) and moving the transverse part (321). The contact surface between the transverse part (321) and the lifting part (322) is an inclined surface. When the drive end (31) drives the control rod (33) to rotate, the transverse part (321) moves radially along the housing (11) and slides relative to the two lifting parts (322), causing the lifting parts (322) to rise or fall, thereby changing the volume of the air chamber (14).

2. The single-cavity passive airbag according to claim 1, characterized in that: The air film (12) includes a mounting surface (121), an abutment surface (122), and a connecting surface (123). The mounting surface (121) is disposed between the housing (11) and the support platform (2) and surrounds the top of the air chamber (14) in an annular shape. The abutment surface (122) is in contact with the bottom end of the support platform (2). The outer contour of the abutment surface (122) is connected to the inner contour of the mounting surface (121) through the connecting surface and forms a cavity (124) with the outer wall surface of the support platform (2).

3. A single-cavity passive airbag according to claim 2, characterized in that: The connecting surface (123) extends from the inner contour of the mounting surface (121) to the outer contour of the abutting surface (122) and is inclined.

4. A single-cavity passive airbag according to claim 1, characterized in that: The inclined surface of the transverse part (321) is provided with a groove (323), and the inclined surface of the lifting part (322) is provided with a protrusion (324) that matches the groove (323). When the groove (323) matches the protrusion (324), the lifting part (322) and the transverse part (321) fit together tightly.

5. A single-cavity passive airbag according to claim 1, characterized in that: The transverse part (321) is provided with a groove (325) along the axial direction of the housing (11). A guide post (326) is provided in the groove (325). The guide post (326) is arranged along the axial direction of the housing (11). The end of the control rod (33) away from the drive end (31) penetrates the radial direction of the guide post (326) and is rotatably connected to the guide post (326). The end away from the drive end (31) is also provided with a limiting block (327).

6. A single-cavity passive airbag according to claim 5, characterized in that: The piston (13) is provided with a sleeve (328) on the side that contacts the actuator (32) and the bottom of the housing (11). The sleeve (328) is sleeved on both ends of the guide post (326). When the lifting part (322) moves, the sleeve (328) slides along the axial direction of the guide post (326).

7. A single-cavity passive airbag according to claim 1, characterized in that: The piston (13) has multiple sealing rings (15) on its outer wall surface, and the sealing rings (15) are tightly fitted to the inner wall of the air chamber (14).

8. A single-cavity passive airbag according to claim 1, characterized in that: The bottom of the housing (11) is provided with a sensor (4) for measuring the height of the piston (13) so as to adjust the volume of the air chamber (14).

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