Solution temperature real-time regulation and control system and method

Abstract

The invention provides a solution temperature real-time regulation and control system and method, and relates to the technical field of semiconductor processing. Comprises: a liquid supply module configured to supply solutions at different temperatures to a liquid mixing module; the liquid mixing module is configured to receive the solutions at different temperatures supplied by the liquid supply module and uniformly mix the solutions; the temperature detection module is configured to detect the temperature of the solution uniformly mixed by the solution mixing module; and the control module is configured to adjust the flow of the solutions with different temperatures conveyed to the solution mixing module by the solution supply module according to the temperature, measured by the temperature detection module, of the uniformly mixed solution, so that the temperature of the uniformly mixed solution in the solution mixing module reaches the target temperature. The liquid supply flow of each component of the solution is regulated and controlled in real time in an online liquid mixing manner, so that the purpose of regulating the temperature of the solution in real time is achieved, the temperature control is more accurate, the process effect is effectively improved, and the process flexibility is improved.

Description

Technical Field

[0001] The invention belongs to the technical field of semiconductor processing, and in particular relates to a system and method for real-time temperature control of a solution. Background Art

[0002] In wet processes, such as wafer cleaning processes, or process development, it is often necessary to change the temperature of the cleaning solution to meet different process requirements or R&D test requirements. The existing technology for controlling the temperature of the cleaning solution in the process and the defects are as follows:

[0003] 1. Mixing method of cleaning solution mixing tank:

[0004] a) Process: Mix the cleaning solution in a mixing tank and heat or cool it to the target temperature, and then supply the solution to the process chamber;

[0005] b) Workmanship defects:

[0006] 1) Cost and floor space: A liquid supply system can only provide cleaning solution of one temperature at a time. When customers require the same machine to have cleaning solutions of multiple temperatures at the same time, multiple cleaning solution supply systems must be provided, which increases the machine cost and increases the floor space of the machine when adding liquid supply systems;

[0007] 2) Inflexible temperature switching: Changing the temperature of the cleaning solution requires manual liquid replacement or changing the temperature setting conditions. The heater or cooling device heats or cools the solution. After a long period of heating or cooling, the cleaning solution can reach the temperature conditions for use. The switching time is long, which reduces the machine's production capacity. Moreover, the switching often requires manual operation, which is not suitable for automation.

[0008] 3) Poor accuracy of temperature control: The temperature from the cleaning solution to the process chamber is affected by the season, pipeline length and pipeline position, and the temperature accuracy is poor.

[0009] 2. Online mixing method:

[0010] a) Process: The existing online liquid mixing method, such as high temperature SC1, only controls the temperature of hot water. For ammonia and hydrogen peroxide, which account for a relatively small proportion, room temperature liquid is directly used. When the temperature of the cleaning solution needs to be changed, the temperature of the hot water needs to be changed.

[0011] b) Workmanship defects:

[0012] 1) Cost and floor space: A liquid supply system can only provide one temperature of cleaning solution at a time. When customers require the same machine to have multiple cleaning solution temperatures at the same time, multiple cleaning solution supply systems must be provided, which increases the machine cost and increases the floor space of the machine when adding liquid supply systems;

[0013] 2) Inflexible temperature switching: To change the temperature, you need to change the temperature setting conditions and control the output power of the hot water heater. The process can only be carried out when the high-temperature hot water reaches the use temperature. The switching time is long, which reduces the machine capacity;

[0014] 3) Poor accuracy of temperature control: The temperature from the chemical solution to the process chamber is affected by the season, pipeline length and pipeline position, and the temperature accuracy is poor.

[0015] As semiconductor manufacturing processes become increasingly sophisticated, process nodes continue to shrink, and wet cleaning places increasingly stringent requirements on cleaning solution temperature control. It is necessary to develop a more accurate temperature control method that is not affected by seasonal changes and the length and position of different chamber pipes. Therefore, a real-time solution temperature control system and method is needed to increase process flexibility and save temperature control time to meet more usage scenarios. Summary of the invention

[0016] In order to better cope with the more refined temperature control of chemical solutions in semiconductor manufacturing processes, increase process accuracy and improve process flexibility, the present invention proposes a solution temperature real-time control system and method.

[0017] In the first aspect, the present application proposes a solution temperature real-time control system, comprising:

[0018] A liquid supply module, configured to supply solutions of different temperatures to the liquid mixing module;

[0019] A liquid mixing module is configured to receive the solutions of different temperatures supplied by the liquid supply module and mix them evenly;

[0020] A temperature detection module is configured to detect the temperature of the solution after being evenly mixed by the liquid mixing module;

[0021] The control module is configured to adjust the flow rate of solutions of different temperatures delivered by the liquid supply module to the liquid mixing module according to the temperature of the mixed solution measured by the temperature detection module, so that the temperature of the mixed solution in the liquid mixing module reaches the target temperature.

[0022] According to a specific implementation of the embodiment of the present application, the liquid supply module includes: a liquid storage unit and a conveying unit; the liquid storage unit is connected to the liquid mixing module through the conveying unit;

[0023] The liquid storage unit comprises:

[0024] A room temperature deionized water storage unit is configured to store room temperature deionized water supplied to the liquid mixing module;

[0025] A high-temperature deionized water storage unit is configured to store high-temperature deionized water supplied to the liquid mixing module;

[0026] The chemical liquid storage unit is configured to store the chemical liquid supplied to the liquid mixing module.

[0027] According to a specific implementation of the embodiment of the present application, the liquid storage unit includes at least one chemical liquid storage unit. When the number of chemical liquid storage units is greater than 1, the chemical liquids stored in each of the chemical liquid storage units are different.

[0028] According to a specific implementation of the embodiment of the present application, the control module is pre-installed with relationship data of different processes corresponding to different temperatures, and a database of volume ratios of various components of the corresponding solution at different temperatures;

[0029] The control module is further configured to:

[0030] Determine the target temperature of the mixed solution;

[0031] Controlling the flow rate of solutions of different temperatures delivered by the liquid supply module to the liquid mixing module according to the volume ratio data of each component of the solution corresponding to the target temperature;

[0032] Obtain the temperature detection results of the temperature detection module in real time;

[0033] When the temperature detection result is different from the target temperature for a preset period of time, the supply temperature and flow rate of the chemical liquid storage unit to the mixing liquid module are controlled to remain unchanged, and the required flow rate changes of room temperature deionized water and high temperature deionized water are calculated in real time according to the temperature detection result, and the room temperature deionized water and high temperature deionized water of corresponding flow rates are transported to the mixing liquid module to make the temperature of the evenly mixed solution in the mixing liquid module reach the target temperature.

[0034] According to a specific implementation of the embodiment of the present application, the control module calculates the required flow rate change of room temperature deionized water and the required flow rate change of high temperature deionized water in real time according to the temperature detection result, including:

[0035] The required flow rate change ΔL of room temperature deionized water is calculated using the following equations: D1 and the required flow change of high temperature deionized water ΔL D2 :

[0036] ΔL D1 +ΔL D2 =0 Formula 1

[0037]

[0038] Wherein, Formula 1 is obtained based on the condition that the total liquid supply flow rate remains unchanged and the liquid supply temperature and flow rate of the chemical liquid storage unit to the liquid mixing module remain unchanged, the sum of the flow rate change of the room temperature deionized water storage unit supplying the room temperature deionized water to the liquid mixing module and the flow rate change of the high temperature deionized water storage unit supplying the high temperature deionized water to the liquid mixing module is 0; Formula 2 is obtained based on the law of conservation of heat;

[0039] Wherein, the liquid storage unit includes n chemical liquid storage units, ΔQ i is the heat change of the chemical liquid in the i-th chemical liquid storage unit, n and i are both positive integers greater than or equal to 1, ΔQ D1 , ΔQ D2 are the heat changes of room temperature deionized water and high temperature deionized water respectively. The unit of heat change is joule, which is obtained according to the heat calculation formula Q=cmΔt and the mass density volume formula m=ρv=ρ*L*t, where:

[0040] c is the specific heat capacity, in joules / kg °C;

[0041] m is mass in kilograms;

[0042] Δt is the temperature increase or decrease in degrees Celsius;

[0043] ρ is the density in kg / dm3;

[0044] L is the flow rate in liters per minute;

[0045] t is the unit time in minutes.

[0046] According to a specific implementation of the embodiment of the present application, the control module is configured as follows:

[0047] Determine the target temperature of the mixed solution;

[0048] Obtain the temperature detection results of the temperature detection module in real time;

[0049] When the temperature detection result is different from the target temperature for a preset period of time, the liquid supply temperature and flow rate of the larger flow storage unit to the mixing liquid module are fixed unchanged; the flow rate change of other liquid storage units supplying the mixing liquid module is adjusted in real time according to the temperature detection result, so that the temperature of the uniformly mixed solution in the mixing liquid module reaches the target temperature, wherein the larger flow storage unit is the liquid storage unit in the liquid supply module that supplies the largest liquid flow rate to the mixing liquid module.

[0050] According to a specific implementation of the embodiment of the present application, when the chemical liquid storage unit includes two liquid supply pipelines, the control module is further configured to control the liquid supply temperature and flow rate of the larger flow storage unit to the liquid mixing module to remain unchanged; the control module adjusts the flow rate change of the other liquid storage units to the liquid mixing module in real time according to the temperature detection result, including:

[0051] The following equations consisting of equations 3, 4, 5, 6 and 7 are used to calculate the flow change of chemical liquid 1 ΔL1, the flow change of chemical liquid 2 ΔL2 and the flow change of room temperature deionized water ΔL D1 :

[0052]

[0053]

[0054] ΔQ1+ΔQ D1 +ΔQ D2 =0 Formula 5

[0055] (L1+ΔL1) / (L D1 +L D2 +ΔL D1 )=r1 Formula 6

[0056] (L2+ΔL2) / (L D1 +L D2 +ΔL D2 )=r2 Formula 7

[0057] Wherein, Formula 3 and Formula 4 are the volume ratios of the two chemical liquids included in the chemical liquid storage unit; Formula 5 is obtained according to the law of conservation of heat; Formula 6 and Formula 7 are the volume ratios of the two chemical liquids included in the storage unit under the condition that the volume ratio of the chemical liquids remains unchanged after the flow rate changes;

[0058] Where r1 and r2 are the volume ratios of the two chemical solutions in the set solution, L1 and L2 are the flow rates of the two chemical solutions, in liters per minute; ΔL1 is the flow rate change of the chemical solution whose flow rate needs to be changed, in liters per minute; L D1 and L D2 ΔL is the flow rate of room temperature deionized water and high temperature deionized water, in liters per minute; D1 and ΔL D2 are the flow rate changes of room temperature deionized water and high temperature deionized water, respectively, in liters / minute; ΔQ1 is the heat change of the chemical liquid that needs to change the flow rate, in joules; ΔQ D1 ΔQ is the heat change of deionized water at room temperature, in joules; D2 It is the heat change of high temperature deionized water, in joules.

[0059] In the second aspect, the present application proposes a solution temperature real-time control system, comprising:

[0060] A liquid supply module, configured to supply solutions of different temperatures to the liquid mixing module;

[0061] A liquid mixing module is configured to receive the solutions of different temperatures supplied by the liquid supply module and mix them evenly;

[0062] The temperature detection module includes a first temperature detection unit configured to detect the temperature of each component of the solution before the solution is evenly mixed and generate a first temperature detection result;

[0063] The control module is configured to determine the target temperature of the mixed solution; according to the first temperature detection result, adjust the flow rate of the solution with different temperatures delivered by the liquid supply module to the mixing module, so that the temperature of the mixed solution in the mixing module reaches the target temperature.

[0064] According to a specific implementation of the embodiment of the present application, the liquid storage unit includes:

[0065] A room temperature deionized water storage unit is configured to store room temperature deionized water supplied to the liquid mixing module;

[0066] A high-temperature deionized water storage unit is configured to store high-temperature deionized water supplied to the liquid mixing module;

[0067] The chemical liquid storage unit is configured to store the chemical liquid supplied to the liquid mixing module.

[0068] According to a specific implementation of the embodiment of the present application, the liquid storage unit includes at least one chemical liquid storage unit. When the number of chemical liquid storage units is greater than 1, the chemical liquids stored in each of the chemical liquid storage units are different.

[0069] According to a specific implementation of the embodiment of the present application, the control module adjusts the flow rate of the solution of different temperatures delivered by the liquid supply module to the liquid mixing module according to the first temperature detection result, including:

[0070] The total liquid supply flow rate is fixed unchanged, the liquid supply temperature and flow rate of the chemical liquid storage unit to the mixing liquid module are fixed unchanged, the required flow rate of room temperature deionized water and the required flow rate of high temperature deionized water are calculated in real time according to the first temperature detection result, and the room temperature deionized water and high temperature deionized water of corresponding flow rates are delivered to the mixing liquid module, so that the temperature of the evenly mixed solution in the mixing liquid module reaches the target temperature.

[0071] According to a specific implementation of the embodiment of the present application, the control module calculates the flow rate required for room temperature deionized water and the flow rate required for high temperature deionized water in real time according to the first temperature detection result, including:

[0072] The required flow rate L of room temperature deionized water is calculated using the following equations consisting of equations 8 and 2: D1 and the required flow rate L of high temperature deionized water D2 :

[0073] L D =L D1 +L D2 Formula 8

[0074]

[0075] Wherein, the total amount of room temperature deionized water and high temperature deionized water supplied to the mixing module is L under the condition that the total flow rate of the liquid supply remains unchanged, and the temperature and flow rate of the liquid supply from the chemical liquid storage unit to the mixing module remain unchanged. D The formula 2 is obtained according to the law of conservation of heat;

[0076] Among them, L D1 Flow rate required for room temperature deionized water; L D2 The flow rate required for high-temperature deionized water; the liquid storage unit includes n chemical liquid storage units, ΔQ i is the heat change of the chemical liquid in the i-th chemical liquid storage unit, n and i are both positive integers greater than or equal to 1, ΔQ D1 , ΔQ D2 are the heat changes of room temperature deionized water and high temperature deionized water respectively. The unit of heat change is joule, which is obtained according to the heat calculation formula Q=cmΔt and the mass density volume formula m=ρv=ρ*L*t, where:

[0077] c is the specific heat capacity, in joules / kg °C;

[0078] m is mass in kilograms;

[0079] Δt is the temperature increase or decrease in degrees Celsius;

[0080] ρ is the density in kg / dm3;

[0081] L is the flow rate in liters per minute;

[0082] t is the unit time in minutes.

[0083] According to a specific implementation of the embodiment of the present application, the temperature detection module further includes a second temperature detection unit, which is configured to detect the temperature of the solution after being evenly mixed by the liquid mixing module, and generate a second temperature detection result;

[0084] The control module is further configured to:

[0085] Acquire a second temperature detection result of a second temperature detection unit in real time;

[0086] When the second temperature detection result is different from the target temperature for a preset period of time, the supply temperature and flow rate of the chemical liquid storage unit to the mixing liquid module are controlled to remain unchanged, and the required flow rate changes of room temperature deionized water and high temperature deionized water are calculated in real time according to the second temperature detection result, and the room temperature deionized water and high temperature deionized water of corresponding flow rates are delivered to the mixing liquid module, so that the temperature of the evenly mixed solution in the mixing liquid module reaches the target temperature.

[0087] In a third aspect, the present application proposes a method for real-time temperature control of a solution, comprising the following steps:

[0088] Using the liquid supply module to supply solutions of different temperatures to the liquid mixing module;

[0089] Solutions of different temperatures are mixed evenly in the liquid mixing module, and the temperature of the mixed solution is detected in real time by the temperature detection module and fed back to the control module;

[0090] The control module adjusts the flow rate of solutions of different temperatures delivered by the liquid supply module to the liquid mixing module according to the temperature of the evenly mixed solution measured by the temperature detection module, so that the temperature of the evenly mixed solution in the liquid mixing module reaches the target temperature.

[0091] According to a specific implementation of the embodiment of the present application, the solution includes at least two of: chemical liquid, room temperature deionized water, and high temperature deionized water.

[0092] According to a specific implementation of the embodiment of the present application, when the solution includes a chemical liquid, the component of the chemical liquid is greater than or equal to one.

[0093] According to a specific implementation of the embodiment of the present application, it also includes:

[0094] Preset the relationship data of different processes corresponding to different temperatures, and the volume ratio data of each component of the solution corresponding to different temperatures in the control module;

[0095] The control module determines the target temperature of the mixed solution according to the process, and controls the mixing of solutions at different temperatures according to the volume ratio data of the components of the solution corresponding to the target temperature;

[0096] The temperature detection module obtains the actual temperature of the mixed solution in real time. When it is detected that the actual temperature is different from the target temperature for a preset period of time, the liquid supply temperature and flow rate of the fixed chemical liquid storage unit to the mixing module remain unchanged. The required flow rate change of room temperature deionized water and the required flow rate change of high temperature deionized water are calculated in real time according to the actual temperature detection result, and the room temperature deionized water and high temperature deionized water of corresponding flow rates are transported to the mixing module, so that the temperature of the mixed solution in the mixing module reaches the target temperature.

[0097] According to a specific implementation of the embodiment of the present application, the step of calculating the required flow rate change of room temperature deionized water and the required flow rate change of high temperature deionized water in real time according to the actual temperature detection result includes:

[0098] The required flow rate change ΔL of room temperature deionized water is calculated using the following equations: D1 and the required flow change of high temperature deionized water ΔL D2 :

[0099] ΔL D1 +ΔL D2 =0 Formula 1

[0100]

[0101] Wherein, Formula 1 is obtained based on the condition that the total liquid supply flow rate remains unchanged and the liquid supply temperature and flow rate of the chemical liquid storage unit to the liquid mixing module remain unchanged, the sum of the flow rate change of the room temperature deionized water supplied by the room temperature deionized water storage unit to the liquid mixing module and the flow rate change of the high temperature deionized water supplied by the high temperature deionized water storage unit to the liquid mixing module is 0; Formula 2 is obtained based on the law of conservation of heat;

[0102] Wherein, the liquid storage unit includes n chemical liquid storage units, ΔQ i is the heat change of the chemical liquid in the i-th chemical liquid storage unit, n and i are both positive integers greater than or equal to 1, ΔQ D1 , ΔQ D2 are the heat changes of room temperature deionized water and high temperature deionized water respectively. The unit of heat change is joule, which is obtained according to the heat calculation formula Q=cmΔt and the mass density volume formula m=ρv=ρ*L*t, where:

[0103] c is the specific heat capacity, in joules / kg °C;

[0104] m is mass in kilograms;

[0105] Δt is the temperature increase or decrease in degrees Celsius;

[0106] ρ is the density in kg / dm3;

[0107] L is the flow rate in liters per minute;

[0108] t is the unit time in minutes.

[0109] According to a specific implementation of the embodiment of the present application, the method further includes:

[0110] The control module determines the target temperature of the solution according to the process, and obtains the temperature detection result of the temperature detection module in real time; when the temperature detection result is different from the target temperature for a preset period of time, the liquid supply temperature and flow rate of the larger flow storage unit to the mixing liquid module are fixed unchanged; according to the temperature detection result, the flow rate change of other liquid storage units supplying liquid to the mixing liquid module is adjusted in real time to make the temperature of the uniformly mixed solution in the mixing liquid module reach the target temperature, wherein the larger flow storage unit is the liquid storage unit in the liquid supply module that supplies the largest liquid flow rate to the mixing liquid module.

[0111] According to a specific implementation of the embodiment of the present application, when the number of the chemical liquid storage units is 2, the control module is further configured to control the liquid supply temperature and flow rate of the larger flow storage unit to the liquid mixing module to remain unchanged; the control module adjusts the flow rate change of other liquid storage units to the liquid mixing module in real time according to the temperature detection result, including:

[0112] The following equations consisting of equations 3, 4, 5, 6 and 7 are used to calculate the flow change of chemical liquid 1 ΔL1, the flow change of chemical liquid 2 ΔL2 and the flow change of room temperature deionized water ΔL D1 :

[0113]

[0114]

[0115] ΔQ1+ΔQ D1 +ΔQ D2 =0 Formula 5

[0116] (L1+ΔL1) / (L D1 +L D2 +ΔL D1 )=r1 Formula 6

[0117] (L2+ΔL2) / (L D1 +L D2 +ΔL D2 )=r2 Formula 7

[0118] Wherein, Formula 3 and Formula 4 are the volume ratios of the two chemical liquids supplied by the two liquid supply pipelines included in the chemical liquid storage unit; Formula 5 is obtained according to the law of conservation of heat; Formula 6 and Formula 7 are the volume ratios of the two chemical liquids supplied by the two liquid supply pipelines included in the chemical liquid storage unit under the condition that the volume ratio of the chemical liquids remains unchanged after the flow rate changes;

[0119] Where r1 and r2 are the volume ratios of the two chemical solutions in the set solution, L1 and L2 are the flow rates of the two chemical solutions, in liters per minute; ΔL1 is the flow rate change of the chemical solution whose flow rate needs to be changed, in liters per minute; L D1 and L D2 ΔL is the flow rate of room temperature deionized water and high temperature deionized water, in liters per minute; D1 and ΔL D2 are the flow rate changes of room temperature deionized water and high temperature deionized water, respectively, in liters / minute; ΔQ1 is the heat change of the chemical liquid that needs to change the flow rate, in joules; ΔQ D1 ΔQ is the heat change of deionized water at room temperature, unit: Joule; D2 It is the heat change of high temperature deionized water, unit: Joule.

[0120] In a fourth aspect, the present application proposes a method for real-time temperature control of a solution, comprising the following steps:

[0121] The control module obtains the target temperature of the mixed solution;

[0122] Using the liquid supply module to supply solutions of different temperatures to the liquid mixing module;

[0123] Solutions of different temperatures are mixed evenly in the liquid mixing module, and the first temperature detection unit is used to detect the liquid supply temperature of each component of the solution in the liquid mixing module in real time to generate a first temperature detection result, and the first temperature detection result is fed back to the control module;

[0124] The control module adjusts the flow rate of the solutions with different temperatures delivered by the liquid supply module to the liquid mixing module according to the first temperature detection result, so that the temperature of the evenly mixed solution in the liquid mixing module reaches the target temperature.

[0125] According to a specific implementation of the embodiment of the present application, the solution includes at least two of: chemical liquid, room temperature deionized water, and high temperature deionized water.

[0126] According to a specific implementation of the embodiment of the present application, when the solution includes a chemical liquid, the component of the chemical liquid is greater than or equal to one.

[0127] According to a specific implementation of the embodiment of the present application, adjusting the flow rate of the solution of different temperatures delivered by the liquid supply module to the liquid mixing module according to the first temperature detection result includes:

[0128] The total liquid supply flow rate is fixed unchanged, the liquid supply temperature and flow rate of the chemical liquid storage unit to the mixing liquid module are fixed unchanged, the required flow rate of room temperature deionized water and the required flow rate of high temperature deionized water are calculated in real time according to the first temperature detection result, and the room temperature deionized water and high temperature deionized water of corresponding flow rates are delivered to the mixing liquid module, so that the temperature of the evenly mixed solution in the mixing liquid module reaches the target temperature.

[0129] According to a specific implementation of the embodiment of the present application, the flow rate required for room temperature deionized water and the flow rate required for high temperature deionized water are calculated in real time according to the first temperature detection result, including:

[0130] The required flow rate L of room temperature deionized water is calculated using the following equations consisting of equations 8 and 2: D1 and the required flow rate L of high temperature deionized water D2 :

[0131] L D =L D1 +L D2 Formula 8

[0132]

[0133] Wherein, the total amount of liquid supplied by the room temperature deionized water storage unit to the mixing module and the total amount of liquid supplied by the high temperature deionized water storage unit to the mixing module is L under the condition that the total liquid supply flow rate remains unchanged and the liquid supply temperature and flow rate of the chemical liquid storage unit to the mixing module remain unchanged. D The formula 2 is obtained according to the law of conservation of heat;

[0134] Among them, L D1 Flow rate required for room temperature deionized water; L D2 The flow rate required for high-temperature deionized water; the liquid storage unit includes n chemical liquid storage units, ΔQ i is the heat change of the chemical liquid in the i-th chemical liquid storage unit, n and i are both positive integers greater than or equal to 1, ΔQ D1 , ΔQ D2 are the heat changes of room temperature deionized water and high temperature deionized water respectively. The unit of heat change is joule, which is obtained according to the heat calculation formula Q=cmΔt and the mass density volume formula m=ρv=ρ*L*t, where:

[0135] c is the specific heat capacity, in joules / kg °C;

[0136] m is mass in kilograms;

[0137] Δt is the temperature increase or decrease in degrees Celsius;

[0138] ρ is the density in kg / dm3;

[0139] L is the flow rate in liters per minute;

[0140] t is the unit time in minutes.

[0141] According to a specific implementation of the embodiment of the present application, the method further includes:

[0142] Using the second temperature detection unit to detect the temperature of the solution after being evenly mixed by the liquid mixing module, and generating a second temperature detection result;

[0143] The control module obtains the temperature detection result of the second temperature detection unit in real time;

[0144] When the second temperature detection result is different from the target temperature for a preset period of time, the supply temperature and flow rate of the chemical liquid storage unit to the mixing liquid module are controlled to remain unchanged, and the required flow rate changes of room temperature deionized water and high temperature deionized water are calculated in real time according to the second temperature detection result, and the room temperature deionized water and high temperature deionized water of corresponding flow rates are delivered to the mixing liquid module, so that the temperature of the evenly mixed solution in the mixing liquid module reaches the target temperature.

[0145] The solution temperature real-time control system and method of the present invention achieves the purpose of adjusting the temperature of the mixed solution in real time by controlling the flow of each component of the liquid supply in real time through online liquid mixing. At the same time, when the machine needs a mixed solution configuration of multiple temperatures, only one solution supply system can be used to reduce the cost of the machine and reduce the floor space of the machine; secondly, the temperature of the mixed solution is flexibly controlled by online control of the flow of each component of the mixed solution, and the temperature switching does not require waiting. Each process chamber can be temperature-controlled separately to improve the utilization rate of the machine; in addition, the temperature control is more accurate, avoiding the difference in the temperature of the mixed solution in different process chambers caused by factors such as ambient temperature or pipeline length, effectively improving the process effect, increasing the flexibility of the process, saving the time of temperature control, and being able to meet more usage scenarios. Other features and advantages of the present invention will be described in the subsequent description, and part of them will become obvious from the description, or be understood by implementing the present invention. The purposes and other advantages of the present invention can be achieved and obtained through the structures indicated in the description, claims and drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0146] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0147] Figure 1 A schematic diagram showing the structure of a real-time temperature control system for a solution according to an embodiment of the present invention is shown;

[0148] Figure 2 A schematic structural diagram showing a case where the liquid supply module of the solution temperature real-time control system according to an embodiment of the present invention is a multi-component solution;

[0149] Figure 3 A schematic structural diagram of a system for real-time temperature control of a solution when there are two types of chemical liquids according to an embodiment of the present invention is shown;

[0150] Figure 4 A schematic structural diagram of a solution temperature real-time control system according to another embodiment of the present invention is shown;

[0151] Figure 5 A schematic structural diagram showing a solution temperature real-time control system according to another embodiment of the present invention when the liquid supply module is a multi-component solution;

[0152] Figure 6 A schematic diagram showing a flow chart of a method for real-time temperature control of a solution according to an embodiment of the present invention; and

[0153] Figure 7 A schematic flow chart of a method for real-time temperature control of a solution according to another embodiment of the present invention is shown. DETAILED DESCRIPTION

[0154] In order to make the purpose, technical solution and advantages of the embodiments of the present invention clearer, the technical solution in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0155] In the wafer cleaning process or process development, the temperature of the cleaning solution often needs to be changed to meet different process requirements or R&D test requirements. In view of the problems of high cost, inflexible temperature switching, and poor temperature control accuracy of the cleaning solution mixing tank mixing method and the online mixing method in the prior art, the inventor has conducted targeted research and proposed a solution temperature real-time control system and method to achieve the purpose of more refined control of the solution temperature in the semiconductor manufacturing process, improve the process accuracy and process flexibility.

[0156] Next, a system and method for real-time temperature control of a solution provided by the present invention are described in detail.

[0157] Please refer to Figure 1 , Figure 1 FIG. 2 is a schematic diagram showing the structure of a real-time temperature control system for a solution according to an embodiment of the present invention. Figure 1 As shown, the solution temperature real-time control system includes a liquid supply module 100 , a liquid mixing module 200 , a temperature detection module 300 , and a control module 400 . Among them, the liquid supply module 100 is configured to supply cleaning solutions of different temperatures to the liquid mixing module 200; the liquid supply module 100 includes a liquid storage unit 101 and a conveying unit 102, and the liquid storage unit 101 is connected to the liquid mixing module 200 through the conveying unit 102; the liquid mixing module 200 is configured to receive the cleaning solutions of different temperatures supplied by the liquid supply module 100 and mix them evenly, and then convey them to the cleaning chamber of the cleaning device through the infusion unit 500 to perform the cleaning process; the temperature detection module 300 is configured to detect the temperature of the cleaning solution after being mixed evenly in the liquid mixing module 200, and is generally selected to be set on the liquid mixing module 200; the control module 400 is configured to adjust the flow rate of the cleaning solutions of different temperatures delivered by the liquid supply module 100 to the liquid mixing module 200 according to the temperature of the cleaning solution after being mixed evenly measured by the temperature detection module 300, so that the temperature of the cleaning solution mixed evenly in the liquid mixing module 200 reaches the target temperature. The present invention monitors the temperature of the cleaning solution in real time and adjusts the flow rate of the cleaning solution at different temperatures in real time, so as to achieve the purpose of more refined control of the temperature of the cleaning solution after uniform mixing in the semiconductor manufacturing process, improve the accuracy of the process, and improve the flexibility of the process.

[0158] Furthermore, in the actual process, the liquid mixing module 200 can select a liquid mixing valve as a mixing space for cleaning solutions of different temperatures, or can select a liquid mixing box as a mixing space for cleaning solutions of different temperatures. The specific selection can be made according to actual needs. In the embodiment of the present invention, there is no restriction on the spatial structure of the liquid mixing module 200, and the structure that can mix the cleaning solutions evenly belongs to the protection scope of the present invention. It is worth noting that when the liquid mixing module 200 is selected as a liquid mixing valve, considering that the volume of the liquid mixing valve is small, it is inconvenient to set the temperature detection module 300, so the temperature detection module 300 can be selected to be set on the infusion unit 500 to detect the temperature of the cleaning solutions of different temperatures after mixing.

[0159] Furthermore, the control module 400 includes a control unit 401 and a flow regulating unit 402. The flow regulating unit 402 is arranged on the conveying unit 102 and is used to control the liquid flow flowing through the conveying unit 102. The control unit 401 receives the cleaning solution temperature sent by the temperature detection module 300, and controls the flow regulating unit 402 to adjust the flow of cleaning solutions of various temperatures supplied by the liquid supply module 100 to the mixing liquid module 200.

[0160] Please continue to refer to Figure 1 When designing a wafer cleaning device, a liquid storage box or a liquid storage tank is generally selected as the liquid storage unit 101 of the liquid supply module 100; the delivery unit 102 is generally selected as an infusion pipeline; the temperature detection module 300 is generally selected as a temperature detector; the control unit 401 of the control module 400 is generally the control system of the cleaning device; the flow regulating unit 402 of the control module 400 is generally selected as a flow regulating valve. During the process, cleaning solutions of different temperatures are transported to the mixing module 200 through the liquid storage unit 101 and the transport unit 102. After the cleaning solutions of different temperatures are evenly mixed in the mixing module 200, they are transported to the wafers in the cleaning chamber through the infusion unit 500 to perform a cleaning process on the wafers. The temperature detection module 300 measures the temperature of the cleaning solution in the mixing module 200 and sends the measured data to the control unit 401 of the control module 400. The control unit 401 controls the flow regulating unit 402 to adjust the flow rate of cleaning solutions of different temperatures supplied by the liquid supply module 100 to the mixing module 200 according to the received data, so that the temperature of the evenly mixed cleaning solution in the mixing module 200 is adjusted to reach the target temperature.

[0161] Among them, the liquid supply module 100 determines the number of liquid storage units 101 and conveying units 102 according to the components contained in the cleaning solution in the mixing liquid module 200, and each liquid storage unit 101 is connected to the mixing liquid module 200 through a conveying unit 102 to convey a cleaning solution of one component to the mixing liquid module 200. It should be understood that in this embodiment, cleaning solutions of different temperatures and the same chemical composition are regarded as different components; cleaning solutions of the same temperature and different chemical components are also regarded as different components. For example, when the cleaning solution contains room temperature deionized water and high temperature deionized water, even if the chemical compositions of the two are the same, they are still regarded as cleaning solutions of different components, and it is assumed that two liquid storage units 101 are required for separate storage; when the cleaning solution contains hydrogen peroxide and room temperature deionized water, even if the temperatures of the two are the same, they are also regarded as different components, and it is assumed that two liquid storage units 101 are required for separate storage. For example, please refer to Figure 2 , Figure 2 The schematic diagram of the structure of the solution temperature real-time control system according to the present invention is shown in FIG. 1 . When the cleaning solution contains three components (room temperature deionized water, high temperature deionized water, and chemical solution), as shown in FIG. Figure 2 As shown, the liquid supply module 100 in the embodiment of the present invention includes: a room temperature deionized water storage unit 101a, configured to store room temperature deionized water supplied to the mixing liquid module 200; a high temperature deionized water storage unit 101b, configured to store high temperature deionized water supplied to the mixing liquid module 200; and a chemical liquid storage unit 101c, configured to store chemical liquid supplied to the mixing liquid module 200.

[0162] Please continue to refer to Figure 2In order to accurately control the temperature of the cleaning solution in the liquid mixing module 200, the relationship data of different processes corresponding to different temperatures and the volume ratio data of the components of the cleaning solution at different temperatures can be collected, and the data can be processed to generate a database stored in the control unit 401 of the control module 400. When it is necessary to perform a cleaning process on the wafer in the cleaning chamber, the control module 400 can first determine the target temperature of the cleaning solution after uniform mixing based on the process to be implemented; control the flow rate of the components of the cleaning solution delivered by the liquid supply module 100 to the liquid mixing module 200 according to the volume ratio data of the components of the cleaning solution corresponding to the target temperature; and at the same time, the control unit 401 obtains the temperature detection result of the temperature detection module 300 for the uniformly mixed cleaning solution in real time. When the temperature detection result is different from the target temperature for a preset time period, the temperature and flow rate of the liquid supply from the chemical liquid storage unit 101c to the liquid mixing module 200 are controlled to remain unchanged, and the required flow rate changes of the room temperature deionized water and the high temperature deionized water are calculated in real time according to the temperature detection result, and the room temperature deionized water and the high temperature deionized water of the corresponding flow rate are delivered to the liquid mixing module 200, so that the temperature of the uniformly mixed cleaning solution in the liquid mixing module 200 reaches the target temperature. Considering that the properties of the chemical liquid may change due to the influence of temperature, and in order to facilitate the precise control of the temperature of the cleaning solution, in this embodiment, the liquid supply temperature and flow rate of the chemical liquid storage unit 101c to the liquid mixing module 200 are controlled to remain unchanged, and the flow rates of the liquid supply from the room temperature deionized water storage unit 101a and the high temperature deionized water storage unit 101b to the liquid mixing module 200 are adjusted. In this embodiment, the chemical liquid storage unit 101c supplies chemical liquid, the room temperature deionized water storage unit 101a supplies room temperature deionized water, and the high temperature deionized water storage unit 101b supplies high temperature deionized water. The temperature of the exemplary high temperature deionized water can be 35 degrees Celsius, 50 degrees Celsius, 60 degrees Celsius, 65 degrees Celsius, or 70 degrees Celsius, and can also be set to other temperatures higher than room temperature. The specific setting can be made according to the process requirements.

[0163] According to the process requirements, the type of chemical liquid can be one or more. It should be understood that the type of chemical liquid here is understood in the same way as the above-mentioned components, and will not be repeated here. When the type of chemical liquid is greater than one, different chemical liquids need to be provided with different chemical liquid storage units, and each chemical liquid storage unit is respectively configured with a conveying unit. Therefore, the storage unit includes at least one chemical liquid storage unit. When the number of chemical liquid storage units is greater than 1, the types of chemical liquids stored in each chemical liquid storage unit are different, and the chemical liquids stored in different chemical liquid storage units are respectively transported to the mixing module via the conveying units connected thereto. Exemplarily, when the cleaning solution is SC1, its components are room temperature deionized water, high temperature deionized water, ammonia water and hydrogen peroxide. There are two types of chemical liquids in the SC1 cleaning solution, namely ammonia water and hydrogen peroxide. When the cleaning solution is SC2, its components are room temperature deionized water, high temperature deionized water, hydrochloric acid and hydrogen peroxide. The SC2 cleaning solution also contains two types of chemical liquids, hydrochloric acid and hydrogen peroxide. Figure 3 , Figure 3 The figure shows a real-time temperature control system of a solution when there are two kinds of chemical liquids in an embodiment of the present invention. Figure 3 As shown, the chemical liquid storage unit in the figure includes a chemical liquid storage unit 101c and a chemical liquid storage unit 101d, which are respectively used to supply ammonia water, hydrogen peroxide or hydrochloric acid, hydrogen peroxide.

[0164] The control module 400 calculates the required flow change ΔL of the room temperature deionized water in real time according to the temperature detection result of the temperature detection module 300. D1 and the required flow change of high temperature deionized water ΔL D2 include:

[0165] The required flow rate change ΔL of room temperature deionized water is calculated using the following equations: D1 and the required flow change of high temperature deionized water ΔL D2 :

[0166] ΔL D1 +ΔL D2 =0 Formula 1

[0167] Among them, ΔL D1 is the required flow change of room temperature deionized water; ΔL D2 is the required flow change of high temperature deionized water.

[0168]

[0169] Wherein, Formula 1 is obtained based on the condition that the total liquid supply flow rate remains unchanged and the liquid supply temperature and flow rate of the chemical liquid storage unit to the liquid mixing module remain unchanged, the sum of the flow rate change of the room temperature deionized water supplied by the room temperature deionized water storage unit to the liquid mixing module and the flow rate change of the high temperature deionized water supplied by the high temperature deionized water storage unit to the liquid mixing module is 0; Formula 2 is obtained based on the law of conservation of heat;

[0170] The liquid storage unit 101 includes n chemical liquid storage units, ΔQ i is the heat change of the chemical liquid in the i-th chemical liquid storage unit, n and i are both positive integers greater than or equal to 1, ΔQ D1 , ΔQ D2 are the heat changes of room temperature deionized water and high temperature deionized water respectively. The unit of heat change is joule, which is obtained according to the heat calculation formula Q=cmΔt and the mass density volume formula m=ρv=ρ*L*t, where:

[0171] c is specific heat capacity, unit: joule / kg℃;

[0172] m is mass, unit: kilogram;

[0173] Δt is the temperature increase (or decrease), unit: Celsius;

[0174] ρ is density, unit: kg / cubic decimeter;

[0175] L is the flow rate in liters per minute;

[0176] t is the unit time, unit: minute.

[0177] In this embodiment, n is equal to 2, and the information of each component of the cleaning solution supplied by the known liquid supply module is as follows (the flow rate of different components is calculated based on the required chemical liquid volume ratio and the total flow rate):

[0178] Chemical liquid 1: liquid supply temperature T1, density ρ1, specific heat capacity C1, flow rate L1;

[0179] Chemical liquid 2: liquid supply temperature T2, density ρ2, specific heat capacity C2, flow rate L2;

[0180] Room temperature deionized water: Temperature T D1 , density ρ D1 , specific heat capacity C D , flow rate is L D1 , assuming the required flow change is ΔL D1 ;

[0181] High temperature deionized water: temperature T D1 , density ρ D2 , specific heat capacity C D, flow rate is L D2 , assuming the required flow change is ΔL D2 ;

[0182] The target temperature after mixing is T;

[0183] Then, the mass of different components and their changes in unit time t are:

[0184] The mass of chemical solution 1: m1 = L1*t*ρ1;

[0185] The mass of chemical solution 2: m2 = L2*t*ρ2;

[0186] The mass of room temperature deionized water: m D1 =L D1 *t*ρ D1 ;

[0187] Mass of high temperature deionized water: m D2 =L D2 *t*ρ D2 ;

[0188] Mass change of room temperature deionized water: Δm D1 =ΔL D1 *t*ρ D1

[0189] Mass change of high temperature deionized water: Δm D2 =ΔL D2 *t*ρ D2

[0190] The mixed liquid is measured from the actual temperature T s In the process of changing to the target temperature T, the heat change is:

[0191] 1. Chemical solution 1: ΔQ1=c1*m1*(TT s );

[0192] 2. Chemical solution 2: ΔQ2 = c2*m2*(TT s );

[0193] 3. Room temperature deionized water: ΔQ D1 =c D *m D1 *(TT S )+c D *m D1 *(TT D1 );

[0194] 4. High temperature deionized water: ΔQ D2 =c D *m D2 *(TTS )+c D *m D2 *(TT D2 );

[0195] Ignoring the tiny dilution heat, according to the law of heat conservation, we can get the following equations 1 and 2:

[0196] ΔL D1 =c1*L1*ρ1*(TT S )+c2*L2*ρ2*(TT S )+c D *L D1 *ρ D1 *(TT S )+c D *L D2 *ρ D2 *(TT S ) / (c D *ρ D2 *(TT D2 )-c D *ρ D1 *(TT D1 ))

[0197] ΔL D2 =-(c1*L1*ρ1*(TT S )+c2*L2*ρ2*(TT S )+c D *L D1 *ρ D1 *(TT S )+c D *L D2 *ρ D2 *(TT S )) / (c D *ρ D2 *(TT D2 )-c D *ρ D1 *(TT D1 ))

[0198] It should be noted that the calculation in this embodiment is an approximate process, specifically including: ignoring the influence of the change in specific heat capacity of water at different temperatures; ignoring the influence of dilution heat and trace chemical reaction heat.

[0199] Different from the above calculation method, when the total flow rate of the liquid supply is variable, in order to ensure the cleaning effect of the cleaning solution, the volume ratio of each component of the cleaning solution is required to remain unchanged. At this time, the control module 400 is configured to: determine the target temperature of the cleaning solution. In an embodiment of the present invention, the control module 400 can select the process to be implemented based on the data in the pre-stored database to determine the target temperature of the cleaning solution, or it can choose the method in which the staff manually inputs the target temperature data, which is not limited in this embodiment; at the same time, the temperature detection result of the temperature detection module 300 for the evenly mixed cleaning solution is obtained in real time; when the temperature detection result continues to be different from the target temperature for a preset period of time, the liquid supply temperature and flow rate of the larger flow storage unit to the mixing module are fixed unchanged; according to the temperature detection result, the flow rate change of other liquid storage units to the mixing module is adjusted in real time to make the temperature of the evenly mixed cleaning solution in the mixing module reach the target temperature, wherein the larger flow storage unit is the liquid storage unit with the largest liquid supply flow rate to the mixing module in the liquid supply module. For example, please refer to Figure 2 In the embodiment of the present invention, the flow rate of high-temperature deionized water supplied by the high-temperature deionized water storage unit 101b to the mixing liquid module is greater than the flow rate of the room-temperature deionized water storage unit 101a and the chemical liquid storage unit 101c to the mixing liquid module, then the temperature and flow rate of the high-temperature deionized water storage unit 101b to the mixing liquid module are fixed, and the flow rates of the room-temperature deionized water storage unit 101a and the chemical liquid storage unit 101c to the mixing liquid module are adjusted to adjust the temperature of the mixed cleaning solution to the target temperature. It is worth noting that this method is suitable for the case where the temperature requirement is high in accuracy and the measured temperature of the mixed solution is not much different from the target temperature.

[0200] When the number of chemical liquid storage units is greater than 1, each chemical liquid storage unit stores different chemical liquid components. Figure 3 , when the liquid storage unit includes two chemical liquid storage units, the chemical liquid storage unit 101c stores chemical liquid 1 supplied to the mixing liquid module; the chemical liquid storage unit 101d stores chemical liquid 2 supplied to the mixing liquid module. The control module 400 fixes the liquid supply temperature and flow rate of the larger flow storage unit, i.e., the high-temperature deionized water storage unit 101b, to the mixing liquid module; the control module 400 adjusts the flow rate change of the other liquid storage units to the mixing liquid module in real time according to the temperature detection result. For example, in this example, the adjustment of the flow rate change of the room temperature deionized water storage unit 101a and the chemical liquid storage unit 101c and the chemical liquid storage unit 101d includes:

[0201] The following equations consisting of equations 3, 4, 5, 6 and 7 are used to calculate the flow change of chemical liquid 1 ΔL1, the flow change of chemical liquid 2 ΔL2 and the flow change of room temperature deionized water ΔLD1 :

[0202]

[0203]

[0204] ΔQ1+ΔQ D1 +ΔQ D2 =0 Formula 5

[0205] (L1+ΔL1) / (L D1 +L D2 +ΔL D1 )=r1 Formula 6 (L2+ΔL2) / (L D1 +L D2 +ΔL D2 )=r2 Formula 7

[0206] Wherein, Formula 3 and Formula 4 are the volume ratios of the two chemical liquids included in the chemical liquid storage unit; Formula 5 is obtained according to the law of conservation of heat; Formula 6 and Formula 7 are the volume ratios of the two chemical liquids included in the storage unit under the condition that the volume ratio of the chemical liquids remains unchanged after the flow rate changes;

[0207] Where r1 and r2 are the volume ratios of the two chemical solutions in the set cleaning solution, L1 and L2 are the flow rates of the two chemical solutions, in liters per minute; ΔL1 is the flow rate change of the chemical solution whose flow rate needs to be changed, in liters per minute; L D1 and L D2 ΔL is the flow rate of room temperature deionized water and high temperature deionized water, in liters per minute; D1 and ΔL D2 are the flow rate changes of room temperature deionized water and high temperature deionized water, respectively, in liters / minute; ΔQ1 is the heat change of the chemical liquid that needs to change the flow rate, in joules; ΔQ D1 ΔQ is the heat change of deionized water at room temperature, unit: Joule; D2 It is the heat change of high temperature deionized water, unit: Joule.

[0208] The information of each component of the cleaning solution supplied by the liquid supply module is the same as above, and is calculated by combining the equation group consisting of equations 3, 4, 5, 6 and 7:

[0209] Room temperature deionized water flow rate change ΔL D1 =[c1*L1*ρ1*(T-T1)+c2*L2*ρ2*(T-T2)-c1*L1*ρ1*(TT s )-c2*L2*ρ2*(TT s )-c D *LD1 *ρ D1 *(TT S )-c D *L D2 *ρ D2 *(TT S )-(L D1 +L D2 )*c1*L1*ρ1*(T-T1) / (L D1 +L D2 )-(L D1 +L D2 )*c2*L2*ρ2*(T-T2) / (L D1 +L D2 )] / [c1*L1*ρ1*(T-T1) / (L D1 +L D2 )+c2*L2*ρ2*(T-T2) / (L D1 +L D2 )+C D *ρ D1 *(TT D1 )]

[0210] Chemical liquid flow rate change AL1 = (L D1 +L D2 +ΔL D1 )*L1 / (L D1 +L D2 )-L1)*L1; Substitute the ΔL obtained in the above formula D1 That is, ΔL1 is obtained;

[0211] Chemical liquid II flow rate change ΔL2 = (L D1 +L D2 +ΔL D1 )*L2 / (L D1 +L D2 )-L2)*L1; Substitute the ΔL obtained in the above formula D1 That’s ΔL2.

[0212] In another embodiment, please refer to Figure 4 , Figure 4 FIG. 2 is a schematic diagram showing the structure of a real-time temperature control system for a solution according to another embodiment of the present invention. Figure 4As shown, a first temperature detection unit 301 is provided on the delivery unit 102 of the liquid supply module 100 to detect the liquid supply temperature of each component of the cleaning solution and generate a first temperature detection result. The control module 400 is configured to determine the target temperature of the cleaning solution after uniform mixing; according to the first temperature detection result, the flow rate of the cleaning solution of different temperatures delivered by the liquid supply module 100 to the liquid mixing module 200 is adjusted so that the temperature of the uniformly mixed cleaning solution in the liquid mixing module 200 reaches the target temperature.

[0213] Specifically, the control module 400 first determines the target temperature of the cleaning solution after uniform mixing. In an embodiment of the present invention, the control module 400 can select the process to be implemented based on the data pre-stored in the database to determine the target temperature of the cleaning solution, or can choose the method of manually inputting the target temperature data by the staff, which is not limited in this embodiment; the control module 400 simultaneously obtains the temperature of each component of the cleaning solution before mixing detected by the first temperature detection unit 301 in real time. Then, based on the first temperature detection result of the first temperature detection unit 301, the calculation is performed, the total flow rate of the liquid supply is fixed unchanged, the liquid supply temperature and flow rate of the chemical liquid storage unit to the mixing module are fixed unchanged, and the flow rate required for room temperature deionized water and the flow rate required for high temperature deionized water are calculated in real time according to the first temperature detection result, and the room temperature deionized water and high temperature deionized water of the corresponding flow rate are delivered to the mixing module 200, so that the temperature of the uniformly mixed cleaning solution in the mixing module 200 reaches the target temperature.

[0214] For example, please refer to Figure 5 When the liquid storage unit 101 includes: a room temperature deionized water storage unit 101a, a high temperature deionized water storage unit 101b, and a chemical liquid storage unit 101c, the control module 400 calculates the required flow rates of room temperature deionized water and high temperature deionized water in real time according to the first temperature detection result, including:

[0215] Based on the fact that the total flow rate of liquid supply remains unchanged, and the temperature and flow rate of liquid supply from the chemical liquid storage unit to the liquid mixing module remain unchanged, the total amount of liquid supply of room temperature deionized water and high temperature deionized water is L D : Then the equation group consisting of the following formula 8 and the above formula 2 is used to calculate the flow rate L required for room temperature deionized water D1 and the required flow rate L of high temperature deionized water D2 :

[0216] L D =L D1 +L D2 Formula 8

[0217] The information of each component of the cleaning solution supplied by the liquid supply module 200 is the same as described above, then,

[0218] Flow rate required for room temperature deionized water L D1 =(c D *L D *ρ D2 *(T D2 -T)-c1*L1*ρ1*(T-T1)-c2*L2*ρ2*(T-T2)) / (c D *ρ D2 *(T D2 -T)+c D *ρ D1 *(TT D1 ))

[0219] Flow rate required for high temperature deionized water L D2 =(c1*L1*ρ1*(T-T1)+c2*L2*ρ2*(T-T2)+c D *L D *ρ D1 *(TT D1 )) / (c D *ρ D2 *(T D2 -T)+c D *ρ D1 *(TT D1 ))

[0220] The control system of the present application also includes: a second temperature detection unit 302 disposed on the liquid mixing module 200 is configured to detect the temperature of the cleaning solution after the liquid mixing module 200 is evenly mixed, and generate a second temperature detection result; when the second temperature detection result is different from the target temperature for a preset period of time, the liquid supply temperature and flow rate of the fixed chemical liquid storage unit 101c to the liquid mixing module remain unchanged, and the required flow rate change of room temperature deionized water and the required flow rate change of high temperature deionized water are calculated in real time according to the second temperature detection result, and the room temperature deionized water and high temperature deionized water of the corresponding flow rate are delivered to the liquid mixing module 200, so that the temperature of the evenly mixed cleaning solution in the liquid mixing module 200 reaches the target temperature. The specific calculation process is: Combine formula 1 and formula 2 to calculate the required flow rate change ΔL of room temperature deionized water D1 and the required flow change of high temperature deionized water ΔL D2 On the basis of setting the second temperature detection unit 302 on the liquid mixing module 200, the first temperature detection unit 301 is also set on the conveying unit 102 to detect the temperature of the input solution and the temperature of the mixed solution at the same time. The combined monitoring of the two temperatures can further ensure the accuracy of the solution flow control.

[0221] The present invention also provides a control method that matches the above-mentioned solution temperature real-time control system. Figure 6 , Figure 6FIG. 2 is a flow chart showing a method for real-time temperature control of a solution according to an embodiment of the present invention. Figure 6 As shown, the method comprises the following steps:

[0222] Step S200, using the liquid supply module to supply cleaning solutions of different temperatures to the liquid mixing module;

[0223] Step S300, cleaning solutions of different temperatures are mixed evenly in the liquid mixing module, and the temperature of the mixed cleaning solution is detected in real time by the temperature detection module and fed back to the control module;

[0224] Step S400, the control module adjusts the flow rate of the cleaning solution of different temperatures delivered by the liquid supply module to the liquid mixing module according to the temperature of the evenly mixed cleaning solution measured by the temperature detection module, so that the temperature of the evenly mixed cleaning solution in the liquid mixing module reaches the target temperature.

[0225] Furthermore, the cleaning solution includes at least two of: chemical solution, room temperature deionized water, and high temperature deionized water.

[0226] Furthermore, when the cleaning solution includes a chemical solution, the component of the chemical solution is greater than or equal to one.

[0227] Furthermore, before supplying cleaning solutions of different temperatures to the liquid mixing module using the liquid supply module, the method further comprises:

[0228] Step S100: presetting the relationship data of different processes corresponding to different temperatures, and the volume ratio data of each component of the cleaning solution corresponding to different temperatures in the control module.

[0229] In the specific process, the control module first determines the target temperature of the cleaning solution according to the process, and then controls the cleaning solutions of different temperatures to be transported to the mixing module for uniform mixing according to the volume ratio data of each component of the cleaning solution corresponding to the target temperature;

[0230] The temperature detection module obtains the actual temperature of the evenly mixed cleaning solution in real time. When it is detected that the actual temperature is different from the target temperature for a preset period of time, the liquid supply temperature and flow rate of the fixed chemical liquid storage unit to the mixing module remain unchanged. The required flow rate change of room temperature deionized water and the required flow rate change of high temperature deionized water are calculated in real time according to the temperature detection result, and the room temperature deionized water and high temperature deionized water of corresponding flow rates are delivered to the mixing module, so that the temperature of the evenly mixed cleaning solution in the mixing module reaches the target temperature.

[0231] Furthermore, the step of calculating the required flow rate change of room temperature deionized water and the required flow rate change of high temperature deionized water in real time according to the temperature detection result includes:

[0232] The required flow rate change ΔL of room temperature deionized water is calculated using the equations composed of equations 1 and 2. D1 and the required flow change of high temperature deionized water ΔL D2 .

[0233] In another embodiment, the method further comprises:

[0234] The control module determines the target temperature of the cleaning solution according to the process, and obtains the temperature detection result of the temperature detection module in real time; when the temperature detection result is different from the target temperature for a preset period of time, the liquid supply temperature and flow rate of the larger flow storage unit to the mixing liquid module are fixed unchanged; according to the temperature detection result, the flow rate change of other liquid storage units to the mixing liquid module is adjusted in real time to make the temperature of the uniformly mixed cleaning solution in the mixing liquid module reach the target temperature, wherein the larger flow storage unit is the liquid storage unit in the liquid supply module that supplies the largest liquid flow rate to the mixing liquid module.

[0235] Furthermore, when the number of chemical liquid storage units is 2, the control module is further configured to control the liquid supply temperature and flow rate of the larger flow storage unit to the liquid mixing module to remain unchanged; the control module adjusts the flow rate change of other liquid storage units to the liquid mixing module in real time according to the temperature detection result, including:

[0236] The equation group consisting of formula 3, formula 4, formula 5, formula 6 and formula 7 is used to calculate the flow change of chemical liquid 1 ΔL1, the flow change of chemical liquid 2 ΔL2 and the flow change of room temperature deionized water ΔL D1 .

[0237] The present invention also provides another control method that matches the above solution temperature real-time control system. Figure 7 , Figure 7 FIG. 2 is a flow chart showing a method for real-time temperature control of a solution according to another embodiment of the present invention. Figure 7 As shown, the method comprises the following steps:

[0238] Step S1100: The control module obtains the target temperature of the cleaning solution. The control module can select the process to be implemented based on the data in the pre-stored database to determine the target temperature of the cleaning solution, or the staff can manually input the target temperature data, which is not limited in this embodiment.

[0239] Step S1200: using the liquid supply module to supply cleaning solutions of different temperatures to the liquid mixing module;

[0240] Step S1300: cleaning solutions of different temperatures are mixed evenly in the liquid mixing module, and the first temperature detection unit provided on the delivery unit connecting the liquid supply module and the liquid mixing module is used to detect the liquid supply temperature of each component of the cleaning solution in real time, generate a first temperature detection result, and feed the first temperature detection result back to the control module;

[0241] Step S1400: the control module adjusts the flow rate of the cleaning solutions of different temperatures delivered by the liquid supply module to the liquid mixing module according to the first temperature detection result, so that the temperature of the uniformly mixed cleaning solution in the liquid mixing module reaches the target temperature.

[0242] Furthermore, the cleaning solution includes at least two of: chemical solution, room temperature deionized water, and high temperature deionized water.

[0243] Furthermore, when the cleaning solution includes a chemical solution, the component of the chemical solution is greater than or equal to one.

[0244] Furthermore, according to the first temperature detection result, adjusting the flow rate of the cleaning solution with different temperatures delivered by the liquid supply module to the liquid mixing module includes:

[0245] The total liquid supply flow rate is fixed unchanged, the liquid supply temperature and flow rate of the chemical liquid storage unit to the mixing liquid module are fixed unchanged, the required flow rate of room temperature deionized water and the required flow rate of high temperature deionized water are calculated in real time according to the first temperature detection result, and the room temperature deionized water and high temperature deionized water of corresponding flow rates are delivered to the mixing liquid module, so that the temperature of the evenly mixed cleaning solution in the mixing liquid module reaches the target temperature.

[0246] Furthermore, the flow rate required for room temperature deionized water and the flow rate required for high temperature deionized water are calculated in real time according to the first temperature detection result, including:

[0247] The flow rate L required for room temperature deionized water is calculated using the equation group consisting of equation 8 and equation 2. D1 and the required flow rate L of high temperature deionized water D2 .

[0248] Furthermore, a second temperature detection unit disposed on the liquid mixing module is used to detect the temperature of the cleaning solution after the liquid mixing module has been evenly mixed, and a second temperature detection result is generated;

[0249] The control module obtains the second temperature detection result of the second temperature detection unit in real time;

[0250] When the second temperature detection result is different from the target temperature for a preset period of time, the liquid supply temperature and flow rate of the chemical liquid storage unit to the mixing liquid module are controlled to remain unchanged, and the required flow rate change of room temperature deionized water and the required flow rate change of high temperature deionized water are calculated in real time according to the second temperature detection result, and the room temperature deionized water and high temperature deionized water of the corresponding flow rate are delivered to the mixing liquid module, so that the temperature of the mixed cleaning solution in the mixing liquid module reaches the target temperature. The specific calculation process is: Use formula 1 combined with formula 2 to calculate the required flow rate change ΔL of room temperature deionized water D1 and the required flow change of high temperature deionized water ΔL D2 .

[0251] The present invention is a temperature control method for online liquid mixing, and is applicable to chemical liquids that can be mixed online. The temperature control range of the chemical liquid is between the temperatures of high-temperature deionized water and room-temperature deionized water. At the same time, it should be understood that the real-time solution temperature control method provided by the present invention is not only applicable to semiconductor cleaning processes, but also to other wet processes in the field of semiconductor processing technology. In fact, as long as solutions of different temperatures need to be mixed to a target temperature, and the target temperature is between the temperature ranges of the various components of the solution, the control system and control method of the present invention are applicable. Exemplarily, finished acid can also be applied in this way to achieve the effect of automatic temperature control. For example, a finished acid needs to control the temperature of the liquid between room temperature and temperature T A The finished acid can be divided into two parts for liquid supply, one part of the liquid is controlled at room temperature, and the other part of the liquid is controlled at T A Temperature, the temperature of the mixed solution can be flexibly controlled between room temperature and T by controlling the flow rate of the two parts of the solution. A between.

[0252] It should be understood that in the present invention, when calculating the flow rate of each component of the cleaning solution, the calculation adopts an approximate process: the influence of the change of the specific heat capacity of water at different temperatures and the influence of the dilution heat and the trace chemical reaction heat are ignored. If the demand is high, these influences can be considered.

[0253] Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent substitutions for some of the technical features therein; and these modifications or substitutions do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A real-time temperature control system for a solution, characterized in that: include: A liquid supply module, configured to supply solutions of different temperatures to the liquid mixing module; A liquid mixing module is configured to receive the solutions of different temperatures supplied by the liquid supply module and mix them evenly; A temperature detection module is configured to detect the temperature of the solution after being evenly mixed by the liquid mixing module; The control module is configured to adjust the flow rate of solutions of different temperatures delivered by the liquid supply module to the liquid mixing module according to the temperature of the mixed solution measured by the temperature detection module, so that the temperature of the mixed solution in the liquid mixing module reaches the target temperature.

2. The control system according to claim 1, characterized in that: The liquid supply module comprises: a liquid storage unit and a conveying unit; the liquid storage unit is connected with the liquid mixing module through the conveying unit; The liquid storage unit comprises: A room temperature deionized water storage unit is configured to store room temperature deionized water supplied to the liquid mixing module; A high-temperature deionized water storage unit is configured to store high-temperature deionized water supplied to the liquid mixing module; The chemical liquid storage unit is configured to store the chemical liquid supplied to the liquid mixing module.

3. The control system according to claim 2, characterized in that: The liquid storage unit includes at least one chemical liquid storage unit. When the number of the chemical liquid storage units is greater than 1, the types of chemical liquids stored in each of the chemical liquid storage units are different.

4. The control system according to claim 3, characterized in that: The control module is pre-installed with relational data of different processes corresponding to different temperatures, and a database of volume ratios of various components of the corresponding solutions at different temperatures; The control module is further configured to: Determine the target temperature of the mixed solution; Controlling the flow rate of solutions of different temperatures delivered by the liquid supply module to the liquid mixing module according to the volume ratio data of each component of the solution corresponding to the target temperature; Obtain the temperature detection results of the temperature detection module in real time; When the temperature detection result is different from the target temperature for a preset period of time, the supply temperature and flow rate of the chemical liquid storage unit to the mixing liquid module are controlled to remain unchanged, and the required flow rate changes of room temperature deionized water and high temperature deionized water are calculated in real time according to the temperature detection result, and the room temperature deionized water and high temperature deionized water of corresponding flow rates are transported to the mixing liquid module to make the temperature of the evenly mixed solution in the mixing liquid module reach the target temperature.

5. The control system according to claim 4, characterized in that: The control module calculates the required flow rate change of room temperature deionized water and the required flow rate change of high temperature deionized water in real time according to the temperature detection result, including: The required flow rate change ΔL of room temperature deionized water is calculated using the following equations: D1 and the required flow change of high temperature deionized water ΔL D2 : ΔL D1 +ΔL D2 =0 Equation 1 Wherein, Formula 1 is obtained based on the condition that the total liquid supply flow rate remains unchanged and the liquid supply temperature and flow rate of the chemical liquid storage unit to the liquid mixing module remain unchanged, the sum of the flow rate change of the room temperature deionized water storage unit supplying the room temperature deionized water to the liquid mixing module and the flow rate change of the high temperature deionized water storage unit supplying the high temperature deionized water to the liquid mixing module is 0; Formula 2 is obtained based on the law of conservation of heat; Wherein, the liquid storage unit includes n chemical liquid storage units, ΔQ i is the heat change of the chemical liquid in the i-th chemical liquid storage unit, n and i are both positive integers greater than or equal to 1, ΔQ D1 , ΔQ D2 are the heat changes of room temperature deionized water and high temperature deionized water respectively. The unit of heat change is joule, which is obtained according to the heat calculation formula Q=cmΔt and the mass density volume formula m=ρv=ρ*L*t, where: c is the specific heat capacity, in joules / kg °C; m is mass in kilograms; Δt is the temperature increase or decrease in degrees Celsius; ρ is the density in kg / dm3; L is the flow rate in liters per minute; t is the unit time in minutes.

6. The control system according to claim 3, characterized in that: The control module is configured to: Determine the target temperature of the solution after mixing; Obtain the temperature detection results of the temperature detection module in real time; When the temperature detection result is different from the target temperature for a preset period of time, the liquid supply temperature and flow rate of the large flow storage unit to the liquid mixing module remain unchanged; According to the temperature detection result, the flow rate change of other liquid storage units supplying liquid to the mixing liquid module is adjusted in real time to make the temperature of the evenly mixed solution in the mixing liquid module reach the target temperature, among which the larger flow liquid storage unit is the liquid storage unit in the liquid supply module with the largest liquid flow rate supplying liquid to the mixing liquid module.

7. The control system according to claim 6, characterized in that: When the chemical liquid storage unit includes two liquid supply pipelines, the control module is further configured to control the liquid supply temperature and flow rate of the larger flow storage unit to the liquid mixing module to remain constant; The control module adjusts the flow rate change of other liquid storage units supplying liquid to the liquid mixing module in real time according to the temperature detection result, including: The following equations consisting of equations 3, 4, 5, 6 and 7 are used to calculate the flow change of chemical liquid 1 ΔL1, the flow change of chemical liquid 2 ΔL2 and the flow change of room temperature deionized water supplied to the mixing module ΔL D1 : ΔQ1+ΔQ D1 +ΔQ D2 =0 Formula 5 (L1+ΔL1) / (L D1 +L D2 +ΔL D1 )=r1 Formula 6 (L2+ΔL2) / (L D1 +L D2 +ΔL D2 )=r2 Formula 7 Wherein, Formula 3 and Formula 4 are the volume ratios of the two chemical liquids included in the chemical liquid storage unit; Formula 5 is obtained according to the law of conservation of heat; Formula 6 and Formula 7 are the volume ratios of the two chemical liquids included in the storage unit under the condition that the volume ratio of the chemical liquids remains unchanged after the flow rate changes; Where r1 and r2 are the volume ratios of the two chemical solutions in the set solution, L1 and L2 are the flow rates of the two chemical solutions, in liters per minute; ΔL1 is the flow rate change of the chemical solution whose flow rate needs to be changed, in liters per minute; L D1 and L D2 ΔL is the flow rate of room temperature deionized water and high temperature deionized water, in liters per minute; D1 and ΔL D2 are the flow rate changes of room temperature deionized water and high temperature deionized water, respectively, in liters / minute; ΔQ1 is the heat change of the chemical liquid that needs to change the flow rate, in joules; ΔQ D1 ΔQ is the heat change of deionized water at room temperature, in joules; D2 It is the heat change of high temperature deionized water, in joules.

8. A real-time temperature control system for a solution, characterized in that: include: A liquid supply module, configured to supply solutions of different temperatures to the liquid mixing module; A liquid mixing module is configured to receive the solutions of different temperatures supplied by the liquid supply module and mix them evenly; The temperature detection module includes a first temperature detection unit configured to detect the temperature of each component of the solution before the solution is evenly mixed and generate a first temperature detection result; A control module configured to determine a target temperature of the mixed solution; According to the first temperature detection result, the flow rate of the solutions with different temperatures delivered by the liquid supply module to the liquid mixing module is adjusted so that the temperature of the evenly mixed solution in the liquid mixing module reaches the target temperature.

9. The control system according to claim 8, characterized in that: The liquid storage unit comprises: A room temperature deionized water storage unit is configured to store room temperature deionized water supplied to the liquid mixing module; A high-temperature deionized water storage unit is configured to store high-temperature deionized water supplied to the liquid mixing module; The chemical liquid storage unit is configured to store the chemical liquid supplied to the liquid mixing module.

10. The control system according to claim 9, characterized in that: The liquid storage unit includes at least one chemical liquid storage unit. When the number of the chemical liquid storage units is greater than 1, the chemical liquids stored in each of the chemical liquid storage units are different.

11. The control system according to claim 10, characterized in that: The control module adjusts the flow rate of the solution with different temperatures delivered by the liquid supply module to the liquid mixing module according to the first temperature detection result, including: The total liquid supply flow rate is fixed unchanged, the liquid supply temperature and flow rate of the chemical liquid storage unit to the mixing liquid module are fixed unchanged, the required flow rate of room temperature deionized water and the required flow rate of high temperature deionized water are calculated in real time according to the first temperature detection result, and the room temperature deionized water and high temperature deionized water of corresponding flow rates are delivered to the mixing liquid module, so that the temperature of the evenly mixed solution in the mixing liquid module reaches the target temperature.

12. The control system according to claim 11, characterized in that: The control module calculates the flow rate required for room temperature deionized water and the flow rate required for high temperature deionized water in real time according to the first temperature detection result, including: The required flow rate L of room temperature deionized water is calculated using the following equations consisting of equations 8 and 2: D1 and the required flow rate L of high temperature deionized water D2 : L D =L D1 +L D2 Formula 8 Wherein, the total amount of room temperature deionized water and high temperature deionized water supplied to the mixing module is L under the condition that the total flow rate of the liquid supply remains unchanged, and the temperature and flow rate of the liquid supply from the chemical liquid storage unit to the mixing module remain unchanged. D The formula 2 is obtained according to the law of conservation of heat; Among them, L D1 Flow rate required for room temperature deionized water; L D2 The flow rate required for high-temperature deionized water; the liquid storage unit includes n chemical liquid storage units, ΔQ i is the heat change of the chemical liquid in the i-th chemical liquid storage unit, n and i are both positive integers greater than or equal to 1, ΔQ D1 , ΔQ D2 are the heat changes of room temperature deionized water and high temperature deionized water respectively. The unit of heat change is joule, which is obtained according to the heat calculation formula Q=cmΔt and the mass density volume formula m=ρv=ρ*L*t, where: c is the specific heat capacity, in joules / kg °C; m is mass in kilograms; Δt is the temperature increase or decrease in degrees Celsius; ρ is the density in kg / dm3; L is the flow rate in liters per minute; t is the unit time in minutes.

13. The control system according to claim 10, characterized in that: The temperature detection module further includes a second temperature detection unit configured to detect the temperature of the solution after the solution is evenly mixed by the liquid mixing module, and generate a second temperature detection result; The control module is further configured to: Acquire a second temperature detection result of a second temperature detection unit in real time; When the second temperature detection result is different from the target temperature for a preset period of time, the supply temperature and flow rate of the chemical liquid storage unit to the mixing liquid module are controlled to remain unchanged, and the required flow rate changes of room temperature deionized water and high temperature deionized water are calculated in real time according to the second temperature detection result, and the room temperature deionized water and high temperature deionized water of corresponding flow rates are delivered to the mixing liquid module, so that the temperature of the evenly mixed solution in the mixing liquid module reaches the target temperature.

14. A method for real-time temperature control of a solution, characterized in that: The steps include: Using the liquid supply module to supply solutions of different temperatures to the liquid mixing module; Solutions of different temperatures are mixed evenly in the liquid mixing module, and the temperature of the mixed solution is detected in real time by the temperature detection module and fed back to the control module; The control module adjusts the flow rate of solutions of different temperatures delivered by the liquid supply module to the liquid mixing module according to the temperature of the evenly mixed solution measured by the temperature detection module, so that the temperature of the evenly mixed solution in the liquid mixing module reaches the target temperature.

15. The control method according to claim 14, characterized in that: The solution includes at least two of: chemical solution, room temperature deionized water, and high temperature deionized water.

16. The control method according to claim 15, characterized in that: When the solution includes a chemical liquid, the component of the chemical liquid is greater than or equal to one.

17. The control method according to claim 16, characterized in that: Also includes: Preset the relationship data of different processes corresponding to different temperatures, and the volume ratio data of each component of the solution corresponding to different temperatures in the control module; The control module determines the target temperature of the mixed solution according to the process, and controls the mixing of solutions at different temperatures according to the volume ratio data of the components of the solution corresponding to the target temperature; The temperature detection module obtains the actual temperature of the mixed solution in real time. When it is detected that the actual temperature is different from the target temperature for a preset period of time, the liquid supply temperature and flow rate of the fixed chemical liquid storage unit to the mixing module remain unchanged. The required flow rate change of room temperature deionized water and the required flow rate change of high temperature deionized water are calculated in real time according to the actual temperature detection result, and the room temperature deionized water and high temperature deionized water of corresponding flow rates are transported to the mixing module, so that the temperature of the mixed solution in the mixing module reaches the target temperature.

18. The control method according to claim 17, characterized in that: The step of calculating the required flow rate change of room temperature deionized water and the required flow rate change of high temperature deionized water in real time according to the actual temperature detection result comprises: The required flow rate change ΔL of room temperature deionized water is calculated using the following equations: D1 and the required flow change of high temperature deionized water ΔL D2 : ΔL D1 +ΔL D2 = 0 Equation 1 Wherein, Formula 1 is obtained based on the condition that the total liquid supply flow rate remains unchanged and the liquid supply temperature and flow rate of the chemical liquid storage unit to the liquid mixing module remain unchanged, the sum of the flow rate change of the room temperature deionized water supplied by the room temperature deionized water storage unit to the liquid mixing module and the flow rate change of the high temperature deionized water supplied by the high temperature deionized water storage unit to the liquid mixing module is 0; Formula 2 is obtained based on the law of conservation of heat; Wherein, the liquid storage unit includes n chemical liquid storage units, ΔQ i is the heat change of the chemical liquid in the i-th chemical liquid storage unit, n and i are both positive integers greater than or equal to 1, ΔQ D1 , ΔQ D2 are the heat changes of room temperature deionized water and high temperature deionized water respectively. The unit of heat change is joule, which is obtained according to the heat calculation formula Q=cmΔt and the mass density volume formula m=ρv=ρ*L*t, where: c is the specific heat capacity, in joules / kg °C; m is mass in kilograms; Δt is the temperature increase or decrease in degrees Celsius; ρ is the density in kg / dm3; L is the flow rate in liters per minute; t is the unit time in minutes.

19. The control method according to claim 16, characterized in that: The method further comprises: The control module determines the target temperature of the solution according to the process, and obtains the temperature detection result of the temperature detection module in real time; when the temperature detection result is different from the target temperature for a preset period of time, the liquid supply temperature and flow rate of the larger flow storage unit to the mixing liquid module are fixed unchanged; according to the temperature detection result, the flow rate change of other liquid storage units to the mixing liquid module is adjusted in real time to make the temperature of the uniformly mixed solution in the mixing liquid module reach the target temperature, wherein the larger flow storage unit is the liquid storage unit in the liquid supply module that supplies the largest liquid flow rate to the mixing liquid module.

20. The control method according to claim 19, characterized in that: When the number of the chemical liquid storage units is 2, the control module is further configured to control the liquid supply temperature and flow rate of the larger flow storage unit to the liquid mixing module to remain unchanged; The step of the control module adjusting the flow rate change of other liquid storage units supplying liquid to the liquid mixing module in real time according to the temperature detection result includes: The following equations consisting of equations 3, 4, 5, 6 and 7 are used to calculate the flow change of chemical liquid 1 ΔL1, the flow change of chemical liquid 2 ΔL2 and the flow change of room temperature deionized water ΔL D1 : ΔQ1+ΔQ D1 +△Q D2 =0 Formula 5 (L1+ΔL1) / (L D1 +L D2 +△L D1 )=r1 Formula 6 (L2+△L2) / (L D1 +L D2 +ΔL D2 )=r2 Formula 7 Wherein, Formula 3 and Formula 4 are the volume ratios of the two chemical liquids supplied by the two liquid supply pipelines included in the chemical liquid storage unit; Formula 5 is obtained according to the law of conservation of heat; Formula 6 and Formula 7 are the volume ratios of the two chemical liquids supplied by the two liquid supply pipelines included in the chemical liquid storage unit under the condition that the volume ratio of the chemical liquids remains unchanged after the flow rate changes; Where r1 and r2 are the volume ratios of the two chemical solutions in the set solution, L1 and L2 are the flow rates of the two chemical solutions, in liters per minute; ΔL1 is the flow rate change of the chemical solution whose flow rate needs to be changed, in liters per minute; L D1 and L D2 ΔL is the flow rate of room temperature deionized water and high temperature deionized water, in liters per minute; D1 and ΔL D2 are the flow rate changes of room temperature deionized water and high temperature deionized water, respectively, in liters / minute; ΔQ1 is the heat change of the chemical liquid that needs to change the flow rate, in joules; ΔQ D1 ΔQ is the heat change of deionized water at room temperature, unit: Joule; D2 It is the heat change of high temperature deionized water, unit: Joule.

21. A method for real-time temperature control of a solution, characterized in that: The steps include: The control module obtains the target temperature of the mixed solution; Using the liquid supply module to supply solutions of different temperatures to the liquid mixing module; Solutions of different temperatures are mixed evenly in the liquid mixing module, and the first temperature detection unit of the temperature detection module is used to detect the liquid supply temperature of each component of the solution in the liquid mixing module in real time, generate a first temperature detection result, and feed the first temperature detection result back to the control module; The control module adjusts the flow rate of the solutions with different temperatures delivered by the liquid supply module to the liquid mixing module according to the first temperature detection result, so that the temperature of the evenly mixed solution in the liquid mixing module reaches the target temperature.

22. The control method according to claim 21, characterized in that: The solution includes at least two of: chemical liquid, room temperature deionized water, and high temperature deionized water.

23. The control method according to claim 22, characterized in that: When the solution includes a chemical liquid, the component of the chemical liquid is greater than or equal to one.

24. The control method according to claim 21, characterized in that: According to the first temperature detection result, adjusting the flow rate of the solution with different temperatures delivered by the liquid supply module to the liquid mixing module comprises: The total liquid supply flow rate is fixed unchanged, the liquid supply temperature and flow rate of the chemical liquid storage unit to the mixing liquid module are fixed unchanged, the required flow rate of room temperature deionized water and the required flow rate of high temperature deionized water are calculated in real time according to the first temperature detection result, and the room temperature deionized water and high temperature deionized water of corresponding flow rates are delivered to the mixing liquid module, so that the temperature of the evenly mixed solution in the mixing liquid module reaches the target temperature.

25. The control method according to claim 24, characterized in that: The flow rate required for room temperature deionized water and the flow rate required for high temperature deionized water are calculated in real time according to the first temperature detection result, including: The required flow rate L of room temperature deionized water is calculated using the following equations consisting of equations 8 and 2: D1 and the required flow rate L of high temperature deionized water D2 : L D =L D1 +L D2 Formula 8 Wherein, Formula 8 is obtained based on the condition that the total flow rate of liquid supply remains unchanged, the temperature and flow rate of liquid supply from the chemical liquid storage unit to the liquid mixing module remain unchanged, and the total amount of liquid supply from the room temperature deionized water storage unit to the liquid mixing module and the total amount of liquid supply from the high temperature deionized water storage unit to the liquid mixing module is L_D; Formula 2 is obtained based on the law of conservation of heat; Among them, L D1 Flow rate required for room temperature deionized water; L D2 The flow rate required for high-temperature deionized water; the liquid storage unit includes n chemical liquid storage units, ΔQ i is the heat change of the chemical liquid in the i-th chemical liquid storage unit, n and i are both positive integers greater than or equal to 1, ΔQ D1 , ΔQ D2 are the heat changes of room temperature deionized water and high temperature deionized water respectively. The unit of heat change is joule, which is obtained according to the heat calculation formula Q=cmΔt and the mass density volume formula m=ρv=ρ*L*t, where: c is the specific heat capacity, in joules / kg °C; m is mass in kilograms; Δt is the temperature increase or decrease in degrees Celsius; ρ is the density in kg / dm3; L is the flow rate in liters per minute; t is the unit time in minutes.

26. The control method according to claim 23, characterized in that: Also includes: Using the second temperature detection unit of the temperature detection module to detect the temperature of the solution after being mixed evenly by the liquid mixing module, to generate a second temperature detection result; The control module obtains the temperature detection result of the second temperature detection unit in real time; When the second temperature detection result is different from the target temperature for a preset period of time, the supply temperature and flow rate of the chemical liquid storage unit to the mixing liquid module are controlled to remain unchanged, and the required flow rate changes of room temperature deionized water and high temperature deionized water are calculated in real time according to the second temperature detection result, and the room temperature deionized water and high temperature deionized water of corresponding flow rates are delivered to the mixing liquid module, so that the temperature of the evenly mixed solution in the mixing liquid module reaches the target temperature.

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