Fixing device for furnace wire of furnace body heater
By designing a furnace body heater furnace wire fixing device composed of multiple fixed units, the problem of insulator loosening and unstable fixation of the furnace wire due to sagging of its own weight is solved, and the stable fixation of the furnace wire is achieved, which improves the service life of the equipment and the yield of the product.
Patent Information
- Application Number
- CN202311109303.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2023-08-30
- Publication Date
- 2025-02-28
AI Technical Summary
After use for a period of time, the furnace wire of the existing furnace body heater will cause the insulator gap to become smaller due to the sagging of the self-weight, which will increase the friction and loosen the insulator, which will lead to the deformation and fixation of the furnace wire, which will affect the service life and product yield.
A fixing device for furnace body heater furnace wire is designed, which is assembled by a plurality of fixed units with the same structure. Each fixing unit includes a front end structure and a tail end structure. The front end structure is provided with a first groove and a second groove, the tail end structure is provided with a third groove and a fourth bump, and the adjacent fixing units form a fastened splicing structure through the clamping structure of the third groove and the fourth bump, fix the furnace wire and stabilize its position.
Through this fixing device, the furnace wire is not prone to deformation and damage, which improves the service life of the furnace body heater and product yield.
Smart Images
Figure CN119533141A_ABST
Abstract
Description
Technical Field
[0001] The invention relates to a semiconductor integrated circuit manufacturing device, in particular to a fixing device for a furnace wire of a furnace heater. Background Art
[0002] In the furnace tube, the furnace heater is a device for providing process temperature. The heating temperature is 400°~1200°. It is a hollow cylinder with a sealed top. The wafer boat loaded with wafers is lifted into the furnace heater by a lift for processing.
[0003] The furnace wire is the heating carrier of the furnace body heater. It is surrounded and spread throughout the entire furnace body heater and is fixed to the furnace body through insulators and through rods.
[0004] After the furnace heater has been used for a period of time, such as more than 3 years, the resistance wire of the furnace body, that is, the furnace wire, will bend and deform. The failure mode is: the weight of the furnace wire sags, causing the gap between the furnace wire and the insulator to become smaller, causing the insulator to tilt, increasing the friction with the through rod, causing the insulator to be unable to absorb the deformation caused by the thermal expansion and contraction of the through rod, causing the insulator to loosen.
[0005] Existing insulator design defects:
[0006] It is fixed with a through rod, which deforms and causes the furnace wire to deform and bulge.
[0007] The front end of the insulator is an arc surface, and there is always a gap, which cannot effectively fix the furnace wire.
[0008] like Figure 1 , which is a schematic diagram of the cross-sectional structure of a furnace body of an existing furnace tube; the furnace body 101 is a hollow cylindrical structure with a sealed top and an open bottom.
[0009] A plurality of wafers 103 are loaded in the wafer boat 102 , and the wafer boat 102 is lifted to a corresponding position in the furnace body 101 by a lift to implement a furnace tube process.
[0010] A heater, namely, a furnace heater, is provided on the inner side surface of the furnace body 101 .
[0011] like Figure 2 1 is a schematic diagram of the top view of the structure of the existing furnace body heater; a heat preservation layer 105 is arranged on the inner wall 104 of the furnace body 101. The heater is arranged inside the heat preservation layer 105, and the heater is formed by a furnace wire 109, i.e., a resistance wire, surrounding the furnace body 101.
[0012] The furnace wire 109 needs to be fixed by an insulator 106 and a through rod 108 . Figure 2 , a plurality of insulators 106 are shown, and each insulator 106 is located at the same height of the furnace body 101 , and is used for passing a circle of the furnace wire 109 . Figure 2 In the top view, the insulators 106 corresponding to each angular position correspond to a row of superimposed insulators 106 .
[0013] Each of the insulators 106 has a rod-penetrating hole 107 , and the rod-penetrating holes 107 of the insulators 106 in the same row are aligned and allow the rod 108 to pass through for fixation.
[0014] A hole for the furnace wire 109 to pass through is formed between the two insulators 106 .
[0015] like Figure 3A As shown, it is a schematic diagram of the superimposed structure of two adjacent insulators in an existing furnace heater; the insulator on the top is individually marked with a mark 106a, and the furnace wire passing through the top of the insulator 106a is individually marked with a mark 109a. It can be seen from the front end area shown in the box 110 that the contact surfaces of the two insulators 106 and 106a are both arc surfaces, and there is a gap shown by circle 111 between the two insulators 106 and 106a. As the use time increases, the furnace wire 109a will move along the arrow line 113, and the gap shown by circle 111 will cause the insulator 106a to rotate along the arrow line 112 and move to the position corresponding to the dotted line 114, and the insulator 106a will tilt. As shown Figure 3B As shown, Figure 3A The schematic diagram of the insulator at the top in the middle after being tilted, the tilted insulator is individually indicated by a mark 106b.
[0016] like Figure 3C As shown, Figure 3B It can be seen that as the furnace heater is used for a longer time, the furnace wire 109a will sag, the insulator 106a will tilt, and finally, the through rod 108 passing through the through rod hole 107 will also deform, which will eventually cause the furnace wire 109a to be unable to be effectively fixed, resulting in the furnace wire 109a being deformed and bulging. Figure 4 Shown is a photograph of an existing furnace heater; Figure 4 In the figure, the insulator is indicated by 206 and the furnace wire is indicated by 209. It can be seen that there are protruding furnace wires at many positions of the entire heater, as shown by 209. Summary of the invention
[0017] The technical problem to be solved by the present invention is to provide a fixing device for furnace wire of furnace heater, which can effectively fix the furnace wire and make the furnace wire not easy to deform and damage, thereby increasing the service life of the furnace heater and improving the product yield.
[0018] In order to solve the above technical problems, the fixing device of the furnace wire of the furnace heater provided by the present invention is assembled from a plurality of fixing units with the same structure.
[0019] Each of the fixing unit structures comprises: a front end structure and a rear end structure connected into one body.
[0020] The front end structure is provided with a first groove and a second groove.
[0021] The first groove is a groove recessed downward from the top surface of the front end structure, the notch of the first groove is located on the top surface of the front end structure, and the concave body of the first groove is located inside the front end structure.
[0022] The second groove is a groove that is concave upward from the bottom surface of the front end structure, the notch of the second groove is located on the bottom surface of the front end structure, and the concave body of the second groove is located inside the front end structure.
[0023] The tail end structure is provided with a third groove and a fourth protrusion.
[0024] The third groove is a groove recessed downward from the top surface of the tail end structure, the notch of the third groove is located on the top surface of the tail end structure, and the concave body of the third groove is located inside the tail end structure.
[0025] The fourth bump is a bump extending downward from the bottom top surface of the tail end structure, the top surface of the fourth bump is located on the bottom surface of the tail end structure, and the convex body of the fourth bump is located below the bottom surface of the tail end structure.
[0026] Two adjacent fixing units form a first splicing structure, in which the fourth protrusion of the fixing unit at the top is clamped in the third groove of the fixing unit at the bottom, so as to realize the fixed splicing between the fixing unit at the top and the fixing unit at the bottom; the notch of the first groove of the fixing unit at the bottom and the notch of the second groove of the fixing unit at the top are butted together, and the concave body of the first groove and the concave body of the second groove are spliced to form a first hole, and the first hole is for the furnace wire to pass through.
[0027] A further improvement is that, in the cross-sectional structure along the direction from the front end structure to the rear end structure, the first groove is in an arc shape, the second groove is in an arc shape, and the first hole is circular.
[0028] A further improvement is that, in the cross-sectional structure along the direction from the front end structure to the rear end structure, the first groove and the second groove are both semicircular.
[0029] A further improvement is that, in the cross-sectional structure along the direction from the front end structure to the rear end structure, the concave body of the third groove and the convex body of the fourth protrusion are both dovetail-shaped.
[0030] A further improvement is that when two adjacent fixing units are spliced together, outside the notch of the first groove of the bottom fixing unit and outside the top surface of the fourth protrusion, the bottom surface of the top fixing unit and the top surface of the bottom fixing unit are in planar contact.
[0031] A further improvement is that a plurality of pairs of the third grooves and the fourth protrusions that cooperate with each other are provided in the tail end structure.
[0032] A further improvement is that the furnace body is a hollow cylindrical structure with a sealed top and an open bottom.
[0033] A further improvement is that the heater is formed by laying the furnace wires in circles along the inner surface of the furnace body from the bottom to the top.
[0034] A further improvement is that, along the direction from the bottom to the top of the furnace body, the fixing units in the same row are sequentially spliced together in the manner of the first splicing structure to form a splicing row.
[0035] A further improvement is that, along a circumference of the furnace body, the fixing device includes a plurality of the splicing rows.
[0036] A further improvement is that the front end structure and the rear end structure of each fixing unit are made of the same insulating material.
[0037] The present invention arranges a third groove and a fourth protrusion in the tail end structure of the fixing unit, and the third grooves and the fourth protrusions of adjacent fixing units will be locked with each other so that the two adjacent fixing units can be spliced to form a fastened first splicing structure. Since the first splicing structure is a fastening structure, it is not easy for the two adjacent fixing units to slide and deform, so that the structure of the first hole formed by the first groove and the second groove in the front end structure is stable, which can make the furnace wire stable inside the first hole, so that the furnace wire is not easy to be deformed and damaged. Therefore, the present invention can effectively fix the furnace wire and make it not easy to be deformed and damaged, thereby improving the service life of the furnace heater and improving the product yield. BRIEF DESCRIPTION OF THE DRAWINGS
[0038] The present invention is further described in detail below with reference to the accompanying drawings and specific embodiments:
[0039] Figure 1 It is a schematic diagram of the cross-sectional structure of a furnace body of an existing furnace tube;
[0040] Figure 2It is a schematic diagram of the top view structure of an existing furnace heater;
[0041] Figure 3A It is a schematic diagram of the superimposed structure of two adjacent insulators in an existing furnace heater;
[0042] Figure 3B yes Figure 3A Schematic diagram of the insulator at the top of the middle after tilting;
[0043] Figure 3C yes Figure 3B The corresponding stereogram;
[0044] Figure 4 Here is a photo of the existing furnace heater;
[0045] Figure 5A is a side view of a fixing unit of a furnace wire of a furnace heater according to an embodiment of the present invention;
[0046] Figure 5B is a side view of a first splicing structure formed by splicing two adjacent fixing units of a furnace wire of a furnace heater according to an embodiment of the present invention;
[0047] Figure 6 yes Figure 5B The corresponding stereogram;
[0048] Figure 7 is a photograph of a furnace heater according to an embodiment of the present invention. DETAILED DESCRIPTION
[0049] like Figure 5A , which is a side view of a fixing unit of a heater wire of a furnace body 101 according to an embodiment of the present invention; Figure 5B FIG. 1 is a side view of a first splicing structure formed by splicing two adjacent fixing units of a heater wire of a furnace body 101 according to an embodiment of the present invention; Figure 6 yes Figure 5B Corresponding stereogram; the fixing device of the heater wire of the furnace body 101 of the embodiment of the present invention is assembled from a plurality of fixing units of the same structure.
[0050] like Figure 5A As shown, each of the fixing units 301 comprises a front end structure and a rear end structure connected into one body.
[0051] In the embodiment of the present invention, the front end structure and the rear end structure of each fixing unit 301 are made of the same insulating material.
[0052] The front end structure is provided with a first groove 302a and a second groove 302b.
[0053] The first groove 302a is a groove recessed downward from the top surface of the front end structure. The notch of the first groove 302a is located on the top surface of the front end structure, and the concave body of the first groove 302a is located inside the front end structure.
[0054] The second groove 302b is a groove concave upward from the bottom surface of the front end structure, the notch of the second groove 302b is located on the bottom surface of the front end structure, and the concave body of the second groove 302b is located inside the front end structure.
[0055] The tail end structure is provided with a third groove 303a and a fourth protrusion 303b.
[0056] The third groove 303a is a groove concave downward from the top surface of the tail end structure. The notch of the third groove 303a is located on the top surface of the tail end structure, and the concave body of the third groove 303a is located inside the tail end structure.
[0057] The fourth bump 303b is a bump extending downward from the bottom top surface of the tail end structure, the top surface of the fourth bump 303b is located on the bottom surface of the tail end structure, and the convex body of the fourth bump 303b is located below the bottom surface of the tail end structure.
[0058] like Figure 5B Shown and referenced Figure 6 As shown, two adjacent fixing units 301 form a first splicing structure, in which the fourth protrusion 303b of the fixing unit 301 at the top is clamped in the third groove 303a of the fixing unit 301 at the bottom, and the clamping structure formed is shown as marked 303, thereby realizing the fixed splicing between the fixing unit 301 at the top and the fixing unit 301 at the bottom; the notch of the first groove 302a of the fixing unit 301 at the bottom and the notch of the second groove 302b of the fixing unit 301 at the top are butt-jointed together, and the concave body of the first groove 302a and the concave body of the second groove 302b are spliced to form a first hole 302, and the first hole 302 is for the furnace wire 305 to pass through.
[0059] In the embodiment of the present invention, in the cross-sectional structure along the direction from the front end structure to the rear end structure, the first groove 302a is in an arc shape, the second groove 302b is in an arc shape, and the first hole 302 is in a circle. Preferably, in the cross-sectional structure along the direction from the front end structure to the rear end structure, both the first groove 302a and the second groove 302b are in a semicircle.
[0060] In the embodiment of the present invention, in the cross-sectional structure in the direction from the front end structure to the rear end structure, the concave body of the third groove 303a and the convex body of the fourth protrusion 303b are both dovetail-shaped. In the embodiment of the present invention, there is only one pair of the concave body of the third groove 303a and the convex body of the fourth protrusion 303b. In other embodiments, it is also possible that: the rear end structure is provided with multiple pairs of the third groove 303a and the fourth protrusion 303b that cooperate with each other.
[0061] In the embodiment of the present invention, when two adjacent fixing units 301 are connected, the bottom surface of the fixing unit 301 at the top and the top surface of the fixing unit 301 at the bottom are in plane contact outside the notch of the first groove 302a of the fixing unit 301 at the bottom and outside the top surface of the fourth protrusion 303b. This makes the front contact area shown in the dotted line frame 307, the contact surface 308 is in plane contact, and there is no Figure 3A The corresponding gap in the existing structure can cause the fixing unit 301 on the top to be tilted.
[0062] The entire furnace body 101 structure of the present invention is also referred to Figure 1 As shown, the furnace body 101 is a hollow cylindrical structure, with a sealed top and an open bottom.
[0063] The heater is formed by laying the furnace wire 305 in circles along the inner surface of the furnace body 101 from the bottom to the top.
[0064] Along the direction from the bottom to the top of the furnace body 101 , the fixing units 301 in the same row are sequentially spliced together according to the first splicing structure to form a splicing row.
[0065] On a circumference along the furnace body 101 , the fixing device includes a plurality of the splicing rows.
[0066] In the embodiment of the present invention, a third groove 303a and a fourth protrusion 303b are arranged in the tail end structure of the fixing unit 301. The third groove 303a and the fourth protrusion 303b of adjacent fixing units 301 will be locked with each other so that two adjacent fixing units 301 can be spliced to form a fastened first splicing structure. Since the first splicing structure is a fastening structure, it is not easy for the two adjacent fixing units 301 to slide and deform, so that the structure of the first hole 302 formed by the first groove 302a and the second groove 302b in the front end structure is stable, and the furnace wire 305 can be stabilized inside the first hole 302, so that the furnace wire 305 is not easy to be deformed and damaged. Therefore, the embodiment of the present invention can effectively fix the furnace wire 305, so that the furnace wire 305 is not easy to be deformed and damaged, thereby improving the service life of the heater of the furnace body 101 and improving the product yield.
[0067] like Figure 7 As shown, it is a photo of the furnace heater according to an embodiment of the present invention; the splicing column formed by the fixing unit 301 is individually indicated by a mark 401, and the furnace wire is individually indicated by a mark 402. It can be seen that the furnace wire 402 according to the embodiment of the present invention is well fixed and thus not easily deformed, which can ultimately improve the service life and product yield.
[0068] The present invention has been described in detail above through specific embodiments, but these do not constitute a limitation of the present invention. Without departing from the principle of the present invention, those skilled in the art may also make many variations and improvements, which should also be regarded as the protection scope of the present invention.
Claims
1. A fixing device for a furnace heater wire, characterized in that: The fixing device is assembled from a plurality of fixing units with the same structure; Each of the fixed unit structures comprises: a front end structure and a rear end structure connected into one body; The front end structure is provided with a first groove and a second groove; The first groove is a groove concave downward from the top surface of the front end structure, the notch of the first groove is located on the top surface of the front end structure, and the concave body of the first groove is located inside the front end structure; The second groove is a groove that is concave upward from the bottom surface of the front end structure, the notch of the second groove is located on the bottom surface of the front end structure, and the concave body of the second groove is located inside the front end structure; The tail end structure is provided with a third groove and a fourth protrusion; The third groove is a groove concave downward from the top surface of the tail end structure, the notch of the third groove is located on the top surface of the tail end structure, and the concave body of the third groove is located inside the tail end structure; The fourth protrusion is a protrusion extending downward from the bottom top surface of the tail end structure, the top surface of the fourth protrusion is located on the bottom surface of the tail end structure, and the protrusion of the fourth protrusion is located below the bottom surface of the tail end structure; Two adjacent fixing units form a first splicing structure, in which the fourth protrusion of the fixing unit at the top is clamped in the third groove of the fixing unit at the bottom, so as to realize the fixed splicing between the fixing unit at the top and the fixing unit at the bottom; the notch of the first groove of the fixing unit at the bottom and the notch of the second groove of the fixing unit at the top are butted together, and the concave body of the first groove and the concave body of the second groove are spliced to form a first hole, and the first hole is for the furnace wire to pass through.
2. The fixing device for furnace wire of furnace heater according to claim 1, characterized in that: In the cross-sectional structure along the direction from the front end structure to the rear end structure, the first groove is in an arc shape, the second groove is in an arc shape, and the first hole is in a circle.
3. The fixing device for furnace wire of furnace heater according to claim 2, characterized in that: In the cross-sectional structure along the direction from the front end structure to the rear end structure, both the first groove and the second groove are semicircular.
4. The fixing device for furnace wire of furnace heater according to claim 1, characterized in that: In the cross-sectional structure along the direction from the front end structure to the rear end structure, the concave body of the third groove and the convex body of the fourth protrusion are both dovetail-shaped.
5. The fixing device for furnace wire of furnace heater according to claim 1, characterized in that: When two adjacent fixing units are spliced together, outside the notch of the first groove of the bottom fixing unit and outside the top surface of the fourth protrusion, the bottom surface of the top fixing unit and the top surface of the bottom fixing unit are in planar contact.
6. The fixing device for furnace wire of furnace heater according to claim 1, characterized in that: A plurality of pairs of the third grooves and the fourth protrusions that cooperate with each other are arranged in the tail end structure.
7. The fixing device for furnace wire of furnace heater according to claim 1, characterized in that: The furnace body is a hollow cylindrical structure with a sealed top and an open bottom.
8. The fixing device for furnace wire of furnace heater according to claim 7, characterized in that: The heater is formed by laying the furnace wires in circles along the inner surface of the furnace body from the bottom to the top.
9. The fixing device for furnace wire of furnace heater according to claim 8, characterized in that: Along the direction from the bottom to the top of the furnace body, the fixing units in the same row are sequentially spliced together in the manner of the first splicing structure to form a splicing row.
10. The fixing device for furnace wire of furnace heater according to claim 9, characterized in that: The fixing device includes a plurality of the splicing rows along a circumference of the furnace body.
11. The fixing device for furnace wire of furnace heater according to claim 1, characterized in that: The front end structure and the rear end structure of each fixing unit are made of the same insulating material.