Laser radar device based on MEMS galvanometer

Abstract

The invention relates to the technical field of micro electro mechanical systems, and provides an MEMS galvanometer structure and a processing and manufacturing method.The MEMS galvanometer structure comprises an outer shell unit, a combined magnet is arranged in the outer shell unit, a control feedback plate is arranged on one side of the combined magnet, a metal mirror face is arranged on one side of the outer shell unit, and the metal mirror face is provided with a reflection area; two groups of torsion beams and a group of outer frames are arranged on the periphery of the reflection area, a coil unit is arranged on one side of the metal mirror surface, an outgoing line is arranged on the coil unit, the coil unit is electrically connected with the control feedback board, the metal mirror surface is electrically connected with the outer shell unit, and the control feedback board is electrically connected with the outer shell unit. According to the invention, a plurality of assemblies are stacked and combined, so that the structure size is effectively reduced; multiple positions of the structure are used for limiting, and mechanical performance stability is guaranteed; and mature metal materials are utilized, so that the material cost of the M EMS galvanometer is further reduced.

Description

Technical Field

[0001] The present invention relates to the field of laser radar technology, and in particular to a laser radar device. Background Art

[0002] LiDAR is a device that uses laser beams to measure the distance of a target and obtain the surface features of the target. Its specific working principle is to emit a laser beam to the surrounding environment, and obtain the scanning cross section by comparing the echo signal with the transmitted signal, so as to obtain relevant information about the target, such as the target distance, direction, speed, attitude and other parameters. It is widely used in many fields, including self-driving cars, robotics, environmental monitoring, etc.

[0003] Most of the current 3D scanning laser radars use multi-line scanning, that is, multiple lasers are used for transmission, the receiving module receives at the corresponding angle, and a one-dimensional galvanometer or rotating mirror is used internally to turn the optical path, and the three-dimensional scanning distance measurement is achieved by rotating in the horizontal and vertical directions. However, due to the large number of internal components and complex structure of the radar, the vertical volume increases, the power consumption and heat dissipation increase, and the cost remains high, which restricts the development of multi-line laser radar. Summary of the invention

[0004] In order to solve the existing technical difficulties and defects in the laser radar industry, the present invention provides a laser radar device with compact structure, dense dot matrix pixels and low cost.

[0005] A three-dimensional scanning laser radar based on a MEMS galvanometer, comprising: The bottom shell is used to provide structural support for the overall component; the laser transmitting and receiving system array is used to transmit and receive multiple laser beams; the reflection system is used to reflect multiple laser beams; the MEMS galvanometer is used to reflect multiple laser beams to the surrounding environment; the main board is used to control the laser transmitting and receiving system array and the MEMS board and data calculation; the MEMS board is used to control the MEMS galvanometer; the upper shell assembly is used to pass the laser beam and provide protection, power supply and network for the overall structure.

[0006] Preferably, the laser transmitting and receiving system array includes multiple groups of laser transmitting and receiving systems, and the laser transmitting and receiving systems are provided with a transmitting module, an optical-mechanical module, and a receiving module; wherein the laser emitted by the transmitting module is collimated by the optical-mechanical module and then reflected by the reflection system to the MEMS galvanometer, and scans in the vertical and horizontal directions.

[0007] Preferably, the receiving module and the transmitting module are fixed to the optical-mechanical module as a whole by glue, and the rear end of the optical-mechanical module has a glue dispensing groove for accommodating the glue, and the center lines of the three are kept in the same plane.

[0008] Preferably, the multiple groups of laser transmitting and receiving systems are parallel to each other, fixed at different height levels of the bottom shell, and are bilaterally symmetrical with respect to the center normal of the bottom shell.

[0009] Preferably, the bottom shell is provided with a bottom shell supporting module, and N groups of optical channels are provided on the bottom shell supporting module.

[0010] Preferably, the reflector bracket is provided with a plurality of light guide holes, the reflector bracket is fixedly connected to N groups of reflectors, and a colloid is provided on the first surface of the reflector bracket. The colloid includes at least a first colloid and a second colloid, and the colloid is distributed along the circumference of the light guide hole.

[0011] Preferably, the central axes of the plurality of light guide holes coincide with the central axes of the plurality of emission modules, wherein the plurality of light guide holes are bilaterally symmetrical about the central normal line of the reflector bracket.

[0012] Preferably, the MEMS oscillating mirror is mounted on the first surface of the bottom shell supporting module, and the first surface of the bottom shell supporting module forms a preset angle with the bottom surface of the bottom shell, and the preset angle is an acute angle.

[0013] Preferably, the upper shell assembly includes a window cover and a side shell assembly, wherein the window cover and the side shell assembly are adjacently distributed around the upper shell.

[0014] Preferably, the upper shell is provided with a countersink, wherein the inner contour of the countersink is consistent with the outer contour of the window cover. A glue dispensing groove is provided at the bottom of the countersink, wherein the contour of the glue dispensing groove is consistent with the contour of the window cover.

[0015] Preferably, the side shell assembly comprises a side shell, a power board and a connector, wherein the side shell is provided with a through hole, the connector and the power board are in an internal and external structural relationship, and the two are connected through the through hole.

[0016] Preferably, the main board is electrically connected to the multiple groups of laser transmitting and receiving systems, the MEMS board and the power board, the MEMS galvanometer is electrically connected to the MEMS board, and the power board is electrically connected to the connector.

[0017] Preferably, sealing rings are used between the bottom shell and the bottom shell pressure plate, between the upper shell assembly, and between the upper shell and the side shell assembly to ensure the sealing of the entire machine.

[0018] Preferably, the bottom shell, the laser transmitting and receiving system array, the reflection system, the MEMS galvanometer, the main board, the MEMS board, and the upper shell assembly are connected as a whole via fixings. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 This is an exploded view of the internal structure of the LiDAR; Figure 2 This is a schematic diagram of the structure of the laser transmitting and receiving system; Figure 3 Exploded view for the reflection system; Figure 4 Assemble exploded views for reflection systems; Figure 5 Exploded view of the MEMS galvanometer assembly; Figure 6 Assemble the exploded view for the upper shell assembly; Figure 7 Assemble the exploded view for the side shell assembly; Figure 8 This is the internal electrical connection diagram of the laser radar; Fig. 9 Assemble an exploded view of the overall structure of the LiDAR; Fig.10 This is the overall structure and appearance diagram of the laser radar.

[0020] Reference numerals: Bottom shell; 101-108, first surface of bottom shell to eighth surface of bottom shell; 110, bottom shell support module; 111, first surface of bottom shell support module; 112, second surface of bottom shell support module; 113, third surface of bottom shell support module; 114, optical channel; Laser transmitting and receiving system; 210, transmitting module; 220, optical machine module; 230, receiving module; 211, transmitting electrical connector; 231, receiving electrical connector; Reflection system; 310, reflector bracket; 311, light guide hole; 312, first surface of reflector bracket; 320, reflector; 330, colloid; 331, first colloid; 332, second colloid; 333, third colloid; 334, fourth colloid; MEMS galvanometer; 411, first mounting platform; 412, second mounting platform; 420, MEMS galvanometer electrical connector; Upper shell assembly; 510, upper shell; 511, first surface of upper shell; 512, second surface of upper shell; 520, window cover; 530, second sealing ring; 600, side shell assembly; 610, side shell; 611, first surface of side shell; 612, second surface of side shell; 613, third surface of side shell; 620, first sealing ring; 630, power board; 640, connector; 700, main board; 710, MEMS board; 720, first electrical connection member; 730, second electrical connection member; 800, bottom shell pressure plate; 810, third sealing ring. DETAILED DESCRIPTION

[0021] In order to enable those skilled in the art to better understand the technical solution of the present invention, a three-dimensional scanning laser radar based on a MEMS galvanometer provided by the present invention is described in detail below in conjunction with the accompanying drawings.

[0022] A three-dimensional scanning laser radar based on a MEMS galvanometer, comprising: The bottom shell 100 is used to provide structural support for the overall assembly; the laser transmitting and receiving system 200 array is used to transmit and receive laser beams in multiple channels; the reflection system 300 is used to reflect multiple laser beams; the MEMS galvanometer 400 is used to reflect multiple laser beams to the surrounding environment; the main board 700 is used to control the laser transmitting and receiving system 200 array and the MEMS board 710 and data calculation; the MEMS board 710 is used to control the MEMS galvanometer 400; the upper shell assembly 500 is used to pass the laser beam and provide protection, power supply and network for the overall structure.

[0023] See also Figure 1 , Figure 2 The laser transmitting and receiving system 200 array includes five groups of laser transmitting and receiving systems 200, each group of laser transmitting and receiving systems 200 includes a transmitting module 210, an optical machine module 220, and a receiving module 230. The laser emitted by the transmitting module 210 is collimated by the optical machine module 220 and then reflected by the reflection system 300 to the MEMS galvanometer 400, scanning in the vertical and horizontal directions. The returned laser passes through the MEMS galvanometer 400 and is reflected by the reflection system 300 to the optical machine module 220 and enters the receiving module 230.

[0024] The five groups of laser emitting and receiving systems 200 are respectively installed on the first to fifth surfaces 101-105 of the bottom shell. The five groups of laser emitting and receiving systems 200 are parallel to each other, distributed at different height levels of the bottom shell 100, and are symmetrical relative to the center normal of the bottom shell 100. The two outermost groups of laser emitting and receiving systems 200 have the highest horizontal position, the two inner groups of laser emitting and receiving systems 200 have the lowest horizontal position, and the middle group of laser emitting and receiving systems 200 is in between the two.

[0025] The bottom shell 100 is provided with a bottom shell supporting module 110, and the bottom shell supporting module 110 is provided with five groups of optical channels 114. The central axis of each group of optical channels 114 coincides with the central axis of the five groups of emission modules 210, so that the laser beam can pass smoothly.

[0026] See also Figure 2 The transmitting module 210 and the receiving module 230 are located on the same side of the optical machine module 220, in an up-down position relationship, and are fixedly connected to the optical machine module 220 by glue. A glue dispensing groove is provided at the rear end of the optical machine module 220, and the glue dispensing groove is symmetrical on the left and right to accommodate glue, and the center lines of the three are kept in the same plane.

[0027] Each optical module 220 has a single positioning circular hole and a single waist-shaped hole at the bottom, and the relative position is determined by cooperating with two positioning pins on the first surface to the fifth surface (101-105) of the bottom shell. Each laser transmitting and receiving system 200 also has two threaded holes at the bottom, and the fasteners are connected to the laser transmitting and receiving system 200 through the through holes on the eighth surface 108 of the bottom shell, so that it is reliably connected to the bottom shell 100.

[0028] The transmitting module 210 is provided with a transmitting electrical connector 211 , and the receiving module 230 is provided with a receiving electrical connector 231 .

[0029] See also Figure 3 The reflector bracket 310 is provided with five groups of light guide holes 311 , each group of light guide holes 311 coincides with the central axis of five groups of emission modules 210 , and is bilaterally symmetrical about the central normal line of the reflector bracket 310 .

[0030] The reflector bracket 310 is fixedly connected to the five groups of reflectors 320. The reflectors 320 are located on the first surface 312 of the reflector bracket and are fixedly connected to the reflector bracket 310 through the colloid 330. The first surface 312 of the reflector bracket is provided with a colloid 330. The colloids include a first colloid 331, a second colloid 332, a third colloid 333 and a fourth colloid 334, and the colloids are distributed circumferentially along the light guide hole 311.

[0031] See also Figure 4 A single circular positioning hole and a single waist-shaped hole are provided at the bottom of the reflector bracket 310, and the relative position is determined by cooperating with two positioning pins on the sixth surface 106 of the bottom shell. Two through holes are provided at the bottom of the reflector bracket 310, and fasteners are connected to the threaded holes on the sixth surface 106 of the bottom shell through the through holes, so that it is reliably connected to the bottom shell 100.

[0032] See also Figure 5 The MEMS galvanometer 400 is mounted on the first surface 111 of the bottom shell supporting module, and the first surface forms a preset angle with the bottom surface, and the preset angle is an acute angle.

[0033] The MEMS galvanometer 400 is provided with a MEMS galvanometer electrical connector 420 .

[0034] The MEMS galvanometer 400 is provided with a mounting platform, which includes a first mounting platform 411 and a second mounting platform 412, wherein the first mounting platform 411 is provided with a single circular positioning hole, and the second mounting platform 412 is provided with a single waist-shaped hole. A positioning pin is provided on the first surface 111 of the bottom shell support module, and the two cooperate to determine the relative position of the MEMS galvanometer 400. A through hole is provided on the mounting platform, and a fastener is connected to the threaded hole on the first surface 111 of the bottom shell support module through the through hole, so that it is reliably connected to the bottom shell 100.

[0035] See also Figure 6The upper shell assembly 500 includes an upper shell 510, a window cover 520 and a side shell assembly 600, wherein the window cover 520 is located on the first surface 511 of the upper shell, and the side shell assembly is located on the second surface 512 of the upper shell, and the two are adjacently fixed on the outer side of the upper shell 510.

[0036] The first surface 511 of the upper shell is provided with a countersink, wherein the inner contour of the countersink is consistent with the outer contour of the window cover 520. A glue dispensing groove is provided at the bottom of the countersink, and the contour of the glue dispensing groove is consistent with the contour of the window cover 520. The upper shell 510 and the window cover 520 are reliably connected by glue.

[0037] See also Figure 7 The side shell assembly 600 includes a side shell 610, a power board 630 and a connector 640. The first surface 611 of the side shell is provided with a through hole, a countersunk hole and a threaded hole. The connector 640 is installed on the first surface 611 of the side shell, and the power board 630 is installed on the second surface 612 of the side shell, which is an internal and external structural relationship. The two are electrically connected through the through hole. The connector 640 is provided with a mounting platform, and the mounting platform is provided with a positioning cylindrical pin and a through hole. The relative position of the connector 640 is determined by the cylindrical pin of the mounting platform and the countersunk hole of the first surface 611 of the side shell. The fastener is connected to the threaded hole of the side shell 610 through the through hole, so that it is reliably connected to the side shell 610.

[0038] The edge of the power board 630 is provided with a through hole and a positioning circular hole, and the second surface 612 of the side shell is provided with a positioning pin and a threaded hole. The two cooperate to determine the relative position of the power board 630, and the fastener is connected to the threaded hole of the second surface 612 of the side shell through the through hole, so that it is reliably connected to the side shell 610.

[0039] See also Figure 8 The edge of the mainboard 700 is provided with a through hole and a positioning circular hole, and the second surface 112 of the bottom shell support module is provided with a positioning pin and a threaded hole. The two cooperate to determine the relative position of the mainboard 700, and the fastener is connected to the threaded hole on the second surface 112 of the bottom shell support module through the through hole, so that it is reliably connected to the bottom shell 100.

[0040] The edge of the MEMS board 710 is provided with a through hole and a positioning circular hole, and the third surface 113 of the bottom shell support module is provided with a positioning pin and a threaded hole. The two cooperate to determine the relative position of the MEMS board 710, and the fastener is connected to the threaded hole on the third surface 113 of the bottom shell support module through the through hole, so that it is reliably connected to the bottom shell 100.

[0041] Each group of laser transmitting and receiving systems 200 is electrically connected to the main board via the transmitting electrical connector 211 and the receiving electrical connector 231; the MEMS galvanometer 400 is electrically connected to the MEMS board 710 via the galvanometer electrical connector 420; the MEMS board 710 is electrically connected to the main board 700 via the first electrical connector 720; and the power board 630 is electrically connected to the main board 700 via the second electrical connector 730.

[0042] See also Fig. 9 The edge of the third surface 613 of the side shell is provided with a through hole and a positioning pin, and the second surface 512 of the upper shell is provided with a single positioning circular hole and a single waist-shaped hole. The two cooperate to determine the relative position of the side plate assembly 600. The second surface 512 of the upper shell is provided with a sealing ring groove, and a first sealing ring 620 is installed. The fastener is connected to the threaded hole of the second surface 512 of the upper shell through the through hole, so that the side shell assembly 600 is reliably connected to the upper shell 510 and the sealing is good.

[0043] The upper shell 510 is provided with a threaded hole and a positioning hole at the bottom, and the seventh surface 107 of the bottom shell is provided with a positioning cylindrical pin and a through hole, which cooperate to determine the relative position of the upper shell assembly 500. The seventh surface 107 of the bottom shell is provided with a sealing ring groove, and a second sealing ring 530 is installed. The fastener is connected to the threaded hole at the bottom of the upper shell 510 through the through hole, so that the bottom shell 100 and the upper shell assembly 500 are reliably connected and well sealed.

[0044] A bottom shell pressing plate 800 is provided at the bottom of the bottom shell 100, and a countersunk hole is provided at the bottom of the bottom shell 100, and the inner contour of the countersunk hole is consistent with the outer contour of the bottom shell pressing plate 800. The eighth surface 108 of the bottom shell is provided with a positioning cylindrical pin, a threaded hole and a sealing ring groove, and a third sealing ring 810 is installed. A through hole is provided on the surface of the bottom shell pressing plate 800, and the two cooperate to determine the relative position of the bottom shell pressing plate 800. The fastener is connected to the threaded hole on the eighth surface 108 of the bottom shell through the through hole, so that the bottom shell pressing plate 800 and the bottom shell 100 are reliably connected and well sealed.

Claims

1. A laser radar device based on a MEMS galvanometer, characterized in that: include: The bottom shell 100 and the upper shell assembly 500; the bottom shell 100 is provided with a laser transmitting and receiving system 200 array, a reflection system 300, a MEMS galvanometer 400, a main board 700 and a MEMS board 710; The laser emitting and receiving system 200 array is provided with N groups of laser emitting and receiving systems 200; the reflection system 300 is provided with a group of reflection mirror brackets 310 and N groups of reflection mirrors 320; The upper shell assembly 500 is provided with an upper shell 510, a window cover 520 and a side shell assembly 600; The side housing assembly 600 includes a side housing 610, a power board 630 and a connector 640; The main board 700 is electrically connected to the N groups of laser transmitting and receiving systems 200, the MEMS board 710 and the power board 630, the MEMS galvanometer 400 is electrically connected to the MEMS board 710, and the power board 630 is electrically connected to the connector 640; N≥2.

2. The laser transmitting and receiving system 200 array according to claim 1, characterized in that: The N groups of laser emitting and receiving systems 200 are parallel to each other, and the N groups of laser emitting and receiving systems 200 correspond to the N groups of reflecting mirrors 320 one by one.

3. The laser transmitting and receiving system 200 according to claim 2, characterized in that: The laser transmitting and receiving system 200 is provided with a transmitting module 210, an optical machine module 220, and a receiving module 230. The transmitting module 210 and the receiving module 230 are fixedly connected with the optical machine module 220. One end of the optical machine module 220 has a glue dispensing groove for accommodating glue.

4. The reflection system 300 according to claim 1, characterized in that: The reflector bracket 310 is provided with N groups of light guide holes 311 , and the reflector bracket 310 is fixedly connected to the N groups of reflectors 320 . The first surface 312 of the reflector bracket has a colloid 330 ; wherein the colloid 330 at least includes a first colloid 331 and a second colloid 332 , and the colloid 330 is distributed circumferentially along the light guide hole 311 .

5. The bottom case 100 according to claim 1, characterized in that: The bottom housing 100 includes a bottom housing support module 110 , on which N groups of optical channels 114 are disposed.

6. The MEMS galvanometer 400 according to claim 1, characterized in that: The MEMS oscillating mirror 400 is fixed to the first surface 111 of the bottom shell supporting module at a preset angle. The preset angle is an acute angle.

7. The upper housing assembly 500 according to claim 1, characterized in that: The window cover 520 is fixedly connected to the upper shell 510, and a glue dispensing groove is provided on the first surface 511 of the upper shell, and the outline of the glue dispensing groove is consistent with the outline of the window cover. The side shell component 600 is provided on the second surface 512 of the upper shell.

8. The side housing assembly 600 according to claim 7, characterized in that: The side shell 610 is provided with a through hole, and the power board 630 and the connector 640 are electrically connected through the through hole.

9. The mainboard 700 according to claim 1, characterized in that: The main board 700 is fixed to the second surface 112 of the bottom shell supporting module, and is electrically connected to the laser transmitting and receiving system 200 array, the MEMS board 710 and the power board 630 .

10. The MEMS plate 710 according to claim 1, characterized in that: The MEMS plate 710 is fixed to the third surface 113 of the supporting module, and the MEMS plate 710 and the MEMS galvanometer 400 are electrically connected.

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