Detachable module for partial pressure display of residual gas analysis instrument

Abstract

The invention discloses a detachable module for partial pressure display of a residual gas analyzer, and relates to the technical field of residual gas analyzers, the detachable module comprises a residual gas analyzer and a partial pressure display module detachably connected with the residual gas analyzer, and the partial pressure display module is provided with a shell and a data processor arranged in the shell. A first butt joint socket and a second butt joint socket are arranged on the inner bottom wall of the shell, a communication LAN port and an I / O output port are installed on a back side plate of the residual gas analyzer, a double-end network cable is connected between the communication LAN port and the first butt joint socket, a male and female adapter is connected between the I / O output port and the second butt joint socket, and a data line is connected between the display screen and the data processor. The device can be used for the residual gas analyzer, partial pressure display is achieved in the direction consistent with a back connector of the residual gas analyzer, and partial pressure display is facilitated while the instrument is integrated into equipment; the partial pressure display module has a detachable function, and all functions of communication are not affected after the partial pressure display module is detached.

Description

Technical Field

[0001] The invention relates to the technical field of residual gas analysis instruments, in particular to a detachable module for partial pressure display of a residual gas analysis instrument. Background Art

[0002] RGA (Residual Gas Analyzer) is an instrument used to measure the gas components (partial pressure) in the process chamber and detect its mass (quantity) (charge) ratio. The total pressure of the mixed gas is the sum of the partial pressures of each component gas. The quadrupole mass spectrometer consists of the following three main components: ion source, quadrupole mass filter and detector. The ion source consists of a pusher cage, a filament, a source cage, an accelerating electrode plate and a focusing plate. The source cage contains the gas molecules / atoms to be measured. When the filament is energized, it will emit negatively charged electrons. It will be pushed by the negatively charged pusher cage and fly toward the source cage. At the same time, it will receive the gravitational force of the positively charged source cage. The accelerated electrons collide with the gas molecules / atoms to be measured in the source cage, causing the gas molecules / atoms to lose an electron and become positively charged ions. The ions are attracted by the accelerating electrode plate and the focusing plate, and will be accelerated to pass through the holes of these two electrode plates.

[0003] A set of DC / RF voltages with opposite polarities are applied to the quadrupole rods. The change in voltage will separate the ions. Ions of different masses can only pass through the quadrupole filter at the voltage corresponding to them. Its resolution depends on the following four points: the length of the quadrupole rod, the RF frequency, the smoothness of the rod surface and its alignment accuracy, and the vacuum quality.

[0004] The number of positive ions received by the detector will respond to a current value of corresponding intensity. After being amplified by the signal amplification circuit module, the current signal is transmitted and the partial pressure value of each gas component is analyzed.

[0005] The RGA residual gas analyzers currently on the market basically do not have a partial pressure display function, and the partial pressure display of the test gas must be obtained through the control of the host computer or PLC communication control; in the prior art, the RGA has a partial pressure display in the form of a digital tube, the display operation is relatively primitive, and the displayed value is on the side, which is not on the same side as the interface. There is no display screen for the operating user to conveniently view the partial pressure of a single gas, which is not convenient for detection and analysis operations. Summary of the invention

[0006] The object of the present invention is to provide a detachable module for partial pressure display of a residual gas analysis instrument to solve the problems raised in the above background technology.

[0007] To achieve the above-mentioned purpose, the present invention provides the following technical solutions: a detachable module for partial pressure display of a residual gas analyzer, comprising: a residual gas analyzer and a partial pressure display module detachably connected to the residual gas analyzer, the partial pressure display module having a shell and a data processor built in the shell, a docking socket 1 and a docking socket 2 being provided on the inner bottom wall of the shell, a communication LAN port and an I / O output port being installed on the back side panel of the residual gas analyzer, a double-headed network cable being connected between the communication LAN port and the docking socket 1, and a male-female adapter being connected between the I / O output port and the docking socket 2;

[0008] It also includes a display screen embedded in the surface wall of the shell. The data processor is connected to the residual gas analyzer via a UART interface. A data line is connected between the display screen and the data processor.

[0009] In a further embodiment, the display screen has a parameter selection display, a voltage division value display, a power supply Power status display, a fault ERROR status display, a filament status display and a detector EM status display.

[0010] In a further embodiment, a plurality of preset threaded holes are provided on the back side plate of the residual gas analyzer, a plurality of mounting holes coaxially distributed with the preset threaded holes are provided on the back side plate of the housing, and bolts threadedly connected with the preset threaded holes are inserted into the mounting holes.

[0011] In a further embodiment, a guide rail is fixed at an inner corner position of the housing, and the guide rail is axially provided with a guide groove that is slidably sleeved on an outer wall of the bolt.

[0012] In a further embodiment, the data processor adopts a processor of model STM32, and the display screen adopts a capacitive touch of model DMG32240C035 03WTC.

[0013] Compared with the prior art, the present invention has the following beneficial effects:

[0014] (1) The present invention can select and configure the partial pressure display according to the type of gas monitored by the user. During the real-time monitoring process, the gas partial pressure that the user wants to view can be observed in real time without operating the host computer software.

[0015] (2) The present invention places the display screen and the back panel of the residual gas analyzer in the same direction, so there is no need to worry about the display viewing angle being blocked when the device is integrated for application.

[0016] (3) The display screen module of the present invention is flexibly designed. If the user does not need to check the gas partial pressure frequently, the user can remove the bolts, separate the housing and the residual gas analyzer, and remove the double-ended network cable and the male and female adapter at the same time to flexibly disassemble the display module. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 It is a schematic diagram of the main structure of the present invention;

[0018] Figure 2 and Figure 3 They are all schematic diagrams of the separation of the partial pressure display module and the residual gas analyzer of the present invention;

[0019] Figure 4 It is a pressure division display flow chart of the present invention;

[0020] Figure 5 It is a schematic diagram of the display interface of the display screen of the present invention.

[0021] In the figure: 1. Shell; 2. Display screen; 3. Mounting hole; 4. Residual gas analyzer; 5. Double-ended network cable; 6. Communication LAN port; 7. I / O output port; 8. Guide rail; 9. Docking socket 1. DETAILED DESCRIPTION

[0022] The following will be described clearly and completely in conjunction with the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0023] Embodiment, this embodiment provides a detachable module for displaying partial pressure of a residual gas analysis instrument, such as Figure 1 and Figure 2 As shown, it includes: a residual gas analyzer 4 and a partial pressure display module detachably connected to the residual gas analyzer 4, such as Figure 2 and Figure 3 As shown, the partial pressure display module has a shell 1 and a data processor built in the shell 1, the inner bottom wall of the shell 1 is provided with a docking socket 1 9 and a docking socket 2, a communication LAN port 6 and an I / O output port 7 are installed on the back side panel of the residual gas analyzer 4, a double-headed network cable 5 is connected between the communication LAN port 6 and the docking socket 1 9, and a male-female adapter is connected between the I / O output port 7 and the docking socket 2; wherein, the data processor adopts a processor of model STM32, and the display screen 2 adopts a capacitive touch screen of model DMG32240C035 03WTC.

[0024] It also includes a display screen 2 embedded in the wall of the housing 1, the data processor is connected to the residual gas analyzer 4 via a UART interface, and a data line is connected between the display screen 2 and the data processor. The display screen 2 has parameter selection display, partial pressure value display, power supply Power status display, fault ERROR status display, filament status display and detector EM status display.

[0025] like Figure 5 As shown, display screen 2 can display the partial pressure of conventional gases that customers need to detect, such as hydrogen H2, helium He, water vapor H2O, nitrogen N2, and oxygen O2, while monitoring the power status, fault ERROR status, filament status, and detector EM status.

[0026] The specific partial pressure display process is: after the residual gas analyzer 4 generates data, the data of the circuit module is transmitted to the display screen 2 to display the corresponding partial pressure value. Specifically, Figure 4 As shown, the data processor and the residual gas analyzer 4 are connected via a UART interface. After the residual gas analyzer 4 is turned on, it scans and transmits the generated data to the data processor for processing. The scanned data is converted into pressure information, and the pressure information is transmitted to the display screen 2 via the UART interface for selecting the gas type and displaying the corresponding pressure. Then the residual gas analyzer 4 stops scanning, the pressure display is reset to zero, and the pressure display ends.

[0027] like Figure 1 As shown, a plurality of preset threaded holes are provided on the back side plate of the residual gas analyzer 4, and a plurality of mounting holes 3 coaxially distributed with the preset threaded holes are provided on the back side plate of the housing 1, and bolts threadedly connected with the preset threaded holes are inserted into the mounting holes 3.

[0028] Specifically, during installation, the housing 1 is attached to the back side plate of the residual gas analyzer 4, ensuring that the mounting hole 3 is coaxially distributed with the preset threaded hole, and then the bolt is passed through the mounting hole 3 and threadedly connected with the preset threaded hole, thereby assembling the partial pressure display module and the residual gas analyzer 4. At the same time, a guide rail 8 is fixed at the inner corner of the housing 1, and the guide rail 8 is axially provided with a guide groove that is slidably sleeved on the outer wall of the bolt, such as Figure 3As shown, by adding a guide rail 8, a guide is provided for the bolt to pass through the mounting hole 3 and accurately connect with the preset threaded hole. By unscrewing the bolts, the partial pressure display module can be removed from the back panel of the residual gas analyzer 4. In this way, the display screen 2 and the back panel of the residual gas analyzer 4 are in the same direction, and there is no need to worry about the display viewing angle being blocked when the device is integrated. In addition, the display screen 2 module is flexibly designed. If the user does not need to check the gas partial pressure frequently, remove the bolts, separate the outer casing 1 and the residual gas analyzer 4, and remove the double-headed network cable 5 and the male and female adapter at the same time, so that the display module can be flexibly disassembled.

[0029] Furthermore, the communication LAN port 6 and the I / O output port 7 of the residual gas analyzer 4 are transferred to the partial pressure display module, which does not affect the communication function and is convenient for users. Figure 2 The DB15 interface of the I / O output port 7 in the voltage divider display module is turned 90° through the male-female adapter and led out to the outside through the bottom wall of the housing 1. Figure 2 The output of the communication LAN port 6 is transferred through a short double-ended network cable 5, and the communication LAN port 6 is turned 90 degrees and led out to the outside at the bottom wall of the housing 1 of the voltage divider display module. Such a design does not affect the communication function.

[0030] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A detachable module for displaying partial pressure of a residual gas analyzer, comprising: A residual gas analyzer (4) and a partial pressure display module detachably connected to the residual gas analyzer (4), characterized in that: The partial pressure display module comprises a housing (1) and a data processor built in the housing (1); a docking socket 1 (9) and a docking socket 2 are provided on the inner bottom wall of the housing (1); a communication LAN port (6) and an I / O output port (7) are installed on the back side panel of the residual gas analyzer (4); a double-headed network cable (5) is connected between the communication LAN port (6) and the docking socket 1 (9); and a male-female adapter is connected between the I / O output port (7) and the docking socket 2; It also includes a display screen (2) embedded in the surface wall of the housing (1); the data processor and the residual gas analyzer (4) are connected via a UART interface; and a data line is connected between the display screen (2) and the data processor.

2. The detachable module for partial pressure display of residual gas analysis instrument according to claim 1, characterized in that: The display screen (2) has parameter selection display, voltage division value display, power supply Power state display, fault ERROR state display, filament state display and detector EM state display.

3. The detachable module for partial pressure display of residual gas analysis instrument according to claim 1, characterized in that: The back side plate of the residual gas analyzer (4) is provided with a plurality of preset threaded holes, the back side plate of the housing (1) is provided with a plurality of mounting holes (3) respectively coaxially distributed with the preset threaded holes, and bolts threadedly connected with the preset threaded holes are inserted into the mounting holes (3).

4. The detachable module for partial pressure display of residual gas analysis instrument according to claim 4, characterized in that: A guide rail (8) is fixed at an inner corner of the housing (1), and the guide rail (8) is axially provided with a guide groove which is slidably sleeved on the outer wall of the bolt.

5. The detachable module for partial pressure display of residual gas analysis instrument according to claim 1, characterized in that: The data processor adopts a processor of model STM32, and the display screen (2) adopts a capacitive touch screen of model DMG32240C03503WTC.

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